MEMS controller and MEMS device

Abstract

Provided in the embodiments of the present invention are a MEMS controller and a MEMS device. The MEMS controller comprises at least one control unit. The control unit comprises: anchoring structures, wherein a first gap is provided between adjacent anchoring structures; cantilever beam structures, which correspond to the anchoring structures, wherein a first end of each cantilever beam structure is located on the top surface of the corresponding anchoring structure, and second ends of two adjacent cantilever beam structures of the same control unit directly face each other and have a second gap therebetween; and a packaging structure, comprising a bottom plate, side plates and a top plate, which are connected in sequence, wherein the bottom plate directly faces the top plate, the bottom plate is located on the bottom surfaces of the anchoring structures, a first flow channel port penetrating the bottom plate is provided in the bottom plate, the first flow channel port is in communication with the first gap of the corresponding control unit, the top plate is spaced apart from the top surfaces of the cantilever beam structures, and a second flow channel port penetrating the top plate is provided in the top plate. Unidirectional fluid flow can be controlled.

Description

MEMS controllers and MEMS devices Technical Field

[0001] The present invention relates to the field of control devices, and particularly to a MEMS controller and a MEMS device. Background Technology

[0002] MEMS (Micro-Electro-Mechanical System), also known as micro-electromechanical system or microsystem, refers to high-tech devices with dimensions of a few millimeters or even smaller, whose internal structures are generally at the micrometer or even nanometer scale. MEMS is an independent intelligent system, developed based on microelectronics technology (semiconductor manufacturing technology), integrating technologies such as photolithography, etching, thin film, LIGA, silicon micromachining, non-silicon micromachining, and precision machining.

[0003] MEMS technology is widely used in various fields, including but not limited to: consumer electronics products, such as miniature speakers and MEMS microphones. These products are widely used in devices such as laptops and smartphones due to their advantages of small size, low power consumption and mass production.

[0004] There is a need to provide a MEMS controller for controlling unidirectional fluid movement. Summary of the Invention

[0005] This invention provides a MEMS controller and a MEMS device that can at least control the unidirectional movement of fluid.

[0006] According to some embodiments of the present invention, one aspect of the present invention provides a MEMS controller, comprising: at least one control unit, the control unit comprising: two anchoring structures having a first gap between adjacent anchoring structures, the anchoring structures having opposing bottom surfaces and top surfaces; and a cantilever beam structure corresponding to the anchoring structures, the cantilever beam structure having opposing first ends and second ends, wherein the first end of each cantilever beam structure is located on the top surface of the corresponding anchoring structure, and the second ends of two adjacent cantilever beam structures of the same control unit are facing each other and have a second gap; The encapsulation structure includes a base plate, a side plate, and a top plate connected in sequence. The base plate and the top plate face each other, and the side plate connects the base plate and the top plate. The base plate is located on the bottom surface of the anchoring structure and has a first flow channel through it, which corresponds to the control unit and is connected to the first gap of the corresponding control unit. The top plate is spaced apart from the top surface of the cantilever beam structure and has a second flow channel through it, which corresponds to the control unit.

[0007] In some embodiments, the cantilever beam structures within the same control unit have the same initial vibration phase and the same vibration frequency.

[0008] In some embodiments, the distance between the center of the second flow channel and the second end of the cantilever beam structure directly opposite the second flow channel is 100 μm to 5000 μm.

[0009] In some embodiments, the height of the anchoring structure is 100μm to 5000μm.

[0010] In some embodiments, in the arrangement direction of the anchoring structure, the width of the first flow channel is greater than or equal to the width of the second gap.

[0011] In some embodiments, the width of the second flow channel opening in the arrangement direction of the anchoring structure is smaller than the width of the second gap, and the distance between the top plate and the cantilever beam structure is smaller than the distance between the bottom plate and the cantilever beam structure.

[0012] In some embodiments, the first flow channel orifice is directly opposite the second gap within the same control unit.

[0013] In some embodiments, the number of control units is greater than or equal to two, and each of the second flow channels is directly opposite the cantilever beam structure on the same side of the anchoring structure arrangement direction of each control unit.

[0014] In some embodiments, the number of control units is greater than or equal to two, and two adjacent second flow channels are directly opposite the cantilever beam structures on different sides of the control units along the arrangement direction of the anchoring structure.

[0015] According to some embodiments of the present invention, another aspect of the present invention also provides a MEMS device, including the MEMS controller as described above.

[0016] The technical solution provided by the embodiments of the present invention has at least the following advantages: When the MEMS device is used as part of a heat sink, the second end of the cantilever beam structure vibrates to draw in cooling fluid from one of the first or second flow channels, then through the gap between the cantilever beam structures, and out through the other of the first or second flow channels to complete the unidirectional flow control of the gas. When the MEMS device is used as part of a loudspeaker, the vibration of the second end of the cantilever beam structure generates a high-frequency signal. The sound channel formed by the encapsulation structure, the cantilever beam structure, and the anchoring structure can demodulate the high-frequency signal, thereby converting the high-frequency signal into a low-frequency signal to output the frequency of human-audible sound. The encapsulation structure serves as the protective shell of the control unit and forms a flow channel, thereby facilitating the output of cooling fluid or the demodulation of sound. Attached Figure Description

[0017] One or more embodiments are illustrated by way of example with corresponding pictures in the accompanying drawings. These illustrative descriptions do not constitute a limitation on the embodiments. Unless otherwise stated, the pictures in the accompanying drawings do not constitute a limitation on scale. In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the conventional technology, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 is a schematic diagram of the structure of a MEMS controller provided by the present invention;

[0019] Figure 2 is a graph showing the relationship between the height of the anchoring structure and the flow rate per unit chip volume provided by the present invention.

[0020] Figure 3 is a graph showing the relationship between the first distance and the flow rate per unit chip volume provided by the present invention.

[0021] Figure 4 shows an arrangement of a control unit according to an embodiment of this disclosure;

[0022] Figure 5 shows another arrangement of the control unit provided in an embodiment of this disclosure;

[0023] Figure 6 shows another arrangement of the control unit provided in an embodiment of this disclosure;

[0024] Figure 7 is a schematic diagram of the structure of the first flow channel as a fluid outlet;

[0025] Figure 8 is a schematic diagram of the structure of the second flow channel as a fluid outlet;

[0026] Figure 9 shows the time-domain diagram of the displacement at the second end of the cantilever beam structure.

[0027] Figure 10 is a time-domain diagram of the flow rate of the fluid flowing out through the second flow channel.

[0028] Figure 11 is a schematic diagram of the structure of the second flow channel as a sound outlet;

[0029] Figure 12 is a schematic diagram of the structure of the first flow channel as a sound outlet;

[0030] Figure 13 shows the spectrum of ultrasonic signals generated by the cantilever beam structure;

[0031] Figure 14 is a spectrum of sound pressure at the sound outlet;

[0032] Figure 15 is a schematic diagram of the simulated sound-emitting process. Embodiments of the present invention

[0033] As can be seen from the background technology, there is a need to provide a MEMS controller to control unidirectional fluid flow.

[0034] This invention provides a MEMS controller and a MEMS device. When the MEMS device is part of a heat sink, the second end of the cantilever beam structure vibrates to draw in cooling fluid from either the first or second flow channel, then through the gap between the cantilever beam structures, and out through the other of the first or second flow channel to achieve unidirectional gas flow control. When the MEMS device is part of a loudspeaker, the vibration of the second end of the cantilever beam structure generates a high-frequency signal. The sound channel formed by the encapsulation structure, the cantilever beam structure, and the anchoring structure can demodulate the high-frequency signal, thereby converting the high-frequency signal into a low-frequency signal to output the frequency of human-audible sound. The encapsulation structure serves as the protective shell of the control unit and forms a flow channel, thereby facilitating the output of cooling fluid or the demodulation of sound.

[0035] In the description of the embodiments of this invention, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this invention, "multiple" means two or more, unless otherwise explicitly defined.

[0036] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0037] In the description of the embodiments of this invention, the term "and / or" is merely a description of the association relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A exists, A and B exist simultaneously, and B exists. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0038] In the description of the embodiments of the present invention, the term "multiple" refers to two or more (including two), similarly, "multiple groups" refers to two or more (including two groups), and "multiple pieces" refers to two or more (including two pieces).

[0039] In the description of the embodiments of the present invention, the technical terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention.

[0040] In the description of the embodiments of the present invention, unless otherwise explicitly specified and limited, the technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention according to the specific circumstances.

[0041] In the accompanying drawings corresponding to the embodiments of the present invention, the thickness and area of ​​the layers are enlarged for better understanding and ease of description. When describing a component (such as a layer, film, region, or lens body) on or on the surface of another component, the component may be "directly" located on the surface of the other component, or there may be a third component between the two components. Conversely, when describing a component on the surface of another component, or when another component is formed or disposed on the surface of a component, it indicates that there is no third component between the two components. Furthermore, when describing a component as being "generally" formed on another component, it means that the component is not formed on the entire surface (or front surface) of the other component, nor is it formed on a portion of the edge of the entire surface.

[0042] In the description of embodiments of the present invention, when a component "includes" another component, other components are not excluded unless otherwise stated, and may be further included. Furthermore, when a component such as a layer, film, region, or plate is referred to as being "on / located" on another component, it can be "directly" on the other component (i.e., located on the surface of the other component with no other components between them), or another component may be present therein. Moreover, when a component such as a layer, film, region, or plate is "directly located" on another component, or when a component such as a layer, film, region, or plate is located on the surface of another component, it indicates that no other components are located therein.

[0043] The terminology used in the description of the various embodiments herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used in the description of the various embodiments and the appended claims, the term "component" is also intended to include the plural form unless the context clearly indicates otherwise. Components include layers, films, regions, or plates, etc.

[0044] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of the present invention to facilitate a better understanding of the invention. However, the technical solutions claimed in this invention can be implemented even without these technical details and various variations and modifications based on the following embodiments.

[0045] Referring to Figure 1, Figure 1 is a schematic diagram of the structure of a MEMS controller provided by the present invention.

[0046] In some embodiments, the MEMS controller may include: at least one control unit 100, the control unit 100 including: two anchoring structures 110, adjacent anchoring structures 110 having a first gap 130, the anchoring structures 110 having opposing bottom surfaces and top surfaces; a cantilever beam structure 120 corresponding to the anchoring structures 110, the cantilever beam structure 120 having opposing first ends and second ends, and the first end of each cantilever beam structure 120 being located on the top surface of the corresponding anchoring structure 110, the second ends of two adjacent cantilever beam structures 120 of the same control unit 100 being directly opposite each other and having a second gap 140.

[0047] The MEMS controller may further include: a packaging structure 101, which includes a base plate 111, a side plate 121, and a top plate 131 connected in sequence. The base plate 111 and the top plate 131 face each other, and the side plate 121 connects the base plate 111 and the top plate 131. The base plate 111 is located on the bottom surface of the anchoring structure 110, and the base plate 111 is provided with a first flow channel 141 penetrating the base plate 111. The first flow channel 141 corresponds to the control unit 100 and is connected to the first gap 130 of the corresponding control unit 100. The top plate 131 is spaced apart from the top surface of the cantilever beam structure 120, and the top plate 131 is provided with a second flow channel 151 penetrating the top plate 131. The second flow channel 151 corresponds to the control unit 100.

[0048] The MEMS device provided in this embodiment of the invention, when used as part of a heat sink, causes the second end of the cantilever beam structure 120 to vibrate, drawing in cooling fluid from either the first flow channel 141 or the second flow channel 151. The fluid then flows through the gap between the cantilever beam structures 120 and out through the other flow channel, thus achieving unidirectional gas flow control. When used as part of a loudspeaker, the vibration of the second end of the cantilever beam structure 120 generates a high-frequency signal. The sound channel formed by the encapsulation structure 101, the cantilever beam structure 120, and the anchoring structure 110 can demodulate the high-frequency signal, thereby converting it into a low-frequency signal to output a frequency audible to humans. The encapsulation structure 101 serves as a protective housing for the control unit 100 and forms a flow channel, facilitating the output of cooling fluid or the demodulation of sound.

[0049] The anchoring structure 110 can be used to support the cantilever beam structure 120. The top surface of the anchoring structure 110 is fixedly connected to the first end of the cantilever beam structure 120. The anchoring structure 110 can provide a drive signal to the cantilever beam structure 120. For example, when the MEMS controller needs to work, the anchoring structure 110 can provide a drive signal to the cantilever beam structure 120 to drive the cantilever beam structure 120 to vibrate.

[0050] The anchoring structure 110 can drive the cantilever beam structure 120 in the following ways: piezoelectric drive, electrostatic drive, thermoelectric drive, or electromagnetic drive, etc. Taking piezoelectric drive as an example, the inverse piezoelectric effect of piezoelectric materials is used to convert electrical energy into mechanical energy to drive the cantilever beam structure 120 to vibrate.

[0051] In some embodiments, the anchoring structure 110 can be a control layer for an SOI (Silicon-On-Insulator) chip. The anchoring structure 110 can also be a control layer for other types of chips, which can be used in conjunction with the cantilever beam structure 120.

[0052] In some embodiments, during the operation of the MEMS controller, the two anchoring structures 110 can be selected to control one of them to control the vibration of the corresponding cantilever beam structure 120, or both anchoring structures 110 can control the vibration of the cantilever beam structure 120. The working time or working state of the anchoring structures 110 can be selected according to different working requirements.

[0053] In some embodiments, the height of the anchoring structure 110 is 100μm to 5000μm, for example, 300μm, 500μm, 1000μm, 1800μm, 2500μm, 3000μm, 4000μm or 4600μm, etc. Referring to Figure 2, which is a graph showing the relationship between the height of the anchoring structure and the flow rate per unit chip volume provided by the present invention, for the anchoring structure 110, the height of the anchoring structure 110 is positively correlated with the net flow rate of the driving fluid of the MEMS controller. That is, the greater the height of the anchoring structure 110, the greater the net flow rate of the fluid that the MEMS controller can pass through. However, a greater height of the anchoring structure 110 will make the overall size of the MEMS controller larger, and a greater height of the anchoring structure 110 will also result in a lower net flow rate per unit chip volume, leading to a waste of the performance of the anchoring structure 110. A smaller height of the anchoring structure 110 will reduce the net flow rate of the fluid that the MEMS controller can pass through, but it will increase the net flow rate per unit chip volume. That is, the performance utilization rate of the anchoring structure 110 will increase. Similarly, as the height of the anchoring structure 110 decreases, the manufacturing process difficulty of the MEMS controller will increase. Therefore, the height of the anchoring structure 110 is set to 100μm~5000μm, which improves the net flow rate per unit chip volume while taking into account the manufacturing process difficulty of the MEMS controller.

[0054] It should be noted that the flow rate per unit chip volume here refers to the total flow rate of fluid output through the MEMS controller per unit time divided by the planar area of ​​the MEMS controller.

[0055] The vibration frequency of the cantilever beam structure 120 is greater than or equal to 20KHz, such as 30KHz, 50KHz or 100KHz, etc. The flow rate of the fluid flowing in or out through the first flow channel 141 can be increased by using the vibration frequency of the cantilever beam structure 120 greater than or equal to 20KHz.

[0056] In some embodiments, the cantilever beam structures 120 within the same control unit 100 have the same initial vibration phase and the same vibration frequency. Controlling the cantilever beam structures 120 within the same control unit 100 to have the same initial vibration phase and the same vibration frequency can prevent interference between the cantilever beam structures 120 within the same control unit 100. Taking the requirement of unidirectional gas flow in the MEMS controller as an example, this avoids the situation where one cantilever beam structure 120 controls gas to enter from the first flow channel 141 and exit from the second flow channel 151, while another cantilever beam structure 120 controls gas to enter from the second flow channel 151 and exit from the first flow channel 141. This prevents mutual interference between the cantilever beam structures 120 within the same control unit 100, improves the stability of fluid control, and also facilitates the control of the MEMS controller by making the initial vibration phase and vibration frequency the same, thus reducing the control difficulty.

[0057] In some embodiments, the initial vibration phases of the cantilever beam structure 120 within the same control unit 100 may also be different, for example, by 10° or 20°. By controlling the different initial vibration phases of the cantilever beam structure 120 within the same control unit 100, the flow rate of the fluid can be controlled. For example, when it is necessary to adjust the flow rate of the fluid, the initial vibration phase of the cantilever beam structure 120 within the same control unit 100 can be changed to change the flow rate of the fluid.

[0058] The encapsulation structure 101 can be used to protect the control unit 100, to extract signals, or to transmit control signals to the control unit 100, thereby completing signal transmission. The encapsulation structure 101 can also be used to construct fluid channels, for example, to construct gas channels to control gas to enter from the first channel port 141 and exit from the second channel port 151, or to control gas to enter from the second channel port 151 and exit from the first channel port 141.

[0059] In some embodiments, the packaging structure 101 may be a metal plate or a PCB, etc.

[0060] In some embodiments, the second flow channel 151 is directly opposite a cantilever beam structure 120 of the corresponding control unit 100, and the second flow channel 151 is offset from the first flow channel 141; in other embodiments, the second flow channel 151 is offset from the cantilever beam structure 120 of the corresponding control unit 100 and is directly opposite the second gap 140, and the second flow channel 151 is directly opposite the first flow channel 141.

[0061] In some embodiments, the distance between the center of the second flow channel 151 and the second end of the cantilever beam structure 120 directly opposite the second flow channel 151 is 100 μm to 5000 μm. The distance between the center of the second flow channel 151 and the second end of the cantilever beam structure 120 directly opposite the second flow channel 151 is defined as the first distance L1. Referring to Figure 3, which is a graph showing the relationship between the first distance and the flow rate per unit chip volume provided by the present invention, for a MEMS controller, the first distance L1 is positively correlated with the net flow rate of the driving fluid through the MEMS controller. That is, the longer the first distance L1, the greater the net flow rate of the fluid that the MEMS controller can pass through. However, a longer first distance L1 will result in a larger overall size of the MEMS controller. Furthermore, a longer first distance L1... The longer the distance L1, the lower the net flow rate per unit chip volume, resulting in wasted performance of the cantilever beam structure 120. The shorter the first distance L1, the lower the net flow rate of the fluid that the MEMS controller can pass through, but the higher the net flow rate per unit chip volume. In other words, the performance utilization rate of the cantilever beam structure 120 will increase. Similarly, as the first distance L1 decreases, the manufacturing process difficulty of the MEMS controller will increase. Therefore, the first distance L1 is set to 100μm~5000μm, which improves the net flow rate per unit chip volume while taking into account the manufacturing process difficulty of the MEMS controller.

[0062] It should be noted that the center of the second flow channel 151 mentioned here can refer to the geometric center of the second flow channel 151. If the second flow channel 151 is circular, then the center mentioned here is the circle. If the second flow channel 151 is square, then the center mentioned here is the center of symmetry of the square.

[0063] In some embodiments, in the arrangement direction of the anchoring structure 110, the width of the first flow channel 141 is greater than or equal to the width of the second gap 140. That is, within the same control unit 100, the width of the first flow channel 141 is greater than or equal to the distance between the two cantilever beam structures 120. Thus, if the fluid enters from the second gap 140 and exits from the first flow channel 141, fluid loss can be reduced. If the fluid enters from the first flow channel 141 and exits from the second gap 140, the reduction in the outlet size will increase the kinetic energy of the fluid, thereby increasing the fluid velocity.

[0064] In some embodiments, the width of the second flow channel 151 in the arrangement direction of the anchoring structure 110 is less than the width of the second gap 140, and the distance between the top plate 131 and the cantilever beam structure 120 is less than the distance between the bottom plate 111 and the cantilever beam structure 120. The accommodating space directly related to the second flow channel 151 is the space enclosed between the encapsulation structure 101 and the cantilever beam structure 120. The accommodating space directly related to the first flow channel 141 is the space enclosed between the encapsulation structure 101, the cantilever beam structure 120, and the anchoring structure 110. By setting the width of the second flow channel 151 to be small and the accommodating space directly related to the second flow channel 151 to be small, the fluid will have a high flow velocity when it flows out, whether it enters from the second flow channel 151 and exits from the second gap 140 or enters from the second gap 140 and exits from the second flow channel 151. On the other hand, by setting the width of the first flow channel 141 to be large and the accommodating space directly related to the first flow channel 141 to be large, when the first flow channel 141 is the fluid outlet, the coverage area when the fluid flows out can be increased. When the first flow channel 141 is the fluid inlet, the fluid flowing out after the gas passes through the second gap 140 and the second flow channel 151 can have a better flow velocity.

[0065] In some embodiments, the first flow channel 141 is directly opposite to the second gap 140 within the same control unit 100. This reduces fluid loss during flow, whether the fluid flows through the second gap 140 to the first flow channel 141 or vice versa, and also reduces noise during fluid flow, thereby improving the performance of the MEMS controller.

[0066] Referring to Figure 4, which illustrates an arrangement of control units according to an embodiment of this disclosure. In some embodiments, the number of control units 100 is greater than or equal to two. Each second flow channel 151 is directly opposite to the cantilever beam structure 120 on the same side of the anchoring structure 110 along the arrangement direction of each control unit 100. In other words, the position of the second flow channel 151 corresponding to each control unit 100 is the same. For example, each second flow channel 151 is directly opposite to the cantilever beam structure 120 on the left side of the control unit 100. By controlling each second flow channel 151 to be directly opposite to the cantilever beam structure 120 on the same side of the anchoring structure 110 along the arrangement direction of each control unit 100, the process difficulty of forming the MEMS controller can be reduced.

[0067] Referring to Figures 5 and 6, Figure 5 shows another arrangement of control units provided in an embodiment of the present disclosure, and Figure 6 shows yet another arrangement of control units provided in an embodiment of the present disclosure.

[0068] In some embodiments, the number of control units 100 is greater than or equal to two, and two adjacent second flow channels 151 are directly opposite the cantilever beam structures 120 on different sides of the control units 100 along the arrangement direction of the anchoring structure 110. In other words, the positions of the second flow channels 151 corresponding to each control unit 100 are different. For example, one of the two adjacent second flow channels 151 is directly opposite the cantilever beam structure 120 on the left side of the control unit 100, and the other is directly opposite the cantilever beam structure 120 on the right side of the control unit 100. For a MEMS controller with multiple control units 100, setting two adjacent control units 100 to be directly opposite the cantilever beam structures 120 on different sides of the control units 100 along the arrangement direction of the anchoring structure 110 can improve the control effect of the MEMS controller. For example, it can improve the reliability of MEMS control of unidirectional airflow or improve the reliability of MEMS sound demodulation.

[0069] Referring to Figure 5, in some embodiments, the number of control units 100 is greater than or equal to two. The second flow channel 151 of the control unit 100 that contacts the side plate 121 is directly opposite the cantilever beam structure 120 away from the side plate 121. In this way, the fluid inlet or outlet can be located in the part of the MEMS controller near the center, which can improve the stress resistance of the packaging structure 101 and improve the reliability of the MEMS controller.

[0070] Referring to Figure 6, in some embodiments, the number of control units 100 is greater than or equal to two. The second flow port 151 of the control unit 100 that contacts the side plate 121 is directly opposite to the cantilever beam structure 120 near the side plate 121. In this way, the fluid inlet or outlet can be set at different positions of the MEMS controller. Taking the fluid flowing out from the second flow port 151 as an example, setting the second flow port 151 to be directly opposite to the cantilever beam structure 120 near the side plate 121 can avoid dead zones in the fluid flowing out of the MEMS controller.

[0071] It should be noted that the aforementioned dead zone refers to the area that cannot be covered after the fluid flows out.

[0072] In some embodiments, the cantilever beam structure 120 within different control units 100 has the same initial vibration phase and the same vibration frequency. In other embodiments, the initial vibration phase, vibration frequency, and / or amplitude of the cantilever beam structure 120 within different control units 100 may also be different, and the vibration of the cantilever beam structure 120 within different control units 100 can be adjusted according to actual needs.

[0073] The following will describe in detail the working process of the MEMS controller when it provides heat dissipation capability, with reference to Figures 7 to 10. Figure 7 is a schematic diagram of the structure of the first flow channel as the fluid outlet, Figure 8 is a schematic diagram of the structure of the second flow channel as the fluid outlet, Figure 9 is a time-domain diagram of the displacement of the second end of the cantilever beam structure, and Figure 10 is a time-domain diagram of the flow rate of the fluid flowing out through the second flow channel.

[0074] Referring to Figures 7, 9, and 10, when the MEMS controller needs to provide heat dissipation, it controls the cantilever beam structure 120 to vibrate. The cold fluid flows in from the second flow channel 151, passes through the second gap 140 and the first gap 130 in sequence, and flows out through the first flow channel 141. The first flow channel 141 can be directly opposite the structure that needs to be cooled, so that the cold fluid impacts the surface of the structure that needs to be cooled, thereby completing the heat dissipation and cooling process.

[0075] In some embodiments, the vibration of a cantilever beam structure 120 within the same control unit 100 satisfies: d s =d1Sin(2πf0t), the vibration of another cantilever beam structure 120 satisfies: d s =d1Sin(2πf0t+∆φ), where d1 represents the amplitude of the vibration of the cantilever beam structure 120, f0 represents the operating frequency of the MEMS controller, and ∆φ represents the initial phase difference of the vibration of the two cantilever beam structures 120 under the same control unit 100.

[0076] Referring to Figure 10, when ∆φ is 0, the flow rate time domain diagram of the fluid flowing into the second flow channel 151 can be shown in Figure 10a, and when ∆φ is not 0, the flow rate time domain diagram of the fluid flowing into the second flow channel 151 can be shown in Figure 10b.

[0077] It should be noted that the above limitation on ∆φ to plot the flow rate time-domain diagram of the fluid flowing in through the second flow channel 151 is only a limitation for ease of understanding. In other embodiments, when ∆φ is not 0, the flow rate time-domain diagram of the fluid flowing in through the second flow channel 151 can be as shown in Figure 10a, and when ∆φ is 0, the flow rate time-domain diagram of the fluid flowing in through the second flow channel 151 can be as shown in Figure 10b.

[0078] The present invention can control the unidirectional flow of fluid through a MEMS controller, and the velocity of the fluid flowing into the second flow channel 151 can be no less than 20m / s.

[0079] Referring to Figures 8, 9 and 10, when the MEMS controller needs to provide heat dissipation, it controls the vibration of the cantilever beam structure. The cold fluid flows in from the first flow channel, passes through the first gap and the second gap in sequence, and flows out through the second flow channel. The second flow channel can be directly opposite the structure that needs to be cooled, so that the cold fluid impacts the surface of the structure that needs to be cooled, thereby completing the heat dissipation and cooling process.

[0080] In some embodiments, the vibration of a cantilever beam structure 120 within the same control unit 100 satisfies: d s =d1Sin(2πf0t), the vibration of another cantilever beam structure 120 satisfies: d s =d1Sin(2πf0t+∆φ), where d1 represents the amplitude of the vibration of the cantilever beam structure 120, f0 represents the operating frequency of the MEMS controller, and ∆φ represents the initial phase difference of the vibration of the two cantilever beam structures 120 under the same control unit 100.

[0081] Referring to Figure 10, when ∆φ is 0, the flow rate time domain diagram of the fluid flowing out of the second flow channel 151 can be shown in Figure 10c, and when ∆φ is not 0, the flow rate time domain diagram of the fluid flowing out of the second flow channel 151 can be shown in Figure 10d.

[0082] It should be noted that the above limitation on ∆φ to plot the flow rate time-domain diagram of the fluid flowing out through the second flow channel 151 is only a limitation for ease of understanding. In other embodiments, when ∆φ is not 0, the flow rate time-domain diagram of the fluid flowing out of the second flow channel 151 can be as shown in Figure 10c, and when ∆φ is 0, the flow rate time-domain diagram of the fluid flowing out of the second flow channel 151 can be as shown in Figure 10d.

[0083] The present invention can control the unidirectional flow of fluid through a MEMS controller, and the amount of fluid flowing out through the second flow channel 151 can be no less than 20 m / s.

[0084] This invention does not limit the fluid; the fluid can be liquid, gas, sound waves, etc.

[0085] The following will describe in detail the working process of the MEMS controller when it is used for sound dissemination, with reference to Figures 11 to 15. Figure 11 is a schematic diagram of the structure of the second flow channel as the sound outlet, Figure 12 is a schematic diagram of the structure of the first flow channel as the sound outlet, Figure 13 is a spectrum diagram of the ultrasonic signal generated by the cantilever beam structure, Figure 14 is a spectrum diagram of the sound pressure at the sound outlet, and Figure 15 is a schematic diagram of the simulated structure of the sound dissemination process.

[0086] When the sound-raising capability is required, the driving signal generated by the anchoring structure 110 drives the displacement of the cantilever beam structures 120 on both sides, and the displacement satisfies: d s =d1Sin(2πf0t)Sin(2πf a t), where d1 represents the amplitude of the cantilever beam structure's 120° vibration, f0 represents the ultrasonic frequency, and f a This represents the audible sound frequency. When the cantilever beam structure vibrates at 120°, it generates ultrasound, as shown in Figure 13. The sound pressure of the ultrasound satisfies u... s=u1Sin(2πf0t)Sin(2πf a t), where u1 is the amplitude of the sound pressure. The sound channel formed by this invention will demodulate the sound, that is, amplitude modulation. The amplitude modulation satisfies: u mod =u2Sin(2πf0t), where u2 is the amplitude of the sound pressure, when the ultrasonic signal u s The output sound pressure level u is modulated by the amplitude of this channel. out The output sound pressure satisfies u out= u sX u mod= u1Sin(2πf0t)Sin(2πf a t)Xu2Sin(2πf0t), where X is the multiplication sign, can be used to obtain the audible frequency f. a The spectrum of the output sound pressure is shown in Figure 14.

[0087] The MEMS provided by this invention can demodulate sound when used for loudspeaker, thereby converting ultrasonic frequencies into human-audible sound frequencies.

[0088] Another embodiment of the present invention also provides a MEMS device, which may include the MEMS controller in some or all of the above embodiments. The following will describe the MEMS device provided in another embodiment of the present disclosure. It should be noted that the same or corresponding parts as those in the foregoing embodiments can be referred to the corresponding descriptions of the foregoing embodiments, which will not be repeated below.

[0089] The MEMS device provided by this invention can be used for heat dissipation or for sound generation.

[0090] Those skilled in the art will understand that the above embodiments are specific examples of implementing the present invention, and in practical applications, various changes in form and detail can be made without departing from the spirit and scope of the embodiments of the present invention. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the embodiments of the present invention; therefore, the scope of protection of the embodiments of the present invention should be determined by the scope defined in the claims.

Claims

1. A MEMS controller, comprising: At least one control unit, the control unit comprising: two anchoring structures having a first gap between adjacent anchoring structures, the anchoring structures having opposing bottom and top surfaces; and a cantilever beam structure corresponding to the anchoring structures, the cantilever beam structure having opposing first and second ends, wherein the first end of each cantilever beam structure is located on the top surface of the corresponding anchoring structure, and the second ends of two adjacent cantilever beam structures of the same control unit are facing each other and have a second gap; The encapsulation structure includes a bottom plate, a side plate, and a top plate connected in sequence, wherein the bottom plate and the top plate face each other, and the side plate connects the bottom plate and the top plate; The base plate is located on the bottom surface of the anchoring structure, and the base plate is provided with a first flow channel through the base plate. The first flow channel corresponds to the control unit and is connected to the first gap of the corresponding control unit. The top plate is spaced apart from the top surface of the cantilever beam structure, and the top plate is provided with a second flow channel through the top plate. The second flow channel corresponds to the control unit.

2. The MEMS controller according to claim 1, wherein, The cantilever beam structures within the same control unit have the same initial vibration phase and the same vibration frequency.

3. The MEMS controller according to claim 1, wherein, The distance between the center of the second flow channel opening and the second end of the cantilever beam structure directly opposite the second flow channel opening is 100μm~5000μm.

4. The MEMS controller according to claim 1, wherein, The height of the anchoring structure is 100μm~5000μm.

5. The MEMS controller according to claim 1, wherein, In the arrangement direction of the anchoring structure, the width of the first flow channel is greater than or equal to the width of the second gap.

6. The MEMS controller according to claim 5, wherein, The width of the second flow channel opening in the arrangement direction of the anchoring structure is smaller than the width of the second gap, and the distance between the top plate and the cantilever beam structure is smaller than the distance between the bottom plate and the cantilever beam structure.

7. The MEMS controller according to claim 1, wherein, The first flow channel opening is directly opposite the second gap within the same control unit.

8. The MEMS controller according to claim 1, wherein, The number of control units is greater than or equal to two, and each of the second flow channels is directly opposite the cantilever beam structure on the same side of the anchoring structure arrangement direction of each control unit.

9. The MEMS controller according to claim 1, wherein, The number of control units is greater than or equal to two, and two adjacent second flow channel openings are directly opposite the cantilever beam structures on different sides of the control units along the arrangement direction of the anchoring structure.

10. A MEMS device, comprising: The MEMS controller as described in any one of claims 1-9.

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