Path switching system and laser ablation device using same

Abstract

The present invention prevents destabilization or turning-off of plasma on the analysis device side due to mixing of air from a cell when replacing an object to be measured. This path switching system is for a laser ablation device that is provided with a cell (1) into and from which a stage (7) on which an object to be measured is placed can be freely moved, and that leads out a carrier gas containing an aerosol to an analysis device such as an ICP-MS or ICP-OES. The path switching system is provided with: a path opening / closing unit (14) that is interposed in a second path that is branched from a first path for leading out the carrier gas to the cell, the second path leading out the carrier gas to the analysis device side without passing through the cell, the path opening / closing unit (14) opening and closing the second path; and a path switching unit (13) that switches the leading destination of the carrier gas led out from the cell to the analysis device side or the exhaust side. When the stage is moved into and out in order to replace the object to be measured, the path opening / closing unit is opened and the path switching unit is switched to the exhaust side.

Description

Path switching system and laser ablation apparatus using the same

[0008] ,

[0007] , ,

[0001] The present invention relates to a path switching system for switching paths such as carrier gas and air, and a laser ablation apparatus using the same.

[0002] Conventionally, in elemental analysis by laser ablation (so-called LA-ICP-MS), the measurement object is aerosolized (atomized) by irradiating the measurement object surface with a laser. By introducing this aerosol (particles) into an analytical device such as ICP-MS or ICP-OES in the subsequent stage, elemental analysis is performed. <​​​​​​​​​​​​​​​​This invention has been made in view of these problems, and its purpose is to prevent plasma destabilization or power outage on the analyzer side caused by air contamination from the cell when the object to be measured is replaced.

[0009] To solve the above problems, a path switching system for a laser ablation apparatus according to a first aspect of the present invention is a path switching system for a laser ablation apparatus that has a cell on which a stage for placing an object to be measured can be moved in and out, and delivers a transport gas containing an aerosol to an analyzer, and is interposed in a second path that branches off from a first path that leads the transport gas to the cell and leads the transport gas to the analyzer side without going through the cell, and opens and closes the second path, and switches the destination of the transport gas delivered out from the cell to the analyzer side or the exhaust side, and when the stage is moved in and out for the replacement of the object to be measured, the path opening and closing section is opened, the path switching section is switched to the exhaust side, and the air mixed in the cell due to the moving in and out of the stage is exhausted.

[0010] A path switching system for a laser ablation apparatus according to a second aspect of the present invention is a path switching system for a laser ablation apparatus that has a cell on which a stage for placing an object to be measured can be moved in and out, and delivers a transport gas containing an aerosol to an analyzer, comprising: a path opening / closing unit interposed in a second path that branches off from a first path that leads the transport gas to the cell and leads the transport gas to the analyzer side without going through the cell, and opens and closes the second path; a first path switching unit interposed in a third path different from the second path that branches off from the first path, and switches the connection from the cell via the third path to the first path or the exhaust side; and a second path switching unit that switches the destination of the transport gas delivered from the cell to the analyzer side or the exhaust side, wherein when the stage is moved in or out for replacement of the object to be measured, the first and second path opening / closing units are opened and the path switching unit is switched to the exhaust side.

[0011] A laser ablation apparatus according to a third aspect of the present invention uses a path switching system described in either the first or second aspect.

[0012] According to the present invention, it is possible to provide a technology that prevents plasma destabilization or power outage on the analytical instrument side caused by air mixing in from the cell when the object to be measured is replaced.

[0013] Figure 1 is a configuration diagram of the path switching system of a laser observation device according to the first embodiment of the present invention. Figure 2 is a detailed configuration diagram of the cell of the laser observation device according to the first embodiment of the present invention. Figures 3(a) and 3(b) are conceptual diagrams illustrating the path switching process by the path switching system of the laser observation device according to the first embodiment of the present invention. Figure 4 is a configuration diagram of the path switching system of a laser observation device according to the second embodiment of the present invention. Figure 5 is a conceptual diagram illustrating the path switching process by the path switching system of the laser observation device according to the second embodiment of the present invention. Figure 6 is a configuration diagram of the path switching system of a laser observation device according to the third embodiment of the present invention. Figure 7 is a conceptual diagram illustrating the path switching process by the path switching system of the laser observation device according to the third embodiment of the present invention. Figure 8 is a functional block diagram of the control system of the laser observation device according to the fourth embodiment of the present invention. Figure 9 is a flowchart illustrating the processing procedure by the laser observation device according to the fourth embodiment of the present invention. Figure 10 is a flowchart illustrating another processing procedure by the laser observation device according to the fourth embodiment of the present invention. Figures 11(a) and 11(b) illustrate the operation process of a laser ablation apparatus according to a fourth embodiment of the present invention. Figures 12(a) and 12(b) are conceptual diagrams showing the flow path of gas and the like in a conventional laser ablation apparatus.

[0014] Embodiments of the present invention will be described below with reference to the drawings.

[0015] <First Embodiment> The path switching system of the laser ablation apparatus according to the first embodiment of the present invention is provided with a 3-port solenoid valve on the gas outlet side of the cell, and the gas inlet side is further branched to the cell side and to the analytical instrument side such as ICP-MS or ICP-OES, and a 2-port solenoid valve is provided in the path that bypasses the analytical instrument such as ICP-MS or ICP-OES to adjust the gas flow.

[0016] Figure 1 shows a perspective view of the configuration of the path switching system of a laser ablation apparatus according to the first embodiment of the present invention, Figure 2 shows a perspective view of the detailed configuration of the cell in the apparatus, and Figures 3(a) and 3(b) show conceptual diagrams of the gas path in the apparatus, which will be explained below.

[0017] As shown in Figures 1 and 2, the path switching system of the laser ablation apparatus according to the first embodiment of the present invention comprises a 3-port solenoid valve 13 as a path switching unit and a 2-port solenoid valve 14 as a path opening / closing unit. A laser ablation cell 1 (hereinafter abbreviated as "cell") may also be added to this to form a path switching system.

[0018] The laser ablation cell 1 is constructed by attaching a port block 3A as an introduction section to the introduction side of the transport gas on the cell body 2, and a port block 3B as an outlet section to the outlet side on the cell body 2, and further attaching a detachable mounting block 7 to the cell body 2. In this example, bolts 12 are used to attach the port blocks 3A and 3B to the cell body 2. The cell body 2 is hollow inside, and its top surface is an opening, and a window section 4 is installed in this opening by a cover member 5. In this example, bolts 11 are used to install the cover member 5 on this window section 4.

[0019] In this diagram, the laser light from a laser light source (not shown) is irradiated onto the sample in the cell body 2 from the direction indicated by the symbol H in the figure.

[0020] As shown in Figure 2, the installation block 7 is attached to the cell body 2 by inserting it into the cell body 2 in the depth direction through the opening 2A of the cell body 2. The installation block 7, which acts as a stage, has a flat surface 7A on the installation block, which is provided with locking members 6A and 6B, respectively, which are operated by a handle 6C. By operating the handle 6C, the locks on the locking members 3A-2 and 3B-2 provided on the port blocks 3A and 3B are opened and closed. That is, by inserting the installation block 7 through the opening 2A of the cell body 2 and operating the handle 6C, the locking members 6A and 6B engage with the locking members 3A-2 and 3B-2, fixing their position. The installation stand 10 is attached to the recess 7C of the installation block 7, and the sample to be measured is placed on the upper surface of the installation stand 10.

[0021] A transport tube 9A, through which a transport gas is introduced from a gas source (not shown), is connected to the introduction side of a T member 15A. The outlet side of the T member 15A is branched into two directions, with a transport tube 9B connected to one and a transport tube 9F connected to the other.

[0022] The transport tube 9B is connected to the port block 3A on the inlet side of cell 1 via valve 8A. The transport tube 9C is connected to the port block 3B on the outlet side of cell 1 via valve 8B. The transport tube 9C is connected to the inlet side of the 3-port solenoid valve 13, and the outlet side of the 3-port solenoid valve 13 is branched into a transport tube 9D that leads the gas to the analytical instrument side such as ICP-MS or ICP-OES, and a transport tube 9E that leads the gas to the exhaust port.

[0023] The transport tube 9F is connected to the inlet side of the two-port solenoid valve 14, and the transport tube 9G is connected to the outlet side of the two-port solenoid valve 14. The transport tube 9G is connected to one end of the inlet side of the T member 15B. The transport tube 9D is connected to the other end of the inlet side of the T member 15B, and the transport tube 9H is connected to the outlet side of the T member 15B, so that the transported gas is guided to an analytical instrument such as an ICP-MS or ICP-OES.

[0024] The two-port solenoid valve 14 generates a magnetic force using electricity and drives the valve to open and close the path. In this example, it controls the on / off of the discharge of gas introduced from the transport tube 9F to the transport tube 9G. On the other hand, the three-port solenoid valve 13 generates a magnetic force using electricity and drives the valve to switch the path to which the transported gas is discharged. In this example, it switches the destination of the gas introduced from the transport tube 9C to either the transport tube 9D or the transport tube 9E.

[0025] In this configuration, the laser ablation apparatus's path switching system, during normal operation after the object to be measured is placed in cell 1, closes the two-port solenoid valve 14 as shown in Figure 3(a), closing the path so that the transport gas does not flow from transport tube 9F to transport tube 9G via the two-port solenoid valve 14. Then, the outlet of the three-port solenoid valve 13 is switched to the transport tube 9D side, setting the path so that the gas discharged from cell 1 is guided through transport tubes 9D and 9H to analytical instruments such as ICP-MS and ICP-OES.

[0026] On the other hand, when adding or removing samples from the cell, as shown in Figure 3(b), the two-port solenoid valve 14 is opened to set a path so that the transport gas flows from the transport tube 9F through the two-port solenoid valve 14 to the transport tube 9G. Then, the outlet of the three-port solenoid valve 13 is switched to the transport tube 9E side to set a path so that the gas or air discharged from cell 1 is guided through the transport tube 9E to the discharge port.

[0027] As described above, according to the first embodiment of the present invention, a path switching system for a laser ablation apparatus that delivers a transport gas containing an aerosol to an analytical instrument such as an ICP-MS or ICP-OES, which is equipped with a cell 1 on which a stage (installation block 7) for placing an object to be measured can be moved in and out, is provided, which includes a path opening / closing unit (2-port solenoid valve 14) interposed in a second path (transport tubes 9F, 9G) that branches off from a first path (transport tube 9A) that leads the transport gas to the cell and leads the transport gas to the analytical instrument side without going through the cell, and opens and closes the second path, and a path switching unit (3-port solenoid valve 13) that switches the destination of the transport gas delivered from the cell to the analytical instrument side (transport tube 9D) or the exhaust side (transport tube 9E), and when the stage is moved in and out for changing the object to be measured, the path opening / closing unit is opened and the path switching unit is switched to the exhaust side.

[0028] Therefore, according to the first embodiment of the present invention, when the object to be measured is replaced, the air mixed into the cell is discharged through the discharge port, and sufficient transport gas is introduced to the analyzer side via the transport tubes 9F, 9G, and 9H, thereby preventing plasma instability or blackout on the analyzer side.

[0029] <Second Embodiment> The path switching system of the laser ablation apparatus according to the second embodiment of the present invention is provided with three-port solenoid valves on the gas introduction side and the gas outlet side of the cell, and further branches the gas introduction side to the cell side and the analytical instrument side such as ICP-MS or ICP-OES, and provides two-port solenoid valves in the path that bypasses the analytical instrument such as ICP-MS or ICP-OES to adjust the gas flow.

[0030] Figure 4 shows a perspective view of the configuration of the path switching system of a laser ablation apparatus according to the second embodiment of the present invention, and Figure 5 shows a conceptual diagram of the gas path in the same apparatus, which will be explained. Here, the same reference numerals are used for components similar to those in the first embodiment, and redundant explanations are omitted, with the focus being on the differences.

[0031] As shown in Figure 4, the path switching system of the laser ablation apparatus according to the second embodiment of the present invention comprises a 3-port solenoid valve 13, 16 as a path switching unit and a 2-port solenoid valve 14 as a path opening / closing unit. A cell 1 may also be added to this to form a path switching system.

[0032] A transport tube 9A, through which a transport gas is introduced from a gas source (not shown), is connected to the introduction side of a T member 15A. The outlet side of the T member 15A is branched in two directions, with transport tube 9B-1 connected to one and transport tube 9F connected to the other.

[0033] The transport tube 9B-1 is connected to the inlet side of the 3-port solenoid valve 16, and the outlet side of the 3-port solenoid valve 16 is branched into a transport tube 9B-2 that guides the transport gas to cell 1 and a transport tube 9L that guides the air inside cell 1 to the exhaust side. The transport tube 9B-2 is connected to the port block 3A on the inlet side of cell 1.

[0034] A transport tube 9C is connected to the port block 3B on the outlet side of cell 1 via a valve 8B. The transport tube 9C is connected to the inlet side of the 3-port solenoid valve 13, and the outlet side of the 3-port solenoid valve 13 is branched into a transport tube 9D that guides gas to the analytical instrument side such as ICP-MS or ICP-OES, and a transport tube 9E that guides gas or air to the exhaust port.

[0035] The transport tube 9F is connected to the inlet side of the two-port solenoid valve 14, and the transport tube 9G is connected to the outlet side of the two-port solenoid valve 14. The transport tube 9G is connected to one end of the inlet side of the T member 15B. The transport tube 9D is connected to the other end of the inlet side of the T member 15B, and the transport tube 9H is connected to the outlet side of the T member 15B, so that the transported gas is guided to an analytical instrument such as an ICP-MS or ICP-OES.

[0036] The two-port solenoid valve 14 generates a magnetic force using electricity and drives the valve to open and close the path. In this example, it controls the on / off of the discharge of gas introduced from the transport tube 9F to the transport tube 9G. On the other hand, the three-port solenoid valves 13 and 16 generate a magnetic force using electricity and drive the valve to switch the path to which the transported gas is discharged. In this example, the three-port solenoid valve 16 switches the destination of the gas introduced from the transport tube 9B-1 to either the transport tube 9B-2 or the transport tube 9L. The three-port solenoid valve 13 switches the destination of the gas introduced from the transport tube 9C to either the transport tube 9D or the transport tube 9E.

[0037] In this configuration, the path switching system of this laser ablation apparatus opens the 2-port solenoid valve 14 when inserting or removing a sample from cell 1, as shown in Figure 5, and sets the path so that the transport gas flows from transport tube 9F through the 2-port solenoid valve 14 to transport tubes 9G and 9H (shown as a dashed line in Figure 4). Then, the outlet of the 3-port solenoid valve 16 is switched to the transport tube 9L side, and the outlet of the 3-port solenoid valve 13 is switched to the transport tube 9E side, setting the path so that air mixed into cell 1 when inserting or removing a sample from cell 1 is guided through transport tubes 9E and 9L to the discharge port and discharged (shown as a dashed line in Figure 4).

[0038] As described above, according to the second embodiment of the present invention, in a path switching system for a laser ablation apparatus that delivers a transport gas containing an aerosol to an analytical instrument such as an ICP-MS or ICP-OES, which is equipped with a cell 1 on which a stage (installation block 7) for placing an object to be measured can be moved in and out, a path opening / closing unit (2-port solenoid valve 14) is interposed in a second path (transport tubes 9F, 9G) that branches off from a first path (transport tube 9A) that leads the transport gas to the cell and leads the transport gas to the analytical instrument side without going through the cell, and opens and closes the second path, and the branch of the first path A route switching system is provided which includes a first route switching unit (3-port solenoid valve 16) interposed in a third route (transport tubes 9B-1, 9B-2) different from the second route, and which switches the connection from the cell via the third route to the first route or the exhaust side (transport tube 9L), and a second route switching unit (3-port solenoid valve 13) which switches the destination of the transport gas discharged from the cell to the analyzer side or the exhaust side (transport tube 9E), and which opens the first and second route opening / closing units and switches the route switching unit to the exhaust side when the stage is moved in or out for changing the object to be measured.

[0039] Therefore, according to the second embodiment of the present invention, the three-port solenoid valves 13 and 16 guide the air mixed into cell 1 during the replacement of the object to be measured to the discharge port and discharge it, and the two-port solenoid valve 14 introduces sufficient transport gas to the analyzer side via transport tubes 9F, 9G, and 9H, thereby preventing plasma instability or blackout on the analyzer side.

[0040] <Third Embodiment> The path switching system for a laser ablation apparatus according to the third embodiment of the present invention branches the gas introduction side to the cell side and the analytical instrument side such as ICP-MS or ICP-OES, provides a two-port solenoid valve in the path that bypasses the analytical instrument such as ICP-MS or ICP-OES, and further provides a mass flow controller in the path that leads to the analytical instrument such as ICP-MS or ICP-OES to provide an auxiliary transport gas, thereby adjusting the gas flow.

[0041] FIG. 6 shows a perspective view of the configuration of the path switching system of the laser ablation apparatus according to the third embodiment of the present invention, and FIG. 7 shows a conceptual diagram of the gas path in the same apparatus, which will be described. Here, for the same configuration as in the first embodiment, the same reference numerals are used, and redundant explanations are omitted, and the description will be centered on the differences.

[0042] As shown in FIG. 6, the path switching system of the laser ablation apparatus according to the third embodiment of the present invention includes a two-port solenoid valve 14 as a path opening / closing unit and a mass flow controller 17 as a flow rate adjusting unit. In addition, the cell 1 may be added to form a path switching system.

[0043] A transport tube 9A through which a transport gas is introduced from a gas source (not shown) is connected to the introduction side of a T member 15A. The outlet side of the T member 15A is branched in two directions, with a transport tube 9B connected to one side and a transport tube 9F connected to the other side.

[0044] The transport tube 9B is connected to a port block 3A on the introduction side surface of the cell 1 via a valve 8A. A transport tube 9C is connected to a port block 3B on the outlet side surface of the cell 1 via a valve 8B. And the transport tube 9C is connected to the introduction side of a T member 15B.

[0045] The transport tube 9F is connected to the introduction side of the two-port solenoid valve 14, a transport tube 9G is connected to the outlet side of the two-port solenoid valve 14, and the transport tube 9G is connected to one end of the introduction side of a T member 15C. A transport tube 9I through which an additional auxiliary gas is transported from a gas source (not shown) is connected to the introduction side of the mass flow controller 17, and a transport tube 9J is connected to the introduction side of the mass flow controller 17. The transport tube 9J is connected to the other end of the introduction side of the T member 15C, the outlet side of the T member 15C is connected to a transport tube 9K, and the transport tube 9K is connected to the other end of the introduction side of the T member 15B. A transport tube 9H is connected to the outlet side of the T member 15B, and the transport gas is guided to an analyzer such as an ICP-MS or ICP-OES.

[0046] The two-port solenoid valve 14 generates a magnetic force by an electric force and drives the valve by the action of the magnetic force to open and close the path. In this example, it performs on / off control of the derivation of the gas introduced from the transfer tube 9F to the transfer tube 9G. The mass flow controller 17 adjusts the flow rate of the additional auxiliary gas by adjusting the opening and closing of the valve by electromagnetic action.

[0047] In such a configuration, in the path switching system of this laser ablation apparatus, when taking in and out the sample to / from the cell, as shown in FIG. 7, the two-port solenoid valve 14 is opened, and the transfer gas flows from the transfer tube 9F through the two-port solenoid valve 14 to the transfer tube 9G to set the path. Then, the mass flow controller 17 is turned on to set the path so that the additional auxiliary gas flows. Thus, the transfer gas and the additional auxiliary gas are guided to the analyzer side such as ICP-MS or ICP-OES through the above-set path (indicated by a one-dot chain line in FIG. 6).

[0048] As described above, according to the third embodiment of the present invention, in a path switching system of a laser ablation apparatus including a cell 1 in which a stage (installation block 7) for placing a measurement object is freely movable in and out and guiding a transfer gas containing an aerosol to an analyzer such as ICP-MS or ICP-OES, it is interposed in a second path (transfer tubes 9F, 9G) that branches from a first path (transfer tube 9A) for guiding the transfer gas to the cell and guides the transfer gas to the analyzer side without passing through the cell, and includes a path opening / closing unit (two-port solenoid valve 14) for opening and closing the second path, and a flow rate adjustment unit (mass flow controller 17) that is interposed in a third path (transfer tubes 9I, 9J) for guiding the additional auxiliary gas to the analyzer and adjusts the flow rate of the additional auxiliary gas. When the stage is moved in and out for exchanging the measurement object, a path switching system is provided that opens the path opening / closing unit and adjusts to open the flow rate adjustment unit.

[0049] Therefore, according to the third embodiment of the present invention, when exchanging the measurement object, the transfer gas and the additional auxiliary gas are directly introduced to the analyzer side such as ICP-MS or ICP-OES, so that destabilization or extinction of the plasma on the analyzer side can be prevented.

[0050] <Fourth Embodiment> The laser ablation apparatus according to the fourth embodiment of the present invention automatically controls the path of the transported gas by linking the laser ablation apparatus according to the first to third embodiments described above with the opening and closing of an openable protective panel.

[0051] Figure 8 shows and explains the configuration of the control system of the laser ablation apparatus according to the fourth embodiment of the present invention.

[0052] As shown in Figure 8, the laser ablation apparatus includes at least a computer 50 for controlling each part, a light source 60, a 3-port solenoid valve 61, a 2-port solenoid valve 62, a flow rate adjustment unit 63, a cell 64, an openable / closable protective panel 65, and a sensor 66.

[0053] The light source 60 consists of a laser light source and an optical system, and irradiates the sample, which is the object to be measured, with laser light placed inside the cell 64. The 3-port solenoid valve 61 functions as a path switching unit that branches the transport path of the transport gas, etc., into two paths. The 2-port solenoid valve 62 functions as a path opening and closing unit that opens and closes the transport path of the transport gas, etc. The flow rate adjustment unit 63 consists of a mass flow controller, etc., and adjusts the flow rate of the additional auxiliary gas by operating the valve, etc. The cell 64 has the configuration described above in the first to third embodiments. The openable protective panel 65 is an openable door installed in the housing, which is opened and closed manually or automatically to put in and take out the sample during the measurement process. The sensor 66 detects the opening and closing of the openable protective panel 65.

[0054] In the computer 50, the communication unit 52 transmits and receives data from external devices via a communication network such as the Internet. The operation panel 53 is composed of, for example, a touch panel, and displays various operation buttons, accepting operation input by tapping these buttons. The storage unit 54 stores the control program of the control unit 51 in advance, as well as various data obtained through measurement.

[0055] The control unit 51 functions as the main control unit 51a, light source control unit 51b, solenoid valve control unit 51c, flow rate adjustment unit control unit 51d, stage drive control unit 51e, etc., by reading and executing the control program from the storage unit 54.

[0056] In this configuration, the main control unit 51a controls each of the control units 51b to 51c based on the various operating modes selected by the operation of the operation panel 52. The light source control unit 51b controls the irradiation of the light source 60 by laser, etc. The solenoid valve control unit 51c controls the switching of paths by the 3-port solenoid valve 61 and the opening and closing of paths by the 2-port solenoid valve 62, etc. The flow rate adjustment unit control unit 51d controls the flow rate of additional transported gas by the flow rate adjustment unit 63, such as a mass flow controller. The stage drive control unit 51e controls the driving of the stage of the cell 64. During the operation of the above-mentioned operations, the main control unit 51a detects the opening and closing of the openable protective panel 65 based on the output of the sensor 66, and executes the next operation based on the operating mode at the timing of the opening and closing.

[0057] The following describes in detail the processing procedure for path control by the laser ablation apparatus according to the fourth embodiment of the present invention, with reference to the flowchart in Figure 9. This operation corresponds to an automated version of the laser ablation apparatus according to the first and second embodiments described above, based on the operating mode.

[0058] When the control panel 53 is operated and a sample exchange instruction is given, and the main control unit 51a receives the instruction, control by each control unit 51b to 51e is started (S1).

[0059] First, the solenoid valve control unit 51c drives and controls the 2-port solenoid valve 62 to open a bypass path (S2), and then the solenoid valve control unit 51c drives and controls the 3-port solenoid valve 61 to switch the path to the exhaust side (S3). As a result, the transport gas is sent to the analytical instrument such as ICP-MS or ICP-OES via the bypassed alternative path, and any air mixed in the cell is discharged from the exhaust side (see, for example, Figures 3(b) and 5).

[0060] Next, when the retractable protective panel 65 is opened (manually or automatically), the sensor 66 detects the open / closed state and transmits it to the main control unit 51a (S4). When the user replaces the object to be measured (sample) placed inside the cell (S5), and the retractable protective panel 65 is closed (manual or automatically), the sensor 66 also detects this open / closed state and transmits it to the main control unit 51a (S6).

[0061] Next, the solenoid valve control unit 51c drives the 2-port solenoid valve 62 to close the bypass path (S7), and the solenoid valve control unit 51c drives the 3-port solenoid valve 61 to switch the path to the intake side (S8), and the measurement continues (S9). This switches to the normal path through which the transport gas is introduced into the cell. This completes the series of processes. Note that the processes in steps S2 and S3 described above may be performed in any order, and the processes in steps S7 and S8 may also be performed in any order.

[0062] The following describes in detail other processing steps for path control by the laser ablation apparatus according to the fourth embodiment of the present invention, with reference to the flowchart in Figure 10. This operation corresponds to an automated version of the laser ablation apparatus according to the third embodiment described above, based on the operating mode.

[0063] When the operation panel 53 is operated and a sample exchange instruction is given, and the main control unit 51a receives the instruction, control by each control unit 51b to 51e is started (S11).

[0064] First, the solenoid valve control unit 51c drives and controls the 2-port solenoid valve 62 to open a bypass path (S12), and the flow rate adjustment unit control unit 51d drives and controls the flow rate adjustment unit 63 to turn on the transport of the additional auxiliary gas and adjust its flow rate (S13). As a result, a path is established in which the additional transport gas is delivered to analytical instruments such as ICP-MS and ICP-OES in addition to the transport gas from the bypassed alternative path (see, for example, Figure 7).

[0065] Next, when the retractable protective panel 65 is opened (manually or automatically), the sensor 66 detects the open / closed state and transmits it to the main control unit 51a (S14). When the user replaces the object to be measured (sample) placed inside the cell (S15), and the retractable protective panel 65 is closed (manual or automatically), the sensor 66 also detects this open / closed state and transmits it to the main control unit 51a (S16).

[0066] Next, the flow rate adjustment control unit 51d drives the flow rate adjustment unit 63 to close the supply path for the additional transported gas (S17), and the solenoid valve control unit 51c drives the two-port solenoid valve 62 to close the bypassed path (S18), and the measurement continues (S19). This switches to the normal path through which the transported gas is introduced into the cell. This completes the series of processes. Note that the processes in steps S12 and S13 described above may be performed in any order, and the processes in steps S17 and S18 may also be performed in any order.

[0067] Finally, Figure 11 shows an external view of the laser impression device and explains it. More specifically, Figure 11(a) is a type of device in which the opening / closing protection panel 65A is opened and closed automatically, and Figure 11(b) is a type of device in which the opening / closing protection panel 65B is opened and closed manually. In either case, the opening / closing state is detected by a sensor and transmitted to the main control unit 51a.

[0068] As described above, according to the fourth embodiment of the present invention, automation based on the operating mode of the exhaust treatment of the laser ablation apparatus according to the first to third embodiments is realized.

[0069] Therefore, according to the fourth embodiment of the present invention, the processing by the laser ablation apparatus according to the first to third embodiments is automatically performed based on the operating mode, etc., and plasma destabilization or power outage on the analysis device side can be suitably prevented.

[0070] Although the first to fourth embodiments of the present invention have been described above, it goes without saying that the present invention is not limited thereto and various improvements and modifications are possible without departing from its spirit.

[0071] For example, the opening and closing of the transport gas or air pathways, and the switching of pathways, are not limited to the solenoid valves mentioned above; various other mechanisms can certainly be employed.

[0072] 1... Laser ablation cell, 2... Cell body, 3A, 3B... Port block, 3A-1... Inlet path, 3A-2... Locking member, 3B-1... Outlet path, 3B-2... Locking member, 4... Window section, 5... Cover member, 6... Handle section, 6A, 6B, 6C... Locking members, 7... Installation block, 7A... Installation block flat section, 7B... Installation block body, 7C... Recess, 8A, 8B... Valve, 9A-9L... Transport tube, 10... Installation base, 11, 12... Bolts, 13... 3-port solenoid valve, 14... 2-port solenoid valve, 15A, 15B, 15C...T member, 16...3-port solenoid valve, 17...mass flow controller, 50...computer, 51...control unit, 51a...main control unit, 51b...light source control unit, 51c...solenoid valve control unit, 51d...flow rate adjustment unit control unit, 51e...stage drive control unit, 52...communication unit, 53...operation panel, 54...storage unit, 60...light source, 61...3-port solenoid valve, 62...2-port solenoid valve, 63...flow rate control unit, 64...cell, 65...openable / closeable protective panel, 66...sensor.

Claims

1. A path switching system for a laser ablation apparatus that has a cell on which a stage for placing an object to be measured can be moved in and out, and which delivers a transport gas containing an aerosol to an analytical apparatus, comprising: a path opening / closing unit interposed in a second path that branches off from a first path that leads the transport gas to the cell and leads the transport gas to the analytical apparatus side without passing through the cell, and opens and closes the second path; and a path switching unit that switches the destination of the transport gas delivered out from the cell to the analytical apparatus side or the exhaust side, wherein when the stage is moved in or out for replacement of the object to be measured, the path opening / closing unit is opened, the path switching unit is switched to the exhaust side, and air mixed in the cell due to the moving in and out of the stage is exhausted.

2. A path switching system for a laser ablation apparatus that has a cell on which a stage for placing an object to be measured can be moved in and out, and which delivers a transport gas containing an aerosol to an analytical apparatus, comprising: a path opening / closing unit interposed in a second path that branches off from a first path that leads the transport gas to the cell and leads the transport gas to the analytical apparatus without going through the cell, and opens and closes the second path; a first path switching unit interposed in a third path different from the second path that branches off from the first path, and which switches the connection from the cell via the third path to the first path or the exhaust side; and a second path switching unit that switches the destination of the transport gas delivered from the cell to the analytical apparatus side or the exhaust side, wherein when the stage is moved in or out for replacement of the object to be measured, the first and second path opening / closing units are opened and the path switching unit is switched to the exhaust side.

3. A laser ablation apparatus characterized by using the path switching system described in either claim 1 or claim 2.

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