Flow rate detection method, fluid pump, and tank-type semiconductor cleaning device
By using the variable volume chamber structure of the fluid pump, the problem of flow detection caused by bubble interference during the preparation of cleaning fluid is solved, enabling accurate flow detection in semiconductor cleaning equipment and expanding the application range of the equipment.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
- Filing Date
- 2026-01-09
- Publication Date
- 2026-07-30
AI Technical Summary
During semiconductor cleaning, air bubbles generated during the preparation of the cleaning solution prevent ultrasonic flow meters from accurately detecting the flow rate, thus limiting the application range of tank-type semiconductor cleaning equipment.
By employing a variable volume chamber structure for a fluid pump, the flow rate is calculated by detecting the duration of volume change in the variable volume chamber, thus avoiding bubble interference and achieving accurate flow rate detection.
During the preparation of the cleaning fluid, the flow rate can be accurately detected, avoiding interference from air bubbles, thus improving the accuracy of flow detection and the application range of the equipment.
Smart Images
Figure CN2026071617_30072026_PF_FP_ABST
Abstract
Description
Flow detection methods, fluid pumps and tank-type semiconductor cleaning equipment Technical Field
[0001] This application belongs to the field of semiconductor process equipment technology, specifically relating to a flow detection method, a fluid pump, and a tank-type semiconductor cleaning equipment. Background Technology
[0002] Tank-type semiconductor cleaning equipment is a crucial type of cleaning equipment in the semiconductor industry. During the cleaning process, a robotic arm immerses silicon wafers in the cleaning tank. The cleaning solution within the tank is circulated by a fluid pump, achieving cleaning according to a specific flow field. During cleaning, the cleaning solution, under specific conditions, completes high-quality cleaning of residual chemicals, particles, metals, and other impurities on the silicon wafer surface through chemical reactions. The circulation flow rate of the cleaning solution is a critical parameter for detecting whether the cleaning solution reacts with impurities on the silicon wafer surface according to the specific flow field; therefore, the accuracy of the cleaning solution circulation flow rate measurement is essential for tank-type semiconductor cleaning equipment.
[0003] In related technologies, tank-type semiconductor cleaning equipment is equipped with ultrasonic flow meters. Different cleaning processes require different types of cleaning solutions. For some cleaning solutions that generate bubbles during mixing, the presence of these bubbles can affect the detection by the ultrasonic flow meter. During the actual detection process, the ultrasonic waves emitted by the flow meter are interfered with by the bubbles in the cleaning solution, making flow measurement impossible. This severely limits the application range of tank-type semiconductor cleaning equipment. Taking a mixture of sulfuric acid and hydrogen peroxide as an example, the cleaning process is a high-temperature process. Hydrogen peroxide is unstable; during the injection or replenishment of hydrogen peroxide into the sulfuric acid, the hydrogen peroxide easily decomposes to produce gas, resulting in a large number of bubbles in the mixture. This prevents the ultrasonic flow meter from detecting the flow rate. Summary of the Invention
[0004] This application discloses a flow detection method, a fluid pump, and a tank-type semiconductor cleaning equipment to solve the problem in the prior art where a large number of bubbles are generated during the preparation of the cleaning solution in semiconductor processes, causing ultrasonic flow meters to be unable to detect the flow rate.
[0005] To solve the above-mentioned technical problems, this application provides the following technical solution:
[0006] In a first aspect, embodiments of this application disclose a flow detection method. This flow detection method is applied to a fluid pump, which includes a pump casing, two variable-volume chambers disposed within the pump casing, and a valve device. The pump casing has an outlet and an inlet. Both variable-volume chambers are connected to the outlet and the inlet via the valve device. The two variable-volume chambers alternately change their volume, with one increasing in volume to allow fluid to enter through the inlet while the other decreases in volume to discharge the fluid contained within it through the outlet. The flow detection method includes:
[0007] The duration of one volume change in the two variable-volume chambers is detected;
[0008] The flow rate of the fluid is calculated based on the volume of the variable volume chamber when it is filled with the fluid and the duration of one volume change.
[0009] Secondly, embodiments of this application disclose a fluid pump, which includes a pump casing, two variable volume chambers disposed within the pump casing, and a valve device; the pump casing has an outlet and an inlet; the two variable volume chambers are respectively connected to the outlet and the inlet through the valve device; the two variable volume chambers alternately change their volume, wherein one volume increases so that fluid enters through the inlet while the other volume decreases so that the fluid contained therein is discharged through the outlet, and the fluid pump includes a processor for executing the flow detection method of the first aspect above.
[0010] Thirdly, this application discloses a tank-type semiconductor cleaning device. The disclosed tank-type semiconductor cleaning device includes a cleaning tank, a cleaning fluid circulation pipeline, and a second fluid pump. The cleaning fluid circulation pipeline includes a first pipe section and a second pipe section. The first end of the first pipe section is connected to the top of the cleaning tank to receive the cleaning fluid discharged from the cleaning tank. The second end of the first pipe section is connected to the inlet. The first end of the second pipe section is connected to the outlet. The second end of the second pipe section is connected to the bottom of the cleaning tank to deliver the cleaning fluid into the cleaning tank.
[0011] The flow detection method disclosed in this application fully utilizes the structure of a fluid pump and the principle of pumping fluid. By combining the known constant value of the volume of the variable volume chamber when it is filled with fluid with the time it takes for the two variable volume chambers to undergo one volume change, the flow rate of the fluid is detected. When using this flow detection method to detect the flow rate of the cleaning fluid in the semiconductor cleaning process, the flow rate will not be undetectable due to the influence of air bubbles generated during the preparation of the cleaning fluid in the semiconductor cleaning process. Therefore, the flow detection method disclosed in this application can solve the problem in the prior art where the ultrasonic flow meter cannot detect the flow rate due to the generation of many air bubbles during the preparation of semiconductor cleaning fluid. Attached Figure Description
[0012] Figures 1 and 2 are schematic diagrams of the fluid pump disclosed in the embodiments of this application in different states; the thick black arrow in Figure 1 indicates that the fluid is discharged from the fluid pump; the thick white arrow in Figure 1 indicates that the fluid is entering the fluid pump; the thick black arrow in Figure 2 indicates that the fluid flows into the fluid pump; the thick white arrow in Figure 2 indicates that the fluid is discharged from the fluid pump; the thin black arrows in Figures 1 and 2 indicate the direction of gas flow in the drive mechanism.
[0013] Figure 3 is a schematic flowchart of the fluid detection method disclosed in the embodiments of this application;
[0014] Figure 4 is a schematic diagram of the structure of the fluid pump disclosed in an embodiment of this application;
[0015] Figure 5 is a schematic diagram of the structure of the tank-type semiconductor cleaning equipment disclosed in the embodiments of this application.
[0016] Explanation of reference numerals in the attached drawings: 100-Fluid pump, 110-Pump casing, 111-Outlet, 112-Inlet, 113-First inner cavity, 114-Second inner cavity, 115-First air path interface, 116-Second air path interface, 120-Variable volume chamber, 130-Valve device, 131-First check valve, 132-Second check valve, 133-Third check valve, 134-Fourth check valve, 140-Position sensor, 150-Drive mechanism, 151-First air path, 152-Second air path, 153-Switching valve, 200-Cleaning tank, 300-Circulation pipeline, 310-First pipe section, 320-Second pipe section, 400-Liquid presence / absence detection sensor, 500-Heater. Detailed Implementation
[0017] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.
[0018] The technical solutions disclosed in the various embodiments of this application are described in detail below with reference to the accompanying drawings.
[0019] Please refer to Figures 1 to 5. This application discloses a flow detection method applied to a fluid pump 100. The fluid pump 100 can be a liquid pump or a gas pump, and this application does not limit the specific type of fluid pump 100.
[0020] The fluid pump 100 involved in the embodiments of this application may include a pump casing 110, a variable volume chamber 120, and a valve device 130.
[0021] The pump casing 110 is an external component of the fluid pump 100. It serves both to provide a foundation for the direct or indirect installation of other components of the fluid pump 100 and to create functional spaces. In this embodiment, the pump casing 110 has an outlet 111 and an inlet 112. During the pumping process, fluid enters the fluid pump 100 through the inlet 112 and is eventually discharged from the fluid pump 100 through the outlet 111. To facilitate the connection of pipelines transporting fluid, the outlet 111 and the inlet 112 can be located at opposite ends of the pump casing 110.
[0022] The variable volume chamber 120 is a flexible or elastic structure, thus facilitating variable volume. During the fluid pump 100's fluid delivery process, the variable volume chamber 120 serves as a temporary storage space for the fluid. Fluid entering the fluid pump 100 from the inlet 112 enters the variable volume chamber 120 and then exits through the variable volume chamber 120 to the outlet 111. In this embodiment, there are two variable volume chambers 120, which are disposed within the pump casing 110.
[0023] A valve device 130 is disposed within the pump casing 110. The valve device 130 controls the flow of fluid between the inlet 112 and the variable volume chamber 120, and between the variable volume chamber 120 and the outlet 111. The two variable volume chambers 120 are respectively connected to the outlet 111 and the inlet 112 via the valve device 130. In this embodiment, under the action of the valve device 130, the two variable volume chambers 120 alternately change their volumes; one increases in volume to allow fluid to enter through the inlet 112, while the other decreases in volume to discharge the fluid it contains through the outlet 111.
[0024] The working process of the fluid pump 100 involved in this application embodiment is as follows: the valve device 130 controls the inlet 112 to alternately connect with the two variable volume chambers 120, and also controls the outlet 111 to alternately connect with the two variable volume chambers 120, so that the two variable volume chambers 120 are not connected to the inlet 112 at the same time, nor are they connected to the outlet 111 at the same time. Finally, the fluid entering the fluid pump 100 from the inlet 112 will enter one of the variable volume chambers 120 with a larger volume, while the other variable volume chamber 120 with a smaller volume will discharge its internal fluid through the outlet 111. Then the valve device 130 switches the connection relationship, so that the volume of the variable volume chamber 120 that has been drained of internal fluid increases to receive the fluid flowing into the fluid pump 100 from the inlet 112, while the volume of the variable volume chamber 120 that is filled with internal fluid decreases to discharge its internal fluid from the fluid pump 100 through the outlet 111. This cycle is repeated to realize the continuous pumping of fluid by the fluid pump 100.
[0025] The traffic detection method disclosed in this application may include the following steps:
[0026] S101. Detect the duration of one volume change in the two variable volume chambers 120.
[0027] In this step, the duration of one volume change in the two variable volume chambers 120 refers to the time required for one of the two variable volume chambers 120 filled with fluid to discharge the fluid. This duration is also the time required for the volume of this variable volume chamber 120 to decrease, and the time required for the other of the two variable volume chambers 120 to fill with fluid, that is, the time required for the volume of the other of the two variable volume chambers 120 to increase.
[0028] It should be noted that the two variable volume chambers 120 have equal and constant volumes when filled with fluid. In the embodiments of this application, the two variable volume chambers 120 can be a membrane bag structure or a bellows structure. The embodiments of this application do not limit the specific structure of the variable volume chambers 120.
[0029] S102. Calculate the flow rate of the fluid based on the volume of the variable volume chamber 120 when it is filled with fluid and the time it takes to undergo one volume change.
[0030] As mentioned above, the volume of the variable volume chamber 120 when it is filled with fluid is a constant. During the process of pumping fluid, the flow rate of the fluid determines the duration of one volume change in the two variable volume chambers 120. Based on this, this step can calculate the flow rate by detecting the duration of one volume change in the two variable volume chambers 120 and then dividing the volume of the variable volume chamber 120 when it is filled with fluid by the duration of one volume change.
[0031] The flow detection method disclosed in this application fully utilizes the structure of the fluid pump 100 and the principle of pumping fluid. By combining the known constant value of the volume of the variable volume chamber 120 when it is full of fluid with the detected duration of one volume change in the two variable volume chambers 120, the flow rate of the fluid is detected. When using this flow detection method to detect the flow rate of the cleaning fluid in the semiconductor cleaning process, the flow rate will not be undetectable due to the influence of air bubbles generated during the preparation of the cleaning fluid in the semiconductor cleaning process. Therefore, the flow detection method disclosed in this application can solve the problem in the prior art where the ultrasonic flow meter cannot detect the flow rate due to the generation of many air bubbles during the preparation of the cleaning fluid in the semiconductor process.
[0032] It should be emphasized that the flow detection method disclosed in this application is not limited to detecting the flow rate of cleaning fluid in semiconductor cleaning processes. It can also be used to detect the flow rate of other liquids, such as water, and the flow rate of drying gas in semiconductor cleaning processes. This application does not impose any limitations. When the flow detection method disclosed in this application is applied to detect the flow rate of cleaning fluid in semiconductor cleaning processes, it will not be affected by air bubbles present in the cleaning fluid, thus preventing the flow rate from being undetectable.
[0033] As described above, in S101, it is necessary to detect the duration of one volume change in the two variable volume chambers 120. There are various specific detection methods, such as directly detecting the time it takes for the fluid volume in the variable volume chamber 120 to change from zero (empty) to full, or directly detecting the time it takes for the variable volume chamber 120 to go from being full of fluid to being emptied. Based on this, the fluid pump 100 disclosed in this application embodiment may include a detection device that can directly detect the time it takes for the volume change in the variable volume chamber 120 to determine the duration of one volume change.
[0034] As described above, the variable volume chamber 120 can have various structures. In one embodiment, the adjacent ends of the two variable volume chambers 120 can be fixed ends and are respectively connected to the valve device 130. The opposite ends of the two variable volume chambers 120 are movable ends, and the volume of the corresponding variable volume chamber 120 can be changed by moving towards or away from the fixed end. In this structure, the variable volume chamber 120 is a telescopic structure, which can increase or decrease the volume by telescoping, thus facilitating more standardized deformation of the variable volume chamber 120.
[0035] Based on this, in other embodiments, the detection device of the fluid pump 100 may include two position sensors 140. The two position sensors 140 may be disposed in the pump housing 110 and arranged opposite to the moving ends of the two variable volume chambers 120 respectively, so as to be triggered by the moving ends when the respective variable volume chambers 120 are filled with fluid.
[0036] In one embodiment, the positioning sensor 140 is positioned on the side away from the fixed end of the variable volume chamber 120. During the movement of the movable end of the variable volume chamber 120 away from the fixed end (i.e., fluid flows into the variable volume chamber 120 on one side), when the positioning sensor 140 comes into contact with the movable end and is triggered, it indicates that the variable volume chamber is filled with fluid; subsequently, when the movable end separates from the positioning sensor 140 and begins to move towards the fixed end, it indicates that the variable volume chamber is discharging fluid.
[0037] Based on this structure, the duration of one volume change experienced by the two variable-volume chambers 120 is measured, including:
[0038] In the specific detection process, the fluid pump 100 may include a timer, which is electrically connected to two position sensors 140 respectively. When one of the two position sensors 140 changes from a triggered state to a non-triggered state, the timer can be started to start timing. When the other of the two position sensors 140 is triggered, the timer can be started to end timing. This time interval is the duration for the two variable volume chambers 120 to undergo one volume change.
[0039] In the specific flow detection process, the fluid pump 100 may occasionally malfunction. In order to ensure the accuracy of flow detection, the flow detection method disclosed in this application embodiment may further include: among the multiple detected durations of a single volume change, the duration of the volume change that does not fall within the preset duration range is determined as an abnormal duration, and the flow rate of the fluid is not calculated based on this (i.e., the abnormal duration).
[0040] When the fluid pump 100 is working, it continuously pumps fluid. That is, the two variable volume chambers 120 continuously undergo volume changes multiple times. In order to improve the detection accuracy, the flow rate of the fluid is calculated based on the volume of the variable volume chambers 120 when they are full of fluid and the duration of one volume change. This includes: among the multiple durations of one volume change detected, the duration of the volume change that falls within a preset duration range is determined as the normal duration, and the average of the flow rates determined by the normal duration is taken as the flow rate of the fluid.
[0041] The fluid pump 100 disclosed in this application embodiment may further include a first alarm. In an embodiment where the fluid pump 100 includes a first alarm, the flow detection method may further include: controlling the first alarm to sound when the number of abnormal durations detected within a first preset time period exceeds a preset threshold. In this embodiment, when the number of abnormal durations detected within the first preset time period exceeds the preset threshold, it indicates that the fluid pump 100 is malfunctioning frequently, affecting the stable detection of fluid flow. Based on this, the first alarm alerts relevant personnel to perform maintenance.
[0042] As described above, the two variable-volume chambers 120 alternately change their volumes, with one increasing in volume to allow fluid to enter through inlet 112 while the other decreases in volume to discharge its contained fluid through outlet 111. To achieve this alternating volume change of the two variable-volume chambers 120, the fluid pump 100 disclosed in this embodiment may further include a drive mechanism 150. The drive mechanism 150 is used to drive the two variable-volume chambers 120 to alternately change their volumes so that fluid enters the fluid pump 100 through inlet 112 and flows out of the fluid pump 100 through outlet 111.
[0043] It should be noted that the single drive time corresponding to one volume change of the variable volume chamber 120 driven by the drive mechanism 150 is sufficient to ensure that the variable volume chamber 120 is completely emptied of the fluid inside. Specifically, within each single drive duration, the drive mechanism 150 drives the moving end to move closer to the fixed end and / or farther away from the fixed end, so that one of the two position sensors 140 changes from a triggered state to a non-triggered state, while the other is triggered.
[0044] In this embodiment, the drive mechanism 150 can have various structures. For example, the drive mechanism 150 can be two telescopic drive mechanisms connected to two variable volume chambers 120 respectively, and the two telescopic drive mechanisms can simultaneously drive the two variable volume chambers 120 to alternately change their volumes. In other embodiments, this application discloses a drive mechanism 150, which includes a first air passage 151, a second air passage 152, and a switching valve 153. The pump housing 110 may have a first inner cavity 113 and a second inner cavity 114 that are isolated from each other. The first inner cavity 113 is isolated from the inlet 112 and the outlet 111 respectively, and the second inner cavity 114 is isolated from the inlet 112 and the outlet 111 respectively. The two ends of the first air passage 151 are respectively connected to the first interface of the switching valve 153 and the first inner cavity 113. Specifically, the end of the first air passage 151 is connected to the first inner cavity 113 through the first air passage interface 115. The two ends of the second air passage 152 are respectively connected to the second interface of the switching valve 153 and the second inner cavity 114. The end of the second air passage 152 is connected to the second inner cavity 114 through the second air passage interface 116.
[0045] The switching valve 153 is used to control the switching of air intake and exhaust between the first air passage 151 and the second air passage 152 by switching the air intake and exhaust direction of the first and second ports, thereby driving the two variable volume chambers 120 to alternately change their volumes. This type of drive mechanism 150 achieves the switching of air intake and exhaust between the first inner cavity 113 and the second inner cavity 114 by switching the air intake and exhaust of the first air passage 151 and the second air passage 152, ultimately realizing the alternating change of the volumes of the two variable volume chambers 120. This gas-driven method has advantages such as simple structure and convenient control.
[0046] It should be noted that the switching cycle of the switching valve 153 in switching the ventilation direction of the first and second ports is the single drive duration mentioned above. In this embodiment, the single drive duration can be a preset duration value, and the single drive duration determines the pumping efficiency of the fluid pump 100.
[0047] In the specific testing process, the duration of a single drive is relatively long. After the drive mechanism 150 has driven the two variable volume chambers 120 to complete one volume change, the drive mechanism 150 has not yet exhausted the duration of a single drive. The time difference between the completion of one volume change in the two variable volume chambers 120 and the completion of a single drive by the drive mechanism 150 is the pause time. The longer the pause time, the lower the working efficiency of the fluid pump 100.
[0048] To improve the working efficiency of the fluid pump 100, the flow detection method disclosed in this application embodiment may further include:
[0049] The switching valve 153 adjusts the intake and exhaust switching time of the first air passage 151 and the second air passage 152 according to the duration of one volume change of the two variable volume chambers 120, so that the intake and exhaust switching time is greater than the duration of one volume change and less than the preset single drive time.
[0050] In other words, in this embodiment, the duration of a single drive can be adjusted according to the time it takes for the two variable volume chambers 120 to undergo a volume change, so that the duration of a single drive is less than a preset value.
[0051] In this embodiment, the time taken for the two variable volume chambers 120 to undergo one volume change is used as a benchmark to reduce the intake and exhaust switching time of the switching valve 153 for the first air passage 151 and the second air passage 152. This makes the intake and exhaust switching time no longer follow the preset single drive time, but instead follow a time shorter than the preset single drive time. This approach can reduce the pause time and thus improve the working efficiency of the fluid pump 100.
[0052] As described above, valve device 130 is used to control the flow of fluid between inlet 112 and variable volume chamber 120 and between variable volume chamber 120 and outlet 111. Valve device 130 can be a single valve that can be electromagnetically switched to realize the function of valve device 130, or it can be a valve group formed by multiple valves.
[0053] This application discloses a specific valve device 130, which may include a first check valve 131, a second check valve 132, a third check valve 133, and a fourth check valve 134.
[0054] One of the two variable volume chambers 120 is connected to the outlet 111 via a first one-way valve 131 and to the inlet 112 via a second one-way valve 132; the other of the two variable volume chambers 120 is connected to the outlet 111 via a third one-way valve 133 and to the inlet 112 via a fourth one-way valve 134. When the volume of the variable volume chamber 120 connected to the first one-way valve 131 and the second one-way valve 132 increases and the volume of the variable volume chamber 120 connected to the third one-way valve 133 and the fourth one-way valve 134 decreases, the second one-way valve 132 is in the open state, the first one-way valve 131 is in the closed state, the third one-way valve 133 is in the open state, and the fourth one-way valve 134 is in the closed state.
[0055] When the volume of the variable volume chamber 120 connected to the first check valve 131 and the second check valve 132 decreases and the volume of the variable volume chamber 120 connected to the third check valve 133 and the fourth check valve 134 increases, the first check valve 131 is in the open state, the second check valve 132 is in the closed state, the third check valve 133 is in the closed state, and the fourth check valve 134 is in the open state.
[0056] The valve device 130 of this structure is composed of four simple check valves, which can fulfill the function of the valve device 130 without complex control, thus helping to reduce the manufacturing cost of the fluid pump 100. At the same time, the first check valve 131, the second check valve 132, the third check valve 133 and the fourth check valve 134 are mechanical valves, which have good working stability and can therefore work more stably.
[0057] Based on the flow detection method disclosed in the embodiments of this application, this application discloses a fluid pump 100. The fluid pump 100 includes the pump housing 110 mentioned above, two variable volume chambers 120 and a valve device 130. The fluid pump 100 may also include a processor, which is used to execute the steps in the fluid detection method disclosed in the embodiments above.
[0058] Based on the fluid pump 100 disclosed in the embodiments of this application, the embodiments of this application further disclose a tank-type semiconductor cleaning device. The disclosed tank-type semiconductor cleaning device includes a cleaning tank 200, a cleaning fluid circulation pipeline 300, and the fluid pump 100 described in the above embodiments.
[0059] The cleaning fluid circulation pipeline 300 includes a first pipe section 310 and a second pipe section 320. The first end of the first pipe section 310 is connected to the top of the cleaning tank 200 to receive the cleaning fluid discharged from the cleaning tank 200. The second end of the first pipe section 310 is connected to the inlet 112. The first end of the second pipe section 320 is connected to the outlet 111. The second end of the second pipe section 320 is connected to the bottom of the cleaning tank 200 to deliver the cleaning fluid into the cleaning tank 200.
[0060] This type of tank-type semiconductor cleaning equipment can ensure the uniformity of the cleaning solution by circulating the cleaning solution through a fluid pump 100, and can also detect the flow rate of the cleaning solution during the circulation process.
[0061] In a further embodiment, the tank-type semiconductor cleaning equipment disclosed in this application may further include a fluid presence / absence detection sensor 400. The fluid presence / absence detection sensor 400 is disposed on the first pipe section 310 or the second pipe section 320, and is used to detect whether there is cleaning fluid in the first pipe section 310 or the second pipe section 320. The fluid presence / absence detection sensor 400 can detect whether there is cleaning fluid in the first pipe section 310 or the second pipe section 320 to determine whether the tank-type semiconductor cleaning equipment is in normal working condition.
[0062] The tank-type semiconductor cleaning equipment disclosed in this application may further include a second alarm, which can be connected to the fluid presence / absence detection sensor 400. The second alarm is activated when no signal indicating the presence of cleaning fluid in the cleaning fluid circulation pipeline 300 is received from the fluid presence / absence detection sensor 400 within a second preset time period. The alarm from the second alarm can remind operators to perform timely maintenance.
[0063] To ensure that the temperature of the cleaning solution more readily meets the temperature requirements of the semiconductor cleaning process, the semiconductor cleaning equipment disclosed in this application may further include a heater 500. The heater 500 is disposed on the first pipe section 310 or the second pipe section 320, and is used to heat the cleaning solution flowing through the cleaning solution circulation pipe 300. During the circulation of the cleaning solution, the cleaning solution is heated before entering the cleaning tank 200.
[0064] The above embodiments of this application focus on describing the differences between the various embodiments. As long as the different features of the various embodiments are not contradictory, they can be combined to form more specific embodiments. For the sake of brevity, they will not be described in detail here.
[0065] The embodiments of this application have been described above with reference to the accompanying drawings. However, this application is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of this application without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of this application.
Claims
1. A flow detection method applied to a fluid pump (100), characterized in that, The fluid pump (100) includes a pump housing (110) and two variable volume chambers (120) and a valve device (130) disposed within the pump housing (110); the pump housing (110) has an outlet (111) and an inlet (112); the two variable volume chambers (120) are connected to the outlet (111) and the inlet (112) through the valve device (130); the two variable volume chambers (120) alternately change their volume, wherein one increases in volume so that fluid enters through the inlet (112) while the other decreases in volume so that the fluid contained therein is discharged through the outlet (111); The flow detection method includes: The duration of one volume change in the two variable volume chambers (120) is detected; The flow rate of the fluid is calculated based on the volume of the variable volume chamber (120) when it is filled with the fluid and the duration of one volume change.
2. The flow detection method according to claim 1, characterized in that, The fluid pump (100) further includes a detection device, which includes two position sensors (140); the adjacent ends of the two variable volume chambers (120) are fixed ends and are respectively connected to the valve device (130); the opposite ends of the two variable volume chambers (120) are movable ends, and the volume of the corresponding variable volume chamber (120) can be changed by moving towards the fixed end or moving away from the fixed end; the two position sensors (140) are disposed in the pump housing (110) and are respectively arranged opposite to the movable ends of the two variable volume chambers (120) for being triggered by the movable ends when the corresponding variable volume chamber (120) is filled with fluid.
3. The flow detection method according to claim 2, characterized in that, The detection of the duration of one volume change in the two variable volume chambers (120) includes: Based on the time interval between the change of one of the two position sensors (140) from a triggered state to a non-triggered state and the triggering of the other, the time interval is determined to be the duration of one volume change for the two variable volume chambers (120).
4. The flow detection method according to any one of claims 1 to 3, characterized in that, The flow detection method further includes: among the detected durations of a single volume change, determining the duration of the volume change that does not fall within a preset duration range as an abnormal duration, and not calculating the flow rate of the fluid based on this.
5. The flow detection method according to claim 4, characterized in that, The calculation of the fluid flow rate based on the volume of the variable volume chamber (120) when it is filled with the fluid and the duration of one volume change includes: Among the detected durations of a single volume change, the duration of the volume change within the preset duration range is determined as the normal duration, and the average flow rate determined by the normal duration is taken as the flow rate of the fluid.
6. The flow detection method according to claim 4, characterized in that, The fluid pump (100) further includes a first alarm, and the flow detection method further includes: If the number of times the abnormal duration is detected within a first preset time period exceeds a preset threshold, the first alarm is activated.
7. The flow detection method according to claim 3, characterized in that, The fluid pump (100) also includes a drive mechanism (150). The drive mechanism (150) drives the mobile end to move closer to the fixed end and / or further away from the fixed end in each single drive duration, so that one of the two position sensors (140) changes from a triggered state to a non-triggered state and the other is triggered.
8. The flow detection method according to claim 7, characterized in that, The pump housing (110) is provided with a first inner cavity (113) and a second inner cavity (114) that are isolated from each other. The first inner cavity (113) is isolated from the inlet (112) and the outlet (111) respectively, and the second inner cavity (114) is isolated from the inlet (112) and the outlet (111) respectively. The drive mechanism (150) includes a first air passage (151), a second air passage (152) and a switching valve (153). The two ends of the first air passage (151) are respectively connected to the first port of the switching valve (153) and the first inner cavity (113), and the two ends of the second air passage (152) are respectively connected to the second port of the switching valve (153) and the second inner cavity (114). The switching valve (153) controls the first air passage (151) and the second air passage (152) to switch between intake and exhaust by switching the air passage direction of the first port and the second port. The flow detection method further includes: The switching valve (153) adjusts the intake and exhaust switching time of the first air passage (151) and the second air passage (152) according to the duration of one volume change of the two variable volume chambers (120), so that the intake and exhaust switching time is longer than the duration of one volume change and shorter than the single drive time preset by the drive mechanism (150).
9. A fluid pump, characterized in that, The pump (100) includes a pump housing (110) and two variable volume chambers (120) and a valve device (130) disposed within the pump housing (110); the pump housing (110) has an outlet (111) and an inlet (112); the two variable volume chambers (120) are respectively connected to the outlet (111) and the inlet (112) through the valve device (130); the two variable volume chambers (120) alternately change their volume, wherein one volume increases so that fluid enters through the inlet (112) while the other volume decreases so that the fluid contained therein is discharged through the outlet (111), and the fluid pump (100) further includes a processor for performing the flow detection method according to any one of claims 1 to 8.
10. The fluid pump according to claim 9, characterized in that, The valve device (130) includes a first check valve (131), a second check valve (132), a third check valve (133), and a fourth check valve (134); one of the two variable volume chambers (120) is connected to the outlet (111) via the first check valve (131) and to the inlet (112) via the second check valve (132); the other of the two variable volume chambers (120) is connected to the outlet (111) via the third check valve (133) and to the inlet (112) via the fourth check valve (134); When the volume of the variable volume chamber (120) connected to the first check valve (131) and the second check valve (132) increases and the volume of the variable volume chamber (120) connected to the third check valve (133) and the fourth check valve (134) decreases, the second check valve (132) is in the open state, the first check valve (131) is in the closed state, the third check valve (133) is in the open state, and the fourth check valve (134) is in the closed state; When the volume of the variable volume chamber (120) connected to the first check valve (131) and the second check valve (132) decreases and the volume of the variable volume chamber (120) connected to the third check valve (133) and the fourth check valve (134) increases, the first check valve (131) is in the open state, the second check valve (132) is in the closed state, the third check valve (133) is in the closed state, and the fourth check valve (134) is in the open state.
11. A tank-type semiconductor cleaning device, characterized in that, The device includes a cleaning tank (200), a cleaning fluid circulation pipeline (300), and a fluid pump (100) as described in claim 9 or 10. The cleaning fluid circulation pipeline (300) includes a first pipe section (310) and a second pipe section (320). A first end of the first pipe section (310) is connected to the top of the cleaning tank (200) to receive the cleaning fluid discharged from the cleaning tank (200). A second end of the first pipe section (310) is connected to the inlet (112). A first end of the second pipe section (320) is connected to the outlet (111). A second end of the second pipe section (320) is connected to the bottom of the cleaning tank (200) to deliver the cleaning fluid into the cleaning tank (200).