Cleaning module and susceptor cleaning system comprising same

Abstract

Disclosed are a cleaning module and a susceptor cleaning system comprising same. The cleaning module according to the present invention comprises: a frame lower support unit; a stage disposed on the frame lower support unit to move; moving operation units disposed on the stage and fixing a susceptor; a frame module mounting unit connected to the frame lower support unit and disposed above the stage; and a cleaning unit disposed below the frame module mounting unit and for separating a crucible from the susceptor.

Description

Cleaning module and susceptor cleaning system including the same

[0001] The present invention relates to a cleaning module and a susceptor cleaning system including the same.

[0002] Wafers used in the semiconductor or solar power industries are generally manufactured using the Czochralski method. In the Czochralski method, a crucible is placed inside a susceptor, a molten raw material containing silicon and / or germanium is placed inside the crucible, and a seed crystal rod in contact with the molten raw material is slowly pulled up to produce a single crystal from the molten raw material.

[0003] After a single crystal is manufactured, any raw material remaining inside the crucible solidifies and adheres to the inner surface of the crucible. Since using a quartz crucible and susceptor with raw material attached inside can contaminate the single crystal being manufactured, it is necessary to remove the quartz crucible with the attached raw material from the susceptor.

[0004] The present invention aims to provide a cleaning module that automatically cleans a susceptor and a susceptor cleaning system including the same.

[0005] In addition, the present invention aims to provide a cleaning module for removing a crucible and raw materials from a susceptor and a susceptor cleaning system including the same.

[0006] The cleaning module of the present invention is characterized by comprising: a frame portion including a lower frame support and an upper frame support disposed above the lower frame support; a stage disposed between the lower frame support and the upper frame support and movable; a moving work portion disposed on the stage and fixing a susceptor; a frame module mounting portion disposed above the upper frame support; and a cleaning unit disposed below the frame module mounting portion and detaching a crucible from the susceptor.

[0007] The above moving work unit includes a plurality of rollers, and each of the plurality of rollers can move to press the susceptor.

[0008] It may further include a fragment collection unit disposed at the lower part of the stage to receive fragments of the crucible that escape from the susceptor.

[0009] It may further include a rail arranged to connect the lower support of the frame and the stage, and to move the stage relative to the lower support of the frame.

[0010] The above-mentioned moving work part can contact the susceptor and rotate the susceptor.

[0011] The above frame module mounting part can be raised and lowered so that the distance from the stage can change.

[0012] It may further include a rotary drive unit that is positioned on the frame module mounting portion, is connected to the cleaning unit, and rotates the cleaning unit.

[0013] The cleaning unit may include a hammer that strikes the crucible disposed on the inner surface of the susceptor.

[0014] The cleaning unit may include a hammer actuator connected to the hammer to move the hammer.

[0015] One end of the above hammer can be provided in a conical shape.

[0016] The cleaning unit may include a brush that removes the crucible from the susceptor by making surface contact with the inner side of the susceptor and adjusts the distance from the inner surface of the susceptor.

[0017] The cleaning unit may include a scraper that makes line contact with the inner surface of the susceptor to remove the crucible from the susceptor and whose distance from the inner surface of the susceptor is adjusted.

[0018] The scraper mentioned above can be provided in the form of a blade.

[0019] One side of the scraper can be provided with a curve.

[0020] The susceptor cleaning system of the present invention comprises: a transfer module that grasps and transports a susceptor placed in a loading section and inverts the susceptor in an up-and-down direction; a crushing module that crushes the crucible placed inside the susceptor by colliding with the susceptor on which the susceptor transported by the transfer module is placed; a cutting module disposed on one side of the crushing module that cuts the crucible placed inside the susceptor on which the susceptor transported by the transfer module is placed; and a cleaning module disposed on one side of the cutting module that removes the crucible placed inside the susceptor on which the susceptor transported by the transfer module is placed from the susceptor.

[0021] Each of the above transfer module, the above crushing module, the above cutting module, and the above cleaning module may include a stage on which the susceptor is placed; and a fragment collection unit disposed below the stage to receive the crucible that is separated from the susceptor.

[0022] The above transfer module may include: a transfer frame in contact with the ground; a transfer rail disposed on the transfer frame; and a transfer unit comprising a transfer gripping roller in contact with the susceptor, a transfer clamp in which the transfer gripping roller is disposed and rotates to invert and re-invert the susceptor, and a transfer lifting unit that moves the transfer clamp up and down.

[0023] The above transfer module can transfer the susceptor placed in the loading section by inverting it vertically to the crushing module, and transfer the susceptor, on which the crushing operation has been performed by the crushing module, by inverting it vertically again to the cutting module.

[0024] The above transfer module can transfer the susceptor from which the crucible has been removed in the above cleaning module to the above loading section.

[0025] According to the present invention, the susceptor can be cleaned automatically.

[0026] In addition, according to the present invention, the quartz crucible and remaining raw materials can be removed from the susceptor.

[0027] FIG. 1 is a perspective view of a susceptor cleaning system according to one embodiment of the present invention, viewed from a first point in time.

[0028] FIG. 2 is a perspective view of a susceptor cleaning system according to one embodiment of the present invention, viewed from a second viewpoint.

[0029] FIG. 3 is a cross-sectional view of a susceptor being cleaned by a susceptor cleaning system according to one embodiment of the present invention.

[0030] FIG. 4 is a perspective view of a transfer module and a crushing module according to one embodiment of the present invention.

[0031] FIG. 5 is a perspective view illustrating that a susceptor is inverted by a transfer module according to one embodiment of the present invention.

[0032] FIG. 6 is a perspective view illustrating a susceptor being seated on a crushing module by a transfer module according to an embodiment of the present invention.

[0033] FIG. 7 is a perspective view of a part of a transfer module according to one embodiment of the present invention.

[0034] FIG. 8 is a perspective view illustrating the movement of a susceptor by a crushing module according to one embodiment of the present invention.

[0035] FIG. 9 is a perspective view illustrating that a crucible placed inside a susceptor is crushed by a crushing module according to one embodiment of the present invention.

[0036] FIG. 10 is a perspective view illustrating a susceptor being seated on a cutting module by a transfer module according to an embodiment of the present invention.

[0037] FIG. 11 is a perspective view illustrating the movement of a susceptor by a cutting module according to one embodiment of the present invention.

[0038] FIG. 12 is a perspective view of a part of a cutting module according to one embodiment of the present invention.

[0039] FIG. 13 is a perspective view illustrating a susceptor being seated on a cleaning module by a transfer module according to an embodiment of the present invention.

[0040] FIG. 14 is a perspective view illustrating the movement of a susceptor by a cleaning module according to an embodiment of the present invention.

[0041] FIG. 15 is a perspective view of a part of a cleaning module according to one embodiment of the present invention.

[0042] FIG. 16 is a perspective view illustrating the movement of a cleaning module and a susceptor according to one embodiment of the present invention.

[0043] Hereinafter, a cleaning module according to the present invention and a susceptor cleaning system including the same will be described with reference to the attached drawings. In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation. Furthermore, the terms described below are defined considering their functions in the present invention, and these may vary depending on the intention or convention of the user or operator. Therefore, the definitions of these terms should be based on the content throughout this specification.

[0044] Furthermore, in this specification, when a part is described as being "connected (or joined)" to another part, this includes not only cases where they are "directly connected (or joined)" but also cases where they are "indirectly connected (or joined)" with other members interposed between them. In this specification, when a part is described as "including (or having) a certain component," this means that, unless specifically stated otherwise, it does not exclude other components but may additionally "include (or have)" other components.

[0045] Additionally, a “unit,” “module,” or “part” for a component as used herein performs at least one function or operation. Furthermore, a “unit,” “module,” or “part” may perform a function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of “units,” a plurality of “modules,” or a plurality of “parts,” excluding a “unit,” “module,” or “part” that must be performed on specific hardware or on at least one processor, may be integrated into at least one module. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0046] Furthermore, throughout this specification, the same reference numerals may refer to the same components. Even if the same or similar reference numerals are not mentioned or described in a specific drawing, they may be described based on other drawings. Additionally, even if a part is not indicated by a reference numeral in a specific drawing, that part may be described based on other drawings. Furthermore, the number, shape, size, and relative differences in size of the detailed components included in the drawings of this application are set for ease of understanding and do not limit the embodiments, and may be implemented in various forms.

[0047]

[0048] FIG. 1 is a perspective view showing the overall configuration of a susceptor cleaning system (1) according to the present invention, FIG. 2 is a perspective view of a susceptor cleaning system according to one embodiment of the present invention viewed from a second viewpoint, FIG. 3 is a cross-sectional view of a susceptor being cleaned by a susceptor cleaning system according to one embodiment of the present invention, FIG. 4 is a perspective view of a transfer module and a crushing module according to one embodiment of the present invention, FIG. 5 is a perspective view showing a susceptor being inverted by a transfer module according to one embodiment of the present invention, FIG. 6 is a perspective view showing a susceptor being placed on a crushing module by a transfer module according to one embodiment of the present invention, and FIG. 7 is a perspective view of a part of a transfer module according to one embodiment of the present invention.

[0049] Referring to FIGS. 1 to 7, the susceptor cleaning system (1) may include a loading section (L) on which a susceptor (C) requiring cleaning is placed, a transfer module (10) for gripping and transferring the susceptor (C), a crushing module (20) disposed on one side of the loading section (L) (e.g., +Y-axis direction) for crushing a crucible (Q) inside the susceptor (C) transferred from the loading section (L), a cutting module (30) disposed on one side of the crushing module (20) (e.g., +Y-axis direction) for cutting a crucible (Q) inside the susceptor (C) transferred from the crushing module (20), and a cleaning module (40) disposed on one side of the cutting module (30) (e.g., +Y-axis direction) for cleaning crucible fragments remaining inside the susceptor (C).

[0050] The loading section (L), crushing module (20), cutting module (30), and cleaning module (40) can be arranged sequentially side by side from one side (-Y-axis direction) to the other side (+Y-axis direction) of the workplace. The transfer module (10) is placed on one side (e.g., -X-axis direction) of the loading section (L), crushing module (20), cutting module (30), and cleaning module (40) and can move in parallel in one direction (e.g., Y-axis direction), and can sequentially transfer the susceptor (C) placed on the loading section (L).

[0051] A susceptor (C) placed in the loading portion (L) may include an upper opening (CU) and a lower opening (CD) of the susceptor. The diameter of the upper opening (CU) of the susceptor may be larger than the diameter of the lower opening (CD) of the susceptor. A crucible (Q) placed inside the susceptor (C) may be open at the upper opening (CU) of the susceptor and may be positioned to cover the lower opening (CD) of the susceptor.

[0052] The crucible (Q) may contain quartz, and the susceptor (C) may contain graphite.

[0053] The crucible (Q) and / or susceptor (C) may comprise various materials. According to one embodiment, the susceptor (C) may comprise a carbon composite or graphite silicon carbide (SiC), and the crucible (Q) may comprise silicon dioxide (SiO2).

[0054] The transfer module (10) can grasp the susceptor (C) loaded in the loading section (L), move it upward (e.g., in the +Z axis direction), and invert the susceptor (C) vertically. As the susceptor (C) is inverted vertically, the upper opening (CU) of the susceptor may be positioned on the lower side (e.g., in the -Z axis direction), and the lower opening (CD) of the susceptor may be positioned on the upper side (e.g., in the +Z axis direction). The transfer module (10) can transfer the vertically inverted susceptor (C) to the crushing module (20).

[0055] The transfer module (10) may include a transfer frame (10F), a transfer rail (10R), and a transfer section (100).

[0056] The transfer frame (10F) can come into contact with the ground and can support the transfer unit (100). The transfer frame (10F) can be positioned parallel to the vertical direction (e.g., Z-axis direction) or parallel to the horizontal direction (e.g., X-axis direction or Y-axis direction) to stand on its own.

[0057] A transfer rail (10R) may be disposed on a transfer frame (10F). The transfer rail (10R) may extend along one direction. According to one embodiment, the transfer rail (10R) may be disposed parallel to the Y-axis direction.

[0058] The transfer unit (100) can move along the transfer rail (10R) by contacting the transfer rail (10R). The transfer module (10) may include a servo motor, a rack gear, and a pinion gear, and the transfer unit (100) can move by means of the servo motor, the rack gear, and the pinion gear.

[0059] The transfer unit (100) can move along the transfer rail (10R) while suspended from the transfer frame (10F). The transfer unit (100) may include a transfer lifting unit (110), a transfer clamp (120), and a transfer gripping roller (130).

[0060] The transfer lifting unit (110) can raise and lower the transfer clamp (120). Accordingly, the transfer clamp (120) can move along the Y-axis direction and can be raised and lowered along the Z-axis direction.

[0061] Two or more transfer clamps (120) may be provided. The transfer clamps (120) may move away from each other or move closer to each other. According to one embodiment, each transfer clamp (120) may move away from each other or closer to each other by moving in parallel in one direction (e.g., the Y-axis direction).

[0062] A susceptor (C) may be placed between two transfer clamps (120). The transfer clamps (120) may contact the susceptor (C) and grip the susceptor (C). Multiple transfer clamps (120) may be provided. According to one embodiment, two transfer clamps (120) may be provided to contact both sides of the susceptor (C) and grip the susceptor (C).

[0063] A transfer gripping roller (130) may be disposed on a transfer clamp (120). The transfer gripping roller (130) may be disposed on the transfer clamp (120) and may come into contact with a susceptor (C). A plurality of transfer gripping rollers (130) may be provided. According to one embodiment, a plurality of transfer gripping rollers (130) may be disposed on a single transfer clamp (120), and a single susceptor (C) may come into contact with a plurality of transfer gripping rollers (130). As the susceptor (C) comes into contact with a plurality of transfer gripping rollers (130), stress concentration at any one point of the susceptor (C) may be prevented.

[0064] A crucible (Q) placed inside the susceptor (C) in the crushing module (20) can be crushed. According to one embodiment, the crushing module (20) can make contact with the crucible (Q) placed in the upper opening (CU) of the susceptor and transmit an impact to the crucible (Q). A crucible (Q) placed in the lower opening (CD) of the susceptor in the crushing module (20) can be crushed by the impact.

[0065] The susceptor (C) on which the crushed crucible (Q) is placed can be transferred from the crushing module (20) to the cutting module (30) by the transfer module (10). The transfer module (10) can re-invert the inverted susceptor (C) up and down. Accordingly, in the re-inverted susceptor (C), the upper opening (CU) of the susceptor can be positioned on the upper side (e.g., +Z axis direction), and the lower opening (CD) of the susceptor can be positioned on the lower side (e.g., -Z axis direction). The transfer module (10) can transfer the re-inverted susceptor (C) to the cutting module (30).

[0066] The cutting module (30) can cut the crucible (Q) placed inside the reversed susceptor (C). The cutting module (30) can cut the crucible (Q) while minimizing damage to the inner surface of the susceptor (C). Accordingly, the bonding force between the crucible (Q) and the susceptor (C) can be reduced.

[0067] The susceptor (C) on which the cut crucible (Q) is placed can be transferred from the cutting module (30) to the cleaning module (40) by the transfer module (10).

[0068] The cleaning module (40) can apply impact to a crucible (Q) placed inside the reversed susceptor (C). According to one embodiment, the hammer of the cleaning module (40) (e.g., the hammer (410) of FIG. 15) is placed in the inner space of the susceptor (C) and can move to make contact with the crucible (Q) and deliver impact to the crucible (Q).

[0069] The cleaning module (40) can remove the crucible (Q) from the susceptor (C) by frictionally contacting the crucible (Q) in surface contact. According to one embodiment, the brush of the cleaning module (40) (e.g., the brush (420) of FIG. 15) is placed in the inner space of the susceptor (C) and can move to make surface contact with the crucible (Q). In a state where the brush (420) and the susceptor (C) are in surface contact, the brush (420) may rotate around an axis, the susceptor (C) may rotate, or the brush (420) may rotate around an axis and the susceptor (C) may also rotate. The direction of rotation of the brush (420) and the direction of rotation of the susceptor (C) may be the same or different.

[0070] The cleaning module (40) can remove the crucible (Q) from the susceptor (C) by making line contact with the crucible (Q). According to one embodiment, the scraper of the cleaning module (40) (e.g., the scraper (430) of FIG. 15) is positioned in the inner space of the susceptor (C) and can move to make line contact with the crucible (Q). While the scraper (430) and the susceptor (C) are in line contact, the scraper (430) may rotate around an axis, the susceptor (C) may rotate, or the scraper (430) may rotate around an axis and the susceptor (C) may also rotate. The direction of rotation of the scraper (430) and the direction of rotation of the susceptor (C) may be the same or different.

[0071] In the process of removing the crucible (Q) by the cleaning module (40), the hammer (410), the brush (420), and the scraper (430) may all be used simultaneously. Alternatively, in the process of removing the crucible (Q) by the cleaning module (40), a combination of two of the hammer (410), the brush (420), and the scraper (430) may be used simultaneously. Alternatively, in the process of removing the crucible (Q) by the cleaning module (40), the hammer (410), the brush (420), and the scraper (430) may be used randomly and sequentially.

[0072] In this way, the crucible (Q) inside the susceptor (C) is completely crushed and removed as it passes through the crushing module (20), the cutting module (30), and the cleaning module (40), and the susceptor (C) can be transferred to the loading section (L) by the transfer module (10).

[0073] The transfer of the susceptor (C) and the crushing process of the crucible (Q) are all carried out automatically, and since there is no need for human intervention, they can be carried out quickly and accurately.

[0074]

[0075] Referring to FIGS. 8 to 16, a frame part (F), a lower frame support part (FL), an upper frame support part (FH), a frame module mounting part (FM), a fragment collection part (FC), a stage (S), a moving work part (SR), a rail (R), a rotary drive part (FD), and a rotary driven part (FA) that may be included in the crushing module (20), the cutting module (30), and the cleaning module (40) will be described.

[0076] The frame portion (F) may include a lower frame support portion (FL), an upper frame support portion (FH), and a frame module mounting portion (FM).

[0077] The lower frame support (FL) can be positioned parallel to a direction perpendicular to the ground (e.g., Z-axis direction) or parallel to a direction horizontal to the ground (e.g., X-axis direction or Y-axis direction). The lower frame support (FL) can be provided in multiple numbers to form a structure capable of standing on its own. A fragment collection unit (FC) can be positioned in the space formed by the multiple lower frame support (FL). The fragment collection unit (FC) can accommodate a crucible (Q) that is detached from the susceptor (C).

[0078] A stage (S), a moving work unit (SR), and a rail (R) can be placed on the lower support (FL) of the frame.

[0079] A susceptor (C) can be placed on a stage (S). According to one embodiment, a susceptor (C) transported by a transport module (10) can be placed on a stage (S).

[0080] The stage (S) can move by being connected to a rail (R) placed on the lower support (FL) of the frame. According to one embodiment, the stage (S) can move in one direction (e.g., the X-axis direction) and parallel to it. When a susceptor (C) is placed on the stage (S), the stage (S) can move in a direction away from the transfer module (10) (e.g., the +X-axis direction).

[0081] The rail (R) is positioned to connect the lower frame support (FL) and the stage (S), and can move the stage (S) relative to the lower frame support (FL).

[0082] When the operation (e.g., crushing, cutting, or cleaning) on ​​the susceptor (C) placed on the stage (S) is completed, the stage (S) can move in a direction (e.g., -X-axis direction) toward the transfer module (10).

[0083] As the stage (S) moves away from the transfer module (10) in the direction (+X-axis direction), the stage (S) can move into the space formed by the upper frame support (FH) and the frame module mounting part (FM).

[0084] A moving work unit (SR) may be positioned on the outer side of the stage (S). The moving work unit (SR) may be equipped with a plurality of rollers to contact the susceptor (C). The plurality of rollers may press the susceptor (C) from various directions. The rollers may move in a horizontal direction (e.g., in the X-axis direction and / or the Y-axis direction) and may contact the susceptor (C) to fix the susceptor (C) to the stage (S). The rollers may contact the susceptor (C) at various positions. Accordingly, the susceptor (C) can be stably fixed to the stage (S).

[0085] In addition, as the rollers of the moving work unit (SR) move and the distance between the rollers varies, susceptors (C) of various sizes and shapes can be fixed to the moving work unit (SR).

[0086] The moving work unit (SR) can move relative to the stage (S) on the upper side of the stage (S) (e.g., in the +Z-axis direction). As the stage (S) moves along one direction (e.g., in the X-axis direction), the moving work unit (SR) can also move along with the movement of the stage (S).

[0087] According to one embodiment, the moving work unit (SR) can move independently separated from the stage (S), and the susceptor (C) fixed by the moving work unit (SR) can move together with the movement of the moving work unit (SR).

[0088] The roller can rotate. Accordingly, the susceptor (C) in contact with the roller can rotate (see FIG. 16). The direction in which the susceptor (C) rotates may be the same as or opposite to the direction in which the crushing unit (200), cutting unit (300), or cleaning unit (400) rotates.

[0089] A frame upper support member (FH) may be positioned on the upper side (e.g., in the +Z-axis direction) of a frame lower support member (FL).

[0090] The upper frame support (FH) may be positioned parallel to a direction perpendicular to the ground (e.g., Z-axis direction) or parallel to a direction horizontal to the ground (e.g., X-axis direction or Y-axis direction). The upper frame support (FH) may be provided in multiple numbers to form a structure capable of standing on its own. A frame module mounting member (FM) may be positioned on the upper frame support (FH). According to one embodiment, the frame module mounting member (FM) may be positioned on the upper side (e.g., +Z-axis direction) of the upper frame support (FH).

[0091] The frame module mounting portion (FM) is positioned on the upper frame support portion (FH) and can move. According to one embodiment, the frame module mounting portion (FM) can move up and down in a vertical direction (e.g., Z-axis direction).

[0092] A crushing unit (200), a cutting unit (300), or a cleaning unit (400) may be disposed in the frame module mounting portion (FM). According to one embodiment, a crushing unit (200), a cutting unit (300), or a cleaning unit (400) may be disposed in the lower part (e.g., in the -Z axis direction) of the frame module mounting portion (FM). As the frame module mounting portion (FM) descends (e.g., in the -Z axis direction), the distance between the crushing unit (200), the cutting unit (300), or the cleaning unit (400) and the susceptor (C) may decrease, and a crushing, cutting, or cleaning operation may be performed on the crucible (Q) disposed inside the susceptor (C).

[0093] When the crushing, cutting, or cleaning operation is completed, the frame module mounting part (FM) rises (e.g., in the +Z-axis direction) so that the distance between the crushing unit (200), cutting unit (300), or cleaning unit (400) and the susceptor (C) can be increased.

[0094] A rotary drive unit (FD) and a rotary driven unit (FA) may be disposed in the frame module mounting portion (FM).

[0095] The rotary drive unit (FD) can be connected to the rotary driven unit (FA). According to one embodiment, the rotary drive unit (FD) and the rotary driven unit (FA) can be connected by a chain or a belt.

[0096] The rotary drive unit (FD) may be provided as a motor that generates driving force. According to one embodiment, the rotary drive unit (FD) rotates, and a rotary driven unit (FA) connected by a chain or belt may rotate. The rotary driven unit (FA) may be connected to a crushing unit (200), a cutting unit (300), or a cleaning unit (400). As the rotary driven unit (FA) rotates, the crushing unit (200), the cutting unit (300), or the cleaning unit (400) may rotate. The crushing unit (200), the cutting unit (300), or the cleaning unit (400) may come into contact with various parts of the crucible (Q) placed inside the susceptor (C) to detach the crucible (Q) from the susceptor (C). Accordingly, the crucible (Q) remaining in the susceptor (C) can be minimized.

[0097] The rotational direction of the crushing unit (200), cutting unit (300), or cleaning unit (400) may be the same as or different from the rotational direction of the susceptor (C) (see FIG. 16).

[0098]

[0099] FIG. 8 is a perspective view illustrating the movement of a susceptor by a crushing module according to an embodiment of the present invention, and FIG. 9 is a perspective view illustrating the crushing of a crucible placed inside the susceptor by a crushing module according to an embodiment of the present invention.

[0100] Referring to FIGS. 8 and 9, the process of crushing the crucible (Q) inside the susceptor (C) is explained.

[0101] The crushing module (20) can be placed on one side (e.g., in the +Y axis direction) of the loading section (L). The crushing module (20) can crush the crucible (Q) inside the susceptor (C) being transported from the transport module (10).

[0102] The susceptor (C) can be inverted by the transfer module (10) so that the lower opening (CD) of the susceptor is positioned on the upper side (e.g., +Z axis direction) and the upper opening (CU) of the susceptor is positioned on the lower side (e.g., -Z axis direction).

[0103] When the susceptor (C), which is inverted and transported by the transport module (10), is placed on the stage (S), the roller of the moving work unit (SR) can move and come into contact with the susceptor (C). The roller can come into contact with the susceptor (C) and fix the susceptor (C) to the stage (S). Once the susceptor (C) is fixed to the stage (S), the stage (S) can move. According to one embodiment, the inverted susceptor (C) can move to the lower part of the crushing unit (200) (e.g., in the -Z axis direction) (see FIG. 8).

[0104] When the inverted susceptor (C) placed on the stage (S) moves to the lower part of the crushing unit (200), the crushing operation on the crucible (Q) placed inside the susceptor (C) can be carried out by the crushing module (20).

[0105] The crushing unit (200) may include a crushing plate (201), a crushing projection (202), and a crushing connecting shaft (203).

[0106] The shape of the crushing plate (201) may be provided as a plate. According to one embodiment, the crushing plate (201) may be provided as a disc. The crushing plate (201) may be placed at the lower part (e.g., in the -Z axis direction) of the lifting frame module mounting part (FM) and may move together with the frame module mounting part (FM) (see FIG. 9).

[0107] The crushing plate (201) can move together with the frame module mounting part (FM) to collide with or pressurize the crucible (Q). As the crushing plate (201) and the crucible (Q) come into contact, the crucible (Q) placed in the lower opening (CD) of the susceptor can be crushed. The crushed crucible (Q) can fall and move to the fragment collection part (FC).

[0108] According to one embodiment, the crushing plate (201) can collide with the crucible (Q) and crush the crucible (Q).

[0109] A crushing projection (202) may be placed on a crushing plate (201). According to one embodiment, the crushing projection (202) may protrude downward from the crushing plate (201) (e.g., in the direction of the -Z axis). As the crushing projection (202) protrudes from the crushing plate (201) and the crushing plate (201) moves, it may come into contact with a crucible (Q). As the crushing projection (202) is formed on the crushing plate (201) and comes into contact with the crucible (Q), an impact may be concentrated at the location where the crushing projection (202) and the crucible (Q) come into contact.

[0110] According to one embodiment, the crushing projection (202) can collide with the crucible (Q) and crush the crucible (Q). Accordingly, the crushing efficiency for the crucible (Q) can be improved.

[0111] The crushing connecting shaft (203) can connect the crushing plate (201) and the frame module mounting part (FM). The crushing connecting shaft (203) can be connected to the rotating driven part (FA) and rotate. Accordingly, the contact area between the crushing unit (200) and the crucible (Q) can change. Alternatively, as the susceptor (C) rotates by the moving work part (SR), the contact area between the crushing unit (200) and the crucible (Q) can change.

[0112] When the crushing operation by the crushing unit (200) is completed, the stage (S) can move in a direction that approaches the transfer module (10) (e.g., -X-axis direction). As the stage (S) moves, the susceptor (C) that has completed the crushing operation can also move. The transfer clamp (120) of the transfer module (10) can lower to grasp the susceptor (C) and then rise again.

[0113] The susceptor (C) held by the transfer clamp (120) can be reversed by the rotation of the transfer clamp (120). Accordingly, the upper opening (CU) of the susceptor can be positioned on the upper side (e.g., in the +Z axis direction), and the lower opening (CD) of the susceptor can be positioned on the lower side (e.g., in the -Z axis direction).

[0114] The reversed susceptor (C) can be transferred to the cutting module (30) by the transfer module (10).

[0115]

[0116] FIG. 10 is a perspective view illustrating a susceptor being seated on a cutting module by a transfer module according to an embodiment of the present invention, FIG. 11 is a perspective view illustrating a susceptor being moved by a cutting module according to an embodiment of the present invention, and FIG. 12 is a perspective view of a part of a cutting module according to an embodiment of the present invention.

[0117] The cutting module (30) can be positioned on one side (e.g., in the +Y axis direction) of the crushing module (20). The cutting module (30) can cut the crucible (Q) inside the susceptor (C) being transported from the crushing module (20).

[0118] The susceptor (C) can be placed on the cutting module (30) in a reversed state by the transfer module (10). According to one embodiment, the upper opening (CU) of the susceptor may be positioned on the upper side (e.g., +Z-axis direction), and the lower opening (CD) of the susceptor may be positioned on the lower side (e.g., -Z-axis direction).

[0119] When the susceptor (C), which is reversed and transported by the transport module (10), is placed on the stage (S), the roller of the moving work unit (SR) can move and come into contact with the susceptor (C). The roller can come into contact with the susceptor (C) and fix the susceptor (C) to the stage (S). Once the susceptor (C) is fixed to the stage (S), the stage (S) can move. According to one embodiment, the reversed susceptor (C) can move in one direction (e.g., +X-axis direction) and be placed on the lower side (e.g., -Z-axis direction) of the cutting unit (300).

[0120] When the reversed susceptor (C) that is placed on the stage (S) moves to the lower part of the cutting unit (300), the cutting module (30) can perform a cutting operation on the crucible (Q) placed inside the susceptor (C).

[0121] The cutting unit (300) may include a cutter plate (301), a cutter (302), and a cutter sensor (303).

[0122] The shape of the cutter plate (301) may be provided as a plate. According to one embodiment, the cutter plate (301) may be provided as a circular plate. The cutter plate (301) may be positioned at the lower part (e.g., in the -Z-axis direction) of the lifting frame module mounting part (FM) and may move together with the frame module mounting part (FM).

[0123] The cutter plate (301) can move together with the frame module mounting part (FM) to get closer to the crucible (Q).

[0124] A cutter (302) may be placed on a cutter plate (301). According to one embodiment, the cutter (302) may be placed on the lower part of the cutter plate (301) (e.g., in the -Z axis direction). The cutter (302) may be provided as a rotating blade. The cutter (302) may move close to the inner surface of the susceptor (C) and come into contact with the crucible (Q). The cutter (302) may cut the crucible (Q) upon contact with it. As the cutter (302) cuts the crucible (Q), the crucible (Q) may be separated into several fragments. Accordingly, the crucible (Q) may be easily detached from the susceptor (C).

[0125] The shape of the cutter (302) may be approximately a circular blade. The shape of the cutter (302) is not limited thereto, and the size and / or shape of the cutter (302) may be varied.

[0126] The cutter (302) may be provided as one or multiple cutters. If multiple cutters (302) are provided, the cutters (302) may be arranged around the cutter connecting shaft (304).

[0127] According to one embodiment, the cutters (302) provided in a plurality may be arranged at equal intervals around the cutter connecting shaft (304).

[0128] A cutter sensor (303) may be placed on a cutter plate (301). According to one embodiment, the cutter sensor (303) may be placed on the lower part of the cutter plate (301) (e.g., in the -Z axis direction). The cutter sensor (303) may come into contact with a crucible (Q) or a susceptor (C) to measure the inner diameter of the crucible (Q) or the inner diameter of the susceptor (C). As the inner diameter of the crucible (Q) or the inner diameter of the susceptor (C) is measured, contact between the cutter (302) and the susceptor (C) can be minimized.

[0129] Alternatively, the cutter sensor (303) may restrict the movement of the cutter (302). According to one embodiment, as the cutter sensor (303) comes into contact with the inner surface of the crucible (Q) or the susceptor (C), the movement of the cutter (302) is restricted, thereby minimizing contact between the cutter (302) and the susceptor (C). Accordingly, damage to the susceptor (C) may be minimized.

[0130] The cutter connecting shaft (304) can connect the cutter plate (301) and the frame module mounting part (FM). The cutter connecting shaft (304) can be connected to the rotating driven part (FA) and rotate. Accordingly, the contact area between the cutting unit (300) and the crucible (Q) can change. Alternatively, as the susceptor (C) rotates by the moving work part (SR), the contact area between the cutting unit (300) and the crucible (Q) can change.

[0131] Accordingly, the crucible (Q) can be separated into several pieces, and the crucible (Q) can be easily detached from the susceptor (C).

[0132] When the cutting operation by the cutting unit (300) is completed, the stage (S) can move in a direction that approaches the transfer module (10) (e.g., -X-axis direction). As the stage (S) moves, the susceptor (C) that has completed the cutting operation can also move. The transfer clamp (120) of the transfer module (10) can lower to grasp the susceptor (C) and then rise again.

[0133] The susceptor (C) held by the transfer clamp (120) can be transferred to the cleaning module (40).

[0134]

[0135] FIG. 13 is a perspective view illustrating a susceptor being seated on a cleaning module by a transfer module according to an embodiment of the present invention, FIG. 14 is a perspective view illustrating a susceptor being moved by a cleaning module according to an embodiment of the present invention, FIG. 15 is a perspective view of a part of a cleaning module according to an embodiment of the present invention, and FIG. 16 is a perspective view illustrating the movement of a cleaning module and a susceptor according to an embodiment of the present invention.

[0136] The cleaning module (40) can be positioned on one side (e.g., in the +Y axis direction) of the cutting module (30). The cleaning module (40) can remove the crucible (Q) inside the susceptor (C) being transferred from the cutting module (30).

[0137] The susceptor (C) can be seated on the cleaning module (40) by the transfer module (10) in a state where the upper opening (CU) of the susceptor is positioned toward the upper side (e.g., +Z-axis direction) and the lower opening (CD) of the susceptor is positioned toward the lower side (e.g., -Z-axis direction).

[0138] When the susceptor (C) transported by the transport module (10) is placed on the stage (S), the roller of the moving work unit (SR) can move and come into contact with the susceptor (C). The roller can come into contact with the susceptor (C) and fix the susceptor (C) to the stage (S). Once the susceptor (C) is fixed to the stage (S), the stage (S) can move. According to one embodiment, the reversed susceptor (C) can move to the lower part of the cleaning unit (400) (e.g., in the -Z axis direction).

[0139] When the susceptor (C) placed on the stage (S) moves to the lower part of the cleaning unit (400) (e.g., in the -Z axis direction), a cleaning operation can be performed in which the crucible (Q) placed inside the susceptor (C) is removed by the cleaning unit (400).

[0140] The cleaning unit (400) may include a cleaning plate (401), a hammer (410), a hammer actuator (411), a brush (420), a scraper (430), and a distance adjustment unit (440).

[0141] The shape of the cleaning plate (401) may be provided as a plate. According to one embodiment, the cleaning plate (401) may be provided as a disc. The cleaning plate (401) may be placed at the lower part (e.g., in the -Z axis direction) of the lifting frame module mounting part (FM) and may move together with the frame module mounting part (FM).

[0142] The cleaning plate (401) can move together with the frame module mounting part (FM) to get closer to the crucible (Q).

[0143] A hammer (410) may be placed on a cleaning plate (401). According to one embodiment, the hammer (410) may be placed on the lower part of the cleaning plate (401) (e.g., in the -Z axis direction). The hammer (410) may collide with the crucible (Q) and transmit an impact to the crucible (Q). According to one embodiment, the hammer (410) may strike the crucible (Q) and transmit an impact to the crucible (Q). Accordingly, a crack may occur in the crucible (Q), or the crucible (Q) may detach from the susceptor (C). Accordingly, the crucible (Q) may be removed from the susceptor (C).

[0144] One end of the hammer (410) may be provided in a conical shape. As one end of the hammer (410) is provided in a conical shape, the contact area between the hammer (410) and the crucible (Q) is reduced, and the area over which the impact is transmitted may be reduced. Accordingly, the impact transmitted to the crucible (Q) is concentrated, and the crucible (Q) may be easily destroyed. The shape of the hammer (410) may be provided in the shape of an awl.

[0145] A hammer actuator (411) may be placed on a cleaning plate (401). According to one embodiment, the hammer actuator (411) may be placed on the lower part of the cleaning plate (401) (e.g., in the -Z axis direction). The hammer actuator (411) may be connected to a hammer (410). The hammer actuator (411) may move the hammer (410). According to one embodiment, the hammer (410) may move from the inside to the outside of the susceptor (C) by driving the hammer actuator (411).

[0146] A brush (420) may be placed on a cleaning plate (401). According to one embodiment, the brush (420) may be placed on the lower part of the cleaning plate (401) (e.g., in the -Z axis direction). The brush (420) may come into surface contact with the crucible (Q) and / or susceptor (C). As the brush (420) comes into surface contact with the crucible (Q) and / or susceptor (C), fragments and / or raw materials of the crucible (Q) may be removed from the susceptor (C). Additionally, small fragments of the crucible (Q) may be removed from the susceptor (C). According to one embodiment, the brush (420) may perform a brushing operation while coming into surface contact with the susceptor (C) and / or crucible (Q) to wipe away fragments or raw materials of the crucible (Q) remaining on the surface of the susceptor (C).

[0147] The shape of the surface of the brush (420) that comes into surface contact with the crucible (Q) and / or susceptor (C) may be provided as a square. The shape of the surface of the brush (420) is not limited to a square and may be provided in various shapes. The shape of the surface of the brush (420) may be provided as a polygon or a curved surface.

[0148] A scraper (430) may be placed on a cleaning plate (401). According to one embodiment, the scraper (430) may be placed on the lower part of the cleaning plate (401) (e.g., in the -Z axis direction). The scraper (430) may make line contact with the crucible (Q) and / or susceptor (C). As the scraper (430) makes line contact with the crucible (Q) and / or susceptor (C), friction with the crucible (Q) may cause the crucible (Q) to detach from the susceptor (C). Additionally, small fragments of the crucible (Q) may be removed from the susceptor (C).

[0149] According to one embodiment, the scraper (430) may be provided as a blade. More specifically, the scraper (430) may be provided as a straight blade and / or a curved blade. As the scraper (430) is provided as a blade, the crucible (Q) inside the susceptor (C) can be easily detached from the susceptor (C) even if the size and / or shape of the susceptor (C) is varied.

[0150] The scraper (430) can make line contact with the inner surface of the susceptor (C) and scrape off the surface of the susceptor (C). Accordingly, fragments of the crucible (Q) remaining on the surface of the susceptor (C) can be removed.

[0151] According to one embodiment, the cleaning unit (400) may be connected to a rotary driven part (FA). Accordingly, the hammer (410), brush (420) and / or scraper (430) may rotate and come into contact with various parts of the inner surface of the susceptor (C) to remove the crucible (Q).

[0152] According to another embodiment, the susceptor (C) can be rotated by the moving work unit (SR). Accordingly, the hammer (410), brush (420) and / or scraper (430) can come into contact with various parts of the inner surface of the rotating susceptor (C) to remove the crucible (Q).

[0153] The distance adjustment unit (440) may include a distance adjustment rod (441) and a distance adjustment support (442). The distance adjustment unit (440) is connected to the brush (420) and / or scraper (430) so that the distance at which the brush (420) and / or scraper (430) protrude in a horizontal direction (e.g., X-axis direction or Y-axis direction) can be adjusted. Accordingly, the distance of the brush (420) and / or scraper (430) from the inner surface of the susceptor (C) can be adjusted.

[0154] The distance adjustment rod (441) can adjust the distance at which the brush (420) and / or scraper (430) protrude in the horizontal direction. According to one embodiment, the distance adjustment rod (441) may be positioned midway in the height direction (e.g., Z-axis direction) of the brush (420) and the scraper (430).

[0155] The distance adjustment support (442) is connected to the brush (420) and / or scraper (430) to minimize movement of the brush (420) and / or scraper (430) relative to the cleaning plate (401). According to one embodiment, the distance adjustment support (442) may be positioned above (e.g., in the +Z-axis direction) and below (e.g., in the -Z-axis direction) the brush (420) and / or scraper (430).

[0156] In this way, as the distance control unit (440) is connected to the brush (420) and / or scraper (430), the cleaning unit (400) can remove the crucible (Q) from the susceptor (C) of various shapes or sizes.

[0157] The susceptor (C) that has completed cleaning in the cleaning module (40) can be transferred to the loading section (L) by the transfer module (10).

[0158] Through the above process, the crucible (Q) and / or raw material inside the susceptor (C) can be removed from the susceptor (C).

[0159] The sequence of paths along which the susceptor (C) moves in the susceptor cleaning system (1) is not limited to the crushing module (20), the cutting module (30), and the cleaning module (40).

[0160] Accordingly, the susceptor (C) can move in the order of the cutting module (30), the crushing module (20), and the cleaning module (40).

[0161] Additionally, the susceptor cleaning system (1) may include a plurality of cleaning modules (40). When a plurality of cleaning modules (40) are provided, the configuration of the cleaning unit (400) placed in each cleaning module (40) may differ.

[0162] According to one embodiment, a hammer (410), a brush (420), and a scraper (430) may all be placed in each of the plurality of cleaning modules (40).

[0163] According to another embodiment, any two of the following may be included in any one of the plurality of cleaning modules (40): a hammer (410), a brush (420), and a scraper (430).

[0164] According to another embodiment, a hammer (410) may be placed in one of the cleaning modules (40), a brush (420) may be placed in another cleaning module (40), and a scraper (430) may be placed in yet another cleaning module (40).

[0165]

[0166] Although the present invention has been described with reference to the embodiments illustrated in the drawings, this is merely illustrative, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible therefrom. Accordingly, the true technical scope of protection of the present invention should be determined by the claims below.

Claims

1. A frame portion comprising a lower frame support and an upper frame support disposed above the lower frame support; A stage that moves and is positioned between the lower support of the frame and the upper support of the frame; A movable working part positioned on the above stage and fixing the susceptor; A frame module mounting portion positioned on the upper side of the upper support portion of the frame; and A cleaning module characterized by including a cleaning unit disposed at the lower part of the frame module mounting portion and detaching the crucible from the susceptor.

2. In Paragraph 1, A cleaning module characterized in that the moving work unit includes a plurality of rollers, and each of the plurality of rollers moves to press the susceptor.

3. In Paragraph 1, A cleaning module further comprising a fragment collection unit disposed at the lower part of the stage and receiving fragments of the crucible that detach from the susceptor.

4. In Paragraph 1, A cleaning module further comprising: a rail arranged to connect the lower frame support and the stage, and to move the stage relative to the lower frame support.

5. In Paragraph 1, A cleaning module characterized by the above-described moving work unit contacting the susceptor and rotating the susceptor.

6. In Paragraph 1, A cleaning module characterized by the frame module mounting portion rising and falling to change the distance from the stage.

7. In Paragraph 1, A cleaning module characterized by further including a rotary drive unit disposed in the frame module mounting portion, connected to the cleaning unit, and rotating the cleaning unit.

8. In Paragraph 1, A cleaning module characterized by comprising: a hammer that strikes the crucible disposed on the inner surface of the susceptor; the cleaning unit described above.

9. In Paragraph 8, A cleaning module characterized in that the cleaning unit includes a hammer actuator connected to the hammer to move the hammer.

10. In Paragraph 8, A cleaning module characterized by one end of the hammer being provided in a conical shape.

11. In Paragraph 1, A cleaning module characterized by comprising: a cleaning unit that removes the crucible from the susceptor by making surface contact with the inner side of the susceptor, and a brush whose distance from the inner surface of the susceptor is adjusted.

12. In Paragraph 1, A cleaning module characterized by comprising: a cleaning unit that removes the crucible from the susceptor by making line contact with the inner surface of the susceptor, and a scraper whose distance from the inner surface of the susceptor is adjustable.

13. In Paragraph 12, A cleaning module characterized in that the scraper is provided in the form of a blade.

14. In Paragraph 13, A cleaning module characterized in that one side of the scraper is provided in a curve.

15. A transfer module that grasps and transfers a susceptor placed in a loading section and inverts the susceptor in an up-and-down direction; A crushing module in which the susceptor transferred to the transfer module is seated and which collides with a crucible disposed inside the susceptor to crush the crucible; A cutting module disposed on one side of the crushing module, on which the susceptor transferred to the transfer module is seated, and which cuts the crucible disposed inside the susceptor; and A susceptor cleaning system characterized by comprising: a cleaning module disposed on one side of the cutting module, on which the susceptor transported by the transport module is seated, and which removes the crucible disposed inside the susceptor from the susceptor.

16. In Paragraph 15, Each of the above transfer module, the above crushing module, the above cutting module, and the above cleaning module is, A stage on which the above-mentioned susceptor is placed; and A susceptor cleaning system characterized by including a fragment collection unit disposed at the lower part of the stage and receiving the crucible detached from the susceptor.

17. In Paragraph 15, The above transfer module is, Transfer frame in contact with the ground; A transfer rail disposed on the above transfer frame; and A susceptor cleaning system characterized by comprising: a transfer gripping roller in contact with the susceptor; a transfer clamp in which the transfer gripping roller is positioned and rotates to invert and re-invert the susceptor; and a transfer lifting unit for moving the transfer clamp up and down.

18. In Paragraph 17, A susceptor cleaning system characterized by the above-described transfer module inverting the susceptor placed in the loading section vertically and transferring it to the crushing module, and inverting the susceptor, on which a crushing operation has been performed by the crushing module, vertically again and transferring it to the cutting module.

19. In Paragraph 15, A susceptor cleaning system characterized in that the above transfer module transfers the susceptor, from which the crucible has been removed in the above cleaning module, to the above loading section.

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