Ultrasonic atomization device
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- TMEIC CORP
- Filing Date
- 2025-01-30
- Publication Date
- 2026-08-06
Smart Images
Figure JP2025002932_06082026_PF_FP_ABST
Abstract
Description
Ultrasonic atomization device
[0005]
[0001] The present disclosure relates to an ultrasonic atomization device that atomizes a raw material solution using an ultrasonic vibrator to obtain a raw material solution mist.
[0002] Conventionally, as a film forming device that sprays a raw material solution mist obtained by atomizing (mistifying) a raw material solution onto a substrate or other base material to obtain a functional thin film, an ultrasonic atomization device that applies ultrasonic vibration to the raw material solution to generate a raw material solution mist has been used. In the ultrasonic atomization device, the raw material solution mist generated in the raw material solution container is supplied from the raw material solution container to a mist injection part such as a nozzle by a carrier gas, and the raw material solution mist is sprayed onto the substrate from the mist injection part to form a thin film. As such a conventional ultrasonic atomization device, for example, there is an atomization device disclosed in Patent Document 1.
[0003] In order to form a stable and uniform thin film on the substrate, it is necessary to stabilize the generation amount of the raw material solution mist supplied from the ultrasonic atomization device. Therefore, it is necessary to keep the mist concentration, which is the amount of mist supplied per unit time from the ultrasonic atomization device, constant.
[0004] FIG. 11 is an explanatory diagram schematically showing the configuration of a conventional ultrasonic atomization device 200. An XYZ orthogonal coordinate system is shown in FIG. Hereinafter, the configuration of the conventional ultrasonic atomization device 200 will be described with reference to FIG. 11.
[0005] In the ultrasonic atomization device 200, a raw material solution container is constituted by a mist generation chamber 91 and a separator cup 97. The bottom surface of the raw material solution container is the separator cup 97. Thus, the raw material solution container composed of the mist generation chamber 91 and the separator cup 97 houses the raw material solution 15.
[0006] An upper lid 91a for the generation chamber is provided above the mist generation chamber 91 so as to close the mist generation space 91H. The lid 91a for the generation chamber has two openings h11 and h12 as through-holes. The separator cup 97 is supported by a cup support base 97b provided on the water tank 10.
[0007] A mist supply pipe 3 is provided on the lid 91a for the generation chamber. The mist supply pipe 3 is located above the separator cup 97 and communicates with the mist generation space 91H through the opening h11 of the lid 91a for the generation chamber. The pipe outlet 3X of the mist supply pipe 3 is connected to a mist injection unit such as a nozzle (not shown) via a mist supply pipe (not shown). Therefore, the raw material solution mist MT generated in the raw material solution container of the ultrasonic atomizer 200 is supplied to the mist injection unit via the mist supply pipe 3.
[0008] The ultrasonic atomizer 200 further includes a water tank 10 that contains ultrasonic transmission water 9, which serves as an ultrasonic transmission medium. The water tank 10 and the separator cup 97 are positioned such that the bottom surface of the separator cup 97 is immersed in the ultrasonic transmission water 9.
[0009] A plurality of ultrasonic transducers 2 are provided on the upper surface of the water tank base 10b, which is the bottom surface of the water tank 10, corresponding to the area below the separator cup 97. Each of the plurality of ultrasonic transducers 2 is provided on the upper surface of the water tank base 10b in such a manner that a portion of each is embedded within the water tank base 10b. In Figure 11, two ultrasonic transducers 2 are shown as the plurality of ultrasonic transducers 2.
[0010] A transport gas supply pipe 4 is provided on the lid 91a of the mist generating chamber 91, and the transport gas supply pipe 4 communicates with the mist generating space 91H through the opening h12 of the lid 91a of the mist generating chamber. Transport gas G4 is supplied from the transport gas supply pipe 4 to the mist generating space 91H inside the mist generating chamber 91.
[0011] In a conventional ultrasonic atomizing apparatus 200 with such a configuration, when an ultrasonic vibration operation is performed in which ultrasonic vibrations are applied from a plurality of ultrasonic transducers 2, the vibration energy of the ultrasonic incident wave W1 from the plurality of ultrasonic transducers 2 is transmitted to the raw material solution 15 in the raw material solution container via the ultrasonic transmission water 9 and the separator cup 97.
[0012] As a result, a liquid column rises from the surface of the raw material solution 15, the raw material solution 15 transforms into a mist, and raw material solution mist MT is obtained in the mist generation space 91H of the mist generation chamber 91. In this way, by performing an ultrasonic vibration operation in which an ultrasonic incident wave W1 is applied from the ultrasonic transducer 2, the raw material solution 15 is atomized and raw material solution mist MT is generated.
[0013] During ultrasonic vibration operation, the raw material solution mist MT generated in the mist generation space 91H of the mist generation chamber 91 is transported by the transport gas G4 supplied from the transport gas supply pipe 4 and supplied to a mist injection unit (not shown) from the pipe outlet 3X of the mist supply pipe 3.
[0014] International Publication No. 2015 / 019468
[0015] In the conventional ultrasonic atomizer 200 shown in Figure 11, a raw material aggregation phenomenon occurs during the generation period of the raw material solution mist MT. The raw material aggregation phenomenon will be described in detail below.
[0016] In the conventional ultrasonic atomizer 200 shown in Figure 11, the raw material solution 15 obtained by dissolving the raw material powder solidifies as time passes, and the raw materials in the raw material solution 15 solidify into relatively large particles called aggregated powder 95. This phenomenon, in which aggregated powder 95 is generated during the generation period of the raw material solution mist MT, is called the raw material aggregation phenomenon.
[0017] This raw material aggregation phenomenon becomes particularly pronounced when the raw material solution 15 contains any of carbon (C), barium (Ba), or strontium (Sr) as a raw material component.
[0018] Of the raw material solution 15 contained in the raw material solution container, the region located relatively close to one of the multiple ultrasonic transducers 2 and along the path of the ultrasonic incident wave W1 is a region where aggregated powder 95 is particularly likely to be generated.
[0019] When agglomerated powder 95 is generated, the density of the raw materials in the raw material solution 15 decreases due to the precipitation of the agglomerated powder 95, and the agglomerated powder 95 also obstructs the propagation of ultrasonic incident waves W1 from the multiple ultrasonic transducers 2, resulting in a decrease in the amount of mist generated, which is the amount of raw material solution mist MT produced.
[0020] When using such a conventional ultrasonic atomizing device to eject a raw material solution mist MT from the mist ejection section with a transport gas G4 and perform film formation on a substrate, as the amount of raw material solution mist MT generated decreases, uneven concentration of the raw materials contained in the raw material solution mist MT occurs, making it impossible to form a uniform film.
[0021] Thus, conventional ultrasonic atomizers, such as the ultrasonic atomizer 200 shown in Figure 11, have the problem that the amount of raw material solution mist MT produced decreases due to the occurrence of raw material aggregation.
[0022] This disclosure aims to provide an ultrasonic atomizing device that can solve the above-mentioned problems and generate raw material solution mist in a stable quantity.
[0023] The ultrasonic atomizing apparatus of this disclosure comprises a raw material solution container for containing a raw material solution, and an ultrasonic transducer provided below the raw material solution container. The apparatus further comprises a stirring drive unit which stirs the raw material solution in the raw material solution container by performing a predetermined stirring operation using an aggregation suppression member present in the raw material solution container, at least a portion of which is atomized by ultrasonic vibration by the ultrasonic transducer to generate a raw material solution mist.
[0024] The stirring drive unit of the ultrasonic atomizing apparatus of this disclosure stirs the raw material solution in the raw material solution container by performing a predetermined stirring operation using a coagulation suppression member in parallel with the raw material solution mist generation process.
[0025] Therefore, the ultrasonic atomizing apparatus of this disclosure can effectively suppress the aggregation phenomenon of raw materials, in which the raw materials in the raw material solution solidify as powder and form relatively large particles during the generation period of the raw material solution mist.
[0026] As a result, the ultrasonic atomizing device of this disclosure can generate a raw material solution mist with a stable mist generation rate.
[0027] The purpose, features, aspects, and advantages of this disclosure will become clearer from the following detailed description and accompanying drawings.
[0028] Figure 1 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device according to Embodiment 1. Figure 2 is a schematic diagram showing the planar arrangement of multiple ultrasonic transducers. Figure 3 is a schematic diagram showing the detailed planar structure of a single ultrasonic transducer. Figure 4 is a schematic diagram illustrating the structure of the A-A cross-section in Figure 3. Figure 5 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device according to Embodiment 2. Figure 6 is a schematic diagram illustrating the planar configuration of a magnetic rotation mechanism. Figure 7 is a schematic diagram illustrating the structure of the B-B cross-section in Figure 6. Figure 8 is a schematic diagram illustrating the planar configuration of a magnetic rotation mechanism within a water tank base. Figure 9 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device according to Embodiment 3. Figure 10 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device according to Embodiment 4. Figure 11 is a schematic diagram illustrating the configuration of a conventional ultrasonic atomizing device.
[0029] <Embodiment 1> Figure 1 is a schematic diagram illustrating the configuration of an ultrasonic atomizer 101 according to Embodiment 1 of the present disclosure. The XYZ Cartesian coordinate system is shown in Figure 1. The configuration of the ultrasonic atomizer 101 according to the present disclosure will be described below with reference to Figure 1.
[0030] In the ultrasonic atomizer 101, the mist generating chamber 1 and the separator cup 7 constitute a container for the raw material solution. The bottom surface of the raw material solution container becomes the bottom surface BP1 of the separator cup 7. Thus, in the ultrasonic atomizer 101 of the first embodiment, the raw material solution 15 is contained in the raw material solution container which is composed of the mist generating chamber 1 and the separator cup 7.
[0031] Examples of raw material solutions 15 include a raw material solution containing dissolved carbon (C) powder, a raw material solution containing dissolved barium (Ba) precursor, and a raw material solution containing dissolved strontium (Sr) precursor.
[0032] The cup support stand 7b is provided on the upper surface of the water tank 10 and supports the separator cup 7 such that its bottom surface BP1 is immersed in the ultrasonically transmitted water 9. The separator cup 7 and the mist generating chamber 1 are connected by a connection part 5 and are integrated as a container for the raw material solution.
[0033] A cover 1a for the mist generating chamber is provided above the mist generating chamber 1 so as to block the mist generating space 1H. The cover 1a for the mist generating chamber has three openings h1 to h3 as through-holes.
[0034] A mist supply pipe 3 is provided on the lid 1a for the generation chamber. The mist supply pipe 3 is located above the separator cup 7 and communicates with the mist generation space 1H through the opening h1 of the lid 1a for the generation chamber. The pipe outlet 3X of the mist supply pipe 3 is connected to a mist ejection unit such as a nozzle (not shown) via a mist supply pipe (not shown). Therefore, the raw material solution mist MT generated in the raw material solution container of the ultrasonic atomizer 101 is supplied to the mist ejection unit via the mist supply pipe 3, and the raw material solution mist MT is ejected from the mist ejection unit.
[0035] The ultrasonic atomizer 101 further includes a water tank 10 that contains ultrasonic transmission water 9, which serves as an ultrasonic transmission medium. The water tank 10 and the separator cup 7 are positioned and fixed by a cup support base 7b such that the bottom surface BP1 of the separator cup 7 is immersed in the ultrasonic transmission water 9. Thus, the ultrasonic atomizer 101 of the first embodiment employs a double-chamber system including a mist generation chamber 1, a separator cup 7, and a water tank 10.
[0036] A plurality of ultrasonic transducers 2 are provided on the upper surface of the aquarium base 10b, which is the bottom surface of the aquarium 10, corresponding to the area below the separator cup 7. Each of the plurality of ultrasonic transducers 2 is provided on the upper surface of the aquarium base 10b in such a manner that a portion of it is embedded within the aquarium base 10b.
[0037] A transport gas supply pipe 4 is provided on the lid 1a of the mist generating chamber 1, and the transport gas supply pipe 4 communicates with the mist generating space 1H through an opening h2 in the lid 1a of the mist generating chamber. Therefore, the transport gas G4 can be supplied from the transport gas supply pipe 4 to the mist generating space 1H in the mist generating chamber 1. A gas control device (not shown) is attached to the transport gas supply pipe 4, and the flow rate of the transport gas G4 supplied to the mist generating chamber 1 is controlled by the gas control device.
[0038] Figure 2 is a schematic diagram illustrating the planar arrangement of multiple ultrasonic transducers 2, Figure 3 is a schematic diagram illustrating the planar structure of one of the four ultrasonic diaphragms 22 shown in Figure 2, and Figure 4 is a schematic diagram illustrating the structure of the A-A cross-section in Figure 3. Figures 2 and 3 each show the XYZ Cartesian coordinate system. Furthermore, Figures 3 and 4 each show a virtual XYZ Cartesian coordinate system. The virtual XYZ Cartesian coordinate system consists of a virtual axis VX where the horizontal direction in Figure 3 is the virtual X direction, a virtual axis VY where the vertical direction in Figure 3 is the virtual Y direction, and an axis Z that coincides with the axis Z of the XYZ Cartesian coordinate system shown in Figures 1 and 2.
[0039] As shown in Figure 2, four ultrasonic transducers 2A to 2D are provided on the water tank base 10b as a plurality of ultrasonic transducers 2. Each of the ultrasonic transducers 2A to 2D has an ultrasonic vibrating plate 22.
[0040] As shown in Figures 2 and 3, on the water tank base 10b of the water tank 10, the ultrasonic diaphragms 22 of the four ultrasonic transducers 2A to 2D are arranged in a ring shape along the outer circle of a distance DS centered on the reference point C10, at approximately equal intervals (approximately 90-degree intervals).
[0041] In this way, the four ultrasonic transducers 2A to 2D are arranged discretely from each other such that the distance DS from the center point C10, which is the reference point of the water tank base 10b of the water tank 10, to the center point C22 of the ultrasonic diaphragm 22 is the same.
[0042] As shown in Figures 3 and 4, the ultrasonic transducer 2A includes an ultrasonic diaphragm 22 and a diaphragm holding member 25 as its main components. The ultrasonic diaphragm 22 is fixed in a slightly tilted position by the diaphragm holding member 25. The diaphragm holding member 25 is composed of, for example, a base for the ultrasonic diaphragm 22 (not shown) and a support rubber provided on the base to support the ultrasonic diaphragm 22.
[0043] Specifically, the ultrasonic diaphragm 22 of the ultrasonic transducer 2A is inclined at the same angle θ2 in the direction approaching the center point C10 (the -VY direction side). Note that the ultrasonic transducers 2B to 2D also have the same structure as the ultrasonic transducer 2A. Therefore, the ultrasonic diaphragms 22 of the plurality of ultrasonic transducers 2A to 2D are inclined at the same angle θ2 on the side in the direction approaching the center point C10 with respect to the horizontal direction (the direction defined in the XY plane). The angle θ2 is a significant angle that is not "0".
[0044] Embodiment 1 is further characterized by having a stirring motor 11 and a stirring rod 12. The stirring motor 11, which is a driving unit for stirring, is disposed on the lid 1a for the generation chamber.
[0045] The stirring rod 12 serving as an aggregation suppression member is a rod-shaped member having one end and the other end. One end is connected to the stirring motor 11, and a part of the other end side of the stirring rod 12 is immersed in the raw material solution 15. The region of the stirring rod 12 immersed in the raw material solution 15 is defined as a solution immersion region.
[0046] The stirring motor 11 is connected to one end of the stirring rod 12 and executes a stirring rod rotation operation of rotating the stirring rod 12 along the rotation direction R1 with the longitudinal direction (Z direction) of the stirring rod 12 as the rotation axis. The lid 1a for the generation chamber has an opening h3 through which the stirring rod 12 can rotate. That is, a part of one end side of the stirring rod 12 is rotatably provided in the opening h3. At the same time, the stirring motor 11 performs a stirring rod rotation operation along the rotation direction R1 of the stirring rod 12, thereby stirring the raw material solution 15 in the raw material solution container.
[0051] In other words, the ultrasonic atomizing device 101 of Embodiment 1 performs the process of generating the raw material solution mist MT and simultaneously rotates the stirring rod using the stirring motor 11.
[0052] When the ultrasonic incident wave W1 is transmitted to the raw material solution 15, a liquid column rises from the surface of the raw material solution 15, the raw material solution 15 is converted into a mist, and raw material solution mist MT is obtained in the mist generation space 1H of the mist generation chamber 1. In this way, by performing an ultrasonic vibration operation in which ultrasonic incident waves W1 are applied from multiple ultrasonic transducers 2, the raw material solution 15 is atomized and raw material solution mist MT is generated.
[0053] During ultrasonic vibration operation, the raw material solution mist MT generated in the mist generation chamber 1 is transported by the transport gas G4 supplied from the transport gas supply pipe 4 and supplied to a mist injection unit (not shown) from the pipe outlet 3X of the mist supply pipe 3.
[0054] In the ultrasonic atomizing apparatus 101 of Embodiment 1 with this configuration, the stirring motor 11, which is the stirring drive unit, performs the above-described stirring rod rotation operation in parallel with the raw material solution mist MT generation process as a predetermined stirring operation using the stirring rod 12, which is the aggregation suppression member.
[0055] The stirring motor 11 rotates the stirring rod 12, stirring the raw material solution 15 in the raw material solution container, which includes the mist generating chamber 1 and the separator cup 7.
[0056] Therefore, the ultrasonic atomizer 101 of Embodiment 1 can effectively suppress the aggregation phenomenon of raw materials, in which the raw materials in the raw material solution 15 solidify as powder and form relatively large particles during the generation period of the raw material solution mist MT.
[0057] This is because, although the raw materials dissolved in the raw material solution 15 tend to return to a powder state over time, the rotation of the stirring rod 12 stirs the raw material solution 15, making it easier to dissolve, thus preventing it from returning to a powder state. In addition, even if relatively small powder particles are generated by the aggregation of the raw materials, stirring with the stirring rod 12 can further refine the powder and ultimately dissolve it in the raw material solution 15.
[0058] As a result, the ultrasonic atomizer 101 of Embodiment 1 can maintain a constant amount of raw material solution mist MT produced. In other words, the ultrasonic atomizer 101 of Embodiment 1 can produce raw material solution mist MT with a stable amount of mist produced.
[0059] This is because the rotational motion of the stirring rod 12 does not cause the raw material to aggregate, thus maintaining a constant raw material density in the raw material solution 15 and not hindering the propagation of ultrasonic incident waves W1 from the multiple ultrasonic transducers 2.
[0060] Furthermore, the stirring motor 11, which is the stirring drive unit of the ultrasonic atomizing device 101 in Embodiment 1, performs a stirring rod rotation operation on the stirring rod 12, which is the agglomeration suppression member, by rotating the stirring rod 12 with the longitudinal direction of the stirring rod 12 as the axis of rotation.
[0061] Therefore, the ultrasonic atomizing device 101 of Embodiment 1 can stir the raw material solution 15 in the raw material solution container using the solution immersion region of the stirring rod 12 as a stirring source by the rotational movement of the stirring rod, thereby effectively suppressing the raw material aggregation phenomenon of the raw material solution 15.
[0062] The ultrasonic atomizing device 101 of Embodiment 1 has four ultrasonic transducers 2A to 2D as multiple ultrasonic transducers 2, so that multiple ultrasonic incident waves W1 are transmitted to the raw material solution 15 in the raw material solution container, a relatively large volume of raw material solution mist MT can be generated.
[0063] Furthermore, in the first embodiment, the ultrasonic atomizing device 101 has the stirring rod 12 positioned so as not to receive the multiple ultrasonic incident waves W1 transmitted by the ultrasonic vibration operation of the multiple ultrasonic transducers 2. Therefore, the presence of the stirring rod 12 does not adversely affect the generation of the raw material solution mist MT.
[0064] In addition, since the ultrasonic diaphragms 22 of each of the multiple ultrasonic transducers 2 in the ultrasonic atomizer 101 of Embodiment 1 are tilted at the same angle θ2 toward the direction approaching the center point C10 with respect to the horizontal direction, the ultrasonic transmission space to which multiple ultrasonic incident waves W1 are transmitted within the raw material solution container can be set to a central local space.
[0065] Therefore, by arranging the stirring rod 12 in the raw material solution container while avoiding the ultrasonic transmission space, it is relatively easy to achieve an arrangement of the stirring rod 12 that does not receive any of the multiple ultrasonic incident waves W1.
[0066] The ultrasonic atomizing device 101 of Embodiment 1 employs a double-chamber system including a water tank 10, a separator cup 7, and a mist generating chamber 1, and can effectively suppress the above-mentioned raw material aggregation phenomenon.
[0067] <Embodiment 2> Figure 5 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device 102 according to Embodiment 2 of the present disclosure. The XYZ Cartesian coordinate system is shown in Figure 5.
[0068] In the following description, components similar to those in the ultrasonic atomizer 101 of Embodiment 1 shown in Figures 1 to 4 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The focus will be on describing the features of the ultrasonic atomizer 102 of Embodiment 2.
[0069] A cover 1a for the mist generating chamber is provided above the mist generating chamber 1 so as to block the mist generating space 1H. The cover 1a for the mist generating chamber has two openings h1 and h2 as through-holes.
[0070] The ultrasonic atomizing device 102 of the second embodiment is characterized by having a stirring bar 17 as an aggregation suppression member on the bottom surface BP1 of the separator cup 7, a rotating mechanism base 28 on the lower side of the water tank base 10b, and a magnetic rotation mechanism 30 inside the rotating mechanism base 28.
[0071] A configuration utilizing magnetic force, including the stirring bar 17 and the magnetic rotation mechanism 30 (rotating magnet 20), is generally called a "magnetic stirrer." Note that the rotating magnet 20 is a schematic representation of the magnet pairs 36 and 37, which will be described later and are actually installed within the magnetic rotation mechanism 30.
[0072] The agitator 17, which is an aggregation suppression member, is positioned on the bottom surface of the raw material solution container, and the agitator 17 contains a magnet. Therefore, the agitator 17 is entirely located within the raw material solution container, making it an aggregation suppression member.
[0073] As shown in Figure 5, the stirring bar 17 is positioned so as not to receive all of the multiple ultrasonic incident waves W1 from the multiple ultrasonic transducers 2. As shown in Figure 2, since the ultrasonic diaphragms 22 of each of the ultrasonic transducers 2A to 2D are arranged at equal intervals around the center point C10, it is desirable to position the stirring bar 17 on the center point C10 when viewed from above.
[0074] The magnetic rotation mechanism 30, which is the drive unit for stirring, is installed inside the rotating mechanism base 28 outside the raw material solution container and performs a stirring bar rotation operation that rotates the stirring bar 17 using magnetic force. In other words, the magnetic rotation mechanism 30 performs a stirring bar rotation operation as a predetermined stirring operation using the stirring bar 17.
[0075] Figure 6 is a schematic diagram illustrating the planar configuration of the magnetic rotation mechanism 30, Figure 7 is a schematic diagram illustrating the structure of the B-B cross-section in Figure 6, and Figure 8 is a schematic diagram illustrating the planar configuration of the magnetic rotation mechanism 30 within the water tank base 10b. The XYZ Cartesian coordinate system is shown in Figures 6 to 8.
[0076] As shown in these figures, the rotating mechanism base 28 is provided below the water tank base 10b, and a magnetic rotation mechanism 30 is provided in a part of the rotating mechanism base 28.
[0077] As shown in Figures 6 and 7, the magnetic rotation mechanism 30 mainly includes a mechanism base 31, a motor 32, a pulley 33, a turntable 34, a magnet pair rotation shaft 35, and magnet pairs 36 and 37. As mentioned above, the rotating magnet 20 shown in Figure 5 schematically represents the magnet pairs 36 and 37 shown in Figures 6 and 7.
[0078] The motor 32 is mounted on the mechanism base 31 and performs a motor rotation operation that rotates the motor rotation shaft 32a. The magnet pair rotation shaft 35 has a bearing portion 35b and supports the turntable 34 so that it can rotate with the bearing portion 35b as the center of rotation. As shown in Figure 8, the magnet pair rotation shaft 35 is positioned so that its center coincides with the center point C10 of the multiple ultrasonic transducers 2 when viewed from above.
[0079] The rotating platform 34 has magnet pairs 36 and 37 positioned opposite each other, with the magnet pair rotating shaft 35 (bearing portion 35b) in between.
[0080] Therefore, as the turntable 34 rotates, the magnet pairs 36 and 37 also rotate. Note that magnet 36 is the south pole and magnet 37 is the north pole.
[0081] The motor rotation shaft 32a and the outer periphery of the turntable 34 are connected via the pulley 33. As a result of the motor rotation operation by the motor 32, the rotation of the motor rotation shaft 32a is transmitted to the turntable 34 via the pulley 33, causing the turntable 34 to rotate.
[0082] The magnetic rotation mechanism 30 with this configuration performs a stirring bar rotation operation. The stirring bar rotation operation is performed by causing the motor 32 to perform a motor rotation operation, which rotates the turntable 34 via the pulley 33, thereby rotating the magnet pairs 36 and 37 around the magnet pair rotation axis 35 as the center of rotation. In Figure 5, the rotation operation of the south pole and north pole magnet pairs 36 and 37 is illustrated as a rotation operation along the rotation direction R3 of the rotating magnet 20.
[0083] Following the rotational movement of the rotating magnets 20 (magnet pairs 36 and 37) along the rotational direction R3, the stirring bar 17, which encloses the magnets, rotates along the rotational direction R2 within the raw material solution 15. The rotation of the stirring bar 17 present within the raw material solution 15 stirs the raw material solution 15 in the container for the raw material solution.
[0084] Thus, the ultrasonic atomizer 102 of the second embodiment has a function called a magnetic stirrer, and the stirring bar rotation operation by the magnetic rotation mechanism 30, which is the stirring drive unit, can stir the raw material solution 15 using the stirring bar 17, which is the agglomeration suppression member, as the stirring source.
[0085] Therefore, the rotational operation of the stirring bar 17 by the magnetic rotation mechanism 30 becomes the predetermined stirring operation by the stirring drive unit.
[0086] In other words, the ultrasonic atomizing device 102 of the second embodiment performs the stirring bar rotation operation by the magnetic rotation mechanism 30 simultaneously with the generation process of the raw material solution mist MT.
[0087] Therefore, the ultrasonic atomizer 102 of Embodiment 2, like Embodiment 1, can effectively suppress the aggregation phenomenon of raw materials during the generation period of the raw material solution mist MT.
[0088] As a result, the ultrasonic atomizer 102 of Embodiment 2 can generate raw material solution mist MT in a stable amount, similar to Embodiment 1.
[0089] In the ultrasonic atomizing apparatus 102 of Embodiment 2, the magnetic rotation mechanism 30 uses a rotating magnet 20 (magnet pair 36 and 37) to rotate the agitator 17, which is placed on the bottom surface BP1 of the raw material solution container, as a predetermined stirring operation.
[0090] Therefore, in the second embodiment, the ultrasonic atomizing device 102 can stir the raw material solution 15 in the raw material solution container using the stirring bar 17 as a stirring source by the stirring bar rotation operation of the magnetic rotation mechanism 30, thereby effectively suppressing the aggregation phenomenon of the raw material in the raw material solution 15.
[0091] Furthermore, in the second embodiment, the ultrasonic atomizer 102 has the agitator 17 positioned so as not to receive the multiple ultrasonic incident waves W1 transmitted by the ultrasonic vibration operation of the multiple ultrasonic transducers 2. Therefore, the presence of the agitator 17 does not adversely affect the generation of the raw material solution mist MT.
[0092] In addition, in the ultrasonic atomizing apparatus 102 of the second embodiment, since the ultrasonic diaphragm 22 of each of the multiple ultrasonic transducers 2 is tilted at the same angle θ2 toward the direction approaching the center point C10 with respect to the horizontal direction, it is relatively easy to realize an arrangement of the agitator 17 that does not receive all of the multiple ultrasonic incident waves W1.
[0093] Furthermore, the ultrasonic atomizer 102 of Embodiment 2, like Embodiment 1, employs a double-chamber system and can effectively suppress the above-mentioned raw material aggregation phenomenon.
[0094] <Embodiment 3> Figure 9 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device 103, which is Embodiment 3 of the present disclosure. The XYZ Cartesian coordinate system is shown in Figure 9.
[0095] In the following description, components similar to those in the ultrasonic atomizer 101 of Embodiment 1 shown in Figures 1 to 4 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The focus will be on describing the features of the ultrasonic atomizer 103 of Embodiment 3.
[0096] A cover 1a for the mist generating chamber is provided above the mist generating chamber 1 so as to block the mist generating space 1H. The cover 1a for the mist generating chamber has three openings h1, h2, and h4 as through-holes. Opening h4 is provided to allow the agitated gas supply pipe 6, which will be described later, to pass through.
[0097] The ultrasonic atomizing device 103 of Embodiment 3 is characterized by having a stirring gas supply mechanism 50 and a stirring gas supply pipe 6. The stirring gas supply mechanism 50, which is the stirring drive unit, supplies stirring gas G6 into the raw material solution 15 in the raw material solution container via the stirring gas supply pipe 6.
[0098] The stirring gas supply pipe 6, which serves as a coagulation suppression member, is a tubular member having openings 6a and 6b at both ends. It receives stirring gas G6 through opening 6a, and opening 6b of the stirring gas supply pipe 6 is immersed in the raw material solution 15. For example, an inert gas such as nitrogen can be used as the stirring gas G6.
[0099] Thus, the stirring gas supply pipe 6, which is a coagulation suppression member, is a tubular member having openings 6a and 6b as one opening and the other opening as the other opening, and stirring gas G6 can flow between openings 6a and 6b. The opening 6a of the stirring gas supply pipe 6 is located outside the raw material solution container, and the opening 6b is immersed in the raw material solution 15.
[0100] The aforementioned agitated gas supply pipe 6 is a flocculation suppression member that is located inside the raw material solution container for the majority of its length (except for the opening h4 and the lid 1a for the generation chamber).
[0101] The stirring gas supply mechanism 50, which is the stirring drive unit, supplies stirring gas G6 to the opening 6a of the stirring gas supply pipe 6 and performs a gas supply operation within the raw material solution, outputting the stirring gas G6 to the raw material solution 15 from the opening 6b.
[0102] As mentioned above, the lid 1a for the generation chamber has an opening h4 for passing the stirring gas supply pipe 6 through. That is, the stirring gas G6 can be circulated in such a manner that the opening 6a of the stirring gas supply pipe 6 is located outside the raw material solution container, and the opening 6b is immersed in the raw material solution 15.
[0103] As shown in Figure 9, the agitated gas supply pipe 6 is positioned so as not to receive all of the multiple ultrasonic incident waves W1 from the multiple ultrasonic transducers 2.
[0104] Thus, the ultrasonic atomizing device 103 of Embodiment 3 can stir the raw material solution 15 using the stirring gas G6 output from the opening 6b of the stirring gas supply pipe 6, which is a flocculation suppression member, as the stirring source, through the gas supply operation of the stirring gas supply mechanism 50, which is a stirring drive unit, into the raw material solution.
[0105] Therefore, the gas supply operation within the raw material solution by the stirring gas supply mechanism 50 becomes the predetermined stirring operation of the stirring drive unit using the stirring gas supply pipe 6. In other words, the ultrasonic atomizer 103 of Embodiment 3 performs the gas supply operation within the raw material solution by the stirring gas supply mechanism 50 simultaneously with the raw material solution mist MT generation process.
[0106] Furthermore, since an inert gas such as nitrogen is used as the stirring gas G6, the properties of the raw material solution 15 will not change due to the gas supply operation within the raw material solution.
[0107] Therefore, the ultrasonic atomizing device 103 of Embodiment 3, like Embodiments 1 and 2, can effectively suppress the aggregation phenomenon of raw materials during the generation period of the raw material solution mist MT.
[0108] As a result, the ultrasonic atomizer 103 of Embodiment 3 can generate raw material solution mist MT in a stable amount, similar to Embodiments 1 and 2.
[0109] In addition, the stirring gas supply mechanism 50 in the ultrasonic atomizing device 103 of Embodiment 3 performs a predetermined stirring operation by supplying stirring gas G6 into the raw material solution 15 contained in the raw material solution container via the stirring gas supply pipe 6, which is a flocculation suppression member.
[0110] Therefore, in the ultrasonic atomizing device 103 of Embodiment 3, the stirring gas supply mechanism 50 is supplied into the raw material solution 15 in the raw material solution container by the operation of supplying gas into the raw material solution, and the stirring gas G6 is used as a stirring source to stir the raw material solution 15, thereby effectively suppressing the aggregation phenomenon of the raw material in the raw material solution 15.
[0111] Furthermore, in the ultrasonic atomizing device 103 of Embodiment 3, the stirring gas supply pipe 6 is positioned so as not to receive the multiple ultrasonic incident waves W1 transmitted by the ultrasonic vibration operation of the multiple ultrasonic transducers 2. Therefore, the presence of the stirring gas supply pipe 6 does not adversely affect the generation of the raw material solution mist MT.
[0112] In addition, in the ultrasonic atomizing apparatus 103 of Embodiment 3, similar to Embodiment 1, the ultrasonic diaphragm 22 of each of the multiple ultrasonic transducers 2 is tilted at the same angle θ2 toward the direction approaching the center point C10 with respect to the horizontal direction. Therefore, it is relatively easy to arrange the agitated gas supply pipe 6 so that it does not receive all of the multiple ultrasonic incident waves W1.
[0113] Furthermore, the ultrasonic atomizer 103 of Embodiment 3, like Embodiments 1 and 2, employs a double-chamber system and can effectively suppress the above-mentioned raw material aggregation phenomenon.
[0114] <Embodiment 4> Figure 10 is a schematic diagram illustrating the configuration of an ultrasonic atomizing device 104, which is Embodiment 4 of the present disclosure. The XYZ Cartesian coordinate system is shown in Figure 10.
[0115] In the following description, components similar to those in the ultrasonic atomizer 101 of Embodiment 1 shown in Figures 1 to 4 will be denoted by the same reference numerals, and their descriptions will be omitted as appropriate. The focus will be on describing the features of the ultrasonic atomizer 104 of Embodiment 4.
[0116] A lid 1a for the mist generating chamber is provided above the mist generating chamber 1 so as to block the mist generating space 1H. The lid 1a for the mist generating chamber has four openings h1, h2, h5 and h6 as through-holes. Opening h5 is provided for the raw material solution supply pipe 47 to pass through, and opening h6 is provided for the raw material solution discharge pipe 48 to pass through.
[0117] The ultrasonic atomizing apparatus 104 of Embodiment 4 is characterized by having a raw material tank 40, a raw material solution supply mechanism 51, a raw material solution discharge mechanism 52, a raw material solution supply pipe 47, and a raw material solution discharge pipe 48.
[0118] The raw material tank 40 is provided independently of the raw material solution container and contains the raw material solution 15 separately from the raw material solution container.
[0119] One of the aggregation suppression members, the raw material solution supply pipe 47, is a tubular member having openings 47a and 47b at both ends. The raw material solution 15 is taken in through opening 47a, and opening 47b of the raw material solution supply pipe 47 is immersed in the raw material solution 15. In other words, the raw material solution supply pipe 47 has opening 47b, which is a solution output port, and opening 47b is immersed in the raw material solution 15 contained in the raw material solution container. In Figure 10, the position of opening 47b of the raw material solution supply pipe 47 is set below the cup support base 7b.
[0120] Thus, the raw material solution supply pipe 47, which is one of the aggregation suppression members, has openings 47a and 47b, and the raw material solution 15 can flow between openings 47a and 47b. The opening 47a of the raw material solution supply pipe 47 is located outside the raw material solution container, and the opening 47b, which is the solution output port, is immersed in the raw material solution 15.
[0121] Another aggregation suppression member, the raw material solution discharge pipe 48, is a tubular member having openings 48a and 48b at both ends. The opening 48b of the raw material solution discharge pipe 48 is immersed in the raw material solution 15, and the raw material solution 15 is taken out from the opening 48b. In other words, the raw material solution discharge pipe 48 has an opening 48b which is a solution inlet, and the opening 48b is immersed in the raw material solution 15 contained in the raw material solution container. In Figure 10, the position of the opening 48b of the raw material solution discharge pipe 48 is set below the cup support base 7b.
[0122] Thus, the raw material solution discharge pipe 48, which is another aggregation suppression member, has openings 47a and 47b, and the raw material solution 15 can flow between openings 47a and 47b. The opening 47a of the raw material solution discharge pipe 48 is located outside the raw material solution container, and the opening 47b, which is the solution inlet, is immersed in the raw material solution 15.
[0123] Furthermore, the raw material solution supply pipe 47 and the raw material solution discharge pipe 48 are positioned opposite each other in a plan view, with the center point C10, which is the reference point of the water tank base 10b, in between. In addition, the height of the opening 47b of the raw material solution supply pipe 47 and the opening 48b of the raw material solution discharge pipe 48 are aligned.
[0124] The raw material solution supply pipe 47 described above is an aggregation suppression member that is located inside the raw material solution container for the majority of its length (except for the opening h5 and the lid 1a for the generation chamber). The raw material solution discharge pipe 48 described above is an aggregation suppression member that is located inside the raw material solution container for the majority of its length (except for the opening h6 and the lid 1a for the generation chamber).
[0125] The raw material solution supply mechanism 51 mainly includes a tank-side raw material solution supply pipe 41, a supply relay pipe 43, and a supply-side pump 45. The tank-side raw material solution supply pipe 41 is positioned from inside the raw material tank 40 to outside the raw material tank 40 so that the raw material solution 15 inside the raw material tank 40 can be supplied to the outside.
[0126] The raw material solution supply pipe 41 on the tank side and the supply relay pipe 43 are connected in a way that allows the raw material solution 15 to flow through them, and the supply relay pipe 43 and the raw material solution supply pipe 47 are also connected in a way that allows the raw material solution 15 to flow through them. A portion of the tank side raw material solution supply pipe 41 is immersed in the raw material solution 15 contained in the raw material tank 40.
[0127] The supply-side pump 45, located in the center of the supply relay pipe 43, performs a raw material solution supply operation, which involves supplying the raw material solution 15 from the raw material tank 40 along the raw material supply direction D1, via the tank-side raw material solution supply pipe 41, the supply relay pipe 43, and the raw material solution supply pipe 47, and finally outputting the raw material solution 15 into the raw material solution container from the opening 47b, which is the solution output port. In this way, the supply-side pump 45 performs a raw material solution supply operation, which involves supplying the raw material solution 15 from the raw material tank 40 to the raw material solution container via the raw material solution supply pipe 47.
[0128] The raw material solution discharge mechanism 52 mainly includes a tank-side raw material solution discharge pipe 42, a discharge relay pipe 44, and a discharge-side pump 46. The tank-side raw material solution discharge pipe 42 is positioned from inside the raw material tank 40 to outside the raw material tank 40 so that the raw material solution 15 can be discharged from the raw material solution container to the raw material tank 40.
[0129] The raw material solution discharge pipe 42 on the tank side and the discharge relay pipe 44 are connected in a way that allows the raw material solution 15 to flow through them, and the discharge relay pipe 44 and the raw material solution discharge pipe 48 are connected in a way that allows the raw material solution 15 to flow through them.
[0130] The discharge-side pump 46, located in the center of the discharge relay pipe 44, takes in the raw material solution 15 from the raw material solution container through the opening 47b, which is the solution inlet, and performs a raw material solution discharge operation, discharging it into the raw material tank 40 via the raw material solution discharge pipe 48, the discharge relay pipe 44, and the tank-side raw material solution discharge pipe 42 along the raw material discharge direction D2. In this way, the discharge-side pump 46 performs a raw material solution discharge operation, discharging it from the raw material solution container to the raw material tank 40 via the raw material solution discharge pipe 48.
[0131] The supply rate V45 of the raw material solution 15 per unit time by the supply-side pump 45 and the discharge rate V46 of the raw material solution 15 per unit time by the discharge-side pump 46 are set to be the same. If there is a difference in magnitude between the supply rate V45 and the discharge rate V46, it is undesirable because it may affect the raw material concentration of the raw material solution 15 in the raw material solution container. The supply rate V45 and the discharge rate V46 can be adjusted by using the rotation speed of the motors built into the supply-side pump 45 and the discharge-side pump 46, respectively.
[0132] Thus, the ultrasonic atomizing device 104 of Embodiment 4 has a raw material solution supply mechanism 51 and a raw material solution discharge mechanism 52 as stirring drive units.
[0133] The raw material solution supply mechanism 51 performs a raw material solution supply operation along the raw material supply direction D1, supplying the raw material solution 15 from the raw material tank 40 into the raw material solution container via the raw material solution supply pipe 47. Therefore, new raw material solution 15 is supplied from the opening 47b of the raw material solution supply pipe 47, which is the end point of the raw material supply direction D1.
[0134] The raw material solution discharge mechanism 52 performs a raw material solution discharge operation along the raw material discharge direction D2, discharging the raw material solution 15 in the raw material solution container to the raw material tank 40 via the raw material solution discharge pipe 48. Therefore, the raw material solution 15 in the raw material solution container is discharged from the opening 48b of the raw material solution discharge pipe 48, which is the starting point of the raw material discharge direction D2.
[0135] As shown in Figure 10, both the raw material solution supply pipe 47 and the raw material solution discharge pipe 48 are positioned so as not to receive all of the multiple ultrasonic incident waves W1 from the multiple ultrasonic transducers 2.
[0136] As described above, the ultrasonic atomizer 104 of Embodiment 4 performs a raw material solution circulation operation in which the raw material solution 15 is circulated between the raw material solution container and the raw material tank 40 outside the raw material solution container by a combination of the raw material solution supply operation by the raw material solution supply mechanism 51 and the raw material solution discharge operation by the raw material solution discharge mechanism 52.
[0137] As the raw material solution circulation operation is performed, the new raw material solution 15 output from the opening 47b of the raw material solution supply pipe 47, which is one of the aggregation suppression members, can be used as a stirring source to stir the raw material solution 15 already present in the raw material solution container.
[0138] Furthermore, in order to obtain sufficient stirring effect of the raw material solution 15, it is desirable to set the supply amount V45 and discharge amount V46 to "1 L / min" or more.
[0139] In Embodiment 4, the combination of the raw material solution supply operation by the raw material solution supply mechanism 51 and the raw material solution discharge operation by the raw material solution discharge mechanism 52 constitutes a predetermined stirring operation of the stirring drive unit utilizing the raw material solution supply pipe 47 and the raw material solution discharge pipe 48.
[0140] In other words, the ultrasonic atomizing device 104 of Embodiment 4 performs a combined operation of supplying the raw material solution by the raw material solution supply mechanism 51 and discharging the raw material solution by the raw material solution discharge mechanism 52, simultaneously with the generation process of the raw material solution mist MT.
[0141] Therefore, the ultrasonic atomizing device 104 of Embodiment 4, like Embodiments 1 to 3, can effectively suppress the aggregation phenomenon of raw materials during the generation period of the raw material solution mist MT.
[0142] As a result, the ultrasonic atomizer 104 of Embodiment 4 can generate raw material solution mist MT in a stable amount, similar to Embodiments 1 to 3.
[0143] The stirring drive unit of the ultrasonic atomizer 104 in Embodiment 4 includes a raw material solution supply mechanism 51 and a raw material solution discharge mechanism 52. The raw material solution supply mechanism 51 performs the raw material solution supply operation described above, and the raw material solution discharge mechanism 52 performs the raw material solution discharge operation described above. That is, when the raw material solution supply operation is performed, a new raw material solution 15 is output from the opening 47b of the raw material solution supply pipe 47, and when the raw material solution discharge operation is performed, the raw material solution 15 in the raw material solution container is taken in from the opening 48b of the raw material solution discharge pipe 48.
[0144] Therefore, by combining the raw material solution supply operation and the raw material solution discharge operation, a raw material solution circulation operation can be performed in which the raw material solution 15 is circulated between the container for the raw material solution and the raw material tank 40 outside the container for the raw material solution.
[0145] As a result, the ultrasonic atomizing device 104 of Embodiment 4 can effectively suppress the aggregation phenomenon of the raw materials in the raw material solution 15 by using the new raw material solution 15 supplied from the raw material tank 40 into the raw material solution container as the main stirring source.
[0146] Furthermore, since the raw material solution supply pipe 47 and the raw material solution discharge pipe 48 are positioned opposite each other with respect to the center point C10 in a plan view, it is expected that the stirring effect of the raw material solution 15 will be enhanced.
[0147] In addition, the ultrasonic atomizing device 104 of Embodiment 4 can manage the environment of the raw material solution 15 in the raw material tank 40 independently of the environment of the raw material solution 15 in the raw material solution container, so it is expected that the raw material solution supply operation and raw material solution discharge operation can be controlled with good precision.
[0148] Furthermore, the amount V45 supplied per unit time of the raw material solution 15 to the raw material solution container by the supply pump 45 is set to be the same as the amount V46 discharged per unit time of the raw material solution 15 from the raw material solution container by the discharge pump 46.
[0149] Therefore, the amount of raw material solution 15 in the raw material solution container does not increase or decrease as a result of the raw material solution supply operation and raw material solution discharge operation. Accordingly, the ultrasonic atomizer 104 of Embodiment 4 can generate raw material solution mist MT without being affected by the raw material solution supply operation and raw material solution discharge operation.
[0150] Furthermore, in the ultrasonic atomizing device 104 of Embodiment 4, the raw material solution supply pipe 47 and the raw material solution discharge pipe 48 are positioned so as not to receive the multiple ultrasonic incident waves W1 transmitted by the ultrasonic vibration operation of the multiple ultrasonic transducers 2. Therefore, the presence of the raw material solution supply pipe 47 and the raw material solution discharge pipe 48 does not adversely affect the generation of the raw material solution mist MT.
[0151] In addition, in the ultrasonic atomizing apparatus 104 of Embodiment 4, similar to Embodiment 1, the ultrasonic diaphragm 22 of each of the multiple ultrasonic transducers 2 is tilted at the same angle θ2 toward the direction approaching the center point C10 with respect to the horizontal direction. Therefore, it is relatively easy to arrange the raw material solution supply pipe 47 and raw material solution discharge pipe 48 so that they do not receive all of the multiple ultrasonic incident waves W1.
[0152] Furthermore, the ultrasonic atomizer 104 of Embodiment 4, like Embodiments 1 to 3, employs a double-chamber system and can effectively suppress the above-mentioned raw material aggregation phenomenon.
[0153] <Other> Although this disclosure has been described in detail, the above description is illustrative in all respects and the disclosure is not limited thereto. It is understood that countless variations not illustrated may be conceivable without falling outside the scope of this disclosure.
[0154] Specifically, the system may be configured by combining two or more ultrasonic atomizers 101 to 104 shown in Embodiments 1 to 4. For example, a modified example can be considered in which the ultrasonic atomizer 102 of Embodiment 2 and the ultrasonic atomizer 104 of Embodiment 4 are combined.
[0155] The above modified ultrasonic atomizer is expected to further enhance the effect of suppressing the aggregation phenomenon of raw materials by performing in parallel a first stirring process in which a new raw material solution 15 is taken in from an external raw material tank 40 and a second stirring process in which a stirrer 17 is rotated in the center of the raw material solution 15 contained in the raw material solution container.
[0156] 1. Mist generation chamber 2, 2A-2D. Ultrasonic transducer 3. Mist supply pipe 4. Conveyor gas supply pipe 6. Agitation gas supply pipe 7. Separator cup 9. Ultrasonic transmission water 10. Water tank 11. Agitation motor 12. Agitation rod 17. Agitator 20. Rotating magnet 22. Ultrasonic vibrator 30. Magnetic rotation mechanism 36, 37. Magnet 40. Raw material tank 45. Supply pump 46. Discharge pump 47. Raw material solution supply pipe 48. Raw material solution discharge pipe 50. Agitation gas supply mechanism 51. Raw material solution supply mechanism 52. Raw material solution discharge mechanism 101-104. Ultrasonic atomizing device
Claims
1. An ultrasonic atomizing device comprising a container for a raw material solution for containing a raw material solution, and an ultrasonic transducer provided below the container for the raw material solution, wherein the ultrasonic vibration operation of the ultrasonic transducer atomizes the raw material solution to generate a raw material solution mist, and the device further comprises a stirring drive unit that performs a predetermined stirring operation using an aggregation suppression member present in at least a portion of the container for the raw material solution to stir the raw material solution in the container for the raw material solution.
2. An ultrasonic atomizing apparatus according to claim 1, wherein the aggregation suppression member includes a rod-shaped stirring rod having one end and the other end, a portion of the other end of the stirring rod is immersed in the raw material solution, and the region of the stirring rod immersed in the raw material solution is defined as the solution immersion region, and the stirring drive unit includes a stirring motor connected to one end of the stirring rod, which performs a stirring rod rotation operation that rotates the stirring rod with the longitudinal direction of the stirring rod as the axis of rotation, and the predetermined stirring operation includes the stirring rod rotation operation.
3. An ultrasonic atomizing apparatus according to claim 1, wherein the aggregation suppression member includes a stirrer disposed on the bottom surface of the raw material solution container, the stirrer contains a magnet, the stirring drive unit is provided outside the raw material solution container and includes a magnetic rotation mechanism that performs a stirrer rotation operation using magnetic force to rotate the stirrer, and the predetermined stirring operation includes the stirrer rotation operation.
4. An ultrasonic atomizing apparatus according to claim 1, wherein the aggregation suppression member includes an agitation gas supply pipe through which agitation gas can flow between one opening and the other opening, the one opening is located outside the raw material solution container, the other opening is immersed in the raw material solution, the agitation drive unit includes an agitation gas supply mechanism that performs a gas supply operation within the raw material solution, supplying the agitation gas to the one opening of the agitation gas supply pipe and outputting the agitation gas from the other opening, and the predetermined agitation operation includes the gas supply operation within the raw material solution.
5. An ultrasonic atomizing apparatus according to claim 1, further comprising a raw material tank provided independently of the raw material solution container and containing the raw material solution, wherein the aggregation suppression member includes a raw material solution supply pipe and a raw material solution discharge pipe, the raw material solution supply pipe has a solution output port, the solution output port is immersed in the raw material solution contained in the raw material solution container, the raw material solution discharge pipe has a solution input port, the solution input port is immersed in the raw material solution contained in the raw material solution container, the stirring drive unit includes a raw material solution supply mechanism that performs a raw material solution supply operation that outputs the raw material solution from the raw material tank to the raw material solution container via the raw material solution supply pipe, and a raw material solution discharge mechanism that performs a raw material solution discharge operation that discharges the raw material solution from the raw material solution container to the raw material tank via the raw material solution discharge pipe, and the predetermined stirring operation includes a combination of the raw material solution supply operation and the raw material solution discharge operation.
6. An ultrasonic atomizing apparatus according to claim 5, wherein the amount of raw material solution supplied to the raw material solution container per unit time by the raw material solution supply operation and the amount of raw material solution discharged from the raw material solution container per unit time by the raw material solution discharge operation are set to be the same.
7. An ultrasonic atomizing apparatus according to any one of claims 1 to 6, wherein an ultrasonic incident wave is transmitted from the ultrasonic transducer into the raw material solution container by the ultrasonic vibration operation of the ultrasonic transducer, and the aggregation suppression member is positioned in a location where it does not receive the ultrasonic incident wave.
8. An ultrasonic atomizing apparatus according to claim 7, wherein the ultrasonic transducer includes a plurality of ultrasonic transducers, the ultrasonic incident wave includes a plurality of ultrasonic incident waves, the plurality of ultrasonic incident waves are transmitted into the raw material solution container by the ultrasonic vibration operation of each of the plurality of ultrasonic transducers, and the aggregation suppression member is positioned so as not to receive any of the plurality of ultrasonic incident waves.
9. An ultrasonic atomizing apparatus according to claim 8, wherein each of the plurality of ultrasonic transducers has an ultrasonic vibrating plate, and each of the ultrasonic vibrating plates of the plurality of ultrasonic transducers is arranged at the same distance from the center point in a plan view, and each of the ultrasonic vibrating plates of the plurality of ultrasonic transducers is inclined at the same angle toward the direction toward the center point with respect to the horizontal direction.
10. An ultrasonic atomizing apparatus according to any one of claims 1 to 9, wherein the raw material solution container has a separator cup at its bottom, the ultrasonic atomizing apparatus further comprises a water tank containing an ultrasonic transmission medium, the water tank and the separator cup are positioned such that the bottom surface of the separator cup is immersed in the ultrasonic transmission medium, and the ultrasonic transducer is provided on the bottom surface of the water tank located below the separator cup.