Micro-electro-mechanical sensor, micro-electro-mechanical module, and electronic device

By designing a radially arranged structure of multiple electrode sheets in a MEMS acoustic sensor and optimizing the arrangement and connection of the electrode sheets, the problem of insufficient sensitivity of MEMS acoustic sensors in artificial intelligence voice interaction is solved, and the resolution of signal detection and the linearity of capacitance change are improved.

WO2026152757A1PCT designated stage Publication Date: 2026-07-23HUAWEI TECH CO LTD
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
HUAWEI TECH CO LTD
Filing Date
2025-09-18
Publication Date
2026-07-23

AI Technical Summary

Technical Problem

How to optimize the performance of MEMS acoustic sensors to meet the needs of artificial intelligence voice interaction, and improve their sensitivity and signal detection resolution.

Method used

Design a microelectromechanical sensor by radially arranging multiple first and second electrode plates on a diaphragm to increase the number and area variation of the electrode plates, using a bias voltage to increase the capacitance variation between the electrode plates, and optimizing the arrangement and connection structure of the electrode plates to improve sensitivity.

Benefits of technology

It enhances the sensitivity of the microelectromechanical sensor, improves the resolution of signal detection and the linearity of capacitance change, expands the acoustic overload point, and optimizes the performance of the MEMS acoustic sensor.

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Abstract

A micro-electro-mechanical sensor, a micro-electro-mechanical module, and an electronic device. The specific solution comprises: the micro-electro-mechanical sensor comprises a substrate, a diaphragm, a first electrode, and a second electrode. The diaphragm covers an opening of the substrate. The first electrode comprises a plurality of first electrode sheets arranged in the radial direction of the diaphragm. The second electrode comprises a plurality of second electrode sheets arranged in the radial direction of the diaphragm. The micro-electro-mechanical sensor uses squeeze-film damping, and can reduce noise and improve the signal-to-noise ratio.
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