Vacuum system, control device for vacuum system, and vacuum pump for vacuum system
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- MINEBEAMITSUMI INC
- Filing Date
- 2026-01-22
- Publication Date
- 2026-07-30
Smart Images
Figure JP2026001991_30072026_PF_FP_ABST
Abstract
Description
Vacuum system, control device for vacuum system, and vacuum pump for vacuum system
[0001] The present invention relates to a vacuum system including a detachable vacuum pump, a control device for the vacuum system, and a vacuum pump for the vacuum system.
[0002] Conventionally, a vacuum system including a detachable vacuum pump has been known. Such a vacuum system is disclosed in, for example, International Publication No. 2025 / 032846.
[0003] International Publication No. 2025 / 032846 discloses a vacuum generating device (vacuum system) including a main body and a vacuum pump. In the vacuum generating device disclosed in International Publication No. 2025 / 032846, the vacuum pump is configured to be detachable from the main body. Specifically, the vacuum pump disclosed in International Publication No. 2025 / 032846 is configured to be attachable to the main body by engaging a pair of claw portions provided on the vacuum pump with an engaged portion provided on the main body. Further, the vacuum pump disclosed in International Publication No. 2025 / 032846 is configured to be removable from the engaged portion of the main body portion by bending a pair of claw portions provided on the vacuum pump in a direction approaching each other.
[0004] International Publication No. 2025 / 032846
[0005] In International Publication No. 2025 / 032846, when removing the vacuum pump from the main body (control device), it is necessary to bend a pair of claw portions provided on the vacuum pump. Therefore, depending on the high rigidity of the claw portions or the magnitude of the force of the operator during removal, the removal operation of the vacuum pump may become complicated. When the removal of the vacuum pump becomes complicated, there is a disadvantage that the maintainability of the vacuum system deteriorates. Therefore, it is required to suppress the complication of the removal of the vacuum pump and improve the maintainability.
[0006] This invention was made to solve the above-mentioned problems, and one of its objectives is to provide a vacuum system, a control device for the vacuum system, and a vacuum pump for the vacuum system that can suppress the complexity of removing the vacuum pump and improve maintainability.
[0007] To solve the above problems, a vacuum system according to the first aspect of this invention comprises a vacuum pump and a control device that controls the suction operation of the vacuum pump, the vacuum pump including a detachable part that detachably holds the vacuum pump, the vacuum pump including a detachable part engaging part that engages with the detachable part when fixed to the detachable part, and the detachable part includes a release button for releasing the fixing of the detachable part engaging part.
[0008] Furthermore, in order to solve the above problems, a control device for a vacuum system according to a second aspect of this invention is a control device for a vacuum system equipped with a vacuum pump, wherein the control device includes a detachable part that detachably holds the vacuum pump, controls the suction operation by the vacuum pump, and the detachable part includes a release button for releasing the locking of the engaging part of the vacuum pump that engages with the detachable part when the vacuum pump is fixed to the detachable part, when the locking of the vacuum pump is released.
[0009] Furthermore, in order to solve the above problems, a vacuum pump for a vacuum system according to a third aspect of this invention is a vacuum pump for a vacuum system that includes a control device including a detachable part for detachably holding the vacuum pump, wherein the vacuum pump includes an engaging part that engages with the detachable part when fixed to the detachable part, and the engaging part is released when a release button for releasing the fixing of the vacuum pump provided on the detachable part is operated.
[0010] In the vacuum system according to the first aspect of this invention, and in the control device for the vacuum system according to the second aspect, as described above, the attachment / detachment part includes a release button for releasing the locking of the engaging part of the vacuum pump attached to the attachment / detachment part. Furthermore, in the vacuum pump for the vacuum system according to the third aspect, the engaging part engages with the attachment / detachment part, and when the release button for releasing the locking of the vacuum pump provided on the attachment / detachment part is operated, the locking of the engaging part is released. As a result, when removing the vacuum pump from the control device, the locking of the vacuum pump can be easily released by operating the release button. Therefore, the complicated removal of the vacuum pump can be suppressed. Consequently, the complicated removal of the vacuum pump can be suppressed, and maintainability can be improved.
[0011] According to the present invention, as described above, it is possible to suppress the complicated process of removing the vacuum pump and improve maintainability.
[0012] This is a perspective view of a vacuum system according to one embodiment of the present invention, viewed from the top. This is a perspective view of a vacuum system according to one embodiment of the present invention, viewed from the bottom. This is a diagram showing a control device included in a vacuum system according to one embodiment of the present invention, with the vacuum pump removed. This is a perspective view of a vacuum pump included in a vacuum system according to one embodiment of the present invention. This is a bottom view of a vacuum pump included in a vacuum system according to one embodiment of the present invention. This is a side view of a vacuum pump included in a vacuum system according to one embodiment of the present invention. This is a perspective view showing the state before the vacuum pump is attached to the control device included in a vacuum system according to one embodiment of the present invention. This is a perspective view showing the state after the vacuum pump has been attached to the control device included in a vacuum system according to one embodiment of the present invention. This is a diagram for explaining the configuration of the attachment / detachment part of attaching a vacuum pump to the control device included in a vacuum system according to one embodiment of the present invention. This is a diagram for explaining the configuration of removing a vacuum pump from the control device included in a vacuum system according to one embodiment of the present invention. This is a diagram for explaining the configuration of a vacuum system according to a modified example of the present invention.
[0013] Hereinafter, one embodiment of the present invention will be described based on the drawings.
[0014] (Embodiment) A vacuum system 1 according to one embodiment of the present invention will be described with reference to Figures 1 to 12.
[0015] (Overall configuration of the vacuum system) The vacuum system 1 according to this embodiment shown in Figure 1 comprises a vacuum pump 200 and a control device 100. The vacuum system 1 generates negative pressure using the vacuum pump 200 to attract an object. The object attracted to the vacuum system 1 is then transported to the target position.
[0016] In detail, the vacuum system 1 is fixed to the arm at the tip of a transport robot, which acts as a transport device. The transport robot then transports the object that has been picked up by the vacuum system 1.
[0017] The control device 100 is a control device for a vacuum system 1 equipped with a vacuum pump 200. The control device 100 is configured to control the suction operation by the vacuum pump 200. The detailed configuration of the control device 100 will be described later.
[0018] The vacuum pump 200 is a vacuum pump for a vacuum system 1 that includes a control device 100 which includes a detachable part 105 for detachably holding the vacuum pump 200. By being attached to the control device 100, the vacuum pump 200 functions as a negative pressure source for the vacuum system 1. The vacuum pump 200 is, for example, a diaphragm-type vacuum pump that expands and contracts the pump chamber by elastically deforming a diaphragm. However, the vacuum pump 200 may be of other types. The detailed configuration of the vacuum pump 200 will be described later.
[0019] As shown in Figures 1 to 3, the control device 100 includes a frame 101, a flange 102, a controller 103, a pad mounting section 104, and a detachable section 105.
[0020] As shown in Figure 1, the frame 101 has a frame-like shape. The flange 102, controller 103, pad mounting portion 104, and attachment / detachment portion 105 are attached to the frame 101. The flange 102, controller 103, pad mounting portion 104, and attachment / detachment portion 105 are attached to the frame 101, for example, by screw fastening.
[0021] The flange 102 is a component that can be connected to the robot arm. The flange 102 is attached to the robot arm, for example, by screwing it in. By attaching the flange 102 to the robot arm, the control device 100 is attached to the robot arm.
[0022] The controller 103 controls the operation of the vacuum pump 200. The controller 103 has a display 131, a button 132, an LED lamp 133, and a connector 134.
[0023] The display 131 is configured to display information detected within the vacuum system 1. The display 131 is, for example, a liquid crystal monitor. The information detected within the vacuum system 1 includes, for example, the pressure value in the space reduced in pressure by the vacuum pump 200, and the current value supplied to the vacuum pump 200.
[0024] Button 132 is configured to switch the information displayed on the display 131. In this embodiment, button 132 includes a first button 132a, a second button 132b, and a third button 132c.
[0025] The LED lamp 133 is configured to display the operating status of the vacuum system 1. In this embodiment, for example, the LED lamp 133 indicates the operating status of the vacuum system 1 by varying the color of light it emits or the state in which it is lit.
[0026] Connector 134 is configured to receive power from the robot arm. Connector 134 is configured to transmit signals to the robot arm and to receive signals from the robot arm.
[0027] As shown in Figure 2, the pad mounting portion 104 is a connector for attaching the vacuum pad 300 (see Figure 3). In this embodiment, as shown in Figure 3, the vacuum pad 300 is directly attached to the pad mounting portion 104. The pad mounting portion 104 may be attached by inserting or snapping the vacuum pad 300 into a direct connection, or by screwing in a pad screw connection. The pad mounting portion 104 communicates with the exhaust port 151 (see Figure 3) of the attachment / detachment portion 105 through piping.
[0028] The vacuum pad 300 includes a pad fixing part 300a, a bellows (corrugated) 300b, and a suction pad 300c.
[0029] In this embodiment, the direction connecting the surface of the frame 101 to which the flange 102 is attached and the surface to which the pad mounting portion 104 is provided is defined as the Z direction. Within the Z direction, the direction on the side to which the flange 102 is attached is defined as the Z1 direction, and the direction on the side to which the pad mounting portion 104 is provided is defined as the Z2 direction.
[0030] Furthermore, the direction in which the vacuum pump 200 moves when it is attached or detached (attachment / detachment direction) is defined as the Y direction. The direction in which the vacuum pump 200 is moved when it is attached is defined as the Y1 direction. The direction in which the vacuum pump 200 is moved when it is removed is defined as the Y2 direction. The direction that intersects the Y direction (attachment / detachment direction) is defined as the X direction. Specifically, the direction that is perpendicular to both the Y direction and the Z direction is defined as the X direction. One side of the X direction is defined as the X1 direction, and the other side as the X2 direction.
[0031] The detachable section 105 is configured to hold the vacuum pump 200 in a detachable manner. The configuration by which the detachable section 105 attaches and detaches the vacuum pump 200 will be described later.
[0032] Figure 3 is a rear view of the control device 100. As shown in Figure 3, the attachment / detachment part 105 has an exhaust port 151, a connector 152, a recess 153, a release button (attach / detachment button) 154, a projection 155, a shaft 156 (see Figure 9), a biasing member 157 (see Figure 9), and a guide part 158.
[0033] Connector 152 is electrically connected to connector 205 (see Figure 5), which will be described later, of the vacuum pump 200 (see Figure 1). By electrically connecting connector 152 to connector 205, current is supplied to the vacuum pump 200 via connector 152.
[0034] The recess 153 is the portion of the frame 101 where the detachable portion 105 is provided. The recess 153 is configured to recess from the Y2 direction side toward the Y1 direction side of the frame 101. The recess 153 is made of a resin material. For example, the recess 153 is made of ABS resin.
[0035] The projection 155 is a part for fixing the vacuum pump 200. The projection 155 is configured to restrict the movement of the attachment / detachment engagement portion 203 (see Figure 4), which will be described later, of the vacuum pump 200 in the Y direction (attachment / detachment direction) when the vacuum pump 200 is attached. The projection 155 is formed of a resin material that has sliding properties. In this embodiment, the projection 155 is formed of, for example, POM (Polyoxymethylene).
[0036] As shown in Figure 3, the projection 155 includes a first projection 155a and a second projection 155b arranged side by side in a direction (X direction) intersecting the Y direction (attachment / detachment direction). The first projection 155a is located on the X1 direction side of the attachment / detachment portion 105 when viewed from the Y2 direction side. The second projection 155b is located on the X2 direction side of the attachment / detachment portion 105 when viewed from the Y2 direction side. The detailed configuration of the first projection 155a and the second projection 155b will be described later.
[0037] The release button 154 is a button for releasing the locking of the attachment / detachment engagement portion 203. The release button 154 is configured such that when the release button 154 is operated, it releases the restriction on the movement of the attachment / detachment engagement portion 203 of the vacuum pump 200 in the Y direction. Specifically, the release button 154 is configured to move the projection 155 in a direction that releases engagement with the attachment / detachment engagement portion 203 against the biasing force of the biasing member 157. The release button 154 is made of a resin material.
[0038] In this embodiment, the release button 154 includes a first release button 154a and a second release button 154b. The first release button 154a is located on the X2 side of the attachment / detachment portion 105 when viewed from the Y2 side. The first release button 154a is configured to release the restriction on the movement of the attachment / detachment portion engaging portion 203 on the first projection 155a.
[0039] The second release button 154b is located on the X1 side of the attachment / detachment portion 105 when viewed from the Y2 side. The second release button 154b is configured to release the restriction on the movement of the attachment / detachment portion engaging portion 203 at the second projection 155b.
[0040] The biasing member 157 is configured to bias the projection 155 in a direction (X direction) intersecting the Y direction (attachment / detachment direction). In this embodiment, the biasing member 157 includes a first biasing member 157a (see Figure 9) and a second biasing member 157b (see Figure 9). Each of the first biasing member 157a and the second biasing member 157b is, for example, a spring.
[0041] Furthermore, in this embodiment, the guide portion 158 is a pair of guide portions 158 provided so as to face each other in the X direction. The pair of guide portions 158 are members that guide the movement of the vacuum pump 200 along the Y direction (attachment / detachment direction). The pair of guide portions 158 are formed of a resin material. For example, the pair of guide portions 158 are formed of ABS resin.
[0042] In this embodiment, the pair of guide portions 158 are a pair of protrusions 158a and 158b that project in opposite directions in the direction (X direction) intersecting the Y direction (attachment / detachment direction). Protrusion 158a is provided on the X2 direction side of the attachment / detachment portion 105 when viewed from the Y2 direction side. Protrusion 158b is provided on the X1 direction side of the attachment / detachment portion 105 when viewed from the Y2 direction side.
[0043] Furthermore, in this embodiment, the attachment / detachment portion 105 includes a rib portion 159 provided on the Z2 direction side of the pair of guide portions 158. The rib portion 159 is formed of a resin material. For example, the rib portion 159 is formed of ABS resin.
[0044] The rib portion 159 includes a pair of rib portions 159a and 159b. Each of the pair of rib portions 159a and 159b has an arc shape. The pair of rib portions 159a and 159b are in contact with the frame 101 on the Z2 direction side. The rib portion 159a is provided on the X2 direction side of the detachable portion 105 when viewed from the Y2 direction side. Also, the rib portion 159b is provided on the X1 direction side of the detachable portion 105 when viewed from the Y2 direction side. By providing the pair of rib portions 159a and 159b, the mechanical strength of the pair of guide portions 158 (the pair of convex portions 158a and 158b) can be improved.
[0045] Also, a screw hole 160 is provided in the recess 153. In the present embodiment, the screw hole includes a pair of screw holes 160a and 160b arranged in the X direction. The pair of screw holes 160a and 160b are holes into which screws are fastened when the vacuum pump 200 is screwed through the through hole 206 of the vacuum pump 200 described later. The screw hole 160a is provided on the X2 direction side of the detachable portion 105 when viewed from the Y2 direction side. Also, the screw hole 160b is provided on the X1 direction side of the detachable portion 105 when viewed from the Y2 direction side.
[0046] (Vacuum pump) Next, referring to FIGS. 4 to 6, the configuration of the vacuum pump 200 will be described.
[0047] As shown in FIG. 4, the vacuum pump 200 has a cylindrical shape. The vacuum pump 200 has an exhaust port 201, a guide engagement portion 202, a detachable portion engagement portion 203, an intake port 204 (see FIG. 5), and a connector 205 (see FIG. 5).
[0048] The pair of guide engagement portions 202 are provided on the side surface 200a of the vacuum pump 200. Also, the pair of guide engagement portions 202 engage with the pair of guide portions 158 (see FIG. 3).
[0049] As shown in Figure 5, the pair of guide engagement portions 202 are a pair of grooves 202a and 202b that are recessed in opposite directions to each other in a direction intersecting the Y direction. Specifically, groove 202a is located on the X2 side of the vacuum pump 200 when viewed from the Y2 side and is recessed toward the X1 direction. Groove 202b is located on the X1 side of the vacuum pump 200 when viewed from the Y2 side and is recessed toward the X2 direction. The pair of grooves 202a and 202b are located on the side surface 200a of the vacuum pump 200 so as to extend along the Y direction.
[0050] As shown in Figure 6, each of the pair of grooves 202a and 202b has a tapered shape. Specifically, each of the pair of grooves 202a and 202b has a tapered shape in which the groove width W increases towards the end 200b of the vacuum pump 200 on the attachment / detachment part 105 side. In the example shown in Figure 6, only groove 202a is illustrated, but groove 202b has a similar shape.
[0051] Furthermore, each of the pair of grooves 202a and 202b has a tapered shape in which the groove width W increases towards the end 200c opposite the attachment / detachment portion 105. That is, each of the pair of grooves 202a and 202b has the smallest groove width W in the central part of the vacuum pump 200, and the groove width W increases towards the end 200b on the attachment / detachment portion 105 side and the end 200c opposite the attachment / detachment portion 105. With this configuration, when forming the vacuum pump 200 from the resin material, it becomes easier to demold, so the vacuum pump 200 can be easily formed. Therefore, it is possible to improve the manufacturing efficiency of the vacuum pump 200, and thus it is possible to suppress a decrease in yield (productivity) when manufacturing the vacuum pump 200.
[0052] Furthermore, as shown in Figures 4 to 6, in this embodiment, the vacuum pump 200 includes a detachable part engaging part (pressing part) 203 that engages with the detachable part 105 when fixed to the detachable part 105. The detachable part engaging part 203 is an example of an "engaging part that engages with the detachable part" within the scope of the claim.
[0053] The attachment engagement portion 203 is fixed to the attachment portion 105 (see Figure 3) by engaging with the projection portion 155 (see Figure 3) when attached to the attachment portion 105. Furthermore, when the release button 154 (see Figure 3) is operated, the projection portion 155 separates from the attachment engagement portion 203, thereby releasing the attachment engagement portion 203 from the attachment portion 105.
[0054] As shown in Figure 5, the detachable engagement portion 203 according to this embodiment includes detachable engagement portions 203a and 203b. The detachable engagement portion 203a is provided on the X2 side of the vacuum pump 200 when viewed from the Y2 side. The detachable engagement portion 203b is provided on the X1 side of the vacuum pump 200 when viewed from the Y2 side.
[0055] Furthermore, as shown in Figure 6, the intake port 204 is provided so as to protrude in the Y1 direction from the end 200b on the attachment / detachment part 105 side of the vacuum pump 200. The intake port 204 is configured to be in close contact with the exhaust port 151 of the control device 100.
[0056] Connector 205 is electrically connected to connector 152 of control device 100. The vacuum pump 200 receives current through connector 205.
[0057] The vacuum pump 200 uses its built-in motor to draw fluid from the vacuum pad 300 attached to the pad mounting section 104 (see Figure 3). The drawn-in fluid is discharged from the exhaust port 151 (see Figure 3). The intake port 204 draws in the fluid discharged from the exhaust port 151. The fluid drawn in from the intake port 204 is discharged from the exhaust port 201.
[0058] (Attaching and detaching the vacuum pump to the control device) Next, with reference to Figures 7 to 12, a configuration for attaching the vacuum pump 200 to the control device 100 and a configuration for detaching the vacuum pump 200 from the control device 100 will be described.
[0059] First, with reference to Figures 7 to 11, we will describe the configuration in which the vacuum pump 200 is attached to the control device 100.
[0060] Here, a flange 102 is provided on the Z1 direction side of the frame 101. Therefore, for example, if the vacuum pump 200 is mounted from the Z1 direction side, the flange 102 interferes, making the mounting operation of the vacuum pump 200 complicated.
[0061] Therefore, in this embodiment, the control device 100 is configured such that the vacuum pump 200 can be attached to the control device 100 by moving the vacuum pump 200 in the Y1 direction relative to the recess 153 that is recessed in the Y1 direction.
[0062] As shown in Figure 7, the vacuum pump 200 is attached to the attachment / detachment part 105 of the control device 100 by moving in the direction indicated by arrow 90 (Y1 direction).
[0063] As shown in Figure 7, the pair of protrusions 158a and 158b are formed on the attachment / detachment portion 105 so as to extend along the Y direction. Specifically, each of the pair of protrusions 158a and 158b extends along the Y direction such that the end on the Y1 direction side abuts against the recess 153. Therefore, when moving the vacuum pump 200 in the direction indicated by arrow 90, the positional displacement of the vacuum pump 200 with respect to the X and Z directions can be suppressed by the pair of protrusions 158a and 158b. Thus, by moving the vacuum pump 200 in the direction indicated by arrow 90 with the attachment / detachment portion engaging portion 203 of the vacuum pump 200 facing the Z1 direction and the pair of grooves 202a and 202b engaged with the pair of protrusions 158a and 158b, the vacuum pump 200 can be attached to the attachment / detachment portion 105 of the control device 100 in a predetermined orientation.
[0064] Figure 8 shows the vacuum pump 200 attached to the control device 100. As shown in Figure 8, the vacuum pump 200 is attached to the control device 100 so as to extend along the Y direction. Therefore, when removing the vacuum pump 200 from the control device 100, the flange 102 does not interfere, and the vacuum pump 200 can be easily removed.
[0065] (Detachable section) Next, the detailed configuration of the detachable section 105 will be described with reference to Figures 9 and 10.
[0066] As shown in Figure 9, the shaft 156 includes a first shaft 156a and a second shaft 156b. Each of the first shaft 156a and the second shaft 156b is made of a metallic material.
[0067] In this embodiment, the first release button 154a is connected to the end of the first shaft 156a. The other end of the first shaft 156a is connected to the first biasing member 157a and the first projection 155a. The first release button 154a is positioned on the X2 side of the second biasing member 157b.
[0068] The first biasing member 157a is configured to bias the first projection 155a toward the second projection 155b side (X2 direction side). Therefore, when the first release button 154a is not operated, the first projection 155a is positioned toward the second projection 155b side (X2 direction side), which is the position for fixing the attachment / detachment engagement portion 203 of the vacuum pump 200.
[0069] The first release button 154a can be pushed inward (towards the X1 direction) of the control device 100, as indicated by the arrow 91. When the first release button 154a is pushed inward (towards the X1 direction), the first shaft 156a moves in the pushing direction (towards the X1 direction) against the biasing force of the first biasing member 157a, and the first projection 155a moves in the pushing direction.
[0070] The second release button 154b is connected to the end of the second shaft 156b. The other end of the second shaft 156b is connected to the second biasing member 157b and the second projection 155b. The second release button 154b is positioned on the Y2 side of the first biasing member 157a.
[0071] The second biasing member 157b is configured to bias the second projection 155b toward the first projection 155a side (X1 direction side). Therefore, when the second release button 154b is not operated, the second projection 155b is positioned toward the first projection 155a side (X1 direction side), which is the position for fixing the attachment engagement portion 203.
[0072] The second release button 154b can be pushed inward (towards the X2 direction) of the control device 100, as indicated by the arrow 92. When the second release button 154b is pushed inward (towards the X2 direction), the second shaft 156b moves in the pushing direction (towards the X2 direction) against the biasing force of the second biasing member 157b, and the second projection 155b moves in the pushing direction.
[0073] When the first release button 154a and the second release button 154b are pushed inward in the X direction of the control device 100, the first projection 155a and the second projection 155b each move outward from the control device 100. That is, the first projection 155a and the second projection 155b each move away from the vacuum pump 200. This releases the locking mechanism of the attachment / detachment engagement portion 203 of the vacuum pump 200.
[0074] Once released from being pressed, the first release button 154a is pushed out in the opposite direction of the pressing direction (X2 direction) by the biasing force (repulsive force) of the first biasing member 157a provided in the control device 100.
[0075] Furthermore, the second release button 154b, once released from being pressed, is pushed out in the opposite direction of the pressing direction (X1 direction) by the biasing force (repulsive force) of the second biasing member 157b provided in the control device 100.
[0076] Furthermore, as shown in Figure 10, the projection 155 has an arc shape that follows the outer circumference of the cylindrical vacuum pump 200.
[0077] The first projection 155a has an inclined surface 155c. The inclined surface 155c of the first projection 155a has an arc shape on the X2 direction side and the Z2 direction side that follows the outer circumference of the vacuum pump 200 on the X2 direction side. In addition, the inclined surface 155c of the first projection 155a has an arc shape on the X2 direction side and the Z1 direction side.
[0078] Furthermore, the inclined surface 155c of the first projection 155a is inclined from the Y2 direction to the Y1 direction.
[0079] Furthermore, the second projection 155b has an inclined surface 155d. The inclined surface 155d of the second projection 155b has an arc shape on the X1 direction side and the Z2 direction side that follows the outer circumference of the vacuum pump 200 on the X1 direction side.
[0080] In the example shown in Figure 10, the first release button 154a is exposed and can be pushed in. The first projection 155a is in a state where it has moved to the opposite side (X2 direction side) of the pushing direction (X1 direction) of the first release button 154a due to the repulsive force of the first biasing member 157a (see Figure 10). The first projection 155a is in a state where it overlaps with the attachment / detachment engagement portion 203b of the vacuum pump 200.
[0081] Furthermore, in the example shown in Figure 10, the second release button 154b is pushed inward (towards the X2 direction) of the control device 100. When the second release button 154b is pushed inward (towards the X2 direction), the second projection 155b moves in the pushing direction (towards the X2 direction). Therefore, the second projection 155b does not overlap with the attachment / detachment engagement portion 203a of the vacuum pump 200. Consequently, the attachment / detachment engagement portion 203a is exposed. Note that in the example shown in Figure 10, for the sake of explanation, an example was described in which the second release button 154b is pushed in and the first release button 154a is not pushed in. However, when actually removing the vacuum pump 200, both the first release button 154a and the second release button 154b are pushed in almost simultaneously.
[0082] Figure 11 shows a sequence of operations for attaching the vacuum pump 200 to the control device 100. Figure 11 shows the control device 100 and the vacuum pump 200 as viewed from the Z1 direction.
[0083] As shown in Figure 11, the inclined surfaces 155c and 155d are inclined such that the distance between them decreases as they move in the direction of Y1 (attachment / detachment direction) when the vacuum pump 200 is attached. In addition, the end 200b of the vacuum pump 200 on the attachment direction side comes into contact with each of the inclined surfaces 155c and 155d during the attachment operation.
[0084] As shown in Step 1-1 of Figure 11, the vacuum pump 200 is moved in the direction indicated by arrow 93 (Y1 direction), and a pair of guide engagement portions 202 (a pair of grooves 202a and 202b) of the vacuum pump 200 engage with a pair of guide portions 158 (a pair of protrusions 158a and 158b) of the attachment / detachment portion 105.
[0085] Next, as shown in Step 1-2, the detachable engagement portions 203a and 203b come into contact with the inclined surface 155d of the second projection 155b and the inclined surface 155c of the first projection 155a. Subsequently, as the vacuum pump 200 moves in the Y1 direction, the vacuum pump 200 presses against the inclined surface 155c of the first projection 155a and the inclined surface 155d of the second projection 155b, causing the first projection 155a and the second projection 155b to be pressed in a direction that separates them from each other in the X direction. As a result, as shown by arrows 94a and 94b, they are moved outward (outward in the X direction) from the control device 100 against the biasing force of the first biasing member 157a and the second biasing member 157b.
[0086] Then, as shown in Step 1-3, when the intake port 204 (see Figure 6) of the vacuum pump 200 comes into close contact with the exhaust port 151 (see Figure 3) of the control device 100, the first projection 155a and the second projection 155b move inward into the control device 100 due to the biasing force of the first biasing member 157a and the second biasing member 157b, as shown by arrows 95a and 95b. The first projection 155a and the second projection 155b then overlap with the attachment / detachment engagement portions 203b and 203a of the vacuum pump 200. As a result, the vacuum pump 200 is attached to the control device 100.
[0087] Next, with reference to Figure 12, a configuration for removing the vacuum pump 200 from the control device 100 will be described.
[0088] As shown in Step 2-1 of Figure 12, the attachment and detachment engagement portions 203b and 203a of the vacuum pump 200 overlap the first projection 155a and the second projection 155b.
[0089] Then, as shown in Step 2-2, when the first release button 154a and the second release button 154b are pushed inward into the control device 100, the first projection 155a and the second projection 155b move in the pushing direction (outward in the X direction), as shown by arrows 96a and 96b. As the first projection 155a and the second projection 155b move in the pushing direction, they separate from the attachment / detachment engagement parts 203b and 203a. Therefore, the restriction on the movement of the vacuum pump 200 in the direction shown by arrow 97 (Y2 direction) is released.
[0090] Subsequently, in Step 2-3, the vacuum pump 200 is removed from the control device 100. Specifically, the vacuum pump 200 is moved so that a pair of grooves 202a and 202b of the vacuum pump 200 move along a pair of guides 158 of the control device 100 in the removal direction (Y2 direction), thereby removing the vacuum pump 200 from the attachment / detachment section 105. This removes the vacuum pump 200 from the control device 100.
[0091] Furthermore, the first projection 155a is moved inward (towards the X2 direction) of the control device 100 by the biasing force from the first biasing member 157a, as shown by arrow 98a. Also, the second projection 155b is moved inward (towards the X1 direction) of the control device 100 by the biasing force from the second biasing member 157b, as shown by arrow 98b. As a result, the first projection 155a and the second projection 155b are moved to a position where they can engage with the detachable engagement portions 203b and 203b.
[0092] (Effects of this embodiment) In this embodiment, the following effects can be obtained.
[0093] In this embodiment, as described above, the vacuum system 1 includes a vacuum pump 200 and a detachable part 105 that detachably holds the vacuum pump 200, and a control device 100 that controls the suction operation by the vacuum pump 200. The vacuum pump 200 includes a detachable part engaging part 203 that engages with the detachable part 105 when fixed to the detachable part 105, and the detachable part 105 includes a release button 154 for releasing the fixing of the detachable part engaging part 203.
[0094] In this embodiment, as described above, the vacuum system 1 includes a release button 154 for releasing the locking of the engaging portion of the vacuum pump 200 attached to the release button 105. This allows the vacuum pump 200 to be easily released from the control device 100 by operating the release button 154. As a result, the removal of the vacuum pump 200 can be made less complicated. Consequently, the removal of the vacuum pump 200 is made less complicated, and maintainability is improved.
[0095] Furthermore, in this embodiment, as described above, the attachment / detachment part 105 further includes a projection 155 for fixing the vacuum pump 200, and the attachment / detachment part engaging part 203 is fixed to the attachment / detachment part 105 by engaging with the projection 155 when attached to the attachment / detachment part 105, and when the release button 154 is operated, the projection 155 separates from the attachment / detachment part engaging part 203, thereby releasing the attachment / detachment part 105. Here, for example, in a configuration in which a vacuum pump having a claw portion is fixed to a control device by engaging the claw portion with the engaged portion of a control device having an engaged portion that engages with the claw portion, when removing the vacuum pump from the control device, the engagement between the claw portion and the engaged portion is released by bending the claw portion provided on the vacuum pump. Therefore, the work of removing a vacuum pump having a claw portion from a control device becomes complicated. Therefore, as described above, if the system is configured to include a release button 154 for releasing the locking of the engaging portion of the vacuum pump 200, when the release button 154 is operated, the vacuum pump 200 will be fixed to the attachment / detachment portion 105, allowing the vacuum pump 200 to be easily removed. As a result, compared to a configuration in which the vacuum pump is released by bending a claw provided on the vacuum pump to release the engagement between the claw and the engaged portion, it is possible to provide a vacuum system 1 in which the locking of the vacuum pump 200 can be easily released.
[0096] Furthermore, in a configuration where the vacuum pump is fixed to the control device by engaging the claw portion with the engaged portion by bending the claw portion, if the mechanical strength of the claw portion is increased in order to firmly fix the vacuum pump and the control device, it becomes difficult to bend the claw portion. Therefore, it becomes difficult to fix the vacuum pump having a claw portion to the control device. On the other hand, if the thickness of the claw portion is reduced in order to make the claw portion more flexible, it becomes easier to engage the claw portion with the engaged portion, but because the claw portion bends easily, the vacuum pump having a claw portion becomes more likely to detach from the control device due to vibrations transmitted from the vacuum system, etc. Therefore, as described above, when the vacuum pump 200 is attached to the attachment / detachment portion 105, by configuring the attachment / detachment portion engaging portion 203 to engage with the projection portion 155 and thus fix it to the attachment / detachment portion 105, the vacuum pump 200 can be fixed to the control device 100 without bending the attachment / detachment portion engaging portion 203. Therefore, compared to a configuration in which the vacuum pump having a claw portion is fixed to the control device, it is possible to suppress the vacuum pump 200 from coming off due to vibrations transmitted from the vacuum system 1, etc. Furthermore, since the vacuum pump 200 can be fixed to the attachment / detachment part 105 without bending the attachment / detachment part engagement part 203, the vacuum pump 200 can be easily fixed to the control device 100 even if the thickness of the attachment / detachment part engagement part 203 is increased. As a result, the vacuum pump 200 can be fixed to the control device 100 more securely and more easily compared to a configuration in which the vacuum pump is fixed to the control device by engaging the claw part with the engaged part.
[0097] Furthermore, in this embodiment, as described above, the projection 155 is configured to restrict the movement of the attachment / detachment engagement portion 203 of the vacuum pump 200 in the Y direction (attachment / detachment direction), which is the direction in which the vacuum pump 200 moves when the vacuum pump 200 is attached or detached. The release button 154 is configured to release the restriction on the movement of the attachment / detachment engagement portion 203 of the vacuum pump 200 in the Y direction when the release button 154 is operated. As a result, the restriction on the movement of the attachment / detachment engagement portion 203 of the vacuum pump 200 in the Y direction, which is restricted by the projection 155, is released by the release button 154, so the vacuum pump 200 can be easily removed from the attachment / detachment portion 105 by operating the release button 154.
[0098] Furthermore, in this embodiment, as described above, the detachable part 105 has a biasing member 157 that biases the projection 155 in a direction (X direction) intersecting the Y direction (detachable direction), and the release button 154 is configured to move the projection 155 in a direction that releases engagement with the detachable part engaging part 203 against the biasing force of the biasing member 157. As a result, after removing the vacuum pump 200 by operating the release button 154, releasing the release button 154 allows the biasing force of the biasing member 157 to move the projection 155 in the opposite direction to the direction moved by the release button 154. Consequently, after removing the vacuum pump 200, the user can move the projection 155 to a position where it can engage with the detachable part engaging part 203 without having to move the projection 155 themselves, thus preventing the user from having to perform complicated operations after removing the vacuum pump 200 from the control device 100.
[0099] Furthermore, in this embodiment, as described above, the control device 100 has a recess 153 on which the attachment / detachment portion 105 is provided, the projection 155 includes a first projection 155a and a second projection 155b arranged side by side in a direction (X direction) intersecting the Y direction (attachment / detachment direction), the biasing member 157 includes a first biasing member 157a that biases the first projection 155a toward the second projection 155b and a second biasing member 157b that biases the second projection 155b toward the first projection 155a, and the release button 154 includes a first release button 154a that releases the restriction on the movement of the attachment / detachment portion engaging portion 203 on the first projection 155a and a second release button 154b that releases the restriction on the movement of the attachment / detachment portion engaging portion 203 on the second projection 155b. In this configuration, where the detachable part 105 includes a single release button 154, and the restriction on the movement of the detachable part engaging part 203 is released by operating the single release button 154, there is a risk that even if the single release button 154 is operated unintentionally, the restriction on the movement of the detachable part engaging part 203 will be released, and the vacuum pump 200 may detach from the detachable part 105. Therefore, as described above, by configuring the system to include a first release button 154a that releases the restriction on the movement of the attachment / detachment engagement portion 203 at the first projection 155a, and a second release button 154b that releases the restriction on the movement of the attachment / detachment engagement portion 203 at the second projection 155b, the restriction on the movement of the attachment / detachment engagement portion 203 is released only when both the first release button 154a and the second release button 154b are operated. This prevents the vacuum pump 200 from detaching from the attachment / detachment portion 105 if either the first release button 154a or the second release button 154b is operated unintentionally. As a result, the vacuum pump 200 can only be removed from the attachment / detachment portion 105 when the user intentionally operates both the first release button 154a and the second release button 154b, thus preventing the vacuum pump 200 from detaching from the attachment / detachment portion 105 unintentionally.
[0100] Furthermore, in this embodiment, as described above, the first projection 155a and the second projection 155b are inclined such that the distance between them decreases as they move in the direction of attachment / detachment of the vacuum pump 200 in the Y direction (attachment / detachment direction), and they have inclined surfaces 155c and 155d that the end of the vacuum pump 200 on the attachment direction side contacts during the attachment operation. As a result, by moving the vacuum pump 200 in the attachment direction (Y1 direction), it is possible to apply force to each of the first projection 155a and the second projection 155b in a direction that separates them from each other via the inclined surfaces 155c and 155d, so that the vacuum pump 200 can be fixed to the attachment / detachment part 105 without operating the first release button 154a and the second release button 154b. As a result, the vacuum pump 200 can be attached to the control device 100 without operating the first release button 154a and the second release button 154b, thus preventing the user from having to perform complicated operations when attaching the vacuum pump 200 to the control device 100.
[0101] Furthermore, in this embodiment, as described above, the vacuum pump 200 has a cylindrical shape, and the projection 155 has an arc shape that follows the outer circumference of the cylindrical vacuum pump 200. This prevents the projection 155 from interfering with the vacuum pump 200 when attaching the vacuum pump 200 to the attachment / detachment part 105. As a result, the operability when attaching the vacuum pump 200 to the control device 100 can be improved. Also, because the vacuum pump 200 has a cylindrical shape, its volume can be reduced to match the shape of the motor built into the vacuum pump 200. As a result, the vacuum system 1 can be miniaturized. In addition, because the vacuum pump 200 has a cylindrical shape, it is less likely to deform when attaching the vacuum pump 200 to the control device 100, and can be stably fixed to the control device 100. Furthermore, since the vacuum pump 200 has a cylindrical shape, compared to a configuration in which the vacuum pump has a rectangular prism shape, for example, damage to the vacuum pump 200 can be suppressed even if the vacuum pump 200 is accidentally dropped when replacing it.
[0102] The attachment / detachment section 105 has a pair of guide portions 158 that guide the movement of the vacuum pump 200 along the Y direction (attachment / detachment direction), which is the direction in which the vacuum pump 200 is moved when attaching or detaching the vacuum pump 200. The side surface 200a of the vacuum pump 200 is provided with a pair of guide engagement portions 202 that engage with the pair of guide portions 158. The pair of guide portions 158 are a pair of protrusions 158a and 158b that project in opposite directions in the direction intersecting the Y direction (X direction), and the pair of guide engagement portions 202 are a pair of grooves 202a and 202b. As a result, when attaching the vacuum pump 200 to the attachment / detachment section 105, the pair of guide portions 158 and the pair of guide engagement portions 202 are engaged, making it easy to attach the vacuum pump 200 to the attachment / detachment section 105 in a predetermined orientation. As a result, the vacuum pump 200 can be easily attached to the attachment / detachment section 105, thereby improving user convenience (usability).
[0103] Furthermore, in this embodiment, as described above, the pair of guide portions 158 are a pair of protrusions 158a and 158b that project in opposite directions in the direction (X direction) intersecting the Y direction (attachment / detachment direction), and the pair of guide engagement portions 202 are a pair of grooves 202a and 202b that recess in the direction opposite to the direction intersecting the Y direction, and the pair of protrusions 158a and 158b are formed on the attachment / detachment portion 105 so as to extend along the Y direction, and the pair of grooves 202a and 202b are provided on the side surface 200a of the vacuum pump 200 so as to extend along the Y direction. As a result, since the pair of protrusions 158a and 158b extend along the Y direction, the mechanical strength of the pair of protrusions 158a and 158b can be improved compared to a configuration in which the pair of protrusions do not extend along the Y direction. Furthermore, since a pair of protrusions 158a and 158b that project in opposite directions in the X direction extend along the Y direction, and a pair of grooves 202a and 202b are formed to extend along the Y direction, when attaching the vacuum pump 200 to the attachment / detachment section 105, it is possible to suppress the displacement of the vacuum pump 200 in the direction perpendicular to both the Y and X directions (Z direction). As a result, when attaching the vacuum pump 200 to the attachment / detachment section 105 in a predetermined orientation, it can be attached more easily.
[0104] Furthermore, in this embodiment, as described above, the vacuum pump 200 has a cylindrical shape, and each of the pair of grooves 202a and 202b provided in the pair of guide engagement portions 202 has a tapered shape in which the groove width W increases towards the end 200b of the vacuum pump 200 on the attachment / detachment portion 105 side. As a result, the pair of grooves 202a and 202b can be easily engaged with the pair of guide portions 158, compared to a configuration in which each of the pair of grooves does not have a tapered shape in which the groove width W increases towards the end 200b of the vacuum pump 200 on the attachment / detachment portion 105 side.
[0105] Furthermore, in this embodiment, as described above, the control device 100 for the vacuum system 1 is a control device 100 for the vacuum system 1 equipped with a vacuum pump 200, and the control device 100 includes a detachable part 105 that detachably holds the vacuum pump 200, controls the suction operation by the vacuum pump 200, and the detachable part 105 includes a release button 154 for releasing the fixing of the engaging part of the vacuum pump 200 that engages with the detachable part 105 when it is fixed to the detachable part 105 when the fixing of the vacuum pump 200 is released. As a result, similar to the vacuum system 1, it is possible to provide a control device 100 for the vacuum system 1 that can suppress the complexity of removing the vacuum pump 200 and improve maintainability.
[0106] Furthermore, in this embodiment, as described above, the vacuum pump 200 for the vacuum system 1 is a vacuum pump 200 for the vacuum system 1 that includes a control device 100 which includes a detachable part 105 that detachably holds the vacuum pump 200, and the vacuum pump 200 includes an engaging part that engages with the detachable part 105 when fixed to the detachable part 105, and the engaging part is released when a release button 154 for releasing the fixing of the vacuum pump 200 provided on the detachable part 105 is operated. As a result, similar to the vacuum system 1, it is possible to provide a vacuum pump 200 for the vacuum system 1 that can suppress the complexity of removing the vacuum pump 200 and improve maintainability.
[0107] (Variations) The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. The scope of the present invention is indicated by the claims rather than the description of the embodiments above, and all modifications (variations) are further included in the meaning and scope equivalent to the claims.
[0108] For example, in the above embodiment, an example was shown in which the vacuum pad 300 is directly attached to the pad mounting portion 104 provided on the frame 101 of the control device 100, but the present invention is not limited thereto. For example, as in the modified vacuum system 401 shown in Figure 13, the vacuum pad 310 may be attached to the pad mounting portion 104 via a tube 311. The other configurations of the modified vacuum system 401 are the same as those of the vacuum system 1 in the above embodiment.
[0109] Furthermore, although the above embodiment shows an example in which the vacuum system 1 is fixed to the tip of a robot arm and the object is attracted by the negative pressure generated by the vacuum pump 200, the present invention is not limited to this. For example, the vacuum system may be configured as a negative pressure source for another adsorption device. That is, a tube connected to another adsorption device may be attached to the pad mounting portion of the vacuum system, and negative pressure may be generated by the vacuum pump, thereby configuring it as a negative pressure source for another adsorption device.
[0110] Furthermore, in the above embodiment, an example was shown in which the vacuum pump 200 is fixed to the detachable part 105 by the detachable part engaging part 203 engaging with the projection 155, but the present invention is not limited to this. For example, the vacuum pump may be configured to be fixed to the detachable part by being screwed to the detachable part. Alternatively, the vacuum pump may be fixed to the control device by using a combination of a configuration in which the detachable part engaging part engages with the projection and a configuration in which the detachable part engaging part is screwed to the detachable part.
[0111] Furthermore, while the above embodiment shows an example in which the projection 155 restricts the movement of the vacuum pump 200 in the Y direction, thereby fixing the vacuum pump 200 to the attachment / detachment part 105, the present invention is not limited to this. The projection may be configured to fix the vacuum pump to the attachment / detachment part by restricting the movement of the vacuum pump in the X direction (a direction intersecting the attachment / detachment direction of the vacuum pump). In this case, the X direction is the attachment / detachment direction of the vacuum pump. Alternatively, the pair of guide parts may be configured to extend in the X direction.
[0112] Furthermore, although the above embodiment shows an example in which the attachment / detachment part 105 has a biasing member 157 that biases the projection 155 in the X direction, the present invention is not limited thereto. For example, the attachment / detachment part does not have to have a biasing member. In this case, the attachment / detachment part only needs to include a release button for moving the projection to the outside of the control device and a fixing button for moving the projection to the inside of the control device.
[0113] Furthermore, although the above embodiment shows an example in which the projection 155 includes a first projection 155a and a second projection 155b, the biasing member 157 includes a first biasing member 157a and a second biasing member 157b, and the release button 154 includes a first release button 154a and a second release button 154b, the present invention is not limited thereto. The projection, biasing member, and release button may each be configured to include a single projection, a single biasing member, and a single release button, respectively.
[0114] Furthermore, although the above embodiment shows an example in which the first projection 155a and the second projection 155b each have inclined surfaces 155c and 155d that are inclined such that the distance between them decreases as they move in the Y1 direction, the present invention is not limited to this. The first projection and the second projection may also have surfaces (surfaces extending along the Y direction) where the distance between them does not change as they move in the Y1 direction.
[0115] Furthermore, in the above embodiment, an example was shown in which the vacuum pump 200 has a cylindrical shape and the projection 155 has an arc shape that follows the outer circumference of the cylindrical vacuum pump 200. However, the present invention is not limited to this. For example, the projection may have a rectangular shape or other shape that does not follow the outer circumference of the vacuum pump.
[0116] Furthermore, in the above embodiment, an example configuration was shown in which the pair of guide portions 158 are a pair of protrusions 158a and 158b that protrude in opposite directions in the direction intersecting the Y direction (X direction), and the pair of guide engagement portions 202 are a pair of grooves 202a and 202b, but the present invention is not limited thereto. For example, the pair of guide portions may be a pair of grooves that are recessed in opposite directions in the direction intersecting the Y direction, and the pair of guide engagement portions may be a pair of protrusions. That is, the pair of guide portions may be a pair of protrusions that protrude in opposite directions in the direction intersecting the attachment / detachment direction (Y direction) (X direction), or one of a pair of grooves that are recessed in opposite directions in the direction intersecting the attachment / detachment direction, and the pair of guide engagement portions may be a pair of protrusions or the other of a pair of grooves.
[0117] Furthermore, in the above embodiment, an example was shown in which a pair of guide portions 158 (each of the pair of protrusions 158a and 158b) extends along the Y direction (attachment / detachment direction) such that the ends on the Y1 direction side abut against the recess 153, but the present invention is not limited to this. For example, the ends on the Y1 direction side of the pair of guide portions (each of the pair of protrusions) do not have to abut against the recess.
[0118] Furthermore, in the above embodiment, an example was shown in which each of the pair of grooves 202a and 202b has a tapered shape in which the groove width W increases towards the end of the vacuum pump 200 on the attachment / detachment part 105 side, but the present invention is not limited to this. For example, the groove width of each of the pair of grooves does not have to change.
[0119] 1,401 Vacuum System 100 Control Device 101 Frame 102 Flange 103 Controller 104 Pad Mounting Section 105 Detachable Section 131 Display 132 Button 133 LED Lamp 134 Connector (Control Device: Connector connected to robot arm) 151 Exhaust Port (Control Device) 152 Connector (Control Device: Connector connected to vacuum pump) 153 Recess 154 Release Button 154a First Release Button 154b Second Release Button 155 Projection 155a First Projection 155b Second Projection 156 Shaft 156a First Shaft 156b Second Shaft 157 Biasing Member 157a First Biasing Member 157b Second Biasing Member 158 Pair of Guide Sections 158a, 158b Pair of Protrusions 200 Vacuum Pump 200a Side of the vacuum pump 200b End of the vacuum pump on the side of the attachment / detachment part 200c End of the vacuum pump opposite the attachment / detachment part 201 Exhaust port (vacuum pump) 202 Pair of guide engagement parts 202a, 202b Pair of groove parts 203, 203a, 203b Attachment / detachment engagement part 204 Intake port 205 Connector (vacuum pump) 300, 310 Vacuum pad W Groove width
Claims
1. A vacuum system comprising a vacuum pump and a control device that controls the suction operation of the vacuum pump, the control device including a detachable part for detachably holding the vacuum pump, the vacuum pump including a detachable part engaging part that engages with the detachable part when fixed to the detachable part, and the detachable part including a release button for releasing the fixing of the detachable part engaging part.
2. The vacuum system according to claim 1, wherein the detachable portion further includes a projection for fixing the vacuum pump, and the detachable portion engaging portion is fixed to the detachable portion by engaging with the projection when attached to the detachable portion, and the fixing to the detachable portion is released when the release button is operated and the projection separates from the detachable portion engaging portion.
3. The vacuum system according to claim 2, wherein the projection is configured to restrict the movement of the attachment / detachment engagement portion of the vacuum pump in the attachment / detachment direction, which is the direction in which the vacuum pump moves when the vacuum pump is attached or detached, when the vacuum pump is installed, and the release button is configured to release the restriction on the movement of the attachment / detachment engagement portion of the vacuum pump in the attachment / detachment direction when the release button is operated.
4. The vacuum system according to claim 3, wherein the attachment / detachment portion has a biasing member that biases the projection in a direction intersecting the attachment / detachment direction, and the release button is configured to move the projection in a direction that disengages it from the attachment / detachment portion engagement portion against the biasing force of the biasing member.
5. The vacuum system according to claim 4, wherein the control device has a recess on which the attachment / detachment portion is provided, the projection includes a first projection and a second projection arranged side by side in a direction intersecting the attachment / detachment direction, the biasing member includes a first biasing member that biases the first projection toward the second projection and a second biasing member that biases the second projection toward the first projection, and the release button includes a first release button that releases the restriction on the movement of the attachment / detachment portion engaging portion on the first projection and a second release button that releases the restriction on the movement of the attachment / detachment portion engaging portion on the second projection.
6. The vacuum system according to claim 5, wherein each of the first projection and the second projection is inclined such that the distance between them decreases as the direction of attachment / detachment moves the vacuum pump when attaching the vacuum pump, and each has an inclined surface to which the end on the attachment side of the vacuum pump abuts during the attachment operation.
7. The vacuum system according to claim 2, wherein the vacuum pump has a cylindrical shape, and the projection has an arc shape that follows the outer circumference of the cylindrical vacuum pump.
8. The vacuum system according to claim 1, wherein the attachment / detachment portion has a pair of guide portions that guide the movement of the vacuum pump along the attachment / detachment direction, which is the direction in which the vacuum pump is moved when the vacuum pump is attached or detached, and the side surface of the vacuum pump is provided with a pair of guide engagement portions that engage with the pair of guide portions, and the pair of guide portions is either a pair of convex portions that protrude in opposite directions in a direction intersecting the attachment / detachment direction, or a pair of groove portions that are recessed in opposite directions in a direction intersecting the attachment / detachment direction, and the pair of guide engagement portions is the other of the pair of convex portions or the pair of groove portions.
9. The vacuum system according to claim 8, wherein the pair of guide portions are a pair of protrusions projecting in opposite directions in a direction intersecting the attachment / detachment direction, the pair of guide engagement portions are a pair of grooves recessed in opposite directions in a direction intersecting the attachment / detachment direction, the pair of protrusions are formed on the attachment / detachment portion so as to extend along the attachment / detachment direction, and the pair of grooves are provided on the side surface of the vacuum pump so as to extend along the attachment / detachment direction.
10. The vacuum system according to claim 9, wherein the vacuum pump has a cylindrical shape, and each of the pair of grooves provided in the pair of guide engagement portions has a tapered shape, with the groove width increasing towards the end of the vacuum pump on the attachment / detachment side.
11. A control device for a vacuum system comprising a vacuum pump, wherein the control device includes a detachable part for detachably holding the vacuum pump, controls the suction operation of the vacuum pump, and the detachable part includes a release button for releasing the locking of an engaging part of the vacuum pump that engages with the detachable part when it is fixed to the detachable part, when the locking of the vacuum pump is released.
12. A vacuum pump for a vacuum system comprising a control device including a detachable part for detachably holding a vacuum pump, wherein the vacuum pump includes an engaging part that engages with the detachable part when fixed to the detachable part, and the engaging part is released when a release button provided on the detachable part for releasing the vacuum pump is operated.