Power supply device for plasma scrubber capable of interleaved control

Abstract

According to an embodiment of the present disclosure, a power supply device for supplying power to a plasma scrubber comprises: a primary power conversion unit configured to receive external AC power and convert same into DC power; an M_secondary power conversion unit configured to receive a part of the DC power and convert same into first output DC power; an S_secondary power conversion unit having the same configuration as the M_secondary power conversion unit, electrically connected in parallel with the M_secondary power conversion unit, and configured to receive a part of the DC power and convert same into second output DC power; an igniter unit configured to receive high-frequency AC power from the M_secondary power conversion unit and generate ignition power to ignite a load; and a power control unit configured to control the first and second output DC power to be output, by transferring a PWM signal to each of the M_secondary power conversion unit and the S_secondary power conversion unit.

Description

Power supply for plasma scrubbers capable of interleaved control

[0001] The disclosed content relates to a power supply unit that supplies power to a plasma scrubber for removing harmful gases generated during a semiconductor process.

[0002] Unless otherwise indicated in this specification, the contents described in this section are not prior art for the claims of this application, and are not to be recognized as prior art simply because they are included in this section.

[0003] Scrubbers used to treat hazardous gases generated during semiconductor manufacturing processes primarily utilize a plasma method. The power supply unit (PSU) providing power to the scrubber incorporates a DC arc discharge device to supply power to the load (the torch of the plasma scrubber) and delivers high-voltage power of tens of kV. To prevent the DC arc discharge voltage from entering the PSU, an inductor is installed in series between the PSU and the DC arc discharge device for protection. However, because the output current produced by the series-installed inductor takes the form of a triangular wave, the ripple in the output current increases, making it difficult to supply power with the precise output current required by the load.

[0004] To improve the aforementioned problem, an LC filter can be considered at the output stage of the power supply, but there is a problem that there are no low-cost capacitors capable of handling DC arc discharge voltage, and to satisfy this voltage rating, extra-high voltage capacitors must be used, which increases the volume of the product and may raise the unit cost.

[0005] The disclosed invention aims to provide a power supply for a plasma scrubber capable of reducing output current ripple in order to solve the aforementioned problems.

[0006] A power supply device for supplying power to a plasma scrubber according to an embodiment of the present disclosure comprises: a primary power converter configured to receive an external AC power source, rectify it, and convert it into a DC power source; an M_2nd power converter configured to receive a parallel branch of the DC power source rectified from the primary power converter, convert it into a high-frequency AC power source, convert the voltage of the high-frequency AC power source into an isolated AC voltage through a transformer having a certain turn ratio, and then rectify it to convert it into a first output DC power source; and an S_2nd power converter configured to have the same configuration as the M_2nd power converter, be electrically connected in parallel with the M_2nd power converter, receive a parallel branch of the DC power source rectified from the primary power converter, convert it into a high-frequency AC power source, convert the voltage of the high-frequency AC power source into an isolated AC voltage through a transformer having a certain turn ratio, and then rectify it to convert it into a second output DC power source. It includes: an ignition unit configured to receive the high-frequency AC power from the M_2nd power converter, increase the voltage of the high-frequency AC power to generate an ignition power, and ignite a load; and a power control unit configured to generate a PWM signal and transmit the PWM signal to each of the M_2nd power converter and the S_2nd power converter, thereby controlling each of the M_2nd power converter and the S_2nd power converter to output the first and second output DC powers.

[0007] In one embodiment, the power control unit may be characterized by transmitting the PWM signal to each of the M_2nd power conversion unit and the S_2nd power conversion unit such that the phase difference between the first and second output DC power sources of each of the M_2nd power conversion unit and the S_2nd power conversion unit is π / 2.

[0008] As an embodiment, the power supply device of the present disclosure may further include a feedback circuit unit capable of detecting a first output current feedback value and a first output voltage feedback value of the first output DC power of the M_2nd power converter and a second output current feedback value and a second output voltage feedback value of the second output DC power of the S_2nd power converter; and the power control unit sets the allowable maximum current and allowable maximum power of the M_2nd power converter and the S_2nd power converter, calculates the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value detected from the feedback circuit unit, and uses the first output current feedback value and the first output power and the second output current feedback value and the second output power to the Calculate the first control current and first control power of the M_2nd power converter and the second control current and second control power of the S_2nd power converter, and control the M_2nd power converter and the S_2nd power converter so that if the maximum value among the calculated first control power and the second control power is less than or equal to the allowable maximum power, and if the first control current and the second control current are less than or equal to the allowable maximum current, the output currents of both the M_2nd power converter and the S_2nd power converter are output as the minimum value among the first control current and the second control current; and if at least one of the first control current and the second control current is greater than the allowable maximum current, the output currents of both the M_2nd power converter and the S_2nd power converter are output as the allowable maximum current. If the maximum value among the calculated first control power and the second control power is greater than the allowable maximum power, the It may be characterized by being configured to control the M_2nd power converter and the S_2nd power converter so that the output power of both the M_2nd power converter and the S_2nd power converter is output at the maximum allowable power.

[0009] In one embodiment, the power supply of the present disclosure comprises a feedback circuit capable of detecting a first output current feedback value and a first output voltage feedback value of the first output DC power of the M_secondary power converter and a second output current feedback value of the second output DC power of the S_secondary power converter;It may further include, and the power control unit sets the allowable maximum current and allowable maximum power of the M_2nd power converter and the S_2nd power converter, calculates the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit unit, and the second output current feedback value and the second output voltage feedback value, and calculates the first control current and the first control power of the M_2nd power converter and the second control current and the second control power of the S_2nd power converter using the first output current feedback value and the first output power and the second output current feedback value and the second output power, and if the first control power is less than or equal to the allowable maximum power, if the first control current is less than or equal to the allowable maximum current, the output current of the M_2nd power converter becomes the first control current. The system may be characterized by being configured such that, when the first control current is greater than the allowable maximum current, the output current of the M_2nd power converter is output as the allowable maximum current, the M_2nd power converter is controlled so that when the first control power is greater than the allowable maximum power, the output power of the M_2nd power converter is output as the allowable maximum power, and when the second control power is less than or equal to the allowable maximum power, the output current of the S_2nd power converter is output as the second control current, and when the second control current is greater than the allowable maximum current, the output current of the S_2nd power converter is output as the allowable maximum current, and when the second control power is greater than the allowable maximum power, the output power of the S_2nd power converter is controlled so that the output power of the S_2nd power converter is output as the allowable maximum power.

[0010] In one embodiment, the power supply device of the present disclosure may further include a feedback circuit unit capable of detecting a first output current feedback value of the first output DC power of the M_2nd power converter and a second output current feedback value of the second output DC power of the S_2nd power converter; and the power control unit sets the allowable maximum current and allowable maximum power of the M_2nd power converter and the S_2nd power converter, calculates the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit unit, and the second output current feedback value and the second output voltage feedback value, and calculates the first control current and the first control power of the M_2nd power converter and the Calculate a second control current and a second control power of the S_2nd power converter, and compare a first output current control amount, which is the ratio of the first control current to the allowable maximum current, with a first output power control amount, which is the ratio of the first control power to the allowable maximum power, so that if the first output current control amount is less than or equal to the first output power control amount, current is output as the first control current, or if the first output current control amount is greater than the first output power control amount, power is output as the first control power, thereby controlling the M_2nd power converter; and compare a second output current control amount, which is the ratio of the second control current to the allowable maximum current, with a second output power control amount, which is the ratio of the second control power to the allowable maximum power, so that if the second output current control amount is less than or equal to the second output power control amount, current is output as the second control current, or if the second output current control amount is greater than the second output power control amount, power is output as the second control power, thereby It can be characterized by being configured to control the S_2nd power conversion unit.

[0011] A power supply unit for supplying power to a plasma scrubber according to an embodiment of the present disclosure has the advantage of reducing output current ripple compared to a conventional power supply unit through interleaved control of the M_secondary power converter and the S_secondary power converter.

[0012] In addition, by controlling the output current of both the M_2nd power converter and the S_2nd power converter to the minimum value between the first control current of the M_2nd power converter and the second control current of the S_2nd power converter, there is an advantage in that load imbalance can be eliminated for the entire module of the M_2nd power converter and the S_2nd power converter.

[0013] In addition, there is an advantage in that load imbalance between the M_secondary power converter and the S_secondary power converter can be eliminated by controlling the M_secondary power converter with the smaller value between the first output current control amount, which is the ratio of the first control current to the allowable maximum current, and the first output power control amount, which is the ratio of the first control power to the allowable maximum power, and controlling the S_secondary power converter with the smaller value between the second output current control amount, which is the ratio of the second control current to the allowable maximum current, and the second output power control amount, which is the ratio of the second control power to the allowable maximum power.

[0014] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description of the invention or the claims.

[0015] FIG. 1 is a configuration diagram of a power supply unit according to an embodiment of the present disclosure.

[0016] FIG. 2 is a configuration diagram of a primary power conversion unit of a power supply unit according to an embodiment of the present disclosure.

[0017] FIG. 3 is a configuration diagram of the M_2nd power conversion unit of a power supply unit according to an embodiment of the present disclosure.

[0018] FIG. 4 is a circuit diagram of the M_secondary power conversion unit, S_secondary power conversion unit, and igniter unit of a power supply device according to an embodiment of the present disclosure.

[0019] FIG. 5 is an example of the output current of a power supply according to an embodiment of the present disclosure.

[0020] FIG. 6 is another example of the output current of a power supply according to an embodiment of the present disclosure.

[0021] FIG. 7 is a configuration diagram of a power supply unit according to one embodiment of the present disclosure.

[0022] FIG. 8 is a flowchart of a power control method using a power supply device in the form according to one embodiment of the present disclosure.

[0023] FIG. 9 is a flowchart of a power control method using a power supply unit in the form according to another embodiment of the present disclosure.

[0024] FIG. 10 is a flowchart of a power control method using a power supply unit in the form according to another embodiment of the present disclosure.

[0025] Hereinafter, embodiments disclosed in this specification will be described in detail with reference to the attached drawings. Identical or similar components regardless of drawing symbols will be assigned the same reference number, and redundant descriptions thereof will be omitted. The suffixes "module" and "part" used for components in the following description are assigned or used interchangeably solely for the ease of drafting the specification and do not inherently possess distinct meanings or roles. Furthermore, in describing the embodiments disclosed in this specification, if it is determined that a detailed description of related prior art could obscure the essence of the embodiments disclosed in this specification, such detailed description will be omitted. Additionally, the attached drawings are intended only to facilitate understanding of the embodiments disclosed in this specification; the technical concept disclosed in this specification is not limited by the attached drawings, and it should be understood that they include all modifications, equivalents, and substitutions that fall within the spirit and technical scope of the invention.

[0026] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but said components are not limited by said terms. These terms are used solely for the purpose of distinguishing one component from another.

[0027] In this application, terms such as “comprising” or “having” are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0028]

[0029] Hereinafter, a power supply device (900) that supplies power to a plasma scrubber according to an embodiment of the present disclosure will be described in detail with reference to the attached drawings.

[0030] FIG. 1 is a configuration diagram of a power supply device (900) according to an embodiment of the present disclosure, FIG. 2 is a configuration diagram of a primary power conversion unit (100) of a power supply device (900) according to an embodiment of the present disclosure, FIG. 3 is a configuration diagram of an M_secondary power conversion unit (200) of a power supply device (900) according to an embodiment of the present disclosure, FIG. 4 is a circuit diagram of an M_secondary power conversion unit (200), an S_secondary power conversion unit (300), and an igniter unit (400) of a power supply device (900) according to an embodiment of the present disclosure, FIG. 5 is an example of an output current of a power supply device (900) according to an embodiment of the present disclosure, and FIG. 6 is another example of an output current of a power supply device (900) according to an embodiment of the present disclosure.

[0031] Referring to FIG. 1, the power supply unit (900) of the present disclosure includes a primary power converter (100), an M_secondary power converter (200), an S_secondary power converter (300), an igniter (400), and a power control unit (500). Here, the M_secondary power converter (200) refers to a master secondary power converter, and the S_secondary power converter (300) refers to a slave secondary power converter. In the power supply unit (900) according to an embodiment of the present disclosure, there is only one M_secondary power converter (200), but there may be one or at least two or more S_secondary power converters (300).

[0032] The primary power conversion unit (100) receives an external AC power source, rectifies it, and converts it into a DC power source. Referring to FIG. 2, the primary power conversion unit (100) may include an input unit (110), an input rectifier unit (120), and an inrush current limiting unit (130). The primary power conversion unit (100) may be one unit, or at least two units may be configured in parallel depending on the number of secondary power conversion units (300).

[0033] The input section (110) is a circuit that receives external AC power and has a protection function that blocks overcurrent from the outside and a function that blocks EMC (Electromagnetic Compatibility).

[0034] The input rectifier (120) functions to convert an external AC power source into a DC power source and output it, and to compensate for the power factor. The input rectifier (120) may be a type of rectifier. The output DC power source may be branched by electrical parallel connection, and the branched DC power sources may be input to the M_secondary power conversion unit (200) and S_secondary power conversion unit (300), respectively, which will be described later.

[0035] The inrush current limiting unit (130) is a circuit that blocks the inrush current flowing into the circuit when an external AC power source is input.

[0036] The M_2nd power conversion unit (200) is configured to receive a portion of the DC power rectified from the 1st power conversion unit (100) that is branched in parallel, convert it into high-frequency AC power, convert the voltage of the high-frequency AC power into an isolated AC voltage through a transformer with a constant turn ratio, and then rectify it to convert it into a first output DC power.

[0037] Referring to FIG. 3, the M_secondary power conversion unit (200) may include a switching unit (210), a resonant unit (220), a main transformer (230), and an output rectifier (240).

[0038] The switching unit (210) receives a portion of the DC power rectified by the primary power conversion unit (100) that is branched in parallel and converts it into high-frequency AC power. Referring to FIG. 4, the switching unit (210) may be a full-bridge circuit using a MOSFET or IGBT capable of high-frequency driving. The switching unit (210) is configured to operate by receiving a Pulse Width Modulation (PWM) signal from the power control unit (500) to be described later.

[0039] The resonant section (220) is composed of a capacitor and an inductor component of a transformer (230) to be described later, and functions to resonate and output a high-frequency AC power output from the switching section (210).

[0040] The main transformer (230) functions to transmit the voltage of the high-frequency AC power generated in the switching unit (210) and output through the resonant unit (220) to the output rectifier (240) to be described later. Referring to FIG. 4, the main transformer (230) may be a type of transformer that transmits power while maintaining insulation between the input and the output.

[0041] The output rectifier (240) functions to convert the high-frequency AC power received from the main transformer (230) into a first output DC power and output it. Referring to FIG. 4, the output rectifier (240) may be a type of rectifier. The first output DC power is electrically combined with the second output DC power output from the S_secondary power converter (300) to be described later and delivered to the load (20).

[0042] The S_2nd power conversion unit (300) is configured to receive a portion of the DC power rectified from the 1st power conversion unit (100) that is branched in parallel, convert it into high-frequency AC power, convert the voltage of the high-frequency AC power into an isolated AC voltage through a transformer with a constant turn ratio, and then rectify it to convert it into a second output DC power.

[0043] The S_2nd power conversion unit (300) is electrically connected in parallel with the M_2nd power conversion unit (200), and its configuration is identical. That is, the S_2nd power conversion unit (300) may include a switching unit (310), a resonant unit (320), a main transformer (330), and an output rectifier unit (340). Since the function of the components of the S_2nd power conversion unit (300) is the same as the function of the components of the M_2nd power conversion unit (200), a description of each component is omitted. As described above, the second output DC power is added to the first output DC power output from the M_2nd power conversion unit (200) in an electrically parallel manner and delivered to the load (20).

[0044] The igniter unit (400) receives high-frequency AC power generated by the switching unit (210) of the M_2nd power conversion unit (200), increases the voltage of the high-frequency AC power, and transmits it to the load (20) (torch of the plasma scrubber). The voltage of the high-frequency AC power output from the igniter unit (400) can be several tens of kV to ignite the load (20) (torch of the plasma scrubber). Referring to FIG. 4, the igniter unit (400) may be a type of transformer that transmits power while maintaining insulation between the input and the output.

[0045] The power control unit (500) generates a Pulse Width Modulation (PWM) signal and transmits the PWM signal to each of the M_2nd power conversion unit (200) and the S_2nd power conversion unit (300), thereby controlling the operation of the switching unit (210) of the M_2nd power conversion unit (200) and the switching unit (310) of the S_2nd power conversion unit (300). As a result, each of the M_2nd power conversion unit (200) and the S_2nd power conversion unit (300) can output a first and a second output DC power supply. The power control unit (500) may be a type of processor board including at least one memory and at least one CPU (Central Process Unit) or MCU (Micro Controller Unit).

[0046] In one embodiment, the power control unit (500) can perform interleaved control on the first and second output DC power sources of each of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300). In other words, the power control unit (500) can transmit a PWM signal to each of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) so that the phase difference between the first and second output DC power sources of each of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) becomes π / 2. The power control unit (500) can control the phase difference between the first and second output DC power sources to be π / 2 by generating the PWM signal transmitted to the M_secondary power conversion unit (200) and the PWM signal transmitted to the S_secondary power conversion unit (300) with a time difference of 1 / 4 (i.e., T / 4) of the period (T) of the first and second output DC power sources.

[0047] Referring to FIG. 5, it can be seen that the generation time of the PWM signal transmitted to the M_secondary power converter (200) and the PWM signal transmitted to the S_secondary power converter (300) differs by T / 4. As a result, it can be seen that the phase difference of the output currents of the M_secondary power converter (200) and the S_secondary power converter (300) is π / 2, and as a result, the sum of the output currents is 95.67A to 108.91A, and the ripple is approximately +6A. It can be seen that the ripple of the output current of the power supply device (900) according to the embodiment of the present disclosure is reduced by approximately 50% compared to the ripple of the output current of a conventional power supply device, which is approximately +12A.

[0048] Figure 6 shows an example of the output current of a power supply when the first output DC power source and the second output DC power source are in phase (Figure 6a) and an example of the output current of a power supply when the phase difference between the first output DC power source and the second output DC power source is π / 2 (Figure 6b). It can be seen that when the first output DC power source and the second output DC power source are controlled to be in phase, the output current ripple is 19.5A (peak to peak), whereas when the phase difference between the first output DC power source and the second output DC power source is controlled to be π / 2, the output current ripple is reduced to 4.8A (peak to peak).

[0049] As one embodiment, the power supply unit (900) of the present disclosure may further include a feedback circuit unit (not shown in the drawing) capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power of the M_secondary power converter (200) and the second output current feedback value and the second output voltage feedback value of the second output DC power of the S_secondary power converter (300) and transmitting them to the power control unit (500). The feedback circuit unit may include a current sensor capable of detecting the output current of the M_secondary power converter (200) and the S_secondary power converter (300), and a voltage sensor capable of detecting the output voltage. The method for detecting the output voltage may also include a circuit utilizing an OP-AMP, etc. The feedback circuit can transmit the first output current feedback value and the first output voltage feedback value of the first output DC power of the M_secondary power converter (200) detected by the current sensor and the voltage sensor, and the second output current feedback value and the second output voltage feedback value of the second output DC power of the S_secondary power converter (300) to the power control unit (500).

[0050] The power control unit (500) can set the allowable maximum current and allowable maximum power of the M_secondary power converter (200) and the S_secondary power converter (300). Here, the allowable maximum current and allowable maximum power can be calculated by considering a safety factor to prevent failure of the M_secondary power converter (200) and the S_secondary power converter (300).

[0051] The power supply unit (900) of the present disclosure can operate by receiving command values ​​for output current and output power from a user. The power control unit (500) can receive a first output current command value and a first output power command value for the M_secondary power conversion unit (200), and a second output current command value and a second output power command value for the S_secondary power conversion unit (300). The power control unit (500) can compare the first output current command value and the second output current command value with the allowable maximum current, and if the first output current command value is greater than the allowable maximum current, it can adjust the first output current command value to a value corresponding to the allowable maximum current, and if the second output current command value is greater than the allowable maximum current, it can adjust the second output current command value to a value corresponding to the allowable maximum current. Likewise, the power control unit (500) can compare the first output power command value and the second output power command value with the allowable maximum power, and if the first output power command value is greater than the allowable maximum power, the first output power command value can be adjusted to a value corresponding to the allowable maximum power, and if the second output power command value is greater than the allowable maximum power, the second output power command value can be adjusted to a value corresponding to the allowable maximum power.

[0052] The power control unit (500) can calculate the first output power of the M_secondary power converter (200) and the second output power of the S_secondary power converter (300) using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value detected from the feedback circuit unit. The output power can be calculated by multiplying the output current and the output voltage.

[0053] The power control unit (500) can calculate the first control current and first control power of the M_secondary power converter (200) and the second control current and second control power of the S_secondary power converter (300) using the first output current feedback value and the first output power and the second output current feedback value and the second output power. The power control unit (500) may include an output current controller and an output power controller. The output current controller calculates the first control current of the M_secondary power converter (200) and the second control current of the S_secondary power converter (300), and the output power controller calculates the first control power of the M_secondary power converter (200) and the second control power of the S_secondary power converter (300). The output current controller may be composed of one unit or two units, which is the sum of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300). Likewise, the output power controller may be composed of one unit or two units, which is the sum of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300).

[0054] Here, the first control current and the first control power refer to the values ​​that the power control unit (500) intends to control regarding the output current and output power of the M_secondary power converter (200), and the second control current and the second control power refer to the values ​​that the power control unit (500) intends to control regarding the output current and output power of the S_secondary power converter (300). The power control unit (500) can calculate the first control current and the first control power and the second control current and the second control power by considering the power required by the load (20) and changing the first output current feedback value and the second output current feedback value as little as possible, so that the sum of the output powers of the M_secondary power converter (200) and the S_secondary power converter (300) can approach the power required by the load (20).

[0055] When the maximum value among the calculated first control power and second control power is less than or equal to the allowable maximum power, the power control unit (500) can control the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) so that when the first control current and the second control current are less than or equal to the allowable maximum current, the output currents of both the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) are output as the minimum value of the first control current and the second control current, and when at least one of the first control current and the second control current is greater than the allowable maximum current, the output currents of both the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) are output as the allowable maximum current.

[0056] When the maximum value among the calculated first control power and second control power is greater than the allowable maximum power, the power control unit (500) can control the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) so that the output power of both the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300) is output as the allowable maximum power.

[0057] This has the advantage of eliminating load imbalance for the entire module of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300).

[0058] In one embodiment, when the calculated first control power is less than or equal to the allowable maximum power, the power control unit (500) can control the M_2nd power conversion unit (200) so that the output current of the M_2nd power conversion unit (200) is output as the first control current when the first control current is less than or equal to the allowable maximum current, and so that the output current of the M_2nd power conversion unit (200) is output as the allowable maximum current when the first control current is greater than the allowable maximum current, and when the calculated first control power is greater than the allowable maximum power, the power control unit (500) can control the M_2nd power conversion unit (200) so that the output power of the M_2nd power conversion unit (200) is output as the allowable maximum power.

[0059] Likewise, for the S_2nd power conversion unit (300), when the calculated second control power is less than or equal to the allowable maximum power, the power control unit (500) can control the S_2nd power conversion unit (300) so that the output current of the S_2nd power conversion unit (300) is output as the second control current when the second control current is less than or equal to the allowable maximum current, and when the second control current is greater than the allowable maximum current, the output current of the S_2nd power conversion unit (300) is output as the allowable maximum current. When the calculated second control power is greater than the allowable maximum power, the power control unit (500) can control the S_2nd power conversion unit (300) so that the output power of the S_2nd power conversion unit (300) is output as the allowable maximum power.

[0060] In one embodiment, with respect to the M_secondary power conversion unit (200), the power control unit (500) can compare a first output current control amount, which is the ratio of the first control current to the allowable maximum current, with a first output power control amount, which is the ratio of the first control power to the allowable maximum power. Here, the first output current control amount is the value obtained by dividing the allowable maximum current by the first control current, and the first output power control amount is the value obtained by dividing the allowable maximum power by the first control power. The power control unit (500) can control the M_secondary power conversion unit (200) so that current is output as the first control current when the first output current control amount is less than or equal to the first output power control amount, and can control the M_secondary power conversion unit (200) so that power is output as the first control power when the first output current control amount is greater than the first output power control amount.

[0061] Likewise, with respect to the S_2nd power conversion unit (300), the power control unit (500) can compare the second output current control amount, which is the ratio of the second control current to the allowable maximum current, with the second output power control amount, which is the ratio of the second control power to the allowable maximum power. Here, the second output current control amount is the value obtained by dividing the allowable maximum current by the second control current, and the second output power control amount is the value obtained by dividing the allowable maximum power by the second control power. The power control unit (500) can control the S_2nd power conversion unit (300) so that current is output as the second control current when the second output current control amount is less than or equal to the second output power control amount, and can control the S_2nd power conversion unit (300) so that power is output as the second control power when the second output current control amount is greater than the second output power control amount.

[0062] Load imbalance between modules can be prevented by controlling the output current or output power for each module with the smaller value between the first output current control amount and the first output power control amount of the M_secondary power conversion unit (200) and the smaller value between the second output current control amount and the second output power control amount of the S_secondary power conversion unit (300).

[0063] FIG. 7 is a configuration diagram of a power supply unit (900) according to one embodiment of the present disclosure. Referring to FIG. 7, the power supply unit (900) of the present disclosure may include at least two S_secondary power conversion units (300), and at least two S_secondary power conversion units (300) may be electrically connected in parallel. By including at least two S_secondary power conversion units (300), the power supply unit (900) of the present disclosure has the advantage of being able to supply power to a load (20) even if a failure occurs in either the M_secondary power conversion unit (200) or the N S_secondary power conversion units (300).

[0064] In one embodiment, the power control unit (500) can perform interleaved control on the first and second output DC power sources of each of the M_secondary power converter (200) and at least two S_secondary power converters (300). In other words, when N S_secondary power converters (300) are electrically connected in parallel, the power control unit (500) can transmit a PWM signal to each of the M_secondary power converter (200) and N S_secondary power converters (300) such that the phase difference between the first and second output DC power sources of each of the M_secondary power converter (200) and N S_secondary power converters (300) is as follows. As a result, the power control unit (500) can control the phase of the first and second output DC power sources of each of the M_secondary power converter (200) and N S_secondary power converters (300).

[0065]

[0066] (formula)

[0067]

[0068] Here, φ is the phase of the second output DC power of the Mth S_2nd power conversion unit (300_M) among the N S_2nd power conversion units (300).

[0069]

[0070] For example, in the case where there are two S_secondary power converters (300), the phase difference of the second output DC power of the first S_secondary power converter (300) with respect to the phase of the first output DC power of the M_secondary power converter (200) is 30 o And, the phase difference of the second output DC power of the second S_secondary power conversion unit (300) is 60 o is. As an example, in the case where there are three S_secondary power converters (300), the phase difference of the second output DC power of the first S_secondary power converter (300) with respect to the phase of the first output DC power of the M_secondary power converter (200) is 22.5 o And, the phase difference of the second output DC power of the second S_secondary power conversion unit (300) is 45 o And, the phase difference of the second output DC power of the third S_secondary power conversion unit (300) is 67.5 o In this way, the power control unit (500) controls the phase difference between the first and second output DC power sources of each of the M_secondary power conversion unit (200) and N S_secondary power conversion units (300), thereby further reducing the ripple of the summed output current.

[0071] The power control unit (500) can set the allowable maximum current and allowable maximum power of the M_secondary power converter (200) and at least two S_secondary power converters (300). Here, the allowable maximum current and allowable maximum power can be calculated by taking into account a safety factor to prevent failure of the M_secondary power converter (200) and the S_secondary power converter (300).

[0072] The power control unit (500) can calculate the first output power of the M_secondary power converter (200) and the second output power of at least two S_secondary power converters (300) using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value detected from the feedback circuit unit. The output power can be calculated by multiplying the output current and the output voltage.

[0073] The power control unit (500) can calculate the first control current and first control power of the M_secondary power converter (200) and the second control current and second control power of at least two S_secondary power converters (300) using the first output current feedback value and the first output power and the second output current feedback value and the second output power. The power control unit (500) may include an output current controller and an output power controller. The output current controller calculates the first control current of the M_secondary power converter (200) and the second control current of the S_secondary power converter (300), and the output power controller calculates the first control power of the M_secondary power converter (200) and the second control power of the S_secondary power converter (300). The output current controller may be composed of one unit or a number equal to the sum of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300). In other words, if there are three S_secondary power conversion units (300), the output current controller may be composed of one unit or a number equal to the sum of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300), which is four units. Similarly, the output power controller may be composed of one unit or a number equal to the sum of the M_secondary power conversion unit (200) and the S_secondary power conversion unit (300).

[0074] As described above, the first control current and the first control power refer to values ​​that the power control unit (500) intends to control regarding the output current and output power of the M_secondary power converter (200), and the second control current and the second control power refer to values ​​that the power control unit (500) intends to control regarding the output current and output power of at least two S_secondary power converters (300). The power control unit (500) can calculate the first control current and the first control power and the second control current and the second control power by considering the power required by the load (20) and changing the first output current feedback value and the second output current feedback value as little as possible, so that the sum of the output power of the M_secondary power converter (200) and at least two S_secondary power converters (300) approaches the power required by the load (20).

[0075] When the maximum value among the calculated first control power and at least two second control powers is less than or equal to the allowable maximum power, the power control unit (500) can control the M_secondary power conversion unit (200) and at least two S_secondary power conversion units (300) so that when the first control current and at least two second control currents are less than or equal to the allowable maximum current, the output currents of the M_secondary power conversion unit (200) and at least two S_secondary power conversion units (300) are all output as the minimum value of the first control current and at least two second control currents, and when at least one of the first control current and at least two second control currents is greater than the allowable maximum current, the output currents of the M_secondary power conversion unit (200) and at least two S_secondary power conversion units (300) are all output as the allowable maximum current.

[0076] When the minimum value among the calculated first control power and at least two second control powers is greater than the allowable maximum power, the power control unit (500) can control the M_secondary power conversion unit (200) and at least two S_secondary power conversion units (300) so that the output power of both the M_secondary power conversion unit (200) and at least two S_secondary power conversion units (300) is output as the allowable maximum power.

[0077] This has the advantage of eliminating load imbalance for the entire module of the M_secondary power converter (200) and at least two S_secondary power converters (300).

[0078] In one embodiment, when the calculated first control power is less than or equal to the allowable maximum power, the power control unit (500) can control the M_2nd power conversion unit (200) so that the output current of the M_2nd power conversion unit (200) is output as the first control current when the first control current is less than or equal to the allowable maximum current, and so that the output current of the M_2nd power conversion unit (200) is output as the allowable maximum current when the first control current is greater than the allowable maximum current, and can control the M_2nd power conversion unit (200) so that the output power of the M_2nd power conversion unit (200) is output as the allowable maximum power when the calculated first control power is greater than the allowable maximum power.

[0079] Likewise, for each of at least two S_secondary power conversion units (300), when the calculated second control power is less than or equal to the allowable maximum power, the power control unit (500) can control the S_secondary power conversion unit (300) so that the output current of the S_secondary power conversion unit (300) is output as the second control current when the second control current is less than or equal to the allowable maximum current, and when the second control current is greater than the allowable maximum current, the output current of the S_secondary power conversion unit (300) is output as the allowable maximum current. When the calculated second control power is greater than the allowable maximum power, the power control unit (500) can control the S_secondary power conversion unit (300) so that the output power of the S_secondary power conversion unit (300) is output as the allowable maximum power.

[0080] In one embodiment, with respect to the M_secondary power conversion unit (200), the power control unit (500) can compare a first output current control amount, which is the ratio of the first control current to the allowable maximum current, with a first output power control amount, which is the ratio of the first control power to the allowable maximum power. As described above, the first output current control amount is the value obtained by dividing the allowable maximum current by the first control current, and the first output power control amount is the value obtained by dividing the allowable maximum power by the first control power. The power control unit (500) can control the M_secondary power conversion unit (200) so that current is output as the first control current when the first output current control amount is less than or equal to the first output power control amount, and can control the M_secondary power conversion unit (200) so that power is output as the first control power when the first output current control amount is greater than the first output power control amount.

[0081] Likewise, for each of at least two S_secondary power converters (300), the power control unit (500) can compare a second output current control amount, which is the ratio of the second control current to the allowable maximum current, with a second output power control amount, which is the ratio of the second control power to the allowable maximum power. As described above, the second output current control amount is the value obtained by dividing the allowable maximum current by the second control current, and the second output power control amount is the value obtained by dividing the allowable maximum power by the second control power. The power control unit (500) can control at least two S_secondary power converters (300) so that current is output as the second control current when the second output current control amount is less than or equal to the second output power control amount, and can control at least two S_secondary power converters (300) so that power is output as the second control power when the second output current control amount is greater than the second output power control amount.

[0082] Load imbalance between modules can be prevented by controlling the output current or output power for each module with the smaller value between the second output current control amount and the second output power control amount of at least two S_secondary power conversion units (300) and the smaller value between the first output current control amount and the first output power control amount of the M_secondary power conversion unit (200).

[0083] FIG. 8 is a flowchart of a power control method using a power supply device (900) in a form according to one embodiment of the present disclosure, FIG. 9 is a flowchart of a power control method using a power supply device (900) in a form according to another embodiment of the present disclosure, and FIG. 10 is a flowchart of a power control method using a power supply device (900) in a form according to yet another embodiment of the present disclosure.

[0084] Referring to FIG. 8, a power control method using a power supply unit (900) of the present disclosure comprises: (A) a step in which the allowable maximum current and allowable maximum power of an M_secondary power converter (200) and at least one S_secondary power converter (300) are set by a power control unit (500); (B) a step in which the power control unit (500) transmits a PWM signal to each of the M_secondary power converter (200) and at least one S_secondary power converter (300) so that a phase difference may be created between the phase of the second output DC power of at least one S_secondary power converter (300) and the phase of the first output DC power of the M_secondary power converter (200); (C) A step in which the feedback circuit detects the first output current feedback value and the first output voltage feedback value of the M_2nd power converter (200) and the second output current feedback value and the second output voltage feedback value of at least one S_2nd power converter (300) and transmits them to the power control unit (500); (D) A step in which the power control unit (500) calculates the first output power of the M_2nd power converter (200) and the second output power of at least one S_2nd power converter (300) using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value received from the feedback circuit; (E) The power control unit (500) calculates the first control current and first control power of the M_secondary power converter (200) and the second control current and second control power of at least one S_secondary power converter (300) using the first output current feedback value and the first output power and the second output current feedback value and the second output power; (F) The power control unit (500) compares the maximum value among the first control power and the second control power with the allowable maximum power;and (G1) when the maximum value among the first control power and the second control power is less than or equal to the allowable maximum power, the power control unit (500) controls the M_secondary power conversion unit (200) and at least one S_secondary power conversion unit (300) such that (H1) when the maximum value among the first control power and the second control power is less than or equal to the allowable maximum power, and when the first control current and the second control current are less than or equal to the allowable maximum current, the output currents of both the M_secondary power conversion unit (200) and at least one S_secondary power conversion unit (300) are output as the minimum value among the first control current and the second control current, and (H2) when at least one of the first control current and the second control current is greater than the allowable maximum current, the output currents of both the M_secondary power conversion unit (200) and at least one S_secondary power conversion unit (300) are output as the allowable maximum current, and (G2) the first control power and the second When the maximum value of the control power is greater than the allowable maximum power, the power control unit may include the step of controlling the M_2nd power conversion unit (200) and at least one S_2nd power conversion unit (300) so that the output power of both the M_2nd power conversion unit (200) and at least one S_2nd power conversion unit (300) is output as the allowable maximum power.

[0085] Referring to FIG. 9, a power control method using a power supply unit (900) of the present disclosure according to one embodiment comprises: (A) a step in which the allowable maximum current and allowable maximum power of an M_secondary power converter (200) and at least one S_secondary power converter (300) are set by a power control unit (500); (B) a step in which the power control unit (500) transmits a PWM signal to each of the M_secondary power converter (200) and at least one S_secondary power converter (300) so that a phase difference may be created between the phase of the second output DC power of at least one S_secondary power converter (300) and the phase of the first output DC power of the M_secondary power converter (200); (C) A step in which the feedback circuit detects the first output current feedback value and the first output voltage feedback value of the M_2nd power converter (200) and the second output current feedback value and the second output voltage feedback value of at least one S_2nd power converter (300) and transmits them to the power control unit (500); (D) A step in which the power control unit (500) calculates the first output power of the M_2nd power converter (200) and the second output power of at least one S_2nd power converter (300) using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value received from the feedback circuit; (E) The power control unit (500) calculates the first control current and first control power of the M_secondary power converter (200) and the second control current and second control power of at least one S_secondary power converter (300) using the first output current feedback value and the first output power and the second output current feedback value and the second output power;And when the first control power is less than or equal to the allowable maximum power, the power control unit (500) controls the M_2nd power conversion unit (200) so that (K1) when the first control current is less than or equal to the allowable maximum current, the output current of the M_2nd power conversion unit (200) is output as the first control current, and (K2) when the first control current is greater than the allowable maximum current, the output current of the M_2nd power conversion unit (200) is output as the allowable maximum current, and when the first control power is greater than the allowable maximum power, the power control unit (500) controls the M_2nd power conversion unit (200) so that (J2) the output power of the M_2nd power conversion unit (200) is output as the allowable maximum power, and for each of at least one S_2nd power conversion unit (300), when the second control power is less than or equal to the allowable maximum power, the power control unit (500) controls (K3) when the second control current is allowable (K4) When the output current of the S_2nd power converter (300) is less than or equal to the maximum current, the output current of the S_2nd power converter (300) is output as the second control current; (K4) When the second control current is greater than the allowable maximum current, the output current of the S_2nd power converter (300) is output as the allowable maximum current; and when the second control power is greater than the allowable maximum power, the power control unit (500) (J4) controls the S_2nd power converter (300) so that the output power of the S_2nd power converter (300) is output as the allowable maximum power; may include the step of controlling the S_2nd power converter (300).

[0086] Referring to FIG. 10, a power control method using a power supply unit (900) of the present disclosure according to another embodiment comprises: (A) a step in which the allowable maximum current and allowable maximum power of an M_secondary power converter (200) and at least one S_secondary power converter (300) are set by a power control unit (500); (B) a step in which the power control unit (500) transmits a PWM signal to each of the M_secondary power converter (200) and at least one S_secondary power converter (300) so that a phase difference may be created between the phase of the second output DC power of at least one S_secondary power converter (300) and the phase of the first output DC power of the M_secondary power converter (200); (C) A step in which the feedback circuit detects the first output current feedback value and the first output voltage feedback value of the M_2nd power converter (200) and the second output current feedback value and the second output voltage feedback value of at least one S_2nd power converter (300) and transmits them to the power control unit (500); (D) A step in which the power control unit (500) calculates the first output power of the M_2nd power converter (200) and the second output power of at least one S_2nd power converter (300) using the first output current feedback value and the first output voltage feedback value and the second output current feedback value and the second output voltage feedback value received from the feedback circuit; (E) The power control unit (500) calculates the first control current and first control power of the M_secondary power converter (200) and the second control current and second control power of at least one S_secondary power converter (300) using the first output current feedback value and the first output power and the second output current feedback value and the second output power; the power control unit (500) (L1) compares the first output current control amount, which is the ratio of the first control current to the allowable maximum current, with the first output power control amount, which is the ratio of the first control power to the allowable maximum power, and (L2) compares the second output current control amount, which is the ratio of the second control current to the allowable maximum current, with the second output power control amount, which is the ratio of the second control power to the allowable maximum power;and (M1) when the first output current control amount is less than or equal to the first output power control amount, the power control unit (500) controls the M_secondary power conversion unit (200) so that current is output as the first control current; (M2) when the first output current control amount is greater than the first output power control amount, the power control unit (500) controls the M_secondary power conversion unit (200) so that power is output as the first control power; (M3) when the second output current control amount is less than or equal to the second output power control amount, the power control unit (500) controls at least one S_secondary power conversion unit (300) so that current is output as the second control current; and (M4) when the second output current control amount is greater than the second output power control amount, the power control unit (500) controls the S_secondary power conversion unit (300) so that power is output as the second control power.

[0087]

[0088] The disclosed content is merely illustrative and can be modified and implemented in various ways by a person skilled in the art without departing from the gist of the claim in the patent claims; therefore, the scope of protection of the disclosed content is not limited to the specific embodiments described above.

[0089]

[0090] [Explanation of the symbol]

[0091] 10: External AC power supply

[0092] 20: Subordinate

[0093] 100: Primary power converter

[0094] 110: Input section

[0095] 120: Input rectifier

[0096] 130: Inrush current limiting unit

[0097] 200: M_Secondary Power Converter

[0098] 300: S_Secondary Power Converter

[0099] 210, 310: Switching section

[0100] 220, 320: Resonance section

[0101] 230, 330: Transformer

[0102] 240, 340: Output rectifier

[0103] 400: Ignition device

[0104] 500: Power control unit

[0105] 900: Power supply

[0106] The present disclosure relates to a power supply unit for supplying power to a plasma scrubber for removing harmful gases generated during a semiconductor process, and has industrial applicability in the field of semiconductor manufacturing.

Claims

1. A power supply unit for supplying power to a plasma scrubber for treating harmful gases during a semiconductor process, A primary power converter configured to receive external AC power, rectify it, and convert it into DC power; M_2nd power converter configured to receive a parallel branched portion of the DC power rectified from the above 1st power converter, convert it into a high-frequency AC power, convert the voltage of the high-frequency AC power into an isolated AC voltage through a transformer having a constant turn ratio, and then rectify and convert it into a first output DC power; An S_secondary power converter configured to have the same configuration as the M_secondary power converter above, be electrically connected in parallel with the M_secondary power converter above, receive a parallel branched portion of the DC power rectified from the primary power converter above, convert it into a high-frequency AC power, convert the voltage of the high-frequency AC power into an isolated AC voltage through a transformer having a constant turn ratio, rectify it, and convert it into a second output DC power; An ignition unit configured to receive the high-frequency AC power from the above M_2nd power converter, increase the voltage of the high-frequency AC power to generate an ignition power, and ignite a load; and A power supply device comprising: a power control unit that generates a PWM signal and transmits the PWM signal to each of the M_2nd power converter and the S_2nd power converter, thereby controlling each of the M_2nd power converter and the S_2nd power converter to output the first and second output DC power.

2. In Claim 1, A power supply unit characterized by the above power control unit including an output current controller and an output power controller.

3. In Claim 1, A power supply device characterized by the power control unit transmitting the PWM signal to each of the M_2nd power conversion unit and the S_2nd power conversion unit such that the phase difference between the first and second output DC power sources of each of the M_2nd power conversion unit and the S_2nd power conversion unit is π / 2.

4. In Claim 1, Further comprising a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power source of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power source of the S_secondary power converter. The above power control unit is, Set the allowable maximum current and allowable maximum power of the above M_2nd power converter and the above S_2nd power converter, and Calculate the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit and the second output current feedback value and the second output voltage feedback value. Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and the second control current and the second control power of the S_secondary power converter are calculated, When the maximum value among the calculated first control power and the second control power is less than or equal to the allowable maximum power, and when the first control current and the second control current are less than or equal to the allowable maximum current, the output currents of both the M_2nd power converter and the S_2nd power converter are output as the minimum value among the first control current and the second control current; and when at least one of the first control current and the second control current is greater than the allowable maximum current, the output currents of both the M_2nd power converter and the S_2nd power converter are output as the allowable maximum current. A power supply device characterized by being configured to control the M_2nd power converter and the S_2nd power converter so that when the maximum value among the calculated first control power and the second control power is greater than the allowable maximum power, the output power of both the M_2nd power converter and the S_2nd power converter is output as the allowable maximum power.

5. In Claim 1, It may further include a feedback circuit unit capable of detecting the first output current feedback value of the first output DC power of the M_secondary power converter and the second output current feedback value of the second output DC power of the S_secondary power converter. The above power control unit is, Set the allowable maximum current and allowable maximum power of the above M_2nd power converter and the above S_2nd power converter, and Calculate the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit and the second output current feedback value and the second output voltage feedback value. Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and the second control current and the second control power of the S_secondary power converter are calculated, When the first control power is less than or equal to the allowable maximum power, and when the first control current is less than or equal to the allowable maximum current, the output current of the M_2nd power converter is output as the first control current; and when the first control current is greater than the allowable maximum current, the output current of the M_2nd power converter is output as the allowable maximum current. The M_2nd power converter is controlled in such a way that the output current of the M_2nd power converter is output as the allowable maximum current. When the first control power is greater than the maximum allowable power, the M_2nd power converter is controlled so that the output power of the M_2nd power converter is output as the maximum allowable power, and When the second control power is less than or equal to the allowable maximum power, and when the second control current is less than or equal to the allowable maximum current, the output current of the S_2nd power converter is output as the second control current, and when the second control current is greater than the allowable maximum current, the output current of the S_2nd power converter is output as the allowable maximum current. The S_2nd power converter is controlled in such a way that the output current of the S_2nd power converter is output as the allowable maximum current. A power supply device characterized by being configured to control the S_2nd power converter so that when the above second control power is greater than the above allowable maximum power, the output power of the S_2nd power converter is output as the allowable maximum power.

6. In Claim 1, It may further include a feedback circuit unit capable of detecting the first output current feedback value of the first output DC power of the M_secondary power converter and the second output current feedback value of the second output DC power of the S_secondary power converter. The above power control unit is, Set the allowable maximum current and allowable maximum power of the above M_2nd power converter and the above S_2nd power converter, and Calculate the first output power of the M_2nd power converter and the second output power of the S_2nd power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit and the second output current feedback value and the second output voltage feedback value. Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and the second control current and the second control power of the S_secondary power converter are calculated, A power supply device characterized by being configured to control the M_2nd power converter by comparing a first output current control amount, which is the ratio of the first control current to the above-mentioned maximum current, with a first output power control amount, which is the ratio of the first control power to the above-mentioned maximum power, so that if the first output current control amount is less than or equal to the first output power control amount, current is output as the first control current, or if the first output current control amount is greater than the first output power control amount, power is output as the first control power, and to control the S_2nd power converter by comparing a second output current control amount, which is the ratio of the second control current to the above-mentioned maximum current, with a second output power control amount, which is the ratio of the second control power to the above-mentioned maximum power, so that if the second output current control amount is less than or equal to the second output power control amount, current is output as the second control current, or if the second output current control amount is greater than the second output power control amount, power is output as the second control power.

7. In Claim 1, A power supply characterized by including at least two S_2nd power converters electrically connected in parallel.

8. In Claim 7, A power supply device characterized in that, when N of the above S_2nd power converters are electrically connected in parallel, the power control unit transmits the PWM signal to each of the M_2nd power converter and N of the above S_2nd power converters such that the phase difference between the first and second output DC power of each of the M_2nd power converter and N of the above S_2nd power converters is as follows in the following formula. [formula] Here, φ is the phase of the second output DC power of the Mth S_2nd power converter among the N S_2nd power converters.

9. In Claim 7, Further comprising a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power source of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power source of at least two S_secondary power converters. The above power control unit is, The allowable maximum current and allowable maximum power of the above M_secondary power converter and at least two of the above S_secondary power converters are set, Calculate the first output power of the M_secondary power converter and at least two second output powers of the S_secondary power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit, and Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and at least two second control currents and second control powers of the S_secondary power converter are calculated, and When the maximum value among the calculated first control power and at least two second control powers is less than or equal to the allowable maximum power, when the first control current and at least two second control currents are less than or equal to the allowable maximum current, the output currents of the M_2nd power converter and at least two S_2nd power converters are all output as the minimum value among the first control current and at least two second control currents; and when at least one of the first control current and at least two second control currents is greater than the allowable maximum current, the output currents of the M_2nd power converter and at least two S_2nd power converters are all output as the allowable maximum current. A power supply device characterized by being configured to control the M_2nd power converter and at least two S_2nd power converters such that when the maximum value among the calculated first control power and at least two second control powers is greater than the allowable maximum power, the output power of both the M_2nd power converter and at least two S_2nd power converters is output as the allowable maximum power.

10. In Claim 7, It may further include a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power source of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power source of at least two S_secondary power converters. The above power control unit is, The allowable maximum current and allowable maximum power of the above M_secondary power converter and at least two of the above S_secondary power converters are set, Calculate the first output power of the M_secondary power converter and at least two second output powers of the S_secondary power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit, and Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and at least two second control currents and second control powers of the S_secondary power converter are calculated, and When the first control power is less than or equal to the allowable maximum power, and when the first control current is less than or equal to the allowable maximum current, the output current of the M_2nd power converter is output as the first control current; and when the first control current is greater than the allowable maximum current, the output current of the M_2nd power converter is output as the allowable maximum current. The M_2nd power converter is controlled in such a way that the output current of the M_2nd power converter is output as the allowable maximum current. When the first control power is greater than the maximum allowable power, the M_2nd power converter is controlled so that the output power of the M_2nd power converter is output as the maximum allowable power, and For each of at least two S_secondary power converters, When the second control power is less than or equal to the allowable maximum power, and when the second control current is less than or equal to the allowable maximum current, the output current of the S_2nd power converter is output as the second control current, and when the second control current is greater than the allowable maximum current, the output current of the S_2nd power converter is output as the allowable maximum current. The S_2nd power converter is controlled in such a way that the output current of the S_2nd power converter is output as the allowable maximum current. A power supply device characterized by being configured to control the S_2nd power converter so that when the above second control power is greater than the above allowable maximum power, the output power of the S_2nd power converter is output as the allowable maximum power.

11. In Claim 7, It may further include a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power source of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power source of at least two S_secondary power converters. The above power control unit is, The allowable maximum current and allowable maximum power of the above M_secondary power converter and at least two of the above S_secondary power converters are set, Calculate the first output power of the M_secondary power converter and at least two second output powers of the S_secondary power converter using the first output current feedback value and the first output voltage feedback value detected from the feedback circuit, and Using the first output current feedback value and the first output power and the second output current feedback value and the second output power, the first control current and the first control power of the M_secondary power converter and at least two second control currents and second control powers of the S_secondary power converter are calculated, and The method is characterized by being configured to control the M_2nd power converter by comparing a first output current control amount, which is the ratio of the first control current to the allowable maximum current, with a first output power control amount, which is the ratio of the first control power to the allowable maximum power, such that if the first output current control amount is less than or equal to the first output power control amount, current is output as the first control current, or if the first output current control amount is greater than the first output power control amount, power is output as the first control power, and to control at least two S_2nd power converters by comparing a second output current control amount, which is the ratio of the second control current to the allowable maximum current, with a second output power control amount, which is the ratio of the second control power to the allowable maximum power, such that if the second output current control amount is less than or equal to the second output power control amount, current is output as the second control current, or if the second output current control amount is greater than the second output power control amount, power is output as the second control power. Power supply.

12. A power control method using a power supply unit that supplies power to a plasma scrubber for treating harmful gases during a semiconductor process, The above power supply unit is the power supply unit of claim 1 and further comprises a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power of at least one S_secondary power converter. A step in which the allowable maximum current and allowable maximum power of the M_2nd power converter and at least one S_2nd power converter are set by the power control unit; The power control unit transmits the PWM signal to each of the M_2nd power conversion unit and at least one S_2nd power conversion unit so that a phase difference may be created between the phase of the second output DC power of at least one S_2nd power conversion unit and the phase of the first output DC power of the M_2nd power conversion unit. The feedback circuit unit detects the first output current feedback value and the first output voltage feedback value of the M_2nd power converter and the second output current feedback value and the second output voltage feedback value of at least one S_2nd power converter and transmits them to the power control unit; The power control unit calculates the first output power of the M_2nd power converter and the second output power of at least one S_2nd power converter using the first output current feedback value and the first output voltage feedback value received from the feedback circuit unit, and the second output current feedback value and the second output voltage feedback value; The power control unit calculates a first control current and a first control power of the M_2nd power converter and a second control current and a second control power of at least one S_2nd power converter using the first output current feedback value and the first output power and the second output current feedback value and the second output power; The power control unit above compares the maximum value among the first control power and the second control power with the allowable maximum power; and When the maximum value among the first control power and the second control power is less than or equal to the allowable maximum power, the power control unit controls the M_2nd power converter and at least one S_2nd power converter so that when the maximum value among the first control power and the second control power is less than or equal to the allowable maximum power, and when the first control current and the second control current are less than or equal to the allowable maximum current, the output currents of both the M_2nd power converter and at least one S_2nd power converter are output as the minimum value among the first control current and the second control current; and when at least one of the first control current and the second control current is greater than the allowable maximum current, the output currents of both the M_2nd power converter and at least one S_2nd power converter are output as the allowable maximum current. A power control method using a power supply device comprising: a step in which, when the maximum value among the first control power and the second control power is greater than the allowable maximum power, the power control unit controls the M_2nd power converter and at least one S_2nd power converter so that the output power of both the M_2nd power converter and at least one S_2nd power converter is output as the allowable maximum power.

13. In Claim 12, A power control method using a power supply device characterized in that, when the power supply device includes one S_2nd power conversion unit, the phase difference is π / 2.

14. In Claim 12, A power control method using a power supply device, characterized in that when the power supply device includes N S_2nd power conversion units, the phase difference corresponding to the Mth S_2nd power conversion unit is calculated by the following formula. [formula] Here, N is an integer greater than or equal to 2, and M is an integer greater than or equal to 1 and less than or equal to N.

15. A power control method using a power supply unit that supplies power to a plasma scrubber for treating harmful gases during a semiconductor process, The above power supply unit is the power supply unit of claim 1 and further comprises a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power of at least one S_secondary power converter. A step in which the allowable maximum current and allowable maximum power of the M_2nd power converter and at least one S_2nd power converter are set by the power control unit; The power control unit transmits the PWM signal to each of the M_2nd power conversion unit and at least one S_2nd power conversion unit so that a phase difference may be created between the phase of the second output DC power of at least one S_2nd power conversion unit and the phase of the first output DC power of the M_2nd power conversion unit. The feedback circuit unit detects the first output current feedback value and the first output voltage feedback value of the M_2nd power converter and the second output current feedback value and the second output voltage feedback value of at least one S_2nd power converter and transmits them to the power control unit; The power control unit calculates the first output power of the M_2nd power converter and the second output power of at least one S_2nd power converter using the first output current feedback value and the first output voltage feedback value received from the feedback circuit unit, and the second output current feedback value and the second output voltage feedback value; The power control unit calculates a first control current and a first control power of the M_2nd power converter and a second control current and a second control power of at least one S_2nd power converter using the first output current feedback value and the first output power and the second output current feedback value and the second output power; and When the first control power is less than or equal to the allowable maximum power, the power control unit controls the M_2nd power converter such that when the first control current is less than or equal to the allowable maximum current, the output current of the M_2nd power converter is output as the first control current, and when the first control current is greater than the allowable maximum current, the output current of the M_2nd power converter is output as the allowable maximum current; and when the first control power is greater than the allowable maximum power, the power control unit controls the M_2nd power converter such that the output power of the M_2nd power converter is output as the allowable maximum power. A power control method using a power supply device comprising the step of, for each of the above-mentioned S_2nd power converters, if the second control power is less than or equal to the allowable maximum power, the power control unit controls the S_2nd power converter so that the output current of the S_2nd power converter is output as the second control current when the second control current is less than or equal to the allowable maximum current, and if the second control current is greater than the allowable maximum current, the output current of the S_2nd power converter is output as the allowable maximum current; and if the second control power is greater than the allowable maximum power, the power control unit controls the S_2nd power converter so that the output power of the S_2nd power converter is output as the allowable maximum power.

16. A power control method using a power supply unit that supplies power to a plasma scrubber for treating harmful gases during a semiconductor process, The above power supply unit is the power supply unit of claim 1 and further comprises a feedback circuit unit capable of detecting the first output current feedback value and the first output voltage feedback value of the first output DC power of the M_secondary power converter and the second output current feedback value and the second output voltage feedback value of the second output DC power of at least one S_secondary power converter. The power control unit calculates the first output power of the M_2nd power converter and the second output power of at least one S_2nd power converter using the first output current feedback value and the first output voltage feedback value received from the feedback circuit unit, and the second output current feedback value and the second output voltage feedback value; The power control unit calculates a first control current and a first control power of the M_2nd power converter and a second control current and a second control power of at least one S_2nd power converter using the first output current feedback value and the first output power and the second output current feedback value and the second output power; The power control unit compares a first output current control amount, which is the ratio of the first control current to the allowable maximum current, with a first output power control amount, which is the ratio of the first control power to the allowable maximum power, and compares a second output current control amount, which is the ratio of the second control current to the allowable maximum current, with a second output power control amount, which is the ratio of the second control power to the allowable maximum power; and When the first output current control amount is less than or equal to the first output power control amount, the power control unit controls the M_2nd power converter so that current is output as the first control current, and when the first output current control amount is greater than the first output power control amount, the power control unit controls the M_2nd power converter so that power is output as the first control power. A power control method using a power supply device comprising the step of: when the second output current control amount is less than or equal to the second output power control amount, the power control unit controls at least one S_2nd power converter so that current is output as the second control current; and when the second output current control amount is greater than the second output power control amount, the power control unit controls at least one S_2nd power converter so that power is output as the second control power.

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