Blade processing device

Abstract

The present application discloses a blade processing device, comprising a base, a suction main shaft and a blade grinding plate, wherein the suction main shaft is rotatably provided on the base and is formed with a first suction air passage, a suction jig is provided at one end of the suction main shaft, a second suction air passage extends through the suction jig and is communicated with a first end of the first suction air passage, the suction jig is used for suctioning the blade by means of the second suction air passage, a second end of the first suction air passage is configured to be communicated with a vacuum generating device, the vacuum generating device is used for providing a vacuum suction force, and the blade grinding plate is used for grinding and sharpening the blade. The blade processing device provided by the present application fixes the blade by means of vacuum suction, does not require a nut for locking, makes the disassembly and assembly of the blade quick and convenient, and improves the sharpening efficiency of the blade; and additionally, the friction between the nut and the blade and the scratching of the blade are avoided, the dynamic balance quality and appearance of the blade are ensured, the vibration during rotation of the blade is reduced, and the risk of edge chipping of the blade is reduced.

Description

A blade processing device

[0001] This application claims priority to Chinese Patent Application No. 202411984913.1, filed with the Chinese Patent Office on December 31, 2024, entitled "A Blade Processing Apparatus", the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to the field of cutting tool processing technology, and more specifically, to a cutting tool processing apparatus. Background Technology

[0003] In the current wafer dicing process, workers first insert the blade into the spindle head at the front end of the spindle, and then use a nut to firmly press the blade onto the spindle. The spindle rotates at high speed, driving the blade to cut back and forth on the grinding plate on the worktable to complete the sharpening. After the sharpening is completed, the worker stops the spindle from rotating, removes the nut with a wrench, takes off the sharpened blade, and loads a new blade to be sharpened, and starts a new round of blade sharpening operations.

[0004] However, this method of manually tightening nuts to install and remove blades has two main drawbacks: First, it is inefficient. Installing and removing blades requires tightening and loosening nuts. While the blade sharpening process only takes 30 seconds, tightening and loosening nuts to install and remove a blade takes 60 seconds, and the excessive auxiliary time severely reduces production efficiency. Second, it affects blade quality. When tightening and loosening nuts, the nut and the blade end face will rub against each other, leaving traces of compression on the blade end face. Any tiny scratches on the blade surface will affect the imbalance, causing the blade to vibrate, which will increase the chipping of the cut material and reduce the quality of the blade.

[0005] Therefore, how to improve the sharpening efficiency of blades and ensure blade quality has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] In view of this, the purpose of this application is to provide a blade processing apparatus to improve blade sharpening efficiency and ensure blade quality.

[0007] To achieve the above objectives, this application provides the following technical solution:

[0008] A blade processing apparatus, comprising:

[0009] Base;

[0010] An adsorption main shaft is rotatably mounted on the base and has a first adsorption gas path. An adsorption fixture is provided at one end of the adsorption main shaft. A second adsorption gas path is provided through the adsorption fixture and communicates with the first end of the first adsorption gas path. The adsorption fixture is used to adsorb the blade through the second adsorption gas path. The second end of the first adsorption gas path is used to communicate with a vacuum generator.

[0011] A sharpening plate, mounted on the base, is used to sharpen and grind the blade.

[0012] In one possible implementation, a first guide rail is provided on the base, a first sliding seat is slidably provided on the first guide rail, and the grinding plate is disposed on the first sliding seat.

[0013] In one possible implementation, a second guide rail is provided on the base, and a second sliding seat is movably provided on the second guide rail;

[0014] The second sliding seat is provided with a lifting guide rail, and the lifting sliding seat is slidably provided on the lifting guide rail. The adsorption main shaft is rotatably provided on the lifting sliding seat.

[0015] The extension directions of any two of the first guide rail, the lifting guide rail, and the second guide rail are perpendicular.

[0016] In one possible implementation, the first adsorption gas path includes an axial gas path and a radial gas path;

[0017] The axial gas path extends along the axial direction of the adsorption main shaft, and the radial gas path extends along the radial direction of the adsorption main shaft. One end of the radial gas path is connected to the axial gas path, and the other end is connected to the second adsorption gas path.

[0018] In one possible implementation, the radial air passages are a plurality of those uniformly arranged axially around the adsorption main shaft, and the second adsorption air passages are a plurality of those uniformly arranged axially around the adsorption fixture, and the radial air passages and the second adsorption air passages are connected in a one-to-one correspondence.

[0019] In one possible implementation, an adsorption ring groove is formed on one end face of the adsorption fixture. The adsorption ring groove is annular and coaxially arranged with the adsorption main shaft, and is connected to each of the second adsorption gas paths. The adsorption fixture is used to adsorb the blade through the adsorption ring groove.

[0020] In one possible implementation, a drive shaft and a vacuum connector are also included;

[0021] The base is provided with a mounting seat, the adsorption main shaft is rotatably mounted on the mounting seat, the mounting seat is provided with a through mounting hole, the vacuum connector is rotatably mounted on the mounting seat, and one end is located in the mounting hole. The vacuum connector is used to connect to a vacuum generator through a rotary bearing.

[0022] The drive shaft has an axially extending air passage. The first end of the drive shaft is connected to the adsorption main shaft, and the second end is connected to the vacuum connector so that the vacuum connector rotates with the adsorption main shaft. The two ends of the air passage are respectively connected to the first adsorption air passage and the inner hole of the vacuum connector.

[0023] In one possible implementation, the first end of the drive shaft is threadedly connected to the first adsorption gas path; and / or,

[0024] The second end of the drive shaft has a first profile on its outer circumferential wall, and the inner wall of the vacuum connector has a second profile that fits with the first profile.

[0025] In one possible implementation, the vacuum connector is mounted on the mounting base via a mounting clamp;

[0026] A floating groove is provided on the circumferential outer wall of the vacuum connector, and the mounting clamp is slidably engaged in the floating groove and connected to the mounting base.

[0027] In one possible implementation, the adsorption fixture is provided with a positioning protrusion for passing through the inner hole of the blade.

[0028] The blade processing device provided in this application includes a base, an adsorption spindle, and a grinding plate. The adsorption spindle is rotatably mounted on the base and has a first adsorption gas path. An adsorption fixture is provided at one end of the adsorption spindle, and a second adsorption gas path is provided through the adsorption fixture, which is connected to the first end of the first adsorption gas path. The adsorption fixture is used to adsorb the blade through the second adsorption gas path, and the second end of the first adsorption gas path is connected to a vacuum generator, which provides a vacuum adsorption force. The grinding plate is mounted on the base and is used to grind and sharpen the blade. During the blade sharpening process, after the vacuum generator is activated, a negative pressure is formed at the adsorption fixture through the first and second adsorption gas paths, thereby adsorbing and fixing the blade, allowing the blade to rotate with the adsorption spindle. Finally, the blade is ground and sharpened by the grinding plate. After sharpening, the vacuum generator is turned off and the blade can be removed.

[0029] Compared with existing technologies, the blade processing device provided in this application uses vacuum adsorption to fix the blade, eliminating the need for nuts to lock it. The blade assembly and disassembly process is quick and convenient, improving the blade's sharpening efficiency. At the same time, using vacuum adsorption to fix the blade can avoid friction between the nut and the blade, which can scratch the blade. This ensures the dynamic balance quality and appearance of the blade, guarantees the sharpening effect, reduces vibration during blade rotation, lowers the risk of blade edge breakage, and ensures blade quality. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0031] Figure 1 is a schematic diagram of the overall structure of the blade processing apparatus disclosed in the embodiment of this application;

[0032] Figure 2 is a side view of the adsorption spindle disclosed in an embodiment of this application;

[0033] Figure 3 is a cross-sectional view of RR in Figure 2;

[0034] Figure 4 is a magnified view of a portion of Figure 3;

[0035] Figure 5 is a magnified view of a portion of Figure 3;

[0036] Figure 6 is a cross-sectional view of section UU in Figure 5.

[0037] The meanings of the various reference numerals in the figure are as follows: 100 is the base, 110 is the first guide rail, 111 is the first sliding seat, 120 is the second guide rail, 121 is the second sliding seat, 130 is the lifting guide rail, and 131 is the lifting sliding seat; 200 is the adsorption spindle, 210 is the first adsorption air passage, 211 is the axial air passage, and 212 is the radial air passage; 300 is the grinding plate; 400 is the adsorption fixture, 401 is the second adsorption air passage, 402 is the adsorption ring groove, and 403 is the positioning protrusion; 500 is the mounting base, 501 is the mounting clamp, 502 is the mounting hole, 510 is the vacuum connector, 511 is the floating slide, 512 is the cooling air inlet, 520 is the drive shaft, 521 is the connecting air passage, and 522 is the seal; 600 is the blade. Detailed Implementation

[0038] This application discloses a blade processing apparatus to improve blade sharpening efficiency and ensure blade quality.

[0039] The embodiments will now be described with reference to the accompanying drawings. Furthermore, the embodiments shown below do not limit the scope of the invention as described in the claims. Additionally, the complete contents of the structures represented in the embodiments below are not limited to those necessary for the solution of the invention as described in the claims. It should be noted that, for ease of description, only the parts relevant to the invention are shown in the drawings. Unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0040] Referring to Figures 1-6, the blade processing device disclosed in this application includes a base 100, an adsorption spindle 200, and a grinding plate 300. The adsorption spindle 200 is rotatably mounted on the base 100 and has a first adsorption air passage 210. One end of the adsorption spindle 200 is provided with an adsorption fixture 400. A second adsorption air passage 401 is provided through the adsorption fixture 400 and communicates with the first end of the first adsorption air passage 210. The adsorption fixture 400 is used to adsorb the blade 600 through the second adsorption air passage 401. The second end of the first adsorption air passage 210 is used to communicate with a vacuum generating device, which is used to provide a vacuum adsorption force. The grinding plate 300 is mounted on the base 100 and is used to grind and sharpen the blade 600.

[0041] During the sharpening process of the blade 600, after the vacuum generator is started, a negative pressure can be formed at the adsorption fixture 400 through the first adsorption gas path 210 and the second adsorption gas path 401, which can adsorb and fix the blade 600, so that the blade 600 can rotate with the adsorption spindle 200. Finally, the blade 600 is sharpened by the grinding plate 300. After the sharpening is completed, the vacuum generator can be turned off and the blade 600 can be removed.

[0042] Compared with the prior art, the blade processing device disclosed in this application uses vacuum adsorption to fix the blade 600, eliminating the need for nut locking. The blade 600 can be quickly and easily installed and removed, improving the sharpening efficiency of the blade 600. At the same time, using vacuum adsorption to fix the blade 600 can avoid friction between the nut and the blade 600, which could scratch the blade 600. This ensures the dynamic balance quality and appearance of the blade 600, guarantees the sharpening effect, reduces vibration during the rotation of the blade 600, lowers the risk of the blade 600 chipping, and ensures the quality of the blade 600.

[0043] In a further optimized design, a first guide rail 110 is provided on the base 100, and a first sliding seat 111 is slidably mounted on the first guide rail 110. The grinding plate 300 is mounted on the first sliding seat 111. Specifically, the sliding of the first sliding seat 111 on the first guide rail 110 can be achieved by belt drive, pneumatic / electric / hydraulic cylinder push-pull, or other driving methods. The grinding plate 300 can be detachably mounted on the first sliding seat 111 by vacuum adsorption or other methods to facilitate adjustment of the position of the grinding plate 300 and replacement of the grinding plate 300.

[0044] During the sharpening process of blade 600, after blade 600 is mounted on the adsorption spindle 200, the adsorption spindle 200 drives blade 600 to rotate. Then, the first sliding seat 111 moves on the first guide rail 110, causing the grinding plate 300 to pass through the sharpening position of blade 600. At the same time, blade 600 leaves a sharpening groove on grinding plate 300 parallel to the extending direction of the first guide rail 110. Compared with the technical solution where the grinding plate 300 is fixed, this application can make the sharpening point height of blade 600 consistent by moving the grinding plate 300, that is, it can ensure that the sharpening thickness of blade 600 remains uniform in all circumferential directions, thereby improving the sharpening quality of blade 600.

[0045] In a specific embodiment disclosed in this application, a second guide rail 120 is provided on the base 100, and a second sliding seat 121 is movably provided on the second guide rail 120; a lifting guide rail 130 is provided on the second sliding seat 121, and a lifting sliding seat 131 is slidably provided on the lifting guide rail 130; the adsorption spindle 200 is rotatably provided on the lifting sliding seat 131; the extension directions of any two of the first guide rail 110, the lifting guide rail 130 and the second guide rail 120 are perpendicular. By adjusting the position of the second sliding seat 121 on the second guide rail 120 and the position of the lifting sliding seat 131 on the lifting guide rail 130, the adsorption spindle 200 can be brought close to the grinding plate 300 and ground to sharpen the blade. When the blade 600 is being sharpened, the second sliding seat 121 moves along the second guide rail 120 toward the direction of the first guide rail 110, so that the adsorption spindle 200 reaches a position close to the movement trajectory of the grinding plate 300. Then, the lifting sliding seat 131 slides along the lifting guide rail 130 toward a height position close to the grinding plate 300 until the blade 600 on the adsorption spindle 200 contacts the grinding plate 300 and cuts the grinding plate 300. At the same time, the first sliding seat 111 drives the grinding plate 300 to translate along the first guide rail 110, so that the blade 600 cuts a straight sharpening groove on the grinding plate 300.

[0046] This application configures the position movement structure of the blade 600 during the sharpening process on the adsorption spindle 200 and the grinding plate 300 respectively. Compared with the solution of integrating all the movement structures on the adsorption spindle 200, this simplifies the structure, reduces the load on the drive mechanism in the movement structure, reduces production costs, and ensures the movement accuracy of the relative positions of the adsorption spindle 200 and the grinding plate 300. Specifically, the sliding of the second sliding seat 121 on the second guide rail 120 and the sliding of the lifting sliding seat 131 on the lifting guide rail 130 can be achieved by belt drive, pneumatic / electric / hydraulic cylinder push-pull, etc., which will not be described in detail here.

[0047] In a specific embodiment disclosed in this application, the first adsorption gas path 210 includes an axial gas path 211 and a radial gas path 212. The axial gas path 211 extends axially along the adsorption main shaft 200, and the radial gas path 212 extends radially along the adsorption main shaft 200. One end of the radial gas path 212 is connected to the axial gas path 211, and the other end is connected to the second adsorption gas path 401. When the vacuum generator is activated, a vacuum is drawn at the adsorption fixture 400 through the axial gas path 211, the radial gas path 212, and the second adsorption gas path 401, and the blade 600 is adsorbed. For example, the diameter of the axial gas path 211 can be set to 5mm ± 0.5mm, and the diameter of the radial gas path 212 can be set to 2mm ± 0.5mm.

[0048] To ensure uniform adsorption at all positions of the blade 600, multiple radial air passages 212 are evenly arranged axially around the adsorption main shaft 200, and multiple second adsorption air passages 401 are evenly arranged axially around the adsorption fixture 400. The adsorption main shaft 200 and the adsorption fixture 400 are coaxially arranged, and the radial air passages 212 and the second adsorption air passages 401 are connected in a one-to-one correspondence.

[0049] Referring to Figure 4, to increase the adsorption area and ensure reliable adsorption of the blade 600, an adsorption ring groove 402 is formed on one end face of the adsorption fixture 400. The adsorption ring groove 402 is annular and coaxially arranged with the adsorption main shaft 200, and is connected to each of the second adsorption gas paths 401. The adsorption fixture 400 is used to adsorb the blade 600 through the adsorption ring groove 402. For example, the depth of the adsorption ring groove 402 can be set to 1mm ± 0.5mm to ensure sufficient vacuum gas flow storage, so that the negative pressure formed can stably adsorb the blade 600 onto the adsorption fixture 400.

[0050] To facilitate connection with the vacuum generator, the blade processing device also includes a drive shaft 520 and a vacuum connector 510. Referring to Figures 3 and 5, a mounting base 500 is provided on the base 100. The adsorption spindle 200 is rotatably mounted on the mounting base 500 via a bearing (not shown in the figure). A mounting hole 502 is provided through the mounting base 500. The vacuum connector 510 is rotatably mounted on the mounting base 500, with one end located inside the mounting hole 502. The first adsorption gas path 210 is connected to the vacuum generator through the vacuum connector 510. A connecting gas path 521 is provided through the axial direction of the drive shaft 520. The first end of the drive shaft 520 is connected to the adsorption spindle 200, and the second end is connected to the vacuum connector 510, so that the vacuum connector 510 can rotate with the adsorption spindle 200. The two ends of the connecting gas path 521 are respectively connected to the inner hole of the first adsorption gas path 210 and the vacuum connector 510. During the installation of the blade 600, the vacuum generating device sequentially forms a negative pressure at the end face of the adsorption fixture 400 through the vacuum connector 510, the connecting gas passage 521, the first adsorption gas passage 210, and the second adsorption gas passage 401, thereby adsorbing the blade 600.

[0051] Specifically, vacuum connector 510 is used to connect to a vacuum generator via a rotary bearing (not shown in the figure). During the rotation of the adsorption spindle 200, the rotational power of the adsorption spindle 200 is transmitted to vacuum connector 510 via drive shaft 520. Vacuum connector 510 releases the rotational power through the rotary bearing to prevent the vacuum pipeline between the vacuum generator and vacuum connector 510 from twisting.

[0052] Since the adsorption spindle 200 will drive the vacuum connector 510 to rotate at high speed, in order to avoid overheating of the rotary bearing, as shown in Figure 5, a cooling air inlet 512 is provided on the vacuum connector 510. Cooling gas can be introduced into the cooling air inlet 512 to cool the vacuum connector 510 and prevent the vacuum connector 510 and the rotary bearing from overheating.

[0053] In one embodiment, the first end of the drive shaft 520 is threadedly connected to the first adsorption gas passage 210. Referring to Figure 6, the second end of the drive shaft 520 has a first profile on its circumferential outer wall, and the inner wall of the vacuum connector 510 has a second profile that is opposite to and engages with the first profile. During assembly, the first end of the drive shaft 520 is first threaded onto the adsorption spindle 200, then the vacuum connector 510 is installed into the mounting hole 502, and the second end of the drive shaft 520 is inserted into the vacuum connector 510, so that the first and second profiles are arranged opposite to each other. Finally, the vacuum connector 510 is fixed to the mounting base 500. For example, Figure 6 shows a technical solution in which eight first profiles are connected end-to-end on the circumferential outer wall of the second end of the drive shaft 520, and eight second profiles are connected end-to-end on the inner wall of the vacuum connector 510.

[0054] To ensure stable adsorption of the blade 600, a seal 522 is provided between the second end of the drive shaft 520 and the vacuum connector 510. The seal 522 includes, but is not limited to, sealing rings and gaskets, to achieve a sealed connection between the drive shaft 520 and the vacuum connector 510. Correspondingly, a sealing ring groove can be provided on the inner wall of the vacuum connector 510 to facilitate the positioning and installation of the seal 522.

[0055] To reduce the vibration impact caused by geometric and assembly errors between the vacuum connector 510 and the adsorption spindle 200, as shown in Figure 5, in some embodiments, the vacuum connector 510 is mounted on the mounting base 500 via a mounting clamp 501. A floating groove 511 is provided on the circumferential outer wall of the vacuum connector 510, and the mounting clamp 501 is slidably engaged within the floating groove 511 and connected to the mounting base 500. During assembly, the mounting clamp 501 is fixed to the mounting base 500 by screws or other means. As the adsorption spindle 200 rotates, the vacuum connector 510 can float relative to the mounting clamp 501, the mounting base 500, and the adsorption spindle 200 via the floating groove 511 to achieve balance, thus preventing excessive vibration of the adsorption spindle 200 and affecting the sharpening of the blade 600.

[0056] Referring to Figure 4, the adsorption fixture 400 is provided with a through hole for fitting onto the end of the adsorption spindle 200. The connection between the adsorption fixture 400 and the adsorption spindle 200 can be mechanically sealed by precision machining to prevent leakage at the connection between the first adsorption gas path 210 and the second adsorption gas path 401.

[0057] To facilitate the positioning and installation of the blade 600, referring to Figure 4, a positioning protrusion 403 is provided on the adsorption fixture 400 for the inner hole of the blade 600 to pass through. For example, the length of the positioning protrusion 403 can be 2mm ± 0.5mm.

[0058] The design is further optimized by providing an external thread on the outer wall of the end of the positioning protrusion 403 away from the adsorption fixture 400. The external thread on the positioning protrusion 403 is used to connect with the disassembly and assembly tool, which facilitates the disassembly and assembly of the adsorption fixture 400 on the adsorption spindle 200 by the disassembly and assembly tool.

[0059] In a specific implementation process, a vacuum is generated by a vacuum generator and travels along the axial direction of the adsorption spindle 200 through the first adsorption gas path 210 to the adsorption fixture 400. After passing through the second adsorption gas path 401 on the adsorption fixture 400, a vacuum negative pressure cavity is formed at the adsorption ring groove 402 on the end face of the adsorption fixture 400, thereby generating a vacuum adsorption force to fix the blade 600. At this time, the adsorption spindle 200 rotates at 40,000 rpm or other speeds to complete the sharpening action of the blade 600. After the blade 600 is sharpened, the connection between the adsorption spindle 200 and the vacuum generator is temporarily disconnected, the sharpened blade 600 is removed, and a new blade 600 to be sharpened is installed on the adsorption fixture 400. At this time, the connection between the adsorption spindle 200 and the vacuum generator is restored, and the next round of blade 600 sharpening can be performed.

[0060] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Specific technical means in some embodiments may be incorporated, in whole or in part, into another embodiment unless explicitly excluded by another embodiment. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A blade processing device, characterized in that, include: Base (100); An adsorption spindle (200) is rotatably mounted on the base (100) and has a first adsorption gas passage (210). One end of the adsorption spindle (200) is provided with an adsorption fixture (400). A second adsorption gas passage (401) is provided through the adsorption fixture (400) and communicates with the first end of the first adsorption gas passage (210). The adsorption fixture (400) is used to adsorb the blade (600) through the second adsorption gas passage (401). A vacuum connector (510) is provided, the second end of the first adsorption gas path (210) is used to communicate with a vacuum generating device through the vacuum connector (510). The vacuum connector (510) is set on the base (100) by a mounting clamp (501). A floating groove (511) is provided on the circumferential outer wall of the vacuum connector (510). The floating groove (511) extends along the axial direction of the vacuum connector (510). The mounting clamp (501) is slidably engaged in the floating groove (511) along the axial direction of the vacuum connector (510) and connected to the base (100). A grinding plate (300) is disposed on the base (100) for grinding and sharpening the blade (600). A first guide rail (110) is disposed on the base (100), and a first sliding seat (111) is slidably disposed on the first guide rail (110). The grinding plate (300) is disposed on the first sliding seat (111). When the blade (600) is sharpened, the adsorption spindle (200) drives the blade (600) to rotate, and the first sliding seat (111) slides on the first guide rail (110) and causes the grinding plate (300) to pass through the sharpening position of the blade (600).

2. The blade processing apparatus according to claim 1, characterized in that, The base (100) is provided with a second guide rail (120), and a second sliding seat (121) is movably provided on the second guide rail (120); The second sliding seat (121) is provided with a lifting guide rail (130), and the lifting sliding seat (131) is slidably provided on the lifting guide rail (130). The adsorption main shaft (200) is rotatably provided on the lifting sliding seat (131). The extension directions of any two of the first guide rail (110), the lifting guide rail (130) and the second guide rail (120) are perpendicular.

3. The blade processing apparatus according to claim 1, characterized in that, The first adsorption gas path (210) includes an axial gas path (211) and a radial gas path (212); The axial gas path (211) extends along the axial direction of the adsorption main shaft (200), and the radial gas path (212) extends along the radial direction of the adsorption main shaft (200). One end of the radial gas path (212) is connected to the axial gas path (211), and the other end is connected to the second adsorption gas path (401).

4. The blade processing apparatus according to claim 3, characterized in that, The radial air passages (212) are a plurality of ones evenly arranged axially around the adsorption main shaft (200), and the second adsorption air passages (401) are a plurality of ones evenly arranged axially around the adsorption fixture (400), and the radial air passages (212) and the second adsorption air passages (401) are connected in a one-to-one correspondence.

5. The blade processing apparatus according to claim 4, characterized in that, The adsorption fixture (400) has an adsorption ring groove (402) on one end face. The adsorption ring groove (402) is annular and coaxially arranged with the adsorption main shaft (200), and is connected to each of the second adsorption gas passages (401). The adsorption fixture (400) is used to adsorb the blade (600) through the adsorption ring groove (402).

6. The blade processing apparatus according to claim 1, characterized in that, It also includes a drive shaft (520); A mounting base (500) is provided on the base (100). The adsorption spindle (200) is rotatably mounted on the mounting base (500). A mounting hole (502) is provided through the mounting base (500). The mounting clamp (501) is connected to the mounting base (500). The vacuum connector (510) is rotatably mounted on the mounting base (500), and one end is located in the mounting hole (502). The vacuum connector (510) is used to connect to a vacuum generator through a rotary bearing. The drive shaft (520) has an axially extending air passage (521). The first end of the drive shaft (520) is connected to the adsorption main shaft (200), and the second end is connected to the vacuum connector (510) so that the vacuum connector (510) rotates with the adsorption main shaft (200). The two ends of the air passage (521) are respectively connected to the first adsorption air passage (210) and the inner hole of the vacuum connector (510).

7. The blade processing apparatus according to claim 6, characterized in that, The first end of the drive shaft (520) is threadedly connected to the first adsorption gas passage (210); and / or, The second end of the drive shaft (520) has a first profile on its outer circumferential wall, and the inner wall of the vacuum connector (510) has a second profile that fits with the first profile.

8. The blade processing apparatus according to claim 1, characterized in that, The adsorption fixture (400) is provided with a positioning protrusion (403) for passing through the inner hole of the blade (600).

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