Liquid source delivery system and method, and semiconductor process device

Abstract

A liquid source delivery system and method, and a semiconductor process device. The liquid source delivery system comprises a first liquid storage unit (100), a second liquid storage unit (200), a third liquid storage unit (300), a fourth liquid storage unit (400), a first power gas supply unit (500), a second power gas supply unit (600), a first purge gas supply unit (700), a second purge gas supply unit (800), and a first vacuum unit (900). The first purge gas supply unit (700) can push a dissolution solution in the third liquid storage unit (300) into the first liquid storage unit (100), the second liquid storage unit (200), and a plurality of pipes, so that the first liquid storage unit (100), the second liquid storage unit (200), and the plurality of pipes can be cleaned using the dissolution solution, thereby dissolving and discharging a liquid source adhered to pipe walls and remaining in the first liquid storage unit (100) and the second liquid storage unit (200).

Description

A liquid source delivery system, method, and semiconductor process equipment Technical Field

[0001] This invention relates to the field of special liquid source delivery technology, and in particular to a liquid source delivery system, method and semiconductor process equipment. Background Technology

[0002] In the semiconductor industry's production processes, CVD machines rely heavily on a series of specialized liquids, and the precise delivery of these liquids depends on a specialized liquid source delivery system. This system integrates several key components, including a liquid storage unit, a buffer unit, a gas supply unit, a gas-liquid separation unit, an exhaust unit, a purging unit, a piping unit, and a pressure monitoring unit.

[0003] However, for certain special liquids with a strong ability to adhere to metal pipe walls, such as TDMAT, CP-Hf, CP-Zr, and IP235, existing purging technologies still struggle to completely remove them. Furthermore, in terms of safety, the system lacks a robust leak detection mechanism, which to some extent limits further performance improvements.

[0004] Currently, no effective solution has been proposed for the problem that existing delivery systems cannot clean liquids with strong adhesion to metal pipe walls. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by providing a liquid source delivery system, method, and semiconductor process equipment to solve problems such as the inability of existing delivery systems to clean liquids with strong adhesion to metal pipe walls.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0007] In a first aspect, the present invention provides a liquid source delivery system, comprising:

[0008] The first liquid storage unit is used to store the liquid source;

[0009] The second liquid storage unit is connected to the first liquid storage unit and the process equipment through pipelines and is located downstream of the first liquid storage unit. It is used to buffer the liquid source and transport the liquid source to the process equipment.

[0010] The third liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store the solution and transport the solution to the first liquid storage unit and the second liquid storage unit.

[0011] The fourth liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store waste liquid;

[0012] The first power gas supply unit is connected to the first power gas source and the first liquid storage unit through pipelines, and is used to supply the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit.

[0013] The second power gas supply unit is connected to the second power gas source and the second liquid storage unit through pipelines, and is used to supply the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows to the process equipment.

[0014] The first purge gas supply unit is connected to the first purge gas source, the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit via pipelines. It is used to deliver the first purge gas to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit to pressurize the liquid source in the pipeline into the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively.

[0015] The second purging gas supply unit is connected to the second purging gas source and the third liquid storage unit through pipelines. It is used to deliver the second purging gas to the third liquid storage unit to press the solution into the pipeline, the first liquid storage unit, and the second liquid storage unit so that the solution cleans the pipeline, the first liquid storage unit, and the second liquid storage unit.

[0016] A first vacuum unit is connected to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, and is used to perform vacuum treatment on the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit.

[0017] In some of these embodiments, it also includes:

[0018] A gas-liquid separation unit is connected to the second liquid storage unit and the process equipment through pipelines and is located downstream of the second liquid storage unit. It is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit to remove the gas in the liquid source and to transport the gas-liquid separated liquid source to the process equipment.

[0019] The second vacuum unit is connected to the gas-liquid separation unit and is used to discharge the gas generated by the gas-liquid separation unit.

[0020] In some of these embodiments, it also includes:

[0021] A evaporation unit is connected to the fourth liquid storage unit and the exhaust device, respectively, and is used to discharge the evaporating liquid from the pipeline and the fourth liquid storage unit.

[0022] The third vacuum unit, which is connected to the first vacuum unit, is used to accelerate the evaporation of the liquid.

[0023] In some of these embodiments, it also includes:

[0024] A leakage monitoring unit is disposed in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, and is used to monitor leakage in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit in real time.

[0025] In some of these embodiments, it also includes:

[0026] A medium monitoring unit is connected to the third liquid storage unit and located downstream of the third liquid storage unit, and is used to monitor whether the medium output by the third liquid storage unit is a liquid.

[0027] In some of these embodiments, it also includes:

[0028] A safety protection unit is installed at the top of the environment in which the liquid source delivery system is located, and is used to monitor environmental information.

[0029] In a second aspect, the present invention also provides a semiconductor process apparatus, comprising:

[0030] The liquid source delivery system as described in the first aspect.

[0031] Thirdly, the present invention also provides a liquid source delivery method, which is applied to the liquid source delivery system as described in the first aspect or the semiconductor process equipment as described in the second aspect.

[0032] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0033] The present invention discloses a liquid source delivery system, method, and semiconductor process equipment. By connecting a first power gas supply unit to a first liquid storage unit, connecting a second power gas supply unit to a second liquid storage unit, connecting a first purge gas supply unit to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit respectively, and connecting a second purge gas supply unit to the third liquid storage unit, the dissolving liquid in the third liquid storage unit can be injected into the first liquid storage unit, the second liquid storage unit, and multiple pipelines. This allows the first liquid storage unit, the second liquid storage unit, and multiple pipelines to be cleaned by the dissolving liquid. This dissolves and discharges the liquid source adhering to the pipe walls and remaining in the first and second liquid storage units, thereby improving the cleanliness of the first liquid storage unit, the second liquid storage unit, and multiple pipelines. Attached Figure Description

[0034] Figure 1 is a schematic diagram (a) of a liquid source delivery system according to an embodiment of the present invention;

[0035] Figure 2 is a schematic diagram of the first liquid storage unit according to an embodiment of the present invention;

[0036] Figure 3 is a schematic diagram of the second liquid storage unit according to an embodiment of the present invention;

[0037] Figure 4 is a schematic diagram of the third liquid storage unit according to an embodiment of the present invention;

[0038] Figure 5 is a schematic diagram of the fourth liquid storage unit according to an embodiment of the present invention;

[0039] Figure 6 is a schematic diagram of a first power gas supply unit according to an embodiment of the present invention;

[0040] Figure 7 is a schematic diagram of the second power gas supply unit according to an embodiment of the present invention;

[0041] Figure 8 is a schematic diagram of the first purge gas supply unit according to an embodiment of the present invention;

[0042] Figure 9 is a schematic diagram of the second purging gas supply unit according to an embodiment of the present invention;

[0043] Figure 10 is a schematic diagram of a first vacuum unit according to an embodiment of the present invention;

[0044] Figure 11 is a schematic diagram (II) of a liquid source delivery system according to an embodiment of the present invention;

[0045] Figure 12 is a schematic diagram of a gas-liquid separation unit and a second vacuum unit according to an embodiment of the present invention;

[0046] Figure 13 is a schematic diagram (III) of a liquid source delivery system according to an embodiment of the present invention;

[0047] Figure 14 is a schematic diagram of the volatilization unit and the third vacuum unit according to an embodiment of the present invention;

[0048] Figure 15 is a schematic diagram (IV) of a liquid source delivery system according to an embodiment of the present invention;

[0049] Figure 16 is a schematic diagram of a leakage detection unit according to an embodiment of the present invention;

[0050] Figure 17 is a schematic diagram of a security protection unit according to an embodiment of the present invention;

[0051] Figure 18 is a specific embodiment of a liquid source delivery system according to an embodiment of the present invention. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0053] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0054] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0055] Example 1

[0056] This embodiment relates to the liquid source delivery system of the present invention.

[0057] As shown in FIG1, a schematic embodiment of the present invention provides a liquid source delivery system, comprising a first liquid storage unit 100, a second liquid storage unit 200, a third liquid storage unit 300, a fourth liquid storage unit 400, a first power gas supply unit 500, a second power gas supply unit 600, a first purge gas supply unit 700, a second purge gas supply unit 800, and a first vacuum unit 900. The first liquid storage unit 100 stores the liquid source; the second liquid storage unit 200 is connected to the first liquid storage unit 100 and process equipment via pipelines, and is located downstream of the first liquid storage unit 100, used to buffer the liquid source and deliver the liquid source to the process equipment; the third liquid storage unit 300 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 via pipelines, used to store the solution and deliver the solution to the first liquid storage unit 100 and the second liquid storage unit 200; the fourth liquid storage unit 400 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 via pipelines. The pipeline is connected for storing waste liquid; the first power gas supply unit 500 is connected to the first power gas source and the first liquid storage unit 100 through pipelines, and is used to supply the first power gas to the first liquid storage unit 100 so that the liquid source in the first liquid storage unit 100 flows to the second liquid storage unit 200; the second power gas supply unit 600 is connected to the second power gas source and the second liquid storage unit 200 through pipelines, and is used to supply the second power gas to the second liquid storage unit 200 so that the liquid source in the second liquid storage unit 200 flows to the process equipment; the first purging gas supply unit 700 respectively... The first purge gas source, the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 are connected via pipelines to respectively deliver the first purge gas to the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 to respectively pressurize the liquid source, the solution, and the waste liquid in the pipeline into the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400; the second purge gas supply unit 800 is connected to the second purge gas source and the third liquid storage unit 300. The first vacuum unit 900 is connected to the first liquid storage unit 100, the second liquid storage unit 200, and the third liquid storage unit 300 via pipelines to deliver the second purging gas to the third liquid storage unit 300 so that the solution is injected into the pipelines, the first liquid storage unit 100, and the second liquid storage unit 200 to clean the pipelines, the first liquid storage unit 100, and the second liquid storage unit 200; the first vacuum unit 900 is connected to the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400 to perform vacuum treatment on the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400.

[0058] It should be noted that the first end and the second end in this invention are the two ends in its length direction, respectively; the first power gas source and the second power gas source include, but are not limited to, He; the first purge gas source and the second purge gas source include, but are not limited to, He and N2.

[0059] As shown in Figure 2, the first liquid storage unit 100 includes a first liquid storage element 101, a first delivery pipeline element, and a second delivery pipeline element. The first liquid storage element 101 is used to store a liquid source; the first delivery pipeline element is connected to the first liquid storage element 101, the first power gas supply unit 500, and the first purge gas supply unit 700, respectively, and is used to deliver gas; the second delivery pipeline element is connected to the first liquid storage element 101, the second liquid storage unit 200, and the first purge gas supply unit 700, respectively, and is used to deliver both gas and liquid.

[0060] Specifically, the first end of the first delivery pipeline element is connected to the first power gas supply unit 500 and the first purging gas supply unit 700, and the second end of the first delivery pipeline element is connected to the first liquid storage element 101; the first end of the second delivery pipeline element is connected to the first liquid storage element 101, the second end of the second delivery pipeline element is connected to the second liquid storage unit 200, and the middle part of the second delivery pipeline element is connected to the first purging gas supply unit 700.

[0061] It should be noted that the second end of the first delivery pipeline element extends into the interior of the first liquid storage element 101 and extends to the position near the top wall of the first liquid storage element 101; the first end of the second delivery pipeline element extends into the interior of the first liquid storage element 101 and extends to the position near the bottom wall of the first liquid storage element 101.

[0062] In some of these embodiments, the first liquid storage element 101 includes, but is not limited to, a stainless steel tank; the first delivery pipeline element includes, but is not limited to, a stainless steel pipe; and the second delivery pipeline element includes, but is not limited to, a stainless steel pipe.

[0063] Furthermore, the first liquid storage unit 100 also includes a first control valve element 102 and a second control valve element 103. The first control valve element 102 is disposed on the first delivery pipeline element and is used to control the flow of the first delivery pipeline element; the second control valve element 103 is disposed on the second delivery pipeline element and is used to control the flow of the second delivery pipeline element.

[0064] Specifically, the first control valve element 102 includes a first pneumatic diaphragm valve. The first pneumatic diaphragm valve is equipped with a first delivery pipeline element for automatically controlling the flow between the first delivery pipeline element and the first liquid storage element 101.

[0065] Specifically, the second control valve element 103 includes a second pneumatic diaphragm valve, a third pneumatic diaphragm valve, a first manual diaphragm valve, a fourth pneumatic diaphragm valve, and a fifth pneumatic diaphragm valve. The second pneumatic diaphragm valve is located on the second delivery pipeline element and is used to automatically control the flow between the second delivery pipeline element and the first liquid storage element 101. The third pneumatic diaphragm valve is located on the second delivery pipeline element and downstream of the second pneumatic diaphragm valve. The first manual diaphragm valve is located on the second delivery pipeline element and downstream of the second pneumatic diaphragm valve. The fourth pneumatic diaphragm valve is located on the second delivery pipeline element and downstream of the first manual diaphragm valve. The fifth pneumatic diaphragm valve is located at the second end of the second delivery pipeline element and communicates with the second liquid storage unit 200, used to automatically control the flow between the second output pipeline element and the second liquid storage unit 200.

[0066] Furthermore, the first liquid storage unit 100 also includes a first bypass pipeline element and a third control valve element 104. The first bypass pipeline element is connected to the first delivery pipeline element and the second delivery pipeline element respectively, for bypassing; the third control valve element 104 is disposed on the first bypass pipeline element for controlling the flow of the first bypass pipeline element.

[0067] Specifically, the first end of the first bypass pipeline element is connected to the first delivery pipeline element, and the connection point is located downstream of the first pneumatic diaphragm valve. The second end of the first bypass pipeline element is connected to the second delivery pipeline element, and the connection point is located downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0068] In some of these embodiments, the first bypass conduit element includes, but is not limited to, a stainless steel pipe.

[0069] Specifically, the third control valve element 104 includes a sixth pneumatic diaphragm valve. The sixth pneumatic diaphragm valve is disposed in the first bypass pipeline element and is used to automatically control the flow through the first bypass pipeline element.

[0070] Furthermore, the first liquid storage unit 100 also includes a first pressure monitoring element 105, a second pressure monitoring element 106, a first liquid level monitoring element, and a first weight monitoring element. The first pressure monitoring element 105 is connected to the first delivery pipeline element and is used to monitor the pressure of the first delivery pipeline element; the second pressure monitoring element 106 is connected to the second delivery pipeline element and is used to monitor the pressure of the second delivery pipeline element; the first liquid level monitoring element is disposed inside the first liquid storage unit 101 and is used to monitor the liquid level of the first liquid storage unit 101; the first weight monitoring element is disposed at the bottom of the first liquid storage unit 101 and is used to monitor the weight of the first liquid storage unit 101.

[0071] Specifically, the connection between the first pressure monitoring element 105 and the first delivery pipeline element is located upstream of the first pneumatic diaphragm valve; the connection between the second pressure monitoring element 106 and the second delivery pipeline element is located downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0072] In some of these embodiments, the first pressure monitoring element 105 includes, but is not limited to, a pressure sensor; the second pressure monitoring element 106 includes, but is not limited to, a pressure sensor; the first liquid level monitoring element includes, but is not limited to, a liquid level sensor; and the first weight monitoring element includes, but is not limited to, a scale.

[0073] As shown in Figure 3, the second liquid storage unit 200 includes a second liquid storage element 201, a third delivery pipeline element, a fourth delivery pipeline element, and at least one fifth delivery pipeline element. The second liquid storage element 201 is connected to the first liquid storage unit 100 and is used to buffer the liquid source. The third delivery pipeline element is connected to the second liquid storage element 201, the second power gas supply unit 600, and the first purge gas supply unit 700, and is used to deliver gas. The fourth delivery pipeline element is connected to the second liquid storage element 201 and the first purge gas supply unit 700, and is used to deliver the liquid source. The fifth delivery pipeline element is connected to the fourth delivery pipeline element and the process equipment, and is used to deliver the liquid source to the process equipment.

[0074] Specifically, the first end of the third conveying pipeline element is connected to the second power gas supply unit 600 and the first purging gas supply unit 700, respectively, and the second end of the third conveying pipeline element is connected to the second liquid storage element 201; the first end of the fourth conveying pipeline element is connected to the second liquid storage element 201; the first end of the fifth conveying pipeline element is connected to the second end of the fourth conveying pipeline element and the first purging gas supply unit 700, respectively, and the second end of the fifth conveying pipeline element is connected to the process equipment.

[0075] It should be noted that the second end of the third delivery pipeline element extends into the interior of the second liquid storage element 201 and extends to the position near the top wall of the second liquid storage element 201; the first end of the fourth delivery pipeline element extends into the interior of the second liquid storage element 201 and extends to the position near the bottom wall of the second liquid storage element 201.

[0076] It should be noted that there are several fifth conveying pipeline elements, the first end of which is connected in parallel with the second end of the fourth conveying pipeline element, and the second end of which is connected to the corresponding process equipment or to multiple air inlets on a process equipment.

[0077] It should be noted that the number of fifth delivery pipeline components can be set according to the number of process equipment or the number of air inlets on a process equipment, and no further restrictions are imposed here.

[0078] In some of these embodiments, the second liquid storage element 201 includes, but is not limited to, a stainless steel tank; the third delivery pipeline element includes, but is not limited to, a stainless steel pipe; the fourth delivery pipeline element includes, but is not limited to, a stainless steel pipe; and the fifth delivery pipeline element includes, but is not limited to, a stainless steel pipe.

[0079] Furthermore, the second liquid storage unit 200 also includes a fourth control valve element 202, a fifth control valve element 203, and at least one sixth control valve element 204. The fourth control valve element 202 is disposed on the third delivery pipeline element and is used to control the flow through the third delivery pipeline element; the fifth control valve element 203 is disposed on the fourth delivery pipeline element and is used to control the flow through the fourth delivery pipeline element; the sixth control valve element 204 is disposed on the fifth delivery pipeline element and is used to control the flow through the fifth delivery pipeline element.

[0080] Specifically, the fourth control valve element 202 includes a seventh pneumatic diaphragm valve. The seventh pneumatic diaphragm valve is disposed in the third delivery pipeline element and is used to automatically control the flow between the third delivery pipeline element and the second liquid storage element 201.

[0081] Specifically, the fifth control valve element 203 includes an eighth pneumatic diaphragm valve, a ninth pneumatic diaphragm valve, and a second manual diaphragm valve. The eighth pneumatic diaphragm valve is located in the fourth delivery pipeline element and is used to automatically control the flow between the second liquid storage element 201 and the fourth delivery pipeline element. The ninth pneumatic diaphragm valve is located in the fourth delivery pipeline element and downstream of the eighth pneumatic diaphragm valve. The second manual diaphragm valve is located in the fourth delivery pipeline element and downstream of the eighth pneumatic diaphragm valve, and is used to manually control the flow between the fourth delivery pipeline element and the fifth delivery pipeline element.

[0082] It should be noted that the number of the sixth control valve element 204 is the same as the number of the fifth delivery pipeline element.

[0083] More specifically, the sixth control valve element 204 includes a tenth pneumatic diaphragm valve and a third manual diaphragm valve. The tenth pneumatic diaphragm valve is located on the fifth delivery pipeline element and is used to automatically control the flow between the fifth and fourth delivery pipeline elements. The third manual diaphragm valve is located on the fifth delivery pipeline element and downstream of the tenth pneumatic diaphragm valve, and is used to manually control the flow between the fifth and fourth delivery pipeline elements.

[0084] Furthermore, the second liquid storage unit 200 also includes a second bypass pipeline element and a seventh control valve element 205. The first end of the second bypass pipeline element is connected to the first liquid storage unit 100, and the second end of the second bypass pipeline element is connected to the fourth delivery pipeline element for bypassing. The seventh control valve element 205 is disposed on the second bypass pipeline element for controlling the flow through the second bypass pipeline element.

[0085] Specifically, the first end of the second bypass pipeline element is connected to the second delivery pipeline element, and the connection point is located downstream of the fourth pneumatic diaphragm valve and upstream of the fifth pneumatic diaphragm valve. The second end of the second bypass pipeline element is connected to the fourth delivery pipeline element, and the connection point is located between the eighth and ninth pneumatic diaphragm valves.

[0086] In some of these embodiments, the second bypass conduit element includes, but is not limited to, a stainless steel pipe.

[0087] Specifically, the seventh control valve element 205 includes an eleventh pneumatic diaphragm valve. The eleventh pneumatic diaphragm valve is disposed in the second bypass pipeline element and is used to control the flow through the second bypass pipeline element.

[0088] Furthermore, the second liquid storage unit 200 also includes a third pressure monitoring element 206, a fourth pressure monitoring element 207, a second liquid level monitoring element, and a second weight monitoring element. The third pressure monitoring element 206 is connected to the third delivery pipeline element and is used to monitor the pressure of the third delivery pipeline element; the fourth pressure monitoring element 207 is connected to the fourth delivery pipeline element and is used to monitor the pressure of the fourth delivery pipeline element; the second liquid level monitoring element is disposed inside the second liquid storage unit 201 and is used to detect the liquid level of the second liquid storage unit 201; the second weight monitoring element is disposed at the bottom of the second liquid storage unit 201 and is used to monitor the weight of the second liquid storage unit 201.

[0089] Specifically, the connection between the third pressure monitoring element 206 and the third delivery pipeline element is located upstream of the seventh pneumatic diaphragm valve; the connection between the fourth pressure monitoring element 207 and the fourth delivery pipeline element is located downstream of the eighth pneumatic diaphragm valve and upstream of the ninth pneumatic diaphragm valve.

[0090] In some of these embodiments, the third pressure monitoring element 206 includes, but is not limited to, a pressure sensor; the fourth pressure monitoring element 207 includes, but is not limited to, a pressure sensor; the second liquid level monitoring element includes, but is not limited to, a liquid level sensor; and the second weight monitoring element includes, but is not limited to, a scale.

[0091] As shown in Figure 4, the third liquid storage unit 300 includes a third liquid storage element 301, a sixth delivery pipeline element, a seventh delivery pipeline element, an eighth delivery pipeline element, and at least one ninth delivery pipeline element. The third liquid storage element 301 is connected to the first liquid storage unit 100 and is used to store the solution; the sixth delivery pipeline element is connected to the third liquid storage element 301, the first purge gas supply unit 700, and the second purge gas supply unit 800 respectively, and is used to deliver gas; the seventh delivery pipeline element is connected to the third liquid storage element 301, the first liquid storage unit 100, the second liquid storage unit 200, and the first purge gas supply unit 700 respectively, and is used to deliver both gas and liquid; the eighth delivery pipeline element is connected to the seventh delivery pipeline element and is used to deliver liquid; the ninth delivery pipeline element is connected to the eighth delivery pipeline element and the second liquid storage unit 200 respectively, and is used to deliver liquid.

[0092] Specifically, the first end of the sixth delivery pipeline element is connected to the first purge gas supply unit 700 and the second purge gas supply unit 800, and the second end of the sixth delivery pipeline element is connected to the third liquid storage element 301; the first end of the seventh delivery pipeline element is connected to the third liquid storage element 301, and the second end of the seventh delivery pipeline element is connected to the second delivery pipeline element and the first purge gas supply unit 700 respectively, and the connection point is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve; the first end of the eighth delivery pipeline element is connected to the seventh delivery pipeline element, and the second end of the eighth delivery pipeline element is connected in parallel with the first ends of multiple ninth delivery pipeline elements; the second end of the ninth delivery pipeline element is connected to the fifth delivery pipeline element, and the connection point between the ninth delivery pipeline element and the fifth delivery pipeline element is located between the tenth pneumatic diaphragm valve and the third manual diaphragm valve.

[0093] It should be noted that the second end of the sixth delivery pipeline element extends into the interior of the third liquid storage element 301 and extends to the position near the top wall of the third liquid storage element 301; the first end of the seventh delivery pipeline element extends into the interior of the third liquid storage element 301 and extends to the position near the bottom wall of the third liquid storage element 301.

[0094] It should be noted that there are several ninth conveying pipeline elements, and each of the several ninth conveying pipeline elements is connected to a corresponding fifth conveying pipeline element.

[0095] It should be noted that the number of the ninth conveying pipeline components is the same as the number of the fifth conveying pipeline components.

[0096] In some of these embodiments, the third liquid storage element 301 includes, but is not limited to, a stainless steel tank; the sixth delivery pipeline element includes, but is not limited to, a stainless steel pipe; the seventh delivery pipeline element includes, but is not limited to, a stainless steel pipe; the eighth delivery pipeline element includes, but is not limited to, a stainless steel pipe; and the ninth delivery pipeline element includes, but is not limited to, a stainless steel pipe.

[0097] Furthermore, the third liquid storage unit 300 also includes an eighth control valve element 302, a ninth control valve element 303, a tenth control valve element 304, and an eleventh control valve element 305. Specifically, the eighth control valve element 302 is disposed on the sixth delivery pipeline element and is used to control the flow in the sixth delivery pipeline element; the ninth control valve element 303 is disposed on the seventh delivery pipeline element and is used to control the flow in the seventh delivery pipeline element; the tenth control valve element 304 is disposed on the eighth delivery pipeline element and is used to control the flow in the eighth delivery pipeline element; and the eleventh control valve element 305 is disposed on the ninth delivery pipeline element and is used to control the flow in the ninth delivery pipeline element.

[0098] Specifically, the eighth control valve element 302 includes a twelfth pneumatic diaphragm valve. The twelfth pneumatic diaphragm valve is disposed in the sixth delivery pipeline element and is used to automatically control the flow between the sixth delivery pipeline element and the third liquid storage element 301.

[0099] Specifically, the ninth control valve element 303 includes a thirteenth pneumatic diaphragm valve, a fourteenth pneumatic diaphragm valve, and a fifteenth pneumatic diaphragm valve. The thirteenth pneumatic diaphragm valve is located in the seventh delivery pipeline element and is used to automatically control the flow between the seventh delivery pipeline element and the third liquid storage element 301. The fourteenth pneumatic diaphragm valve is located in the seventh delivery pipeline element and downstream of the thirteenth pneumatic diaphragm valve. The fifteenth pneumatic diaphragm valve is located in the seventh delivery pipeline element and downstream of the fourteenth pneumatic diaphragm valve, and is used to automatically control the flow between the seventh delivery pipeline element and the second delivery pipeline element.

[0100] Specifically, the tenth control valve element 304 includes a sixteenth pneumatic diaphragm valve. The sixteenth pneumatic diaphragm valve is disposed in the eighth delivery pipeline element and is used to automatically control the flow between the seventh delivery pipeline element and the eighth delivery pipeline element.

[0101] Specifically, the eleventh control valve element 305 includes a seventeenth pneumatic diaphragm valve. The seventeenth pneumatic diaphragm valve is disposed in the ninth delivery pipeline element and is used to automatically control the flow between the ninth delivery pipeline element and the fifth delivery pipeline element.

[0102] It should be noted that the number of the eleventh control valve element 305 is the same as the number of the ninth delivery pipeline element.

[0103] Furthermore, the third liquid storage unit 300 also includes a fifth pressure monitoring element 306 and a third weight monitoring element. The fifth pressure monitoring element 306 is connected to the sixth delivery pipeline element and is used to monitor the pressure inside the sixth delivery pipeline element; the third weight monitoring element is located at the bottom of the third liquid storage unit 301 and is used to monitor the weight of the third liquid storage unit 301.

[0104] Specifically, the connection between the fifth pressure monitoring element 306 and the sixth delivery pipeline element is located upstream of the twelfth pneumatic diaphragm valve.

[0105] In some embodiments, the fifth pressure monitoring element 306 includes, but is not limited to, a pressure sensor; the third weight monitoring element includes, but is not limited to, a scale.

[0106] As shown in Figure 5, the fourth liquid storage unit 400 includes a fourth liquid storage element 401 and a tenth delivery pipeline element. The fourth liquid storage element 401 is connected to the first liquid storage unit 100 and the second liquid storage unit 200 via pipelines and is used to store waste liquid. The tenth delivery pipeline element is connected to the fourth liquid storage element 401, the first liquid storage unit 100, the second liquid storage unit 200, and the first purge gas supply unit 700, and is used to deliver liquid.

[0107] Specifically, the first end of the tenth delivery pipeline element has two branch pipelines, which are respectively connected to the second delivery pipeline element, the fifth delivery pipeline element, and the first purge gas supply unit 700. The connection point between one branch pipeline and the second delivery pipeline element is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve, and the connection point between the other branch pipeline and the fifth delivery pipeline element is located between the fourth pressure monitoring element 207 and the ninth pneumatic diaphragm valve.

[0108] It should be noted that the second end of the tenth delivery pipeline element extends into the interior of the fourth liquid storage element 401 and extends to the position near the top wall inside the fourth liquid storage element 401.

[0109] In some embodiments, the fourth liquid storage element 401 includes, but is not limited to, a stainless steel tank; the tenth delivery pipeline element includes, but is not limited to, a stainless steel pipe.

[0110] Furthermore, the fourth liquid storage unit 400 also includes a twelfth control valve element 402. The twelfth control valve element 402 is disposed on the tenth delivery pipeline element and is used to control the flow through the tenth delivery pipeline element.

[0111] Specifically, the tenth control valve element 304 includes an eighteenth pneumatic diaphragm valve, a nineteenth pneumatic diaphragm valve, a twentieth pneumatic diaphragm valve, and a twenty-first pneumatic diaphragm valve. The eighteenth pneumatic diaphragm valve is located on the tenth delivery pipeline element and is used to automatically control the flow between the tenth and second delivery pipeline elements; the nineteenth pneumatic diaphragm valve is located on the tenth delivery pipeline element and is used to automatically control the flow between the tenth and fifth delivery pipeline elements; the twentieth pneumatic diaphragm valve is located on the tenth delivery pipeline element; and the twenty-first pneumatic diaphragm valve is located on the tenth delivery pipeline element and downstream of the twentieth pneumatic diaphragm valve, and is used to automatically control the flow between the tenth delivery pipeline element and the fourth liquid storage element 401.

[0112] Furthermore, the fourth liquid storage unit 400 also includes a sixth pressure monitoring element 403 and a fourth weight monitoring element. The sixth pressure monitoring element 403 is connected to the tenth delivery pipeline element and is used to monitor the pressure inside the tenth delivery pipeline element; the fourth weight monitoring element is located at the bottom of the fourth liquid storage unit 401 and is used to monitor the weight of the fourth liquid storage unit 401.

[0113] Specifically, the connection between the sixth pressure monitoring element 403 and the tenth delivery pipeline element is located between the eighteenth pneumatic diaphragm valve and the nineteenth pneumatic diaphragm valve.

[0114] In some embodiments, the sixth pressure monitoring element 403 includes, but is not limited to, a pressure sensor; the fourth weight monitoring element includes, but is not limited to, a scale.

[0115] As shown in Figure 6, the first power gas supply unit 500 includes a first power gas supply element. The first power gas supply element is connected to the first power gas source and the first liquid storage unit 100 through pipelines, and is used to supply the first power gas to the first liquid storage unit 100 so that the liquid source in the first liquid storage unit 100 flows to the second liquid storage unit 200.

[0116] Specifically, the first end of the first power gas supply element is connected to the first power gas source, and the second end of the first power gas supply element is connected to the first end of the first delivery pipeline element.

[0117] In some of these embodiments, the first power gas supply element includes, but is not limited to, a stainless steel pipe.

[0118] Furthermore, the first power gas supply unit 500 also includes a thirteenth control valve element 501. The thirteenth control valve element 501 is disposed on the first power gas supply element and is used to control the flow of gas through the first power gas supply element.

[0119] Specifically, the thirteenth control valve element 501 includes a fourth manual diaphragm valve, a first check valve, a fifth manual diaphragm valve, and a twenty-second pneumatic diaphragm valve. The fourth manual diaphragm valve is located on the first power gas supply element and is used to manually control the flow between the first power gas supply element and the first power gas source. The first check valve is located on the first power gas supply element and downstream of the fourth manual diaphragm valve, and is used to allow unidirectional flow of gas inside the first power gas supply element. The fifth manual diaphragm valve is located on the first power gas supply element and downstream of the fourth manual diaphragm valve. The twenty-second pneumatic diaphragm valve is located on the first power gas supply element and downstream of the fifth manual diaphragm valve, and is used to automatically control the flow between the first power gas supply element and the first delivery pipeline element.

[0120] Furthermore, the first power gas supply unit 500 also includes a first pressure regulating element 502 and a seventh pressure monitoring element 503. The first pressure regulating element 502 is disposed on the first power gas supply element and is used to regulate the internal pressure of the first power gas supply element; the seventh pressure monitoring element 503 is disposed on the first power gas supply element and is used to monitor the internal pressure of the first power gas supply element.

[0121] Specifically, the first pressure regulating element 502 is located downstream of the first check valve and upstream of the fifth manual diaphragm valve; the connection between the seventh pressure monitoring element 503 and the first power gas supply element is located downstream of the first pressure regulating element 502 and upstream of the fifth manual diaphragm valve.

[0122] In some of these embodiments, the first pressure regulating element 502 includes, but is not limited to, a pressure regulating valve; and the seventh pressure monitoring element 503 includes, but is not limited to, a pressure sensor.

[0123] As shown in Figure 7, the second power gas supply unit 600 includes a second power gas supply element. The second power gas supply element is connected to the second power gas source and the second liquid storage unit 200 via pipelines, and is used to supply the second power gas to the second liquid storage unit 200 so that the liquid source in the second liquid storage unit 200 flows to the process equipment.

[0124] Specifically, the first end of the second power gas supply element is connected to the second power gas source, and the second end of the second power gas supply element is connected to the fourth delivery pipeline element.

[0125] In some of these embodiments, the second power gas supply element includes, but is not limited to, a stainless steel tube.

[0126] Furthermore, the second power gas supply unit 600 also includes a fourteenth control valve element 601. The fourteenth control valve element 601 is disposed on the second power gas supply element and is used to control the flow of gas through the second power gas supply element.

[0127] Specifically, the fourteenth control valve element 601 includes a sixth manual diaphragm valve, a second check valve, a seventh manual diaphragm valve, and a twenty-third pneumatic diaphragm valve. The sixth manual diaphragm valve is located on the second power gas supply element and is used to manually control the flow between the second power gas supply element and the second power gas source. The second check valve is located on the second power gas supply element and downstream of the sixth manual diaphragm valve, and is used to allow unidirectional gas flow within the second power gas supply element. The seventh manual diaphragm valve is located on the second power gas supply element and downstream of the second check valve. The twenty-third pneumatic diaphragm valve is located on the second power gas supply element and downstream of the seventh manual diaphragm valve, and is used to automatically control the flow between the second power gas supply element and the fourth delivery pipeline element.

[0128] Furthermore, the second power gas supply unit 600 also includes a second pressure regulating element 602 and an eighth pressure monitoring element 603. The second pressure regulating element 602 is disposed on the second power gas supply element and is used to regulate the pressure of the second power gas supply element; the eighth pressure monitoring element 603 is disposed on the second power gas supply element and is used to monitor the pressure of the second power gas supply element.

[0129] Specifically, the second pressure regulating element 602 is located downstream of the second check valve and upstream of the seventh manual diaphragm valve; the connection between the eighth pressure monitoring element 603 and the second power gas supply element is located downstream of the second pressure regulating element 602 and upstream of the seventh manual diaphragm valve.

[0130] In some embodiments, the second pressure regulating element 602 includes, but is not limited to, a pressure regulating valve; the eighth pressure monitoring element 603 includes, but is not limited to, a pressure sensor.

[0131] As shown in Figure 8, the first purge gas supply unit 700 includes a first purge pipeline element, a second purge pipeline element, a third purge pipeline element, a fourth purge pipeline element, a fifth purge pipeline element, and a sixth purge pipeline element. The first purge pipeline element is connected to the first purge gas source and is used to deliver the first purge gas. The second purge pipeline element is connected to both the first purge pipeline element and the first liquid storage unit 100, and is used to deliver the first purge gas to the first liquid storage unit 100 to pressurize the liquid source in the pipeline into the first liquid storage unit 100. The third purge pipeline element is connected to both the first purge pipeline element and the second liquid storage element 201 of the second liquid storage unit 200, and is used to deliver the first purge gas to the second liquid storage element 201 to pressurize the liquid source in the pipeline into the second liquid storage unit 200. The fourth purge pipeline element is connected to both the first purge pipeline element and the second liquid storage element 201 of the second liquid storage unit 200. The first purging pipeline element is connected to the first purging pipeline element and the fourth liquid storage unit 300, and is used to deliver the first purging gas to the third liquid storage unit 300 to pump the dissolved liquid in the pipeline into the third liquid storage unit 300; the fifth purging pipeline element is connected to the first purging pipeline element and the eighth delivery pipeline element of the third liquid storage unit 300, and is used to deliver the first purging gas to the eighth delivery pipeline element to discharge the liquid in the third liquid storage unit 300.

[0132] Specifically, the first end of the first purge pipeline element is connected to the first purge air source; the first end of the second purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the second purge pipeline element is connected to the first end of the first delivery pipeline element and the second delivery pipeline element respectively. The connection point between the second purge pipeline element and the second delivery pipeline element is located between the second pressure monitoring element 106 and the third pneumatic diaphragm valve; the first end of the third purge pipeline element is connected to the second end of the first purge pipeline element, and the second end of the third purge pipeline element is connected to the first ends of the fourth delivery pipeline element and the fifth delivery pipeline element respectively. The connection point between the third purge pipeline element and the fifth delivery pipeline element is located between the fourth pressure monitoring element 207 and the ninth pneumatic diaphragm valve. Between valves; the first end of the fourth purge line element is connected to the second end of the first purge line element, and the second end of the fourth purge line element is connected to the first end of the sixth delivery line element and the seventh delivery line element respectively. The connection point between the fourth purge line element and the seventh delivery line element is located between the thirteenth pneumatic diaphragm valve and the fourteenth pneumatic diaphragm valve; the first end of the fifth purge line element is connected to the second end of the first purge line element, and the second end of the fifth purge line element is connected to the tenth delivery line element, and the connection point is located between the sixth pressure monitoring element 403 and the nineteenth pneumatic diaphragm valve; the first end of the sixth purge line element is connected to the second end of the first purge line element, and the second end of the sixth purge line element is connected to the ninth delivery line element.

[0133] In some of these embodiments, the first purge line element includes, but is not limited to, a stainless steel tube; the second purge line element includes, but is not limited to, a stainless steel tube; the third purge line element includes, but is not limited to, a stainless steel tube; the fourth purge line element includes, but is not limited to, a stainless steel tube; the fifth purge line element includes, but is not limited to, a stainless steel tube; and the sixth purge line element includes, but is not limited to, a stainless steel tube.

[0134] Furthermore, the first purge gas supply unit 700 also includes a fifteenth control valve element 701, a sixteenth control valve element 702, a seventeenth control valve element 703, an eighteenth control valve element 704, and a nineteenth control valve element 705. Specifically, the fifteenth control valve element 701 is disposed in the first purge pipeline element and is used to control the flow in the first purge pipeline element; the sixteenth control valve element 702 is disposed in the third purge pipeline element and is used to control the flow in the third purge pipeline element; the seventeenth control valve element 703 is disposed in the fourth purge pipeline element and is used to control the flow in the fourth purge pipeline element; the eighteenth control valve element 704 is disposed in the fifth purge pipeline element and is used to control the flow in the fifth purge pipeline element; and the nineteenth control valve element 705 is disposed in the fifth purge pipeline element and is used to control the flow in the fifth purge pipeline element.

[0135] Specifically, the fifteenth control valve element 701 includes a twenty-fourth pneumatic diaphragm valve and a third check valve. The twenty-fourth pneumatic diaphragm valve is disposed in the first purge pipeline element and is used to automatically control the flow between the first purge gas source and the first purge pipeline element; the third check valve is disposed in the first purge pipeline element and is located downstream of the twenty-fourth pneumatic diaphragm valve, and is used to allow the gas in the first purge pipeline element to flow in one direction only.

[0136] Specifically, the sixteenth control valve element 702 includes a twenty-fifth pneumatic diaphragm valve, a twenty-sixth pneumatic diaphragm valve, and a twenty-seventh pneumatic diaphragm valve. The twenty-fifth pneumatic diaphragm valve is disposed on the second purge line element; the twenty-sixth pneumatic diaphragm valve is disposed on the second purge line element and located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow between the second purge line element and the first delivery line element; the twenty-seventh pneumatic diaphragm valve is disposed on the second purge line element and located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow between the second purge line element and the second delivery line element.

[0137] Specifically, the seventeenth control valve element 703 includes a twenty-eighth pneumatic diaphragm valve, a twenty-ninth pneumatic diaphragm valve, and a thirtieth pneumatic diaphragm valve. The twenty-eighth pneumatic diaphragm valve is located in the third purge line element; the twenty-ninth pneumatic diaphragm valve is located in the third purge line element and downstream of the twenty-eighth pneumatic diaphragm valve, used to automatically control the flow between the third purge line element and the fourth delivery line element; the thirtieth pneumatic diaphragm valve is located in the third purge line element and downstream of the twenty-eighth pneumatic diaphragm valve, used to automatically control the flow between the third purge line element and the fifth delivery line element.

[0138] Specifically, the eighteenth control valve element 704 includes a thirty-first pneumatic diaphragm valve, a thirty-second pneumatic diaphragm valve, and a thirty-third pneumatic diaphragm valve. The thirty-first pneumatic diaphragm valve is located in the fourth purge line element; the thirty-second pneumatic diaphragm valve is located in the fourth purge line element and downstream of the thirty-first pneumatic diaphragm valve, and is used to automatically control the flow between the fourth purge line element and the sixth delivery line element; the thirty-second pneumatic diaphragm valve is also located in the fourth purge line element and downstream of the thirty-first pneumatic diaphragm valve, and is used to automatically control the flow between the fourth purge line element and the seventh delivery line element.

[0139] Specifically, the nineteenth control valve element 705 includes a thirty-fourth pneumatic diaphragm valve and a thirty-fifth pneumatic diaphragm valve. The thirty-fourth pneumatic diaphragm valve is located in the fifth purge line element; the thirty-fifth pneumatic diaphragm valve is located in the fifth purge line element and downstream of the thirty-fourth pneumatic diaphragm valve, and is used to automatically control the flow between the fifth purge line element and the tenth delivery line element.

[0140] In addition, a one-way valve is installed on the sixth purge line element to ensure unidirectional gas flow within it.

[0141] Furthermore, the first purge gas supply unit 700 also includes a micro-leakage regulating element 706, a third pressure regulating element 707, and a ninth pressure monitoring element 708. The micro-leakage regulating element 706 is disposed in the first purge pipeline element to minimize the leakage of the first purge gas; the third pressure regulating element 707 is disposed in the first purge pipeline element to regulate the pressure of the first purge pipeline element; and the ninth pressure monitoring element 708 is disposed in the first purge pipeline element to monitor the pressure of the first purge pipeline element.

[0142] Specifically, the micro-leakage regulating element 706 is located between the twenty-fourth pneumatic diaphragm valve and the third check valve; the third pressure regulating element 707 is located downstream of the third check valve; and the connection between the ninth pressure monitoring element 708 and the first purge pipeline element is located downstream of the third pressure regulating element 707.

[0143] In some of these embodiments, the microleak adjustment element 706 includes, but is not limited to, a pneumatic microleak valve; the third pressure regulating element 707 includes, but is not limited to, a pressure regulating valve; and the ninth pressure monitoring element 708 includes, but is not limited to, a pressure sensor.

[0144] As shown in Figure 9, the second purge gas supply unit 800 includes a seventh purge pipeline element. This seventh purge pipeline element is connected to both the second purge gas source and the third liquid storage unit 300, and is used to deliver the first purge gas to the third liquid storage unit 300 to inject dissolved liquid into the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200, so that the dissolved liquid cleans the pipeline, the first liquid storage unit 100, and the second liquid storage unit 200.

[0145] Specifically, the first end of the seventh purging pipeline element is connected to the second purging gas source, and the second end of the seventh purging pipeline element is connected to the first end of the sixth delivery pipeline element.

[0146] In some of these embodiments, the seventh purge line element includes, but is not limited to, a stainless steel tube.

[0147] Furthermore, the second purge gas supply unit 800 also includes a twentieth control valve element 801. The twentieth control valve element 801 is disposed in the seventh purge pipeline element and is used to control the flow through the seventh purge pipeline element.

[0148] Specifically, the twentieth control valve element 801 includes an eighth manual diaphragm valve, a fourth check valve, and a thirty-sixth pneumatic diaphragm valve. The eighth manual diaphragm valve is located on the seventh purge line element and is used to manually control the flow between the seventh purge line element and the second purge gas source. The fourth check valve is located on the seventh purge line element and downstream of the eighth manual diaphragm valve, and is used to allow unidirectional gas flow within the seventh purge line element. The thirty-sixth pneumatic diaphragm valve is located on the seventh purge line element and downstream of the fourth check valve, and is used to automatically control the flow between the seventh purge line element and the sixth delivery line element.

[0149] Furthermore, the second purge gas supply unit 800 also includes a fourth pressure regulating element 802 and a tenth pressure monitoring element 803. The fourth pressure regulating element 802 is disposed in the seventh purge pipeline element and is used to regulate the pressure inside the seventh purge pipeline element; the tenth pressure monitoring element 803 is connected to the seventh purge pipeline element and is used to monitor the pressure inside the seventh purge pipeline element.

[0150] Specifically, the fourth pressure regulating element 802 is located between the fourth check valve and the thirty-sixth pneumatic diaphragm valve; the connection between the tenth pressure monitoring element 803 and the seventh purge pipeline element is located between the fourth pressure regulating element 802 and the thirty-sixth pneumatic diaphragm valve.

[0151] In some embodiments, the fourth pressure regulating element 802 includes, but is not limited to, a pressure regulating valve; the tenth pressure monitoring element 803 includes, but is not limited to, a pressure sensor.

[0152] As shown in Figure 10, the first vacuum unit 900 includes a first exhaust pipe element, a first vacuum pipe element, a second vacuum pipe element, a third vacuum pipe element, and a fourth vacuum pipe element. The first exhaust pipe element is connected to the waste gas treatment equipment and is used to transport waste gas. The first vacuum pipe element is connected to the first liquid storage unit 100, the first exhaust pipe element, and the vacuum generator, respectively, and is used to perform vacuum treatment on the first liquid storage unit 100. The second vacuum pipe element is connected to the second liquid storage unit 200, the first exhaust pipe element, and the first vacuum pipe element, respectively, and is used to perform vacuum treatment on the second liquid storage unit 200. The third vacuum pipe element is connected to the third liquid storage unit 300, the first exhaust pipe element, and the first vacuum pipe element, respectively, and is used to perform vacuum treatment on the third liquid storage unit 300. The fourth vacuum pipe element is connected to the fourth liquid storage unit 400, the first exhaust pipe element, and the first vacuum pipe element, respectively, and is used to perform vacuum treatment on the fourth liquid storage unit 400.

[0153] Specifically, the first end of the first exhaust pipe element is connected to the vacuum generating device; the first end of the first vacuum pipe element is connected to the second end of the first exhaust pipe element, and the second end of the first vacuum pipe element is connected to the second purge pipe element, with the connection point located between the twenty-sixth pneumatic diaphragm valve and the twenty-seventh pneumatic diaphragm valve; the first end of the second vacuum pipe element is connected to the second end of the first exhaust pipe element, and the second end of the second vacuum pipe element is connected to the third purge pipe element, with the connection point located between the twenty-ninth pneumatic diaphragm valve and the thirtieth pneumatic diaphragm valve; the first end of the third vacuum pipe element is connected to the first exhaust pipe element, and the second end of the third vacuum pipe element is connected to the fourth purge pipe element, with the connection point located between the thirty-second pneumatic diaphragm valve and the thirty-third pneumatic diaphragm valve; the first end of the fourth vacuum pipe element is connected to the first exhaust pipe element, and the second end of the fourth vacuum pipe element is connected to the fifth purge pipe element, with the connection point located upstream of the thirty-fifth pneumatic diaphragm valve.

[0154] In some of these embodiments, the first exhaust conduit element includes, but is not limited to, a stainless steel tube; the first vacuum conduit element includes, but is not limited to, a stainless steel tube; the second vacuum conduit element includes, but is not limited to, a stainless steel tube; the third vacuum conduit element includes, but is not limited to, a stainless steel tube; and the fourth vacuum conduit element includes, but is not limited to, a stainless steel tube.

[0155] Furthermore, the first vacuum unit 900 also includes a twenty-first control valve element 901, a twenty-second control valve element 902, a twenty-third control valve element 903, a twenty-fourth control valve element 904, and a twenty-fifth control valve element 905. Specifically, the twenty-first control valve element 901 is disposed on the first exhaust pipe element and is used to control the flow in the first exhaust pipe element; the twenty-second control valve element 902 is disposed on the first vacuum pipe element and is used to control the flow in the first vacuum pipe element; the twenty-third control valve element 903 is disposed on the second vacuum pipe element and is used to control the flow in the second vacuum pipe element; the twenty-fourth control valve element 904 is disposed on the third vacuum pipe element and is used to control the flow in the third vacuum pipe element; and the twenty-fifth control valve element 905 is disposed on the fourth vacuum pipe element and is used to control the flow in the fourth vacuum pipe element.

[0156] Specifically, the twenty-first control valve element 901 includes a thirty-seventh pneumatic diaphragm valve. The thirty-seventh pneumatic diaphragm valve is located on the first exhaust pipe element and is used to automatically control the flow between the first exhaust pipe element and the exhaust gas treatment equipment.

[0157] Specifically, the twenty-second control valve element 902 includes a thirty-eighth pneumatic diaphragm valve. The thirty-eighth pneumatic diaphragm valve is disposed in the first vacuum line element and is used to automatically control the flow between the first exhaust line element and the first vacuum line element.

[0158] Specifically, the twenty-third control valve element 903 includes a thirty-ninth pneumatic diaphragm valve. The thirty-ninth pneumatic diaphragm valve is located in the second vacuum line element and is used to automatically control the flow between the first exhaust line element and the second vacuum line element.

[0159] Specifically, the twenty-fourth control valve element 904 includes the fortieth pneumatic diaphragm valve. The fortieth pneumatic diaphragm valve is located in the third vacuum line element and is used to automatically control the flow between the first exhaust line element and the third vacuum line element.

[0160] Specifically, the twenty-fifth control valve element 905 includes a forty-first pneumatic diaphragm valve. The forty-first pneumatic diaphragm valve is located in the fourth vacuum line element and is used to automatically control the flow between the first exhaust line element and the fourth vacuum line element.

[0161] Furthermore, the first vacuum unit 900 also includes an eleventh pressure monitoring element 906. The eleventh pressure monitoring element 906 is connected to the first exhaust pipe element and is used to monitor the pressure of the first exhaust pipe element.

[0162] Specifically, the connection between the eleventh pressure monitoring element 906 and the first exhaust pipe element is located downstream of the thirty-sixth pneumatic diaphragm valve.

[0163] In some embodiments, the eleventh pressure monitoring element 906 includes, but is not limited to, a pressure sensor.

[0164] The usage method of this embodiment is as follows:

[0165] (a) Transporting liquid source

[0166] The fourth manual diaphragm valve is manually opened, allowing the first power gas from the first power gas source to flow to the first power gas supply element. The system activates the first pressure regulating element 502 to regulate the pressure of the first power gas in the first power gas supply element, ensuring that the gas pressure in the first power gas supply element meets the standard. When the gas pressure detected by the seventh pressure monitoring element 503 meets the standard, the fifth manual diaphragm valve is manually opened, and the system automatically opens the twenty-second pneumatic diaphragm valve, allowing flow between the first power gas supply element and the first delivery pipeline element. The system opens the first pneumatic diaphragm valve, connecting the first delivery pipeline element to the first liquid storage element 101, allowing the first power gas to enter the first liquid storage element 101. The system opens the second, third, fourth, and fifth pneumatic diaphragm valves, and manually opens the first manual diaphragm valve, connecting the second delivery pipeline element to the first liquid storage element 101 and the second liquid storage element 201, allowing the liquid source inside the first liquid storage element 101 to flow through the second delivery pipeline under the action of the first power gas. The component enters the second liquid storage component 201, thereby buffering the liquid source; the sixth manual diaphragm valve is manually opened, allowing the second power gas from the second power gas source to flow to the second power gas supply component; the system opens the second pressure regulating component 602 to regulate the pressure of the second power gas in the second power gas supply component, thereby ensuring that the gas pressure in the second power gas supply component meets the standard; when the gas pressure monitored by the eighth pressure monitoring component 603 meets the standard, the seventh manual diaphragm valve is manually opened and the system automatically opens the twenty-third pneumatic diaphragm valve, allowing the second power gas supply component to circulate with the fourth delivery pipeline component; the system opens the seventh pneumatic diaphragm valve, connecting the third delivery pipeline component with the second liquid storage component 201, thereby allowing the second power gas to enter the second liquid storage component 201; the second manual diaphragm valve and the third manual diaphragm valve are manually opened and the system automatically opens the eighth, ninth, and tenth pneumatic diaphragm valves, allowing the liquid source inside the second liquid storage component 201 to enter the process equipment through the fourth and fifth delivery pipeline components.

[0167] (II) Cleaning the first liquid storage unit 100

[0168] The system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates the micro-leakage regulating element 706 to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth and twenty-seventh pneumatic diaphragm valves, allowing the first purge gas to pass through the second purge pipeline element and the second delivery pipeline element into the first liquid storage element 101, thereby allowing the gas in the second delivery pipeline element to pass through the second purge pipeline element and the second delivery pipeline element into the first liquid storage element 101. The liquid source is pressurized into the first liquid storage element 101; the eighth manual diaphragm valve is manually opened, allowing the second purge gas from the second purge gas source to enter the seventh purge pipeline element; the system activates the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, thereby ensuring that the gas pressure in the seventh purge pipeline element meets the standard; the system activates the thirty-sixth and twelfth pneumatic diaphragm valves, allowing the second purge gas to pass through the seventh purge pipeline element and the sixth delivery pipeline element into the third liquid storage element 301; the system activates the thirteenth, fourteenth, and fifteenth pneumatic diaphragm valves, allowing the dissolved liquid in the third liquid storage element 301 to pass through the seventh delivery pipeline element, the second purge pipeline element, and the second delivery pipeline element. The liquid flows from the first liquid storage element 101 to the first liquid storage element 101, thereby dissolving the residual liquid source in the first liquid storage element 101. After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system opens the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system opens the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard. When the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth, twenty-sixth, and sixth pneumatic diaphragm valves. The system activates the eighteenth, twentieth, and twenty-first pneumatic diaphragm valves, allowing the first purge gas to pressurize the waste liquid in the first liquid storage element 101 into the fourth liquid storage element 401. When the waste liquid inside the first liquid storage element 101 is emptied, the system opens the sixth, twenty-sixth, twenty-seventh, thirty-seventh, and thirty-eighth pneumatic diaphragm valves to discharge the gas from each pipeline. Upon completion of the venting operation, the system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system also activates the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element.The system activates the third pressure regulating element 707 to regulate the pressure of the first purging gas in the first purging pipeline element, thereby ensuring that the gas pressure in the first purging pipeline element meets the standard. When the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth, twenty-sixth, twenty-seventh, and sixth pneumatic diaphragm valves, filling the pipeline with the first purging gas and maintaining the pressure for a period of time. After purging is completed, the system opens the sixth, twenty-sixth, twenty-seventh, thirty-seventh, and thirty-eighth pneumatic diaphragm valves, thereby venting the gas from the pipeline.

[0169] (III) Cleaning the second liquid storage element 201 of the second liquid storage unit 200

[0170] The system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates the micro-leakage regulating element 706 to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-ninth and thirtieth pneumatic diaphragm valves, allowing the first purge gas to pass through the third purge pipeline element and the fourth delivery pipeline. The component enters the second liquid storage element 201, thereby allowing the dissolved pressure in the fourth delivery pipeline element to flow into the second liquid storage element 201; the eighth manual diaphragm valve is manually opened, allowing the second purge gas from the second purge gas source to enter the seventh purge pipeline element; the system activates the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, ensuring that the gas pressure in the seventh purge pipeline element meets the standard; the system activates the thirty-sixth and twelfth pneumatic diaphragm valves, allowing the second purge gas to pass through the seventh purge pipeline element and the sixth delivery pipeline element into the third liquid storage element 301; the system activates the thirteenth and fourteenth pneumatic diaphragm valves... The pneumatic diaphragm valves 15, 27, 3, 4, and 11 allow the dissolved liquid in the third storage element 301 to flow to the second storage element 201 via the seventh delivery pipeline element, the second purge pipeline element, the second delivery pipeline element, the second bypass pipeline element, and the fourth delivery pipeline element. This allows the dissolved liquid to dissolve the residual liquid source in the second storage element 201. After sufficient dissolution, the system automatically opens the 24th pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system then activates the micro-leakage adjustment element 706 to adjust the first purge gas. The system adjusts the flow rate of the first purge gas from the source into the first purge pipeline element; the system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system activates the twenty-fifth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the nineteenth pneumatic diaphragm valve, the twentieth pneumatic diaphragm valve, and the twenty-first pneumatic diaphragm valve, so that the first purge gas can pressurize the waste gas in the second liquid storage element 201 into the fourth liquid storage element 401;When the waste liquid inside the second liquid storage element 201 is emptied, the system opens the seventh, eleventh, third, fourth, twenty-seventh, thirty-seventh, thirty-eighth, sixth, twenty-eighth, twenty-ninth, and thirtieth pneumatic diaphragm valves to discharge the gas in the pipeline. After the venting operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system activates the micro-leakage regulating element 706 to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system activates the third pressure regulating element 707 to regulate the flow rate of the first purge gas in the first purge pipeline element. The system adjusts the pressure to ensure the air pressure in the first purging pipeline components meets the standard. When the air pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the twenty-fifth, twenty-seventh, third, fourth, twenty-eighth, twenty-ninth, and thirtieth pneumatic diaphragm valves, filling the pipeline with the first purging gas and maintaining the pressure for a period of time. After purging is complete, the system opens the seventh, eleventh, third, fourth, twenty-seventh, thirty-seventh, thirty-eighth, sixth, twenty-eighth, twenty-ninth, and thirtieth pneumatic diaphragm valves to release the gas from the pipeline.

[0171] (iv) Clean the fifth delivery pipeline components of the second liquid storage unit 200.

[0172] The system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates the micro-leakage regulating element 706 to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; if the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the seventeenth pneumatic diaphragm valve and manually opens... The third manual diaphragm valve is activated to discharge the liquid source in the fifth delivery pipeline element. After the liquid source is completely discharged, the eighth manual diaphragm valve is manually opened to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline element. The system activates the fourth pressure regulating element 802 to regulate the pressure of the second purge gas in the seventh purge pipeline element, ensuring that the gas pressure in the seventh purge pipeline element meets the standard. The system activates the thirty-sixth and twelfth pneumatic diaphragm valves, allowing the second purge gas to pass through the seventh purge pipeline element and the sixth delivery pipeline element. The system enters the third liquid storage element 301; the system opens the thirteenth, fourteenth, sixteenth, and seventeenth pneumatic diaphragm valves, allowing the dissolved liquid in the third liquid storage element 301 to flow through the seventh, eighth, and ninth delivery pipeline elements to the fifth delivery pipeline element, thereby dissolving the residual liquid source in the fifth delivery pipeline element; after sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system The micro-leakage regulating element 706 is activated to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, so that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system activates the seventeenth pneumatic diaphragm valve and manually activates the third manual diaphragm valve, thereby discharging the waste liquid in the fifth delivery pipeline element; after the waste liquid is completely discharged, the gas in the pipeline is discharged.

[0173] (V) Clean the third liquid storage unit 300

[0174] The system automatically opens the 24th pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system opens the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system opens the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the 31st and 33rd pneumatic diaphragm valves, allowing the first purge gas to enter the third liquid storage element 301 through the fourth purge pipeline element and the seventh delivery pipeline element, thereby allowing the dissolved liquid in the seventh delivery pipeline element to flow into the third liquid storage element 301; when the dissolved liquid in the pipeline is drained, the system opens the 12th, 13th, 31st, 32nd, 40th, and 30th pneumatic diaphragm valves. The system automatically opens the 24th pneumatic diaphragm valve to allow the first purge gas from the first purge gas source to enter the first purge pipeline element after the purging operation is completed. The system then opens the micro-leakage regulating element 706 to regulate the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system also opens the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the gas pressure in the first purge pipeline element meets the standard. If the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the 31st, 32nd, and 33rd pneumatic diaphragm valves to fill the pipeline with the first purge gas and maintain the pressure for a period of time. After purging is completed, the system opens the 12th, 13th, 31st, 32nd, 40th, and 38th pneumatic diaphragm valves to discharge the gas from the pipeline.

[0175] (vi) Clean the fourth liquid storage unit 400

[0176] The system opens the forty-first, thirty-fifth, and thirty-eighth pneumatic diaphragm valves to purge the gas from the pipeline. With the gas purged, the system automatically opens the twenty-fourth pneumatic diaphragm valve, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system activates the micro-leakage regulating element 706 to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system activates the third pressure regulating element 707 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the gas pressure in the first purge pipeline element meets the standard. If the gas pressure detected by the ninth pressure monitoring element 708 meets the standard, the system opens the thirty-fourth and thirty-fifth pneumatic diaphragm valves, filling the pipeline with the first purge gas and maintaining the pressure for a period of time. After purging is complete, the system opens the forty-first, thirty-fifth, and thirty-eighth pneumatic diaphragm valves to purge the gas from the pipeline.

[0177] The advantage of this embodiment is that by connecting the first power gas supply unit to the first liquid storage unit, connecting the second power gas supply unit to the second liquid storage unit, connecting the first purge gas supply unit to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit respectively, and connecting the second purge gas supply unit to the third liquid storage unit, the dissolving liquid in the third liquid storage unit can be injected into the first liquid storage unit, the second liquid storage unit, and multiple pipelines. This allows the first liquid storage unit, the second liquid storage unit, and multiple pipelines to be cleaned by the dissolving liquid. This dissolves and discharges the liquid source adhering to the pipe wall and remaining in the first and second liquid storage units, thereby improving the cleanliness of the first liquid storage unit, the second liquid storage unit, and multiple pipelines.

[0178] Example 2

[0179] This embodiment is a modified embodiment of embodiment 1.

[0180] As shown in Figure 11, the liquid source delivery system also includes a gas-liquid separation unit 1000 and a second vacuum unit 1100. The gas-liquid separation unit 1000 is connected to the second liquid storage unit 200 and the process equipment via pipelines, and is located downstream of the second liquid storage unit 200. It is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit 200 to remove gas from the liquid source and to transport the separated liquid source to the process equipment. The second vacuum unit 1100 is connected to the gas-liquid separation unit 1000 and is used to discharge the gas generated by the gas-liquid separation unit 1000.

[0181] As shown in Figure 12, the gas-liquid separation unit 1000 includes a gas-liquid separation element 1001 and a third bypass pipeline element. The gas-liquid separation element 1001 is connected to and located downstream of the second liquid storage unit 200, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit 200 to remove gas from the liquid source, and to direct the separated liquid source to the process equipment. The first end of the third bypass pipeline element is connected to the pipeline connecting the gas-liquid separation element 1001 and the second liquid storage unit 200, and the second end of the third bypass pipeline element is connected to the pipeline connecting the gas-liquid separation element 1001 and the process equipment, serving to protect the overall pipeline.

[0182] Specifically, the gas-liquid separation element 1001 is disposed on the fourth delivery pipeline element and is located downstream of the fourth pressure monitoring element 207 and upstream of the ninth pneumatic diaphragm valve; the first end of the third bypass pipeline element and the connection point between it and the fourth delivery pipeline element are located between the fourth pressure monitoring element 207 and the gas-liquid separation element 1001, and the second end of the third bypass pipeline element and the connection point between it and the fourth delivery pipeline element are located between the ninth pneumatic diaphragm valve and the gas-liquid separation element 1001.

[0183] In some of these embodiments, the gas-liquid separation element 1001 includes, but is not limited to, a gas-liquid separator; the third bypass pipeline element includes, but is not limited to, a stainless steel pipe.

[0184] Furthermore, the gas-liquid separation unit 1000 also includes a twenty-sixth control valve element 1002 and a twenty-seventh control valve element 1003. The twenty-sixth control valve element 1002 is disposed in a pipeline connected to the gas-liquid separation element 1001 and is used to control the flow between the gas-liquid separation element 1001 and the second liquid storage unit 200 and the process equipment. The twenty-seventh control valve element 1003 is disposed in a third bypass pipeline element and is used to control the flow in the third bypass pipeline element.

[0185] Specifically, the twenty-sixth control valve element 1002 includes a forty-second pneumatic diaphragm valve and a forty-third pneumatic diaphragm valve. The forty-second pneumatic diaphragm valve is disposed on the fourth delivery pipeline element and located between the gas-liquid separation element 1001, the first end of the third bypass pipeline element, and the fourth delivery pipeline element; the forty-third pneumatic diaphragm valve is disposed on the fourth delivery pipeline element and located between the gas-liquid separation element 1001, the second end of the third bypass pipeline element, and the fourth delivery pipeline element.

[0186] Specifically, the twenty-seventh control valve element 1003 includes a forty-fourth pneumatic diaphragm valve and a forty-fifth pneumatic diaphragm valve. The forty-fourth pneumatic diaphragm valve is located at the first end of the third bypass pipeline element; the forty-fifth pneumatic diaphragm valve is located at the second end of the third bypass pipeline element.

[0187] As shown in Figure 12, the second vacuum unit 1100 includes a fifth vacuum pipeline element. The fifth vacuum pipeline element is connected to the vacuum generating device and the gas-liquid separation unit 1000, and is used to discharge the gas generated by the gas-liquid separation unit 1000.

[0188] Specifically, the first end of the fifth vacuum pipeline element is connected to the vacuum generator, and the second end of the fifth vacuum pipeline element is connected to the gas-liquid separation element 1001.

[0189] In some of these embodiments, the fifth vacuum line element includes, but is not limited to, a stainless steel tube.

[0190] Furthermore, the second vacuum unit 1100 includes a twenty-eighth control valve element 1101 and a twelfth pressure monitoring element 1102. The twenty-eighth control valve element 1101 is disposed in the fifth vacuum pipeline element and is used to control the flow in the fifth vacuum pipeline element; the twelfth pressure monitoring element 1102 is connected to the fifth vacuum pipeline element and is used to monitor the pressure inside the fifth vacuum pipeline element.

[0191] Specifically, the twenty-eighth control valve element 1101 includes a forty-sixth pneumatic diaphragm valve and a ninth manual diaphragm valve. The forty-sixth pneumatic diaphragm valve is located in the fifth vacuum line element; the ninth manual diaphragm valve is located in the connecting line between the twelfth pressure monitoring element 1102 and the fifth vacuum line element, and is located upstream of the forty-sixth pneumatic diaphragm valve.

[0192] In some of these embodiments, the twelfth pressure monitoring element 1102 includes, but is not limited to, a pressure sensor.

[0193] The usage method of this embodiment is as follows:

[0194] When the fourth conveying pipeline element delivers liquid to the process equipment, the system opens the forty-second and forty-third pneumatic diaphragm valves, allowing flow at both ends of the gas-liquid separation element 1001, thereby enabling the gas-liquid separation element 1001 to separate gas from the liquid source. Simultaneously with the operation of the gas-liquid separation element 1001, the system opens the forty-sixth pneumatic diaphragm valve, allowing the vacuum generator to discharge the gas generated by the gas-liquid separation element 1001 through the fifth vacuum pipeline element. If the gas-liquid separation element 1001 malfunctions, the system opens the forty-fourth and forty-fifth pneumatic diaphragm valves, allowing the liquid source in the fourth conveying pipeline element to be delivered to the process equipment through the third bypass pipeline element.

[0195] The advantage of this embodiment is that by setting up a gas-liquid separation unit and a second vacuum unit, the liquid source output by the second liquid storage unit can be gas-liquid separated, thereby improving the purity of the liquid source.

[0196] Example 3

[0197] This embodiment is a modified embodiment of Embodiments 1 and 2.

[0198] As shown in Figure 13, the liquid source delivery system also includes an evaporation unit 1200 and a third vacuum unit 1300. The evaporation unit 1200 is connected to the fourth liquid storage unit 400 and the exhaust device, respectively, and is used to discharge the evaporating liquid from the pipeline and the fourth liquid storage unit 400; the third vacuum unit 1300 is connected to the first vacuum unit 900 and is used to accelerate the evaporation of the liquid.

[0199] As shown in Figure 14, the evaporation unit 1200 includes a first evaporation pipeline element and a second evaporation pipeline element. The first evaporation pipeline element is connected to the fourth liquid storage unit 400 and the exhaust device, respectively, and is used to evaporate and discharge the liquid inside the fourth liquid storage unit 400. The second evaporation pipeline element is connected to the first evaporation pipeline element and the third liquid storage unit 300, respectively, and is used to evaporate and discharge the liquid inside the pipeline.

[0200] Specifically, the first end of the first evaporation pipeline element is connected to the fourth liquid storage element 401, and the second end of the first evaporation pipeline element is connected to the waste gas treatment equipment; the first end of the second evaporation pipeline element is connected to the first evaporation pipeline element, and the second end of the second evaporation pipeline element is connected to the seventh conveying pipeline element, and the connection point is located between the fourteenth pneumatic diaphragm valve and the fifteenth pneumatic diaphragm valve.

[0201] In some of these embodiments, the first evaporation conduit element includes, but is not limited to, a stainless steel pipe; the second evaporation conduit element includes, but is not limited to, a stainless steel pipe.

[0202] Furthermore, the evaporation unit 1200 includes a twenty-ninth control valve element 1201 and a thirtieth control valve element 1202. The twenty-ninth control valve element 1201 is disposed in the first evaporation pipeline element and is used to control the flow in the first evaporation pipeline element; the thirtieth control valve element 1202 is disposed in the second evaporation pipeline element and is used to control the flow in the second evaporation pipeline element.

[0203] Specifically, the twenty-ninth control valve element 1201 includes a forty-seventh pneumatic diaphragm valve, a forty-eighth pneumatic diaphragm valve, a fifth check valve, and a tenth manual diaphragm valve. The forty-seventh pneumatic diaphragm valve is located in the first evaporation pipeline element and controls the flow between the first evaporation pipeline element and the fourth liquid storage element 401. The forty-eighth pneumatic diaphragm valve is located in the first evaporation pipeline element and downstream of the forty-seventh pneumatic diaphragm valve. The fifth check valve is located in the first evaporation pipeline element and downstream of the forty-seventh pneumatic diaphragm valve, allowing unidirectional gas flow within the first evaporation pipeline element. The tenth manual diaphragm valve is located in the first evaporation pipeline element and downstream of the fifth check valve, controlling the flow between the first evaporation pipeline element and the waste gas treatment equipment.

[0204] In some of these embodiments, the twenty-ninth control valve element 1201 includes, but is not limited to, a diaphragm valve and a check valve.

[0205] Specifically, the thirtieth control valve element 1202 includes a sixth check valve. The sixth check valve is located in the second evaporation pipeline element and is used to allow flow between the second evaporation pipeline element and the waste gas treatment equipment.

[0206] As shown in Figure 14, the third vacuum unit 1300 includes a sixth vacuum pipeline element. This sixth vacuum pipeline element is connected to the first vacuum unit 900 and is used to accelerate the evaporation of the liquid.

[0207] Specifically, the first end of the sixth vacuum pipeline element is connected to the vacuum generator, and the second end of the sixth vacuum pipeline element is connected to the first exhaust pipeline element.

[0208] In some of these embodiments, the sixth vacuum line element includes, but is not limited to, a stainless steel tube.

[0209] Furthermore, the third vacuum unit 1300 includes a thirty-first control valve element 1301. The thirty-first control valve element 1301 is disposed in the sixth vacuum line element and is used to control the flow through the sixth vacuum line element.

[0210] Specifically, the thirty-first control valve element 1301 includes the forty-ninth pneumatic diaphragm valve. The forty-ninth pneumatic diaphragm valve is located in the sixth vacuum line element and is used to control the flow between the sixth vacuum line element and the vacuum generator.

[0211] The usage method of this embodiment is as follows:

[0212] The residual liquid in the fourth liquid storage element 401 and the seventh delivery pipeline element can be freely evaporated and discharged through the first evaporation pipeline element and the second evaporation pipeline element, respectively.

[0213] The advantage of this embodiment is that residual liquid in the fourth liquid storage unit or the seventh delivery pipeline element can be discharged through the evaporation unit, thereby improving the cleanliness of the pipeline.

[0214] Example 4

[0215] This embodiment is a modified embodiment of embodiments 1 to 3.

[0216] As shown in Figure 15, the liquid source delivery system also includes a leakage monitoring unit 1400. The leakage monitoring unit 1400 is installed in the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400, and is used to monitor leakage in these units in real time.

[0217] As shown in Figure 16, the leakage monitoring unit 1400 further includes a receiving element 1401, a plurality of first leakage detection elements 1402, and a second leakage detection element 1403. The receiving element 1401 is used to receive the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400. The plurality of first leakage detection elements 1402 are disposed in the receiving element 1401 and correspond to the bottom of the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300, and the fourth liquid storage unit 400, respectively, for detecting leakage in these units. The second leakage detection elements 1403 are disposed in the receiving element 1401 and are used to detect whether there is liquid accumulation in the receiving element 1401.

[0218] Specifically, the receiving element 1401 is arranged in a basin shape, and the first liquid storage element 101, the second liquid storage element 201, the third liquid storage element 301, and the fourth liquid storage element 401 are placed inside the receiving element 1401.

[0219] In some of these embodiments, the housing element 1401 includes, but is not limited to, a stainless steel basin.

[0220] Specifically, there are four first leakage detection elements, and the four first leakage detection elements 1402 are respectively disposed at the bottom of the first liquid storage element 101, the second liquid storage element 201, the third liquid storage element 301, and the fourth liquid storage element 401.

[0221] In some of these embodiments, the first leakage detection element 1402 includes, but is not limited to, a paper tape leakage detector; and the second leakage detection element 1403 includes, but is not limited to, a float leakage detector.

[0222] The usage method of this embodiment is the same as that of Embodiment 1, and will not be repeated here.

[0223] The advantage of this embodiment is that, in the event of leakage in the first, second, third, and fourth liquid storage elements, the first and second leakage detection elements can detect the leakage in a timely and effective manner, making it easier for staff to observe and improving work safety.

[0224] Example 5

[0225] This embodiment is a modified embodiment of embodiments 1 to 4.

[0226] As shown in Figure 15, the liquid source delivery system also includes a medium monitoring unit 1500. The medium monitoring unit 1500 is connected to the third liquid storage unit 300 and is located downstream of the third liquid storage unit 300. It is used to monitor whether the medium output by the third liquid storage unit 300 is a liquid.

[0227] Specifically, the medium monitoring unit 1500 is installed on the seventh delivery pipeline element to detect whether the medium in the seventh delivery pipeline element is a liquid. If it is not a liquid, that is, the content of the solution in the third liquid storage element 301 is too low, the third liquid storage element 301 needs to be replaced.

[0228] In some embodiments, the medium monitoring unit 1500 includes, but is not limited to, an ultrasonic sensor.

[0229] The usage method and advantages of this embodiment are the same as those of Embodiment 1, and will not be repeated here.

[0230] Example 6

[0231] This embodiment is a modified embodiment of embodiments 1 to 5.

[0232] As shown in Figure 15, the liquid source delivery system also includes a safety protection unit 1600. The safety protection unit 1600 is located at the top of the environment surrounding the liquid source delivery system and is used to monitor environmental information.

[0233] As shown in Figure 17, the safety protection unit 1600 includes a smoke detection element 1601, a liquid spray element 1603, an ultraviolet-infrared switch, and a blower element 1604. The smoke detection element 1601 is located at the top of the environment where the liquid source delivery system is located and is used to monitor smoke information in the environment; the liquid spray element 1603 is located at the top of the environment where the liquid source delivery system is located and is used to spray liquid into the environment; the ultraviolet-infrared switch is located at the top of the environment where the liquid source delivery system is located and is used to monitor whether there is an open flame in the environment; the blower element 1604 is located at the top of the environment where the liquid source delivery system is located and is used to exhaust gases from the environment.

[0234] In some embodiments, the smoke detection element 1601 is a smoke detector; the liquid spray element 1603 is a spray head; the ultraviolet-infrared switch is an infrared switch (IR switch); the blower element 1604 includes, but is not limited to, an exhaust fan; and the safety protection unit 1600 also includes a gas detection element, a flame detection element, and a temperature detection element.

[0235] The advantages of this embodiment are that, in the event of leakage or combustion in the liquid source delivery system, a smoke monitoring element is used for early warning; a liquid spraying element is used for spraying to reduce the concentration of relevant gases and liquids in the environment and prevent explosions; and a blower element can quickly discharge the gases in the environment to the exhaust gas treatment system.

[0236] Example 7

[0237] This embodiment relates to semiconductor process equipment in this invention.

[0238] A semiconductor process apparatus includes a liquid source delivery system as described in Examples 1 to 6.

[0239] The semiconductor process equipment also includes a first power gas source, a second power gas source, a first purge gas source, a second purge gas source, a first vacuum unit, a second vacuum unit, a third vacuum unit, and waste gas treatment equipment. Specifically, the first power gas source is connected to the first power gas supply unit 500; the second power gas source is connected to the second power gas supply unit 600; the first purge gas source is connected to the first purge gas supply unit 700; the second purge gas source is connected to the second purge gas supply unit 800; the first vacuum unit is connected to the first vacuum unit 900; the second vacuum unit is connected to the second vacuum unit 1100; the third vacuum unit is connected to the third vacuum unit 1300; and the waste gas treatment equipment is connected to the evaporation unit 1200.

[0240] The usage method of this embodiment is the same as that of Embodiments 1 to 6, and will not be repeated here.

[0241] The technical effects of this embodiment are the same as those of Embodiments 1 to 6, and will not be repeated here.

[0242] Example 8

[0243] This embodiment relates to the liquid source delivery method of the present invention.

[0244] A liquid source delivery method, applied to the liquid source delivery system as described in Examples 1-6 or the semiconductor process equipment as described in Example 7, includes:

[0245] (a) Transporting liquid source

[0246] The first power gas supply unit 500 supplies a first power gas to the first liquid storage unit 100 so that the liquid source of the first liquid storage unit 100 flows to the second liquid storage unit 200; the second power gas supply unit 600 supplies a second power gas to the second liquid storage unit 200 so that the liquid source of the second liquid storage unit 200 flows to the process equipment.

[0247] It should be noted that the specific implementation method can be referred to Example 1.

[0248] (II) Cleaning the first liquid storage unit 100

[0249] The first purge gas supply unit 700 supplies first purge gas to the first liquid storage unit 100 to force the liquid source in the pipeline into the first liquid storage unit 100; while the liquid source in the pipeline is being forced into the first liquid storage unit 100, the second purge gas supply unit 800 supplies second purge gas to the third liquid storage unit 300 to allow the solution in the third liquid storage unit 300 to clean the pipeline and the first liquid storage unit 100; after the solution is added to the first liquid storage unit 100, the first purge gas supply unit 700 supplies first purge gas to the first liquid storage unit 100. A purge gas is purged so that the waste liquid in the first liquid storage unit 100 flows to the fourth liquid storage unit 400; when the waste liquid inside the first liquid storage unit 100 is emptied, the first vacuum unit 900 empties the gas inside the first liquid storage unit 100; when the first liquid storage unit 100 is under vacuum, the first purge gas supply unit 700 supplies the first purge gas to the first liquid storage unit 100 to purge the first liquid storage unit 100; when the purging of the first liquid storage unit 100 is completed, the first vacuum unit 900 empties the first purge gas inside the first liquid storage unit 100.

[0250] It should be noted that the specific implementation method can be referred to Example 1.

[0251] (III) Cleaning the second liquid storage unit 200

[0252] The first purge gas supply unit 700 supplies a first purge gas to the second liquid storage unit 200 to force the liquid source in the pipeline into the second liquid storage unit 200; while the liquid source in the pipeline is being forced into the second liquid storage unit 200, the second purge gas supply unit 800 supplies a second purge gas to the third liquid storage unit 300 to allow the solution in the third liquid storage unit 300 to clean the pipeline and the second liquid storage unit 200; after the solution is added to the second liquid storage unit 200, the first purge gas supply unit 700 supplies a second purge gas to the second liquid storage unit 200. A purge gas is used to allow the waste liquid in the second liquid storage unit 200 to flow to the fourth liquid storage unit 400; when the waste liquid inside the second liquid storage unit 200 is emptied, the first vacuum unit 900 empties the gas in the second liquid storage unit 200; when the second liquid storage unit 200 is under vacuum, the first purge gas supply unit 700 supplies the first purge gas to the second liquid storage unit 200 to purge the second liquid storage unit 200; when the purging of the second liquid storage unit 200 is completed, the first vacuum unit 900 empties the first purge gas from the second liquid storage unit 200.

[0253] It should be noted that the specific implementation method can be referred to Example 1.

[0254] (iv) Clean the third liquid storage unit 300

[0255] The first purge gas supply unit 700 supplies first purge gas to the third liquid storage unit 300 to force the dissolved liquid in the pipeline into the third liquid storage unit 300; when the dissolved liquid in the pipeline is forcefully injected into the third liquid storage unit 300, the first vacuum unit 900 vents the gas in the third liquid storage unit 300; when the third liquid storage unit 300 is under vacuum, the first purge gas supply unit 700 supplies first purge gas to the third liquid storage unit 300 to purge the third liquid storage unit 300; when the purging of the third liquid storage unit 300 is completed, the first vacuum unit 900 vents the first purge gas inside the third liquid storage unit 300.

[0256] It should be noted that the specific implementation method can be referred to Example 1.

[0257] (V) Clean the fourth liquid storage unit 400

[0258] The first vacuum unit 900 empties the gas from the fourth liquid storage unit 400; while the fourth liquid storage unit 400 is under vacuum, the first purge gas supply unit 700 supplies the first purge gas to the fourth liquid storage unit 400 to purge the fourth liquid storage unit 400; after the purging of the fourth liquid storage unit 400 is completed, the first vacuum unit 900 empties the first purge gas from the fourth liquid storage unit 400.

[0259] It should be noted that the specific implementation method can be referred to Example 1.

[0260] Furthermore, the liquid source delivery method also includes:

[0261] (vi) Gas-liquid separation

[0262] The gas-liquid separation unit 1000 performs gas-liquid separation on the liquid source flowing out of the second liquid storage unit 200 to remove the gas in the liquid source, and then flows the liquid source after gas-liquid separation to the process equipment; the second vacuum unit 1100 discharges the gas generated by the gas-liquid separation unit 1000.

[0263] It should be noted that the specific implementation method can be referred to Example 2.

[0264] (vii) Liquid evaporation

[0265] The evaporation unit 1200 evaporates and discharges the liquid from the pipeline and the fourth liquid storage unit 400; and / or

[0266] The first vacuum unit 900 is connected to the fourth liquid storage unit 400 to accelerate the evaporation of the liquid in the fourth liquid storage unit 400.

[0267] It should be noted that the specific implementation method can be found in Example 3.

[0268] (viii) Leakage monitoring

[0269] The leakage detection unit 1400 is used to detect leakage in the first liquid storage unit 100, the second liquid storage unit 200, the third liquid storage unit 300 and the fourth liquid storage unit 400; the leakage detection unit 1400 is used to detect whether there is liquid accumulation.

[0270] It should be noted that the specific implementation method can be found in Example 4.

[0271] (ix) Ultrasonic monitoring

[0272] The media monitoring unit 1500 monitors whether the medium output by the third liquid storage unit 300 is liquid, in order to detect whether the dissolution in the third liquid storage unit 300 is sufficient.

[0273] It should be noted that the specific implementation method can be found in Example 5.

[0274] Example 9

[0275] This embodiment relates to a specific implementation of the liquid source delivery system and method of the present invention.

[0276] As shown in Figure 18, the first liquid storage unit 100 includes a liquid storage tank (Bulk Bank), pneumatic diaphragm valves (PV1A, PV1B, PV1C, LPIL, RCV, PV2B), manual diaphragm valve (MV2L), and pressure sensors (PT1L, PT2L).

[0277] The second liquid storage unit 200 includes a liquid storage tank (Process Tank), pneumatic diaphragm valves (PV2A, PV2C, PV2D, LPIR, LP1, LP2, LP3, LP4), manual diaphragm valves (MV2R, LM1, LM2, LM3, LM4), and pressure sensors (PT1R, PT2R); the third liquid storage unit 300 includes a liquid storage tank (Solvent Tank), pneumatic diaphragm valves (PV3A, PV3B, PV16, PV11, PV12, LPV1, LPV2, LPV3, LPV4), and pressure sensor (PT6); the fourth liquid storage unit 400 includes a liquid storage tank (Recovery Tank), pneumatic diaphragm valve (PV4A), and pressure sensor (PT7).

[0278] The first power gas supply unit 500 includes a manual diaphragm valve (MV5L, MV4L), a check valve (CV2), a pressure regulating valve (REG1), a pressure sensor (PT5L), and a pneumatic diaphragm valve (PV5L); the second power gas supply unit 600 includes a manual diaphragm valve (MV5R, MV4R), a check valve (CV3), a pressure regulating valve (REG4), a pressure sensor (PT5R), and a pneumatic diaphragm valve (PV5R); the first purge gas supply unit 700 includes pneumatic diaphragm valves (PG1, PV4L, PV2L, PV1L, PV4R, PV2R, PV1R, PV18, PV19, PV20, PV24, PV25, PV26), a micro-leak valve (PGBV), a check valve (CV1), a pressure regulating valve (REG2), and a pressure sensor (PT4); the second purge gas supply unit 800 includes a manual diaphragm valve (MV6), a check valve (CV5), a pressure regulating valve (REG1), a pressure sensor (PT5L), a pressure sensor (PT5L), and a pneumatic diaphragm valve (PV5L); The system includes a pressure valve (REG3), a pneumatic diaphragm valve (PV15), and a pressure sensor (PT8); a first vacuum unit 900 includes pneumatic diaphragm valves (PV9L, PV3L, PV3R, PV17, PV23), a manual diaphragm valve (MPV1), and a pressure sensor (PV1); a gas-liquid separation unit 1000 includes pneumatic diaphragm valves (LPIR, PV6R, PV7R, PV8R) and a gas-liquid separator (DEGASSER); a second vacuum unit 1100 includes a pneumatic diaphragm valve (PV9R), a manual diaphragm valve (MPV2), and a pressure sensor (PV2); a evaporation unit 1200 includes pneumatic diaphragm valves (PV4B, PV22, PV27), a manual diaphragm valve (MV7), and check valves (CV6, CV7); a third vacuum unit 1300 includes a pneumatic diaphragm valve (PV28) and a check valve (CV8); and a leakage monitoring unit 1400 includes a paper tape leakage detector (Leak... The detection tape and the float leak detector (LEAK SENSOR) are included; the media monitoring unit 1500 includes an ultrasonic sensor (US).

[0279] Specifically, the liquid source delivery method in this embodiment is as follows:

[0280] (I) Liquid source transportation

[0281] Manually open MV5L to allow the first power gas from the first power gas source to flow to the first power gas supply element; activate REG1 to regulate the pressure of the first power gas in the first power gas supply element, ensuring that the pressure within the first power gas supply element meets the standard; if the pressure monitored by PT5L meets the standard, manually open MV4L and automatically open PV5L to allow flow between the first power gas supply element and the first delivery pipeline element; activate PV1A to connect the first delivery pipeline element to the Bulk Bank, allowing the first power gas to enter the Bulk Bank; activate PV1B, LPIL, PCV, and PV2B and manually open MV2L to connect the second delivery pipeline element to the Bulk Bank and Process Tank, allowing the liquid source inside the Bulk Bank to enter the Process Tank through the second delivery pipeline element under the action of the first power gas. The TANK buffers the liquid source; MV5R is manually activated to allow the second power gas from the second power gas source to flow to the second power gas supply element; REG4 is activated to regulate the pressure of the second power gas in the second power gas supply element, ensuring that the pressure within the element meets the standard; with the pressure monitored by PT5R meeting the standard, MV4R is manually activated and PV5R is automatically activated, allowing flow between the second power gas supply element and the fourth delivery pipeline element; PV2A is activated, connecting the third delivery pipeline element to the Process TANK, allowing the second power gas to enter the Process. TANK; Manually open MV2R and LM4, and the system automatically opens PV2C and LPIR, allowing the liquid source to flow to DEGASSER through the fourth delivery pipeline element, thus enabling DEGASSER to perform gas-liquid separation of the liquid source; Manually open MV2R, LM1, LM2, LM3, and LM4, and the system opens LP1, LP2, LP3, and LP4, allowing the liquid source inside the fourth delivery pipeline element to flow to the fifth delivery pipeline element and enter the process equipment; In addition, if DEGASSER malfunctions, the system opens PV7R and PV8R, allowing the liquid source to flow to the process equipment through the third bypass pipeline element.

[0282] (II) Cleaning of the first liquid storage unit 100

[0283] The system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the pressure within the first purge pipeline element meets the standard; if the pressure monitored by PT4 meets the standard, the system activates PV4L and PV1L, allowing the first purge gas to enter the Bulk Bank through the second purge pipeline element and the second delivery pipeline element, thereby pressurizing the liquid source in the second delivery pipeline element into the Bulk Bank; MV6 is manually activated, allowing the second purge gas from the second purge gas source to enter the seventh purge pipeline element; the system activates REG3 to regulate the pressure of the second purge gas in the seventh purge pipeline element, ensuring that the pressure within the seventh purge pipeline element meets the standard; the system activates PV15 and PV3A, allowing the second purge gas to enter the Solvent through the seventh purge pipeline element and the sixth delivery pipeline element. Tank; The system activates PV3B, PV16, and PV11, allowing the dissolving liquid in the Solvent Tank to flow to the Bulk Bank through the seventh delivery line element, the second purge line element, and the second delivery line element, thereby dissolving the residual liquid source in the Bulk Bank; After sufficient dissolution, the system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge line element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge line element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge line element, thereby ensuring that the gas pressure in the first purge line element meets the standard; when the gas pressure detected by PT4 meets the standard, the system activates PV4L, PV2L, PV1C, PV13, PV21, and PV4A, thereby allowing the first purge gas to pump the waste gas in the Bulk Bank into the Recovery Tank; in the Bulk... When the waste liquid inside the bank is emptied, the system opens PV1C, PV2L, PV1L, PV3L, and PV9L to purge the gas in each pipeline. After the purging operation is completed, the system automatically opens PG1 to allow the first purge gas from the first purge gas source to enter the first purge pipeline element. The system opens PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system opens REG2 to regulate the pressure of the first purge gas in the first purge pipeline element so that the gas pressure in the first purge pipeline element meets the standard. When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV2L, PV1L, and PV1C to fill the pipeline with the first purge gas and maintain the pressure for a period of time.After purging, the system activates PV1C, PV2L, PV1L, PV3L, and PV9L to purge the gas from the pipelines.

[0284] (III) Cleaning of the second liquid storage element 201 of the second liquid storage unit 200

[0285] The system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the pressure within the first purge pipeline element meets the standard; if the pressure detected by PT4 meets the standard, the system activates PV4R, PV1R, and PV2C, allowing the first purge gas to enter the Process TANK through the third purge pipeline element and the fourth delivery pipeline element, thereby allowing the dissolved pressure in the fourth delivery pipeline element to be pumped into the Process TANK; MV6 is manually activated, allowing the second purge gas from the second purge gas source to enter the seventh purge pipeline element; the system activates REG3 to regulate the pressure of the second purge gas in the seventh purge pipeline element, ensuring that the pressure within the seventh purge pipeline element meets the standard.

[0286] The system activates PV15 and PV3B, allowing the second purge gas to enter the third storage element 301 through the seventh purge line element and the sixth delivery line element. The system activates PV3B, PV16, PV11, PV1L, LPIL, MV2L, RCV, PV2D, and PV2C, allowing the solution in the Solvent Tank to flow to the Process Tank through the seventh delivery line element, the second purge line element, the second delivery line element, the second bypass line element, and the fourth delivery line element, thereby enabling the solution to dissolve the Process Tank. The residual liquid source in the TANK; after sufficient dissolution, the system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by PT4 meets the standard, the system activates PV4L, PV1L, LPIL, MV2L, RCV, PV2D, PV14, PV21, and PV4A, thereby allowing the first purge gas to pump the waste gas from the Process TANK into the Recovery Tank; in the Process With the waste liquid inside the TANK emptied, the system activates PV9L, PV3L, PV1L, LPIL, MV2L, RCV, PV2C, PV2D, PV2A, PV2R, PV1R, and PV3R to expel the gas in the pipeline. After the venting operation is complete, the system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system activates REG2 to purge the first purge gas within the first purge pipeline element. The system adjusts the pressure to ensure that the gas pressure in the first purging pipeline component meets the standard. When the gas pressure detected by PT4 meets the standard, the system opens PV4L, PV1L, LPIL, MV2L, RCV, PV2B, PV4R, PV2R, PV1R, and PV2C to fill the pipeline with the first purging gas and maintain the pressure for a period of time. After purging is completed, the system opens PV9L, PV3L, PV1L, LPIL, MV2L, RCV, PV2C, PV2D, PV2A, PV2R, PV1R, and PV3R to discharge the gas in the pipeline.

[0287] (iv) Cleaning of the fifth delivery pipeline component of the second liquid storage unit 200

[0288] The system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, thereby ensuring that the gas pressure in the first purge pipeline element meets the standard; when the gas pressure detected by PT4 meets the standard, the system activates LPV1, LPV2, LPV3, and LPV4 and manually activates LM1, LM2, LM3, and LM4, thereby removing the liquid from the fifth delivery pipeline element. Source discharge; after the liquid source is completely discharged, manually open MV6 to allow the second purge gas from the second purge gas source to enter the seventh purge pipeline element; the system opens REG3 to regulate the pressure of the second purge gas in the seventh purge pipeline element, so that the gas pressure in the seventh purge pipeline element meets the standard; the system opens PV15 and PV3A, so that the second purge gas can enter the fifth delivery pipeline element through the seventh purge pipeline element and the sixth delivery pipeline element; the system opens PV3B, PV16, PV12, LPV1, LPV2, LPV3, and LPV4, so that Solvent... The dissolving liquid in the tank can flow to the fifth delivery pipeline element through the seventh, eighth, and ninth delivery pipeline elements, thereby dissolving the residual liquid source in the fifth delivery pipeline element. After sufficient dissolution, the system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source entering the first purge pipeline element. The system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the gas pressure in the first purge pipeline element meets the standard. When the gas pressure detected by PT4 meets the standard, the system activates LPV1, LPV2, LPV3, and LPV4 and manually activates LM1, LM2, LM3, and LM4, thereby discharging the waste liquid in the fifth delivery pipeline element. After the waste liquid is completely discharged, the gas in the pipeline is discharged.

[0289] (V) Cleaning of the third liquid storage unit 300

[0290] The system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element; the system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element; the system activates REG2 to regulate the pressure of the first purge gas in the first purge pipeline element, ensuring that the pressure within the first purge pipeline element meets the standard; when the pressure detected by PT4 meets the standard, the system activates PV18, PV20, and PV3B, allowing the first purge gas to enter the Solvent Tank through the fourth purge pipeline element and the seventh delivery pipeline element, thereby allowing the dissolved pressure in the seventh delivery pipeline element to be pumped into the Solvent. Tank; With the dissolved liquid in the pipeline drained, the system activates PV3A, PV13, PV3B, PV20, PV17, and PV9L to expel the gas from the pipeline; After the purging operation is completed, the system automatically activates PG1 to allow the first purging gas from the first purging gas source to enter the first purging pipeline element; the system activates PGBV to adjust the flow rate of the first purging gas from the first purging gas source into the first purging pipeline element; the system activates REG2 to regulate the pressure of the first purging gas in the first purging pipeline element, so that the gas pressure in the first purging pipeline element meets the standard; when the gas pressure detected by PT4 meets the standard, the system activates PV18, PV19, and PV20 to fill the pipeline with the first purging gas and maintain the pressure for a period of time; after purging is completed, the system activates PV3A, PV13, PV3B, PV20, PV17, and PV9L to expel the gas from the pipeline.

[0291] (vi) Cleaning of the fourth liquid storage unit 400

[0292] The system activates PV25, PV26, PV23, and PV9L to purge the gas from the pipeline. With the gas purged, the system automatically activates PG1, allowing the first purge gas from the first purge gas source to enter the first purge pipeline element. The system activates PGBV to adjust the flow rate of the first purge gas from the first purge gas source into the first purge pipeline element. The system activates REG2 to regulate the pressure of the first purge gas within the first purge pipeline element, ensuring the pressure meets the standard. If the pressure detected by PT4 meets the standard, the system activates PV24, PV25, and PV26, filling the pipeline with the first purge gas and maintaining the pressure for a period of time. After purging is complete, the system activates PV25, PV26, PV23, and PV9L to purge the gas from the pipeline.

[0293] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0294] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A liquid source delivery system, characterized in that, include: The first liquid storage unit is used to store the liquid source; The second liquid storage unit is connected to the first liquid storage unit and the process equipment through pipelines and is located downstream of the first liquid storage unit. It is used to buffer the liquid source and transport the liquid source to the process equipment. The third liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store the solution and transport the solution to the first liquid storage unit and the second liquid storage unit. The fourth liquid storage unit is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store waste liquid; The first power gas supply unit is connected to the first power gas source and the first liquid storage unit through pipelines, and is used to supply the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit. The second power gas supply unit is connected to the second power gas source and the second liquid storage unit through pipelines, and is used to supply the second power gas to the second liquid storage unit so that the liquid source of the second liquid storage unit flows to the process equipment. The first purge gas supply unit is connected to the first purge gas source, the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit via pipelines. It is used to deliver the first purge gas to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit to pressurize the liquid source, the solution, and the waste liquid in the pipeline into the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively. The second purging gas supply unit is connected to the second purging gas source and the third liquid storage unit through pipelines. It is used to deliver the second purging gas to the third liquid storage unit to press the solution into the pipeline, the first liquid storage unit, and the second liquid storage unit so that the solution cleans the pipeline, the first liquid storage unit, and the second liquid storage unit. A first vacuum unit is connected to the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, respectively, and is used to perform vacuum treatment on the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit.

2. The liquid source delivery system according to claim 1, characterized in that, The first liquid storage unit includes: A first liquid storage element, wherein the first liquid storage element is used to store a liquid source; The first delivery pipeline element is connected to the first liquid storage element, the first power gas supply unit, and the first purging gas supply unit respectively, and is used to deliver gas; A second delivery pipeline element, which is connected to the first liquid storage element, the second liquid storage unit, and the first purge gas supply unit respectively, is used to deliver gas and liquid; and / or The second liquid storage unit includes: The second liquid storage element is connected to the first liquid storage unit and is used as a buffer state source; The third delivery pipeline element is connected to the second liquid storage element, the second power gas supply unit, and the first purging gas supply unit respectively, and is used to deliver gas; The fourth delivery pipeline element is connected to the second liquid storage element and the first purge gas supply unit respectively, and is used to deliver the liquid source; At least one fifth delivery pipeline element, the fifth delivery pipeline element being connected to the fourth delivery pipeline element and the process equipment respectively, for delivering the liquid source to the process equipment; and / or The third liquid storage unit includes: A third liquid storage element, which is connected to the first liquid storage unit, is used to store the solution; The sixth delivery pipeline element is connected to the third liquid storage element, the first purge gas supply unit, and the second purge gas supply unit respectively, and is used to deliver gas; The seventh delivery pipeline element is connected to the third liquid storage element, the first liquid storage unit, the second liquid storage unit, and the first purge gas supply unit, respectively, and is used to deliver gas and liquid; The eighth conveying pipeline element is connected to the seventh conveying pipeline element and is used to convey liquid; At least one ninth delivery pipeline element, the ninth delivery pipeline element being connected to the eighth delivery pipeline element and the second liquid storage unit respectively, for delivering liquid; and / or The fourth liquid storage unit includes: The fourth liquid storage element is connected to the first liquid storage unit and the second liquid storage unit through pipelines, and is used to store waste liquid; The tenth delivery pipeline element is connected to the fourth liquid storage element, the first liquid storage unit, the second liquid storage unit, and the first purge gas supply unit, respectively, for delivering liquid; and / or The first power gas supply unit includes: A first power gas supply element, which is connected to a first power gas source and a first liquid storage unit via pipelines, is used to supply the first power gas to the first liquid storage unit so that the liquid source in the first liquid storage unit flows to the second liquid storage unit; and / or The second power gas supply unit includes: A second power gas supply element, which is connected to a second power gas source and a second liquid storage unit via pipelines, is used to supply second power gas to the second liquid storage unit so that the liquid source in the second liquid storage unit flows to the process equipment; and / or The first purge gas supply unit includes: The first purge pipeline element, together with the first purge gas source, is used to deliver the first purge gas; The second purge pipeline element is connected to the first purge pipeline element and the first liquid storage unit respectively, and is used to deliver the first purge gas to the first liquid storage unit to press the liquid source in the pipeline into the first liquid storage unit. The third purge pipeline element is connected to the first purge pipeline element and the second liquid storage element of the second liquid storage unit, respectively, and is used to deliver the first purge gas to the second liquid storage unit to press the liquid source in the pipeline into the second liquid storage unit; The fourth purge pipeline element is connected to the first purge pipeline element and the third liquid storage unit, respectively, and is used to deliver the first purge gas to the third liquid storage unit so as to inject the dissolved pressure in the pipeline into the third liquid storage unit; The fifth purge pipeline element is connected to the first purge pipeline element and the fourth liquid storage unit, respectively, and is used to deliver the first purge gas to the fourth liquid storage unit to pump the waste gas in the pipeline into the fourth liquid storage unit. A sixth purge line element, which is connected to both the first purge line element and the third liquid storage unit, is used to deliver the first purge gas to the third liquid storage unit to discharge the liquid from the third liquid storage unit; and / or The second purge gas supply unit includes: A seventh purge pipeline element, which is connected to a second purge gas source and a third liquid storage unit, is used to deliver the second purge gas to the third liquid storage unit to inject dissolved liquid into the pipeline, the first liquid storage unit, and the second liquid storage unit so that the dissolved liquid cleans the pipeline, the first liquid storage unit, and the second liquid storage unit; and / or The first vacuum unit includes: The first exhaust pipe element is connected to the vacuum generating equipment and is used to transport exhaust gas; The first vacuum pipeline element is connected to the first liquid storage unit, the first exhaust pipeline element, and the vacuum generator, respectively, and is used to perform vacuum treatment on the first liquid storage unit. The second vacuum pipeline element is connected to the second liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, respectively, and is used to perform vacuum treatment on the second liquid storage unit; The third vacuum pipeline element is connected to the third liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, respectively, and is used to perform vacuum treatment on the third liquid storage unit; A fourth vacuum pipeline element is connected to the fourth liquid storage unit, the first exhaust pipeline element, and the first vacuum pipeline element, respectively, and is used to perform vacuum treatment on the fourth liquid storage unit.

3. The liquid source delivery system according to claim 2, characterized in that, The first liquid storage unit further includes: A first control valve element is disposed on the first delivery pipeline element and is used to control the flow of the first delivery pipeline element; A second control valve element, disposed on the second delivery pipeline element, is used to control the flow in the second delivery pipeline element; and / or The first liquid storage unit further includes: A first bypass pipeline element is connected to the first delivery pipeline element and the second delivery pipeline element respectively, for bypassing; A third control valve element, disposed on the first bypass pipeline element, is used to control the flow through the first bypass pipeline element; and / or The second liquid storage unit also includes: A fourth control valve element is disposed on the third delivery pipeline element and is used to control the flow of the third delivery pipeline element; A fifth control valve element is disposed on the fourth delivery pipeline element and is used to control the flow of the fourth delivery pipeline element; At least one sixth control valve element, the sixth control valve element being disposed on the fifth delivery pipeline element, for controlling the flow in the fifth delivery pipeline element; and / or The second liquid storage unit also includes: The second bypass pipeline element has a first end connected to the first liquid storage unit and a second end connected to the fourth delivery pipeline element for bypassing. A seventh control valve element, disposed in the second bypass pipeline element, is used to control the flow in the second bypass pipeline element; and / or The third liquid storage unit also includes: The eighth control valve element is disposed on the sixth delivery pipeline element and is used to control the flow of the sixth delivery pipeline element; A ninth control valve element is disposed on the seventh delivery pipeline element and is used to control the flow of the seventh delivery pipeline element; A tenth control valve element is disposed on the eighth delivery pipeline element and is used to control the flow of the eighth delivery pipeline element; An eleventh control valve element, disposed on the ninth delivery pipeline element, is used to control the flow in the ninth delivery pipeline element; and / or The fourth liquid storage unit also includes: A twelfth control valve element, disposed on the tenth delivery pipeline element, is used to control the flow in the tenth delivery pipeline element; and / or The first power gas supply unit also includes: A thirteenth control valve element, wherein the thirteenth control valve element is disposed on the first power gas supply element, and is used to control the flow of gas through the first power gas supply element; and / or The second power gas supply unit also includes: A fourteenth control valve element, wherein the fourteenth control valve element is disposed on the second power gas supply element, for controlling the flow of the second power gas supply element; and / or The first purge gas supply unit further includes: The fifteenth control valve element is disposed on the first purge pipeline element and is used to control the flow of the first purge pipeline element; The sixteenth control valve element is disposed on the third purge pipeline element and is used to control the flow of the third purge pipeline element; The seventeenth control valve element is disposed on the fourth purge pipeline element and is used to control the flow of the fourth purge pipeline element; The eighteenth control valve element is disposed on the fifth purge pipeline element and is used to control the flow of the fifth purge pipeline element; A nineteenth control valve element, wherein the nineteenth control valve element is disposed in the fifth purge line element, is used to control the flow in the fifth purge line element; and / or The second purge gas supply unit also includes: The twentieth control valve element, disposed in the seventh purge line element, is used to control the flow in the seventh purge line element; and / or The first vacuum unit further includes: The 21st control valve element is disposed on the first exhaust pipe element and is used to control the flow of the first exhaust pipe element; The 22nd control valve element is disposed on the first vacuum pipeline element and is used to control the flow of the first vacuum pipeline element; The 23rd control valve element is disposed on the 2nd vacuum pipeline element and is used to control the flow of the 2nd vacuum pipeline element; The 24th control valve element is disposed on the 3rd vacuum pipeline element and is used to control the flow of the 3rd vacuum pipeline element; The 25th control valve element is disposed on the 4th vacuum line element and is used to control the flow of the 4th vacuum line element.

4. The liquid source delivery system according to claim 2, characterized in that, The first liquid storage unit further includes: A first pressure monitoring element is connected to the first delivery pipeline element and is used to monitor the pressure of the first delivery pipeline element. A second pressure monitoring element is connected to the second delivery pipeline element and is used to monitor the pressure of the second delivery pipeline element; A first liquid level monitoring element is disposed inside the first liquid storage element and is used to monitor the liquid level of the first liquid storage element; A first weight monitoring element, disposed at the bottom of the first liquid storage element, is used to monitor the weight of the first liquid storage element; and / or The second liquid storage unit also includes: A third pressure monitoring element is connected to the third delivery pipeline element and is used to monitor the pressure of the third delivery pipeline element; A fourth pressure monitoring element, which is connected to the fourth delivery pipeline element, is used to monitor the pressure of the fourth delivery pipeline element; The second liquid level monitoring element is disposed inside the second liquid storage element and is used to detect the liquid level of the second liquid storage element; A second weight monitoring element, disposed at the bottom of the second liquid storage element, is used to monitor the weight of the second liquid storage element; and / or The third liquid storage unit also includes: A fifth pressure monitoring element, which is connected to the sixth delivery pipeline element, is used to monitor the pressure of the sixth delivery pipeline element; A third weight monitoring element, disposed at the bottom of the third liquid storage element, is used to monitor the weight of the third liquid storage element; and / or The fourth liquid storage unit also includes: A sixth pressure monitoring element, which is connected to the tenth delivery pipeline element, is used to monitor the pressure of the tenth delivery pipeline element; A fourth weight monitoring element, disposed at the bottom of the fourth liquid storage element, is used to monitor the weight of the fourth liquid storage element; and / or The first power gas supply unit also includes: A first pressure regulating element is disposed on the first power gas supply element and is used to regulate the pressure of the first power gas supply element; A seventh pressure monitoring element, together with the first power gas supply element, is used to monitor the pressure of the first power gas supply element; and / or The second power gas supply unit also includes: The second pressure regulating element is disposed on the second power gas supply element and is used to regulate the pressure of the second power gas supply element; The eighth pressure monitoring element, together with the second power gas supply element, is used to monitor the pressure of the second power gas supply element; and / or The first purge gas supply unit further includes: A microleak adjustment element is disposed in the first purge pipeline element for microleakage of the first purge gas; A third pressure regulating element is disposed on the first purge pipeline element and is used to regulate the pressure of the first purge pipeline element; A ninth pressure monitoring element, together with the first purge line element, is used to monitor the pressure of the first purge line element; and / or The second purge gas supply unit also includes: The fourth pressure regulating element is disposed in the seventh purge pipeline element and is used to regulate the pressure of the seventh purge pipeline element; A tenth pressure monitoring element, which is connected to the seventh purge line element, is used to monitor the pressure of the seventh purge line element; and / or The first vacuum unit further includes: The eleventh pressure monitoring element is connected to the first exhaust pipe element and is used to monitor the pressure of the first exhaust pipe element.

5. The liquid source delivery system according to claims 1 to 4, characterized in that, Also includes: A gas-liquid separation unit is connected to the second liquid storage unit and the process equipment through pipelines and is located downstream of the second liquid storage unit. It is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage unit to remove the gas in the liquid source and to transport the gas-liquid separated liquid source to the process equipment. A second vacuum unit, connected to the gas-liquid separation unit, is used to discharge the gas generated by the gas-liquid separation unit; and / or A evaporation unit is connected to the fourth liquid storage unit and the exhaust device, respectively, and is used to discharge the evaporating liquid from the pipeline and the fourth liquid storage unit. A third vacuum unit, connected to the first vacuum unit, is used to accelerate the evaporation of the liquid; and / or A leakage monitoring unit is disposed in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit, and is used to monitor leakage in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit in real time. and / or A media monitoring unit, connected to and located downstream of the third liquid storage unit, is used to monitor whether the medium output by the third liquid storage unit is a liquid; and / or A safety protection unit is installed at the top of the environment in which the liquid source delivery system is located, and is used to monitor environmental information.

6. The liquid source delivery system according to claim 5, characterized in that, The gas-liquid separation unit includes: A gas-liquid separation element is connected to the second liquid storage unit and located downstream of the second liquid storage unit. It is used to perform gas-liquid separation on the liquid source flowing downstream of the second liquid storage unit to remove gas from the liquid source and to allow the gas-liquid separated liquid source to flow to the process equipment. A third bypass piping element, wherein the first end of the third bypass piping element is connected to the piping connecting the gas-liquid separation element and the second liquid storage unit, and the second end of the third bypass piping element is connected to the piping connecting the gas-liquid separation element and the process equipment, for the purpose of protecting the overall piping; and / or The second vacuum unit includes: The fifth vacuum pipeline element, which is connected to the vacuum generating equipment and the gas-liquid separation unit respectively, is used to discharge the gas generated by the gas-liquid separation unit; and / or The evaporation unit includes: The first evaporation pipeline element is connected to the fourth liquid storage unit and the exhaust device respectively, and is used to evaporate and discharge the liquid from the fourth liquid storage unit; A second evaporation conduit element, which is connected to the first evaporation conduit element and the third liquid storage unit, is used to evaporate and discharge the liquid from the conduit; and / or The third vacuum unit includes: A sixth vacuum line element, connected to the first vacuum unit, is used to accelerate the evaporation of the liquid; and / or The leakage detection unit also includes: A receiving element for accommodating the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit; A plurality of first leakage detection elements are disposed on the receiving element and respectively correspond to the bottom of the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit, for detecting leakage in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit and the fourth liquid storage unit; A second leakage detection element is disposed on the receiving element and is used to detect whether there is liquid accumulation in the receiving element.

7. The liquid source delivery system according to claim 6, characterized in that, The gas-liquid separation unit further includes: The 26th control valve element is disposed in a pipeline connected to the gas-liquid separation element and is used to control the flow between the gas-liquid separation element and the second liquid storage unit and process equipment; The twenty-seventh control valve element, disposed in the third bypass pipeline element, is used to control the flow in the third bypass pipeline element; and / or The second vacuum unit includes: The 28th control valve element is disposed on the 5th vacuum pipeline element and is used to control the flow of the 5th vacuum pipeline element; A twelfth pressure monitoring element, which is connected to the fifth vacuum pipeline element, is used to monitor the pressure inside the fifth vacuum pipeline element; and / or The evaporation unit includes: The 29th control valve element is disposed on the first evaporation pipeline element and is used to control the flow of the first evaporation pipeline element; The thirtieth control valve element, disposed in the second evaporation pipeline element, is used to control the flow in the second evaporation pipeline element; and / or The third vacuum unit includes: The thirty-first control valve element is disposed on the sixth vacuum pipeline element and is used to control the flow of the sixth vacuum pipeline element.

8. A semiconductor process apparatus, characterized in that, include: The liquid source delivery system as described in any one of claims 1 to 7.

9. A method for transporting a liquid source, characterized in that, Applied to the liquid source delivery system as described in claims 1 to 7 or the semiconductor process equipment as described in claim 8, comprising: (a) Transporting liquid source The first power gas supply unit supplies the first power gas to the first liquid storage unit so that the liquid source of the first liquid storage unit flows to the second liquid storage unit; The second power gas supply unit supplies the second power gas to the second liquid storage unit so that the liquid source in the second liquid storage unit flows to the process equipment; (II) Cleaning the first liquid storage unit The first purge gas supply unit delivers the first purge gas to the first liquid storage unit to pressurize the liquid source in the pipeline into the first liquid storage unit; When the liquid source in the pipeline is pressed into the first liquid storage unit, the second purge gas supply unit delivers the second purge gas to the third liquid storage unit so that the solution in the third liquid storage unit cleans the pipeline and the first liquid storage unit. After the dissolving liquid is added to the first storage unit, the first purging gas supply unit supplies the first purging gas to the first storage unit so that the waste liquid of the first storage unit flows to the fourth storage unit. When the waste liquid inside the first liquid storage unit is emptied, the first vacuum unit empties the gas from the first liquid storage unit; When the first liquid storage unit is under vacuum, the first purge gas supply unit supplies the first purge gas to the first liquid storage unit to purge the first liquid storage unit. After the first liquid storage unit is purged, the first vacuum unit empties the first purging gas inside the first liquid storage unit. (III) Cleaning the second liquid storage unit The first purge gas supply unit delivers the first purge gas to the second liquid storage unit to pressurize the liquid source in the pipeline into the second liquid storage unit; When the liquid source in the pipeline is pressed into the second liquid storage unit, the second purge gas supply unit delivers the second purge gas to the third liquid storage unit so that the solution in the third liquid storage unit cleans the pipeline and the second liquid storage unit. After the dissolving liquid is added to the second liquid storage unit, the first purging gas supply unit supplies the first purging gas to the second liquid storage unit so that the waste liquid of the second liquid storage unit flows to the fourth liquid storage unit. With the waste liquid inside the second liquid storage unit emptied, the first vacuum unit empties the gas from the second liquid storage unit; When the second liquid storage unit is under vacuum, the first purge gas supply unit supplies the first purge gas to the second liquid storage unit to purge the second liquid storage unit. After the second liquid storage unit is purged, the first vacuum unit empties the first purging gas from the second liquid storage unit. (iv) Cleaning the third liquid storage unit The first purge gas supply unit supplies the first purge gas to the third liquid storage unit to force the dissolved liquid in the pipeline into the third liquid storage unit; When the dissolved liquid in the pipeline is injected into the third liquid storage unit, the first vacuum unit vents the gas from the third liquid storage unit. When the third liquid storage unit is under vacuum, the first purging gas supply unit supplies the first purging gas to the third liquid storage unit to purge the third liquid storage unit. After the third liquid storage unit is purged, the first vacuum unit empties the first purging gas inside the third liquid storage unit. (V) Cleaning the fourth liquid storage unit The first vacuum unit empties the gas from the fourth liquid storage unit; When the fourth liquid storage unit is under vacuum, the first purging gas supply unit supplies the first purging gas to the fourth liquid storage unit to purge the fourth liquid storage unit. After the fourth liquid storage unit has been purged, the first vacuum unit empties the first purging gas from the fourth liquid storage unit.

10. The liquid source delivery method of claim 9, wherein, Also includes: (vi) Gas-liquid separation The gas-liquid separation unit performs gas-liquid separation on the liquid source flowing out of the second liquid storage unit to remove the gas in the liquid source, and then the liquid source after gas-liquid separation flows to the process equipment; The second vacuum unit discharges the gas produced by the gas-liquid separation unit; and / or (vii) Liquid evaporation The evaporation unit evaporates and discharges the liquid from the pipeline and the fourth liquid storage unit; and / or The first vacuum unit is connected to the fourth liquid storage unit to accelerate the evaporation of liquid from the fourth liquid storage unit; and / or (viii) Leakage monitoring The leakage detection unit is used to detect leakage in the first liquid storage unit, the second liquid storage unit, the third liquid storage unit, and the fourth liquid storage unit; The leak detection unit is used to detect whether there is liquid accumulation; (ix) Ultrasonic monitoring The media monitoring unit monitors whether the medium output by the third liquid storage unit is liquid in order to detect whether the dissolution in the third liquid storage unit is sufficient.

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