Micromechanical rotation rate sensor with improved rotational acceleration robustness due to manufacturing tolerances

Abstract

The invention relates to a micromechanical rotation rate sensor having at least one drive structure having at least one mass, having at least one further mass and having at least one coupling structure, the mass being connected to the further mass by the coupling structure, the micromechanical rotation rate sensor having at least one mass system, the mass system comprising the mass and the coupling structure and the further mass, the mass system, to detect a first rotation rate about a first axis of rotation, being able to be excited to oscillate in a first detection mode, the first detection mode involving a rotary oscillation of the coupling structure, characterized in that the excitability of the first detection mode is inhibited and / or suppressed by a rotational acceleration of the micromechanical rotation rate sensor as a result of a torque that acts on the coupling structure and a further torque that acts on the coupling structure cancelling each other out at least in part.

Description

[0001] R. 412881

[0002] - 1 -

[0003] Description

[0004] title

[0005] Micromechanical gyroscope with improved gyroscope acceleration robustness over manufacturing tolerances

[0006] Disclosure of the invention

[0007] State of the art

[0008] The invention relates to a micromechanical gyroscope with at least one drive structure, at least one mass, at least one further mass, and at least one coupling structure according to the preamble of claim 1. Such micromechanical gyroscopes, which often exhibit different frequencies of the vibration modes of the two sub-oscillators due to manufacturing tolerances, are generally known and, for example, from US patent 11719539B2. The gyroscope disclosed in US patent 11719539B2 consists of two rotors for measuring the x- and y-rotation rates and four masses for measuring the z-rotation rate. Two of these four masses are mechanically directly coupled. Due to the quarter-symmetry of the design, the sensor would theoretically be robust against linear and rotational accelerations.However, due to manufacturing tolerances and local process variations, the sensor's symmetry can be broken, causing the two individual z-detection modes to differ in their properties. In one z-detection mode, only the two leftmost masses oscillate at a resonant frequency f. L In the other z-detection mode, only the two rightmost masses oscillate at a resonance frequency f. R Each of the two z-detection modes can be excited by rotational acceleration around the z-axis, thereby generating a differential capacitance signal that can interfere with the measurement signal during sensor operation. For example, at rotational accelerations with a frequency of f L or f R The corresponding ZR. 412881

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[0010] The detection mode is resonantly excited and can thereby generate very high capacitance signals. This can either lead to a direct false signal or overload the front end in the ASIC.

[0011] Disclosure of the invention

[0012] Against this background, the task is to provide a micromechanical gyroscope with at least one drive structure, with at least one mass, with at least one further mass and with at least one coupling structure, which does not have the disadvantages described above.

[0013] The micromechanical angular rate sensor according to the invention comprises at least one drive structure, at least one mass, at least one further mass, and at least one coupling structure, wherein the mass is connected by the coupling structure, wherein the micromechanical angular rate sensor has at least one mass system, wherein the mass system comprises the mass, the coupling structure, and the further mass, wherein the mass system can be excited to a vibration in a first detection mode for the detection of a first angular rate about a first axis of rotation, wherein the first detection mode comprises a torsional vibration of the coupling structure, characterized in that the excitability of the first detection mode by a rotational acceleration of the micromechanical angular rate sensor is inhibited and / or suppressed byThe fact that a torque acting on the coupling structure and a further torque acting on the coupling structure at least partially cancel each other out has the advantage that rotational accelerations cannot, or can hardly, excite the first detection mode. This makes it possible to avoid or prevent a systematic measurement error of the first rotation rate when rotational accelerations occur around the first axis of rotation. Advantageous embodiments and further developments of the invention can be found in the dependent claims and the description with reference to the drawings. All described circumstances apply equally or analogously to the components of the micromechanical rotation rate sensor designated as additional, without this being expressly stated. R. 412881

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[0015] According to an advantageous embodiment of the micromechanical gyroscope according to the invention, a first and a second mass each correspond to a Coriolis mass and / or a first further and a second further mass each correspond to a balancing mass of the micromechanical gyroscope.

[0016] According to a further advantageous embodiment of the micromechanical angular rate sensor according to the invention, the first and / or the second mass and / or the first further and / or the second further mass are connected to substrate connections or substrate anchorages via resilient U-shaped loop structures, wherein the substrate connections or substrate anchorages are in particular arranged at one end of the resilient U-shaped loop structures.

[0017] According to a further advantageous embodiment of the micromechanical gyroscope according to the invention, first and / or second and / or third coupling structures and / or further coupling structures of the micromechanical gyroscope, in particular designed as rectangular frame structures, have a substrate connection or substrate anchoring arranged in the middle of the coupling structure and / or further coupling structure.

[0018] According to a further advantageous embodiment of the micromechanical rotation rate sensor according to the invention, it has a first rotor structure and a second rotor structure, wherein the rotor structures have a substrate connection or substrate anchoring, in particular at one location, preferably only at one location and preferably in the middle, wherein the rotor structures can tilt or rotate about axes of symmetry, in particular passing through the substrate connection.

[0019] According to a further advantageous embodiment of the micromechanical rotation rate sensor according to the invention, the mass and lever ratios of the masses and other masses and coupling structures and other coupling structures are balanced or calibrated or adjusted so that the first detection mode cannot be excited by rotational accelerations.

[0020] According to a further advantageous embodiment of the micromechanical angular rate sensor according to the invention, a mixed detection of a first detection signal is carried out by inserting or placing detection electrodes in both Coriolis masses and compensating masses. R. 412881

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[0022] According to a further advantageous embodiment of the micromechanical gyroscope according to the invention, it has, in addition to a first mass and a second mass, an additional first mass and an additional second mass and / or, in addition to a first further mass and a second further mass, an additional first further mass and an additional second further mass and / or, in addition to a first coupling structure and a second coupling structure and a third coupling structure, an additional first coupling structure and an additional second coupling structure and an additional third coupling structure.

[0023] According to a further advantageous embodiment of the micromechanical gyroscope according to the invention, the first additional mass and the second additional mass are at rest in a drive mode of the micromechanical gyroscope and are only deflected in the first detection mode.

[0024] According to a further advantageous embodiment of the micromechanical rotation rate sensor according to the invention, the inertial forces acting on the coupling structures and / or on the further coupling structures in the rotationally accelerated reference system of the micromechanical rotation rate sensor correspond to modal forces of the first detection mode.

[0025] Exemplary embodiments of the present invention are shown in the drawings and explained in more detail in the following description.

[0026] Brief description of the drawings

[0027] Figure 1a shows a schematic representation of a micromechanical angular rate sensor in a first embodiment according to the present invention.

[0028] Figure 1b shows in schematic representation the vibration directions of a drive mode and a first detection mode of a micromechanical angular rate sensor in the first embodiment according to the present invention.

[0029] Figure 1c shows a schematic representation of the vibration directions of a second and third detection mode of a micromechanical angular rate sensor in the first embodiment according to the present invention. R. 412881

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[0031] Figure 2a shows a schematic representation of a micromechanical angular rate sensor in a second embodiment according to the present invention.

[0032] Figure 2b shows a schematic representation of the vibration directions of a drive mode and a first detection mode of a micromechanical angular rate sensor in the second embodiment according to the present invention.

[0033] Figure 2c shows a schematic representation of various variants of a micromechanical rotation rate sensor according to the present invention, which differ in the arrangement of the detection electrodes.

[0034] Figure 3 shows a schematic representation of a micromechanical angular rate sensor in a third embodiment (left representation) or in a fourth embodiment (right representation) according to the present invention.

[0035] Embodiments of the invention

[0036] In the various figures, identical parts are always designated with the same reference symbols and are therefore generally only named or mentioned once. All described facts apply equally or analogously to the components of the micromechanical gyroscope designated as additional, without this being explicitly stated.

[0037] Figure 1a shows a schematic representation of a micromechanical angular rate sensor 100 in a first embodiment according to the present invention. The depicted three-axis micromechanical angular rate sensor 100 allows the angular rates, i.e., the angular velocities, to be determined simultaneously about three orthogonal spatial axes—an X-axis, a Y-axis, and a Z-axis. The depicted angular rate sensor 100 can be manufactured, for example, from silicon or silicon oxides or other semiconductors or oxides or oxide ceramics by means of physical or chemical vapor deposition processes and by means of various etching processes. The micromechanical angular rate sensor has a first rotor structure 9.1 and a second rotor structure 9.2 for measuring the angular rates about the X-axis and Y-axis. For measuring a first angular rate about a first axis of rotation A, which here is the Z-axis, R. 412881

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[0039] The micromechanical gyroscope 100 comprises a first and a second drive structure 1.1, 1.2, as well as an additional first and an additional second drive structure 1.1', 1.2'. For measuring the gyroscope rate about the Z-axis, the micromechanical gyroscope 100 also comprises a mass system 5 and an additional mass system 5', wherein the mass system 5 has a first and a second mass 2.1, 2.2, a first additional and a second additional mass 3.1, 3.2, and a first and a second coupling structure 4.1, 4.2, and wherein the additional mass system 5' has an additional first and an additional second mass 2.1', 2.2', an additional first additional and an additional second additional mass 3.1', 3.2', and an additional first and an additional second coupling structure 4.1', 4.2'. The first and second masses 2.1, 2.2 are each designed as a first and a second U-shaped frame structure.The first and second additional masses 3.1, 3.2 are each designed as rectangular frame structures and arranged within the first and second U-shaped frame structures. The first and second masses 2.1, 2.2 are connected to the first and second additional masses 3.1, 3.2 via the first and second coupling structures 4.1, 4.2, respectively, wherein connecting structures 6.1, 6.2, 6.3, 6.4, preferably resilient U-shaped loop structures, are inserted between the first mass 2.1 and the first and second coupling structures 4.1, 4.2 and between the second mass and the first and second coupling structures 4.1, 4.2, which connect the first mass 2.1 and the first and second coupling structures 4.1, 4.2 and the second mass and the first and second coupling structures 4.1, 4.2 in a materially bonded manner, wherein between the first additional mass 3.1 and the first and second coupling structures 4.1, 4.2 and between the second additional mass 3.Further connecting structures 7.1, 7.2, preferably resilient simple or multiple beam structures, are inserted between the first additional mass 3.1 and the first and second coupling structures 4.1, 4.2, and the second additional mass 3.2 and the first and second coupling structures 4.1, 4.2, forming a material bond. The first additional mass and the second additional mass 3.1, 3.2 each have detection electrodes 8.1, 8.2, 8.3, 8.4 in the form of an electrode comb. The first and second drive structures 1.1, 1.2 drive the first and second masses 2.1, 2.2, respectively, to oscillations along the Y-axis. As a result of a first rotation rate, in particular a rotation rate about the Z-axis, the following occur in the rotating reference frame or coordinate system of the R. 412881.

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[0041] micromechanical angular rate sensor 100 Coriolis forces along the X-axis, which act on the first mass 2.1 or on the second mass 2.2 and drive them to oscillations along the X-axis. The first mass 2.1 and second mass 2.2, thus driven, transmit forces to the coupling structures via the connection structures 6.1, 6.2, 6.3, 6.4 at the connection points between the coupling structures and the masses, and also generate two constructively or additively superimposed oscillating torques at the first coupling structure 4.1 and the second coupling structure 4.2, which cause the first coupling structure 4.1 or the second coupling structure 4.2 to move into a torsional vibration or an oscillating pivoting motion about a first coupling axis of rotation of the first coupling structure 4.1 or a second coupling axis of rotation of the second coupling structure 4.2, wherein the first coupling axis of rotation is defined by a first substrate connection of the first coupling structure 4.1 and / or perpendicular to the main extension plane of the micromechanical angular rate sensor 100 and / or the second coupling axis of rotation runs through a second substrate connection of the second coupling structure 4.2 and / or perpendicular to the main extension plane of the micromechanical angular rate sensor 100. Through the further connecting structures 7.1, 7.2, the first additional mass 3.1 and the second additional mass 3.2 are thereby set into a linear oscillation oriented along the Y-axis. The first coupling structure 4.1 and the second coupling structure 4.2 are designed as T-shaped deflection structures, each of which has web-like extensions that act as lever arms and deflect a linear oscillation motion along the X-axis (horizontal) into a linear oscillation motion along the Y-axis (vertical). The coupled oscillatory motions of the first and second masses 2.1 , 2.2, of the first and second coupling structure 4.1 , 4.2 and the first additional mass 3.1 and the second additional mass 3.2 (as components of the mass system 5) thus form a first detection mode (for the detection of the first rotation rate) of the mass system 5 (here a rotation rate about the Z-axis). The excitability of the first detection mode by a rotational acceleration of the micromechanical rotation rate sensor 100 is inhibited and / or suppressed by the fact that torques generated by forces acting on the lever arms of the coupling structures 4.1, 4.2 from the first and second masses 2.1, 2.2 and from the first additional mass 3.1 and the second additional mass 3.2 are suppressed. R. 412881.

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[0043] mutually cancel each other out at least partially or superimpose destructively (or subtractively), wherein the forces are in particular inertial forces in the accelerated reference frame of the micromechanical rotation rate sensor 100.

[0044] Figure 1b shows a schematic representation of a micromechanical gyroscope 100 in the first embodiment according to the present invention. The linear vibration directions of the drive structures 1.1, 1.2 and the first and second masses 2.1, 2.2 are indicated by red arrows in the left-hand diagram. The linear vibration directions of the additional drive structures 1.1', 1.2' and the additional first and second masses 2.1', 2.2' are also shown in the left-hand diagram. Furthermore, the torsional vibration directions of the first rotor structure 9.1 and the second rotor structure 9.2 are shown in the left-hand diagram. The linear vibration directions of the first mass 2.2 and the second mass 2.2 and the first additional mass 3.1 and the second additional mass 3.2 due to Coriolis forces at a first rotation rate about the Z-axis are shown in the right-hand diagram.Furthermore, the linear oscillation directions of the additional first mass 2.1', the additional second mass 2.2', the additional first further mass 3.1', and the additional second further mass 3.2' due to Coriolis forces at a first rotation rate about the Z-axis are shown. All directions shown apply to a first point in time during the oscillation motion of a drive mode or during the oscillation motion in the first detection mode of the micromechanical rotation rate sensor 100.

[0045] Figure 1c shows a schematic representation of a micromechanical angular rate sensor 100 in the first embodiment according to the present invention. The left-hand illustration shows the oscillation directions of a second detection mode (for detecting a second angular rate of a second rotation about the X-axis) of the micromechanical angular rate sensor 100, indicated by red directional symbols. The right-hand illustration shows the oscillation directions of a third detection mode (for detecting a third angular rate about the Y-axis) of the micromechanical angular rate sensor 100.

[0046] Figure 2a shows a schematic representation of a micromechanical gyroscope 100 in a second embodiment according to the present R. 412881.

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[0048] Invention. The illustrated three-axis micromechanical angular rate sensor 100 allows the angular rates, i.e., the angular velocities, about three orthogonal spatial axes—an X-axis, a Y-axis, and a Z-axis—to be determined simultaneously. The illustrated angular rate sensor 100 can be manufactured, for example, from silicon or silicon oxides or other semiconductors, oxides, or oxide ceramics by means of physical or chemical vapor deposition processes and by means of various etching processes. For measuring the angular rates about the X-axis and Y-axis, the micromechanical angular rate sensor 100 comprises a first rotor structure 9.1 and a second rotor structure 9.2. For measuring an angular rate about the Z-axis, the micromechanical angular rate sensor 100 comprises a first and a second drive structure 1.1, 1.2, as well as an additional first and an additional second drive structure 1.1', 1.2'.For measuring the rotation rate about the Z-axis, the micromechanical rotation rate sensor 100 also comprises a mass system 5 and an additional mass system 5', wherein the mass system 5 has a first and a second mass 2.1, 2.2, and a first further and a second further mass 3.1, 3.2, and a first, a second, and a third coupling structure 4.1, 4.2, 4.3, wherein the additional mass system 5' has an additional first and an additional second mass 2.1', 2.2', an additional first further and an additional second further mass 3.1', 3.2', and an additional first, an additional second, and an additional third coupling structure 4.1', 4.2', 4.3'. The first and second masses 2.1, 2.2 are each configured as a first and a second rectangular frame structure. The first further and second further masses 3.1, 3.2 are configured as a first and a second rectangular frame structure.2 is each designed as a rectangular frame structure and arranged in a row oriented along the Y-direction with the first and second masses. The first and second masses 2.1, 2.2 are connected to the first and second additional masses 3.1, 3.2 via the first and third coupling structures 4.1, 4.3 respectively, and the first additional mass 3.1 is connected to the second additional mass 3.2 via the second coupling structure 4.2. Between the first mass 2.1 and the first coupling structure 4.1 and between the second mass 2.2 and the third coupling structure 4.3, connecting structures 6.1, 6.2 in the form of resilient circular loop structures (or Phi springs) are inserted, which connect the first mass 2.1 and the first coupling structure 4.1 and the second mass and the third coupling structure 4.3 in a materially bonded manner, with between the first further mass 3.1 and the first or second R. 412881.

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[0050] Coupling structures 4.1, 4.2 and between the second additional mass 3.2 and the second and third coupling structures 4.2, 4.3, further connecting structures 7.1, 7.2, 7.3, 7.4 are inserted in the form of resilient circular loop structures (or phi springs), which connect the first additional mass 3.1 and the first and second coupling structures 4.1, 4.2 and the second additional mass 3.2 and the second and third coupling structures 4.2, 4.3 in a metallurgical bond. The first and second masses 2.1, 2.2 and the first additional and second additional masses 3.1, 3.2 each have detection electrodes 8.1, 8.2, 8.3, 8.4 in the form of an electrode comb. The first and second drive structures 1.1, 1.2 drive the first and second masses 2.1, 2.2 to oscillations along the Y-axis.As a result of a first rotation rate, in particular a rotation rate about the Z-axis, 100 Coriolis forces arise in the rotating reference system or coordinate system of the micromechanical rotation rate sensor along the X-axis, which act on the first mass 2.1 or on the second mass 2.2 and cause them to oscillate along the X-axis. The first mass 2.1 and second mass 2.2, thus driven, transmit forces via the connecting structures 6.1, 6.2 at the connection points between the coupling structures 4.1, 4.2, 4.3 and the masses 2.1, 2.2 to the coupling structures and also generate an oscillating torque at the first coupling structure 4.1 and the third coupling structure 4.3 respectively, which causes the first coupling structure 4.1 or the third coupling structure 4.3 to undergo a torsional vibration or an oscillating pivoting motion about a first coupling axis of rotation of the first coupling structure 4.1 or 4.3, respectively.A third coupling axis of rotation of the third coupling structure 4.3 is displaced, wherein the first coupling axis of rotation passes through a first substrate connection of the first coupling structure 4.1 and / or perpendicular to the main extension plane of the micromechanical rotation rate sensor 100, and / or the third coupling axis of rotation passes through a third substrate connection of the third coupling structure 4.3 and / or perpendicular to the main extension plane of the micromechanical rotation rate sensor 100. Through the further connecting structures 7.1, 7.2, 7.3, 7.4, the first additional mass 3.1 and the second additional mass 3.2 are thereby set into a linear oscillation oriented along the X-axis. The first, the second, and the third coupling structure 4.1. 4.2, 4.3 are therefore designed as rectangular frame structures, which have frames that act as lever arms and cause a linear oscillatory movement along the X-axis (horizontal) in the positive X-direction inR. 412881.

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[0052] a linear oscillatory motion is deflected in the negative X-direction (and vice versa). The oscillatory motions thus coupled of the first and second masses 2.1, 2.2, the first, second, and third coupling structures 4.1, 4.2, 4.3, and the first additional mass 3.1 and the second additional mass 3.2 (as components of the mass system 5) thus form a further first detection mode (for the detection of the first rotation rate) of the mass system 5 (here a rotation rate about the Z-axis). The excitability of the further first detection mode by a rotational acceleration of the micromechanical rotation rate sensor 100 is inhibited and / or suppressed by the fact that torques generated by forces exerted by the first and second masses 2.1, 2.2, and by the first additional mass 3.1 and the second additional mass 3.2 are not affected.2 act on the lever arms of the coupling structures, cancel each other out at least partially or superimpose destructively (or subtractively), wherein the forces are in particular inertial forces in the accelerated reference frame of the micromechanical rotation rate sensor 100.

[0053] Figure 2b schematically shows a micromechanical gyroscope 100 in the second embodiment according to the present invention. The left-hand illustration shows the linear vibration directions of the drive structures 1.1, 1.2 and the first and second masses 2.1, 2.2, indicated by red arrows. The left-hand illustration also shows the linear vibration directions of the additional drive structures 1.1', 1.2' and the additional first and second masses 2.1', 2.2'. Furthermore, the left-hand illustration shows the torsional vibration directions of the first rotor structure 9.1 and the second rotor structure 9.2. The right-hand illustration shows the linear vibration directions of the first mass 2.2 and the second mass 2.2, and of the first additional mass 2.1' and the second additional mass 2.2' due to Coriolis forces at a first rotation rate about the Z-axis.Furthermore, the linear oscillation directions of the additional first mass 2.1', the additional second mass 2.2', the additional first further mass 3.1', and the additional second further mass 3.2' due to Coriolis forces at a first rotation rate about the Z-axis are shown. All directions shown apply to a first point in time during the oscillation motion of a drive mode or the further first detection mode of the micromechanical rotation rate sensor 100.R. 412881.

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[0055] Figure 2c shows a schematic representation of a micromechanical angular rate sensor 100 in the second embodiment according to the present invention. In the left-hand illustration, the first and second masses 2.1, 2.2 (corresponding to Coriolis masses) each have detection electrodes 8.1, 8.4 in the form of an electrode comb, whereas the first additional mass 3.1 and the second additional mass 3.2 are each designed as rectangular structures (as balancing masses) and do not have any detection electrodes. In the right-hand illustration, the first and second masses 2.1, 2.2 (corresponding to rectangular structures as Coriolis masses) do not have any detection electrodes, whereas the first additional mass 3.1 and the second additional mass 3.2 (corresponding to balancing masses) each have detection electrodes in the form of electrode combs.

[0056] Figure 3 shows a schematic representation of a micromechanical angular rate sensor 100 in a third embodiment (left illustration) and a fourth embodiment (right illustration) according to the present invention. In both the left and right illustrations, an additional mass system 5' has been omitted because the first detection mode (in the case of the left illustration) and the first further detection mode (in the case of the right illustration) of the individual mass system 5 are already robust against rotational accelerations in the manner described above.

[0057] The invention is not limited to the embodiments described above, but can instead be used for a wide variety of applications in inertial sensor-based navigation, orientation, and stabilization of objects. A processing unit within the sensor can control the operation of the inertial sensor (e.g., power-saving mode, measuring ranges), validate sensor signals and check them for tolerances (e.g., for internal sensor monitoring), process signals (e.g., calculate position or orientation, filter data), and select communication protocols. Various algorithms, including self-learning AI-based ones, can be used in the processing unit for evaluating and processing the data from the inertial sensors, temperature sensors, and external data (e.g., GPS data, odometer data). Exemplary applications can be found in: R. 412881

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[0059] -- Automotive applications (e.g. ESP, Roll Over Sensing, Airbag, Road Noise Suppression, Anti-Theft Alarm System, Parking Bump Detection, Road Condition Monitoring).

[0060] - in two-wheeled applications such as motorcycles, bicycles, and scooters (e.g., in ESP / AirBag, tilt detection, balancing)

[0061] - in the case of three-wheeled vehicles such as tuk-tuks

[0062] - in the avionics field (e.g. in flight stabilization and flight control)

[0063] - in industrial robot applications (e.g. in position control of excavator buckets, drilling, image stabilization, flight control, alignment of satellite antennas, fine motor skills when gripping robots)

[0064] - in applications for home and garden (e.g., in lawnmower navigation, door position monitoring)

[0065] - in medical applications (e.g. fall detection, movement and posture tracking)

[0066] - in sports and leisure applications (e.g. motion detection, posture detection (in golf clubs, tennis rackets or skis)

[0067] - in numerous consumer applications, e.g., in smartphones, tablets, wearables, hearables, drones, gaming toys, AR or VR

[0068] Furthermore, numerous designs, changes, modifications, deviations, variations and embodiments are possible, all of which fall within the scope of the invention.

Claims

R. 412881 - 14 - 1. Micromechanical gyroscope (100) comprising at least one drive structure (1.1; 1.2; 1.1 1.2'), at least one mass (2.1; 2.2; 2.1 2.2'), at least one further mass (3.1; 3.2; 3.1'; 3.2') and at least one coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3'), wherein the mass (2.1; 2.2; 2.1'; 2.2') is connected to the further mass (3.1; 3.2; 3.1'; 3.2') by the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3'), wherein the micromechanical gyroscope (100) comprising at least one mass system (5), wherein the mass system (5) comprises the mass (2.1; 2.2; 2.1 '; 2.2') and the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and the further mass (3.1; 3.2; 3.1 '; 3.2'), wherein the mass system (5) is excitable to oscillation in a first detection mode for the detection of a first rotation rate about a first rotation axis (A), wherein the first detection mode is a rotational oscillation of the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') characterized in that the excitability of the first detection mode by a rotational acceleration of the micromechanical rotation rate sensor (100) is inhibited and / or suppressed by the fact that a torque exerted by the rotational acceleration from the mass (2.1; 2.2; 2.1 '; 2.2') on the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and a further torque exerted by the rotational acceleration from the further mass (3.1; 3.2; 3.1 '; 3.2') on the coupling structure (4.1 ; 4.2; 4.3; 4.1 '; 4.2'; 4.3') at least partially cancel each other out.

2. Micromechanical gyroscope (100) according to claim 1, wherein the micromechanical gyroscope (100) is a three-axis gyroscope, wherein the first axis of rotation is in particular the Z-axis, wherein in particular the three-axis gyroscope can be excited to oscillate in a second detection mode for the detection of a second gyroscope about a second axis of rotation, in particular the X-axis, wherein in particular the three-axis gyroscope can be excited to oscillate in a third detection mode for the detection of a third gyroscope about a third axis of rotation, in particular the Y-axis.

3. Micromechanical angular rate sensor (100) according to one of the preceding claims, wherein the first detection mode is applied to the mass (2.1; 2.2; 2.1'; 2.2')R. 412881 - 15 - acting, in particular oscillating, Coriolis forces can be excited, wherein the Coriolis forces occur in a reference system of the micromechanical rotation rate sensor (100) which rotates with the first rotation rate, wherein the Coriolis forces occur as a result of the first rotation rate and a, in particular oscillating, drive movement of the mass (2.1 ; 2.2; 2.1 2.2') driven by the drive structure (1.1, 1.2, 1.1 ', 1.2').

4. Micromechanical angular rate sensor (100) according to one of the preceding claims, wherein the torque acting on the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') can be generated by a force transmitted from the mass (2.1; 2.2; 2.1'; 2.2') to the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') and / or the further torque acting on the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') by a force transmitted from the further mass (3.1; 3.2; 3.1'; 3.2') to the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') transmitted, further force can be generated, wherein the force and / or the further force occurs as a result of the rotational acceleration, in particular a rotational acceleration about the first axis of rotation (A), of the micromechanical rotation rate sensor (100), in particular as an inertial force in the rotationally accelerated reference frame of the micromechanical rotation rate sensor (100), wherein the force is applied at a connection point between mass (2.1; 2.2; 2.1 '; 2.2') and coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') from the mass (2.1; 2.2; 2.1 '; 2.2') to the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and / or the further force at a further connection point between the further mass (3.1 ; 3.2; 3.1 '; 3.2') and the coupling structure (4.1 ; 4.2; 4.3; 4.1 '; 4.2'; 4.3') from the further mass (3.1 ; 3.2; 3.1 '; 3.2') to the coupling structure (4.1 ; 4.2; 4.3; 4.1 '; 4.2'; 4.3') is transferable.

5. Micromechanical gyroscope (100) according to claim 4, wherein the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') is configured as a deflection structure and comprises three extensions, in particular three web-shaped extensions, wherein in particular the three web-shaped extensions form a T-shaped structure, wherein the connection point is located in particular at one end of a first extension of the three extensions and / or the further connection point is located at one end of a second extension of the three extensions or the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') is configured as a deflection structure and twoR. 412881 - 16 - The extensions (41), in particular two web-shaped extensions, comprise in particular the two web-shaped extensions forming an L-shaped structure, wherein the connection point is located in particular at one end of a first extension of the two extensions and / or the further connection point is located at one end of a second extension of the two extensions.

6. Micromechanical angular rate sensor (100) according to claim 5, wherein the first extension of the three extensions is oriented perpendicular to the second extension of the three extensions and / or the first extension of the two extensions is oriented perpendicular to the second extension of the two extensions.

7. Micromechanical gyroscope (100) according to claim 4, wherein the coupling structure (4.1; 4.2; 4.3; 4.1'; 4.2'; 4.3') is designed in the form of a frame, in particular a rectangular frame, wherein the connection point is located in particular on a first side of the frame, preferably near the center or in the center of the first side of the frame, and / or the further connection point is located on a second side of the frame, in particular opposite the first side of the frame, preferably near the center or in the center of the second side of the frame.

8. Micromechanical gyroscope (100) according to any one of claims 5 to 7, wherein a connection structure (6.1; 6.2; 6.3; 6.4; 6.1'; 6.2'; 6.3'; 6.4') is inserted at the connection point and / or a further connection structure (7.1; 7.2; 7.3; 7.4; 7.1'; 7.2'; 7.3'; 7.4') is inserted at the further connection point, wherein the connection structure (6.1; 6.2; 6.3; 6.4; 6.1'; 6.2'; 6.3'; 6.4') is inserted such that the connection structure (6.1; 6.2; 6.3; 6.4; 6.1'; 6.2'; 6.3'; 6.4') is materially bonded with the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and is materially bonded to the mass (2.1 ; 2.2; 2.1 '; 2.2') and the further coupling structure (7.1; 7.2; 7.3; 7.4; 7.1 '; 7.2'; 7.3'; 7.4') is inserted such that the further coupling structure (7.1; 7.2; 7.3; 7.4; 7.1 '; 7.2'; 7.3'; 7.4') is materially bonded to the coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and materially bonded to the further mass (3.1 ; 3.2; 3.1 '; 3.2') is connected, wherein the connection structure (6.1; 6.2; 6.3; 6.4; 6.1 '; 6.2'; 6.3'; 6.4') is in particular a resilient connection structure (6.1; 6.2; 6.3; 6.4; 6.1 '; 6.2'; 6.3'; 6.4'), preferably in FormR. 412881. - 17 - a U-loop and / or in the form of a circular loop and / or in the form of a beam, and / or the further connecting structure (7.1; 7.2; 7.3; 7.4; 7.1'; 7.2'; 7.3'; 7.4') is designed in particular as a resilient further connecting structure (7.1; 7.2; 7.3; 7.4; 7.1'; 7.2'; 7.3'; 7.4'), preferably in the form of a U-loop and / or in the form of a circular loop and / or in the form of a beam, wherein in particular the connecting structure (6.1; 6.2; 6.3; 6.4; 6.1'; 6.2'; 6.3'; 6.4') extends along a direction perpendicular to the connecting axis between mass (2.1; 2.2; 2.1'; 2.2') and coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and parallel to a principal extension plane of the micromechanical gyroscope (100) exhibits its greatest spring stiffness and / or in particular the further connecting structure (7.1; 7.2; 7.3; 7.4; 7.1 '; 7.2'; 7.3'; 7.4') along a further direction perpendicular to the connecting axis between further mass (3.1; 3.2; 3.1 '; 3.2') and coupling structure (4.1; 4.2; 4.3; 4.1 '; 4.2'; 4.3') and parallel to the main extension plane of the micromechanical gyroscope (100) exhibits its greatest spring stiffness.

9. Micromechanical angular rate sensor (100) according to one of the preceding claims, wherein the mass (2.1 ; 2.2; 2.1 '; 2.2') and / or the further mass (3.1 ; 3.2; 3.1 '; 3.2') comprises detection electrodes (8.1; 8.2; 8.3; 8.4; 8.1 '; 8.2'; 8.3'; 8.4'), in particular for detecting the first angular rate about the first axis of rotation (A), preferably in the form of an electrode comb.

10. Micromechanical gyroscope (100) according to one of the preceding claims, wherein the mass (2.1; 2.2; 2.1 '; 2.2') is designed as a frame structure, in particular in a U-shape, and / or the further mass (3.1; 3.2; 3.1 '; 3.2') is designed as a frame structure, in particular as a rectangular frame, preferably as a rectangular frame with a recess, particularly preferably arranged in the center of the frame.

11. Micromechanical gyroscope (100) according to any one of the preceding claims, wherein the mass system (5) comprises a first mass (2.1; 2.1') ​​and a second mass (2.2; 2.2') and a first further mass (3.1; 3.1') and a second further mass (3.2; 3.2') and a first coupling structure (4.1; 4.1') and a second coupling structure (4.2; 4.2'), wherein the first coupling structure (4.1; 4.1')R. 412881 - 18 - and the second coupling structure (4.2; 4.2') are configured as T-shaped structures, wherein the first additional mass (3.1; 3.1') and the second additional mass (3.2; 3.2') are configured as rectangular frames with a recess arranged in the center of the frame, wherein the first mass (2.1; 2.1') ​​and the second mass (3.1; 3.1') are preferably configured as U-shaped structures and the web ends of the U-shaped structures are each connected to a web end of the first coupling structure (4.1; 4.1') and the second coupling structure (4.2; 4.2'), wherein the ends of the middle webs of the first coupling structure (4.1; 4.1') and second coupling structure (4.2; 4.2') are each connected to a point in the recesses of the first additional mass (3.1; 3.1 ') and the second additional mass (3.2; 3.2') are connected.

12. Micromechanical angular rate sensor (100) according to any one of claims 1 to 10, wherein the mass system (5) comprises a first mass (2.1; 2.1') ​​and a second mass (2.2; 2.2') and a first further mass (3.1; 3.1') and a second further mass (3.2; 3.2') and a first coupling structure (4.1; 4.1') and a second coupling structure (4.2; 4.2') and a third coupling structure (4.3; 4.3'), wherein in particular the first coupling structure (4.1; 4.1') and the second coupling structure (4.2; 4.2') and the third coupling structure (4.3; 4.3') are each configured as a rectangular frame and the first mass (2.1; 2.1') ​​and the second mass (2.2; 2.2') and the first additional mass (3.1 ; 3.1 ') and the second additional mass (3.2; 3.2') are coupled to each other by means of the first coupling structure (4.1; 4.1 ') and the second coupling structure (4.2; 4.2') and the third coupling structure (4.3; 4.3').

13. Micromechanical gyroscope (100) according to one of the preceding claims, wherein the micromechanical gyroscope (100) comprises an additional mass system (5'), wherein the additional mass system (5') is arranged on a plane of symmetry of the micromechanical sensor (100), in particular on the YZ plane and / or the XZ plane, mirrored to the mass system (5), wherein in particular the additional mass system (5') has the same arrangement and / or configuration and / or number of components as the mass system (5) and / or is essentially identical in construction to the mass system (5).

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