Vacuum coating device

Abstract

The present invention relates to a vacuum coating device, comprising a plurality of vacuum coating units and a support. The vacuum coating units are respectively arranged on the left and right sides of the support, or the plurality of vacuum coating units are arranged in the vertical direction of the support. When the vacuum coating units are respectively arranged on the left and right sides of the support, the vacuum coating unit located on one of the left and right sides of the support extends obliquely downward from the top to the bottom thereof in the direction away from the vacuum coating unit located on the other side of the support. The support comprises a bottom support member, a longitudinal support member, a transverse support member, and connecting members. The longitudinal support member is arranged on the bottom support member, the transverse support member is connected to and perpendicular to the longitudinal support member, the connecting members are arranged at the left end and the right end of the transverse support member, the connecting members are connected to the vacuum coating units, and the connecting members are arranged obliquely. The vacuum coating device of the present invention increases production capacity in the effective utilization space.

Description

A vacuum coating device Technical Field

[0001] This invention relates to a vacuum coating apparatus. Background Technology

[0002] PVD vacuum coating equipment is suitable for coating processes of perovskite, BC cells and other photovoltaic cells. The PVD vacuum coating equipment mainly includes a high vacuum coating unit, a transmission device and support legs. The high vacuum coating unit is equipped with a molecular pump and a rotating cathode. The high vacuum coating unit is set in a horizontal direction. The number of molecular pumps and rotating cathodes in the high vacuum coating unit is relatively limited, and the production capacity per unit volume is relatively small. Summary of the Invention

[0003] The purpose of this invention is to provide a vacuum coating apparatus to solve the problem of low production capacity of existing vacuum coating apparatuses.

[0004] To achieve the above objectives, the present invention employs the following technical solution:

[0005] A vacuum coating apparatus includes multiple vacuum coating units and a support body. Vacuum coating units are respectively disposed on the left and right sides of the support body, or multiple vacuum coating units are disposed along the vertical direction of the support body. When vacuum coating units are disposed on the left and right sides of the support body, the vacuum coating unit located on one of the left and right sides of the support body extends downwards at an angle from its top to its bottom away from the vacuum coating unit located on the other side of the support body. The support body includes a bottom support, a longitudinal support, a transverse support, and a connector. The longitudinal support is disposed on the bottom support. The transverse support is connected to and perpendicular to the longitudinal support. The left and right ends of the transverse support are located on the left and right sides of the longitudinal support, respectively. Connectors are disposed on both the left and right ends of the transverse support. The connectors are connected to the vacuum coating units and are inclined in the same direction as the corresponding vacuum coating unit.

[0006] According to some embodiments of the present invention, the device further includes a support member connected to the bottom of the connector and abutting against the bottom of the vacuum coating unit.

[0007] According to some embodiments of the present invention, the support member is perpendicular to the connector. According to some embodiments of the present invention, the connector is provided with a guide hole, the guide hole being oval in shape, and the guide hole extending along the inclined direction of the connector.

[0008] According to some embodiments of the present invention, the transverse support member comprises two straight segments, one segment disposed on the left side of the longitudinal support member and the other segment disposed on the right side of the longitudinal support member.

[0009] According to some embodiments of the present invention, a plurality of longitudinal supports are provided, and the plurality of longitudinal supports are arranged sequentially along a direction perpendicular to the transverse supports.

[0010] According to some embodiments of the invention, the device further includes a first reinforcing member for connecting two adjacent longitudinal supports.

[0011] According to some embodiments of the present invention, the device further includes a second reinforcing member and a third reinforcing member, the second reinforcing member being used to connect the lateral support member and the bottom support member, and the third reinforcing member being used to connect the second reinforcing member and the bottom support member, the third reinforcing member being triangular in shape.

[0012] According to some embodiments of the present invention, multiple transverse supports are provided on the same longitudinal support member, and the multiple transverse supports are arranged sequentially along the height direction of the longitudinal support member, wherein the length of the transverse support member located above is less than the length of the transverse support member located below it.

[0013] According to some embodiments of the present invention, for different longitudinal support members, the transverse support members are provided on the longitudinal support members, and a plurality of the transverse support members are distributed along the front-back direction.

[0014] According to some embodiments of the present invention, the bottom support member includes a plurality of crossbeams and a plurality of longitudinal beams, the crossbeams being connected to and perpendicular to the longitudinal beams, and the bottom support member being quadrilateral in shape.

[0015] According to some embodiments of the invention, the device further includes a fourth reinforcing member for connecting two adjacent crossbeams and longitudinal beams, the fourth reinforcing member being triangular in shape.

[0016] According to some embodiments of the present invention, when multiple vacuum coating units are arranged along the vertical direction of the support, each vacuum coating unit includes a molecular pump and a rotating cathode target. The support has a receiving cavity, and the support has an upper side and a lower side, a front side and a rear side, and a left side and a right side arranged opposite to each other. A partition is provided in the receiving cavity to divide the receiving cavity into an upper coating cavity and a lower coating cavity. Multiple molecular pumps and multiple rotating cathode targets are arranged on the upper side of the support, and multiple molecular pumps and multiple rotating cathode targets are arranged on the lower side of the support.

[0017] According to some embodiments of the present invention, an upper support plate is provided on the upper side of the support body, and a lower support plate is provided on the lower side of the support body. Each of the upper and lower support plates has a through hole corresponding to a specific chamber. The through holes communicate with the corresponding chambers. Multiple protrusions are provided on the surfaces of the upper and lower support plates away from each other. The protrusions are located between adjacent through holes. A molecular pump placement area and a cathode placement area are formed on the front and rear sides of the protrusions on the support plate, respectively. A molecular pump placement plate is provided in the molecular pump placement area, and an opening communicating with the chamber is provided on the molecular pump placement area. A cathode placement plate is provided in the cathode placement area, and an opening communicating with the chamber is provided on the cathode placement area.

[0018] Another technical solution adopted in this invention is:

[0019] A vacuum coating apparatus, the apparatus comprising multiple vacuum coating units and a support body,

[0020] Vacuum coating units are respectively provided on the left and right sides of the support, or multiple vacuum coating units are arranged along the vertical direction of the support.

[0021] When the vacuum coating units are respectively arranged on the left and right sides of the support body, the vacuum coating unit located on one of the left and right sides of the support body extends downwards from its top to its bottom in a direction away from the vacuum coating unit located on the other side of the support body. The support body includes a bottom support, a longitudinal support, a transverse support, and a connector. The longitudinal support is arranged on the bottom support. The transverse support is connected to the longitudinal support and is perpendicular to it. The left and right ends of the transverse support are located on the left and right sides of the longitudinal support, respectively. The left and right ends of the transverse support are each provided with a connector. The connector is connected to the vacuum coating unit. The connector is inclined, and the inclination direction of the connector is consistent with the inclination direction of the corresponding vacuum coating unit. The connector is provided with a guide hole. The guide hole is oval-shaped and extends along the inclination direction of the connector.

[0022] The bottom support includes multiple horizontal beams and multiple vertical beams, the horizontal beams are connected to and perpendicular to the vertical beams, and the bottom support is quadrilateral.

[0023] The device further includes a support member, a first reinforcing member, a second reinforcing member, a third reinforcing member, and a fourth reinforcing member. The support member is connected to the bottom of the connecting member and abuts against the bottom of the vacuum coating unit. The first reinforcing member is used to connect two adjacent longitudinal support members. The second reinforcing member is used to connect the transverse support member and the bottom support member. The third reinforcing member is used to connect the second reinforcing member and the bottom support member, and the third reinforcing member is triangular in shape. The fourth reinforcing member is used to connect two adjacent crossbeams and longitudinal beams, and the fourth reinforcing member is triangular in shape.

[0024] Alternatively, when multiple vacuum coating units are arranged along the vertical direction of the support, each vacuum coating unit includes a molecular pump and a rotating cathode target. The support has a receiving cavity, and a partition is provided in the receiving cavity to divide the receiving cavity into an upper coating cavity and a lower coating cavity. Multiple molecular pumps and multiple rotating cathode targets are provided on the upper side of the support, and multiple molecular pumps and multiple rotating cathode targets are provided on the lower side of the support.

[0025] According to some embodiments of the present invention, an upper support plate is provided on the upper side of the support body, and a lower support plate is provided on the lower side of the support body. Each of the upper and lower support plates has a through hole corresponding to a specific chamber. The through holes communicate with the corresponding chambers. Multiple protrusions are provided on the surfaces of the upper and lower support plates away from each other. The protrusions are located between adjacent through holes. A molecular pump placement area and a cathode placement area are formed on the front and rear sides of the protrusions on the support plate, respectively. A molecular pump placement plate is provided in the molecular pump placement area, and an opening communicating with the chamber is provided on the molecular pump placement area. A cathode placement plate is provided in the cathode placement area, and an opening communicating with the chamber is provided on the cathode placement area.

[0026] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0027] The vacuum coating apparatus provided by the present invention includes a support body and multiple vacuum coating units. Vacuum coating units are respectively arranged on the left and right sides of the support body. The support body supports and fixes the vacuum coating units, preventing the silicon wafers from falling off during the transport process and improving the production capacity within the effective usable area.

[0028] The vacuum coating apparatus provided by this invention has multiple vacuum coating units arranged along the vertical direction of the support. Within a unit volume, the number of vacuum coating units, molecular pumps, and rotating cathodes increases, thereby greatly improving the production capacity within the effective usable area. Attached Figure Description

[0029] Figure 1 is a structural diagram of a vacuum coating apparatus according to an embodiment of the present invention from a first perspective.

[0030] Figure 2 is an enlarged view of the boss in Figure 1;

[0031] Figure 3 is a structural diagram of a vacuum coating apparatus according to an embodiment of the present invention from a second perspective.

[0032] Figure 4 is a structural diagram of the support body of a vacuum coating apparatus according to an embodiment of the present invention from a first perspective.

[0033] Figure 5 is a structural diagram of the support body of a vacuum coating apparatus according to an embodiment of the present invention from a second perspective;

[0034] Figure 6 is a structural diagram of the support body of a vacuum coating apparatus according to an embodiment of the present invention from a third perspective;

[0035] Figure 7 is a structural diagram of the internal structure of the vacuum chamber of a vacuum coating apparatus according to an embodiment of the present invention;

[0036] Figure 8 is a structural diagram of the support body of a vacuum coating apparatus according to another embodiment of the present invention from a first perspective.

[0037] Figure 9 is a structural diagram of the protrusion in Figure 8;

[0038] Figure 10 is a structural diagram of the support body of a vacuum coating apparatus according to another embodiment of the present invention from a second perspective.

[0039] In the attached diagrams above:

[0040] 1-Vacuum cavity, 101-Support plate, 102-Boss, 103-Reinforcing plate;

[0041] 2-Support body, 201-Longitudinal support, 202-Transverse support, 203-Connector, 2031-Guide hole, 204-Supporting component, 205-First reinforcing member, 206-Second reinforcing member, 207-Third reinforcing member, 208-Fourth reinforcing member, 209-Crossbeam, 210-Longitudinal beam;

[0042] 211-Upper support plate, 212-Lower support plate, 213-Protrusion, 214-Molecular pump placement plate, 215-Cathode placement plate, 216-Support leg;

[0043] 4-Molecular pump; 5-Cathode target;

[0044] 6-Transmission mechanism, 601-Drive shaft, 602-Drive gear, 603-Drive belt, 604-Drive component. Detailed Implementation

[0045] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0046] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0047] The vacuum coating apparatus includes multiple vacuum coating units and a support body 2. Vacuum coating units are respectively arranged on the left and right sides of the support body 2, or multiple vacuum coating units are arranged along the vertical direction of the support body 2. Within a unit volume, the number of vacuum coating units, molecular pumps, and rotating cathodes increases, thereby significantly improving the production capacity within the effective usable area.

[0048] In one embodiment, referring to Figures 1 to 7, vacuum coating units are respectively provided on the left and right sides of the support 2. The vacuum coating units are inclined. The vacuum coating unit located on the left or right side of the support 2 extends downward from its top to its bottom in a direction away from the vacuum coating unit located on the other side of the support 2. That is, the vacuum coating unit located on the left side of the support 2 extends downward from its top to its bottom in a direction away from the vacuum coating unit located on the right side of the support 2, and the vacuum coating unit located on the right side of the support 2 extends downward from its top to its bottom in a direction away from the vacuum coating unit located on the left side of the support 2.

[0049] When vacuum coating units are respectively provided on the left and right sides of the support body 2, the support body 2 includes a bottom support, a longitudinal support 201, a transverse support 202, and a connector 203. The longitudinal support 201 is provided on the bottom support and extends along the vertical direction (Z-axis). The transverse support 202 extends along the X-axis and is connected to and perpendicular to the longitudinal support 201. The left and right ends of the transverse support 202 are located on the left and right sides of the longitudinal support 201, respectively. The transverse support 202 is integral and passes through the longitudinal support 201. Alternatively, the transverse support 202 may include two sections, one connected to the left side of the longitudinal support 201 and the other connected to the right side of the longitudinal support 201. The length of the transverse support 202 on the left side of the longitudinal support 201 is preferably equal to the length of the transverse support 202 on the right side of the longitudinal support 201, thus forming a symmetrical structure. Both the left and right ends of the transverse support 202 are provided with connectors 203, which are connected to the vacuum coating unit. The connectors 203 are inclined, and the inclination direction of the connectors 203 is consistent with the inclination direction of the corresponding vacuum coating unit. The connectors 203 are provided to fix the vacuum coating unit.

[0050] In this example, the tilt angle of the vacuum coating unit relative to the vertical center line is greater than 0 and less than or equal to 60°, preferably 30°, which can effectively prevent the silicon wafer from falling off during the transmission process.

[0051] The device also includes a support member 204, which is connected to the bottom of the connector 203. The support member 204 abuts against the bottom of the vacuum coating unit to further support the vacuum coating unit. Referring to Figures 4-5, the connector 203 is a square plate, the support member 204 is a square plate, and the support member 204 and the connector 203 form a space perpendicular to each other to support the vacuum coating unit.

[0052] In some embodiments, the connector 203 and the corresponding vacuum coating unit are provided with corresponding mounting holes. The connector 203 is connected to the vacuum coating unit by placing fasteners in the mounting holes. The fasteners are bolt and nut assemblies, which facilitates the installation and disassembly of the vacuum coating unit.

[0053] In a preferred embodiment, the connector 203 is provided with a guide hole 2031. The guide hole 2031 has a certain length, such as being oval-shaped. The guide hole 2031 extends along the inclined direction of the connector 203, and the vacuum coating unit is adjustablely positioned within the guide hole 2031. When connecting the vacuum coating unit to the connector 203, a suitable position of the fastener corresponding to the guide hole 2031 is selected, and then the fastener is installed to fix the vacuum coating unit to the connector 203, thereby adjusting the vertical position of the vacuum coating unit.

[0054] In this example, both the left and right ends of the transverse support 202 are inclined surfaces. The left end of the transverse support 202 extends downwards from its top to its bottom in a direction away from its right end, and the right end of the transverse support 202 extends downwards from its top to its bottom in a direction away from its left end. The inclination direction of the left end of the transverse support 202 is consistent with the inclination direction of the vacuum coating unit located on the left and the inclination direction of the connector 203 above it. The inclination direction of the right end of the transverse support 202 is consistent with the inclination direction of the vacuum coating unit located on the right and the inclination direction of the connector 203 above it.

[0055] In this example, multiple longitudinal support members 201 are provided, arranged sequentially along a direction perpendicular to the transverse support members 202 (front-to-back direction), with a gap maintained between adjacent longitudinal support members 201. Multiple transverse support members 202 are also provided, with multiple transverse support members 202 mounted on the same longitudinal support member 201, arranged sequentially along the height direction of the longitudinal support member 201 in the vertical direction. For the same longitudinal support member 201, the length of the uppermost transverse support member 202 is less than the length of the lowermost transverse support member 202; that is, the length of the uppermost transverse support member 202 is less than the length of the lowermost transverse support member 202. Furthermore, the left end faces of all transverse support members 202 are inclined surfaces, with the same inclination direction. Similarly, the right end faces of all transverse support members 202 are also inclined surfaces, with the same inclination direction. For different longitudinal support members 201, at least one longitudinal support member 201 is provided with a transverse support member 202, thus forming multiple transverse support members 202, which are distributed along the front-back direction. When there are multiple longitudinal support members 201 and multiple transverse support members 202, the support member 204 is connected to the connector 203 on the lowermost transverse support member 202.

[0056] In some embodiments, the device further includes a first reinforcing member 205, which connects two adjacent longitudinal support members 201. The first reinforcing member 205 extends along the Y-axis direction, and its placement enhances the stability and strength of the entire support body 2. When multiple longitudinal support members 201 are provided, a first reinforcing member 205 is provided between every two adjacent longitudinal support members 201, and multiple first reinforcing members 205 at the same height are arranged in a straight line. Multiple first reinforcing members 205 can be provided vertically and between two adjacent longitudinal support members 201 to further enhance the stability and strength of the entire support body 2.

[0057] In some embodiments, the upper end of the longitudinal support member 201 has a groove, and the uppermost transverse support member 202 is partially disposed in this groove, which serves to position and fix the transverse support member 202. The uppermost first reinforcing member 205 also has a groove, and the uppermost transverse support member 202 is partially disposed in this groove. The upper surface of the uppermost first reinforcing member 205 may be flush with the upper surface of the uppermost first reinforcing member 205.

[0058] In some embodiments, the device further includes a second reinforcing member 206, which connects the transverse support member 202 and the bottom support member. The extension direction of the second reinforcing member 206 is parallel to the extension direction of the longitudinal support member 201. Multiple second reinforcing members 206 are provided, distributed along the left-right direction and arranged in parallel. The second reinforcing members 206 enhance the strength of the entire support body 2.

[0059] The device also includes a third reinforcing member 207, which connects the second reinforcing member 206 and the bottom support member. The third reinforcing member 207 is triangular in shape, with its two adjacent sides connected to the second reinforcing member 206 and the bottom support member, respectively. The cross-section of the third reinforcing member 207 is preferably a right-angled triangle. In some embodiments, the third reinforcing member 207 is located on the side of the second reinforcing member 206 away from the longitudinal support member 201.

[0060] The bottom support includes multiple crossbeams 209 and multiple longitudinal beams 210. The crossbeams 209 are parallel to the transverse support 202, and the longitudinal beams 210 are connected to and perpendicular to the crossbeams 209, extending along the Y-axis. The bottom support is quadrilateral in shape. The device also includes a fourth reinforcing member 208, which connects two adjacent crossbeams 209 and longitudinal beams 210. The fourth reinforcing member 208 is preferably triangular. The fourth reinforcing member 208 increases the strength of the bottom support in supporting the longitudinal support 201, thereby improving the overall strength.

[0061] In this example, the vacuum coating unit includes a vacuum chamber 1, a molecular pump 4, and a rotating cathode target 5. The vacuum chamber 1 has an upper and lower side, a front and rear side, and a left and right side arranged opposite each other. The vacuum coating unit includes multiple chambers, which are formed by reinforcing plates 103 spaced apart within the vacuum coating unit. The multiple chambers are distributed along the front-to-back direction, and the reinforcing plates 103 are vertically arranged. The multiple reinforcing plates 103 are distributed along the front-to-back direction and have perforations that allow the multiple chambers to be interconnected. The perforations are for the passage of a carrier. The front and rear ends of the vacuum chamber 1 of the vacuum coating unit have openings. The carrier (used to transport silicon wafers) passes through the front opening, the interior, and the rear opening of the vacuum chamber 1 of the vacuum coating unit in sequence. The multiple reinforcing plates 103 increase the overall strength, facilitate the formation of multiple molecular pump placement areas and cathode placement areas, and enable mass silicon wafer processing, increasing production capacity.

[0062] A support plate 101 is provided on the upper side of the vacuum chamber 1 of the vacuum coating unit. The support plate 101 has through holes corresponding to each chamber, that is, one through hole corresponds to one chamber and the through hole communicates with the corresponding chamber. The support plate 101 is connected to the reinforcing plate 103. The upper surface of the support plate 101 is provided with a plurality of protrusions 102 protruding from its upper surface. The protrusions 102 are located between two adjacent through holes. The upper surface of the protrusions 102 is higher than the upper surface of the support plate 101. A molecular pump placement area and a cathode placement area are formed on the front and rear sides of the protrusions 102 on the support plate 101, that is, the molecular pump placement area and the cathode placement area are arranged adjacent to each other. The molecular pump placement area corresponds to one chamber, and the cathode placement area corresponds to one chamber. The molecular pump placement area is provided with a molecular pump placement plate 214, which has an opening that communicates with the chamber. The cathode placement area is provided with a cathode placement plate 215, which has an opening that communicates with the chamber.

[0063] In this example, the upper surfaces of the support plate 101 located in the molecular pump placement area and the cathode placement area are both horizontal and have a high degree of flatness to ensure the overall airtightness of the vacuum coating unit after the molecular pump and cathode are placed. At the same time, it is easy to process, as there is no need to process the entire support plate 101, only the upper surfaces of the support plate 101 located in the molecular pump placement area and the cathode placement area are processed, which saves costs and provides better airtightness.

[0064] In another embodiment, referring to Figures 8 to 10, multiple vacuum coating units are arranged along the vertical direction of the support 2. Each vacuum coating unit includes a molecular pump 4 and a rotating cathode target 5. The support 2 has a receiving cavity, with multiple support legs 216 disposed below the receiving cavity. The support 2 has an upper and lower side, a front and rear side, and a left and right side arranged opposite to each other. A horizontally extending partition is disposed within the receiving cavity to divide the cavity into an upper coating cavity and a lower coating cavity. The upper coating cavity is located above the lower coating cavity. The upper and lower coating cavities are independent of each other, and silicon wafers are coated within their respective cavities. Multiple molecular pumps 4 and multiple rotating cathode targets 5 are disposed on the upper side and the lower side of the support 2.

[0065] Both the upper and lower coating cavities include multiple chambers, which are formed by reinforcing plates spaced apart within the accommodating cavity. The multiple chambers are distributed along the front-to-back direction. The reinforcing plates are arranged vertically, and the multiple reinforcing plates are distributed along the front-to-back direction. The reinforcing plates have perforations, which allow the multiple chambers to pass through. The perforations are used for the carrier to pass through. The front and rear ends of the support body 2 have openings, and the carrier (used to transport silicon wafers) passes through the opening at the front end, the interior, and the opening at the rear end of the support body 2 in sequence.

[0066] An upper support plate 211 is provided on the upper side of the support body 2, and a lower support plate 212 is provided on the lower side of the support body 2. Each of the upper and lower support plates 211 and 212 has through holes corresponding to each chamber, meaning one through hole corresponds to one chamber and the through hole communicates with the corresponding chamber. The upper and lower support plates 211 and 212 are respectively connected to corresponding reinforcing plates. Multiple protrusions 213 are provided on the surfaces of the upper and lower support plates 211 and 212 away from each other. The protrusions 213 are located between two adjacent through holes. In this configuration, the upper support plate 211 and the lower support plate 212 each form a molecular pump placement area and a cathode placement area on their respective front and rear sides of the protrusion 213, i.e., the molecular pump placement area and the cathode placement area are arranged adjacent to each other. Each molecular pump placement area corresponds to a chamber, and each cathode placement area corresponds to a chamber. The molecular pump placement area is provided with a molecular pump placement plate 214, which has an opening communicating with the chamber. Similarly, the cathode placement area is provided with a cathode placement plate 215, which also has an opening communicating with the chamber. The protrusion 213 separates the molecular pump placement area and the cathode placement area, facilitating positioning and identification, and allowing for the separate placement of the molecular pump placement area and the cathode assembly in the respective areas.

[0067] In this example, two layers, an upper coating chamber and a lower coating chamber, are set up. The two-layer structure can simultaneously perform magnetic sputtering electroplating on two sets of substrates, achieving a doubling of production capacity within the effective usable area.

[0068] Both embodiments of the device include a conveying mechanism 6, which is used to drive the carrier to move along the direction of the molecular pump and the cathode target. The conveying mechanism 6 includes one or more first driving components and one or more second driving components. The first driving components and the second driving components are respectively disposed on the left and right sides of the vacuum chamber 1. The first driving components and the second driving components correspond one-to-one. Both the first driving components and the second driving components include a driving element 604, multiple transmission shafts 601, and multiple transmission units. One end of the transmission shaft 601 is engaged with the carrier located in the vacuum chamber 1, and the other end of the transmission shaft 601 can extend to the outside of the vacuum coating unit. The other ends of two adjacent transmission shafts 601 located on the same side of the vacuum chamber 1 or the support of the vacuum coating unit are connected through the transmission unit. The driving element is connected to a transmission shaft 601. Both the transmission unit and the driving element are located outside the vacuum chamber 1.

[0069] Each transmission unit includes a transmission gear 602 and a transmission belt. One transmission gear 602 is mounted on the outermost transmission shaft 601, while two transmission gears 602 are mounted on the other transmission shafts 601. A transmission belt is wound around the transmission gears 602 on adjacent transmission shafts 601. The end of the transmission shaft 601 with the transmission gear 602, the transmission gear 602, and the transmission belt are all located outside the vacuum coating unit to prevent damage to the drive components, transmission gears 602, and transmission belt during coating, extending the service life of the transmission mechanism. This also facilitates replacement of the transmission mechanism and makes operation convenient and quick. A roller is mounted on the end of the transmission shaft 601 away from the transmission gear 602. This roller is located within the vacuum coating unit or support body and cooperates with the carrier.

[0070] The drive unit is located outside the vacuum chamber 1, and one end of the drive shaft 601 with the drive gear 602 is located outside the vacuum chamber 1 (both the drive gear 602 and the drive belt 603 are located outside the vacuum chamber 1). This prevents damage to the drive unit, drive gear, and drive belt during coating, extends the service life of the transmission mechanism, and facilitates the replacement of the transmission mechanism, making operation convenient and quick.

[0071] The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be construed as limiting the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A vacuum coating apparatus, characterized in that, The device includes multiple vacuum coating units and a support body. Vacuum coating units are respectively arranged on the left and right sides of the support body, or multiple vacuum coating units are arranged along the vertical direction of the support body. When vacuum coating units are arranged on the left and right sides of the support body, the vacuum coating unit located on one of the left or right sides of the support body extends downwards at an angle from its top to its bottom away from the vacuum coating unit located on the other side of the support body. The support body includes a bottom support, a longitudinal support, a transverse support, and a connector. The longitudinal support is arranged on the bottom support, and the transverse support is connected to and perpendicular to the longitudinal support. The left and right ends of the transverse support are located on the left and right sides of the longitudinal support, respectively. Connectors are provided on both the left and right ends of the transverse support. The connectors are connected to the vacuum coating units, and the connectors are inclined in the same direction as the corresponding vacuum coating unit.

2. The vacuum coating apparatus according to claim 1, characterized in that, The device further includes a support member connected to the bottom of the connector and abutting against the bottom of the vacuum coating unit.

3. The vacuum coating apparatus according to claim 2, characterized in that, The supporting member is perpendicular to the connecting member.

4. The vacuum coating apparatus according to claim 1, characterized in that, The connector is provided with a guide hole, which is oval in shape and extends along the inclined direction of the connector.

5. The vacuum coating apparatus according to claim 1, characterized in that, The transverse support on the same longitudinal support includes two straight segments, one segment located on the left side of the longitudinal support and the other segment located on the right side of the longitudinal support.

6. The vacuum coating apparatus according to claim 1, characterized in that, Multiple longitudinal support members are provided, and the multiple longitudinal support members are arranged sequentially along a direction perpendicular to the transverse support members.

7. The vacuum coating apparatus according to claim 6, characterized in that, The device further includes a first reinforcing member for connecting two adjacent longitudinal support members.

8. The vacuum coating apparatus according to claim 1, characterized in that, The device further includes a second reinforcing member and a third reinforcing member. The second reinforcing member is used to connect the lateral support member and the bottom support member, and the third reinforcing member is used to connect the second reinforcing member and the bottom support member. The third reinforcing member is triangular in shape.

9. The vacuum coating apparatus according to claim 1, characterized in that, On the same longitudinal support member, multiple transverse support members are provided. The multiple transverse support members are arranged sequentially along the height direction of the longitudinal support member, and the length of the transverse support member located above is less than the length of the transverse support member located below it.

10. The vacuum coating apparatus according to claim 1, characterized in that, For different longitudinal support members, the transverse support members are provided on the longitudinal support members, and multiple transverse support members are distributed along the front-back direction.

11. The vacuum coating apparatus according to claim 1, characterized in that, The bottom support includes multiple horizontal beams and multiple vertical beams, the horizontal beams are connected to and perpendicular to the vertical beams, and the bottom support is quadrilateral. The device further includes a fourth reinforcing member, which is used to connect two adjacent crossbeams and longitudinal beams, and the fourth reinforcing member is triangular in shape.

12. The vacuum coating apparatus according to claim 1, characterized in that, When multiple vacuum coating units are arranged along the vertical direction of the support, each vacuum coating unit includes a molecular pump and a rotating cathode target. The support has a receiving cavity, and a partition is provided in the receiving cavity to divide the receiving cavity into an upper coating cavity and a lower coating cavity. Multiple molecular pumps and multiple rotating cathode targets are arranged on the upper side of the support, and multiple molecular pumps and multiple rotating cathode targets are arranged on the lower side of the support.

13. The vacuum coating apparatus according to claim 12, characterized in that, The support body has an upper support plate on its upper side and a lower support plate on its lower side. Each of the upper and lower support plates has through holes corresponding to its respective chamber. The surfaces of the upper and lower support plates away from each other have multiple protrusions. These protrusions are located between adjacent through holes. A molecular pump placement area and a cathode placement area are formed on the front and rear sides of the protrusions on the support plates, respectively. A molecular pump placement plate is provided in the molecular pump placement area, and the molecular pump placement plate has an opening that communicates with the chamber. Similarly, a cathode placement plate is provided in the cathode placement area, and the cathode placement plate has an opening that communicates with the chamber.

14. A vacuum coating apparatus, characterized in that, The device includes multiple vacuum coating units and a support body. The vacuum coating units are respectively arranged on the left and right sides of the support body, or multiple vacuum coating units are arranged along the vertical direction of the support body. When the vacuum coating units are respectively arranged on the left and right sides of the support body, the vacuum coating unit located on one of the left and right sides of the support body extends downward from its top to its bottom in a direction away from the vacuum coating unit located on the other side of the support body. The support body includes a bottom support, a longitudinal support, a transverse support, and a connector. The longitudinal support is arranged on the bottom support. The transverse support is connected to the longitudinal support and is perpendicular to it. The left and right ends of the transverse support are located on the left and right sides of the longitudinal support, respectively. The left and right ends of the transverse support are both provided with the connector. The connector is connected to the vacuum coating unit. The connector is inclined. The inclination direction of the connector is consistent with the inclination direction of the corresponding vacuum coating unit. The connector is provided with a guide hole, which is oval in shape and extends along the inclined direction of the connector. The bottom support includes multiple horizontal beams and multiple vertical beams, the horizontal beams are connected to and perpendicular to the vertical beams, and the bottom support is quadrilateral. The device further includes a support member, a first reinforcing member, a second reinforcing member, a third reinforcing member, and a fourth reinforcing member. The support member is connected to the bottom of the connecting member and abuts against the bottom of the vacuum coating unit. The first reinforcing member is used to connect two adjacent longitudinal support members. The second reinforcing member is used to connect the transverse support member and the bottom support member. The third reinforcing member is used to connect the second reinforcing member and the bottom support member, and the third reinforcing member is triangular in shape. The fourth reinforcing member is used to connect two adjacent crossbeams and longitudinal beams, and the fourth reinforcing member is triangular in shape. Alternatively, when multiple vacuum coating units are arranged along the vertical direction of the support, each vacuum coating unit includes a molecular pump and a rotating cathode target. The support has a receiving cavity, and a partition is provided in the receiving cavity to divide the receiving cavity into an upper coating cavity and a lower coating cavity. Multiple molecular pumps and multiple rotating cathode targets are provided on the upper side of the support, and multiple molecular pumps and multiple rotating cathode targets are provided on the lower side of the support.

15. The vacuum coating apparatus according to claim 14, characterized in that, The support body has an upper support plate on its upper side and a lower support plate on its lower side. Each of the upper and lower support plates has through holes corresponding to its respective chamber. The surfaces of the upper and lower support plates away from each other have multiple protrusions. These protrusions are located between adjacent through holes. A molecular pump placement area and a cathode placement area are formed on the front and rear sides of the protrusions on the support plates, respectively. A molecular pump placement plate is provided in the molecular pump placement area, and the molecular pump placement plate has an opening that communicates with the chamber. Similarly, a cathode placement plate is provided in the cathode placement area, and the cathode placement plate has an opening that communicates with the chamber.

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