Component mounting machine and mounting head cleaning method

Abstract

A mounting head 3 comprises: a shaft support member 31 (first supply portion) having a branch passage 312 (first supply passage); an outer ring member 34 (second supply portion) comprising a positive pressure supply passage 341 (second supply passage); and a mechanical valve 32 (switching valve) that switches a supply passage that communicates with a nozzle communication passage Tn between the branch passage 312 and the positive pressure supply passage 341. Negative pressure can be supplied to the nozzle 5 by allowing the branch passage 312 to communicate with the nozzle communication passage Tn, and positive pressure can be supplied to the nozzle 5 by allowing the positive pressure supply passage 341 to communicate with the nozzle communication passage Tn. With this configuration, foreign matter adhering to the branch passage 312 sometimes remains without being discharged, as discussed above. In response to this, the branch passage 312 is cleaned by allowing the branch passage 312 to which positive pressure is being supplied to communicate with the nozzle communication passage Tn to generate an air flow that flows from the branch passage 312 into the nozzle communication passage Tn and passes through the nozzle communication passage Tn.

Description

Component mounting machine and method for cleaning a mounting head

[0001] The present invention relates to a technique for supplying negative pressure and positive pressure to a nozzle used for component mounting, and more particularly to a technique for cleaning a supply passage that communicates with the nozzle to supply negative pressure.

[0002] Patent Document 1 discloses a technique for supplying negative pressure and positive pressure to a suction nozzle attached to the tip of a nozzle shaft. That is, a negative pressure supply passage (second negative pressure supply passage) into which negative pressure is introduced, a positive pressure supply passage (second positive pressure supply passage) into which positive pressure is introduced, and a mechanical valve for switching the supply passage that communicates with the nozzle shaft among the negative pressure supply passage and the positive pressure supply passage are provided. When the negative pressure supply passage is communicated with the nozzle shaft, negative pressure is supplied to the suction nozzle, and the component is adsorbed by the suction nozzle. Also, when the positive pressure supply passage is communicated with the nozzle shaft, positive pressure is supplied to the suction nozzle, and the component is detached from the suction nozzle.

[0003] WO2017 / 056293 JP64,528,32

[0004] By the way, foreign matter may be sucked into the suction nozzle along with the supply of negative pressure to the suction nozzle. The foreign matter thus sucked adheres to the nozzle shaft, the negative pressure supply passage, or the positive pressure supply passage. Among these, in the nozzle shaft and the positive pressure supply passage, the positive pressure supplied at the time of component detachment appropriately discharges the foreign matter from the suction nozzle. On the other hand, the foreign matter adhering to the negative pressure supply passage remains without being discharged.

[0005] The present invention has been made in view of the above problems, and an object thereof is to enable removal of foreign matter from a supply passage that supplies negative pressure to a nozzle attached to the tip of a nozzle shaft.

[0006] The component mounting machine according to the present invention comprises a nozzle shaft having a nozzle mounting section to which a nozzle is detachably attached and a nozzle communication passage communicating with the nozzle mounted on the nozzle mounting section; a first supply section having a first supply passage to which negative or positive pressure is supplied; a second supply section having a second supply passage to which positive pressure is supplied; a switching valve for switching between the first and second supply passages that communicate with the nozzle communication passage; and a control unit for controlling the switching valve. The control unit connects the first supply passage, to which negative pressure is supplied, to the nozzle communication passage and supplies negative pressure to the nozzle mounted on the nozzle mounting section, thereby attracting the component with the nozzle; connects the second supply passage to the nozzle communication passage and supplies positive pressure to the nozzle, thereby separating the component from the nozzle mounted on the nozzle mounting section; and connects the first supply passage, to which positive pressure is supplied, to the nozzle communication passage and generates an airflow that flows from the first supply passage into the nozzle communication passage and passes through the nozzle communication passage, thereby cleaning the first supply passage.

[0007] The mounting head cleaning method according to the present invention is a mounting head cleaning method for a mounting head having a nozzle shaft having a nozzle mounting section to which a nozzle is detachably attached and a nozzle communication passage communicating with a nozzle attached to the nozzle mounting section, a first supply section having a first supply passage to which negative or positive pressure is supplied, a second supply section having a second supply passage to which positive pressure is supplied, and a switching valve for switching between the first supply passage and the second supply passage that communicates with the nozzle communication passage, wherein the first supply passage to which positive pressure is supplied is connected to the nozzle communication passage, and an airflow is generated that flows from the first supply passage into the nozzle communication passage and passes through the nozzle communication passage, thereby cleaning the first supply passage.

[0008] In the present invention (component mounting machine and mounting head cleaning method) configured as described above, the mounting head includes a first supply unit having a first supply passage, a second supply unit having a second supply passage, and a switching valve for switching between the first supply passage and the supply passage that communicates with the nozzle communication passage. Negative pressure can be supplied to the nozzle by connecting the first supply passage to the nozzle communication passage, and positive pressure can be supplied to the nozzle by connecting the second supply passage to the nozzle communication passage. In this configuration, as described above, foreign matter adhering to the first supply passage sometimes remained without being discharged. In contrast, in the present invention, the first supply passage is cleaned by connecting the first supply passage, to which positive pressure is supplied, to the nozzle communication passage, thereby generating an airflow that flows from the first supply passage into the nozzle communication passage and passes through the nozzle communication passage. This cleaning allows foreign matter adhering to the first supply passage to be discharged to the outside via the nozzle communication passage. In this way, it is possible to remove foreign matter from the first supply passage that supplies negative pressure to the nozzle attached to the tip of the nozzle shaft.

[0009] Furthermore, the component mounting machine may be configured to include a main shaft extending in the longitudinal direction and having a main supply passage, with a plurality of nozzle shafts arranged circumferentially around the main shaft, and a plurality of first supply passages arranged circumferentially around the main shaft corresponding to each of the plurality of nozzle shafts, with each of the plurality of first supply passages communicating with the nozzle communication passage of the corresponding nozzle shaft and the main supply passage, and negative or positive pressure being supplied to the plurality of first supply passages via the main supply passage. In such a configuration, the plurality of first supply passages can be cleaned by supplying positive pressure to them.

[0010] Alternatively, the component mounting machine may be configured such that multiple switching valves are arranged circumferentially around the main shaft to correspond to multiple nozzle shafts, and the supply of negative or positive pressure from a first supply passage to the nozzle shafts and the supply of positive pressure from a second supply passage to the nozzle shafts are performed via the switching valves. In such a configuration, since both positive pressure from the first supply passage and positive pressure from the second supply passage are supplied to the switching valves, it is possible to reliably discharge any foreign matter adhering to the switching valves to the outside by positive pressure.

[0011] Furthermore, the component mounting machine may be configured to include a rotating block that can rotate around the main shaft while holding multiple nozzle shafts and multiple switching valves, with multiple first supply passages provided within the rotating block, and a switching valve facing a second supply passage among the multiple switching valves being able to connect the nozzle communication passage to the second supply passage, and the switching valve facing the second supply passage being changed by rotating the rotating block. In such a configuration, it is not necessary to provide multiple second supply passages corresponding to each of the multiple switching valves, and the configuration can be simplified.

[0012] Furthermore, the component mounting machine may be configured to include a filter removal device for removing the filter from the nozzle shaft, the nozzle shaft having a filter housing section provided in the nozzle communication passage, the negative pressure supplied to the nozzle communication passage being supplied to the nozzle via the filter housing section, and the control unit to cause the filter removal device to remove the filter from the filter housing section before cleaning the first supply passage. In such a configuration, since the first supply passage is cleaned after the filter is removed, foreign matter can be discharged from the first supply passage with sufficient airflow.

[0013] Furthermore, the component mounting machine may be configured to include a filter confirmation unit that checks for the presence or absence of a filter in the filter storage unit, and the control unit may perform cleaning of the first supply path only after confirming with the filter confirmation unit that the filter removal device has successfully removed the filter from the filter storage unit. In such a configuration, the cleaning of the first supply path can be performed only after the filter has been reliably removed.

[0014] Furthermore, the nozzle shaft may have a pair of windows that open to the filter housing on both sides of the filter housing, and the filter confirmation unit may have a camera that images the filter housing through one of the pair of windows, and an illumination unit that shines light on the filter housing through the other of the pair of windows, and the component mounting machine may be configured to confirm the presence or absence of a filter in the filter housing based on the image captured by the camera while illuminating it with the illumination unit. In such a configuration, the presence or absence of a filter can be accurately confirmed by the silhouette image.

[0015] Furthermore, the component mounting machine may be further equipped with a filter mounting device for attaching a filter to the filter housing of the nozzle shaft, and the control unit may be configured to have the filter mounting device perform the filter attachment to the filter housing after cleaning the first supply path. In such a configuration, the component mounting machine can perform filter replacement, such as removing the old filter and attaching a new one.

[0016] According to the present invention, it is possible to remove foreign matter from the supply passage that supplies negative pressure to the nozzle attached to the tip of the nozzle shaft.

[0017] Figure 1 shows a schematic plan view of an example of a component mounting machine according to the present invention. Figure 1 shows a block diagram of an example of the electrical configuration of the component mounting machine. Figure 1 shows a partial front view of the configuration of the mounting head. Figure 1 shows a partial bottom view of the configuration of the mounting head. Figure 1 shows a perspective view of an example of the external configuration of a mounting shaft. Figure 5 shows a schematic partial front view of the vicinity of the lower end of the mounting shaft. Figure 5 shows a schematic partial side view of the vicinity of the lower end of the mounting shaft. Figure 5 shows a partially cutaway cross-sectional view of the mounting shaft. Figure 5 shows a schematic partial cross-sectional view of the communication between the pressure supply pipe and the nozzle of the mounting shaft. Figure 1 shows a schematic partial cross-sectional view of a pressure switching mechanism that switches the pressure supplied to the air supply passage. Figure 10 shows a schematic partial cross-sectional view of the operation of the pressure switching mechanism. Figure 10 shows a schematic partial cross-sectional view of the operation of the pressure switching mechanism. Figure 10 shows a schematic partial cross-sectional view of the operation of the pressure switching mechanism. Figure 10 shows a schematic partial cross-sectional view of the operation of the pressure switching mechanism. Figure 10 shows a schematic front view of the nozzle holding member. A schematic perspective view showing the internal configuration of the filter removal device. A schematic front view showing the internal configuration of the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic diagram showing the operation of removing the air filter from the nozzle holding member by the filter removal device. A schematic flowchart showing an example of automatic cleaning performed on a component mounting machine. A schematic plan view showing an example of an imaging unit used in the automatic cleaning in Figure 14A.

[0018] Figure 1 is a schematic plan view showing an example of a component mounting machine according to the present invention, and Figure 2 is a block diagram showing an example of the electrical configuration of the component mounting machine in Figure 1. In Figure 1, the horizontal direction X, the horizontal direction Y perpendicular to the X direction, and the vertical direction Z are shown as appropriate. The component mounting machine 1 in Figure 1 produces a substrate B with components E mounted on it by transferring components E onto the substrate B.

[0019] As shown in Figure 2, the component mounting machine 1 includes a control unit 100. The control unit 100 includes an arithmetic processing unit 110, a storage unit 120, a drive control unit 130, a pressure supply control unit 140, an imaging control unit 150, and a UI 160. The arithmetic processing unit 110 is a processor such as a CPU (Central Processing Unit) and comprehensively controls the operation of the component mounting machine 1. The storage unit 120 is a storage device such as an HDD (Hard Disk Drive) or SSD (Solid State Drive). The drive control unit 130 controls the drive system of the component mounting machine 1 based on commands from the arithmetic processing unit 110. The pressure supply control unit 140 controls the pressure switching unit 35 based on commands from the arithmetic processing unit 110. Furthermore, the pressure supply control unit 140 acquires the pressure measurement value from the pressure gauge P, which will be described later, based on commands from the arithmetic processing unit 110. The imaging control unit 150 controls the imaging system of the component mounting machine 1 based on commands from the arithmetic processing unit 110. In particular, the component mounting machine 1 is equipped with an imaging unit 8, which will be described later, and the imaging control unit 150 controls imaging by the imaging unit 8. The drive control unit 130, the pressure supply control unit 140, and the imaging control unit 150 can be configured by, for example, an FPGA (Field Programmable Gate Array) or a processor. The UI 160 is a user interface and consists of input devices such as a keyboard and a mouse, and output devices such as a display. Note that the input devices and output devices do not need to be configured separately, and they may be configured as an integrated unit by a touch panel display or the like.

[0020] The component mounting machine 1 comprises a base 21 and a pair of conveyors 22 positioned on the base 21. The pair of conveyors 22 are arranged in parallel in the X direction and transport the substrate B in the X direction according to commands from the drive control unit 130. In other words, the conveyors 22 transport the substrate B from the upstream side in the X direction (substrate transport direction) to the mounting work position (the position of substrate B in Figure 1), and then transport the substrate B downstream in the X direction from the mounting work position.

[0021] The component mounting machine 1 comprises a pair of Y-axis rails 23, 23 extending in the Y direction, a Y-axis ball screw 24 extending in the Y direction, and a Y-axis motor My that rotationally drives the Y-axis ball screw 24. The component mounting machine 1 also comprises an X-axis rail 25 extending in the X direction, which is supported by the pair of Y-axis rails 23, 23 so as to be movable in the Y direction and is fixed to the nut of the Y-axis ball screw 24. Furthermore, the component mounting machine 1 comprises an X-axis ball screw 26 extending in the X direction and an X-axis motor Mx that rotationally drives the X-axis ball screw 26. The X-axis ball screw 26 and the X-axis motor Mx are attached to the X-axis rail 25 and move integrally with the X-axis rail 25 in the Y direction.

[0022] Furthermore, the component mounting machine 1 includes a mounting head 3 that is supported so as to be movable in the X direction by an X-axis rail 25. The mounting head 3 is fixed to a nut of an X-axis ball screw 26. Therefore, the drive control unit 130 can move the mounting head 3 in the Y direction by rotating the Y-axis ball screw 24 with the Y-axis motor My, and move the mounting head 3 in the X direction by rotating the X-axis ball screw 26 with the X-axis motor Mx.

[0023] The component mounting machine 1 comprises two component supply units 27 located on one side of a pair of conveyors 22, 22 in the Y direction, and two component supply units 27 located on the other side. In each component supply unit 27, a plurality of feeder mounting units 271 are arranged at a predetermined pitch in the X direction, and tape feeders 28 are detachably mounted on the feeder mounting units 271. The tape feeder 28 has a component supply position 281 at its tip on the conveyor 22 side and supplies components E contained in the component supply tape to the component supply position 281. The component supply tape contains components E in each of a plurality of pockets arranged in a row at equal pitches, and the tape feeder 28 supplies components E to the component supply position 281 by intermittently feeding the component supply tape in the Y direction at that pitch. The components E contained in the component supply tape are small electronic components such as integrated circuits, transistors, or capacitors.

[0024] The mounting head 3 uses a nozzle 5 (Figure 5), described later, to pick up the component E from the tape feeder 28 and transfer it to the substrate B at the mounting work position, thereby mounting the component E to the substrate B. Specifically, the mounting head 3 moves to the upper side of the tape feeder 28 and picks up the component E supplied by the tape feeder 28 with the nozzle 5. At this time, the negative pressure supplied to the nozzle 5 causes the component E to be attracted to the nozzle 5. The mounting head 3 then moves to the upper side of the substrate B and releases the component E from the nozzle 5 to the substrate B. At this time, the positive pressure supplied to the nozzle 5 causes the component E to be released from the nozzle 5.

[0025] Furthermore, the component mounting machine 1 includes a nozzle changer 291 for changing the nozzles 5 attached to the mounting head 3. The nozzle changer 291 has a mechanism similar to that of a nozzle replacement storage machine described, for example, in WO2014 / 167684. In response to a command from the drive control unit 130, the nozzle changer 291 installs or removes the nozzles 5 from the mounting head 3, which is facing the nozzle changer 291 from above.

[0026] Furthermore, the component mounting machine 1 includes a filter mounting machine 292 for mounting the air filter F (Figure 9), which will be described later, onto the mounting head 3. The filter mounting machine 292 has a mechanism similar to, for example, the filter attachment / detachment unit (filter mounting unit) described in US2018271000A1. In response to a command from the drive control unit 130, the filter mounting machine 292 installs the air filter F onto the mounting head 3.

[0027] Figure 3 is a front view partially showing the configuration of the mounting head, and Figure 4 is a bottom view partially showing the configuration of the mounting head. The mounting head 3 has a plurality of mounting shafts 4 arranged circumferentially at equal pitches (for example, 20 degrees) around a rotation axis Cm parallel to the Z direction. The mounting shafts 4 have a shaft body 41 extending parallel to the Z direction and a nozzle holding member 6 attached to the lower end of the shaft body 41.

[0028] The mounting head 3 has a shaft support member 31 that supports a plurality of mounting shafts 4. The shaft support member 31 has a cylindrical shape centered on the rotation axis Cm. The mounting shafts 4 are supported by the shaft support member 31 so as to be able to move up and down in the Z direction. Specifically, the mounting shafts 4 are biased upward relative to the shaft support member 31 by an elastic member such as a spring. In contrast, the mounting head 3 has a Z-axis motor Mz (Figure 2) that lowers the mounting shafts 4 relative to the shaft support member 31 against the elastic member. Therefore, the drive control unit 130 can move the mounting head 3 up and down using the Z-axis motor Mz.

[0029] The mounting head 3 has multiple mechanical valves 32, each corresponding to one of the multiple mounting shafts 4. The multiple mechanical valves 32 are arranged circumferentially at equal pitches around a rotation axis Cm and supported by a shaft support member 31. Each mechanical valve 32 is positioned on the outside of its corresponding mounting shaft 4 (opposite side of the rotation axis Cm) and is movable up and down in the Z direction relative to the shaft support member 31. As will be described later, by raising or lowering the mechanical valve 32, the pressure (atmospheric pressure) supplied to the mounting shaft 4 corresponding to that mechanical valve 32 is switched.

[0030] Figure 5 is a perspective view showing the external configuration of an example of a mounting shaft, Figure 6 is a schematic partial front view showing the vicinity of the lower end of the mounting shaft in Figure 5, Figure 7 is a schematic partial side view showing the vicinity of the lower end of the mounting shaft in Figure 5, and Figure 8 is a partially cutaway cross-sectional view of the mounting shaft in Figure 5. In Figures 6 and 7, the "detached" column shows the state in which the nozzle 5 is detached from the mounting shaft 4, and the "engaged" column shows the state in which the nozzle 5 is engaged with the mounting shaft 4. Figure 8 shows the state in which the nozzle 5 is engaged with the mounting shaft 4. In these figures, the rotational direction Rs is shown, centered on the rotation axis Cs that passes through the center of the mounting shaft 4 in the Z direction.

[0031] The shaft body 41 has a main body housing 42 extending in the Z direction and a pressure supply pipe 43 extending in the Z direction inside the main body housing 42. The pressure supply pipe 43 protrudes downward from the lower end of the main body housing 42. A nozzle holding member 6 is attached to the lower end of this pressure supply pipe 43.

[0032] The nozzle holding member 6 has a holding member body 61 attached to the lower end of the pressure supply pipe 43 and a nozzle engaging portion 62 provided at the upper end of the holding member body 61. The nozzle engaging portion 62 has a pair of engaging protrusions 621, 621 arranged at an angle of 180 degrees relative to each other in the rotational direction Rs. The engaging protrusions 621, 621 protrude in opposite directions horizontally and have a shape that is convex upward. In this way, the pair of engaging protrusions 621, 621 protrude horizontally from both sides of the upper end of the holding member body 61.

[0033] Above the nozzle engagement portion 62, an annular pressing plate 63 and a coil-shaped compression spring 64 are fitted onto the pressure supply pipe 43. That is, the pressure supply pipe 43 is inserted through both the pressing plate 63 and the compression spring 64. The pressing plate 63, thus positioned above the nozzle engagement portion 62, has an annular shape with an inner circumference diameter narrower than the width of the upper end of the nozzle engagement portion 62 (the distance between the ends of the engagement protrusions 621, 621), and it catches on the upper end of the nozzle engagement portion 62, preventing it from falling downward. The compression spring 64, positioned above the pressing plate 63, has a coil shape with a diameter wider than the inner circumference of the pressing plate 63 and narrower than the outer circumference of the pressing plate 63, and the lower end of the compression spring 64 abuts against the upper surface of the pressing plate 63.

[0034] The nozzle 5 has a roughly cylindrical hollow portion 51 that opens upward. The inner wall of the hollow portion 51 is provided with a pair of engagement holes 52, 52 that are recessed upward and are spaced 180 degrees apart from each other in the rotational direction Rs. The nozzle 5 can then be attached to the nozzle engagement portion 62 of the nozzle holding member 6 by inserting the lower end of the nozzle holding member 6 into the hollow portion 51.

[0035] Specifically, for example, from the "detached" state in Figure 6, the nozzle 5 is fitted onto the nozzle holding member 6 from below, and the upper surface of the nozzle 5 is used to push up the pressure plate 63 relative to it, against the biasing force of the compression spring 64. The nozzle 5 is then pushed up relative to it until the upper surface of the pressure plate 63 approaches or contacts the lower end of the main body housing 42. As a result, the engagement holes 52 rise relatively above the engagement projections 621. By rotating the nozzle 5 90 degrees from this state, the rotation angles (phases) of the engagement holes 52, 52 and the engagement projections 621, 621 are aligned, and the engagement holes 52, 52 are positioned directly above the engagement projections 621, 621. Subsequently, by lowering the nozzle 5 relative to it according to the biasing force of the compression spring 64, the engagement projections 621, 621 retract into the engagement holes 52, 52, and the nozzle 5 and the nozzle engagement part 62 engage. Furthermore, since the compression spring 64 biases the nozzle 5 downward via the pressure plate 63, the engagement between the nozzle 5 and the nozzle engagement portion 62 is maintained by the biasing force of the compression spring 64.

[0036] It should be noted that the specific configuration for engaging the nozzle 5 is not limited to the configuration shown in Figure 6, and various conventionally known configurations can be used, for example, the configuration shown in Japanese Patent Publication No. 62-107991 can be used. Specifically, a pin is provided protruding from the nozzle engagement portion 62 and a hook-shaped slit is provided in the nozzle 5, and the pin of the nozzle engagement portion 62 is introduced from the base end (base end of the hook) of the slit that opens at the top of the nozzle 5 to the tip of the slit (tip of the hook). Then, the nozzle 5 is biased downward by the compression spring 64, and the pin of the nozzle engagement portion 62 is brought into contact with the tip of the slit in the nozzle 5, thereby maintaining the engagement between the nozzle engagement portion 62 and the nozzle 5.

[0037] Thus, as shown in the "Engagement" column of Figure 6, when the nozzle 5 and the engagement projection 621 engage and the nozzle 5 is mounted on the nozzle holding member 6, the pressure supply pipe 43 and the nozzle 5 are connected (Figure 9). Figure 9 is a schematic partial cross-sectional view showing the connection between the pressure supply pipe and the nozzle of the mounting shaft. Inside the pressure supply pipe 43, a pressure supply passage 431 extending in the Z direction is formed. Inside the nozzle 5, a nozzle hole 53 is provided that extends in the Z direction from the hollow portion 51 to the lower end of the nozzle 5. The upper end of the nozzle hole 53 opens upward relative to the hollow portion 51, and the lower end of the nozzle hole 53 opens downward relative to the outside.

[0038] A filter placement chamber 65 is provided inside the retaining member body 61, which is inserted into the hollow portion 51, where the air filter F is placed. The filter placement chamber 65 is located below the pressure supply passage 431 and above the nozzle hole 53. The filter placement chamber 65 is a space enclosed horizontally by cylindrical side walls 651, and the side walls 651 surround and contact the air filter F placed in the filter placement chamber 65.

[0039] Furthermore, the nozzle holding member 6 has an upper opening 661 provided on the upper side of the filter placement chamber 65. The upper opening 661 opens to the pressure supply passage 431 and also to the filter placement chamber 65. Therefore, the filter placement chamber 65 communicates with the pressure supply passage 431 via the upper opening 661. The upper opening 661 has a smaller diameter than the filter placement chamber 65, and the periphery of the upper opening 661 contacts the air filter F placed in the filter placement chamber 65 from above.

[0040] Furthermore, the nozzle holding member 6 has a lower opening 662 provided on the lower side of the filter placement chamber 65. The lower opening 662 opens to the nozzle hole 53 via the hollow portion 51 and also opens to the filter placement chamber 65. Therefore, the filter placement chamber 65 communicates with the nozzle hole 53 via the lower opening 662.

[0041] Furthermore, the nozzle holding member 6 has a flange 663 that protrudes inward from the side wall 651 of the filter placement chamber 65. The flange 663 contacts the air filter F housed in the filter placement chamber 65 from below. In other words, the flange 663 supports the air filter F from below, preventing it from falling out of the filter placement chamber 65. However, if the frictional force between the air filter F and the side wall 651 is sufficient to prevent the air filter F from falling, the flange 663 may be omitted.

[0042] In such a configuration, the pressure supply passage 431, the filter placement chamber 65, and the nozzle hole 53 communicate with each other. Therefore, when a negative pressure is supplied to the pressure supply passage 431, an air current is generated from the nozzle hole 53 through the air filter F in the filter placement chamber 65 toward the pressure supply passage 431. By this air current, air is sucked from the lower end of the nozzle hole 53. At this time, the air filter F removes foreign matter from the air passing through the air filter F from the nozzle hole 53 toward the pressure supply passage 431. When a positive pressure is supplied to the pressure supply passage 431, an air current is generated from the pressure supply passage 431 through the air filter F in the filter placement chamber 65 toward the nozzle hole 53. By this air current, air is discharged from the lower end of the nozzle hole 53. At this time, the air filter F removes foreign matter from the air passing through the air filter F from the pressure supply passage 431 toward the nozzle hole 53.

[0043] In other words, a nozzle communication passage Tn is formed in which the pressure supply passage 431 in the pressure supply pipe 43 and the filter placement chamber 65 in the holding member main body 61 cooperate to communicate with the nozzle hole 53 in the nozzle 5. When a negative pressure is supplied to the pressure supply passage 431, after passing through the nozzle hole 53, an air current is generated that passes through the nozzle communication passage Tn in the order of the filter placement chamber 65 and the pressure supply passage 431. Also, when a positive pressure is supplied to the pressure supply passage 431, after passing through the nozzle communication passage Tn in the order of the pressure supply passage 431 and the filter placement chamber 65, an air current is generated that passes through the nozzle hole 53.

[0044] Subsequently, a pressure switching mechanism for switching the pressure supplied to the pressure supply passage 431 of the pressure supply pipe 43 will be described. FIG. 10A is a partial cross-sectional view schematically showing a pressure switching mechanism for switching the pressure supplied to the air supply passage, and FIGS. 10B to 10D are partial cross-sectional views schematically showing the operation of the pressure switching mechanism of FIG. 10A.

[0045] In these figures, a predetermined working rotation position Pr in the rotation direction Rm centered on the rotation axis Cm is shown. That is, for the mounting head 3, two working rotation positions Pr arranged at intervals of 180 degrees in the rotation direction Rm are set. As will be described later, various operations are performed for the working rotation position Pr.

[0046] The positive pressure sources shown in FIGS. 10A to 10D are for the use of the facility where the component mounter 1 is installed and generate positive pressure. The negative pressure sources shown in FIGS. 10A to 10D are for the use of the facility where the component mounter 1 is installed and generate negative pressure. In FIG. 10A, a pressure supply pipe 43 and components other than the for-use constitute a pressure switching mechanism S.

[0047] As described above, the mounting head 3 has a plurality of mechanical valves 32. On the other hand, the shaft support member 31 is formed with a plurality of valve insertion holes 311 corresponding to the plurality of mechanical valves 32 respectively. That is, the plurality of valve insertion holes 311 are arranged in a circumferential shape at an equal pitch (for example, 20 degrees) around the rotation axis Cm. The valve insertion hole 311 is a hole extending in the Z direction, and the mechanical valve 32 corresponding to the valve insertion hole 311 is inserted into the valve insertion hole 311. The mechanical valve 32 can move up and down in the Z direction with respect to the valve insertion hole 311 into which the mechanical valve 32 is inserted.

[0048] Further, the mounting head 3 has a main shaft 33 extending in the Z direction. The main shaft 33 extends along the rotation axis Cm. The shaft support member 31 is attached to the lower end portion of the main shaft 33. The plurality of mounting shafts 4 are provided in a circumferential shape around the main shaft 33, and the plurality of mechanical valves 32 are provided in a circumferential shape around the main shaft 33. The mounting head 3 has an R-axis motor Mr (FIG. 2) that rotates the main shaft 33 in the rotation direction Rm around the rotation axis Cm. Therefore, the drive control unit 130 can rotate the plurality of mounting shafts 4 and the plurality of mechanical valves 32 integrally with the main shaft 33 in the rotation direction Rm by the R-axis motor Mr.

[0049] A main supply passage 331 extending in the Z direction is formed inside the main shaft 33. Furthermore, multiple branch passages 312 extending radially horizontally from the main supply passage 331 are formed inside the main shaft 33 and the shaft support member 31. Each of the multiple branch passages 312 corresponds to one of the multiple valve insertion holes 311, and the branch passages 312 connect the valve insertion hole 311 corresponding to the branch passage 312 to the main supply passage 331, creating communication between them. Specifically, an upper port 311A ​​is provided in the valve insertion hole 311, and the branch passages 312 connect the main shaft 33 to the upper port 311A, thereby creating communication between the main shaft 33 and the valve insertion hole 311.

[0050] Furthermore, multiple communication passages 313 are formed inside the shaft support member 31. Each of the multiple communication passages 313 corresponds to one of the multiple pressure supply pipes 43, and each of the multiple valve insertion holes 311. The communication passages 313 connect and communicate the pressure supply passages 431 of the corresponding pressure supply pipes 43 with the corresponding valve insertion holes 311. Specifically, a middle port 311B is provided in the valve insertion hole 311. The middle port 311B is located below the upper port 311A. The communication passages 313 connect the pressure supply passages 431 of the pressure supply pipes 43 with the middle port 311B, thereby connecting the pressure supply passages 431 with the valve insertion holes 311.

[0051] Furthermore, the mounting head 3 has an outer ring member 34 that fits onto the shaft support member 31 from the outside. This outer ring member 34 has a hollow annular shape, and the shaft support member 31 is positioned in the hollow portion of the outer ring member 34. The shaft support member 31 is rotatable relative to the outer ring member 34; in other words, the outer ring member 34 does not follow the rotation of the shaft support member 31.

[0052] The outer ring member 34 has two positive pressure supply passages 341 that are spaced 180 degrees apart from each other in the rotational direction Rm. In other words, the two positive pressure supply passages 341 are provided for two working rotational positions Pr. The positive pressure supply passage 341 connects the valve insertion hole 311 that is opposite to the positive pressure supply passage 341 to the positive pressure source. Specifically, the valve insertion hole 311 is provided with a lower port 311C. The lower port 311C is located below the middle port 311B. The positive pressure supply passage 341 connects the valve insertion hole 311 to the positive pressure source by connecting the lower port 311C that is opposite to the positive pressure supply passage 341 to the positive pressure source. The drive control unit 130 rotates the shaft support member 31 with the R-axis motor Mr, thereby changing the valve insertion hole 311 that faces the positive pressure supply passage 341 among the multiple valve insertion holes 311 (in other words, the valve insertion hole 311 located at the working rotation position Pr).

[0053] Furthermore, the mounting head 3 has a pair of Z-axis actuators Az arranged at an angle of 180 degrees relative to each other in the rotational direction Rm. The two Z-axis actuators Az are provided corresponding to two positive pressure supply passages 341, in other words, they are provided for two working rotation positions Pr. The Z-axis actuators Az raise and lower the mechanical valve 32 that is inserted into the valve insertion hole 311 facing the corresponding positive pressure supply passage 341, among the plurality of mechanical valves 32. In other words, the Z-axis actuators Az raise and lower the mechanical valve 32 located at the working rotation position Pr on which the Z-axis actuators Az are provided. The drive control unit 130 can change the mechanical valve 32 located at the working rotation position Pr among the plurality of mechanical valves 32 by rotating the shaft support member 31 with the R-axis motor Mr, thereby changing the mechanical valve 32 that is raised and lowered by the Z-axis actuators Az. The specific mechanism for raising and lowering the mechanical valve 32 using the Z-axis actuator Az is similar to the mechanism shown in, for example, US2018263149A1.

[0054] Furthermore, the mounting head 3 has a pressure switching unit 35 that switches the pressure supplied to the main supply line 331 between positive pressure and negative pressure. The pressure switching unit 35 has a three-way solenoid valve 351. The positive pressure input port of the three-way solenoid valve 351 is connected to a positive pressure source, the negative pressure input port of the three-way solenoid valve 351 is connected to a negative pressure source, and the output port of the three-way solenoid valve 351 is connected to the main supply line 331. When the three-way solenoid valve 351 connects the positive pressure input port and the output port, positive pressure is supplied to the main supply line 331. When the three-way solenoid valve 351 connects the negative pressure input port and the output port, negative pressure is supplied to the main supply line 331. The pressure switching unit 35 operates in response to commands from the pressure supply control unit 140, which is controlled by the calculation processing unit 110. In other words, when the pressure switching unit 35 (three-way solenoid valve 351) receives a positive pressure supply command from the pressure supply control unit 140, it supplies positive pressure to the main supply passage 331, and when it receives a negative pressure supply command from the pressure supply control unit 140, it supplies negative pressure to the main supply passage 331. Note that the specific configuration for switching the supply pressure to the main supply passage 331 is not limited to a three-way solenoid valve, but may also be a configuration combining two-way solenoid valves.

[0055] The mechanical valve 32 has a shutter 321 that blocks the valve insertion hole 311 vertically. The shutter 321 restricts the movement of air between its upper and lower positions. By changing the height of the mechanical valve 32 and thereby changing the position of the shutter 321, one of the main supply passage 331 and the positive pressure supply passage 341 can be connected to the pressure supply passage 431.

[0056] In the Z direction, when the shutter 321 is positioned between the upper port 311A ​​and the middle port 311B, the positive pressure supply passage 341 and the pressure supply passage 431 are connected via the valve insertion hole 311, while the main supply passage 331 and the pressure supply passage 431 are blocked from each other. As a result, positive pressure is supplied to the pressure supply pipe 43 via the positive pressure supply passage 341, the valve insertion hole 311, and the communication passage 313 (Figure 10B). This positive pressure is supplied to the nozzle hole 53 via the filter placement chamber 65. When detaching component E from the nozzle 5 for mounting component E onto substrate B, positive pressure is supplied to the nozzle 5 in this manner.

[0057] In the Z direction, when the shutter 321 is positioned between the middle port 311B and the lower port 311C, the main supply passage 331 and the pressure supply passage 431 are connected via the valve insertion hole 311, while the positive pressure supply passage 341 and the pressure supply passage 431 are blocked from each other. In this state, when the pressure switching unit 35 supplies negative pressure to the main supply passage 331, negative pressure is supplied to the pressure supply pipe 43 via the main supply passage 331, the branch passage 312, the valve insertion hole 311, and the communication passage 313 (Figure 10C). This negative pressure is supplied to the nozzle hole 53 via the filter placement chamber 65. When the nozzle 5 attracts the component E, negative pressure is supplied to the nozzle 5 in this manner.

[0058] In the Z direction, when the shutter 321 is positioned between the middle port 311B and the lower port 311C, the main supply passage 331 and the pressure supply passage 431 are connected via the valve insertion hole 311, while the positive pressure supply passage 341 and the pressure supply passage 431 are blocked from each other. In this state, when the pressure switching unit 35 supplies positive pressure to the main supply passage 331, positive pressure is supplied to the pressure supply pipe 43 via the main supply passage 331, the branch passage 312, the valve insertion hole 311, and the connecting passage 313 (Figure 10D). This positive pressure is supplied to the nozzle hole 53 via the filter placement chamber 65.

[0059] As mentioned above, an air filter F is placed in the filter placement chamber 65 of the nozzle holding member 6. The component mounting machine 1 can then remove the air filter F from the filter placement chamber 65. This point will be explained next.

[0060] Figures 11A and 11B are schematic front views showing the external appearance of the nozzle holding member. Figure 11A shows a nozzle holding member 6 that houses an air filter F in a filter placement chamber 65, while Figure 11B shows a nozzle holding member 6 that does not house an air filter F in a filter placement chamber 65. In these figures, the lower end 61l of the holding member body 61 is shown. The lower opening 662 described above opens at this lower end 61l.

[0061] The nozzle holding member 6 has a side opening 67 that opens on the horizontal side of the holding member body 61. The side opening 67 opens horizontally and communicates with the filter placement chamber 65. Therefore, as shown in Figure 11A, the air filter F housed in the filter placement chamber 65 is exposed horizontally through the side opening 67. Also, as shown in Figure 11B, a pair of side openings 67 open on both sides of the holding member body 61 in the horizontal direction. In this way, the filter placement chamber 65 is sandwiched from the horizontal by the pair of side openings 67. Therefore, a hole that penetrates the holding member body 61 horizontally is formed by the pair of side openings 67 and the filter placement chamber 65.

[0062] The side opening 67 has a filter-facing portion 671 that faces the air filter F housed in the filter arrangement chamber 65 from the horizontal direction. The central portion 671m of the filter-facing portion 671 has a constant width in the horizontal direction. The upper end portion 671h of the filter-facing portion 671, located above the central portion 671m, has a shape in which the horizontal width narrows as it moves upward. The lower end portion 671l of the filter-facing portion 671, located below the central portion 671m, has a shape in which the horizontal width narrows as it moves downward.

[0063] Furthermore, the side opening 67 has a lower extension 672 that extends downward from the lower end 671l of the filter-facing portion 671. In the horizontal direction, the width of the lower extension 672 is narrower than the width of the filter-facing portion 671. More specifically, in the horizontal direction, the width of the lower extension 672 is narrower than the widths of the upper end 671h, the central portion 671m, and the lower end 671l. In addition, the lower extension 672 has a shape in which its horizontal width narrows as it moves downward.

[0064] Figure 12A is a schematic perspective view showing the internal configuration of the filter removal device, and Figure 12B is a schematic front view showing the internal configuration of the filter removal device. In these figures, the Z direction and the horizontal drive direction D are shown. The forward side Df and the reverse side Db of the drive direction D are also shown. The forward side Df and the reverse side Db face opposite directions.

[0065] The filter removal device 7 is detachably mounted, for example, on the feeder mounting section 271 of the parts supply section 27. This filter removal device 7 comprises a base plate 71 and a base block 72. The base plate 71 is mounted horizontally on the feeder mounting section 271. The base block 72 is provided on the forward side Df of the base plate 71 and protrudes upward from the base plate 71.

[0066] Figure 12B shows the internal structure of the base block 72. An air filter discharge section 721 is formed inside the base block 712. The air filter discharge section 721 has a filter inlet 722 that opens on the upper surface of the base block 72, a filter outlet 723 that opens on the side of the forward side Df of the base block 72, and a filter discharge passage 724 that extends from the filter inlet 722 to the filter outlet 723. The cross-sections of the filter inlet 722, the filter outlet 723, and the filter discharge passage 724 have a shape that encloses the cross-section of the air filter F. In other words, the width of the filter discharge passage 724 is wider than the width of the air filter F. Therefore, the air filter F can pass through the filter discharge passage 724 from the filter inlet 722 to the filter outlet 723.

[0067] The filter discharge passage 724 includes a vertical discharge passage 725 extending in the Z direction from the filter inlet 722, and an inclined discharge passage 726 that slopes downward from the lower end of the vertical discharge passage 725 to the filter outlet 723. The air filter F that enters the filter outlet 723 falls along the vertical discharge passage 725, then falls along the inclined discharge passage 726, and is discharged from the filter outlet 723.

[0068] Furthermore, a slit 727 extending in the Z direction is provided on the side of the receding side Db of the base block 72. The slit 727 opens to the vertical discharge passage 725 of the filter discharge passage 724. In the horizontal direction, the width of this slit 727 is narrower than the width of the filter discharge passage 724 and the width of the air filter F within the filter discharge passage 724.

[0069] The filter removal device 7 includes a filter disposal section 73 provided on the forward side Df of the base block 72. The filter disposal section 73 has a horizontal surface 731 extending horizontally from the lower end of the filter outlet 723 to the forward side Df, and an inclined surface 732 that slopes toward the forward side Df from the end of the horizontal surface 731 to the forward side Df. The air filter F discharged from the filter outlet 723 to the horizontal surface 731 falls along the inclined surface 732. The filter disposal section 73 houses the air filter F.

[0070] The filter removal device 7 includes a positioning block 74 provided on the upper side of the base block 72. A retaining member insertion hole 741 is formed inside the positioning block 74. This retaining member insertion hole 741 penetrates the positioning block 74 in the Z direction and opens toward the filter inlet 722. In a plan view from the Z direction, the periphery of the retaining member insertion hole 741 is located outside the periphery of the filter inlet 722. In other words, the periphery 728 of the filter inlet 722 on the upper surface of the base block 72 protrudes inward from the periphery of the retaining member insertion hole 741.

[0071] When the nozzle holding member 6 is inserted into the holding member insertion hole 741 from above, the inner wall of the holding member insertion hole 741 contacts the nozzle holding member 6 from the horizontal direction, and the peripheral edge 728 contacts the nozzle holding member 6 from below. In this way, the nozzle holding member 6 is positioned by the positioning block 74. The position of the peripheral edge 728 corresponds to the position of the lower end 61l of the holding member body 61 of the nozzle holding member 6.

[0072] Furthermore, a slit 742 extending in the Z direction is provided on the side of the retracted side Db of the positioning block 74. The slit 742 opens toward the retaining member insertion hole 741. In the horizontal direction, the width of the slit 742 is narrower than the width of the retaining member insertion hole 741 and the width of the nozzle retaining member 6 within the retaining member insertion hole 741. The slit 742 of the positioning block 74 and the slit 727 of the base block 72 are connected in the Z direction to form a single slit that is long in the Z direction. However, it is not essential that they be connected.

[0073] The filter removal device 7 includes a metal needle unit 75 positioned on the retraction side Db of the base block 72 and the positioning block 74. The needle unit 75 has a mounting plate 751 parallel to the Z direction and the drive direction D, an upper needle member 752 bent horizontally from the upper end of the mounting plate 751 to one side, and a lower needle member 753 bent horizontally from the lower end of the mounting plate 751 to one side. The upper needle member 752 and the lower needle member 753 are aligned in the Z direction, with the lower needle member 753 positioned below the upper needle member 752. The distance between the upper needle member 752 and the lower needle member 753 is fixed. The upper needle member 752 protrudes forward from the mounting plate 751 to the forward side Df and faces the slit 742 from the retraction side Db. The lower needle member 753 protrudes from the mounting plate 751 toward the forward side Df and faces the lower slit 727 of the slit 742 from the backward side Db.

[0074] Furthermore, the filter removal device 7 includes a needle drive unit 76 that drives the needle unit 75. The needle drive unit 76 is positioned on the retracted side Db of the base block 72 and the positioning block 74. As will be described later, when the needle drive unit 76 is driven, the upper needle member 752 enters the filter placement chamber 65 through the slit 742 and the side opening 67, and the lower needle member 753 enters the vertical discharge passage 725 through the slit 727.

[0075] The needle drive unit 76 has a cam follower 77. The cam follower 77 supports a needle unit 75 fastened to the cam follower 77. The upper needle member 752 and the lower needle member 753 of the needle unit 75 protrude from the cam follower 77 toward the forward direction Df. The cam follower 77 has a follower frame 771 to which the needle unit 75 is fastened, a cam placement hole 772 that penetrates the follower frame 771 horizontally, and a pair of guide holes 773 provided above the cam placement hole 772. Each guide hole 773 is an elongated hole extending in the drive direction D.

[0076] The needle drive unit 76 has a cam mechanism 78 that drives the cam follower 77. The cam mechanism 78 has an eccentric cam 781 positioned in a cam arrangement hole 772 and a cam shaft 782 extending in a horizontal direction perpendicular to the drive direction D, with the eccentric cam 781 supported by the cam shaft 782. The circumferential surface of the eccentric cam 781 contacts the side wall of the cam arrangement hole 772. Furthermore, the cam mechanism 78 has bearings 783 that support the cam shaft 782. These bearings 783 are provided at each end of the cam shaft 782. Furthermore, the needle drive unit 76 has a cam motor Mc (Figure 2). The cam motor Mc rotates the eccentric cam 781, causing it to rotate around a rotation center perpendicular to the drive direction D. In accordance with this rotation of the eccentric cam 781, the cam follower 77 that contacts the eccentric cam 781 moves.

[0077] The needle drive unit 76 has a guide unit 79 that guides the movement of the cam follower 77. The guide unit 79 has a base block 791 positioned on and fixed to the base plate 71, a pair of guide pins 792 erected on the upper side from the upper surface of the base block 791, and a lifting block 793 that fits onto the pair of guide pins 792. A pair of guide holes 794 penetrate the lifting block 793 in the Z direction, and a pair of guide pins 792 are inserted into the pair of guide holes 794, respectively. Therefore, guided by the guide pins 792, the lifting block 793 moves (lifts and lowers) in the Z direction. The lifting block 793 is adjacent to the follower frame 771 from the horizontal direction perpendicular to the drive direction D, and the guide unit 79 has a pair of guide pins 795 that protrude from the lifting block 793 toward the follower frame 771. The pair of guide pins 795 are inserted into a pair of guide holes 773, respectively. Therefore, the cam follower 77 moves (up and down) in the Z direction together with the lifting block 793, guided by the guide pin 792, and also moves in the drive direction D, guided by the guide pin 795.

[0078] Figures 13A to 13H schematically show the operation of removing the air filter from the nozzle holding member by the filter removal device. To start this removal operation, the nozzle changer 291 removes the nozzle 5 from the nozzle holding member 6 of the target mounting shaft 4. Then, the drive control unit 130 drives the mounting head 3 with the X-axis motor Mx, Y-axis motor My, and Z-axis motor Mz to insert the nozzle holding member 6 of the target mounting shaft 4 into the holding member insertion hole 741 of the positioning block 74. In addition, one of the pair of side openings 67 provided on the nozzle holding member 6 faces the retraction side Db and opens toward the slit 742. Therefore, the upper needle member 752 can enter the filter placement chamber 65 through the slit 742 and the side opening 67.

[0079] The filter removal device 7 performs the operations shown in Figures 13A to 13H in this order. With the execution of each operation, the eccentric cam 781 rotates twice, and the upper needle member 752 and the lower needle member 753 reciprocate twice in the drive direction D. In addition, the upper needle member 752 moves up and down twice in the Z direction above the lower end 61l of the retaining member body 61 (i.e., the lower opening 662), and the lower needle member 753 moves up and down twice in the Z direction below the lower end 61l of the retaining member body 61. The range in which the upper needle member 752 moves up and down in the Z direction is below the upper end of the slit 742 and within the range between the upper and lower ends of the filter placement chamber 65. The range in which the lower needle member 753 moves up and down in the Z direction is above the lower end of the slit 727.

[0080] Figure 13A shows a first state in which the rotation angle of the eccentric cam 781 is a first angle. In the first state, the upper needle member 752 is located in a retracted position Pb, which is retracted to the backward side Db from the slit 742 in the driving direction D, and is located in an elevated position H1u in the Z direction. The lower needle member 753 is located in a retracted position Pb, which is retracted to the backward side Db from the slit 727 in the driving direction D, and is located in an elevated position H2u in the Z direction. Figure 13A shows the air filter F housed in the filter arrangement chamber 65 of the holding member body 61. In the Z direction, the elevated position H1u is between the upper and lower ends of the air filter F in the filter arrangement chamber 65, and more specifically, the elevated position H1u is between the upper and lower ends of the filter facing portion 671 of the side opening 67. Therefore, the upper needle member 752 in the elevated position H1u faces the air filter F in the filter arrangement chamber 65 from the driving direction D via the side opening 67.

[0081] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the first angle to the second angle, the eccentric cam 781 pushes the forward-facing surface Df of the cam arrangement hole 772 toward the forward-facing Df, causing the cam follower 77 to move toward the forward-facing Df. As a result, the upper needle member 752 and the lower needle member 753 move toward the forward-facing Df, reaching the second state shown in Figure 13B. In the second state, the upper needle member 752 is located in an entry position Pf in the drive direction D, entering the filter arrangement chamber 65 through the side opening 67 from the slit 742, and is located in an upward position H1u in the Z direction. The lower needle member 753 is located in an entry position Pf in the drive direction D, entering the vertical discharge passage 725 from the slit 727, and is located in an upward position H2u in the Z direction. Therefore, as shown in Figure 13B, the upper needle member 752 pierces the air filter F housed in the filter arrangement chamber 65 from the retracted side Db.

[0082] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the second angle to the third angle, the cam follower 77, which contacts the circumferential surface of the eccentric cam 781 with the upper surface of the cam arrangement hole 772, descends along with the descent of the circumferential surface. As a result, the upper needle member 752 and the lower needle member 753 descend, reaching the third state shown in Figure 13C. In the third state, the upper needle member 752 is located at an entry position Pf in the drive direction D, entering the filter arrangement chamber 65, and at a descending position H1l in the Z direction, below the rising position H1u. The lower needle member 753 is located at an entry position Pf in the drive direction D, entering the vertical discharge passage 725, and at a descending position H2l in the Z direction, below the rising position H2u. In this way, the upper needle member 752 descends from the raised position H1u (Figure 13B) to the lowered position H1l (Figure 13C). As a result, the air filter F that pierces the upper needle member 752 descends, and the lower end Fl of the air filter F protrudes below the lower end 61l of the holding member body 61 and enters the vertical discharge passage 725. Incidentally, the lowered position H1l is between the upper and lower ends of the lower extension 672. In other words, the upper needle member 752 descends from the filter opposing part 671 to the lower extension 672. By descending to the lower extension 672 in this way, the descending distance of the upper needle member 752 is secured.

[0083] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the third angle to the fourth angle, the eccentric cam 781 pushes the retracted side Db surface of the cam arrangement hole 772 toward the retracted side Db, moving the cam follower 77 toward the retracted side Db. As a result, the upper needle member 752 and the lower needle member 753 move toward the retracted side Db, reaching the fourth state shown in Figure 13D. In the fourth state, the upper needle member 752 is located in a retracted position Pb, which is retracted toward the retracted side Db from the slit 742 in the driving direction D, and in a lowered position H1l in the Z direction. The lower needle member 753 is located in a retracted position Pb, which is retracted toward the retracted side Db from the slit 727 in the driving direction D, and in a lowered position H2l in the Z direction. As the upper needle member 752 moves from the entry position Pf to the retracted position Pb, the upper needle member 752 exits the filter placement chamber 65 to the retracted side Db. In contrast, the upper end Fh of the air filter F remains inside the retaining member body 61. As a result, the upper needle member 752 exits the air filter F. Consequently, the lower end Fl of the air filter F protrudes from the lower end 61l of the retaining member body 61 into the vertical discharge passage 725, while the upper end Fh remains inside the retaining member body 61, with the upper end Fh engaged with the flange 663.

[0084] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the fourth angle to the first angle, the eccentric cam 781 pushes the upper surface of the cam arrangement hole 772 upward, causing the cam follower 77 to rise. As a result, the upper needle member 752 and the lower needle member 753 rise, reaching the fifth state shown in Figure 13E. Thus, the eccentric cam 781 rotates 360 degrees through the operation shown in Figures 13A to 13E. In the fifth state, the upper needle member 752 is located in a retracted position Pb, which is retracted to the backward side Db from the slit 742 in the driving direction D, and in an elevated position H1u in the Z direction. The lower needle member 753 is located in a retracted position Pb, which is retracted to the backward side Db from the slit 727 in the driving direction D, and in an elevated position H2u in the Z direction. The lower needle member 753, located in the raised position H2u, faces the lower end Fl of the air filter F, which protrudes from the lower end 61l of the holding member body 61 into the vertical discharge passage 725, from the retracted side Db via the slit 727.

[0085] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the first angle to the second angle, the eccentric cam 781 pushes the forward-facing surface Df of the cam arrangement hole 772 toward the forward-facing Df, causing the cam follower 77 to move toward the forward-facing Df. As a result, the upper needle member 752 and the lower needle member 753 move toward the forward-facing Df, reaching the sixth state shown in Figure 13F. In the sixth state, the upper needle member 752 is located in an entry position Pf in the drive direction D, entering the filter arrangement chamber 65 through the side opening 67 from the slit 742, and is located in an upward position H1u in the Z direction. The lower needle member 753 is located in an entry position Pf in the drive direction D, entering the vertical discharge passage 725 from the slit 727, and is located in an upward position H2u in the Z direction. Therefore, as shown in Figure 13F, the lower needle member 753 pierces the lower end Fl of the air filter F, which protrudes from the lower end 61l of the holding member body 61 into the vertical discharge passage 725, from the retracted side Db.

[0086] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the second angle to the third angle, the cam follower 77, which contacts the circumferential surface of the eccentric cam 781 with the upper surface of the cam arrangement hole 772, descends along with the descent of the circumferential surface. As a result, the upper needle member 752 and the lower needle member 753 descend, reaching the seventh state shown in Figure 13G. In the seventh state, the upper needle member 752 is located at an entry position Pf in the drive direction D, entering the filter arrangement chamber 65, and at a descended position H1l in the Z direction. The lower needle member 753 is located at an entry position Pf in the drive direction D, entering the vertical discharge passage 725, and at a descended position H2l in the Z direction. Thus, the lower needle member 753 descends from an upward position H2u (Figure 13F) to a downward position H2l (Figure 13G). As a result, the air filter F, which is pierced by the lower needle member 753, descends, and the entire air filter F protrudes below the lower end 61l of the holding member body 61 and is discharged into the vertical discharge passage 725.

[0087] As the cam motor Mc rotates the eccentric cam 781 and the rotation angle of the eccentric cam 781 changes from the third angle to the fourth angle, the eccentric cam 781 pushes the retracted side Db surface of the cam arrangement hole 772 toward the retracted side Db, moving the cam follower 77 toward the retracted side Db. As a result, the upper needle member 752 and the lower needle member 753 move toward the retracted side Db, reaching the eighth state shown in Figure 13H. In the eighth state, the upper needle member 752 is located in a retracted position Pb, which is retracted toward the retracted side Db from the slit 742 in the driving direction D, and in a lowered position H1l in the Z direction. The lower needle member 753 is located in a retracted position Pb, which is retracted toward the retracted side Db from the slit 727 in the driving direction D, and in a lowered position H2l in the Z direction. As the lower needle member 753 moves from the entry position Pf to the retracted position Pb, the lower needle member 753 exits the vertical discharge passage 725 to the retracted side Db. In contrast, the air filter F remains inside the vertical discharge passage 725. Therefore, the lower needle member 753 exits the air filter F. As a result, the air filter F is disposed of in the filter waste section 73 via the filter discharge passage 724.

[0088] Figure 14A is a flowchart showing an example of automatic cleaning performed in a component mounting machine, and Figure 14B is a schematic plan view showing an example of an imaging unit used in the automatic cleaning in Figure 14A. As shown in Figure 14B, the imaging unit 8 has a camera 81 and a illuminator 82. The camera 81 captures images using a solid-state image sensor and is positioned outside the plurality of nozzle holding members 6 arranged in a circular pattern. The illuminator 82 is composed of, for example, an LED (Light Emitting Diode). The illuminator 82 is positioned inside the plurality of nozzle holding members 6 arranged in a circular pattern and is located on the rotation axis Cm. The camera 81 is positioned at the working rotation position Pr and captures images of the nozzle holding member 6 facing the camera 81 (in other words, the nozzle holding member 6 located at the working rotation position Pr) between the camera 81 and the illuminator 82 to acquire an image. That is, the camera 81 captures images of the nozzle holding member 6 that is illuminated by the illuminator 82 from the opposite side (i.e., the back) of the camera 81, and acquires a silhouette image of the nozzle holding member 6.

[0089] Here, of the pair of side openings 67 of the nozzle holding member 6 located at the working rotation position Pr, one faces the camera 81 and the other faces the illumination 82. In other words, the pair of side openings 67 are aligned in a line in the imaging direction from the camera 81 to the illumination 82. Therefore, if the air filter F is not in the filter placement chamber 65, the light irradiated by the illumination 82 onto the nozzle holding member 6 passes through the pair of side openings 67 and enters the camera 81. As a result, the brightness of the region corresponding to the side openings 67 in the silhouette image becomes higher than a predetermined brightness. On the other hand, if the air filter F is in the filter placement chamber 65, the light irradiated by the illumination 82 onto the nozzle holding member 6 is blocked by the air filter F and does not enter the camera 81. As a result, the brightness of the region corresponding to the side openings 67 in the silhouette image becomes lower than a predetermined brightness. Therefore, the arithmetic processing unit 110 can determine the presence or absence of the air filter F in the filter placement chamber 65 based on the brightness of the silhouette image. For example, by comparing the brightness of the region corresponding to the side aperture 67 in the silhouette image with a threshold, it can be determined that there is no air filter F if the imaging brightness is not equal to or greater than the threshold, and that there is an air filter F if the imaging brightness is less than the threshold.

[0090] The flowchart in Figure 14A is executed under the control of the arithmetic processing unit 110. In step S101, the nozzle 5 is removed. Specifically, the drive control unit 130, receiving a command from the arithmetic processing unit 110, drives the mounting head 3 with the X-axis motor Mx and the Y-axis motor My to move the nozzle 5 attached to the target mounting shaft 4 to the nozzle changer 291. The drive control unit 130 then uses the nozzle changer 291 to remove the nozzle 5 from the nozzle holding member 6. That is, the drive control unit 130 uses the Z-axis motor Mz to lower the nozzle 5 and insert it into the nozzle holder of the nozzle changer 291. The drive control unit 130 also rotates the mounting shaft 4 using a drive mechanism (not shown) to release the engagement between the nozzle holding member 6 and the nozzle 5. Furthermore, while restricting the nozzle changer 291 from removing the nozzle 5 from the nozzle holder, the drive control unit 130 raises the nozzle holding member 6 with the Z-axis motor Mz. In this way, the nozzle 5 is removed from the nozzle holding member 6.

[0091] In step S102, the arithmetic processing unit 110 supplies negative pressure to the main supply passage 331 using the pressure switching unit 35, while simultaneously connecting the pressure supply passage 431 of the target mounting shaft 4 to the main supply passage 331 (Figure 10C). In this state, the arithmetic processing unit 110 checks the air flow rate in the main supply passage 331 using the pressure gauge P. If the measured value of the pressure gauge P is above the threshold pressure and sufficient flow rate is confirmed (YES in step S102), the arithmetic processing unit 110 notifies the completion of cleaning via the UI 160 (step S110).

[0092] If the pressure gauge P's measurement is below the threshold pressure and sufficient flow rate cannot be confirmed ("NO" in step S102), the calculation processing unit 110 removes the air filter F from the target mounting shaft 4. Specifically, the drive control unit 130, upon receiving a command from the calculation processing unit 110, drives the mounting head 3 with the X-axis motor Mx and Y-axis motor My to insert the nozzle holding member 6 of the target mounting shaft 4 into the holding member insertion hole 741 of the filter removal device 7. Subsequently, the drive control unit 130 rotates the eccentric cam 781 twice with the cam motor Mc. This removes the air filter F from the mounting shaft 4.

[0093] In step S104, the arithmetic processing unit 110 acquires a silhouette image of the nozzle holding member 6 that was targeted for removal of the air filter F using the imaging unit 8. The arithmetic processing unit 110 then checks whether the removal of the air filter F was successful based on this silhouette image. If the arithmetic processing unit 110 confirms that the air filter F is still present on the nozzle holding member 6 based on the silhouette image, it determines that the removal of the air filter F failed ("NO" in step S104) and returns to step S103. As a result, the removal of the air filter F is retried.

[0094] Based on the silhouette image, the arithmetic processing unit 110 confirms that the air filter F is not present on the nozzle holding member 6, and determines that the removal of the air filter F has been successful (YES in step S104), and cleaning is performed in step S105. In other words, in step S105, the pressure supply control unit 140, having received a command from the arithmetic processing unit 110, supplies positive pressure to the main supply passage 331 via the pressure switching unit 35. Furthermore, the arithmetic processing unit 110 positions the target mounting shaft 4 at the working rotation position Pr via the drive control unit 130, and connects the pressure supply passage 431 of the mounting shaft 4 to the main supply passage 331 via the Z-axis actuator Az. As a result, positive pressure is supplied to the pressure supply pipe 43 via the main supply passage 331, branch passage 312, valve insertion hole 311, and communication passage 313 (Figure 10D). This positive pressure is supplied from the pressure supply pipe 43 to the nozzle holding member 6. This positive-pressure airflow passes through the main supply passage 331, branch passage 312, valve insertion hole 311, connecting passage 313, pressure supply pipe 43, and nozzle holding member 6 in that order, performing blowing. As a result, any foreign matter that was in the path through which the airflow passed is discharged to the outside from the pressure supply pipe 43 (cleaning). In particular, the positive pressure supplied from the positive-pressure supply passage 341 makes it possible to discharge foreign matter from the branch passage 312, which cannot be blown out otherwise.

[0095] Once the cleaning in step S105 is complete, the air filter F is attached to the target mounting shaft 4 (step S106). Specifically, the drive control unit 130, receiving a command from the calculation processing unit 110, drives the mounting head 3 with the X-axis motor Mx and Y-axis motor My to move the nozzle holding member 6 of the target mounting shaft 4 to the filter mounting machine 292. The drive control unit 130 then lowers the nozzle holding member 6 towards the air filter F supplied by the filter mounting machine 292 using the Z-axis motor Mz. As a result, the air filter F is mounted in the filter placement chamber 65 of the nozzle holding member 6.

[0096] In step S107, the arithmetic processing unit 110 acquires a silhouette image of the nozzle holding member 6 to which the air filter F is to be attached using the imaging unit 8. The arithmetic processing unit 110 then checks whether the air filter F was successfully attached based on this silhouette image. If the silhouette image confirms that the air filter F is not present on the nozzle holding member 6, the arithmetic processing unit 110 determines that the attachment of the air filter F has failed ("NO" in step S107), and the arithmetic processing unit 110 notifies the UI 160 that the cleaning is incomplete (step S111).

[0097] If the presence of the air filter F in the nozzle holding member 6 is confirmed based on the silhouette image, the calculation processing unit 110 determines that the installation of the air filter F has been successful ("YES" in step S107) and proceeds to step S108. In step S108, the flow rate in the main supply path 331 is confirmed by the pressure gauge P, in the same manner as in step S102. If the measured value of the pressure gauge P is below the threshold pressure and sufficient flow rate cannot be confirmed ("NO" in step S108), the calculation processing unit 110 notifies the UI 160 that the cleaning is incomplete (step S111). On the other hand, if the measured value of the pressure gauge P is above the threshold pressure and sufficient flow rate can be confirmed ("YES" in step S108), the calculation processing unit 110 notifies the UI 160 that the cleaning is complete (step S109).

[0098] In the embodiment described above, the mounting head 3 includes a shaft support member 31 (first supply section) having a branch passage 312 (first supply passage), an outer ring member 34 (second supply section) having a positive pressure supply passage 341 (second supply passage), and a mechanical valve 32 (switching valve) for switching between the supply passages that communicate with the nozzle communication passage Tn among the branch passage 312 and the positive pressure supply passage 341. Negative pressure can be supplied to the nozzle 5 by connecting the branch passage 312 to the nozzle communication passage Tn, and positive pressure can be supplied to the nozzle 5 by connecting the positive pressure supply passage 341 to the nozzle communication passage Tn. In this configuration, as described above, foreign matter adhering to the branch passage 312 sometimes remained without being discharged. In contrast, in this embodiment, the branch passage 312, to which positive pressure is supplied, is connected to the nozzle communication passage Tn, and an airflow is generated that flows from the branch passage 312 into the nozzle communication passage Tn and passes through the nozzle communication passage Tn, thereby cleaning the branch passage 312 (step S105). This cleaning allows foreign matter adhering to the branch passage 312 to be discharged to the outside via the nozzle communication passage Tn. In this way, it is possible to remove foreign matter from the branch passage 312 that supplies negative pressure to the nozzle 5 attached to the tip of the mounting shaft 4 (nozzle shaft).

[0099] Furthermore, a main shaft 33 is provided, extending in the Z direction (extension direction) and having a main supply passage 331. Multiple mounting shafts 4 are arranged circumferentially around the main shaft 33, and multiple branch passages 312 are arranged circumferentially around the main shaft 33, corresponding to each of the multiple mounting shafts 4. Each of the multiple branch passages 312 connects the nozzle communication passage Tn of the corresponding mounting shaft 4 to the main supply passage 331, and negative or positive pressure is supplied to the multiple branch passages 312 via the main supply passage 331. In this configuration, the multiple branch passages 312 can be cleaned by supplying positive pressure to them.

[0100] Furthermore, multiple mechanical valves 32 are arranged circumferentially around the main shaft 33, corresponding to multiple mounting shafts 4. Negative or positive pressure is supplied to the mounting shafts 4 from the branch passage 312, and positive pressure is supplied to the mounting shafts 4 from the positive pressure supply passage 341, both of which are performed via the mechanical valves 32. In this configuration, since the mechanical valves 32 receive both positive pressure from the branch passage 312 and positive pressure from the positive pressure supply passage 341, foreign matter adhering to the mechanical valves 32 can be reliably discharged to the outside by positive pressure.

[0101] Furthermore, a shaft support member 31 (rotating block) is provided that can rotate around the main shaft 33 while holding multiple mounting shafts 4 and multiple mechanical valves 32. Multiple branch passages 312 are provided within the shaft support member 31 (rotating block). Of the multiple mechanical valves 32, the mechanical valve 32 facing the positive pressure supply passage 341 can connect the nozzle communication passage Tn to the positive pressure supply passage 341. By rotating the shaft support member 31, the mechanical valve 32 facing the positive pressure supply passage 341 can be changed. With this configuration, it is not necessary to provide multiple positive pressure supply passages 341 corresponding to each of the multiple mechanical valves 32, thus simplifying the configuration.

[0102] Furthermore, a filter removal device 7 is provided for removing the air filter F from the mounting shaft 4. The mounting shaft 4 has a filter placement chamber 65 (filter storage section) provided in the nozzle communication passage Tn, and the negative pressure supplied to the nozzle communication passage Tn is supplied to the nozzle 5 via the air filter F housed in the filter placement chamber 65. In response, the calculation processing unit 110 (control unit) causes the filter removal device 7 to remove the air filter F from the filter placement chamber 65 before cleaning the branch passage 312 (step S103). With this configuration, since the branch passage 312 is cleaned after the air filter F is removed, foreign matter can be discharged from the branch passage 312 with sufficient airflow.

[0103] In this manner, the filter removal device 7 performs an operation (filter removal operation) to remove the air filter F from the filter placement chamber 65. Specifically, it performs an operation in which the upper needle member 752 and the lower needle member 753 each perform an operation twice: moving forward Df, moving downward, and moving backward Db. However, it is conceivable that the filter removal device 7 may fail to remove the air filter F from the filter placement chamber 65 as a result of performing this filter removal operation.

[0104] Therefore, an imaging unit 8 (filter confirmation unit) is provided to check for the presence or absence of the air filter F in the filter placement chamber 65. Then, the calculation processing unit 110 confirms with the imaging unit 8 that the filter removal device 7 has successfully removed the air filter F from the filter placement chamber 65 (step S104), and then performs cleaning of the branch path 312 (step S105). With this configuration, the cleaning of the branch path 312 can be performed only after the air filter F has been reliably removed.

[0105] Furthermore, the mounting shaft 4 has a pair of side openings 67 (windows) that open to the filter placement chamber 65 on both sides of the filter placement chamber 65. In contrast, the imaging unit 8 has a camera 81 that images the filter placement chamber 65 through one of the pair of side openings 67, and an illumination unit 82 that irradiates the filter placement chamber 65 with light through the other side of the pair of side openings 67 (the opposite side of the one). Then, based on the silhouette image captured by the camera 81 while irradiating with light by the illumination unit 82, the presence or absence of the air filter F in the filter placement chamber 65 is confirmed. With this configuration, the presence or absence of the air filter F can be accurately confirmed by the silhouette image.

[0106] Furthermore, the mounting shaft 4 is equipped with a filter mounting machine 292 (filter mounting device) for attaching an air filter F to the filter placement chamber 65. The arithmetic processing unit 110 then instructs the filter mounting machine 292 to attach the air filter F to the filter placement chamber 65 after cleaning the branching path 312 (steps S105, S106). With this configuration, the component mounting machine 1 can perform the replacement of the air filter F, such as removing the old air filter F and installing a new one.

[0107] In the above embodiment, the nozzle 5 corresponds to an example of the "nozzle" of the present invention, the nozzle holding member 6 corresponds to an example of the "nozzle mounting section" of the present invention, the nozzle communication passage Tn corresponds to an example of the "nozzle communication passage" of the present invention, the mounting shaft 4 corresponds to an example of the "nozzle shaft" of the present invention, the branching passage 312 corresponds to an example of the "first supply passage" of the present invention, the shaft support member 31 corresponds to an example of the "first supply section" of the present invention, the positive pressure supply passage 341 corresponds to an example of the "second supply passage" of the present invention, the outer ring member 34 corresponds to an example of the "second supply section" of the present invention, the mechanical valve 32 corresponds to an example of the "switching valve" of the present invention, the calculation processing unit 110 corresponds to an example of the "control unit" of the present invention, the component mounting machine 1 corresponds to an example of the "component mounting machine" of the present invention, and the Z direction corresponds to the "extension" of the present invention. The main supply path 331 corresponds to an example of the "main supply path" of the present invention, the main shaft 33 corresponds to an example of the "main shaft" of the present invention, the shaft support member 31 corresponds to an example of the "rotating block" of the present invention, the air filter F corresponds to an example of the "filter" of the present invention, the filter removal device 7 corresponds to an example of the "filter removal device" of the present invention, the filter placement chamber 65 corresponds to an example of the "filter storage section" of the present invention, the imaging unit 8 corresponds to an example of the "filter confirmation section" of the present invention, the side opening 67 corresponds to an example of the "window" of the present invention, the camera 81 corresponds to an example of the "camera" of the present invention, the illumination 82 corresponds to an example of the "illumination" of the present invention, and the filter mounting machine 292 corresponds to an example of the "filter mounting device" of the present invention.

[0108] It should be noted that the present invention is not limited to the embodiments described above, and various modifications can be made to those described above without departing from the spirit of the invention. For example, there are various specific methods for removing the entire air filter F from the filter placement chamber 65 after the lower end portion Fl of the air filter F has been discharged from the lower opening 662. For example, the air filter F may be blown out of the filter placement chamber 65 to the lower side of the lower opening 662 using compressed air (positive pressure), or the lower end portion Fl of the air filter F that has been discharged from the lower opening 662 may be grasped by a robot hand and the air filter F may be pulled out of the filter placement chamber 65 through the lower opening 662, or the air filter F may be dropped from the filter placement chamber 65 by its own weight.

[0109] Furthermore, it is not necessary to provide two needle members, the upper needle member 752 or the lower needle member 753; only the upper needle member 752 may be provided.

[0110] The specific configuration of the needle drive unit 76 is not limited to the example described above. In other words, any configuration can be used that can drive the upper needle member 752 (lower needle member 753) so that at least a portion of the air filter F is discharged from the filter chamber 65.

[0111] Alternatively, instead of using a member that pierces the air filter F, such as an upper needle member 752 or a lower needle member 753, the air filter F may be discharged from the filter chamber 65 by a contact member that contacts the side surface of the air filter F. In other words, the air filter F may be scraped out of the filter chamber 65 by contact friction between the side surface of the air filter F and the contact member.

[0112] Furthermore, the pair of side openings 67 do not need to have the same shape as each other; they may have different shapes.

[0113] Furthermore, it is not necessary to provide a pair of side openings 67; a single side opening 67 may be provided.

[0114] Furthermore, the shape of the side opening 67 can be changed as appropriate. For example, it is not necessary to provide the lower extension 672.

[0115] Furthermore, the location of the filter removal device 7 is not limited to the feeder mounting section 271. Therefore, the filter removal device 7 may be configured integrally with the nozzle changer 291 or the filter mounting machine 292. Alternatively, the filter removal device 7 may be positioned away from the base 21.

[0116] 1...Component mounting machine 110...Calculation processing unit 292...Filter mounting machine 31...Shaft support member 312...Branch path 32...Mechanical valve 33...Main shaft 331...Main supply path 34...Outer ring member 341...Positive pressure supply path 4...Mounting shaft 5...Nozzle 6...Nozzle holding member 65...Filter placement chamber 67...Side opening 7...Filter removal device 8...Imaging unit 81...Camera 82...Illumination F...Air filter Tn...Nozzle connecting passage

Claims

1. A nozzle shaft having a nozzle mounting section to which a nozzle is detachably attached, and a nozzle communication passage communicating with the nozzle mounted on the nozzle mounting section; a first supply section having a first supply passage to which negative or positive pressure is supplied; a second supply section having a second supply passage to which positive pressure is supplied; a switching valve for switching between the first and second supply passages that communicate with the nozzle communication passage; and a control unit for controlling the switching valve, wherein the control unit connects the first supply passage to which negative pressure is supplied, to the nozzle communication passage, thereby supplying negative pressure to the nozzle mounted on the nozzle mounting section, thereby attracting a part with the nozzle; and connects the second supply passage to the nozzle communication passage, thereby supplying positive pressure to the nozzle, thereby releasing the part from the nozzle mounted on the nozzle mounting section. A component mounting machine that cleans the first supply passage by connecting the first supply passage, to which positive pressure is supplied, to the nozzle communication passage, thereby generating an airflow that flows from the first supply passage into the nozzle communication passage and passes through the nozzle communication passage.

2. The component mounting machine according to claim 1, further comprising a main shaft extending in the extension direction and having a main supply passage, wherein a plurality of nozzle shafts are arranged circumferentially around the main shaft, a plurality of first supply passages are arranged circumferentially around the main shaft corresponding to each of the plurality of nozzle shafts, each of the plurality of first supply passages communicates the nozzle communication passage of the corresponding nozzle shaft with the main supply passage, and negative or positive pressure is supplied to the plurality of first supply passages via the main supply passage.

3. A component mounting machine according to claim 2, wherein a plurality of switching valves are arranged circumferentially around the main shaft in correspondence with the plurality of nozzle shafts, and the supply of negative or positive pressure from the first supply passage to the nozzle shafts and the supply of positive pressure from the second supply passage to the nozzle shafts are performed via the switching valves.

4. The component mounting machine according to claim 3, further comprising a rotating block that can rotate around the main shaft while holding the plurality of nozzle shafts and the plurality of switching valves, wherein the plurality of first supply passages are provided within the rotating block, and among the plurality of switching valves, the switching valve facing the second supply passage can connect the nozzle communication passage to the second supply passage, and the switching valve facing the second supply passage can be changed by rotating the rotating block.

5. A component mounting machine according to any one of claims 1 to 4, further comprising a filter removal device for removing a filter from the nozzle shaft, wherein the nozzle shaft has a filter housing provided in the nozzle communication passage, the negative pressure supplied to the nozzle communication passage is supplied to the nozzle via the filter housed in the filter housing, and the control unit causes the filter removal device to remove the filter from the filter housing before cleaning the first supply passage.

6. The component mounting machine according to claim 5, further comprising a filter confirmation unit for checking the presence or absence of the filter in the filter storage unit, wherein the control unit performs cleaning of the first supply path after confirming with the filter confirmation unit that the filter removal device has successfully removed the filter from the filter storage unit.

7. The component mounting machine according to claim 6, wherein the nozzle shaft has a pair of windows that open to the filter storage on both sides of the filter storage, the filter confirmation unit has a camera that images the filter storage through one of the pair of windows, and an illumination that irradiates the filter storage through the other of the pair of windows, and the machine confirms the presence or absence of the filter in the filter storage based on the image captured by the camera while irradiating with light by the illumination.

8. The component mounting machine according to any one of claims 5 to 7, further comprising a filter mounting device for attaching the filter to the filter housing of the nozzle shaft, wherein the control unit causes the filter mounting device to attach the filter to the filter housing after cleaning the first supply path.

9. A mounting head cleaning method for cleaning a mounting head having a nozzle shaft having a nozzle mounting portion to which a nozzle is detachably attached and a nozzle communication passage communicating with the nozzle mounted on the nozzle mounting portion, a first supply portion having a first supply passage to which negative or positive pressure is supplied, a second supply portion having a second supply passage to which positive pressure is supplied, and a switching valve for switching between the first supply passage and the second supply passage that communicates with the nozzle communication passage, wherein the first supply passage to which positive pressure is supplied is connected to the nozzle communication passage, and an airflow is generated that flows from the first supply passage into the nozzle communication passage and passes through the nozzle communication passage, thereby cleaning the first supply passage.

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