Substrate and manufacturing method therefor

Abstract

A substrate and a manufacturing method therefor. The substrate comprises: a base substrate; a plurality of groups of first electrodes, located on one side of the base substrate, wherein the first electrodes are reflective, and different groups of first electrodes correspond to pixels emitting light of different colors; and a plurality of groups of cavity length adjustment structures, located on sides of the plurality of groups of first electrodes away from the base substrate and in one-to-one correspondence with the plurality of groups of first electrodes, wherein different groups of cavity length adjustment structures corresponding to different colors of light have different thicknesses. A group of cavity length adjustment structures having the smallest thickness is composed of a first blocking layer, and the remaining groups of cavity length adjustment structures are each composed of a first pad layer and the first blocking layer. The first pad layer is located between corresponding first electrodes and the first blocking layer. The first pad layer is made of an organic material, and the first blocking layer is made of an inorganic material.

Description

A substrate and its manufacturing method

[0001] Cross-references to related applications

[0002] This application claims priority to Chinese Patent Application No. 202510097592.1, filed on January 21, 2025, entitled "A Substrate and a Method for Manufacturing the Substrate Thereof," the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure relates to the field of display technology, and in particular to a substrate and a method for manufacturing the same. Background Technology

[0004] Organic light-emitting diodes (OLEDs) on silicon utilize mature silicon-based semiconductor processes to fabricate OLED displays with high brightness, high color gamut, low power consumption, high pixel density (Pixels Per Inch, PPI), and high refresh rate. They are widely used in the fields of virtual reality (VR) and augmented reality (AR).

[0005] To achieve high-brightness displays, the anode in the display needs to have high reflectivity. To achieve high color gamut displays, a special cavity length structure is required to purify light of specific wavelengths. Traditional cavity length structures are primarily composed of metal oxide layers, such as indium tin oxide (ITO), and inorganic layers, such as silicon oxide (SiO). Different cavity length structures are formed through multiple photolithography and etching processes. This process is complex, and the multiple etching and wet processing steps during fabrication reduce the thickness of the anode film. Damage to the anode surface worsens its roughness, leading to decreased reflectivity and consequently reduced brightness and lifespan of the display. Summary of the Invention

[0006] This disclosure provides a substrate and a method for manufacturing the same, in order to solve the aforementioned technical problems existing in the prior art.

[0007] In a first aspect, to solve the above-mentioned technical problems, embodiments of this disclosure provide a substrate, comprising:

[0008] Substrate;

[0009] Multiple sets of first electrodes are located on one side of the substrate, and the first electrodes are reflective; different sets of first electrodes correspond to pixels that emit different colors of light;

[0010] Multiple cavity length adjustment structures are located on the side of the multiple sets of first electrodes away from the substrate and correspond one-to-one with the multiple sets of first electrodes; the thickness of the different sets of cavity length adjustment structures corresponds to different colors of light;

[0011] The group of cavity length adjustment structures with the smallest thickness consists of a first barrier layer, while the remaining groups of cavity length adjustment structures all consist of a first pad and the first barrier layer. The first pad is located between the corresponding first electrode and the first barrier layer. The first pad is made of organic material, and the first barrier layer is made of inorganic material.

[0012] In one possible implementation, the substrate further includes:

[0013] Multiple microlens structures are located on the side of the multiple sets of first electrodes away from the substrate.

[0014] The multiple sets of microlens structures correspond one-to-one with the cavity length adjustment structures of the remaining sets; the side of the microlens structure away from the substrate is a convex surface.

[0015] In one possible implementation, the multiple sets of microlens structures correspond one-to-one with the cavity length adjustment structures of the remaining sets;

[0016] The cavity length adjustment structures of the remaining groups are reused as corresponding microlens structures.

[0017] In one possible implementation, the multiple sets of microlens structures correspond one-to-one with the multiple sets of first electrodes, and the multiple sets of microlens structures are located on the side of the multiple sets of cavity length adjustment structures away from the substrate.

[0018] The microlens structure includes a second pad and a second blocking layer, with the second pad located between the first blocking layer and the second blocking layer.

[0019] In one possible implementation, the first electrode includes:

[0020] A pad structure is located on one side of the substrate; the side of the pad structure away from the substrate is a convex surface;

[0021] A conductive structure is located on the side of the pad structure away from the substrate, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure.

[0022] In one possible implementation, the thickness of the first pad layer in the cavity length adjustment structures of the remaining groups is different for the cavity length adjustment structures in different groups, and the thickness of the first blocking layer in each cavity length adjustment structure is the same.

[0023] In one possible implementation, the substrate further includes:

[0024] Multiple light-emitting structures are located on the side of the multiple cavity length adjustment structures away from the substrate.

[0025] The second electrode is located on the side of the plurality of light-emitting structures away from the substrate, and the second electrode is transparent to light.

[0026] Secondly, embodiments of this disclosure provide a method for manufacturing a substrate, comprising:

[0027] Provide a substrate;

[0028] Multiple sets of first electrodes are formed on one side of the substrate; the first electrodes reflect light, and different sets of first electrodes correspond one-to-one with pixels that emit different colors of light;

[0029] On the side of the plurality of first electrodes away from the substrate, a plurality of cavity length adjustment structures are formed, each corresponding to one of the plurality of first electrodes; the thickness of the cavity length adjustment structures corresponding to different colors is different; the cavity length adjustment structure with the smallest thickness is composed of a first barrier layer, and the cavity length adjustment structures of the remaining groups are all composed of a first pad layer and the first barrier layer; the first pad layer is located between the corresponding first electrode and the first barrier layer, the first pad layer is composed of an organic material, and the first barrier layer is composed of an inorganic material.

[0030] One possible implementation involves forming a plurality of cavity length adjustment structures, each corresponding to one of the plurality of first electrodes, on the side of the plurality of first electrodes away from the substrate, including:

[0031] On the side of the plurality of first electrodes away from the substrate, a first sub-pad layer having a first thickness is coated, and the first sub-pad layer is cured after the first sub-pad layer corresponding to the surface of the first electrode with the third color light is removed.

[0032] On the side of the first sub-pad layer away from the substrate, a second sub-pad layer with a second thickness is coated, and the second sub-pad layer is cured after removing the second sub-pad layer in the area where the first electrode corresponding to the second color light and the area where the first electrode corresponding to the third color light is located.

[0033] The first barrier layer is deposited on the side of the second sub-pad layer away from the substrate.

[0034] One possible implementation, after forming multiple cavity length adjustment structures corresponding one-to-one with the multiple sets of first electrodes, further includes:

[0035] On the side of the multiple cavity length adjustment structures away from the substrate, a multiple lens structure is formed that corresponds one-to-one with the multiple first electrodes; the side of the lens structure away from the substrate is a convex surface.

[0036] One possible implementation includes forming a plurality of first electrodes on one side of the substrate, comprising:

[0037] Multiple sets of pad structures are formed on one side of the substrate; the side of the pad structure away from the substrate is a convex surface.

[0038] Multiple sets of conductive structures are deposited on the side of the plurality of pad structures away from the substrate; the plurality of conductive structures correspond one-to-one with the plurality of pad structures, and the refractive index of the conductive structures is greater than the refractive index of the cavity length adjustment structure; the first electrode includes the pad structure and the corresponding conductive structure. Attached Figure Description

[0039] Figure 1 is a schematic diagram of the structure of a substrate provided in an embodiment of this disclosure;

[0040] Figure 2 is a schematic diagram of another substrate provided in an embodiment of this disclosure;

[0041] Figures 3 and 4 are schematic diagrams of another substrate provided in the embodiments of this disclosure;

[0042] Figure 5 is a schematic diagram of reflection of a first electrode provided in an embodiment of this disclosure;

[0043] Figure 6 is a schematic diagram of reflection of another first electrode provided in an embodiment of this disclosure;

[0044] Figure 7 is a schematic diagram of the structure of a first electrode provided in an embodiment of this disclosure;

[0045] Figure 8 is a flowchart of a method for manufacturing a substrate according to an embodiment of this disclosure;

[0046] Figure 9 is a schematic diagram of a multi-cavity length adjustment structure provided in an embodiment of this disclosure.

[0047] Reference numerals: 1. Substrate; 2. First electrode; 3. Cavity length adjustment structure; 3. First pad layer; 31. First barrier layer; 32. Light-emitting structure; 4. Second electrode; 5. Lens structure; 6. Second pad layer; 61. Second barrier layer; 62. Pad layer structure; 21. Conductive structure; 22. Color resist; 7. First sub-pad layer; 311. Second sub-pad layer; 312. Detailed Implementation

[0048] This disclosure provides a substrate and a method for manufacturing the same, in order to solve the aforementioned technical problems existing in the prior art.

[0049] It should be understood that the specific structural and functional details disclosed in the embodiments of this disclosure are merely representative and are intended to describe exemplary embodiments of this disclosure. However, this disclosure can be implemented in many alternative or combined forms and should not be construed as being limited solely to the embodiments set forth herein.

[0050] In the description of this disclosure, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.

[0051] The terminology used in this disclosure is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms “a” and “an” as used herein are also intended to include the plural. It should also be understood that the terms “comprising” and / or “including” as used herein specify the presence of the stated features, integers, steps, operations, units, and / or components, without excluding the presence or addition of one or more other features, integers, steps, operations, units, components, and / or combinations thereof.

[0052] To make the above-described objects, features, and advantages of this disclosure more apparent and understandable, the disclosure will be further described below in conjunction with the accompanying drawings and embodiments. However, the exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the disclosure more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the figures denote the same or similar structures, and therefore repeated descriptions of them will be omitted. Terms describing position and direction as described in this disclosure are illustrative of the accompanying drawings, but changes may be made as needed, and all such changes are included within the scope of protection of this disclosure. The accompanying drawings of this disclosure are for illustrative purposes only and do not represent actual scale.

[0053] It should be noted that specific details are set forth in the following description to provide a full understanding of this disclosure. However, this disclosure can be implemented in many ways other than those described herein, and those skilled in the art can make similar extensions without departing from the spirit of this disclosure. Therefore, this disclosure is not limited to the specific embodiments disclosed below. The following descriptions are preferred embodiments for carrying out this disclosure; however, these descriptions are for the purpose of illustrating the general principles of this disclosure and are not intended to limit the scope of this disclosure. The scope of protection of this disclosure shall be determined by the appended claims.

[0054] The following description, in conjunction with the accompanying drawings, details an embodiment of a substrate and its fabrication method provided in this disclosure.

[0055] Please refer to Figure 1, which is a schematic diagram of a substrate provided in an embodiment of this disclosure. The substrate includes:

[0056] Substrate 1;

[0057] Multiple sets of first electrodes 2 are located on one side of the substrate 1, and the first electrodes 2 reflect light; different sets of first electrodes 2 correspond to pixels that emit different colors of light;

[0058] Multiple cavity length adjustment structures 3 are located on the side of multiple first electrodes 2 away from the substrate 1 and correspond one-to-one with multiple first electrodes 2; the thickness of different cavity length adjustment structures 3 is different for different colors of light.

[0059] The group of cavity length adjustment structures 3 with the smallest thickness is composed of the first blocking layer 32, and the remaining groups of cavity length adjustment structures 3 are all composed of the first pad 31 and the first blocking layer 32. The first pad 31 is located between the corresponding first electrode 2 and the first blocking layer 32. The first pad 31 is composed of organic material, and the first blocking layer 32 is composed of inorganic material (such as silicon oxide).

[0060] The first electrode 2 can be either an anode or a cathode; there is no specific restriction.

[0061] The first electrode 2 can be made of a metallic material. When the first electrode 2 is made of a metallic material, it can conduct electricity and reflect light at the same time. Alternatively, the first electrode 2 can be made of other conductive and reflective materials. The other conductive material can be ITO, and the reflective material is disposed on the side of the other conductive material close to the substrate 1. In this way, the first electrode 2 can also conduct electricity and reflect light at the same time.

[0062] If the substrate has pixels of three colors of light, namely red (R), green (G), and blue (B), then the multiple sets of first electrodes 2 are three sets of first electrodes 2, and the three sets of first electrodes 2 correspond one-to-one with the pixels of red, green, and blue light; if the substrate has pixels of four colors of light, namely red, green, blue, and white, then the multiple sets of first electrodes 2 are four sets of first electrodes 2, and the four sets of first electrodes 2 correspond one-to-one with the pixels of red, green, blue, and white light.

[0063] Figure 1 shows a partial structure of the substrate. Taking a pixel containing three colors of light in the substrate as an example, the corresponding substrate includes three sets of first electrodes 2 and three sets of cavity length adjustment structures 3 that correspond one-to-one with these three colors of light. The corresponding color light is indicated in the parentheses after the labels of the different first electrodes 2 in Figure 1.

[0064] Since different colors of light have different wavelengths, purifying the corresponding color light requires designing different cavity lengths for pixels of different colors. Cavity length adjustment is typically achieved through a cavity length adjustment structure 3. In the embodiments provided in this disclosure, different thicknesses are set for the cavity length adjustment structures 3 corresponding to different colors of light, which can purify the color light emitted by the corresponding pixels. Among red, green, and blue light, blue light has the shortest wavelength. Therefore, the cavity length adjustment structure 3 corresponding to blue light is configured to be composed of a first blocking layer 32. The cavity length adjustment structures 3 corresponding to red and green light are both composed of a first pad layer 31 and a first blocking layer 32. The first pad layer 31 is made of organic material. The first barrier layer 32 is made of inorganic materials. This allows for the purification of the corresponding color light by adjusting the cavity length of the cavity length of the corresponding color light using the cavity length adjustment structure 3 corresponding to different color light. It also allows for the formation of first pads 31 of different thicknesses by using coating and curing processes to form cavity length adjustment structures 3 of different thicknesses, thus eliminating the need for etching and wet processes to form cavity length adjustment structures 3 of different thicknesses as in related technologies. Furthermore, the first barrier layer 32 is set on the side of the first pad 31 away from the substrate 1, which also protects the first electrode 2 from etching damage in subsequent processes, thereby improving the reflectivity of the first electrode 2.

[0065] It should be understood that different colors of light have different wavelength ranges. Therefore, in this disclosure, the minimum wavelength refers to the comparison of wavelengths between different colors of light, rather than the comparison of different wavelengths within the same color of light.

[0066] Furthermore, the thickness of the cavity length adjustment structure 3 corresponding to different colored lights can be set according to the luminous intensity of different colored lights. For example, among the three colors of red, green, and blue light, red light has the highest luminous intensity, so the thickness of the cavity length adjustment structure 3 corresponding to red light can be set to the minimum, i.e., it is composed of the first blocking layer 32. The cavity length adjustment structures 3 corresponding to green and blue light are each composed of the first blocking layer 32 and the first padding layer 31. Of course, the thickness of the cavity length adjustment structure 3 corresponding to different colored lights is affected not only by the wavelength and luminous intensity mentioned above, but also by other factors or a combination of multiple factors. Therefore, there is no limitation on which factors(s) to refer to when setting the thickness of the cavity length adjustment structure 3 corresponding to different colored lights.

[0067] In the embodiments provided in this disclosure, by setting the thickness of the cavity length adjustment structure 3 corresponding to different colors of light to be different, pixels of different colors of light can have different cavity lengths to purify the corresponding colors of light. The cavity length adjustment structure 3 corresponding to the shortest wavelength color light is set to be composed of a first blocking layer 32, and the cavity length adjustment structures 3 corresponding to the other colors of light are set to be composed of a first pad layer 31 and a first blocking layer 32. The first electric field is located between the first blocking layer 32 and the corresponding first electrode 2. The first pad layer 31 is made of organic material and the first blocking layer 32 is made of inorganic material. Cavity length adjustment structures 3 of different thicknesses can be formed by coating and curing processes. The first blocking layer 32 can also protect the first electrode 2 from damage by subsequent etching processes. This eliminates the need to use etching processes to form the cavity length adjustment structure 3 as in related technologies. This effectively prevents the surface of the first electrode 2 from becoming rough and thin due to etching, thereby effectively improving the reflectivity and lifespan of the first electrode 2, and ultimately achieving the goal of improving the color gamut, brightness and lifespan of the display product.

[0068] Furthermore, since organic materials have higher light transmittance, setting the first pad 31 as an organic material can also reduce light transmission loss and improve light output efficiency.

[0069] Please refer to Figure 1. The thickness of the first pad 31 corresponding to the cavity length adjustment structure 3 in the other groups is different, and the thickness of the first blocking layer 32 in each cavity length adjustment structure 3 is the same.

[0070] Taking a pixel with red, green, and blue light on a substrate as an example, and setting the thickness of the cavity length adjustment structure according to the wavelength of different colors of light, the cavity length adjustment structure 3 corresponding to blue light has the smallest thickness and is composed of the first blocking layer 32. Therefore, the thickness of the cavity length adjustment structure 3 corresponding to blue light is the same as the thickness of the first blocking layer 32. The cavity length adjustment structures 3 corresponding to red and green light are both composed of the first pad layer 31 and the first blocking layer 32. Since the wavelength corresponding to red light is the largest, the thickness d1 of the first pad layer 31 corresponding to red light is greater than the thickness d2 of the first pad layer 31 corresponding to green light. Since the thickness d3 of the first blocking layer 32 in each cavity length adjustment structure 3 is the same, the thickness of the cavity length adjustment structure 3 corresponding to red light is (d1+d3), the thickness of the cavity length adjustment structure 3 corresponding to green light is (d2+d3), and the thickness of the cavity length adjustment structure 3 corresponding to blue light is d3.

[0071] If the thickness of the cavity length adjustment structure 3 is set according to the luminous amount of different colors of light, the cavity length adjustment structure 3 corresponding to red light has the smallest thickness and is composed of the first blocking layer 32. The thickness of the cavity length adjustment structure 3 corresponding to red light is the first blocking layer 32. The cavity length adjustment structures 3 corresponding to blue light and green light are both composed of the first blocking layer 32 and the first pad layer 31. The thickness of the first pad layer 31 corresponding to blue light is greater than the thickness of the first pad layer 31 corresponding to green light, and the thickness of the first blocking layer 32 corresponding to blue light and green light is the same.

[0072] Since the thickness d3 of the first barrier layer 32 in each cavity length adjustment structure 3 is the same, the first barrier layer 32 in each cavity length adjustment structure 3 can be formed using the same process. This allows the thickness of the remaining cavity length adjustment structures 3, except for the group with the smallest thickness, to be adjusted using the first pad layer 31, and the group with the smallest thickness to be formed using the first barrier layer 32. The entire process can form cavity length adjustment structures 3 with different thicknesses corresponding to different colors of light without the need for etching, thus avoiding damage to the first electrode 2 by etching and improving the reflectivity of the first electrode 2.

[0073] Please refer to Figure 2, which is a schematic diagram of another substrate provided in an embodiment of this disclosure. The substrate further includes:

[0074] Multiple light-emitting structures 4 are located on the side of the multiple cavity length adjustment structures 3 away from the substrate 1; different light-emitting structures 4 emit different colors of light, as shown in Figure 2, which shows the light-emitting structures 4 for red (R), green (G), and blue (B) light.

[0075] The second electrode 5 is located on the side of the multiple light-emitting structures 4 away from the substrate 1, and the second electrode 5 is transparent.

[0076] If the first electrode 2 is the anode, then the second electrode 5 is the cathode; if the first electrode 2 is the cathode, then the second electrode 5 is the anode. The second electrode 5 can be made of ITO. The light-emitting structure 4 can be an organic light-emitting diode (OLED) or other light-emitting structures 4, which are not limited here.

[0077] In Figure 2, the structure between the first electrode 2 and the second electrode 5 constitutes the microcavity structure of the corresponding pixel, and the distance between the first electrode 2 and the second electrode 5 is the cavity length of the corresponding microcavity structure.

[0078] Please refer to Figures 3 and 4 for schematic diagrams of another substrate provided in an embodiment of this disclosure. This substrate further includes:

[0079] Multiple microlens structures 6 are located on the side of multiple first electrodes 2 away from the substrate 1;

[0080] Each set of microlens structures 6 corresponds one-to-one with the cavity length adjustment structures 3 of the other sets; the side of the microlens structure 6 away from the substrate 1 is a convex surface.

[0081] As shown in Figure 3, multiple sets of microlens structures 6 correspond one-to-one with the remaining sets of cavity length adjustment structures 3; the remaining sets of cavity length adjustment structures 3 are reused as their corresponding microlens structures 6. In Figure 3, the cavity length adjustment structures 3 corresponding to red light (R) and green light (G) are all from the remaining sets of cavity length adjustment structures 3, therefore their corresponding cavity length adjustment structures 3 are reused as microlens structures 6. When the cavity length adjustment structure 3 is reused as a microlens structure 6, the material used for the first pad 31 can be a lens material, such as optical adhesive. When the cavity length adjustment structure 3 is reused as a microlens structure 6, the refractive index of the first blocking layer 32 is less than the refractive index of the first pad 31, making it easier to concentrate the light outside the microlens structure 6 onto the surface of the first electrode 2.

[0082] As shown in Figure 4, multiple sets of microlens structures 6 correspond one-to-one with multiple sets of first electrodes 2, and the multiple sets of microlens structures 6 are located on the side of the multiple sets of cavity length adjustment structures 3 away from the substrate 1.

[0083] The microlens structure 6 includes a second pad 61 and a second blocking layer 62, with the second pad 61 located between the first blocking layer 32 and the second blocking layer 62. The refractive index of the second blocking layer 62 is lower than that of the second pad 61, which makes it easier to focus light from outside the microlens structure 6 onto the surface of the first electrode 2.

[0084] The first pad 31 can be made of optical materials (such as optical adhesive), and the second blocking layer 62 can be made of inorganic materials (such as silicon oxide). By setting a corresponding microlens structure 6 for each first electrode 2, it is convenient to improve the color gamut corresponding to each color of light.

[0085] Please refer to Figures 5 and 6. Figure 5 is a schematic diagram of the reflection of a first electrode according to an embodiment of this disclosure, and Figure 6 is a schematic diagram of the reflection of another first electrode according to an embodiment of this disclosure. As shown in Figure 5, when the microlens structure 6 is located on the side of the first electrode 2 away from the substrate 1, the light reflected from the first electrode 2 is relatively dispersed, and some reflected light does not pass through the color filter 7 corresponding to the first electrode 2. As shown in Figure 6, when the microlens structure 6 is provided on the side of the first electrode 2 away from the substrate 1, the light (not shown) emitted by the light-emitting structure 4 towards the first electrode 2 is incident on the first electrode 2 at a smaller angle by the microlens structure 6, causing the first electrode 2 to reflect at a smaller angle. In this way, more of the light reflected by the first electrode 2 passes through the light-emitting structure 4 and exits from the corresponding color filter 7, thereby improving the light utilization rate and brightness. The color filter 7 in Figures 5 and 6 can be disposed on the substrate or on a color filter substrate disposed opposite to the substrate. The specific substrate on which it is disposed is not limited here.

[0086] In the embodiments provided in this disclosure, by providing multiple sets of microlens structures 6 with convex surfaces on the side of the multiple sets of first electrodes 2 away from the substrate 1, the microlens structures 6 can be used to concentrate the light of the corresponding color scattered around to the area of ​​the corresponding first electrode 2, thereby improving the optical gain of the corresponding pixel and improving the color point. When the first electrode 2 passes the converged light through the color adhesive (not shown), it can reduce the stray light at large angles when passing through the color adhesive, reduce cross-lighting between pixels, and thus improve the color gamut of the product.

[0087] It should be understood that in practical applications, the light-emitting structure 4 is set in the opening of the pixel definition layer, which is not shown in this disclosure.

[0088] Please refer to Figure 7, which is a schematic diagram of the structure of a first electrode provided in an embodiment of this disclosure. The first electrode 2 includes:

[0089] The pad structure 21 is located on one side of the substrate 1; the side of the pad structure 21 away from the substrate 1 is a convex surface;

[0090] The conductive structure 22 is located on the side of the pad structure 21 away from the substrate 1, and the refractive index of the conductive structure 22 is greater than the refractive index of the cavity length adjustment structure 3.

[0091] The conductive structure 22 can be made of metallic materials, or the electric field structure can be made of organic materials; it can also be made of ITO. When the conductive material is made of IRO, the pad structure 21 can be made of black materials (such as resin), which can make the first electrode 2 reflect light.

[0092] By setting the first electrode 2 as a pad structure 21 with a convex surface and a conductive structure 22 located on the side of the pad structure 21 away from the substrate 1, and making the refractive index of the conductive structure 22 greater than the refractive index of the cavity length adjustment structure 3, the first electrode 2 can be made into a convex electrode, thereby increasing the reflective area of ​​the first electrode 2, improving the optical gain, and thus improving the brightness of the display product.

[0093] Based on the same inventive concept, this disclosure provides a method for manufacturing a substrate, as shown in FIG8. The method includes:

[0094] S11: Provide a substrate;

[0095] S12: Multiple sets of first electrodes are formed on one side of the substrate; the first electrodes reflect light, and different sets of first electrodes correspond to pixels that emit different colors of light;

[0096] S13: On the side of the multiple sets of first electrodes away from the substrate, a multiple set of cavity length adjustment structures are formed, each corresponding to one of the multiple sets of first electrodes; the thickness of the different sets of cavity length adjustment structures corresponding to different colors of light is different; the cavity length adjustment structure with the smallest thickness is composed of a first blocking layer, and the cavity length adjustment structures of the remaining sets are all composed of a first pad and a first blocking layer; the first pad is located between the corresponding first electrode and the first blocking layer, the first pad is composed of an organic material, and the first blocking layer is composed of an inorganic material.

[0097] Please refer to Figure 9, which is a schematic diagram of a multi-cavity length adjustment structure provided in an embodiment of this disclosure.

[0098] S21: On the side of the multiple sets of first electrodes 2 away from the substrate 1, a first sub-pad layer 311 with a first thickness h1 is coated, and the first sub-pad layer 311 is cured after removing the first sub-pad layer 311 on the surface of the first electrode 2 corresponding to the third color light; wherein, taking the first color light as R, the second color light as G, the third color light as B, and the thickness of the cavity length adjustment structure 3 corresponding to the third color light as the smallest as an example.

[0099] The first sub-layer 311 is made of organic materials.

[0100] After coating a first sub-pad 311 with a first thickness h1 on one side of the substrate 1, the first sub-pad 311 on the surface of the first electrode 2 corresponding to the third color light is removed by exposure and development, and then photocuring and vacuum baking are performed to remove the solvent in the first sub-pad 311 to the greatest extent.

[0101] S22: On the side of the first sub-pad 311 away from the substrate 1, a second sub-pad 312 with a second thickness is coated, and the second sub-pad 312 is cured after removing the second sub-pad 312 in the regions where the first electrode 2 is located corresponding to the second color light and the regions where the first electrode 2 is located corresponding to the third color light; wherein, the first pad 31 includes the first sub-pad 311 and the second sub-pad 312;

[0102] The second sub-layer 312 is also made of organic materials.

[0103] After coating the first sub-pad 311 with a second sub-pad 312 having a second thickness h2 on the side away from the substrate 1, the second sub-pad 312 on the surface of the first electrode 2 corresponding to the second color light and the third color light is removed by exposure and development. Then, photocuring and vacuum baking are performed to remove the solvent in the second sub-pad 312 to the greatest extent.

[0104] S23: On the side of the second sub-pad layer 312 away from the substrate 1, a first barrier layer 32 is deposited.

[0105] The first barrier layer 32 is made of inorganic materials, such as silicon oxide. In this way, the first barrier layer 32 covers the first pad layer 31, which can prevent the volatilization of the material of the first pad layer 31 from causing damage to the light-emitting material, and prevent the subsequent etching process from damaging the first electrode 2.

[0106] In the embodiments provided in this disclosure, since the first pad layer can be formed with different thicknesses by coating and curing processes, thereby adjusting the thickness of the cavity length adjustment structure corresponding to different colors of light, it is not necessary to use photolithography to etch the inorganic layer to form cavity length adjustment structures of different thicknesses as in related technologies, thus avoiding damage to the surface of the first electrode, thereby improving the reflective sides and lifespan of the first electrode; while depositing a first barrier layer on the side of the first pad layer away from the substrate, it is possible to set a set of cavity length adjustment structures with the smallest thickness on the first electrode by the first barrier layer, and the first barrier layer can also be used to protect the first electrode from damage in subsequent etching processes.

[0107] In some embodiments, after forming multiple cavity length adjustment structures corresponding one-to-one with multiple sets of first electrodes, the method further includes:

[0108] On the side of the multi-cavity length adjustment structure away from the substrate, a multi-lens structure is formed that corresponds one-to-one with the multi-group first electrode; the side of the lens structure away from the substrate is convex.

[0109] Regardless of whether the lens structure shown in Figure 3 or Figure 4 is formed, a coating and curing process can be used to form a second pad with a convex surface. Then, a second liner structure is deposited on the side of the second pad away from the substrate to cover the second pad. This eliminates the need for an etching process to form a lens structure with a convex surface, thereby preventing damage to the first electrode. The lens structure can also be used to improve the light extraction efficiency.

[0110] In other embodiments, a plurality of first electrodes are formed on one side of the substrate, including:

[0111] Multiple pad structures are formed on one side of the substrate; the side of the pad structure away from the substrate is a convex surface.

[0112] Multiple sets of conductive structures are deposited on the side of the multiple pad structures away from the substrate; the multiple sets of conductive structures correspond one-to-one with the multiple sets of pad structures, and the refractive index of the conductive structures is greater than the refractive index of the cavity length adjustment structure; the first electrode includes pad structures and corresponding conductive structures.

[0113] A coating process can be used to form a pad structure with a convex surface, and then a conductive structure can be deposited on one side of the convex surface to obtain the first electrode. This can effectively increase the reflective area of ​​the first electrode and improve the optical gain.

[0114] The substrate can be an organic light-emitting diode (OLED) substrate, a quantum dot light-emitting diode (QLED) substrate, a micro light-emitting diode (Micro LED) substrate, etc., and this disclosure does not specifically limit it.

[0115] Although preferred embodiments of this disclosure have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this disclosure.

[0116] Obviously, those skilled in the art can make various modifications and variations to this disclosure without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of this disclosure and their equivalents, this disclosure is also intended to include such modifications and variations.

Claims

1. A substrate, wherein, include: Substrate; Multiple sets of first electrodes are located on one side of the substrate, and the first electrodes are reflective. Different groups of first electrodes correspond to pixels that emit different colors of light; Multiple cavity length adjustment structures are located on the side of the multiple sets of first electrodes away from the substrate and correspond one-to-one with the multiple sets of first electrodes; the thickness of the different sets of cavity length adjustment structures corresponds to different colors of light; The group of cavity length adjustment structures with the smallest thickness consists of a first barrier layer, while the remaining groups of cavity length adjustment structures all consist of a first pad and the first barrier layer. The first pad is located between the corresponding first electrode and the first barrier layer. The first pad is made of organic material, and the first barrier layer is made of inorganic material.

2. The substrate as claimed in claim 1, wherein, The substrate further includes: Multiple microlens structures are located on the side of the multiple sets of first electrodes away from the substrate. The multiple sets of microlens structures correspond one-to-one with the cavity length adjustment structures of the remaining sets; the side of the microlens structure away from the substrate is a convex surface.

3. The substrate as claimed in claim 2, wherein, The multiple sets of microlens structures correspond one-to-one with the remaining sets of cavity length adjustment structures; The cavity length adjustment structures of the remaining groups are reused as the microlens structures of the corresponding groups.

4. The substrate as claimed in claim 2, wherein, The multiple sets of microlens structures correspond one-to-one with the multiple sets of first electrodes, and the multiple sets of microlens structures are located on the side of the multiple sets of cavity length adjustment structures away from the substrate. The microlens structure includes a second pad and a second blocking layer, with the second pad located between the first blocking layer and the second blocking layer.

5. The substrate as claimed in claim 1, wherein, The first electrode includes: A pad structure is located on one side of the substrate; the side of the pad structure away from the substrate is a convex surface; A conductive structure is located on the side of the pad structure away from the substrate, and the refractive index of the conductive structure is greater than the refractive index of the cavity length adjustment structure.

6. The substrate according to any one of claims 1-5, wherein, The thickness of the first pad layer in the cavity length adjustment structures of the remaining groups is different for different groups, and the thickness of the first barrier layer in each cavity length adjustment structure is the same.

7. The substrate according to any one of claims 1-6, wherein, The substrate further includes: Multiple light-emitting structures are located on the side of the multiple cavity length adjustment structures away from the substrate. The second electrode is located on the side of the plurality of light-emitting structures away from the substrate, and the second electrode is transparent to light.

8. A method for manufacturing a substrate, wherein, include: Provide a substrate; Multiple sets of first electrodes are formed on one side of the substrate. The first electrode reflects light, and different groups of first electrodes correspond one-to-one with pixels that emit different colors of light; On the side of the plurality of first electrodes away from the substrate, a plurality of cavity length adjustment structures are formed, each corresponding to one of the plurality of first electrodes; the thickness of the cavity length adjustment structures corresponding to different colors is different; the cavity length adjustment structure with the smallest thickness is composed of a first barrier layer, and the cavity length adjustment structures of the remaining groups are all composed of a first pad layer and the first barrier layer; the first pad layer is located between the corresponding first electrode and the first barrier layer, the first pad layer is composed of an organic material, and the first barrier layer is composed of an inorganic material.

9. The manufacturing method as described in claim 8, wherein, On the side of the plurality of first electrodes away from the substrate, a plurality of cavity length adjustment structures corresponding one-to-one with the plurality of first electrodes are formed, including: On the side of the plurality of first electrodes away from the substrate, a first sub-pad layer having a first thickness is coated, and the first sub-pad layer is cured after the first sub-pad layer corresponding to the surface of the first electrode corresponding to the third color light is removed. On the side of the first sub-pad layer away from the substrate, a second sub-pad layer with a second thickness is coated, and the second sub-pad layer is cured after removing the second sub-pad layer in the region where the first electrode corresponding to the second color light and the region where the first electrode corresponding to the third color light is located; wherein, the first pad layer includes the first sub-pad layer and the second sub-pad layer; The first barrier layer is deposited on the side of the second sub-pad layer away from the substrate.

10. The manufacturing method as described in claim 8, wherein, After forming multiple cavity length adjustment structures corresponding one-to-one with the multiple sets of first electrodes, the method further includes: On the side of the multiple cavity length adjustment structures away from the substrate, a multiple lens structure is formed that corresponds one-to-one with the multiple sets of first electrodes; the side of the lens structure away from the substrate is a convex surface.

11. The manufacturing method as described in claim 8, wherein, On one side of the substrate, a plurality of first electrodes are formed, including: Multiple sets of pad structures are formed on one side of the substrate; the side of the pad structure away from the substrate is a convex surface. Multiple sets of conductive structures are deposited on the side of the plurality of pad structures away from the substrate; the plurality of conductive structures correspond one-to-one with the plurality of pad structures, and the refractive index of the conductive structures is greater than the refractive index of the cavity length adjustment structure; the first electrode includes the pad structure and the corresponding conductive structure.

Images