Component-mounting device and component suction nozzle

Abstract

A component-mounting device (20) comprises: a component suction nozzle (40) for suctioning a component; and a work head (24) to which the component suction nozzle is attached and which mounts the component onto a substrate by means of said component suction nozzle. The component suction nozzle comprises: a shaft-shaped nozzle main body (41) that has, at the tip thereof, a component suction surface (412) in which a suction port (413) is formed; and a nozzle flange (45) that holds the nozzle main body so as to be relatively movable in the axial direction of the nozzle main body. The work head (24) comprises: a lifting shaft (27); a nozzle holder (60) that is attached to a lower end part of the lifting shaft and holds the component suction nozzle; and a buffer part (70) that contacts the nozzle main body of the component suction nozzle held by the nozzle holder, and biases the nozzle main body in a direction away from the lifting shaft. The nozzle holder (60) comprises: a first holding part (61) that holds the nozzle flange; and a second holding part (62) that holds the upper part of the nozzle main body.

Description

Component mounting apparatus and component suction nozzle

[0001] The present invention relates to a component mounting apparatus and a component suction nozzle.

[0002] There is known a component mounting apparatus that mounts components onto a substrate using a component suction nozzle. The component mounting apparatus is configured to allow replacement of the component suction nozzle, and performs component mounting work while replacing the component suction nozzle with one suitable for the component. Specifically, a nozzle holder is provided on a working head, and a nozzle flange of the component suction nozzle is detachably attached to the nozzle holder.

[0003] In recent years, the speed of component mounting has been increased to improve productivity, and components have also been miniaturized in response to the demand for miniaturization of electronic devices. For this reason, component mounting apparatuses having a buffer structure for reducing the impact applied to components when sucking components or mounting them on a substrate have appeared (see, for example, Patent Documents 1 and 2).

[0004] Japanese Patent Application Laid-Open No. 2017-011228 Japanese Patent Application Laid-Open No. 2017-027997

[0005] In the component mounting apparatus having the above-described buffer structure, a nozzle body including a nozzle tip is mounted so as to be relatively movable in the axial direction relative to the nozzle flange, and a structure is adopted in which the nozzle body is biased by a buffer spring. For this reason, there has been a problem that variation in the position of the component suction surface of the nozzle increases, which reduces the component mounting accuracy.

[0006] An object of the present invention is to provide a component mounting apparatus and a component suction nozzle capable of suppressing a decrease in component mounting accuracy.

[0007] (1) A component mounting device according to one aspect of the present invention comprises a component suction nozzle for adsorbing a component, and a work head to which the component suction nozzle is mounted, for mounting the component onto a substrate by the component suction nozzle, wherein the component suction nozzle comprises an axial nozzle body portion having a component suction surface with a suction port formed at its tip, and a nozzle flange that holds the nozzle body portion so as to be movable relative to the nozzle body portion along the axial direction of the nozzle body portion, the work head comprises a lifting shaft, a nozzle holder mounted on the lower end of the lifting shaft for holding the component suction nozzle, and a buffer portion that contacts the nozzle body portion of the component suction nozzle held by the nozzle holder and biases the nozzle body portion toward a direction away from the lifting shaft, the nozzle holder comprises a first holding portion for holding the nozzle flange, and a second holding portion for holding the upper part of the nozzle body portion.

[0008] In the component mounting device described in (1), the nozzle flange and the nozzle body are relative to each other, with the nozzle flange held by the first holding part and the nozzle body held by the second holding part. At this time, the nozzle body is subjected to a biasing force from the buffer part, so it is pressed against the nozzle flange, and the component suction surface of the nozzle body is positioned. As a result, variations in the position of the component suction surface are suppressed, and a decrease in the accuracy of component mounting can be suppressed.

[0009] (2) In the component mounting device described in (1) above, the second holding portion may restrict movement of the nozzle body portion in a direction perpendicular to the axial direction and rotational movement about the axial direction, while holding the nozzle body portion in a state that allows relative movement in the axial direction with respect to the nozzle body portion.

[0010] According to the component mounting device described in (2), the second holding part restricts movement in the direction perpendicular to the axial direction and rotational movement about the axial direction in the nozzle holder while allowing relative movement in the axial direction in the nozzle body. This improves the positioning accuracy of the component suction surface of the nozzle body. Therefore, the decrease in component mounting accuracy can be further suppressed.

[0011] (3) In the component mounting device described in (1) or (2) above, the second holding portion may be provided with a fitting portion that fits with the upper part of the nozzle body.

[0012] According to the component mounting device described in (3), the fitting portion of the second holding portion is fitted with the upper part of the nozzle body, so that movement of the nozzle body in a direction perpendicular to the axial direction can be restricted. As a result, misalignment of the nozzle body in that direction can be suppressed, and the positioning accuracy of the component suction surface of the nozzle body can be further improved.

[0013] (4) In the component mounting device described in (3) above, a recessed structure may be formed on the outer circumference of the upper part of the nozzle body, and the second holding portion may be provided with an engaging portion that engages with the recessed structure and guides relative movement in the axial direction.

[0014] (4) According to the component mounting device described above, the engaging portion of the second holding portion engages with the uneven structure of the nozzle body portion and guides relative movement in the axial direction, so that the engaging portion can be engaged with the nozzle body portion while allowing relative movement in the axial direction of the nozzle body portion.

[0015] (5) In the component mounting device described in (4) above, the uneven structure may include a protrusion that protrudes from the outer circumference, and the engaging portion may be a notch that is open at the bottom and engages with the protrusion.

[0016] (5) According to the component mounting device described above, the protrusion that extends from the outer circumference of the upper part of the nozzle body engages with a notch formed in the second retaining part that is open at the bottom, so that the engaging part of the second retaining part can be reliably engaged with the nozzle body with a simple structure.

[0017] (6) A component suction nozzle according to another aspect of the present invention is a component suction nozzle that is detachably attached to a nozzle holder of a component mounting device for mounting components on a substrate, comprising: an axial nozzle body having a component suction surface with a suction port formed thereon at its tip; and a nozzle flange that holds the nozzle body so as to be movable relative to the nozzle body along the axial direction of the nozzle body, wherein the nozzle flange has a first held portion that is held by a first holding portion provided on the nozzle holder, and the nozzle body has a second held portion that is held by a second holding portion provided on the nozzle holder.

[0018] In the component suction nozzle described in (6), the nozzle flange and the nozzle body are held relative to each other, with the first held portion of the nozzle flange being held by the first holding portion, and the second held portion of the nozzle body being held by the second holding portion. In this way, the nozzle flange and the nozzle body are held individually, so the position of the nozzle body is less affected by the position of the nozzle flange. As a result, variations in the position of the component suction surface of the nozzle body are suppressed, and a decrease in the accuracy of component mounting can be suppressed.

[0019] (7) In the component suction nozzle described in (6) above, the second retained portion may be the base end of the nozzle body opposite to the tip and fitted to the second retained portion.

[0020] In the component suction nozzle described in (7), the second retained portion, which is the base end of the nozzle body, is fitted to the second retaining portion, so that movement of the nozzle body in a direction perpendicular to the axial direction can be restricted by the second retaining portion. As a result, misalignment of the nozzle body in that direction can be suppressed, and the positioning accuracy of the component suction surface of the nozzle body can be further improved.

[0021] (8) In the component suction nozzle described in (7) above, a recessed structure may be formed on the outer circumference of the second retained portion, and the recessed structure may engage with the second retaining portion to guide the relative movement in the axial direction with respect to the second retaining portion.

[0022] (8) With the component suction nozzle described above, the uneven structure of the nozzle body engages with the second holding portion, which guides the relative axial movement of the nozzle body. Therefore, the second holding portion can be engaged with the nozzle body while allowing relative axial movement of the nozzle body.

[0023] (9) In the component suction nozzle described in (8) above, the uneven structure may include protrusions that protrude from the outer circumference.

[0024] (9) According to the component suction nozzle described above, a protrusion is formed at the base end of the nozzle body portion, which protrudes from the outer circumference, so that the protrusion can be engaged with the second holding portion with a simple structure.

[0025] According to the component mounting device and the like of the present invention, it is possible to suppress a decrease in the accuracy of component mounting.

[0026] Figure 1 is an explanatory diagram showing the schematic configuration of a component mounting system according to an embodiment. Figure 2 is a cross-sectional view showing a work head and a component suction nozzle attached to the work head according to an embodiment. Figure 3 is a cross-sectional view showing a work head and a component suction nozzle attached to the work head according to an embodiment. Figure 4 is a perspective view showing a component suction nozzle according to an embodiment. Figure 5 is a cross-sectional view showing a component suction nozzle according to an embodiment. Figure 6 is a cross-sectional view showing a component suction nozzle according to an embodiment. Figure 7 is a cross-sectional view showing the state in which the nozzle flange is held by the first holding part according to an embodiment. Figure 8 is a perspective view showing the nozzle body according to an embodiment. Figure 9 is a perspective view showing the engaged state between the protrusion and the engaging part according to an embodiment. Figure 10 is a cross-sectional view showing the engaged state between the protrusion and the engaging part according to an embodiment. Figure 11 is a cross-sectional view showing the engaged state between the protrusion and the engaging part according to an embodiment. Figure 12 is a cross-sectional view showing the state in which the nozzle body according to an embodiment is raised relative to the nozzle flange. Figure 13 is a perspective view of a filter unit according to an embodiment. Figure 14 is a cross-sectional view of a filter unit according to an embodiment. Figure 15 is a cross-sectional view of a filter unit according to an embodiment. Figure 16 is a cross-sectional view showing the positional relationship between the filter unit and the stopper according to the embodiment. Figure 17 is a cross-sectional view showing the state of the filter unit according to the embodiment before it is removed from the work head. Figure 18 is a cross-sectional view showing the state of the filter unit according to the embodiment after it has been removed from the work head. Figure 19 is a cross-sectional view showing the filter unit according to Modification 1. Figure 20 is a cross-sectional view showing the filter unit according to Modification 2.

[0027] The following describes embodiments of the present invention and their modifications, including component mounting devices, with reference to the drawings. The embodiments and modifications described below are general or specific examples. The numerical values, shapes, materials, components, arrangement positions, and connection configurations shown in the following embodiments and modifications are examples only and are not intended to limit the present invention. Furthermore, the figures are schematic diagrams, and dimensions are not necessarily precisely represented. In addition, the same or similar components are denoted by the same reference numerals in each figure. In the following description, the X-axis direction is the width direction of each device (component mounting device 20 and trolley 21) provided in the component mounting system 10, the Y-axis direction is the direction in which each device is arranged, and the Z-axis direction is the height direction (vertical direction) of each device. The θ direction is the rotational direction around the Z-axis direction. In the following description, the X-axis direction may also be referred to as the lateral direction, the Y-axis direction as the front-back direction, and the Z-axis direction as the up-down direction. Also, rotational motion around the Z-axis direction may be referred to as θ rotation.

[0028] Furthermore, expressions indicating relative directions or orientations, such as parallel and orthogonal, include cases where the directions or orientations are not strictly accurate. For example, when two directions are parallel, it means not only that they are perfectly parallel, but also that they are substantially parallel, i.e., that they may have a difference of a few percent. Moreover, simply saying "in the X-axis direction" means either the bidirectional or unidirectional direction parallel to the X-axis. The same applies to terminology related to the Y-axis and Z-axis.

[0029] (Embodiment) Figure 1 is an explanatory diagram showing the schematic configuration of a component mounting system 10 according to an embodiment. As shown in Figure 1, the component mounting system 10 according to the embodiment comprises a component mounting device 20 and a trolley 21.

[0030] The component mounting device 20 is a device that mounts components (not shown) supplied by a component supply unit 22 (feeder) on a trolley 21 onto a substrate 2. The component mounting device 20 has an air passage connected to the suction port of a component suction nozzle 40 attached to a work head 24, and by introducing negative pressure from a pneumatic source into the air passage, the component suction nozzle 40 holds the components and mounts them onto the substrate 2. Specifically, the component mounting device 20 includes a work head holding section 25A having multiple work heads 24 (two in this embodiment) that take components from the component supply unit 22 on the trolley 21 and transfer and mount them onto the substrate 2, a horizontal movement section 25B that moves the work head holding section 25A horizontally, and a substrate transport section 26 that transports the substrate 2 on which components have been mounted by each work head 24 to a subsequent device (not shown). The substrate transport section 26 is installed on the upper surface of the base 20A of the component mounting device 20. The work head holding section 25A has a lifting mechanism (not shown) for raising and lowering the work head 24 and a rotation mechanism (not shown) for rotating it around a rotation axis along the Z axis. In other words, the work head 24 and the horizontal movement section 25B function as a head movement section 25 that moves the work head 24.

[0031] The head movement unit 25 has two work heads 24 arranged at a predetermined distance in the Y-axis direction. The head movement unit 25 moves each work head 24 in the X-axis, Y-axis, and Z-axis directions, and also rotates it around the Z-axis direction. In this embodiment, the diagram shows a case where the component mounting device 20 is equipped with two work heads 24, but the number of work heads installed can be anything.

[0032] The trolley 21 is a trolley positioned and connected to the parts mounting device 20 in the negative Y-axis direction. The trolley 21 is connected to the parts mounting device 20 by a connecting part (not shown) provided on the base 20A. The trolley 21 includes a feeder mounting section 3 on which a parts supply unit 22 that supplies parts by pulling in a carrier tape 4 containing parts is mounted, and a reel housing section 29 that detachably houses a reel 5 on which the carrier tape 4 is wound. The feeder mounting section 3 is capable of holding multiple parts supply units 22 arranged in the X-axis direction. The reel housing section 29 is capable of holding multiple reels 5 arranged in the X-axis direction.

[0033] The parts supply unit 22 pulls out the carrier tape 4 from the reel 5 housed in the reel storage section 29 and transports the parts stored on the carrier tape 4 to the pick-up position by the work head 24.

[0034] Next, the details of the work head 24 provided in the component mounting device 20 will be described. In this embodiment, one of the two work heads 24, the one in the negative Y-axis direction, will be described as an example. The other work head 24 is basically the same.

[0035] Figures 2 and 3 are cross-sectional views showing a work head 24 and a parts suction nozzle 40 attached to the work head 24 according to an embodiment. Figure 3 is a cross-sectional view of the cross-section including the line III-III in Figure 2.

[0036] As shown in Figures 2 and 3, the work head 24 includes a lifting shaft 27, a joint portion 28, a nozzle holder 60, a cushioning portion 70, and a stopper 80.

[0037] The lifting shaft 27 is a shaft supported by the work head holding part 25A. The lifting shaft 27 moves up and down in the Z-axis direction by the work head holding part 25A and also rotates around the Z-axis direction. The lifting shaft 27 is a cylindrical body, and a concave air passage 271 extending upward is formed on its lower end surface (tip surface). As a result, the lower end of the lifting shaft 27 is formed in a cylindrical shape, and the portion of the lifting shaft 27 above the air passage 271 is solid. In the air passage 271, the side facing the pneumatic source is upward, and the side opposite the pneumatic source is downward. The direction of airflow through the air passage 271 is in the Z-axis direction.

[0038] In the air passage 271, the inner diameter of the upper end is smaller than the inner diameter of the portion below the upper end. The portion of the air passage 271 with a larger inner diameter is designated as the first large-diameter section 272, and the portion with a smaller inner diameter is designated as the first small-diameter section 273. A portion of the buffer section 70 is housed in the first large-diameter section 272. In the air passage 271, the boundary between the first large-diameter section 272 and the first small-diameter section 273 is stepped.

[0039] In the lifting shaft 27, two connecting passages 274 are formed in the wall portion facing the first small-diameter portion 273 of the air passage 271, penetrating toward the air passage 271. The two connecting passages 274 are arranged side by side in the radial direction of the lifting shaft 27. In addition, in the lifting shaft 27, one insertion hole 275 is formed in the wall portion facing the lower end of the first large-diameter portion 272, penetrating toward the air passage 271. A stopper 80 is inserted into the insertion hole 275.

[0040] The joint portion 28 is a component attached to the lifting shaft 27 and connects the piping leading to the pneumatic source to the air passage 271. The joint portion 28 is attached to the lifting shaft 27 via two bearings 281. The two bearings 281 are spaced apart in the Z-axis direction. Therefore, even if the lifting shaft 27 rotates around the Z-axis direction, the joint portion 28 does not rotate. Inside the space between the two bearings 281, two sealing materials 282 are spaced apart in the axial direction. The two sealing materials 282 are in continuous contact with the inner circumferential surface of the joint portion 28 and the outer circumferential surface of the lifting shaft 27 over their entire circumference. Therefore, the portion of the space between the outer circumferential surface of the lifting shaft 27 and the inner circumferential surface of the joint portion 28 that is sandwiched by the two sealing materials 282 is airtight. In the joint portion 28, an annular channel 283 is formed between the two sealing materials 282, which communicates with the air channel 271 via each connecting channel 274.

[0041] The joint section 28 is provided with a tube mounting section 284 to which one end of a tube (part of the piping leading to the pneumatic source) is attached. The tube mounting section 284 is equipped with a communication passage 285 that communicates with the annular flow path 283. In other words, the air pressure (negative or positive pressure) generated at the pneumatic source is introduced from the tube through the communication passage 285 of the joint section 28, through the annular flow path 283, and into the air flow path 271 via the communication passage 274 of the lifting shaft 27.

[0042] The nozzle holder 60 is mounted on the lower end of the lifting shaft 27 and is the part that holds the component suction nozzle 40. The nozzle holder 60 comprises a first holding part 61 and a second holding part 62.

[0043] First, the second holding portion 62 will be described. The second holding portion 62 is a part that holds the nozzle body 41 of the component suction nozzle 40. The second holding portion 62 is attached to the lower end of the elevating shaft 27. The second holding portion 62 is a cylindrical body provided with a shaft hole 621 penetrating in the Z-axis direction. In the shaft hole 621, the inner diameter of the upper end portion is larger than the inner diameter of a portion below the upper end portion. The portion with a larger inner diameter of the shaft hole 621 is defined as a second large-diameter portion 623, and the portion with a smaller inner diameter is defined as a second small-diameter portion 624. In the shaft hole 621, a boundary portion between the first large-diameter portion 272 and the first small-diameter portion 273 forms a step. The lower end of the elevating shaft 27 is fitted into the second large-diameter portion 623. The second holding portion 62 is positioned relative to the elevating shaft 27 by the contact between the step of the shaft hole 621 and the lower end of the elevating shaft 27. The second holding portion 62 is fixed to the elevating shaft 27 with a fastener such as a bolt in a state of being positioned. The first large-diameter portion 272 of the elevating shaft 27 and the second small-diameter portion 624 of the second holding portion 62 have the same inner diameter. Therefore, a step is less likely to occur between the inner circumferential surface of the first large-diameter portion 272 and the inner circumferential surface of the second small-diameter portion 624. This allows the filter unit 90 (described later) to move smoothly inside the first large-diameter portion 272 and the second small-diameter portion 624.

[0044] The second holding portion 62 includes a first portion 625, a second portion 626, and a third portion 627 that are arranged in order from the positive direction of the Z axis. The first portion 625 is a cylindrical portion having the largest outer diameter. The third portion 627 is a cylindrical portion having the smallest outer diameter. The second portion 626 is a cylindrical portion having an outer diameter between that of the first portion 625 and the third portion 627.

[0045] In the first portion 625, a stopper hole 628 continuous with the insertion hole 275 of the elevating shaft 27 is formed along the radial direction. A stopper 80 is fitted into this stopper hole 628. The stopper 80 locks a filter unit 90, which will be described later, to prevent the filter unit 90 from falling out of the air flow path 271.

[0046] The first holding portion 61 is attached and fixed to the second portion 626. The third portion 627 is a portion that holds the nozzle main body 41 inserted into the second small diameter portion 624. The second small diameter portion 624 of the third portion 627 is an example of a fitting portion into which the nozzle main body 41 is fitted. Two engaging portions 629 notched along the Z-axis direction are formed at the tip end of the third portion 627. As shown in FIG. 17 and FIG. 18 described later, each engaging portion 629 is a notch open at the lower side, and has two nozzle main body guide surfaces 629S along the Z-axis direction. The two engaging portions 629 face each other in the radial direction of the third portion 627. Further, a projection 630 protruding in the positive Y-axis direction is provided on a side surface of the third portion 627. In polar coordinates on an XY plane with the origin at the central axis extending in the Z-axis direction of the second small diameter portion 624, the angle between the two engaging portions 629 is 180 degrees, and the projection 630 is located at a position 90 degrees away from the two engaging portions 629.

[0047] Next, the first holding portion 61 will be described. As shown in FIG. 2 and FIG. 3, the first holding portion 61 is a portion that holds the nozzle flange 45 of the component suction nozzle 40. The first holding portion 61 is a cylindrical member, and three ball push screws 622 (see FIG. 7) arranged at predetermined intervals in the circumferential direction are provided inside the first holding portion 61. The ball push screws 622 are arranged along the radial direction of the first holding portion 61. The tip end (ball) of the ball push screw 622 faces the central portion of the first holding portion 61. The tip end of the ball push screw 622 can protrude and retract freely, and is biased in the protruding direction. Each ball push screw 622 engages with the nozzle flange 45, thereby holding the nozzle flange 45.

[0048] The buffer portion 70 is a portion that contacts the nozzle main body 41 of the component suction nozzle 40 held by the nozzle holder 60, and biases the nozzle main body 41 in a direction away from the lifting shaft 27. The buffer portion 70 is accommodated in the first large diameter portion 272 of the lifting shaft 27 and the second small diameter portion 624 of the nozzle holder 60, and is disposed above the nozzle main body 41.

[0049] The buffer section 70 comprises a biasing section 71 and a filter unit 90. The biasing section 71 is positioned above the filter unit 90. The biasing section 71 as a whole is detachably housed within the first large-diameter section 272 (air passage 271). The upper end of the biasing section 71 is in contact with the step between the first large-diameter section 272 and the first small-diameter section 273 on the lifting shaft 27, and the lower end of the biasing section 71 is in contact with the upper end of the filter unit 90. In this state, the biasing section 71 biases the filter unit 90 downward (in the negative Z-axis direction). The biasing section 71 can be of any type as long as it can impart a biasing force to the filter unit 90. In this embodiment, a coil spring is exemplified as the biasing section 71, but other springs such as leaf springs or other elastic materials such as rubber may be used as long as they do not obstruct the airflow in the air passage 271.

[0050] The filter unit 90 is a component that prevents foreign matter from entering the air passage 271. The filter unit 90 is detachably attached to the air passage 271. Part of the filter unit 90 is located within the first large-diameter section 272 (air passage 271), and the other part is located within the second small-diameter section 624. The lower end of the filter unit 90 is in contact with the upper end of the nozzle body section 41. Therefore, the biasing force from the biasing section 71 acts on the nozzle body section 41 via the filter unit 90. Details of the filter unit 90 will be described later.

[0051] The stopper 80 is a pin member that is fitted into the stopper hole 628 of the nozzle holder 60. The stopper 80 may also be a screw. In this case, the stopper hole 628 will be a female screw. When the stopper 80 is fitted into the stopper hole 628, its tip protrudes into the air passage 271 through the insertion hole 275 of the lifting shaft 27. This prevents the filter unit 90, which is placed in the air passage 271, from falling out of the air passage 271.

[0052] Next, the component suction nozzle 40 will be described. The component suction nozzle 40 is a component holder for suctioning components. As described above, the component suction nozzle 40 comprises a nozzle body portion 41 and a nozzle flange 45.

[0053] Figure 4 is a perspective view showing a component suction nozzle 40 according to an embodiment. Figures 5 and 6 are cross-sectional views showing the component suction nozzle 40 according to an embodiment. Figure 6 is a cross-sectional view of the cross-section including the line VI-VI in Figure 5.

[0054] As shown in Figures 2 to 6, in the component suction nozzle 40, the nozzle body portion 41 is integrated with the nozzle flange 45 by being inserted into it.

[0055] The nozzle flange 45 comprises a main cylindrical portion 451 and a flange portion 452. The main cylindrical portion 451 is a cylindrical part in which a recess 451C having a predetermined depth in the Z-axis direction is formed from the upper surface of the main cylindrical portion 451. Furthermore, a central hole 451M smaller than the inner diameter of the recess 451C penetrates the center of the bottom portion 453 of the recess 451C. The recess 451C and the central hole 451M are coaxial with the central axis of the component suction nozzle 40 which extends in the Z-axis direction.

[0056] In the main cylindrical portion 451, a continuous groove 455 is formed on the upper outer peripheral surface. The tip (ball) of each ball set screw 622 of the first holding portion 61 engages with the groove 455, thereby holding the nozzle flange 45 in the first holding portion 61 (see Figure 7). Figure 7 is a cross-sectional view showing the state in which the nozzle flange 45 is held in the first holding portion 61 according to the embodiment. Thus, the main cylindrical portion 451 is an example of a first held portion held in the first holding portion 61.

[0057] Furthermore, the main body cylindrical portion 451 has an alignment groove 456 that is open at the top. When attaching the part suction nozzle 40 to the nozzle holder 60, the projection 630 of the third portion 627 is inserted into this alignment groove 456, thereby aligning the orientation of the part suction nozzle 40 in the θ direction with the orientation of the nozzle holder 60 in the θ direction.

[0058] The flange portion 452 is an annular portion that continuously protrudes outward from the lower outer peripheral surface of the main body cylindrical portion 451.

[0059] Figure 8 is a perspective view showing the nozzle body portion 41 according to an embodiment. As shown in Figure 8, the nozzle body portion 41 is formed in an axial shape extending in the Z-axis direction and has a substantially cylindrical thick shaft portion 41L with a diameter larger than the central hole 451M of the nozzle flange 45, and a thin shaft portion 41S that is cylindrical in size smaller than the central hole 451M and protrudes from the thick shaft portion 41L in the Z-axis negative direction (downward), and tapers towards the Z-axis negative direction. The nozzle body portion 41 is mostly made of metal, but the tip portion 41T (the lower end of the thin shaft portion 41S) is made of a material with excellent wear resistance (for example, ceramics). The nozzle body portion 41 is equipped with a suction channel 411 that penetrates in the Z-axis direction. The tip (lower end) of the nozzle body portion 41 is a component adsorption surface 412 on which components are adsorbed. A suction port 413, which is the entrance to the suction channel 411, is formed on the component adsorption surface 412.

[0060] The nozzle body portion 41 is mounted on the nozzle flange 45 by inserting the thin shaft portion 41S from above the central hole 451M. When mounted on the nozzle flange 45, the thin shaft portion 41S protrudes downward from the nozzle flange 45, and the thick shaft portion 41L is located inside the recess 451C. Furthermore, the outer circumferential surface of the thick shaft portion 41L and the inner circumferential surface of the recess 451C are separated by a predetermined distance, and an annular space 401 is formed between the outer circumferential surface of the thick shaft portion 41L and the recess 451C. The annular space 401 is the space into which the lower end portion (third portion 627) of the second holding portion 62 of the nozzle holder 60 is inserted.

[0061] Two guide grooves 414 extending in the Z-axis direction are formed on the outer circumference of the thick shaft portion 41L. Each guide groove 414 is positioned to face the other in the radial direction of the nozzle body portion 41. A protrusion 415 projecting outward is provided at the lower end of each guide groove 414. The protrusion 415 has two sliding surfaces 415S exposed in the annular space 401. The lower end of the guide groove 414 reaches a position that overlaps with the upper part of the protrusion 415. If the outer circumference of the thick shaft portion 41L that is separated from the protrusion 415 is considered a "recess," then it can be said that an uneven structure is formed on the outer circumference of the upper part of the nozzle body portion 41.

[0062] Two pins 457 are mounted in the nozzle flange 45 at a position away from the alignment groove 456. The two pins 457 are positioned opposite each other in the radial direction of the nozzle flange 45. The tips of the pins 457 protrude into the annular space 401. Furthermore, the tips of the pins 457 are inserted into the guide groove 414. This prevents the nozzle body 41 from falling off the nozzle flange 45. The pins 457 also engage with the guide groove 414, which extends along the axial direction of the nozzle body. As a result, the nozzle body 41 is relatively movable relative to the nozzle flange 45 along its axial direction. In other words, the nozzle flange 45 holds the nozzle body 41 so that it can move relative to it along its axial direction. The relative movement range of the nozzle body 41 is limited by the positional relationship and dimensions of the pins 457, the guide groove 414, and the protrusion 415. The lower limit is the position where the protrusion 415 contacts the bottom 453 (the bottom of the recess 451C), and the upper limit is the position where the lower end of the guide groove 414 contacts the pin 457 (see Figure 12). Figure 12 is a cross-sectional view showing the nozzle body portion 41 according to the embodiment in a raised state relative to the nozzle flange 45.

[0063] In particular, as shown in Figure 2, when the part suction nozzle 40 is attached to the work head 24, the nozzle body 41 is constantly subjected to a biasing force from the biasing portion 71 of the buffer portion 70, so that each protrusion 415 is pressed against the bottom portion 453 of the main body cylindrical portion 451. This positions the part suction surface 412 of the nozzle body 41.

[0064] In polar coordinates on the XY plane with the central axis of the component suction nozzle 40 as the origin, the angle between the pins 457 is 180 degrees, and the alignment groove 456 is located 90 degrees away from the two engaging portions 629. Therefore, when the nozzle body portion 41 is assembled to the nozzle flange 45 by the pins 457, the two protrusions 415 are located 90 degrees away from the alignment groove 456. The positional relationship between these two protrusions 415 and the alignment groove 456 matches the positional relationship between the two engaging portions 629 and the projection 630 on the second small diameter portion 624 of the second holding portion 62. Therefore, by aligning the alignment groove 456 with the projection 630, the component suction nozzle 40 can be held in the nozzle holder 60, and the protrusions 415 and engaging portions 629 of the nozzle body portion 41 can be engaged.

[0065] Figure 9 is a perspective view showing the engagement state between the protrusion 415 and the engaging portion 629 according to the embodiment. Figures 10 and 11 are cross-sectional views showing the engagement state between the protrusion 415 and the engaging portion 629 according to the embodiment. Figure 10 is a cross-sectional view of a cross-section including the line X-X shown in Figure 2. Figure 11 is a cross-sectional view of a cross-section including the line XI-XI shown in Figure 2.

[0066] As shown in Figures 9 to 11, when the nozzle flange 45 is held by the nozzle holder 60, the engaging portions 629 of the second holding portion 62 engage with each protrusion 415 of the nozzle body portion 41. Each protrusion 415 of the nozzle body portion 41 is guided in the Z-axis direction by the engaging portions 629 of the second holding portion 62. In other words, the second holding portion 62 holds the nozzle body portion 41 while allowing relative movement of the nozzle body portion 41 in the Z-axis direction. Furthermore, since the nozzle body guide surface 629S of the engaging portion 629 contacts and holds the sliding surface 414S of the protrusion 415, the second holding portion 62 can hold the nozzle body portion 41 with almost no play in the θ direction.

[0067] Furthermore, the upper part of the nozzle body 41 is fitted around the entire circumference into the second small-diameter portion 624 of the second holding portion 62. In this way, the second holding portion 62 can hold the nozzle body 41 with almost no play in the direction perpendicular to the Z-axis direction (along the XY plane). The second holding portion 62 can hold the nozzle body 41 while restricting movement along the XY plane and rotational movement around the Z-axis direction.

[0068] Thus, the second holding portion 62 can directly hold the upper part of the nozzle body portion 41. In other words, the upper part of the nozzle body portion 41 can be said to be an example of a second held portion that is held by the second holding portion 62.

[0069] Here, when the nozzle body 41 receives an impact while adsorbing a part, the nozzle body 41 rises while being guided by each engaging portion 629, and the biasing portion 71 of the buffer portion 70 deforms (compresses). As a result, the impact on the nozzle body 41 is mitigated by the buffer portion 70.

[0070] Next, the details of the filter unit 90 will be described. Figure 13 is a perspective view of the filter unit 90 according to the embodiment. Figures 14 and 15 are cross-sectional views of the filter unit 90 according to the embodiment. Figure 15 is a cross-sectional view of the cross-section including the line XV-XV in Figure 14.

[0071] As shown in Figures 13 to 15, the filter unit 90 comprises an air filter 91, a filter fixing device 92, and a unit body 93. The air filter 91, the filter fixing device 92, and the unit body 93 are separate components, and the filter unit 90 is formed when these are assembled.

[0072] The air filter 91 is a sheet-shaped air filter. The filter holder 92 is a component for fixing the air filter 91 to the unit body 93. The filter holder 92 is a flat cylindrical body having a hole 921. The air filter 91 is attached to the filter holder 92 in a folded state so that it overlaps the upper and lower surfaces of the filter holder 92. As a result, the upper and lower surfaces of the hole 921 of the filter holder 92 are covered by the air filter 91. The air filter 91 may or may not be glued to the filter holder 92. If it is not glued, the assembled assembly 94 of the filter holder 92 and the air filter 91 is fitted into the unit body 93, maintaining the assembled state of both. Therefore, when the assembly 94 is removed from the unit body 93, the air filter 91 can be easily removed from the filter holder 92. This simplifies the replacement of the air filter 91.

[0073] The unit body 93 is formed in an overall cylindrical shape, and the through-hole 95 extending in the Z-axis direction inside it is the ventilation hole 95. The lower end of the unit body 93 is the air filter section 96, and the part above the air filter section 96 is the cylindrical section 97.

[0074] The air filter section 96 is the part to which the filter fixing device 92 and the air filter 91 are attached. The air filter section 96 is formed in a cylindrical shape, and a mounting hole 961 is formed on its side, opening from the side of the air filter section 96 so as to connect to the ventilation hole 95. The mounting hole 961 is a recess that extends across the ventilation hole 95. The mounting hole 961 is a recess that extends parallel to the XY plane. The assembly 94 is inserted into the mounting hole 961 and positioned so that the ventilation hole 95 and the hole portion 921 are aligned in the Z-axis direction. At this time, the assembly 94 fits into the mounting hole 961, and the filter fixing device 92 and the air filter 91 are fixed. In this state, the air filter 91 covers the ventilation hole 95 in a double layer.

[0075] In the air filter section 96, a tool engagement portion 962 is formed at the end (lower end) opposite to the cylindrical portion 97. The tool engagement portion 962 is the part to which a tool (not shown) used in the operation of attaching and detaching the filter unit 90 to the air passage 271 is engaged. The tool engagement portion 962 only needs to be formed in a shape corresponding to the tip shape of the tool. In this embodiment, a flathead screwdriver is used as the tool, so a straight groove formed on the lower surface of the air filter section 96 is used as the tool engagement portion 962. If a Phillips head screwdriver is used, a cross-shaped groove can be formed on the lower surface of the air filter section 96 as the tool engagement portion 962. The same applies to other tools.

[0076] The cylindrical portion 97 is formed in a cylindrical shape and has a groove-shaped opening 98 formed by cutting out a part of it. The groove-shaped opening 98 is J-shaped when viewed from the side. Specifically, the groove-shaped opening 98 comprises a first section 981, a second section 982, and a third section 983. The first section 981 is the part that opens the upper end of the cylindrical portion 97 and extends from the upper end toward the air filter portion 96. In this embodiment, the first section 981 extends parallel to the Z-axis direction, but it may be inclined or curved with respect to the Z-axis direction.

[0077] The second section 982 is the portion that extends from the end (lower end) of the first section 981 in a direction intersecting the Z-axis direction. In this embodiment, the second section 982 extends parallel to the XY plane, but it may also be inclined or curved with respect to the XY plane.

[0078] The third section 983 is the portion that extends upward (towards the pneumatic source) from the end of the second section 982. The third section 983 extends partway down the cylindrical portion 97 and does not reach the upper end. In this embodiment, the third section 983 extends parallel to the Z-axis direction, but it may be inclined or curved with respect to the Z-axis direction.

[0079] Figure 16 is a cross-sectional view showing the positional relationship between the filter unit 90 and the stopper 80 according to the embodiment. Figure 16 is a cross-sectional view of the cross-section including the line XVI-XVI shown in Figure 2. As shown in Figures 2 and 16, when the filter unit 90 is installed in the air passage 271, the tip of the stopper 80 is inserted into the groove-shaped opening 98. Specifically, the tip of the stopper 80 is inserted into the third section 983 of the groove-shaped opening 98. By inserting the tip of the stopper 80 into the third section 983 of the groove-shaped opening 98, the filter unit 90 is locked in the air passage 271 and is prevented from coming out of the air passage 271 and falling.

[0080] Next, we will explain the process of attaching and detaching the filter unit 90 to the work head 24. First, we will explain the process of removing the filter unit 90.

[0081] Figure 17 is a cross-sectional view showing the state of the filter unit 90 according to the embodiment before it is removed from the work head 24. In Figure 17, the component suction nozzle 40 has been removed from the work head 24 in advance.

[0082] The worker inserts the tip of the tool into the shaft hole 621 from below the second holding portion 62 and engages the tip with the tool engagement portion 962.

[0083] Next, the worker uses a tool to push the filter unit 90 into the shaft hole 621, resisting the biasing force of the biasing part 71. This moves the filter unit 90 to a position where the starting point of the third section 983 (the end point of the second section 982) reaches the stopper 80. Once the end point of the second section 982 reaches the stopper 80, the worker uses a tool to rotate the filter unit 90 around the Z-axis, moving it until the starting point of the second section 982 (the end point of the first section 981) reaches the stopper 80. This releases the locking of the filter unit 90 by the stopper 80.

[0084] Subsequently, when the worker removes the tool from the shaft hole 621, the filter unit 90 is pushed out of the shaft hole 621 by the biasing part 71, and as a result, the stopper 80 comes out of the first section 981. Furthermore, when the worker removes the tool from the shaft hole 621, the filter unit 90 also falls out of the work head 24.

[0085] Figure 18 is a cross-sectional view showing the state after the filter unit 90 according to the embodiment has been removed from the work head 24. As shown in Figure 18, after removal, the biasing portion 71 is extended, and its lower end is in contact with the stopper 80. This prevents the biasing portion 71 from falling off the work head 24.

[0086] Next, the installation procedure for the filter unit 90 will be described. Starting from the state shown in Figure 18, the filter unit 90 is attached to the tip of the tool, and then the tool is operated to insert the filter unit 90 into the shaft hole 621 of the second holding part 62. When the filter unit 90 comes into contact with the biasing part 71, the operator raises the tool further to resist the biasing force and insert the tip of the stopper 80 into the first section 981 of the filter unit 90.

[0087] When the stopper 80 reaches the end of the first section 981 (the starting point of the second section 982), the operator rotates the filter unit 90 with a tool to move the stopper 80 to the end of the second section 982 (the starting point of the third section 983).

[0088] Subsequently, when the operator lowers the tool from the shaft hole 621, the filter unit 90 also descends under the biasing force of the biasing part 71. At this time, the end of the third section 983 catches on the stopper 80, and the filter unit 90 is mounted in the shaft hole 621 (see Figure 17). In this way, the filter unit 90 can be easily attached to and detached from the work head 24 simply by moving / rotating it within the shaft hole 621 using a tool, following the shape of the groove-shaped opening 98.

[0089] The groove-shaped opening 98 can have any shape as long as the filter unit 90 is locked in place when the stopper 80 is inserted. Other possible shapes include L-shape, V-shape, U-shape, and wedge shape.

[0090] The filter unit 90, removed from the work head 24, can be reused multiple times after cleaning. The air filter 91 captures foreign matter sucked in from the parts suction nozzle 40, but much of the foreign matter adheres to the side opposite to the cylindrical portion 97. Therefore, the most effective way to clean the air filter 91 is to remove the foreign matter by blowing high-pressure air from the cylindrical portion 97. The groove-shaped opening 98 formed on the surface of the cylindrical portion 97 opens up to the vicinity of the air filter 91 mounted on the air filter portion 96. Therefore, high-pressure air can be blown onto the air filter 91 from a close distance using an air gun or the like through the groove-shaped opening 98, allowing the cleaning work to be completed in a short time.

[0091] [Effects, etc.] As described above, according to the above embodiment, the nozzle flange 45 and the nozzle body 41, which are relatively movable, are held such that the first held portion (main body cylindrical portion 451) of the nozzle flange 45 is held by the first held portion 61, and the second held portion (upper part of the nozzle body 41) of the nozzle body 41 is held by the second held portion 62. In this way, the nozzle flange 45 and the nozzle body 41 are held individually, so the position of the nozzle body 41 is less affected by the position of the nozzle flange 45. In particular, since the nozzle body 41 is subjected to a biasing force from the biasing portion 71 of the buffer portion 70, it is pressed against the nozzle flange 45, and the component suction surface 412 of the nozzle body 41 is positioned. As a result, variations in the position of the component suction surface 412 are suppressed, and a decrease in the accuracy of component mounting can be suppressed.

[0092] Furthermore, the second holding portion 62 allows relative movement of the nozzle body portion 41 in the axial direction (Z-axis direction), while restricting movement of the nozzle body portion 41 in a direction perpendicular to the axial direction and rotational movement about the axial direction. This improves the positioning accuracy of the component suction surface 412 of the nozzle body portion 41. Therefore, the decrease in component mounting accuracy can be further suppressed.

[0093] Furthermore, since the fitting portion (second small diameter portion 624) of the second holding portion 62 is fitted with the upper part (second held portion) of the nozzle body portion 41, movement of the nozzle body portion 41 in a direction perpendicular to the axial direction can be restricted. As a result, misalignment of the nozzle body portion 41 in that direction can be suppressed, and the positioning accuracy of the component suction surface 412 of the nozzle body portion 41 can be further improved.

[0094] Furthermore, the engaging portion 629 of the second holding portion 62 engages with the uneven structure of the nozzle body portion 41 and guides relative movement in the axial direction, so that the engaging portion 629 can be engaged with the nozzle body portion 41 while allowing relative movement of the nozzle body portion 41 in the axial direction.

[0095] Furthermore, since the protrusion 415 that extends from the outer circumference of the upper part of the nozzle body 41 engages with a notch (engagement portion 629) formed in the second holding portion 62 that is open at the bottom, the engagement portion 629 of the second holding portion 62 can be reliably engaged with the nozzle body 41 with a simple structure.

[0096] Furthermore, by inserting the stopper 80 protruding from the air passage 271 into the groove-shaped opening 98 of the filter unit 90, the filter unit 90 can be secured, making it possible to attach the filter unit 90 to the air passage 271 with a simple structure. Moreover, the filter unit 90 can be easily removed simply by detaching the stopper 80 from the groove-shaped opening 98.

[0097] The filter unit 90, once removed from the air passage 271, allows for easy cleaning of the air filter 91, for example, using an air gun, via the groove-shaped opening 98.

[0098] Furthermore, since the groove-shaped opening 98 into which the stopper 80 is inserted is equipped with a first section 981, a second section 982, and a third section 983, the stopper 80 is less likely to come out. This allows the filter unit 90 to be stably locked in place. The filter unit 90 can be easily attached and detached by simply moving / rotating the filter unit 90 within the shaft hole 621 following the shape of the groove-shaped opening 98. In addition, since the groove-shaped opening 98 extends close to the air filter section 96, it is also possible to improve the ease of cleaning the air filter 91.

[0099] Furthermore, since the tool engagement portion 962 is formed at the end (lower end) of the air filter portion 96 opposite to the cylindrical portion 97, a tool can be inserted from the inlet side (shaft hole 621) of the air passage 271 and engaged with the tool engagement portion 962. This makes it possible to easily attach and detach the filter unit 90 from the air passage 271 using a tool.

[0100] Furthermore, since the air filter 91 is secured by inserting the filter fixing device 92 into the mounting hole 961, the air filter 91 can be easily replaced simply by attaching and detaching the filter fixing device 92 and the air filter 91 to the mounting hole 961.

[0101] Furthermore, since the filter fixing device 92 is provided with holes 921 aligned with the ventilation holes 95, the air filter 91 can be attached to the air filter section 96 with a simple configuration by inserting it into the mounting hole 961 with the air filter 91 covering these holes 921.

[0102] Furthermore, by structuring the filter unit 90, whose lower end contacts the upper end of the nozzle body portion 41 of the component suction nozzle 40, to be biased against the stopper 80 by a biasing portion, the filter unit 90 can be used as a component of the buffer portion 70 that mitigates the impact acting on the component when the component suction nozzle 40 picks up or attaches the component.

[0103] (Modifications) Modifications of the above embodiments will be described below. In the following description, parts that are the same as those in the above embodiments or other modifications may be denoted by the same reference numerals and their descriptions may be omitted.

[0104] [Modification 1] Modification 1 of the above embodiment will now be described. In the above embodiment, the filter unit 90 was illustrated in which the air filter 91, the filter fixing device 92, and the unit body 93 are all separate components. The filter unit 90a according to Modification 1 is illustrated in which the filter unit 90a consists of a separate unit body 93 and a filter forming body 99a.

[0105] Figure 19 is a cross-sectional view showing a filter unit 90a according to Modification 1. In Figure 19, the unit body 93 and the filter forming body 99a are shown disassembled. The filter forming body 99a is a flattened cylindrical resin member with an air filter 91a integrally formed on it. The filter forming body 99a is formed, for example, by a 3D printer. In Figure 19, the air filter 91a is shown as being positioned at the lower end of the opening of the filter forming body 99a, but the position of the air filter 91a can be anything as long as it covers the opening. The filter forming body 99a is assembled by fitting it into the mounting hole 961 of the unit body 93.

[0106] As described above, according to Modification 1, since the air filter 91a is integrally formed with the filter forming body 99a, it is possible to reduce the number of parts.

[0107] [Modification 2] Modification 2 of the above embodiment will now be described. In Modification 2, a filter unit 90b in which the unit body 93b and the air filter 91b are integrally molded will be described.

[0108] Figure 20 is a cross-sectional view showing a filter unit 90b according to modified example 2. As shown in Figure 20, in the unit body 93b of the filter unit 90b, the air filter section 96b is cylindrical, and the air filter 91b is positioned to cover its ventilation holes 95b. The air filter section 96b and the air filter 91b are integrally formed resin members. The filter unit 90b is formed, for example, by a 3D printer.

[0109] As described above, since the air filter 91b is integrally formed with the air filter section 96b, it is possible to reduce the number of parts.

[0110] (Other) Although the component mounting device 20 and the like according to the embodiments of the present invention have been described above, the present invention is not limited to these embodiments. In other words, the embodiments disclosed herein are illustrative in all respects, and the scope of the present invention includes all modifications in the sense and scope of equivalence to the claims. Furthermore, forms constructed by arbitrarily combining the components included in each of the above embodiments and their variations are also included within the scope of the present invention.

[0111] This invention can be applied to component mounting equipment and the like, which mounts components onto a substrate.

[0112] 2. Substrate 3. Feeder mounting section 4. Carrier tape 5. Reel 10. Component mounting system 20. Component mounting device 20A. Base 21. Cart 22. Component supply unit 24. Work head 25. Head movement section 25A. Work head holding section 25B. Horizontal movement section 26. Substrate transport section 27. Lifting shaft 28. Joint section 29. Reel storage section 40. Component suction nozzle 41. Nozzle body section 41L. Thick shaft section 41S. Thin shaft section 41T. Tip section 45. Nozzle flange 60. Nozzle holder 61. First holding section 62. Second holding section 70. Cushioning section 71. Biasing section 80. Stopper 90, 90a, 90b. Filter unit 91, 91a, 91b. Air filter 92. Filter fixing device 93, 93b. Unit body 94. Assembly 95, 95b Ventilation holes 96, 96b Air filter section 97 Cylindrical section 98 Groove-shaped opening 99a Filter forming body 271 Air passage 272 First large diameter section 273 First small diameter section 274 Connecting passage 275 Insertion hole 281 Bearing 282 Sealing material 283 Annular passage 284 Tube mounting section 285 Connecting passage 411 Suction passage 412 Component adsorption surface 413 Suction port 414 Guide groove section 414S Sliding surface 415 Protrusion 451 Main cylindrical section (first held section) 451C Recess 451M Central hole 452 Flange section 453 Bottom section 455 Recessed section 456 Alignment groove 457 Pin 621 Axle hole 622 Screw 623 Second large diameter section 624 Second small diameter section (fitting section) 625 First section 626 Second section 627 Third section 628 Stopper hole 629 Engaging section 629S Nozzle body guide surface 630 Projection 921 Hole 961 Mounting hole 962 Tool engagement section 981 First section 982 Second section 983 Third section

Claims

1. A component mounting device comprising: a component suction nozzle for picking up components; and a work head to which the component suction nozzle is mounted, for mounting the components onto a substrate using the component suction nozzle, wherein the component suction nozzle comprises: an axial nozzle body having a component suction surface with a suction port formed at its tip; and a nozzle flange that holds the nozzle body so as to be movable relative to the nozzle body along the axial direction of the nozzle body; the work head comprises: a lifting shaft; a nozzle holder mounted at the lower end of the lifting shaft for holding the component suction nozzle; and a buffer portion that contacts the nozzle body of the component suction nozzle held by the nozzle holder and biases the nozzle body toward a direction away from the lifting shaft; the nozzle holder comprises: a first holding portion for holding the nozzle flange; and a second holding portion for holding the upper part of the nozzle body.

2. The component mounting device according to claim 1, wherein the second holding portion restricts movement of the nozzle body portion in a direction perpendicular to the axial direction and rotational movement about the axial direction, while holding the nozzle body portion in a state that allows relative movement in the axial direction with respect to the nozzle body portion.

3. The component mounting device according to claim 2, wherein the second holding portion comprises a fitting portion that fits with the upper part of the nozzle body portion.

4. The component mounting device according to claim 3, wherein the outer periphery of the upper part of the nozzle body has an uneven structure, and the second holding part has an engaging part that engages with the uneven structure and guides relative movement in the axial direction.

5. The component mounting device according to claim 4, wherein the uneven structure includes a protrusion projecting from the outer periphery, and the engaging portion is a notch that is open at the bottom and engages with the protrusion.

6. A component suction nozzle that is detachably attached to a nozzle holder of a component mounting device for mounting components onto a substrate, comprising: an axial nozzle body having a component suction surface with a suction port formed at its tip; and a nozzle flange that holds the nozzle body so as to be movable relative to the nozzle body along the axial direction of the nozzle body, wherein the nozzle flange has a first held portion that is held by a first holding portion provided on the nozzle holder, and the nozzle body has a second held portion that is held by a second holding portion provided on the nozzle holder.

7. The component suction nozzle according to claim 6, wherein the second retained portion is the base end of the nozzle body portion opposite to the tip, and fits with the second retained portion.

8. The component suction nozzle according to claim 7, wherein the outer periphery of the second retained portion has an uneven structure, and the uneven structure engages with the second retaining portion to guide its relative axial movement with respect to the second retaining portion.

9. The component suction nozzle according to claim 8, wherein the uneven structure includes a protrusion that protrudes from the outer circumference.

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