Protective coating for processing chamber components

Abstract

A base ring for a substrate processing chamber includes a coating on one or more radially inward surfaces and on one or more upward-facing surfaces. A cover is disposed on the base ring. The cover experiences thermal expansion during a processing operation, and thermal contraction during a subsequent cooling period. The coating prevents contact and abrasion between the cover and the material of the base ring during the thermal expansion and contraction of the cover.

Description

PATENTAttorney Docket No.: 44025366WO01PROTECTIVE COATING FOR PROCESSING CHAMBER COMPONENTS BACKGROUNDField

[0001] Embodiments of the present disclosure generally relate to substrate processing chambers, and particularly to metallic components of substrate processing chambers.Description of the Related Art

[0002] The manufacture of semiconductor devices involves processing a substrate, such as depositing a material on the substrate, etching a material on the substrate, or annealing the substrate in a processing chamber. In an example, annealing may include a heating phase followed by a cooling phase. The heating phase can include raising a temperature of the substrate from ambient to 1000 degrees Celsius or more over a few seconds. In the cooling phase, the temperature of the substrate is reduced, such as back to the ambient temperature.

[0003] Some chamber components, such as a substrate support, are also heated to a temperature similar to the temperature of the substrate. In some cases, other chamber components are actively cooled, and so experience less of a temperature change during the heating phase. Some chamber components are made of a material different to a material of other chamber components. The different materials can have different coefficients of thermal expansion.

[0004] Two adjacent chamber components may experience differing magnitudes of thermal expansion and contraction resulting from being heated to different temperatures or from being made of different materials. Where the two adjacent chamber components are physically touching each other, the differing magnitudes of thermal expansion can cause the chamber components to rub against each other. Abrasion between the chamber components can occur during the heating phase and during the cooling phase. The abrasion of a metallic chamber component can cause metal atoms to be released from thePATENTAttorney Docket No.: 44025366WO01chamber component. The metal atoms can be carried by an anneal gas to the substrate, and can contaminate the substrate. Contamination of the substrate can be detrimental to the performance of the semiconductor devices made on the substrate.

[0005] Thus, there is a need for improved systems that mitigate the issues described above.SUMMARY

[0006] The present disclosure generally relates to substrate processing chambers, and particularly to metallic components of substrate processing chambers. In one aspect, a base ring for a substrate processing chamber includes an annular body including an iron-containing metal. The body includes a first radially inner surface extending to a first upper surface that extends radially outwardly. The body further includes a second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface. A first coating is disposed on the first radially inner surface, a second coating is disposed on the first upper surface, and a third coating is disposed on the second radially inner surface.

[0007] In another aspect, an assembly for a substrate processing chamber includes a base ring. The base ring includes an annular first body of an iron-containing metal. The first body includes a first radially inner surface extending to a first upper surface that extends radially outwardly. The first body further includes a second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface. A first coating is disposed on the first radially inner surface, a second coating is disposed on the first upper surface, and a third coating is disposed on the second radially inner surface. A cover is disposed on the base ring, and includes an annular second body. A first radially outer surface of the second body faces the first radially inner surface of the base ring. An under surface of the second body faces the first upper surface of the base ring. A second radiallyPATENTAttorney Docket No.: 44025366WO01outer surface of the second body faces the second radially inner surface of the base ring.

[0008] In another aspect, a substrate processing chamber includes a chamber body including one or more sidewalls and a floor. A base ring is disposed in the chamber body. The base ring includes an annular first body of an iron-containing metal. The first body includes a first radially inner surface extending to a first upper surface that extends radially outwardly. The first body further includes a second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface. A first coating is disposed on the first radially inner surface, a second coating is disposed on the first upper surface, and a third coating is disposed on the second radially inner surface. A cover is disposed on the base ring, and includes an annular second body. A first radially outer surface of the second body faces the first radially inner surface of the base ring. An under surface of the second body faces the first upper surface of the base ring. A second radially outer surface of the second body faces the second radially inner surface of the base ring.BRIEF DESCRIPTION OF THE DRAWINGS

[0009] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of the scope of the disclosure, as the disclosure may admit to other equally effective embodiments.

[0010] Figure 1 schematically illustrates a cross-section of a processing chamber.

[0011] Figure 2 schematically illustrates a cross-section of an embodiment of a component of the processing chamber of Figure 1.PATENTAttorney Docket No.: 44025366WO01

[0012] Figure 3 schematically illustrates a partial isometric view of another embodiment of the component depicted in Figure 2.

[0013] Figure 4 schematically illustrates a cross-section of the component depicted in Figure 3.

[0014] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. One or more elements or features of any one embodiment or example may be beneficially incorporated in any one or more other non-mutually exclusive embodiments or examples.DETAILED DESCRIPTION

[0015] The present disclosure concerns substrate processing chambers, and particularly to metallic components of substrate processing chambers. More specifically, the present disclosure provides embodiments of chamber components that are in contact with each other, and experience differing magnitudes of thermal expansion and contraction across different phases of substrate processing operations.

[0016] Figure 1 schematically illustrates a cross-section of a processing chamber 100. The processing chamber 100 is depicted as being configured to conduct an annealing operation, such as a so-called rapid thermal processing operation. Nevertheless, in some embodiments that may be combined with other embodiments, the processing chamber 100 may be configured to conduct one or more other processes, such as a deposition process or an etch process.

[0017] The processing chamber 100 includes a chamber body 102 having one or more sidewalls 104 and a floor 106. Substrates 124 enter and exit the processing chamber 100 through an access port 108 at one of the chamber sidewalls 104. The processing chamber 100 includes a lid assembly 110 coupled to the chamber body 102. The lid assembly 110 includes a source of radiant heat, such as a plurality of lamps 112 that produce infrared radiation. APATENTAttorney Docket No.: 44025366WO01window 114 separates the lamps from a processing volume 118 within the processing chamber 100.

[0018] A substrate support 130 is disposed in the processing volume 118 of the processing chamber 100. The substrate support 130 includes an edge ring 132 disposed on a support cylinder 134. The support cylinder 134 is coupled to a magnetic ring 136. The magnetic ring 136 is configured to function as a rotor to facilitate lifting and / or rotating the substrate support 130. A corresponding stator 138 is disposed around the magnetic ring 136. The stator 138 includes one or more coils configured to function as electromagnets. When energized, the one or more coils interact with the magnetic ring 136 to move the substrate support 130. In some examples that may be combined with other examples, the one or more coils interact with the magnetic ring 136 to raise or lower the substrate support 130 along the Z direction. In some examples that may be combined with other examples, the one or more coils interact with the magnetic ring 136 to center the substrate support 130 in the X-Y plane. In some examples that may be combined with other examples, the one or more coils interact with the magnetic ring 136 to rotate the substrate support 130 in the X-Y plane.

[0019] A base ring 140 is disposed above the stator 138. The base ring 140 includes an annular body 142. In some embodiments that may be combined with other embodiments, the base ring 140 is metallic. In some examples, the base ring 140 is made of a steel, such as a stainless steel. A cover 150 is disposed on the base ring 140. The cover 150 includes an annular body 152, and extends radially inwardly towards the edge ring 132. In some embodiments that may be combined with other embodiments, the cover 150 is metallic. In some examples, the cover 150 is made of a steel, such as a stainless steel. In some embodiments that may be combined with other embodiments, the cover 150 is made of a non-metallic material, such as a ceramic (e.g., an aluminum oxide or an yttrium oxide) or quartz.

[0020] A substrate 124 is shown disposed on the edge ring 132 of the substrate support 130. Beneath the substrate 124 is a reflector 126. A lift pinPATENTAttorney Docket No.: 44025366WO01assembly 170 is disposed below the substrate 124. The lift pin assembly 170 includes a plurality of lift pins 172 coupled to a shaft 174. An actuator 176 coupled to the shaft 174 raises or lowers the lift pins 172 along the Z direction when the substrate 124 is being transferred between the substrate support 130 and a handling robot (not shown).

[0021] Although the processing chamber 100 is depicted as including a source of radiant heat above the substrate 124 and the reflector 126 below the substrate 124, in some embodiments that may be combined with other embodiments, other arrangements are contemplated. In some examples that may be combined with other examples, the source of radiant heat may be disposed below the substrate 124, and the reflector 126 may be disposed above the substrate 124. In some examples that may be combined with other examples, a first source of radiant heat may be disposed above the substrate 124, and a second source of radiant heat may be disposed below the substrate 124.

[0022] An atmosphere control system 120 is fluidically coupled to the processing volume 118 via one or more ports 116 in the chamber body 102. In some embodiments that may be combined with other embodiments, the atmosphere control system 120 includes one or more gas sources configured provide one or more gases into the processing volume 118. Exemplary gases include annealing gases, purge gases, precursor gases, etch gases, or cleaning gases. In some embodiments that may be combined with other embodiments, the atmosphere control system 120 includes a vacuum system configured to adjust a pressure of the processing volume 118.

[0023] In some embodiments that may be combined with other embodiments, operation of the processing chamber 100 is controlled by a controller 180. The controller 180 includes a central processing unit (CPU), a memory containing instructions, and support circuits for the CPU. The memory, or non-transitory computer readable medium, is one or more of a readily available memory such as random access memory (RAM), read only memory (ROM), floppy disk, hard disk, flash drive, or any other form of digital storage,PATENTAttorney Docket No.: 44025366WO01local or remote. The support circuits are coupled to the CPU for supporting the CPU. The support circuits include cache, power supplies, clock circuits, input / output circuitry and subsystems, and the like. Operations and operating parameters are stored in the memory as a software routine that is executed or invoked to configure the controller 180 into a specific purpose controller to control the operations of the processing chamber 100.

[0024] In some embodiments that may be combined with other embodiments, the controller 180 is configured to control heating of the substrate 124 by the plurality of lamps 112. In some embodiments that may be combined with other embodiments, the controller 180 is configured to control the transfer of the substrate 124 between the substrate support 130 and a handling robot. In some embodiments that may be combined with other embodiments, the controller 180 is configured to control the operation of the stator 138 to move the substrate support 130. In some embodiments that may be combined with other embodiments, the controller 180 is configured to control the operation of the atmosphere control system 120. The instructions stored on the memory, when executed, cause one or more of the operations described herein to be conducted.

[0025] The controller 180 includes, or is coupled to, a transmitter / receiver that facilitates communication with other devices, such as a base station or other controllers of other processing chambers or other systems.

[0026] Figure 2 schematically illustrates a cross-section of an embodiment of the base ring 140 in which the base ring 140 is represented by base ring 200. The body 142 of the base ring 200 includes a first radially inner surface 210 that faces radially inwardly and extends upwards along the Z direction to a step 204. The step 204 includes a first upper surface 220 that faces upwards in the Z direction, and extends radially outwardly in the X-Y plane to a second radially inner surface 230. The second radially inner surface 230 faces radially inwardly and extends upwards along the Z direction from the first upper surface 220 to a second upper surface 240. The second upper surface 240 extends radiallyPATENTAttorney Docket No.: 44025366WO01outwardly in the X-Y plane to the radially outer surface (Figure 1), and faces upwards in the Z direction.

[0027] As depicted, in some embodiments that may be combined with other embodiments, a coating 242 is disposed on the second upper surface 240. In some examples that may be combined with other examples, the coating 242 extends over an entirety of the second upper surface 240. In some embodiments that may be combined with other embodiments, the coating 242 includes a ceramic material, such as an aluminum oxide or an yttrium oxide. In some examples that may be combined with other examples, the coating 242 extends over a portion of the second upper surface 240, such as 30% or more, 40% or more, 50% or more, 60% or more, 70% or more, 80% or more, or 90% or more of the second upper surface 240. However, in some embodiments that may be combined with other embodiments, the coating 242 is omitted.

[0028] As depicted, in some embodiments that may be combined with other embodiments, a coating 232 is disposed on the second radially inner surface 230. In some examples that may be combined with other examples, the coating 232 extends over an entirety of the second radially inner surface 230. In some examples that may be combined with other examples, the coating 232 extends over a portion of the second radially inner surface 230, such as 30% or more, 40% or more, 50% or more, 60% or more, 70% or more, 80% or more, or 90% or more of the second radially inner surface 230. However, in some embodiments that may be combined with other embodiments, the coating 232 is omitted.

[0029] In some embodiments that may be combined with other embodiments, the coating 232 includes a ceramic material, such as an aluminum oxide or an yttrium oxide. In some embodiments that may be combined with other embodiments, the coating 232 includes a material the same as the material of the coating 242 on the second upper surface 240. In some embodiments that may be combined with other embodiments, the coating 232 includes a material different from the material of the coating 242 on the second upper surface 240.PATENTAttorney Docket No.: 44025366WO01

[0030] In some embodiments that may be combined with other embodiments, the coating 232 contacts the coating 242 on the second upper surface 240. In some embodiments that may be combined with other embodiments, the coating 232 does not contact the coating 242 on the second upper surface 240.

[0031] As depicted, in some embodiments that may be combined with other embodiments, a coating 222 is disposed on the first upper surface 220. In some examples that may be combined with other examples, the coating 222 extends over an entirety of the first upper surface 220. In some examples that may be combined with other examples, the coating 222 extends over a portion of the first upper surface 220, such as 30% or more, 40% or more, 50% or more, 60% or more, 70% or more, 80% or more, or 90% or more of the first upper surface 220. However, in some embodiments that may be combined with other embodiments, the coating 222 is omitted.

[0032] In some embodiments that may be combined with other embodiments, the coating 222 includes a ceramic material, such as an aluminum oxide or an yttrium oxide. In some embodiments that may be combined with other embodiments, the coating 222 includes a material the same as the material of the coating 232 on the second radially inner surface 230. In some embodiments that may be combined with other embodiments, the coating 222 includes a material different from the material of the coating 232 on the second radially inner surface 230.

[0033] In some embodiments that may be combined with other embodiments, the coating 222 contacts the coating 232 on the second radially inner surface 230. In some embodiments that may be combined with other embodiments, the coating 222 does not contact the coating 232 on the second radially inner surface 230.

[0034] As depicted, in some embodiments that may be combined with other embodiments, a coating 212 is disposed on the first radially inner surface 210. In some examples that may be combined with other examples, the coating 212PATENTAttorney Docket No.: 44025366WO01extends over an entirety of the first radially inner surface 210. In some examples that may be combined with other examples, the coating 212 extends over a portion of the first radially inner surface 210, such as 30% or more, 40% or more, 50% or more, 60% or more, 70% or more, 80% or more, or 90% or more of the first radially inner surface 210. However, in some embodiments that may be combined with other embodiments, the coating 212 is omitted.

[0035] In some embodiments that may be combined with other embodiments, the coating 212 includes a ceramic material, such as an aluminum oxide or an yttrium oxide. In some embodiments that may be combined with other embodiments, the coating 212 includes a material the same as the material of the coating 222 on the first upper surface 220. In some embodiments that may be combined with other embodiments, the coating 212 includes a material different from the material of the coating 222 on the first upper surface 220.

[0036] In some embodiments that may be combined with other embodiments, the coating 212 contacts the coating 222 on the first upper surface 220. In some embodiments that may be combined with other embodiments, the coating 212 does not contact the coating 222 on the first upper surface 220.

[0037] Each coating 212, 222, 232, 242 is bonded to each corresponding surface. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 is applied to the base ring 200 by a plasma spray. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 is applied to the base ring 200 by atomic layer deposition. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 is applied to the base ring 200 by physical vapor deposition.

[0038] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has an iron content of 0.1% or less by weight, such as 0.07% or less by weight, 0.05% orPATENTAttorney Docket No.: 44025366WO01less by weight, 0.03% or less by weight, or 0.01% or less by weight. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has an iron content substantially equal to the iron content of any other one or more of the coating 212, 222, 232, or 242. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has an iron content different from the iron content of any other one or more of the coating 212, 222, 232, or 242.

[0039] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a minimum thickness of greater than or equal to 50 microns, such as greater than or equal to 100 microns, greater than or equal to 150 microns, greater than or equal to 200 microns, or greater than or equal to 250 microns. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a maximum thickness of up to 400 microns, such as up to 350 microns, up to 300 microns, up to 250 microns, or up to 200 microns.

[0040] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a thickness substantially equal to the thickness of any other one or more of the coating 212, 222, 232, or 242. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a thickness different from the thickness of any other one or more of the coating 212, 222, 232, or 242.

[0041] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 is substantially non-porous. In some examples that may be combined with other examples, any one or more of the coating 212, 222, 232, or 242 has a porosity of 0.1% or less, such as 0.05% or less, 0.01% or less, or 0%. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a porosity greater than 0.1%, such as 0.5% to 10%, 1 % to 9%, 1.5% to 8%, 2% to 7%, 2.5% to 6%, or 3% to 5%. InPATENTAttorney Docket No.: 44025366WO01some embodiments that may be combined with other embodiments, the porosity of any one or more of the coating 212, 222, 232, or 242 is predominantly an unconnected porosity, such as in the form of isolated voids.

[0042] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a porosity substantially equal to the porosity of any other one or more of the coating 212, 222, 232, or 242. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a porosity different from the porosity of any other one or more of the coating 212, 222, 232, or 242.

[0043] In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a permeability of less than 10-14m2, such as less than 10-15m2, less than 10-16m2, less than 10-17m2, or less than 10-18m2. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a permeability substantially equal to the permeability of any other one or more of the coating 212, 222, 232, or 242. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has a permeability different from the permeability of any other one or more of the coating 212, 222, 232, or 242.

[0044] Each coating 212, 222, 232, 242 has a corresponding exposed surface 214, 224, 234, 244, respectively. In some embodiments that may be combined with other embodiments, any one or more of the exposed surfaces 214, 224, 234, or 244 is polished. In some embodiments that may be combined with other embodiments, any one or more of the exposed surfaces 214, 224, 234, or 244 is unpolished. In some embodiments that may be combined with other embodiments, any one or more of the exposed surfaces 214, 224, 234, or 244 has an average surface roughness (Ra) of 0.1 to 5 microns, such as 0.5 to 4 microns, 1 to 3 microns, or 1.5 to 2 microns. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has an average surface roughness (Ra) substantially equal toPATENTAttorney Docket No.: 44025366WO01the average surface roughness (Ra) of any other one or more of the coating 212, 222, 232, or 242. In some embodiments that may be combined with other embodiments, any one or more of the coating 212, 222, 232, or 242 has an average surface roughness (Ra) different from the average surface roughness (Ra) of any other one or more of the coating 212, 222, 232, or 242.

[0045] The cover 150 is disposed on the step 204 of the base ring 200. The body 152 of the cover 150 includes a first radially outer surface 154 that extends upwards along the Z direction to a projection 160. The projection 160 includes an under surface 162 that faces downwards in the Z direction, and extends radially outwardly in the X-Y plane to a second radially outer surface 156. The second radially outer surface 156 extends upwards along the Z direction from the under surface 162.

[0046] When the cover 150 is disposed on the base ring 200, the first radially outer surface 154 faces the first radially inner surface 210 of the base ring 200. The coating 212 prevents the first radially outer surface 154 of the cover 150 from contacting the first radially inner surface 210 of the base ring 200. When the cover 150 is disposed on the base ring 200, the under surface 162 faces the first upper surface 220 of the base ring 200. The coating 222 prevents the under surface 162 of the projection 160 of the cover 150 from contacting the first upper surface 220 of the base ring 200. When the cover 150 is disposed on the base ring 200, the second radially outer surface 156 faces the second radially inner surface 230 of the base ring 200. The coating 232 prevents the second radially outer surface 156 of the cover 150 from contacting the second radially inner surface 230 of the base ring 200.

[0047] The under surface 162 of the projection 160 is disposed upon, and contacts, the coating 222 on the first upper surface 220 of the base ring 200. In some embodiments that may be combined with other embodiments, the first radially outer surface 154 of the cover 150 contacts the coating 212 on the first radially inner surface 210 of the base ring 200. In some embodiments that may be combined with other embodiments, the first radially outer surface 154 of thePATENTAttorney Docket No.: 44025366WO01cover 150 does not contact the coating 212 on the first radially inner surface 210 of the base ring 200.

[0048] In some embodiments that may be combined with other embodiments, the second radially outer surface 156 of the cover 150 contacts the coating 232 on the second radially inner surface 230 of the base ring 200. In some embodiments that may be combined with other embodiments, the second radially outer surface 156 of the cover 150 does not contact the coating 232 on the second radially inner surface 230 of the base ring 200.

[0049] As illustrated, in some embodiments that may be combined with other embodiments, the base ring 200 includes one or more conduits 252, 254, 256 through the body 142. The one or more conduits 252, 254, 256 convey a coolant, such as water or a water-glycol mixture. In some examples that may be combined with other examples, a first conduit 252 extends through the body 142 below, and parallel to, the second upper surface 240. The first conduit 252 may be 10 cm or less (such as 7 cm or less or 5 cm or less) below the second upper surface 240. In some examples that may be combined with other examples, a second conduit 254 extends through the body 142 beside, and parallel to, the second radially inner surface 230. The second conduit 254 may be 10 cm or less (such as 7 cm or less or 5 cm or less) below the second radially inner surface 230. In some examples that may be combined with other examples, a third conduit 256 extends through the body 142 below, and parallel to, the first upper surface 220. The third conduit 256 may be 10 cm or less (such as 7 cm or less or 5 cm or less) below the first upper surface 220. In some embodiments that may be combined with other embodiments, at least one of the first conduit 252, second conduit 254, or third conduit 256 may be omitted.

[0050] Figure 3 schematically illustrates a partial isometric view of an embodiment of the base ring 140. The base ring 140 is represented by base ring 200A, which is a version of base ring 200. The base ring 200A includes the coating 212 on the first radially inner surface 210, however the coating 212PATENTAttorney Docket No.: 44025366WO01does not cover 150 the entire first radially inner surface 210, leaving one or more portions of the first radially inner surface 210 exposed.

[0051] As illustrated, in some embodiments that may be combined with other embodiments, the coating 212 does not extend across an entirety of the first radially inner surface 210 in the X-Y plane. In some embodiments that may be combined with other embodiments, the coating 212 does extend across an entirety of the first radially inner surface 210 in the X-Y plane. As illustrated, in some embodiments that may be combined with other embodiments, the coating 212 does not extend across an entirety of the first radially inner surface 210 in the Z direction. In some embodiments that may be combined with other embodiments, the coating 212 does extend across an entirety of the first radially inner surface 210 in the Z direction.

[0052] As illustrated, in some embodiments that may be combined with other embodiments, the coating 212 is present as a discrete patch 216 on the first radially inner surface 210. In some embodiments that may be combined with other embodiments, the coating 212 is present as multiple discrete patches 216 on the first radially inner surface 210.

[0053] The base ring 200A includes the coating 222 on the first upper surface 220, however the coating 222 does not cover the entire first upper surface 220, leaving one or more portions of the first upper surface 220 exposed. As illustrated, in some embodiments that may be combined with other embodiments, the coating 222 does not extend across an entirety of the first upper surface 220 circumferentially in the X-Y plane. In some embodiments that may be combined with other embodiments, the coating 222 does extend across an entirety of the first upper surface 220 circumferentially in the X-Y plane.

[0054] As illustrated, in some embodiments that may be combined with other embodiments, the coating 222 does not extend across an entirety of the first upper surface 220 between the first radially inner surface 210 and the second radially inner surface 230. In some embodiments that may be combined withPATENTAttorney Docket No.: 44025366WO01other embodiments, the coating 222 does extend across an entirety of the first upper surface 220 between the first radially inner surface 210 and the second radially inner surface 230.

[0055] As illustrated, in some embodiments that may be combined with other embodiments, the coating 222 is present as a discrete patch 226 on the first upper surface 220. In some embodiments that may be combined with other embodiments, the coating 222 is present as multiple discrete patches 226 on the first upper surface 220.

[0056] The base ring 200A includes the coating 232 on the second radially inner surface 230, however the coating 232 does not cover 150 the entire second radially inner surface 230, leaving one or more portions of the second radially inner surface 230 exposed. As illustrated, in some embodiments that may be combined with other embodiments, the coating 232 does not extend across an entirety of the second radially inner surface 230 in the X-Y plane. In some embodiments that may be combined with other embodiments, the coating 232 does extend across an entirety of the second radially inner surface 230 in the X-Y plane. As illustrated, in some embodiments that may be combined with other embodiments, the coating 232 does not extend across an entirety of the second radially inner surface 230 in the Z direction. In some embodiments that may be combined with other embodiments, the coating 232 does extend across an entirety of the second radially inner surface 230 in the Z direction.

[0057] As illustrated, in some embodiments that may be combined with other embodiments, the coating 232 is present as a discrete patch 236 on the second radially inner surface 230. In some embodiments that may be combined with other embodiments, the coating 232 is present as multiple discrete patches 236 on the second radially inner surface 230.

[0058] As illustrated, in some embodiments that may be combined with other embodiments, the base ring 200A does not include the coating 242 on the second upper surface 240. However, in some embodiments that may be combined with other embodiments, the base ring 200A does include the coatingPATENTAttorney Docket No.: 44025366WO01242 on the second upper surface 240. In some examples that may be combined with other examples, the coating 242 covers the entire second upper surface 240. In some examples that may be combined with other examples, the coating 242 does not cover the entire second upper surface 240. In some of such examples, the coating 242 is present as one or more discrete patches on the second upper surface 240, such as described above with respect to the coating 222 on the first upper surface 220.

[0059] As illustrated, in some embodiments that may be combined with other embodiments, the base ring 200A includes one or more of the conduits 252, 254, 256 through the body 142, such as described above with respect to the base ring 200.

[0060] Figure 4 schematically illustrates a cross-section of the base ring 200A with the cover 150 in place thereon. The coating 212 prevents the first radially outer surface 154 of the cover 150 from contacting the first radially inner surface 210 of the base ring 200A. Where the coating 212 is absent, the first radially outer surface 154 of the cover 150 is separated from the first radially inner surface 210 by a void 218.

[0061] The coating 222 prevents the under surface 162 of the projection 160 of the cover 150 from contacting the first upper surface 220 of the base ring 200A. Where the coating 222 is absent, the under surface 162 is separated from the first upper surface 220 by a void 228. The coating 232 prevents the second radially outer surface 156 of the cover 150 from contacting the second radially inner surface 230 of the base ring 200A. Where the coating 232 is absent, the second radially outer surface 156 of the cover 150 is separated from the second radially inner surface 230 by a void 238.

[0062] During operation of the processing chamber 100, the processing volume 118 (Figure 1) is provided with an atmosphere of nitrogen gas, and is heated by the plurality of lamps 112 (Figure 1 ). In some embodiments that may be combined with other embodiments, the temperature in the processing volume 118 is raised from an ambient temperature (such as room temperature)PATENTAttorney Docket No.: 44025366WO01up to a processing temperature of 1000 degrees Celsius or higher, such as up to 1050 degrees Celsius, 1100 degrees Celsius, 1150 degrees Celsius, 1200 degrees Celsius, 1250 degrees Celsius, 1300 degrees Celsius, 1350 degrees Celsius, 1400 degrees Celsius, 1450 degrees Celsius, or 1500 degrees Celsius.

[0063] In embodiments in which the base ring 140, 200, 200A includes one or more of the conduits 252, 254, or 256, a coolant is flowed through one or more of the conduits 252, 254, or 256. A temperature rise at one or more of the first radially inner surface 210, the first upper surface 220, the second radially inner surface 230, or the second upper surface 240 of the base ring 140, 200, 200A may be limited by the cooling provided by the coolant. The base ring 140, 200, 200A experiences negligible thermal expansion at one or more of the first radially inner surface 210, the first upper surface 220, the second radially inner surface 230, or the second upper surface 240.

[0064] The heating provided by the heat lamps 112 increases a temperature of the cover 150 to approximately the processing temperature (depending upon the length of time the heating is applied and the thermal conductivity of the cover 150 material). The cover 150 experiences thermal expansion resulting from the increase in temperature. The temperature of the cover 150 decreases with the deactivation of the heating lamps 112 and subsequent cooling of the processing volume 118. The cover 150 experiences thermal contraction resulting from the decrease in temperature.

[0065] Without being bound by theory, it is contemplated that in the absence of the coating 212, the coating 222, or the coating 232, the thermal expansion and contraction of the cover 150 leads to contamination by iron of the substrate 124 (Figure 1 ) and of devices being manufactured thereon. Thermal expansion and contraction of the cover 150 causes abrasion at contact points between the cover 150 and the base ring 140, 200, 200A. In the absence of the coating 212, the coating 222, or the coating 232, the cover 150 can directly contact iron-containing metal material of the base ring 140, 200, 200A. The abrasion can release iron from the metal material into the nitrogen atmosphere of thePATENTAttorney Docket No.: 44025366WO01processing volume 118. Iron in the nitrogen atmosphere becomes deposited on the substrate 124 and the devices being manufactured thereon. Such iron contamination can result in ineffective or inefficient operation of the electronic devices being manufactured on the substrate 124.

[0066] One or more of the coating 212, the coating 222, or the coating 232 hinder direct contact between the cover 150 and, respectively, the first radially inner surface 210, the first upper surface 220, or the second radially inner surface 230 of the base ring 140, 200, 200A. Without such direct contact, the cover 150 does not abrade against the metal material of the base ring 140, 200, 200A, and the release of iron from the metal material into the nitrogen atmosphere is deterred.

[0067] Without being bound by theory, it is contemplated that interaction between the nitrogen atmosphere at the processing temperature and iron-containing metal material of the base ring 140, 200, 200A can lead to contamination by iron of the substrate 124 and of devices being manufactured thereon. The theory involves contact of the metal material of the base ring 140, 200, 200A with the nitrogen at the processing temperature causing release of iron from the metal material into the nitrogen atmosphere of the processing volume 118. Iron in the nitrogen atmosphere becomes deposited on the substrate 124 and the devices being manufactured thereon.

[0068] One or more of the coating 212, the coating 222, the coating 232, or the coating 242 hinder migration of the nitrogen towards, respectively, the first radially inner surface 210, the first upper surface 220, the second radially inner surface 230, or the second upper surface 240 of the base ring 140, 200, 200A. The properties of each coating 212, 222, 232, or 242 (such as the thickness, porosity, or permeability, described above) facilitate the hindrance of contact of the metal material of the base ring 140, 200, 200A by the nitrogen, and the hindrance of migration of liberated iron from the base ring 140, 200, 200A through each coating212, 222, 232, or 242. The release of iron from the metal material into the nitrogen atmosphere is deterred.PATENTAttorney Docket No.: 44025366WO01

[0069] In some examples that may be combined with other examples, the absence of one or more of the coating 212, the coating 222, the coating 232, or the coating 242 can lead to an iron contamination level of more than 5 x 1O10atoms / cm2on the substrate 124 and the devices being manufactured thereon. In some examples that may be combined with other examples, the presence of one or more of the coating 212, the coating 222, the coating 232, or the coating 242 can lead to an iron contamination level of less than 5 x 108atoms / cm2on the substrate 124 and the devices being manufactured thereon.

[0070] It is contemplated that any one or more elements or features of any one disclosed embodiment or example may be beneficially incorporated in any one or more other non-mutually exclusive embodiments or examples. While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

PATENTAttorney Docket No.: 44025366WO01What is claimed is:

1. A base ring for a substrate processing chamber, comprising:an annular body comprising an iron-containing metal, the body including: a first radially inner surface extending to a first upper surface that extends radially outwardly; anda second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface;a first coating disposed on the first radially inner surface;a second coating disposed on the first upper surface; anda third coating disposed on the second radially inner surface.

2. The base ring of claim 1 , wherein each of the first, second, and third coatings comprise a same ceramic material.

3. The base ring of claim 1 , wherein two of the first, second, and third coatings comprise a first ceramic material, and one other of the first, second, and third coatings comprises a second ceramic material different from the first ceramic material.

4. The base ring of claim 1 , wherein the second coating contacts one or more of the first coating or the third coating.

5. The base ring of claim 1, wherein one or more of the first, second, or third coatings is in the form of a discrete patch.

6. The base ring of claim 1, wherein one or more of the first, second, or third coatings is in the form of a plurality of discrete patches.

7. The base ring of claim 1 , wherein a thickness of one or more of the first, second, or third coatings is from 50 microns to 400 microns.PATENTAttorney Docket No.: 44025366WO018. The base ring of claim 1 , wherein a thickness of one of the first, second, and third coatings equals a thickness of another of the first, second, and third coatings.

9. The base ring of claim 1 , wherein one of the first, second, and third coatings has a first thickness, and another of the first, second, and third coatings has a second thickness different from the first thickness.

10. The base ring of claim 1, further comprising a fourth coating disposed on the second upper surface.

11. An assembly for a substrate processing chamber, comprising:a base ring comprising:an annular first body comprising an iron-containing metal, the first body including:a first radially inner surface extending to a first upper surface that extends radially outwardly; anda second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface;a first coating disposed on the first radially inner surface;a second coating disposed on the first upper surface; and a third coating disposed on the second radially inner surface; and a cover disposed on the base ring, the cover comprising:an annular second body including:a first radially outer surface facing the first radially inner surface of the base ring;an under surface facing the first upper surface of the base ring; anda second radially outer surface facing the second radially inner surface of the base ring.PATENTAttorney Docket No.: 44025366WO0112. The assembly of claim 11 , wherein each of the first, second, and third coatings comprise a same ceramic material.

13. The assembly of claim 11, wherein the cover comprises one of a ceramic material or quartz.

14. The assembly of claim 11, wherein the second coating contacts one or more of the first coating or the third coating.

15. The assembly of claim 11, wherein one or more of the first, second, or third coatings is in the form of a discrete patch.

16. The assembly of claim 11, wherein one or more of the first, second, or third coatings is in the form of a plurality of discrete patches.

17. The assembly of claim 11, wherein a thickness of one or more of the first, second, or third coatings is from 50 microns to 400 microns.

18. The assembly of claim 11 , wherein a thickness of one of the first, second, and third coatings equals a thickness of another of the first, second, and third coatings.

19. The assembly of claim 11 , wherein one of the first, second, and third coatings has a first thickness, and another of the first, second, and third coatings has a second thickness different from the first thickness.

20. A substrate processing chamber comprising:a chamber body including one or more sidewalls and a floor;a base ring disposed in the chamber body, the base ring comprising:an annular first body comprising an iron-containing metal, the first body including:a first radially inner surface extending to a first upper surface that extends radially outwardly; andPATENTAttorney Docket No.: 44025366WO01a second radially inner surface extending from the first upper surface to a second upper surface that extends radially outwardly to a radially outer surface;a first coating disposed on the first radially inner surface;a second coating disposed on the first upper surface; and a third coating disposed on the second radially inner surface; and a cover disposed on the base ring, the cover comprising:an annular second body including:a first radially outer surface facing the first radially inner surface of the base ring;an under surface facing the first upper surface of the base ring; anda second radially outer surface facing the second radially inner surface of the base ring.

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