Nozzle position detection method, nozzle position adjustment method, computer program, and substrate processing device

Abstract

Provided is a technology with which the position of a nozzle can be detected with high accuracy even with a single camera. A nozzle position detection method comprises: a step for acquiring a first image (Ph1) by imaging a nozzle (412) disposed at a first position and by imaging a mirror image of the nozzle (412) reflected on a reflection surface (Ws) of a substrate (W); a step for acquiring a second image (Ph2) by imaging the nozzle (412) disposed at a second position and by imaging a mirror image of the nozzle (412) reflected on the reflection surface (Ws) of the substrate (W); and a step for acquiring a first inter-image distance (d1) between a nozzle real image (412a) and a nozzle mirror image 412b in the first image (Ph1), and a second inter-image distance (d2) between the nozzle real image (412a) and the nozzle mirror image 412b in the second image (Ph2). Furthermore, the nozzle position detection method includes a step for calculating a substrate-to-nozzle distance (x1), x2) from the substrate (W) to the nozzle (412) using a movement amount (t) when the nozzle (412) is moved from the first position to the second position, and the first inter-image distance (d1) and the second inter-image distance (d2).

Claims

1. A nozzle position detection method, comprising: a) a step of holding a substrate having a reflective surface with a substrate holding part; b) a step of acquiring a first image including the nozzle and its mirror image by imaging a nozzle positioned at a first position and a mirror image of the nozzle reflected on the reflective surface of the substrate; c) a step of acquiring a first inter-image distance between the actual image of the nozzle and the mirror image of the nozzle in the first image; d) a step of moving the nozzle from the first position to a second position in the vertical direction of the substrate after step b); e) a step of acquiring a second image including the nozzle and its mirror image by imaging the nozzle at the second position and a mirror image of the nozzle reflected on the reflective surface of the substrate; f) a step of acquiring a second inter-image distance between the actual image of the nozzle and the mirror image of the nozzle in the second image; g) A nozzle position detection method comprising: a step of calculating the distance between the substrate and the nozzle from the substrate to the nozzle using the amount of movement when the nozzle is moved from the first position to the second position in step d), the first inter-image distance, and the second inter-image distance.

2. A nozzle position detection method according to claim 1, wherein step g) includes a step of calculating a conversion coefficient to convert the inter-image distance between the real image of the nozzle and the mirror image of the nozzle into the inter-nozzle distance between the substrate nozzles.

3. A nozzle position detection method according to claim 2, wherein the first inter-image distance is the number of pixels between the real image of the nozzle and the mirror image of the nozzle in the first image, the second inter-image distance is the number of pixels between the real image of the nozzle and the mirror image of the nozzle in the second image, and the conversion coefficient is the value obtained by dividing the amount of movement of the nozzle by the change in the first inter-image distance and the second inter-image distance.

4. A nozzle position detection method according to any one of claims 1 to 3, wherein step c) includes: c-1) detecting the positions of the real image and the mirror image of the nozzle in the first image by pattern matching; and c-2) obtaining the distance between the first images using the detection result of step c-1).

5. A nozzle position adjustment method, comprising: A) a step of calculating the distance between substrate nozzles using the nozzle position detection method described in any one of claims 1 to 4; B) a step of determining whether the distance between substrate nozzles calculated in step A) has reached a predetermined target distance; and C) if it is determined in step B) that the distance between substrate nozzles has not reached the target distance, a step of moving the nozzles so that the distance between substrate nozzles approaches the target distance.

6. A nozzle position adjustment method according to claim 5, wherein in step C), the nozzle is moved to approach the target distance based on the number of pixels present between the substrate nozzles and the target distance.

7. A computer program executable by a computer, which causes the computer to perform the steps of the nozzle position detection method described in any one of claims 1 to 4.

8. A substrate processing apparatus comprising: a substrate holding unit for holding a substrate; a nozzle for discharging a processing liquid; a nozzle driving unit for moving the nozzle; an imaging unit; and a control unit for controlling the nozzle driving unit, wherein the control unit performs the nozzle position detection method described in any one of claims 1 to 4.

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