Ultra-fast rotary ultrasonic micro-machining systems
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2026-02-06
- Publication Date
- 2026-08-13
Smart Images
Figure US2026014347_13082026_PF_FP_ABST
Abstract
Description
Attorney Docket No. TTU-1087PCTPATENT APPLICATION ULTRA-FAST ROTARY ULTRASONIC MICRO-MACHINING SYSTEMSSTATEMENT OF GOVERNMENT RIGHTS
[0001] The invention described in this patent application was made with Government support under grant # 2102181 awarded by the National Science Foundation. The Government has certain rights in the invention.CROSS-REFERENCE TO RELATED PATENT APPLICATIONS
[0002] This patent application claims the priority and benefit under 35 U.S.C. §119(e) of U.S. Provisional Patent Application Serial No. 63 / 755,940 filed February 7, 2025, entitled “ULTRA-FAST ROTARY ULTRASONIC MICRO-MACHINING SYSTEM”. U.S. Provisional Patent Application Serial Number 63 / 755,940 is herein incorporated by reference in its entirety.
[0003] This patent application claims the priority and benefit under 35 U.S.C. §119(e) of U.S. Provisional Patent Application Serial No. 63 / 976,486 filed February 5, 2026, entitled “ULTRA-FAST ROTARY ULTRASONIC MICRO-MACHINING SYSTEM”. U.S. Provisional Patent Application Serial Number 63 / 976,486 is herein incorporated by reference in its entirety.TECHNICAL FIELD
[0004] Embodiments are generally related to the field of fabrication. Embodiments are further related to machining. Embodiments are further related to micro-machining. Embodiments are further related to machining of semiconductor materials, ceramics and other hard and brittle substrate materials, . Embodiments are also related to rotary ultrasonic machining systems. Embodiments are also related to ultra-fast rotary ultrasonic micromachining.Attorney Docket No. TTU-1087PCTPATENT APPLICATION BACKGROUND
[0005] Semiconductor materials, ceramics, and other hard and brittle substrate materials are widely used in numerous industries because of their excellent and versatile electronic, thermal, mechanical, and chemical properties. The manufacturing process of these materials, and subsequent machining, is challenging because of their high hardness value and brittleness.
[0006] Abrasive micro-cutting, laser micro-drilling, chemical micro-machining, and electrical discharge machining are examples of some common micro-machining processes involved in the semiconductor and ceramics industry. These processes have drawbacks. For example, some of these techniques generate high cutting force and may result in quality issues, such as edge chipping and micro-cracking. Others generate thermal and chemical stress, as well as waste. Likewise, slow processing speed, poor machinability, and other such limitations make the processes inefficient and expensive.
[0007] In some cases, high-frequency vibration can be used for machining of certain materials, such as ceramics, glass, and semiconductor materials. However, micro-tools for this type of process show very poor performance (breakage and tool wear) during certain micro-machining operations for several reasons.
[0008] First, the micro-tools are very small and thin compared to regular cutting tools, so the peripheral linear speeds of the micro-tools are not high enough to remove the materials effectively during the micro-machining operations. In addition, micro-tools show large runout issues during micro-drilling operations.
[0009] Microfeature fabrication techniques such as micro-drilling, micro-grooving, and micro-texturing of brittle materials has been used in a variety of applications, such as the micro-drilling of silicon wafers / panels for use in pressure and flow sensors and solar panels, micro-drilling in dentistry and orthopedic surgeries, micro-machining of high-temperature ceramic fuel nozzles for aerospace engines, and micro-featuring of optical components like lenses and fibers. The brittleness of these materials makes them difficult to be machined using conventional mechanical processes, which can cause chipping and fracture. ThermalAttorney Docket No. TTU-1087PCTPATENT APPLICATIONand chemical non-traditional machining (NTM) processes have also been applied for micromachining operations. However, these thermal and chemical NTM processes can cause unwanted material oxidation and heat-affected zones. These options also have poor machining efficiency and require chemical use.
[0010] As such, there is a need in the art for high efficiency, cost effective, and high quality micro-fabrication machines for hard and / or brittle materials using ultra-fast rotary ultrasonic micro-machining systems, as detailed herein, that address aforementioned limitations in the current art.Attorney Docket No. TTU-1087PCTPATENT APPLICATION SUMMARY
[0011] The following summary is provided to facilitate an understanding of some of the innovative features unique to the embodiments disclosed and is not intended to be a full description. A full appreciation of the various aspects of the embodiments can be gained by taking the entire specification, claims, drawings, and abstract as a whole.
[0012] It is, therefore, one aspect of the disclosed embodiments to provide systems for fabrication.
[0013] It is another aspect of the disclosed embodiments to provide machining systems.
[0014] It is another aspect of the disclosed embodiments to provide micro-machining systems.
[0015] It is another aspect of the disclosed embodiments to provide micro-machining systems for micro drilling, grinding, face milling, end milling, and dicing.
[0016] It is another aspect of the disclosed embodiments to provide ultra-fast rotary ultrasonic micro-machining systems for use with hard and / or brittle materials including, but not limited to, silicon, sapphire, silicon carbide, ceramics, and ceramic composites.
[0017] It will be appreciated that the methods and systems can be achieved according to the embodiments disclosed herein. For example, in an embodiment, an ultra-fast rotary ultrasonic micro-machining system comprises a spindle configured to engage an operating tool, an ultrasonic vibrator configured to operably engage a workpiece, and an x-y linear stage operably engaged to the ultrasonic vibrator. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a dynamometer configured between the ultrasonic vibrator and the x-y linear stage. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an ultrasonic generator configured to drive the ultrasonic vibrator. In an embodiment, the ultra-fast rotary ultrasonic micromachining system further comprises a damper inserted between the ultrasonic vibrator and a fixture plate. In an embodiment, the spindle comprises a high speed spindle. In anAttorney Docket No. TTU-1087PCTPATENT APPLICATIONembodiment, the high speed spindle is configured to rotate at up to 60,000 rpm. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a vertical linear stage operably connected to the spindle. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an amplifier configured to amplify a signal from the dynamometer, and an analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal. In an embodiment, the operating tool comprises a cutting tool. In an embodiment, the operating tool comprises at least one of a drill bit, a dicing disc, a diamond burr, and a scribing tool. In an embodiment, the ultrasonic vibrator is configured to vibrate at a rate of greater than 20kHz.
[0018] In an embodiment, an ultra-fast rotary ultrasonic micro-machining system comprises a spindle configured to engage a drilling tool, an ultrasonic vibrator configured to operably engage a workpiece, and a vertical linear stage operably engaged to the spindle. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a dynamometer configured between the ultrasonic vibrator and an x-y linear stage. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an ultrasonic generator configured to drive the ultrasonic vibrator. In an embodiment, the ultrafast rotary ultrasonic micro-machining system further comprises a damper inserted between the ultrasonic vibrator and a fixture plate. In an embodiment, the spindle is configured to rotate between 1,000 rpm and 60,000 rpm. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an amplifier configured to amplify a signal from the dynamometer, and an analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal. In an embodiment, the drilling tool comprises at least one of a drill bit and a scribing tool. In an embodiment, the ultrasonic vibrator is configured to vibrate at a rate of greater than 20kHz.
[0019] In an embodiment, a micro-machining system comprises a spindle configured to engage an operating tool, an ultrasonic vibrator configured to operably engage a workpiece, an x-y linear stage operably engaged to the ultrasonic vibrator, and a vertical linear stage operably connected to the spindle. In an embodiment, the operating tool comprises at least one of: a drill bit, a dicing disc, a diamond burr, and a scribing tool.Attorney Docket No. TTU-1087PCTPATENT APPLICATION BRIEF DESCRIPTION OF THE FIGURES
[0020] The accompanying figures, like reference numerals refer to identical or functionally similar elements throughout the separate views, and are incorporated in, and form a part of the specification, further illustrate the embodiments and, together with the detailed description, serve to explain the embodiments disclosed herein.
[0021] FIG. 1A depicts a diagram of an ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro drilling, in accordance with the disclosed embodiments;
[0022] FIG. 1 B depicts a diagram of the operating mechanism associated with an ultra-fast rotary ultrasonic micro-machining system for micro drilling, in accordance with the disclosed embodiments;
[0023] FIG. 2A depicts a diagram of an ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro-grooving or wafer dicing, in accordance with the disclosed embodiments;
[0024] FIG. 2B depicts a diagram of a feeding mechanism associated with an ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro-grooving or wafer dicing, in accordance with the disclosed embodiments;
[0025] FIG. 2C depicts a diagram of another ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro-grooving or wafer dicing for different vibration directions, in accordance with the disclosed embodiments;
[0026] FIG. 3A depicts aspects of an ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro-drilling, in accordance with the disclosed embodiments;
[0027] FIG. 3B depicts a diagram of an ultra-fast rotary ultrasonic micro-machining (URUpM) system for micro-drilling with detailed components, in accordance with the disclosed embodiments;Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0028] FIG. 4A depicts aspects of an ultra-fast rotary ultrasonic micro-machining system for micro-grooving, in accordance with the disclosed embodiments;
[0029] FIG. 4B depicts a diagram of an ultra-fast rotary ultrasonic micro-machining system for micro-drilling with different subsystems, in accordance with the disclosed embodiments;
[0030] FIG. 5A depicts a comparative chart of cutting force as a function of rotational speed of a diamond drill, in accordance with the disclosed embodiments;
[0031] FIG. 5B depicts a comparative chart of cutting force as a function of rotational speed of a twist drill, in accordance with the disclosed embodiments;
[0032] FIG. 6A depicts comparative images of holes created with a diamond drill, in accordance with the disclosed embodiments;
[0033] FIG. 6B depicts comparative images of holes created with a twist drill, in accordance with the disclosed embodiments;
[0034] FIG. 7 depicts a block diagram of a computer system which is implemented in accordance with the disclosed embodiments;
[0035] FIG. 8 depicts a graphical representation of a network of data-processing devices in which aspects of the present embodiments may be implemented; and
[0036] FIG. 9 illustrates a computer software system for directing the operation of the data-processing system depicted in FIG. 7, in accordance with the disclosed embodiments.Attorney Docket No. TTU-1087PCTPATENT APPLICATION DETAILED DESCRIPTION
[0037] Embodiments and aspects of the disclosed technology are presented herein. The particular embodiments and configurations discussed in the following non-limiting examples can be varied, and are provided to illustrate one or more embodiments, and are not intended to limit the scope thereof.
[0038] Reference to the accompanying drawings, in which illustrative embodiments are shown are provided herein. The embodiments disclosed can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the embodiments to those skilled in the art. Like numbers refer to like elements throughout.
[0039] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.
[0040] Throughout the specification and claims, terms may have nuanced meanings suggested or implied in context beyond an explicitly stated meaning. Likewise, the phrase “in one embodiment” as used herein does not necessarily refer to the same embodiment and the phrase “in another embodiment” as used herein does not necessarily refer to a different embodiment. It is intended, for example, that claimed subject matter include combinations of example embodiments in whole or in part.
[0041] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art. ItAttorney Docket No. TTU-1087PCTPATENT APPLICATIONwill be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
[0042] It is contemplated that any embodiment discussed in this specification can be implemented with respect to any method, kit, reagent, or composition of the invention, and vice versa. Furthermore, compositions of the invention can be used to achieve methods of the invention.
[0043] It will be understood that particular embodiments described herein are shown by way of illustration and not as limitations of the invention. The principal features of this invention can be employed in various embodiments without departing from the scope of the invention. Those skilled in the art will recognize, or be able to ascertain using no more than routine experimentation, numerous equivalents to the specific procedures described herein. Such equivalents are considered to be within the scope of this invention and are covered by the claims.
[0044] The use of the word “a” or “an” when used in conjunction with the term “comprising” in the claims and / or the specification may mean “one,” but it is also consistent with the meaning of “one or more,” “at least one,” and “one or more than one.” The use of the term “or” in the claims is used to mean “and / or” unless explicitly indicated to refer to alternatives only or the alternatives are mutually exclusive, although the disclosure supports a definition that refers to only alternatives and “and / or.” Throughout this application, the term “about” is used to indicate that a value includes the inherent variation of error for the device, the method being employed to determine the value, or the variation that exists among the study subjects.
[0045] As used in this specification and claim(s), the words “comprising” (and any form of comprising, such as “comprise” and “comprises”), “having” (and any form of having, such as “have” and “has”), “including” (and any form of including, such as “includes” and “include”) or “containing” (and any form of containing, such as “contains” and “contain”) are inclusive or open-ended and do not exclude additional, unrecited elements or method steps.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0046] The term “or combinations thereof” as used herein refers to all permutations and combinations of the listed items preceding the term. For example, “A, B, C, or combinations thereof” is intended to include at least one of: A, B, C, AB, AC, BC, or ABC, and if order is important in a particular context, also BA, CA, CB, CBA, BCA, ACB, BAC, or CAB. Continuing with this example, expressly included are combinations that contain repeats of one or more item or term, such as BB, AAA, AB, BBC, AAABCCCC, CBBAAA, CABABB, and so forth. The skilled artisan will understand that typically there is no limit on the number of items or terms in any combination, unless otherwise apparent from the context.
[0047] All of the compositions and / or methods disclosed and claimed herein can be made and executed without undue experimentation in light of the present disclosure. While the compositions and methods of this invention have been described in terms of preferred embodiments, it will be apparent to those of skill in the art that variations may be applied to the compositions and / or methods and in the steps or in the sequence of steps of the method described herein without departing from the concept, spirit, and scope of the invention. All such similar substitutes and modifications apparent to those skilled in the art are deemed to be within the spirit, scope and concept of the invention as defined by the appended claims.
[0048] The embodiments disclosed herein are directed to an ultra-fast rotary ultrasonic micro-machining (URUpM) system. The system can comprise an ultra-fast rotary machining arrangement comprising a high-speed spindle which can operate between 1,000 rpm and 60,000 rpm, an ultrasonic vibrator which can generate vibration at a frequency greater than 20 kHz, a micro-machining cutting tool capable of machining works in the micrometer range, and one or more linear stages, having resolution of 0.8 pm.
[0049] The URUpM systems disclosed herein are capable of different types of machining operations including micro-drilling, micro-grooving, grinding, dicing, scribing, face milling, end milling, etc. FIG. 1A illustrates an exemplary embodiment of a system 100 for micro-drilling operations. The ultra-fast speed of the spindle offers significant advantages as compared to standard micro-drilling systems.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0050] FIG. 1A illustrates an ultra-fast rotary ultrasonic micro-machining (URU|1M) system 100 for micro drilling. In this embodiment, the system 100 is configured for micro drilling, but it should be appreciated that in other embodiments, the system can be used for other micro machining operations by changing the operating tool 106.
[0051] The system 100 can comprise an ultrasonic vibrator 102 upon which, the workpiece 104 can be mounted. In certain embodiments, the workpiece 104 can be bonded to the ultrasonic vibrator 102 with adhesive 126, or via other such means.
[0052] The system 100 further includes an operating tool 106 which can be used to impart the desired machining to the workpiece 104. In FIG. 1 A, the operating tool 106 is illustrated as a drilling tool, with rotary motion of the operating tool 106 provided by a machine spindle 108. The machine spindle 108 is also configured to provide vertical motion of the operating tool 106 during operation, in some cases via attachment to a vertical linear stage, as illustrated by arrow 110. The operating tool 106 can comprise a micro-tool in the nature of a drill bit. It should be appreciated that, in other embodiments, the operating tool 106 can be another type of micro-tool.
[0053] The ultrasonic vibrator 102 can be operatively connected to a power supply 112. The ultrasonic vibrator 102 is configured to vibrate at greater than 20 kHz to impart vibrational motion as illustrated by arrows 118. The frequency of vibration, as well as the type of vibrator, may be selected according to the application. Some micro-machining operations may require higher frequency, others may require lower frequency to achieve the desired low force micromachining.
[0054] A damper 114 can be installed between the ultrasonic vibrator 102 and fixture plate 116. The damper 114 can comprise a thin rubber pad, selected to allow the pad to be tightly engage between the ultrasonic vibrator 102 and fixture plate 116. Screws 120, or other such attachment means can be used to secure the damper 114 to the ultrasonic vibrator 102 and secure ultrasonic vibrator 102 to fixture plate 116.
[0055] The fixture plate 116 can be attached to a dynamometer 122, which can be mounted to a machine table 124, or other such work surface. The dynamometer 122 is usedAttorney Docket No. TTU-1087PCTPATENT APPLICATIONto measure forces dynamically in three directions, and torque in the vertical direction.
[0056] The dynamometer 122, ultrasonic vibrator 102, and the workpiece 104 are supported by the machine table 124. The machine table 124 can include an x-y linear stage so that it can be moved in the horizontal direction at controlled speeds.
[0057] FIG. 1 B is a diagram illustrating the operating tool 106 operating on the workpiece 104 using the disclosed system 100. As illustrated, the rotating operating tool 106 can be lowered into position to create a hole 154 in the workpiece 104. During operation, cutting chip(s) 152 may be generated. The machine table 124 can include a groove 156 positioned below the workpiece 104 so that when the operating tool 106 penetrates the workpiece 104 it does not impact the machine table 124. Varying feeding speeds can be used according to the machining application.
[0058] FIG. 2A illustrates an ultra-fast rotary ultrasonic micro-machining (URUpM) system 200 for micro grooving or wafer dicing. The system 200 can comprise an ultrasonic vibrator 202 upon which the workpiece 204 can be mounted. In certain embodiments, the workpiece 204 can be bonded to the ultrasonic vibrator 202 with adhesive 226, or via other such means.
[0059] The system 200 further includes an operating tool 206 which can be used to impart the desired machining on the workpiece 204. In FIG. 2A, the operating tool 206 is illustrated as a cutting tool, with rotary motion of the cutting tool provided by a spindle 208. The spindle 208 is also configured to provide vertical motion of the operating tool 206 during operation, in some cases, via attachment to a vertical linear stage, as illustrated by arrow 210.
[0060] The operating tool 206 can comprise a micro-tool in the nature of an abrasive wheel. For example, the abrasive wheel can comprise a diamond cutting wheel with diamond grit. It should be appreciated that, in other embodiments, the operating tool 206 can be another type of micro-tool.
[0061] The ultrasonic vibrator 202 can be operatively connected to a power supply 212. The ultrasonic vibrator 202 is configured to vibrate at greater than 20 kHz to impart vibrational motion as illustrated by arrows 218. In this embodiment, the ultrasonic vibrator can compriseAttorney Docket No. TTU-1087PCTPATENT APPLICATIONa vertical ultrasonic vibrator. The frequency of vibration, as well as the type of vibrator, may be selected according to the application. Some micro-machining operations may require higher frequency, others may require lower frequency to achieve the desired low force micromachining.
[0062] A damper 214 can be installed between the ultrasonic vibrator 202 and fixture plate 216. The damper 214 can comprise a thin rubber pad, selected to allow the pad to be tightly engage between the ultrasonic vibrator 202 and fixture plate 216. Screws 220, or other such attachment means can be used to secure the damper 214 to the ultrasonic vibrator 202 and secure ultrasonic vibrator 202 to fixture plate 216.
[0063] The fixture plate 216 can be attached to a dynamometer 222, which can be mounted to a machine table 224, or other such work surface. The dynamometer 222 is used to measure forces dynamically in three directions, and torque in the vertical direction.
[0064] The dynamometer 222, ultrasonic vibrator 202, and the workpiece 204 are supported by the machine table 224. The machine table 224 can include an x-y linear stage so that it can be moved in the horizontal direction at controlled speeds.
[0065] FIG. 2B is a diagram illustrating the operating tool 206 trajectory on the workpiece 204 using the disclosed system 200. The operating tool 206 can include abrasive particles 256. As illustrated, the rotating operating tool 206 can be lowered into position to create an indentation 252 in the workpiece 204. The machine table 224 and / or the workpiece 204 can be moved horizontally using the x-y linear stage, to create, for example, precision microgrooves 254. The feeding force is illustrated by arrow 258, and the cutting force is illustrated by arrow 260. Varying feeding speeds can be used according to the machining application. Material removal is accomplished both with the grinding as well as the ultrasonic vibration.
[0066] FIG. 2C illustrates an ultra-fast rotary ultrasonic micro-machining (URUpM) system 250. The system 250 can comprise an ultrasonic vibrator 260 upon which the workpiece 204 can be mounted. In certain embodiments, the workpiece 204 can be bonded to the ultrasonic vibrator 260 with adhesive 226, or via other such means.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0067] The system 250 further includes an operating tool 206 which can be used to impart the desired machining on the workpiece 204. In FIG. 2C, the operating tool 206 is illustrated as a cutting tool, with rotary motion of the cutting tool provided by a spindle 208. The spindle 208 is also configured to provide vertical motion of the operating tool 206 during operation, in some cases via attachment to a vertical linear stage, as illustrated by arrow 210.
[0068] The operating tool 206 can comprise a micro-tool in the nature of an abrasive wheel. For example, the abrasive wheel can comprise a diamond cutting wheel with diamond grit. It should be appreciated that, in other embodiments, the operating tool 206 can be another type of micro-tool.
[0069] The ultrasonic vibrator 260 can be operatively connected to a power supply 212. The ultrasonic vibrator 260 is configured to vibrate at greater than 20 kHz to impart horizontal vibrational motion as illustrated by arrows 262. In this embodiment, the ultrasonic vibrator comprises a horizontal ultrasonic vibrator. The frequency of vibration, as well as the type of vibrator, may be selected according to the application. Some micro-machining operations may require higher frequency, others may require lower frequency to achieve the desired low force micro- machining.
[0070] Horizontal ultrasonic vibration provided by the ultrasonic vibrator 260 yields lower surface roughness values. In addition, lateral sinusoidal motion introduced by horizontal vibration assists in stabilizing the cutting process along the feed direction. This lateral modulation of the tool path helps distribute cutting forces more evenly and suppresses the onset of micro-cracks. The improved material removal and reduced plowing effect contribute to a more consistent and refined surface finish. Horizontal ultrasonic-assisted machining consistently provides improved smoothness due to the lateral modulation aiding in uniform material removal. Likewise, horizontal ultrasonic vibration provided by ultrasonic vibrator 260 reduces horizontal feeding forces.
[0071] A damper 214 can be installed between the ultrasonic vibrator 260 and fixture plate 216. The damper 214 can comprise a thin rubber pad, selected to allow the pad to be tightly engaged between the ultrasonic vibrator 260 and fixture plate 216. Screw 220, or other such attachment means can be used to secure the damper 214 to the ultrasonic vibrator 260.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0072] The fixture plate 216 can be attached to a dynamometer 222, which can be mounted to a machine table 224, or other such work surface. The dynamometer 222 is used to measure forces dynamically in three directions, and torque in the vertical direction.
[0073] The dynamometer 222, ultrasonic vibrator 260, and the workpiece 204 are supported by the machine table 224. The machine table 224 can include an x-y linear stage so that it can be moved in the horizontal direction at controlled speeds.
[0074] FIG. 3A illustrates aspects of an embodiment of an ultra-fast rotary ultrasonic micromachining system 300 for micro-drilling operations. The system 300 includes an ultrasonic vibrator 302 upon which, the workpiece 304 can be mounted. The system 300 further includes an operating tool 306 which can be used to impart the desired micro-machining on the workpiece 304. In FIG. 3A, the operating tool 306 is illustrated as a drilling tool, with rotary motion of the cutting tool provided by a spindle 308 connected to DC motor 328. At high speed, the operating tool 306 becomes stronger so that it can easily remove material from hard materials like silicon and / or sapphire, with relatively low force, while minimizing unwanted chips, cracks, or abrasions.
[0075] A vertical linear stage 310 is used to adjust the vertical position of the operating tool 306. The vertical linear stage 310 can be controlled with a motion controller 332 operably connected to a computer system. Vertical movement can be controlled on a scale of 0.8 pm to provide excellent precision.
[0076] The ultrasonic vibrator 302 can be operatively connected to an ultrasonic generator, which can include a power supply, and can be configured to generate vibration at greater than 20 kHz. The frequency of vibration, as well as the type of vibrator, may be selected according to the application.
[0077] The high-speed spindle 308 is cooled with an air-line system 336, and can be controlled with a controller 330. The spindle 308 can include a chuck configured to hold micro-tools of different sizes with different shank diameters making it a versatile machine tool.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0078] A damper 314 can be installed between the ultrasonic vibrator 302 and fixture plate 316. The damper 314 can comprise a thin rubber pad. The damper 314 pad material is selected to be tightly engaged between the ultrasonic vibrator 302 and fixture plate 316.
[0079] The fixture plate 316 can be attached to a dynamometer 322, which can be mounted to a machine table 324, or other such work surface. The dynamometer 322 is used to measure forces in three directions, as well as torque along the vertical axis. The system can further include an x-y plane linear stages 320, configured to adjust the position of the workpiece 304 in the x-y direction (i.e., in a plane nominally parallel to that of the work surface). The dynamometer 322, ultrasonic vibrator 302, and the workpiece 304 are supported by the machine table 324.
[0080] The dynamometer 322 is configured to provide output to an amplifier 338, which accepts a signal from the dynamometer 322 and amplifies it. The amplified analog signal is then provided to an A / D converter 326 which can provide the converted digital signal to a computer system 334 for readout.
[0081] FIG. 3B illustrates a diagram of various systems associated with the ultra-fast rotary ultrasonic micro-machining system 300 for micro-drilling operations. The system 300 can include a vertical feeding subsystem 352, a force measurement subsystem 354, an ultra-fast spindle subsystem 356, and an ultrasonic vibration subsystem 358.
[0082] The vertical feeding subsystem 352 can include the motion controller 332 and computer system 334. The motion controller 332 is operably connected to the vertical linear stage 310. An interface can be provided with the computer system 334. This allows precision control of the position of the operating tool 306. A fixture 360 can be provided to hold the vertical linear stage 310. To achieve precision machining operations, the operating tool 306 can be moved in the vertical direction (or other directions in other embodiments) with speed as low as 1 pm / s.
[0083] The ultra-fast spindle subsystem 356 can comprise an air-line cooling system 336 and controller 330, which are operably connected to the spindle 308 with power line 331. The air-line system 336 and controller 330 are used to drive, control, and cool down the spindleAttorney Docket No. TTU-1087PCTPATENT APPLICATION308. In operation, compressed air in the air-line system 336 is supplied to the high-speed spindle 308 to dissipate heat produced due to the high rpm of the spindle 308.
[0084] Embodiments can include two types of spindles 308. One can comprise a straight and vertical spindle 308 as shown in the schematic diagram of FIG. 3B. However, in another embodiment, the spindle 308 can comprise a spindle arranged at a 90° angle from horizontal, using a transmitter, as illustrated in FIG. 2A. Likewise, the spindle 308 can be attached to various types of operating tools 306, which can comprise micro-tools (e.g., drill bits, dicing discs, diamond burrs, scribing tool, etc.). Different operating tools 306 can be used for different types of micro-machining operations. The micro-machining operations can include micro-drilling, scribing, face milling, end milling, dicing, or the like.
[0085] The ultrasonic vibration system 358 can comprise the ultrasonic vibrator 302 and associated power supply 312, which is used to control the ultrasonic vibrator 302. The ultrasonic vibrator 302 can comprise one or more sonotrodes. The ultrasonic vibrator 302 can be configured to operate at different frequencies. In addition, the ultrasonic power and amplitude of the vibration can be controlled with the power supply 312. The system 300 is therefore capable of producing different ultrasonic frequencies and amplitudes. The workpiece 304 is attached to an ultrasonic vibration system 358 so that the workpiece 304 can be vibrated during the micro-machining process. Frequency, amplitude, and ultrasonic power of the ultrasonic system can be tuned using the control panel of the power supply 312. The system can include an x-y plane linear stage 320, configured to adjust the position of the workpiece 304 in the x-y direction.
[0086] The ultrasonic vibrator 302 generates ultrasonic vibration that is transmitted toward the upper surface of the ultrasonic vibrator 302. The workpiece 304 can be fixed to the ultrasonic vibrator 302 with adhesive, for example, using hot glue, or other such adhesives. The thin layer of adhesive ensures proper vibration transmission to workpiece 304. The adhesive can be selected so that the workpiece 304 can be easily removed from the ultrasonic vibrator 302 without leaving any residue on the workpiece 304.
[0087] The system 300 can include a fixture to affix the ultrasonic vibrator 302 to the dynamometer 322. There are vibration-dampening rubber pads 314 in between the fixtureAttorney Docket No. TTU-1087PCTPATENT APPLICATIONand the ultrasonic vibrator 302. The pads 314 can also be installed between the fixture and the dynamometer 322. The rubber pads 314 dampen the vibration toward the dynamometer 322 to ensure proper functioning of the dynamometer 322.
[0088] The force measurement subsystem 354 can comprise the dynamometer 322, an amplifier 338, and an A / D converter 326. The A / D converter 326 can send signals to the computer system 334, which can output force measurements from the dynamometer 322. The dynamometer 322, along with the force measurement subsystem 354 components, are used to measure cutting forces in all three directions, as well as torque along the vertical axis.
[0089] The system 300 can include high-speed spindle(s) 308 that have extremely small runouts. In addition, the ultra-fast speed can generate very high linear speed in the operating tool 306 to efficiently cut (i.e. remove material from) hard and brittle materials. Integration of ultrasonic vibration gives system 300 the advantages of ultrasonic vibration-assisted machining as well as high-speed rotary micro-machining.
[0090] FIG. 4A illustrates aspects of an embodiment of an ultra-fast rotary ultrasonic micromachining system 400 for micro-grooving or wafer dicing. The system 400 includes an ultrasonic vibrator 402 upon which, the workpiece 404 can be mounted. The system 400 further includes an operating tool 406 which can be used to impart the desired micromachining on the workpiece 404. In FIG. 4A, the operating tool 406 is illustrated as a cutting tool, with rotary motion of the cutting tool provided by a spindle 408. At high speed, the cutting tool becomes stronger so that it can easily remove material from hard materials like silicon and / or sapphire, with relatively low cutting force, while minimizing unwanted chips or abrasions.
[0091] A vertical linear stage 410 is used to adjust the vertical position of the operating tool 406. The vertical linear stage 410 can be controlled with a motion controller 432 operably connected to a computer system. Vertical movement can be controlled on a scale of 0.8 pm to provide excellent precision.
[0092] The ultrasonic vibrator 402 can be operatively connected to an ultrasonic generator 412, which can include a power supply, and can be configured to generate vibration at greaterAttorney Docket No. TTU-1087PCTPATENT APPLICATIONthan 20 kHz. The frequency of vibration, as well as the type of vibrator, may be selected according to the application.
[0093] The high-speed spindle 408 is connected to DC motor 428, and is driven and controlled by a controller 430. The spindle 408 is cooled with an air-line system 436. The spindle 408 can include a chuck configured to hold micro-tools of different sizes with different shank diameters making it a versatile machine tool.
[0094] A damper 414 can be installed between the ultrasonic vibrator 402 and fixture plate 416. The damper 414 can comprise a thin rubber pad. The damper 414 pad material is selected to be tightly engaged between the ultrasonic vibrator 402 and fixture plate 416.
[0095] The fixture plate 416 can be attached to a dynamometer 422, which can be mounted to a machine table 424, or other such work surface. The dynamometer 422 is used to measure forces in three directions, as well as torque along the vertical axis. The system can further include an x-y plane linear stage 420, configured to adjust the position of the workpiece 404 in the x-y direction (i.e., in a plane nominally parallel to that of the work surface). The dynamometer 422, ultrasonic vibrator 402, and the workpiece 404 are supported by the machine table 424.
[0096] The dynamometer 422 is configured to provide output to an amplifier 438, which accepts a signal from the dynamometer 422 and amplifies it. The amplified analog signal is then provided to an A / D converter 426 which can provide the converted digital signal to a computer system 434 for readout.
[0097] FIG. 4B illustrates a diagram of various systems associated with the ultra-fast rotary ultrasonic micro-machining system 400. The system 400 can include a horizontal and vertical motion subsystem 452, a force measurement subsystem 454, an ultra-fast spindle subsystem 456, and an ultrasonic vibration subsystem 458.
[0098] The horizontal and vertical motion subsystem 452 can include the motion controller 432 and computer system 434. The motion controller 432 is operably connected to an x-y plane linear stage 420, as well as the vertical linear stage 410. An interface can be providedAttorney Docket No. TTU-1087PCTPATENT APPLICATIONwith the computer system 434. This allows precision control of the position of the operating tool 406, as well as the location of the workpiece 404. A fixture 460 can be provided to hold the vertical linear stage 410. To achieve precision machining operations, the cutting tool 406, and the workpiece 404, can be moved in all three directions with speed as low as 1 pm / s.
[0099] The ultra-fast spindle subsystem 456 can comprise an air-line system 436 and controller 430, which are used to drive control, and cool down the spindle 408. In operation, compressed air is supplied to the high-speed spindle 408 to dissipate heat produced due to the high rotation speed of the spindle 408.
[0100] Embodiments can include two types of spindles 408. One can comprise a straight and vertical spindle 408 as shown in the schematic diagram of FIG. 4B. However, in another embodiment, the spindle 408 can comprise a spindle arranged at a 90° angle from horizontal as illustrated in FIG. 2A. Likewise, the spindle 408 can be attached to various types of cutting tools 406, which can comprise micro-tools (e.g., drill bits, dicing discs, diamond burrs, scribing tool, etc.). Different cutting tools 406 can be used for different types of micromachining operations. The micro-machining operations can include micro-drilling, grooving, scribing, face milling, end milling, dicing, or the like.
[0101] The ultrasonic vibration system 458 can comprise the ultrasonic vibrator 402 and associated power supply 412, which is used to control the ultrasonic vibrator 402. The ultrasonic vibrator 402 can comprise one or more sonotrodes. The ultrasonic vibrator 402 can be configured to operate at different frequencies. In addition, the ultrasonic power and amplitude of the vibration can be controlled with the ultrasonic power supply 412. The system 400 is therefore capable of producing different ultrasonic frequencies and amplitudes. The workpiece 404 is attached to an ultrasonic vibration system 458 so that the workpiece 404 can be vibrated during the micro-machining process. Frequency and amplitude (ultrasonic power) of the ultrasonic system 458 can be tuned using the control panel of the ultrasonic system 458.
[0102] The ultrasonic vibrator 402 generates ultrasonic vibration that is transmitted toward the upper surface of the ultrasonic vibrator 402. The workpiece 404 can be fixed to the ultrasonic vibrator 402 with adhesive, for example, using hot glue, or other such adhesives.Attorney Docket No. TTU-1087PCTPATENT APPLICATIONThe thin layer of adhesive ensures proper vibration transmission to the workpiece 404. The adhesive can be selected so that the workpiece 404 can be easily removed from the ultrasonic vibrator 402 without leaving any residue on the workpiece 404.
[0103] The system 400 can include a fixture to affix the ultrasonic vibrator 402 to the dynamometer 422. There are vibration-dampening rubber pads 414 in between the fixture and the ultrasonic vibrator 402. The pads 414 can also be installed between the fixture and the dynamometer 422. The rubber pads 414 dampen the vibration toward the dynamometer 422 to ensure proper functioning of the dynamometer 422.
[0104] The force measurement subsystem 454 can comprise the dynamometer 422, an amplifier 438, and an A / D converter 426. The A / D converter 426 can send signals to the computer system 434, which can output force measurements from the dynamometer 422. The dynamometer 422, along with the force measurement subsystem 454 components, are used to measure cutting forces in all three directions, as well as torque along the vertical axis.
[0105] The system 400 can include high-speed spindle(s) 408 that have extremely small runouts. In addition, the ultra-fast speed can generate very high linear speed in the cutting tool 406 to efficiently cut (i.e. remove material from) hard and brittle materials. Integration of ultrasonic vibration gives system 400 the advantages of ultrasonic vibration-assisted machining as well as high-speed rotary micro-machining.
[0106] Disclosed embodiments offer marked improvements over prior art techniques. FIG.5A provides a chart 500 showing the decreased force required for cutting during a micro drilling operation. Specifically, the cutting force required during micro-drilling with a diamond tool under ultrasonic vibration is considerably lower than without ultrasonic vibration. The cutting force at higher rpm is also significantly decreased with ultrasonic vibration imparted with the systems disclosed herein. FIG. 6A illustrates images 600 of experimental results of diamond drill holes fabricated with and without ultrasonic vibration, with the system as disclosed herein. As illustrated, the holes created using the systems disclosed herein are significantly improved over standard drilling techniques.
[0107] FIG. 5B provides a chart 550 showing the decreased force required for cuttingAttorney Docket No. TTU-1087PCTPATENT APPLICATIONduring a micro drilling operation. Specifically, the cutting force during micro-drilling with a twist drill is larger than that with a diamond tool. However, the micro-drilling with ultrasonic vibration shows a similar trend as shown in chart 500. With ultrasonic vibration, the cutting force value for the twist drill is reduced significantly. Likewise, at higher rpm, the cutting forces considerably decrease with ultrasonic vibration. FIG. 6B illustrates images 650 of experimental results of twist drill holes fabricated with and without ultrasonic vibration with a system as disclosed herein. As illustrated, the holes created using the systems disclosed herein are significantly improved over standard drilling techniques.
[0108] FIGS. 7-9 are provided as exemplary diagrams of data-processing environments in which embodiments of the present invention may be implemented. It should be appreciated that FIGS. 7-9 are only exemplary and are not intended to assert or imply any limitation with regard to the environments in which aspects or embodiments of the disclosed embodiments may be implemented. Many modifications to the depicted environments may be made without departing from the spirit and scope of the disclosed embodiments.
[0109] A block diagram of a computer system 700 that executes programming for implementing parts of the methods and systems disclosed herein is shown in FIG. 7. A computing device in the form of a computer 710 configured to interface with controllers, peripheral devices, and other elements disclosed herein may include one or more processing units 702, memory 704, removable storage 712, and non-removable storage 714. Memory 704 may include volatile memory 706 and non-volatile memory 708. Computer 710 may include or have access to a computing environment that includes a variety of transitory and non-transitory computer-readable media such as volatile memory 706 and non-volatile memory 708, removable storage 712 and non-removable storage 714. Computer storage includes, for example, random access memory (RAM), read only memory (ROM), erasable programmable read-only memory (EPROM) and electrically erasable programmable readonly memory (EEPROM), flash memory or other memory technologies, compact disc readonly memory (CD ROM), Digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage, or other magnetic storage devices, or any other medium capable of storing computer-readable instructions as well as data including image data.Attorney Docket No. TTU-1087PCTPATENT APPLICATION
[0110] Computer 710 may include, or have access to, a computing environment that includes input 716, output 718, and a communication connection 720. The computer 710 may operate in a networked environment using a communication connection 720 to connect to one or more remote computers, remote sensors and / or controllers, detection devices, hand-held devices, multi-function devices (MFDs), mobile devices, tablet devices, mobile phones, Smartphone, or other such devices. The remote computer may also include a personal computer (PC), server, router, network PC, RFID enabled device, a peer device or other common network node, or the like. The communication connection 720 may include a Local Area Network (LAN), a Wide Area Network (WAN), Bluetooth connection, or other networks. This functionality is described more fully in the description associated with FIG. 8 below.
[0111] Output 718 is most commonly provided as a computer monitor, but may include any output device. Output 718 and / or input 716 may include a data collection apparatus associated with computer system 700. In addition, input 716, which commonly includes a computer keyboard and / or pointing device such as a computer mouse, computer track pad, or the like, allows a user to select and instruct computer system 700. A user interface can be provided using output 718 and input 716. Output 718 may function as a display for displaying data and information for a user, and for interactively displaying a graphical user interface (GUI) 730.
[0112] Note that the term “GUI” generally refers to a type of environment that represents programs, files, options, and so forth by means of graphically displayed icons, menus, and dialog boxes on a computer monitor screen. A user can interact with the GUI to select and activate such options by directly touching the screen and / or pointing and clicking with a user input device 716 such as, for example, a pointing device such as a mouse, and / or with a keyboard. A particular item can function in the same manner to the user in all applications because the GUI provides standard software routines (e.g., program module or node 725) to handle these elements and report the user’s actions.
[0113] Computer-readable instructions, for example, program module or node 725, which can be representative of other modules or nodes described herein, are stored on a computer-Attorney Docket No. TTU-1087PCTPATENT APPLICATIONreadable medium and are executable by the processing unit 702 of computer 710. Program module or node 725 may include a computer application. A hard drive, CD-ROM, RAM, Flash Memory, and a USB drive are just some examples of articles including a computer-readable medium.
[0114] FIG. 8 depicts a graphical representation of a network of data-processing systems 800 in which aspects of the present invention may be implemented. Network data-processing system 800 can be a network of computers or other such devices, such as mobile phones, smart phones, sensors, controllers, speakers, tactile devices, and the like, in which embodiments of the present invention may be implemented. Note that the system 800 can be implemented in the context of a software module such as program module or node 725. The system 800 includes a network 802 in communication with one or more clients 810, 812, and 814. Network 802 may also be in communication with one or more network devices 804, servers 806, and storage 808. Network 802 is a medium that can be used to provide communications links between various devices and computers connected together within a networked data processing system such as computer system 700. Network 802 may include connections such as wired communication links, wireless communication links of various types, and fiber optic cables. Network 802 can communicate with one or more servers 806, one or more external devices 804, and a memory storage unit such as, for example, memory or database 808. It should be understood that device 804 may be embodied as an actuator, linear stage, controller, ultrasonic generator, sensor, or other such device.
[0115] In the depicted example, device 804, server 806, and clients 810, 812, and 814 connect to network 802 along with storage unit 808. Clients 810, 812, and 814 may be, for example, personal computers or network computers, handheld devices, mobile devices, tablet devices, smart phones, personal digital assistants, recording devices, speakers, MFDs, etc. Computer system 700 depicted in FIG. 7 can be, for example, a client such as client 810 and / or 812 and / or 814.
[0116] Computer system 700 can also be implemented as a server such as server 806, depending upon design considerations. In the depicted example, server 806 provides data such as boot files, operating system images, applications, and application updates to clientsAttorney Docket No. TTU-1087PCTPATENT APPLICATION810, 812, and / or 814. Clients 810, 812, and 814 and device 804 are clients to server 806 in this example. Network data-processing system 800 may include additional servers, clients, and other devices not shown. Specifically, clients may connect to any member of a network of servers, which provide equivalent content.
[0117] In the depicted example, network data-processing system 800 is the Internet, with network 802 representing a worldwide collection of networks and gateways that use the Transmission Control Protocol / lnternet Protocol (TCP / IP) suite of protocols to communicate with one another. At the heart of the Internet is a backbone of high-speed data communication lines between major nodes or host computers consisting of thousands of commercial, government, educational, and other computer systems that route data and messages. Of course, network data-processing system 800 may also be implemented as a number of different types of networks such as, for example, an intranet, a local area network (LAN), or a wide area network (WAN). FIGS. 7 and 8 are intended as examples and not as architectural limitations for different embodiments of the present invention.
[0118] FIG. 9 illustrates a software system 900, which may be employed for directing the operation of the data-processing systems such as computer system 700 depicted in FIG. 7. Software application 905, may be stored in memory 704, on removable storage 712, or on non-removable storage 714 shown in FIG. 7, and generally includes and / or is associated with a kernel or operating system 910 and a shell or interface 915. One or more application programs, such as module(s) or node(s) 725, may be "loaded" (i.e., transferred from removable storage 712 into the memory 704) for execution by the network data-processing system 700. The network data-processing system 700 can receive user commands and data through user interface 915, which can include input 716 and output 718, accessible by a user 920. These inputs may then be acted upon by the computer system 700 in accordance with instructions from operating system 910 and / or software application 905 and any software program module(s) or node(s) 725 thereof.
[0119] Generally, program modules or nodes (e.g., program module or node 725) can include, but are not limited to, routines, subroutines, software applications, programs, objects, components, data structures, etc., that perform particular tasks or implement particular abstract data types and instructions. Moreover, those skilled in the art will appreciate thatAttorney Docket No. TTU-1087PCTPATENT APPLICATIONelements of the disclosed methods and systems may be practiced with other computer system configurations such as, for example, hand-held devices, mobile phones, smart phones, tablet devices multi-processor systems, microcontrollers, printers, copiers, fax machines, multi-function devices, data networks, microprocessor-based or programmable consumer electronics, networked personal computers, minicomputers, mainframe computers, servers, medical equipment, medical device computers, and the like.
[0120] Note that the term “module” or “node” as utilized herein may refer to a collection of routines and data structures that perform a particular task or implements a particular abstract data type. Modules may be composed of two parts: an interface, which lists the constants, data types, variables, and routines that can be accessed by other modules or routines; and an implementation, which is typically private (accessible only to that module), and which includes source code that actually implements the routines in the module. The term module may also simply refer to an application such as a computer program designed to assist in the performance of a specific task such as word processing, accounting, inventory management, etc., or a hardware component designed to equivalently assist in the performance of a task.
[0121] The interface 915 (e.g., a graphical user interface 730) can serve to display results, whereupon a user 920 may supply additional inputs or terminate a particular session. In some embodiments, operating system 910 and GUI 730 can be implemented in the context of a “windows” system. It can be appreciated, of course, that other types of systems are possible. For example, rather than a traditional “windows” system, other operation systems such as, for example, a real-time operating system (RTOS) more commonly employed in wireless systems may also be employed with respect to operating system 910 and interface 915. The software application 905 can include, for example, program module(s) or node(s) 725, which can include instructions for carrying out steps or logical operations such as those shown and described herein.
[0122] The description is presented with respect to embodiments of the present invention, which can be embodied in the context of, or require the use of, a network data-processing system such as computer system 700, in conjunction with program module or node 725, and data-processing system 800 and network 802 depicted in FIGS. 7-8. The present invention, however, is not limited to any particular application or any particular environment. Instead,Attorney Docket No. TTU-1087PCTPATENT APPLICATIONthose skilled in the art will find that the system and method of the present invention may be advantageously applied to a variety of systems and application software.
[0123] Moreover, the present invention may be embodied on a variety of different platforms, including Windows, Macintosh, UNIX, LINUX, Android, Arduino and the like, using any number of standard programming languages and libraries (C++, Matlab, python, etc.). Therefore, the descriptions of the exemplary embodiments, are for purposes of illustration.
[0124] Based on the foregoing, it can be appreciated that a number of embodiments, preferred and alternative, are disclosed herein. In an embodiment, an ultra-fast rotary ultrasonic micro-machining system comprises a spindle configured to engage an operating tool, an ultrasonic vibrator configured to operably engage a workpiece, and an x-y linear stage operably engaged to the ultrasonic vibrator. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a dynamometer configured between the ultrasonic vibrator and the x-y linear stage. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an ultrasonic generator configured to drive the ultrasonic vibrator. In an embodiment, the ultra-fast rotary ultrasonic micromachining system further comprises a damper inserted between the ultrasonic vibrator and a fixture plate. In an embodiment, the spindle comprises a high speed spindle. In an embodiment, the high speed spindle is configured to rotate at up to 60,000 rpm. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a vertical linear stage operably connected to the spindle. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an amplifier configured to amplify a signal from the dynamometer and an analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal. In an embodiment, the operating tool comprises a cutting tool. In an embodiment, the operating tool comprises at least one of a drill bit, a dicing disc, a diamond burr, and a scribing tool. In an embodiment, the ultrasonic vibrator is configured to vibrate at a rate of greater than 20 kHz.
[0125] In an embodiment, an ultra-fast rotary ultrasonic micro-machining system comprises a spindle configured to engage a drilling tool, an ultrasonic vibrator configured to operably engage a workpiece, and a vertical linear stage operably engaged to the spindle.Attorney Docket No. TTU-1087PCTPATENT APPLICATIONIn an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises a dynamometer configured between the ultrasonic vibrator and an x-y linear stage. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an ultrasonic generator configured to drive the ultrasonic vibrator. In an embodiment, the ultrasonic vibrator comprises one of a vertical ultrasonic vibrator or a horizontal ultrasonic vibrator. In an embodiment, the spindle is configured to rotate between 1 ,000 rpm and 60,000 rpm. In an embodiment, the ultra-fast rotary ultrasonic micro-machining system further comprises an amplifier configured to amplify a signal from the dynamometer and an analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal. In an embodiment, the drilling tool comprises at least one of a drill bit and a scribing tool. In an embodiment, the ultrasonic vibrator is configured to vibrate at a rate of greater than 20kHz.
[0126] In an embodiment, a micro-machining system comprises a spindle configured to engage an operating tool, an ultrasonic vibrator configured to operably engage a workpiece, an x-y linear stage operably engaged to the ultrasonic vibrator, and a vertical linear stage operably connected to the spindle. In an embodiment, the operating tool comprises at least one of a drill bit, a dicing disc, a diamond burr, and a scribing tool.
[0127] It will be appreciated that variations of the above-disclosed and other features and functions, or alternatives thereof, may be desirably combined into many other different systems or applications. Also, it should be appreciated that various presently unforeseen or unanticipated alternatives, modifications, variations, or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.
Claims
Attorney Docket No. TTU-1087PCTPATENT APPLICATION CLAIMSWhat is claimed is:
1. An ultra-fast rotary ultrasonic micro-machining system comprising:a spindle configured to engage an operating tool;an ultrasonic vibrator configured to operably engage a workpiece; andan x-y linear stage operably engaged to the ultrasonic vibrator.
2. The ultra-fast rotary ultrasonic micro-machining system of claim 1 further comprising: a dynamometer configured between the ultrasonic vibrator and the x-y linear stage.
3. The ultra-fast rotary ultrasonic micro-machining system of claim 1 further comprising: an ultrasonic generator configured to drive the ultrasonic vibrator.
4. The ultra-fast rotary ultrasonic micro-machining system of claim 1 further comprising: a damper inserted between the ultrasonic vibrator and a fixture plate.
5. The ultra-fast rotary ultrasonic micro-machining system of claim 1 wherein the spindle comprises:a high speed spindle.
6. The ultra-fast rotary ultrasonic micro-machining system of claim 5 wherein the high speed spindle is configured to rotate at up to 60,000 rpm.
7. The ultra-fast rotary ultrasonic micro-machining system of claim 1 further comprising: a vertical linear stage operably connected to the spindle.
8. The ultra-fast rotary ultrasonic micro-machining system of claim 2 further comprising: an amplifier configured to amplify a signal from the dynamometer; andan analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal.Attorney Docket No. TTU-1087PCTPATENT APPLICATION8. The ultra-fast rotary ultrasonic micro-machining system of claim 1 wherein the operating tool comprises a cutting tool.
9. The ultra-fast rotary ultrasonic micro-machining system of claim 1 wherein the operating tool comprises at least one of:a drill bit;a dicing disc;a diamond burr; anda scribing tool.
10. The ultra-fast rotary ultrasonic micro-machining system of claim 1 wherein the ultrasonic vibrator is configured to vibrate at a rate of greater than 20kHz.
11. An ultra-fast rotary ultrasonic micro-machining system comprising:a spindle configured to engage an operating tool;an ultrasonic vibrator configured to operably engage a workpiece; anda vertical linear stage operably engaged to the spindle.
12. The ultra-fast rotary ultrasonic micro-machining system of claim 11 further comprising:a dynamometer configured between the ultrasonic vibrator and an x-y linear stage.
13. The ultra-fast rotary ultrasonic micro-machining system of claim 11 further comprising:an ultrasonic generator configured to drive the ultrasonic vibrator.
14. The ultra-fast rotary ultrasonic micro-machining system of claim 11 wherein the ultrasonic vibrator comprises one of:a vertical ultrasonic vibrator; ora horizontal ultrasonic vibrator.
15. The ultra-fast rotary ultrasonic micro-machining system of claim 11 wherein the spindle is configured to rotate between 1 ,000 rpm and 60,000 rpm.Attorney Docket No. TTU-1087PCTPATENT APPLICATION16. The ultra-fast rotary ultrasonic micro-machining system of claim 12 further comprising:an amplifier configured to amplify a signal from the dynamometer; andan analog to digital converter configured to receive an analog signal from the amplifier and convert it to a digital signal.
17. The ultra-fast rotary ultrasonic micro-machining system of claim 11 wherein the operating tool comprises at least one of:a drill bit; anda scribing tool.
18. The ultra-fast rotary ultrasonic micro-machining system of claim 11 wherein the ultrasonic vibrator is configured to vibrate at a rate of greater than 20kHz.
19. A micro-machining system comprising:a spindle configured to engage an operating tool;an ultrasonic vibrator configured to operably engage a workpiece;an x-y linear stage operably engaged to the ultrasonic vibrator; anda vertical linear stage operably connected to the spindle.
20. The micro-machining system of claim 19 wherein the operating tool comprises at least one of:a drill bit;a dicing disc;a diamond burr; anda scribing tool.