Probe card

Abstract

A probe card for inspecting a semiconductor device or the like comprising: a probe unit that has a probe and a support for the probe; a holder that has a fixing surface and holds the probe unit by screw-fastening the support to the fixing surface; and a stopper that is provided in the holder and is capable of switching between a second state in which displacement of the probe unit in the in-plane direction of the fixing surface is prevented by pressing the support during the screw-fastening and a first state in which pressing the support is stopped.

Description

Probe card

[0001] The present invention relates to a probe card used for inspecting semiconductor devices and the like.

[0002] Probe cards are used for inspecting semiconductor devices and the like. For example, in the probe card of Patent Document 1, a holder that supports probes by a guide plate or the like is fastened to a wiring board by a plurality of screws.

[0003] Japanese Patent Application Laid-Open No. 2015-25749

[0004] Generally, in the assembly of such a probe card, when fastening the holder with screws, the probe unit moves in the rotational direction of the screws, causing displacement of the probes. As a result, a calibration operation by a prober with the probe card mounted later occurs. Even if a method is adopted in which positioning pins are inserted between the probe unit and the wiring board before screwing to suppress such displacement of the probes, since the movement of the probe unit cannot be completely stopped, there is a problem that it becomes difficult to remove the positioning pins after assembly due to a slight displacement of the probe unit.

[0005] The present invention has been made in view of such points, and an object thereof is to provide a probe card capable of suppressing displacement of probes due to screwing during assembly.

[0006] In order to achieve the above object, the following solution was taken for a probe card for inspecting semiconductor devices and the like.

[0007] The probe card of the present disclosure includes a probe unit having a probe and a support for the probe, a holder having a fixed surface, the support being screwed to the fixed surface to hold the probe unit, a stopper provided on the holder, and the stopper being capable of switching between a second state in which displacement of the probe unit in the in-plane direction of the fixed surface is prevented by pressing the support during the screwing and a first state in which pressing of the support is stopped.

[0008] In this configuration, for example, with the stopper switched to the first state, the probe unit is positioned at a predetermined location on the fixed surface. When the support is screwed to the fixed surface, a clockwise rotational force acts on the probe unit when viewed from the fixed surface, causing the probe unit to attempt to displace in the in-plane direction of the fixed surface. At this time, the stopper is switched to the second state and the support is pressed by the stopper, preventing the aforementioned in-plane displacement of the probe unit. Therefore, displacement of the probe due to screw fastening is suppressed.

[0009] The support is formed in a quadrilateral shape that is a square or rectangle when viewed perpendicular to the fixed surface, and the holder is equipped with four stoppers that press against the four sides corresponding to each of the four sides of the support.

[0010] In this configuration, when the screws are fastened, each of the four sides of the support is pressed by the stopper. As a result, displacement in two axial directions of the support's quadrilateral (i.e., in the directions of the two axes of symmetry) is prevented by the stopper. Thus, displacement of the probe unit in the aforementioned in-plane direction is prevented, and misalignment of the probe is effectively suppressed.

[0011] The screw fastening screws advance from the support side to the holder side, and each of the four stoppers may be provided near the right end of the side when viewed from a position facing the side, with the direction extending perpendicular to the fixing surface toward the support side being the vertical direction upward, and the direction extending along the fixing surface of the side being the left-right direction.

[0012] In this configuration, a clockwise rotational force acts on the probe unit due to screw fastening, while the displacement of the probe unit is prevented by the four stoppers pressing against each of the four sides of the support. Here, each of the four stoppers presses against the right-hand side of the corresponding side. Therefore, compared to a case where the stoppers press against, for example, the center or left-hand side of the side, the counterclockwise rotational force acting on the support increases due to the pressure of the stoppers. This reduces the required pressure of the stoppers.

[0013] The stopper has an eccentric screw having a shaft with male threads formed on its outer circumference and a head formed on the shaft eccentrically with respect to the shaft, and the eccentric screw is screwed into the holder with the axis of the shaft perpendicular to the fixed surface, and may be configured to switch between a second state in which the head presses against the support and a first state in which the head stops pressing against the support by rotating.

[0014] In this configuration, the eccentric screw is threaded into the holder from the side of the fixed surface. For example, when the probe unit is positioned in a predetermined location on the fixed surface, the eccentric screw rotates to switch to the first state. When the support is screwed to the fixed surface, the eccentric screw rotates to switch to the second state. In this way, the stopper can be easily switched between the first and second states simply by rotating the eccentric screw.

[0015] The stopper is positioned on the fixed surface, and the holder may have a recess formed in its bottom surface which is the fixed surface.

[0016] In this configuration, the probe unit and stopper are positioned at the bottom of a recess formed in the holder. Therefore, the length of the probe unit and holder perpendicular to their fixed surfaces, and consequently the length of the entire probe card perpendicular to its fixed surface, is reduced. This prevents damage to the probe card due to physical interference with the object being inspected.

[0017] Multiple probe units may be provided in a single holder.

[0018] When multiple probe units are screw-fastened to a single holder, the positional displacement of the probes due to screw fastening differs for each probe unit; however, this configuration suppresses such issues.

[0019] The probe units may be provided in multiples on a single holder, and the multiple probe units may be arranged such that the stoppers corresponding to each of them do not overlap with each other when viewed in a direction perpendicular to the fixed surface.

[0020] In this configuration, multiple probe units are arranged so that the stoppers of different probe units do not overlap with each other. Therefore, the in-plane displacement of each probe unit is reliably prevented by the four stoppers.

[0021] The probe units may be provided in multiples on a single holder, and the multiple probe units may be arranged so that their respective sides face each other.

[0022] In this configuration, multiple probe units are arranged so that the sides of their supports face each other, thus reducing the required length of the holder in the direction in which the sides extend along the fixed surface. For example, if multiple probe units are arranged vertically, the required length of the holder in the lateral direction is reduced, and if multiple probe units are arranged horizontally, the required length of the holder in the vertical direction is reduced. Therefore, the density of multiple probe units provided on a single holder can be increased.

[0023] The plurality of probe units may be arranged such that the two stoppers corresponding to two opposing sides overlap in a view in the direction in which the sides extend along the fixed surface.

[0024] In this configuration, two stoppers corresponding to two opposing sides overlap when viewed in the direction in which the sides extend along the fixed surface. Therefore, compared to the case where the two stoppers do not overlap, the spacing between probe units in the direction of the probe unit arrangement, i.e., in the direction in which the two sides face each other, becomes smaller. Consequently, the density of multiple probe units provided in a single holder can be further increased.

[0025] The support has a first inclined surface that extends outward from the support as it approaches the fixed surface, and the stopper has a first contact portion that contacts the first inclined surface, and a first displacement member that, as it is displaced toward the fixed surface in the direction perpendicular to the fixed surface, presses the first inclined surface in the in-plane direction of the fixed surface while the first contact portion slides along the first inclined surface.

[0026] In this configuration, the first contact portion of the first displacement member of the stopper contacts the first inclined surface extending outward from the support. As the first displacement member displaces toward the fixed surface in the direction perpendicular to the fixed surface, the first contact portion slides along the first inclined surface, pressing it in the in-plane direction of the fixed surface. As a result, the in-plane displacement of the support is prevented, and the in-plane displacement of the probe unit is prevented.

[0027] The holder has a second inclined surface located on the outer circumference of the support and approaching the support as it moves toward the fixed surface, and the stopper has a second contact portion positioned between the support and the second inclined surface and in contact with the second inclined surface, and as it is displaced toward the fixed surface in the direction perpendicular to the fixed surface, the second contact portion slides along the second inclined surface, thereby displacing toward the support and pressing the support toward the in-plane direction of the fixed surface, and includes a second displacement member.

[0028] In this configuration, the second contact portion of the second displacement member of the stopper contacts the second inclined surface of the holder, which is located on the outer circumference of the support and approaches the support as it moves toward the fixed surface. As the second displacement member is displaced toward the fixed surface in the direction perpendicular to the fixed surface, the second contact portion slides along the second inclined surface, causing it to be displaced toward the support. As a result, the second displacement member presses the support in the in-plane direction toward the fixed surface, preventing the in-plane displacement of the support and thus preventing the in-plane displacement of the probe unit.

[0029] The stopper has a stationary member and a third displacement member arranged in order from the side of the fixed surface in the direction perpendicular to the fixed surface, the stationary member has a fourth inclined surface that approaches the support as it moves toward the side of the fixed surface, and the third displacement member has a third inclined surface that is formed parallel to the fourth inclined surface and in surface contact with the fourth inclined surface, and as it is displaced toward the side of the fixed surface in the direction perpendicular to the fixed surface, the third inclined surface slides against the fourth inclined surface, thereby displacing toward the support and pressing the support toward the in-plane direction of the fixed surface.

[0030] In this configuration, the stopper has a stationary member and a third member arranged sequentially from the side of the fixed surface in the direction perpendicular to the fixed surface. The third inclined surface of the third member, which is formed parallel to the fourth inclined surface, makes surface contact with the fourth inclined surface of the stationary member, which approaches the support as it moves toward the fixed surface. As the third member is displaced toward the fixed surface in the direction perpendicular to the fixed surface, the third inclined surface slides against the fourth inclined surface, causing it to be displaced toward the support. As a result, the third displacement member presses the support in the in-plane direction of the fixed surface, preventing the in-plane displacement of the support and thus preventing the in-plane displacement of the probe unit.

[0031] According to the present invention, it is possible to provide a probe card that can suppress the misalignment of the probe due to screw fastening during assembly.

[0032] Figure 1 is a schematic bottom view of a probe card according to Embodiment 1 of the present invention. Figure 2 is an example of a cross-sectional view of the probe card of Figure 1. Figure 3 shows (A) a schematic bottom view of the probe unit and holder of Figure 2, (B) a cross-sectional view showing the cross-section of (A) along the A-A cutting line, (C) a detailed view of the eccentric screw, (D) a bottom view showing a part of the holder, and (E) a bottom view of the middle spacer. Figure 4 is a diagram showing the assembly steps (1) to (3) of the probe unit and holder of Figure 3. Figure 5 is a diagram showing the assembly steps (4) to (6) of the probe unit and holder of Figure 3. Figure 6 is a diagram illustrating an example of the arrangement of the probe unit in the probe card of Figure 1. Figure 7 is a schematic diagram showing the main parts of a probe card according to Embodiment 2 of the present invention. Figure 8 is a schematic diagram showing the main parts of a probe card according to Embodiment 3 of the present invention. Figure 9 is a schematic diagram showing the main parts of a probe card according to Embodiment 4 of the present invention. Figure 10 is a schematic diagram showing the main parts of a probe card according to Embodiment 5 of the present invention, where (A) is a schematic bottom view of the probe unit and holder, and (B) to (C) are enlarged views of the stopper portion in the cross-section of (A) along the A-A cutting line. Figure 11 is a schematic diagram for explaining the configuration of the stopper according to Embodiment 5 of the present invention, where (A) to (B) are a plan view and a side view of the slide block, and (C) is a front view of the slide block fixing screw. Figure 12 is a schematic diagram showing the main parts of a probe card according to Embodiment 6 of the present invention, where (A) is a schematic bottom view of the probe unit and holder, and (B) is an enlarged view of the stopper portion in the cross-section of (A) along the A-A cutting line.

[0033] Embodiments of the present invention will be described below with reference to the drawings. In this specification, for convenience, the thickness direction of the wiring board will be described as the vertical direction, but this does not limit the orientation of the probe card when using the present invention. In this specification, the direction substantially perpendicular to the thickness direction of the wiring board will be referred to as the planar direction. Corresponding components will be denoted by the same or similar reference numerals, and for example, through holes 23b1, 23b2, 23b3, and 23b4 may be collectively referred to as through hole 23b.

[0034] [Embodiment 1] (Probe Card 1) Figures 1 to 3 show an example configuration of a probe card 1 according to Embodiment 1 of the present invention.

[0035] As shown in Figures 1 and 2, the probe card 1 comprises probe units 2, a holder 3, a printed circuit board (PCB) 4, an interposer 5, pogo pins 6, a flange 7, a flange spacer 8, and an external terminal 9. Multiple probe units 2 can be provided in one holder 3. In the probe card 1 of Figure 1, 16 probe units 2 are provided, and each probe unit 2 has numerous probes 21 protruding downwards. In other words, each probe 21 is supported in an upright position in the vertical direction.

[0036] (Wiring board 4) The wiring board 4 is a flat, plate-shaped wiring board that can be detachably attached by a prober (not shown), and is made of a printed circuit board. The wiring board 4 is arranged substantially horizontally, and a reinforcing plate 41 is attached to its upper surface. The reinforcing plate 41 is a flat, plate-shaped reinforcing member for suppressing distortion of the wiring board 4, and can be made of a metal member such as stainless steel. In addition, two or more external terminals 9 for connection to a tester device (not shown) are provided outside the reinforcing plate 41, that is, on the outer peripheral edge of the upper surface of the wiring board 4.

[0037] (Interposer 5) The interposer 5 is a board for electrically connecting the wiring board 4 and the probe unit 2, and is mounted on the underside of the wiring board 4. The interposer 5 is equipped with a number of pogo pins 6 that make electrical connections between the wiring of the wiring board 4 and the wiring of the probe unit 2. The pogo pins 6 are a type of electrical connector mechanism.

[0038] (Probe Unit 2) The probe unit 2 is a component for supporting the probe 21 and connecting to the pogo pin 6, and includes a support 20 for supporting the probe 21, and two or more probes 21.

[0039] (Supporter 20) The supporter 20 includes an ST (Space Transformer) substrate 25, a middle spacer 23, a top guide plate 24, and a bottom guide plate 22.

[0040] (ST board 25) The ST board 25 is a wiring board for changing the electrode arrangement pitch. It is fixed to the middle spacer 23 (described later) by screws 29 and can be attached to the lower surface of the interposer 5 so as to connect to the pogo pins 6. Specifically, the ST board 25 has two or more upper electrodes on its upper surface to which the pogo pins 6 are connected, and two or more lower electrodes on its lower surface to which the probes 21 are connected. The lower electrodes are arranged at a narrow pitch corresponding to the probes 21 and are electrically connected to the upper electrodes, which are arranged at a wider pitch, through the wiring pattern and through-holes of the ST board 25. As a result, one wiring board 4 and interposer 5 can be shared among various probe units 2, which are specially designed according to the various probe pitches of the object being inspected, thus reducing inspection costs.

[0041] (Top guide plate 24, bottom guide plate 22) The top guide plate 24 and the bottom guide plate 22 are both substantially square or substantially rectangular members that support the probe 21 so that it can move up and down, and for example, a flat ceramic substrate can be used.

[0042] The top guide plate 24 supports the needle base (wiring board) side of the probe 21, and the bottom guide plate 22 supports the needle tip (object to be inspected) side of the probe 21. The top guide plate 24 and the bottom guide plate 22 are fixed to the middle spacer 23 by screws 27-28 and are positioned approximately horizontally at a distance from the ST board 25.

[0043] The top guide plate 24 and the bottom guide plate 22 also have two or more guide holes 21a in which the probes 21 are respectively arranged, as shown in FIGS. 3(A) to 3(B). By inserting the probes 21 into the guide holes 21a, the positioning of the probes 21 in the substantially planar direction is performed. The guide holes 21a are through holes that penetrate the top guide plate 24 and the bottom guide plate 22 in the vertical direction. The top guide plate 24 is arranged to face the lower surface of the ST substrate 25 and positions the probe 21 with respect to the ST substrate 25. The bottom guide plate 22 is arranged to face the lower surface of the top guide plate 24 and is held by the holder 3 by fastening the fixing screw 26 together with the middle spacer 23, and positions the probe 21 with respect to the inspection object.

[0044] (Middle Spacer 23) The middle spacer 23 is a substantially square or substantially rectangular flat member for separating the top guide plate 24 and the bottom guide plate 22. As shown in FIG. 3(E), the middle spacer 23 has a through hole 23e formed in a substantially square or substantially rectangular shape in a vertical view for inserting the probe 21 at a substantially central portion. The middle spacer 23 has substantially rectangular tongue pieces 23a protruding outward in the substantially planar direction on each of the four side surfaces 23s1 to 23s4. The tongue pieces 23a extend vertically toward the bottom guide plate 22 from positions facing the respective side surfaces 23s1 to 23s4 when viewed from the side surfaces 23s1 to 23s4, and are provided at portions closer to the right ends of the respective side surfaces when the upward direction in the vertical direction and the direction extending along the lower surface of the middle spacer 23 on the respective side surfaces are defined as the left-right direction.

[0045] The middle spacer 23 and the bottom guide plate 22 have positioning holes 51a for inserting a positioning pin 51 in order to position the probe unit 2 with respect to the holder 3, as shown in FIG. 3(A). The positioning pin 51 will be described in the assembly procedure of the probe card 1 described later.

[0046] Furthermore, when the support 20 is assembled from the ST substrate 25, top guide plate 24, middle spacer 23, and bottom guide plate 22, it is formed in a quadrilateral shape that is approximately square or rectangular when viewed from below, as shown in Figure 4(1). In the support 20, when viewed from below, only the tongue portions 23a of the four sides 23s1 to 23s4 of the middle spacer 23 protrude outward in the approximately planar direction from each side of the bottom guide plate 22.

[0047] (Probe 21) The probe 21 is a vertical probe with an elongated shape, manufactured using MEMS (Micro Electro Mechanical Systems) technology, etc., and is made of a conductive material. The upper end of the probe 21 is connected to the lower electrode of the ST substrate 25, and the lower end is made to be able to contact the electrode terminal on the object to be inspected. The guide holes 21a of the top guide plate 24 and the bottom guide plate 22 through which the probe 21 is inserted are arranged to be offset from each other in a substantially horizontal direction, and the probe 21 is configured to be curved between the top guide plate 24 and the bottom guide plate 22 when not being inspected. As a result, multiple probes 21 can be elastically deformed in the same direction by overdrive, which brings the probe card 1 closer to the object to be inspected in contact with the probe 21, and interference between adjacent probes can be prevented.

[0048] (Holder 3) The holder 3 is a holding member for holding the probe unit 2 in the plane in the substantially planar direction, and for example, a metal member can be used. As shown in Fig. 3(D), the holder 3 has a concave seat groove 32 formed in a substantially square or substantially rectangular shape at a substantially central portion of the lower surface. The seat groove 32 has four seat groove protrusions 32a protruding outward in the substantially planar direction from each of the four side surfaces, a substantially flat bottom surface 32b, and a through hole 3e for inserting the probe 21 at the substantially central portion. The seat groove protrusion 32a is a substantially rectangular region for arranging the eccentric screw 31 therein. The bottom surface 32b has a fixing screw hole 26a for screw-fastening the probe unit 2, and is a fixing surface on which the bottom guide plate 22 and the middle spacer 23 fastened by the fixing screw 26 are seated to hold the probe unit 2. The bottom surface 32b has a positioning hole 51a for the positioning pin 51. The holder 3 is fastened to the probe unit 2 by a fixing screw 26 that screws in from the side of the probe unit 2.

[0049] The four seat groove protrusions 32a are arranged so that the eccentric screw 31 to be described later faces each of the four tongue pieces 23a of the middle spacer 23 seated on the bottom surface 32b and contacts the tongue piece 23a from the outside. That is, the holder 3 holds the probe unit 2 on the bottom surface 32b of the seat groove, and the side surfaces 23s1 to 23s4 of the middle spacer 23 of the held probe unit 2, more specifically, the tongue piece 23a, are pressed by the eccentric screw 31 from the outside, so as to prevent the in-plane displacement of the probe unit 2 on the bottom surface 32b of the seat groove. That is, the four side surfaces 23s1 to 23s4 of the middle spacer 23 are an example of the side surface of the support 20.

[0050] (Eccentric Screw 31) As shown in Figure 3(C), the eccentric screw 31 is a component having a shaft 312 with male threads formed on its outer circumference and a head 311 formed on the shaft 312 eccentrically with respect to the shaft 312, with the end of the head 311 furthest from the axis of the shaft indicated by the eccentricity mark M. The eccentric screw 31 is positioned such that, as shown in Figure 3(A), the axis of the shaft is perpendicular to the bottom surface 32b of the right end of the side surface 23s1 to 23s4 when viewed from a position facing the side surfaces 23s1 to 23s4 of the support 20, i.e., the middle spacer 23, and the direction extending perpendicular to the bottom surface 32b toward the bottom guide plate 22 is defined as the upward direction, and the direction extending along the bottom surface 32b of the side surfaces 23s1 to 23s4 is defined as the left-right direction, with the outer circumference of the head 311 facing each of the four tongue-shaped portions 23a of the middle spacer 23 seated on the bottom surface 32b.

[0051] In other words, the outer circumference of the heads 311 of the four eccentric screws 31, when rotated, presses from the outside onto each of the four tongue-shaped portions 23a of the middle spacer 23 when the eccentric mark M is positioned inward, i.e., towards the probe unit 2 (i.e., second state), and stops pressing onto the tongue-shaped portions 23a of the middle spacer 23 when the eccentric mark M is positioned outward, i.e., away from the probe unit 2 (i.e., first state). In other words, the eccentric screws 31 function as stoppers that can switch between a second state in which the head presses onto the support 20, thereby preventing in-plane displacement at the bottom surface 32b of the counterbore of the probe unit 2, and a first state in which the head stops pressing onto the support 20.

[0052] (Assembly Procedure for Probe Card 1) Next, the assembly procedure for probe card 1 will be described with reference to Figures 4 and 5. The top row of each figure shows a bottom view of the probe unit 2 and holder 3, the middle row shows a cross-sectional view taken along the A-A line of the bottom view, and the bottom row shows a cross-sectional view taken along the B-B line of the bottom view.

[0053] First, as shown in Figure 4(1), the support 20 is assembled using the bottom guide plate 22, middle spacer 23, top guide plate 24, and ST substrate 25, and the probe 21 is inserted, and then fastened with screws 27 to 29.

[0054] Next, as shown in Figure 4(2), the eccentric screw 31 of the holder 3 is attached to the four counterbore protrusions 32a provided in the counterbore 32, so that the eccentric mark M of the eccentric screw 31 is located on the outside. In this case, it is preferable that the eccentric screw 31 has enough slack to be turned an extra half turn or more.

[0055] Next, as shown in Figure 4(3), the probe unit 2 is positioned by inserting the positioning pin 51 through the positioning hole 51a of the bottom guide plate 22, the middle spacer 23, and the holder 3, and then the probe unit 2 is attached to the holder 3.

[0056] Next, as shown in Figure 5(4), the fixing screws 26 that fasten the probe unit 2 and the holder 3 are temporarily fastened. It is preferable to temporarily fasten them to a degree that does not apply torque.

[0057] Next, as shown in Figure 5(5), tighten the eccentric screws 31 so that the eccentric mark M is positioned on the inside, that is, on the side of the support 20. For each of the four eccentric screws 31, press from the outside against the tongue portion 23a of the side surface 23s1 to 23s4 of the middle spacer 23 of the support 20. It is preferable to tighten the eccentric screws 31 to the extent that the positioning pin 51 can be removed. This is because tilting of the probe unit 2 can be avoided by utilizing the characteristic that the positioning pin 51 is difficult to remove when the probe unit 2 is tilted.

[0058] Finally, as shown in Figure 5(6), tighten the fixing screw 26 that fastens the probe unit 2 and the holder 3. After tightening, remove the positioning pin 51.

[0059] In this way, by assembling the probe unit 2 and holder 3 of the probe card 1, it is possible to suppress misalignment of the probe unit 2 and holder 3, that is, misalignment of the probe 21, caused by tightening the fixing screws 26 during assembly.

[0060] (Summary) According to the probe card 1 of Embodiment 1 of the present invention, for example, with the eccentric screw 31 (stopper) switched to the first state, the probe unit 2 is positioned at a predetermined location on the counterbore bottom surface 32b (fixed surface). When the support 20 is screwed to the counterbore bottom surface 32b, a clockwise rotational force acts on the probe unit 2 when viewed toward the counterbore bottom surface 32b, causing the probe unit 2 to attempt to displace in the in-plane direction of the counterbore bottom surface 32b. At this time, the eccentric screw 31 is switched to the second state and the middle spacer 23 (support) is pressed by the eccentric screw 31, thus preventing the in-plane displacement of the probe unit 2. Therefore, displacement of the probe 21 due to screw fastening is suppressed.

[0061] Furthermore, according to the probe card 1, when the screws are fastened, each of the four sides of the middle spacer 23 (support) is pressed by the eccentric screws 31. As a result, the displacement of the middle spacer 23 (support) in two axial directions (i.e., in the directions of the two axes of symmetry) is prevented by the eccentric screws 31. Thus, the in-plane displacement of the probe unit 2 is prevented, and the misalignment of the probe 21 is effectively suppressed.

[0062] Furthermore, according to the probe card 1, a clockwise rotational force acts on the probe unit 2 when the screws are fastened, while the displacement of the probe unit 2 is prevented by the four eccentric screws 31 pressing against each of the four sides of the middle spacer 23 (support). Here, each of the four eccentric screws 31 presses against the portion near the right end of the corresponding side. Therefore, compared to the case where the eccentric screws 31 press against, for example, the center or the portion near the left end in the left-right direction of the side, the counterclockwise rotational force acting on the middle spacer 23 (support) due to the pressing of the eccentric screws 31 increases. As a result, the required pressing force of the eccentric screws 31 is reduced.

[0063] Furthermore, according to the probe card 1, the eccentric screw 31 is screwed into the holder 3 by screwing in from the side of the counterbore bottom surface 32b. For example, when the probe unit 2 is positioned at a predetermined location on the counterbore bottom surface 32b, the eccentric screw 31 switches to the first state by rotating. When the support 20 is screwed to the fixed surface, the eccentric screw 31 switches to the second state by rotating. In this way, the stopper can be easily switched between the first and second states simply by rotating the eccentric screw 31.

[0064] Furthermore, according to the probe card 1, the probe unit 2 and the eccentric screw 31 are positioned on the bottom surface 32b of the counterbore (recess) formed in the holder 3. Therefore, the length of the probe unit 2 and the holder 3 in the direction perpendicular to the bottom surface 32b of the counterbore, and consequently the length of the entire probe card 1 in the direction perpendicular to the bottom surface 32b of the counterbore, is suppressed. Thus, situations in which the probe card 1 is damaged due to physical interference between the probe card 1 and the object being inspected are avoided.

[0065] Furthermore, according to the probe card 1, when multiple probe units 2 are screw-fastened to a single holder 3, the displacement of the probe 21 due to screw fastening differs for each probe unit 2, but this configuration suppresses such a situation.

[0066] Furthermore, according to the probe card 1, the multiple probe units 2 are arranged such that the eccentric screws 31 of different probe units 2 do not overlap with each other. Therefore, the in-plane displacement of each probe unit 2 is reliably prevented by the four eccentric screws 31.

[0067] Furthermore, according to the probe card 1, since multiple probe units 2 are arranged so that the sides of their middle spacers 23 (supports) face each other, the required length of the holder 3 in the direction in which the side extends along the counterbore bottom surface 32b is reduced. For example, if multiple probe units 2 are arranged in the vertical direction, the required length of the holder 3 in the horizontal direction is reduced, and if multiple probe units 2 are arranged in the horizontal direction, the required length of the holder 3 in the vertical direction is reduced. Therefore, the density of multiple probe units provided in a single holder can be increased.

[0068] Furthermore, according to the probe card 1, the two eccentric screws 31 corresponding to the two opposing sides overlap when viewed in the direction in which the sides extend along the counterbore bottom surface 32b. Therefore, compared to the case where the two eccentric screws 31 do not overlap, the spacing between the probe units 2 in the arrangement direction of the probe units 2, i.e., in the direction in which the two sides face each other, becomes smaller. Consequently, the density of multiple probe units provided in a single holder can be further increased.

[0069] Next, embodiments 2 to 6 of the present invention will be described. In the following description, redundant explanations of the same configuration as the probe card 1 in Figure 1 (embodiment 1 of the present invention) will be omitted.

[0070] Embodiment 1 of the present invention describes an example in which the stopper is equipped with an eccentric screw 31.

[0071] [Embodiment 2] Embodiment 2 differs from Embodiment 1 in that, as shown in Figure 7, the stopper includes a slide block 31b1, which is a first displacement member, instead of an eccentric screw 31.

[0072] Figure 7 is a cross-sectional view showing the main part of one example configuration of the probe card 1 according to Embodiment 2 of the present invention, and corresponds to an enlarged view of the stopper portion in Figure 3(B) of Embodiment 1. However, unlike Figure 3(B), in Figure 7 the side of the object to be inspected is shown on the upper side of the figure, and the side of the ST substrate 25 is shown on the lower side of the figure.

[0073] In the second embodiment, a sloped surface S2 is formed on the side surface 23s2 of the tongue portion 23a of the middle spacer 23. The sloped surface S2 is inclined so as it approaches the stopper side as it goes toward the bottom surface 32b of the counterbore 32. In other words, the middle spacer 23 of the support 2 has a sloped surface S2 that extends outward from the support 2 as it goes toward the bottom surface 32b, which is the fixed surface. The holder 3 has a shape in which the inner circumferential side surface of the counterbore 32 extends perpendicularly to the bottom surface 32b.

[0074] The stopper includes a slide block 31b1 positioned in the region between the middle spacer 23 and the inner circumferential side surface of the counterbore 32, and a slide block fixing screw 31b2 that screws into the holder 3.

[0075] The slide block 31b1 is a block member having a substantially trapezoidal cross-section, a substantially flat bottom surface facing the counterbore bottom surface 32b, and an upper surface that is wider than the bottom surface. The upper surface of the slide block 31b1 also has a recess into which the head of the screwed slide block fixing screw 31b2 can be fitted, and the screw head is prevented from protruding from the upper surface of the slide block 31b1 toward the object to be inspected.

[0076] The slide block 31b1 has an outer surface that contacts the inner circumferential surface of the counterbore 32 and is perpendicular to the bottom surface 32b, and an inner surface that contacts the inclined surface S2 of the tongue portion 23a of the middle spacer 23 and is inclined surface S1, and is configured to press the middle spacer 23 in the in-plane direction of the bottom surface 32b via the inclined surface S1 while moving in the vertical direction of the bottom surface 32b.

[0077] In other words, the stopper has an inclined surface S1 that contacts the inclined surface S2, and includes a slide block 31b1 that, as the inclined surface S1 is displaced toward the bottom surface 32b in the vertical direction of the bottom surface 32b, slides against the inclined surface S2 and presses against the inclined surface S2 in the in-plane direction of the bottom surface 32b.

[0078] The slide block fixing screw 31b2 is a component that fixes the slide block 31b1 by screwing it into the holder 3 from the side of the object to be inspected, perpendicular to the counterbore bottom surface 32b. When screwed into the holder 3, the slide block fixing screw 31b2 has a shape that allows the screw head to press and displace the slide block 31b1 toward the bottom surface 32b in a direction perpendicular to the bottom surface 32b.

[0079] In other words, when the slide block fixing screw 31b2 is screwed into the holder 3, the slide block 31b1 moves toward the counterbore bottom surface 32b and presses the middle spacer 23 inward via the inclined surface S1 (second state), and when it is not pressed by the slide block fixing screw 31b2, it stops pressing on the middle spacer 23 (first state). In short, the slide block 31b1 can switch between a second state in which it prevents in-plane displacement of the counterbore bottom surface 32b of the probe unit 2 by pressing the support 20 inward as the slide block fixing screw 31b2 rotates, and a first state in which it stops pressing on the support 20.

[0080] Thus, in the second embodiment, the tongue portion 23a of the middle spacer 23 forms an inclined surface S2 that extends toward the side away from the middle spacer 23 toward the bottom surface 32b, and the inner circumferential side surface of the counterbore 32 of the holder 3 has a shape that extends perpendicular to the bottom surface 32b. The slide block 31b1 has an outer side surface that contacts the inner circumferential side surface of the counterbore 32 that is perpendicular to the bottom surface 32b, and the inclined surface S1 of the inner side surface that contacts the tongue portion 23a of the middle spacer 23 contacts the inclined surface S2 of the tongue portion 23a, and has a shape that allows the middle spacer 23 to be pressed inward in the in-plane direction of the bottom surface 32b via the inclined surface S2 while moving in the vertical direction. Therefore, as the slide block fixing screw 31b2 is screwed into the holder 3, the slide block 31b1 moves toward the counterbore bottom surface 32b and presses the tongue portion 23a of the middle spacer 23 inward via the inclined surface S2, thereby preventing in-plane displacement of the probe unit 2 on the counterbore bottom surface 32b. Furthermore, since the pressing force on the probe unit 2 can be adjusted by the amount the slide block fixing screw 31b2 is screwed in via the inclined surface S2, misalignment of the probe 21 can be reliably suppressed.

[0081] In the second embodiment, the slide block 31b1 is an example of the first displacement member, the inclined surface S2 formed on the side surface of the middle spacer 23 is an example of the first inclined surface, and the inclined surface S1 forming the side surface of the slide block 31b1 is an example of the first contact portion.

[0082] [Embodiment 3] This embodiment differs from Embodiment 2 in that, as shown in Figure 8, the stopper is provided with a countersunk screw 31c instead of a slide block 31b1 as the first displacement member.

[0083] Figure 8 is a cross-sectional view showing the main part of one example configuration of the probe card 1 according to Embodiment 3 of the present invention, and corresponds to an enlarged view of the stopper portion in Figure 3(B) of Embodiment 1. However, in Figure 8, unlike Figure 3(B), the side of the object to be inspected is shown on the upper side of the figure, and the side of the ST substrate 25 is shown on the lower side of the figure.

[0084] In Embodiment 3, the middle spacer 23, similar to Embodiment 2, has a side surface of the tongue portion 23a facing the stopper that forms a slope S2, and the holder 3 has a shape in which the inner circumferential side surface of the counterbore 32 extends perpendicularly toward the bottom surface 32b.

[0085] The stopper is positioned in the region between the middle spacer 23 and the inner circumferential side surface of the counterbore 32, and includes a countersunk screw 31c that is screwed into the holder 3 from the side of the object to be inspected, perpendicular to the bottom surface 32b of the counterbore. The countersunk screw 31c has a flat upper surface on the screw head 31c1, and the outer circumference of the seating surface forms a conical slope S1 that decreases in outer diameter toward the shaft. When screwed into the holder 3, the slope S1 of the outer circumference of the seating surface contacts the slope S2 of the middle spacer 23, and has a shape that allows it to press the middle spacer 23 in the in-plane direction of the bottom surface 32b via the slope S2 while moving in the vertical direction of the bottom surface 32b. Furthermore, when the countersunk screw 31c is screwed into the holder 3, the screw head 31c1 does not protrude from the counterbore 32 toward the object to be inspected.

[0086] In other words, in Embodiment 3, the countersunk screw 31c is an example of the first displacement member, the inclined surface S2 formed on the side surface of the middle spacer 23 is an example of the first inclined surface, and the inclined surface S1 formed by the screw head 31c1 of the countersunk screw 31c is an example of the first contact portion.

[0087] As the countersunk screw 31c is screwed into the holder 3, it moves toward the countersunk bottom surface 32b and contacts the inclined surface S2 of the middle spacer 23 via the inclined surface S1 on the outer circumference of the seating surface, thereby pressing the middle spacer 23 inward via the inclined surface S2 (second state). When it does not contact the inclined surface S2, it stops pressing on the middle spacer 23 (first state). In other words, the countersunk screw 31c can be switched between a second state in which it prevents in-plane displacement of the countersunk bottom surface 32b of the probe unit 2 by pressing the support 20 inward through rotation, and a first state in which it stops pressing on the support 20.

[0088] As described above, in Embodiment 3, the countersunk screw 31c, which is screwed into the countersunk bottom surface 32b from the side of the object to be inspected, has a conical inclined surface S1 on the outer circumference of the seating surface portion, which decreases in outer diameter toward the holder 3 side. The inclined surface S1 on the outer circumference of the seating surface portion contacts the inclined surface S2 of the middle spacer 23, and has a shape that allows the middle spacer 23 to be pressed through the inclined surface S2. Therefore, as the countersunk screw 31c is screwed in, the inclined surface S1 on the outer circumference of the seating surface portion moves toward the holder 3 side and contacts the inclined surface S2, and the middle spacer 23 is pressed through the inclined surface S2, thereby preventing in-plane displacement of the probe unit 2 at the countersunk bottom surface 32b. Furthermore, since the pressing force on the probe unit 2 can be adjusted by the amount the countersunk screw 31c is screwed in, the positional displacement of the probe 21 can be reliably suppressed with a simple configuration.

[0089] [Embodiment 4] This embodiment differs from Embodiment 1 in that, as shown in Figure 9, the stopper is equipped with a slide block 31d1 instead of an eccentric screw 31.

[0090] Figure 9 is a cross-sectional view showing the main part of one example configuration of the probe card 1 according to Embodiment 4 of the present invention, and corresponds to an enlarged view of the stopper portion in Figure 3(B) of Embodiment 1. However, in Figure 9, unlike Figure 3(B), the side of the object to be inspected is shown on the upper side of the figure, and the side of the ST substrate 25 is shown on the lower side of the figure.

[0091] In Embodiment 4, the four sides of the middle spacer 23 extend perpendicularly to the counterbore bottom surface 32b of the holder 3, and a sloped surface S2 is formed on the inner circumferential side surface of the counterbore 32 of the holder 3. The sloped surface S2 is inclined to move towards the stopper side as it approaches the bottom surface 32b of the counterbore 32. In other words, the holder 3 is located on the outer circumference of the middle spacer 23 and has a sloped surface S2 that moves towards the middle spacer 23 as it approaches the bottom surface 32b.

[0092] The stopper includes a slide block 31d1 positioned in the region between the middle spacer 23 and the inner circumferential side surface of the counterbore 32, and a slide block fixing screw 31d2 that screws into the holder 3.

[0093] The slide block 31d1 is a block member having a substantially trapezoidal cross-sectional shape, a substantially flat lower surface facing the counterbore bottom surface 32b, and an upper surface that is wider than the lower surface. The upper surface of the slide block 31d1 also has a recess into which the head of the screwed slide block fixing screw 31d2 can be fitted, and the screw head is prevented from protruding from the upper surface of the slide block 31d1 toward the object to be inspected.

[0094] The slide block 31d1 has an inner surface that contacts the side surface of the middle spacer 23 and is perpendicular to the bottom surface 32b, and an outer surface that contacts the inner circumferential surface of the counterbore 32 and is inclined S1, and is capable of pressing the middle spacer 23 in the in-plane direction of the bottom surface 32b via the inclined surface S1 while moving in the vertical direction.

[0095] In other words, the stopper is positioned between the middle spacer 23 and the inclined surface S2, and has an inclined surface S1 that contacts the inclined surface S2. As the stopper is displaced toward the bottom surface 32b in the vertical direction of the bottom surface 32b, the inclined surface S1 slides along the inclined surface S2, displacing toward the middle spacer 23 and pressing the middle spacer 23 toward the in-plane direction of the bottom surface 32b. The inclined surface S2 of the holder 3 is an example of a second inclined surface, the inclined surface S1 of the slide block 31d1 is an example of a second contact portion, and the slide block 31d1 is an example of a second displacement member.

[0096] The slide block fixing screw 31d2 is a component that fixes the slide block 31d1 by screwing it into the holder 3 from the side of the object to be inspected, perpendicular to the counterbore bottom surface 32b. When screwed into the holder 3, the slide block fixing screw 31d2 has a shape that allows the screw head to press and displace the slide block 31d1 toward the bottom surface 32b in the direction perpendicular to the bottom surface 32b.

[0097] In other words, when the slide block fixing screw 31d2 is screwed into the holder 3, the slide block 31d1 moves toward the counterbore bottom surface 32b and presses the middle spacer 23 inward via the inclined surface S1 (second state), and when it is not pressed by the slide block fixing screw 31d2, it stops pressing on the middle spacer 23 (first state). In short, the slide block 31d1 can switch between a second state in which it prevents in-plane displacement of the counterbore bottom surface 32b of the probe unit 2 by pressing the support 20 inward as the slide block fixing screw 31d2 rotates, and a first state in which it stops pressing on the support 20.

[0098] Thus, in Embodiment 4, the side surface 23s2 of the middle spacer 23 extends perpendicularly to the bottom surface 32b of the holder 3 toward the bottom surface 32b, and the inner circumferential side surface of the counterbore 32 of the holder 3 forms a slope S2 that extends so as to widen toward the side facing the middle spacer 23. The slide block 31d1 has an inner side surface that contacts the middle spacer 23 that is perpendicular to the bottom surface 32b, and an outer side surface that contacts the slope S2 of the inner circumferential side surface of the counterbore 32 that contacts the inner circumferential side surface of the counterbore 32 at a slope S1, and has a shape that allows the middle spacer 23 to be pressed inward in the in-plane direction of the bottom surface 32b via the slope S1 while moving in the direction perpendicular to the bottom surface 32b. Therefore, as the slide block fixing screw 31d2 is screwed into the holder 3, the slide block 31d1 moves toward the counterbore bottom surface 32b and presses the side surface 23s2 of the middle spacer 23 inward via the inclined surface S1, thereby preventing in-plane displacement of the probe unit 2 at the counterbore bottom surface 32b. Furthermore, since the pressing force on the probe unit 2 can be adjusted by the amount the slide block fixing screw 31d2 is screwed in via the inclined surface S1, misalignment of the probe 21 can be reliably suppressed.

[0099] [Embodiment 5] This embodiment differs from Embodiment 1 in that, as shown in Figures 10 and 11, the stopper includes a slide block 31e1 and a stationary block 31e2 instead of an eccentric screw 31.

[0100] Figure 10 shows the main parts of one example configuration of the probe card 1 according to Embodiment 5 of the present invention, where (A) corresponds to Figure 3(A) of Embodiment 1, and (B) to (C) correspond to enlarged views of the stopper portion in the cross-sectional view taken along the A-A line in (A). However, unlike Figure 3(B), in Figure 10 the side of the object to be inspected is shown on the upper side of the figure, and the side of the ST substrate 25 is shown on the lower side of the figure.

[0101] In Embodiment 5, the middle spacer 23 has two protrusions 23c1 and 23c2 that project outward from the opposing sides 22s2 and 22s4 of the bottom guide plate 22 in the direction extending from the opposing sides 23s1 and 23s3 when viewed vertically, instead of the four tongue-shaped portions 23a on each side. The protrusions 23c1 and 23c2 each have two substantially rectangular through holes 23b1, 23b2 and 23b3 and 23b4 in the direction extending from the sides 23s2 and 23s4.

[0102] The stopper includes a slide block 31e1 and a stationary block 31e2 that can be fitted into four through holes 23b and are slidable via inclined surfaces S1 and S2, and a slide block fixing screw 31e3 that is screwed into the holder 3 from the side of the object to be inspected, perpendicular to the counterbore bottom surface 32b, to fix the slide block 31e1 and the stationary block 31e2.

[0103] The stationary block 31e2 has a flat shape with its lower surface positioned on the counterbore bottom surface 32b, and its upper surface opposite to the lower surface has a slope S2 which increases in distance from the inner surface as it moves away from the inner surface that presses against the through hole 23b, from the end facing the inner surface that presses against the through hole 23b to the opposite end. The slide block 31e1 has a slidable slope S1 on its lower surface that extends along the slope S2 of the upper surface of the stationary block 31e2, and is a block member having a substantially flat upper surface and substantially flat side surfaces that can contact and press against the opposing inner surface of the through hole 23b. The slide block 31e1 and stationary block 31e2 are provided with through holes H1 and H2 for the slide block fixing screw 31e3 to pass through from the upper surface to the lower surface. The slide block fixing screw 31e3 is screwed into the holder 3 so that the slide block 31e1 and stationary block 31e2 can be clamped and pressed between the screw head and the holder 3.

[0104] In other words, the stopper has a stationary block 31e2 and a sliding block 31e1 arranged in order from the side of the bottom surface 32b in the vertical direction of the bottom surface 32b. The stationary block 31e2 has an inclined surface S2 that approaches the middle spacer 23 as it moves toward the side of the bottom surface 32b. The sliding block 31e1 has an inclined surface S1 formed parallel to the inclined surface S2 and in surface contact with the inclined surface S2. As the sliding block 31e1 is displaced toward the side of the bottom surface 32b in the vertical direction of the bottom surface 32b, the inclined surface S1 slides along the inclined surface S2, displacing toward the side of the middle spacer 23 and pressing the middle spacer 23 toward the in-plane direction of the bottom surface 32b. The stationary block 31e2 and the sliding block 31e1 are examples of a stationary member and a third displacement member, respectively. The inclined surface S2 of the stationary block 31e2 is an example of a fourth inclined surface, and the inclined surface S1 of the sliding block 31e1 is an example of a third inclined surface.

[0105] As shown in Figures 11(A) to (B), the diameter a1 of the through hole H1 of the slide block 31e1 is larger than the diameter a2 of the through hole H2 of the stationary block 31e2. That is, when the slide block fixing screw 31e3 is screwed into the holder 3 from the top surface of the slide block 31e1, the slide block 31e1 is made movable along the slope S2 formed by the top surface of the stationary block 31e2 in a direction perpendicular to the axis of the slide block fixing screw 31e3. Also, as shown in Figure 10(C), the through hole 23b into which the slide block 31e1 and the stationary block 31e2 are fitted is eccentric such that the position of the center line is offset from the center line of the slide block fixing screw hole, making it easier for the slide block 31e1 to press against the inner side surface of the opposing through hole 23b.

[0106] In other words, when the slide block fixing screw 31e3 is screwed into the holder 3 from the top surface, the slide block 31e1 moves toward the counterbore bottom surface 32b and slides along the slope S2 formed by the top surface of the stationary block 31e2, moving toward the inner side surface of the opposing through hole 23b and pressing against the inner side surface (second state). When not pressed by the slide block fixing screw 31e3, it stops pressing against the inner side surface (first state). In short, the slide block 31e1 can be switched between a second state in which it prevents in-plane displacement of the counterbore bottom surface 32b (fixed surface) of the probe unit 2 by pressing against the support 20 due to the rotation of the slide block fixing screw 31e3, and a first state in which it stops pressing against the support 20.

[0107] Thus, in Embodiment 5, the middle spacer 23 has a through hole 23b into which a stopper can be fitted, and in the through hole 23b, the stationary block 31e2 has its lower surface positioned on the counterbore bottom surface 32b, and its upper surface opposite to the lower surface has a slope S2. The slide block 31e1 is positioned on the upper surface of the stationary block 31e2, and its side surface is shaped to press against the opposing inner side surface of the through hole 23b, while its lower surface is a slidable slope S1 that extends along the slope S2 of the upper surface of the stationary block 31e2. The slope S2 of the upper surface of the stationary block 31e2 increases in distance from the lower surface as it moves away from the inner side surface of the through hole 23b from the end facing the inner side surface to the opposite end. Therefore, as the slide block fixing screw 31e3 is screwed in, the slide block 31e1 moves toward the counterbore bottom surface 32b, sliding along the slope and pressing against the inner side surface of the opposing through hole 23b, thereby preventing in-plane displacement of the probe unit 2 on the counterbore bottom surface 32b. Furthermore, since the pressing force on the probe unit 2 can be adjusted by the amount the slide block fixing screw 31e3 is screwed in, misalignment of the probe 21 can be reliably suppressed.

[0108] [Embodiment 6] This embodiment differs from Embodiment 2 in that, as shown in Figure 12, the stopper is equipped with a fixing screw 31f instead of a slide block 31b1 as the first displacement member.

[0109] Figure 12 shows the main parts of one example configuration of the probe card 1 according to Embodiment 6 of the present invention, where (A) corresponds to Figure 3(A) of Embodiment 1, and (B) corresponds to an enlarged view of the stopper portion in the cross-sectional view taken along the A-A line in (A). However, unlike Figure 3(B), in Figure 12 the side of the object to be inspected is shown on the upper side of the figure, and the side of the ST substrate 25 is shown on the lower side of the figure.

[0110] In Embodiment 6, the middle spacer 23 has four through holes 23b similar to Embodiment 5, but unlike Embodiment 5, the inner side surface of the through hole 23b facing the fixing screw 31f has a tapered portion that extends toward the fixing screw 31f toward the counterbore bottom surface 32b and widens toward the fixing screw 31f, forming a slope S2 with a smaller inner diameter.

[0111] The stopper is designed to be fitted into the through hole 23b and includes a fixing screw 31f that screws into the holder 3 perpendicular to the counterbore bottom surface 32b from the side of the object to be inspected. The fixing screw 31f has a cylindrical shape with a flat top surface of the screw head and a seating surface wider than the shaft. When screwed into the holder 3, the seating surface contacts the inclined surface S2 on the inner side of the through hole 23b and has a shape that allows it to press the middle spacer 23 in the in-plane direction of the bottom surface 32b via the inclined surface S2 while moving in the vertical direction. Furthermore, when the fixing screw 31f is screwed into the holder 3, the screw head does not protrude from the counterbore 32 towards the object to be inspected.

[0112] In other words, in embodiment 6, the fixing screw 31f is an example of the first displacement member, the inclined surface S2 formed on the side surface of the middle spacer 23 is an example of the first inclined surface, and the screw head 31f1 of the fixing screw is an example of the first contact portion.

[0113] In other words, when the fixing screw 31f is screwed into the holder 3, it moves toward the counterbore bottom surface 32b and contacts the inclined surface S2 of the through hole 23b with its screw head 31f1, pressing the middle spacer 23 inward via the inclined surface S2 (second state). When it does not contact the inclined surface S2, it stops pressing on the middle spacer 23 (first state). In short, the fixing screw 31f can be switched between a second state, in which rotation presses the support 20 inward, thereby preventing in-plane displacement of the counterbore bottom surface 32b of the probe unit 2, and a first state, in which it stops pressing on the support 20.

[0114] As described above, in Embodiment 6, the middle spacer 23 has a through hole 23b into which a fixing screw 31f can be inserted. The through hole 23b has a tapered portion on its inner side facing the fixing screw 31f, which extends toward the fixing screw 31f toward the counterbore bottom surface 32b and forms a slope S2 with a smaller inner diameter. The fixing screw 31f, which is screwed in perpendicular to the counterbore bottom surface 32b from the side of the object to be inspected, has a wide screw head 31f1 that contacts the slope S2 of the tapered portion of the through hole 23b, and has a shape that can press the tapered portion through the slope S2. Therefore, as the fixing screw 31f is screwed in, the screw head 31f1 moves toward the holder 3 and contacts the slope S2, and can press the tapered portion on the inner side of the opposing through hole 23b through the slope S2, thereby preventing in-plane displacement of the probe unit 2 on the counterbore bottom surface 32b. Furthermore, since the pressing force on the probe unit 2 can be adjusted by the amount the fixing screw 31f is screwed in, misalignment of the probe 21 can be reliably suppressed.

[0115] (Modification) The method of arranging the probe unit 2 in the holder 3 is not limited to the configuration example of the probe card 1 according to Embodiment 1 of the present invention. For example, as shown in Figure 6(2), four probe units 2A, 2B, 2C, and 2D may be arranged such that two eccentric screws 31 corresponding to two opposing sides overlap each other when viewed in the direction in which the sides extend along the counterbore bottom surface 32b (fixed surface). With this arrangement, in the holder 3, the spacing D1 between probe units 2A and 2B in the direction perpendicular to the opposing sides 23s1A and 23s3B can be reduced, and the spacing D2 between probe units 2A and 2C in the direction perpendicular to the opposing sides 23s2A and 23s4C can be reduced, thus enabling an efficient two-dimensional arrangement.

[0116] (Probe) In the description of probe card 1, an example of a vertical probe 21 configuration in which the probe 21 is connected perpendicularly to a wiring board such as an ST substrate 25 has been described. However, the invention is not limited to this, and other probes such as cantilever probes in which a needle made of tungsten or the like is directly attached to the wiring board may be used. For example, by using a cantilever probe, a narrow-pitch compatible probe card with good contact characteristics with aluminum pads, etc., can be provided at low cost.

[0117] Furthermore, in embodiments 5 and 6, examples were described in which the four inner surfaces pressed by the stopper 31 in the four through holes 23b provided in the middle spacer 23 are surfaces with different normal vectors depending on the position of the through holes 23b. However, the invention is not limited to this, and any of the surfaces may have the same normal vector. For example, by pressing the inner surfaces of the through holes 23b that have the same normal vector and extend in a direction perpendicular to the direction in which the opposing surfaces 23s1 and 23s3 of the middle spacer 23 extend with the stopper 31, the displacement of the surfaces 23s1 and 23s3 of the middle spacer 23 in the direction in which they extend can be adjusted. Alternatively, by pressing the inner surfaces of the through holes 23b that have the same normal vector and extend in a direction perpendicular to the direction in which the opposing surfaces 23s1 and 23s3 of the middle spacer 23 extend with the stopper 31, the displacement of the surfaces 23s1 and 23s3 of the middle spacer 23 in the direction perpendicular to the direction in which they extend can be adjusted.

[0118] The present invention is not limited to the embodiments described above, and includes various modifications to the embodiments described above, without departing from the spirit of the invention.

[0119] 1 Probe card 2 Probe unit 20 Support 21 Probe 3 Holder 31 Eccentric screw (stopper) 32 Counterbore 32b Counterbore bottom surface (fixed surface) 31b1 Slide block (first displacement member) 31c Countersunk screw (first displacement member) 31d1 Slide block (second displacement member) 31e1 Slide block (third displacement member) 31e2 Stationary block (stationary member) 31f Fixing screw (first displacement member) 31f1 Screw head (first contact part) S1 Inclined surface (first contact part, second contact part, third inclined surface) S2 Inclined surface (first inclined surface, second inclined surface, fourth inclined surface)

Claims

1. A probe card comprising: a probe unit having a probe and a support for the probe; a holder having a fixed surface to which the support is screw-fastened, thereby holding the probe unit; and a stopper provided on the holder, which is switchable between a second state in which pressing the support during screw fastening prevents displacement of the probe unit in the in-plane direction of the fixed surface, and a first state in which pressing against the support is stopped.

2. The probe card according to claim 1, wherein the support is formed in a quadrilateral shape that is a square or rectangle when viewed in a direction perpendicular to the fixed surface, and the probe card comprises four stoppers that press on four sides corresponding to each of the four sides of the support.

3. The probe card according to claim 2, wherein the screw fastening screw is threaded from the support side to the holder side, and each of the four stoppers is provided on the right side of the side when viewed from a position facing the side, with the direction extending perpendicular to the fixing surface toward the support side being the vertical direction upward, and the direction extending along the fixing surface of the side being the left-right direction.

4. The probe card according to claim 1, wherein the stopper has an eccentric screw having a shaft with male threads formed on its outer circumference and a head formed on the shaft eccentrically with respect to the shaft, the eccentric screw is screwed into the holder with the axis of the shaft perpendicular to the fixed surface, and the probe card switches between a second state in which the head presses against the support and a first state in which the head stops pressing against the support by rotating.

5. The probe card according to claim 1, wherein the stopper is disposed on the fixed surface, and the holder has a recess formed therein whose bottom surface is the fixed surface.

6. The probe card according to claim 1, wherein the probe unit is a probe card in which a plurality of probe units are provided in one holder.

7. The probe card according to claim 2, wherein a plurality of probe units are provided in one holder, and the plurality of probe units are arranged such that the stoppers corresponding to each of them do not overlap each other when viewed in a direction perpendicular to the fixed surface.

8. A probe card according to claim 3, wherein a plurality of probe units are provided in one holder, and the plurality of probe units are arranged so that their respective sides face each other.

9. A probe card according to claim 8, wherein the plurality of probe units are arranged such that two stoppers corresponding to two opposing sides overlap in a view in the direction in which the sides extend along the fixed surface.

10. A probe card according to claim 1, wherein the support has a first inclined surface that extends outward from the support as it approaches the fixed surface, and the stopper has a first contact portion that contacts the first inclined surface, and the probe card comprises a first displacement member that, as it is displaced toward the fixed surface in the direction perpendicular to the fixed surface, the first contact portion slides along the first inclined surface and presses the first inclined surface in the in-plane direction of the fixed surface.

11. A probe card according to claim 1, wherein the holder has a second inclined surface located on the outer circumference of the support and approaching the support as it moves toward the fixed surface, and the stopper has a second contact portion disposed between the support and the second inclined surface and in contact with the second inclined surface, and the second displacement member is provided which, as it is displaced toward the fixed surface in the direction perpendicular to the fixed surface, the second contact portion slides along the second inclined surface, thereby displacing toward the support and pressing the support toward the in-plane direction of the fixed surface.

12. The probe card according to claim 1, wherein the stopper has a stationary member and a third displacement member arranged in order from the side of the fixed surface in the direction perpendicular to the fixed surface, the stationary member has a fourth inclined surface that approaches the support as it moves toward the side of the fixed surface, the third displacement member has a third inclined surface formed parallel to the fourth inclined surface and in surface contact with the fourth inclined surface, and as the probe card is displaced toward the side of the fixed surface in the direction perpendicular to the fixed surface, the third inclined surface slides along the fourth inclined surface, thereby displacing toward the support and pressing the support toward the in-plane direction of the fixed surface.

Images