Magnetic sensor device
The magnetic sensor device with triangular substrates and flexible arrangements addresses the limitations of conventional devices, providing high accuracy and versatility in magnetic field measurement.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- SPIN SENSING FACTORY CORP
- Filing Date
- 2025-10-31
- Publication Date
- 2026-07-16
AI Technical Summary
Conventional magnetic sensor devices are limited in their arrangement shapes, leading to insufficient detection accuracy in situations other than their designed configurations.
A magnetic sensor device with triangular substrates and three magnetic sensors at each vertex, allowing flexible arrangements and connections to form various shapes, including concentric circles and straight lines, enabling efficient and accurate magnetic field measurement.
The device achieves high detection accuracy and versatility in measuring magnetic fields across different scenarios by optimizing sensor placement and connection methods.
Smart Images
Figure JP2025038401_16072026_PF_FP_ABST
Abstract
Description
Magnetic Sensor Device
[0001] The present invention relates to a magnetic sensor device.
[0002] Conventionally, in order to improve the detection accuracy of a magnetic field or increase the S / N ratio of the magnetic field to be detected, devices in which a plurality of magnetic sensors are arranged side by side have been developed. For example, those in which magnetic sensors are arranged in a row (see, for example, Patent Document 1), those in which a plurality of magnetic sensor arrays arranged in the same direction are arranged three-dimensionally (see, for example, Patent Document 2), those in which magnetic sensors are arranged along a circle on a plane, or those in which magnetic sensors are arranged on the surface of a flexible substrate bent in an arc shape (see, for example, Patent Document 3), those in which magnetic sensors are arranged in a grid (see, for example, Patent Document 4), etc.
[0003] Japanese Patent Application Laid-Open No. 2020-024173, Japanese Patent Application Laid-Open No. 2024-161066, Japanese Patent Application Laid-Open No. 2020-008476, Japanese Patent Application Laid-Open No. 2017-003345 [[ID=;10]]
[0004] However, the conventional magnetic sensor devices as described in Patent Documents 1 to 4 have a problem that the arrangement of the magnetic sensors is limited to a line shape, a circular shape, an arc shape, a grid shape, etc., respectively, so that the situations in which they can be effectively used are limited. Further, when used in situations other than effective situations, there is a problem that the magnetic field cannot be detected with sufficient detection accuracy.
[0005] The present invention has been made paying attention to such problems, and an object thereof is to provide a magnetic sensor device that can be effectively applied to various situations and can measure a magnetic field with relatively high detection accuracy.
[0006] In order to achieve the above object, the magnetic sensor device according to the present invention has a plurality of unit units each having a substantially triangular substrate and three magnetic sensors arranged at the positions of the vertices of a predetermined triangle on the substrate, and each unit unit is arranged side by side in a planar manner such that one vertex of each of the substrates converges at one point, and adjacent unit units are connected by one side of each of the substrates.
[0007] The magnetic sensor device according to the present invention allows for various arrangements of the three magnetic sensors on the substrate of each unit unit by changing the size of the generally triangular substrate of each unit unit, the shape of the triangle, and the number of unit units connected to each other. Therefore, the arrangement of each magnetic sensor can be set according to various situations in which magnetic fields are measured, making it effectively applicable to a wide range of situations.
[0008] In the magnetic sensor device according to the present invention, it is preferable that the substrates of each unit unit are the same size and shape. In the magnetic sensor device according to the present invention, each unit unit is arranged in a planar manner such that one vertex of each substrate converges to one point (hereinafter also referred to as the "center point"). Therefore, of the three magnetic sensors placed on the substrate of each unit unit, the corresponding magnetic sensors are arranged on concentric circles centered on the center point. For this reason, by scanning the magnetic field along each circle, the magnetic field can be measured efficiently and with relatively high accuracy. Furthermore, depending on the arrangement of each magnetic sensor, three or more magnetic sensors can be arranged in a straight line, and by scanning the magnetic field along that straight line, the magnetic field can be measured efficiently and with relatively high accuracy.
[0009] In the magnetic sensor device according to the present invention, the size of the substrate of each unit unit may be any size. Also, the triangular shape of the substrate of each unit unit may be any shape, such as an equilateral triangle or an isosceles triangle. Furthermore, the substrate of each unit unit does not have to be a perfect triangle, but may be roughly triangular in shape. For example, it may be a sector shape in which the base of the triangle opposite the center point forms an arc, or some of the three vertices of the triangle may be cut into a curved or straight shape. Also, there may be holes in the central part of the substrate, or in parts where the magnetic sensors are not attached. Each magnetic sensor of each unit unit may have any direction in which it senses the magnetic field (hereinafter also referred to as the "sensing direction"). All or two of the three magnetic sensors in each unit unit may have the same sensing direction, or the three magnetic sensors may have different sensing directions, for example, each having a sensing direction along three mutually orthogonal axes. Also, for example, all magnetic sensors in all unit units may have the same sensing direction.
[0010] Furthermore, the magnetic sensor device according to the present invention may have two unit units, or three or more. In addition to a plurality of unit units arranged so that one vertex of a substrate converges to a single point, the magnetic sensor device according to the present invention may have one or more unit units or other substrates connected to those unit units. In this case, for example, a plurality of unit units arranged so that one vertex of a substrate converges to a single point may be considered as one set, and a plurality of sets may be connected alternately in a strip shape. Also, in the magnetic sensor device according to the present invention, adjacent unit units that are connected to each other may be connected in any way, for example, they may be connected by gluing one edge of each substrate together, or one edge of each substrate may be connected by a connecting member or the like, or each substrate may be originally formed as a single unit. Furthermore, in addition to the three magnetic sensors of each unit unit, the magnetic sensor device according to the present invention may have magnetic sensors arranged at desired positions.
[0011] In the magnetic sensor device according to the present invention, each magnetic sensor may consist of any type of sensor, such as a Hall sensor, a tunnel magnetoresistance sensor (TMR sensor), a giant magnetoresistance sensor (GMR sensor), or an anisotropic magnetoresistance sensor (AMR sensor).
[0012] Furthermore, in the magnetic sensor device according to the present invention, each magnetic sensor of each unit unit may be positioned at any triangular vertex on the substrate of the corresponding unit unit. For example, the substrates of each unit unit may have the same size and shape, and each magnetic sensor of each unit unit may be positioned at the same location on each substrate. In particular, it is preferable that each magnetic sensor of each unit unit be positioned at the vertices of a triangle that is similar to the triangular shape of the substrate of the corresponding unit unit, shares the same centroid as the triangular shape of the substrate, and whose sides are parallel to the corresponding sides of the triangular shape of the substrate. Furthermore, it is preferable that the similarity ratio between the triangular shape of the substrate and the triangle on which each magnetic sensor is positioned at its vertex is 4:1.
[0013] The magnetic sensor device according to the present invention has a sum of angles of vertices concentrated at one point in each unit unit, which is 360 degrees, and may be arranged in a planar configuration around that point. In particular, the unit unit may consist of n units, and each unit unit may have an angle of 360 / n degrees at one vertex of the substrate, and may be arranged in a planar configuration around that point such that one vertex is concentrated at that point. In this case, of the three magnetic sensors placed on the substrate of each unit unit, the corresponding magnetic sensors are arranged at equal angular intervals on concentric circles centered on the central point. Therefore, by scanning the magnetic field along each circle, the magnetic field can be measured more efficiently and with higher accuracy.
[0014] In the magnetic sensor device according to the present invention, it is preferable that adjacent unit units are connected to each other in a bendable manner. In this case, any of the connection points between adjacent unit units can be bent to form a three-dimensional shape. For example, when two connection points extend in a straight line through a central point, the bent portion can be positioned along the straight edge of the object to be measured by bending them at the connection points, thereby enabling measurement of the magnetic field.
[0015] The magnetic sensor device according to the present invention has a sum of angles of vertices concentrated at one point in each unit unit that is less than 360 degrees, and among the unit units connected to each other, there may be a gap between the unit unit at one end and the unit unit at the other end along the circumferential direction centered on the one point. In this case, it is particularly preferable that adjacent unit units are connected to each other in a bendable manner. This allows the substrate of each unit unit to be positioned along the surface of a three-dimensional object to be measured by bending at the connection point of adjacent unit units, and can be effectively applied to measuring magnetic fields on three-dimensional objects. For example, by connecting the unit units so as to close the gap between the unit unit at one end and the unit unit at the other end, a cone shape can be formed, and the convex or angular part of the object to be measured can be placed inside it to measure the magnetic field. In this case, since each unit unit has three magnetic sensors, the magnetic field can be measured with relatively high detection accuracy even if the object is three-dimensional.
[0016] The magnetic sensor device according to the present invention may include a recording means for recording sensitivity information of each magnetic sensor acquired in advance, a correction means for correcting measurement data measured by each magnetic sensor based on the sensitivity information corresponding to each magnetic sensor recorded in the recording means, and an output means for outputting the corrected data corrected by the correction means. In this case, variations in the sensitivity of each magnetic sensor can be corrected, and the magnetic field can be measured with higher accuracy. Furthermore, this eliminates the need to calibrate each magnetic sensor each time a measurement is taken, making measurements easy. The recording means may be any type of device that can record the sensitivity information of each magnetic sensor, and may consist of, for example, a non-volatile memory.
[0017] If such a correction means is provided, for example, the recording means may consist of a plurality of non-volatile memories provided corresponding to each magnetic sensor, and record the sensitivity information of the magnetic sensor corresponding to each non-volatile memory. The correction means may be configured to acquire the sensitivity information from the corresponding non-volatile memory along with the measurement data from each magnetic sensor, and to correct the measurement data based on that sensitivity information. Alternatively, each magnetic sensor may have sensor identification information consisting of a manufacturing number or barcode provided to each magnetic sensor so that each magnetic sensor can be identified. The recording means may record the sensor identification information and the sensitivity information of each magnetic sensor in association with each other. The correction means may be configured to acquire the sensitivity information of each magnetic sensor recorded in the recording means from the sensor identification information of each magnetic sensor, and to correct the measurement data of the corresponding magnetic sensor based on that sensitivity information.
[0018] According to the present invention, it is possible to provide a magnetic sensor device that can be effectively applied to various situations and can measure magnetic fields with relatively high detection accuracy.
[0019] (a) A plan view showing a unit unit consisting of a triangle with three sides of different lengths according to an embodiment of the present invention; (b) A plan view showing a magnetic sensor device using the unit unit; (c) A plan view of a modified example having an additional magnetic sensor; (d) A plan view showing a unit unit consisting of an isosceles triangle; (e) A plan view showing a magnetic sensor device using the unit unit; (f) A plan view of a modified example having an additional magnetic sensor. (a) A plan view showing a unit unit consisting of a triangle with three sides of different lengths, in which the sensing direction of each magnetic sensor is the same; (b) A plan view showing a magnetic sensor device consisting of that unit unit in which all magnetic sensors have the same sensing direction; (c) A plan view showing a unit unit consisting of an isosceles triangle in which the sensing direction of each magnetic sensor is the same; (d) A plan view showing a magnetic sensor device consisting of that unit unit in which all magnetic sensors have the same sensing direction; (e) A plan view showing a unit unit consisting of a triangle with three sides of different lengths in which the sensing direction of two magnetic sensors is the same; (f) A plan view showing a magnetic sensor device consisting of that unit unit in which all magnetic sensors have one of two sensing directions; (g) A plan view showing a unit unit consisting of an isosceles triangle in which the sensing direction of two magnetic sensors is the same; (h) A plan view showing a magnetic sensor device consisting of that unit unit in which all magnetic sensors have one of two sensing directions.(a) A plan view showing a unit unit of a magnetic sensor device according to an embodiment of the present invention, consisting of a triangle with three sides of different lengths, in which each magnetic sensor has the same sensing direction; (b) A plan view showing a magnetic sensor device in which all magnetic sensors have a sensing direction along the circumferential direction centered on a central point, based on that unit unit; (c) A plan view showing a unit unit consisting of an isosceles triangle, in which each magnetic sensor has the same sensing direction; (d) A plan view showing a magnetic sensor device in which all magnetic sensors have a sensing direction along the circumferential direction centered on a central point, based on that unit unit; (e) A plan view showing a unit unit consisting of a triangle with three sides of different lengths, in which each magnetic sensor has a sensing direction along three mutually orthogonal axes; (f) A plan view showing a magnetic sensor device in which corresponding magnetic sensors have the same sensing direction, based on that unit unit; (g) A plan view showing a unit unit consisting of an isosceles triangle, in which each magnetic sensor has a sensing direction along three mutually orthogonal axes; (h) A plan view showing a magnetic sensor device in which corresponding magnetic sensors have the same sensing direction, based on that unit unit. Figure 4(d) shows a plan view of a magnetic sensor device according to an embodiment of the present invention, (a) a plan view showing a unit unit consisting of a triangle with three sides of different lengths and one vertex angle of 360 / n degrees, (b) a plan view showing a magnetic sensor device in which n such unit units are arranged without gaps, (c) a plan view showing a unit unit consisting of an isosceles triangle with a vertex angle of 360 / n degrees, and (d) a plan view showing a magnetic sensor device in which n such unit units are arranged without gaps. Figure 4(d) shows a plan view of the magnetic sensor device shown, (a) when n=4, (b) when n=5, (c) when n=6, (d) when n=7, (e) when n=8, and (f) a plan view of a modified example having an additional magnetic sensor when n=6. (a) A plan view showing a unit of magnetic sensor device according to an embodiment of the present invention, with three sides of different lengths; (b) A plan view showing magnetic sensor devices arranged with gaps between them, using the unit of magnetic sensor device; (c) A plan view of a cone formed to fill the gap; and (d) A front view of the cone.Figure 7(b) shows the magnetic sensor device according to an embodiment of the present invention: (a) a plan view showing a unit unit consisting of an isosceles triangle, (b) a plan view showing the magnetic sensor device arranged with gaps between the unit units, (c) a plan view of the cone formed by the gap, and (d) a front view of the cone. Figure 7(b) shows the magnetic sensor device: (a) a plan view when the central angle at the center of the gap is 240 degrees, (b) a plan view of the cone formed to close the gap, (c) a front view of the cone, (d) a plan view when the central angle at the center of the gap is 90 degrees, (e) a plan view of the cone formed to close the gap, (f) a front view of the cone, (g) a plan view when the central angle at the center of the gap is 60 degrees, (h) a plan view of the cone formed to close the gap, (i) a front view of the cone, (j) a plan view when the central angle at the center of the gap is 30 degrees, (k) a plan view of the cone formed to close the gap, and (l) a front view of the cone. (a) A plan view of the magnetic sensor device shown in Figure 6(b), (b) A perspective view showing the magnetic sensor device in use, placed on the surface of the corner of a cube, (c) A plan view of the magnetic sensor device shown in Figure 7(b), and (d) A perspective view showing the magnetic sensor device in use, placed on the surface of the corner of a cube. (a) A plan view of a modified example of the magnetic sensor device according to an embodiment of the present invention in which the substrate of each unit unit is fan-shaped, (b) A plan view of a modified example further having a connector and output terminals, (c) A plan view of a modified example having an additional magnetic sensor, (d) A plan view of a modified example in which a triangular unit unit has a connector and output terminals, (e) A plan view of a modified example in which all unit units have connectors and output terminals, and (f) A plan view of a modified example in which peripheral circuits are provided on the connector of (d). (a) A plan view of a magnetic sensor device according to an embodiment of the present invention when all magnetic sensors have the same sensing direction, (b) A plan view when two magnetic sensors in each unit have the same sensing direction and only one other magnetic sensor has a different sensing direction, and (c) A plan view when each magnetic sensor in each unit has a sensing direction along three mutually orthogonal axes.(a) A plan view of a modified example of the magnetic sensor device shown in Figure 10(b) with peripheral circuits provided, (b) A plan view of a modified example of the magnetic sensor device shown in Figure 10(d) with peripheral circuits provided, (c) A perspective view showing the magnetic sensor device shown in Figure 10(d) in use arranged along a straight edge, and (d) A perspective view showing the magnetic sensor device shown in Figure 10(b) in use arranged along a straight edge. (a) A plan view of a modified example of the magnetic sensor device according to an embodiment of the present invention in which the substrate of each unit unit is made up of a fan shape and each unit unit is arranged with gaps between them, (b) A perspective view of a cone formed to close the gap, (c) A plan view of the cone, and (d) A front view of the cone. (a) A plan view of the magnetic sensor device shown in Figure 10(a), (b) A plan view of the magnetic sensor device shown in Figure 10(b), (c) A plan view of the magnetic sensor device shown in Figure 10(c), and (d) A plan view of a modified example in which the substrate of the magnetic sensor device shown in Figure 10(d) is made up of a PCB substrate. (a) A plan view of a modified example of the magnetic sensor device shown in Figure 14(c), in which the connection portion of each unit unit is bendable; (b) A perspective view showing the magnetic sensor device in use arranged along a straight edge; (c) A plan view of a modified example of the magnetic sensor device shown in (a), in which each unit unit is arranged with gaps between them; (d) A perspective view of a cone formed to fill the gaps. (a) A plan view of a modified example of the magnetic sensor device shown in Figure 10(d), in which a reinforcing substrate is provided between each magnetic sensor and the substrate; (b) A plan view of a modified example further having peripheral circuits; (c) A plan view of a modified example of the magnetic sensor device shown in Figure 10(b), in which each unit unit is arranged with gaps between them, and a reinforcing substrate is provided between each magnetic sensor and the substrate; (d) A plan view of a modified example of the magnetic sensor device shown in (c), in which a reinforcing substrate is provided on the surface of the substrate opposite to each magnetic sensor. (a) An enlarged perspective view of the mounting position of the reinforcing substrate in the magnetic sensor device shown in Figures 16(a) to (c), (b) A perspective view showing a modified example of the mounting state of each magnetic sensor in (a), (c) An enlarged perspective view of the mounting position of the reinforcing substrate in the magnetic sensor device shown in Figure 16(d), and (d) A perspective view showing a modified example of the mounting state of each magnetic sensor in (c).(a) A plan view showing a first modified shape of the reinforcing substrate of the magnetic sensor device shown in Figure 16(a), (b) A plan view showing a first modified shape of the reinforcing substrate of the magnetic sensor device shown in Figure 16(b), and (c) A plan view showing a second modified shape of the reinforcing substrate of the magnetic sensor device shown in Figure 16(a). (a) A plan view of a modified version of the magnetic sensor device shown in Figure 18(a) in which each unit is arranged with gaps between them, (b) A perspective view of a cone formed to fill the gaps, (c) A plan view of a modified version of the magnetic sensor device shown in (a) in which the reinforcing substrate is on the surface of the substrate opposite to each magnetic sensor, and (d) A perspective view of a cone formed to fill the gaps. (a) A plan view of a modified example of the magnetic sensor device shown in Figure 10(d), having a reinforcing substrate in the connector portion; (b) A plan view of a modified example of the magnetic sensor device shown in Figure 10(d), in which the connector portion is foldable; (c) An enlarged perspective view of the connector portion showing the state in which the connector portion of (b) is folded and the reinforcing substrate is inserted inside; (d) An enlarged perspective view of the connector portion showing the state in which the reinforcing substrate is inserted inside the folded connector portion of (b); (e) A plan view of the magnetic sensor device in the state of (d). (a) The magnetic sensor device shown in Figure 16(a); (b) The magnetic sensor device shown in Figure 16(b); (c) The magnetic sensor device shown in Figure 19(c); (d) The magnetic sensor device shown in Figure 16(c); (e) A plan view of a modified example of the magnetic sensor device shown in Figure 16(d), having a reinforcing substrate in the connector portion. Figure 5(c) is a plan view of a modified example of the magnetic sensor device shown, having (a) a notch of a certain width and (b) a wedge-shaped notch formed from the outer edge toward the center point. Figure 22(a) shows the magnetic sensor device, with (a) two magnetic sensor devices whose substrates are made of FPC substrates, (b) two magnetic sensor devices having a reinforcing member, (c) two magnetic sensor devices whose substrates are made of PCB substrates, (d) a perspective view of the cross-shaped three-dimensional form when the notches of the two magnetic sensor devices (a) to (c) are interlocked, (e) a plan view of a modified example of the magnetic sensor device shown in Figure 4(d), having a notch formed from the outer edge toward the center point, and (f) a perspective view showing the magnetic sensor device shown in (e) in use, placed on the surface of the corner of a cube.(a) A plan view showing an example of setting the sensing direction of each magnetic sensor in the magnetic sensor device shown in Figure 23(e), (b) A perspective view showing the sensing direction of each magnetic sensor when the magnetic sensor device shown in (a) is placed on the surface of the corner of a cube, (c) A plan view showing the two magnetic sensor devices shown in (a) and one magnetic sensor device having a cross-shaped insertion hole, and (d) A perspective view showing the three-dimensional shape when the three magnetic sensor devices of (c) are combined. Figure 22(a) shows a modified example of the magnetic sensor device shown in Figure 22(a), (a) a plan view of a modified example in which three are connected, (b) a perspective view showing the usage state in which (a) has been deformed into a curved surface, and (c) a plan view of a modified example in which four are connected. (a) A plan view of a modified example of the magnetic sensor device shown in Figure 5(c) having a U-shaped cutout at the mounting position of each magnetic sensor, and (b) A plan view of a modified example of the magnetic sensor device shown in Figure 22(b) having a U-shaped cutout at the mounting position of one magnetic sensor on the substrate of each unit unit. (a) A plan view of a modified example of the magnetic sensor device shown in Figure 5(c), in which a U-shaped notch is provided at the mounting position of one magnetic sensor on the substrate of each unit unit, and the position of the notch is shifted; (b) A perspective view showing the state in which each notch in (a) is folded; (c) A perspective view showing an example of setting the sensing direction of each magnetic sensor in (b); (d) A perspective view of an attachment for holding each notch in (a) folded vertically. A perspective view of a modified example of the magnetic sensor device of an embodiment of the present invention in which each magnetic sensor has a coil, in which (a) all magnetic sensors are parallel to the substrate and have the same sensing direction; (b) all magnetic sensors have a sensing direction perpendicular to the substrate; (c) a perspective view when the three magnetic sensors of each unit unit have different configurations and have sensing directions along three mutually orthogonal axes; (d) a perspective view when the three magnetic sensors of each unit unit have the same configuration and have sensing directions along three mutually orthogonal axes. The following are perspective views showing a modified example of a magnetic sensor device according to an embodiment of the present invention, in which each magnetic sensor has a coil: (a) a perspective view showing an example of a magnetic sensor configuration in which the sensing direction is in the X direction parallel to the substrate; (b) a perspective view showing an example of a magnetic sensor configuration in which the sensing direction is in the Y direction parallel to the substrate and perpendicular to the X direction; and (c) a perspective view showing an example of a magnetic sensor configuration in which the sensing direction is in the Z direction perpendicular to the substrate.The following are perspective views of a modified version of the magnetic sensor device according to an embodiment of the present invention, in which each magnetic sensor has a coil: (a) a perspective view showing a structure in which the magnetic sensor is attached to a substrate using pins; (b) a perspective view showing a modified version in which the magnetic sensor is attached to a substrate by passing the coil through the opposite side of the substrate; (c) a perspective view showing a modified version of the structure in (b) using a spacer; and (d) a perspective view showing a modified version of the structure in (a) in which the MTJ element is inverted. The following are perspective views of a modified version of the magnetic sensor device according to an embodiment of the present invention, in which each magnetic sensor has a coil: (a) a perspective view showing an assembly method when forming a coil using a coated substrate; (b) a perspective view showing the state in which the coated substrate is attached to the substrate according to (a) to form a coil; and (c) a perspective view showing a magnetic sensor assembled according to (a). The following are perspective views of a modified version of the magnetic sensor device according to an embodiment of the present invention, in which each magnetic sensor has a coil: (a) a perspective view showing an assembly method when forming a coil using microfabrication technology; (b) a perspective view showing a magnetic sensor assembled according to (a); and (c) a perspective view showing the structure of the coil of the magnetic sensor shown in (b).
[0020] The embodiments of the present invention will now be described based on the drawings. Figures 1 to 32 show a magnetic sensor device 10 according to an embodiment of the present invention. As shown in Figures 1(a) to 1(f), the magnetic sensor device 10 has a plurality of unit units 11, and each unit unit 11 has a substrate 12 and three magnetic sensors 13.
[0021] As shown in Figures 1(a) and (d), the substrate 12 has a triangular planar shape. Each unit 11 of the substrate 12 is the same size and shape. The substrate 12 may be made of any material that can be used as a substrate 12, such as an FPC (Flexible Printed Circuit) or a PCB (Printed Circuit Board). In the specific example shown in Figure 1, the substrate 12 is made of an FPC.
[0022] The substrate 12 may be of any size. The substrate 12 may be any shape as long as it is a triangle, such as a triangle with three sides of different lengths as shown in Figure 1(a), or an isosceles triangle or equilateral triangle as shown in Figure 1(d).
[0023] Each magnetic sensor 13 is positioned on the substrate 12 at the vertices of a predetermined triangle. Each magnetic sensor 13 may consist of any type of sensor, such as a Hall sensor, a tunnel magnetoresistance sensor (TMR sensor), a giant magnetoresistance sensor (GMR sensor), or an anisotropic magnetoresistance sensor (AMR sensor). In the specific example shown in Figure 1, each magnetic sensor 13 consists of a TMR sensor.
[0024] Each magnetic sensor 13 may be positioned at any triangular vertex on the substrate 12. In the specific example shown in Figure 1, each magnetic sensor 13 is positioned at the vertices of a triangle that is similar to the triangular shape of the substrate 12, with a similarity ratio of 4:1, sharing the same centroid as the triangular shape of the substrate 12, and with each side parallel to the corresponding side of the triangular shape of the substrate 12.
[0025] As shown in Figures 1(b), (c), (e), and (f), each unit 11 has each magnetic sensor 13 positioned at the same location on its respective substrate 12. Each unit 11 is arranged in a planar configuration such that one vertex of each substrate 12 converges to a single point (center point 15). Furthermore, each unit 11 is connected to adjacent units 11 by one edge of their respective substrates 12. These adjacent unit 11s may be connected in any way; for example, they may be connected by gluing one edge of each substrate 12 together, or by connecting members, or each substrate 12 may be formed as a single unit. In the specific example shown in Figure 1, each substrate 12 is formed as a single unit.
[0026] Next, let's explain the operation. The magnetic sensor device 10 can change the arrangement of the three magnetic sensors 13 placed on the substrate 12 of each unit unit 11 in various ways by changing the size of the substrate 12 of each unit unit 11, the shape of the substrate 12, and the number of unit units 11 connected to each other. Therefore, the arrangement of each magnetic sensor 13 can be set according to various situations in which magnetic fields are measured, making it effectively applicable to a variety of situations.
[0027] Furthermore, in the magnetic sensor device 10, each unit unit 11 is arranged in a planar configuration such that one vertex of each substrate 12 converges to the center point 15. As a result, of the three magnetic sensors 13 placed on the substrate 12 of each unit unit 11, the corresponding magnetic sensors 13 are arranged on concentric circles centered on the center point 15. Therefore, by scanning the magnetic field along each circle, the magnetic field can be measured efficiently and with relatively high accuracy. In addition, depending on the arrangement of each magnetic sensor 13, three or more magnetic sensors 13 can be arranged in a straight line, and by scanning the magnetic field along that straight line, the magnetic field can be measured efficiently and with relatively high accuracy.
[0028] As shown in Figures 1(c) and (f), the magnetic sensor device 10 may have magnetic sensors 13a positioned at desired locations in addition to the three magnetic sensors 13 of each unit unit 11. In the specific example shown in Figures 1(c) and (f), a magnetic sensor 13a is positioned at the center point 15, but magnetic sensors 13a may be positioned at other locations.
[0029] As shown in Figures 2 and 3, the magnetic sensor device 10 may have magnetic field sensing directions (arrows in the figures, hereafter the same) of each magnetic sensor 13 in each unit unit 11 in any direction, and all or two of the three magnetic sensors 13 in each unit unit 11 may have the same sensing direction, or the three magnetic sensors 13 may have different sensing directions. Specifically, as shown in Figures 2(a) to (d), each magnetic sensor 13 in each unit unit 11 may have the same sensing direction, and furthermore, in a magnetic sensor device 10 in which each unit unit 11 is connected, all magnetic sensors 13 may have the same sensing direction. Also, as shown in Figures 2(e) to (h), two magnetic sensors 13 in each unit unit 11 may have the same sensing direction, and only one other magnetic sensor 13 may have a different sensing direction, and furthermore, in a magnetic sensor device 10 in which each unit unit 11 is connected, each magnetic sensor 13 may be positioned to have one of those two sensing directions.
[0030] Furthermore, as shown in Figures 3(a) to (d), each magnetic sensor 13 of each unit unit 11 may have the same sensing direction parallel to the surface of the substrate 12, and in a magnetic sensor device 10 to which each unit unit 11 is connected, all magnetic sensors 13 may have a sensing direction along the circumferential direction centered on the center point 15. Also, as shown in Figures 3(e) to (f), each magnetic sensor 13 of each unit unit 11 may have a sensing direction along three mutually orthogonal axes, and in a magnetic sensor device 10 to which each unit unit 11 is connected, the corresponding magnetic sensors 13 of each unit unit 11 may have the same sensing direction.
[0031] As shown in Figures 4 and 5, in the magnetic sensor device 10, the unit unit 11 consists of n units, and each unit unit 11 may be arranged in a planar manner around the center point 15 such that the angle of one vertex of the substrate 12 is 360 / n degrees and that one vertex is concentrated at the center point 15. In this case, of the three magnetic sensors 13 placed on the substrate 12 of each unit unit 11, the corresponding magnetic sensors 13 are arranged at equal angular intervals on concentric circles centered on the center point 15. Therefore, by scanning the magnetic field along each circle, the magnetic field can be measured more efficiently and with higher accuracy.
[0032] Specifically, as shown in Figures 4(a) and 4(b), when the substrate 12 of the unit unit 11 consists of a triangle with three sides of different lengths, each magnetic sensor 13 is arranged on three concentric circles centered on the center point 15. Also, as shown in Figures 4(c) and 4(d), when the substrate 12 of the unit unit 11 consists of an isosceles triangle with its vertex angle converging on the center point 15, each magnetic sensor 13 is arranged on two concentric circles centered on the center point 15. In this case, the circle with the larger diameter has twice as many magnetic sensors 13 compared to the circle with the smaller diameter, thereby improving the accuracy of magnetic field measurement.
[0033] Furthermore, Figures 5(a) to (e) show the magnetic sensor device 10 when the number n of unit units 11 is 4 to 8. As shown in Figures 5(a), (c), and (e), when n is an even number, not only can each magnetic sensor 13 be arranged concentrically, but three or more magnetic sensors 13 can also be arranged in a straight line. Therefore, the magnetic field can be scanned not only along the circle but also along the straight line, enabling efficient and highly accurate measurement of the magnetic field. Also, as shown in Figures 5(b) and (d), when n is an odd number, three or more magnetic sensors 13 cannot be arranged in a straight line, but each magnetic sensor 13 can be arranged concentrically. In these cases as well, for example, as shown in Figure 5(f), magnetic sensors 13a may be placed at desired positions in addition to the three magnetic sensors 13 of each unit unit 11.
[0034] As shown in Figures 6 to 9, the magnetic sensor device 10 has a configuration in which the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and among the unit units 11 connected to each other, there is a gap between the unit unit 11 at one end and the unit unit 11 at the other end along the circumferential direction centered on the center point 15, and adjacent unit units 11 may be connected to each other in a bendable manner. In this case, for example, as shown in Figures 6(a) to (d), by bending the connection parts of adjacent unit units 11 and connecting them in such a way that the gap between the unit unit 11 at one end and the unit unit 11 at the other end is closed, it is possible to make a roughly conical shape, and the convex or angular part of the object to be measured can be placed inside it to measure the magnetic field. In this case, as shown in Figures 6(c) and (d), the corresponding magnetic sensors 13 of each unit 11 are arranged on three circles whose centers lie on the central axis of the cone passing through the center point 15. Therefore, by scanning the magnetic field along each circle, the magnetic field can be measured more efficiently and with higher accuracy.
[0035] Furthermore, as shown in Figures 7(a) to 7(d), when the substrate 12 of the unit unit 11 is made up of an isosceles triangle and its vertex angle is concentrated at the center point 15, connecting them to form a cone that closes the gaps between the unit units 11 allows each magnetic sensor 13 to be arranged on two circles. In this case, the number of magnetic sensors 13 in the circle with the larger diameter is doubled compared to the circle with the smaller diameter, thereby improving the accuracy of magnetic field measurement.
[0036] Furthermore, as shown in Figure 8, when the central angle at the center point 15 of the gap between the unit units 11 narrows to, for example, 240 degrees (see Figures 8(a) to (c)), 90 degrees (see Figures 8(d) to (f)), 60 degrees (see Figures 8(g) to (i)), or 30 degrees (see Figures 8(j) to (l)), the cone formed by connecting to close the gap between the unit units 11 gradually approaches a flattened shape. Therefore, by adjusting the gap between the unit units 11 according to the shape of the object to be measured, each magnetic sensor 13 can be optimally positioned to measure the magnetic field.
[0037] Furthermore, as shown in Figure 9, when the number of unit units 11 is a multiple of 3 (6 in Figure 9), and the central angle of the gap between the unit units 11 is 90 degrees, the connection points between the unit units 11 are located at positions that divide the central angle at the center point 15 of the connected unit units 11 into 90-degree intervals. Therefore, by bending the unit units 11 at a 90-degree angle at the connection points, the magnetic field can be measured by positioning them along the surface of the corners of the cube of the object to be measured 1, as shown in Figures 9(b) and (d).
[0038] As shown in Figures 10(a) and (b), the magnetic sensor device 10 may have a substrate 12 of each unit unit 11 that is deformed from a triangle with a circular arc base, i.e., it may be sector-shaped. Also, as shown in Figures 10(b), (d), (e), and (f), the magnetic sensor device 10 may have a connector portion 21 that protrudes from the outside of one or more unit units 11 arranged in a planar configuration, and a plurality of output terminals 22 provided on the connector portion 21 and electrically connected to the corresponding magnetic sensors 13. In this case, the connector portion 21 may be rectangular in shape, and each output terminal 22 may be arranged in a line on one surface of the connector portion 21. Also, as shown in Figures 10(b), (d), and (f), the connector portion 21 may be provided along the base of one unit unit 11 (the side opposite the vertex located at the center point 15), or it may be provided along the base of multiple unit units 11, or as shown in Figure 10(e), all of the unit units 11. Furthermore, as shown in Figure 10(f), peripheral circuits 23, such as circuits related to each magnetic sensor 13, may be provided in the connector portion 21. Also, as shown in Figure 10(c), in addition to the three magnetic sensors 13 of each unit 11, magnetic sensors 13a may be placed at desired positions.
[0039] Furthermore, as shown in Figure 11, the direction in which each magnetic sensor 13 of each unit unit 11 senses the magnetic field may be any direction, and all or two of the three magnetic sensors 13 in each unit unit 11 may have the same sense direction, or the three magnetic sensors 13 may have different sense directions. Specifically, as shown in Figure 11(a), in a magnetic sensor device 10 in which each unit unit 11 is connected, all magnetic sensors 13 may have the same sense direction. Also, as shown in Figure 11(b), in a magnetic sensor device 10 in which each unit unit 11 is connected, two magnetic sensors 13 of each unit unit 11 may have the same sense direction, and only one other magnetic sensor 13 may have a different sense direction. Also, as shown in Figure 11(c), in a magnetic sensor device 10 in which each unit unit 11 is connected, each magnetic sensor 13 of each unit unit 11 may have a sense direction along three mutually orthogonal axes.
[0040] Furthermore, as shown in Figures 12(a) and (b), peripheral circuits 23, such as sensors other than each magnetic sensor 13, circuits related to those sensors, and circuits related to each magnetic sensor 13, may be provided on the substrate 12 of each unit unit 11. Also, as shown in Figures 12(c) and (d), the connection portion between adjacent unit units 11 may extend linearly through the center point 15, and the connection portion may be bendable. In this case, for an object to be measured 1 having a linear edge, the bendable portion can be placed along the edge to measure the magnetic field.
[0041] Furthermore, when the base of the substrate 12 of each unit unit 11 forms an arc-shaped triangle, i.e., a sector, as shown in Figure 13, the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and adjacent unit units 11 may be connected to each other in a bendable manner. In this case, by bending the connection parts of adjacent unit units 11 and connecting the unit units 11 in a way that closes the gaps between the unit units 11, a nearly conical shape can be achieved.
[0042] As shown in Figures 14 and 15, the magnetic sensor device 10 may have substrates 12 of each unit unit 11 made of PCB substrates. In this case, compared to the case where each substrate 12 is made of FPC substrates, each substrate 12 is less prone to deformation, so the precise position of each magnetic sensor 13 can be determined, and the magnetic field can be measured with high precision. Also, in this case, similar to Figure 10 where each substrate 12 is made of FPC substrates, each substrate 12 may be a triangle with an arc-shaped base, i.e., a sector, as shown in Figures 14(a) and (b). Furthermore, as shown in Figures 14(b) and (d), the magnetic sensor device 10 may have a connector portion 21 and a plurality of output terminals 22. Furthermore, as shown in Figure 14(c), in addition to the three magnetic sensors 13 of each unit unit 11, magnetic sensors 13a may be placed at desired positions.
[0043] Furthermore, as shown in Figure 15, adjacent unit units 11 may be bendable and connected to each other, for example, by a rubber material. In this case, for example, as shown in Figures 15(a) and (b), the connection points between adjacent unit units 11 may extend in a straight line on both sides of the center point 15. In this case, for an object 1 to be measured that has a straight edge, the bent portion can be placed along the edge to measure the magnetic field. Also, for example, as shown in Figures 15(c) to (d), the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and among the unit units 11 connected to each other, there may be a gap between one end of the unit unit 11 and the other end of the unit unit 11 along the circumferential direction centered on the center point 15. At this time, by bending the connecting parts of adjacent unit units 11 and connecting them in such a way that the gap between the unit unit 11 at one end and the unit unit 11 at the other end is closed, it is possible to make it roughly conical, and the convex or angular part of the object to be measured 1 can be placed inside it to measure the magnetic field.
[0044] As shown in FIGS. 16 to 19, in the magnetic sensor device 10, the substrate 12 of each unit unit 11 may be made of an FPC substrate, and a reinforcing substrate 24 made of a PCB substrate may be provided on the surface of the substrate 12. In this case, it is possible to effectively prevent each magnetic sensor 13 from being peeled off or disconnected from the FPC substrate. Also, at this time, as shown in FIGS. 16(a) to (c), for example, a reinforcing substrate 24 may be provided between each magnetic sensor 13 and the FPC substrate, and as shown in FIG. 16(d), the reinforcing substrate 24 may be provided on the surface of the FPC substrate opposite to each magnetic sensor 13.
[0045] When a reinforcing substrate 24 is provided between each magnetic sensor 13 and the substrate 12 made of an FPC substrate, for example, as shown in FIGS. 17(a) and (b), the reinforcing substrate 24 is fixed to the substrate 12 by screws 25, resin, an adhesive, etc., each magnetic sensor 13 is attached to the surface of the reinforcing substrate 24, and further, each magnetic sensor 13 is electrically connected to the wiring of the substrate 12 via the reinforcing substrate 24, which is preferable. Also, at this time, a circuit such as a resistor or a Wheatstone bridge may be provided on the reinforcing substrate 24. Also, as shown in FIGS. 17(c) and (d), when a reinforcing substrate 24 is provided on the surface of the substrate 12 made of an FPC substrate opposite to each magnetic sensor 13, it is preferable that the reinforcing substrate 24 is fixed to the substrate 12 by screws, resin, an adhesive, etc.
[0046] Furthermore, when these reinforcing substrates 24 are present, the magnetic sensor device 10 may have a connector portion 21 and a plurality of output terminals 22, as shown in Figures 16(a) to (d), and peripheral circuits 23 such as sensors other than each magnetic sensor 13, circuits related to those sensors, and circuits related to each magnetic sensor 13 may be provided on each substrate 12, as shown in Figure 16(b). Also, as shown in Figures 16(c) and (d), the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and among the unit units 11 connected to each other, there may be a gap between the unit unit 11 at one end and the unit unit 11 at the other end along the circumferential direction centered on the center point 15. In this case, by bending the connection portions of each unit unit 11 and connecting the unit units 11 in a way that closes the gap, it is possible to make it roughly conical.
[0047] Furthermore, as shown in Figures 18(a), (b), 19(a), and (c), the reinforcing substrate 24 may be a triangle similar in size to the substrate 12 of each unit unit 11, but slightly smaller than the substrate 12, or as shown in Figure 18(c), the reinforcing substrate 24 may be similar in size to the combined shape of the substrates 12 of multiple unit units 11, but slightly smaller than that shape. Also, in these cases, as shown in Figures 18(a), (b), and 19(a), the reinforcing substrate 24 may be provided between each magnetic sensor 13 and the substrate 12 made of FPC substrate, or as shown in Figure 19(c), the reinforcing substrate 24 may be provided on the surface of the substrate 12 made of FPC substrate opposite to each magnetic sensor 13.
[0048] In these cases, as shown in FIGS. 18 and 19, the magnetic sensor device 10 may have a connector portion 21 and a plurality of output terminals 22. As shown in FIG. 18(b), peripheral circuits 23 such as sensors other than each magnetic sensor 13, circuits related to such sensors, and circuits related to each magnetic sensor 13 may be provided on each substrate 12. Further, as shown in FIG. 18(c), a reinforcing substrate 24 may be provided in a state where the connection portions between adjacent unit units 11 that extend linearly on both sides of the center point 15 are opened. At this time, the connection portion can be bent, and the bent portion can be arranged along the edge portion of the measurement object 1 having a linear edge portion to measure the magnetic field. Also, as shown in FIGS. 19(a) and (c), the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and among the unit units 11 connected to each other, a gap may be provided between the unit unit 11 at one end and the unit unit 11 at the other end along the circumferential direction centered on the center point 15. At this time, as shown in FIGS. 19(b) and (d), by connecting the unit units 11 so as to close the gap while bending the connection portions between the unit units 11, it can be made into a substantially conical shape.
[0049] As shown in FIGS. 20(a) and FIGS. 21(a) to (e), the magnetic sensor device 10 may have a connector portion 21 made of an FPC substrate, a plurality of output terminals 22 provided on one surface of the connector portion 21, and a reinforcing substrate 26 made of a PCB substrate provided so as to cover the other surface of the connector portion 21. Further, as shown in FIGS. 20(b) to (e), the connector portion 21 may be provided so as to be foldable with each output terminal 22 on the outside, and the reinforcing substrate 26 may be provided inside the folded connector portion 21. In these cases, it is possible to effectively prevent each output terminal 22 from being disconnected.
[0050] Furthermore, in these cases, as shown in Figures 21(a) to (e), a reinforcing substrate 24 may be provided on the surface of the substrate 12 of each unit unit 11, and as shown in Figure 21(b), peripheral circuits 23 such as sensors other than each magnetic sensor 13, circuits related to those sensors, and circuits related to each magnetic sensor 13 may be provided on each substrate 12. Also, as shown in Figures 21(c) to (e), the sum of the angles of the vertices concentrated at the center point 15 of each unit unit 11 is less than 360 degrees, and among the unit units 11 connected to each other, there may be a gap between the unit unit 11 at one end and the unit unit 11 at the other end along the circumferential direction centered on the center point 15. In this case, by bending the connection parts of each unit unit 11 and connecting the unit units 11 in a way that closes the gap, it is possible to make it roughly conical.
[0051] As shown in Figures 22 to 25, the magnetic sensor device 10 may have a notch 27 formed along one of the connection points of adjacent unit units 11, extending from the outer edge toward the center point 15, for each unit unit 11 shown in Figures 4 and 5, which are arranged in a planar manner without gaps around the center point 15 and connected to one another. The notch 27 may have a constant width, as shown in Figure 22(a), or it may be wedge-shaped, with its width gradually decreasing from the outer edge toward the center point 15, as shown in Figure 22(b).
[0052] When this notch 27 is present, the connection portion of adjacent unit units 11 can be bent to deform it to match the surface shape of the object to be measured 1, such as corners or curved surfaces, and the magnetic field can be measured with high accuracy. In this case, for example, as shown in Figures 23(e) and (f), the magnetic field can be measured by arranging it along the surface of the corner of the cube of the object to be measured 1. Furthermore, as shown in Figures 24(a) and (b), the sensing direction of each magnetic sensor 13 may be set so that the sensing direction of each magnetic sensor 13 is aligned with three mutually orthogonal axes for each surface of the cube of the object to be measured 1.
[0053] Furthermore, if the notches 27 are present, as shown in Figures 23(a) to (d), the notches 27 of the two magnetic sensor devices 10 can be interlocked to form a cross-shaped three-dimensional cross section. In this case, as shown in Figure 23(a), the substrate 12 of each unit unit 11 may be an FPC substrate, as shown in Figure 23(c), or it may be a PCB substrate, and as shown in Figure 23(b), it may have a reinforcing substrate 24. Also, as shown in Figure 24(c), the other magnetic sensor device 10 may have cross-shaped insertion holes 28 along four of the connection parts of each unit unit 11, centered on the center point 15, and be configured to allow the insertion of the three-dimensional shape shown in Figure 23(d). This makes it possible to create a new three-dimensional shape as shown in Figure 24(d).
[0054] Furthermore, if the notch 27 is present, multiple magnetic sensor devices 10 may be connected, as shown in Figure 25. In this case, even if the surface of the object to be measured 1 has a complex curved shape, the devices can be arranged to match the surface shape and the magnetic field can be measured.
[0055] As shown in Figures 26 and 27, the magnetic sensor device 10 may have U-shaped notches 29 provided in the substrate 12 of each unit unit 11 to surround the mounting positions of one, two, or three magnetic sensors 13. In this case, the inner portion of the notch 29 can be bent (for example, along the dashed line in Figure 27(a)) so that the inner portion of the notch 29 is perpendicular to the surface of each substrate 12. Therefore, the sensing direction of the magnetic sensors 13 placed in the inner portion of the notch 29 can be made perpendicular to the surface of each substrate 12.
[0056] In this case, for example, as shown in Figure 26(a), notches 29 may be provided corresponding to the mounting positions of all three magnetic sensors 13 on each substrate 12, or as shown in Figure 26(b), notches 29 may be provided corresponding to the mounting position of one magnetic sensor 13 on each substrate 12. Also, as shown in Figures 27(a) and (b), notches 29 may be provided such that when the inner portion of the notch 29 is folded vertically, the magnetic sensor 13 placed in the inner portion of the notch 29 is at the position of the vertex of a desired triangle. Also, as shown in Figure 27(c), notches 29 may be provided corresponding to the mounting position of one magnetic sensor 13 on each substrate 12, and the sensing directions of the three magnetic sensors 13 may be arranged along three mutually orthogonal axes. Also, as shown in Figure 27(d), the inner portion of the notch 29 may be folded vertically and held using an attachment 30 so that the inner portion of the notch 29 is perpendicular to the surface of each substrate 12.
[0057] Furthermore, if the notch 29 is present, as shown in Figure 26(a), each unit unit 11 may be arranged in a planar manner without gaps around the center point 15 and connected to one another, or, as shown in Figure 26(b), each unit unit 11, which is arranged in a planar manner without gaps around the center point 15 and connected to one another, may have a notch 27 formed along one of the connection parts of adjacent unit units 11, extending from the outer edge toward the center point 15.
[0058] As shown in Figures 28 to 32, the magnetic sensor device 10 may have each magnetic sensor 13 having an MTJ element 31 and a feedback coil 32 with the MTJ element 31 inserted inside. In this case, by performing so-called closed-loop control, in which the coil 32 generates a magnetic field to cancel out the magnetic field detected by the MTJ element 31, the magnetic field can be measured in the region of high sensitivity near 0T. At this time, the magnetic field can be detected by the coil current. Furthermore, by correcting with the magnetic field from the coil 32, voltage saturation by the amplifier can be avoided when amplifying the detected magnetic field signal.
[0059] In this case, it is preferable that the arrangement of the coil 32 relative to the MTJ element 31 is as shown in Figures 29(a) to (c), depending on the three mutually orthogonal sensing directions of the MTJ element 31. Also, for example, as shown in Figure 28(a), the sensing direction of each magnetic sensor 13 may be parallel to the substrate 12 and in the same direction, or as shown in Figure 28(b), the sensing direction of each magnetic sensor 13 may be perpendicular to the substrate 12. Furthermore, as shown in Figures 28(c) and (d), the sensing directions of the three magnetic sensors 13 on each substrate 12 may be arranged along three mutually orthogonal axes. Also, as shown in Figure 28(c), the three magnetic sensors 13 may consist of those shown in Figures 29(a) to (c), or as shown in Figure 28(d), the three magnetic sensors 13 may consist of those with the same configuration as shown in Figure 29(a) or (b).
[0060] Furthermore, in this case, the configuration in which the MTJ element 31 and the coil 32 are attached to the substrate 12 can be any configuration. For example, as shown in Figure 30(a), each magnetic sensor 13 may have the MTJ element 31 positioned high above the surface of the substrate 12 by pins 33 or the like, and the coil 32 may be fixed to the substrate 12 with adhesive or the like so that the MTJ element 31 is inserted inside. Alternatively, as shown in Figure 30(b), the coil 32 may be passed through to the opposite side of the substrate 12 from where the MTJ element 31 is attached, and the coil 32 may be fixed to the surface of the substrate 12 on the opposite side. Or, as shown in Figure 30(c), the coil 32 may be fixed between the surface of the substrate 12 on the opposite side via a spacer. Furthermore, as shown in Figure 30(d), each magnetic sensor 13 may be mounted such that the MTJ element 31 is positioned high above the surface of the substrate 12 by pins 33 or the like, and the front and back are reversed compared to Figure 30(a), and the coil 32 is fixed to the substrate 12 with adhesive or the like so that the MTJ element 31 is inserted inward.
[0061] In this case, the coil 32 may be constructed using the wiring of the substrate 12. For example, as shown in Figure 31, there may be a covering substrate 34 made of an FPC substrate to cover the side and above of the MTJ element 31 fixed to the substrate 12, and when the MTJ element 31 is covered with the covering substrate 34, wiring 35 may be pre-formed on the surface of the substrate 12 to which the MTJ element 31 is attached and on the surface of the covering substrate 34 so that a coil 32 is formed between the substrate 12 and the covering substrate 34. Alternatively, as shown in Figure 32, the wiring 35 may be pre-formed on the PCT substrate to which the MTJ element 31 is attached, and bumps 36, through-silicon electrodes (TSVs) 37, and wiring 35 may be formed on the substrate 12 to which the MTJ element 31 is attached using microfabrication technology so that a coil 32 is formed when the MTJ element 31 is attached to the PCT substrate.
[0062] The magnetic sensor device 10 may also include a recording means for recording sensitivity information of each magnetic sensor acquired in advance, a correction means for correcting the measurement data measured by each magnetic sensor based on the sensitivity information corresponding to each magnetic sensor recorded in the recording means, and an output means for outputting the corrected data corrected by the correction means. The recording means preferably consists of, for example, a single non-volatile memory. In this case, variations in the sensitivity of each magnetic sensor can be corrected, and the magnetic field can be measured with higher accuracy. Furthermore, this eliminates the need to calibrate each magnetic sensor after each measurement, making measurements easy to perform.
[0063] Furthermore, if such a correction means is provided, for example, the recording means may consist of a plurality of non-volatile memories provided in correspondence with each magnetic sensor, and record sensitivity information of the magnetic sensor corresponding to each non-volatile memory. The correction means may be configured to acquire sensitivity information from the corresponding non-volatile memory along with measurement data from each magnetic sensor and to correct the measurement data based on that sensitivity information. Alternatively, each magnetic sensor may have sensor identification information consisting of a manufacturing number or barcode provided on each magnetic sensor to enable identification. The recording means may record the sensor identification information and sensitivity information of each magnetic sensor in correspondence. The correction means may be configured to acquire the sensitivity information of each magnetic sensor recorded in the recording means from the sensor identification information of each magnetic sensor and to correct the measurement data of the corresponding magnetic sensor based on that sensitivity information.
[0064] 10 Magnetic sensor device 11 Unit 12 Circuit board 13, 13a Magnetic sensor 15 Center point 21 Connector section 22 Output terminal 23 Peripheral circuit 24, 26 Reinforcement board 25 Screw 27, 29 Notch 28 Insertion hole 30 Attachment 31 MTJ element 32 Coil 33 Pin 34 Covered circuit board 35 Wiring 36 Bump 37 Through-silicon electrode (TSV)
Claims
1. A magnetic sensor device having a plurality of unit units, each having a generally triangular substrate and three magnetic sensors positioned at predetermined triangular vertices on the substrate, wherein each unit unit is arranged in a planar configuration such that one vertex of each substrate converges to a single point, and adjacent unit units are connected by one side of each substrate.
2. The magnetic sensor device according to claim 1, characterized in that each magnetic sensor consists of a tunnel magnetoresistance sensor.
3. The magnetic sensor device according to claim 1, characterized in that each magnetic sensor in each unit unit is positioned at each vertex of a triangle that is similar in shape to the triangular shape of the substrate of the corresponding unit unit, shares the same center of gravity as the triangular shape of the substrate, and whose sides are parallel to the corresponding sides of the triangular shape of the substrate.
4. The magnetic sensor device according to claim 1, characterized in that the sum of the angles of the vertices of each unit unit that converge at the aforementioned point is 360 degrees, and the units are arranged in a planar manner around the aforementioned point.
5. The magnetic sensor device according to claim 1, wherein the unit consists of n units, and each unit is arranged in a planar manner around a single point such that the angle of one vertex of the substrate is 360 / n degrees and that one vertex is concentrated at that point.
6. The magnetic sensor device according to claim 1, characterized in that the adjacent unit units are connected to each other in a foldable manner.
7. The magnetic sensor device according to claim 1, characterized in that the sum of the angles of the vertices concentrated at the aforementioned point of each unit unit is less than 360 degrees, and among the unit units connected to each other, there is a gap between the unit unit at one end and the unit unit at the other end along the circumferential direction centered on the aforementioned point.
8. The magnetic sensor device according to claim 1, comprising: a recording means for recording sensitivity information of each magnetic sensor acquired in advance; a correction means for correcting measurement data measured by each magnetic sensor based on the sensitivity information corresponding to each magnetic sensor recorded in the recording means; and an output means for outputting the corrected data corrected by the correction means.
9. The magnetic sensor device according to claim 8, characterized in that the recording means comprises a plurality of non-volatile memories provided corresponding to each magnetic sensor, and records the sensitivity information of the magnetic sensor corresponding to each non-volatile memory, and the correction means is configured to acquire the sensitivity information from the corresponding non-volatile memory along with the measurement data from each magnetic sensor, and to correct the measurement data based on the sensitivity information.
10. The magnetic sensor device according to claim 8, characterized in that each magnetic sensor has sensor identification information consisting of a manufacturing number or barcode provided on each magnetic sensor so as to be identifiable, the recording means records the sensor identification information and sensitivity information of each magnetic sensor in correspondence, and the correction means is configured to obtain the sensitivity information of each magnetic sensor recorded in the recording means from the sensor identification information of each magnetic sensor and to correct the measurement data of the corresponding magnetic sensor based on the sensitivity information.