Processing device, substrate processing device, display method, production method for semiconductor device, and program

Abstract

The present invention comprises a display unit that can display an editing screen that shows a recipe that defines conditions for processing a substrate at each of a plurality of steps in the form of a table defined by an axis for a plurality of items that constitute the conditions and an axis for the steps such that it is possible to edit a plurality of setting values that are set at the intersections between the items and the steps, a selection unit that selects respective display modes for the plurality of setting values on the basis of display setting information that sets display modes for display of the plurality of setting values by ranges for the setting values, and a control unit that can control the display unit to display the plurality of setting values on the editing screen in the respective display modes selected by the selection unit.

Description

Processing Device, Substrate Processing Device, Display Method, Method for Manufacturing Semiconductor Device, and Program

[0001] The present disclosure relates to a processing device, a substrate processing device, a display method, a method for manufacturing a semiconductor device, and a program.

[0002] In the manufacturing process of a semiconductor device, a recipe used may be edited, and processing may be performed on a substrate (see, for example, Patent Document 1).

[0003] International Publication No. 2019 / 186649

[0004] The present disclosure provides a technology capable of improving work efficiency during recipe editing.

[0005] According to one aspect of the present disclosure, a display unit capable of displaying an edit screen in a table format defined by an axis of the steps and an axis of a plurality of items constituting the conditions, in which a plurality of set values set at intersections of the plurality of items and the plurality of steps of a recipe in which conditions for processing a substrate are defined for each of the plurality of steps are configured to be editable; a selection unit that selects display modes corresponding to the plurality of set values respectively based on display setting information in which display modes when displaying set values are set for each range of the plurality of set values; and a control unit that controls the display unit to display the plurality of set values in the edit screen in accordance with the respective display modes selected by the selection unit are provided.

[0006] According to the present disclosure, it becomes possible to improve work efficiency during recipe editing.

[0007] FIG. 1 is a perspective view showing an example of a substrate processing device according to an embodiment. FIG. 2 is a cross-sectional view of the substrate processing device according to the embodiment as viewed from the side. FIG. 3 is a block diagram showing an example of a functional configuration of a control device included in the substrate processing device according to the embodiment. FIG. 4 is a diagram showing an example of a recipe edit screen according to the embodiment. FIG. 5 is a diagram showing an example of a display setting screen according to the embodiment. FIG. 6 is a diagram showing an example of a recipe edit screen displayed when the display size is reduced. FIG. 7 is a flowchart showing an example of a color selection process in the recipe edit screen according to the embodiment.

[0008] Hereinafter, one aspect of this disclosure will be described with reference primarily to Figures 1 to 7. Note that the drawings used in the following description are all schematic, and the dimensional relationships and proportions of the elements shown in the drawings do not necessarily correspond to reality. Furthermore, the dimensional relationships and proportions of the elements do not necessarily correspond between multiple drawings. Elements that are substantially the same as those described in multiple drawings will be given the same reference numeral, and their descriptions will be omitted. Moreover, this disclosure is not limited in any way to the following embodiments, and can be implemented with appropriate modifications within the scope of this disclosure.

[0009] First, an overview of the substrate processing apparatus according to this embodiment will be described with reference to Figures 1 and 2.

[0010] Figure 1 is a perspective view showing an example of a substrate processing apparatus 10 according to this embodiment. Figure 2 is a cross-sectional view of the substrate processing apparatus 10 according to this embodiment, viewed from the side. Figures 1 and 2 show a vertical substrate processing apparatus 10 as an example of a substrate processing apparatus. The substrate processed in the substrate processing apparatus 10 is shown as an example of a semiconductor wafer made of silicon or the like. In this specification, the term "wafer" may mean the wafer itself or a laminate of a wafer and a predetermined layer or film formed on its surface. In this specification, the term "surface of the wafer" may mean the surface of the wafer itself or the surface of a predetermined layer formed on the wafer. In this specification, when it is written that "a predetermined layer is formed on the wafer," it may mean that the predetermined layer is directly formed on the surface of the wafer itself or that the predetermined layer is formed on a layer or the like that is formed on the wafer. In this specification, the term "substrate" is used in the same sense as when the term "wafer" is used.

[0011] As shown in Figures 1 and 2, the substrate processing apparatus 10 includes a housing 111. A pod loading / unloading port 112 is provided in the front wall 111a of the housing 111, connecting the inside and outside of the housing 111. The pod loading / unloading port 112 is opened and closed by a front shutter (loading / unloading port opening / closing mechanism) 113. A load port (substrate transport container transfer table) 114 is installed on the front front side of the pod loading / unloading port 112.

[0012] The pod 110 is a sealed substrate transport container, and is configured to be loaded onto the load port 114 by an in-process transport device (not shown) and unloaded from the load port 114.

[0013] A rotating pod shelf (substrate transport container storage shelf) 105 is installed in the upper part of the enclosure 111, approximately in the center in the front-to-back direction. The rotating pod shelf 105 is equipped with multiple shelves (substrate transport container mounting shelves) 117, which are configured to store pods 110 with at least one pod placed on them.

[0014] A pod opener (a mechanism for opening and closing the lid of a substrate transport container) 121 is provided below the rotating pod shelf 105. The pod opener 121 has a configuration that allows it to place a pod 110 on top of it and to open and close the lid of the pod 110.

[0015] A pod transport mechanism (container transport mechanism) 118 is installed between the load port 114, the rotating pod rack 105, and the pod opener 121, and is configured to transport pods 110 between the load port 114, the rotating pod rack 105, and the pod opener 121.

[0016] A sub-casing 119 is provided at the lower part of the enclosure 111, approximately in the center in the front-to-back direction, extending to the rear end. A pair of wafer loading / unloading ports (substrate loading / unloading ports) 120 are provided on the front wall 119a of the sub-casing 119 for loading and unloading wafers 200 as substrates into and out of the sub-casing 119.

[0017] The pod opener 121 includes a mounting base 122 on which the pod 110 is placed, and an opening / closing mechanism 123 for opening and closing the lid of the pod 110. The pod opener 121 is configured to open and close the wafer entrance / exit of the pod 110 by opening and closing the lid of the pod 110, which is placed on the mounting base 122, using the opening / closing mechanism 123.

[0018] The sub-enclosure 119 constitutes a transfer chamber 124 that is airtight from the space (pod transfer space) where the pod transport mechanism 118 and the rotating pod shelf 105 are located. A wafer transfer mechanism (substrate transfer mechanism) 125 is installed in the front area of ​​the transfer chamber 124. The wafer transfer mechanism 125 is configured to allow a predetermined number of wafers 200 (5 in Figure 2) to move linearly in the horizontal direction, rotate horizontally, or move up and down. The wafer transfer mechanism 125 is configured to load and unload wafers 200 into and out of the boat (substrate holder) 217.

[0019] A waiting area 126 is provided in the rear region of the transfer chamber 124 to house and hold the boat 217, and a vertical processing furnace 202 is provided above the waiting area 126. The processing furnace 202 is also called a processing container for processing the wafer 200.

[0020] Next, the operation of the substrate processing device 10 will be described.

[0021] When a pod 110 is supplied to the load port 114, the pod loading / unloading port 112 is opened by the front shutter 113. The pod 110 on the load port 114 is loaded into the interior of the housing 111 through the pod loading / unloading port 112 by the pod transport mechanism 118 and placed on a designated shelf 117 of the rotating pod rack 105. After being temporarily stored on the rotating pod rack 105, the pod 110 is transported by the pod transport mechanism 118 from the shelf 117 to one of the pod openers 121 and transferred to the mounting platform 122, or it is transferred directly from the load port 114 to the mounting platform 122.

[0022] The pod 110, placed on the mounting table 122, has its open end face pressed against the opening edge of the wafer loading / unloading port 120 on the front wall 119a of the sub-housing 119, and the lid is removed by the opening / closing mechanism 123, opening the wafer entrance / exit.

[0023] When the pod 110 is opened by the pod opener 121, the wafer transfer mechanism 125 takes the wafer 200 out of the pod 110, carries it to the standby unit 126, and loads (charges) it into the boat 217.

[0024] Once a predetermined number of wafers 200 are loaded into the boat 217, the furnace opening of the processing furnace 202, which had been closed by the furnace opening shutter 147, is opened by the furnace opening shutter 147. Subsequently, the boat 217 is raised by the boat elevator 115 and loaded into the processing chamber 201.

[0025] After loading, the furnace opening is hermetically sealed by the seal cap 219. In this embodiment, at this timing (after loading), there is a purging process (pre-purging process) in which the processing chamber 201 is replaced with an inert gas.

[0026] The processing chamber 201 is evacuated by a vacuum pump (not shown) to achieve a desired pressure (vacuum level). The processing chamber 201 is also heated to a predetermined temperature by a heater (not shown) to achieve a desired temperature distribution.

[0027] Furthermore, a processing gas controlled to a predetermined flow rate is supplied by a processing gas supply source (not shown), and as the processing gas flows through the processing chamber 201, it comes into contact with the surface of the wafer 200, and a predetermined process is performed on the surface of the wafer 200. In addition, the processing gas after the reaction is exhausted from the processing chamber 201 by a gas exhaust mechanism (not shown). Note that the processing gas referred to here is the gas supplied into the processing chamber 201. These same conditions apply in the following explanation.

[0028] Once the pre-set processing time has elapsed, inert gas is supplied from an inert gas supply source (not shown), replacing the processing chamber 201 with inert gas and returning the pressure in the processing chamber 201 to atmospheric pressure (after-purge process). Then, the boat 217 is lowered via the seal cap 219 by the boat elevator 115. The processing time referred to here means the time during which the processing is continued. These terms are also used in the following explanation.

[0029] For the removal of the processed wafers 200, the wafers 200 and pods 110 are discharged outside the housing 111 in the reverse procedure of the above description. Unprocessed wafers 200 are then loaded into boats 217, and batch processing of wafers 200 is performed. Alternatively, pods 110 containing processed wafers 200 may be temporarily stored on a rotating pod shelf 105, and then transported from shelf 117 to load port 114 by a pod transport mechanism 118, and discharged outside the housing 111.

[0030] As shown in Figures 1 and 2, the substrate processing apparatus 10 includes a control device 100. The control device 100 controls the substrate processing apparatus 10. The control device 100 may be built into the substrate processing apparatus 10, or it may be provided externally so as to be accessible from the substrate processing apparatus 10.

[0031] Next, with reference to Figure 3, the configuration of the control system of the substrate processing apparatus 10 according to this embodiment will be described. Figure 3 is a block diagram showing an example of the functional configuration of the control device 100 provided in the substrate processing apparatus 10 according to this embodiment.

[0032] As shown in Figure 3, the substrate processing apparatus 10 includes a control device (main controller) 100, an external communication unit 301, an external storage unit 302, an operation unit 303, a display unit 304, a process control unit 305, and a drive control unit 306.

[0033] The control device 100 includes a CPU (Central Processing Unit) 100a as a control unit, a RAM (Random Access Memory) 100b, a storage unit 100c, a selection unit 100d, and an I / O port 100e.

[0034] The control device 100 is connected to the operation unit 303 and the display unit 304, and is also connected to the process control unit 305 and the drive control unit 306 via the I / O port 100e. Since the control device 100 is electrically connected to each of the process control unit 305 and the drive control unit 306 via the I / O port 100e, it is configured to enable the transmission and reception of various data, as well as the download and upload of various files.

[0035] The control device 100 is connected to an external host computer (not shown) via an external communication unit 301. Therefore, even if the substrate processing device 10 is installed in a cleanroom, the host computer can be located in an office or other location outside the cleanroom. The control device 100 is also connected to an external storage unit 302, which serves as a mounting unit for inserting and removing a USB (Universal Serial Bus) memory, an example of a recording medium.

[0036] The operation unit 303 has an integrated display unit 304, or is connected to the display unit 304 via a video cable or the like. The display unit 304 is, for example, a liquid crystal display panel. The display unit 304 is configured to display various operation screens for operating the substrate processing apparatus 10. The operation screens include a substrate processing recipe editing screen 12 for controlling the process system controlled by the process control unit 305 and the drive system controlled by the drive control unit 306. The display unit 304 is configured to display the substrate processing recipe editing screen 12 in which processing procedures and processing conditions are defined. The operation unit 303 is configured to allow editing of the processing procedures and processing conditions of the recipe via the recipe editing screen 12. Furthermore, the operation unit 303 is configured to allow editing of the setting values ​​of multiple items, which are multiple processing conditions in each processing procedure, by operating the recipe editing screen 12.

[0037] Furthermore, the operation unit 303 outputs information displayed on the display unit 304 to a device such as a USB memory inserted into the external storage unit 302. The operation unit 303 receives input data (input instructions) from the operation screen displayed on the display unit 304 and transmits the input data to the control device 100. The operation unit 303 is also configured to receive instructions (control instructions) to execute any board processing recipe (also called a process recipe) from among the recipes deployed in the RAM 100b or stored in the recipes of the storage unit 100c, and transmit these instructions to the control device 100. Note that the operation unit 303 and the display unit 304 may be configured as touch panels. Here, the operation unit 303 and the display unit 304 are provided separately from the control device 100, but they may also be integrated into the control device 100.

[0038] The process control unit 305 includes a temperature control unit 307, a gas flow rate control unit 308, and a pressure control unit 309, etc. The temperature control unit 307, gas flow rate control unit 308, and pressure control unit 309, etc., each constitute a subcontroller and are electrically connected to the process control unit 305. Therefore, it is configured to enable the transmission and reception of various data, as well as the download and upload of various files. Although the process control unit 305 and each subcontroller (temperature control unit 307, gas flow rate control unit 308, and pressure control unit 309, etc.) are shown separately in the diagram, they may also be configured as an integrated unit.

[0039] The temperature control unit 307 is configured to control the processing temperature based on the set values ​​for each zone set in the recipe and the measured values ​​detected by temperature sensors (not shown) installed in each zone. The temperature control unit 307 is configured to adjust the temperature inside the processing chamber 201 or the temperature of the wafer 200 by controlling the temperature of the heaters (not shown) in each zone. Here, processing temperature refers to the temperature of the wafer 200 or the temperature inside the processing chamber 201.

[0040] Note that each zone indicates an area obtained by dividing the processing chamber 201 in the height direction, and in this embodiment, it is divided into, for example, five areas. Note that the number of zones is not limited to five, and it may be divided into zones other than five depending on the configuration of the apparatus. Further, heaters are provided for each zone, and in the case of this embodiment, it is composed of five heaters. The temperature inside the processing chamber 201 or the temperature of the wafer 200 is controlled by the five heaters.

[0041] The gas flow rate control unit 308 is configured to adjust the flow rate of the gas into the processing chamber 201 so that the flow rate of the gas becomes a desired flow rate based on the set value set in the recipe and the measured value detected by a gas flow rate sensor (not shown). Further, the gas flow rate control unit 308 is configured to control the opening and closing operation of the valve in accordance with the opening and closing state of the valve set in the recipe. The gas flow rate control unit 308 is configured to adjust the flow rate of the gas into the processing chamber 201 by controlling the mass flow controller (MFC) which is a flow rate controller (flow rate control unit) and the opening and closing of the valve.

[0042] The pressure control unit 309 is configured to control the processing pressure based on the set value set in the recipe and the pressure value detected by a pressure sensor (not shown). The pressure control unit 309 is configured to control the switching (on / off) of the pressure adjusting device and the vacuum pump so that the pressure inside the processing chamber 201 becomes a desired pressure at a desired timing. Here, the processing pressure means the pressure inside the processing chamber 201.

[0043] The drive control unit 306 includes a transfer control unit 311, a rotation control unit 312, a lifting control unit 313, and the like. Note that the drive control unit 306 and the transfer control unit 311, the rotation control unit 312, and the lifting control unit 313 are shown separately, but they may be integrally configured.

[0044] The transfer control unit 311 is configured to control the transfer operations of, for example, the boat elevator 115, the pod transfer mechanism 118, and the wafer transfer mechanism 125, respectively.

[0045] The rotation control unit 312 is configured to control the rotation operations of, for example, the pod transfer mechanism 118, the wafer transfer mechanism 125, and the rotating shaft 116 disposed at the center of the rotary pod rack 105, respectively.

[0046] The lifting control unit 313 is configured to control the lifting operations of, for example, the boat elevator 115, the pod transfer mechanism 118, and the wafer transfer mechanism 125, respectively.

[0047] Note that the control device 100, the process control unit 305, and the drive control unit 306 according to the present embodiment can be realized using a normal computer system, not a dedicated system. For example, by installing a program for executing the above-described processing from a recording medium (such as a CD-ROM, USB, etc.) storing the program in a general-purpose computer, each controller for executing a predetermined process can be configured.

[0048] And the means for supplying these programs is arbitrary. In addition to being supplied via a predetermined recording medium as described above, it may be supplied via, for example, a communication line, a communication network, and a communication system.

[0049] The control device 100 is configured as a computer including a CPU 100a, a RAM 100b, a storage unit 100c, a selection unit 100d, and an I / O port 100e. In the storage unit 100c, various recipe files such as recipes in which processing procedures and processing conditions are defined, control program files for executing these recipe files, parameter files (setting value files) for setting processing procedures and processing conditions, error processing program files and error processing parameter files, various screen files including an input screen for inputting process parameters, various icon files, etc. (none of which are shown) are stored. Note that the control device 100 is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) using the external communication unit 301 and is capable of communicating with external devices via the network.

[0050] Furthermore, the storage unit 100c can be, for example, an HDD (Hard Disk Drive), an SSD (Solid State Drive), or flash memory. The storage unit 100c stores a recipe editing program for executing the recipe editing process according to this embodiment. The storage unit 100c also stores display setting information, which contains the display modes for displaying setting values ​​set for each of the multiple item or type ranges on the recipe editing screen 12. The display setting information may also be stored in the external storage unit 302.

[0051] The display settings information includes at least one of the following: information regarding background colors set for each of multiple item or type ranges in the recipe editing screen 12; information regarding text color; and information regarding icon display, which will be described later. Specifically, for example, the display settings information includes lower and upper limits for which multiple setting values ​​can be set for each of multiple item ranges. The display settings information includes at least one of the following: information regarding background colors set according to each range, or for each ratio (also called the percentage) of the setting value relative to the full-scale value, as well as information regarding text color and icon display, with the range between the lower and upper limits of the setting value for each type (hereinafter referred to as the full-scale value) being divided into at least multiple ranges.

[0052] The selection unit 100d is configured to select a display mode corresponding to each setting value and notify the CPU 100a based on the display setting information stored in the storage unit 100c or the external storage unit 302 and the multiple setting values ​​set in the setting value display area 14. In other words, the selection unit 100d is configured to select a display mode corresponding to each of the multiple setting values ​​and notify the CPU 100a based on the display setting information which sets the display modes for displaying the setting values ​​for each of the multiple ranges of setting values ​​for each of the multiple items or types.

[0053] Furthermore, the CPU 100a calculates the ratio of multiple setting values ​​for each of the multiple items or types to the full-scale value. In this case, the selection unit 100d is configured to select a display mode corresponding to the ratio of each setting value to the full-scale value and notify the CPU 100a. For example, the selection unit 100d automatically assigns pre-set color shades to each of the multiple items or types for each range of multiple setting values ​​for each of the multiple items or types, selects each one, and notifies the CPU 100a.

[0054] Furthermore, the CPU 100a is configured to control the display unit 304 so that multiple setting values ​​are displayed in the recipe editing screen 12 according to the display mode selected by the selection unit 100d. Specifically, for example, the CPU 100a is configured to control the display unit 304 so that multiple setting values ​​are displayed according to the background color, text color, or icon display, which are pre-stored in the storage unit 100c and selected by the selection unit 100d.

[0055] Furthermore, the CPU 100a is configured to control the display unit 304 so that, when the size of the cells in which multiple setting values ​​are displayed in the recipe editing screen 12 falls below a preset value, or when the font size of the setting values ​​displayed in the cells falls below a preset value, the multiple setting values ​​are switched to be displayed as icons corresponding to the range of the multiple setting values ​​and displayed in the recipe editing screen 12.

[0056] Here, an icon is a pre-set graphic image used to indicate the range of setting values ​​displayed on the recipe editing screen 12. This graphic image includes not only designed shapes, but also symbols, alphabets, hiragana, katakana, kanji, and other characters. However, the icon is not limited to the above; it is sufficient if it allows the range of each setting value to be identified on the recipe editing screen 12.

[0057] Furthermore, the CPU 100a functions as a determination unit that determines whether or not there is an abnormality in each of the multiple setting values ​​on the recipe editing screen 12. Alternatively, a separate determination unit may be provided in addition to the CPU 100a. For example, the CPU 100a determines that there is an abnormality if the input setting value is not within the valid range, or if it is an order of magnitude different from the setting values ​​in the previous or next step. The CPU 100a is configured to control the display unit 304 so that the setting value determined to be abnormal by the determination unit is displayed on the recipe editing screen 12 in a way that makes it distinguishable from other setting values. The CPU 100a may also display a notification on the display unit 304 indicating that there is an abnormality in the setting value. This makes it possible to recognize abnormalities in setting values ​​during the recipe editing stage, allowing for more efficient board processing.

[0058] Specifically, the CPU 100a is configured to control the display unit 304 so that setting values ​​determined to be abnormal by the judgment unit are displayed with a different background color or text color (hereinafter referred to as "display color") or icon display than other setting values. The display color or icon display indicating abnormality is set in advance as display setting information. In this case, when the display color is set for each type in the display setting screen 21 described later, the CPU 100a prevents the selection of the display color or icon display set as the display color or icon display indicating abnormality. This makes it easy for the operator to recognize setting values ​​that have been determined to be abnormal.

[0059] Furthermore, the CPU 100a may be configured to control the display unit 304 so that the frame color or thickness of a setting value determined to be abnormal by the determination unit is different from the frame color or thickness of other setting values ​​(i.e., a frame color or thickness that indicates abnormality). This makes it easier for the operator to recognize setting values ​​that have been determined to be abnormal.

[0060] The recipe editing processing program and display setting information may be pre-installed in the substrate processing device 10, for example. The recipe editing processing program and display setting information may also be implemented by recording them on a non-volatile recording medium or distributing them via a network and installing them in the substrate processing device 10 as appropriate. Examples of non-volatile recording media include CD-ROMs, magneto-optical disks, HDDs, DVD-ROMs, flash memory, memory cards, and USB drives.

[0061] The recipe editing processing program is a program (also called a program product) that causes the substrate processing apparatus 10 to execute, via a computer, a procedure for editing a recipe that defines the processing procedure and processing conditions for the wafer 200, and a procedure for processing the wafer 200 using the edited recipe.

[0062] Next, an example of the recipe editing process according to this embodiment will be described. Figure 4 is a diagram showing an example of the recipe editing screen 12 displayed on the display unit 304. The recipe editing screen 12 is displayed on the display unit 304 after being controlled by the control device 100 through operation of the operation unit 303.

[0063] The recipe editing screen 12 is configured to allow editing of the processing steps in one step of the semiconductor device manufacturing process, the processing conditions in each processing step, and the multiple setting values ​​for the processing conditions in each processing step. Editing here includes adding or deleting processing steps, adding or deleting processing conditions, and inputting, copying, pasting, changing, and deleting setting values, which are parameters of each processing condition in each processing step.

[0064] In the manufacturing process of semiconductor devices, there are many processing steps, and many processing conditions are set for each processing step. As a result, in the tabular recipe editing screen 12, the display area of ​​the cells that show the multiple setting values ​​for the processing conditions in each processing step is small, and the spacing between adjacent cells is also narrow. Therefore, it is difficult for the operator to check the setting values ​​on the recipe editing screen 12.

[0065] In this embodiment, in the recipe editing screen 12, the multiple setting values ​​for each of the multiple items or types displayed in the setting value display area 14 are displayed in a display manner predetermined for each range of setting values ​​for each of the multiple items or types. That is, the multiple setting values ​​for each of the multiple items or types displayed in the setting value display area 14 are displayed in a different manner for each range of setting values ​​for each of the multiple items or types. This makes it easier to recognize the range of setting values ​​for each of the multiple items or types.

[0066] The recipe editing screen 12 includes a recipe display area 13, a setting value display area 14, a size instruction button 15, a size display area 16, and display setting buttons: Set Color key 17, Save key 18, and Escape key 19.

[0067] The recipe display area 13 is configured to display the name of the recipe and the execution time of the recipe. This allows the user to understand the contents of the recipe and the execution time of the recipe on the recipe editing screen 12.

[0068] The setting value display area 14 is configured in a table format in which the recipe for processing the wafer 200 is defined for each of several steps, with the steps on the vertical axis (Y-axis, also called columns) and the items that constitute the conditions in each step on the horizontal axis (X-axis, also called rows), and editable setting values ​​are displayed at the intersection of the two axes.

[0069] Multiple items consist of multiple types, such as temperature, gas flow rate, pressure, and valves. Set values ​​include multiple types of set values, such as temperature set values ​​for multiple zones in each step, flow rate set values ​​for multiple MFCs in each step, pressure values ​​in each step, and opening and closing operations of multiple valves in each step.

[0070] The size instruction button 15 is configured to allow the display size of the setting value display area 14 to be enlarged or reduced. The CPU 100a is configured to control the display unit 304 so that the display size of the setting value display area 14 is switched in response to the operation of the size instruction button 15, and the recipe editing screen 12 is displayed. Specifically, for example, by sliding the size instruction button 15 to the plus side, the display size of each setting value in the setting value display area 14 can be increased. Conversely, by sliding the size instruction button 15 to the minus side, the display size of each setting value in the setting value display area 14 can be decreased, allowing all steps in the board processing recipe to be displayed.

[0071] The size display area 16 is configured to display the display size (also called the magnification) of the setting value display area 14, which is changed according to the operation of the size instruction button 15.

[0072] In other words, the setting value display area 14 of the recipe editing screen 12 is configured to allow switching of the display size of the setting value display area 14 in response to operation using the size instruction button 15. Furthermore, if the display unit 304 and the operation unit 303 are configured as touch panels, the setting value display area 14 may be enlarged or reduced by pinching in and pinching out. This allows the operator to easily enlarge or reduce the setting value display area 14.

[0073] In other words, the CPU 100a is configured to control the display unit 304 to enlarge or reduce the display size (also called the cell display size) of the set value in the set value display area 14 in response to operation by the size instruction button 15. The operator can enlarge the display size of the set value in the set value display area 14 to check the set value of each item in each step. Alternatively, the operator can reduce the display size of the set value in the set value display area 14 to check the overall image of the recipe.

[0074] Alternatively, the magnification can be directly entered into the size display area 16. In that case, the magnification of the size instruction button 15 and the display size of the setting value display area 14 may be switched to match the magnification entered into the size display area 16.

[0075] The Set Color key 17 is configured to display a display settings screen 21 that allows setting display modes for multiple items or types, and for multiple ranges of setting values. For example, when the Set Color key 17 is pressed, the display settings screen 21 shown in Figure 5 is displayed.

[0076] The Save key 18 is configured so that when pressed, the information set on the recipe editing screen 12 is saved to the storage unit 100c or the external storage unit 302. The Escape key 19 is configured so that when pressed, the information set on the recipe editing screen 12 is discarded and the user returns to the menu screen. If the Escape key 19 is pressed while information is set on the recipe editing screen 12, a message may be displayed to confirm whether it is OK to discard the set information. Specifically, for example, a message such as "There is data being edited. Do you want to discard the data being edited?" may be displayed on the recipe editing screen 12.

[0077] Figure 5 shows an example of the display settings screen 21. The display settings screen 21 is displayed, for example, when the Set Color key 17 shown in Figure 4 is pressed.

[0078] The display settings screen 21 allows users to set the display mode collectively or individually by selecting at least one of the following for each item, or for each type such as temperature, gas flow rate, pressure, or valve: background color, text color (i.e., display color), or icon display. Setting different display colors for each item makes it easier to check the settings for a specific item. Setting different display colors for each type makes it easier to understand the type and prevents input errors.

[0079] Furthermore, the display settings screen 21 is configured to allow users to select at least one of either a display color or an icon display for each of the multiple item or type ranges of settings, thereby setting the display mode collectively or individually. By setting different display colors or icons for each of the multiple ranges of settings, it becomes easier to recognize the ranges of the settings.

[0080] Furthermore, the display colors for each range of settings for multiple items or categories can be set automatically by assigning pre-set color shades to each item or category. Alternatively, the display colors for each range of settings for multiple items or categories can be set individually for each range of settings for each item or category.

[0081] For example, in the case of automatic settings, if a display color is set for each type, the CPU 100a can divide the full-scale value set for each type into, for example, 10 levels, and assign 10 levels of intensity from the set display color to each of the multiple ranges of setting values. In this way, the intensity of the color set for each type can be set as the display color for each range of setting values. This avoids the complexity that comes with setting multiple colors.

[0082] Furthermore, in the display settings screen 21, if icon display is set for a type, the display size of the cells in the setting value display area 14 will be set to switch to icon display when the display size of each setting value falls below a predetermined value.

[0083] Figure 6 shows an example of the recipe editing screen 12 in Figure 4, where the size indicator button 15 is slid to the negative side to reduce the display size of the setting value display area 14.

[0084] When the display size of the setting value display area 14 is reduced and the size of the cells in the setting value display area 14 falls below a preset value (threshold), the CPU 100a controls the display unit 304 to switch the display of multiple setting values ​​to icons corresponding to the range of multiple setting values ​​and display them on the recipe editing screen 12, as shown in Figure 6. Here, the threshold is, for example, a display size (also called font size or cell size) that makes the setting value displayed in the cell difficult to see and recognize for the operator. This ensures that the range of setting values ​​remains clear even when the display size of the setting value display area 14 is reduced.

[0085] Specifically, for example, if the font size of the setting value displayed in a cell becomes 5 points or less, the display of multiple setting values ​​is switched to icons corresponding to the range of the setting value. This makes it easier to recognize the ranges of multiple setting values ​​even when the setting value display area 14 is reduced in size. The CPU 100a may also stop reducing the setting value display area 14 when multiple setting values ​​in the setting value display area 14 reach a threshold, preventing further reduction. For example, the CPU 100a may stop reducing the size when the font size of the cells in the setting value display area 14 becomes 5 points or less.

[0086] Specifically, for example, as display setting information, if the background color for temperature is set to red and icon display is selected, and the icon display settings for each range of multiple setting values ​​are as follows, when the full scale value of temperature is 1000.0°C, if the ratio of the setting value to the full scale value of temperature is greater than 0% and 10% or less (for example, the setting value corresponds to greater than 0.0°C and 100.0°C or less), it will be "A", if the ratio is greater than 10% and 20% or less (for example, the setting value corresponds to greater than 100.0°C and 200.0°C or less), it will be "B", and if the ratio is greater than 20% and 30% or less (for example, the setting value corresponds to greater than 200.0°C and 300.0°C or less) If the setting is greater than 30% and less than or equal to 40% (for example, if the setting is greater than 300.0°C and less than or equal to 400.0°C), then "C" is selected. If the setting is greater than 40% and less than or equal to 50% (for example, if the setting is greater than 400.0°C and less than or equal to 500.0°C), then "E" is selected. If the setting is greater than 50% and less than or equal to 60% (for example, if the setting is greater than 500.0°C and less than or equal to 600.0°C), then "F" is selected. When the setting value display area 14 is reduced and the font size of the setting value becomes 5 points or less, the temperature setting value for each step switches to displaying A to F according to the respective setting value. Note that when the temperature setting value is displayed as 0.0°C, it also includes the case where no temperature is set. The same applies to the following explanation.

[0087] Similarly, if the background color for gas flow rate is set to blue, icon display is selected, and the full-scale value of gas flow rate is 400,000 slm (standard liter / minute), the icon display settings for each range of multiple setting values ​​will be as follows: "A" if the ratio to the full-scale value of gas flow rate is greater than 0% and 10% or less (for example, the setting value corresponds to greater than 0.000 slm and 40.000 slm or less); "B" if the ratio is greater than 10% and 20% or less (for example, the setting value corresponds to greater than 40.000 slm and 80.000 slm or less); and "B" if the ratio is greater than 20% and 30% or less. If the ratio is below (for example, the set value is greater than 80,000 slm and corresponds to 120,000 slm or less), it is "C"; if the ratio is greater than 30% and corresponds to 40% or less (for example, the set value is greater than 120,000 slm and corresponds to 160,000 slm or less), it is "D"; if the ratio is greater than 40% and corresponds to 50% or less (for example, the set value is greater than 160,000 slm and corresponds to 200,000 slm or less), it is "E"; if the ratio is greater than 50% and corresponds to 60% or less (for example If the set value is greater than 200,000 slm and 240,000 slm or less, it is "F"; if the ratio is greater than 60% and 70% or less (for example, if the set value is greater than 240,000 slm and 280,000 slm or less), it is "G"; if the ratio is greater than 70% and 80% or less (for example, if the set value is greater than 280,000 slm and 320,000 slm or less), it is "H"; if the ratio is greater than 80% and 90% or less (for example, if the set value is If the value is greater than 320,000 slm (corresponding to 360,000 slm or less), "I" is selected. If the ratio is greater than 90% and less than or equal to 100% (for example, if the set value is greater than 360,000 slm and less than or equal to 400,000 slm), "J" is selected. When the setting value display area 14 is reduced and the font size of the setting value becomes 5 points or less, the temperature setting value for each step switches to displaying A to J according to the respective setting value. Note that if the gas flow rate setting value is displayed as 0.000 slm, this also includes the case where no gas is supplied. The same applies to the following explanation.

[0088] Next, an example of the color selection process according to this embodiment will be described. Figure 7 is a flowchart of an example of the color selection process.

[0089] First, in step S11, the CPU 100a determines whether or not the display color is set as display setting information in the storage unit 100c or the external storage unit 302. If the display color is set, the process proceeds to step S12; otherwise, the process ends.

[0090] Next, in step S12, the CPU 100a acquires the multiple setting values ​​displayed in the setting value display area 14.

[0091] Next, in step S13, the CPU 100a obtains a lower limit (for example, "0" in the case of temperature) and an upper limit (full-scale value) defined for each type from the storage unit 100c or the external storage unit 302.

[0092] Next, in step S14, the CPU 100a obtains the setting color that has been set for each type.

[0093] Next, in step S15, the CPU 100a calculates the ratio (also called a percentage) of the full-scale value for each of the multiple setting values ​​in the setting value display area 14, based on the lower and upper limits set for each type of setting value in the setting value display area 14.

[0094] Next, in step S16, the selection unit 100d selects and acquires information regarding the display color and / or icon display corresponding to each setting value, based on the calculated ratio and the display setting information stored in the storage unit 100c for each setting value.

[0095] Next, in step S17, the selection unit 100d notifies the CPU 100a of the information regarding the display color and / or icon display acquired for each set value.

[0096] Specifically, for example, if the setting item is MFC1, the full-scale value from the lower limit to the upper limit is 400.000 sml, and the setting value is 250.000 slm, the CPU 100a calculates the ratio of the setting value to the full-scale value as 62.5%. Then, the selection unit 100d selects, for example, the display color and / or icon display set for the range of the setting value greater than 60% and 70% or less. Then, the CPU 100a displays each setting value on the recipe editing screen 12 using the selected display color and / or icon display.

[0097] In this way, in the recipe editing screen 12, multiple setting values ​​for each of the multiple items or types displayed in the setting value display area 14 are displayed in a display manner set in advance for each range of setting values ​​for each of the multiple items or types. This helps to avoid input errors and suppress a decrease in work efficiency.

[0098] In the above description, a substrate processing apparatus according to the embodiment was used as an example, but the embodiment may also be in the form of a program that causes a computer to execute the functions of the substrate processing apparatus. The embodiment may also be in the form of a non-temporary recording medium that is readable by a computer that stores these programs.

[0099] Furthermore, the configuration of the substrate processing apparatus described in the above embodiment is merely an example, and may be modified as needed without departing from the main purpose.

[0100] Furthermore, the program processing flow described in the above embodiment is just one example, and unnecessary steps may be deleted, new steps added, or the processing order rearranged, as long as it does not deviate from the main purpose.

[0101] Furthermore, although the above embodiment describes a case in which the process according to the embodiment is realized by a software configuration using a computer by executing a program, the embodiment is not limited to this. The embodiment may also be realized by a hardware configuration or a combination of a hardware configuration and a software configuration.

[0102] Furthermore, the above embodiments described an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at once. This disclosure is not limited to the above embodiments and can be suitably applied, for example, when forming a film using a single-wafer substrate processing apparatus that processes one or several substrates at once. Furthermore, the above embodiments described an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace. This disclosure is not limited to the above embodiments and can be suitably applied when forming a film using a substrate processing apparatus having a cold-wall type processing furnace.

[0103] Even when using these substrate processing devices, each process can be performed using the same processing procedures and conditions as in the above embodiment, and the same effects as in the above embodiment can be obtained.

[0104] 200 Wafer (substrate) 10 Substrate processing device (processing device) 12 Recipe editing screen (editing screen) 100a CPU (control unit) 100d Selection unit 304 Display unit

Claims

1. A processing apparatus comprising: a display unit capable of displaying an editable editing screen configured in a tabular format defined by the axis of the step and the axis of the multiple items constituting the conditions, in which a recipe for processing a substrate is defined for each of the multiple steps, and multiple setting values ​​set at the intersections of the multiple items and the multiple steps are editable; a selection unit that selects a display mode corresponding to each of the multiple setting values ​​based on display setting information which sets the display modes for displaying the setting values ​​for each range of the multiple setting values; and a control unit capable of controlling the display unit to display the multiple setting values ​​on the editing screen according to each display mode selected by the selection unit.

2. The processing apparatus according to claim 1, wherein the editing screen is configured to allow switching of the display size, and the control unit is configured to control the display unit so that the editing screen is displayed according to a specified display size.

3. The processing apparatus according to claim 1, wherein the editing screen is provided with a size instruction button for instructing to enlarge or reduce the display size, and the control unit is configured to control the display unit so that the editing screen is displayed by switching the display size in response to the operation of the size instruction button.

4. The processing apparatus according to claim 1, wherein the plurality of items are composed of a plurality of types, the display setting information is configured to be configurable for each of the plurality of types, and the selection unit is configured to select a display mode corresponding to each of the plurality of setting values ​​based on the display setting information in which the display mode is set for each of the plurality of types.

5. The processing apparatus according to claim 1, wherein the display setting information is configured to be configurable for each of the plurality of items, and the selection unit is configured to select a display mode corresponding to each of the plurality of setting values ​​based on the display setting information in which the display mode is set for each of the plurality of items.

6. The processing apparatus according to claim 1, further comprising an operation unit for operating the editing screen to set each of the plurality of setting values, wherein the selection unit is configured to select a display mode corresponding to the plurality of setting values ​​set by the operation unit.

7. The processing apparatus according to claim 1, wherein the display setting information is configured to include information regarding background colors corresponding to the range of the plurality of setting values.

8. The processing apparatus according to claim 1, wherein the display setting information is configured to include information regarding character colors corresponding to the range of the plurality of setting values.

9. The processing apparatus according to claim 1, wherein the display setting information is configured to include information regarding icon display according to the range of the plurality of setting values.

10. The processing apparatus according to claim 9, wherein the control unit is configured to control the display unit so that when the size of the cells in which each of the multiple setting values ​​in the table format is displayed becomes less than or equal to a preset value, the multiple setting values ​​are switched to be displayed as icons corresponding to the range of the multiple setting values ​​and displayed on the editing screen.

11. The processing apparatus according to claim 1, wherein the display setting information includes a lower limit and an upper limit for which the plurality of setting values ​​can be set for each of the plurality of items, the control unit calculates the ratio of the plurality of setting values ​​to the range between the lower limit and the upper limit, and the selection unit is configured to select a display mode corresponding to the plurality of setting values ​​based on the ratio.

12. The processing apparatus according to claim 7, wherein the background color is configured to be set collectively or individually for each of the plurality of types, and the control unit is configured to control the display unit so that the plurality of setting values ​​are displayed according to each background color selected by the selection unit.

13. The processing apparatus according to claim 8, wherein the character color is configured to be set collectively or individually for each of the multiple types, and the control unit is configured to control the display unit so that the multiple setting values ​​are displayed according to each character color selected by the selection unit.

14. The processing apparatus according to claim 1, further comprising a determination unit that determines whether or not each of the plurality of setting values ​​is abnormal, wherein the control unit is configured to control the display unit so that the setting value determined to be abnormal by the determination unit is displayed on the editing screen in an identifiable manner.

15. The processing apparatus according to claim 14, wherein the control unit is configured to control the display unit so that it displays a setting value among the plurality of setting values ​​that has been determined to be abnormal by the determination unit in a different color from the other setting values.

16. The apparatus according to claim 14, wherein the control unit is configured to control the display unit so that it displays the frame of a setting value determined to be abnormal by the determination unit among the plurality of setting values ​​in a different color from the frames of other setting values.

17. The processing apparatus according to claim 11, wherein the display setting information is configured to divide the range between the lower limit and the upper limit into at least a plurality of ranges, and to be information regarding the background color or text color set according to each range.

18. A substrate processing apparatus comprising: a display unit capable of displaying an editable editing screen configured in a tabular format defined by the axis of the step and the axis of the multiple items constituting the conditions, in which a recipe for processing a substrate is defined for each of the multiple steps, and multiple setting values ​​set at the intersections of the multiple items and the multiple steps are editable; a selection unit that selects a display mode corresponding to each of the multiple setting values ​​based on display setting information which sets the display modes for displaying the setting values ​​for each range of the multiple setting values; a control unit capable of controlling the display unit to display the multiple setting values ​​in the editing screen according to the display mode selected by the selection unit; and a processing container for processing the substrate according to the recipe.

19. A display method comprising: a step of displaying an editing screen configured in a tabular format defined by the axis of the step and the axis of the multiple items constituting the conditions, in which a recipe for processing a substrate is defined for each of the multiple steps, and multiple setting values ​​set at the intersections of the multiple items and the multiple steps are editable; a step of selecting a display mode corresponding to each of the multiple setting values ​​based on display setting information which sets the display modes for displaying the setting values ​​for each range of the multiple setting values; and a step of displaying the multiple setting values ​​in the editing screen according to the selected display mode.

20. A method for manufacturing a semiconductor device, comprising: a step of displaying an editing screen configured in a tabular format defined by the axis of the step and the axis of the multiple items constituting the conditions, in which a recipe for processing a substrate is defined for each of the multiple steps, and multiple setting values ​​set at the intersections of the multiple items and the multiple steps are editable; a step of selecting a display mode corresponding to each of the multiple setting values ​​based on display setting information which sets the display modes for displaying the setting values ​​for each range of the multiple setting values; a step of displaying the multiple setting values ​​on the editing screen according to the selected display mode; and a step of processing the substrate according to the edited recipe.

21. A program that causes a substrate processing apparatus to execute the following steps via a computer: a procedure to display an editing screen configured in a tabular format defined by the axis of the step and the axis of the multiple items constituting the conditions, in which a recipe for processing a substrate is defined for each of the multiple steps, and multiple setting values ​​set at the intersections of the multiple items and the multiple steps are editable; a procedure to select a display mode corresponding to each of the multiple setting values ​​based on display setting information that sets the display modes for displaying the setting values ​​for each range of the multiple setting values; and a procedure to display the multiple setting values ​​in the editing screen according to the selected display mode.

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