System and method for performing flammability test on gas cabinet

Abstract

A system and method for performing a flammability test on a gas cabinet (10). The gas cabinet (10) internally comprises several pipelines (11), valves (12) and electrical connection points (13). The system at least comprises: a tracer gas container (20), which is in communication with a simulated gas release point (22) by means of a tracer gas pipe (21), and is used for releasing a tracer gas at the simulated gas release point (22), wherein the simulated gas release point (22) is located at a position where a valve (12) and a pipeline (11) inside a gas cabinet (10) are connected; several detectors (30), wherein each detector (30) is connected to a monitoring point (32) by means of a sampling pipe (31), and monitoring points (32) are at least disposed at electrical connection points (13) inside the gas cabinet (10); and a controller (40), which is in signal connection with the detectors (30), wherein the several detectors (30) are used for collecting tracer gas concentration values at several monitoring points (32) and sending the tracer gas concentration values to the controller (40), and the controller (40) is used for comparing the tracer gas concentration values at the monitoring points (32) with preset tracer gas concentration values, so as to determine whether the gas cabinet (10) passes a flammability test. The system greatly improves the testing accuracy and testing efficiency of a flammability test for the gas cabinet (10), is environmentally friendly and has wide application prospects.

Description

A system and method for testing the flammability of gas holders Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a system and method for testing the flammability of gas holders. Background Technology

[0002] Gas cabinets (gas transfer control cabinets) are core tools in semiconductor manufacturing, and their safety is paramount. The semiconductor production environment presents numerous unique factors that impose extremely stringent safety requirements on equipment. For example, semiconductor manufacturing often requires operation in specific gas environments, such as the widespread use of flammable and explosive gases like hydrogen. Gas cabinets, responsible for controlling the transfer of these gases, may generate high temperatures and static electricity during operation. If the flammable and explosive gases inside the cabinet reach their explosive limits, a severe safety accident could erupt instantly. Loss of control can not only severely damage the gas cabinet but also potentially trigger catastrophic events such as fires and explosions, endangering the lives of operators and causing enormous economic losses.

[0003] Against this backdrop, to ensure the safety of gas holders, the Semiconductor Equipment and Materials International (SEMI) has developed the SEMI S6 test method. This method encompasses two important components: the SEMI S6 flammability test and the toxicity test. The SEMI S6 flammability test evaluates the ventilation capacity of a designed gas holder and its related components in the event of a flammable gas leak, determining whether the designed gas holder can effectively dilute and remove leaked flammable gases, thereby ensuring the safety of the semiconductor manufacturing environment.

[0004] However, existing SEMI S6 flammability testing methods generally use a mixture of sulfur hexafluoride (SF6) and nitrogen (N2) as tracer gases, which has several drawbacks: the results of this testing method are slow to provide timely and efficient evidence for the safety assessment of gas holders, and it is not conducive to making rapid decisions and adjustments in actual testing scenarios. In addition, SF6 is a strong greenhouse gas with a global warming potential (GWP) thousands of times higher than that of carbon dioxide, and it has a significant destructive effect on the atmospheric ozone layer. Using this mixture as a tracer gas will undoubtedly cause environmental pollution.

[0005] In conclusion, the existing SEMI S6 flammability testing method is insufficient to meet the rapid and accurate testing requirements of gas holders facing complex operating conditions in actual operation. A more complete, efficient and environmentally friendly testing solution is urgently needed to replace it. Summary of the Invention

[0006] The purpose of this invention is to provide a system and method for testing the flammability of gas holders, which can acquire monitoring results from multiple monitoring points inside the gas holder in real time, effectively improving the testing efficiency of flammability testing. At the same time, it adopts an environmentally friendly test gas formula, which meets the requirements of environmental protection and sustainable development.

[0007] To achieve the above objectives, the present invention provides a system for testing the flammability of a gas holder, wherein the gas holder includes a plurality of pipelines, a plurality of valves, and a plurality of electrical connection points, characterized in that it includes at least:

[0008] A tracer gas container is connected to a simulated gas release point via a tracer gas pipeline for releasing tracer gas at the simulated gas release point; the simulated gas release point is located at the connection point of the valve and pipeline inside the gas holder.

[0009] A plurality of detectors, each detector being connected to a monitoring point via a sampling tube; the plurality of monitoring points are located at least at the plurality of electrical connection points inside the gas holder;

[0010] The controller is signal-connected to the plurality of detectors;

[0011] The detectors are used to collect tracer gas concentration values ​​at the monitoring points and send them to the controller; the controller is used to compare the tracer gas concentration values ​​at the monitoring points with preset tracer gas concentration values ​​to determine whether the flammability test of the gas holder has passed.

[0012] Optionally, the preset tracer gas concentration values ​​at each monitoring point may be different or the same, wherein: when the preset tracer gas concentration values ​​at each monitoring point are the same, the controller receives the tracer gas concentration values ​​at each monitoring point and compares them with the preset tracer gas concentration values; when the preset tracer gas concentration values ​​at each monitoring point are different, the controller receives the tracer gas concentration values ​​at each monitoring point and compares them with the preset tracer gas concentration values ​​corresponding to each monitoring point respectively.

[0013] Optionally, when the number of detectors is greater than or equal to the number of monitoring points inside the gas holder, the detectors of that number of monitoring points are used to perform synchronous testing on each monitoring point inside the gas holder; when the number of detectors is less than the number of monitoring points inside the gas holder, the detectors are used to perform batch testing on each monitoring point inside the gas holder until all monitoring points inside the gas holder have been tested.

[0014] Optionally, the controller calculates the time T required for the tracer gas from the simulated gas release point to reach a stable state inside the gas holder based on the inherent parameters of the gas holder, and outputs a test command to the detector at least T hours after the release of the tracer gas.

[0015] Optionally, the controller compares the received tracer gas concentration value of the monitoring point with the preset tracer gas concentration value, and outputs a first control command when the tracer gas concentration value of at least one monitoring point is greater than or equal to its corresponding preset tracer gas concentration value.

[0016] Optionally, the gas holder is equipped with an exhaust device, which is signal-connected to the controller. The exhaust device receives the first control command and adjusts the exhaust volume inside the gas holder so that the tracer gas concentration values ​​at the plurality of monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point.

[0017] Optionally, the system further includes a human-machine interaction module, which is signal-connected to the controller, and the controller receives inherent parameters of the gas holder transmitted from the human-machine interaction module.

[0018] Optionally, the system further includes a display module, which is signal-connected to the controller, and receives a second control command output from the controller to display the tracer gas concentration value at the monitoring point.

[0019] Optionally, the system further includes an alarm module, which is signal-connected to the controller. When the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module receives a third control command output from the controller and issues an alarm signal.

[0020] Optionally, the alarm signal includes: a light signal and / or a sound signal.

[0021] Optionally, the system further includes a mass flow controller, which is located on the tracer gas pipeline and is used to adjust the release flow rate of the tracer gas at the simulated gas release point.

[0022] Optionally, the system further includes a pressure regulating valve, which is located on the tracer gas pipeline and is used to adjust the release pressure of the tracer gas to the operating pressure range of the mass flow controller.

[0023] Optionally, the tracer gas includes H2, and the detector is an H2 detector.

[0024] Optionally, the total time from the release of the tracer gas to the collection of tracer gas concentration values ​​at several monitoring points by several H2 detectors and the transmission of these values ​​to the controller is 30 seconds to 1 minute.

[0025] Optionally, the system further includes an integrated box, in which the controller and the detector are integrated.

[0026] Optionally, the monitoring point is also located at the corner of the cabinet inside the gas holder.

[0027] The present invention also provides a method for testing the flammability of a gas holder, which is implemented using the above-described system for testing the flammability of a gas holder, and the method includes at least the following steps:

[0028] The tracer gas is transported from the tracer gas container through the tracer gas pipeline to the gas simulation release point for simulated release.

[0029] Several detectors receive test commands output from the controller, and collect and analyze the tracer gas concentration values ​​at the several monitoring points;

[0030] The controller receives the tracer gas concentration value transmitted from the plurality of detectors, compares it with a preset tracer gas concentration value, and determines whether the flammability test of the gas holder has passed.

[0031] Optionally, when the number of detectors is greater than or equal to the number of monitoring points inside the gas holder, the detectors of that number of monitoring points are used to perform synchronous testing on each monitoring point inside the gas holder; when the number of detectors is less than the number of monitoring points inside the gas holder, the detectors are used to perform batch testing on each monitoring point inside the gas holder until all monitoring points inside the gas holder have been tested.

[0032] Optionally, the method further includes: the controller calculating the time T it takes for the tracer gas from the simulated gas release point to reach a stable state inside the gas holder based on the inherent parameters of the gas holder, and issuing the test command to the detector after a time T from the release of the tracer gas.

[0033] Optionally, the inherent parameters of the gas holder can be transmitted to the controller via a human-machine interaction module.

[0034] Optionally, the inherent parameters of the gas holder include the volume of the gas holder.

[0035] Optionally, when it is determined that the flammability test of the gas holder has failed, the method further includes: the controller outputs a control command so that the tracer gas concentration values ​​of the plurality of monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point.

[0036] Optionally, the control command includes a first control command, which includes: increasing the exhaust volume inside the gas holder so that the tracer gas concentration values ​​at the plurality of monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point.

[0037] Optionally, the control command includes a second control command, which includes: displaying the tracer gas concentration value of the monitoring point.

[0038] Optionally, the control command includes a third control command, which includes issuing an alarm signal when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value.

[0039] Optionally, the tracer gas includes H2.

[0040] Optionally, the tracer gas is a mixture of H2 and N2, wherein the volume ratio of H2 in the mixture does not exceed 5.7%.

[0041] Optionally, the method is used for the SEMI S6 flammability test.

[0042] Compared with the prior art, the beneficial effects of the present invention include at least the following:

[0043] (1) This invention integrates a controller and several detectors to achieve multi-point synchronous monitoring inside a gas holder with several monitoring points. Furthermore, the controller can automatically determine whether the flammability test of the gas holder has passed based on the tracer gas concentration values ​​at several monitoring points. On the one hand, traditional testing methods use a single-point, one-by-one detection approach, requiring more than 30 minutes to obtain the test results of all monitoring points inside the gas holder. In contrast, the multi-point synchronous monitoring achieved by this invention shows significant advantages, requiring only 30 seconds to 1 minute to complete the flammability test of the gas holder. This avoids the problems of inaccurate test results and long test times caused by the single-point testing capability in traditional methods, effectively improving the real-time performance of the test results, thereby enhancing the accuracy and efficiency of the test. On the other hand, the integrated controller has the function of automatically determining whether the test results meet the safety requirements, avoiding errors caused by manual judgment, simplifying the test operation process, and further improving the accuracy and efficiency of the test.

[0044] (2) Furthermore, the system and method provided by the present invention are particularly suitable for the flammability test of gas holders with complex internal component layouts. Different preset tracer gas concentration values ​​can be flexibly set according to factors such as the risk level of each monitoring point inside the gas holder. The controller can automatically judge, thereby enabling a more accurate and efficient assessment of whether the gas holder can pass the flammability test.

[0045] (3) Further, in the system and method provided by the present invention, the controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas holder based on the inherent parameters of the gas holder, and sends the test command to the detector after T hours from the release of the tracer gas, so as to ensure that the detector collects the tracer gas concentration value in a stable state, and eliminates the interference factors caused by the unstable gas concentration at the beginning of release to the greatest extent, thereby improving the accuracy of the test data.

[0046] (4) Furthermore, the system and method provided by this invention also integrate an intelligent verification design that can control different modules or devices by outputting different control commands. The first control command from the operator is used to control the exhaust device and adjust the exhaust volume inside the gas holder, thereby adjusting the test results so that the gas holder can pass the SEMI S6 flammability test; the second control command is used to control the display module to display the tracer gas concentration data of each monitoring point, so that the operator can quickly and intuitively grasp the real-time status of the tracer gas concentration in different areas inside the gas holder; the third control command is used to control the alarm module to issue an alarm signal, thereby promptly notifying the operator that there is an abnormal situation inside the gas holder and ensuring safety during the test process. This intelligent verification design enables the system to respond or handle various situations autonomously, reducing the waste of manpower and energy, making the entire test process more efficient and orderly, reducing human error, and improving the accuracy and reliability of the test.

[0047] (5) Furthermore, in the system and method of the present invention, a mixture of H2 and N2 is used instead of the traditional mixture of SF6 and N2 as the tracer gas. SF6, as a gas that easily generates a greenhouse effect, has been largely replaced after the implementation of this solution. The implementation of this technical solution promotes green production and sustainable development for enterprises. By using more environmentally friendly H2 and N2, the emission of greenhouse gases is reduced, which is environmentally friendly and in line with the current trend of green environmental protection and sustainable development. Enterprises can better respond to the global call for environmental protection and sustainable development, establish a green, environmentally friendly, and low-carbon corporate image, and make a positive contribution to the sustainable development of society. Attached Figure Description

[0048] Figure 1 is a simplified schematic diagram of a system for testing the flammability of gas holders according to the present invention.

[0049] Figure 2 is a simplified schematic diagram of a system for testing the flammability of gas holders, including a human-computer interaction module, according to the present invention.

[0050] Figure 3 is a simplified schematic diagram of a system for testing the flammability of gas holders, including a human-computer interaction module and a display module, according to the present invention.

[0051] Figure 4 is a flowchart of a method for testing the flammability of a gas holder according to the present invention.

[0052] Figure 5 is a flowchart of a method for testing the flammability of a gas holder, including step S5.1, according to the present invention.

[0053] Figure 6 is a flowchart of a method for testing the flammability of a gas holder, including step S5.2, according to the present invention.

[0054] Figure 7 is a flowchart of a method for testing the flammability of a gas holder, including step S5.3, according to the present invention.

[0055] Attached image labels:

[0056] Gas holder 10, pipeline 11, valve 12, electrical connection point 13;

[0057] Tracer gas container 20, tracer gas pipeline 21, gas simulation release point 22, mass flow controller 211, pressure regulating valve 212;

[0058] Detector 30, sampling tube 31, monitoring point 32, near-source location point 321, near-source detector D1, first background detector D2, second background detector D3, monitoring point detectors D4~D15;

[0059] Controller 40;

[0060] Human-computer interaction module 50;

[0061] Exhaust device 60;

[0062] Display module 70;

[0063] Integrated box 80. Detailed Implementation

[0064] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0065] In the description of this invention, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0066] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0067] The term "several" in this article refers to one or more.

[0068] The term "gas cabinet" as used herein refers to semiconductor equipment used for storing, controlling, and transporting various gases used in semiconductor manufacturing processes. The gas cabinet internally includes several pipelines, valves, and electrical connection points; wherein, the pipelines are used to transport gases; the valves are used to control gas flow and regulate gas flow rate and pressure; and the electrical connection points are used to provide power to the monitoring equipment, valve control devices, and other electrically driven components inside the gas cabinet, ensuring that all functional components of the gas cabinet can operate normally and work collaboratively.

[0069] The “explosion limit threshold” as used in this article refers to the lowest concentration at which a flammable gas (e.g., hydrogen) may explode.

[0070] As described in the background section, for gas holders involving the controlled transmission of flammable gases, safety performance is a key consideration in their design. The gas holder typically contains numerous pipelines, valves, and electrical connection points, arranged in a complex manner. Leakage of flammable gases is difficult to avoid at the pipelines and valves, while electrical connection points are prone to generating electrical sparks. If the concentration of flammable gas leaking at an electrical connection point reaches the explosion limit threshold, that connection point is highly likely to become an explosion point, causing a violent explosion, damaging the gas holder, and even endangering the safety of on-site operators.

[0071] Therefore, it is necessary to conduct flammable gas leakage detection at several electrical connection points. Based on the measured flammable gas concentration at the monitoring points, the ventilation effect of the gas holder can be evaluated to determine whether it meets safety requirements, thereby determining whether the gas holder passes the flammability test, and guiding the design optimization of the gas holder structure or the layout of its internal components.

[0072] Existing methods for testing the flammability of gas holders use a mixture of sulfur hexafluoride (SF6) and nitrogen (N2) as tracer gases. SF6 is used as the detection gas to measure its concentration in the tested equipment, while N2 serves as the carrier gas, diluting the SF6 to a set concentration and uniformly delivering it to the target area. However, this invention has found that these methods for testing the flammability of gas holders have the following limitations:

[0073] For the detection of SF6 gas, traditionally, a detector dedicated to SF6 concentration detection is used. Its advantage is that the speed of obtaining the gas concentration value is relatively fast. However, the detection accuracy of existing SF6 detectors is not high. Mainly due to the limitations of the gas characteristics of SF6 itself and the detection capabilities of the equipment itself, the detection signals of SF6 detectors are relatively weak and are vulnerable to interference from factors such as minute impurities, minute changes in temperature, and / or humidity, which may cause large deviations in the detection results, resulting in a decrease in the test accuracy and easily causing misjudgment or missed judgment in the test.

[0074] To improve the test accuracy, an attempt is made to use gas chromatography (GC) with higher detection accuracy for detection. However, this method requires a sampler to collect a certain volume of tracer gas samples at the monitoring point, and then send the tracer gas samples to the laboratory and inject them into the GC instrument for analysis. Moreover, it takes at least 3 minutes for the GC instrument to complete the concentration analysis of a single tracer gas sample, resulting in a cumbersome test process and consuming test time. In addition, the GC instrument can only allow the concentration data of one tracer gas sample to be analyzed at a time. Therefore, for a complex gas cabinet containing several monitoring points, the tracer gas samples collected at each monitoring point need to be analyzed one by one point by point, further leading to a significant extension of the test time. The extension of the test time brings the problem of delayed feedback of the test results, resulting in the inability of this method to achieve real-time synchronous monitoring of the gas concentration changes at each monitoring point inside the gas cabinet, which may cause the omission of some important instantaneous concentration change information, making the test accuracy still unable to meet the requirements.

[0075] In addition, in the existing methods for flammability testing of gas cabinets, there are defects in the test operation process. Specifically, it is necessary for the operator (test personnel) to compare the detected SF6 concentration value with a specific set value (for example, the explosion limit threshold) by themselves to manually judge whether the flammability test is qualified. Such an operation method makes the entire test process cumbersome, not only consuming test time but also occupying additional human resources and reducing the test efficiency.

[0076] In summary, the existing methods for flammability testing of gas cabinets have problems such as long detection time, slow feedback results, and low detection accuracy, making it difficult to meet the requirements of the semiconductor industry for efficient, accurate, and real-time flammability testing of gas cabinets under complex working conditions, and it is not conducive to timely and accurately evaluating the safety performance of gas cabinets. Moreover, SF6 is a recognized greenhouse gas and is harmful to the environment.

[0077] To address the aforementioned problems, this invention designs a system for testing the flammability of gas holders. The system integrates several detectors and a controller. The detectors are connected to several monitoring points inside the gas holder, enabling real-time acquisition of tracer gas concentration values ​​from these monitoring points and transmission to the controller. The controller compares the tracer gas concentration values ​​with preset tracer gas concentration values ​​and automatically determines whether the gas holder passes the flammability test. Therefore, this invention enables synchronous acquisition and feedback of tracer gas concentration values ​​from multiple monitoring points inside the gas holder. Furthermore, the system automatically compares the acquired tracer gas concentration values ​​with preset values ​​and directly outputs the test results without manual comparison, effectively improving the real-time performance and accuracy of the test and simplifying the testing process. Moreover, this invention uses an environmentally friendly mixture of hydrogen (H2) and N2 as the tracer gas for flammability testing, eliminating environmental hazards.

[0078] The following explanation is based on the accompanying drawings.

[0079] As shown in Figure 1, the present invention provides a system for testing the flammability of a gas holder. The gas holder 10 includes several pipelines 11, several valves 12, and several electrical connection points 13. The system includes at least:

[0080] The tracer gas container 20 is connected to a gas simulation release point 22 via a tracer gas pipeline 21, and is used to release tracer gas at the gas simulation release point 22; the gas simulation release point 22 is located at the connection between the valve 12 and the pipeline 11 inside the gas holder 10.

[0081] A plurality of detectors 30, each detector 30 being connected to a monitoring point 32 via a sampling tube 31; the plurality of monitoring points 32 are provided at least at the plurality of electrical connection points 13 inside the gas holder 10;

[0082] Controller 40, which is signal-connected to the plurality of detectors 30;

[0083] The detectors 30 are used to collect the tracer gas concentration values ​​of the monitoring points 32 and send them to the controller 40; the controller 40 is used to compare the tracer gas concentration values ​​with preset tracer gas concentration values ​​to determine whether the flammability test of the gas holder 10 has passed.

[0084] In some embodiments, the system further includes an integrated box 80, in which the controller 40 and the detector 30 are integrated. The sampling tubes 31 are centrally led out from inside the integrated box 40 to various monitoring points 32 inside the gas holder 10, thereby reducing space occupation and facilitating centralized management of the controller 40 and the detector 30, making it convenient for operators to inspect, debug or maintain.

[0085] In the actual operation of the gas holder 10, the pipeline 11 inside the gas holder 10 is used to transport a specific gas, and the valve 12 is used to control the flow of the specific gas and regulate its flow rate and pressure. The connection between the valve 12 and the pipeline 11 is a junction of two different components, which is prone to sealing problems, making gas leakage more likely. Therefore, this invention selects the connection between the valve 12 and the pipeline 11 inside the gas holder 10 as the simulated gas release point 22. In this invention, tracer gas is simulated and released at the connection between the valve 12 and the pipeline 11 through the tracer gas pipeline 21 to simulate a real gas leakage situation.

[0086] In this invention, the principle for selecting the monitoring point 32 is the location inside the gas holder 10 where an electric spark may be generated, causing combustion or explosion, such as electrical connection points, corners of the cabinet, etc.

[0087] During the actual operation of the gas holder 10, the electrical connection points 13 inside the gas holder 10 provide power to the valve control devices, mass flow controllers (MFC), and other electrically driven components inside the gas holder 10, ensuring that all components inside the gas holder 10 can operate normally and work collaboratively. However, the electrical connection points 13 are prone to generating electric sparks due to the power supply. If the specific gas transported by the pipeline 11 in the gas holder 10 contains flammable gas, and the concentration of flammable gas leaking at the electrical connection point 13 reaches the explosion limit threshold, then the electrical connection point 13 is very likely to become an explosion point, causing a violent explosion accident, damaging the gas holder and endangering the safety of the operator. Therefore, in this invention, several monitoring points 32 are designed to be located at least at the several electrical connection points 13 inside the gas holder 10. By monitoring the changes in the tracer gas concentration in these key areas in real time, it is determined whether the entire gas holder 10 has passed the flammability test and meets the safety requirements of the gas holder 10.

[0088] In some embodiments, the monitoring point 32 is also located at the corner of the gas holder 10. Since the corners are areas where gas tends to accumulate and where flow patterns are complex, setting the monitoring point 32 there allows for a more comprehensive and accurate capture of the gas distribution and changes within the gas holder 10. During gas leaks or normal operation, the gas concentration at the corners may differ from other areas. The data collected by these monitoring points 32 helps to understand the gas characteristics at different spatial locations within the gas holder 10 in greater detail, thus providing a more reliable basis for determining whether the gas holder 10 can pass the flammability test and further improving the system's accuracy.

[0089] In this invention, multiple detectors are used to simultaneously collect tracer gas concentration values ​​at multiple monitoring points, thereby monitoring the changes in tracer gas concentration at various locations within the gas cabinet (e.g., multiple electrical connection points and / or cabinet corners). Specifically, each detector is connected to a monitoring point via a sampling tube to ensure accurate acquisition of tracer gas information for the corresponding monitoring point. In some embodiments, continuing to refer to Figure 1, the multiple detectors include a near-source detector D1, a first background detector D2, a second background detector D3, and 12 monitoring point detectors D4-D15 for monitoring tracer gas concentration at monitoring point 32. The near-source detector D1 is connected to a near-source location point 321 with a diameter of 2 cm from the simulated gas release point 22 via a sampling tube 31, and is used to collect the tracer gas concentration at a location with a diameter of 2 cm from the simulated gas release point 22, thereby verifying whether the tracer gas pipeline 21 is blocked and whether the simulated gas release point 22 has successfully released tracer gas. The first background detector D2 is connected to a location point (not shown in the figure) inside the integrated box 80 via a sampling tube 31, and is used to collect the concentration of tracer gas around the multiple detectors 30; the second background detector D3 is connected to a location point (not shown in the figure) around the outside of the gas holder 10 via a sampling tube 31, and is used to collect the concentration of tracer gas around the outside of the gas holder 10. The first background detector D2 and the second background detector D3 are used to observe the background of the test environment, so as to reduce the influence of the surrounding environment of the multiple detectors 30 and the outside of the gas holder 10 on the test results.

[0090] In this invention, to achieve system automation and intelligence, reduce manpower waste, and improve testing efficiency, a controller 40 is integrated. The controller 40 automatically compares the real-time monitored tracer gas concentrations at each monitoring point 32 with a pre-input preset tracer gas concentration value, thereby automatically determining whether the flammability test of the gas holder 10 has passed. The controller 40 is signal-connected to several detectors 30, which send the collected tracer gas concentration values ​​from the several monitoring points 32 to the controller 40. For example, when the tracer gas concentration values ​​received by the controller 40 from the several monitoring points 32 are all less than the preset tracer gas concentration value, the flammability test of the gas holder 10 is determined to have passed. The acquisition includes collecting tracer gas and analyzing its concentration value.

[0091] In this invention, the preset tracer gas concentration values ​​(not exceeding the explosion limit threshold) corresponding to each monitoring point 32 may be the same or different. The controller 40 receives the tracer gas concentration values ​​of each monitoring point 32 transmitted from several detectors 30 and compares them with the preset tracer gas concentration values ​​corresponding to each monitoring point 32 to determine whether the flammability test of the gas holder 10 has passed. For gas holders 10 with a relatively simple internal structure and component layout, or for ease of management, the preset tracer gas concentration values ​​of each monitoring point 32 may be the same. In this case, the controller 40 can receive the tracer gas concentration values ​​of each monitoring point 32 and compare them with the preset tracer gas concentration value. However, in some embodiments, to further improve the accuracy of the test, given that there are accident-prone locations (e.g., areas with dense electrical connection points 13) and relatively safe locations (e.g., exhaust vents) inside the gas holder, the preset tracer gas concentration values ​​for each monitoring point 32 can be different. Furthermore, the preset tracer gas concentration values ​​can also differ depending on the distance between the monitoring point 32 and the simulated gas release point 22. In this case, the controller 40 needs to receive the tracer gas concentration values ​​from each monitoring point 32 and compare them with the corresponding preset tracer gas concentration values ​​for each monitoring point 32. The test is considered passed only when the tracer gas concentration values ​​of all monitoring points 32 are less than or equal to their corresponding preset tracer gas concentration values. As an example, in areas with dense electrical connection points 13, where the possibility of explosion or fire is higher, the preset tracer gas concentration values ​​for monitoring points 32 in this area can be set accordingly lower. By setting different preset tracer gas concentration values ​​for monitoring points 32 based on different location characteristics, the gas concentration in key areas inside the gas holder 10 can be monitored and judged more accurately and sensitively, thereby improving the accuracy and reliability of flammability testing and effectively avoiding test misjudgments and / or omissions caused by a single preset tracer gas concentration value.

[0092] The present invention can also flexibly adjust the testing method according to the gas holder 10 containing different numbers of monitoring points 32. In some embodiments, when the number of detectors 30 is greater than or equal to the number of monitoring points 32 inside the gas holder 10, the detectors 30 of the specified number of monitoring points 32 are used to synchronously monitor each monitoring point 32 inside the gas holder 10. When the number of detectors 30 is less than the number of monitoring points 32 inside the gas holder 10, the detectors 30 are used to test each monitoring point 32 inside the gas holder 10 in batches until all monitoring points 32 inside the gas holder 10 have been tested. As an example, if the system shown in Figure 1 (containing 12 monitoring point detectors D4~D15) is used, when the number of monitoring points of the gas holder under test is less than or equal to 12, the system can be used to complete the flammability test of all monitoring points inside the gas holder under test at one time. When the number of monitoring points of the gas holder under test is greater than or equal to 12 (i.e., gas holders with complex operating conditions), the system can be used to complete the flammability test of 12 monitoring points first, and then the system can be used to conduct another batch of tests on the remaining monitoring points of the gas holder under test until all monitoring points inside the gas holder under test have been tested.

[0093] To ensure the accuracy of test data and avoid misjudgment interference, in some embodiments, the controller 40 calculates the time T required for the tracer gas from the simulated gas release point 22 to reach a stable state inside the gas holder 10 based on the inherent parameters of the gas holder 10, and outputs a test command to the detector 30 at least T hours after the tracer gas is released. The gas holder 10 typically has a complex spatial structure and different component layouts. After the tracer gas is released from the simulated gas release point 22, it requires a certain amount of time to fully diffuse throughout the gas holder 10 and reach a stable concentration distribution. If testing is performed too early, the tracer gas concentration at each monitoring point 32 will still be in a constantly changing and unstable stage. At this time, the data obtained by the detector 30 cannot truly reflect the normal gas distribution in the gas holder 10, which may easily lead to misjudgment and / or missed judgment. By calculating the time T required to reach a stable state through the controller 40 and waiting for at least T before outputting the test command, the detector 30 is ensured to collect the tracer gas concentration value under stable conditions, thereby improving the accuracy of the test data and providing a reliable basis for the subsequent accurate judgment of the flammability test results of the gas holder 10.

[0094] In some embodiments, as shown in FIG2, the system further includes a human-machine interface module 50, which is signal-connected to the controller 40. The human-machine interface module 50 includes an input interface through which testers can input the inherent parameters or other commands of the gas holder 10. The controller 40 receives the inherent parameters of the gas holder 10 transmitted from the human-machine interface module 50. The inherent parameters of the gas holder 10 include the volume of the gas holder 10 and its structural information (e.g., the layout of components and / or the presence of a layered structure).

[0095] To further enhance system intelligence and optimize the collaborative operation of modules or devices during testing, in some embodiments, the controller 40 compares the received tracer gas concentration values ​​at monitoring points 32 with the preset tracer gas concentration value. If the tracer gas concentration values ​​at all monitoring points 32 are less than or equal to the preset tracer gas concentration value, the test passes, and the flammability test of the gas holder ends. If the tracer gas concentration value at any monitoring point 32 is greater than the preset tracer gas concentration value, the test fails, indicating a safety hazard in the gas holder, requiring adjustment of the exhaust volume to eliminate the hazard. To achieve this, when the flammability test of the gas holder fails, the controller itself or the testing personnel output various control commands to respond, taking different processing measures for the corresponding devices and / or modules. This enables functions such as ensuring that the tracer gas concentration values ​​monitored at each monitoring point 32 inside the gas holder are less than the preset tracer gas concentration value, automatically recording and displaying the monitored tracer gas concentration values, and automatically alarming under specific circumstances. Specifically, the control commands include a first control command, a second control command, and a third control command. These control commands can originate from the tester or be actively issued by the controller after judgment; this application does not impose specific limitations. The following is a detailed explanation.

[0096] Referring again to Figure 1, in this example, the gas holder 10 is equipped with an exhaust device 60. The first control command is used to control and adjust the exhaust volume of the exhaust device 60. The exhaust device 60 is signal-connected to the controller 40. The controller 40 compares the tracer gas concentration value received from the monitoring point 32 with the preset tracer gas concentration value. When the tracer gas concentration value of at least one monitoring point 32 is greater than or equal to its corresponding preset tracer gas concentration value, the tester receives a test failure message and can issue a first control command. The first control command includes increasing the exhaust volume of the exhaust device 60 inside the gas holder 10. The exhaust device 60 receives the first control command and adjusts the exhaust volume inside the gas holder 10 so that the tracer gas concentration values ​​of several monitoring points 32 are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point 32, thereby ensuring that the exhaust capacity of the gas holder 10 meets the flammability test pass standard. In some embodiments, to prevent gas from accumulating in certain areas inside the gas holder 10, the gas holder 10 is also equipped with several exhaust devices (not shown in the figure) located at different positions inside the gas holder 10. All of these exhaust devices 60 are signal-connected to the controller 40, and a first control command can control the exhaust volume of the multiple exhaust devices. It should be noted that, due to limitations of the prior art, the control of the exhaust volume of the exhaust devices still requires manual adjustment by the test personnel. In this case, the controller 40 only serves to receive the first control command from the test personnel and adjust the exhaust devices according to the first control command; it cannot actively adjust the exhaust devices without the test personnel's instruction.

[0097] In some embodiments, as shown in FIG3, the system further includes a display module 70, wherein the second control command is used to control the display module to display the tracer gas concentration values ​​of each monitored point in real time. In some preferred embodiments, the human-machine interaction module 50 includes the display module 70. The display module 70 is signal-connected to the controller 40, and the display module 70 receives the second control command output from the controller 40 to display the tracer gas concentration values ​​of each monitored point 32, so that the operator can intuitively and promptly understand the tracer gas concentration distribution at different locations inside the gas holder 10. In some embodiments, the display module 70 also has a data storage function, which can record the tracer gas concentration data of each monitored point 32 monitored during the test for subsequent query and analysis, thereby guiding the optimization of the design of the gas holder 10. In some embodiments, the display module 70 includes a display interface, which can display the tracer gas concentration values ​​of each monitored point 32 in the form of a list or chart, and can also display the changing trend of the tracer gas concentration values ​​of each monitored point 32. It is understood that the display interface and the input interface mentioned above can be integrated into a control screen to optimize the human-computer interaction experience.

[0098] In some embodiments, the system further includes an alarm module (not shown), and the third control command is used to control the alarm module to issue an alarm signal. The alarm module is signal-connected to the controller 40. When the tracer gas concentration value of at least one of the monitoring points 32 is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module receives the third control command output from the controller 40 and issues an alarm signal to promptly notify the operator of any potential hazards inside the gas cabinet. The alarm signal includes, but is not limited to, light signals and sound signals, such as flashing red warning lights and / or a piercing buzzer, to ensure timely avoidance of the risk of safety accidents that may be caused by abnormal tracer gas concentrations.

[0099] In some preferred embodiments, referring again to Figure 3, the controller 40, the detector 30, the human-machine interaction module 50, the display module 70, and the alarm module (not shown in the figure) are all integrated in the integrated box 80, making the system structure more compact and simple. Through the integrated layout, the signal transmission distance between each device and / or module is significantly reduced, and the possibility of signal interference is reduced, thereby greatly improving the accuracy and timeliness of data transmission, enabling efficient and accurate testing of the gas holder's flammability.

[0100] In some embodiments, the system further includes a mass flow controller (MFC) 211. The mass flow controller 211 is located on the tracer gas pipeline 21 and is used to regulate the release flow rate of the tracer gas at the simulated gas release point 22. The working principle of the mass flow controller 211 is based on a precise measurement and feedback regulation mechanism of the fluid flow rate within the pipeline. It monitors parameters such as the flow rate and pressure of the tracer gas in real time using a built-in high-precision sensor, and, based on a preset flow target value, uses an advanced control algorithm to drive and adjust the opening of its built-in valve, thereby achieving dynamic and stable control of the tracer gas release flow rate. This function ensures a high degree of consistency and repeatability in simulating gas leakage scenarios during each flammability test, making test data from different batches or time periods comparable.

[0101] In some embodiments, the system further includes a pressure regulating valve 212. The pressure regulating valve 212 is located on the tracer gas line 21 and is used to adjust the release pressure of the tracer gas to the operating pressure range of the mass flow controller 211. If the initial release pressure of the tracer gas is too high or too low, exceeding the operating pressure range of the mass flow controller 211, it may cause the mass flow controller 211 to be unable to accurately measure and control the flow rate, resulting in excessive flow fluctuations or even equipment failure. Therefore, the regulating valve 212 is needed to control the release pressure of the tracer gas to stabilize within the required operating pressure range of the mass flow controller 211.

[0102] In some embodiments, the tracer gas includes hydrogen (H2), and the detector 30 is an H2 detector supplied by Honeywell. This invention is the first to use H2 as a tracer gas for flammability testing, coordinating multiple H2 detectors for simultaneous monitoring at multiple monitoring points 32. Compared to traditional flammability testing using SF6, this method offers at least the following advantages:

[0103] First, it significantly improves the real-time performance of flammability testing. The main reason is that, compared to GC technology, the H2 detector has a faster feedback speed and can achieve simultaneous monitoring of multiple monitoring points. For example, to ensure detection accuracy, SF6 gas detection requires GC technology, which takes at least 3 minutes from injection to obtaining concentration analysis results. When there are 12 monitoring points inside the gas holder, since the GC device only allows single sample injection, completing the detection of SF6 at all 12 monitoring points would take at least 36 minutes. However, for H2 sample detection, using an H2 detector, the time from tracer gas release to the collection of tracer gas concentration values ​​from 12 monitoring points by several H2 detectors and transmission to the controller is only 30 seconds. Therefore, using H2 as a tracer gas, combined with simultaneous monitoring of multiple points, significantly improves the real-time performance of test results, greatly shortens the overall test time, and avoids errors in test results or omissions of crucial gas concentration changes caused by detection delays. Real-time synchronous monitoring ensures that data from all monitoring points are acquired on the same time scale, accurately reflecting the gas concentration relationship at various locations within the gas holder, thus providing a more accurate basis for assessing whether the gas holder has passed the flammability test.

[0104] Secondly, it significantly improves the accuracy of flammability testing. This is mainly because the H2 detector also possesses high sensitivity and detection accuracy. The H2 detector is typically based on electrochemical principles, using the oxidation or reduction reaction of H2 to generate a current signal for logical calculations to determine the H2 concentration. Since H2 is chemically relatively reactive and can react rapidly under certain conditions, the H2 detector produces a noticeable signal change when detecting H2 concentration, thus achieving high sensitivity and accuracy. Therefore, the detection signal from the H2 detector is strong, negligible interference from minute impurities, temperature, and / or humidity changes, achieving high-precision detection.

[0105] Third, H2 is more environmentally friendly than SF6. SF6 is a potent greenhouse gas that has a significant negative impact on global warming. H2, on the other hand, is non-toxic and harmless, does not produce greenhouse gas effects, and the main byproduct of H2 combustion is water, which does not create additional environmental burden.

[0106] As shown in Figure 4, the present invention provides a method for testing the flammability of a gas holder, comprising at least the following steps:

[0107] Step S1, providing the above-described system for testing the flammability of gas holders.

[0108] In some embodiments, step S1 further includes: inputting system test parameters through a human-machine interaction module. The human-machine interaction module includes a control screen for inputting the system test parameters. The system test parameters include, but are not limited to: inherent parameters of the gas holder (e.g., the internal volume of the gas holder), tracer gas information (e.g., tracer gas components and the concentration of each component), the number of monitoring points, the location of each monitoring point, and the preset tracer gas concentration value corresponding to each monitoring point.

[0109] Step S2: The tracer gas is transported from the tracer gas container through the tracer gas pipeline to the gas simulation release point for simulated release.

[0110] In some embodiments, the tracer gas includes H2. In this example, the tracer gas is a mixture of H2 and N2; wherein H2 serves as the detection gas and N2 serves as the carrier gas. The tracer gas can also be a mixture of H2 and other carrier gases (e.g., Ar). Given that the explosion limit threshold of H2 is 5.7%, to ensure safety during the testing process, the volume ratio of H2 in the mixture used in the present invention does not exceed 5.7%, for example, 5.7%, 4.5%, 4%, etc.

[0111] Both H2 and N2 are colorless, odorless, and non-toxic gases under normal conditions. Therefore, it is understood that the tracer gas container can be a pressurized tracer gas cylinder for storing the H2 and N2 mixture. In some embodiments, to control the tracer gas flow rate at the simulated gas release point, a pressure regulating valve and a mass flow controller are sequentially installed on the tracer gas pipeline. The pressure regulating valve adjusts the release pressure of the tracer gas from the tracer gas container to the operating pressure range of the mass flow controller. The mass flow controller regulates the release flow rate of the tracer gas at the simulated gas release point to simulate gas leakage during actual operation of the gas holder.

[0112] In some embodiments, the release flow rate of the tracer gas at the simulated gas release point can be less than the possible gas flow rate of the pipeline at that point during actual operation. That is, the release flow rate can simulate the gas flow rate under conditions of minor gas leakage, such as a small crack or poor local sealing in the pipeline. In other embodiments, the release flow rate can be comparable to the possible gas flow rate of the pipeline at the simulated gas release point during actual operation. That is, the release flow rate can simulate the gas flow rate under extreme gas leakage conditions caused by a complete pipeline rupture. By using different simulation methods, the flammability test can be comprehensively verified under different levels of leakage scenarios, thereby ensuring the accuracy of the system test of the present invention and guaranteeing the safety of the gas holder.

[0113] In step S3, several detectors receive test commands output from the controller and collect and analyze the tracer gas concentration values ​​at the several monitoring points.

[0114] When the tracer gas is a mixture of H2 and N2, the detector uses an H2 detector (from Honeywell) to collect the H2 tracer gas concentration value at each monitoring point. As mentioned earlier, since the time from tracer gas release to the H2 detector collecting the tracer gas concentration value and sending it to the controller is only 30 seconds, when the number of detectors is greater than or equal to the number of monitoring points inside the gas holder, using the number of detectors to simultaneously monitor each monitoring point inside the gas holder allows for the acquisition of tracer gas concentration values ​​at each monitoring point within 30 seconds to 1 minute, greatly improving testing efficiency and reducing testing errors caused by detection delays. When the number of detectors is less than the number of monitoring points inside the gas holder, the detectors can be used to test each monitoring point inside the gas holder in batches until all monitoring points inside the gas holder have been tested.

[0115] In some embodiments, step S3 further includes: the controller calculating the time T required for the tracer gas from the simulated gas release point to reach a stable state inside the gas holder based on the inherent parameters of the gas holder; and issuing the test command to the detector T hours after the release of the tracer gas, to ensure that the detector collects the tracer gas concentration value when the gas concentration reaches a stable state inside the gas holder, thereby improving the accuracy of the detection data. In some embodiments, the inherent parameters of the gas holder include the volume of the gas holder.

[0116] Step S4: The controller receives the tracer gas concentration value transmitted from the plurality of detectors, compares it with the preset tracer gas concentration value, and determines whether the flammability test of the gas holder has passed.

[0117] Based on the standard requirements for general gas holder flammability testing (e.g., SEMI S6 flammability test), the criterion for determining whether the gas holder passes the flammability test is: throughout the entire test, the concentration of tracer gas detected at each monitoring point inside the gas holder is consistently controlled within a safe range, and no phenomena that could trigger combustion or explosion occur. Therefore, in some embodiments, the preset tracer gas concentration values ​​at each monitoring point are all less than or equal to the explosion limit threshold of the tracer gas. When the controller receives a tracer gas concentration value at at least one of the monitoring points that is greater than or equal to the explosion limit threshold of the tracer gas, it means that an explosion risk has occurred inside the gas holder, and the flammability test does not meet the passing standard.

[0118] After steps S1 to S4, if the tracer gas concentration values ​​collected at each monitoring point inside the gas holder are all less than their corresponding preset tracer gas concentration values, then the gas holder can pass the flammability test.

[0119] In some embodiments, to determine a more economical and environmentally friendly exhaust volume for the gas holder, as shown in Figure 5, the method for testing the flammability of the gas holder further includes: step S5.1, whereby the controller outputs a first control command, the first control command including: increasing the exhaust volume inside the gas holder so that the tracer gas concentration values ​​at the plurality of monitoring points are all less than the preset tracer gas concentration values ​​corresponding to each monitoring point. The gas holder is typically ventilated with the outside air and is equipped with at least one exhaust device, which is used to adjust the exhaust volume to achieve gas replacement and ventilation inside the gas holder. It should be noted that, due to limitations of the prior art, in this embodiment, the first control command originates from the testing personnel, and after being set by the testing personnel, it is output by the controller to the exhaust device for execution.

[0120] In some embodiments, to enhance the data visualization during the testing process, as shown in Figure 6, the method for testing the flammability of a gas holder further includes: step S5.2, whereby the controller outputs a second control command, the second control command including: displaying the tracer gas concentration value at the monitoring point.

[0121] Traditional testing methods, whether using GC technology or SF6 detectors, lack the ability to output and display test data from each monitoring point in real time. This prevents operators from fully understanding the changes in tracer gas concentration at different locations inside the gas holder at the same time.

[0122] In this invention, the second control command can be received through the human-computer interaction module, and the tracer gas concentration values ​​of each monitoring point can be displayed on a control screen in real time. This allows the operator to quickly and intuitively obtain real-time data on the tracer gas concentration of each monitoring point inside the gas holder, greatly improving the timeliness and accuracy of the gas holder flammability test.

[0123] In some embodiments, the second control command further includes recording the tracer gas concentration value at the monitoring point. This control command can be received via a human-machine interface module, allowing for real-time recording of the tracer gas concentration values ​​at each monitoring point. This facilitates subsequent data analysis and traceability, enabling the verification and optimization of the gas holder design's rationality.

[0124] In some embodiments, in order to further improve the intelligence level of the testing process and ensure the safety of the testing process, as shown in Figure 7, the method for testing the flammability of a gas holder further includes: step S5.3, whereby the controller outputs a third control command, the third control command including: when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, an alarm signal is issued.

[0125] In traditional testing methods, operators need to judge whether the tracer gas concentration value at the monitoring point is abnormal based on the value of the tracer gas concentration at the monitoring point. This is especially prone to misjudgment and / or missed judgment when dealing with tracer gas concentration data from multiple monitoring points.

[0126] In this invention, the alarm module can receive the third control command. When the tracer gas concentration value of at least one of the monitoring points is greater than or equal to its corresponding preset tracer gas concentration value, the alarm module automatically triggers an alarm and issues an alarm signal, thereby greatly improving the safety of the testing process and reducing the error of human judgment.

[0127] In summary, this invention provides a system and method for testing the flammability of gas holders. By integrating a controller and multiple detectors to achieve multi-point synchronous monitoring, it significantly improves the real-time performance and accuracy of the test, completing the test in just 30 seconds to 1 minute, far faster than traditional methods. The system can automatically judge the test results, thereby accurately assessing the safety of the gas holder, and simplifies the testing operation process, making it particularly suitable for gas holders with complex layouts. The system also integrates an intelligent verification design, displaying tracer gas concentration data and issuing alarms, reducing manpower and energy waste, and improving testing efficiency and reliability. Furthermore, the system uses a mixture of H2 and N2 as the tracer gas, which is environmentally friendly and in line with the trend of green and sustainable development.

[0128] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above description. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A system for gas cabinet flammability testing, the gas cabinet interior comprising a number of pipelines, a number of valves and a number of electrical connection points, characterized in that, At least comprising: a tracer gas container, which is communicated with a gas simulation release point through a tracer gas pipeline, for releasing tracer gas at the gas simulation release point; the gas simulation release point is located at the connection between a valve and a pipeline inside the gas tank; a plurality of detectors, each detector is communicated with a monitoring point through a sampling tube; a plurality of monitoring points are arranged at least at the plurality of electrical connection points inside the gas tank; a controller, which is signal connected with the plurality of detectors; wherein the plurality of detectors are used to collect the tracer gas concentration values of the plurality of monitoring points and send them to the controller; the controller is used to compare the tracer gas concentration values at the monitoring points with preset tracer gas concentration values to determine whether the flammability test of the gas tank is passed.

2. The system for gas cabinet combustibility testing of claim 1, wherein, The preset tracer gas concentration values of each monitoring point are different or the same, wherein: when the preset tracer gas concentration values of each monitoring point are the same, the controller receives the tracer gas concentration values of each monitoring point and compares them with the preset tracer gas concentration values; when the preset tracer gas concentration values of each monitoring point are different, the controller receives the tracer gas concentration values of each monitoring point and compares them with the preset tracer gas concentration values corresponding to each monitoring point respectively.

3. The system for flammability test of gas tank according to claim 1, wherein: when the number of detectors is greater than or equal to the number of monitoring points inside the gas tank, the number of monitoring points of detectors are used to test each monitoring point inside the gas tank synchronously; when the number of detectors is less than the number of monitoring points inside the gas tank, the detectors are used to test each monitoring point inside the gas tank in batches until each monitoring point inside the gas tank is tested.

4. The system for gas cabinet combustibility testing of claim 1, wherein, The controller calculates the time T for the tracer gas from the gas simulation release point to reach a steady state inside the gas tank according to the inherent parameters of the gas tank, and outputs a test instruction to the detector at least T time after releasing the tracer gas.

5. The system for gas cabinet combustibility testing of claim 1, wherein, The controller compares the tracer gas concentration values of the monitoring points received with the preset tracer gas concentration values, and outputs a first control instruction when the tracer gas concentration value of at least one monitoring point is greater than or equal to the corresponding preset tracer gas concentration value.

6. The system for gas cabinet combustibility testing of claim 5, wherein, The gas tank is provided with an exhaust device, which is signal connected with the controller, and receives the first control instruction to adjust the exhaust amount inside the gas tank, so that the tracer gas concentration values of the plurality of monitoring points are all less than the corresponding preset tracer gas concentration values of each monitoring point.

7. The system for gas cabinet combustibility testing of claim 1, wherein, Further comprising: a human-computer interaction module, which is signal connected with the controller, and the controller receives the inherent parameters of the gas tank transmitted from the human-computer interaction module.

8. The system for gas cabinet combustibility testing of claim 1, wherein, Further comprising: a display module, which is signal connected with the controller, and the display module receives the second control instruction output from the controller to display the tracer gas concentration values of the monitoring points.

9. The system for gas cabinet combustibility testing of claim 1, wherein, Further comprising: An alarm module connected with the controller, when the tracer gas concentration value of at least one of the monitoring points is greater than or equal to the preset tracer gas concentration value corresponding thereto, the alarm module receives the third control instruction output from the controller and sends an alarm signal.

10. The system for gas cabinet combustibility testing of claim 9, wherein, The alarm signal includes a light signal and / or a sound signal.

11. The system for gas cabinet combustibility testing of claim 1, wherein, Further comprising: A mass flow controller arranged on the tracer gas pipeline, used to adjust the release flow of the tracer gas at the gas simulation release point.

12. The system for gas cabinet combustibility testing of claim 11, wherein, Further comprising: A pressure regulating valve arranged on the tracer gas pipeline, used to adjust the release pressure of the tracer gas to the working pressure range of the mass flow controller.

13. The system for gas cabinet combustibility testing of claim 1, wherein, The tracer gas includes H2, and the detector is an H2 detector.

14. The system for gas cabinet combustibility testing of claim 13, wherein, The total time for the tracer gas to be released from the tracer gas container to the H2 detectors to collect the tracer gas concentration values of the monitoring points and to be sent to the controller is 30 s to 1 min.

15. The system for gas cabinet combustibility testing of claim 1, wherein, Further comprising: An integrated box, and the controller and the detector are arranged inside the integrated box.

16. The system for gas cabinet combustibility testing of claim 1, wherein, The monitoring points are also arranged at the corner of the cabinet inside the gas cabinet.

17. A method for gas cabinet flammability testing, characterized by, The system for testing the flammability of the gas cabinet is implemented by using the method according to any one of claims 1 to 16, and the method at least includes the following steps: The tracer gas is transported from the tracer gas container to the gas simulation release point through the tracer gas pipeline for simulation release; The detectors receive the test instruction output from the controller, collect and analyze the tracer gas concentration values of the monitoring points; The controller receives the tracer gas concentration values transmitted from the detectors, compares the tracer gas concentration values with the preset tracer gas concentration values, and judges whether the flammability test of the gas cabinet is passed.

18. The method for testing the flammability of the gas cabinet according to claim 17, wherein When the number of the detectors is greater than or equal to the number of the monitoring points inside the gas cabinet, the detectors with the number of the monitoring points are used to synchronously test each monitoring point inside the gas cabinet; When the number of the detectors is less than the number of the monitoring points inside the gas cabinet, the detectors are used to test each monitoring point inside the gas cabinet in batches until each monitoring point inside the gas cabinet is tested.

19. The method for gas cabinet flammability testing of claim 17, wherein, Further comprising: The controller calculates the time T for the tracer gas from the gas simulation release point to reach a stable state inside the gas cabinet according to the inherent parameters of the gas cabinet, and sends the test instruction to the detectors after T time from the release of the tracer gas.

20. The method for gas cabinet flammability testing of claim 19, wherein, The inherent parameters of the gas cabinet are transmitted to the controller through a human-computer interaction module.

21. The method for gas cabinet flammability testing of claim 20, wherein, The inherent parameters of the gas cabinet include the volume of the gas cabinet.

22. The method for gas cabinet flammability testing of claim 17, wherein, When it is judged that the flammability test of the gas cabinet is not passed, the method further includes that the controller outputs a control instruction so that the tracer gas concentration values of the monitoring points are all less than the preset tracer gas concentration values corresponding to each monitoring point.

23. The method for gas cabinet flammability testing of claim 22, wherein, The control instruction comprises a first control instruction, and the first control instruction comprises: increasing the exhaust amount of the gas cabinet to make the trace gas concentration values of the monitoring points all less than the preset trace gas concentration values corresponding to the monitoring points.

24. The method for gas cabinet flammability testing of claim 22, wherein, The control instruction comprises a second control instruction, and the second control instruction comprises: displaying the trace gas concentration values of the monitoring points.

25. The method for gas cabinet flammability testing of claim 22, wherein, The control instruction comprises a third control instruction, and the third control instruction comprises: when the trace gas concentration value of at least one of the monitoring points is greater than or equal to the preset trace gas concentration value corresponding to the monitoring point, issuing an alarm signal.

26. The method for gas cabinet flammability testing of claim 17, wherein, The trace gas comprises H2.

27. The method for gas cabinet flammability testing of claim 26, wherein, The trace gas is a mixture of H2 and N2, and the volume ratio of H2 in the mixture is not more than 5.7%.

28. The method for gas cabinet flammability testing of claim 17, wherein, The method is used for SEMI S6 flammability test.

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