Biasing member fixing structure and electrical connection device
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2026-01-29
- Publication Date
- 2026-08-13
Smart Images
Figure JP2026003013_13082026_PF_FP_ABST
Abstract
Description
Biasing member fixing structure and electrical connection device
[0001] The present invention relates to a biasing member fixing structure and an electrical connection device, and can be applied to, for example, an electrical connection device such as an inspection socket used for an energization test of a test object.
[0002] Conventionally, packaged semiconductor devices (semiconductor devices) are inspected for electrical characteristics called package tests, final tests, etc. In these inspections, an inspection socket for mounting the semiconductor device is used. A plurality of contacts are mounted on the inspection socket, and a biasing member made of a synthetic resin such as an elastomer is provided to prevent each contact from falling off and to provide elasticity during contact.
[0003] Patent Documents 1 and 2 disclose an example of an inspection socket. The inspection socket described in Patent Document 1 is disclosed to include a contact block made of an elastomer in order to hold a plurality of contact pins simultaneously. Further, the inspection socket described in Patent Document 2 is disclosed in which a contact strip 320 is molded in combination with a plastic coating 320 as a biasing member, and the plastic coating 320 has a waveform.
[0004] Japanese Patent Application Laid-Open No. 7-335353 U.S. Patent Publication No. 9,178,328 (US9,178,328B2)
[0005] Conventionally, as a method of fixing a rod-shaped elastomer as a biasing member in an inspection socket, it is common to press-fit both ends of the rod-shaped elastomer into groove portions for fixing.
[0006] However, there is a problem that the central portion may float up if only both ends of the rod-shaped elastomer are fixed. For example, when inspecting a semiconductor device in which inspection pads are arranged in a grid pattern, such as an area array terminal device, the number of contacts increases, so the rod-shaped elastomer becomes longer, and the problem of floating is particularly likely to occur.
[0007] For example, to prevent contacts from falling off, a rod-shaped elastomer holds multiple contacts simultaneously, but it becomes difficult to firmly hold contacts in areas that have lifted up. Also, because the rod-shaped elastomer utilizes the elasticity of the contacts, the pin heights of contacts near lifted areas and those near non-lifted areas may differ, potentially affecting the contact between the electrode terminals of the object being tested and the contacts. This variation in the contact pressure against the electrode terminals can also affect the inspection of electrical characteristics.
[0008] Therefore, in view of the above-mentioned problems, the present invention seeks a biasing member fixing structure and an electrical connection device that can prevent the biasing member supporting the contact from lifting up and suppress variations in the needle pressure of the contact.
[0009] To solve the above problems, the first invention provides a biasing member fixing structure for fixing a biasing member that supports a plurality of contacts that electrically contact the electrode terminals of an object under inspection and provides elasticity to the plurality of contacts when in contact, characterized in that (1) the biasing member is a rod-shaped member that simultaneously supports a plurality of contacts, (2) it has a groove for housing the biasing member as a rod-shaped member, and the groove has (3) an end narrow portion at each end of the groove, the groove width being narrower than the diameter of the biasing member and fixing the end of the biasing member, and (4) one or more narrow portions that are provided between a certain contact and an adjacent contact among the plurality of contacts supported by the biasing member, the groove width being narrower than the diameter of the biasing member, and other than the end of the biasing member.
[0010] The second aspect of the present invention relates to an electrical connection device having a housing portion on a substrate having connection wiring to an inspection device, which houses an object to be inspected and a plurality of contacts that make electrical contact with the electrode terminals of the object to be inspected and the connection wiring, characterized in that the housing portion has the biasing member fixing structure of the first aspect of the present invention.
[0011] According to the present invention, it is possible to prevent the biasing member supporting the contact from lifting up and to suppress variations in the needle pressure of the contact.
[0012] This is a plan view showing the detailed configuration of the biasing member fixing structure for fixing the first biasing member and the second biasing member according to the embodiment. This is a perspective view showing the overall configuration of the inspection socket according to the embodiment. This is a configuration diagram showing the cross-sectional configuration of the housing portion of the inspection socket according to the embodiment. This is a diagram showing the arrangement of the contact, the first biasing member and the second biasing member according to the embodiment. This is a configuration diagram showing the detailed configuration of the biasing member fixing structure of Embodiment 1 and Embodiment 2 according to the embodiment. This is a diagram showing the conditions and effects of Embodiment 3 and Embodiment 4 according to the embodiment. This is a configuration diagram showing an example configuration of the biasing member fixing structure of Embodiment 3 and Embodiment 4 according to the embodiment. This is a diagram showing the conditions and effects of Embodiment 5 and Embodiment 6 according to the embodiment. This is a configuration diagram showing an example configuration of the biasing member fixing structure of Embodiment 5 and Embodiment 6 according to the embodiment. This is a diagram showing the conditions and effects of Embodiment 7 and Embodiment 8 according to the embodiment. This is a configuration diagram showing an example configuration of the biasing member fixing structure of Embodiment 7 and Embodiment 8 according to the embodiment. This is a configuration diagram showing the respective configurations of the groove portion of the first biasing member and the groove portion of the second biasing member according to the modified embodiment.
[0013] (A) In the following main embodiments, embodiments of the biasing member fixing structure and electrical connection device according to the present invention will be described in detail with reference to the drawings.
[0014] In the following, the "electrical connection device" according to the present invention electrically connects a semiconductor testing device (tester) and an object under test when testing the electrical characteristics of the object under test, and includes, for example, a test socket. In this embodiment, an example of application to a test socket is given.
[0015] The "biasing member" according to the present invention is a rod-shaped member made of synthetic resin (for example, elastomer, synthetic rubber, etc.) for pressing down on contacts and contact pins housed in an electrical connection device and for providing elasticity.
[0016] (A-1) Diagram 2 of the inspection socket configuration is a perspective view showing the overall configuration of the inspection socket according to the embodiment. Figure 3 is a configuration diagram showing the cross-sectional configuration of the housing portion of the inspection socket according to the embodiment. Note that the configuration of the inspection socket in Figures 2 and 3 is an example and is not limited thereto.
[0017] In Figure 2, the inspection socket 1, which serves as an electrical connection device, comprises an inspection socket mounting board 10, a frame 66, and a housing portion 60.
[0018] The test socket 1 is used to test the electrical characteristics of semiconductor chips (semiconductor devices) such as IC packages, which are used as the object to be tested 8. With the object to be tested 8 mounted in the housing 14 in the center of the test socket 1, the test socket 1 is connected to a semiconductor testing device and used for package testing, final testing, etc. The test socket 1 can be used as, for example, a test IC socket, a test socket, etc.
[0019] The inspection socket mounting substrate 10 is a wiring board made of an electrically insulating material. The inspection socket mounting substrate 10 has a wiring pattern 11 formed on its first surface (for example, the top surface), and a housing portion 60 fixed by a frame 66 is placed on the wiring pattern 11. The wiring pattern 11 is connected to each of the multiple contacts 12 and also to the semiconductor inspection device.
[0020] The frame 66 is a frame member that fixes the housing portion 60 to the first surface of the inspection socket mounting substrate 10 while fixing the periphery of the housing portion 60.
[0021] The housing portion 60 is provided with a plurality of contacts 12, a first biasing member 41, and a second biasing member 42 within a housing made of an insulating material. Here, each contact 12 is provided to connect to a wiring pattern 11 on the first surface of the inspection socket mounting substrate 10.
[0022] The housing portion 60 has a housing portion 14 in its central part for housing the object to be inspected 8, and is a member that houses the contactor 12, the first biasing member 41, and the second biasing member 42.
[0023] As shown in Figures 3(A) and 3(B), with the object under test 8 mounted in the housing 14, the housing 60 electrically connects the electrode terminals 82 of the object under test 8 in the housing 14 with the corresponding contacts 12 inside the housing. This allows electrical signals to be transmitted between the semiconductor testing apparatus and the object under test 8 via the contacts 12 and the wiring pattern 11.
[0024] The housing section 14 has an opening (for example, a square) that matches the shape of the object to be inspected 8, and has a tapered surface 14a that decreases in area toward the bottom (direction of the wiring pattern 11), and a storage section 14b that serves as a recess according to the shape and size of the object to be inspected 8. This makes it easy to install the object to be inspected 8. Furthermore, the object to be inspected 8 is pushed in from the opening toward the wiring pattern 11 side, and the object to be inspected 8 is fitted into the storage section 14b to install the object to be inspected 8. The object to be inspected 8 is removed by the reverse procedure.
[0025] The housing portion 60 is located inside the lower part of the storage portion 14b that houses the object to be inspected 8. The housing portion 60 houses the multiple contacts 12, the first biasing member 41, and the second biasing member 42. In other words, there is a space 17 inside the lower part of the storage portion 14b, and this space 17 serves as the housing portion 60.
[0026] Details of the arrangement of the contactor 12 and the first biasing member 41 and the second biasing member 42 in space 17 will be described later, but here we will briefly explain one example.
[0027] The object to be inspected 8 is a semiconductor device in which electrode terminals 82 for inspection pads are arranged in a grid pattern.
[0028] In the examples shown in Figures 2, 3(A), and 3(B), the object to be inspected 8 has 16 electrode terminals 82 arranged in a grid pattern on its second surface (for example, the bottom surface) at the intersections of 4 rows and 4 columns, and the inspection socket 1 is provided with 16 contacts 12 corresponding to the arrangement of the electrode terminals 82.
[0029] Figures 3(A) and 3(B) show the arrangement of four contacts 12 in a certain row out of the sixteen contacts 12. When the object to be inspected 8 is pushed into the storage section 14b, the electrode terminals 82 of the object to be inspected 8 and the tip 121 of the contact 12 make electrical contact, and electrical signals can be transmitted between the electrode terminals 82 and the wiring pattern 11 via the contacts 12. In other words, electrical signals can be conducted.
[0030] Note that the arrangement of the electrode terminals 82 of the object to be inspected 8 is not limited to 4 rows x 4 columns, but may be more than that. In that case as well, the inspection socket 1 shall be provided with the same number of contacts 12 as the number of electrode terminals 82, corresponding to the arrangement of the electrode terminals 82.
[0031] (A-2) Contact and biasing member Figure 4 is a diagram showing the arrangement of the contact 12, the first biasing member 41 and the second biasing member according to the embodiment. Figure 4(A) is a plan view when viewed downward from the top of the opening of the housing 14. Figure 4(B) is a side view showing the state of the contact 12 before and after contact with the electrode terminal 82 of the object to be inspected 8.
[0032] In Figure 4(A), the solid lines represent exposed parts, and the dashed lines represent parts housed within the housing. The 16 contacts 12 are arranged in a 4x4 grid.
[0033] The first biasing member 41 and the second biasing member 42 are each elastic members formed from, for example, a synthetic resin such as elastomer or synthetic rubber. The first biasing member 41 and the second biasing member 42 can be rod-shaped members with a circular, elliptical, square, rectangular cross-section, etc. In this embodiment, they are rod-shaped members with a circular cross-section.
[0034] There are four first biasing members 41 and four second biasing members 42, which are arranged to extend in the column direction and are arranged in the row direction. Each of the first biasing members 41 and two second biasing members 42 simultaneously supports all four contacts 12 that are arranged in the column direction.
[0035] The first biasing member 41 is provided below the tip portions 121 of all four contacts 12, and the second biasing member 42 is provided above the rear ends 125 of all four contacts 12 (see Figure 4(B)). In other words, the first biasing member 41 supports the tip portions 121 of the contacts 12 from below, and the second biasing member 42 supports the rear ends 125 of the contacts 12 from above.
[0036] In this embodiment, the case in which one contact 12 is supported by two biasing members is illustrated, but it is also possible to support one contact 12 with one biasing member.
[0037] The contact element 12 is a plate-shaped member formed from a conductive material such as metal. As shown in Figure 4(B), the contact element 12 has an elongated shape in the longitudinal direction (Y-axis direction). Note that the shape and size of the contact element 12 are examples only and are not limited to the example in Figure 4(B).
[0038] In this embodiment, the contactor 12 has a tip portion 121 that contacts the electrode terminal 82, a rear end portion 125, a wiring contact portion 122 that contacts the wiring pattern 11, a first biasing receiving portion 123 that contacts the first biasing member 41, and a second biasing receiving portion 124 that contacts the second biasing member 42.
[0039] The contactor 12 is housed in the space 17, but before contact with the electrode terminals 82 of the object to be inspected 8, its tip portion 121 protrudes from a slit provided in the mounting surface (i.e., the ceiling surface of the space 17) on which the object to be inspected 8, housed in the housing portion 60, is placed.
[0040] When the object to be inspected 8 is mounted, the tip 121 of the contactor 12 comes into contact with the electrode terminal 82. When the object to be inspected 8 is pushed in, the tip 121 moves downward (towards the wiring pattern 11) around the rear end 125, which is supported from above by the second biasing member 42. As a result, the first biasing member 41, which is under load, accumulates energy.
[0041] Conversely, when the test object 8 mounted on the housing part 60 is removed, the energization stored in the first biasing member 41 that has been receiving the load is released, and with the rear end part 125 supported by the second biasing member 42 as the center, the front end part 121 moves upward (toward the electrode terminal 82 side). As a result, the front end part 121 returns to a state of protruding from the slit in the storage part 14b.
[0042] Note that the structure of the contact 12 and the structures of the biasing members (the first biasing member 41 and the second biasing member 42) are not limited to the structures of this embodiment. That is, various shapes can be applied to the shape of the plate-like contact 12. Also, the number of biasing members supporting one contact 12 is not limited. Furthermore, various arrangements of the biasing members supporting one contact 12 can be applied. There are also various biasing structures of the contact formed by combining these contacts 12 and the biasing members, but as long as it is a structure in which a rod-shaped biasing member is press-fitted and fixed into a groove part, the biasing member fixing structure according to this embodiment can be widely applied.
[0043] (A-3) Biasing member fixing structure FIG. 1 is a plan view showing a detailed configuration of a biasing member fixing structure for fixing the first biasing member 41 and the second biasing member 42 according to the embodiment.
[0044] The biasing member fixing structure 50 in FIG. 1 is formed in a space 17 for housing the first biasing member 41 and the second biasing member 42.
[0045] Here, for the sake of easy explanation, the biasing member fixing structure 50 for fixing the first biasing member 41 is shown, but an equivalent structure is also formed for the second biasing member 42. A detailed description of the biasing member fixing structure 50 of the second biasing member 42 is omitted, but it has the same structure.
[0046] In FIG. 1, the biasing member fixing structure 50 includes a groove part 51 for press-fitting the first biasing member 41. The biasing member fixing structure 50 for housing the contact 12 and the first biasing member 41 is a member formed of an insulating material.
[0047] The groove portion 51 is a groove for press-fitting and fixing the first biasing member 41 formed of an elastomer or the like. The length of the groove portion 51 can be set to approximately the same length as the length (the length in the longitudinal direction) of the first biasing member 41. As the number of contacts 12 supported by the first biasing member 41 simultaneously increases, the length of the first biasing member 41 also increases, and accordingly, the length of the groove portion 51 is also increased according to the length of the first biasing member 41.
[0048] The groove portion 51 has end constricted portions 52 present at both ends of the groove portion 51, respectively, and one or a plurality of width constricted portions 53 present between the two end constricted portions 52.
[0049] The end constricted portions 52 of the groove portion 51 are portions that receive and fix the press-fitting of the first biasing member 41 at both ends of the groove portion 51. The groove width (the length of the width; the length in the Y-axis direction) of the end constricted portion 52 is formed to be smaller than the diameter (the length in the Y-axis direction) of the first biasing member 41. Therefore, when fixing the first biasing member 41 to the groove portion 51, the first biasing member 41 can be fixed by press-fitting both end portions of the first biasing member 41 into the end constricted portions 52 of the groove portion 51.
[0050] The width constricted portion 53 of the groove portion 51 is a portion that receives and fixes the press-fitting of portions other than both end portions of the first biasing member 41. By receiving and fixing the press-fitting of the first biasing member 41 at a location other than both end portions, the lifting of the first biasing member 41 can be prevented. Also, by preventing the lifting of the first biasing member 41, the pinning (assembly of the contacts 12) of the contacts 12 becomes easier and more reliable, and furthermore, variations in the pin height of the contacts 12 with respect to the electrode terminals 82 in the vicinity of the width constricted portion 53 can be prevented.
[0051] In the width direction (Y-axis direction), a pair of support protrusions (the first support protrusion 54 and the second support protrusion 55) are provided opposite to each other in the width constricted portion 53.
[0052] The first support projection 54 is located on the inner wall surface of the groove 51 and protrudes toward the inside of the groove, and similarly, the second support projection 55 is also located on the inner wall surface of the groove 51 and protrudes toward the inside of the groove. Since the first support projection 54 and the second support projection 55 are arranged facing each other in the axial direction, the press-fitted first biasing member 41 can be sandwiched and fixed between them.
[0053] The contact portion 541 of the first support projection 54 is the portion that contacts the press-fitted first biasing member 41, and similarly, the contact portion 551 of the second support projection 55 is also the portion that contacts the press-fitted first biasing member 41. The larger the contact area between the contact portion 541 and the contact portion 551 and the first biasing member 41, the stronger the first biasing member 41 can be fixed, and conversely, the smaller the contact area, the weaker the fixation can be.
[0054] Here, the first biasing member 41 is the element that fixes and gives elasticity to the contact 12. As described above, if the fixation is strong, the detachment of the contact 12 can be reliably prevented, but the strong fixation affects the elasticity of the first biasing member 41 such as the elastomer, which may cause the elastic force of the contact 12 to be weaker than expected, potentially increasing the needle pressure on the electrode terminal 82. On the other hand, if the fixation is weak, the elastic force of the contact 12 will be as expected, but it may not be possible to prevent it from floating up.
[0055] Thus, the groove 51 not only fixes the first biasing member 41, but also affects the elasticity of the first biasing member 41 and the elasticity of the contactor 12 (elasticity during contact), and furthermore, it can cause variations in the needle pressure applied to the electrode terminal 82 during contact. Therefore, the structure of the groove 51 is very delicate, and its design is difficult. The same applies to the method of fixing the second biasing member 42.
[0056] Therefore, detailed configuration examples (Examples 1 to 8) of the biasing member fixing structure 50, which prevents the biasing member from lifting up and allows the elasticity of the fixed contact element 12 to be exerted, will be explained using Figures 5 to 11.
[0057] For example, the difference in diameter of the first biasing member 41 raises the question of what the groove width of the narrow portion 53 should be. Also, for example, the pitch of the contactor 12 is determined according to the pitch of the electrode terminals 82 arranged on the object to be inspected 8, but the strength of fixing the biasing member differs depending on the length of the contact portion of the narrow portion 53 and the length of the end narrow portion 52, so the question arises of what the lengths of the contact portion and the end narrow portion 52 should be.
[0058] Based on the above, we will now describe an effective configuration in which the groove 51 effectively prevents the first biasing member 41 from lifting up and eliminates variations in the needle pressure of the contactor 12 to the electrode terminal 82 of the object under inspection 8.
[0059] Figure 5 is a configuration diagram showing the detailed configuration of the biasing member fixing structure 50 according to the embodiment.
[0060] Figure 5(B) is a configuration diagram showing the respective configurations of the groove 51 of the first biasing member 41 and the groove 61 of the second biasing member 42.
[0061] The groove 61 of the second biasing member 42 is basically the same as the groove 51 in structure, and has a narrow end portion 62 with a pair of support protrusions (first support protrusion 64, second support protrusion 65) and a narrow width portion 63. The first support protrusion 64 has a contact portion 641, and the second support protrusion 65 has a contact portion 651.
[0062] Here, "A: Groove width of the narrow section", "B: Contact section length", and "C: End narrow section length" are illustrated and defined. Specifically, "A: Groove width of the narrow section" is the groove width (length in the Y-axis direction) of the narrow section 53 (narrow section 63). "B: Contact section length" is the length over which the contact sections 541 and 551 (contact sections 641 and 651) contact the outer surface of the biasing member. "C: End narrow section length" is the length of the end narrow section 52 (end narrow section 62).
[0063] Figure 5(A) shows the configuration examples and effects of Embodiments 1 and 2. In Figure 5(A), the items are "pin pitch," "type of biasing member," "diameter of biasing member," "A. groove width of narrow section (narrowest width)," "B. contact section length," and "C. end narrow section length." The items are not limited to these.
[0064] Furthermore, to verify the effectiveness, we confirmed the absence of lifting and the presence or absence of variations in tracking force during contact. For "confirmation of absence of lifting," we visually checked for lifting of the first biasing member 41 or the second biasing member 42. If there was lifting, we marked it as "× (NG)," and if there was no lifting, we marked it as "〇 (OK)." For "presence or absence of variations in tracking force during contact," after press-fitting the first biasing member 41 or the second biasing member 42, we checked whether there was variation in tracking force between the multiple contacts 12 beyond a predetermined range. If there was variation, we marked it as "×," and if there was no variation, we marked it as "〇." Note that the same procedure was followed for all eight examples from 1 to 8.
[0065] <Example 1> Example 1 shows the case where the pitch between the contacts 12 is "pin pitch: 0.8 mm". In other words, it is assumed that it is used in an inspection socket that can accommodate the object to be inspected 8 in which the electrode terminals 82 are arranged at a 0.8 mm pitch. Also, the diameter of the first biasing member 41 is "diameter: 0.3 mm", and the diameter of the second biasing member 42 is "diameter: 0.2 mm".
[0066] For groove 51, the specifications were: A. Groove width: 0.25 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm.
[0067] In Example 1, when the first biasing member 41 and the second biasing member 42 were press-fitted into the grooves 51 and 61, their respective ends were firmly fixed, and there was no lifting of the central portion. The first biasing member 41 and the second biasing member 42 were contained within the grooves 51 and 61 over their entire longitudinal length. In other words, no lifting of the first biasing member 41 and the second biasing member 42 was observed.
[0068] Furthermore, although the pin pitch was 0.8 mm and the length of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portion 53 was set to 0.2 mm, the first biasing member 41 and the second biasing member 42 can firmly support the contact element 12 located near the narrow portion 53 (narrow portion 63), so the contact element 12 does not loosen as much as in the conventional design, and the contact element 12 does not fall off.
[0069] The elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure applied to the electrode terminals 82 of the object under inspection 8. In other words, even during contact, the first biasing member 41 and the second biasing member 42 did not lift up, and it can be said that they were able to provide even support to all of the contactors 12.
[0070] Furthermore, by providing a narrow section 53 (narrow section 63) between both ends of the groove 51 (groove 61), the length over which the end narrow section 52 (end narrow section 62) contacts the first biasing member 41 (second biasing member 42) can be shortened compared to conventional designs. In other words, the contact area at the end narrow section 52 (end narrow section 62) can be reduced. This allows for greater leeway in the design of the groove 51 (groove 61), which previously required a highly accurate design scale, and also allows for smoother assembly of the contact element 12.
[0071] <Example 2> Example 2 shows the case where the pitch between the contacts 12 is "pin pitch: 0.65 mm". In other words, it is assumed that it is used in an inspection socket that can accommodate the object to be inspected 8 in which the electrode terminals 82 are arranged at a 0.65 mm pitch. Furthermore, the diameter of the first biasing member 41 is "diameter: 0.25 mm", and the diameter of the second biasing member 42 is "diameter: 0.2 mm".
[0072] For groove 51, the specifications were: A. Groove width: 0.23 mm, B. Contact length: 0.2 mm, C. End narrow length: 0.35 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.2 mm, C. End narrow length: 0.35 mm.
[0073] In Example 2, the pin pitch is narrower than in Example 1. In this example, since it is necessary to reduce the area of the contacts 12 arranged in the X-axis direction, a first biasing member 41 with a smaller diameter than in Example 1 is used.
[0074] Regarding the groove 51, the groove width of the narrow portion 53 was made narrower to 0.23 mm compared to the diameter of the first biasing member 41, which has a diameter of 0.25 mm, and the ratio of the length of the contact portions 541 and 551 to the pin pitch was increased. In this example as well, when the first biasing member 41 was press-fitted into the groove 51, each end was firmly fixed, and there was no lifting of the central portion, and the first biasing member 41 was contained within the groove 51 over its entire length. The same was true for the groove 61 of the second biasing member 42. In other words, no lifting of the first biasing member 41 and the second biasing member 42 was observed.
[0075] Furthermore, with a pin pitch of 0.65 mm, the length of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portion 53 was set to 0.2 mm. However, the first biasing member 41 and the second biasing member 42 were able to firmly support the contacts 12 located near the narrow portion 53 (narrow portion 63), preventing the contacts 12 from falling off.
[0076] Although the ratio of the length of the contact portions 541 and 551 (contact portions 641 and 651) to the pin pitch was increased compared to Example 1, the first biasing member 41 and the second biasing member 42 were flexible, the elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure against the electrode terminals 82 of the object under inspection 8. In other words, even during contact, the first biasing member 41 and the second biasing member 42 did not lift up, and it can be said that they were able to provide even support to all of the multiple contactors 12.
[0077] Furthermore, similar to Embodiment 1, by providing a narrow section 53 (narrow section 63) between both ends of the groove 51 (groove 61), the length of the end narrow section 52 (end narrow section 62) can be made shorter than in the conventional design. In other words, the contact area at the end narrow section 52 (end narrow section 62) can be reduced. This allows for more leeway in the design of the groove 51 (groove 61), and also allows for smoother assembly of the contact element 12.
[0078] <Example 3> Figure 6 shows the configuration examples and effects of Examples 3 and 4. Figure 7(A) is a configuration example of Example 3, and Figure 7(B) is a configuration diagram showing a configuration example of Example 4.
[0079] In Example 3, the groove width of the narrow sections 53 and 63 was set to 70% of the diameter of the first biasing member 41 and the second biasing member 42 of the rod-shaped elastomer.
[0080] For example, in Embodiment 3, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0081] For groove 51, the specifications were: A. Groove width: 0.21 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm. For groove 61, the specifications were: A. Groove width: 0.14 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm.
[0082] In Example 3, the groove widths of the narrow sections 53 and 63 were made smaller than those in Example 1. However, the grooves 51 and 61 firmly secured the press-fitted first biasing member 41 and second biasing member 42, and there was no lifting in the central section. The first biasing member 41 and second biasing member 42 were contained within the grooves 51 and 61 throughout the entire longitudinal region, and there was no lifting. Furthermore, not only was press-fitting smooth, but removal of the first biasing member 41 and second biasing member 42 was also smooth.
[0083] Furthermore, with a pin pitch of 0.8 mm, the lengths of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portion 53 were set to 0.2 mm. However, the first biasing member 41 and the second biasing member 42 were able to firmly support the contacts 12 located near the narrow portion 53 (narrow portion 63), preventing the contacts 12 from falling off.
[0084] The elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure applied to the electrode terminals 82 of the object under inspection 8. In other words, even during contact, the first biasing member 41 and the second biasing member 42 did not lift up, and it can be said that they were able to provide even support to all of the contactors 12.
[0085] Furthermore, although the ratio of the length of the narrow end portion 52 to the pin pitch was reduced compared to Examples 1 and 2, the length of the narrow end portion 52 (narrow end portion 62) can be made shorter than before by providing a narrow width portion 53 (narrow width portion 63) between both ends of the groove portion 51 (groove portion 61). In other words, even if the contact area at the narrow end portion 52 (narrow end portion 62) is reduced, there is still room for flexibility in the design of the groove portion 51 (groove portion 61), and the contactor 12 can be assembled smoothly.
[0086] <Example 4> In Example 4, the groove width of the narrow sections 53 and 63 was set to 95% of the diameter of the first biasing member 41 and the second biasing member 42 of the rod-shaped elastomer.
[0087] For example, in Embodiment 4, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0088] For groove 51, the specifications were: A. Groove width: 0.285 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm. For groove 61, the specifications were: A. Groove width: 0.19 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.4 mm.
[0089] In Example 4, the groove widths of the narrow sections 53 and 63 were made larger than those in Example 1. However, the grooves 51 and 61 firmly secured the press-fitted first biasing member 41 and second biasing member 42, and there was no lifting of the central section. The first biasing member 41 and second biasing member 42 were contained within the grooves 51 and 61 throughout the entire longitudinal region, and there was no lifting. Furthermore, because the groove width was increased, the first biasing member 41 and second biasing member 42 could be removed smoothly.
[0090] Furthermore, with a pin pitch of 0.8 mm, the lengths of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portion 53 were set to 0.2 mm. However, the first biasing member 41 and the second biasing member 42 were able to firmly support the contacts 12 located near the narrow portion 53 (narrow portion 63), preventing the contacts 12 from falling off.
[0091] The elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure applied to the electrode terminals 82 of the object under inspection 8. In other words, even during contact, the first biasing member 41 and the second biasing member 42 did not lift up, and it can be said that they were able to provide even support to all of the contactors 12.
[0092] Furthermore, similar to Embodiment 1, by providing a narrow section 53 (narrow section 63) between both ends of the groove 51 (groove 61), the length of the end narrow section 52 (end narrow section 62) can be made shorter than in the conventional design. In other words, even if the contact area at the end narrow section 52 (end narrow section 62) is reduced, there is more leeway in the design of the groove 51 (groove 61), and the contact element 12 can be assembled smoothly.
[0093] <Example 5> Figure 8 shows the configuration examples and effects of Examples 5 and 6. Figure 9(A) is a configuration example of Example 5, and Figure 9(B) is a configuration diagram showing a configuration example of Example 6.
[0094] In Example 5, the ratio of the length of contact portions 541 and 551 (contact portions 641 and 651) to the pin pitch was set to 20%.
[0095] For example, in Embodiment 5, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0096] For groove 51, the specifications were: A. Groove width: 0.25 mm, B. Contact length: 0.16 mm, and C. End narrow length: 0.4 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.16 mm, and C. End narrow length: 0.4 mm.
[0097] In Example 5, the length of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portions 53 and 63 was set to 20% of the pin pitch.
[0098] Although the length of the contact portions 541 and 551 (contact portions 641 and 651) was reduced, that is, the contact area with the first biasing member 41 and the second biasing member 42 was reduced, even in this case, the fit of the press-fitted first biasing member 41 and the second biasing member 42 did not become loose, and they were firmly fixed. The first biasing member 41 and the second biasing member 42 were contained in the grooves 51 and 61 over the entire length, and there was no lifting of the central part.
[0099] Furthermore, with a pin pitch of 0.8 mm, the length of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portion 53 was set to 0.16 mm. However, the first biasing member 41 and the second biasing member 42 were able to firmly support the contacts 12 located near the narrow portion 53 (narrow portion 63), preventing the contacts 12 from falling off.
[0100] The elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure applied to the electrode terminals 82 of the object under inspection 8. In other words, even during contact, the first biasing member 41 and the second biasing member 42 did not lift up, and it can be said that they were able to provide even support to all of the contactors 12.
[0101] Furthermore, compared to Example 1, the ratio of the length of the contact portions 541 and 551 (contact portions 641 and 651) to the pin pitch was reduced, but even in this case, it was still possible to fix it firmly, so the length of the narrow end portion 52 (narrow end portion 62) could be made shorter than before. In other words, even if the contact area at the narrow end portion 52 (narrow end portion 62) was reduced, there was more leeway in the design of the groove portion 51 (groove portion 61), and the contactor 12 could also be assembled smoothly.
[0102] <Example 6> In Example 6, the ratio of the length of contact portions 541 and 551 (contact portions 641 and 651) to the pin pitch was set to 50%.
[0103] For example, in Embodiment 6, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0104] For groove 51, the specifications were: A. Groove width: 0.25 mm, B. Contact length: 0.4 mm, and C. End narrow length: 0.4 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.4 mm, and C. End narrow length: 0.4 mm.
[0105] In Example 6, the length of the contact portions 541 and 551 (contact portions 641 and 651) of the narrow portions 53 and 63 was set to 50% of the pin pitch.
[0106] Although the length of the contact portions 541 and 551 (contact portions 641 and 651) was increased, that is, the contact area with the first biasing member 41 and the second biasing member 42 was increased, the press-fitted first biasing member 41 and the second biasing member 42 were not fixed too firmly. Furthermore, the first biasing member 41 and the second biasing member 42 were contained within the grooves 51 and 61 over the entire lengthwise direction, and there was no lifting of the central part.
[0107] Furthermore, although the contact portions 541 and 551 (contact portions 641 and 651) of the narrow section 53 were supported over a long range of 0.4 mm relative to the 0.8 mm pin pitch, the contact elements 12 located near the narrow section 53 (narrow section 63) were not supported too firmly, and the detachment of the contact elements 12 was effectively prevented.
[0108] Furthermore, the elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure applied to the electrode terminals 82 of the object under inspection 8. In other words, even during contact, there was no lifting of the first biasing member 41 and the second biasing member 42, and it can be said that all of the contactors 12 were evenly supported.
[0109] Furthermore, regarding the groove 51, the ratio of the length of the contact portion 541 to the pin pitch was reduced, but even in that case, it was still possible to fix it firmly. In other words, even if the contact area at the narrow end portion 52 (narrow end portion 62) is reduced, there is still room for flexibility in the design of the groove portion 51 (groove portion 61), and the contact element 12 can be assembled smoothly.
[0110] <Example 7> Figure 10 is a diagram showing the configuration examples and effects of Examples 7 and 8. Figure 11(A) is a configuration example of Example 7, and Figure 11(B) is a configuration diagram showing a configuration example of Example 8.
[0111] In Example 7, the ratio of the length of the narrow end portion 52 (narrow end portion 62) to the pin pitch was set to 30%.
[0112] For example, in Embodiment 7, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0113] For groove 51, the specifications were: A. Groove width: 0.25 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.24 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.24 mm.
[0114] In Example 7, the length of the narrow end portion 52 (narrow end portion 62) was set to 30% of the pin pitch.
[0115] Although the length of the narrowed end portion 52 (narrowed end portion 62) was reduced, that is, the contact area at both ends of the first biasing member 41 and the second biasing member 42 was reduced, there was no lifting of the press-fitted first biasing member 41 and the second biasing member 42. In other words, the first biasing member 41 and the second biasing member 42 were contained within the grooves 51 and 61 over the entire length, and there was no lifting of the central portion.
[0116] Furthermore, even when the area supporting both ends of the first biasing member 41 and the second biasing member 42 was reduced, they could still be supported by the narrow portion 53 (narrow portion 63), thus effectively preventing the contactor 12 from falling off.
[0117] Furthermore, the elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure against the electrode terminals 82 of the object under inspection 8. This indicates that the narrow portion 53 (narrow portion 63) is provided, which allows the contactor 12 to be supported.
[0118] Furthermore, even when the ratio of the length of the narrow end portion 52 (narrow end portion 62) to the pin pitch was reduced, the first biasing member 41 (second biasing member 42) could still be firmly fixed. In other words, even when the contact area at the narrow end portion 52 (narrow end portion 62) was reduced, there was room for flexibility in the design of the groove portion 51 (groove portion 61), and the contact element 12 could also be assembled smoothly.
[0119] <Example 8> In Example 8, the ratio of the length of the end narrow portion 52 (end narrow portion 62) to the pin pitch was set to 70%.
[0120] For example, in Embodiment 8, the pitch between the contacts 12 is set to "pin pitch: 0.8 mm", the diameter of the first biasing member 41 is set to "diameter: 0.3 mm", and the diameter of the second biasing member 42 is set to "diameter: 0.2 mm".
[0121] For groove 51, the specifications were: A. Groove width: 0.25 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.56 mm. For groove 61, the specifications were: A. Groove width: 0.18 mm, B. Contact length: 0.2 mm, and C. End narrow length: 0.56 mm.
[0122] In Example 8, the length of the narrow end portion 52 (narrow end portion 62) was set to 70% of the pin pitch.
[0123] The length of the narrow end portion 52 (narrow end portion 62) was increased, that is, the contact area at both ends of the first biasing member 41 and the second biasing member 42 was increased. However, even when the support force was strengthened not only in the narrow width portion 53 (narrow width portion 63) but also in the narrow end portion 52 (narrow end portion 62), the press-fitted first biasing member 41 and the second biasing member 42 did not lift up. In other words, the first biasing member 41 and the second biasing member 42 were contained within the grooves 51 and 61 over the entire length, and there was no lifting of the central portion.
[0124] Furthermore, by strengthening the support force at both ends of the first biasing member 41 and the second biasing member 42, and by supporting them with the narrow portion 53 (narrow portion 63), the contact element 12 could be firmly prevented from falling off.
[0125] Furthermore, the elasticity of the contactor 12 was sufficient, and there was no variation in the needle pressure against the electrode terminals 82 of the object under inspection 8. This indicates that the narrow portion 53 (narrow portion 63) is provided, which allows the contactor 12 to be supported.
[0126] Furthermore, even when the ratio of the length of the narrow end portion 52 (narrow end portion 62) to the pin pitch was increased, the first biasing member 41 (second biasing member 42) could still be securely fixed. This allowed for more flexibility in the design of the groove portion 51 (groove portion 61), and also enabled the contactor 12 to be assembled smoothly.
[0127] <Results of Examples 1 to 8> Figure 10 summarizes the results from Examples 1 to 8, showing the "groove width of the narrow portion 53 (narrow portion 63) relative to the diameter of the biasing member," the "ratio of the length of the contact portions 541 and 551 (contact portions 641 and 651) relative to the pin pitch," and the "ratio of the length of the end narrow portion 52 (end narrow portion 62) relative to the pin pitch."
[0128] From the results of Examples 1 to 8, it can be seen that when the groove width of the narrow portion 53 (narrow portion 63) relative to the diameter of the biasing member is approximately 70-95% (in the range of 70% to 95%), it is possible to effectively prevent the central part of the biasing member from lifting up and to prevent variations in stylus pressure. Furthermore, from the results of Examples 1 and 2, it can be seen that when the pin pitch is further narrowed, it is preferable for the groove width of the narrow portion 53 (narrow portion 63) relative to the diameter of the biasing member to be approximately 83-92% (in the range of 83% to 92%).
[0129] Similarly, it can be seen that when the ratio of the length of contact portions 541 and 551 (contact portions 641 and 651) to the pin pitch is approximately 20-50% (in the range of 20% to 50%), and further approximately 20-35% (in the range of 20% to 35%), the central part of the biasing member can be effectively prevented from lifting, and variations in stylus pressure can be prevented.
[0130] Similarly, it can be seen that when the ratio of the length of the narrow end portion 52 (narrow end portion 62) to the pin pitch is approximately 30-70% (in the range of 30% to 70%), and even more specifically 50-55% (in the range of 50% to 55%), the central part of the biasing member can be effectively prevented from lifting, and variations in the tracking force can also be prevented.
[0131] (A-4) Effects of the Embodiment As described above, according to this embodiment, the biasing members (first biasing member, second biasing member) can be prevented from lifting up by supporting both ends of the biasing members with the narrow end portions and supporting the space between the contactors with the narrow width portion.
[0132] Furthermore, according to this embodiment, the narrow portion supports the biasing member between the contact and the adjacent contact, thereby enabling uniform support of the contacts and suppressing variations in stylus pressure.
[0133] Furthermore, according to this embodiment, pressing into and removing the groove becomes smoother, making it easy to attach and detach the biasing member and reducing the workload.
[0134] (B) Other Embodiments Although various modified embodiments have been mentioned in the embodiments described above, the present invention can also be applied to the following modified embodiments.
[0135] (B-1) Figure 12 is a configuration diagram showing the respective configurations of the groove 51 of the first biasing member 41 and the groove 61 of the second biasing member 42 according to the modified embodiment.
[0136] In the embodiment described above, an example was given in which a narrow portion 53 (narrow portion 63) is provided between the contact 12 and all adjacent contacts 12.
[0137] However, the narrow sections 53 (narrow sections 63) may be spaced apart. That is, as illustrated in Figure 12(A), the narrow sections 53 (narrow sections 63) may be placed at intervals of one contact between multiple contacts, or they may be placed at intervals of two contacts as in Figure 12(B), or three contacts as in Figure 12(C).
[0138] For example, in cases such as area array terminal devices, where the number of electrode terminals arranged on the object to be inspected 8 increases, and the number of contacts increases accordingly, the length of the biasing member may also increase. In such cases, a narrow section 53 (narrow section 63) may be provided every n units.
[0139] As shown in Figures 12(A) to 12(C), the narrow sections are not limited to being provided at equal intervals. The same unique effect can be obtained if the narrow sections are placed anywhere other than both ends of the biasing member, between the contacts. Furthermore, the same unique effect can be obtained if there is one or more narrow sections.
[0140] (B-2) In the above-described embodiment, the example was given in which the length of contact with the outer surface of the biasing member is the same for both the two contact portions 541 and 551 (in other words, the contact area is the same). However, the example is not limited to this, and the contact length of the contact portion 541 and the contact length of the contact portion 551 with respect to the biasing member may be different. Even in that case, as long as the biasing member can be reliably supported, specific effects can be obtained.
[0141] (B-3) In the above-described embodiment, an example was given in which there are two end narrowing portions to receive the press-fitting of each end of the biasing member, but it is also possible to receive the press-fitting of either one of the ends, in which case there may be only one end narrowing portion.
[0142] 1: Inspection socket, 10: Inspection socket mounting board, 11: Wiring pattern, 14: Housing section, 14a: Tapered surface, 14b: Storage section, 17: Space, 60: Housing section, 66: Frame, 8: Object to be inspected, 82: Electrode terminal, 12: Contact, 121: Tip section, 122: Wiring contact section, 123: First biasing receiving section, 124: Second biasing receiving section, 125: Rear end section, 41: First biasing member, 42: Second biasing member, 50: biasing member fixing structure, 51: groove, 52: narrow end, 53: narrow width, 54: first support projection, 55: second support projection, 61: groove, 62: narrow end, 63: narrow width, 64: first support projection, 65: second support projection, 541: contact part, 551: contact part, 641: contact part, 651: contact part.
Claims
1. A biasing member fixing structure for fixing a biasing member that supports a plurality of contacts that electrically contact the electrode terminals of an object under inspection and provides elasticity to the plurality of contacts when in contact, wherein the biasing member is a rod-shaped member that simultaneously supports the plurality of contacts, and has a groove for housing the biasing member as a rod-shaped member, and the groove has a narrow end portion at each end of the groove, the groove width being narrower than the diameter of the biasing member and fixing the end of the biasing member, and one or more narrow width portions that are narrower than the diameter of the biasing member and are provided between a certain contact and an adjacent contact among the plurality of contacts supported by the biasing member, other than the end of the biasing member.
2. The biasing member fixing structure according to claim 1, characterized in that, when there are multiple narrow portions, the multiple narrow portions are provided at equal intervals from one end to the other end of the groove portion.
3. The biasing member fixing structure according to claim 1, characterized in that, when there are multiple narrow portions, the multiple narrow portions are provided at non-equal intervals from one end to the other end of the groove portion.
4. The biasing member fixing structure according to claim 1, characterized in that the ratio of the length of the groove width of the narrow portion to the diameter of the biasing member is 70% or more and 95% or less.
5. The biasing member fixing structure according to claim 1 or 4, characterized in that the ratio of the length of the contact portion in which the narrow portion contacts the biasing member to the distance between the contacts is 20% or more and 50% or less.
6. The biasing member fixing structure according to claim 1 or 4, characterized in that the ratio of the length of the end narrow portion to the distance between the contacts is 30% or more and 70% or less.
7. The biasing member fixing structure according to claim 1, characterized in that the plurality of contacts are arranged in a grid, the biasing member is provided for each row of the plurality of contacts arranged in a grid, and supports the plurality of contacts arranged in each row simultaneously, and the groove is provided for each row, and houses and fixes each of the plurality of biasing members provided in each row.
8. An electrical connection device having a housing portion on a circuit board having connection wiring to an inspection device, which houses an object to be inspected and a plurality of contacts that make electrical contact with the electrode terminals of the object to be inspected and the connection wiring, wherein the housing portion has the biasing member fixing structure described in any one of claims 1 to 7.