Substrate holder with insert

Abstract

The invention relates to a substrate holder (10) for disk-shaped or planar substrates (12), comprising a carrier (14) which has at least one carrier receptacle (18) having a carrier substrate-receiving region for receiving a substrate, and at least one insert (16) which is formed separately from the carrier and has an insert substrate-receiving region for receiving a substrate, wherein the carrier receptacle and the insert are designed such that the insert can be inserted into the carrier receptacle in an insertion direction. The invention also relates to a processing station comprising such a substrate holder.

Description

[0001] MAU / MAI Title: Substrate holder with insert

[0002] Description

[0003] The invention relates to a substrate holder for disc- or plate-shaped substrates, in particular for glass discs and wafer pieces. The invention also relates to a processing station comprising such a substrate holder, a coating device, and a manipulator.

[0004] Glass plates, e.g. in the form of microscope slides, and wafer pieces have proven to be advantageous substrates in research and development because they have a defined surface and can be easily coated, e.g. by means of spin coating.

[0005] To process such substrates, it is known to store them in a substrate holder and, if necessary, to feed them individually to a processing device, e.g. a coating device.

[0006] For example, substrate holders are known that have multiple substrate receptacles for holding a substrate.

[0007] The invention addresses the problem of expanding the range of applications for such substrate holders.

[0008] This problem is solved according to the invention by a substrate holder having the features of claim 1.

[0009] According to a first aspect, a substrate holder for disc- or plate-shaped substrates, in particular glass discs, and further, in particular, microscope slides and / or wafer pieces, is proposed. The substrate holder has a support with at least one, in particular rectangular, support receptacle. The support receptacle has a, in particular rectangular, support-substrate receiving area for receiving a substrate. The substrate holder also has at least one insert part (also referred to as an insert) formed separately from the support. The insert part, in turn, has a, in particular rectangular, insert part-substrate receiving area for receiving a substrate. The support receptacle is designed such that either a substrate or an insert part can be received in the support receptacle and, in particular, are positively locked in it.The carrier holder is designed not only to hold a substrate but also an insert, which in turn can hold a substrate. This allows different substrates to be held in the same substrate holder. In particular, very thin or fragile substrates, such as wafer fragments, can be handled reliably and securely by placing them in the insert-substrate holder area and then maneuvering them together with the insert. The insert can thus act as a carrier for such substrates. Simultaneously, it is possible to place substrates without an insert in the carrier holder. The proposed solution allows the carrier-substrate holder area and the insert-substrate holder area to be designed differently from each other, so that different substrates can be held in the same substrate holder.

[0010] The substrate holder is, in particular, an assembly of at least two different components (carrier and insert part), which are connected to form a device. Specifically, a substrate holder is also proposed in which the insert part is inserted into the carrier receptacle of the carrier.

[0011] In particular, the insertion part and the support receptacle are dimensioned such that the insertion part can be inserted or reattached into the support receptacle in an insertion direction that is, in particular, orthogonal to a principal extension direction of the support, i.e., orthogonal to a support plane, and in particular can be repeatedly and releasably inserted. In particular, the insertion part and the support receptacle are dimensioned such that, in the inserted state, the insertion part is positively locked in the support receptacle in a lateral direction, i.e., in a direction orthogonal to the insertion direction / in a direction parallel to the support plane.

[0012] In particular, the substrate can be inserted into the carrier receptacle in an insertion direction, especially one that is orthogonal to a main extension direction of the carrier, and is preferably held in a form-fitting manner in a lateral direction, i.e. in a direction orthogonal to the insertion direction / in a direction parallel to the carrier plane.

[0013] The substrate can be of various shapes. For example, the substrate can be round or oval. Preferably, however, the substrate is rectangular, and in particular square. For example, the substrate can be a glass slide. The insert can be of various shapes. For example, the insert can be round or oval. Preferably, however, the insert is rectangular, and in particular square. In particular, the substrate and the insert can have different external dimensions in the lateral direction.

[0014] It is possible for the carrier to have only a single carrier receptacle. Preferably, however, the carrier comprises several carrier receptacles, particularly those arranged side by side. In this case, for example, it is conceivable that a substrate (without an insert) is arranged in the carrier-substrate receiving area of ​​a first carrier receptacle, and that an insert is arranged in a second carrier receptacle, in whose insert-substrate receiving area a further substrate may optionally be arranged. The advantages and optional features described below with regard to a single carrier receptacle then apply, in particular, to each of these carrier receptacles in the case of carriers with multiple carrier receptacles. This does not, however, preclude the carrier from having further, differently designed receptacles, e.g., for receiving other substrates.

[0015] The support has at least one mounting point, which is formed in the support itself. The support can be made in one piece or in multiple pieces. Preferably, the support is made in one piece, for example, by means of an additive manufacturing process.

[0016] The carrier receptacle preferably includes a substrate retention structure for holding a substrate. The substrate retention structure, in particular, defines the carrier-substrate receptacle area. The substrate retention structure is specifically designed to hold the substrate laterally, i.e., in a direction orthogonal to the insertion direction, and in particular to provide a positive fit. This does not necessarily mean that the substrate, when inserted, is in lateral contact with the substrate retention structure. It is also conceivable that the substrate is inserted with some play in the carrier receptacle, but the substrate retention structure prevents the substrate from being displaced laterally beyond a certain tolerance.

[0017] The support receptacle, in particular the substrate holding structure, preferably has a substrate boundary surface (also referred to as a substrate boundary surface) extending, particularly in the insertion direction, preferably orthogonally to the substrate support surface, which limits the support-substrate receiving area in a lateral direction, i.e., radially outwards. The substrate boundary surface can be a continuous surface, in particular extending along a circumference around the support receptacle. The substrate boundary surface can also be formed from several segments spatially spaced apart from one another, in particular distributed along a circumference around the support receptacle. The substrate boundary surface can, in particular, form a stop surface for the substrate in the lateral direction.

[0018] The substrate and the support-substrate receiving area can be designed such that, when installed, the substrate rests against at least one section of the substrate boundary surface, for example, one of several segments. Alternatively, the substrate and the support-substrate receiving area can be designed such that, when installed, a gap exists between the substrate and the substrate boundary surface, but the substrate boundary surface prevents the substrate from being displaced laterally beyond a certain tolerance.

[0019] The carrier receptacle, in particular the substrate holding structure, preferably has a substrate support surface for the substrate, extending especially perpendicular to the insertion direction of the inserting part. The substrate support surface can be a continuous surface. The substrate support surface can also be formed from several spatially spaced segments. When the substrate is inserted, it rests in particular on the substrate support surface.

[0020] The carrier receptacle preferably has, in addition to the substrate holding structure, a separate insert holding structure for the insert, designed differently from the substrate holding structure. Thus, the carrier receptacle preferably has separate holding structures for the insert and the substrate. This enables both parts to be held reliably.

[0021] The carrier receptacle, in particular the insert retaining structure, defines a, preferably rectangular, insert receptacle area for the insert. Preferably, the insert retaining structure and the insert are dimensioned and aligned such that the insert, when inserted, is held laterally, in particular by a positive locking mechanism, by the insert retaining structure. This does not necessarily mean that the insert rests against the insert retaining structure laterally. It is also conceivable that the insert is inserted with some play in the carrier receptacle, but the insert retaining structure prevents the insert from being displaced laterally beyond a certain tolerance.The carrier receptacle, in particular the insert-part holding structure, preferably has an insert-part boundary surface (also referred to as insert-part boundary surface) extending, particularly in the insertion direction, preferably orthogonally to the insert-part support surface, which limits the carrier receptacle, in particular the insert-part receiving area, in a lateral direction, i.e., radially outwards. The insert-part boundary surface can be a continuous surface, in particular extending along a circumference around the carrier receptacle. The insert-part boundary surface can also be formed from several segments spatially spaced apart from one another, in particular distributed along a circumference around the carrier receptacle. The insert-part boundary surface can, in particular, form a stop surface for the insert in the lateral direction.

[0022] The carrier receptacle, in particular the insert holder structure, preferably has an insert support surface for the insert, which extends particularly orthogonally to the insertion direction of the insert. The insert support surface can be a continuous surface. The insert support surface can also be formed from several spatially spaced segments.

[0023] It is conceivable that the insert, when installed, rests exclusively on its support surface. It is also conceivable that, when installed, it rests exclusively on the substrate support surface. It is also conceivable that the insert is designed such that, when installed, it rests on both its support surface and the substrate support surface. In this case, the substrate support surface can simultaneously serve as a support surface for the insert. This facilitates a particularly reliable and, in particular, positionally accurate retention of the insert within the carrier.

[0024] The substrate holding structure and the insert holding structure can be arranged on a base body of the carrier. Preferably, the substrate holding structure and the insert holding structure are formed within the carrier.

[0025] In a further advantageous design, the substrate support surface and the insert support surface can be arranged axially offset from each other along the insertion direction, i.e., in a direction orthogonal to the support plane. In particular, the substrate support surface can be arranged behind the insert support surface when viewed in the insertion direction, i.e., it can be "lower" when viewed in the insertion direction.

[0026] Furthermore, it proves advantageous if the insertable component receiving area has a larger circumference or diameter in the lateral direction, i.e., orthogonal to the insertion direction / parallel to the support plane, than the support-substrate receiving area. This can be achieved, for example, by offsetting the insertable component boundary surface and the substrate boundary surface laterally, in particular by positioning the insertable component boundary surface radially further outwards. This makes it possible, for instance, to design the insertable component-substrate receiving area to be the same size as the support-substrate receiving area while still laterally limiting the insertable component-substrate receiving area with an insertable component-substrate retention structure.

[0027] The carrier-substrate receiving area preferably has a maximum diameter of 500 mm, particularly 300 mm, more particularly 200 mm, and more particularly 100 mm. The insert receiving area preferably has a maximum diameter of 500 mm, particularly 300 mm, more particularly 200 mm, and more particularly 100 mm.

[0028] Furthermore, it proves advantageous if the carrier receptacle is designed as a recess. The carrier receptacle can be designed such that, when inserted, the insert does not protrude beyond the upper edge of the carrier in the opposite direction of insertion. This design facilitates a particularly flat construction and the stacking of several substrate holders on top of each other. Alternatively, the carrier receptacle can be designed such that, when inserted, the insert protrudes beyond the upper edge of the carrier in the opposite direction of insertion. This facilitates easy access to the substrate held by the insert.

[0029] The support receptacle can be bounded by a circumferential wall. The bearing surfaces and, optionally, the boundary surfaces can be formed within this wall. It is also conceivable that the wall is interrupted. In this case, the support receptacle can be bounded by at least two, in particular four, preferably paired, opposing wall segments.

[0030] In an advantageous embodiment, the carrier receptacle can be limited by at least two, in particular four, preferably paired and opposing, centering elements. The centering elements can form the substrate holding structure and / or the insert holding structure completely or partially.

[0031] In a particularly advantageous embodiment, the centering elements can each be designed in a stepped configuration with several steps, especially those rising in the opposite direction to the insertion direction. Specifically, a first step, particularly the lowest step, can provide the substrate boundary surface and, in particular, the substrate support surface, while a second step, offset from the first step, can provide the insertion part boundary surface and, in particular, the insertion part support surface. Such a design is easy to manufacture and also facilitates precise positioning of the substrate and the insertion part.

[0032] One possible realization form of the insert provides that the insert is designed complementarily to the centering elements on a bottom side opposite the insert substrate receiving area, in particular in a step-like manner with a first step and a second step.

[0033] In general terms, it can be advantageous if the carrier has recesses on at least two diagonally opposite sides, particularly at at least two diagonally opposite corners, of the carrier receptacle. The recesses are specifically designed such that a substrate arranged in the carrier receptacle, particularly in the carrier-substrate receiving area, and / or an insert part arranged in the carrier receptacle, can be gripped laterally, i.e., from the radial outside, particularly on an outer surface parallel to the insertion direction. This makes it easy to grip the substrate or the insert part laterally—and thus, in particular, without having to touch a substrate surface. Specifically, the recesses are designed to allow a gripper finger to engage and grip the substrate or the insert part.

[0034] In this context, the term recess also refers to a cutout. In particular, the bottom surface of the recess can be at the same level as the substrate support surface.

[0035] In an advantageous embodiment, the carrier receptacle has a rectangular base shape, in particular a rectangular substrate receiving area and a rectangular insert receiving area. It is then particularly preferred if the recesses are formed at the corners of the carrier receptacle.

[0036] The recesses can be designed in such a way that adjacent centering elements are spaced apart from each other by a recess.

[0037] The insert preferably has an insert-substrate retention structure for holding a substrate. The insert-substrate retention structure defines, in particular, the insert-substrate receiving area. The insert-substrate retention structure is specifically designed to hold a substrate in a form-fitting manner in the lateral direction. The insert-substrate retention structure has, in particular, an insert-substrate bearing surface. The insert-substrate retention structure also has, in particular, an insert-substrate boundary surface that limits the insert-substrate receiving area in the lateral direction.

[0038] In a particularly advantageous further development, the insert, and in particular the insert-substrate holding structure, has a plurality of centering elements, especially in the form of centering pins, which are arranged distributed along a circumference around the insert-substrate receiving area. The centering elements define the insert-substrate receiving area in a lateral direction (i.e., radially outwards). With such a design using centering pins, lateral contact between the substrate and the insert is reduced, which, for example, has a positive effect on coating quality when coating a substrate held in the insert.

[0039] This can be further facilitated by ensuring that the circumferential extent of each centering element of the insert, in particular centering pin, is less than 10%, preferably less than 5%, of the circumference of the insert substrate receiving area.

[0040] It is conceivable that the support receptacle is closed in the insertion direction. Therefore, the support receptacle can have a base surface. This base surface can, in particular, form the substrate support surface or a part thereof.

[0041] It is also conceivable that the carrier receptacle is at least partially open in the insertion direction.

[0042] In particular, the carrier receptacle can have a central through-opening. This allows access from below to a substrate or insert held in the carrier receptacle, enabling, for example, direct contact between a heating device and the substrate.

[0043] In one advantageous implementation, the support can be designed as a frame surrounding the substrate receptacle. The substrate retention structure and the insert retention structure can be located on an inner edge of the frame. Alternatively, the substrate retention structure and the insert retention structure can be arranged on a surface of the frame.

[0044] Furthermore, it proves advantageous if the insert is designed as an insertion frame. The insert then has, in particular, a frame opening. When the carrier is designed as a frame, the carrier and the insert are preferably configured such that the frame opening of the insert, when the insert is in place, overlaps with, and is in particular aligned with, the through-opening of the carrier receptacle. This also allows access from below for a substrate held by the insert.

[0045] If the insert part is designed as an insert frame, the insert part substrate support surface can be formed by a frame surface of the insert frame.

[0046] Furthermore, it proves advantageous if the carrier, particularly in a central section, has a gripper interface through which the carrier can be gripped by a gripper. The gripper interface can, in particular, have an undercut that can be engaged by a gripper finger.

[0047] Furthermore, it proves advantageous if the carrier has at least one positioning element, in particular in the form of a projection, on a first side, and at least one counter-positioning element, in particular in the form of a receptacle, on an opposite second side, which is designed to be complementary to the first positioning element. Such a design makes it possible to stack several substrate holders on top of each other and to position them relative to each other by the interaction of a positioning element of a first substrate holder with the counter-positioning element of an adjacent substrate holder.

[0048] According to a second aspect, a substrate holder stack comprising a plurality of the substrate holders described above is proposed. The substrate holders are stacked on top of each other, particularly along the insertion direction. Preferably, the substrate holders are stacked such that the at least one positioning element of one substrate holder interacts with the at least one counter-positioning element of an adjacent substrate holder, in particular forming a positive-locking connection.

[0049] According to a third aspect, a system comprising a substrate holder as described above and at least one disc- or plate-shaped substrate, in particular a glass disc or wafer piece, is proposed. The substrate is arranged, in particular, in the carrier-substrate receiving area of ​​the carrier receptacle. Alternatively, the substrate is arranged in the insert-substrate receiving area, and the insert is arranged in the carrier receptacle.

[0050] According to an advantageous embodiment, the system comprises a substrate holder as described above and at least two substrates, wherein the substrate holder has at least two support receptacles, wherein a substrate is arranged in a first support receptacle and wherein an insert part is arranged in a second support receptacle, wherein a further substrate is arranged in the insert part substrate receptacle area of ​​this insert part.

[0051] According to a fourth aspect, a processing station, in particular a coating station, for disc- or plate-shaped substrates is proposed. The processing station preferably comprises: - at least one substrate holder as described above;

[0052] - a coating device, in particular a spin coater or blade coater, with a substrate holder which is designed to selectively hold a substrate or an insert part;

[0053] - a manipulator, in particular a robot, with a gripping device configured to selectively grip either a substrate or an insert. Preferably, the gripping device is also configured to grip the substrate holder carrier.

[0054] The gripping device can be designed in various ways. Preferably, the gripping device has two gripper fingers between which a substrate or insert can be clamped. In a design of the carrier with recesses (see above), it can be particularly advantageous if the gripper fingers and the recesses are dimensioned such that the gripper fingers can engage in the recesses to grip a substrate or insert arranged in the carrier receptacle laterally. The invention is explained in more detail below with reference to the figures. They show:

[0055] Fig. 1 shows a sketched representation of an exemplary design of a substrate holder;

[0056] Fig. 2 Detail view of a section of the substrate holder according to Figure 1;

[0057] Fig. 3A,B sketched representation of an insert part of the substrate holder according to Figure 1 in a perspective top view (View A) and a perspective bottom view (View B);

[0058] Fig. 4 shows a sketched representation of the substrate holder according to Figure 1 with the substrate and insert part inserted in a top view;

[0059] Fig. 5A-D Detail views of the substrate holder according to Figure 4 in a sectional view along the section plane VV shown in Figure 4 with free support (View A), with substrate inserted (View B), with insert part inserted (View C) and with insert part and substrate inserted (View D); and

[0060] Fig. 6 shows a sketched representation of another exemplary embodiment of an insert part.

[0061] In the following description and in the figures, the same reference symbols are used for identical or corresponding features.

[0062] Figure 1 shows a sketched example of a substrate holder, which is designated by reference numeral 10. The substrate holder 10 is designed to hold disk- or plate-shaped substrates 12 (see Fig. 4), e.g., glass discs or wafer pieces.

[0063] The substrate holder 10 has a support 14 and at least one insert 16. The support 14 has several support receptacles 18 arranged side by side. In embodiments not shown, however, fewer or more support receptacles 18 may be provided.

[0064] The carrier receptacles 18 are each designed to selectively receive a substrate 12 or an insert part 16 and, in particular, to hold it in a form-fitting manner (explained in more detail below with reference to Figures 5A-D).

[0065] It is possible that the substrate holder 10 has one insert 16 for each carrier receptacle 18. It is also possible that the substrate holder 10 has fewer inserts 16 than carrier receptacles 18.

[0066] The insert part 16 can be inserted into a support receptacle 18 in an insertion direction 20. In particular, the substrate 12 can also be inserted into the support receptacle 18 in the insertion direction 20. By way of example and preferably, the insertion direction 20 is orthogonal to a main dimension of the support 14.

[0067] The insert part 16 is itself designed to receive a substrate 12.

[0068] In the example shown, the support 14 is designed as a frame, so that each support receptacle 18 has a central through-opening 22. In embodiments not shown, the support receptacles 18 can also be closed in the insertion direction 20. For example, the support 14 can have a continuous base plate.

[0069] In the illustrated example, the insert part 16 is also designed as an insert frame. The insert part 16 thus encloses a central frame opening 24 (see Figs. 1 and 3A). When the insert part 16 is inserted into a support receptacle 18, the frame opening 24 and the through opening 22 preferably align.

[0070] As can be seen in Fig. 3A, the insert 16 has an insert-substrate retention structure 26, which defines an insert-substrate receiving area 28 (shown as a dashed line in Fig. 3A), which in this example is square, for receiving a substrate 12. The insert-substrate retention structure 26 has an insert-substrate support surface 30. In this example, the insert-substrate support surface 30 is formed by a frame surface of the insert frame surrounding the frame opening 24.

[0071] The insert-substrate holding structure 26 also has a plurality of centering pins 32, which are arranged along a circumference around the frame opening 24. The centering pins 32 limit the insert-substrate receiving area 28 in the lateral direction 34 (see Fig. 4), i.e., in a direction orthogonal to the insertion direction 20 / parallel to a principal extension plane of the support 14.

[0072] In the example shown, two centering pins 32 are arranged on each side. However, in embodiments not shown, more or fewer centering pins 32 may be provided.

[0073] As can be seen from Figures 4 and 5A, the carrier 14 has a substrate holding structure 36 at each carrier receptacle 18, which defines a carrier-substrate receiving area 38 (shown in dashed lines in Fig. 4), which is square in the example, for receiving a substrate 12.

[0074] In addition, the carrier 14 has an insert part holding structure 40, which defines an insert part receiving area 42 (shown in dashed lines in Fig. 4), which is square in the example, for the insert part 16.

[0075] In this specific example, the carrier 14 has four opposing centering elements 44 in pairs for each carrier receptacle 18, which together form the substrate holding structure 36 and the insert part holding structure 40 (see Fig. 2). In embodiments not shown, more or fewer centering elements 33 may be provided.

[0076] The centering elements 44 limit the support receptacle 18 in the lateral direction 34, i.e. in a direction orthogonal to the insertion direction 20 or in a direction parallel to the support plane.

[0077] The centering elements 44 are designed and arranged by way of example such that a rectangular support receptacle 18 is formed (see Fig. 4). In embodiments not shown, the centering elements 44 can also be designed and arranged such that a round, oval, or polygonal support receptacle 18 is formed.

[0078] In the example, the centering elements 22 arranged between two support mounts 18 extend in a web-like fashion along the insertion direction 20 (see Fig. 1).

[0079] As can best be seen from Figures 2 and 5A, the centering elements 44 are designed in a stepped form with several steps 46, 48. In particular, a first, lower step 46 forms the substrate holding structure 36 and a second, upper step 48 forms the insert part holding structure 40.

[0080] The substrate holding structure 36 has a substrate support surface 50 for the substrate 12 (see Figs. 2 and 5A). In this example, the substrate support surface 50 is formed by a surface of the support 14 surrounding the through-opening 22 of a support receptacle 18 (see Figs. 2 and 5A). The portion of the substrate support surface 50 in the area of ​​the centering elements 44 can also be considered the "tread surface" of the lower step 46 of the centering elements 44.

[0081] The substrate holding structure 36 also has a substrate boundary surface 52, which limits the support-substrate receiving area 38 in the lateral direction 34, i.e., orthogonally to the insertion direction 20 or in a direction parallel to the support plane (see Fig. 5A). The substrate boundary surface 52 is, by way of example, oriented orthogonally to the substrate support surface 50. In this example, the substrate boundary surface 52 is formed by the four "riser steps" of the lower steps 46 of the centering elements 44. The substrate boundary surface 42 is thus formed by four spatially separated segments.

[0082] In the installed state of the substrate 12 (see Fig. 5B), the substrate 12 rests with its underside 54 on the substrate support surface 50. The substrate 12 can also abut the substrate boundary surface 52 with one side surface 56. However, the substrate 12 and the support-substrate receiving area 38 can also be dimensioned such that a gap is provided between the substrate boundary surface 52 and the side surface 56 of the substrate 12.

[0083] The insert retaining structure 40 has an insert support surface 58. In this example, the insert support surface 58 is formed by the four "tread surfaces" of the upper steps 48 of the four centering elements 44. The insert support surface 58 is thus formed by four spatially separated segments. As can be seen in Fig. 5A, the insert support surface 58 is axially offset from the substrate support surface 50 in the insertion direction 20.

[0084] The insert retaining structure 40 also has an insert boundary surface 60, which limits the insert receiving area 42 in the lateral direction 34. The insert boundary surface 60 is, for example, oriented orthogonally to the insert support surface 58. In this example, the insert boundary surface 60 is formed by the four "riser steps" of the upper steps 48 of the centering elements 44. The insert boundary surface 60 is thus formed by four spatially separated segments.

[0085] In the inserted state of the insert part 16 (see Fig. 5C), a side surface 62 can abut the insert part boundary surface 60. However, the insert part 16 and the insert part receiving area 42 can also be dimensioned such that a gap is provided between the insert part boundary surface 60 and the side surface 62 of the insert part 16.

[0086] As can be seen from Figures 3B and 5C, the insert part 16 is designed on a bottom side 64 in a complementary manner to the centering elements 44, thus itself having a step-like structure with two steps 66, 68, wherein a first step 66 interacts with the lower step 46 of the centering elements 44 and a second step 68 interacts with the upper step 48 of the centering elements 44.

[0087] It is conceivable that the insert 16, when installed, rests with a first contact surface 70 on the substrate support surface 50 and with a second contact surface 72 on the insert support surface 58. It is also conceivable that the insert 16, when installed, rests exclusively with the first contact surface 70 on the substrate support surface 50. It is also conceivable that the insert 16, when installed, rests exclusively with the second contact surface 72 on the insert support surface 58.

[0088] As can best be seen from Figures 1, 2, and 4, the centering elements 44 are separated from one another by recesses 74. The recesses 74 are formed at the corners of the support receptacle 18. The recesses 74 are designed, by way of example, such that a base surface 76 of the recesses lies at the level of the substrate support surface 50 (see Fig. 2). As mentioned above, the recesses 74 are specifically designed to grip a substrate 12 or insert part 16 arranged in the support receptacle 18 laterally.

[0089] The substrate holder 10 is preferably designed such that two or more substrate holders 10 can be stacked on top of each other.

[0090] To define the correct relative position of two stacked substrate holders 10, the support 14 in the example has two positioning elements 78 in the form of projections on one side. The positioning elements 78 are designed to interact with corresponding counter-positioning elements, in particular in the form of receptacles complementary to the projections, on a second, opposite side of the support 14 of another substrate holder 10. Therefore, the support 14 has a counter-positioning element (not visible) on a second side.

[0091] As mentioned above, the carrier 14 also has a gripper interface 80, via which the carrier 14 can be gripped by means of a gripper. By way of example, the gripper interface 80 comprises two engagement sections 82, each of which has an undercut.

[0092] Figure 6 shows a further embodiment of an insert part 16, in which the insert part substrate receiving area 28 is designed as a recess. In the example shown, the insert part 16 is designed as an insert frame, with the insert part substrate retention structure 26 being formed on an inner edge of the frame.

[0093] As can be seen from Figure 6, the insert 16 has recesses 84 at the corners of the insert substrate receiving area 28 for receiving the corners of the substrate 12. In this way, the corners can be protected.

Claims

Patent claims 1. Substrate holder (10) for disc- or plate-shaped substrates (12), in particular glass discs and / or wafer pieces, comprising: - a carrier (14) which has at least one carrier receptacle (18) with a carrier substrate receptacle (38) for receiving a substrate (12); - at least one insert part (16) formed separately from the carrier (14), which in turn has an insert part substrate receiving area (28) for receiving a substrate (12), wherein the carrier receptacle (18) and the insertion part (16) are designed such that the insertion part (16) can be inserted into the carrier receptacle (18) along an insertion direction (20) and, in particular, is held in the carrier receptacle (18) in a lateral direction (34) when inserted.

2. Substrate holder (10) according to claim 1, wherein the carrier receptacle (18) has a substrate holding structure (36) for holding the substrate (12) and, in addition to the substrate holding structure (36), an insert holding structure (40) for holding the insert (16).

3. Substrate holder (10) according to claim 1 or 2, wherein the carrier receptacle (18), in particular the substrate holding structure (36), has a substrate boundary surface (52) which limits the carrier substrate receiving area (38) in a lateral direction (34), and wherein the carrier receptacle (18), in particular the insert part holding structure (40), has an insert part boundary surface (60) which limits an, in particular rectangular, insert part receiving area (42) for the insert part (16) in a lateral direction (34).

4. Substrate holder (10) according to the previous claim, wherein the substrate boundary surface (52) and the insert part boundary surface (60) are offset from each other in a lateral direction (34).

5. Substrate holder (10) according to one of the preceding claims, wherein the support receptacle (18), in particular the substrate holding structure (36), has a substrate support surface (50) for the substrate (12), extending in particular orthogonally to the insertion direction (20), and wherein the support receptacle (18), in particular the insert part holding structure (40), has an insert part support surface (58), extending in particular orthogonally to the insertion direction (20), wherein the substrate support surface (50) and the insert part support surface (58) are arranged offset from each other along the insertion direction (20).

6. Substrate holder (10) according to the previous claim, wherein the insert part (16) is designed such that, in the inserted state, it rests on the insert support surface (58) and / or on the substrate support surface (50).

7. Substrate holder (10) according to one of the preceding claims, wherein the carrier receptacle (18) is limited by at least two, in particular four, preferably pairwise opposite, centering elements (44), wherein the centering elements (44) form the substrate holding structure (36) and the insert part holding structure (40).

8. Substrate holder (10) according to the previous claim with reference to claim 5, wherein the centering elements (44) are each designed in a stepped manner with at least two steps (46, 48), wherein a first step (46) provides the substrate support surface (50) and a second step (48) provides the insert support surface (58).

9. Substrate holder (10) according to one of claims 7 or 8, wherein the centering elements (44) project from a base plane of the support (14) in a web-like manner along the insertion direction (20).

10. Substrate holder (10) according to one of the preceding claims, wherein the support (14) has recesses (74) on diagonally opposite sides of the support receptacle (18), in particular on opposite corners of the support receptacle (18), such that a substrate (12) arranged in the support receptacle (18) or an insert part (16) arranged in the support receptacle (18) can be gripped laterally, in particular at the corners.

11. Substrate holder (10) according to one of the preceding claims, wherein the insert part (16) has a plurality of centering pins (32) which are arranged distributed along a circumference around the insert part substrate receiving area (28) and limit the insert part substrate receiving area (28) in a lateral direction (34).

12. Substrate holder (10) according to one of the preceding claims, wherein the support (14) is designed as a frame such that the support receptacle (18) has a central through-opening (22) in the insertion direction (20).19 13. Substrate holder (10) according to one of the preceding claims, wherein the insertion part (16) is designed as an insertion frame which has a frame opening (24), in particular such that the frame opening (24) overlaps, in particular is aligned, with the through opening (22) of the carrier receptacle (18) in the inserted state of the insertion part (16) in the carrier receptacle (18).

14. Processing station, in particular coating station, for disc- or plate-shaped substrates, comprising - at least one substrate holder (10) according to one of the preceding claims; - a coating device, in particular a spin coater or blade coater, with a substrate holder for selectively receiving a substrate or an insert part; - a manipulator, in particular a robot, with a gripping device, wherein the gripping device is designed to selectively grip a substrate, an insert part or a carrier.

15. Processing station according to the previous claim, wherein the gripping device has two gripper fingers between which a substrate or an insert can be clamped, wherein the gripper fingers and the recesses (74) in the carrier (14) are dimensioned such that the gripper fingers can engage in the recesses (74) in order to grip a substrate (12) or insert (16) laterally in a carrier receptacle (18).

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