Radio-frequency power supply, analog load, debugging method, and radio-frequency power supply system
WO2026153324A1PCT designated stage Publication Date: 2026-07-23SHENZHEN CSL VACUUM SCI & TECH CO LTD
View PDF 0 Cites 0 Cited by
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- SHENZHEN CSL VACUUM SCI & TECH CO LTD
- Filing Date
- 2026-01-13
- Publication Date
- 2026-07-23
AI Technical Summary
Technical Problem
Existing radio frequency generator systems experience a decrease in impedance matching efficiency when the plasma load impedance changes dynamically, leading to low power transmission efficiency and energy loss, and may even cause plasma extinction.
Method used
By adjusting the frequency of the RF power supply and recording the virtual reactance value, the target frequency and virtual reactance value for a specific VSWR are determined, a linear relationship is established and normalized, and a reference position is determined to achieve optimal impedance matching.
Benefits of technology
It improves the impedance matching efficiency of the analog load, reduces energy loss, and ensures the stability and efficient energy transfer of the RF power supply system.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN2026072373_23072026_PF_FP_ABST
Abstract
Disclosed in the present application are a debugging method for a radio-frequency power supply, and a system. The radio-frequency power supply is connected to an analog load. The method comprises: a radio-frequency power supply changing frequency values, outputting an electrical signal to an analog load, and recording the frequency values and corresponding imaginary reactance values; determining a selected standing-wave ratio, selecting, as a target frequency value, the frequency value corresponding to the selected standing-wave ratio, and selecting, as a target imaginary reactance value, the imaginary reactance value corresponding to the target frequency value; and selecting the frequency values and the corresponding imaginary reactance values to construct a linear relationship, performing normalization, and determining, as reference positions, the positions corresponding to the target frequency value and the target imaginary reactance value.
Need to check novelty before this filing date? Find Prior Art