Argon recovery device having high extraction rate and working method thereof

Abstract

The present application discloses an argon recovery device having a high extraction rate and a working method thereof. The argon recovery device having a high extraction rate comprises an argon extraction unit, the argon extraction unit comprising a pure argon pipe group, a first valve group, and an argon extraction mechanism. The pure argon pipe group comprises a first processing pipe group and a second processing pipe group; the first processing pipe group comprises a first receiving pipe, a second receiving pipe, and a liquid nitrogen connecting pipe; and the second processing pipe group comprises a first impure argon gas conduit, an impure liquid argon conduit, two reflux pipes, a second impure argon gas conduit, and a supplementary pipe. The first valve group comprises a feed throttling valve and a first liquid nitrogen throttling valve. The argon extraction mechanism comprises a crude liquid argon processing member and an impure argon gas processing member; the crude liquid argon processing member comprises a pure argon column and a nitrogen reboiler; the impure argon gas processing member comprises a nitrogen evaporator and a re-extraction assembly; and the re-extraction assembly comprises an argon enrichment column. Compared with common recovery methods, the present application has high processing efficiency and achieves an argon extraction rate of 98% or higher, thereby reducing the waste of argon resources.

Description

High-efficiency argon recovery equipment and its working method Technical Field

[0001] This application relates to the field of argon recovery technology, and in particular to argon recovery equipment with high extraction rate and its working method. Background Technology

[0002] Currently, the Czochralski method, which uses reduced pressure crystal pulling, produces a large amount of crude argon gas during the production of monocrystalline silicon. Recycling and utilizing this argon gas is of great practical significance.

[0003] Patent CN201210078306.X discloses a method and apparatus for argon recovery and purification in monocrystalline silicon production. In a distillation column, argon is separated from nitrogen and hydrogen, two light components, through distillation. Pure liquid argon is recovered from the bottom of the column, while distillation waste gas, composed of argon, nitrogen, and hydrogen, is discharged from the top. This waste gas is heated by a low-temperature plate heat exchanger and used as the replacement gas for a room-temperature adsorption unit. However, because the waste gas contains a large amount of argon, this portion cannot be recovered, resulting in a low overall argon extraction rate and a significant waste of argon resources.

[0004] Patent CN116332139A discloses an argon recovery device integrating high-purity nitrogen and an efficiency-enhancing device, and a method for using it. The recovered argon is processed to obtain dry crude argon, which is then transported to the nitrogen reboiler at the bottom of the argon refining tower for liquefaction. The fluid output from the nitrogen reboiler is depressurized and transported to the upper part of the argon refining tower for distillation. The pure liquid argon at the bottom of the argon refining tower is depressurized and transported together with externally supplied liquid argon to the argon tower condenser and evaporated into argon. The gas at the top of the argon refining tower is denitrogenated by the efficiency-enhancing device and then output to the argon compressor. However, due to the use of an efficiency-enhancing device based on the adsorption principle, the separation of nitrogen and argon is incomplete, and a small amount of argon components are still wasted, resulting in a relatively low argon recovery rate. Summary of the Invention

[0005] To address the aforementioned technical problems and achieve at least one advantage of this application, this application provides a high-extraction-rate argon recovery device, the high-extraction-rate argon recovery device comprising an argon extraction unit, the argon extraction unit comprising:

[0006] The refined argon tube assembly includes a first processing tube assembly and a second processing tube assembly. The first processing tube assembly includes a first receiving tube, a second receiving tube, and a liquid nitrogen connection tube. The second processing tube assembly includes a first waste argon gas conduit, a waste liquid argon conduit, two return tubes, a second waste argon gas conduit, and a replenishment pipe.

[0007] The first valve group includes a feed throttle valve and a first liquid nitrogen throttle valve. The feed throttle valve is installed on the first receiving pipe, and the first liquid nitrogen throttle valve is installed on the liquid nitrogen connecting pipe.

[0008] Argon extraction mechanism, the argon extraction mechanism comprising:

[0009] The crude liquid argon treatment component includes:

[0010] The first receiving pipe is connected to the high end of the argon refining column. Crude liquid argon is guided through the first receiving pipe to the feed throttle valve so that it is depressurized by the feed throttle valve and then introduced into the argon refining column.

[0011] A nitrogen reboiler is installed inside the argon refining column and located at the bottom of the column. After cooling, dry nitrogen is introduced from the high end of the nitrogen reboiler. After depressurization, the crude liquid argon introduced into the argon refining column is distilled to obtain pure liquid argon and waste argon products. After cooling, the dry nitrogen is liquefied in the nitrogen reboiler to obtain liquid nitrogen.

[0012] The contaminated argon gas treatment component includes:

[0013] A nitrogen evaporator is provided. The two ends of the second receiving pipe are respectively connected to the high end of the argon refining tower and the high end of the nitrogen evaporator. The argon refining tower is connected to the nitrogen evaporator through the second receiving pipe to introduce waste argon gas product into the nitrogen evaporator. The two ends of the liquid nitrogen connecting pipe are respectively connected to the low end of the nitrogen reboiler and the high end of the nitrogen evaporator. The liquid nitrogen obtained by heat exchange in the nitrogen reboiler is guided to the first liquid nitrogen throttling valve through the liquid nitrogen connecting pipe. After being depressurized by the first liquid nitrogen throttling valve, it is guided to the nitrogen evaporator. The waste argon gas product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator to obtain reflux waste liquid argon, first waste argon gas, and nitrogen. The two ends of one of the reflux pipes are respectively connected to the low end of the nitrogen evaporator and the high end of the argon refining tower. The nitrogen evaporator is connected to the argon refining tower through the corresponding reflux pipe to introduce reflux waste liquid argon into the argon refining tower.

[0014] The re-extraction component includes:

[0015] An argon enhancement tower has two ends of a first waste argon gas conduit connected to the high end of a nitrogen evaporator and the low end of the argon enhancement tower, respectively. The nitrogen evaporator is connected to the argon enhancement tower via the first waste argon gas conduit to introduce first waste argon gas into the argon enhancement tower. One end of a waste liquid argon conduit is connected to the high end of the argon enhancement tower to introduce waste liquid argon into the argon enhancement tower. The waste liquid argon flows downward in the argon enhancement tower to transfer heat and mass with the first waste argon gas introduced into the argon enhancement tower and flowing upward in the argon enhancement tower to obtain second waste argon gas and reflux waste liquid argon. The two ends of another reflux pipe are connected to the low end of the argon enhancement tower and the high end of the refined argon tower, respectively. The argon enhancement tower is connected to the refined argon tower via the corresponding reflux pipe to introduce reflux waste liquid argon into the refined argon tower.

[0016] An argon evaporator has two ends connected to the high end of the argon evaporator and the high end of the argon enhancement tower, respectively. The argon enhancement tower is connected to the argon evaporator through the second waste argon gas conduit to introduce second waste argon gas into the argon evaporator. One end of the replenishment pipe is connected to the argon evaporator and is used to introduce external liquid argon into the argon evaporator. The external liquid argon and the second waste argon gas exchange heat in the argon evaporator to obtain exhaust waste argon gas, waste liquid argon, and second product argon gas. The end of the waste liquid argon conduit away from the argon enhancement tower is connected to the low end of the argon evaporator. The argon evaporator is connected to the argon enhancement tower through the waste liquid argon conduit to introduce waste liquid argon into the argon enhancement tower.

[0017] According to one embodiment of this application, the high-extraction-rate argon recovery equipment includes a heat exchanger group, which includes heat exchange devices and a conduit group. The conduit group includes at least one feed pipe. The heat exchange devices are installed on the feed pipes. Crude argon gas is introduced into the heat exchange devices through the feed pipes and discharged after heat exchange and cooling within the heat exchange devices. The high-extraction-rate argon recovery equipment also includes a hydrogen removal unit, which includes an argon condenser-evaporator. The argon condenser-evaporator is installed at one end of the feed pipe. After cooling through heat exchange within the heat exchange devices, the crude argon gas passes through the feed pipes and is located at the heat exchange device. The crude argon gas is introduced into the argon condenser evaporator through the section between the heating device and the argon condenser evaporator. After cooling, the crude argon gas is cooled by heat exchange in the argon condenser evaporator to obtain a crude argon gas-liquid mixture. The hydrogen removal unit also includes a gas-liquid separation tank. The argon condenser evaporator is connected to the gas-liquid separation tank through a pipeline to introduce the crude argon gas-liquid mixture into the gas-liquid separation tank. The crude argon gas-liquid mixture undergoes gas-liquid separation in the gas-liquid separation tank to obtain hydrogen-rich gas and crude liquid argon. The lower end of the gas-liquid separation tank is connected to the other end of the first receiving pipe and crude liquid argon is introduced into the upper end of the argon refining tower through the first receiving pipe.

[0018] According to one embodiment of this application, the first processing pipe assembly includes a pure liquid argon connecting pipe, and the first valve assembly includes a pure liquid argon throttling valve. The two ends of the pure liquid argon connecting pipe are respectively connected to the lower end of the refined argon column and the upper end of the argon condenser evaporator. The pure liquid argon throttling valve is installed on the pure liquid argon connecting pipe. The pure liquid argon in the refined argon column is guided through the pure liquid argon connecting pipe to the pure liquid argon throttling valve for depressurization before being introduced into the argon condenser evaporator. After depressurization, the pure liquid argon introduced into the argon condenser evaporator acts as a cold source, reacting with the pure liquid argon introduced through the feed pipe. After cooling, crude argon gas undergoes heat exchange in the argon condenser-evaporator. Pure liquid argon gas is heated by heat exchange within the argon condenser-evaporator to obtain the first product argon gas. The conduit assembly also includes a product argon gas pipe assembly, which includes a first product argon gas pipe. One end of the first product argon gas pipe is connected to the high end of the argon condenser-evaporator. The heat exchange device is installed on the first product argon gas pipe. The first product argon gas obtained by heat exchange within the argon condenser-evaporator is guided through the first product argon gas pipe to the heat exchange device for heat exchange and heating before being discharged.

[0019] According to one embodiment of this application, the crude liquid argon treatment component includes a nitrogen compressor, the conduit group includes a nitrogen pipe group, the nitrogen pipe group includes a first nitrogen conduit, the two ends of the first nitrogen conduit are respectively connected to the nitrogen compressor and the high end of the nitrogen reboiler, the heat exchange device is installed on the first nitrogen conduit, the nitrogen compressor introduces dry nitrogen into the first nitrogen conduit, the dry nitrogen is introduced into the heat exchange device through the first nitrogen conduit to exchange heat in the heat exchange device and cool down before being introduced into the nitrogen reboiler.

[0020] According to one embodiment of this application, the nitrogen pipeline includes a second nitrogen conduit, the two ends of which are respectively connected to the nitrogen compressor and the high end of the nitrogen evaporator. The heat exchange device is installed on the second nitrogen conduit. The nitrogen obtained by heat exchange in the nitrogen evaporator is guided through the second nitrogen conduit to the heat exchange device to exchange heat and be heated in the heat exchange device before being guided to the nitrogen compressor.

[0021] According to one embodiment of this application, the product argon gas pipe assembly further includes a second product argon gas pipe, one end of which is connected to the high end of the argon evaporator. The heat exchange device is installed on the second product argon gas pipe. The second product argon gas obtained by heat exchange in the argon evaporator is guided through the second product argon gas pipe to the heat exchange device for heat exchange and heating before being discharged.

[0022] According to one embodiment of this application, the conduit group further includes a waste argon gas exhaust pipe, one end of which is connected to the high end of the argon evaporator. The heat exchange device is installed on the waste argon gas exhaust pipe. The waste argon gas obtained by heat exchange in the argon evaporator is guided to the heat exchange device through the waste argon gas exhaust pipe to exchange heat in the heat exchange device and be heated before being discharged.

[0023] According to one embodiment of this application, the conduit assembly includes a hydrogen-rich gas pipe, one end of which is connected to the gas-liquid separator. Hydrogen-rich gas separated in the gas-liquid separator is discharged through the hydrogen-rich gas pipe. Two feed pipes are provided, each with one end connected to the argon condenser / evaporator. The heat exchange device includes a first heat exchanger and a second heat exchanger. The first heat exchanger is installed on one of the feed pipes, the first nitrogen conduit, the second nitrogen conduit, the first product argon gas pipe, and the second product argon gas pipe. The second heat exchanger is installed on the other feed pipe, the waste argon gas exhaust pipe, and the hydrogen-rich gas pipe, and flows through the corresponding feed pipe to the first... A crude argon gas from a heat exchanger exchanges heat with dry nitrogen gas introduced into the first heat exchanger via the second nitrogen gas conduit, first product argon gas introduced into the first heat exchanger via the first product argon gas conduit, and second product argon gas introduced into the first heat exchanger via the second product argon gas conduit, and is cooled before being directed to the argon condenser-evaporator. A crude argon gas flowing through a corresponding feed pipe and introduced into the second heat exchanger exchanges heat with sludge argon gas introduced into the second heat exchanger via the sludge argon gas exhaust pipe and hydrogen-rich gas introduced into the second heat exchanger via the hydrogen-rich gas conduit, and is cooled before being directed to the argon condenser-evaporator. One end of the feed pipe, away from the argon condenser-evaporator, is radially connected to the other end of the feed pipe, away from the argon condenser-evaporator.

[0024] According to one embodiment of this application, the heat exchanger assembly includes two crude argon gas control valves. Each of the two feed pipes is provided with a crude argon gas control valve at the portion between the connection point of the two pipes and the first heat exchanger or the second heat exchanger. The crude argon gas control valve is used to regulate the flow rate of crude argon gas flowing through the corresponding feed pipe and directed to the first heat exchanger or the second heat exchanger.

[0025] To address the aforementioned technical problems and achieve at least one advantage of this application, this application provides a method for operating a high-extraction-rate argon recovery device, the method comprising the following steps:

[0026] After cooling, the dry nitrogen is introduced from the high end of the nitrogen reboiler. The crude liquid argon is guided through the first feed pipe to the feed throttle valve and then introduced into the argon refiner after being depressurized by the feed throttle valve to be distilled to obtain pure liquid argon and waste argon products. After cooling, the dry nitrogen is liquefied in the nitrogen reboiler to obtain liquid nitrogen.

[0027] The waste argon product is introduced into the nitrogen evaporator through the second receiving pipe. Liquid nitrogen is guided through the liquid nitrogen connecting pipe to the first liquid nitrogen throttling valve so that it is depressurized by the first liquid nitrogen throttling valve and then guided into the nitrogen evaporator. The waste argon product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator to obtain reflux waste liquid argon, first waste argon gas and nitrogen. The first waste argon gas is introduced into the argon enhancement tower through the first waste argon gas conduit. Waste liquid argon is introduced into the argon enhancement tower through the waste liquid argon conduit. The waste liquid argon flows downward in the argon enhancement tower to transfer heat and mass with the first waste argon gas flowing upward in the argon enhancement tower to obtain second waste argon gas and reflux waste liquid argon. The nitrogen evaporator and the argon enhancement tower respectively introduce reflux waste liquid argon into the refined argon tower through the two reflux pipes. The reflux waste liquid argon flows downward in the refined argon tower to transfer heat and mass with the waste argon product flowing upward in the refined argon tower.

[0028] The second waste argon gas is introduced into the argon evaporator through the second waste argon gas conduit. External liquid argon is introduced into the argon evaporator through the replenishment pipe. The external liquid argon and the second waste argon gas exchange heat in the argon evaporator to obtain exhaust waste argon gas, waste liquid argon, and second product argon gas. The waste liquid argon in the argon evaporator is introduced into the argon enhancement tower through the waste liquid argon conduit so that the first waste argon gas treatment operation in the argon enhancement tower can be carried out continuously.

[0029] The beneficial effects of this application include:

[0030] 1. Based on the distillation of crude argon liquid to extract argon, the waste argon gas product obtained from the distillation of crude argon liquid is recovered and extracted, and the first waste argon gas obtained from the treatment of the waste argon gas product is also recovered and extracted to recover argon as much as possible. Compared with common recovery methods, the processing efficiency is high, and the argon extraction rate reaches 98% or more, which greatly reduces the argon content in the discharged waste argon gas and reduces the waste of argon resources.

[0031] 2. When distilling crude argon liquid, the amount of circulating nitrogen is adjusted to change the circulation rate in a timely manner, so as to cope with the heat load fluctuation of crude liquid argon after the pressure is reduced at the bottom of the tower, and the anti-interference ability is strong.

[0032] 3. By subcooling the external liquid argon, sufficient cooling capacity is provided for the heat exchange operation in the argon evaporator, thereby increasing the argon content in the waste liquid argon and greatly improving the argon extraction rate. Compared with uncooled liquid argon, the argon extraction rate is guaranteed while the replenishment amount can be kept as low as possible, reducing the use of liquid argon. Attached Figure Description

[0033] Figure 1 shows a structural flow diagram of the high extraction rate argon recovery device described in this application.

[0034] Figure 2 shows a partial structural flow diagram of the high extraction rate argon recovery device described in this application.

[0035] Figure 3 shows another partial structural flow diagram of the high extraction rate argon recovery device described in this application.

[0036] Reference numerals: 10, Heat exchanger assembly; 11, Heat exchange device; 111, First heat exchanger; 1111, Heat exchanger body; 1112, Dry air pipe assembly; 11121, First air branch pipe; 11122, Second air branch pipe; 112, Second heat exchanger; 12, Conductor pipe assembly; 121, Feed pipe; 122, Nitrogen pipe assembly; 1221, First nitrogen conductor pipe; 1222, Second nitrogen conductor pipe; 1223, Nitrogen distributor pipe; 123. Product argon gas pipeline assembly; 1231. First product argon gas pipeline; 1232. Second product argon gas pipeline; 124. Waste argon gas exhaust pipe; 125. Hydrogen-rich gas pipeline; 126. Dry air pipeline; 1261. Dry air inlet pipe; 1262. Dry air outlet pipe; 127. Oxygen-enriched air pipeline; 1271. Oxygen-enriched air main pipe; 1272. Liquid nitrogen pipeline; 128. Nitrogen pipeline; 13. Crude argon gas control valve; 20. Hydrogen removal unit; 21. Argon condenser evaporator; 22. Gas-liquid separator; 30. Argon extraction unit; 31. Argon extraction mechanism; 311. Crude liquid argon processing components; 3111. 3112 Refined Argon Tower; 3113 Nitrogen Reboiler; 312 Nitrogen Compressor; 312 Waste Argon Treatment Components; 3121 Nitrogen Evaporator; 3122 Re-extraction Components; 31221 Argon Enhancement Tower; 31222 Argon Evaporator; 32 Refined Argon Tubing Assembly; 321 First Processing Tubing Assembly; 3211 First Feeding Pipe; 3212 Pure Liquid Argon Connection Pipe; 3213 Second Feeding Pipe; 321 4. Liquid nitrogen connection pipe; 322. Second processing pipe assembly; 3221. First waste argon gas conduit; 3222. Waste liquid argon gas conduit; 3223. Return pipe; 3224. Second waste argon gas conduit; 3225. Replenishment pipe; 33. First valve assembly; 331. Feed throttle valve; 332. Pure liquid argon throttle valve; 333. First liquid nitrogen throttle valve; 334. External liquid argon control valve; 335. Nitrogen control valve; 40. Auxiliary unit; 41. Air handling components; 411. Nitrogen tower; 412. Nitrogen tower condenser / evaporator; 42. Temperature control assembly; 421. Expander; 422. Subcooler assembly; 4221. First subcooler; 4222. Second subcooler; 43. Auxiliary piping; 431. First guide pipe; 432. Second guide pipe; 433. Third guide pipe; 44. Second valve assembly; 441. Oxygen-enriched liquid throttle valve; 442. Second liquid nitrogen throttle valve; 443. Dry air throttle valve; 444. Liquid nitrogen control valve. Detailed Implementation

[0037] The following description is intended to disclose this application and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of this application defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of this application.

[0038] Those skilled in the art should understand that, in the disclosure of this application, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this application.

[0039] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.

[0040] Referring to Figures 1 and 2, a high-extraction-rate argon recovery device according to a preferred embodiment of the present application will be described in detail below. The high-extraction-rate argon recovery device is used to recover crude argon gas obtained after carbon removal and hydrogenation deoxygenation operations. The crude argon gas contains nitrogen, hydrogen and argon as gas components, wherein the nitrogen content is 0.4%, the hydrogen content is 2%, and the remainder is argon.

[0041] The high extraction rate argon recovery equipment includes a heat exchanger group 10, which includes a heat exchange device 11 and a conduit group 12. The conduit group 12 includes at least one feed pipe 121. The heat exchange device 11 is installed on the feed pipe 121. Crude argon gas is introduced into the heat exchange device 11 through the feed pipe 121 and discharged after heat exchange and cooling in the heat exchange device 11.

[0042] The high-extraction-rate argon recovery equipment includes a hydrogen removal unit 20, which includes an argon condenser evaporator 21. The argon condenser evaporator 21 is installed at one end of the feed pipe 121. After being cooled by heat exchange in the heat exchange device 11, the crude argon gas is introduced into the argon condenser evaporator 21 through the portion of the feed pipe 121 located between the heat exchange device 11 and the argon condenser evaporator 21. After being cooled, the crude argon gas is cooled by heat exchange in the argon condenser evaporator 21 to obtain a crude argon gas-liquid mixture.

[0043] The hydrogen removal unit 20 also includes a gas-liquid separator 22. The argon condenser evaporator 21 is connected to the gas-liquid separator 22 via a pipeline to introduce a crude argon gas-liquid mixture into the gas-liquid separator 22. The crude argon gas-liquid mixture is separated into gas and liquid in the gas-liquid separator 22 to obtain hydrogen-rich gas and crude liquid argon.

[0044] The high-extraction-rate argon recovery equipment includes an argon extraction unit 30, which includes an argon extraction mechanism 31, a refined argon tube assembly 32, and a first valve assembly 33. The argon extraction mechanism 31 includes a crude liquid argon treatment component 311, which includes a refined argon tower 3111 and a nitrogen reboiler 3112. The nitrogen reboiler 3112 is installed inside the refined argon tower 3111 and located at the bottom of the tower. The refined argon tube assembly 32 includes a first processing tube assembly 321, which includes a first receiving tube 3211. The first valve assembly 33 includes an inlet throttle valve 331. The two ends of the first receiving tube 3211 are respectively connected to the lower end of the gas-liquid separator 22 and the upper end of the refined argon tower 3111. The inlet throttle valve 331 is installed on the first receiving tube 3211. Crude liquid argon is discharged from the gas-liquid separator 22 and guided through the first receiving tube 3211 to the inlet throttle valve 331 so that it is depressurized by the inlet throttle valve 331 and then introduced into the refined argon tower 3111.

[0045] The crude liquid argon treatment component 311 includes a nitrogen compressor 3113, and the conduit assembly 12 includes a nitrogen pipe assembly 122. The nitrogen pipe assembly 122 includes a first nitrogen conduit 1221, the two ends of which are respectively connected to the nitrogen compressor 3113 and the high end of the nitrogen reboiler 3112. The heat exchange device 11 is installed on the first nitrogen conduit 1221. The nitrogen compressor 3113 introduces dry nitrogen into the first nitrogen conduit 1221. The dry nitrogen is introduced into the heat exchange device 11 through the first nitrogen conduit 1221 to exchange heat and cool down before being introduced into the nitrogen reboiler 3112. After being depressurized and introduced into the argon purification column 3111, the crude liquid argon is distilled to obtain pure liquid argon and waste argon products. The cooled dry nitrogen is liquefied in the nitrogen reboiler 3112 to obtain liquid nitrogen.

[0046] The first processing pipe assembly 321 includes a pure liquid argon connecting pipe 3212, and the first valve assembly 33 includes a pure liquid argon throttling valve 332. The two ends of the pure liquid argon connecting pipe 3212 are respectively connected to the lower end of the refined argon tower 3111 and the upper end of the argon condenser evaporator 21. The pure liquid argon throttling valve 332 is installed on the pure liquid argon connecting pipe 3212. The pure liquid argon in the refined argon tower 3111 is guided to the pure liquid argon throttling valve 332 through the pure liquid argon connecting pipe 3212 so that it is depressurized by the pure liquid argon throttling valve 332 and then introduced into the argon condenser evaporator 21. The depressurized pure liquid argon introduced into the argon condenser evaporator 21 acts as a cold source and exchanges heat with the cooled crude argon gas introduced into the argon condenser evaporator 21 through the feed pipe 121. The pure liquid argon is heated in the argon condenser evaporator 21 to obtain the first product argon gas. The conduit assembly 12 further includes a product argon gas assembly 123, which includes a first product argon gas pipe 1231. One end of the first product argon gas pipe 1231 is connected to the high end of the argon condenser evaporator 21. The first product argon gas obtained by heat exchange in the argon condenser evaporator 21 is discharged through the first product argon gas pipe 1231 to achieve argon recovery.

[0047] Preferably, the heat exchange device 11 is installed on the first product argon gas pipe 1231, and the first product argon gas flowing through the first product argon gas pipe 1231 is introduced into the heat exchange device 11 to serve as a cold source for heat exchange within the heat exchange device 11, so as to recover the cold energy and facilitate the heat exchange operation.

[0048] The first processing tube assembly 321 includes a second receiving tube 3213, and the argon extraction mechanism 31 includes a waste argon gas treatment component 312. The waste argon gas treatment component 312 includes a nitrogen evaporator 3121. The two ends of the second receiving tube 3213 are respectively connected to the high end of the refined argon tower 3111 and the high end of the nitrogen evaporator 3121. The refined argon tower 3111 is connected to the nitrogen evaporator 3121 through the second receiving tube 3213 to introduce waste argon gas products into the nitrogen evaporator 3121.

[0049] The first processing pipe assembly 321 includes a liquid nitrogen connection pipe 3214, and the first valve assembly 33 includes a first liquid nitrogen throttling valve 333. The two ends of the liquid nitrogen connection pipe 3214 are respectively connected to the lower end of the nitrogen reboiler 3112 and the higher end of the nitrogen evaporator 3121. The first liquid nitrogen throttling valve 333 is installed on the liquid nitrogen connection pipe 3214. The liquid nitrogen obtained through heat exchange in the nitrogen reboiler 3112 is guided through the liquid nitrogen connection pipe 3214 to the first liquid nitrogen throttling valve 333, where it is depressurized and then guided to the nitrogen evaporator 3121. The waste argon product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator 3121 to obtain reflux waste liquid argon, first waste argon, and nitrogen.

[0050] The nitrogen pipeline assembly 122 includes a second nitrogen conduit 1222, the two ends of which are respectively connected to the nitrogen compressor 3113 and the high end of the nitrogen evaporator 3121. The heat exchange device 11 is mounted on the second nitrogen conduit 1222. The nitrogen obtained by heat exchange in the nitrogen evaporator 3121 is guided through the second nitrogen conduit 1222 to the heat exchange device 11, where it is heated by heat exchange and then guided to the nitrogen compressor 3113. In this process, no additional cold source is required, and nitrogen is recycled, saving nitrogen resources and greatly reducing processing costs.

[0051] The waste argon gas treatment component 312 includes a re-extraction component 3122, which includes an argon enhancement tower 31221. The refined argon tube group 32 includes a second treatment tube group 322, which includes a first waste argon gas conduit 3221. The two ends of the first waste argon gas conduit 3221 are respectively connected to the high end of the nitrogen evaporator 3121 and the low end of the argon enhancement tower 31221. The nitrogen evaporator 3121 is connected to the argon enhancement tower 31221 through the first waste argon gas conduit 3221 to introduce the first waste argon gas into the argon enhancement tower 31221. The second processing tube assembly 322 includes a waste liquid argon conduit 3222. One end of the waste liquid argon conduit 3222 is connected to the high end of the argon enhancement tower 31221 to introduce waste liquid argon into the argon enhancement tower 31221. The waste liquid argon flows downward in the argon enhancement tower 31221 to conduct heat and mass transfer with the first waste argon gas introduced into the argon enhancement tower 31221 and flowing upward in the argon enhancement tower 31221 to obtain the second waste argon gas and the return waste liquid argon.

[0052] The second processing tube assembly 322 includes two reflux pipes 3223. One end of each reflux pipe 3223 is connected to the lower end of the nitrogen evaporator 3121 and the lower end of the argon enhancement tower 31221, respectively, and the other end of each reflux pipe 3223 is connected to the upper end of the argon purification tower 3111. The nitrogen evaporator 3121 and the argon enhancement tower 31221 are connected to the argon purification tower 3111 via the two reflux pipes 3223 to introduce reflux sludge argon into the argon purification tower 3111. The reflux sludge argon flows downward within the argon purification tower 3111 to transfer heat and mass with the upward-flowing sludge argon gas products within the argon purification tower 3111, in order to recover argon as much as possible.

[0053] The second processing tubing assembly 322 further includes a second waste argon gas conduit 3224, and the re-extraction assembly 3122 further includes an argon evaporator 31222. The two ends of the second waste argon gas conduit 3224 are respectively connected to the high end of the argon evaporator 31222 and the high end of the argon enhancement tower 31221. The argon enhancement tower 31221 is connected to the argon evaporator 31222 via the second waste argon gas conduit 3224 to introduce second waste argon gas into the argon evaporator 31222. The second processing tubing assembly 322 also includes a replenishment pipe 3225, one end of which is connected to the argon evaporator 31222. The replenishment pipe 3225 is used to introduce external liquid argon into the argon evaporator 31222. The external liquid argon and the second waste argon gas exchange heat within the argon evaporator 31222 to obtain discharged waste argon gas, waste liquid argon, and second product argon gas.

[0054] It is worth mentioning that the end of the waste argon conduit 3222 away from the argon enhancement tower 31221 is connected to the lower end of the argon evaporator 31222. The argon evaporator 31222 is connected to the argon enhancement tower 31221 through the waste argon conduit 3222 to introduce waste argon into the argon enhancement tower 31221, so as to recover argon as much as possible and to enable the first waste argon gas treatment operation in the argon enhancement tower 31221 to be carried out continuously.

[0055] The product argon gas pipe assembly 123 also includes a second product argon gas pipe 1232. One end of the second product argon gas pipe 1232 is connected to the high end of the argon evaporator 31222. The second product argon gas obtained by heat exchange in the argon evaporator 31222 is discharged through the second product argon gas pipe 1232.

[0056] In this way, based on the distillation of crude argon liquid to extract argon, the waste argon gas product obtained from the distillation of crude argon liquid is recovered and extracted, and the first waste argon gas obtained from the treatment of waste argon gas product is also recovered and extracted to recover argon as much as possible. Compared with common recovery methods, the processing efficiency is high, and the argon extraction rate reaches 98% or more, which greatly reduces the argon content in the discharged waste argon gas and reduces the waste of argon resources.

[0057] It is worth mentioning that the high-extraction-rate argon recovery equipment uses distillation to extract argon, which, compared to adsorption, effectively avoids incomplete separation of nitrogen and argon and waste of argon components, and also improves the argon recovery rate.

[0058] Preferably, the heat exchange device 11 is installed on the second product argon gas pipe 1232, and the second product argon gas flowing through the second product argon gas pipe 1232 is introduced into the heat exchange device 11 to serve as a cold source for heat exchange within the heat exchange device 11, so as to recover the cold energy and facilitate the heat exchange operation.

[0059] The conduit assembly 12 also includes a waste argon gas exhaust pipe 124. One end of the waste argon gas exhaust pipe 124 is connected to the high end of the argon evaporator 31222. The waste argon gas obtained by heat exchange in the argon evaporator 31222 is discharged through the waste argon gas exhaust pipe 124 to vent.

[0060] Preferably, the heat exchange device 11 is installed on the waste argon gas exhaust pipe 124, and the waste argon gas flowing through the waste argon gas exhaust pipe 124 is introduced into the heat exchange device 11 to serve as a cold source for heat exchange within the heat exchange device 11, so as to recover the cold energy and facilitate the heat exchange operation.

[0061] It is worth mentioning that the external liquid argon introduced through the replenishment pipe 3225 is cooled before being introduced into the argon evaporator 31222. This provides sufficient cooling for the heat exchange operation in the argon evaporator 31222, thereby increasing the argon content in the waste liquid argon and greatly improving the argon extraction rate. Compared with uncooled liquid argon, the replenishment amount can be kept as low as possible while ensuring the argon extraction rate, thus reducing the use of liquid argon.

[0062] Preferably, the temperature of the external liquid argon introduced into the argon evaporator 31222 is -190 to -186°C, which reduces the liquid argon consumption by 20% compared to non-cooled liquid argon, based on the same argon extraction rate.

[0063] The first valve group 33 includes an external liquid argon control valve 334, which is installed on the replenishment pipe 3225. The external liquid argon control valve 334 is used to regulate the flow rate of external liquid argon that is directed to the argon evaporator 31222 through the replenishment pipe 3225, so that the external liquid argon replenished to the argon evaporator 31222 meets the required cooling capacity without causing waste.

[0064] The first valve group 33 includes a nitrogen control valve 335, and the nitrogen pipe group 122 includes a nitrogen distribution pipe 1223. The nitrogen control valve 335 is installed on the nitrogen distribution pipe 1223. The two ends of the nitrogen distribution pipe 1223 are respectively connected to the radial direction of the first nitrogen conduction pipe 1221 and the radial direction of the second nitrogen conduction pipe 1222 or the nitrogen compressor 3113. The dry nitrogen portion introduced into the first nitrogen conduction pipe 1221 by the nitrogen compressor 3113 is introduced into the nitrogen distribution pipe 1223 and flows into the nitrogen compressor 3113. A flow meter is installed on the portion of the first nitrogen conduit 1221 between it and the nitrogen splitter 1223. The flow meter is used to detect the flow rate of dry nitrogen guided from the first nitrogen conduit 1221 to the heat exchange device 11. The nitrogen control valve 335 is used to regulate the flow rate of dry nitrogen flowing through the nitrogen splitter 1223 to the nitrogen compressor 3113.

[0065] Existing technologies employ a self-coupling process, using argon gas to evaporate liquid argon from crude argon in the column. When the composition of the feed gas fluctuates significantly, the heat load entering the column also fluctuates greatly, leading to fluctuations in the distillation process and loss of purity, which cannot be adjusted in a timely manner. In contrast to existing technologies, this application selectively adjusts the flow rate of dry nitrogen flowing to the nitrogen compressor 3113 via the nitrogen control valve 335 based on the flow meter's detection results. This precise control of the dry nitrogen flow rate directed to the heat exchange device 11 prevents fluctuations in the dry nitrogen flow rate from affecting the distillation process within the argon column 3111, ensuring a stable distillation process and guaranteeing the purity of the obtained liquid argon.

[0066] It is worth mentioning that a thermometer is installed on the portion of the first receiving pipe 3211 located between the feed throttle valve 331 and the argon refining tower 3111. The thermometer is used to detect the temperature of the depressurized crude liquid argon directed to the argon refining tower 3111. The nitrogen compressor 3113 can operate at variable speed to adjust the flow rate of the dry nitrogen directed to the first nitrogen conduit 1221. In this way, based on the thermometer's detection results, the nitrogen compressor 3113 selectively regulates the flow rate of dry nitrogen directed to the first nitrogen conduit 1221. That is, when the heat load of the crude liquid argon decreases after depressurization, more energy is required for the crude liquid argon to be distilled in the argon refining tower 3111. At this time, the load of the nitrogen compressor 3113 is increased to increase the flow rate of dry nitrogen directed to the first nitrogen conduit 1221, thereby increasing the flow rate of dry nitrogen introduced into the heat exchange device 11, so as to introduce more cooled dry nitrogen into the nitrogen reboiler 3112, thereby providing more energy for the distillation operation and thus providing more evaporation energy. When the heat load of the crude liquid argon increases after depressurization, the energy required for the crude liquid argon to be distilled in the argon refining tower 3111 decreases. At this time, the load of the nitrogen compressor 3113 is reduced to decrease the flow rate of the dry nitrogen gas directed to the first nitrogen conduit 1221, thereby reducing the flow rate of the dry nitrogen gas introduced into the heat exchange device 11, so as to reduce the amount of cooled dry nitrogen gas supplied to the nitrogen reboiler 3112, so as to achieve better distillation effect while saving energy.

[0067] The conduit assembly 12 includes a hydrogen-rich gas pipe 125, one end of which is connected to the gas-liquid separator 22. The hydrogen-rich gas separated in the gas-liquid separator 22 is discharged through the hydrogen-rich gas pipe 125.

[0068] Two feed pipes 121 are provided, and one end of each feed pipe 121 is connected to the argon condenser evaporator 21. The heat exchange device 11 includes a first heat exchanger 111 and a second heat exchanger 112. The first heat exchanger 111 is installed on one of the feed pipes 121, the first nitrogen gas conduction pipe 1221, the second nitrogen gas conduction pipe 1222, the first product argon gas pipe 1231, and the second product argon gas pipe 1232. The second heat exchanger 112 is installed on the other feed pipe 121, the waste argon gas exhaust pipe 124, and the hydrogen-rich gas pipe 125. The crude argon gas flowing through the corresponding feed pipe 121 and introduced into the first heat exchanger 111 exchanges with the dry nitrogen gas introduced into the first heat exchanger 111 through the second nitrogen gas conduction pipe 1222, the first product argon gas introduced into the first heat exchanger 111 through the first product argon gas pipe 1231, and the second product argon gas introduced into the first heat exchanger 111 through the second product argon gas pipe 1232. After exchanging heat and cooling, the argon gas is directed to the argon condenser evaporator 21. The crude argon gas flowing through the corresponding feed pipe 121 and introduced into the second heat exchanger 112 exchanges with the waste argon gas introduced into the second heat exchanger 112 through the waste argon gas discharge pipe 124 and the hydrogen-rich gas introduced into the second heat exchanger 112 through the hydrogen-rich gas pipe 125. After exchanging heat and cooling, the argon gas is directed to the argon condenser evaporator 21.

[0069] Preferably, one end of the feed pipe 121, which is away from the argon condenser evaporator 21, is radially connected to the other end of the feed pipe 121, which is also away from the argon condenser evaporator 21, to concentrate the feed flow.

[0070] The heat exchanger assembly 10 includes two crude argon gas control valves 13. Each of the two feed pipes 121, located at their connection points between the first heat exchanger 111 and the second heat exchanger 112, is equipped with one of the crude argon gas control valves 13. The crude argon gas control valves 13 are used to regulate the flow rate of crude argon gas flowing through the corresponding feed pipe 121 and directed to the first heat exchanger 111 or the second heat exchanger 112, to adapt to actual heat exchange conditions.

[0071] Preferably, the temperature of the crude argon gas directed to the first heat exchanger 111 and the second heat exchanger 112 is 18–22°C, and the temperature of the cooled crude argon gas directed to the argon condenser-evaporator 21 is -162–-158°C. The temperature of the crude argon-liquid mixture discharged from the argon condenser-evaporator 21 is -165–-160°C, and the temperatures of the hydrogen-rich gas and crude liquid argon discharged from the gas-liquid separator 22 are both -165–-160°C. The temperature of the hydrogen-rich gas after heat exchange in the second heat exchanger 112 is 28–32°C. The temperature of the dry nitrogen gas directed to the first heat exchanger 111 is 38–42°C, and the temperature of the cooled nitrogen gas discharged from the first heat exchanger 111 is -154–150°C. The temperature of the crude liquid argon after pressure reduction by the feed throttle valve 331 is -167 to -162°C. The temperature of the pure liquid argon discharged from the refined argon tower 3111 is -165 to -160°C. The temperature of the pure liquid argon after pressure reduction by the pure liquid argon throttle valve 332 is -166 to -161°C. The temperature of the first product argon gas discharged from the argon condenser evaporator 21 is -165 to -161°C. The temperature of the first product argon gas after heat exchange in the first heat exchanger 111 is 28 to 32°C. The temperature of the liquid nitrogen discharged from the nitrogen reboiler 3112 is -165 to -160°C. The temperature of the liquid nitrogen after being depressurized by the first liquid nitrogen throttle valve 333 is -166 to -161°C. The temperature of the waste argon product discharged from the refined argon tower 3111 is -175 to -171°C. The temperature of the reflux waste liquid argon and nitrogen discharged from the nitrogen evaporator 3121 is -177 to -172°C. The temperature of the nitrogen after heat exchange in the first heat exchanger 111 is 28 to 32°C. The temperature of the first waste argon gas discharged from the nitrogen evaporator 3121 is -175 to -171°C; the temperature of the reflux waste liquid argon discharged from the argon enhancement tower 31221 is -175 to -171°C; the temperature of the second waste argon gas discharged from the argon enhancement tower 31221 is -178 to -174°C; the temperature of the external liquid argon introduced into the argon evaporator 31222 through the replenishment pipe 3225 is -190 to -186°C; and the temperature of the argon gas discharged from the argon evaporator 31222 is -175 to -171°C. The temperature of the argon waste liquid discharged from 222 is -178 to -174°C. The temperature of the second product argon gas discharged from the argon evaporator 31222 is -180 to -176°C. The temperature of the second product argon gas after heat exchange in the first heat exchanger 111 is 28 to 32°C. The temperature of the argon waste gas discharged from the argon evaporator 31222 is -177 to -172°C. The temperature of the argon waste gas after heat exchange in the second heat exchanger 112 is 28 to 32°C.

[0072] Referring to Figures 1 and 3, the conduit assembly 12 further includes a dry air duct 126, on which the first heat exchanger 111 is installed. Dry air is introduced into the first heat exchanger 111 through the dry air duct 126 to exchange heat in the first heat exchanger 111 and cool down before being discharged.

[0073] It is worth mentioning that by placing the first heat exchanger 111 on the dry air duct 126 and the second heat exchanger 112 on the hydrogen-rich gas duct 125, hydrogen and oxygen are separated to prevent explosion and increase the safety of use.

[0074] The high-extraction-rate argon recovery equipment also includes an auxiliary unit 40, which includes an air treatment component 41 and a temperature control component 42. The air treatment component 41 includes a nitrogen purification tower 411, and the temperature control component 42 includes an expander 421. The nitrogen purification tower 411 is connected to one end of the dry air duct 126, and the expander 421 is installed on the dry air duct 126. After cooling, the dry air flowing through the dry air duct 126 flows at least partially through the expander 421 to be cooled in the expander 421 before being introduced into the nitrogen purification tower 411.

[0075] The auxiliary unit 40 includes an auxiliary pipe 43, which includes a first guide pipe 431. One end of the first guide pipe 431 is connected to the upper end of the nitrogen purification tower 411. The first guide pipe 431 is used to introduce liquid nitrogen into the nitrogen purification tower 411. As the liquid nitrogen flows downwards within the nitrogen purification tower 411, it undergoes heat and mass transfer with the cooled, dry air rising within the tower to obtain pure nitrogen gas and oxygen-enriched liquid.

[0076] The air handling component 41 includes a nitrogen tower condenser-evaporator 412, the temperature control component 42 includes a subcooler group 422, the subcooler group 422 includes a first subcooler 4221, the auxiliary pipe 43 includes a second guide pipe 432, the two ends of the second guide pipe 432 are respectively connected to the lower end of the nitrogen tower 411 and the upper end of the nitrogen tower condenser-evaporator 412, and the first subcooler 4221 is installed on the second guide pipe 432. The auxiliary unit 40 further includes a second valve group 44, which includes an oxygen-enriched liquid throttling valve 441. The oxygen-enriched liquid throttling valve 441 is installed in the portion of the second guide pipe 432 located between the first subcooler 4221 and the nitrogen tower condenser-evaporator 412. The oxygen-enriched liquid discharged from the lower end of the nitrogen tower 411 is introduced into the first subcooler 4221 through the second guide pipe 432, cooled within the first subcooler 4221, and then flows through the oxygen-enriched liquid throttling valve 441 into the nitrogen tower condenser-evaporator 412. The oxygen-enriched liquid throttling valve 441 is used to depressurize the cooled oxygen-enriched liquid that has been heat-exchanged in the first subcooler 4221 and is directed to the nitrogen tower condenser-evaporator 412.

[0077] The auxiliary pipe 43 includes a third guide pipe 433, the two ends of which are connected to the high end of the nitrogen purification tower 411 and the high end of the nitrogen tower condenser-evaporator 412, respectively. The nitrogen purification tower 411 is connected to the nitrogen tower condenser-evaporator 412 through the third guide pipe 433 to introduce pure nitrogen gas into the nitrogen tower condenser-evaporator 412. The pure nitrogen gas exchanges heat with the depressurized oxygen-enriched liquid introduced into the nitrogen tower condenser-evaporator 412 through the second guide pipe 432 to obtain liquid nitrogen and oxygen-enriched gas.

[0078] It is worth mentioning that the other end of the first guide pipe 431 is connected to the lower end of the nitrogen tower condenser evaporator 412 so that liquid nitrogen is supplied from the nitrogen tower condenser evaporator 412 to the nitrogen purification tower 411. At this time, no additional nitrogen supply is required, so that the dry air treatment operation in the nitrogen purification tower 411 can be carried out continuously.

[0079] The conduit assembly 12 further includes an oxygen-enriched air conduit 127, which includes an oxygen-enriched air main pipe 1271. One end of the oxygen-enriched air main pipe 1271 is connected to the high end of the nitrogen tower condenser-evaporator 412, and the first subcooler 4221 is installed on the oxygen-enriched air main pipe 1271. The oxygen-enriched gas obtained by heat exchange in the nitrogen tower condenser-evaporator 412 is introduced into the first subcooler 4221 through the oxygen-enriched air main pipe 1271 to serve as a cold source for heat exchange with the oxygen-enriched liquid flowing through the first subcooler 4221.

[0080] The oxygen-enriched air duct 127 also includes a liquid nitrogen pipe body 1272. The subcooler assembly 422 includes a second subcooler 4222. The second valve assembly 44 includes a second liquid nitrogen throttle valve 442. The second subcooler 4222 is installed on the supplementary duct 3225 and the liquid nitrogen pipe body 1272. One end of the liquid nitrogen pipe body 1272 is connected to the first guide duct 431. The second liquid nitrogen throttle valve 442 is installed on the portion of the liquid nitrogen pipe body 1272 located between the first guide duct 431 and the second subcooler 4222. The liquid nitrogen discharged from the nitrogen tower condenser evaporator 412 to the first guide pipe 431 flows through the liquid nitrogen pipe body 1272 and is introduced into the second liquid nitrogen throttling valve 442. After being depressurized by the second liquid nitrogen throttling valve 442, it is introduced into the second subcooler 4222. The depressurized liquid nitrogen introduced into the second subcooler 4222 serves as a cold source to exchange heat with the external liquid argon flowing through the second subcooler 4222. At this time, no additional cold source is required, which is energy-saving and environmentally friendly.

[0081] Preferably, one end of the liquid nitrogen pipe 1272 away from the first guide pipe 431 is connected to the portion of the oxygen-enriched air main pipe 1271 located between the first subcooler 4221 and the nitrogen tower condenser-evaporator 412, so that the heated liquid nitrogen obtained by heat exchange in the second subcooler 4222 flows into the oxygen-enriched air main pipe 1271 through the liquid nitrogen pipe 1272 to mix with the oxygen-enriched oxygen discharged from the nitrogen tower condenser-evaporator 412 and be guided together to the first subcooler 4221. The liquid nitrogen and oxygen-enriched oxygen as a whole exchange heat with the oxygen-enriched liquid introduced into the first subcooler 4221 to obtain oxygen-enriched air.

[0082] The conduit assembly 12 also includes a nitrogen pipeline 128. The first subcooler 4221 is installed on the nitrogen pipeline 128. One end of the nitrogen pipeline 128 is connected to the third guide pipeline 433. A portion of the pure nitrogen discharged from the nitrogen purification tower 411 to the third guide pipeline 433 flows through the nitrogen pipeline 128 and is introduced into the first subcooler 4221 to serve as a cold source for heat exchange with the oxygen-enriched liquid introduced into the first subcooler 4221.

[0083] Preferably, the first heat exchanger 111 is installed on the portion of the oxygen-enriched air main pipe 1271 located away from the nitrogen tower condenser-evaporator 412 of the first subcooler 4221, and the first heat exchanger 111 is also installed on the portion of the nitrogen pipe 128 located away from the third guide pipe 433 of the first subcooler 4221. The oxygen-enriched air and pure nitrogen, heated by heat exchange in the first subcooler 4221, are guided to the first heat exchanger 111 through the portions of the oxygen-enriched air main pipe 1271 and the nitrogen pipe 128 respectively located between the first subcooler 4221 and the first heat exchanger 111. The oxygen-enriched air and pure nitrogen flowing into the first heat exchanger 111 serve as a cold source for heat exchange within the first heat exchanger 111, recovering cooling capacity.

[0084] It is worth mentioning that the oxygen-enriched air flowing through the oxygen-enriched air main pipe 1271 and passing through the first heat exchanger 111, and then discharged after heat exchange within the first heat exchanger 111, is used as the regeneration gas for the equipment that dries the air to obtain dry air. The pure nitrogen gas flowing through the nitrogen pipe 128 and passing through the first heat exchanger 111, and then discharged after heat exchange within the first heat exchanger 111, is used as the regeneration gas for the equipment that performs carbon removal and hydrogenation deoxygenation operations.

[0085] The dry air duct 126 includes a dry air inlet pipe 1261 and two dry air outlet pipes 1262. The first heat exchanger 111 includes a heat exchange body 1111 and two dry air pipe groups 1112. The dry air pipe group 1112 includes a first air branch pipe 11121 and a second air branch pipe 11122. One end of the dry air inlet pipe 1261 is connected to the heat exchange body 1111, and dry air is introduced into the heat exchange body 1111 through the dry air inlet pipe 1261. Both the first air branch pipe 11121 and the second air branch pipe 11122 are disposed within the heat exchange body 1111, and the heat transfer area of ​​the first air branch pipe 11121 is smaller than that of the second air branch pipe 11122. One end of each of the two dry air outlet pipes 1262 is connected to the first air branch pipe 11121 and the second air branch pipe 11122, respectively, so that the temperature of the cooled dry air that undergoes heat exchange in the first air branch pipe 11121 and is subsequently guided to the corresponding dry air outlet pipe 1262 is higher than the temperature of the cooled dry air that undergoes heat exchange in the second air branch pipe 11122 and is subsequently guided to the corresponding dry air outlet pipe 1262. The other end of each of the two dry air outlet pipes 1262 is connected to the lower end of the nitrogen purification tower 411.

[0086] The expander 421 is installed on the dry air outlet pipe 1262 connected to the first air branch pipe 11121. The expander 421 is used to further cool the cooled dry air flowing through the corresponding dry air outlet pipe 1262 and directed to the nitrogen purification tower 411. The second valve group 44 includes a dry air throttle valve 443, which is installed on the dry air outlet pipe 1262 connected to the second air branch pipe 11122. The dry air throttle valve 443 is used to depressurize the cooled dry air flowing through the corresponding dry air outlet pipe 1262 and directed to the nitrogen purification tower 411.

[0087] The second valve assembly 44 further includes a liquid nitrogen control valve 444, which is installed on the portion of the liquid nitrogen pipe 1272 located away from the first flow guide pipe 431 in the second subcooler 4222. The liquid nitrogen control valve 444 is used to adjust the flow rate of the heated liquid nitrogen discharged from the second subcooler 4222 to match the flow rate of the external liquid argon introduced into the second subcooler 4222, so as to ensure that the external liquid argon can be cooled to a predetermined temperature range.

[0088] Preferably, the temperature of the dry air directed to the first heat exchanger 111 is 18-22°C, the temperature of the cooled dry air discharged from the first air branch pipe 11121 is -170-165°C, the temperature of the cooled dry air discharged from the second air branch pipe 11122 is -173-168°C, the temperature of the cooled dry air after being depressurized by the dried air throttle valve 443 is -181-177°C, and the temperature of the cooled dry air after being cooled by the expander 421 is -182-178°C. The temperature of the pure nitrogen gas discharged from the nitrogen purification tower 411 is -178 to -173°C. The temperature of the oxygen-enriched liquid discharged from the nitrogen purification tower 411 is -173 to -169°C. The temperature of the cooled oxygen-enriched liquid discharged from the first subcooler 4221 is -175 to -171°C. The temperature of the cooled oxygen-enriched liquid after being depressurized by the oxygen-enriched liquid throttling valve 441 is -183 to -178°C. The temperature of the liquid nitrogen discharged from the nitrogen tower condenser evaporator 412 is -187 to -183°C. The temperature of the liquid nitrogen after being depressurized by the second liquid nitrogen throttling valve 442 is -193 to -189°C. The temperature of the heated liquid nitrogen discharged from the second subcooler 4222 is -193 to -189°C. The temperature of the external liquid argon guided to the second subcooler 4222 is -161 to -156°C. The temperature of the oxygen-enriched air discharged from the nitrogen tower condenser-evaporator 412 is -179 to -175°C, the temperature of the oxygen-enriched air discharged from the first subcooler 4221 is -179 to -175°C, and the temperature of the oxygen-enriched air after heat exchange in the first heat exchanger 111 is 28 to 32°C. The temperature of the pure nitrogen discharged from the first subcooler 4221 is -179 to -175°C, and the temperature of the pure nitrogen after heat exchange in the first heat exchanger 111 is 28 to 32°C.

[0089] The following is a working method for a high-extraction-rate argon recovery device, comprising the following steps:

[0090] After cooling, the dry nitrogen is introduced from the high end of the nitrogen reboiler 3112. The crude liquid argon is guided through the first feed pipe 3211 to the feed throttle valve 331 and then introduced into the argon purification column 3111 for distillation to obtain pure liquid argon and waste argon products. After cooling, the dry nitrogen is liquefied in the nitrogen reboiler 3112 to obtain liquid nitrogen.

[0091] The waste argon product is introduced into the nitrogen evaporator 3121 through the second receiving pipe 3213. Liquid nitrogen is guided through the liquid nitrogen connecting pipe 3214 to the first liquid nitrogen throttling valve 333 for depressurization before being introduced into the nitrogen evaporator 3121. The waste argon product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator 3121 to obtain reflux waste liquid argon, first waste argon, and nitrogen. The first waste argon is introduced into the argon enhancement tower 31221 through the first waste argon conduit 3221, and into the argon enhancement tower through the waste liquid argon conduit 3222. Argon sludge is introduced into 31221. The argon sludge flows downward in the argon enhancement tower 31221 to transfer heat and mass with the first argon sludge flowing upward in the argon enhancement tower 31221 to obtain the second argon sludge and reflux argon sludge. The nitrogen evaporator 3121 and the argon enhancement tower 31221 respectively introduce reflux argon sludge into the argon refinement tower 3111 through two reflux pipes 3223. The reflux argon sludge flows downward in the argon refinement tower 3111 to transfer heat and mass with the argon sludge gas product flowing upward in the argon refinement tower 3111 to recover argon as much as possible.

[0092] The second waste argon gas is introduced into the argon evaporator 31222 through the second waste argon gas conduit 3224, and external liquid argon is introduced into the argon evaporator 31222 through the replenishment pipe 3225. The external liquid argon and the second waste argon gas exchange heat in the argon evaporator 31222 to obtain exhaust waste argon gas, waste liquid argon and second product argon gas. The waste liquid argon in the argon evaporator 31222 is introduced into the argon enhancement tower 31221 through the waste liquid argon conduit 3222, so that the first waste argon gas treatment operation in the argon enhancement tower 31221 is carried out continuously.

[0093] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0094] Crude argon gas is introduced into the heat exchange device 11 through the feed pipe 121 for heat exchange, and then introduced into the argon condenser evaporator 21. After cooling, the crude argon gas is cooled in the argon condenser evaporator 21 to obtain a crude argon gas-liquid mixture. The crude argon gas-liquid mixture is introduced into the gas-liquid separator 22 for gas-liquid separation to obtain hydrogen-rich gas and crude liquid argon.

[0095] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0096] Dry nitrogen is introduced into the heat exchange device 11 through the first nitrogen inlet pipe 1221. After being cooled by heat exchange in the heat exchange device 11, the dry nitrogen is introduced into the nitrogen reboiler 3112.

[0097] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0098] The pure liquid argon in the argon tower 3111 is guided through the pure liquid argon connecting pipe 3212 to the pure liquid argon throttle valve 332. After being depressurized by the pure liquid argon throttle valve 332, it is introduced into the argon condenser evaporator 21. The depressurized pure liquid argon introduced into the argon condenser evaporator 21 acts as a cold source and exchanges heat with the cooled crude argon gas introduced into the argon condenser evaporator 21 through the feed pipe 121. The pure liquid argon is heated in the argon condenser evaporator 21 to obtain the first product argon gas. The first product argon gas is introduced into the first product argon gas pipe 1231 and flows through the heat exchange device 11 to be heated in the heat exchange device 11 before being discharged.

[0099] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0100] The dry nitrogen discharged from the nitrogen compressor 3113 is guided to the heat exchange device 11 through the first nitrogen conduit 1221. The flow rate of the dry nitrogen flowing through the nitrogen diversion pipe 1223 and guided to the nitrogen compressor 3113 is regulated by the nitrogen control valve 335 so that the flow rate of the dry nitrogen guided to the heat exchange device 11 remains stable.

[0101] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0102] The nitrogen obtained by heat exchange in the nitrogen evaporator 3121 is guided to the heat exchange device 11 through the second nitrogen conduit 1222 to exchange heat and be heated in the heat exchange device 11 before being guided to the nitrogen compressor 3113.

[0103] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0104] Dry air is introduced into the first heat exchanger 111 through the dry air duct 126 to exchange heat and cool down. After cooling down through the dry air duct 126, at least part of the dry air flows through the expander 421 to cool down again before being introduced into the nitrogen purification tower 411. At the same time, liquid nitrogen is introduced into the nitrogen purification tower 411 through the first guide pipe 431. As the liquid nitrogen flows downward in the nitrogen purification tower 411, it undergoes heat and mass transfer with the cooled dry air rising in the nitrogen purification tower 411 to obtain pure nitrogen and oxygen-enriched liquid.

[0105] The oxygen-enriched liquid in the nitrogen purification tower 411 is introduced into the first subcooler 4221 through the second guide pipe 432. After being cooled in the first subcooler 4221, it flows through the oxygen-enriched liquid throttling valve 441 and into the nitrogen tower condenser-evaporator 412. The pure nitrogen gas in the nitrogen purification tower 411 is introduced into the nitrogen tower condenser-evaporator 412 through the third guide pipe 433. The pure nitrogen gas and the depressurized oxygen-enriched liquid exchange heat in the nitrogen tower condenser-evaporator 412 to obtain liquid nitrogen and oxygen-enriched gas. The oxygen-enriched gas in the nitrogen tower condenser-evaporator 412 is introduced into the first subcooler 4221 through the oxygen-enriched air main pipe 1271 to serve as a cold source for heat exchange with the oxygen-enriched liquid flowing through the first subcooler 4221. Liquid nitrogen in the nitrogen tower condenser-evaporator 412 is introduced into the nitrogen purification tower 411 through the first guide pipe 431 so that the dry air treatment operation in the nitrogen purification tower 411 can be carried out continuously. At the same time, the liquid nitrogen discharged from the nitrogen tower condenser-evaporator 412 to the first guide pipe 431 flows through the liquid nitrogen pipe body 1272 and is introduced into the second liquid nitrogen throttling valve 442. After being depressurized by the second liquid nitrogen throttling valve 442, it is introduced into the second subcooler 4222. The depressurized liquid nitrogen introduced into the second subcooler 4222 is used as a cold source to exchange heat with the external liquid argon flowing through the second subcooler 4222, thereby supplying the cooled external liquid argon to the argon evaporator 31222.

[0106] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0107] The heated liquid nitrogen obtained by heat exchange in the second subcooler 4222 flows into the oxygen-enriched air main pipe 1271 through the liquid nitrogen pipe 1272 to mix with the oxygen-enriched oxygen discharged from the nitrogen tower condenser evaporator 412 and be guided together to the first subcooler 4221. The liquid nitrogen and oxygen-enriched oxygen as a whole exchange heat with the oxygen-enriched liquid introduced into the first subcooler 4221 to obtain oxygen-enriched air.

[0108] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0109] The oxygen-enriched air obtained by heat exchange in the first subcooler 4221 is introduced into the first heat exchanger 111 through the portion of the oxygen-enriched air main pipe 1271 located between the first subcooler 4221 and the first heat exchanger 111 to serve as a cold source.

[0110] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0111] The hydrogen-rich gas separated in the gas-liquid separator 22 flows through the hydrogen-rich gas pipe 125 and through the second heat exchanger 112 to be heated in the second heat exchanger 112 before being discharged.

[0112] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0113] The pure nitrogen gas discharged from the nitrogen tower 411 to the third guide pipe 433 flows through the nitrogen pipe 128 and is introduced into the first subcooler 4221 to serve as a cold source for heat exchange with the oxygen-enriched liquid introduced into the first subcooler 4221.

[0114] The operating method of the high-extraction-rate argon recovery equipment further includes the following steps:

[0115] The pure nitrogen obtained by heat exchange in the first subcooler 4221 is introduced into the first heat exchanger 111 through the portion of the nitrogen pipe 128 located between the first subcooler 4221 and the first heat exchanger 111 to serve as a cold source.

[0116] Those skilled in the art should understand that the embodiments of this application described above and shown in the accompanying drawings are merely examples and do not limit the scope of this application. The advantages of this application have been fully and effectively implemented. The functional and structural principles of this application have been demonstrated and explained in the embodiments, and any variations or modifications can be made to the implementation of this application without departing from the stated principles.

Claims

1. A high-extraction-rate argon recovery device, characterized in that, The high-extraction-rate argon recovery equipment includes an argon extraction unit, which comprises: The refined argon tube assembly includes a first processing tube assembly and a second processing tube assembly. The first processing tube assembly includes a first receiving tube, a second receiving tube, and a liquid nitrogen connection tube. The second processing tube assembly includes a first waste argon gas conduit, a waste liquid argon conduit, two return tubes, a second waste argon gas conduit, and a replenishment pipe. The first valve group includes a feed throttle valve and a first liquid nitrogen throttle valve. The feed throttle valve is installed on the first receiving pipe, and the first liquid nitrogen throttle valve is installed on the liquid nitrogen connecting pipe. Argon extraction mechanism, the argon extraction mechanism comprising: The crude liquid argon treatment component includes: The first receiving pipe is connected to the high end of the argon refining column. Crude liquid argon is guided through the first receiving pipe to the feed throttle valve so that it is depressurized by the feed throttle valve and then introduced into the argon refining column. A nitrogen reboiler is installed inside the argon refining column and located at the bottom of the column. After cooling, dry nitrogen is introduced from the high end of the nitrogen reboiler. After depressurization, the crude liquid argon introduced into the argon refining column is distilled to obtain pure liquid argon and waste argon products. After cooling, the dry nitrogen is liquefied in the nitrogen reboiler to obtain liquid nitrogen. The contaminated argon gas treatment component includes: A nitrogen evaporator is provided. The two ends of the second receiving pipe are respectively connected to the high end of the argon refining tower and the high end of the nitrogen evaporator. The argon refining tower is connected to the nitrogen evaporator through the second receiving pipe to introduce waste argon gas product into the nitrogen evaporator. The two ends of the liquid nitrogen connecting pipe are respectively connected to the low end of the nitrogen reboiler and the high end of the nitrogen evaporator. The liquid nitrogen obtained by heat exchange in the nitrogen reboiler is guided to the first liquid nitrogen throttling valve through the liquid nitrogen connecting pipe. After being depressurized by the first liquid nitrogen throttling valve, it is guided to the nitrogen evaporator. The waste argon gas product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator to obtain reflux waste liquid argon, first waste argon gas, and nitrogen. The two ends of one of the reflux pipes are respectively connected to the low end of the nitrogen evaporator and the high end of the argon refining tower. The nitrogen evaporator is connected to the argon refining tower through the corresponding reflux pipe to introduce reflux waste liquid argon into the argon refining tower. The re-extraction component includes: An argon enhancement tower has two ends of a first waste argon gas conduit connected to the high end of a nitrogen evaporator and the low end of the argon enhancement tower, respectively. The nitrogen evaporator is connected to the argon enhancement tower via the first waste argon gas conduit to introduce first waste argon gas into the argon enhancement tower. One end of a waste liquid argon conduit is connected to the high end of the argon enhancement tower to introduce waste liquid argon into the argon enhancement tower. The waste liquid argon flows downward in the argon enhancement tower to transfer heat and mass with the first waste argon gas introduced into the argon enhancement tower and flowing upward in the argon enhancement tower to obtain second waste argon gas and reflux waste liquid argon. The two ends of another reflux pipe are connected to the low end of the argon enhancement tower and the high end of the refined argon tower, respectively. The argon enhancement tower is connected to the refined argon tower via the corresponding reflux pipe to introduce reflux waste liquid argon into the refined argon tower. An argon evaporator has two ends connected to the high end of the argon evaporator and the high end of the argon enhancement tower, respectively. The argon enhancement tower is connected to the argon evaporator through the second waste argon gas conduit to introduce second waste argon gas into the argon evaporator. One end of the replenishment pipe is connected to the argon evaporator and is used to introduce external liquid argon into the argon evaporator. The external liquid argon and the second waste argon gas exchange heat in the argon evaporator to obtain exhaust waste argon gas, waste liquid argon, and second product argon gas. The end of the waste liquid argon conduit away from the argon enhancement tower is connected to the low end of the argon evaporator. The argon evaporator is connected to the argon enhancement tower through the waste liquid argon conduit to introduce waste liquid argon into the argon enhancement tower.

2. The high extraction rate argon recovery equipment according to claim 1, characterized in that, The high-extraction-rate argon recovery equipment includes a heat exchanger assembly, which comprises heat exchange devices and a conduit assembly. The conduit assembly includes at least one feed pipe. The heat exchange devices are mounted on the feed pipes. Raw argon gas is introduced into the heat exchange devices through the feed pipes and discharged after heat exchange and cooling within the heat exchange devices. The high-extraction-rate argon recovery equipment also includes a hydrogen removal unit, which includes an argon condenser-evaporator. The argon condenser-evaporator is mounted at one end of the feed pipe. After cooling through heat exchange within the heat exchange devices, the raw argon gas passes through the feed pipes between the heat exchange devices and the heat exchanger assembly. The crude argon gas is introduced into the argon condenser-evaporator through a section between the two argon condensers-evaporators. After cooling, the crude argon gas is cooled by heat exchange in the argon condenser-evaporator to obtain a crude argon gas-liquid mixture. The hydrogen removal unit also includes a gas-liquid separator. The argon condenser-evaporator is connected to the gas-liquid separator through a pipeline to introduce the crude argon gas-liquid mixture into the gas-liquid separator. The crude argon gas-liquid mixture undergoes gas-liquid separation in the gas-liquid separator to obtain hydrogen-rich gas and crude liquid argon. The lower end of the gas-liquid separator is connected to the other end of the first receiving pipe and crude liquid argon is introduced into the upper end of the argon refining tower through the first receiving pipe.

3. The high extraction rate argon recovery equipment according to claim 2, characterized in that, The first processing pipe assembly includes a pure liquid argon connecting pipe, and the first valve assembly includes a pure liquid argon throttling valve. The two ends of the pure liquid argon connecting pipe are respectively connected to the lower end of the refined argon column and the upper end of the argon condenser evaporator. The pure liquid argon throttling valve is installed on the pure liquid argon connecting pipe. The pure liquid argon in the refined argon column is guided through the pure liquid argon connecting pipe to the pure liquid argon throttling valve for depressurization before being introduced into the argon condenser evaporator. After depressurization, the pure liquid argon introduced into the argon condenser evaporator acts as a cold source, interacting with the argon condenser evaporator introduced through the feed pipe. After cooling in the condenser evaporator, crude argon gas undergoes heat exchange, and pure liquid argon heats up within the argon condenser evaporator to obtain the first product argon gas. The connecting pipe assembly also includes a product argon gas pipe assembly, which includes a first product argon gas pipe. One end of the first product argon gas pipe is connected to the high end of the argon condenser evaporator. The heat exchange device is installed on the first product argon gas pipe. The first product argon gas obtained by heat exchange in the argon condenser evaporator is guided through the first product argon gas pipe to the heat exchange device for heat exchange and heating before being discharged.

4. The high extraction rate argon recovery equipment according to claim 3, characterized in that, The crude argon processing component includes a nitrogen compressor, the conduit assembly includes a nitrogen pipe assembly, the nitrogen pipe assembly includes a first nitrogen conduit, the two ends of the first nitrogen conduit are respectively connected to the nitrogen compressor and the high end of the nitrogen reboiler, the heat exchange device is installed on the first nitrogen conduit, the nitrogen compressor introduces dry nitrogen into the first nitrogen conduit, the dry nitrogen is introduced into the heat exchange device through the first nitrogen conduit to exchange heat and cool down in the heat exchange device before being introduced into the nitrogen reboiler.

5. The high extraction rate argon recovery equipment according to claim 4, characterized in that, The nitrogen pipeline includes a second nitrogen conduit, the two ends of which are respectively connected to the nitrogen compressor and the high end of the nitrogen evaporator. The heat exchange device is installed on the second nitrogen conduit. The nitrogen obtained by heat exchange in the nitrogen evaporator is guided through the second nitrogen conduit to the heat exchange device to exchange heat and be heated in the heat exchange device before being guided to the nitrogen compressor.

6. The high extraction rate argon recovery equipment according to claim 5, characterized in that, The product argon gas pipe assembly also includes a second product argon gas pipe. One end of the second product argon gas pipe is connected to the high end of the argon evaporator. The heat exchange device is installed on the second product argon gas pipe. The second product argon gas obtained by heat exchange in the argon evaporator is guided through the second product argon gas pipe to the heat exchange device to exchange heat in the heat exchange device and be heated before being discharged.

7. The high extraction rate argon recovery equipment according to claim 6, characterized in that, The conduit assembly also includes a waste argon gas exhaust pipe. One end of the waste argon gas exhaust pipe is connected to the high end of the argon evaporator. The heat exchange device is installed on the waste argon gas exhaust pipe. The waste argon gas obtained by heat exchange in the argon evaporator is guided to the heat exchange device through the waste argon gas exhaust pipe to exchange heat in the heat exchange device and be heated before being discharged.

8. The high extraction rate argon recovery equipment according to claim 7, characterized in that, The conduit assembly includes a hydrogen-rich gas pipe, one end of which is connected to the gas-liquid separator. Hydrogen-rich gas separated in the gas-liquid separator is discharged through the hydrogen-rich gas pipe. Two feed pipes are provided, each with one end connected to the argon condenser evaporator. The heat exchange device includes a first heat exchanger and a second heat exchanger. The first heat exchanger is installed on one of the feed pipes, the first nitrogen conduit, the second nitrogen conduit, the first product argon gas pipe, and the second product argon gas pipe. The second heat exchanger is installed on the other feed pipe, the waste argon gas exhaust pipe, and the hydrogen-rich gas pipe, and the gas flows through the corresponding feed pipe and into the first heat exchanger. The crude argon gas is cooled by exchanging heat with the dry nitrogen gas introduced into the first heat exchanger through the second nitrogen gas conduit, the first product argon gas introduced into the first heat exchanger through the first product argon gas conduit, and the second product argon gas introduced into the first heat exchanger through the second product argon gas conduit, and then directed to the argon condenser-evaporator. The crude argon gas flowing through the corresponding feed pipe and introduced into the second heat exchanger is cooled by exchanging heat with the sludge argon gas introduced into the second heat exchanger through the sludge argon gas exhaust pipe and the hydrogen-rich gas introduced into the second heat exchanger through the hydrogen-rich gas conduit, and then directed to the argon condenser-evaporator. The radial end of one feed pipe away from the argon condenser-evaporator is connected to the end of another feed pipe away from the argon condenser-evaporator.

9. The high extraction rate argon recovery equipment according to claim 8, characterized in that, The heat exchanger assembly includes two crude argon control valves. Each of the two feed pipes is provided with a crude argon control valve at the connection point between the two pipes and the first heat exchanger or the second heat exchanger. The crude argon control valve is used to regulate the flow rate of crude argon that flows through the corresponding feed pipe and is directed to the first heat exchanger or the second heat exchanger.

10. The operating method of the high extraction rate argon recovery device according to any one of claims 1 to 9, characterized in that, The working method of the high-extraction-rate argon recovery equipment includes the following steps: After cooling, the dry nitrogen is introduced from the high end of the nitrogen reboiler. The crude liquid argon is guided through the first feed pipe to the feed throttle valve and then introduced into the argon refiner after being depressurized by the feed throttle valve to be distilled to obtain pure liquid argon and waste argon products. After cooling, the dry nitrogen is liquefied in the nitrogen reboiler to obtain liquid nitrogen. The waste argon product is introduced into the nitrogen evaporator through the second receiving pipe. Liquid nitrogen is guided through the liquid nitrogen connecting pipe to the first liquid nitrogen throttling valve so that it is depressurized by the first liquid nitrogen throttling valve and then guided into the nitrogen evaporator. The waste argon product and the depressurized liquid nitrogen exchange heat in the nitrogen evaporator to obtain reflux waste liquid argon, first waste argon gas and nitrogen. The first waste argon gas is introduced into the argon enhancement tower through the first waste argon gas conduit. Waste liquid argon is introduced into the argon enhancement tower through the waste liquid argon conduit. The waste liquid argon flows downward in the argon enhancement tower to transfer heat and mass with the first waste argon gas flowing upward in the argon enhancement tower to obtain second waste argon gas and reflux waste liquid argon. The nitrogen evaporator and the argon enhancement tower respectively introduce reflux waste liquid argon into the refined argon tower through the two reflux pipes. The reflux waste liquid argon flows downward in the refined argon tower to transfer heat and mass with the waste argon product flowing upward in the refined argon tower. The second waste argon gas is introduced into the argon evaporator through the second waste argon gas conduit. External liquid argon is introduced into the argon evaporator through the replenishment pipe. The external liquid argon and the second waste argon gas exchange heat in the argon evaporator to obtain exhaust waste argon gas, waste liquid argon, and second product argon gas. The waste liquid argon in the argon evaporator is introduced into the argon enhancement tower through the waste liquid argon conduit so that the first waste argon gas treatment operation in the argon enhancement tower can be carried out continuously.

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