Ultrasonic inspection device and method for operating ultrasonic inspection device

Abstract

An ultrasonic inspection device (10) is configured to use measurement devices (12) each provided with a transmission / reception unit (121) for transmitting and receiving ultrasound to perform ultrasonic inspection of an object under inspection by switching between a first ultrasonic inspection in which a gas is placed in a space between the transmission / reception unit (121) and the object under inspection, and a second ultrasonic inspection in which a liquid is placed in the space. The measurement device (12) for use in the first ultrasonic inspection and the measurement device (12) for use in the second ultrasonic inspection are mounted in the same scanning device (11).

Description

Ultrasonic inspection device and method for operating an ultrasonic inspection device

[0001] The present disclosure relates to an ultrasonic inspection device and a method for operating an ultrasonic inspection device.

[0002] Patent Document 1 describes "an ultrasonic inspection device 1 that inspects a subject E by irradiating an ultrasonic beam to the subject E through a gas, comprising a transmission probe 110 that emits an ultrasonic beam and a reception probe 120 installed on the opposite side of the transmission probe 110 with respect to the subject E, and an eccentricity adjustment unit 105 that adjusts the distance between the transmission sound axis AX1, which is the central axis of the propagation path of the ultrasonic beam emitted from the transmission probe 110, and the reception sound axis AX2, which is the central axis of the propagation path of the ultrasonic beam assumed to be emitted from the reception probe 120, to a distance greater than zero."

[0003] Japanese Patent Application Laid-Open No. 2021-32810

[0004] There may be cases where, after performing one of ultrasonic inspections (ultrasonic inspection using a gas) in which a gas is arranged in the space between the subject and the probe, or ultrasonic inspections (ultrasonic inspection using a liquid) in which a liquid is arranged in the space, the other ultrasonic inspection is to be performed. However, for example, when using the ultrasonic inspection device described in Patent Document 1, when performing the other ultrasonic inspection after one of the ultrasonic inspections, the subject is moved (transported) from one ultrasonic inspection device to the other ultrasonic inspection device. Therefore, it takes time and effort for the movement. The problem to be solved by the present disclosure is to provide an ultrasonic inspection device and an ultrasonic inspection method capable of switching between ultrasonic inspections using a gas and ultrasonic inspections using a liquid and executing them.

[0005] The ultrasonic inspection device of the present disclosure is configured to perform ultrasonic inspection of the subject by switching between a first ultrasonic inspection in which a gas is arranged in the space between the transmission / reception unit and the subject and a second ultrasonic inspection in which a liquid is arranged in the space, using a measuring device including a transmission / reception unit for transmitting and receiving ultrasonic waves, and the measuring device used in the first ultrasonic inspection and the measuring device used in the second ultrasonic inspection are attached to the same scanning device. Other solutions will be described later in the mode for carrying out the invention.

[0006] According to this disclosure, it is possible to provide an ultrasonic inspection apparatus and an ultrasonic inspection method that can switch between performing ultrasonic inspection using gas and ultrasonic inspection using liquid.

[0007] This is a schematic diagram of an ultrasound inspection device viewed from the side, illustrating the case when performing ultrasound inspection based on the transmission method. This is a schematic diagram viewed from a direction 90° different in the horizontal plane from the direction shown in Figure 1. This is a schematic diagram of an ultrasound inspection device viewed from the side, illustrating the case when performing ultrasound inspection based on the reflection method. This is a diagram illustrating an identification device, showing a state where only one mechanical switch is turned on according to the length of the connected arm. This is a diagram illustrating an identification device, showing a state where two mechanical switches are turned on according to the length of the connected arm. This is a diagram illustrating an identification device, showing a state where two mechanical switches are turned off because the arm is not connected. This is a block diagram showing the specific hardware configuration of the control device. This is an image displayed on the display device when identifying the type of transmitting and receiving unit, and is an image displayed on the display device before identification. This is an image displayed on the display device when identifying the type of transmitting and receiving unit, and is an image displayed on the display device after identification. This is a block diagram of an ultrasound inspection device, a system diagram when performing a first ultrasound inspection. This is a block diagram of an ultrasound inspection device, a system diagram when performing a second ultrasound inspection. This is a block diagram of an ultrasound inspection device according to another embodiment, an example using a transmitting and receiving probe. This is a block diagram of an ultrasound inspection apparatus according to another embodiment, showing an example where a receiving circuit, which is an example of a signal processing unit, is shared between the first ultrasound inspection and the second ultrasound inspection. This is a block diagram of an ultrasound inspection apparatus according to another embodiment, showing an example where a transmitting and receiving probe is used, and a receiving circuit, which is an example of a signal processing unit, is shared between the first ultrasound inspection and the second ultrasound inspection. This is a flowchart explaining the operation method of the ultrasound inspection apparatus.

[0008] The following describes embodiments for implementing this disclosure, with reference to the drawings. The following is merely an example of how to implement the invention related to this disclosure, and this disclosure is not limited to the following example. Within the description of one embodiment below, other embodiments applicable to that embodiment will also be described as appropriate. This disclosure is not limited to the following embodiment, and different embodiments can be combined or modified as appropriate without significantly impairing the effects of this disclosure. In addition, the same reference numerals will be used for the same components, and redundant explanations will be omitted. Furthermore, components having the same function will be given the same name. The illustrations are schematic, and for illustrative purposes, the actual configuration may be changed or some components may be omitted or modified between drawings without significantly impairing the effects of this disclosure. Also, the same embodiment does not necessarily need to have all the components.

[0009] Figure 1 is a schematic diagram of the ultrasonic inspection apparatus 10 viewed from the side, illustrating the case when performing ultrasonic inspection based on the transmission method. In Figure 1, the liquid level L1 of liquid L, assuming that liquid L is placed in the water tank 16, is shown by a dashed line. The ultrasonic inspection apparatus 10 is a device that uses the measuring device 12 described later to perform ultrasonic inspection on, for example, the inside of a subject E. The subject E is a structure such as a wafer or a laminated structure. By ultrasonic inspection, defects, voids, cracks, etc. (hereinafter collectively referred to as defects, etc.) that may exist inside the subject E can be detected (inspected) non-destructively.

[0010] In the examples of this disclosure, ultrasound examination is performed by propagating ultrasound waves through a gas G, such as air or an inert gas (nitrogen, argon, etc.), although details will be described later. In the examples of this disclosure, the ultrasound examination method using gas G can be performed using ultrasound waves that have passed through the subject E, also known as the air transmission method (e.g., the air transmission method). However, it may also be performed using ultrasound waves reflected from defects on the surface or inside the subject E, also known as the air reflection method (e.g., the air reflection method). In addition, in this disclosure, ultrasound examination can also be performed by propagating ultrasound waves through a liquid L, such as water (pure water, ultrapure water, etc.) or any solvent. The ultrasound examination method using liquid L can be performed by selecting either transmitted ultrasound, also known as the liquid transmission method (e.g., the water transmission method), or reflected ultrasound, also known as the liquid reflection method (e.g., the water reflection method). In the example of this disclosure, a single ultrasound inspection device 10 can be used to switch between performing ultrasound inspections using a gas G (e.g., air transmission method) and ultrasound inspections using a liquid L (e.g., liquid transmission method, liquid reflection method).

[0011] The ultrasonic inspection apparatus 10 comprises a scanning device 11 (described later; not shown in Figure 1), a measuring device 12 equipped with a transmitting / receiving unit 121 for transmitting and receiving ultrasound, and a control device 50 (described later; not shown in Figure 1). The ultrasonic inspection apparatus 10 further comprises a sample stage 14, a fixing member 15, a water tank 16, and an identification device 17.

[0012] A measuring device 12 is attached to the scanning device 11. The scanning device 11 is equipped with, for example, an actuator (not shown) to move the measuring device 12 in the x and y directions (horizontal direction). This allows the subject E to be scanned. Movement of the measuring device 12 in the z direction (height direction; vertical direction) can be performed by, for example, a moving mechanism (not shown), but may also be performed by the scanning device 11. The scanning device 11 is connected to a control device 50, and the driving of the scanning device 11 is performed by the control device 50.

[0013] The measuring device 12 comprises a transmitting / receiving unit 121 and an arm 122. The transmitting / receiving unit 121 is, for example, a probe (described later) that transmits and receives ultrasound. Specifically, the transmitting / receiving unit 121 transmits ultrasound to the subject E and receives ultrasound that has passed through or been reflected by the subject E. The measuring device 12 is connected to a control device 50, and the driving of the measuring device 12 is performed by the control device 50.

[0014] A space 20 is formed between the transmitting / receiving unit 121 (e.g., a probe) and the subject E. By placing a gas G such as air in the space 20, ultrasonic testing based on the air transmission method and the air reflection method can be performed. In addition, by placing a liquid L such as water in the space 20, ultrasonic testing based on the liquid transmission method and the liquid reflection method can be performed. Hereinafter, ultrasonic testing performed with gas G placed in the space 20 will be referred to as "first ultrasonic testing," "ultrasonic testing using gas G," etc. In addition, ultrasonic testing performed with liquid L placed in the space 20 will be referred to as "second ultrasonic testing," "ultrasonic testing using liquid L," etc. The specific methods for placing gas G and liquid L in the space 20 will be described later.

[0015] The transmitting / receiving unit 121 may transmit and receive ultrasound using a single structure, or it may use multiple structures to separate the transmission and reception of ultrasound. In the example in Figure 1, the transmitting / receiving unit 121 includes a transmitting probe 121a (an example of a transmitting / receiving unit and a transmitting unit) that transmits ultrasound, and a receiving probe 121b (an example of a transmitting / receiving unit and a receiving unit) that receives ultrasound. The transmitting probe 121a includes a transmitting probe 121a1 (Figure 10) used in a first ultrasound examination and a transmitting probe 121a2 (Figure 11) used in a second ultrasound examination. The receiving probe 121b includes a receiving probe 121b1 (Figure 10) used in a first ultrasound examination and a receiving probe 121b2 (Figure 11) used in a second ultrasound examination.

[0016] The transmitting probe 121a is, for example, a focusing probe that focuses the ultrasonic waves it transmits (emits, irradiates). The receiving probe 121b is also a focusing probe that focuses the ultrasonic waves if ultrasonic waves are transmitted from the receiving probe 121b, but it may also be a non-focusing probe that does not focus.

[0017] The measuring device 12 includes a first measuring device used in the first ultrasonic examination (ultrasonic examination using gas G) and a second measuring device used in the second ultrasonic examination (ultrasonic examination using liquid L). The first measuring device consists of a transmitting probe 121a1 and a receiving probe 121b1 (both in Figure 10) when based on the transmission method, and a transmitting / receiving probe (not shown) that can be used in air when based on the reflection method. The second measuring device consists of a transmitting probe 121a2 and a receiving probe 121b2 (both in Figure 11) when based on the transmission method, and a transmitting / receiving probe 121c2 (Figure 12) when based on the reflection method. In this disclosure, the transmitting probe, receiving probe and transmitting / receiving probe may be collectively referred to simply as "probes". The probe, as a transmitting / receiving unit 121, is a structure that irradiates ultrasound onto a subject E and receives ultrasound reflected by or transmitted through the subject E. The transmitting / receiving probe 121c2 is a single probe that transmits and receives ultrasound.

[0018] Accordingly, the first measuring device 12 used in the first ultrasound examination based on the transmission method comprises a transmitting probe 121a1 (first transmitting probe) that transmits ultrasound to the subject E, and a receiving probe 121b1 (first receiving probe) which is configured separately from the transmitting probe 121a1 and receives ultrasound that has been transmitted through the subject E. The second measuring device 12 used in the second ultrasound examination based on the transmission method comprises a transmitting probe 121a2 (second transmitting probe) that transmits ultrasound to the subject E, and a receiving probe 121b2 (second receiving probe) which is configured separately from the transmitting probe 121a2 and receives ultrasound that has been transmitted through the subject E.

[0019] Furthermore, in another embodiment, the first measuring device 12 used in a first ultrasound examination based on the reflection method includes a transmitting / receiving probe (not shown) that transmits ultrasound to the subject E and receives ultrasound reflected by the subject E. The second measuring device 12 used in a second ultrasound examination based on the reflection method includes a transmitting / receiving probe 121c2 that transmits ultrasound to the subject E and receives ultrasound reflected by the subject E.

[0020] Figure 2 is a schematic diagram viewed from a direction (x direction) that is 90° different in the horizontal plane from the direction shown in Figure 1 (y direction). The transmitting probe 121a and the receiving probe 121b are positioned opposite each other with the subject E in between.

[0021] In the example shown in Figure 2, the ultrasound transmitted from the transmitting probe 121a passes through the subject E and reaches the receiving probe 121b. When the ultrasound passes through the subject E, if there are defects or other issues in the ultrasound propagation path, the ultrasound intensity received by the receiving probe 121b will be weaker than if there were no defects. This allows for the detection of the presence of defects or other issues.

[0022] In the example shown in Figure 2, the transmitting probe 121a is positioned above the subject E, and the receiving probe 121b is positioned below the subject E. However, the transmitting probe 121a may also be positioned below the subject E, and the receiving probe 121b may be positioned above the subject E.

[0023] Figure 3 is a schematic diagram of the ultrasound examination apparatus 10 viewed from the side, illustrating the case when performing an ultrasound examination based on the reflection method. When performing an ultrasound examination based on the reflection method, the transmitting and receiving unit 121 provided in the measuring device 12 uses a single probe to transmit and receive ultrasound. Therefore, the transmitting and receiving unit 121 is equipped with a transmitting and receiving probe 121c that transmits ultrasound and receives ultrasound reflected by the subject E. The transmitting and receiving probe 121c includes a transmitting and receiving probe (not shown) used for the first ultrasound examination and a transmitting and receiving probe 121c2 (Figure 12) used for the second ultrasound examination. The transmitting and receiving probe 121c is positioned only on one side (the upper side in the illustrated example) when viewed from the subject E, and not on the other side (the lower side in the illustrated example). For this reason, unlike the example in Figure 1, the measuring device 12 does not have an arm 122.

[0024] In the example shown in Figure 3, a portion of the ultrasound transmitted from the transmitting / receiving probe 121c to the subject E is reflected from the upper surface of the subject E and returns to the transmitting / receiving probe 121c. The remaining ultrasound propagates inside the subject E and is reflected by defects, etc., returning to the transmitting / receiving probe 121c. Therefore, the presence and height position of defects, etc., can be detected based on the reception time of the reflected waves (the time difference of the received ultrasound).

[0025] In the example shown in Figure 3, the transmitting / receiving probe 121c is positioned above the subject E, but it may also be positioned below the subject E.

[0026] Returning to Figure 1, the measuring device 12 includes a transmitting / receiving unit 121 and an arm 122 for fixing the receiving probe 121b. The arm 122 is used in the case of ultrasound examination based on the transmission method (first ultrasound examination and second ultrasound examination). The arm 122 is positioned to the side of the sample stage 14 so as not to come into contact with the sample stage 14 on which the subject E is placed. The upper end of the arm 122 is fixed to a fixing member 15. The transmitting probe 121a is also fixed to the fixing member 15. The receiving probe 121b is fixed to the lower end of the arm 122. Therefore, the transmitting probe 121a and the receiving probe 121b are fixed to the fixing member 15 that fixes the probes. As the scanning device 11 moves the fixing member 15, the transmitting probe 121a and the receiving probe 121b move together with the fixing member 15.

[0027] The water tank 16 is a structure located below the sample stage 14 and has a bottom surface 161. The bottom surface 161 is located below the sample stage 14. Therefore, for example, by storing liquid L (such as pure water) in the water tank 16 and immersing the subject E and the transmitting / receiving unit 121 in the liquid L, a layer of liquid L can be formed in the space 20 between the transmitting / receiving unit 121 and the subject E. This allows ultrasonic waves to be propagated in the liquid L, enabling ultrasonic testing of the subject E based on the transmission method and the reflection method. If gas G is introduced into the water tank 16, a layer of gas G will be formed in the space 20. This allows ultrasonic waves to be propagated in the gas G, enabling ultrasonic testing of the subject E based on the transmission method and the reflection method. Therefore, in the example of this disclosure, ultrasonic testing using gas G and ultrasonic testing using liquid L can be switched and performed in the same measurement space (the internal space of the water tank 16).

[0028] In ultrasonic testing using gas G and ultrasonic testing using liquid L, the transmission method or reflection method does not need to be the same; they may be different. For example, ultrasonic testing based on the transmission method using gas G and ultrasonic testing based on the transmission method using liquid L may be switched, or ultrasonic testing based on the transmission method using gas G and ultrasonic testing based on the reflection method using liquid L may be switched.

[0029] In the illustrated example, the height of the side walls of the water tank 16 is such that the subject E and the transmitting / receiving unit 121 can be immersed in the liquid L. However, for example, a layer of liquid L can be formed in the space 20 by supplying liquid L locally (partially) to the space 20 using a liquid injection mechanism (not shown). In this case, since it is not necessary to immerse the subject E and the transmitting / receiving unit 121 in the liquid L, the height of the side walls may be such that they can receive the liquid L falling from the sample stage 14 and the subject E. Therefore, it is not necessary to make the height of the side walls of the water tank 16 such that the subject E and the transmitting / receiving unit 121 can be immersed in the liquid L.

[0030] The measuring device 12 is attached to the same scanning device 11. That is, the first measuring device (measuring device 12) used in the first ultrasound examination and the second measuring device (measuring device 12) used in the second ultrasound examination are attached to the same scanning device 11. The first measuring device is, as described above, a transmitting probe 121a1 and a receiving probe 121b1, or a transmitting and receiving probe (not shown) that can be used in the air reflection method. The second measuring device is, as described above, a transmitting probe 121a2 and a receiving probe 121b2, or a transmitting and receiving probe 121c2 (Figure 12). The same scanning device 11 as used here means that the same scanning device 11 is used regardless of the ultrasound examination method in the ultrasound examination apparatus 10 (transmission method, reflection method, whether gas G or liquid L is used, etc.), that is, the scanning device 11 used is common.

[0031] Furthermore, the ultrasonic inspection method can be selected, or switched, by replacing (changing) the measuring device 12 attached to the scanning device 11 according to whether gas G or liquid L is used, and whether transmitted ultrasonic waves or reflected ultrasonic waves are received. In addition, there is no need to replace the sample stage 14 between ultrasonic inspection using gas G and ultrasonic inspection using liquid L. That is, by appropriately replacing the measuring device 12 with the subject E placed on the sample stage 14, it is possible to perform, for example, an ultrasonic inspection with gas G placed in the space 20 (gas G interposed between the transmitting / receiving unit 121 and the subject E) and an ultrasonic inspection with liquid L placed in the space 20 (liquid L interposed between the transmitting / receiving unit 121 and the subject E) in succession on the same subject E.

[0032] However, replacing the measuring device 12 is not mandatory. That is, for example, if an ultrasonic inspection with gas G and an ultrasonic inspection with liquid L can be performed using the same (common) probe, the ultrasonic inspection with gas G and the ultrasonic inspection with liquid L can be switched and performed without replacing the measuring device 12.

[0033] As described above, the ultrasound examination apparatus 10 is configured to use the measuring device 12 to switch between an ultrasound examination with gas G placed in the space 20 (first ultrasound examination) and a second ultrasound examination with liquid L placed in the space 20, thereby performing an ultrasound examination on the subject E (second ultrasound examination). This eliminates the need to move the subject E from one ultrasound examination apparatus to the other when performing one ultrasound examination with gas G or the other with liquid L. This reduces the effort required to move the subject E.

[0034] The term "switching" means that a single ultrasound examination device 10 can perform both a first ultrasound examination and a second ultrasound examination according to the user's selection. Therefore, when switching, it is not necessarily required that the settings conditions of the ultrasound examination device 10 for the first ultrasound examination (for example, the electrical circuits used (transmitting circuits 51a, 51b and receiving circuits 52a, 52b, etc., described below)) and the settings conditions of the ultrasound examination device 10 for the second ultrasound examination (same) be automatically set by, for example, the control device 50.

[0035] The identification device 17 is a device that identifies the measuring device 12 (equipped with a transmitting / receiving unit 121, an appropriate arm 122, etc.) attached to the scanning device 11. The identification device 17 is a device that identifies whether the measuring device 12 attached to the scanning device 11 is used for first ultrasound examination or second ultrasound examination. This allows the use of the appropriate measuring device 12 depending on the type of first ultrasound examination apparatus or second ultrasound examination apparatus. In addition, the first ultrasound examination apparatus or second ultrasound examination apparatus can be properly operated depending on the attached measuring device 12.

[0036] The identification device 17 is not limited to these, but includes at least one of the following: a physical mechanical switch, an RFID tag, a proximity sensor, an optical sensor, a one-dimensional barcode or a two-dimensional barcode, and a camera.

[0037] Figure 4 illustrates the identification device 17 and shows a state in which only one switch 171 is turned on, depending on the length of the connected arm 122. Figure 5 illustrates the identification device 17 and shows a state in which both switches 171 and 172 are turned on, depending on the length of the connected arm 122. Figure 6 illustrates the identification device 17 and shows a state in which both switches 171 and 172 are turned off, as the arm 122 is not connected. In the examples of this disclosure, switches 171 and 172, which are examples of the identification device 17, are mechanical switches. Mechanical switches are turned on, for example, by pressing (contacting) and turned off when the press is released.

[0038] The arm 122 includes, for example, an arm 122a used for a first ultrasound examination and an arm 122b used for a second ultrasound examination. The arm 122 is equipped with an identification section 122c for identifying the type of arm 122 (whether it is arm 122a or arm 122b) attached to the fixing member 15 by an identification device 17. In the examples of Figures 4 and 5, the identification section 122c is the upper end of the arm 122 and is the portion that extends vertically. The height of the identification section 122c in arm 122a (Figure 5) is higher than the height of the identification section 122c in arm 122b (Figure 4).

[0039] For example, when performing an ultrasound examination based on the transmission method using liquid L (transmission method), both the transmitting probe 121a and the receiving probe 121b are used. Therefore, an arm 122b is used to position the receiving probe 121b, for example, below the subject E. The height of the identification part 122c of the arm 122b, to which the receiving probe 121b used in the transmission method is fixed, is relatively low. For this reason, as shown in Figure 4, when the arm 122b is fixed to the fixing member 15, the arm 122b only contacts the switch 171, thereby turning only the switch 171 on, and does not contact the switch 172, so the switch 172 remains off.

[0040] Next, for example, when performing an ultrasonic examination based on the transmission method using gas G (air transmission method), both the transmitting probe 121a and the receiving probe 121b are used, as explained with reference to Figure 4 above. However, the height of the identification part 122c of the arm 122a used in the air transmission method is relatively high. For this reason, as shown in Figure 5, when the arm 122a is fixed to the fixing member 15, the arm 122a comes into contact with both switches 171 and 172, thereby turning on both switches 171 and 172.

[0041] Finally, when performing an ultrasound examination based on the transmission method using gas G (air transmission method; air transmission method may also be used), the transmitting and receiving probe 121c is used, and the transmitting and receiving unit 121 is not positioned, for example, below the subject E. Therefore, the arm 122 is not fixed to the fixing member 15, as shown in Figure 6. For this reason, both switches 171 and 172 are off.

[0042] As shown in FIGS. 4 to 6, by identifying whether switches 171 and 172 are on or off, it is possible to determine whether it is gas G or liquid L, and whether it is the reflection method or the transmission method.

[0043] As described above, the identification device 17 detects the attachment state of the measurement device 12, specifically, for example, the attachment state of an arm 122 (which may be a transmission / reception unit 121, a probe, etc.) as an element of the measurement device 12 to a fixing member 15. Thereby, the identification device 17 identifies whether the probe (transmission probe 121a, reception probe 12lb, and transmission / reception probe 121c) fixed to the fixing member 15 is a probe used for either the first ultrasonic inspection or the second ultrasonic inspection. By doing so, the ultrasonic inspection device 10 itself can identify the type (individual information) of the attached probe, and various controls can be executed using the obtained information.

[0044] FIG. 7 is a block diagram showing a specific hardware configuration of the control device 50. The control device 50 is a device that executes at least part of the control of the operation, driving, etc. of the ultrasonic inspection device 10 and the operation method of the ultrasonic inspection device 10. The control device 50 includes, for example, a CPU (Central Processing Unit) 1001, a RAM (Random Access Memory) 1002, a ROM (Read Only Memory) 1003, an I / F (Inter Face) 1004, a bus 1005, etc. The CPU 1001, the RAM 1002, the ROM 1003, and the I / F 1004 are connected via, for example, a bus 1005. The control device 50 is realized by a predetermined control program (for example, the ultrasonic inspection method of the present disclosure, the operation method of the ultrasonic inspection device 10, etc.) stored in the ROM 1003 being developed in the RAM 1002 and executed by the CPU 1001. The exchange of signals and information between the control device 50 and various devices (scanning device 11, measurement device 12, identification device 17, server, personal computer, etc.), external networks, etc. is performed hardware-wise through the I / F 1004.

[0045] The control device 50 switches the signal processing units 51 and 52 to either the signal processing unit 51 (FIG. 10) used for the first ultrasonic inspection or the signal processing unit 52 (FIG. 10) used for the second ultrasonic inspection according to the identification result by the identification device 17. Whether to use the liquid L or the gas G may result in different inspection conditions (such as driving frequency, method of processing received signals, electric circuits used for transmitting and receiving ultrasonic waves, etc.) for the ultrasonic inspection. Therefore, the signal processing units 51 and 52 are configured corresponding to the respective inspection conditions. And by the control device 50 switching to the appropriate signal processing units 51 and 52 according to the identification result, the labor of the user can be reduced. Also, switching errors can be avoided.

[0046] Note that the signal processing units 51 and 52 mentioned here are functional units that execute appropriate conditions for the ultrasonic inspection. This functional unit can be realized by software as well as by hardware. The signal processing units 51 and 52, for example, process the signals received by the receiving probe 121b and the transmitting and receiving probe 121c, and also process (generate) signals for transmitting ultrasonic waves from the transmitting probe 121a and the transmitting and receiving probe 121c.

[0047] However, the identification device 17 may be used to execute different processes with or by switching the signal processing units 51 and 52. For example, the identification device 17 may be used to display on the display device 60 (described later) which measurement device 12 is being used. The control device 50 can display the identification result by the identification device 17 (for example, the medium in use (gas G or liquid L), and the inspection method (transmission method or reflection method)) on the display device 60. When the display device is a lamp, the lamp corresponding to the medium in use and the inspection method can be lit.

[0048] Also, the signal processing units 51 and 52 can be controlled by the control device 50 as described above, but they may also be switched by the user himself / herself instead of the control device 50. Specifically, the user who visually recognizes the display device 60 (such as a lamp) can appropriately switch the signal processing units 51 and 52 to either one according to the display result on the display device 60.

[0049] The control device 50 detects the switching of the gas G or liquid L to be placed in the space 20 by detecting that the first measuring device or the second measuring device has been switched. Detection can be performed, for example, by the identification device 17. The gas G or liquid L to be placed in the space 20 differs between the first measuring device used for the first ultrasonic examination and the second measuring device used for the second ultrasonic examination. Therefore, by detecting the switching of the first measuring device or the second measuring device, the type of fluid, which is either the gas G or the liquid L to be placed in the space 20, can be determined.

[0050] Figure 8 shows an image 61 displayed on the display device 60 when identifying the type of transmitting / receiving unit 121, and an image 61 displayed on the display device 60 before identification. Figure 9 shows an image 61 displayed on the display device 60 when identifying the type of transmitting / receiving unit 121, and an image 61 displayed on the display device 60 after identification. When the ultrasonic inspection device 10 is in operation, the display device 60 displays, for example, an image of the analysis program. Depending on the type of ultrasonic inspection (whether it is a gas G or a liquid L, whether it is a transmission method or a reflection method, etc.), the program used may differ. Therefore, for example, as shown in Figures 8 and 9, the program used for the ultrasonic inspection method identified by the identification result may be displayed according to the identification result. For example, in the case of ultrasonic inspection based on the liquid transmission method (second ultrasonic inspection), a step of supplying (injecting) liquid L into the space 20 occurs. Therefore, the button 62 (Figure 8), which could not be pressed before identification, can be pressed (Figure 9) after it is detected that the measuring device 12 used for the second ultrasonic inspection has been installed.

[0051] Furthermore, for example, the control device 50 may be configured to notify an alert via the display device 60 if a different measuring device 12 is attached, even though the user is attempting to operate the ultrasound examination device 10 in a predetermined manner according to the user's settings. An identification device 17 using RFID can also notify an alert if the operating method is set to liquid reflection method or air reflection method, even though a measuring device 12 corresponding to the liquid transmission method has been attached. In this case, along with the notification, the device may also prompt the user to change to the correct operating method or measuring device 12.

[0052] Figure 10 is a block diagram of the ultrasound inspection apparatus 10, and is a system diagram for when the first ultrasound inspection is performed. In the example shown in Figure 10 and Figure 11 below, different signal processing units 51 and 52 are used for the first ultrasound inspection and the second ultrasound inspection. In the example of Figure 10, a transmitting probe 121a1 and a receiving probe 121b1 for ultrasound inspection using gas G (first ultrasound inspection) are attached. The data processing unit 53 for generating and processing electrical signals used in the ultrasound inspection apparatus 10 and the signal processing unit 51 for the first ultrasound inspection are connected by closing switches 541 and 542. Analog signals and digital signals are converted in the data processing unit 53. On the other hand, the data processing unit 53 and the signal processing unit 52 for the second ultrasound inspection are not connected by opening switches 543 and 544. The opening and closing of switches 541, 542, 543, and 544 can be performed by the data processing unit 53 according to the type of transmitting / receiving unit 121 identified by the identification device 17.

[0053] The signal processing unit 51 includes a waveform generator 511, an amplifier 512, a filter 513, and an amplifier 514. Of these, the waveform generator 511 and amplifier 512 constitute a transmitting circuit 51a (high-voltage pulse application circuit; electrical circuit). The transmitting circuit 51a is an electrical circuit for transmitting ultrasonic waves from a transmitting probe 121a1 (or a transmitting / receiving probe). The filter 513 and amplifier 514 constitute a receiving circuit 51b (signal processing circuit). The receiving circuit 51b is an electrical circuit for inputting ultrasonic waves received by a receiving probe 121b1 (or a transmitting / receiving probe) to the data processing unit 53. Upon receiving a command from the data processing unit 53, the waveform generator 511 generates a voltage having a predetermined waveform (e.g., a pulse wave). The generated voltage is amplified by the amplifier 512, and the voltage output from the amplifier 512 is applied to the transmitting probe 121a1, thereby transmitting ultrasonic waves from the transmitting probe 121a1.

[0054] The transmitted ultrasound passes through the subject E and is received by the receiving probe 121b1. The electrical signal of the received ultrasound is amplified by the amplifier 514. The amplified electrical signal is filtered by a filter 513 (e.g., a high-pass filter, a low-pass filter, a band-pass filter, etc.) to remove predetermined portions, and then input to the data processing unit 53.

[0055] The scanning device 11 comprises a scan controller 111, a position measuring unit 112, and a drive unit 113. The scan controller 111 drives the measuring device 12 through the drive unit 113, which includes, for example, an actuator. The drive unit 113 is a device that changes the relative position of the transmitting / receiving unit 121 with respect to the subject E by driving the measuring device 12. The position measuring unit 112 is a device that measures the scanning position, such as an encoder. The scanning position from the transmitting / receiving unit 121 is input to the scan controller 111 through the position measuring unit 112.

[0056] Figure 11 is a block diagram of the ultrasound examination apparatus 10, and is a system diagram for when a second ultrasound examination is performed. In the example in Figure 11, a transmitting probe 121a2 and a receiving probe 121b2 for the second ultrasound examination using liquid L are attached. The data processing unit 53 and the signal processing unit 52 for the second ultrasound examination are connected by closing switches 543 and 544. On the other hand, the data processing unit 53 and the signal processing unit 51 for the first ultrasound examination are not connected by opening switches 541 and 542.

[0057] The signal processing unit 52 includes a waveform generator 521, an amplifier 522, a filter 523, and an amplifier 524. Of these, the waveform generator 521 and amplifier 522 constitute a transmitting circuit 52a (high-voltage pulse application circuit; electrical circuit). The transmitting circuit 52a is an electrical circuit for transmitting ultrasonic waves from a transmitting probe 121a2 (or a transmitting / receiving probe). The filter 523 and amplifier 524 constitute a receiving circuit 52b (signal processing circuit). The receiving circuit 52b is an electrical circuit for inputting ultrasonic waves received by a receiving probe 121b2 (or a transmitting / receiving probe) to the data processing unit 53. Upon receiving a command from the data processing unit 53, the waveform generator 521 generates a voltage having a predetermined waveform (e.g., a pulse wave). The generated voltage is amplified by amplifier 522, and the voltage output from amplifier 522 is applied to the transmitting probe 121a2, thereby transmitting ultrasonic waves from the transmitting probe 121a2.

[0058] The transmitted ultrasound passes through the subject E and is received by the receiving probe 121b2. The electrical signal of the received ultrasound is amplified by the amplifier 524. The amplified electrical signal is filtered by a filter 523 (e.g., a high-pass filter, low-pass filter, band-pass filter, etc.) to remove predetermined portions, and then input to the data processing unit 53.

[0059] Figure 12 is a block diagram of an ultrasound examination apparatus 10 according to another embodiment, and is a block diagram showing an example in which a transmitting / receiving probe 121c2 is used. In Figure 12, for convenience, the transmitting / receiving probe 121c2 is connected as a probe for a second ultrasound examination using liquid L. Therefore, in the example of Figure 12, a second ultrasound examination can be performed by reflecting ultrasound waves off the subject E in the liquid.

[0060] Figure 13 is a block diagram of an ultrasound examination apparatus 10 according to another embodiment, and is a block diagram showing an example in which receiving circuits 51b and 52b, which are examples of signal processing units 51 and 52, are common to the first ultrasound examination and the second ultrasound examination. In Figure 13, the receiving circuit 52c, which is the common receiving circuit 51b and 52b, is shown. However, the transmitting circuits 51a and 52a may also be common. In the example of Figure 13, for the sake of explanation, the transmitting probe 121a1 and receiving probe 121b1 for the first ultrasound examination and the transmitting probe 121a2 and receiving probe 121b2 for the second ultrasound examination are shown together.

[0061] In the example shown in Figure 13, the electrical signal (received signal) from receiving probe 121b1 and the electrical signal (received signal) from receiving probe 121b2 are both input to amplifier 524. The electrical signals are amplified by amplifier 524, processed by filter 523, and then input to data processing unit 53. Note that no switches are placed between filter 523 and data processing unit 53.

[0062] In the example shown in Figure 13, the receiving circuit (electrical circuit) consisting of amplifier 524 and filter 523 is shared, but the program for processing the received signal may be separate or shared. However, typically different settings and programs are used for the first ultrasound examination and the second ultrasound examination.

[0063] Regarding the switching of signal processing units 51 and 52, only one of the transmitting circuits 51a and 52a, or the receiving circuits 51b and 52b, may be switched. For example, the transmitting circuits 51a and 52a common to both the first and second ultrasound examinations may be used (i.e., not switched), and the receiving circuit 51b used for the first ultrasound examination and the receiving circuit 52b used for the second ultrasound examination may be switched. Alternatively, as shown in Figure 13, the transmitting circuit 51a used for the first ultrasound examination and the transmitting circuit 52a used for the second ultrasound examination may be switched, and the receiving circuits 51b and 52b (receiving circuit 52c) common to both the first and second ultrasound examinations may be used. Furthermore, as shown in Figures 10 and 11, the transmitting circuit 51a used for the first ultrasound examination and the transmitting circuit 52a used for the second ultrasound examination may be switched, and the receiving circuit 51b used for the first ultrasound examination and the receiving circuit 52b used for the second ultrasound examination may also be switched.

[0064] Figure 14 is a block diagram of an ultrasound inspection apparatus 10 according to another embodiment, which uses a transmitting / receiving probe 121c2 and shares a receiving circuit 52c, which is an example of a signal processing unit 51, 52, between the first ultrasound inspection and the second ultrasound inspection. In the example of Figure 14, for the sake of explanation, the transmitting probe 121a1 and receiving probe 121b1 for the first ultrasound inspection and the transmitting / receiving probe c2 for the second ultrasound inspection are shown together.

[0065] In the example shown in Figure 14, the received signals from both the receiving probe 121b1 and the transmitting / receiving probe 121c2 are input to the amplifier 534. The ultrasonic inspection apparatus 10 can also be configured in this way.

[0066] As described above, the receiving circuits 51b and 52b are shared, but the transmitting circuits 51a and 52a, which consist of waveform generators (waveform generators 511 and 521) and amplifiers (amplifiers 512 and 522), may also be shared.

[0067] Figure 15 is a flowchart illustrating the operation method of the ultrasound inspection device 10 (hereinafter referred to as the operation method of this disclosure). The operation method of this disclosure can also be referred to as an ultrasound inspection method using the ultrasound inspection device 10, etc. The operation method of this disclosure can be performed using the ultrasound inspection device 10. For this reason, the explanation of Figure 15 will be given with reference to Figure 1, etc., as appropriate.

[0068] The method of operation described herein involves performing either an ultrasonic inspection using gas G (first ultrasonic inspection) or an ultrasonic inspection using liquid L (second ultrasonic inspection) on a subject E that has undergone one ultrasonic inspection, followed by the other ultrasonic inspection. This allows the user to perform both the first and second ultrasonic inspections using a single ultrasonic inspection device 10. This allows the user to arbitrarily select and perform the inspection method according to conditions such as the application, material, and size of defects of the subject E. Whether to perform the first or second ultrasonic inspection can be performed, for example, by switching the corresponding transmitting and receiving unit 121. In addition, it can be performed, for example, by switching the corresponding signal processing units 51 and 52.

[0069] In the example of this disclosure, a second ultrasound examination is performed on the subject E that underwent the first ultrasound examination. Since the first ultrasound examination uses gas G, it has little effect on the subject E. For example, if the subject E is a lithium-ion secondary battery, electronic component, etc., and does not have resistance to liquid L (e.g., water), then if a lithium-ion secondary battery is placed in liquid L, the lithium-ion secondary battery will become unusable afterward.

[0070] On the other hand, liquid L allows for a higher frequency of transmitted ultrasound than gas G, resulting in higher detection accuracy for defects (especially minute defects). Therefore, ultrasonic inspection using liquid L (second ultrasonic inspection) has the advantage of superior detection accuracy compared to ultrasonic inspection using gas G (first ultrasonic inspection). For example, if a defect is found when a sample E is ultrasonically inspected in gas G, the sample E can then be subjected to a detailed ultrasonic inspection in liquid L. Based on the detailed inspection results of the sample E in liquid L, the manufacturing process of the sample E can be reviewed, allowing for changes to a manufacturing process that prevents defects from occurring and improving the yield of the sample E.

[0071] The specific operating method will be explained below. The operating method of this disclosure includes steps S1 to S11 in this order. Therefore, in the example of Figure 15, the second ultrasonic inspection is performed after the first ultrasonic inspection, but the first ultrasonic inspection may be performed after the second ultrasonic inspection. Also, in the example of Figure 15, air is used as the gas G and a water tank 16 with an open top is used, so the step of placing the gas G in the space 20 is not explicitly shown. However, if a gas G other than air is to be placed in the space 20, the step of placing the gas G in the space 20 may be performed between steps S3 and S4 described later.

[0072] In step S1, first, a measuring device 12 for ultrasonic testing using gas G, i.e., for first ultrasonic testing, is attached to the fixing member 15. The measuring device 12 comprises, for example, a transmitting and receiving unit 121 and an appropriate arm 122. Installation is performed, for example, by the user's manual labor, but may also be performed mechanically using any mounting device (not shown).

[0073] In step S2, the attached measuring device 12 is identified using the identification device 17. This identification determines, for example, whether the attached measuring device 12 is for first ultrasound examination or second ultrasound examination, and whether it is for transmission or reflection ultrasound. The identification result is input to the data processing unit 53.

[0074] In step S3, the control device 50 (data processing unit 53) switches to the electrical circuit and program corresponding to the measuring device 12 for the first ultrasound examination, i.e., the signal processing unit 51. This makes the ultrasound examination device 10 ready to perform the first ultrasound examination.

[0075] In step S4, the distance between the transmitting / receiving unit 121 and the subject E is adjusted. The adjustment can be made, for example, by adjusting the distance so that the focal point of the transmitted ultrasound is located inside the subject E. The adjustment can be performed, for example, manually by the user, but it may also be performed automatically by a machine depending on the strength of the received electrical signal, etc.

[0076] As described above, in the example of this disclosure, the transmitting probe 121a1, the receiving probe 121b1, and the arm 122 move together as a single unit. However, the arm 122 may be provided with a device (not shown) for adjusting the height position of the transmitting probe 121a. For example, by adjusting the height position of the transmitting probe 121a1 (e.g., vertical movement), the distance between the transmitting probe 121a1 and the subject E can be adjusted.

[0077] A drive device (not shown) may be provided to allow the transmitting probe 121a1 and the receiving probe 121b1 to move up and down independently. In this case, the distance between the transmitting probe 121a1 and the receiving probe 121b1 and the subject E can be adjusted by adjusting the height position of both the transmitting probe 121a1 and the receiving probe 121b1 using the drive device. Alternatively, the distance between the transmitting / receiving unit 121 and the subject E may be adjusted by adjusting the height position of the subject E by moving the subject E or the sample stage 14 up and down.

[0078] In the transmission method, the height (z-direction) position of one or both of the transmitting probe 121a1 and the receiving probe 121b1 is adjusted. On the other hand, in the reflection method, the height position of the integrated transmitting and receiving probe 121c is adjusted. Normally, due to the difference in refractive index when the ultrasound is incident on the subject E, the distance is adjusted to be different for ultrasound examinations using gas G and ultrasound examinations using liquid L.

[0079] In step S5, a first ultrasonic examination is performed using gas G. The first ultrasonic examination can be performed, for example, according to the system diagram shown in Figure 10 above.

[0080] In step S6, the already installed measuring device 12 is removed, and in its place, a transmitting probe 121a2 and a receiving probe 121b2 for a second ultrasound examination using liquid L are installed.

[0081] In step S6, after the first ultrasound examination, the measuring device 12 is switched from the measuring device 12 for the first ultrasound examination to the measuring device 12 for the second ultrasound examination. Specifically, after performing the first ultrasound examination using the transmitting probe 121a1 (first transmitting probe) and the receiving probe 121b1 (first receiving probe), the measuring device 12 is switched from the transmitting probe 121a1 and the receiving probe 121b1 to the transmitting probe 121a2 (second transmitting probe) and the receiving probe 121b2 (second receiving probe) for the second ultrasound examination. In another embodiment, in the case of the liquid reflection method, after performing the first ultrasound examination using the transmitting probe 121a1 and the receiving probe 121b1, the measuring device 12 is switched from the transmitting probe 121a1 and the receiving probe 121b1 to the transmitting and receiving probe 121c2 for the second ultrasound examination.

[0082] In step S7, the measuring device 12 is identified in the same manner as in step S2. In step S8, the control device 50 (data processing unit 53) switches to the electrical circuit and program for the second ultrasound examination, i.e., the signal processing unit 52, in the same manner as in step S3. This makes the ultrasound examination device 10 ready to perform the second ultrasound examination.

[0083] In step S9, liquid L is placed in space 20. This can be done, for example, by filling a water tank 16 with liquid L such as water and immersing the subject E and measuring device 12 in the liquid L. If the subject E is sensitive to water, the test may be performed by partially forming a layer (liquid film) of liquid L between the subject E and the measuring device 12.

[0084] In step S10, the distance between the transmitting / receiving unit 121 and the subject E is adjusted in the same manner as in step S4. However, the medium through which the ultrasound waves propagate (gas G or liquid L) differs between the first ultrasound examination and the second ultrasound examination. Therefore, in step S10, which uses liquid L, the distance adjustment is performed independently of step S4, which uses gas G. As a result of this independent distance adjustment, the distances in step S10 and step 4 are likely to be different, but they may end up being the same.

[0085] In this way, when switching between the measuring device 12 used for the first ultrasound examination (first measuring device) and the measuring device 12 used for the second ultrasound examination (second measuring device), the ultrasound transmission and reception distance set for the first and second ultrasound examinations is set by adjusting the distance between the transmitting / receiving unit 121 and the subject E. As a result, ultrasound can be appropriately transmitted to and received from the subject E in both the first and second ultrasound examinations, and defects can be detected.

[0086] In step S11, a second ultrasonic inspection is performed using liquid L. In this way, liquid L is filled between the transmitting / receiving unit 121 and the subject E in space 20, and the distance between the transmitting / receiving unit 121 and the subject E is adjusted, and then the second ultrasonic inspection is performed. This allows defects and other issues to be detected using liquid L.

[0087] 10 Ultrasound inspection device 11 Scanning device 111 Scan controller 112 Position measurement unit 113 Drive unit 12 Measuring device (first measuring device, second measuring device) 121 Transmitting / receiving unit 1211 Transmitting / receiving unit 121a Transmitting probe 121a1 Transmitting probe (first transmitting probe) 121a2 Transmitting probe (second transmitting probe) 121b Receiving probe 121b1 Receiving probe (first receiving probe) 121b2 Receiving probe (second receiving probe) 121c Transmitting / receiving probe 121c2 Transmitting / receiving probe 122 Arm 122a Arm 122b Arm 122c Identification unit 14 Sample stage 15 Fixing member 16 Water tank 161 Bottom surface 17 Identification device 171 Switch 172 Switch 20 Space 50 Control device 51 Signal processing unit 511 Waveform generator 512 Amplifier 513 Filter 514 Amplifier 52 Signal processing unit 521 Waveform generator 522 Amplifier 523 Filter 524 Amplifier 53 Data processing unit 534 Amplifier 541 Switch 542 Switch 543 Switch 544 Switch 60 Display device 61 Image AX1 Sound axis AX2 Sound axis E Subject G Gas G L Liquid L

Claims

1. An ultrasonic testing apparatus comprising a measuring device equipped with a transmitting and receiving unit for transmitting and receiving ultrasonic waves, configured to perform an ultrasonic testing of a subject by switching between a first ultrasonic testing in which gas is placed in the space between the transmitting and receiving unit and the subject, and a second ultrasonic testing in which liquid is placed in the space, wherein the measuring device used in the first ultrasonic testing and the measuring device used in the second ultrasonic testing are mounted on the same scanning device.

2. An ultrasonic inspection apparatus according to claim 1, wherein the measuring device comprises a first measuring device used in the first ultrasonic inspection and a second measuring device used in the second ultrasonic inspection, and is characterized by comprising a control device that detects the switching of a gas or liquid placed in the space by detecting that the first measuring device or the second measuring device has been switched.

3. An ultrasound inspection apparatus according to claim 1, comprising an identification device for identifying the measuring device, wherein the identification device identifies whether the measuring device attached to the scanning device is used for the first ultrasound inspection or for the second ultrasound inspection.

4. An ultrasonic inspection apparatus according to claim 3, characterized by comprising a control device that switches the signal processing unit to either the signal processing unit used for the first ultrasonic inspection or the signal processing unit used for the second ultrasonic inspection, according to the identification result by the identification device.

5. An ultrasonic testing apparatus according to claim 1, comprising: a sample stage on which a subject is placed; a probe, which serves as the transmitting and receiving unit, for irradiating the subject with ultrasound and receiving ultrasound reflected by or transmitted through the subject; a fixing member for fixing the probe; and an identification device that detects the mounting state of the measuring device to identify whether the probe fixed to the fixing member is a probe used for the first ultrasonic testing or the second ultrasonic testing.

6. An ultrasonic inspection apparatus according to claim 5, further comprising a water tank disposed below the sample stage.

7. A method for operating the ultrasound examination apparatus described in claim 1, characterized in that, after performing either the first ultrasound examination or the second ultrasound examination, the other ultrasound examination is performed on the subject who underwent the first ultrasound examination.

8. A method for operating an ultrasound examination apparatus according to claim 7, characterized in that, after the first ultrasound examination, the second ultrasound examination is performed on the subject who underwent the first ultrasound examination.

9. A method for operating an ultrasound inspection apparatus according to claim 7, wherein the measuring apparatus comprises a first measuring apparatus used for the first ultrasound inspection and a second measuring apparatus used for the second ultrasound inspection, and the method for operating an ultrasound inspection apparatus is characterized in that, when switching between the first measuring apparatus and the second measuring apparatus, the transmission and reception distance of ultrasound set for the first ultrasound inspection and the second ultrasound inspection, respectively, is set by adjusting the distance between the transmitting and receiving unit and the subject.

10. A method for operating an ultrasonic inspection apparatus according to claim 7, characterized in that, after the first ultrasonic inspection, the measuring device is switched from the measuring device for the first ultrasonic inspection to the measuring device for the second ultrasonic inspection, the liquid is filled in the space between the transmitting / receiving unit and the subject, the distance between the transmitting / receiving unit and the subject is adjusted, and then the second ultrasonic inspection is performed.

11. A method for operating an ultrasonic inspection apparatus according to claim 7, wherein the first measuring device used in the first ultrasonic inspection comprises a transmitting probe that transmits ultrasound to the subject, and a receiving probe configured separately from the transmitting probe that receives ultrasound that has passed through the subject, and the second measuring device used in the second ultrasonic inspection comprises a transmitting and receiving probe that transmits ultrasound to the subject and receives ultrasound reflected by the subject, and after performing the first ultrasonic inspection using the transmitting probe and the receiving probe, the measuring device is switched from the transmitting probe and the receiving probe to the transmitting and receiving probe, the liquid is filled between the transmitting and receiving unit and the subject in the space, and the distance between the transmitting and receiving unit and the subject is adjusted, and then the second ultrasonic inspection is performed.

12. A method for operating an ultrasonic inspection apparatus according to claim 7, wherein the first measuring device used in the first ultrasonic inspection comprises a first transmitting probe for transmitting ultrasound to a subject, and a first receiving probe configured separately from the first transmitting probe for receiving ultrasound that has passed through the subject, and the second measuring device used in the second ultrasonic inspection comprises a second transmitting probe for transmitting ultrasound to a subject, and a second receiving probe configured separately from the second transmitting probe for receiving ultrasound that has passed through the subject, and after performing the first ultrasonic inspection using the first transmitting probe and the first receiving probe, the measuring device is switched from the first transmitting probe and the first receiving probe to the second transmitting probe and the second receiving probe, the liquid is filled between the transmitting / receiving unit and the subject in the space, and the distance between the transmitting / receiving unit and the subject is adjusted, and then the second ultrasonic inspection is performed.

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