Electromagnetic wave matching device and electromagnetic wave matching system
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2026-02-02
- Publication Date
- 2026-08-13
Smart Images
Figure JP2026003660_13082026_PF_FP_ABST
Abstract
Description
Electromagnetic Wave Integration Device and Electromagnetic Wave Integration System
[0001] The present invention relates to an electromagnetic wave integration device and an electromagnetic wave integration system.
[0002] Patent Document 1 discloses an electromagnetic wave integrator that reflects an electromagnetic wave beam emitted from a gyrotron using a plurality of phase correction mirrors and emits it to an external transmission system through an exit. [Prior Art Documents] [Patent Documents] [Patent Document 1] Japanese Patent Laid-Open No. 09-138291 General Disclosure
[0003] The electromagnetic wave integration device according to one aspect of the present invention may include a housing having a first window and a second window. The electromagnetic wave integration device may include a first mirror disposed inside the housing and configured to reflect an electromagnetic wave beam incident from the first window. The electromagnetic wave integration device may include a second mirror disposed inside the housing and configured to reflect the electromagnetic wave beam reflected by the first mirror and emit it from the second window. The electromagnetic wave integration device may include a first support portion that extends from the inside to the outside of the housing through a first through hole of the housing and supports the first mirror inside the housing. The electromagnetic wave integration device may include a second support portion that extends from the inside to the outside of the housing through a second through hole of the housing and supports the second mirror inside the housing.
[0004] The electromagnetic wave integration device may include a first angle adjustment mechanism provided on an outer surface around the first through hole of the housing and configured to adjust an angle of the first mirror via the first support portion. The electromagnetic wave integration device may include a second angle adjustment mechanism provided on an outer surface around the second through hole of the housing and configured to adjust an angle of the second mirror via the second support portion.
[0005] In any of the electromagnetic wave matching devices, the first angle adjustment mechanism may have a first base fixed to the outer surface of the housing. The first angle adjustment mechanism may have a first angle adjustment section that supports the first mirror so as to be rotatable about a first rotation axis relative to the first base. The second angle adjustment mechanism may have a second base fixed to the outer surface of the housing. The second angle adjustment mechanism may have a third angle adjustment section that supports the second mirror so as to be rotatable about a third rotation axis relative to the second base.
[0006] In any of the electromagnetic wave matching devices, the first angle adjustment mechanism may have a second angle adjustment section that supports the first mirror so as to be rotatable about a second rotation axis intersecting the first rotation axis relative to the first angle adjustment section. The second angle adjustment mechanism may have a fourth angle adjustment section that supports the second mirror so as to be rotatable about a fourth rotation axis intersecting the third rotation axis relative to the third angle adjustment section.
[0007] In any of the electromagnetic wave matching devices, the first angle adjustment mechanism may have a first extension portion that is arranged to surround a part of the outer circumference of the first support portion, with one end fixed to the first mirror side of the first support portion and the other end fixed to the first angle adjustment portion. The second angle adjustment mechanism may have a third extension portion that is arranged to surround a part of the outer circumference of the second support portion, with one end fixed to the second mirror side of the second support portion and the other end fixed to the third angle adjustment portion.
[0008] In any of the electromagnetic wave matching devices, the first angle adjustment mechanism may include a first extension portion arranged to surround a part of the outer circumference of the first support portion, with one end fixed to the first mirror side end of the first support portion and the other end fixed to the first angle adjustment portion, and a second extension portion arranged to surround a part of the outer circumference of the first extension portion, with one end fixed to the housing or the first base and the other end fixed to the first angle adjustment portion. The second angle adjustment mechanism may include a third extension portion arranged to surround a part of the outer circumference of the second support portion, with one end fixed to the second mirror side end of the second support portion and the other end fixed to the third angle adjustment portion, and a fourth extension portion arranged to surround a part of the outer circumference of the third extension portion, with one end fixed to the housing or the second base and the other end fixed to the third angle adjustment portion.
[0009] In any of the electromagnetic wave matching devices, one end of the second extension portion may be fixed to the housing via a first flange provided around the first through-hole, and the other end of the second extension portion may be fixed to the first angle adjustment portion via a second flange provided around the third through-hole through which the first support portion of the first angle adjustment portion passes. One end of the fourth extension portion may be fixed to the housing via a third flange provided around the second through-hole, and the other end of the fourth extension portion may be fixed to the third angle adjustment portion via a fourth flange provided around the fourth through-hole through which the second support portion of the third angle adjustment portion passes.
[0010] In any of the electromagnetic wave matching devices, the space within the housing and the space between the first extension portion and the second extension portion may be in communication through the first through-hole. The space within the housing and the space between the third extension portion and the fourth extension portion may be in communication through the second through-hole.
[0011] In any of the electromagnetic wave matching devices, the space within the housing, the space between the first extension portion and the second extension portion, and the space between the third extension portion and the fourth extension portion may be a vacuum.
[0012] Any of the electromagnetic wave matching devices may include a first pipe through which a refrigerant for cooling the first mirror flows, passing through the first support portion. The electromagnetic wave matching device may also include a second pipe through which a refrigerant for cooling the second mirror flows, passing through the second support portion.
[0013] In any of the electromagnetic wave matching devices, the housing may have a first wall portion and a second wall portion that constitute the outer surface of the housing. The first window may be provided in the first wall portion, and the second window may be provided in the second wall portion. In any of the electromagnetic wave matching devices, the housing may have a first wall portion and a second wall portion parallel to the first wall portion on the opposite side of the first wall portion. The first window may be provided in the first wall portion. The second window may be provided in the second wall portion.
[0014] In any of the electromagnetic wave matching devices, the housing may further have a third wall perpendicular to the first and second walls. The third wall may include the mounting surface of the housing.
[0015] An electromagnetic wave matching system according to one aspect of the present invention may include the electromagnetic wave matching device and an electromagnetic wave generating device that generates an electromagnetic wave beam to be incident from the first window.
[0016] It should be noted that the above summary of the invention does not enumerate all of its features. Furthermore, subcombinations of these features may also constitute an invention.
[0017] This figure schematically shows the configuration of the electromagnetic wave matching system 10 according to this embodiment. This is a side view of the electromagnetic wave matching device 100 according to this embodiment, viewed from the y-axis direction. This is a perspective view of the electromagnetic wave matching device 100 according to this embodiment. This is a perspective view of the electromagnetic wave matching device 100 with the opposing side walls of the housing 110 removed in the y-axis direction. This is a front view of the electromagnetic wave matching device 100 viewed from the side of the housing 110 where the window 112a is provided. This is a cross-sectional view taken along line A-A shown in Figure 5A. This is a perspective view of the electromagnetic wave matching device 100 with the side wall of the housing 110 removed, viewed from the angle adjustment mechanism 130a side. This is a cross-sectional view taken along line A-A shown in Figure 6A. This is a plan view of the angle adjustment mechanism 130a (130b) viewed from the reflective surface 122a (122b) side of the mirror 120a (120b). This is a perspective view of the angle adjustment mechanism 130a (130b) viewed from the reflective surface 122a (122b) side of the mirror 120a (120b). This is a perspective view of the angle adjustment mechanism 130a (130b) as seen from the opposite side of the reflective surface 122a (122b) of the mirror 120a (120b). This is a plan view of the angle adjustment mechanism 130a (130b) as seen from the y-axis direction shown in Figure 1. This is a plan view of the angle adjustment mechanism 130a (130b) and the support part 140a (140b) as seen from the y-axis direction shown in Figure 1. This is a partial cross-sectional view of the angle adjustment mechanism 130a (130b) and the support part 140a (140b) as seen along the surface 110e or surface 110f shown in Figure 1 and from a direction perpendicular to the y-axis.
[0018] The present invention will be described below through embodiments, but these embodiments are not intended to limit the scope of the claims. Furthermore, not all combinations of features described in the embodiments are necessarily essential to the solution of the invention.
[0019] Figure 1 is a schematic diagram showing the configuration of the electromagnetic wave matching system 10 according to this embodiment. The electromagnetic wave matching system 10 comprises a gyrotron 20 and an electromagnetic wave matching device 100. The gyrotron 20 is an example of an electromagnetic wave generator. The gyrotron 20 comprises an electron gun section 21, a body section 25, and a collector section 26.
[0020] The electron gun unit 21 is a triode-type high-frequency electron gun that generates an electron beam. The electron gun unit 21 includes a cathode electrode 23 and an anode electrode 24. The body unit 25 has a cavity resonator 251, a body electrode 255, and a solenoid coil 252. The body electrode 255 is provided at the tip of the electron gun unit 21 and applies an acceleration voltage. The solenoid coil 252 is arranged to surround the body electrode 255 and applies a static magnetic field in the axial direction of the gyrotron 20. When a voltage is applied to the electron gun unit 21, thermionic electrons are emitted.
[0021] A narrow, ring-shaped emission belt 22 is provided on the cathode electrode 23. Electrons are emitted from the emission belt 22. By creating a finite angle between the direction of electron emission and the direction of the magnetic field lines of the static magnetic field, a rotational velocity is imparted to the electrons, forming a cylindrical electron beam. The electrons emitted from the emission belt 22 are wrapped around the static magnetic field and introduced downstream into the cavity resonator 251 along the magnetic field lines.
[0022] The cavity resonator 251 oscillates a high-power, high-frequency electromagnetic wave through interaction with the electron beam generated from the cathode electrode 23. The collector 26 captures the electron beam after the interaction. The cavity resonator 251 is positioned at the center of the solenoid coil 252. As the magnetic field strength increases from the electron gun 21 toward the cavity resonator 251, the electron's propagating energy is converted into rotational energy according to the conservation of the electron's magnetic moment. The ratio of the electron's rotational speed to its propagating speed, the so-called rotation ratio (pitch factor), increases as it propagates, and the cavity resonator 251 generates an electron beam with a large rotational energy component.
[0023] The gyrotron 20 is an electron tube that converts the rotational energy of electrons into electromagnetic wave (microwave) energy within a cavity resonator 251 using the effect of an electron cyclotron resonance maser, generating an electron beam with a high rotation ratio. The electron gun 21 controls the rotation ratio by controlling the anode voltage while keeping the energy of the electron beam constant. The rotation ratio can also be changed by changing the magnetic field of the electron gun 21, but in this case, the position of the electron beam changes, so it is necessary to synchronize it with the magnetic field of the cavity resonator 251 and adjust it to the optimal position of the electron beam within the cavity resonator 251.
[0024] Inside the cavity resonator 251, electromagnetic waves of resonant modes with unique resonant frequencies are excited depending on the position of the electron beam and the strength of the applied magnetic field. These electromagnetic waves do not leak out towards the electron gun section 21 because they act as an electromagnetic wave cutoff, and propagate only downstream. The mode converter 254 converts the electromagnetic waves into a Gaussian electromagnetic beam EMb. The Gaussian electromagnetic beam EMb emitted from the mode converter 254 is guided by the reflectors 241 and 242 and emitted to the outside as a high-frequency beam MWb, which is a quasi-optical electromagnetic beam, through the output window 28 provided in the collector section 26. The electron beam Eb, which has lost energy after being used to excite the electromagnetic waves in the cavity resonator 251, travels along the magnetic field surrounded by the insulating ceramic 243 and is captured in the collector section 26.
[0025] In a gyrotron 20 with this configuration, the electron beam generated from the cathode electrode 23 undergoes helical motion due to the electric field formed by the anode electrode 24 and the magnetic field generated by the solenoid coil 252, and is further accelerated by the electric field between the cathode electrode 23 and the body section 25. The energy of the accelerated electron beam is converted into rotational energy by the magnetic field generated by the solenoid coil 252. The helical-moving electron beam interacts within the cavity resonator 251 of the body section 25, and a portion of the electron beam's energy is converted into high-frequency energy. After this interaction, the electron beam is captured by the collector section 26.
[0026] The electromagnetic wave matching device 100 couples the electromagnetic wave beam, which is a high-frequency beam MWb output from the gyrotron 20, to a corrugated waveguide. The electromagnetic wave matching device 100 comprises a housing 110, mirrors 120a and 120b arranged inside the housing 110, support parts 140a and 140b that support mirrors 120a and 120b, angle adjustment mechanisms 130a and 130b for adjusting the angles of mirrors 120a and 120b, and pipes 150a and 150b through which a coolant flows to cool mirrors 120a and 120b. The electromagnetic wave matching device 100 corrects the phase of the electromagnetic wave beam by reflecting the electromagnetic wave beam with mirrors 120a and 120b, and concentrates the energy by correcting the beam shape of the electromagnetic wave beam, thereby matching the propagation modes.
[0027] The housing 110 has a window 112a on the surface 110a facing the gyrotron 20, through which an electromagnetic wave beam (high-frequency beam MWb) output from the gyrotron 20 is incident. The housing 110 further has a window 112b on the surface 110b opposite to surface 110a, through which the electromagnetic wave beam reflected by mirrors 120a and 120b is emitted toward the corrugated waveguide. The electromagnetic wave beam incident from window 112a is reflected by the reflective surface 122a of mirror 120a, then reflected by the reflective surface 122b of mirror 120b, and then emitted from window 112b.
[0028] Window 112a is an example of a first window, and window 112b is an example of a second window. Mirror 120a is an example of a first mirror, and mirror 120b is an example of a second mirror. Angle adjustment mechanism 130a is an example of a first angle adjustment mechanism, and angle adjustment mechanism 130b is an example of a second angle adjustment mechanism. The positions of the walls of the housing 110 on which windows 112a and 112b are provided, as shown in Figure 1, are examples only. Each of windows 112a and 112b may be provided on any different wall from among the multiple wall sections that make up the outer surface of the housing 110.
[0029] The electromagnetic wave matching device 100 corrects the phase of the electromagnetic wave beam that enters the housing 110 through the window 112a by reflecting it with mirrors 120a and 120b, and sets the electromagnetic wave beam to the fundamental mode HE of the corrugated waveguide.１１ Convert to mode and output via window 112b. Then HE １１ The millimeter waves (high-frequency beams) converted into modes are introduced into a fusion reactor, for example, via a corrugated waveguide.
[0030] The housing 110 has a wall portion 110a with a window 112a facing the output window 28 of the gyrotron 20, and a wall portion 110b facing and parallel to wall portion 110a. The wall portion 110b is provided with the window 112b. The housing 110 further has a wall portion 110c perpendicular to wall portions 110a and 110b. Wall portion 110c includes the mounting surface of the housing 110. The housing 110 further has a wall portion 110d perpendicular to wall portions 110a and 110b, facing and parallel to wall portion 110c. The housing 110 further has a wall portion 110e connected at an angle to wall portions 110a and 110b, and a wall portion 110f facing wall portion 110e. The interior angles formed by wall portion 110e and wall portion 110d, and by wall portion 110e and wall portion 110b are each 135 degrees. Similarly, the interior angles formed by wall portion 110f and wall portion 110a, and by wall portion 110f and wall portion 110c are each 135 degrees. Wall portion 110a is an example of a first wall portion of the housing 110, wall portion 110b is an example of a second wall portion of the housing 110, and wall portion 110c is an example of a third wall portion of the housing 110.
[0031] The wall portion 110c or wall portion 110d of the housing 110 functions as a reference plane (reference line) aligned with the same direction as the propagation direction of the electromagnetic wave beam emitted from the gyrotron 20. This makes it easy to adjust the incident angle of the electromagnetic wave beam between the gyrotron 20 and the electromagnetic wave matching device 100. Furthermore, since the wall portion 110c, including the mounting surface, is perpendicular to the walls 110a and 110b, it is easy to adjust the position when installing it relative to the gyrotron 20.
[0032] In Figure 1, the x-axis is defined as the axis parallel to the incident and outgoing directions of the electromagnetic wave beam incident on the electromagnetic wave matching device 100, the y-axis is defined as the axis along the wall portion 110c and perpendicular to the incident and outgoing directions of the high-frequency beam, and the z-axis is defined as the axis along the wall portions 110a and 110b and perpendicular to the x-axis and y-axis.
[0033] Next, the configuration of the electromagnetic wave matching device 100 according to this embodiment will be further explained with reference to Figures 2 to 12.
[0034] Figure 2 is a side view of the electromagnetic wave matching device 100 according to this embodiment, viewed from the y-axis direction. Figure 3 is a perspective view of the electromagnetic wave matching device 100 according to this embodiment. Figure 4 is a perspective view of the electromagnetic wave matching device 100 with the opposing side walls of the housing 110 removed in the y-axis direction.
[0035] Figure 5A is a front view of the electromagnetic wave matching device 100 as seen from the wall portion 110a side of the housing 110, which is provided with a window 112a. Figure 5B is a cross-sectional view taken along line A-A in Figure 5A.
[0036] Figure 6A is a perspective view of the electromagnetic wave matching device 100 with the side wall of the housing 110 removed, as seen from the angle adjustment mechanism 130a side. Figure 6B is a cross-sectional view taken along line A-A in Figure 6A.
[0037] The housing 110 may be made of aluminum. The housing 110 may be formed, for example, by machining aluminum. In this embodiment, an example is shown in which the housing 110 is made of aluminum, but it may be made of other metals or alloys suitable for a vacuum environment, such as stainless steel, titanium alloy, or aluminum alloy. The inside of the housing 110 is hollow, and the electromagnetic wave matching device 100 is used with the inside of the housing 110 in a vacuum state. Therefore, when a drive mechanism is provided inside the housing 110, it is preferable to use a non-grease specification mechanism. Also, since a high-frequency beam passes inside the housing 110, it is preferable to take measures against arc discharge or outgassing, or to use materials with high heat resistance such as ceramics for the components placed inside the housing 110. Considering these factors, each component placed inside the housing 110 becomes expensive.
[0038] Therefore, in this embodiment, the number of parts placed inside the housing 110 is minimized, and as many parts as possible are placed outside the housing 110, thereby reducing parts costs. Furthermore, by placing as many parts as possible outside the housing 110, maintenance of the parts is made easier.
[0039] More specifically, in the electromagnetic wave matching device 100 according to this embodiment, the angle adjustment mechanisms 130a and 130b, which are drive mechanisms for adjusting the angles of the mirrors 120a and 120b, are located outside the housing 110. This eliminates the need to make the drive parts of the angle adjustment mechanisms 130a and 130b non-grease specification. Furthermore, it eliminates the need to construct the angle adjustment mechanisms 130a and 130b from highly heat-resistant materials such as ceramics in order to improve heat resistance. Thus, the manufacturing cost of the angle adjustment mechanisms 130a and 130b is reduced, and the risk of malfunctions occurring in the angle adjustment mechanisms 130a and 130b is lowered. In addition, by providing the angle adjustment mechanisms 130a and 130b outside the housing 110, maintenance of the angle adjustment mechanisms 130a and 130b is made easier.
[0040] As shown in Figure 5B, the housing 110 has through holes 114a and 114b in the wall portions 110e and 110f, which communicate from the inside to the outside of the housing 110. Through hole 114a is an example of a first through hole, and through hole 114b is an example of a second through hole.
[0041] Support portion 140a extends from the inside to the outside of the housing 110, passing through the through hole 114a, and supports the mirror 120a inside the housing 110. Support portion 140b extends from the inside to the outside of the housing 110, passing through the through hole 114b of the housing 110, and supports the mirror 120b inside the housing 110.
[0042] The electromagnetic wave matching device 100 further includes a pipe 150a through which a cooling medium for the mirror 120a flows, passing inside the support portion 140a, and a pipe 150b through which a cooling medium for the mirror 120b flows, passing inside the support portion 140b. The support portion 140a (140b) has a groove extending in the longitudinal direction of the support portion 140a (140b), and the pipe 150a (150b) is arranged in the groove. The mirrors 120a and 120b generate heat by reflecting the electromagnetic wave beam, which is a high-frequency beam. The medium flowing through the pipes 150a and 150b cools this heat. The medium may be, for example, water.
[0043] The pipe 150a is exposed from the support portion 140a inside the housing 110 and includes a pipe 152a that passes through the inside of the mirror 120a. The pipe 150b is exposed from the support portion 140b inside the housing 110 and includes a pipe 152b that passes through the inside of the mirror 120b.
[0044] The angle adjustment mechanism 130a is provided on the outer surface around the through-hole 114a of the housing 110 and adjusts the angle of the mirror 120a via the support portion 140a. The angle adjustment mechanism 130b is provided on the outer surface around the through-hole 114b of the housing 110 and adjusts the angle of the mirror 120b via the support portion 140b.
[0045] FIG. 7 is a plan view of the angle adjustment mechanism 130a (130b) as viewed from the side of the reflecting surface 122a (122b) of the mirror 120a (120b). FIG. 8 is a perspective view of the angle adjustment mechanism 130a (130b) as viewed from the side of the reflecting surface 122a (122b) of the mirror 120a (120b). FIG. 9 is a perspective view of the angle adjustment mechanism 130a (130b) as viewed from the side opposite to the reflecting surface 122a (122b) of the mirror 120a (120b). FIG. 10 is a plan view of the angle adjustment mechanism 130a (130b) as viewed from the y-axis direction shown in FIG. 1.
[0046] FIG. 11 is a plan view of the angle adjustment mechanism 130a (130b) and the support portion 140a (140b) as viewed from the y-axis direction shown in FIG. 1. FIG. 12 is a partial cross-sectional view of the angle adjustment mechanism 130a (130b) and the support portion 140a (140b) as viewed from a direction along the wall portion 110e or the wall portion 110f shown in FIG. 1 and orthogonal to the y-axis.
[0047] [[ID=】] The pipe 150a (150b) passing through the support portion 140a (140b) is exposed from the outer surface near one end on the mirror 120a (120b) side of the support portion 140a (140b) and is connected to the pipe 152a (152b). The pipe 152a (152b) passes through the inside of the mirror 120a (120b), and after further being exposed from the mirror 120a (120b), it is connected to the pipe 150a (150b) again. The pipe 150a (150b) passes through the support portion 140a (140b) again and is connected to an external temperature adjustment circulation device. The pipes 150a (150b) and the pipes 152a (152b) are made of, for example, copper.
[0048] The angle adjustment mechanism 130a (130b) includes a base 132a (132b), an angle adjustment section 134a (134b), and an angle adjustment section 136a (136b). The base 132a (132b) is fixed to the outer surface of the housing 110. The base 132a (132b) is fixed to the outer surface of the housing 110 via a flange 131a (131b) provided around the through hole 114a (114b). Base 132a is an example of a first base, and base 132b is an example of a second base. Angle adjustment section 134a is an example of a first angle adjustment section, and angle adjustment section 134b is an example of a third angle adjustment section.
[0049] The angle adjustment section 134a (134b) supports the mirror 120a (120b) on the base 132a (132b) so that it can rotate around the rotation axis 1221a (1221b) shown in Figure 11. The rotation axis 1221a (1221b) is an axis that is along the reflective surface 122a (122b) of the mirror 120a (120b) and parallel to the y-axis. The rotation axis 1221a (1221b) is an axis that is along the wall portion 110c, which is the installation surface of the electromagnetic wave matching device 100, and is perpendicular to the incident and outgoing directions of the electromagnetic wave beam.
[0050] The angle adjustment section 136a (136b) supports the mirror 120a (120b) so that it can rotate around a rotation axis 1222a (1222b) that intersects the rotation axis 1221a (1221b) relative to the angle adjustment section 134a (134b). The angle adjustment section 136a is an example of a second angle adjustment section, and the angle adjustment section 136b is an example of a fourth angle adjustment section. The rotation axis 1222a (1222b) is perpendicular to the rotation axis 1221a (1221b) and forms a 45-degree angle with respect to the incident and exit directions of the electromagnetic wave beam.
[0051] The base 132a (132b) has a sliding surface 1321a (1321b) that forms an arc centered on the rotation axis 1221a (1221b) when viewed from the direction of the rotation axis 1221a (1221b). The angle adjustment part 134a (134b) has a sliding surface 1341a (1341b) that forms an arc corresponding to the sliding surface 1321a (1321b). The base 132a (132b) holds the angle adjustment parts 134a and 134b so as to be slidable via the sliding surface 1321a (1321b). As the angle adjustment parts 134a and 134b move along the sliding surface 1321a (1321b) relative to the base 132a (132b), the mirror 120a (120b) rotates together with the angle adjustment parts 134a and 134b around the rotation axis 1221a (1221b), and the orientation of the reflective surface 122a (122b) is adjusted.
[0052] The angle adjustment section 134a (134b) has a sliding surface 1342a (1342b) that forms an arc centered on the rotation axis 1222a (1222b) when viewed from the direction of the rotation axis 1222a (1222b). The angle adjustment section 136a (136b) has a sliding surface 1361a (1361b) that forms an arc corresponding to the sliding surface 1342a (1342b). The angle adjustment section 134a (134b) holds the angle adjustment section 136a (136b) so as to be slidable via the sliding surface 1342a (1342b). As the angle adjustment part 136a (136b) moves along the sliding surface 1342a (1342b) relative to the angle adjustment part 134a (134b), the mirror 120a (120b) rotates together with the angle adjustment part 136a (136b) around the rotation axis 1222a (1222b), and the orientation of the reflective surface 122a (122b) is adjusted.
[0053] The angle adjustment section 134a (134b) and the angle adjustment section 136a (136b) may be rotated manually or electrically. If the angle adjustment section 134a (134b) and the angle adjustment section 136a (136b) are rotated electrically, the angle adjustment mechanism 130a (130b) may further include a drive source such as a motor to drive the angle adjustment section 134a (134b) and the angle adjustment sections 136a and 136b.
[0054] The angle adjustment mechanism 130a (130b) has a bellows-shaped extension portion 142a (142b) that is arranged to surround a part of the outer circumference of the support portion 140a (140b). One end of the extension portion 142a (142b) is fixed to one end of the support portion 140a (140b) on the mirror 120a (120b) side, and the other end is fixed to the angle adjustment portion 134a (134b). Furthermore, the angle adjustment mechanism 130a (130b) has a bellows-shaped extension portion 144a (144b) that is arranged to surround a part of the outer circumference of the extension portion 142a (142b). One end of the extension portion 144a (144b) is fixed to the housing 110 or the base 132a, and the other end is fixed to the angle adjustment portion 134a (134b). The stretched portion 142a is an example of the first stretched portion, and the stretched portion 142b is an example of the third stretched portion. The stretched portion 144a is an example of the second stretched portion, and the stretched portion 144b is an example of the fourth stretched portion.
[0055] One end of the extension portion 144a (144b) is fixed to the housing 110 via a flange 131a (131b) provided around the through hole 114a (114b) of the housing 110, and the other end of the extension portion 144a (144b) is fixed to the angle adjustment portion 134a (134b) via a flange 135a (135b) provided around the through hole 1344a (1344b) through which the support portion 140a (140b) of the angle adjustment portion 134a (134b) passes.
[0056] With this configuration, the space 110S inside the housing 110 (see Figure 5B) and the space 130S between the extension parts 142a (142b) and 144a (144b) (see Figure 12) are in communication via the through hole 114a (114b). The space 110S inside the housing 110 and the space 130S between the extension parts 142a (142b) and 144a (144b) are in vacuum. The mirror 120a (120b), the piping 152a, and a part of the support part 140a (140b) are arranged in the vacuum space inside the housing 110. On the other hand, the drive part of the angle adjustment mechanism 130a (130b) is located in the space outside the housing 110. Therefore, the drive part of the angle adjustment mechanism 130a (130b) does not need to be non-grease specification and does not need to be made of a heat-resistant material such as ceramic.
[0057] Furthermore, by positioning the angle adjustment section 134a (134b) outside the housing 110, the movable angle adjustment section 134a (134b) and angle adjustment section 136a (136b) can be positioned away from the rotation axis 1221a (1221b) and rotation axis 1222a (1222b). This allows for a larger radius of curvature of the sliding surface 1321a (1321b) and sliding surface 1342a (1342b). Consequently, the amount of angle adjustment of the mirror 120a (120b) corresponding to the sliding amount of the angle adjustment section 134a (134b) and angle adjustment section 136a (136b) can be reduced, allowing for finer adjustment of the mirror 120a (120b). In other words, it becomes easier to make highly accurate adjustments to the angle of the mirror 120a (120b).
[0058] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications or improvements can be made to the above embodiments. It will be clear from the claims that such modified or improved forms may also be included in the technical scope of the present invention.
[0059] It should be noted that the execution order of operations, procedures, steps, and stages in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not explicitly stated as "before," "prior to," etc., and that these can be performed in any order unless the output of a previous process is used in a later process. Even if the operation flow in the claims, specifications, and drawings is described using phrases such as "first," "next," etc. for convenience, this does not mean that it is mandatory to perform the operations in that order.
[0060] 10 Electromagnetic wave matching system 20 Gyrotron 21 Electron gun section 22 Emission belt 23 Cathode electrode 24 Anode electrode 25 Body section 26 Collector section 28 Output window 100 Electromagnetic wave matching device 110 Housing 112a, 112b Window 114a, 114b Through hole 120a, 120b Mirror 122a, 122b Reflecting surface 130a, 130b Angle adjustment mechanism 131a, 131b Flange 135a, 135b Flange 132a, 132b Base 134a, 134b Angle adjustment section 136a, 136b Angle adjustment section 140a, 140b Support section 142a, 142b Extension section 144a, 144b Extension section 150a, 150b Piping 152a, 152b Piping 241, 242 Reflector 243 Insulating ceramic 251 Cavity resonator 252 Solenoid coil 254 Mode converter 255 Body electrode 1221a, 1221b Rotating shaft 1222a, 1222b Rotating shaft 1344a, 1344b Through hole EMb Gaussian electromagnetic beam Eb Electron beam MWb High-frequency beam
Claims
1. An electromagnetic wave matching device comprising: a housing having a first window and a second window; a first mirror disposed inside the housing for reflecting an electromagnetic wave beam incident from the first window; a second mirror disposed inside the housing for reflecting the electromagnetic wave beam reflected by the first mirror and for emitting it from the second window; a first support portion that extends from the inside to the outside of the housing through a first through-hole in the housing and supports the first mirror inside the housing; and a second support portion that extends from the inside to the outside of the housing through a second through-hole in the housing and supports the second mirror inside the housing.
2. The electromagnetic wave matching device according to claim 1, further comprising: a first angle adjustment mechanism provided on the outer surface around the first through-hole of the housing for adjusting the angle of the first mirror via the first support portion; and a second angle adjustment mechanism provided on the outer surface around the second through-hole of the housing for adjusting the angle of the second mirror via the second support portion.
3. The electromagnetic wave matching device according to claim 2, wherein the first angle adjustment mechanism comprises a first base fixed to the outer surface of the housing and a first angle adjustment section that supports the first mirror so as to be rotatable about a first rotation axis relative to the first base, and the second angle adjustment mechanism comprises a second base fixed to the outer surface of the housing and a third angle adjustment section that supports the second mirror so as to be rotatable about a third rotation axis relative to the second base.
4. The electromagnetic wave matching device according to claim 3, wherein the first angle adjustment mechanism further comprises a second angle adjustment section that supports the first mirror so as to be rotatable about a second rotation axis intersecting the first rotation axis relative to the first angle adjustment section, and the second angle adjustment mechanism further comprises a fourth angle adjustment section that supports the second mirror so as to be rotatable about a fourth rotation axis intersecting the third rotation axis relative to the third angle adjustment section.
5. The electromagnetic wave matching device according to claim 3, wherein the first angle adjustment mechanism has a first extension portion that is arranged to surround a part of the outer circumference of the first support portion, with one end fixed to the first mirror side end of the first support portion and the other end fixed to the first angle adjustment portion, and the second angle adjustment mechanism has a third extension portion that is arranged to surround a part of the outer circumference of the second support portion, with one end fixed to the second mirror side end of the second support portion and the other end fixed to the third angle adjustment portion.
6. The electromagnetic wave matching device according to claim 4, wherein the first angle adjustment mechanism has a first extension portion arranged to surround a part of the outer circumference of the first support portion, with one end fixed to the first mirror side end of the first support portion and the other end fixed to the first angle adjustment portion; and a second extension portion arranged to surround a part of the outer circumference of the first extension portion, with one end fixed to the housing or the first base and the other end fixed to the first angle adjustment portion; and the second angle adjustment mechanism has a third extension portion arranged to surround a part of the outer circumference of the second support portion, with one end fixed to the second mirror side end of the second support portion and the other end fixed to the third angle adjustment portion; and a fourth extension portion arranged to surround a part of the outer circumference of the third extension portion, with one end fixed to the housing or the second base and the other end fixed to the third angle adjustment portion.
7. The electromagnetic wave matching device according to claim 6, wherein one end of the second extension portion is fixed to the housing via a first flange provided around the first through hole, the other end of the second extension portion is fixed to the first angle adjustment portion via a second flange provided around the third through hole through which the first support portion of the first angle adjustment portion passes, one end of the fourth extension portion is fixed to the housing via a third flange provided around the second through hole, and the other end of the fourth extension portion is fixed to the third angle adjustment portion via a fourth flange provided around the fourth through hole through which the second support portion of the third angle adjustment portion passes.
8. The electromagnetic wave matching device according to claim 6, wherein the space inside the housing and the space between the first extension portion and the second extension portion are in communication through the first through hole, and the space inside the housing and the space between the third extension portion and the fourth extension portion are in communication through the second through hole.
9. The electromagnetic wave matching device according to claim 8, wherein the space inside the housing, the space between the first extension portion and the second extension portion, and the space between the third extension portion and the fourth extension portion are a vacuum.
10. The electromagnetic wave matching device according to claim 1, further comprising: a first pipe through which a refrigerant for cooling the first mirror flows, passing through the first support portion; and a second pipe through which a refrigerant for cooling the second mirror flows, passing through the second support portion.
11. The electromagnetic wave matching device according to claim 1, wherein the housing has a first wall portion and a second wall portion that constitute the outer surface of the housing, the first window is provided in the first wall portion, and the second window is provided in the second wall portion.
12. The electromagnetic wave matching device according to claim 1, wherein the housing has a first wall portion and a second wall portion parallel to the first wall portion on the opposite side of the first wall portion, the first window is provided in the first wall portion, and the second window is provided in the second wall portion.
13. The electromagnetic wave matching device according to claim 12, wherein the housing further has a third wall portion perpendicular to the first wall portion and the second wall portion, and the third wall portion has a mounting surface for the housing.
14. An electromagnetic wave matching system comprising an electromagnetic wave matching device according to any one of claims 1 to 13, and an electromagnetic wave generating device for generating an electromagnetic wave beam to be incident from the first window.