Evanescent-field-driven miniature optical-waveguide actuator and evanescent-field-driven miniature optical-waveguide actuation method

Abstract

Disclosed in the present invention are an evanescent-field-driven miniature optical-waveguide actuator and an evanescent-field-driven miniature-optical-waveguide actuation method. The actuator comprises a micro-nano optical fiber, a polymer fiber and a light source, wherein the polymer fiber is in contact connection with one end of the micro-nano optical fiber, and the light source is arranged on the other end of the micro-nano optical fiber; the micro-nano optical fiber is a single-tapered micro-nano optical fiber, which comprises a micro-nano optical-fiber taper region located in the middle, a micro-nano optical-fiber waist region located at one end, and a micro-nano optical-fiber pigtail located at the other end; and the polymer fiber is in contact connection with the outer surface of the micro-nano optical-fiber waist region, and the light source is arranged near the tail end of the micro-nano optical-fiber pigtail. The principle of the method is that, when light propagates through a micro-nano optical fiber, an evanescent field is generated around a micro-nano optical-fiber waist region, heating occurs under the action of a photothermal conversion material, and bending deformation of the actuator is caused due to thermal expansion coefficients of a polymer fiber and the micro-nano optical-fiber waist region being different. The present invention has the advantages of strong controllability, fast response speed, etc., and is convenient for application in the fields of deep-sea exploration, miniature soft robots, in-vivo diagnosis and treatment, etc.

Description

A miniature optical wave actuator and method driven by evanescent field Technical Field

[0001] This invention relates to the field of micro-optical wave actuation technology, and specifically to a micro-optical wave actuator and method driven by an evanescent field. Background Technology

[0002] Miniature soft actuators that can convert external stimuli into mechanical motion have great application potential in fields such as deep-sea exploration, small-scale biological sampling, and biomedicine. Various soft actuators driven by different stimuli such as magnetic fields, electric fields, temperature, and humidity have been widely reported. Among them, light-driven photoactuators have attracted particular attention due to their ease of remote control and the adjustability of parameters such as wavelength, intensity, and polarization.

[0003] Traditional optical actuators are mostly triggered by free-space light, which means there must be a straight optical path between the light source and the actuator. This severely limits the actuator's use in situations prone to obstruction. Furthermore, the intensity of free-space light can decrease significantly during long-distance transport, affecting driving efficiency. For example, in underwater scenarios, especially in deep-water and deep-sea exploration applications, the refraction, scattering, and absorption of water greatly affect the intensity and properties of free-space light, significantly hindering the use and precise control of actuators.

[0004] Using optical waveguides to transmit light into actuators is an effective strategy to overcome these limitations, as light can be transmitted over long distances through waveguides, avoiding the influence of the external environment and reducing losses. However, current research on optical waveguide actuators is very limited, and the reported optical waveguide actuators mostly use commercial optical fibers, which are large in size (>100 micrometers). This results in large actuator sizes, making miniaturization difficult, and can easily lead to size mismatches with photoresponsive materials, reducing energy efficiency. Therefore, existing optical waveguide actuators have small deformation ranges and long response times, making it difficult to meet the needs of practical applications. Summary of the Invention

[0005] In view of the shortcomings of existing technologies, the development of micro-optical wave actuators with large deformation capabilities has important scientific and application value. Therefore, this invention provides a micro-optical wave actuator driven by evanescent field.

[0006] The technical solution of the present invention is as follows:

[0007] I. A miniature optical wave actuator driven by evanescent field:

[0008] The micro-optical wave actuator includes micro-nano optical fibers, polymer fibers, and a light source. The polymer fibers are connected to one end of the micro-nano optical fibers, and the light source is arranged at the other end of the micro-nano optical fibers. The micro-nano optical fibers have a waist region, where polymer fibers with different material properties from the micro-nano optical fibers are arranged.

[0009] The micro-nano fiber is mainly a single-cone micro-nano fiber, which is produced by a heat stretching method. The single-cone micro-nano fiber includes a micro-nano fiber cone region in the middle, a micro-nano fiber waist region at one end, and a micro-nano fiber pigtail at the other end. That is, the micro-nano fiber cone region is between the micro-nano fiber waist region and the micro-nano fiber pigtail. The micro-nano fiber waist region is connected to the surface of the micro-nano fiber waist region by polymer fiber. The light source is arranged near the end of the micro-nano fiber pigtail.

[0010] The polymer fibers are tightly attached to the surface of the waist region of the micro / nano optical fiber.

[0011] Light is generated and emitted by the light source, and then incident into the single-cone micro / nano fiber, causing an evanescent field to be generated around the waist region of the micro / nano fiber; the light enters the single-cone micro / nano fiber from the micro / nano fiber pigtail and propagates, passing through the tapered region of the micro / nano fiber to reach the waist region of the micro / nano fiber.

[0012] The polymer fiber is doped with photothermal conversion material.

[0013] The refractive index of the polymer fiber is greater than that of the core of the single-cone micro / nano fiber, and the coefficient of thermal expansion of the polymer fiber and the waist region of the micro / nano fiber are different.

[0014] Preferably, the polymer fiber is typically made of polymethyl methacrylate fiber, thermoplastic polyurethane, liquid crystal elastomer, hydrogel, polyethylene, polystyrene, etc., and the photothermal conversion material is specifically gold nanoparticles, gold nanorods, graphene, carbon nanotubes, dyes, etc.

[0015] More preferably, the polymer fiber is any one of polymer fiber I, polymer fiber II, polymer fiber III, and polymer fiber IV;

[0016] 1) Polymethyl methacrylate and photothermal dye are added to N,N-dimethylformamide until dissolved, wherein the mass of polymethyl methacrylate is 20-1000 times that of the photothermal dye. Then, electrospinning and parallel plate electrodes are used to obtain oriented polymethyl methacrylate fibers as polymer fiber I. Subsequently, polymer fiber I is placed on the waist region of the micro / nano fiber using micromanipulation. Then, polymer fiber I placed on the waist region of the micro / nano fiber is treated with N,N-dimethylformamide vapor to obtain the waist region of the micro / nano fiber incorporating polymer fiber I, which serves as actuator I.

[0017] 2) Polyethylene glycol-modified gold nanorods were dispersed in N,N-dimethylformamide and then dissolved in thermoplastic polyurethane. The mass of thermoplastic polyurethane was 500-5000 times that of the gold nanorods to obtain mixed solution I. Subsequently, the mixed solution I was printed on the waist region of the micro / nano fiber using microelectronic printing technology as polymer fiber II. After drying and curing, the waist region of the micro / nano fiber incorporating polymer fiber II was obtained as actuator II.

[0018] 3) N-isopropylacrylamide, acrylic acid, acrylamide benzophenone, and azobisisobutyronitrile (AIBN) were dissolved in 1,4-dioxane, heated and reacted, and dried to obtain PNIPAM. Polyethylene glycol-modified gold nanorods were dispersed in propanol, and then PNIPAM was added until dissolved. The mass of PNIPAM was 500-5000 times that of the gold nanorods to obtain mixed solution II. Subsequently, mixed solution II was printed on the waist region of the micro / nano fiber using microelectronic printing technology as polymer fiber III. After ultraviolet light irradiation, the waist region of the micro / nano fiber combined with polymer fiber III was obtained. Then, the waist region of the micro / nano fiber combined with polymer fiber III was immersed in a mixed solvent of ethanol and water to serve as actuator III.

[0019] 4) A mixed solution Ⅲ is obtained by mixing liquid crystal monomers, chain extenders, free radical inhibitors, crosslinking agents, photoinitiators, catalysts and photothermal dyes together, wherein the mass ratio of photothermal dyes in mixed solution Ⅲ is 0.1%-5%. The solution is heated under light-shielded conditions to carry out an oligomerization reaction to obtain liquid crystal elastomer ink. Subsequently, the liquid crystal elastomer ink pattern is printed on the waist region of the micro / nano fiber using microelectronic printing technology as polymer fiber Ⅳ. The micro / nano fiber waist region is then irradiated with ultraviolet light to obtain a micro / nano fiber waist region incorporating polymer fiber Ⅳ, which serves as actuator Ⅳ.

[0020] II. A method for micro-optical wave actuation driven by evanescent field based on micro-optical wave actuators:

[0021] The method is as follows:

[0022] The light source generates and emits light, which is then incident into the single-cone micro / nano fiber. An evanescent field is generated around the waist region of the single-cone micro / nano fiber. The refractive index of the polymer fiber is greater than that of the waist region of the micro / nano fiber, causing the light to be transmitted into the polymer fiber and absorbed by the polymer fiber. This leads to an increase in temperature between the polymer fiber and the waist region of the micro / nano fiber, resulting in a temperature difference between them. Due to the difference in the coefficients of thermal expansion between the polymer fiber and the waist region of the micro / nano fiber, the micro-light wave causes the actuator to bend and deform.

[0023] After absorbing light, the polymer fiber and the waist region of the micro-nano fiber increase in temperature under the action of the photothermal material, which in turn causes the waist region of the polymer fiber and the micro-nano fiber to bend and deform in the direction with less thermal expansion deformation.

[0024] Compared with the prior art, the beneficial effects of the present invention are:

[0025] (1) It overcomes the shortcomings of traditional actuators that are easily limited by the space environment, difficult to miniaturize and remotely control precisely.

[0026] (2) It has strong controllability and fast response speed.

[0027] (3) Driven by the evanescent field generated in the waist region of micro-nano fiber, the driving light can be efficiently introduced into the deformable material, thus improving the energy utilization rate. Attached Figure Description

[0028] Figure 1 is a schematic diagram of the structure of a micro-optical wave actuator.

[0029] Figure 2 is a cross-sectional view of Figure 1 (AA section).

[0030] Figure 3 is a microscopic image of polymethyl methacrylate oriented nanofibers collected using a parallel plate electrode.

[0031] Figure 4 is a schematic diagram of actuator deformation when the coefficient of thermal expansion of polymer fiber is greater than that of the waist region of micro / nano fiber.

[0032] Figure 5 is a schematic diagram of actuator deformation when the coefficient of thermal expansion of polymer fiber is less than that of the waist region of micro / nano fiber.

[0033] In the figure: 1. Micro-nano fiber, 101. Waist region of micro-nano fiber, 102. Taper region of micro-nano fiber, 103. Pigtail of micro-nano fiber, 2. Polymer fiber, 3. Light source. Detailed Implementation

[0034] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] As shown in Figure 1, the micro-optical wave actuator includes a micro-nano optical fiber, a polymer fiber 2, and a light source 3. The polymer fiber 2 is connected to one end of the micro-nano optical fiber, and the light source 3 is arranged at the other end of the micro-nano optical fiber. The micro-nano optical fiber has a waist region, where a polymer fiber 2 with different material properties from the micro-nano optical fiber is arranged.

[0036] The micro-nano fiber is mainly a single-cone micro-nano fiber 1, which is made by heating and stretching. The single-cone micro-nano fiber 1 includes a micro-nano fiber cone region 102 located in the middle, a micro-nano fiber waist region 101 located at one end, and a micro-nano fiber pigtail 103 located at the other end. That is, the micro-nano fiber cone region 102 is between the micro-nano fiber waist region 101 and the micro-nano fiber pigtail 103. The micro-nano fiber waist region 101 is connected to the surface of the micro-nano fiber waist region 101 by polymer fiber 2. The polymer fiber 2 is in contact with the surface of the micro-nano fiber waist region 101. The light source 3 is arranged near the end of the micro-nano fiber pigtail 103.

[0037] Light is generated and emitted by light source 3, and then incident into the single-cone micro-nano fiber 1, causing an evanescent field to be generated around the waist region 101 of the micro-nano fiber; light is incident from the micro-nano fiber pigtail 103 into the single-cone micro-nano fiber 1 and propagates, passing through the micro-nano fiber cone region 102 to reach the micro-nano fiber waist region 101.

[0038] In a specific implementation, polymer fiber 2 is attached to the surface of the waist region 101 of the micro / nano fiber. The polymer fiber 2 is doped with photothermal conversion material, the refractive index of the polymer fiber 2 is greater than the refractive index of the core of the single-cone micro / nano fiber 1, and the coefficients of thermal expansion of the polymer fiber 2 and the waist region 101 of the micro / nano fiber are different.

[0039] The specific implementation of the actuator of the present invention is as follows:

[0040] Light source 3 emits light, which is then incident into the single-cone micro / nano fiber 1. An evanescent field is generated around the waist region 101 of the single-cone micro / nano fiber 1. Since the refractive index of the polymer fiber is greater than that of the waist region of the micro / nano fiber, the light in the evanescent field is transmitted to the polymer fiber 2 and absorbed by the polymer fiber 2. Under the action of the photothermal conversion material, it is converted into heat energy, causing the temperature of the polymer fiber 2 and the waist region 101 of the micro / nano fiber to rise. Since the thermal expansion coefficients of the polymer fiber 2 and the waist region 101 of the micro / nano fiber are different, a temperature difference occurs between the polymer fiber 2 and the waist region 101 of the micro / nano fiber. Due to the difference in thermal expansion coefficients between the polymer fiber 2 and the waist region 101 of the micro / nano fiber, the micro-light wave causes the actuator to bend and deform.

[0041] Specifically, when the coefficient of thermal expansion of polymer fiber 2 is greater than that of the waist region 101 of micro-nano fiber, after polymer fiber 2 absorbs light, the temperature of both polymer fiber 2 and waist region 101 of micro-nano fiber increases under the action of photothermal material. The thermal expansion deformation of polymer fiber 2 is greater than that of waist region 101 of micro-nano fiber. The actuator bends and deforms in the direction of smaller thermal expansion deformation, that is, towards the side of waist region 101 of micro-nano fiber.

[0042] When the coefficient of thermal expansion of polymer fiber 2 is less than that of the waist region 101 of micro-nano fiber, after polymer fiber 2 absorbs light, the temperature of both polymer fiber 2 and waist region 101 of micro-nano fiber increases under the action of photothermal material. The thermal expansion deformation of polymer fiber 2 is less than that of waist region 101 of micro-nano fiber. The actuator bends and deforms in the direction of smaller thermal expansion deformation, that is, towards the polymer fiber 2.

[0043] The embodiments of the present invention are as follows: Example 1:

[0044] Figure 1 shows a schematic diagram of the structure of the micro-optical wave actuator. In this embodiment, the coefficient of thermal expansion of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano optical fiber.

[0045] Polymethyl methacrylate (PMMA) and a certain amount of photothermal dye were dissolved in N,N-dimethylformamide, and then PMMA fibers were prepared by electrospinning. The oriented PMMA fibers were collected using parallel plate electrodes, and the morphology of the resulting oriented fibers is shown in Figure 3. The orientation of the fibers facilitates subsequent micromanipulation of the PMMA fibers and reduces the overlap and adhesion between the disordered stacked nanofibers.

[0046] Micro-nano optical fiber 1 was prepared using a thermal stretching method. Subsequently, PMMA fibers were placed on the waist region 101 of micro-nano optical fiber 1 using micromanipulation to serve as polymer fibers 2. The polymer fibers 2 were then treated with N,N-dimethylformamide vapor for 1 minute to firmly bond them to the micro-nano optical fiber 1, resulting in a miniature optical wave actuator.

[0047] When the actuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of photothermal dye, causing the temperature to rise. Since the coefficient of thermal expansion of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano fiber 1, the photoactuator bends to one side of the micro-nano fiber 1 and deforms. The deformation effect is shown in Figure 4. Example 2:

[0048] In this embodiment, the coefficient of thermal expansion of polymer fiber 2 is greater than that of the waist region 101 of micro / nano optical fiber.

[0049] Micro-nano optical fibers 1 were prepared using a heated stretching method. Polyethylene glycol-modified gold nanorods (AuNR) were dispersed in N,N-dimethylformamide and then dissolved in thermoplastic polyurethane (TPU). Subsequently, the TPU / AuNR solution was printed onto the waist region 101 of the micro-nano optical fiber 1 using microelectronic printing technology as polymer fiber 2. After drying and curing, a micro-optical wave actuator was obtained.

[0050] When the photoactuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of AuNR, causing the temperature to rise. Since the coefficient of thermal expansion of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano fiber 1, the photoactuator bends to one side of the micro-nano fiber 1 and deforms. The deformation effect is shown in Figure 4. Example 3:

[0051] Figure 2 shows the AA cross-sectional view of the micro-optical wave actuator. In this embodiment, the coefficient of thermal expansion of the polymer fiber is less than that of the waist region of the micro / nano optical fiber.

[0052] N-Isopropylacrylamide, acrylic acid, acrylamide benzophenone, and AIBN were dissolved in 1,4-dioxane and reacted at 80 °C for 15 hours. After drying, PNIPAM was obtained. Polyethylene glycol-modified AuNR was dispersed in propanol, and then PNIPAM was added and dissolved. Micro / nano fiber 1 was prepared using a thermal stretching method. Subsequently, the PNIPAM / AuNR solution was printed onto the waist region 101 of micro / nano fiber 1 as polymer fiber 2 using microelectronic printing technology, and crosslinked by irradiation with ultraviolet light for 60 min. Then, it was immersed in a water / ethanol mixed solvent to remove unreacted parts, and a micro-optical wave actuator was obtained.

[0053] When the photoactuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of AuNR, causing the temperature to rise. Since PNIPAM has thermal shrinkage, that is, the coefficient of thermal expansion of the polymer fiber 2 is lower than that of the waist region 101 of the micro-nano fiber 1, the photoactuator bends and deforms to the side of the polymer fiber 2. The deformation effect is shown in Figure 5. Example 4:

[0054] In this embodiment, the coefficient of thermal expansion of the polymer fiber is less than that of the waist region of the micro / nano fiber.

[0055] Liquid crystal monomer RM 257, chain extender EDDET, free radical inhibitor BHT, crosslinking agent PETA, photoinitiator PI 819, catalyst TEA and photothermal dye are mixed together and reacted at 80 °C for 45 minutes in the dark to carry out oligomerization reaction, thus obtaining liquid crystal elastomer (LCE) ink.

[0056] Micro-nano optical fiber 1 was prepared by heating and stretching method. Then, LCE pattern was printed on the waist region 101 of micro-nano optical fiber 1 as polymer fiber 2 using microelectronic printing technology. After cross-linking by irradiation with ultraviolet light for 60 min, a micro-optical wave actuator was obtained.

[0057] When the photoactuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of photothermal dye, causing the temperature to rise. Since LCE has thermal shrinkage, that is, the coefficient of thermal expansion of polymer fiber 2 is lower than that of the waist region 101 of micro-nano fiber 1, the photoactuator bends towards the polymer fiber 2 and deforms. The deformation effect is shown in Figure 5. Example 5:

[0058] In this embodiment, the coefficient of thermal expansion of polymer fiber 2 is greater than that of the waist region 101 of micro / nano optical fiber.

[0059] Micro-nano optical fibers 1 were prepared using a heated stretching method. Polyethylene (PE) resin particles and photothermal dyes were mixed at high temperature using a twin-screw extruder, wherein the mass ratio of photothermal dyes to PE resin particles was 0.1%-5%. The resulting mixture was cooled and regranulated, and then added to a printing nozzle equipped with a heating function. Subsequently, the PE melt mixed with photothermal dyes was printed onto the waist region 101 of the micro-nano optical fiber 1 as polymer fiber 2 using microelectronic printing technology. After cooling and solidification, a micro-optical wave actuator was obtained.

[0060] When the photoactuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of photothermal dye, causing the temperature to rise. Since the coefficient of thermal expansion of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano fiber 1, the photoactuator bends to one side of the micro-nano fiber 1 and deforms. The deformation effect is shown in Figure 4. Example 6:

[0061] Figure 1 shows a schematic diagram of the structure of the micro-optical wave actuator. In this embodiment, the coefficient of thermal expansion of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano optical fiber.

[0062] Polyethylene glycol-modified gold nanorods (AuNR) were dispersed in tetrahydrofuran and dissolved in polystyrene (PS) to obtain an AuNR / PS solution. PS fibers were then prepared using electrospinning. The resulting PS fiber mat was cut into small pieces and immersed in ethanol. The PS fiber mat was then dispersed using a high-speed disperser at 14,000 rpm, forming a dispersion of single PS short fibers in ethanol. This dispersion was then drop-coated onto a silicon wafer and dried to obtain single PS short fibers. Dispersing the originally overlapping and adhered nanofibers into single short fibers facilitates subsequent micromanipulation of the PS fibers.

[0063] Micro-nano optical fiber 1 was prepared using a thermal stretching method. Subsequently, short PS fibers were placed on the waist region 101 of micro-nano optical fiber 1 using micromanipulation to serve as polymer fibers 2. The polymer fibers 2 were then treated with tetrahydrofuran vapor for 1 minute to firmly bond with micro-nano optical fiber 1, resulting in a miniature optical wave actuator.

[0064] When the actuator is working, the pigtail 103 of the micro-nano fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than that of the waist region 101 of the micro-nano fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of photothermal dye, causing the temperature to rise. Since the coefficient of thermal expansion of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano fiber 1, the photoactuator bends to one side of the micro-nano fiber 1 and deforms. The deformation effect is shown in Figure 4.

[0065] The above specific embodiments are used to explain and illustrate the present invention, but not to limit the present invention. Any modifications and changes made to the present invention within the spirit and scope of the claims shall fall within the protection scope of the present invention.

[0066] The above description is only a preferred embodiment of the present invention. Therefore, all equivalent changes or modifications made to the structure, features and principles described in the claims of this patent application are included in the scope of this patent application.

Claims

1. A miniature optical wave actuator driven by an evanescent field, characterized in that: It includes micro-nano optical fiber, polymer fiber (2) and light source (3). The polymer fiber (2) is connected to one end of the micro-nano optical fiber, and the light source (3) is arranged at the other end of the micro-nano optical fiber. The micro-nano optical fiber has a waist region, and polymer fiber (2) with different material properties from the micro-nano optical fiber is arranged in the waist region.

2. The evanescent field-driven micro-optical wave actuator according to claim 1, characterized in that: The micro-nano fiber is mainly a single-cone micro-nano fiber (1). The single-cone micro-nano fiber (1) includes a micro-nano fiber cone region (102) located in the middle, a micro-nano fiber waist region (101) located at one end, and a micro-nano fiber pigtail (103) located at the other end. The micro-nano fiber waist region (101) is connected to a polymer fiber (2) through which the polymer fiber (2) is in contact with the surface of the micro-nano fiber waist region (101). The light source (3) is arranged near the end of the micro-nano fiber pigtail (103).

3. The evanescent field-driven micro-optical wave actuator according to claim 1, characterized in that: The polymer fiber (2) is attached to the surface of the waist region (101) of the micro / nano fiber.

4. The evanescent field-driven micro-optical wave actuator according to claim 1, characterized in that: Light is generated and emitted by the light source (3), and then incident into the single-cone micro-nano fiber (1), causing an evanescent field to be generated around the waist region (101) of the micro-nano fiber; light is incident from the micro-nano fiber pigtail (103) into the single-cone micro-nano fiber (1) and propagates, passing through the tapered region (102) of the micro-nano fiber to reach the waist region (101) of the micro-nano fiber.

5. The evanescent field-driven micro-optical wave actuator according to claim 1, characterized in that: The polymer fiber (2) is doped with photothermal conversion material.

6. The evanescent field-driven micro-optical wave actuator according to claim 5, characterized in that: The refractive index of the polymer fiber (2) is greater than that of the core of the single-cone micro-nano fiber (1), and the coefficient of thermal expansion of the polymer fiber (2) is different from that of the waist region (101) of the micro-nano fiber.

7. A method for evanescent field-driven micro-optical wave actuation based on the micro-optical wave actuator according to any one of claims 1-6, characterized in that: The method is as follows: The light source (3) generates light and then incident it into the single-cone micro-nano fiber (1), generating an evanescent field around the waist region (101) of the single-cone micro-nano fiber (1). The refractive index of the polymer fiber is greater than that of the waist region of the micro-nano fiber, causing the light to be transmitted into the polymer fiber (2) and absorbed by the polymer fiber (2), resulting in an increase in temperature of the polymer fiber (2) and the waist region (101) of the micro-nano fiber. Since the thermal expansion coefficients of the polymer fiber (2) and the waist region (101) of the micro-nano fiber are different, the micro-light wave causes the actuator to bend and deform.

8. The method for evanescent field-driven micro-optical wave actuation according to claim 7, characterized in that: After absorbing light, the polymer fiber (2) and the waist region (101) of the micro-nano fiber are heated by the photothermal material, which causes the polymer fiber (2) and the waist region (101) of the micro-nano fiber to bend and deform in the direction of less thermal expansion deformation.

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