Shower apparatus, film deposition device, film deposition method, and cell
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2026-01-20
- Publication Date
- 2026-08-13
Smart Images
Figure CN2026073674_13082026_PF_FP_ABST
Abstract
Description
Spraying device, coating equipment, coating method and battery cell
[0001] Cross-reference to related applications
[0002] This application claims priority to Chinese Patent Application No. 202510144190.2, filed on February 8, 2025, entitled “Spraying Apparatus, Coating Equipment, Coating Method and Battery Cell”, the entire contents of which are incorporated herein by reference. Technical Field
[0003] This application relates to the field of coating technology, and in particular to a spraying device, coating equipment, coating method and battery cell. Background Technology
[0004] In existing technologies, ALD (Atomic Layer Deposition) or CVD (Chemical Vapor Deposition) processes are commonly used to prepare passivation films on the cut surfaces of solar cells. However, due to the presence of grid lines on the cell surface, gaps exist between cells when multiple cells are stacked. The reactive gases in the ALD process can penetrate these gaps and deposit a passivation film on the cell surface, resulting in a wrap-around plating situation. Furthermore, since the passivation film is an insulating film, its adhesion to the grid lines causes poor soldering during the fabrication of the solar module, further affecting the power generation of the final solar module. Therefore, a technical solution is urgently needed to address the problem of wrap-around plating on the cell surface. Summary of the Invention
[0005] The main technical problem addressed by this application is to provide a spraying device, coating equipment, coating method, and battery cell, thereby improving the product reliability of the battery cell.
[0006] To solve the above-mentioned technical problems, this application adopts a technical solution: providing a spraying device, the spraying device including a first housing, the first housing having a first receiving cavity with an opening on one side, the first receiving cavity being used to accommodate a plurality of stacked workpieces to be coated; wherein, the first housing includes a first spray plate disposed opposite to the opening, the first spray plate having at least one first spray hole communicating with the first receiving cavity.
[0007] The first spray plate is provided with a first air inlet hole, and the first spray hole is connected to the first air inlet hole through a spray channel.
[0008] The number of first spray holes is multiple, and the multiple first spray holes are arranged in multiple rows. The spray channel includes a first spray channel and a second spray channel. The first spray holes in the same row are connected to the same first spray channel. The multiple first spray channels are simultaneously connected to the first air inlet through the second spray channel. The extension direction of the second spray channel intersects the extension direction of the first spray channel.
[0009] The spraying device further includes a second housing, which includes a second base plate, two second side plates, and a cover plate. The two second side plates are spaced apart and connected to both sides of the second base plate. At least one of the first housings is disposed on the second base plate and located between two adjacent second side plates. The opening is oriented toward one of the second side plates and is spaced apart from the adjacent second side plates to form an air intake channel between the opening and the second side plates. The cover plate is disposed opposite to the second base plate and between the two second side plates.
[0010] The second base plate is provided with a second air inlet, and the first spray hole on the first spray plate is connected to the first air inlet and the second air inlet in sequence through the spray channel.
[0011] The second housing also includes a second spray plate, which is located at the end of the second bottom plate and connected to two second side plates. The surface of the second spray plate facing the first housing has a second spray hole, which is connected to the air intake channel.
[0012] The number of first boxes is multiple, and the multiple first boxes are divided into multiple repeating units. The multiple repeating units are arranged along the extension direction of the second side plate. Each repeating unit includes two first boxes, and the openings of the two first boxes are arranged opposite to each other.
[0013] To solve the above-mentioned technical problems, this application adopts a technical solution: providing a coating equipment, including the spraying device described above.
[0014] To solve the above-mentioned technical problems, this application adopts a technical solution: providing a coating method using the coating equipment described above, the method comprising: stacking multiple workpieces to be coated in a first box, wherein the processing surface of the workpieces to be coated is exposed at the opening of the first box; introducing a first gas from the first spray hole of the first spray plate into the stacked workpieces to be coated to form an air wall extending toward the processing surface; and introducing a second gas to deposit and passivate the processing surface exposed at the opening.
[0015] The second gas includes either O3 or H2O, and the first gas includes either N2 or A. r Any one of them.
[0016] Beneficial effects: This application stacks multiple workpieces to be coated inside a first chamber, allowing the machined surfaces of the workpieces to be coated to be exposed at the opening. This enables the workpieces at the opening to be coated with a reactive gas. Simultaneously, a first spray plate positioned opposite the opening can introduce inert gas into the first chamber through the first spray hole. This reduces the risk of the reactive gas entering the first chamber and coating the non-machined surfaces of the workpieces, thereby improving the product reliability of the workpieces to be coated.
[0017] Taking a solar cell as an example, the purpose of coating the machined surface of the workpiece to be coated is explained: In industrial applications, solar cells are usually cut into smaller pieces to reduce the resistance loss of current on the cell surface, thereby improving the conversion efficiency of the cell. However, during the cutting process, the cross-section of a complete solar cell is an unpassivated silicon wafer. The recombination rate of the unpassivated edge cross-section is very high, which leads to a reduction in the conversion efficiency of the cell by 0.2-0.3%, thus having a significant impact on the electrical performance of the cell. Heterojunction (HJT) solar cells have high open-circuit voltages, and the conversion efficiency reduction after laser cleaving is even greater (usually greater than 0.3%). The efficiency reduction of the cell caused by laser cleaving will directly lead to a reduction in the power of the entire solar module containing the sliced cells. Therefore, it is necessary to passivate the cut surface of the solar cell (i.e., the machined surface of the workpiece to be coated as proposed in this application) by edge passivation coating to reduce or eliminate the power loss caused by the damage to the cut surface. Among them, passivation coating refers to the formation of a passivation film on the cut surface of the battery cell (i.e. the processing surface of the workpiece to be coated as proposed in this application) by deposition, thereby reducing minority carrier recombination, providing field passivation effect and reducing reflectivity.
[0018] Continuing with the example of a battery cell as the workpiece to be coated, and considering the effect of the passivation coating process on the battery cell, the main contents of the spraying device, coating equipment, and coating method in this application are reflected in the following points:
[0019] 1. Flow field design
[0020] When multiple solar cells are stacked in the first chamber, the grid line height on the surface of the solar cells creates a relatively wide gap between them. Since the passivation deposition reaction needs to be carried out in a vacuum environment, the pressure in the gaps between the solar cells is low. This makes it easy for the second gas to enter the gaps between the solar cells when it flows through the cut surface of the solar cells (i.e., the processing surface of the workpiece to be coated). This is because the pressure on the cut surface is greater than the pressure in the gaps between the solar cells, thus depositing aluminum oxide and forming a wrap-around coating that affects the subsequent welding process.
[0021] Therefore, by setting up a first housing, which is also a five-sided enclosed structure, multiple solar cells are stacked inside the first housing, with the cut surfaces of the solar cells exposed at the opening of the first housing. A first spray plate sprays a first gas onto the stacked solar cells inside the first housing. The first gas flows into the first housing evenly at a specific speed and flow rate, allowing the first gas to form an air wall in the gaps between the solar cells. That is, the first gas can apply pressure in the direction of the cut surfaces of the solar cells, thereby increasing the pressure in the gaps between the solar cells. This allows the first gas to block the second gas flowing over the surface of the solar cells and form a no-go zone for the second gas between the stacked solar cells, thereby reducing the risk of the second gas entering the gaps between the solar cells and depositing aluminum oxide, leading to plating around the cells.
[0022] 2. New gas field design for edge passivation coating applications
[0023] The application requirements for edge passivation coating mainly involve passivating the cut surfaces of solar cells. This differs significantly from traditional full-surface passivation applications. Therefore, to improve the effective utilization rate of the second gas and prevent it from appearing in the non-coating areas (i.e., non-cut surfaces) of the solar cells, the entire gas field needs to be specifically designed. Specifically, after placing the first chamber inside the second chamber, an air intake channel is formed between the opening of the first chamber and the second side plate of the second chamber. This allows the second gas used for edge passivation coating of the solar cell cut surfaces to contact the cut surfaces from the air intake channel. Combined with the first gas sprayed from the first spray plate in the first chamber, a new gas field design is achieved. This design not only passivates the cut surfaces of the solar cells but also creates a no-go zone for the second gas on the non-cut surfaces, thereby reducing the risk of coating wrapping around the solar cells. Simultaneously, after the second and first gases are combined, a vacuum pump can be used to remove the combined second and first gases, forming the complete airflow field required for the edge passivation coating application in the coating equipment.
[0024] 3. Coating equipment design for edge passivation coating applications
[0025] To increase the production capacity of the edge passivation coating equipment while ensuring that the process performance is not affected, multiple first boxes can be set in the second box, and the number of second boxes can be increased at the same time to form a multi-layer stack of multiple second boxes. Preferably, two second boxes are stacked on top of each other, so as to realize a control system with multiple independent zones while improving production efficiency.
[0026] 4. The coating process is further optimized to match edge passivation coating applications. The use of a spray device can solve the problem of wrap-around coating in the TMA (trimethylaluminum) + H2O passivation coating process. Furthermore, the TMA (trimethylaluminum) + O3 (ozone) process is preferred.
[0027] Currently, the mainstream edge passivation coating process is the alumina process, with TMA (trimethylaluminum) and H2O (water) as reactants. Due to the hydrogen bonds between H2O molecules, which exhibit relatively weak interactions, water molecules can form clusters, resulting in high cohesion and surface tension. This hydrogen bonding causes water molecules to attract each other, increasing the difficulty of removing individual water molecules. Simultaneously, because water molecules have a polar structure—oxygen atoms carry a negative charge and hydrogen atoms carry a positive charge—there are strong interactions between water molecules and other polar molecules, further increasing the difficulty of removing water molecules.
[0028] Therefore, by combining the above-mentioned spray device with the TMA (trimethylaluminum) + H2O process for passivation coating, the first gas sprayed from the first spray hole of the first spray plate in the first box can reduce or avoid the situation where reactants such as H2O / TMA / O3 enter the gaps between the battery cells, thus improving the problem of coating wrapping caused by the TMA (trimethylaluminum) + H2O process for passivation coating in the prior art.
[0029] Furthermore, to further remove the reactive gas (i.e., the second gas) entering the second chamber, TMA and O3 are preferably used as the reaction source for alumina deposition. O3's high chemical reactivity and rapid decomposition rate make it easier to remove than H2O molecules, further reducing the risk of reactive gas entering the gaps between stacked solar cells and causing plating defects that could affect welding. However, because O3 has strong oxidizing properties and can easily corrode the grid lines on the surface of the finished solar cells, the first chamber, through its first spray plate, applies airflow and pressure to the gaps between the solar cells towards the cut surface. This ensures that the pressure in the gaps between the solar cells is greater than or equal to the pressure on the cut surface, preventing O3 from entering the gaps. This prevents the formation of an alumina film on the surface that could affect welding and also prevents O3 from entering the gaps between the solar cells and corroding the grid lines.
[0030] 5. Manufacturing process of solar cells and modules
[0031] A process for controlling the coating of photovoltaic cells can be used with conventional equipment or the equipment described in this application. The equipment described in this application refers to the process of passing off the edge cross-section of the cell by introducing a first gas into the gap between the cells to form an air wall, thereby preventing the second gas (reaction gas) from entering the gap between the cells and thus avoiding the formation of coating on the front or back of the cell. The conventional wire wrapping width of solar cells is generally 3-8 mm. The wire wrapping width of solar cells prepared by the process of this application can be controlled to 0.1-1 mm (i.e., using H2O as an oxidant and the device of this application for passivation coating). Preferably, the wire wrapping width of solar cells can reach less than 0.1 mm (i.e., using O3 as an oxidant and the device of this application for passivation coating). More preferably, the wire wrapping width of solar cells can reach less than 0.01 mm (i.e., using O3 as an oxidant and the device of this application for passivation coating). The wire wrapping is almost unobservable. Therefore, by reducing the wire wrapping, the welded solar cell module can reduce the conversion efficiency loss caused by solar cell cutting, improve the efficiency of the solar cell module, and reduce the power generation cost of the module. Attached Figure Description
[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:
[0033] Figure 1 is a schematic diagram of the overall structure of the spraying device provided in some embodiments of this application;
[0034] Figure 2 is an exploded view of the spray device in Figure 1;
[0035] Figure 3 is a cross-sectional schematic diagram of a first spray plate provided in some embodiments of this application;
[0036] Figure 4 is a schematic diagram of the structure of a first box placed inside a second box according to some embodiments of this application;
[0037] Figure 5 is a schematic diagram of the spraying of the second gas and the first gas provided in some embodiments of this application;
[0038] Figure 6 is a schematic diagram of the structure in which the first spray plate and the second base plate are connected according to some embodiments of this application;
[0039] Figure 7 is a schematic diagram of the spraying of the second gas and the first gas provided in some other embodiments of this application;
[0040] Figure 8 is a schematic diagram of four independent regions provided in some embodiments of this application;
[0041] Figure 9 is a schematic diagram of the structure of two second boxes stacked according to some embodiments of this application;
[0042] Figure 10 is a structural block diagram of a coating apparatus provided in some embodiments of this application;
[0043] Figure 11 is a flowchart of a coating method provided in some embodiments of this application;
[0044] Figure 12 shows the coating process on the surface of the battery cell after passivation coating using water in conventional equipment in the prior art.
[0045] Figure 13 shows the surface coating of the battery cell after passivation coating using the ozone process provided in some embodiments of this application. Embodiments of the present invention
[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0047] The terms "first," "second," and "third" in this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movements between components in a specific orientation (as shown in the figures). If the specific orientation changes, the directional indications also change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.
[0048] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0049] In industrial applications, solar cells are typically cut into smaller pieces to reduce resistive current loss on the cell surface, thereby improving conversion efficiency. However, during the cutting process, the cross-section of a complete cell becomes an unpassivated silicon wafer. The recombination rate at the unpassivated edge is high, leading to a 0.2-0.3% reduction in conversion efficiency, significantly impacting the cell's electrical performance. Heterojunction (HJT) solar cells, with their high open-circuit voltage, experience an even greater efficiency reduction after laser cleaving (typically greater than 0.3%). This efficiency reduction directly leads to a decrease in the overall power of the entire solar module containing the cleaved cells. Therefore, passivation coatings are applied to the cut surfaces of the cells to reduce or eliminate power loss caused by surface damage. Passivation coating involves depositing a passivation film onto the cut surface of the cell to reduce minority carrier recombination, provide field passivation, and reduce reflectivity.
[0050] However, due to the gaps between the stacked solar cells, according to the grid line height test, the grid line height of a finished solar cell is 7-11um, and the gap height between the solar cells is 14-22um, which is much larger than the reaction source molecules (e.g., H2O 0.27nm). Moreover, since the deposition reaction needs to be carried out in a vacuum environment, the pressure in the gaps between the solar cells is low. This makes it easy for the reaction gas to enter between the solar cells when it flows through the cut surface of the solar cell, because the pressure on the cut surface is greater than the pressure in the gaps between the solar cells. As a result, aluminum oxide is deposited on the non-cut surface of the solar cell, causing circumferential plating, which affects the welding process.
[0051] Therefore, to address the aforementioned problems, please refer to Figure 1. In one embodiment of this application, a spraying device 100 is provided as a carrier for the workpiece 10 to be coated. Similarly, the workpiece 10 to be coated in this application is a battery cell, which is typically coated using TMA (Trimethyl Aluminum) oxide. Therefore, this application details a technical solution for coating battery cells using TMA oxide to generate aluminum oxide. It is understood that the same applies when using other reactants. The spraying device 100 of this application can be installed in the coating equipment 200 within a reaction chamber that accommodates the coating reaction.
[0052] In this application, a second gas (i.e., a reaction gas, which may include a passivating agent and an oxidizing agent) can be introduced and contacted onto the processing surface 11 (i.e., the cut surface) of the solar cell. Then, an atomic layer deposition (ALD) chemical reaction occurs on the processing surface 11 to generate a coating, such as an aluminum oxide coating, an aluminum nitride coating, or a silicon oxide coating, thus completing the edge passivation coating process of the solar cell. In other embodiments, a chemical vapor deposition (CVD) method can also be used to generate the coating; this is not a limitation.
[0053] Specifically, please refer to Figure 1. The spray device 100 includes a first housing 20. The first housing 20 has a first receiving cavity 22 with an opening 21 on one side. The first receiving cavity 22 is used to accommodate multiple stacked workpieces 10 to be coated. At this time, the first housing 20 stably supports the multiple stacked workpieces 10 to be coated, so that the processing surface 11 of the workpiece 10 to be coated can be exposed at the opening 21. This allows the second gas (i.e., the reaction gas) to directly perform coating operation on the processing surface 11 at the opening 21 during the coating process, thereby reducing the risk of unwanted coating on the non-processed surface of the workpiece 10 to be coated.
[0054] Please refer to Figures 1 and 2 together. The first housing 20 includes a first spray plate 23 disposed opposite to the opening 21. The first spray plate 23 is provided with at least one first spray hole 231 communicating with the first receiving cavity 22, so that during the coating process, a first gas that does not chemically react with the second gas passing through the opening 21, such as inert gas nitrogen (N2) or argon (A2), can be sprayed into the first housing 20 through the first spray hole 231. r This process, such as creating an air wall between the workpieces 10 to be coated, increases the internal air pressure inside the first housing 20, thereby increasing the pressure in the gap between the workpieces 10 to be coated. Alternatively, the air wall formed by the first gas can directly blow out the second gas that enters between the workpieces 10 to be coated, creating a no-go zone for the second gas on the non-machined surface of the workpieces 10 to be coated. This further reduces the risk of the second gas entering the first housing 20 and contacting the non-machined surface of the workpieces 10 to be coated, thus reducing the risk of unwanted coating and minimizing the occurrence of wrap-around coating on the non-machined surface of the workpieces 10 to be coated.
[0055] The above-mentioned arrangement of multiple workpieces 10 to be coated is stacked in the first housing 20, with the machined surface 11 of the workpieces 10 to be coated exposed at the opening 21. This allows the workpieces 10 at the opening 21 to be coated by the second gas (i.e., the reaction gas). At the same time, the first spray plate 23, which is arranged opposite to the opening 21, can input the first gas (i.e., the inert gas) into the first housing 20 through the first spray hole 231. This reduces the risk of the first gas entering the first housing 20 and coating the non-machined surface of the workpieces 10, thereby improving the product reliability of the workpieces 10 to be coated.
[0056] In some embodiments, the flow direction of the first gas sprayed into the first housing 20 from the first spray hole 231 is preferably transverse to each workpiece 10 to be coated, that is, parallel to the upper or lower surface of the workpiece 10 in the third direction Z in FIG1. The airflow of the second gas (i.e., the reaction gas) sprayed toward the opening 21 is usually in a direction perpendicular to the upper or lower surface of the workpiece 10 to be coated (i.e., the second direction Y in FIG1). At this time, the airflow extension direction of the second gas and the airflow extension direction of the first gas are perpendicular to each other. Here, the airflow extension direction of the first gas refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0057] In other embodiments, the airflow direction of the second gas (i.e., the reactive gas) sprayed toward the opening 21 may also be parallel to the extension direction of the upper or lower surface of the workpiece 10 to be coated (i.e., the third direction Z in the figure). That is, the airflow extension direction of the second gas is parallel to the airflow extension direction of the first gas to achieve counter-current, which can further prevent the second gas from entering the gaps between the workpieces 10 to be coated. Similarly, the limitation on the airflow extension direction of the first gas here refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0058] Please refer to Figures 2 and 3 together. In some embodiments, the bottom of the first spray plate 23 is provided with a first air inlet 232. The first spray hole 231 is connected to the first air inlet 232 through the spray channel 233. The first air inlet 232 is used to introduce the first gas that is about to be sprayed into the first box 20, so that the first spray plate 23 can effectively spray the first gas between multiple stacked workpieces 10 to be coated.
[0059] In some embodiments, the number of first air inlets 232 may be multiple. For example, in this embodiment, two spaced-apart first air inlets 232 are provided at the bottom of the first spray plate 23. It is understood that the specific number of first air inlets 232 can be set according to the size of the first spray plate 23, and is not limited here.
[0060] Referring to Figure 2, in some embodiments, the first housing 20 further includes a first bottom plate 24, a top plate 25, and two first side plates 26. The first bottom plate 24 and top plate 25 are arranged opposite each other along a first direction X, and the two first side plates 26 are arranged opposite each other along a second direction Y. A first spray plate 23 is disposed between the two first side plates 26, and the first spray plate 23 and the two first side plates 26 surround the first bottom plate 24 and the top plate 25. An opening 21 is formed between the first bottom plate 24, the top plate 25, and the two first side plates 26, such that the first spray plate 23 and the opening 21 are arranged opposite each other along a third direction Z, so that the first gas sprayed from the first spray plate 23 can enter the interior of the first housing 20.
[0061] As can be seen, the first housing 20 is a five-sided enclosed structure composed of a first bottom plate 24, a top plate 25, two first side plates 26, and a first spray plate 23. Stacked workpieces 10 to be coated can be placed inside the first housing 20, ensuring that the processing surface 11 to be coated is exposed at the opening 21 to contact the second gas. Uniformly arranged first spray holes 231 are provided on the first spray plate 23. The first gas can flow out uniformly from the first spray holes 231 at a specific speed and flow rate, flowing into the gaps between the workpieces 10 to be coated, forming an air wall. The presence of this air wall can increase the pressure within the gaps between the workpieces 10 to be coated, thereby preventing the second gas near the processing surface 11 of the workpieces 10 to be coated from penetrating into the gaps.
[0062] In some embodiments, the first housing 20 is an integrally formed structure, thereby improving the structural strength of the first housing 20.
[0063] In some embodiments, the first base plate 24, the top plate 25, the two first side plates 26, and the first spray plate 23 are fixedly connected by bolts.
[0064] In some embodiments, the first direction X, the second direction Y, and the third direction Z are mutually perpendicular to each other.
[0065] Please refer to Figure 2. In some embodiments, the top plate 25 has positioning protrusions 251 at both ends facing the first side plates 26, and each first side plate 26 has a corresponding positioning groove 261 on its inner wall facing the other first side plate 26. The positioning protrusions 251 can be inserted into the positioning grooves 261. The positioning grooves 261 allow the positioning protrusions 251 to be smoothly inserted between the two first side plates 26 when the top plate 25 is placed on the two first side plates 26, achieving precise positioning between the top plate 25 and the first side plates 26, and also improving the connection stability between the top plate 25 and the two first side plates 26.
[0066] Please refer to Figures 2 and 4 together. In some embodiments, a positioning protrusion 251 may be provided on the side of the top plate 25 facing the first spray plate 23, and a positioning groove 261 is correspondingly provided on the side of the first spray plate 23 facing the top plate 25, which further improves the structural stability of the first box 20.
[0067] Please refer again to Figures 2 and 3. In some embodiments, there are multiple first spray holes 231, which can be irregularly arranged. Preferably, for example, in this embodiment, the multiple first spray holes 231 are arranged in multiple rows, which can achieve a more uniform and comprehensive spraying effect on the workpiece 10 to be coated within the first housing 20. The spray channel 233 includes a first spray channel 2331 and a second spray channel 2332. The first spray holes 231 in the same row are connected to the same first spray channel 2331, and multiple first spray channels 2331 are simultaneously connected to the first air inlet 232 through the second spray channel 2332. The extending direction of the second spray channel 2332 intersects the extending direction of the first spray channel 2331. Each row of first spray holes 231 receives first gas from the corresponding first spray channel 2331, ensuring the uniformity and consistency of the spraying action of each row of first spray holes 231. Meanwhile, by connecting one or more second spray channels 2332 to the first air inlet 232, the flow path of the first gas can be optimized, the flow resistance of the first gas can be reduced, thereby improving the spraying efficiency of the first spray plate 23.
[0068] In some embodiments, the extending direction of the first spray channel 2331 is perpendicular to the extending direction of the second spray channel 2332.
[0069] In this embodiment, the first spray plate 23 has 10 rows of parallel first spray channels 2331, each of which intersects with two columns of second spray channels 2332. Each second spray channel 2332 is connected to a first air inlet 232. It can be understood that the number of first spray channels 2331 and the number of second spray channels 2332 can be set according to the size of the first spray plate 23, and there is no limitation here.
[0070] Please refer to Figures 2, 4, and 5 together. In some embodiments, the spray device 100 further includes a second housing 30, which includes a second base plate 31, two second side plates 32, and a cover plate 35 (see Figure 9). The two second side plates 32 are spaced apart and connected to both sides of the second base plate 31. The cover plate 35 is disposed opposite to the second base plate 31 and between the two second side plates 32. In this embodiment, the two second side plates 32 are spaced apart along a third direction Z, and the cover plate 35 is disposed opposite to the second base plate 31 along a first direction X.
[0071] At least one first housing 20 is disposed on the second base plate 31 and located between two adjacent second side plates 32. An opening 21 is disposed facing one of the second side plates 32, and the opening 21 and the adjacent second side plate 32 are spaced apart to form an air intake channel 33 between the opening 21 and the second side plate 32. The air intake channel 33 provides flow space for the second gas (i.e., the reaction gas) to realize the coating operation on the processing surface 11 of the workpiece 10 to be coated at the opening 21.
[0072] Specifically, the air intake channel 33 between the opening 21 and the second side plate 32 allows a predetermined spray path to be formed between the first box 20 and the second box 30. When the coating operation is performed on the processing surface 11 of the workpiece 10 to be coated, the second gas (i.e., the reaction gas) can enter the air intake channel 33 along the predetermined spray path after entering the second box 30.
[0073] The cover plate 35 (see Figure 9) is positioned opposite to the second bottom plate 31 and between the two second side plates 32, so that each second box 30 can form a closed independent structure. At the same time, the cover plate 35 also facilitates the second box 30 to be stacked along the first direction X, so that the cover plate 35 of the lower second box 30 can support the upper second box 30.
[0074] In some embodiments, the width and shape of the air intake channel 33 may be set according to the actual coating requirements, and are not limited herein.
[0075] Please refer to Figures 3, 4 and 6 together. In some embodiments, the second base plate 31 is provided with a second air inlet 311. The first spray hole 231 on the first spray plate 23 is connected to the first air inlet 232 and the second air inlet 311 in sequence through the spray channel 233, so that when the first box 20 is placed in the second box 30, the first gas (i.e., inert gas) can smoothly transition from air intake to spraying, forming a complete gas flow path and completing the spraying process of the first spray plate 23.
[0076] It is understandable that the number of second air intakes 311 is the same as the number of first air intakes 232, so as to achieve a one-to-one correspondence.
[0077] Specifically, a first box 20 containing stacked finished workpieces 10 to be coated is placed inside a second box 30. The second box 30 has a second air inlet 311. The first air inlet 232 at the bottom of the first spray plate 23 in the first box 20 is connected to the second air inlet 311 on the second box 30. The first gas (inert gas such as nitrogen or helium) enters the first spray plate 23 of the first box 20 through the second box 30, providing an airflow and pressure towards the processing surface 11 of the workpieces 10 to be coated in the gaps between the stacked workpieces 10 in the first box 20. When the second gas (i.e., the reaction gas) flows through the air inlet channel 33 between the second housing 30 and the opening 21 of the first housing 20 across the processing surface 11 of the workpiece 10 to be coated, since there is no pressure difference between the processing surface 11 and the workpiece 10 to be coated and there is an airflow in the direction of the processing surface 11 to be coated, the second gas (i.e., the reaction gas) will not enter the gap between the workpieces 10 to be coated, thereby reducing the risk of the workpiece 10 to be coated being coated around the coating.
[0078] Please refer to Figures 4 and 5 together. In some embodiments, the second housing 30 also includes a second spray plate 34. The second spray plate 34 is located at the end of the second bottom plate 31 and connects to two second side plates 32. The surface of the second spray plate 34 facing the first housing 20 is provided with second spray holes 341. The second spray holes 341 are connected to the air inlet channel 33 in the second housing 30, so that the second gas (i.e., the reaction gas) corresponding to the workpiece 10 to be coated can enter the second housing 30 through the second spray holes 341 and continue to flow along the air inlet channel 33 to spray the workpiece 10 to be coated with the second gas (i.e., the reaction gas) located at the air inlet channel 33 and exposed at the opening 21 of the first housing 20. The second gas (i.e., the reaction gas) causes a passivation coating reaction on the processing surface 11 of the workpiece 10 to be coated.
[0079] Please refer to Figures 4 and 5. In some embodiments, a nozzle 342 facing the first housing 20 can be provided at the second spray hole 341 of the second spray plate 34, with the second spray hole 341 located inside the nozzle 342. The nozzle 342 protrudes towards the first housing 20, ensuring gas sealing of the second gas ejected from the nozzle 342 within the second housing 30 and reducing the risk of flow loss when the second gas exits from the nozzle 342.
[0080] Specifically, the nozzles 342 can be divided into two categories for spraying the second gas (i.e., the reaction gas). One category is used to spray the passivating agent gas jet, and the other category is used to spray the oxidizing agent gas jet. Then, the various second gases (i.e., the reaction gases) can be sprayed from the corresponding nozzles 342 into the air inlet channel 33 of the second box 30 and fall onto the processing surface 11 of the workpiece 10 to be coated, which is exposed at the opening 21. After the processing surface 11 meets the temperature conditions, the various second gases (i.e., the reaction gases) can undergo multi-level coating reactions to achieve the coating process of the processing surface 11.
[0081] It is understandable that each nozzle 342 can be connected to an external passivating agent gas source or oxidizing agent gas source through a corresponding passivating agent pipe or oxidizing agent pipe.
[0082] In some embodiments, the second gas (i.e., the reaction gas) ejected by the nozzle 342 includes, but is not limited to, passivating agent gas and oxidizing agent gas.
[0083] Please refer to Figures 4 and 7 together. In some embodiments, the second spray plate 34 is disposed on the connecting second side plate 32. At this time, the second spray plate 34 is disposed opposite to the first spray plate 23 (see Figure 2). At this time, the airflow direction of the second gas (i.e., the reaction gas) sprayed towards the opening 21 is parallel to the extension direction of the upper or lower surface of the workpiece 10 to be coated. That is, the airflow extension direction of the second gas is parallel to the airflow extension direction of the first gas to achieve counterflow, which can further prevent the second gas from entering the gap between the workpieces 10 to be coated.
[0084] Please refer again to Figures 4 and 5. In some embodiments, the other end of the second housing 30 is also provided with an air extraction port (not shown) opposite to the second spray plate 34. The spray device 100 also includes an air pump (not shown) connected to the air extraction port. The air pump is used to draw in the gas output from the second housing 30 (i.e., including the second gas sprayed out by the first spray plate 23 and the first gas sprayed out by the second spray plate 34) after the second gas (i.e., the reaction gas) and the first gas are combined, thereby maintaining the air pressure inside the second housing 30 and forming the entire airflow field required for the application of the spray device 100.
[0085] Please refer to Figures 4 and 5. In some embodiments, there are multiple first housings 20, which are divided into multiple repeating units 40. The repeating units 40 are arranged along the extension direction of the second side plate 32 (i.e., arranged along the second direction Y). Each repeating unit 40 includes two first housings 20, with the openings 21 of the two housings facing away from each other (i.e., facing away from each other along the third direction). This allows multiple sets of workpieces 10 to be coated in the multiple first housings 20 to be coated simultaneously, thereby improving production efficiency.
[0086] Specifically, in this embodiment, the first box 20 includes five repeating units 40, and the projections of each repeating unit 40 on the extension direction (i.e., the second direction Y) of the second side plate 32 overlap, such that each repeating unit 40 is located in the same column of the first box 20 on the extension direction of the second side plate 32. The workpiece 10 to be coated in each first box 20 can share the second gas sprayed from the second spray hole 341 on the same second spray plate 34, thereby further improving production efficiency and realizing the efficient utilization of the second gas.
[0087] Each repeating unit 40 includes two first chambers 20, which are arranged opposite each other along the interval direction (i.e., the third direction Z) of the second side plate 32, so that the two first chambers 20 can perform spraying operations independently without interfering with each other. Accordingly, the second spray plate 34 needs to be provided with two spaced second spray holes 341 so that the reaction gas can be sprayed onto both first chambers 20 arranged side by side, and spraying can be achieved at different air inlet channels 33 within the second chamber 30, thereby improving production efficiency.
[0088] It is understood that the first spray plate 23 in the first box 20 of each repeating unit 40 is preferably of the same design, but it can also be of different designs, so as to achieve independent control of the spraying of the first gas in each first box 20. That is, each first box 20 in each repeating unit 40 can have a different design. For example, in one repeating unit 40, the first spray holes 231 on the first spray plate 23 in one first box 20 are arranged in a regular manner, while the first spray holes 231 on the first spray plate 23 in another first box 20 are arranged in an irregular manner.
[0089] Please refer to Figures 4, 5, 8 and 9 together. In some embodiments, there are multiple second boxes 30. Multiple second boxes 30 can be stacked along the first direction X to enable simultaneous coating operations on the workpieces 10 to be coated in multiple second boxes 30, thereby further improving production efficiency.
[0090] In this embodiment, taking the setting of two second boxes 30 as an example, the two second boxes 30 are stacked along the first direction X. At this time, when viewed along the extension direction of the second side plate 32 (i.e. along the second direction Y), the two second boxes 30 are divided into four regions. The four regions are independent of each other and have independent control systems. That is, the first spray plate 23 of the first box 20 in each region is independent, and the second spray hole 341 on the second spray plate 34 in the second box 30 in each region is also independent.
[0091] Specifically, the independent meaning of the first spray plate 23 in each first box 20 in each region is that the gas flow rate of the first gas in each first spray plate 23 can be adjusted individually during the coating process, so that the gas flow rate of the first gas sprayed by the first spray plate 23 in all the four regions in the first direction X, the second direction Y and the third direction Z can be controlled to ensure the uniformity of coating of the workpiece 10 to be coated in the four regions.
[0092] The meaning of the independent operation of the second spray holes 341 on the second spray plate 34 in the second box 30 of each region is that during the coating process, the second spray holes 341 in each region also correspond to the air inlet channel 33 in each region, so that the gas flow rate of the second gas (i.e., the reaction gas) sprayed into each air inlet channel 33 can be adjusted individually.
[0093] Please refer to Figure 10. This application provides a coating apparatus 200, which includes the above-described spraying device 100.
[0094] In the coating equipment 200, the second gas, the first gas, or other heating or annealing gas are mainly provided to the workpiece 10 to be coated during the coating and passivation process, so as to meet the environmental parameters required by the coating and passivation process.
[0095] Please refer to Figures 4, 5, and 11 together. This application also provides a coating method using the above-mentioned coating equipment 200. The coating method includes:
[0096] S300: Multiple workpieces 10 to be coated are stacked inside the first box 20, with the machined surface 11 of the workpieces 10 to be coated exposed at the opening 21 of the first box 20.
[0097] The first box 20 is a closed structure with five sides. The workpieces 10 to be coated, especially many pieces of workpieces 10 to be coated, are closely attached to each other, neatly arranged and stacked into a cuboid, so that the processing surface 11 of the workpieces 10 to be coated faces the same side, and then neatly inserted into the first box 20, leaving the processing surface 11 at the opening 21 facing outwards. At the same time, the stack of workpieces 10 to be coated is sealed in the first box 20.
[0098] S310: A first gas is introduced from the first spray hole 231 of the first spray plate 23 into the stacked workpieces 10 to be coated, forming an air wall extending toward the processing surface 11.
[0099] The first spray plate 23 sprays a first gas onto the stacked workpieces 10 to be coated inside the first box 20. The first gas flows into the first box 20 at a specific speed and flow rate, so that the first gas can form an air wall in the gap between the workpieces 10 to be coated. That is, the first gas can apply a pressure in the direction of the processing surface 11 of the workpiece 10 to be coated, thereby increasing the pressure in the gap between the workpieces 10 to be coated.
[0100] S320: A second gas is introduced to deposit and passivate the machined surface 11 exposed at the opening 21.
[0101] When the first housing 20 is placed inside the second housing 30, an air intake channel 33 is formed between the opening 21 of the first housing 20 and the second side plate 32 of the second housing 30, so that the second gas (i.e., the reaction gas) for edge passivation coating of the processing surface 11 of the workpiece 10 to be coated can be output from the air intake channel 33 and contact the processing surface 11 of the workpiece 10 to be coated.
[0102] At this time, the first gas ejected in step S310 can block the second gas flowing over the surface of the workpiece 10 to be coated, and form a forbidden zone for the second gas between the stacked workpieces 10 to be coated, thereby reducing the risk of the second gas entering the gaps between the workpieces 10 to be coated and depositing, causing the workpieces 10 to be coated to be coated to be coated to be coated around.
[0103] It is understandable that the first gas (i.e., the inert gas) is usually in a normally open state, and the second gas (i.e., the reactant gas) can be introduced into the second chamber 30 after the first gas is introduced into the first chamber 20, or it can be introduced into the second chamber 30 at the same time as the first gas is introduced into the first chamber 20.
[0104] Please refer to Figures 2, 4, and 5 together. In some embodiments, the second gas includes either O3 (ozone) or H2O (water), and the first gas includes N2 (nitrogen) or A. r Any of the following (argon) gases. When the coating equipment 200 performs passivation coating on the workpiece 10 to be coated, after placing the first housing 20 inside the second housing 30, an air inlet channel 33 is formed between the opening 21 of the first housing 20 and the second side plate 32 of the second housing 30. O3 (ozone) or H2O (water) as the oxidant in the second gas, together with other passivating agents (such as TMA trimethylaluminum), is output from the air inlet channel 33 to contact the processing surface 11 of the workpiece 10 to be coated at the opening 21 of the first housing 20 for passivation coating.
[0105] The first spray plate 23 of the first housing 20 can spray N2 (nitrogen) or A through the first spray hole 231. r Argon gas enters the first chamber 20 as the first gas, wherein N2 (nitrogen) or A rArgon is an inert gas and does not readily react with other substances. This inert first gas can block the second gas flowing over the surface of the workpiece 10 to be coated, and form a forbidden zone for the second gas in the gaps between the stacked workpieces 10, thereby reducing the risk of the second gas entering the gaps between the workpieces 10 and depositing, leading to circumferential coating.
[0106] Specifically, taking the workpiece 10 to be coated as a battery cell as an example, the coating method is described in detail:
[0107] Currently, the mainstream process for edge passivation coating is the alumina process, with TMA (trimethylaluminum) and H2O (water) as reactants. Due to the hydrogen bonds between H2O molecules, which have relatively weak interactions, water molecules can form clusters, resulting in high cohesion and surface tension. This hydrogen bonding causes water molecules to attract each other, increasing the difficulty of removing individual water molecules. Simultaneously, because water molecules have a polar structure (oxygen atoms are negatively charged, and hydrogen atoms are positively charged), there are strong interactions between water molecules and other polar molecules, further increasing the difficulty of removing water molecules. Referring to Figure 12, currently, using conventional equipment and H2O as the oxidant for passivation coating of the battery cell edges, H2O molecules easily enter the gaps between the battery cells, causing a wrap-around coating problem on both the front and back sides of the cell. That is, the wrap-around coating width in Figure 12 is greater than the three grid lines on the battery cell (i.e., the wrap-around coating width covers the three grid lines).
[0108] The spray device 100 of this application uses the TMA (trimethylaluminum) + H2O process for passivation coating. The first gas sprayed from the first spray hole 231 of the first spray plate 23 in the first housing 20 can reduce or avoid the situation where H2O molecules enter the gaps between the battery cells. This makes the width of the battery cell after coating much smaller than the width of the coating produced by conventional devices in the prior art with H2O process, thereby improving the problem of the battery cell being coated when using the TMA+H2O process for passivation coating in the prior art.
[0109] Furthermore, to further remove the second gas (i.e., the reaction gas) entering the second housing 30, TMA and O3 are preferably used as the reaction source for alumina deposition. O3's high chemical activity and rapid decomposition rate make it easier to remove than H2O molecules, further reducing the risk of the reaction gas entering the gaps between the stacked solar cells and causing plating defects that could affect welding. However, since O3 has strong oxidizing properties and can easily corrode the grid lines on the surface of the finished solar cells, the first housing 20, through its first spray holes 231 on the first spray plate 23, applies airflow and pressure towards the cut surface to the gaps between the solar cells. This ensures that the pressure in the gaps between the solar cells is greater than or equal to the pressure on the cut surface, preventing the second gas from entering the gaps between the solar cells. This prevents the formation of an alumina film on the surface that could affect welding and also prevents O3 from entering between the solar cells and corroding the grid lines.
[0110] Therefore, as shown in Figure 13, the above-mentioned spraying device uses the TMA+O3 process for passivation coating. The first gas sprayed from the first spray hole 231 of the first spray plate 23 in the first housing 20 can reduce or avoid O3 entering the gaps between the battery cells, so that the coated battery cells hardly exhibit any plating wrapping. That is, the plating wrapping width in Figure 13 is less than or equal to one grid line on the battery cell, and plating wrapping is almost unobservable. After 400 cycles, the plating wrapping width is less than 0.01 mm, which is completely undetectable to the naked eye. The above-mentioned O3 process can greatly improve the problem of plating wrapping on battery cells when using the TMA+H2O process for passivation coating in the prior art.
[0111] Furthermore, in conjunction with the aforementioned spraying device 100, the passivation coating process for the workpiece 10 to be coated can be implemented using the following embodiments:
[0112] Example 1: The preferred reaction sources are TMA (trimethylaluminum) and H2O (water).
[0113] In the spray device 100 corresponding to Embodiment 1, a first gas, such as N2 (nitrogen) or A, is sprayed into the first housing 20 from the first spray hole 231. r The preferred flow direction of argon is along the transverse direction of each battery cell, i.e., parallel to the extension direction of the upper or lower surface of the battery cell. The second gas, namely TMA (trimethylaluminum) and H2O (water), is sprayed towards the opening 21 in a direction perpendicular to the upper or lower surface of the battery cell. In this case, the extension direction of the second gas and the extension direction of the first gas are perpendicular to each other. The limitation on the extension direction of the first gas refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0114] Example 2: The preferred reaction sources are TMA (trimethylaluminum) and O3 (ozone).
[0115] In the spray device 100 corresponding to Embodiment 2, a first gas, such as N2 (nitrogen) or A, is sprayed into the first housing 20 from the first spray hole 231. r The preferred flow direction of argon is along the transverse direction of each battery cell, i.e., parallel to the extension direction of the upper or lower surface of the battery cell. The second gas, namely TMA (trimethylaluminum) and O3 (ozone), is sprayed towards the opening 21 in a direction perpendicular to the upper or lower surface of the battery cell. In this case, the extension direction of the second gas and the extension direction of the first gas are perpendicular to each other. Similarly, the limitation on the extension direction of the first gas refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0116] Example 3: The preferred reaction sources are TMA (trimethylaluminum) and H2O (water).
[0117] In the spray device 100 corresponding to Embodiment 3, a first gas, such as N2 (nitrogen) or A, is sprayed into the first housing 20 from the first spray hole 231. r The preferred flow direction of the argon gas is transverse to each battery cell, i.e., parallel to the extension direction of the upper or lower surface of the battery cell. The flow direction of the second gas sprayed onto the opening 21, namely TMA (trimethylaluminum) and H2O (water), is also parallel to the extension direction of the upper or lower surface of the battery cell. In other words, the flow direction of the second gas is parallel to the flow direction of the first gas to achieve counteracting and further prevent the second gas from entering the gaps between the battery cells. Similarly, the restriction on the flow direction of the first gas refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0118] Example 4: The preferred reaction sources are TMA (trimethylaluminum) and O3 (ozone).
[0119] In the spray device 100 corresponding to Embodiment 4, a first gas, such as N2 (nitrogen) or A, is sprayed into the first housing 20 from the first spray hole 231. r The preferred flow direction of argon is along the transverse direction of each battery cell, i.e., parallel to the extension direction of the upper or lower surface of the battery cell. The flow direction of the second gas sprayed onto the opening 21, namely TMA (trimethylaluminum) and O3 (ozone), is also parallel to the extension direction of the upper or lower surface of the battery cell. In other words, the flow direction of the second gas is parallel to the flow direction of the first gas to achieve counteracting, which can further prevent the second gas from entering the gap between the battery cells. Similarly, the restriction on the flow direction of the first gas refers to the flow direction of the first gas between the first spray hole 231 and the processing surface 11 of the workpiece 10 to be coated.
[0120] In the four embodiments described above, O3 (ozone) / H2O (water) and TMA are used as the second gas to passivate the cut surface of the battery cell. At this time, the spraying direction of the second gas can be perpendicular or parallel to the spraying direction of the first gas. Both methods can solve the technical problem of battery efficiency loss caused by circumferential coating after the battery cell is cut, while repairing the cutting loss of the battery cell, thereby improving the conversion efficiency of the battery cell module.
[0121] This application also provides a process for controlling the coating of photovoltaic cells. Using the device of this application or other conventional devices, when passivating the edge section of the cell, a first gas is introduced into the gap between the cells to form an air wall, preventing the second gas (reaction gas) from entering the gap between the cells, thereby avoiding the formation of coating on the front or back of the cell.
[0122] The conventional wire wrapping width of solar cells is generally 3-8 mm. The wire wrapping width of solar cells prepared by the process of this application can be controlled to 0.1-1 mm (i.e., using H2O as an oxidant and the passivation coating of this application). Preferably, the wire wrapping width of solar cells can reach less than 0.1 mm (i.e., using O3 as an oxidant and the passivation coating of conventional equipment). More preferably, the wire wrapping width of solar cells can reach less than 0.01 mm (i.e., using O3 as an oxidant and the passivation coating of this application). The wire wrapping is almost unobservable. Therefore, by reducing the wire wrapping, the welded solar cell module can reduce the conversion efficiency loss caused by solar cell cutting, improve the efficiency of the solar cell module, and reduce the power generation cost of the module.
[0123] Specifically, Table 1 shows the edge passivation width of the solar cells after edge passivation using conventional equipment / the equipment of this application, combined with H2O / O3 as an oxidant. The comparative examples and embodiments in Table 1 all use the deposition of an alumina passivation film as an example for experimental purposes. The conventional equipment in Table 1 refers to equipment without a first spray plate, i.e., equipment that does not spray the first gas (inert gas) towards the gaps between the solar cells.
[0124] Table 1
[0125]
[0126] Comparative Example 1: ALD (Atomic Layer Deposition) was used in conjunction with a conventional apparatus (an apparatus without a first spray plate 23, i.e., an apparatus that does not spray inert gas towards the gaps between the solar cells) for deposition. TMA (trimethylaluminum) and H2O (water) were used as reactants in a pulsed reaction. The TMA pulse time was 0.1-10 s, and the purge time was 0.1-100 s. The H2O pulse time was 0.1 s, and the purge time was 0.1-100 s. The process flow rate was 0.1-100,000 sccm. Verification was conducted using a pulsed gas flow into the conventional apparatus. In Comparative Example 1, the plating width around the solar cells after passivation was 3-8 mm, indicating a very severe plating phenomenon.
[0127] Example 1: ALD (Atomic Layer Deposition) was used in conjunction with the apparatus of this application (a device equipped with a first spray plate 23, i.e., a device that sprays inert gas toward the gaps between the solar cells) for deposition. TMA (trimethylaluminum) and H2O (water) were used as reactants in a pulsed reaction. The TMA pulse time was 0.1-10s, the purge time was 0.1-100s, the H2O pulse time was 0.1s, the purge time was 0.1-100s, and the process flow rate was 0.1-100000 sccm. Verification was performed by having the gas flow enter the apparatus of this application in a pulsed manner, and the flow rate of the gas wall formed by the first gas sprayed from the first spray plate 23 was 0.1-100000 sccm. In Example 1, the plating width around the solar cells after passivation can be controlled within 0.1-1mm, which is a significant improvement compared to Comparative Example 1.
[0128] Example 2: Compared with Example 1, this example uses TMA and O3 as reactants and employs conventional equipment for deposition. The TMA pulse time is 0.1-10s, the purge time is 0.1-100s, the O3 concentration is 0.1-50%, and the gas flow is pulsed into the conventional equipment. In Example 2, the passivation width of the solar cell after plating can reach less than 0.1mm, further improving the plating problem compared to Example 1.
[0129] Example 3: Compared with Example 1, the same apparatus of this application was used for deposition passivation, and TMA and O3 were used as reactants. The TMA pulse time was 0.1-10s, the purge time was 0.1-100s, and the O3 concentration was 0.1-50%. The gas flow entered the apparatus of this application in a pulsed manner. In Example 3, the passivation width of the solar cell after passivation can reach less than 0.01mm, which greatly improves the passivation problem compared with Example 1.
[0130] As shown in Table 1 above, the passivated solar cells using the methods of Examples 1, 2, and 3 of this application show significantly improved plating widths compared to Comparative Example 1. Therefore, the solar cell modules welded from the solar cells prepared by the processes of Examples 1, 2, and 3 of this application can reduce the conversion efficiency loss caused by solar cell cutting, improve the efficiency of the solar cell modules, and reduce the power generation cost of the modules.
[0131] The above are merely embodiments of this application and do not limit the scope of this patent application. Any equivalent structural or procedural changes made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.
Claims
1. A spraying device, wherein, The spraying device includes a first housing, which has a first receiving cavity with an opening on one side. The first receiving cavity is used to accommodate multiple stacked workpieces to be coated. The first housing includes a first spray plate disposed opposite to the opening, and the first spray plate is provided with at least one first spray hole communicating with the first receiving cavity.
2. The spraying device according to claim 1, wherein, The first spray plate is provided with a first air inlet hole, and the first spray hole is connected to the first air inlet hole through a spray channel.
3. The spraying device according to claim 2, wherein, The number of the first spray holes is multiple, and the multiple first spray holes are arranged in multiple rows. The spray channel includes a first spray channel and a second spray channel. In this configuration, the first spray holes in the same row are connected to the same first spray channel, and multiple first spray channels are simultaneously connected to the first air inlet through the second spray channel. The extension direction of the second spray channel intersects with the extension direction of the first spray channel.
4. The spraying device according to claim 2, wherein, The spraying device further includes a second housing, the second housing comprising: Second base plate; Two second side plates are connected to the two sides of the second bottom plate at intervals; In this embodiment, at least one of the first housings is disposed on the second base plate and located between two adjacent second side plates, the opening of the first housing is disposed facing one of the second side plates, and the opening is spaced apart from the adjacent second side plates to form an air intake channel between the opening and the second side plates; A cover plate is disposed opposite to the second bottom plate and between the two second side plates.
5. The spraying device according to claim 4, wherein, The second base plate is provided with a second air inlet, and the first spray hole on the first spray plate is connected to the first air inlet and the second air inlet in sequence through the spray channel.
6. The spraying device according to claim 4, wherein, The second enclosure also includes: The second spray plate is located at the end of the second base plate and connects to the two second side plates. The surface of the second spray plate facing the first housing has a second spray hole, which is connected to the air inlet channel.
7. The spraying device according to claim 4, wherein, There are multiple first boxes, and the multiple first boxes are divided into multiple repeating units. The multiple repeating units are arranged along the extension direction of the second side plate. Each repeating unit includes two first boxes, and the openings of the two first boxes are arranged opposite each other.
8. A coating apparatus, wherein, The spraying device includes any one of claims 1-7.
9. A coating method, employing the coating equipment described in claim 8, wherein, The method includes: Multiple workpieces to be coated are stacked inside the first box, with the machined surface of the workpieces exposed at the opening of the first box. A first gas is introduced into the space between the stacked workpieces to be coated through the first spray hole of the first spray plate, forming an air wall extending toward the processing surface; A second gas is introduced to deposit and passivate the processed surface exposed at the opening.
10. The method according to claim 9, wherein, The second gas includes either O3 or H2O, and the first gas includes either N2 or A. r Any one of them.