Measuring device for a transport enclosure and control method

Abstract

A measuring device comprising at least one interface comprising at least one measuring head (3) including a measuring conduit (4), a measuring tube (5) translationally movable within the measuring conduit (4), and an elastic element (6) configured to urge the measuring tube (5) into a deployed position such that, in the case of a transport enclosure coupled to the interface, the measuring tube (5) engages in a ventilation port if the ventilation port is configured to open in the event of a negative pressure inside the transport enclosure, and such that the measuring tube (5) is pushed back into a retracted position otherwise.

Description

Description Title of the invention: Measurement device for a transport container and control method Technical field of the invention

[0001] The present invention relates to a device for measuring at least one transport container for the conveying and atmospheric storage of semiconductor substrates. The present invention also relates to a method for checking the leak-tightness of at least one transport container. Technical background

[0002] In the semiconductor manufacturing industry, transport enclosures such as Front Opening Unified Pods (FOUPs) enable the transport of substrates, such as semiconductor wafers, from one piece of equipment to another or the storage of substrates between two manufacturing steps. These transport enclosures define a confined space under atmospheric pressure, separate from the substrate's operating and transport environment, for the transport and storage of one or more substrates in cleanrooms, where the internal atmosphere is maintained with a very low contamination level.

[0003] The transport enclosures consist of a rigid peripheral shell whose opening can be closed by a removable door, with a door seal interposed between the door and the shell. These transport enclosures are standardized components for interfacing with production equipment, allowing the opening and closing of the doors to be managed automatically directly by this equipment.

[0004] The transport enclosure is not completely airtight, however, as ventilation ports ("breathing port" in English) are provided in the casing to allow pressure equalization between the inside and outside of the enclosure.

[0005] To further reduce the risk of contamination inside these enclosures, it is currently recommended to regularly purge their internal atmosphere.

[0006] Recent developments also include the installation of check valves in the ventilation ports of certain transport enclosures, with these check valves mounted in series with filters. The check valves allow for a near-airtight seal of the enclosures, maintaining the internal atmosphere at a slight overpressure of purge gas for as long as possible without any gas exchange with the outside.

[0007] This increased airtightness at the ventilation ports makes the door's airtightness critical. Indeed, if the door's airtightness is not guaranteed, unfiltered gas can enter the transport chamber, which is particularly damaging to the substrates. Measurements have established a correlation between the airtightness of the transport chamber door and the level of particle contamination of the substrates within these chambers. The door's airtightness is therefore directly linked to production yield.

[0008] Document WO2018083312A1 describes a device for measuring the leak-tightness of at least one transport enclosure. This device includes at least one interface configured to couple with the transport enclosure. The interface comprises a measuring head configured to engage with a ventilation port of the transport enclosure, pushing back the incoming non-return valve when the ventilation port is equipped with an incoming non-return valve. The measuring head thus allows a measurement line to be connected to a ventilation port of the transport enclosure by opening any non-return valves that may be present on the transport enclosure. The measuring device therefore allows the leak-tightness of the enclosure door to be checked by accessing the internal atmosphere of the transport enclosure from the outside, in a leak-tight manner and without modifying the enclosure, which remains in its standard configuration.

[0009] However, ventilation ports have become increasingly complex over time, and this has not been standardized among manufacturers. As a result, the number and arrangement of ventilation ports can vary from one FOU P transport enclosure to another. Some enclosures may have only one inlet check valve and one outlet check valve, for example, located at the two corners of the back. Others may have one inlet check valve and one outlet check valve near the door. Still others may have three or four ventilation ports, and so on. Furthermore, the design of the ventilation ports can differ, with some transport enclosures featuring membrane valves.It is therefore necessary to provide several types of interfaces, each adapted to a particular configuration of the ventilation ports of the transport enclosure, as the same measurement device cannot be used for FOU P transport enclosures with different ventilation ports. Summary of the invention

[0010] One aim of the present invention is to improve the compatibility of the measurement device interface with FOUP transport enclosures.

[0011] To this end, the invention relates to a measuring device for at least one laterally opening transport enclosure for the conveying and atmospheric storage of semiconductor substrates, said transport enclosure comprising at least two ventilation ports, the measuring device comprising at least one interface configured to couple to the transport enclosure, characterized in that the interface comprises at least one measuring head configured to be positioned opposite a ventilation port of the transport enclosure coupled to the interface, the measuring head comprising: - a measuring conduit configured to be fluidly connected to a measuring line, - a measuring tube that is movable in translation within the measuring conduit between a deployed position in which the measuring tube protrudes from the measuring conduit and a retracted position in which the measuring tube is retracted into the measuring conduit,- an elastic element configured to exert stress on the measuring tube in the deployed position such that, in the case of a transport enclosure coupled to the interface, the measuring tube engages in a ventilation port if the ventilation port is configured to open in the event of negative pressure inside the transport enclosure, and so that the measuring tube is pushed back into the retracted position otherwise.

[0012] The same measuring head thus makes it possible to ensure a sealed fluidic communication between the measuring conduit and a first type of ventilation port equipped with an incoming non-return valve by keeping it in the open position for the duration of the measurement and to be able to be placed opposite a second type of ventilation port equipped with an outgoing non-return valve or opposite a ventilation port with a single hole or without a ventilation port, without the measuring head lifting the transport enclosure and without needing to change the interface.

[0013] The measuring device may also include one or more of the characteristics described below, taken alone or in combination.

[0014] The measuring head can be configured to, in the deployed position, push back a shutter of an incoming check valve from a ventilation port of the transport enclosure coupled to the interface configured to open in case of depression inside the transport enclosure.

[0015] The stiffness of the elastic element is, for example, configured to be greater than that of an elastic component of the incoming check valve.

[0016] The measuring tube can be configured to be pushed back into the retracted position when a vent port configured to open in case of overpressure inside the transport enclosure is located opposite the measuring head of the transport enclosure coupled to the interface, in particular when the vent port has an outward non-return valve located opposite the measuring head of the transport enclosure coupled to the interface or when the transport enclosure coupled to the interface has no vent port located opposite the measuring head or has a vent port without valves or membrane.

[0017] The stiffness of the elastic element is, for example, configured to be less than the force exerted by said transport enclosure coupled to the interface.

[0018] According to one embodiment, at least one lateral opening is provided at the end of the measuring tube.

[0019] The measuring head can be configured to, in the deployed position, lift a membrane from a membrane ventilation port of the transport enclosure coupled to the interface.

[0020] The stiffness of the elastic element is, for example, configured to be greater than that of the ventilation port membrane.

[0021] According to one exemplary embodiment, the measuring tube has a pointed end, the points being configured to engage in respective orifices of a grid of a support of the membrane ventilation port.

[0022] According to one embodiment, the measuring head includes an annular sealing gasket configured to be interposed between the ventilation port of the transport enclosure coupled to the interface and the measuring head by surrounding the outlet orifice of the ventilation port.

[0023] According to one embodiment, the measuring head includes a guide ring in which the measuring tube can slide between the deployed and retracted positions, with the head of the measuring tube bearing against an axial stop of the guide ring in the deployed position.

[0024] The elastic element can be arranged in the measuring conduit, the guide ring being screwed to the main body by preloading the elastic element.

[0025] According to one embodiment, the main body includes a thread stop for tightening the guide ring.

[0026] An axial end of the guide ring opposite the one that butts up against the head of the measuring tube can be configured to cooperate with a tool.

[0027] According to another embodiment, the guide ring has a polygonal shape configured to cooperate with a tool, such as a wrench.

[0028] The invention further relates to a method for checking the leak-tightness of at least one transport enclosure for the conveying and atmospheric storage of semiconductor substrates by means of a measuring device as described above, in which a transport enclosure is coupled to an interface of the measuring device so that all the ventilation ports of the transport enclosure are blocked or coupled to a measuring head of the interface with at least one measuring head engaged in a ventilation port of the transport enclosure. Brief description of the figures

[0029] Other advantages and features will become apparent upon reading the following description of a particular, but by no means limiting, embodiment of the invention, as well as the accompanying drawings in which:

[0030] [Fig.1] Figure 1 shows a schematic view of an example of a transport enclosure envelope coupled to a measuring device.

[0031] [Fig.2] Figure 2 shows a schematic cross-sectional view of a ventilation port fitted with an incoming check valve in the open position.

[0032] [Fig.3] Figure 3 shows a schematic cross-sectional view of a ventilation port fitted with an exit check valve in the closed position.

[0033] [Fig.4] Figure 4 shows a schematic cross-sectional view of a measuring head according to a first example of embodiment.

[0034] [Fig.5] Figure 5 shows a schematic exploded view of the measuring head of Figure 4.

[0035] [Fig.6] Figure 6 shows a schematic cross-sectional view of the measuring head of Figure 4 in the deployed position, coupled to a ventilation port equipped with an incoming check valve.

[0036] [Fig.7] Figure 7 shows a schematic cross-sectional view of the measuring head of Figure 4 in the retracted position, coupled to a ventilation port equipped with an outward non-return valve.

[0037] [Fig.8] Figure 8 shows a schematic cross-sectional view of a membrane ventilation port.

[0038] [Fig.9A] Figure 9A shows a schematic perspective view of a support for the membrane ventilation port of Figure 8.

[0039] [Fig.9B] Figure 9B shows a schematic side view of a membrane of the ventilation port of Figure 8.

[0040] [Fig.10] Figure 10 shows a schematic perspective view of a measuring head according to a second embodiment example.

[0041] [Fig.11] Figure 11 shows a schematic cross-sectional view of the measuring head of Figure 10.

[0042] [Fig.12] Figure 12 shows a schematic cross-sectional view of the measuring head of Figure 10 in the deployed position, coupled to a membrane ventilation port.

[0043] [Fig.13] Figure 13 shows a schematic cross-sectional view of the measuring head of Figure 10 in the retracted position, coupled to a ventilation port equipped with an outgoing non-return valve.

[0044] In these figures, identical or similar elements bear the same reference numbers.

[0045] Only the elements necessary for understanding the invention are represented. Detailed description

[0046] The following embodiments are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment, or that the features apply only to a single embodiment. Simple features of different embodiments can also be combined or interchanged to provide other embodiments, without departing from the scope of the invention as defined by the claims.

[0047] The term "upstream" refers to an element that is positioned before another element in relation to the direction of gas flow. Conversely, the term "downstream" refers to an element positioned after another element in relation to the direction of gas flow.

[0048] Figure 1 shows a schematic view of a measuring device 1 of at least one transport enclosure 200, for example allowing the control of the sealing of the door of said enclosure.

[0049] The 200 transport chamber allows for the conveying and storage of at least one semiconductor substrate, such as wafers or photomasks, between semiconductor manufacturing steps. The internal atmosphere of the 200 transport chambers is atmospheric pressure, using either air or nitrogen. These are specifically standardized, side-opening FOUP (Front Opening Unified Pod) type chambers.

[0050] The transport enclosure 200 comprises a rigid casing 204, made of plastic material, having a lateral opening 205 and a removable door (not shown) having a peripheral sealing gasket, the door allowing the opening 205 to be closed.

[0051] The transport enclosure 200 includes at least two ventilation ports 207 provided in a bottom wall 208 of the envelope 204.

[0052] According to a first embodiment visible in the cross-sectional view of Figure 2, the ventilation port 207 includes an incoming check valve 211 arranged in a through orifice in the bottom wall 208 of the transport enclosure 200, upstream or downstream of a particle filter 210.

[0053] The incoming check valve 211 is configured to open in the event of a vacuum inside the enclosure 200.

[0054] The incoming check valve 211 comprises a movable obturator 213 and an elastic element 214. The obturator 213 is movable in translation between an open position (Figure 2) and a closed position in which it closes an outlet orifice 212 formed by the mouth of the through-hole of the ventilation port 207. The obturator 213 has, for example, a disc-shaped head configured to close the outlet orifice 212. The disc is, for example, provided with an O-ring seal and located at the end of a stem, so that the obturator 213 has a "T" shape. The elastic element 214, such as a compression spring, forces the movable obturator 213 into the closed position.

[0055] The opening of the incoming check valve 211 allows the entry of a gas into the transport vessel 200 under the exercise of an external force on the transport vessel 200, the position of the valve 211 being determined by the upstream / downstream pressure difference of the valve 211. When the pressure difference between the external pressure and the internal pressure of the transport vessel 200 is greater than a valve setting threshold, the movable obturator 213 is pushed against the elastic element 214 in the open position and a purge gas can enter the transport vessel 200 (as represented by the arrow in Figure 2).

[0056] According to a second embodiment visible in the cross-sectional view of Figure 3, the ventilation port 207 includes an outgoing non-return valve 215 arranged in a through orifice in the bottom wall 208 of the transport enclosure 200, upstream or downstream of a particle filter 210.

[0057] The outward non-return valve 215 opens in case of excess gas inside the transport enclosure 200 relative to the external atmospheric pressure.

[0058] The outlet port 215 differs from the inlet port 211 in that its opening allows the exit of a gas from the transport container 200, the outgoing non-return valve 215 opening under the exercise of a force exerted from inside the transport container 200. Thus, when the pressure difference between the internal and external pressure of the transport container 200 is greater than a setting threshold of the valve, the obturator 213 is pushed against the elastic element 214 in the open position and gas can exit the transport container 200 through the outlet orifice 212.

[0059] The movable obturators 213 and the elastic elements 214 of the incoming check valve 211 and of the outgoing check valve 215 can be the same, the obturator 213 of the incoming check valve 211 being arranged in an inverted position with respect to the obturator 213 of the outgoing check valve 215.

[0060] These ventilation ports 207 can be used to purge the FOUP transport enclosures 200. A purge gas can be injected into the transport enclosure 200 at an inlet check valve 211, with excess air being expelled through an outlet check valve 215. It is thus possible to purge the internal atmosphere of the transport enclosure 200 without opening or modifying the enclosure 200, and therefore during production.

[0061] A transport enclosure 200 may include two to four ventilation ports 207 provided in the bottom wall 208 of the enclosure 204, for example at least one pair of inlet check valves 211 - outlet check valves 215.

[0062] The transport enclosure 200, for example, has two ventilation ports 207 with inlet check valves 211 and two ventilation ports 207 with outlet check valves 215, for example arranged at the four corners of the bottom wall 208 of the enclosure 204. The transport enclosure 200 may have a single ventilation port 207 with an inlet check valve 211 and a single ventilation port 207 with an outlet check valve 215. According to another example, the transport enclosure 200 has three ventilation ports 207.

[0063] The measuring device 1 for the leakage of at least one transport container 200 includes at least one interface 2 configured to couple to the transport container 200 (Figure 1). The measuring device 1 may include several interfaces 2 for the simultaneous leakage testing of several transport containers 200 coupled to a respective interface 2.

[0064] Interface 2 includes at least one measuring head 3, such as two, three or four measuring heads 3, configured to be positioned opposite a ventilation port 207 of the transport enclosure 200 coupled to interface 2.

[0065] More clearly visible in figures 4 and 5, the measuring head 3 comprises a measuring conduit 4, a measuring tube 5 and an elastic element 6.

[0066] The measuring conduit 4 is provided in a main body 7 of the measuring head 3.

[0067] The measuring conduit 4 is configured to be fluidically connected to a measuring line. This measuring line includes one or more control or measuring devices that are to be made to communicate fluidically with the interior of the transport enclosure 200.

[0068] According to an example of implementation, the measurement line allows the sealing of the door of the transport enclosure 200 to be checked.

[0069] For this purpose, a transport enclosure 200 is coupled to an interface 2 of the measuring device 1 so that all the ventilation ports 207 of the transport enclosure 200 are blocked or coupled to a measuring head 3 of the interface 2 with at least one measuring head 3 engaged in a ventilation port 207 of the transport enclosure 200.

[0070] For example, an interface 2 is planned having four measuring heads 3, all fluidly connected to the measuring line by a respective isolation valve.

[0071] The measurement line includes, for example, a flow meter, a pressure sensor, and a sampling pump. The flow meter includes, for example, a gas source and an adjustable mass flow meter. It allows the controlled injection of different gas flows into the measuring conduit 4, which opens through the measuring head 3.

[0072] During the test, for example, a first measuring head 3 is used to establish fluidic communication between the inside of the transport vessel and the sampling pump and pressure sensor in order to control a predetermined initial pressure, for example, atmospheric pressure, while the other measuring heads 3 are isolated. Then, the first measuring head 3 is isolated, and a gas, such as air, is injected into a second measuring head 3 using the flow measurement device, while the other measuring heads 3 remain isolated (alternatively, the same measuring head is injected). The injection is then stopped, and the pressure drop is measured to determine the leakage rate of the transport vessel door 200, each ventilation port 207 being coupled to a measuring head 3. The pressure drop time curve allows the conductance of the leakage flow to be determined.

[0073] According to another embodiment, the measurement line includes at least one gas analyzer and a sampling pump, for monitoring a level of contamination inside the transport enclosure 200. For example, an interface 2 is provided having one or four measuring heads 3.

[0074] The measuring tube 5 is movable in translation in the measuring conduit 4, at the end of the measuring conduit 4, in the axial direction of the tube 5 intended to be perpendicular to the bottom wall 208 of the transport enclosure 200 coupled to the interface 2.

[0075] According to one embodiment, the elastic element 6 is arranged in the measuring conduit 4, interposed here between the head 5a of the measuring tube 5 and a tubular lug 11 fixed to the main body 7.

[0076] The elastic element 6 includes, for example, a compression spring.

[0077] The elastic element 6 exerts stress on the measuring tube 5 in the deployed position (figure 4). In other words, at rest, i.e. in the absence of an external load exerted on the measuring tube 5, the measuring tube 5 protrudes from the measuring conduit 4.

[0078] The measuring tube 5 is movable relative to the main body 7 between a deployed position in which the measuring tube 5 protrudes from the measuring conduit 4 (figures 4, 6) and a retracted position in which the measuring tube 5 is retracted into the measuring conduit 4 (figure 7).

[0079] The elastic element 6 is configured to stress the measuring tube 5 in the deployed position so that, in the case of a transport enclosure 200 coupled to the interface 2, the measuring tube 5 engages in a ventilation port 207 if the ventilation port 207 is configured to open in the event of a depression inside the transport enclosure 200 and so that the measuring tube 5 is pushed back into the retracted position otherwise, i.e. in the opposite case.

[0080] The measuring head 3 is for example configured to, in the deployed position, push back the shutter 213 of an incoming check valve 211 of a ventilation port 207 of the transport enclosure 200 coupled to the interface 2.

[0081] The measuring tube 5 is configured in particular to be pushed back into the retracted position when a ventilation port 207 configured to open in case of overpressure inside the transport enclosure 200 is located opposite the measuring head 3 of the transport enclosure 200 coupled to the interface 2, in particular the measuring tube 5 is for example configured to be pushed back into the retracted position when a ventilation port 207 equipped with an outward non-return valve 215 is located opposite the measuring head 3 of the transport enclosure 200 coupled to the interface 2, or when the transport enclosure 200 coupled to the interface 2 is without a ventilation port located opposite the measuring head 3 or is provided with a ventilation port without valves or membrane.

[0082] For this, for example, the stiffness of the elastic element 6 is configured to be greater than that of an elastic element 214 of the incoming check valve 211.

[0083] The stiffness of the elastic element 6 can be configured to be less than the force exerted by the transport enclosure 200 coupled to the interface 2 when a ventilation port 207 equipped with an outgoing check valve 215 is disposed opposite the measuring head 3 of the transport enclosure 200 coupled to the interface 2, or when the transport enclosure 200 coupled to the interface 2 is without a ventilation port disposed opposite the measuring head 3 or is provided with a ventilation port without valves or membrane.

[0084] The diameter of the measuring tube 5 is for example greater than the diameter of the outlet orifice 212 of an outgoing check valve 215 of the ventilation port 207 (figure 7) and less than the diameter of the outlet orifice 212 of an incoming check valve 211 of the ventilation port 207 (figure 6).

[0085] The same measuring head 3 thus makes it possible to ensure a sealed fluidic communication between the measuring conduit 4 and a first type of ventilation port 207 equipped with an incoming non-return valve 211 by keeping it in the open position for the duration of the measurement and to be able to be placed opposite a second type of ventilation port 207 equipped with an outgoing non-return valve 215 or opposite a ventilation port with a single hole or without a ventilation port, without the measuring head 3 lifting the transport enclosure 200 and without needing to change interface 2.

[0086] According to one embodiment, the measuring head 3 includes an annular sealing gasket 8 configured to be interposed between the ventilation port 207 of the transport enclosure 200 coupled to the interface 2 and the measuring head 3 by surrounding the outlet orifice 212 of the ventilation port 207.

[0087] The annular sealing gasket 8 is for example cylindrical with a rectangular cross-section or is made by a suction cup.

[0088] According to one embodiment, the annular sealing gasket 8 surrounds an end piece 9 of the main body 7, at the end of the measuring conduit 4. The annular sealing gasket 8 may protrude from the end piece 9.

[0089] It is anticipated in particular that the diameter of the hollow of the annular sealing gasket 8 will be greater than the diameter of the outlet orifice 212 of the ventilation port 207 in particular equipped with an incoming non-return valve 211.

[0090] According to one embodiment, the measuring head 3 includes a guide ring 10 in which the measuring tube 5 can slide between the deployed position and the retracted position, a head 5a of the measuring tube 5 bearing against an axial stop of the guide ring 10 in the deployed position to block the exit of the measuring tube 5 in the deployed position.

[0091] The guide ring 10 preferably has good sliding properties. For example, it is made of PTFE (Polytetrafluoroethylene).

[0092] According to one embodiment, the guide ring 10 can be screwed to the main body 7 of the measuring head 3 by preloading the elastic element 6 arranged in the measuring conduit 4, in particular by exerting a predetermined constraint on the measuring tube 5, which allows a precise assembly of the guide ring 10 allowing fine adjustment of the preload of the elastic element 6.

[0093] The main body 7 may include a thread stop for tightening the guide ring 10. This ensures that the guide ring 10 is tightened the same way on all measuring heads 3 and therefore that the elastic elements 6 are rigidly reproducible during assembly.

[0094] A tool 12 (Figure 5) can be configured to cooperate with an axial end of the guide ring 10, opposite the end that butts against the head 5a of the measuring tube 5, to screw / unscrew the guide ring 10 into the fitting 9. One end of the tool 12 and the axial end of the guide ring 10 may, for example, have two diametrically aligned slots, and the other may have two corresponding tabs. The tool 12 facilitates the assembly of the guide ring 10 into the fitting 9 of the main body 7.

[0095] According to one embodiment, at least one lateral opening 13 is provided at the end of the measuring tube 5. Two openings 13, for example, extend laterally from the end of the measuring tube 5, the openings 13 being, for example, diametrically opposed. These openings 13 are positioned, for example, so as to be closed by the guide ring 10 into which the measuring tube 5 retracts, and positioned beyond the guide ring 10 so as to be open in the deployed position of the measuring tube 5.

[0096] Thus, when the measuring head 3 is positioned opposite a ventilation port 207 equipped with an inward non-return valve 211, as shown in Figure 6, the end of the measuring tube 5 comes into contact with the disc of the movable shutter 213 of the valve 211. The difference in stiffness allows the measuring tube 5 to remain in the extended position and to push the shutter 213 of the valve 211 into a retracted position, opening the valve 211. Gases can then flow from the measuring conduit 4 of interface 2 into the through orifice of the ventilation port 207 of the transport enclosure 200 coupled to interface 2, passing through the measuring tube 5 via the orifices 13, the seal between the measuring tube 5 and the ventilation port 207 being ensured by the annular sealing gasket 8. Measurement head 3 thus allows the inside of the transport enclosure 200 to be connected to the measurement line via fluidic communication.

[0097] When the measuring head 3 is positioned opposite a ventilation port 207 of the enclosure 200, which is equipped with an outgoing non-return valve 215, as shown in Figure 7, the end of the measuring tube 5 rests against the bottom wall 208 of the transport enclosure 200, opposite the outlet 212 of the ventilation port 207. The force exerted by the transport enclosure 200 coupled to the interface 2 retracts the measuring tube 5 into the retracted position. The transport enclosure 200 can be coupled to the interface 2 without the measuring head 3 lifting the transport enclosure 200.

[0098] The same operation applies in the case where there is no ventilation port 207 opposite the measuring head 3 and in the case where the ventilation port 207 is an orifice through the bottom wall 208 provided with a particle filter 210, the measuring tube 5 being pushed into the retracted position for example by a grid of the through orifice.

[0099] Figures 8, 9A and 9B show another example of the implementation of the ventilation port 216.

[0100] In this example, the ventilation port 216 has a membrane 217 attached to a support 218 of the ventilation port 216, for example above a grid of the support 218 of the ventilation port 216, upstream or downstream of a particle filter 210.

[0101] The ventilation port 216 is closed in the rest position; overpressure allows the membrane 217 to be lifted to open it.

[0102] The ventilation port 216 is "incoming", that is, configured to open in case of depression inside the enclosure 200. In case of depression, the membrane 217 is configured to lift and allow the entry of a gas into the transport enclosure 200, the lifting of the membrane 217 being determined by the upstream / downstream pressure difference of the membrane 217.

[0103] This 216 vent port can also be used to purge 200 FOIIP transport enclosures.

[0104] The measuring tube 5 is movable relative to the main body 7 between a deployed position in which the measuring tube 5 protrudes from the measuring conduit 4 (figures 11, 12) and a retracted position in which the measuring tube 5 is retracted into the measuring conduit 4 (figure 13).

[0105] In the deployed position, the measuring tube 5 engages in a ventilation port 216 configured to open in case of depression inside the transport enclosure 200 coupled to the interface 2 and arranged opposite the measuring head 3 (figure 12).

[0106] The measuring head 3 is configured here to, in the deployed position, lift a membrane 217 from the membrane ventilation port 216 of the transport enclosure 200 coupled to the interface 2. For this, for example, the stiffness of the elastic element 6 is configured to be greater than that of the membrane 217 of the ventilation port 216. In addition, the diameter of the measuring tube 5 is, for example, less than the diameter of the outlet orifice 212 of a membrane ventilation port 216 (Figure 12) and greater than the diameter of a ventilation port 207 equipped with an outgoing non-return valve 215 (Figure 13).

[0107] The same measuring head 3 thus makes it possible to ensure a sealed fluidic communication between the measuring conduit 4 and a first type of ventilation port 207 equipped with an incoming non-return valve 211 by keeping it in the open position for the duration of the measurement and a third type of ventilation port 216 with a membrane (figure 12) by keeping it in the open position for the duration of the measurement, without needing to change interface 2.

[0108] According to one embodiment, the annular sealing gasket 8 surrounds an end of the guide ring 10. The annular sealing gasket 8 may protrude from the guide ring 10.

[0109] In this embodiment example, the guide ring 10 has a polygonal shape configured to cooperate with a tool, such as a wrench.

[0110] According to one embodiment, the measuring tube 5 has a pointed end, the points being configured to engage in respective holes in a grid of the support 218 of the membrane ventilation port 216. The end of the measuring tube 5, for example, has three points visible in Figure 10, configured to engage in three respective holes in the grid of the support 218 (Figure 9A).

[0111] Thus, when the measuring head 3 is positioned opposite a diaphragm vent port 216, as shown in Figure 12, the end of the measuring tube 5 rests against the edge of the diaphragm 217. The difference in stiffness allows the measuring tube 5 to remain in the extended position and lift the diaphragm 217 to open it. Gases can then flow from the measuring conduit 4 of interface 2 into the through orifice of the vent port 216 of the transport enclosure 200 coupled to interface 2, passing through the measuring tube 5 between the tips. The seal between the measuring tube 5 and the vent port 216 is ensured by the annular sealing gasket 8. The measuring head 3 thus establishes fluid communication between the interior of the transport enclosure 200 and the measuring line.

[0112] When the measuring head 3 is positioned opposite a ventilation port 207 of the enclosure 200 equipped with an outgoing non-return valve 215, as can be seen in Figure 13, the end of the measuring tube 5 rests against the bottom wall 208 of the transport enclosure 200, opposite the outlet 212 of the ventilation port 207. The force exerted by the transport enclosure 200 coupled to the interface 2 allows the measuring tube 5 to retract into the retracted position without the measuring head 3 lifting the transport enclosure 200.

[0113] The compatibility of interface 2 of measuring device 1 with the 200 FOUP transport enclosures is therefore improved.

Claims

DEMANDS

1. A measuring device (1) for at least one side-opening transport enclosure (200) for the conveying and atmospheric storage of semiconductor substrates, said transport enclosure (200) comprising at least two ventilation ports (207; 216), the measuring device (1) comprising at least one interface (2) configured to mate with the transport enclosure (200), characterized in that the interface (2) comprises at least one measuring head (3) configured to be positioned opposite a ventilation port (207; 216) of the transport enclosure (200) coupled to the interface (2), the measuring head (3) comprising: - a measuring conduit (4) configured to be fluidly connected to a measuring line, - a measuring tube (5) movable in translation within the measuring conduit (4) between a deployed position in which the measuring tube (5) protrudes from the measuring conduit (4) and a retracted position in which the measuring tube (5) is retracted into the measuring conduit (4), - an elastic element (6) configured to stress the measuring tube (5) in the deployed position so that, in the case of a transport enclosure (200) coupled to the interface (2), the measuring tube (5) engages in a ventilation port (207; 216) if the ventilation port (207; 216) is configured to open in the event of a vacuum inside the transport enclosure (200) and so that the measuring tube (5) is pushed back into the retracted position otherwise.

2. Measuring device (1) according to the preceding claim, characterized in that, in the deployed position, the measuring head (3) is configured to push back a shutter (213) of an incoming check valve (211) of a ventilation port (207; 216) of the transport enclosure (200) coupled to the interface (2) configured to open in the event of a depression inside the transport enclosure (200).

3. Measuring device (1) according to the preceding claim, characterized in that the stiffness of the elastic element (6) is configured to be greater than that of an elastic element (214) of the incoming check valve (211).

4. A measuring device (1) according to any one of the preceding claims, characterized in that the measuring tube (5) is configured to be pushed back into the retracted position when a ventilation port (207) configured to open in case of overpressure inside the transport enclosure (200) is disposed opposite the measuring head (3) of the transport enclosure (200) coupled to the interface (2), or when the transport enclosure (200) coupled to the interface (2) is without a ventilation port disposed opposite the measuring head (3) or is provided with a ventilation port without flaps or a membrane.

5. A measuring device (1) according to the preceding claim, characterized in that the stiffness of the elastic element (6) is configured to be less than the force exerted by said transport enclosure (200) coupled to the interface (2).

6. Measuring device (1) according to any one of the preceding claims, characterized in that at least one lateral orifice (13) is provided at the end of the measuring tube (5).

7. Measuring device (1) according to any one of claims 1 to 5, characterized in that, in the deployed position, the measuring head (3) is configured to lift a membrane (217) from a membrane ventilation port (216) of the transport enclosure (200) coupled to the interface (2).

8. Measuring device (1) according to the preceding claim, characterized in that the stiffness of the elastic element (6) is configured to be greater than that of the membrane (217) of the ventilation port (216).

9. Measuring device (1) according to any one of claims 7 or 8, characterized in that the measuring tube (5) has a pointed end, the points being configured to engage in respective orifices of a grid of a support (218) of the membrane ventilation port (216).

10. Measuring device (1) according to any one of the preceding claims, characterized in that the measuring head (3) has an annular sealing gasket (8) configured to be interposed between the ventilation port (207) of the transport enclosure (200) coupled to the interface (2) and the measuring head (3) by surrounding the outlet orifice (212) of the ventilation port (207).

11. Measuring device (1) according to any one of the preceding claims, characterized in that the measuring head (3) comprises a guide ring (10) in which the measuring tube (5) can slide between the deployed position and the retracted position, a head (5a) of the measuring tube (5) bearing against an axial stop of the guide ring (10) in the deployed position.

12. Measuring device (1) according to the preceding claim, characterized in that the elastic element (6) is arranged in the measuring conduit (4), the guide ring (10) being screwable to the main body (7) by preloading the elastic element (6).

13. Measuring device (1) according to the preceding claim, characterized in that the main body (7) has a thread stop for tightening the guide ring (10).

14. Method for checking the leak-tightness (100) of at least one transport container (200) for the conveying and atmospheric storage of semi-17 substrates conductors by means of a measuring device (1) according to any one of the preceding claims, wherein a transport enclosure (200) is coupled to an interface (2) of the measuring device (1) such that all ventilation ports (207; 216) of the transport enclosure (200) are blocked or coupled to a measuring head (3) of the interface (2) with at least one measuring head (3) engaged in a ventilation port (207; 216) of the transport enclosure (200).

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