Apparatus for supplying precursor medium
By designing a precursor medium supply device, an automatic replenishment of the medium is achieved using a liquid level sensor and a pneumatic three-way reversing valve, which solves the problem of frequent bottle changes, improves work efficiency, and reduces resource waste.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- PNC PROCESS SYSTEMS CO LTD
- Filing Date
- 2025-08-27
- Publication Date
- 2026-07-23
Smart Images
Figure CN2025117163_23072026_PF_FP_ABST
Abstract
Description
A precursor medium supply device Technical Field
[0001] This utility model relates to the semiconductor field, specifically to a precursor dielectric supply device. Background Technology
[0002] Liquid precursor products are one of the core raw materials in the entire electronics industry. They are widely used in many aspects of electronic device manufacturing, such as computer chips, solar cells, mobile communications, satellite navigation, and spacecraft, playing a significant role in aerospace, new solar cells, and electronic products. In furnace tube processes, precursors represented by dichloroethylene play an important role in production because they serve as excellent chlorine sources. The current industry supply solution involves using small-volume source bottles to hold the chemical media, and replacing the small-volume source bottle with a new one whenever the media in the small-volume stock solution is depleted.
[0003] The above method has the following drawbacks: First, frequent downtime for bottle replacement increases the number of times maintenance personnel come into contact with chemicals, posing a potential threat to their health. Second, to ensure production safety, residual chemical media will always remain in the original solution bottles, making it impossible to completely use them up before replacement. This incomplete use of the media and the subsequent disposal of residual liquid not only wastes resources but also further increases the company's operating costs.
[0004] Utility Model Content
[0005] The purpose of this invention is to provide a precursor medium supply device that can continuously replenish the liquid and reduce the number of bottle changes.
[0006] The objective of this utility model can be achieved through the following technical solutions:
[0007] A precursor medium supply device for replenishing a stock solution bottle includes a replenishment bottle. The replenishment bottle has a first liquid chamber for loading the medium inside. A first pressurizing pipe and a first outlet pipe are installed at the top of the replenishment bottle. The outlet end of the first pressurizing pipe extends into the top of the first liquid chamber. A first valve is connected to the first pressurizing pipe. The inlet of the first outlet pipe extends into the first liquid chamber. A second valve and a pneumatic three-way reversing valve are sequentially connected to the first outlet pipe. A first end of the pneumatic three-way reversing valve is connected to the first outlet pipe, a second pressurizing pipe is connected to a second end perpendicular to the first end, and a connecting pipe connected to the stock solution bottle is connected to a third end opposite to the second end. The stock solution bottle has a second liquid chamber for loading the medium inside. The outlet end of the connecting pipe extends into the bottom of the second liquid chamber. An vent pipe is installed at the top of the stock solution bottle, and a third valve is connected to the vent pipe. A liquid level sensor is installed inside the stock solution bottle. The device also includes a controller. All valves and the liquid level sensor are connected to the controller. The volume of the replenishment bottle is larger than the volume of the stock solution bottle.
[0008] The above technical solution uses a liquid level sensor to detect the liquid level in the original solution bottle. When replenishment is needed, the sensor sends a signal. Upon receiving the signal, the controller opens the first and second valves and switches the pneumatic three-way directional valve, using air pressure to supply the medium from the replenishment bottle to the original solution bottle via the first outlet pipe. This allows for continuous replenishment, reduces the number of bottle changes, significantly improves work efficiency, and effectively avoids waste caused by replacing original solution bottles with residual medium. The pneumatic three-way directional valve also features an interlocking structure to prevent mistaken insertion.
[0009] In a specific embodiment of this invention: a pressure regulating valve and a pressure detector are also connected to the first pressurizing tube. With this structure, the first pressurizing tube is connected to the gas source, and the carrier gas is pressurized by the pressure regulating valve before entering the replenishment bottle, thus avoiding excessive pressure that could damage subsequent components. The pressure detector can detect the carrier gas pressure.
[0010] In a specific embodiment of this utility model: the volume of the replenishment bottle is 16L, and the volume of the original solution bottle is 1L.
[0011] In a specific embodiment of this utility model: the third valve is a pneumatic three-way directional valve. By using the pneumatic three-way directional valve, an interlocking relationship exists in its physical structure, preventing mistaken identification.
[0012] In a specific embodiment of this utility model, it further includes a constant temperature container, which has a cavity with a top opening, and the original liquid bottle is located inside the cavity.
[0013] In summary, this utility model utilizes a liquid level sensor to detect the liquid level of the medium in the original liquid bottle. When replenishment is detected, the liquid level sensor sends a signal. Upon receiving the signal, the controller opens the first and second valves and controls the pneumatic three-way reversing valve to switch control, using air pressure to replenish the medium from the replenishment bottle to the original liquid bottle along the first outlet pipe. This automated redistribution of the replenishment bottle reduces the number of times maintenance personnel need to replace the original liquid bottle to a single replacement, significantly improving work efficiency. Furthermore, the medium is kept in a temperature-controlled container, allowing for timely replenishment of the amount used each time, and the temperature fluctuation within the original liquid bottle is much smaller than when the entire bottle is replaced after it is depleted. Attached Figure Description
[0014] The present invention will be further described below with reference to the accompanying drawings.
[0015] Figure 1 is a structural schematic diagram of a precursor medium supply device according to the present invention;
[0016] Figure 2 is a schematic diagram of the structure of the export expansion container of this utility model. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.
[0018] Please refer to Figure 1. This utility model is a precursor medium supply device for replenishing the medium to the original liquid bottle 9. It includes a replenishment bottle 10, which has a first liquid chamber 11 for loading the medium inside. A first pressurizing pipe 12 and a first outlet pipe 13 are inserted through the top of the replenishment bottle 10. The outlet end of the first pressurizing pipe 12 extends into the top of the first liquid chamber 11, and a first valve 121 is connected to the first pressurizing pipe 12. The inlet of the first outlet pipe 13 extends into the first liquid chamber 11. A second valve 131 and a pneumatic three-way reversing valve 132 are connected sequentially to the first outlet pipe 13. The first end 1321 of the pneumatic three-way reversing valve 132 is connected to the outlet end of the first outlet pipe 13, the second end 1322 perpendicular to the first end 1321 is connected to a second pressurizing pipe 15, and the third end 1323 opposite to the second end 1322 is connected to a connecting pipe 16. Connecting pipe 16 is connected to the raw liquid bottle 9, which has a second liquid chamber 901 for loading the medium. The outlet end of connecting pipe 16 extends into the bottom of the second liquid chamber 901. A vent pipe 17 is also installed at the top of the raw liquid bottle 9. A third valve 19 is connected to the vent pipe 17. A liquid level sensor 902 is installed inside the raw liquid bottle 9, and a controller (not shown in the figure) is also included. The first valve 121, the second valve 131, the pneumatic three-way directional valve 132, the third valve 19, and the liquid level sensor are all connected to the controller. Here, the third valve 19 is also a pneumatic three-way directional valve. The use of the pneumatic three-way directional valve creates an interlocking relationship in the physical structure, preventing foolproof operation.
[0019] In this embodiment, a pressure regulating valve 122 and a pressure detector 123 are also connected to the first pressurization pipe 12. With this structure, the first pressurization pipe 122 is connected to a gas source, and the carrier gas is pressurized by the pressure regulating valve 122 before entering the replenishment bottle 10, to avoid excessive pressure damaging subsequent components. The pressure detector can detect the carrier gas pressure. Here, the carrier gas can be nitrogen.
[0020] In this embodiment, the volume of the replenishment bottle 10 is greater than the volume of the original solution bottle 9. The volume of the replenishment bottle 10 is 16L. The volume of the original solution bottle 9 is 1L. The original solution bottle 9 is a quartz bottle.
[0021] It also includes a thermostatic container 18. This thermostatic container 18 has a cavity 181 with an open top. The stock solution bottle 9 is located inside the cavity 181. The thermostatic container 18 contains a heating element, a control circuit board, and a temperature range switch. Thus, the temperature is controlled by the temperature range switch, thereby controlling the temperature of the medium inside the stock solution bottle placed in the cavity 181, and meeting the technical requirements of subsequent machine processes. The thermostatic container is existing technology and will not be described in detail here.
[0022] As shown in Figures 1 and 2, an outlet expansion container 20 for connecting to multiple stock solution bottles is also connected to the first outlet pipe 13. By connecting the outlet expansion container 20 to multiple stock solution bottles, a single replenishment bottle can replenish multiple stock solution bottles. The outlet expansion container 20 has a main inlet pipe 21 and multiple branch outlet pipes 22 connected to the main inlet pipe 21. The first outlet pipe is connected to the main inlet pipe 21, and each branch outlet pipe 22 is connected to its corresponding stock solution bottle 9. A first manual valve 211 is connected to the main inlet pipe 21. A second manual valve 221 is connected to each branch outlet pipe 22.
[0023] A purge line 23 is also provided inside the outlet expansion container 20. The purge line 23 is connected to the corresponding branch outlet line 22 through multiple purge branch lines 24. A third manual valve 231, a one-way valve 232, and a pressure gauge 233 are connected sequentially to the purge line 23. A fourth manual valve 241 is connected to each purge branch line 24. When performing a purge operation, the purge line 23 is connected to the carrier gas source, and the third manual valve and the corresponding fourth manual valve 241 are opened. If it is necessary to purge the residual liquid in the pipeline into the original liquid bottle, the corresponding second manual valve 221 must be closed, so that the carrier gas carries the residual liquid in the pipeline into the corresponding original liquid bottle. Conversely, if it is necessary to purge the residual liquid in the pipeline into the replenishment bottle, the first manual valve 211 and the corresponding second manual valve 221 must be opened, so that the carrier gas carries the residual liquid into the replenishment bottle.
[0024] The above describes a precursor medium supply device, and its working principle is as follows;
[0025] During use, the thermostatic container 18 is activated to control the temperature of the medium in the original liquid bottle, ensuring that the medium can reach the required temperature conditions in subsequent processes. The pneumatic three-way reversing valve 132 is switched to the air path. Carrier gas enters the second liquid chamber through the second pressurization pipe 15 and connecting pipe 16, injecting into the liquid medium. The carrier gas then emerges from the liquid medium in the form of bubbles, with liquid medium adhering to the surface of the bubbles. These bubbles then enter the machine's terminal through the outlet pipe 17. Simultaneously, the liquid level sensor 902 continuously monitors the liquid level in the original liquid bottle. As the liquid medium is continuously consumed, when the liquid level sensor detects that the medium in the original liquid bottle has dropped to a level requiring replenishment, the liquid level sensor 902 sends a signal. Upon receiving the signal, the controller controls the first valve 121 and the second valve 131 to open, and controls the pneumatic three-way reversing valve 132 to switch the liquid path, using air pressure to replenish the medium in the replenishment bottle along the first outlet pipe 13 to the original liquid bottle 9.
[0026] In summary, this utility model utilizes a liquid level sensor to detect the liquid level in the original solution bottle. When replenishment is needed, the sensor sends a signal. Upon receiving the signal, the controller opens the first and second valves and switches the liquid path using a pneumatic three-way reversing valve. The medium from the replenishment bottle is then supplied to the original solution bottle via the first outlet pipe using pneumatic pressure. This automated redistribution of the replenishment bottle reduces the number of times maintenance personnel need to replace the original solution bottle to a single replacement, significantly improving work efficiency. Furthermore, the medium is kept in a temperature-controlled container, allowing for timely replenishment of the amount used each time. The temperature fluctuation within the original solution bottle is also minimal compared to replacing the entire bottle after it is depleted.
[0027] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.
Claims
1. A precursor medium supply device for replenishing a stock solution bottle with a medium, characterized in that, The system includes a replenishment bottle, which has a first liquid chamber for loading a medium. A first pressurizing tube and a first outlet tube are installed at the top of the replenishment bottle. The outlet end of the first pressurizing tube extends into the top of the first liquid chamber. A first valve is connected to the first pressurizing tube. The inlet of the first outlet tube extends into the first liquid chamber. A second valve and a pneumatic three-way reversing valve are sequentially connected to the first outlet tube. A second pressurizing tube is connected to the first end of the pneumatic three-way reversing valve, and a connecting tube connected to the original liquid bottle is connected to the third end opposite to the second end. The original liquid bottle has a second liquid chamber for loading a medium. The outlet end of the connecting tube extends into the bottom of the second liquid chamber. An vent tube is installed at the top of the original liquid bottle, and a third valve is connected to the vent tube. A liquid level sensor is installed inside the original liquid bottle. The system also includes a controller. The first valve, second valve, pneumatic three-way reversing valve, third valve, and liquid level sensor are all connected to the controller. The volume of the replenishment bottle is larger than the volume of the original liquid bottle.
2. The precursor medium supply device according to claim 1, characterized in that, The first pressurization pipe is also connected to a pressure regulating valve and a pressure detector.
3. The precursor medium supply device according to claim 1, characterized in that, The replenishment bottle has a volume of 16L, and the original solution bottle has a volume of 1L.
4. The precursor medium supply device according to claim 1, characterized in that, The third valve is a pneumatic three-way directional valve.
5. The precursor medium supply device according to claim 1, characterized in that, It also includes a thermostatic container having a cavity with a top opening, and the stock solution bottle is located inside the cavity.
6. The precursor medium supply device according to claim 1, characterized in that, The first liquid outlet pipe is also connected to an outlet expansion container for connecting to multiple raw liquid bottles.
7. The precursor medium supply device according to claim 1, characterized in that, The outlet expansion container has a main inlet pipeline and multiple branch outlet pipelines connected to the main inlet pipeline. A first manual valve is connected to the main inlet pipeline, and a second manual valve is connected to each branch outlet pipeline.
8. The precursor medium supply device according to claim 1, characterized in that, The outlet expansion container is also equipped with a purging pipeline, which is connected to the corresponding branch liquid outlet pipeline through multiple purging branch pipelines. A third manual valve, a check valve and a pressure gauge are connected in sequence on the purging pipeline, and a fourth manual valve is connected to each purging branch pipeline.