Calibration apparatus for AMC measurement equipment and methods for calibrating the same
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2026-02-06
- Publication Date
- 2026-08-13
Smart Images
Figure US2026014382_13082026_PF_FP_ABST
Abstract
Description
Docket No. E0001190 WOCALIBRATION APPARATUS FOR AMC MEASUREMENT EQUIPMENT AND METHODS FOR CALIBRATING THE SAMEFIELD
[0001] This disclosure is directed to airborne molecular contamination (“AMC”) measurement equipment for semiconductor substrate carrying containers such as front opening unified pods (FOUPs), front opening shipping boxes (FOSBs), or multi-application carriers (MACs), for example those used in semiconductor manufacturing. More specifically, the disclosure relates to a calibration apparatus for calibrating the AMC measurement equipment.BACKGROUND
[0002] Substrates, for example, in the form of wafers, can be processed to form semiconductor devices. The wafer substrates, or simply substrates, undergo a series of process steps. A substrate container is used to store and transport the in-process wafers between process steps within the fabrication facility. During some process steps, the substrates are processed by processing equipment within a clean environment (e.g., a clean room). During processing, gases must be introduced and removed from the substrate container such as a front opening unified pods (FOUP), for example during purge processes, thus requiring that the FOUP have one or more locations at which purge gas may enter or leave the FOUP.
[0003] In some cases, the FOUPs can be transferred between various processing devices either manually or through an overhead hoist transportation (OHT), in which substrates can be transferred from the substrate container to the processing tool through an equipment front end module (EFEM). The EFEM generally includes a load port for receiving the substrate container, a transfer unit, a frame or “mini-environment”, and a fan filter unit used to generate gas flow within the EFEM.
[0004] During such processing and storage operations, contamination, such as particles or molecules, can contaminate the substrates and / or the FOUPs, which can lead to yield loss and / or affect the processing of the substrates, e.g., degrade process performance.SUMMARY
[0005] This disclosure is directed to airborne molecular contamination (“AMC”) measurement equipment for semiconductor substrate carrying containers such as front opening unified pods (FOUPs), front opening shipping boxes (FOSBs), or multi-application carriers (MACs), forDocket No. E0001190 WOexample those used in semiconductor manufacturing. More specifically, the disclosure relates to a calibration apparatus for calibrating the AMC measurement equipment.
[0006] In an embodiment, a calibration apparatus for calibrating an AMC measurement equipment is provided. The calibration apparatus includes a shell and a calibration gas delivery system. The shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment. The calibration gas delivery system is disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment. The calibration gas outlet port is provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment.
[0007] In another embodiment, a method of calibrating an AMC measurement equipment is provided. The method includes connecting a calibration apparatus to the AMC measurement equipment; delivering the calibration gas to the AMC measurement equipment through the bottom wall of the shell of the calibration apparatus; and calibrating one or more analyzers of the AMC measurement equipment to one or more concentrations of gases in the calibration gas. The calibration apparatus includes a shell, in which the shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment. The calibration apparatus also includes a calibration gas delivery system disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment. The calibration gas outlet port is provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment.
[0008] In some embodiments, a calibration apparatus is provided. The calibration apparatus includes a calibration gas delivery system and a dilution gas delivery system, in which the calibration gas delivery system and the dilution gas delivery system can be powered by a portable power source. The calibration gas delivery system and the gas dilution system are installed within a shell, such as a FOUP or FOSB shell, such that the calibration apparatus is configured to deliver the calibration gas to an AMC measurement equipment. As such, the AMC measurement equipment is configured to sample the calibration gas from the calibration apparatus in the same way as the AMC measurement equipment would sample the gas from a FOUP or FOSB. In an embodiment, the calibration apparatus includes inlet poit(s) to feed the calibration gas and the dilution gas to the calibration gas delivery system, e.g., for example, connected to the shell of a FOUP inlet port. The calibration gas delivery system is thusDocket No. E0001190 WOconfigured to create different levels of concentration to calibrate the AMC measurement equipment.
[0009] In another embodiment, a calibration apparatus is provided. The calibration apparatus includes a calibration gas delivery system. In this embodiment, the calibration gas delivery system includes a gas bladder bag with an inlet port for refilling the gas bladder, e.g., for example, connected to the shell of a FOUP inlet port. The calibration gas delivery system is installed within a shell, such as a FOUP or FOSB shell, such that the calibration apparatus is configured to deliver the calibration gas to an AMC measurement equipment, e.g., the AMC measurement equipment is configured to sample the calibration gas from the calibration apparatus. The calibration gases can be charged to the calibration gas delivery system at predetermined level(s), e.g., charged into the gas bladder bag. The AMC measurement equipment is configured to sample the calibration gas from the gas bladder bag in the same way as the AMC measurement equipment would sample the gas from a FOUP or FOSB. In some embodiments, the calibration apparatus can be prepared at one location and then shipped to different locations for tool matching studies, e.g., calibration and / or testing of multiple AMC measurement equipment.
[0010] As such, the calibration apparatuses and methods as discussed herein are provided to calibrate AMC analytical equipment, such that the calibration apparatuses and methods can provide reduced service charges for performing calibration, e.g., simplified procedures for performing calibration, and to maintain tool accuracy and precision for better quality control during substrate processing.BRIEF DESCRIPTION OF THE DRAWINGS
[0011] References are made to the accompanying drawings that form a part of this disclosure and which illustrate the embodiments in which systems and methods described in this specification can be practiced.
[0012] FIG. 1 shows a front perspective view of a calibration apparatus according to an embodiment.
[0013] FIG. 2 shows a schematic view of a calibration apparatus according to an embodiment.
[0014] FIG. 3 shows a schematic view of a calibration apparatus according to another embodiment.
[0015] FIG. 4 illustrates a calibration apparatus connected to an AMC measurement equipment according to an embodiment.Docket No. E0001190 WO
[0016] FIG. 5 shows a flowchart of a method for calibrating an AMC measurement equipment according to an embodiment.
[0017] Like reference numbers represent like parts throughout.DETAILED DESCRIPTION
[0018] As indicated above, during processing and storage operations of substrates in a clean environment, contamination, such as particles or molecules, can contaminate the substrate(s) and / or the substrate container(s), which can lead to yield loss and / or affect the processing of the substrate(s), e.g., degrade process performance.
[0019] An AMC measurement device can be used to monitor and / or understand where contamination in the clean environment comes from. For example, the AMC measurement device can be configured to receive the substrate container, e.g., via manually or the OHT, in which the substrate container can be docked on a load port of the AMC measurement device. The substrate container can include multiple discrete components including a grommet, a valve such as a check valve, a bottom plate, and various sealing members for connecting the substrate container to the load port of the AMC measurement device. The AMC measurement device is configured to determine whether the substrate container has any contamination by sampling gas within an inner volume of the substrate container, e.g., via ports in the load port that correspond to the ports through the bottom wall and the bottom plate of the substrate container, and using one or more analyzers to analyze the sampled gas either continuously or intermittently. As such, based on the analyzer(s) results of the level of contamination, it can be determined whether or not to clean and / or decontaminate the substrate container, e.g., to minimize or reduce defects and / or waste due to contamination, or allow the “clean” substrate container to be further processed by subsequent semi-conductor processing devices.
[0020] The AMC measurement device is an integrated system having several different analyzers to conduct gas analysis simultaneously, e.g., from the same sampling manifold, for the inner volume of a substrate container. As such, the AMC measurement device can be configured to sample the inner volume of the substrate container, e.g., using a vacuum pump, and analyze the sample gas to determine whether or not the substrate container and / or substrate(s) have any contamination, such as, one or more of ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (IIF), hydrochloric acid (IIC1), total amines, nitrous gas (NOx), arsine (AsII3), phosphine (PH3), and water (H2O).Docket No. E0001190 WO
[0021] In order to ensure accuracy of the measurement of the contaminant(s) by the AMC measurement device, the analyzers of the AMC measurement device are calibrated. In prior systems, when conducting the analyzer calibration, each analyzer is disconnected and calibrated independently from the sampling manifold, since there is no standard substrate container gas sample that can be tested to calibrate all of the analyzers at the same time. Moreover, in such systems, when the calibration is conducted, the sample air is withdrawn from the substrate container and the makeup air is injected into the substrate container to balance the air pressure in the substrate container, which can dilute the gas components in the substrate container, thus resulting in an incorrect calibration of the analyzers. As such, not only does the calibration of the analyzers of the AMC measurement device using the prior systems have errors or variations, such sampling techniques do not allow calibration of two or more different analyzers based on the same gas components, for example, calibrating an analyzer for measuring the concentration of NH3 using an ion mobility spectrometer (IMS) and an analyzer using a cavity ring-down spectroscopy (CRDS).
[0022] Embodiments disclosed herein provide solutions to the above problems by e.g. providing a calibration apparatus for calibrating the AMC measurement equipment, which is not only configured to calibrate the AMC measurement equipment as a whole, e.g., calibrate all of the analyzers at the same time, but also can be used to provide a standard gas that can be used to calibrate different analyzers, and in some embodiments, different analyzers that are used to measure the same gas component / contaminant. The calibration apparatus is also configured to easily and / or simply dock on the load port of the AMC measurement equipment by having ports and / or coupling elements that correspond to the load port of the AMC measurement equipment. As such, the entirety of the AMC measurement equipment can be evaluated and tuned to ensure the accuracy of the contamination measurements by the AMC measurement equipment and the calibration apparatus also allows use of the same calibration gas for calibrating multiple AMC measurement equipment to obtain consistent calibration of the multiple AMC measurement equipment.
[0023] Particular embodiments of the present disclosure are described herein with reference to the accompanying drawings; however, it is to be understood that the disclosed embodiments are merely examples of the disclosure, which can be embodied in various forms. Well-known functions or constructions are not described in detail to avoid obscuring the present disclosure in unnecessary detail. Therefore, specific structural and functional details disclosed herein are not to be interpreted as limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the present disclosure in virtuallyDocket No. E0001190 WOany appropriately detailed structure. In this description, as well as in the drawings, like-referenced numbers represent elements that can perform the same, similar, or equivalent functions.
[0024] The scope of the disclosure should be determined by the appended claims and their legal equivalents, rather than by the examples given herein. For example, the steps recited in any method claims can be executed in any order and are not limited to the order presented in the claims. Moreover, no element is essential to the practice of the disclosure unless specifically described herein as “critical” or “essential”.
[0025] FIG. 1 shows a front perspective view of calibration apparatus for calibrating an AMC measurement equipment according to an embodiment. Calibration apparatus 100 includes shell 102 having a bottom wall 104, and equipment hook up 108 for transportation of the calibration apparatus, e.g., via the OHT. The calibration apparatus 100 further includes a calibration gas delivery system 110.
[0026] Calibration apparatus 100 is a configured to contain the calibration gas delivery system 110 within the shell 102, in which the calibration gas delivery system 110 is connected to ports 112, 114, 116 along the shell of the calibration apparatus 100, e.g., via tubing or piping that is press-fit, e.g., via Luer connections, clamped, screwed, or otherwise connected. As used herein, the term “connected” can refer to both fluid connection and mechanical connection to allow the delivery of the calibration gas to one or more various components. The shell 102 defines an internal space or volume for receiving the calibration gas delivery system 110. The shell 102 can define the internal space by way of top, bottom, side, and back walls with an open front side, which can be enclosed by a door or wall 101, to allow the insertion or removal of the calibration gas delivery system 110 and / or components thereof. In some embodiments, the calibration apparatus 100 can include the shell of a FOUP or FOSB or MAC or similar reticle container.
[0027] Bottom wall 104 is configured to connect to a load port of the AMC measurement equipment. In some embodiments, the bottom wall 104 can include one or more purge ports and / or gas outlet ports 120 provided on the shell 102 and through the bottom wall 104 for providing fluid communication with corresponding ports in the load port of the AMC measurement equipment. Bottom wall 104 can be configured to facilitate handling of the substrate container and can include interfaces, such as grommets, a valve such as a check valve, various sealing members, coupling elements, or the like for connecting the calibration apparatus 100 to the load port of the AMC measurement equipment. In some embodiments, the bottom wall 104 can be connected to a bottom plate 106, in which the bottom plate 106 isDocket No. E0001190 WOconfigured to interface with various conveyors or other devices so that the calibration apparatus can be moved around the processing facility and / or for connecting to the load port of the AMC measurement equipment, e.g., to the ports of the load port to form a fluid communication between the calibration apparatus 100 and the AMC measurement equipment. In an embodiment, the bottom plate 106 can be a conveyor plate of the calibration apparatus 100 that is fixed with bottom wall 104, for example, by welding, bonding, connectors, fasteners, etc., in which the purge ports of the calibration apparatus 100 are connected to ports in the bottom plate 106.
[0028] In some embodiments, the bottom wall 104 can include one to four purge ports and / or gas outlet ports 120 for creating a calibration apparatus / AMC measurement equipment interface with the corresponding ports in the load port of the AMC measurement equipment. In some embodiments, one or more of the ports 120 can be configured as gas outlet ports 120 for delivering the calibration gas to the AMC measurement equipment. In some embodiments, the purge ports 120 can be used to deliver purge gas, such as nitrogen, clean dry air, or ultra clean dry air, from the AMC measurement equipment to maintain the pressure in the calibration apparatus 100, e.g., at 1 ATM.
[0029] The calibration gas delivery system 110 is configured to deliver calibration gas to the AMC measurement equipment for calibration of one or more analyzers, and in some embodiments, two or more analyzers, using a known calibration gas concentration. The calibration gas can include, but not limited to, one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsII3), phosphine (PII3), and water (II2O). The concentrations of the one or more gases can be selected from one or more of the following concentrations: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the SO2 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1 to 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
[0030] In some embodiments, the calibration gas delivery system 110 can include one or more components, such as, but not limited to, microprocessor(s), one or more flow control valves,Docket No. E0001190 WOsuch as, needle valves or ball valves, a pressure regulator, a power supply, a power supply port 116 (and / or charging and / or control port) provided on the shell 102 of the calibration apparatus 100, a calibration gas inlet port 112 provided on the shell 102 of the calibration apparatus 100, a calibration gas outlet port connected to the bottom of the shell 102 having the bottom wall 104, a dilution gas delivery system, a dilution gas inlet port 114 provided on the shell 102 of the calibration apparatus 100, and a vent 118 provided on the shell 102 of the calibration apparatus 100 for venting excess gas in the internal space of the calibration apparatus 100, e.g., to prevent or reduce pressure build up in the calibration apparatus 100.
[0031] In some embodiments, the calibration gas delivery system 110 can be secured in the internal space of the shell 102. For example, the calibration gas delivery system 110 can be installed on a bracket or rack that is secured, e.g., fastened using fasteners, welded, glued, or the like, to an internal structure in the internal space of the shell 102, e.g., supports or walls or on the bottom wall. In other embodiments, the calibration gas delivery system 110 can be secured to one or more base plates that arc configured to be received in the substrate supports or shelves that are provided in the FOUP or secured to a support structure connectable to the shell of the FOUP to allow insertion and securement of one or more of the components of the calibration gas delivery system 110. In some embodiments, the calibration gas delivery system 110 can be secured to the bottom wall of the shell 102.
[0032] The calibration gas delivery system 110 is configured to deliver the calibration gas to the AMC measurement equipment via a calibration gas outlet port 120 provided on the shell 102 and through the bottom wall 104. In some embodiments, one or more flow control or metering valve(s) 113 are connected to the calibration gas inlet port 112 for receiving the calibration gas, e.g., from an external cannister having a calibration gas to control a known amount and concentration of the calibration gas to the AMC measurement equipment. The calibration gas then flows through the calibration gas outlet port 120 through the bottom of the shell 102 having the bottom wall 104, e.g., such as through the grommet(s), for delivering the calibration gas to the AMC measurement equipment via the load port. In other words, the AMC measurement equipment is configured to withdraw the calibration gas from the calibration gas delivery system 110 through the calibration gas outlet port 120 through the bottom of the shell 102 having the bottom wall 104, e.g., through the grommet(s), and the load port of the AMC measurement equipment. As such, one or more of the analyzers of the AMC measurement equipment can be calibrated to a known and reproducible quantity and concentration of calibration gas. In other embodiments, the calibration gas delivery system 110 can include canisters, bottles, or a refillable gas bladder that includes the calibration gas for delivery to theDocket No. E0001190 WOAMC measurement equipment. In some embodiments, the one or more flow control or metering valves, in lieu of or in addition to the flow control or metering valves 113, can be connected to the calibration gas outlet port 120 for delivering or regulating (and measuring) delivery of the calibration gas to the AMC measurement equipment. In some embodiments, the calibration gas can be delivered to the AMC measurement equipment at a rate between 0.05 to 50 standard liters per minute (SLPM), and in some embodiments, a rate between 0.05 to 10 SLPM, and in some embodiments, 0.05 to 1 SLPM.
[0033] In some embodiments, the calibration gas delivery system 110 can include a dilution gas delivery system for receiving a dilution gas, such as, nitrogen, clean dry air, or ultra clean dry air. The dilution gas delivery system can include one or more flow control or metering valves connected to the dilution gas inlet port 114 for receiving dilution gas. The dilution gas delivery system is connected to the calibration gas delivery system 110 for diluting the calibration gas for delivery of the known concentration and amount of calibration gas to the AMC measurement equipment such that the calibration gas and the dilution gas arc delivered through the calibration gas outlet port 120 to the AMC measurement equipment.
[0034] In some embodiments, the calibration gas delivery system 110 can further include a power source, such as, a battery pack or pluggable connections to shore power, for providing power to the calibration gas delivery system 110. In some embodiments, the power can be supplied to the components of the calibration gas delivery system, such as, but not limited to, the flow control or metering valves, vent valve, sensors, displays, or the like. The power source is connected to the power source port 116 for providing the power and / or control signals and / or for recharging the battery pack.
[0035] In some embodiments, the calibration gas delivery system 110 can also include a venting system that includes the vent 118 provided on the shell 102 of the calibration apparatus 100 and a check valve for venting excess gas in the internal space of the calibration apparatus 100, e.g., a one-way check valve and / or a flow control or metering valve configured to regulate a pressure inside the calibration apparatus 100 to prevent or reduce pressure build up, i.e., pressurization. For example, in some embodiments, in order to get an accurate calibration of the one or more analyzers of the AMC measurement equipment, which uses a vacuum pump, the pressure in the calibration apparatus 100 must remain at atmospheric or 1 ATM to not force gas into the AMC measurement equipment. As such, the vent 118, which can be connected to a one-way check valve and / or a flow control or metering valve, is provided for relieving (and / or measuring) an amount of gas vented from the calibration apparatus 100.Docket No. E0001190 WO
[0036] As such, the calibration apparatus having the calibration gas delivery system 110 can be designed or otherwise configured to deliver a known amount and concentration of calibration gas to the AMC measurement equipment when docked on the load port of the AMC measurement equipment for calibrating the one or more analyzers of the AMC measurement equipment. Thus, in some embodiments, two or more of the analyzers can be calibrated simultaneously using the same calibration gas, e.g., to check the whole system operations of the AMC measurement equipment and / or calibrate multiple analyzers that analyze the same gas component / contaminant at the same time using the same standard of calibration gas. In some embodiments, the calibration apparatus 100 can be used to during at least one of the process steps to calibrate the AMC measurement equipment to ensure accuracy of the analyzers of the AMC measurement equipment for contamination detection, in which the calibration apparatus 100 can be transported to the AMC measurement equipment, e.g., via the OHT and equipment hook up 108, to allow automated and / or scheduled calibration. Additionally, the calibration apparatus 100 can be used to ensure one or more of the AMC measurement equipment are calibrated to the same standard for consistency of measurement. For example, in an embodiment the calibration apparatus 100 can be transported to multiple AMC measurement equipment, e.g., via the OHT and equipment hookup 108 or manually transported.
[0037] FIG. 2 is a schematic illustration of a calibration apparatus for calibrating an AMC measurement equipment, according to an embodiment, that can have any of the same or similar features as the calibration apparatus 100 of FIG. 1, in which the same or similar features are not illustrated herein to avoid obscuring understanding of the embodiment. Calibration apparatus 200 includes shell 202 having a bottom wall 204. The calibration apparatus 200 further includes a calibration gas delivery system 210.
[0038] Calibration apparatus 200 is a configured to contain the calibration gas delivery system 210 within the shell 202, in which the calibration gas delivery system 210 is connected to ports 212, 214, 216 along the shell of the calibration apparatus 200. The shell 202 defines an internal space or volume for receiving the calibration gas delivery system 210. The shell 202 can define the internal space by way of top, bottom, side, and back walls with an open front side, which can be enclosed by a door or wall, to allow the insertion or removal of the calibration gas delivery system 210 and / or components thereof. In some embodiments, the calibration apparatus 200 can include the shell of a FOUP or FOSB or MAC or similar reticle container.
[0039] Bottom wall 204 is configured to connect to a load port of the AMC measurement equipment. In some embodiments, the bottom wall 204 can include one or more purge portsDocket No. E0001190 WOand / or gas outlet ports 220 provided on the shell 202 and through the bottom wall 204 for providing fluid communication with the load port of the AMC measurement equipment. Bottom wall 204 can be configured to facilitate handling of the substrate container and can include interfaces, such as grommets, a valve such as a check valve, various sealing members, coupling elements, or the like for connecting the calibration apparatus 200 to the load port of the AMC measurement equipment. In some embodiments, the bottom wall 204 can be connected to a bottom plate 206, in which the bottom plate 206 is configured to interface with various conveyors or other devices so that the calibration apparatus can be moved around the processing facility and / or connecting to the load port of the AMC measurement equipment, e.g., to the ports of the load port to form a fluid communication between the calibration apparatus 200 and the AMC measurement equipment. In an embodiment, the bottom plate 206 can be a conveyor plate of the calibration apparatus 200 that is fixed with bottom wall 204, for example, by welding, bonding, connectors, fasteners, etc., in which the purge ports of the calibration apparatus 100 arc connected to ports in the bottom plate 206.
[0040] In some embodiments, the bottom wall 204 can include one to four purge ports and / or gas outlet ports 220 for creating a calibration apparatus / AMC measurement equipment interface with the corresponding ports in the load port of the AMC measurement equipment. In some embodiments, one or more of the ports 220 can be configured as gas outlet ports 220 for delivering the calibration gas to the AMC measurement equipment. In some embodiments, the purge ports 220 can be used to deliver purge gas, such as nitrogen, clean dry air, or ultra clean dry air, from the AMC measurement equipment to maintain the pressure in the calibration apparatus 100, e.g., at 1 ATM.
[0041] The calibration gas delivery system 210 is configured to deliver calibration gas to the AMC measurement equipment for calibration of one or more analyzers, and in some embodiments, two or more analyzers, using a known calibration gas concentration. The calibration gas can include, but not limited to, one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O). The concentrations of the one or more gases can be selected from one or more of the following concentrations: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the SO2 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1Docket No. E0001190 WOto 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
[0042] In some embodiments, the calibration gas delivery system 210 can include one or more components, such as, but not limited to, microprocessors), one or more flow control valves, a pressure regulator, a power supply, a power supply port 216 (and / or charging and / or control port) provided on the shell 202 of the calibration apparatus 200, a calibration gas inlet port 212 provided on the shell 202 of the calibration apparatus 200, a calibration gas outlet port 220 connected to the bottom of the shell 202 having the bottom wall 204, a dilution gas delivery system, a dilution gas inlet port 214 provided on the shell 202 of the calibration apparatus 200, and a vent 218 provided on the shell 202 of the calibration apparatus 200 for venting excess gas in the internal space of the calibration apparatus 200.
[0043] In some embodiments, the calibration gas delivery system 210 can be secured in the internal space of the shell 202. For example, the calibration gas delivery system 210 can be installed on a bracket or rack that is secured to an internal structure in the internal space of the shell 202, e.g., supports or walls or on the bottom wall. In other embodiments, the calibration gas delivery system 210 can be secured to one or more base plates that are configured to be received in the substrate supports or shelves that are, e.g. provided in the FOUP, or secured to a support structure connectable to the shell of the FOUP to allow insertion and securement of one or more of the components of the calibration gas delivery system 210. In some embodiments, the calibration gas delivery system 210 can be secured to the bottom wall of the shell 202.
[0044] The calibration gas delivery system 210 is configured to deliver the calibration gas to the AMC measurement equipment via the calibration gas outlet port 220 provided on the shell 202 and through the bottom wall 204. In some embodiments, one or more flow control or metering valve(s) 230 are connected to the calibration gas inlet port 212 for receiving the calibration gas, e.g., from an external cannister having a calibration gas to control a known amount and concentration of the calibration gas to the AMC measurement equipment. In some embodiments, the calibration gas inlet port 212 can include valves, such as, ball valves or needle valves, for regulating the flow of the calibration gas to the flow control or metering valve 230. The calibration gas then flows through the calibration gas outlet port 220 through the bottom of the shell 202 having the bottom wall 204 for delivering the calibration gas to the AMC measurement equipment via the load port. In other words, the AMC measurementDocket No. E0001190 WOequipment is configured to withdraw the calibration gas from the calibration gas delivery system 210 through the calibration gas outlet port 220 through the bottom of the shell 202 having the bottom wall 204, e.g., through the grommet(s), and the load port of the AMC measurement equipment. As such, one or more of the analyzers of the AMC measurement equipment can be calibrated to a known and reproducible quantity and concentration of calibration gas. In some embodiments, the one or more flow control or metering valves, in lieu of or in addition to the flow control or metering valves 230, can be connected to the calibration gas outlet port 220 for delivering or regulating (and measuring) delivery of the calibration gas to the AMC measurement equipment. In some embodiments, the calibration gas can be delivered to the AMC measurement equipment at a rate between 0.05 to 50 standard liters per minute (SLPM), and in some embodiments, a rate between 0.05 to 10 SLPM, and in some embodiments, a rate between 0.05 to 1 SLPM.
[0045] The calibration gas delivery system 210 of this embodiment includes a dilution gas delivery system 232 for receiving a dilution gas, such as, nitrogen, clean dry air, or ultra clean dry air. The dilution gas delivery system can include one or more flow control or metering valves connected to the dilution gas inlet port 214 for receiving dilution gas. The dilution gas delivery system 232 is connected to the calibration gas delivery system 210 for diluting the calibration gas for delivery of the known concentration and amount of calibration gas to the AMC measurement equipment such that the calibration gas and the dilution gas are delivered through the calibration gas outlet port 220 to the AMC measurement equipment.
[0046] The calibration gas delivery system 210 can further include a power source 234, such as, a battery pack or pluggable connections to shore power, for providing power to the calibration gas delivery system 210. In some embodiments, the power can be supplied to the components of the calibration gas delivery system 210, such as, but not limited to, the flow control or metering valves, vent valve, sensors, displays, or the like. The power source is connected to the power source port 216 for providing the power and / or control signals and / or for recharging the battery pack.
[0047] The calibration gas delivery system 210 can also include a venting system that includes the vent 218 provided on the shell 202 of the calibration apparatus 200 and a check valve for venting excess gas in the internal space of the calibration apparatus 200, e.g., a one-way check valve and / or a flow control or metering valve to regulate a pressure inside the calibration apparatus 200 to prevent or reduce pressure build up, i.e., pressurization. For example, in some embodiments, in order to get an accurate calibration of the one or more analyzers of the AMC measurement equipment, which uses a vacuum pump, the pressure in the calibration apparatusDocket No. E0001190 WO200 must remain at atmospheric or 1 ATM to not force gas into the AMC measurement equipment. As such, the vent 218, which can be connected to a one-way check valve and / or a flow control or metering valve, is provided for relieving (and / or measuring) an amount of gas vented from the calibration apparatus 200.
[0048] As such, the calibration apparatus having the calibration gas delivery system 210 can be designed or otherwise configured to deliver a known amount and concentration of calibration gas to the AMC measurement equipment when docked on the load port of the AMC measurement equipment for calibrating the one or more analyzers of the AMC measurement equipment. Thus, in some embodiments, two or more of the analyzers can be calibrated simultaneously using the same calibration gas, e.g., to check the whole system operations of the AMC measurement equipment and / or calibrate multiple analyzers that analyze the same gas component / contaminant at the same time using the same standard of calibration gas. In some embodiments, the calibration apparatus 200 can be used to during at least one of the process steps to calibrate the AMC measurement equipment to ensure accuracy of the analyzers of the AMC measurement equipment for contamination detection, in which the calibration apparatus 200 can be transported to the AMC measurement equipment to allow automated and / or scheduled calibration(s). Additionally, the calibration apparatus 200 can be used to ensure one or more of the AMC measurement equipment are calibrated to the same standard for consistency of measurement. For example, in an embodiment the calibration apparatus 200 can be transported to multiple AMC measurement equipment.
[0049] FIG. 3 is a schematic illustration of a calibration apparatus for calibrating an AMC measurement equipment, according to an embodiment, that can have any of the same or similar features as the calibration apparatus 100 of FIG. 1 and / or the calibration apparatus 200 of FIG.2, in which the same or similar features are not illustrated herein to avoid obscuring understanding of the embodiment. Calibration apparatus 300 includes shell 302 having a bottom wall 304. The calibration apparatus 300 further includes a calibration gas delivery system 310. However, in this embodiment, the calibration gas delivery system 310 is in the form of a refillable gas bladder 315. It is understood that while a refillable gas bladder 315 is discussed herein, such disclosure is not intended to be limiting. Rather, it is understood that other storage vessels of calibration gas can also be used according to the disclosure, such as, canister(s), bottle(s), or the like.
[0050] Calibration apparatus 300 is a configured to contain the calibration gas delivery system 310 within the shell 302, in which the calibration gas delivery system 310 is connected to port 312, along the shell of the calibration apparatus 300. The shell 302 defines an internal space orDocket No. E0001190 WOvolume for receiving the calibration gas delivery system 310. The shell 302 can define the internal space by way of top, bottom, side, and back walls with an open front side, which can be enclosed by a door or wall, to allow the insertion or removal of the calibration gas delivery system 310 and / or components thereof. In some embodiments, the calibration apparatus 300 can include the shell of a FOUP or FOSB or MAC or similar reticle container.
[0051] Bottom wall 304 is configured to connect to a load port of the AMC measurement equipment. In some embodiments, the bottom wall 304 can include one or more purge ports and / or gas outlet ports 320 provided on the shell 302 and through the bottom wall 304 for providing fluid communication with the load port of the AMC measurement equipment. Bottom wall 304 can be configured to facilitate handling of the substrate container and can include interfaces, such as grommets, a valve such as a check valve, various sealing members, coupling elements, or the like for connecting the calibration apparatus 300 to the load port of the AMC measurement equipment. In some embodiments, the bottom wall 304 can be connected to a bottom plate 306, in which the bottom plate 306 is configured to interface with various conveyors or other devices so that the calibration apparatus can be moved around the processing facility and / or connecting to the load port of the AMC measurement equipment, e.g., to the ports of the load port to form a fluid communication between the calibration apparatus 300 and the AMC measurement equipment. In an embodiment, the bottom plate 306 can be a conveyor plate of the calibration apparatus 300 that is fixed with bottom wall 304, for example, by welding, bonding, connectors, fasteners, etc., in which the purge ports of the calibration apparatus 100 are connected to ports in the bottom plate 306.
[0052] In some embodiments, the bottom wall 304 can include one to four purge ports and / or gas outlet ports 320 for creating a calibration apparatus / AMC measurement equipment interface with the corresponding ports in the load port of the AMC measurement equipment. In some embodiments, one or more of the ports 320 can be configured as gas outlet ports 320 for delivering the calibration gas to the AMC measurement equipment. In some embodiments, the purge ports 320 can be used to deliver purge gas, such as nitrogen, clean dry air, or ultra clean dry air, from the AMC measurement equipment to maintain the pressure in the calibration apparatus 300, e.g., at 1 ATM.
[0053] The calibration gas delivery system 310 is configured to deliver calibration gas to the AMC measurement equipment for calibration of one or more analyzers, and in some embodiments, two or more analyzers, using a known calibration gas concentration. The calibration gas can include, but not limited to, one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfurDocket No. E0001190 WOdioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O). The concentrations of the one or more gases can be selected from one or more of the following concentrations: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the SO2 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1 to 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
[0054] In some embodiments, the calibration gas delivery system 310 can include one or more components, such as, but not limited to, microprocessors), one or more flow control valves, a pressure regulator, a calibration gas inlet port 312 provided on the shell 302 of the calibration apparatus 300, a calibration gas outlet port 320 connected to the bottom of the shell 302 having the bottom wall 304, and a vent 318 provided on the shell 302 of the calibration apparatus 300 for venting excess gas in the internal space of the calibration apparatus 300, e.g., to prevent or reduce pressure build up in the calibration apparatus 300.
[0055] In some embodiments, the calibration gas delivery system 310 can be secured in the internal space of the shell 302. For example, the calibration gas delivery system 310 can be installed on a bracket or rack that is secured to an internal structure in the internal space of the shell 302, e.g., supports or walls or on the bottom wall, for securing the bladder 315. In other embodiments, the calibration gas delivery system 310 can be secured to one or more base plates that are configured to be received in the substrate supports or shelves that are, e.g. provided in the FOUP, or secured to a support structure connectable to the shell of the FOUP to allow insertion and securement of one or more of the components of the calibration gas delivery system 310.
[0056] The calibration gas delivery system 310 is configured to deliver the calibration gas to the AMC measurement equipment via the calibration gas outlet port 320 provided on the shell 302 and through the bottom wall 304. In this embodiment, the calibration gas delivery system 310 includes a refillable gas bladder having the calibration gas. In some embodiments, one or more flow control or metering valve(s) can be connected to the calibration gas inlet port 312 for refilling the bladder 315 with the calibration gas, e.g., from an external cannister. In some embodiments, the calibration gas inlet port 312 can include valves, such as, ball valves orDocket No. E0001190 WOneedle valves, for regulating the flow of the calibration gas to the refillable gas bladder 315. The calibration gas then flows through the calibration gas outlet port 320 through the bottom of the shell 302 having the bottom wall 304 for delivering the calibration gas to the AMC measurement equipment via the load port. In other words, the AMC measurement equipment is configured to withdraw the calibration gas from the refillable gas bladder 315 through the calibration gas outlet port 320 through the bottom of the shell 302 having the bottom wall 304, e.g., through the grommet(s), and the load port of the AMC measurement equipment. As such, one or more of the analyzers of the AMC measurement equipment can be calibrated to a known and reproducible quantity and concentration of calibration gas. In some embodiments, the one or more flow control or metering valves can be connected to the calibration gas outlet port 320 for delivering or regulating (and measuring) delivery of the calibration gas to the AMC measurement equipment. In some embodiments, the calibration gas can be delivered to the AMC measurement equipment at a rate between 0.05 to 50 standard liters per minute (SLPM), and in some embodiments, a rate between 0.05 to 10 SLPM, and in some embodiments, a rate between 0.05 to 1 SLPM.
[0057] The calibration gas delivery system 310 can also include a venting system that includes the vent 318 provided on the shell 302 of the calibration apparatus 300 and a check valve for venting excess gas in the internal space of the calibration apparatus 300, e.g., a one-way check valve and / or a flow control or metering valve, to regulate a pressure inside the calibration apparatus 300 to prevent or reduce pressure build up, i.e., pressurization. For example, in some embodiments, in order to get an accurate calibration of the one or more analyzers of the AMC measurement equipment, which uses a vacuum pump, the pressure in the calibration apparatus 300 must remain at atmospheric or 1 ATM to not force gas into the AMC measurement equipment. As such, the vent 318, which can be connected to a one-way check valve and / or a flow control or metering valve, is provided for relieving (and / or measuring) an amount of gas vented from the calibration apparatus 300.
[0058] As such, the calibration apparatus having the calibration gas delivery system 310 can be designed or otherwise configured to deliver a known amount and concentration of calibration gas to the AMC measurement equipment when docked on the load port of the AMC measurement equipment for calibrating the one or more analyzers of the AMC measurement equipment. Thus, in some embodiments, two or more of the analyzers can be calibrated simultaneously using the same calibration gas, e.g., to check the whole system operations of the AMC measurement equipment and / or calibrate multiple analyzers that analyze the same gas component / contaminant at the same time using the same standard of calibration gas. InDocket No. E0001190 WOsome embodiments, the calibration apparatus 300 can be used to during at least one of the process steps to calibrate the AMC measurement equipment to ensure accuracy of the analyzers of the AMC measurement equipment for contamination detection, in which the calibration apparatus 300 can be transported to the AMC measurement equipment to allow automated and / or scheduled calibration(s). Additionally, the calibration apparatus 300 can be used to ensure one or more of the AMC measurement equipment are calibrated to the same standard for consistency of measurement. For example, in an embodiment the calibration apparatus 300 can be transported to multiple AMC measurement equipment.
[0059] FIG. 4 is a schematic view of a calibration apparatus 400 interacting with an AMC measurement equipment 440, according to an embodiment. The calibration apparatus 400 is docked on a load port 442 adjacent the AMC measurement equipment 440. It is understood that while a single load port is discussed herein, the AMC measurement equipment 440 can include one or more load ports, in which one or a corresponding amount of calibration apparatuses can be docked on the one or more load ports. The calibration apparatus 400 may be any of the calibration apparatuses discussed herein, e.g., calibration apparatus 100 of FIG.1, calibration apparatus 200 of FIG. 2, or calibration apparatus 300 of FIG. 3.
[0060] In use, the calibration apparatus 400 can dock on the load port 442 to form a calibration apparatus / AMC measurement equipment interface in which one or more purge ports and / or outlet ports of the calibration apparatus 400 are fluidly connected to ports in the load port of the AMC measurement equipment. The AMC measurement equipment 440 includes a vacuum pump for retrieving a sample of the calibration gas, either continuously or intermittently, from the calibration gas outlet port of the calibration apparatus 400 through the bottom wall of the shell of the calibration apparatus, e.g., at 6 LPM. The AMC measurement equipment 440 is then configured to analyze the sample calibration gas for one or more contaminants, including, but not limited to, ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HO), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O). As such, if the analyzer fails to determine the correct concentration of the one or more contaminants in the sample calibration gas, the analyzer can be calibrated to the correct value, e.g., to the known concentration value in the calibration gas, to ensure accuracy of the AMC measurement equipment in determining contamination in the substrate carrier(s) or substrate(s) during substrate processing.
[0061] In some embodiments, the AMC measurement equipment can include pumps for delivery purge gas (e.g. nitrogen, extra clean dry air, etc.) through the load port to the ports ofDocket No. E0001190 WOthe calibration apparatus 400 to make up gas removed from the calibration apparatus by the AMC measurement equipment, e.g., to maintain atmospheric pressure within the calibration apparatus 400.
[0062] In some embodiments, the AMC measurement equipment can include a controller that can be configured to adjust the purge flow parameters (e.g., gas flow rate) and / or sampling rates (e.g., sampling of the calibration gas) to achieve optimized environmental response, e.g., maintain atmospheric pressure within the calibration apparatus 400.
[0063] FIG. 5 shows a flowchart of a method 500 for calibrating an airborne molecular contamination (AMC) measurement equipment, according to an embodiment. For example, the method 500 can be used to calibrate the AMC measurement equipment using a calibration apparatus, such as, calibration apparatus 100 of FIG. 1, calibration apparatus 200 of FIG. 2, or calibration apparatus 300 of FIG. 3, docked on a load port of the AMC measurement equipment, such as AMC measurement equipment 440 of FIG. 4.
[0064] The operational or processing flow chart 500 can include one or more operations, actions, or functions depicted by one or more blocks 510, 520, 530. Although illustrated as discrete blocks, various blocks can be divided into additional blocks, combined into fewer blocks, or eliminated, depending on the desired implementation. As a non-limiting example, the blocks of the flow chart 500 can be performed by e.g., any suitable controller having e.g., a processor and / or memory.
[0065] At 510 “Connect calibration apparatus to AMC,’’ a calibration apparatus is connected to or docked on the load port of the AMC measurement equipment. The calibration apparatus includes a shell and a calibration gas delivery system. The shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment. The calibration gas delivery system is disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment, in which the calibration gas outlet port is provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment. In some embodiments, one or more flow control or metering valve(s) are connected to a calibration gas inlet port is provided on the shell of the calibration apparatus for receiving the calibration gas, e.g., from an external cannister having a calibration gas to control a known amount and concentration of the calibration gas to the AMC measurement equipment. In other embodiments, the calibration gas delivery system can include canister(s), bottle(s), or a refillable gas bladder disposed within the shell, in which the canister(s), bottle(s),Docket No. E0001190 WOor refillable gas bladder includes the calibration gas for delivery to the AMC measurement equipment.
[0066] In some embodiments, the bottom wall is configured to connect to a load port of the AMC measurement equipment. The bottom wall can include one or more purge ports and / or gas outlet ports provided on the shell and through the bottom wall for providing fluid communication with corresponding ports in the load port of the AMC measurement equipment. The bottom wall can be configured to facilitate handling of the substrate container and can include interfaces, such as grommets, a valve such as a check valve, various sealing members, coupling elements, or the like for connecting the calibration apparatus to the load port of the AMC measurement equipment. In some embodiments, the bottom wall can be connected to a bottom plate, in which the bottom plate is configured to interface with various conveyors or other devices so that the calibration apparatus can be moved around the processing facility and / or for connecting to the load port of the AMC measurement equipment, e.g., to the ports of the load port to form a fluid communication between the calibration apparatus and the AMC measurement equipment. In an embodiment, the bottom plate can be a conveyor plate of the calibration apparatus that is fixed with bottom wall, for example, by welding, bonding, connectors, fasteners, etc., in which the purge ports of the calibration apparatus are connected to ports in the bottom plate.
[0067] The method 500 then proceeds to 520.
[0068] At 520 “Deliver calibration gas,” the calibration gas is delivered to the AMC measurement equipment through the bottom wall of the shell of the calibration apparatus. In an embodiment, the calibration gas delivery system is used to deliver calibration gas to the AMC measurement equipment for calibration of one or more analyzers, and in some embodiments, two or more analyzers, using a known calibration gas concentration. In some embodiments, one or more flow control or metering valve(s) are connected to a calibration gas inlet port on the calibration apparatus for receiving the calibration gas, e.g., from an external cannister having a calibration gas to control a known amount and concentration of the calibration gas to the AMC measurement equipment. The calibration gas then flows through the calibration gas outlet port on the bottom wall of the shell for delivering the calibration gas to the AMC measurement equipment via the load port. In other words, the AMC measurement equipment is configured to withdraw the calibration gas from the calibration gas delivery system through the calibration gas outlet port through the bottom of the shell having the bottom wall and the load port of the AMC measurement equipment. As such, one or more of the analyzers of the AMC measurement equipment can be calibrated to a known and reproducibleDocket No. E0001190 WOquantity and concentration of calibration gas. In some embodiments, the calibration gas can be delivered to the AMC measurement equipment at a rate between 0.05 to 50 standard liters per minute (SLPM), and in some embodiments, a rate between 0.05 to 10 SLPM, and in some embodiments, 0.05 to 1 SLPM.
[0069] In some embodiments, the calibration gas can be diluted with a dilution gas, such as, nitrogen, clean dry air, or ultra clean dry air, using a dilution gas delivery system. The dilution gas delivery system can include one or more flow control or metering valves connected to a dilution gas inlet port on the calibration apparatus for receiving the dilution gas in which the dilution gas delivery system is connected to the calibration gas delivery system.
[0070] The calibration gas can include, but not limited to, one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O). The concentrations of the one or more gases can be selected from one or more of the following concentrations: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the S 02 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1 to 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
[0071] In some embodiments, the method can further include regulating a pressure inside the calibration apparatus via a venting system that vents gas pressure to prevent pressurizing the calibration apparatus. The venting system includes a vent provided on the shell of the calibration apparatus and a check valve for venting excess gas in the internal space of the calibration apparatus, e.g., a one-way check valve and / or a flow control or metering valve configured to regulate a pressure inside the calibration apparatus to prevent or reduce pressure build up, i.e., pressurization. For example, in some embodiments, in order to get an accurate calibration of the one or more analyzers of the AMC measurement equipment, which uses a vacuum pump, the pressure in the calibration apparatus must remain at atmospheric or 1 ATM to not force gas into the AMC measurement equipment. As such, the vent, which can be connected to a one-way check valve and / or a flow control or metering valve, is provided for relieving (and / or measuring) an amount of gas vented from the calibration apparatus.Docket No. E0001190 WO
[0072] Then the method 500 proceeds to 530.
[0073] At 530 “Calibrate analyzer,” one or more analyzers of the AMC measurement equipment can be calibrated to one or more concentrations of gases in the calibration gas. In an embodiment, after the sample gas is withdrawn from the calibration apparatus, the AMC measurement equipment can be configured to analyze the calibration gas for one or more gas components (or contaminants) to determine the accuracy of the analyzer. For example, if the NH3 concentration in the gas sample is 10 ppb, one or more of an IMS analyzer and the CRDS analyzer can be used to detect the concentration of the NH3. If the reading is incorrect, one or more of an IMS analyzer and the CRDS analyzer can be adjusted to the correct value of the concentration from the sample calibration gas.
[0074] As such, one or more analyzers of the AMC measurement equipment can be calibrated using the calibration apparatus having the calibration gas delivery system by receiving a known amount and concentration of calibration gas when the calibration apparatus is docked on the load port of the AMC measurement equipment. Thus, in some embodiments, two or more of the analyzers can be calibrated simultaneously using the same calibration gas, e.g., to check the whole system operations of the AMC measurement equipment and / or calibrate multiple analyzers that analyze the same gas component / contaminant at the same time using the same standard of calibration gas. In some embodiments, the calibration of the AMC measurement equipment can be one of the process steps to ensure accuracy of the analyzers of the AMC measurement equipment for contamination detection. In some embodiments, the calibration apparatus can be transported to the AMC measurement equipment, e.g., via the OHT and equipment hook up, to allow automated and / or scheduled calibration. Additionally, the calibration apparatus can be used to ensure one or more of the AMC measurement equipment are calibrated to the same standard for consistency of measurement. For example, in an embodiment the calibration apparatus can be transported to multiple AMC measurement equipment, e.g., via the OHT and equipment hookup or manually transported.
[0075] Aspects:
[0076] It is understood that any of aspects 1-15 can be combined with any of aspects 16-19.
[0077] Aspect 1. A calibration apparatus for calibrating an airborne molecular contamination (AMC) measurement equipment, the calibration apparatus comprising: a shell; and a calibration gas delivery system, wherein the shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment, wherein the calibration gas delivery system is disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment, wherein the calibration gasDocket No. E0001190 WOoutlet port is provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment.
[0078] Aspect 2. The calibration apparatus of Aspect 1 , wherein the calibration apparatus further comprises a calibration gas inlet port provided on the shell of the calibration apparatus and connected to the calibration gas delivery system for receiving the calibration gas.
[0079] Aspect 3. The calibration apparatus of any of Aspects 1-2, wherein the calibration apparatus further comprises a dilution gas delivery system for receiving a dilution gas, wherein a dilution gas inlet port connected to the dilution gas delivery system is connected to the shell of the calibration apparatus, and wherein the dilution gas delivery system is connected to the calibration gas outlet port.
[0080] Aspect 4. The calibration apparatus of any of Aspects 1-3, wherein the calibration apparatus further comprises a power source, and the shell further comprises a power supply port connected to the power source.
[0081] Aspect 5. The calibration apparatus of Aspect 4, wherein the power source is a battery pack.
[0082] Aspect 6. The calibration apparatus of any of Aspects 1-5, wherein the calibration gas delivery system is configured to deliver the calibration gas which is one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfur dioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O).
[0083] Aspect 7. The calibration apparatus of Aspect 6, wherein the one or more gases are selected at one or more concentrations selected from the group consisting of: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the SO2 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1 to 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
[0084] Aspect 8. The calibration apparatus of any one of Aspects 1-7, further comprising one or more flow control valves for regulating the calibration gas to the calibration gas delivery system and / or for regulating delivery of the calibration gas.Docket No. E0001190 WO
[0085] Aspect 9. The calibration apparatus of Aspect 8. wherein the calibration gas delivery system is configured to regulate gas flow of the calibration gas between 0.05 to 1 standard liters per minute.
[0086] Aspect 10. The calibration apparatus of any one of Aspects 1-9, wherein the calibration gas delivery system includes a bracket or rack for mounting the calibration gas delivery system to an internal structure in the shell.
[0087] Aspect 11. The calibration apparatus of any one of Aspects 1-10, further comprising a venting system for regulating a pressure inside the shell, wherein the venting system comprises a flow meter to determine an amount of gas vented from the calibration apparatus without pressurizing the calibration apparatus.
[0088] Aspect 12. The calibration apparatus of Aspect 11, wherein the venting system comprises a check valve for venting an amount of gas from the calibration apparatus without pressurizing the calibration apparatus.
[0089] Aspect 13. The calibration apparatus of any one of Aspects 1-12, wherein the calibration gas delivery system comprises a refillable gas bladder including the calibration gas.
[0090] Aspect 14. The calibration apparatus of Aspect 13, further comprising one or more flow control valves for regulating the calibration gas to the refillable gas bladder and / or for regulating delivery of the calibration gas from the refillable gas bladder.
[0091] Aspect 15. The calibration apparatus of any one of Aspects 1-14, wherein the shell is in a form of a front opening unified pod.
[0092] Aspect 16. A method of calibrating an airborne molecular contamination (AMC) measurement equipment comprising the steps of: connecting a calibration apparatus to the AMC measurement equipment, the calibration apparatus comprising a shell, wherein the shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment, wherein the calibration apparatus comprises a calibration gas delivery system disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment, the calibration gas outlet port being provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment; delivering the calibration gas to the AMC measurement equipment through the bottom wall of the shell of the calibration apparatus; and calibrating one or more analyzers of the AMC measurement equipment to one or more concentrations of gases in the calibration gas.Docket No. E0001190 WO
[0093] Aspect 17. The method of Aspect 16, wherein the delivering the calibration gas to the AMC measurement equipment includes delivering the calibration gas by connecting a container having the calibration gas to a calibration gas inlet port provided on the shell and connected to the calibration gas delivery system.
[0094] Aspect 18. The method of any one of Aspects 16-17, wherein the delivering the calibration gas to the AMC measurement equipment includes delivering the calibration gas via a refillable bladder having a calibration gas that is disposed within the shell of the calibration apparatus.
[0095] Aspect 19. The method of any one of Aspects 16-18, further comprising regulating a pressure inside the calibration apparatus via a venting system that vents gas pressure to prevent pressurizing the calibration apparatus.
[0096] The examples disclosed in this application are to be considered in all respects as illustrative and not limitative. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes which come within the meaning and range of equivalency of the claims are intended to be embraced therein.
Claims
Docket No. E0001190 WOCLAIMS1. A calibration apparatus for calibrating an airborne molecular contamination (AMC) measurement equipment, the calibration apparatus comprising:a shell; anda calibration gas delivery system,wherein the shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment,wherein the calibration gas delivery system is disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment,wherein the calibration gas outlet port is provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment.
2. The calibration apparatus of claim 1, wherein the calibration apparatus further comprises a calibration gas inlet port provided on the shell of the calibration apparatus and connected to the calibration gas delivery system for receiving the calibration gas.
3. The calibration apparatus of claim 1, wherein the calibration apparatus further comprises a dilution gas delivery system for receiving a dilution gas, wherein a dilution gas inlet port connected to the dilution gas delivery system is connected to the shell of the calibration apparatus, and wherein the dilution gas delivery system is connected to the calibration gas outlet port.
4. The calibration apparatus of claim 1, wherein the calibration apparatus further comprises a power source, and the shell further comprises a power supply port connected to the power source.
5. The calibration apparatus of claim 4, wherein the power source is a battery pack.
6. The calibration apparatus of claim 1, wherein the calibration gas delivery system is configured to deliver the calibration gas which is one or more gases selected from the group consisting of: ammonia (NH3), total acids, total volatile organic compounds (VOCs), sulfurDocket No. E0001190 WOdioxide (SO2), total sulfur, hydrogen fluoride (HF), hydrochloric acid (HC1), total amines, nitrous gas (NOx), arsine (AsH3), phosphine (PH3), and water (H2O).
7. The calibration apparatus of claim 6, wherein the one or more gases are selected at one or more concentrations selected from the group consisting of: the NH3 at a concentration between 0.2 to 100 ppb, the total acids at a concentration between 0.2 to 100 ppb, the total VOCs at a concentration between 20 ppb to 200 ppm, the SO2 at a concentration between 0.5 to 100 ppb, the total sulfur at a concentration between 0.4 to 100 ppb, the HF at a concentration between 0.1 to 100 ppb, the HC1 at a concentration between 0.1 to 100 ppb, the total amines at a concentration between 0.2 to 100 ppb, the NOx at a concentration between 0.4 to 100 ppb, the arsine at a concentration between 18 and 200 ppb, the phosphine at a concentration between 110 and 120 ppb, and the H20 at a concentration of less than 5 % relative humidity.
8. The calibration apparatus of claim 1, further comprising one or more flow control valves for regulating the calibration gas to the calibration gas delivery system and / or for regulating delivery of the calibration gas.
9. The calibration apparatus of claim 8, wherein the calibration gas delivery system is configured to regulate gas flow of the calibration gas between 0.05 to 1 standard liters per minute.
10. The calibration apparatus of claim 1, wherein the calibration gas delivery system includes a bracket or rack for mounting the calibration gas delivery system to an internal structure in the shell.
11. The calibration apparatus of claim 1 , further comprising a venting system for regulating a pressure inside the shell, wherein the venting system comprises a flow meter to determine an amount of gas vented from the calibration apparatus without pressurizing the calibration apparatus.
12. The calibration apparatus of claim 11, wherein the venting system comprises a check valve for venting an amount of gas from the calibration apparatus without pressurizing the calibration apparatus.Docket No. E0001190 WO13. The calibration apparatus of claim 1, wherein the calibration gas delivery system comprises a refillable gas bladder including the calibration gas.
14. The calibration apparatus of claim 13, further comprising one or more flow control valves for regulating the calibration gas to the refillable gas bladder and / or for regulating delivery of the calibration gas from the refillable gas bladder.
15. The calibration apparatus of claim 1 , wherein the shell is in a form of a front opening unified pod.
16. A method of calibrating an airborne molecular contamination (AMC) measurement equipment comprising the steps of:connecting a calibration apparatus to the AMC measurement equipment, the calibration apparatus comprising a shell, wherein the shell includes a bottom wall configured to connect to a load port of the AMC measurement equipment, wherein the calibration apparatus comprises a calibration gas delivery system disposed within the shell and connected to a calibration gas outlet port for delivering the calibration gas to the AMC measurement equipment, the calibration gas outlet port being provided on the shell of the calibration apparatus and through the bottom wall such that the calibration apparatus is configured to deliver the calibration gas to the AMC measurement equipment;delivering the calibration gas to the AMC measurement equipment through the bottom wall of the shell of the calibration apparatus; andcalibrating one or more analyzers of the AMC measurement equipment to one or more concentrations of gases in the calibration gas.
17. The method of claim 16, wherein the delivering the calibration gas to the AMC measurement equipment includes delivering the calibration gas by connecting a container having the calibration gas to a calibration gas inlet port provided on the shell and connected to the calibration gas delivery system.
18. The method of claim 16, wherein the delivering the calibration gas to the AMC measurement equipment includes delivering the calibration gas via a refillable bladder having a calibration gas that is disposed within the shell of the calibration apparatus.Docket No. E0001190 WO19. The method of claim 16, further comprising regulating a pressure inside the calibration apparatus via a venting system that vents gas pressure to prevent pressurizing the calibration apparatus.