X-ray imaging system and method for operating an x-ray imaging system
WO2026149787A1PCT designated stage Publication Date: 2026-07-16CARL ZEISS SMT GMBH
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- CARL ZEISS SMT GMBH
- Filing Date
- 2025-12-18
- Publication Date
- 2026-07-16
AI Technical Summary
Technical Problem
Existing x-ray imaging systems suffer from distortion and attenuation of the x-ray beam due to the sample mount material, leading to reduced accuracy and signal-to-noise ratio, especially when imaging regions close to the x-ray source.
Method used
The x-ray imaging system incorporates a sample mount with an opening that allows x-rays to pass through without interacting with the mount material, enabling the x-ray source to be positioned very close to the region of interest, thereby maintaining high x-ray flux density and reducing exposure time.
Benefits of technology
This configuration enhances the accuracy and signal-to-noise ratio of x-ray imaging by minimizing beam distortion and allowing for rapid imaging of multiple samples with high throughput.
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Smart Images
Figure EP2025088058_16072026_PF_FP_ABST
Abstract
An x-ray imaging system (A#100) for imaging a sample (A#102), comprising a sample mount (A#122) for supporting the sample (A#102), an x-ray source (A#112) for emitting x-rays (A#114, A#114') towards a region of interest (A#104) of the sample (A#102), and an x-ray detector (A#138) for detecting x-rays (A#114") transmitted through the region of interest (A#104), wherein the sample mount (A#122) comprises an opening (A#148) for passing through of the emitted x-rays (A#114, A#114') and / or the transmitted x- rays (A#114").
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