Photodetection element

Abstract

A photodetection element according to the present disclosure includes a light-receiving layer, an optical layer, and a plurality of lenses. The light-receiving layer includes a plurality of photoelectric conversion portions disposed in a matrix. The optical layer is stacked on the light-receiving layer. The plurality of lenses is stacked on the optical layer. The plurality of lenses includes first lenses and second lenses. The first lens is disposed opposite to one photoelectric conversion portion across the optical layer. The second lens is disposed opposite to a plurality of adjacent photoelectric conversion portions. The optical layer includes an optical waveguide portion. The optical waveguide portion has a width partitioning the optical layer at a portion facing the boundary line between adjacent first lenses larger than a width partitioning the optical layer at portions facing the boundary line between the adjacent second lenses.

Description

PHOTODETECTION ELEMENT

[0001] The　present　disclosure　relates　to　a　photodetection　element.

[0002] There　is　a　photodetection　element　including　a　light-receiving　layer　including　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix,　an　optical　layer　provided　so　as　to　cover　the　light-receiving　layer,　and　a　plurality　of　lenses　having　different　sizes　provided　on　a　side　opposite　to　the　light-receiving　layer　across　the　optical　layer.

[0003] As　such　a　photodetection　element,　there　is　a　photodetection　element　including　a　first　lens　provided　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　an　optical　layer　and　a　second　lens　provided　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer　(see,　for　example,　PTL　1).

[0004] Such　a　photoelectric　conversion　element　may　be　provided　with　an　optical　waveguide　portion　that　partitions　the　optical　layer　for　each　lens　so　as　to　guide　light　incident　via　the　lens　to　the　photoelectric　conversion　portion.

[0005] Japanese　Laid-open　Patent　Publication　No.　2023-015206

[0006] However,　the　interval　between　the　optical　waveguide　portions　in　the　portion　facing　the　boundary　portion　between　the　adjacent　first　lenses　is　narrower　than　the　interval　between　the　optical　waveguide　portions　in　the　portion　facing　the　boundary　portion　between　the　first　lens　and　the　second　lens　and　the　interval　between　the　optical　waveguide　portions　in　the　portion　facing　the　boundary　portion　between　the　adjacent　second　lenses.

[0007] For　this　reason,　in　a　case　where　the　photodetection　element　includes　the　first　lenses　and　the　second　lenses　described　above,　light　incident　from　the　first　lens　may　enter　the　photoelectric　conversion　portion　facing　the　adjacent　first　lens,　and　the　photodetection　accuracy　may　decrease.

[0008] The　present　disclosure　has　been　made　in　view　of　the　above,　and　an　object　is　to　provide　a　photodetection　element　capable　of　suppressing　a　decrease　in　photodetection　accuracy.

[0009] A　photodetection　element　according　to　the　present　disclosure　includes　a　light-receiving　layer,　an　optical　layer,　and　a　plurality　of　lenses.　　The　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix.　　The　optical　layer　that　is　provided　so　as　to　cover　the　light-receiving　layer.　　The　plurality　of　lenses　that　is　provided　on　a　side　opposite　to　the　light-receiving　layer　across　the　optical　layer.　　The　plurality　of　lenses　includes　first　lenses　and　second　lenses.　　The　first　lens　provided　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer.　　The　second　lens　provided　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer.　　The　optical　layer　includes　an　optical　waveguide　portion.　　The　optical　waveguide　portion　partitioning　the　optical　layer　for　each　of　the　lenses　so　as　to　guide　light　incident　through　the　lenses　to　the　photoelectric　conversion　portions.　　The　optical　waveguide　portion　has　a　width　partitioning　the　optical　layer　in　a　portion　facing　a　boundary　line　between　adjacent　first　lenses　larger　than　a　width　partitioning　the　optical　layer　in　portions　facing　a　boundary　line　between　adjacent　second　lenses　and　a　boundary　line　between　adjacent　first　lens　and　second　lens.

[0010] Fig.　1　is　a　plan　view　illustrating　a　portion　of　a　light-receiving　surface　of　a　photodetection　element　according　to　a　first　embodiment.Fig.　2　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　comparative　example.Fig.　3　is　an　explanatory　view　illustrating　light-receiving　characteristics　of　the　photodetection　element　according　to　the　comparative　example.Fig.　4　is　an　explanatory　view　illustrating　light-receiving　characteristics　of　the　photodetection　element　according　to　the　comparative　example.Fig.　5　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　6　is　a　plan　view　illustrating　a　portion　of　an　optical　layer　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　7　is　a　plan　view　illustrating　a　portion　of　an　optical　layer　according　to　a　first　modification　of　the　first　embodiment.Fig.　8　is　a　plan　view　illustrating　a　portion　of　an　optical　layer　according　to　a　second　modification　of　the　first　embodiment.Fig.　9　is　a　plan　view　illustrating　a　portion　of　an　optical　layer　according　to　a　third　modification　of　the　first　embodiment.Fig.　10　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　fourth　modification　of　the　first　embodiment.Fig.　11　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　fifth　modification　of　the　first　embodiment.Fig.　12　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　13　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　14　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　15　is　a　plan　view　illustrating　a　portion　of　an　optical　layer　of　a　photodetection　element　according　to　a　sixth　modification　of　the　first　embodiment.Fig.　16　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　according　to　the　sixth　modification　of　the　first　embodiment.Fig.　17　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　seventh　modification　of　the　first　embodiment.Fig.　18　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　an　eighth　modification　of　the　first　embodiment.Fig.　19　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　ninth　modification　of　the　first　embodiment.Fig.　20　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　tenth　modification　of　the　first　embodiment.Fig.　21　is　a　plan　view　illustrating　a　portion　of　a　light-receiving　layer　of　the　photodetection　element　according　to　the　first　embodiment.Fig.　22　is　a　plan　view　illustrating　a　portion　of　a　light-receiving　layer　of　a　photodetection　element　according　to　an　eleventh　modification　of　the　first　embodiment.Fig.　23　is　a　plan　view　illustrating　a　portion　of　a　light-receiving　layer　of　a　photodetection　element　according　to　a　twelfth　modification　of　the　first　embodiment.Fig.　24　is　a　plan　view　illustrating　a　disposition　example　of　lenses　according　to　a　thirteenth　modification　of　the　first　embodiment.Fig.　25　is　a　plan　view　illustrating　a　disposition　example　of　lenses　according　to　a　fourteenth　modification　of　the　first　embodiment.Fig.　26　is　a　plan　view　illustrating　a　disposition　example　of　lenses　according　to　a　fifteenth　modification　of　the　first　embodiment.Fig.　27　is　a　plan　view　illustrating　a　disposition　example　of　color　filters　according　to　a　sixteenth　modification　of　the　first　embodiment.Fig.　28　is　a　plan　view　illustrating　a　disposition　example　of　color　filters　according　to　a　seventeenth　modification　of　the　first　embodiment.Fig.　29　is　a　plan　view　illustrating　a　disposition　example　of　color　filters　according　to　an　eighteenth　modification　of　the　first　embodiment.Fig.　30　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　second　embodiment.Fig.　31　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　central　portion　of　a　light-receiving　surface　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　32　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　33　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　a　central　portion　of　a　light-receiving　surface　of　a　photodetection　element　according　to　a　first　modification　of　the　second　embodiment.Fig.　34　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　a　central　portion　of　a　light-receiving　surface　of　a　photodetection　element　according　to　a　second　modification　of　the　second　embodiment.Fig.　35　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　third　modification　of　the　second　embodiment.Fig.　36　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　fourth　modification　of　the　second　embodiment.Fig.　37　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　fifth　modification　according　to　the　second　embodiment.Fig.　38　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　sixth　modification　according　to　the　second　embodiment.Fig.　39　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　according　to　a　seventh　modification　according　to　the　second　embodiment.Fig.　40　is　a　plan　view　illustrating　an　example　of　a　portion　of　an　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　41　is　a　plan　view　illustrating　an　example　of　a　portion　of　the　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　42　is　a　plan　view　illustrating　an　example　of　a　portion　of　the　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　43　is　a　plan　view　illustrating　an　example　of　a　portion　of　the　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　44　is　a　plan　view　illustrating　an　example　of　a　portion　of　the　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.Fig.　45　is　a　plan　view　illustrating　an　example　of　a　portion　of　the　optical　layer　of　the　photodetection　element　according　to　the　second　embodiment.

[0011] Embodiments　of　the　present　disclosure　will　be　described　below　in　detail　on　the　basis　of　the　drawings.　　Note　that,　in　each　embodiment　described　below,　the　same　elements　are　designated　by　the　same　reference　numerals,　and　duplicate　description　will　be　omitted.First Embodiment

[0012] First,　a　photodetection　element　according　to　a　first　embodiment　will　be　described.　　Fig.　1　is　a　plan　view　illustrating　a　portion　of　a　light-receiving　surface　of　a　photodetection　element　1　according　to　the　first　embodiment.　　Fig.　2　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　100　according　to　a　comparative　example.　　Figs.　3　and　4　are　explanatory　views　illustrating　light-receiving　characteristics　of　the　photodetection　element　100　according　to　the　comparative　example.

[0013] The　photodetection　element　1　according　to　the　first　embodiment　is,　for　example,　a　solid-state　imaging　element　adopted　in　a　light-receiving　portion　in　an　imaging　device　such　as　a　digital　camera.　　As　illustrated　in　Fig.　1,　the　photodetection　element　1　includes　a　plurality　of　photoelectric　conversion　portions　21　disposed　in　a　matrix　and　a　plurality　of　lenses　stacked　on　the　photoelectric　conversion　portions　21.

[0014] A　plurality　of　types　of　color　filters　that　transmits　different　colors　of　light　is　provided　between　the　photoelectric　conversion　portions　21　and　the　lenses.　　Color　filters　that　transmit　red　light　and　absorb　light　of　colors　other　than　red　are　stacked　on　the　photoelectric　conversion　portions　21　indicated　as　"R"　in　Fig.　1.　　Color　filters　that　transmit　green　light　and　absorb　light　of　colors　other　than　green　are　stacked　on　the　photoelectric　conversion　portions　21　indicated　as　"G"　in　Fig.　1.　　Color　filters　that　transmit　blue　light　and　absorb　light　of　colors　other　than　blue　are　stacked　on　the　photoelectric　conversion　portions　21　indicated　as　"B"　in　Fig.　1.

[0015] The　lenses　include　first　lenses　31　and　second　lenses　32.　　The　first　lens　31　is　stacked　on　one　photoelectric　conversion　portion　21　via　the　color　filter.　　The　second　lens　32　is　stacked　on　a　plurality　of　adjacent　photoelectric　conversion　portions　21　via　the　color　filter.　　In　the　example　illustrated　in　Fig.　1,　the　second　lens　32　is　disposed　across　two　adjacent　photoelectric　conversion　portions　21.

[0016] The　first　lens　31　and　the　second　lens　32　collect　incident　light　to　the　photoelectric　conversion　portions　21　via　the　color　filters.　　Each　photoelectric　conversion　portion　21　is　a　photoelectric　conversion　element　that　photoelectrically　converts　light　incident　through　the　first　lens　31　or　the　second　lens　32　and　the　color　filter　into　signal　charges　according　to　the　amount　of　light.　　The　photoelectric　conversion　element　is,　for　example,　a　photodiode.

[0017] In　the　example　illustrated　in　Fig.　1,　each　of　one　photoelectric　conversion　portion　21　disposed　opposite　to　the　first　lens　31　and　two　adjacent　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32　outputs　signal　charges　corresponding　to　each　pixel　of　a　captured　image.

[0018] Since　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32　can　output　signal　charges　for　one　pixel,　it　is　possible　to　maintain　highly　sensitive　light-receiving　performance　even　when　it　is　dark.　　On　the　other　hand,　since　one　photoelectric　conversion　portion　21　disposed　opposite　to　the　first　lens　31　can　output　signal　charges　for　one　pixel,　it　is　possible　to　capture　a　high-resolution　image　when　it　is　light.

[0019] Among　the　three　primary　colors　of　red,　green,　and　blue,　green　is　the　color　that　is　most　easily　recognized　by　the　human　eye.　　Therefore,　in　the　photodetection　element　1,　the　first　lens　31　is　stacked　on　the　color　filter　that　transmits　green　light.　　As　a　result,　the　photodetection　element　1　can　capture　an　image　in　which　green,　which　is　most　easily　recognized　by　the　human　eye,　is　reproduced　with　high　resolution.

[0020] Here,　a　cross-sectional　structure　of　the　photodetection　element　100　according　to　the　comparative　example　will　be　described　with　reference　to　Fig.　2.　　As　illustrated　in　Fig.　2,　the　photodetection　element　100　includes　a　light-receiving　layer　20,　an　optical　layer　40,　first　lenses　31,　and　second　lenses　32.　　Note　that　the　disposition　of　the　first　lenses　31　and　the　second　lens　32　is　similar　to　the　disposition　of　the　lenses　of　the　photodetection　element　1　illustrated　in　Fig.　1.

[0021] The　light-receiving　layer　20　includes　a　plurality　of　photoelectric　conversion　portions　21　disposed　in　a　matrix.　　Each　photoelectric　conversion　portion　21　includes　a　photodiode　formed　by　PN　junction　between　a　P-type　region　of　Si　(silicon)　doped　with　a　P-type　impurity　such　as　B　(boron)　and　an　N-type　region　of　Si　doped　with　an　N-type　impurity　such　as　P　(phosphorus).

[0022] A　pixel　isolation　portion　22　that　electrically　and　optically　isolates　adjacent　photoelectric　conversion　portions　21　from　each　other　is　provided　between　the　photoelectric　conversion　portions　21.　　The　pixel　isolation　portion　22　is　formed　of,　for　example,　SiO2　(silicon　oxide).

[0023] In　addition,　a　fixed　charge　layer　23　of　Si　doped　with　a　negative　fixed　charge　is　provided　on　the　light-receiving　surface　of　each　photoelectric　conversion　portion　21　in　order　to　suppress　a　dark　current.　　Further,　a　protective　film　24　is　stacked　on　the　fixed　charge　layer　23.　　The　protective　film　24　is　formed　of,　for　example,　SiO2.

[0024] The　optical　layer　40　is　provided　so　as　to　cover　the　light-receiving　layer　20.　　The　first　lenses　31　and　the　second　lens　32　are　provided　on　the　side　opposite　to　the　light-receiving　layer　20　across　the　optical　layer　40.　　The　first　lens　31　is　provided　on　the　side　opposite　to　one　photoelectric　conversion　portion　21　across　the　optical　layer　40.　　The　second　lens　32　is　provided　on　the　side　opposite　to　a　plurality　of　(here,　two)　adjacent　photoelectric　conversion　portions　21　across　the　optical　layer　40.

[0025] In　addition,　the　optical　layer　40　includes　optical　waveguide　portions　4　that　partition　the　optical　layer　40　for　each　lens　(the　first　lenses　31　and　the　second　lens　32).　　The　surface　of　each　optical　waveguide　portion　4　is　covered　with　a　protective　film　41.　　The　optical　waveguide　portion　4　is　formed　of,　for　example,　a　low　refractive　index　material　such　as　SiO2,　a　low　refractive　index　resin,　and　silica.

[0026] The　protective　film　41　is　formed　of,　for　example,　SiO2.　　Note　that　the　inside　of　the　protective　film　41　may　be　hollow.　　In　this　case,　the　hollow　becomes　the　optical　waveguide　portion　4.　　The　hollow　to　be　the　optical　waveguide　portion　4　also　has　a　low　refractive　index.　　As　a　result,　the　optical　waveguide　portion　4　can　guide　light　incident　through　the　first　lens　31　or　the　second　lens　32　to　the　photoelectric　conversion　portion　21.

[0027] Color　filters　4R　and　4G　and　the　like　are　disposed　in　the　optical　layer　40　partitioned　by　the　optical　waveguide　portions　4.　　In　the　example　illustrated　in　Fig.　2,　the　color　filter　4G　that　transmits　green　light　is　disposed　between　one　photoelectric　conversion　portion　21　and　the　first　lens　31.

[0028] The　color　filter　4R　that　transmits　red　light　is　disposed　between　two　adjacent　photoelectric　conversion　portions　21　and　the　second　lens　32.　　Note　that,　although　not　illustrated　here,　there　is　also　a　region　where　a　color　filter　4B　(see　Fig.　6)　that　transmits　blue　light　is　disposed　between　two　adjacent　photoelectric　conversion　portions　21　and　the　second　lens　32.

[0029] In　the　photodetection　element　100,　in　a　case　where　light　indicated　by　outlined　arrows　in　Fig.　2　is　obliquely　incident　on　the　first　lenses　31,　as　with　light　indicated　by　thick　black　line　arrows,　the　light　may　pass　from　the　color　filters　4G　through　the　optical　waveguide　portions　4　and　enter　the　adjacent　color　filters　4G　and　4R.

[0030] At　this　time,　since　the　second　lens　32　having　a　larger　light-receiving　area　than　the　first　lenses　31　is　stacked　on　the　color　filter　4R,　the　original　light-receiving　amount　is　larger　than　that　of　the　color　filter　4G.　　Therefore,　in　the　two　photoelectric　conversion　portions　21　on　which　the　color　filter　4R　is　stacked,　even　when　some　light　enters　from　the　adjacent　color　filter　4G,　the　total　light-receiving　amount　is　not　greatly　affected.

[0031] On　the　other　hand,　in　the　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked,　since　the　light-receiving　area　of　the　stacked　first　lenses　31　is　smaller　than　that　of　the　second　lens　32,　the　original　light-receiving　amount　is　small.　　Therefore,　in　the　one　photoelectric　conversion　portion　21　on　which　the　color　filter　4G　is　stacked,　only　when　some　light　enters　from　the　adjacent　color　filter　4G,　the　total　light-receiving　amount　is　greatly　affected.

[0032] Here,　such　a　phenomenon　will　be　described　with　reference　to　Figs.　3　and　4.　　The　horizontal　axis　of　the　graphs　illustrated　in　Figs.　3　and　4　indicates　the　incident　angle　of　light.　　The　vertical　axis　of　the　graphs　illustrated　in　Figs.　3　and　4　indicates　the　light-receiving　amount　received　by　one　photoelectric　conversion　portion　21　on　which　the　color　filter　4G　is　stacked.

[0033] The　case　where　the　incident　angle　is　0　degrees　refers　to　a　case　where　light　is　incident　on　the　photodetection　element　100　from　a　normal　direction　of　the　light-receiving　surface.　　In　addition,　the　case　where　the　incident　angle　is　other　than　0　degrees　refers　to　a　case　where　light　is　incident　on　the　photodetection　element　100　from　an　oblique　direction　other　than　the　normal　direction　of　the　light-receiving　surface.

[0034] In　addition,　Fig.　3　illustrates　a　case　where　a　small　amount　of　light　enters　from　the　adjacent　color　filter　4G.　　Fig.　4　illustrates　a　case　where　a　large　amount　of　light　enters　from　the　adjacent　color　filter　4G.　　In　addition,　solid　line　graphs　illustrated　in　Figs.　3　and　4　indicate　the　light-receiving　amount　of　one　of　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked,　and　broken　line　graphs　indicate　the　light-receiving　amount　of　the　other　photoelectric　conversion　portion　21.

[0035] As　illustrated　in　Fig.　3,　when　a　small　amount　of　light　enters　from　the　adjacent　color　filter　4G,　there　is　no　large　difference　in　the　light-receiving　amounts　of　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked,　regardless　of　the　incident　angle　of　the　light.

[0036] On　the　other　hand,　as　illustrated　in　Fig.　4,　when　a　large　amount　of　light　enters　from　the　adjacent　color　filter　4G,　there　is　a　large　difference　in　the　light-receiving　amounts　of　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked,　as　the　incident　angle　of　the　light　is　greatly　inclined　from　0　degrees.

[0037] That　is,　in　a　case　where　a　large　amount　of　light　enters　from　the　adjacent　color　filter　4G,　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked　receive　a　larger　amount　of　light　or　a　smaller　amount　of　light　than　the　amount　of　light　to　be　originally　received,　and　the　photodetection　accuracy　decreases.　　As　a　result,　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked　may　degrade　the　image　quality　of　the　captured　image.

[0038] Therefore,　the　photodetection　element　1　according　to　the　first　embodiment　has　a　configuration　of　suppressing　a　decrease　in　photodetection　accuracy　by　reducing　the　amount　of　light　entering　from　the　adjacent　color　filter　4G.　　Next,　a　configuration　of　the　photodetection　element　1　according　to　the　first　embodiment　will　be　described　with　reference　to　Fig.　5.　　Fig.　5　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1　according　to　the　first　embodiment.　　Fig.　6　is　a　plan　view　illustrating　a　portion　of　the　optical　layer　40　of　the　photodetection　element　1　according　to　the　first　embodiment.

[0039] As　illustrated　in　Figs.　5　and　6,　the　shape　of　some　of　the　optical　waveguide　portions　4　of　the　photodetection　element　1　is　different　from　that　of　the　optical　waveguide　portion　4　of　the　photodetection　element　100　according　to　the　comparative　example.　　The　optical　waveguide　portion　4　of　the　photodetection　element　1　includes　a　wide　portion　42　in　which　a　width　partitioning　the　optical　layer　40　at　a　portion　facing　the　boundary　line　between　adjacent　first　lenses　31　is　larger　than　a　width　partitioning　the　optical　layer　40　at　a　portion　facing　the　boundary　line　between　adjacent　first　lens　31　and　second　lens　32.

[0040] In　addition,　the　optical　waveguide　portion　4　of　the　photodetection　element　1　includes　a　wide　portion　42　in　which　a　width　partitioning　the　optical　layer　40　at　a　portion　facing　the　boundary　line　between　adjacent　first　lenses　31　is　larger　than　a　width　partitioning　the　optical　layer　40　at　a　portion　facing　the　boundary　line　between　adjacent　second　lenses　32.

[0041] As　a　result,　as　indicated　by　the　thick　broken　line　arrow　in　Fig.　5,　the　photodetection　element　1　can　prevent　the　light　from　passing　through　the　optical　waveguide　portion　4　in　the　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　31　and　entering　the　adjacent　color　filter　4G.　　As　a　result,　the　photodetection　element　1　can　suppress　a　decrease　in　photodetection　accuracy　of　the　two　adjacent　photoelectric　conversion　portions　21　on　which　the　color　filters　4G　are　stacked.

[0042] In　addition,　in　the　optical　waveguide　portion　4　of　the　photodetection　element　1,　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4G　that　transmit　light　of　the　same　color　is　different　from　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4R　(4G　and　4B)　that　transmit　light　of　different　colors.

[0043] In　the　example　illustrated　in　Fig.　6,　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4G　that　transmit　light　of　the　same　color　is　larger　than　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4R　(4G　and　4B)　that　transmit　light　of　different　colors.　　As　a　result,　the　photodetection　element　1　can　suppress　light　from　passing　through　the　wide　portion　42　of　the　optical　waveguide　portion　4　and　entering　from　one　of　the　two　adjacent　color　filters　4G　and　4G　to　the　other.

[0044] Note　that,　in　the　optical　waveguide　portion　4,　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4R　(4G　and　4B)　that　transmit　light　of　different　colors　may　be　larger　than　a　width　partitioning　the　optical　layer　40　between　the　adjacent　color　filters　4G　and　4G　that　transmit　light　of　the　same　color.

[0045] In　this　case,　the　photodetection　element　1　can　suppress　the　light　from　passing　through　the　wide　portion　42　of　the　optical　waveguide　portion　4　and　entering　from　one　of　the　adjacent　color　filters　4G　and　4R　(4G　and　4B)　that　transmit　light　of　different　colors　to　the　other,　so　that　the　occurrence　of　color　mixing　can　be　suppressed.

[0046] Note　that　the　configuration　of　the　photodetection　element　1　illustrated　in　Figs.　5　and　6　is　an　example,　and　various　modifications　are　possible.　　Next,　photodetection　elements　according　to　first　to　fifth　modifications　of　the　first　embodiment　will　be　described　with　reference　to　Figs.　7　to　11.　　Figs.　7　to　9　are　plan　views　illustrating　a　portion　of　the　optical　layer　40　according　to　the　first　to　third　modifications　of　the　first　embodiment.

[0047] As　illustrated　in　Fig.　7,　in　the　optical　waveguide　portion　4　of　a　photodetection　element　1A　according　to　the　first　modification,　a　portion　located　between　two　color　filters　4G　adjacent　in　the　row　direction　among　portions　facing　the　boundary　line　between　adjacent　the　first　lenses　31　is　the　wide　portion　42.　　As　a　result,　the　photodetection　element　1A　can　at　least　reduce　the　amount　of　light　passing　through　the　wide　portion　42　from　one　of　the　two　color　filters　4G　adjacent　in　the　row　direction　to　the　other.

[0048] In　addition,　as　illustrated　in　Fig.　8,　the　optical　waveguide　portion　4　of　a　photodetection　element　1B　according　to　the　second　modification　has　a　shape　in　which　four　corners　44　of　a　rectangle　of　the　optical　waveguide　portion　4　having　a　rectangular　shape　in　plan　view　surrounding　the　color　filters　4R　and　4B　are　removed.　　The　other　portions　have　the　same　shape　as　the　optical　waveguide　portion　4　according　to　the　first　modification　illustrated　in　Fig.　7.

[0049] Such　an　optical　waveguide　portion　4　has　a　shape　in　a　case　where　the　optical　waveguide　portion　4　having　a　hollow　inside　is　adopted.　　In　the　case　of　forming　the　optical　waveguide　portion　4　having　a　hollow　inside,　a　semiconductor　layer　removable　by　wet　etching　performed　in　a　subsequent　step　is　formed　on　the　entire　surface　of　the　light-receiving　layer　20.

[0050] Subsequently,　a　region　of　a　portion　where　the　color　filters　4R,　4G,　and　4B　are　formed　is　removed　from　the　formed　semiconductor　layer　by　dry-etching,　for　example,　to　form　a　temporary　wall　having　a　lattice　shape　in　plan　view　and　shaped　into　the　shape　of　the　optical　waveguide　portion　4.　　Then,　the　surface　of　the　formed　temporary　wall　is　covered　with　an　insulating　film　(for　example,　a　SiO2　film).

[0051] Subsequently,　after　the　color　filters　4R,　4G,　and　4B　are　formed　in　the　regions　surrounded　by　the　temporary　walls,　the　insulating　films　at　the　four　corners　44　of　the　rectangular　shape　in　plan　view　surrounding　the　color　filters　4R　and　4B　are　removed　to　expose　portion　of　the　temporary　walls.

[0052] Thereafter,　wet　etching　is　performed　to　remove　the　semiconductor　inside　the　temporary　walls　covered　with　the　insulating　film,　thereby　forming　the　optical　waveguide　portion　4　having　a　hollow　inside.　　As　a　result,　the　photodetection　element　1B　can　at　least　reduce　the　amount　of　light　passing　through　the　wide　portion　42　from　one　of　the　two　color　filters　4G　adjacent　in　the　row　direction　to　the　other.

[0053] In　addition,　as　illustrated　in　Fig.　9,　a　photodetection　element　1C　according　to　the　third　modification　includes　an　optical　waveguide　portion　4　crossing　the　color　filters　4R　and　4B　in　the　row　direction　in　addition　to　the　wide　portion　42　of　the　optical　waveguide　portion　4　according　to　the　first　modification.

[0054] As　a　result,　it　is　possible　to　suppress　entry　of　light　from　one　of　the　two　adjacent　color　filters　4R　divided　by　the　optical　waveguide　portion　4　to　the　other.　　In　addition,　it　is　possible　to　suppress　entry　of　light　from　one　of　the　two　color　filters　4B　divided　by　the　optical　waveguide　portion　4　to　the　other.

[0055] Therefore,　by　using　the　phase　difference　between　the　light　incident　on　one　of　the　two　adjacent　color　filters　4R　divided　by　the　optical　waveguide　portion　4　and　the　light　incident　on　the　other,　the　autofocus　performance　for　automatically　adjusting　the　focus　to　a　subject　can　be　enhanced.

[0056] In　addition,　by　using　the　phase　difference　between　the　light　incident　on　one　of　the　two　adjacent　color　filters　4B　divided　by　the　optical　waveguide　portion　4　and　the　light　incident　on　the　other,　the　high-accuracy　autofocus　performance　for　automatically　adjusting　the　focus　to　a　subject　can　be　enhanced.

[0057] Next,　photodetection　elements　1D　and　1E　according　to　the　fourth　to　fifth　modifications　of　the　first　embodiment　will　be　described　with　reference　to　Figs.　10　and　11.　　Figs.　10　and　11　are　cross-sectional　views　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　elements　1D　and　1E　according　to　the　fourth　to　fifth　modifications　of　the　first　embodiment.

[0058] As　illustrated　in　Fig.　10,　the　photodetection　element　1D　according　to　the　fourth　modification　is　different　from　the　photodetection　element　1　illustrated　in　Fig.　5　in　the　configuration　including　absorption　portions　45　that　absorb　light　between　the　optical　waveguide　portions　4　and　the　protective　film　24,　and　is　similar　to　the　photodetection　element　1　illustrated　in　Fig.　5　in　the　other　configurations.

[0059] The　absorption　portions　45　are　thin　films　containing,　for　example,　tungsten　(W),　titanium　(Ti),　titanium　nitride　(TiN),　aluminum　(Al),　copper　(Cu),　silver　(Ag),　or　the　like.　　As　a　result,　in　the　photodetection　element　1D,　the　light　passing　through　the　optical　waveguide　portion　4　can　be　shielded　by　the　absorption　portions　45,　so　that　the　occurrence　of　color　mixing　can　be　suppressed.

[0060] In　addition,　as　illustrated　in　Fig.　11,　in　the　photodetection　element　1E　according　to　the　fifth　modification,　the　side　cross-sectional　shape　of　the　optical　waveguide　portions　4　is　different　from　that　of　the　photodetection　element　1　illustrated　in　Fig.　5,　and　the　other　configurations　are　similar　to　those　of　the　photodetection　element　1　illustrated　in　Fig.　5.

[0061] The　optical　waveguide　portions　4　according　to　the　fifth　modification　have　a　tapered　shape　that　becomes　wider　from　a　first　lens　31　side　or　second　lens　32　side　toward　a　light-receiving　layer　20　side.　　As　a　result,　the　optical　waveguide　portions　4　according　to　the　fifth　modification　can　improve　a　light　collection　characteristic　of　collecting　light　incident　on　the　color　filters　4R,　4G,　and　4B　to　the　photoelectric　conversion　portions　21.

[0062] Next,　the　disposition　of　the　optical　waveguide　portions　4　according　to　the　position　on　the　light-receiving　surface　of　the　photodetection　element　1　according　to　the　first　embodiment　will　be　described　with　reference　to　Figs.　12　to　14.　　Fig.　12　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　1　according　to　the　first　embodiment.　　Figs.　13　and　14　are　cross-sectional　views　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　1　according　to　the　first　embodiment.

[0063] As　illustrated　in　Fig.　12,　light　is　incident　on　the　photodetection　element　1　from　a　direction　close　to　the　normal　direction　of　the　light-receiving　surface　at　the　central　portion　(image　height　center)　on　the　light-receiving　surface　of　the　photodetection　element　1　as　indicated　by　an　outlined　arrow.　　Therefore,　the　optical　waveguide　portions　4　and　4　(42)　provided　at　the　central　portion　in　plan　view　of　the　optical　layer　40　of　the　photodetection　element　1　are　provided　at　positions　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions　21.

[0064] On　the　other　hand,　on　an　outer　side　of　the　central　portion　(image　height　center)　on　the　light-receiving　surface　of　the　photodetection　element　1,　light　is　incident　on　the　photodetection　element　1　from　an　oblique　direction　as　indicated　by　an　outlined　arrow　in　Fig.　13.　　Therefore,　the　optical　waveguide　portions　4　and　4　(42)　provided　on　an　outer　side　of　the　central　portion　in　plan　view　of　the　optical　layer　40　of　the　photodetection　element　1　are　provided　at　positions　shifted　in　the　direction　of　the　central　portion　from　positions　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions　21.

[0065] As　a　result,　in　the　photodetection　element　1,　it　is　possible　to　prevent　light　incident　from　an　oblique　direction　from　being　shielded　by　the　optical　waveguide　portions　4　and　4　(42)　on　an　outer　side　of　the　central　portion　(image　height　center)　on　the　light-receiving　surface,　and　thus,　it　is　possible　to　improve　the　light-receiving　sensitivity　of　the　photoelectric　conversion　portions　21.

[0066] In　addition,　as　illustrated　in　Fig.　14,　in　the　photodetection　element　1,　light　is　incident　from　a　more　largely　inclined　oblique　direction　as　indicated　by　an　outlined　arrow　on　an　outer　side　of　the　light-receiving　surface　with　respect　to　the　position　illustrated　in　Fig.　13.　　Therefore,　the　wide　portion　42　of　the　optical　waveguide　portion　4　provided　on　a　further　outer　side　of　the　light-receiving　surface　with　respect　to　the　position　illustrated　in　Fig.　13　has　a　width　partitioning　the　optical　layer　40　larger　than　that　of　the　wide　portions　42　illustrated　in　Figs.　12　and　13.　　Note　that,　in　the　photodetection　elements　1　illustrated　in　Figs.　13　to　14,　the　first　lenses　31　and　the　second　lens　32　are　disposed　at　positions　moved　toward　a　central　portion　side　of　the　light-receiving　surface　with　respect　to　the　optical　layer　40.

[0067] As　a　result,　the　wide　portion　42　of　the　optical　waveguide　portion　4　can　reduce　the　amount　of　light　to　be　transmitted　even　when　the　light　is　incident　from　a　more　largely　inclined　oblique　direction.　　Note　that　the　wide　portion　42　of　the　optical　waveguide　portion　4　illustrated　in　Fig.　13　may　also　be　larger　in　width　than　the　wide　portion　42　of　the　optical　waveguide　portion　4　illustrated　in　Fig.　12.

[0068] Next,　a　photodetection　element　1F　according　to　a　sixth　modification　will　be　described　with　reference　to　Figs.　15　and　16.　　Fig.　15　is　a　plan　view　illustrating　a　portion　of　the　optical　layer　40　of　the　photodetection　element　1F　according　to　the　sixth　modification　of　the　first　embodiment.　　Fig.　16　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1F　according　to　the　sixth　modification　of　the　first　embodiment.　　Note　that　Fig.　16　illustrates　a　cross　section　of　the　photodetection　element　1F　taken　along　line　A-A　illustrated　in　Fig.　15.

[0069] Although　the　case　where　the　color　filter　4R,　the　set　of　four　color　filters　4G　disposed　in　a　matrix,　and　the　color　filter　4B　are　arranged　in　the　Bayer　array　has　been　described　above　as　an　example,　the　arrangement　of　the　color　filters　4R,　4G,　and　4B　according　to　the　first　embodiment　is　not　limited　to　the　Bayer　array.

[0070] As　illustrated　in　Fig.　15,　in　the　photodetection　element　1F　according　to　the　sixth　modification,　some　(3%　to　6%)　color　filters　4B　among　the　color　filters　4B　arranged　in　the　Bayer　array　are　replaced　with　color　filters　4G.

[0071] As　illustrated　in　Fig.　16,　in　the　photodetection　element　1F,　the　color　filter　4G　is　disposed　between　the　second　lens　32　and　one　photoelectric　conversion　portion　21　of　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32.　　Then,　a　covering　portion　46　of　the　optical　waveguide　portion　4　is　disposed　between　the　other　photoelectric　conversion　portion　21　and　the　second　lens　32　so　as　to　cover　the　photoelectric　conversion　portion　21.　　The　absorption　portion　45　is　disposed　between　the　covering　portion　46　and　the　protective　film　24.

[0072] In　a　region　adjacent　to　the　portion　illustrated　in　Fig.　16,　the　color　filter　4G　is　disposed　between　the　second　lens　32　and　the　other　photoelectric　conversion　portion　21　of　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32,　and　the　one　photoelectric　conversion　portion　21　is　covered　with　the　covering　portion　46　and　the　absorption　portion　45.

[0073] As　a　result,　by　using　the　phase　difference　between　the　light　incident　on　the　one　adjacent　photoelectric　conversion　portion　21　not　covered　with　the　covering　portion　46　or　the　absorption　portion　45　and　the　light　incident　on　the　other　photoelectric　conversion　portion　21,　autofocus　can　also　be　achieved　by　the　photoelectric　conversion　portion　21　that　receives　green　light.

[0074] Next,　photodetection　elements　1G,　1H,　1J,　and　1K　according　to　seventh　to　tenth　modifications　will　be　described　with　reference　to　Figs.　17　to　20.　　Figs.　17　to　20　are　cross-sectional　views　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　elements　1G,　1H,　1J,　and　1K　according　to　the　seventh　to　tenth　modifications　of　the　first　embodiment.

[0075] As　illustrated　in　Fig.　17,　in　the　photodetection　element　1G　according　to　the　seventh　modification,　the　color　filter　4G　is　disposed　between　the　second　lens　32　and　one　photoelectric　conversion　portion　21　of　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32.

[0076] Then,　the　absorption　portion　45　is　disposed　between　the　other　photoelectric　conversion　portion　21　and　the　second　lens　32　so　as　to　cover　the　photoelectric　conversion　portion　21.　　Further,　the　color　filter　4G　is　disposed　between　the　absorption　portion　45　and　the　second　lens　32.

[0077] In　a　region　adjacent　to　the　portion　illustrated　in　Fig.　17,　the　color　filter　4G　is　disposed　between　the　second　lens　32　and　the　other　photoelectric　conversion　portion　21　of　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32.　　Then,　the　one　photoelectric　conversion　portion　21　is　covered　with　the　absorption　portion　45,　and　the　color　filter　4G　is　disposed　between　the　absorption　portion　45　and　the　second　lens　32.

[0078] As　a　result,　by　using　the　phase　difference　between　the　light　incident　on　the　one　adjacent　photoelectric　conversion　portion　21　not　covered　with　the　absorption　portion　45　and　the　light　incident　on　the　other　photoelectric　conversion　portion　21,　autofocus　can　also　be　achieved　by　the　photoelectric　conversion　portion　21　that　receives　green　light.

[0079] Moreover,　in　the　photodetection　element　1G,　the　color　filter　4G　is　disposed　between　the　absorption　portion　45　and　the　second　lens　32,　and　therefore,　for　example,　even　when　the　incident　light　is　reflected　by　the　absorption　portion　45,　color　components　other　than　green　contained　in　the　reflected　light　are　absorbed　by　the　color　filter　4G.　　Therefore,　even　when　light　incident　from　the　second　lens　32　is　reflected　by　the　absorption　portion　45,　the　photodetection　element　1G　can　suppress　occurrence　of　flare.

[0080] In　addition,　as　illustrated　in　Fig.　18,　in　the　photodetection　element　1H　according　to　the　eighth　modification,　the　color　filter　4G　is　disposed　between　the　second　lens　32　and　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32.

[0081] Since　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　second　lens　32　via　the　color　filter　4G　can　output　signal　charges　for　one　pixel,　it　is　possible　to　maintain　highly　sensitive　light-receiving　performance　as　the　photoelectric　conversion　portions　21　that　receive　green　light　even　in　dark.　　On　the　other　hand,　since　one　photoelectric　conversion　portion　21　disposed　opposite　to　the　first　lens　31　via　the　color　filter　4G　can　output　signal　charges　for　one　pixel,　it　is　possible　to　capture　a　high-resolution　image　in　bright　light.

[0082] In　addition,　although　the　case　where　the　first　lenses　31　and　the　second　lenses　32　are　general　microlenses　has　been　described　above,　the　lenses　according　to　the　first　embodiment　are　not　limited　to　general　microlenses.　　For　example,　the　first　lenses　31　and　the　second　lenses　32　may　be　high　refractive　index　lenses　having　a　higher　refractive　index　than　general　microlenses.

[0083] In　addition,　as　in　the　photodetection　element　1J　according　to　the　ninth　modification　illustrated　in　Fig.　19,　the　lenses　may　be　a　light-collecting　element　33　having　an　aspherical　shape.　　In　a　case　where　the　light-collecting　element　33　having　an　aspherical　shape　is　provided,　in　the　photodetection　element　1J,　an　etching　stopper　layer　51　is　disposed　between　the　light-collecting　element　33　and　the　optical　layer　40.

[0084] The　light-receiving　layer　20　and　the　optical　layer　40　of　the　photodetection　element　1J　have　the　same　configuration　as　the　light-receiving　layer　20　and　the　optical　layer　40　illustrated　in　Fig.　5.　　Therefore,　also　in　the　photodetection　element　1J　including　the　light-collecting　element　33　having　an　aspherical　shape,　similarly　to　the　photodetection　element　1　illustrated　in　Fig.　5,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.

[0085] In　addition,　as　in　the　photodetection　element　1K　according　to　the　tenth　modification　illustrated　in　Fig.　20,　the　lenses　may　be　a　meta-lens　34　in　which　a　meta-surface　is　adopted.　　In　a　case　where　the　meta-lens　34　is　provided,　in　the　photodetection　element　1K,　the　etching　stopper　layer　51　is　disposed　between　the　meta-lens　34　and　the　optical　layer　40.

[0086] The　light-receiving　layer　20　and　the　optical　layer　40　of　the　photodetection　element　1K　have　the　same　configuration　as　the　light-receiving　layer　20　and　the　optical　layer　40　illustrated　in　Fig.　5.　　Therefore,　also　in　the　photodetection　element　1K　including　the　meta-lens　34,　similarly　to　the　photodetection　element　1　illustrated　in　Fig.　5,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.

[0087] Next,　a　configuration　of　the　light-receiving　layer　20　of　the　photodetection　element　1　according　to　the　first　embodiment　will　be　described　with　reference　to　Fig.　21.　　Fig.　21　is　a　plan　view　illustrating　a　portion　of　the　light-receiving　layer　20　of　the　photodetection　element　1　according　to　the　first　embodiment.　　As　illustrated　in　Fig.　21,　the　photodetection　element　1　includes　the　pixel　isolation　portion　22　having　a　lattice　shape　in　plan　view　that　electrically　and　optically　isolates　the　plurality　of　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix.

[0088] As　a　result,　in　the　photodetection　element　1,　leakage　of　light　incident　on　the　photoelectric　conversion　portion　21　to　the　adjacent　photoelectric　conversion　portion　21　can　be　suppressed　by　the　pixel　isolation　portion　22.　　In　addition,　the　photodetection　element　1　can　suppress　leakage　of　the　signal　charges　photoelectrically　converted　by　the　photoelectric　conversion　portion　21　to　the　adjacent　photoelectric　conversion　portion　21.

[0089] Note　that　the　shape　of　the　pixel　isolation　portion　22　according　to　the　first　embodiment　is　not　limited　to　the　plan　view　shape.　　Next,　pixel　isolation　portions　22　according　to　eleventh　and　twelfth　modifications　will　be　described　with　reference　to　Figs.　22　and　23.　　Figs.　22　and　23　are　plan　views　illustrating　a　portion　of　the　light-receiving　layer　20　of　photodetection　elements　1L　and　1M　according　to　the　eleventh　and　twelfth　modifications　of　the　first　embodiment.

[0090] As　illustrated　in　Fig.　22,　the　pixel　isolation　portion　22　according　to　the　eleventh　modification　is　provided　in　a　portion　excluding　a　portion　where　the　boundary　portions　between　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix　on　which　light　of　the　same　color　is　incident　intersect　among　the　boundary　portions　between　a　plurality　of　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix.　　The　pixel　isolation　portion　22　electrically　and　optically　isolates　the　adjacent　photoelectric　conversion　portions　21.

[0091] As　a　result,　similarly　to　the　pixel　isolation　portion　22　illustrated　in　Fig.　20,　the　pixel　isolation　portion　22　according　to　the　eleventh　modification　can　suppress　leakage　of　light　incident　on　the　photoelectric　conversion　portion　21　to　the　adjacent　photoelectric　conversion　portion　21　and　leakage　of　the　photoelectrically　converted　signal　charges　to　the　adjacent　photoelectric　conversion　portion　21.

[0092] In　addition,　the　photodetection　element　1L　according　to　the　eleventh　modification　includes　pixel　isolation　regions　25　into　which　impurities　are　ion-implanted　in　portions　where　the　boundary　portions　between　the　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix　on　which　light　of　the　same　color　is　incident　intersect.

[0093] The　pixel　isolation　regions　25　prevent　signal　charges　from　leaking　from　the　photoelectric　conversion　portion　21　to　the　adjacent　photoelectric　conversion　portion　21　while　allowing　light　incident　via　the　color　filters　4R,　4G,　and　4B　to　be　incident　on　the　photoelectric　conversion　portion　21.

[0094] As　a　result,　in　the　photodetection　element　1L,　light　is　also　incident　on　the　photoelectric　conversion　portion　21　from　the　portion　where　the　boundary　portions　between　the　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix　on　which　light　of　the　same　color　is　incident　intersect,　so　that　the　light-receiving　sensitivity　of　each　photoelectric　conversion　portion　21　is　improved.

[0095] In　addition,　light　is　incident　from　the　pixel　isolation　regions　25　to　the　four　photoelectric　conversion　portions　21　surrounding　the　pixel　isolation　regions　25,　but　since　these　four　photoelectric　conversion　portions　21　photoelectrically　convert　light　of　the　same　color,　color　mixing　is　less　likely　to　occur.

[0096] In　addition,　as　illustrated　in　Fig.　23,　in　the　photodetection　element　1M　according　to　the　twelfth　modification,　a　configuration　in　which　an　electrode　26　is　disposed　inside　the　pixel　isolation　portion　22　is　different　from　that　of　the　photodetection　element　1L　illustrated　in　Fig.　21,　and　the　other　configurations　are　similar　to　those　of　the　photodetection　element　1L　illustrated　in　Fig.　21.

[0097] The　electrode　26　is,　for　example,　a　metal　electrode　formed　of　polySi　(polysilicon),　Ti,　TiN,　or　the　like,　or　a　transparent　electrode　formed　of　InO　(indium　oxide)　or　the　like.　　A　negative　voltage　is　applied　to　the　electrode　26.　　As　a　result,　the　photodetection　element　1M　can　suppress　generation　of　dark　current　in　the　photoelectric　conversion　portions　21.

[0098] Next,　disposition　examples　of　lenses　according　to　thirteenth　to　fifteenth　modifications　will　be　described　with　reference　to　Figs.　24　to　26.　　Figs.　24　to　26　are　plan　views　illustrating　disposition　examples　of　lenses　according　to　the　thirteenth　to　fifteenth　modifications　according　to　the　first　embodiment.

[0099] The　photodetection　element　1　illustrated　in　Fig.　1　includes　the　first　lenses　31　provided　at　positions　opposite　to　the　respective　four　photoelectric　conversion　portions　21　disposed　in　a　matrix,　and　the　second　lenses　32　each　provided　at　a　position　opposite　to　two　adjacent　photoelectric　conversion　portions　21　arranged　in　the　row　direction.

[0100] On　the　other　hand,　the　photodetection　element　according　to　the　thirteenth　modification　includes　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　24.　　The　photodetection　element　according　to　the　thirteenth　modification　includes　the　first　lenses　31　provided　at　positions　opposite　to　the　respective　four　photoelectric　conversion　portions　21　disposed　in　a　matrix,　and　the　second　lenses　32　each　provided　at　a　position　opposite　to　four　photoelectric　conversion　portions　21　disposed　in　a　matrix.

[0101] In　addition,　the　photodetection　element　according　to　the　fourteenth　modification　includes　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　25.　　The　photodetection　element　according　to　the　fourteenth　modification　includes　the　first　lenses　31　provided　at　positions　opposite　to　the　respective　16　photoelectric　conversion　portions　21　disposed　in　a　matrix,　and　the　second　lenses　32　each　provided　at　a　position　opposite　to　two　adjacent　photoelectric　conversion　portions　21　arranged　in　the　row　direction.　　The　eight　second　lenses　32　are　disposed　in　a　matrix.

[0102] In　addition,　the　photodetection　element　according　to　the　fifteenth　modification　includes　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　26.　　The　photodetection　element　according　to　the　fifteenth　modification　includes　the　first　lenses　31　provided　at　positions　opposite　to　the　respective　16　photoelectric　conversion　portions　21　disposed　in　a　matrix,　and　the　second　lenses　32　each　provided　at　a　position　opposite　to　four　photoelectric　conversion　portions　21　disposed　in　a　matrix.　　The　four　second　lenses　32　are　disposed　in　a　matrix.

[0103] Next,　disposition　examples　of　color　filters　according　to　sixteenth　to　eighteenth　modifications　will　be　described　with　reference　to　Figs.　27　to　29.　　Figs.　24　to　26　are　plan　views　illustrating　disposition　examples　of　color　filters　according　to　the　thirteenth　to　fifteenth　modifications　of　the　first　embodiment.

[0104] Rectangles　indicated　by　"R"　in　Figs.　27　and　29　are　color　filters　4R　that　transmit　red　light.　　Rectangles　indicated　by　"Y"　in　Figs.　27　and　28　are　color　filters　4Y　that　transmit　yellow　light.　　Rectangles　indicated　by　"B"　in　Figs.　27　and　29　are　color　filters　4B　that　transmit　blue　light.

[0105] In　addition,　rectangles　indicated　by　"M"　in　Fig.　28　are　color　filters　4M　that　transmit　magenta　light.　　Rectangles　indicated　by　"C"　in　Fig.　28　are　color　filters　4C　that　transmit　cyan　light.

[0106] As　illustrated　in　Fig.　27,　the　photodetection　element　according　to　the　sixteenth　modification　includes　four　adjacent　color　filters　4R　arranged　in　a　matrix,　four　adjacent　color　filters　4Y　arranged　in　a　matrix,　and　four　adjacent　color　filters　4B　arranged　in　a　matrix.

[0107] As　illustrated　in　Fig.　28,　the　photodetection　element　according　to　the　seventeenth　modification　includes　four　adjacent　color　filters　4M　arranged　in　a　matrix,　four　adjacent　color　filters　4Y　arranged　in　a　matrix,　and　four　adjacent　color　filters　4C　arranged　in　a　matrix.

[0108] As　illustrated　in　Fig.　29,　the　photodetection　element　according　to　the　eighteenth　modification　includes　16　adjacent　color　filters　4R　arranged　in　a　matrix,　16　adjacent　color　filters　4G　arranged　in　a　matrix,　and　16　adjacent　color　filters　4B　arranged　in　a　matrix.

[0109] For　example,　by　combining　the　disposition　of　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　1　with　the　disposition　of　the　color　filters　4R,　4G,　and　4B　illustrated　in　Fig.　6,　the　photodetection　element　including　green　pixels,　red　pixels,　and　blue　pixels　described　below　is　achieved.

[0110] The　green　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4G　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　green　light,　and　the　first　lenses　31　provided　on　a　side　opposite　to　the　photoelectric　conversion　portions　21　across　the　color　filters　4G.

[0111] The　red　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4R　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　red　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　two　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4G.

[0112] The　blue　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4B　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　blue　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　two　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4B.

[0113] In　such　a　photodetection　element　as　well,　by　adopting　the　optical　waveguide　portions　4　and　4　(42)　according　to　the　first　embodiment,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.

[0114] In　addition,　for　example,　by　combining　the　disposition　of　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　24　with　the　disposition　of　the　color　filters　4R,　4G,　and　4B　illustrated　in　Fig.　6,　the　photodetection　element　including　green　pixels,　red　pixels,　and　blue　pixels　described　below　is　achieved.

[0115] The　green　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4G　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　green　light,　and　the　first　lenses　31　provided　on　a　side　opposite　to　the　photoelectric　conversion　portions　21　across　the　color　filters　4G.

[0116] The　red　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4R　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　red　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　four　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4R.

[0117] The　blue　pixels　include　four　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4B　that　are　provided　at　positions　opposite　to　the　four　photoelectric　conversion　portions　21　and　transmit　blue　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　four　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4B.

[0118] In　such　a　photodetection　element　as　well,　by　adopting　the　optical　waveguide　portions　4　and　4　(42)　according　to　the　first　embodiment,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.

[0119] In　addition,　for　example,　by　combining　the　disposition　of　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　25　with　the　disposition　of　the　color　filters　4R,　4G,　and　4B　illustrated　in　Fig.　29,　the　photodetection　element　including　green　pixels,　red　pixels,　and　blue　pixels　described　below　is　achieved.

[0120] The　green　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4G　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　green　light,　and　the　first　lenses　31　provided　on　a　side　opposite　to　the　photoelectric　conversion　portions　21　across　the　color　filters　4G.

[0121] The　red　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4R　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　red　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　two　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4R.

[0122] The　blue　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4B　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　blue　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　two　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4B.

[0123] In　such　a　photodetection　element　as　well,　by　adopting　the　optical　waveguide　portions　4　and　4　(42)　according　to　the　first　embodiment,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.

[0124] In　addition,　for　example,　by　combining　the　disposition　of　the　first　lenses　31　and　the　second　lenses　32　illustrated　in　Fig.　26　with　the　disposition　of　the　color　filters　4R,　4G,　and　4B　illustrated　in　Fig.　29,　the　photodetection　element　including　green　pixels,　red　pixels,　and　blue　pixels　described　below　is　achieved.

[0125] The　green　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4G　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　green　light,　and　the　first　lenses　31　provided　on　a　side　opposite　to　the　photoelectric　conversion　portions　21　across　the　color　filters　4G.

[0126] The　red　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4R　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　red　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　four　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4R.

[0127] The　blue　pixels　include　16　photoelectric　conversion　portions　21　adjacent　to　each　other　in　a　matrix,　the　color　filters　4B　that　are　provided　at　positions　opposite　to　the　16　photoelectric　conversion　portions　21　and　transmit　blue　light,　and　the　second　lenses　32　provided　on　a　side　opposite　to　the　four　adjacent　photoelectric　conversion　portions　21　across　the　color　filters　4B.

[0128] In　such　a　photodetection　element　as　well,　by　adopting　the　optical　waveguide　portions　4　and　4　(42)　according　to　the　first　embodiment,　it　is　possible　to　suppress　a　decrease　in　photodetection　accuracy.Second Embodiment

[0129] Next,　a　photodetection　element　according　to　a　second　embodiment　will　be　described.　　Fig.　30　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　photodetection　element　1N　according　to　the　second　embodiment.

[0130] As　illustrated　in　Fig.　30,　the　photodetection　element　1N　is　different　from　the　photodetection　element　100　illustrated　in　Fig.　2　in　that　the　photodetection　element　1N　includes　an　absorption　portion　45　that　absorbs　light　between　an　optical　waveguide　portion　4　in　the　portion　facing　the　boundary　line　between　adjacent　first　lenses　31　and　a　protective　film　24,　and　is　similar　to　the　photodetection　element　100　in　the　other　configurations.

[0131] Specifically,　the　photodetection　element　1N　includes　a　light-receiving　layer　20,　an　optical　layer　40,　the　first　lenses　31,　and　second　lenses　32.　　The　light-receiving　layer　20　includes　a　plurality　of　photoelectric　conversion　portions　21　disposed　in　a　matrix.　　A　fixed　charge　layer　23　is　provided　on　a　light-receiving　surface　of　each　photoelectric　conversion　portion　21.　　The　photoelectric　conversion　portions　21　and　the　fixed　charge　layer　23　are　covered　with　the　protective　film　24.

[0132] The　optical　layer　40　is　provided　so　as　to　cover　the　light-receiving　layer　20.　　The　optical　layer　40　includes　a　plurality　of　types　of　color　filters　4R,　4G,　and　4B　that　transmits　different　colors　of　light.　　For　example,　the　optical　layer　40　includes　a　color　filter　4R　that　selectively　transmits　red　light,　a　color　filter　4G　that　selectively　transmits　green　light,　and　a　color　filter　4B　that　selectively　transmits　blue　light.

[0133] The　first　lenses　31　and　the　second　lens　32　are　provided　on　the　side　opposite　to　the　light-receiving　layer　20　across　the　optical　layer　40.　　The　first　lens　31　is　provided　on　the　side　opposite　to　one　photoelectric　conversion　portion　21　across　the　optical　layer　40.　　The　second　lens　32　is　provided　on　the　side　opposite　to　a　plurality　of　(in　Fig.　30,　two)　adjacent　photoelectric　conversion　portions　21　across　the　optical　layer　40.

[0134] In　addition,　the　optical　layer　40　includes　the　optical　waveguide　portions　4　that　partition　the　optical　layer　40　for　each　of　the　first　lenses　31　and　the　second　lens　32　so　as　to　guide　light　incident　via　the　first　lenses　31　and　the　second　lens　32　to　the　photoelectric　conversion　portions　21.　　Each　optical　waveguide　portion　4　is　covered　with　a　protective　film　41.

[0135] Then,　the　optical　waveguide　portion　4　in　a　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　31　is　stacked　on　the　light-receiving　layer　20　via　the　absorption　portion　45.　　On　the　other　hand,　the　optical　waveguide　portions　4　in　a　portion　facing　the　boundary　line　between　the　adjacent　second　lenses　32　and　a　portion　facing　the　boundary　line　between　the　adjacent　first　lens　31　and　second　lens　32　are　stacked　on　the　light-receiving　layer　20　without　interposing　the　absorption　portion　45.

[0136] As　a　result,　the　photodetection　element　1N　can　improve　the　light-receiving　sensitivity　of　the　entire　photodetection　element　1N　while　suppressing　crosstalk　between　the　two　photoelectric　conversion　portions　21　opposite　to　the　two　adjacent　first　lenses　31.

[0137] Specifically,　in　the　photodetection　element　1N,　in　a　case　where　light　indicated　by　outlined　arrows　in　Fig.　30　is　obliquely　incident　on　the　first　lenses　31,　a　part　of　the　light　may　hit　a　contact　portion　of　the　optical　waveguide　portions　4　with　respect　to　the　protective　film　24,　like　light　indicated　by　thick　black　line　arrows.

[0138] In　this　case,　without　the　absorption　portions　45,　as　indicated　by　a　dotted　arrow　in　Fig.　30,　part　of　the　light　obliquely　transmitted　through　the　color　filter　4G　is　received　by　the　photoelectric　conversion　portion　21　facing　the　color　filter　4G　located　adjacent　to　the　color　filter　4G　through　which　the　light　has　transmitted,　and　crosstalk　occurs.

[0139] On　the　other　hand,　the　photodetection　element　1　includes　the　absorption　portions　45　that　absorb　light　between　the　optical　waveguide　portion　4　in　the　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　31　and　the　protective　film　24.　　Therefore,　in　the　photodetection　element　1N,　a　part　of　the　light　obliquely　transmitted　through　the　color　filter　4G　is　absorbed　by　the　absorption　portion　45.

[0140] As　a　result,　the　photodetection　element　1N　can　suppress　crosstalk　by　suppressing　light　that　has　obliquely　transmitted　through　the　color　filter　4G　from　being　received　by　the　photoelectric　conversion　portion　21　facing　the　color　filter　4G　located　adjacent　to　the　color　filter　4G　through　which　the　light　has　transmitted.

[0141] In　addition,　in　a　portion　facing　the　boundary　line　between　the　adjacent　second　lenses　32　and　a　portion　facing　the　boundary　line　between　the　adjacent　first　lens　31　and　second　lens　32,　the　absorption　portion　45　does　not　exist　between　the　optical　waveguide　portions　4　and　the　protective　film　24.

[0142] Therefore,　the　optical　waveguide　portions　4　in　the　portion　facing　the　boundary　line　between　the　adjacent　second　lenses　32　and　the　portion　facing　the　boundary　line　between　the　adjacent　first　lens　31　and　second　lens　32　can　guide　the　light　to　the　photoelectric　conversion　portions　21　facing　the　color　filters　4G　through　which　the　light　has　transmitted　without　absorbing　the　light.　　As　a　result,　the　photodetection　element　1N　can　improve　the　light-receiving　sensitivity　of　the　entire　photodetection　element　1N.

[0143] In　addition,　the　optical　waveguide　portion　4　stacked　on　the　light-receiving　layer　20　via　the　absorption　portion　45　is　located　between　the　adjacent　color　filters　4G　that　transmit　light　of　the　same　color　(in　Fig.　30,　green).　　As　a　result,　the　photodetection　element　1N　can　receive　the　light　to　be　received　by　each　of　the　two　adjacent　photoelectric　conversion　portions　21　that　receive　the　light　of　the　same　color　with　high　accuracy.

[0144] Next,　the　disposition　of　the　optical　waveguide　portions　4　according　to　the　position　on　the　light-receiving　surface　of　the　photodetection　element　1N　according　to　the　second　embodiment　will　be　described　with　reference　to　Figs.　31　and　32.　　Fig.　31　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　a　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　1N　according　to　the　second　embodiment.　　Fig.　32　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　of　the　photodetection　element　1N　according　to　the　second　embodiment.

[0145] As　illustrated　in　Fig.　31,　light　is　incident　on　the　photodetection　element　1N　from　a　direction　close　to　the　normal　direction　of　the　light-receiving　surface　at　the　central　portion　(image　height　center)　on　the　light-receiving　surface　of　the　photodetection　element　1N　as　indicated　by　outlined　arrows.　　Therefore,　the　optical　waveguide　portions　4　provided　at　the　central　portion　in　plan　view　of　the　optical　layer　40　of　the　photodetection　element　1N　are　provided　at　positions　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions　21.

[0146] On　the　other　hand,　on　an　outer　side　of　the　central　portion　(image　height　center)　on　the　light-receiving　surface　of　the　photodetection　element　1N,　light　is　incident　on　the　photodetection　element　1N　from　an　oblique　direction　as　indicated　by　outlined　arrows　in　Fig.　32.　　Therefore,　the　optical　waveguide　portions　4　provided　on　an　outer　side　of　the　central　portion　in　plan　view　of　the　optical　layer　40　of　the　photodetection　element　1N　are　provided　at　positions　shifted　in　the　direction　of　the　central　portion　from　positions　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions　21.

[0147] As　a　result,　in　the　photodetection　element　1N,　it　is　possible　to　prevent　light　incident　from　an　oblique　direction　from　being　shielded　by　the　optical　waveguide　portions　4　on　an　outer　side　of　the　central　portion　(image　height　center)　on　the　light-receiving　surface,　and　thus,　it　is　possible　to　improve　the　light-receiving　sensitivity　of　the　photoelectric　conversion　portions　21.

[0148] Next,　a　photodetection　element　1P　according　to　a　first　modification　of　the　second　embodiment　and　a　photodetection　element　1Q　according　to　a　second　modification　of　the　second　embodiment　will　be　described　with　reference　to　Figs.　33　and　34.　　Fig.　33　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　a　light-receiving　surface　of　the　photodetection　element　1P　according　to　the　first　modification　of　the　second　embodiment.　　Fig.　34　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　an　outer　side　of　the　central　portion　of　a　light-receiving　surface　of　the　photodetection　element　1Q　according　to　the　second　modification　of　the　second　embodiment.

[0149] As　illustrated　in　Fig.　33,　the　photodetection　element　1P　according　to　the　first　modification　is　different　from　the　photodetection　element　1N　illustrated　in　Fig.　32　in　that　the　absorption　portion　45　is　disposed　at　a　position　facing　the　boundary　line　between　the　adjacent　first　lenses　31,　and　is　similar　to　the　photodetection　element　1N　illustrated　in　Fig.　32　in　the　other　configurations.

[0150] With　such　a　configuration　as　well,　the　photodetection　element　1P　according　to　the　first　modification　can　improve　the　light-receiving　sensitivity　of　the　entire　photodetection　element　1P　while　suppressing　crosstalk　between　the　two　photoelectric　conversion　portions　21　opposite　to　the　two　adjacent　first　lenses　31.

[0151] In　addition,　as　illustrated　in　Fig.　34,　in　the　photodetection　element　1Q　according　to　the　second　modification,　the　optical　waveguide　portions　4　provided　on　an　outer　side　of　the　central　portion　of　the　light-receiving　surface　are　provided　in　a　staircase　pattern　at　positions　shifted　in　the　direction　of　the　central　portion　of　the　light-receiving　surface　as　approaching　the　first　lenses　31　or　the　second　lens　32　from　positions　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions　21.

[0152] Therefore,　in　the　photodetection　element　1Q　according　to　the　second　modification,　the　optical　waveguide　portions　4　are　less　likely　to　shield　the　light　obliquely　incident　on　the　photoelectric　conversion　portions　21　located　on　an　outer　side　of　the　central　portion　of　the　light-receiving　surface,　as　compared　with　the　configuration　in　which　the　optical　waveguide　portions　4　are　not　in　a　staircase　pattern.　　As　a　result,　the　photodetection　element　1Q　can　further　improve　the　light-receiving　sensitivity　in　the　region　on　an　outer　side　of　the　central　portion　of　the　light-receiving　surface.　　Note　that,　in　the　photodetection　elements　1N,　1P,　and　1Q　illustrated　in　Figs.　32　to　34,　similarly　to　the　photodetection　elements　1　illustrated　in　Figs.　13　and　14,　the　first　lenses　31　and　the　second　lens　32　are　disposed　at　positions　moved　toward　a　central　portion　side　of　the　light-receiving　surface　with　respect　to　the　optical　layer　40.

[0153] Next,　a　photodetection　element　1R　according　to　a　third　modification　of　the　second　embodiment　and　a　photodetection　element　1S　according　to　a　fourth　modification　of　the　second　embodiment　will　be　described　with　reference　to　Figs.　35　and　36.　　Fig.　35　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1R　according　to　the　third　modification　of　the　second　embodiment.　　Fig.　36　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1S　according　to　the　fourth　modification　of　the　second　embodiment.

[0154] As　illustrated　in　Fig.　35,　in　the　photodetection　element　1Q　according　to　the　third　modification,　the　optical　waveguide　portions　4　have　a　tapered　shape　that　becomes　wider　from　a　first　lens　31　side　or　second　lens　32　side　toward　a　light-receiving　layer　20　side.

[0155] In　other　words,　the　optical　waveguide　portions　4　according　to　the　third　modification　have　a　tapered　shape　that　becomes　narrower　from　the　light-receiving　layer　20　side　toward　the　first　lens　31　side　or　second　lens　32　side.　　As　a　result,　in　the　photodetection　element　1R　according　to　the　third　modification,　the　opening　areas　of　the　optical　waveguide　portions　4　facing　the　direction　in　which　the　light　is　incident　are　increased,　so　that　the　light　collection　characteristic　can　be　improved.

[0156] In　addition,　as　illustrated　in　Fig.　36,　the　photodetection　element　1S　according　to　the　fourth　modification　is　different　from　the　photodetection　element　1R　according　to　the　third　modification　in　that　side　surfaces　of　the　optical　waveguide　portions　4　have　a　rounded　shape,　and　the　other　configurations　are　similar　to　those　of　the　photodetection　element　1R　according　to　the　third　modification.

[0157] Also　in　the　photodetection　element　1S　according　to　the　fourth　modification,　the　optical　waveguide　portions　4　are　narrowed　from　the　light-receiving　layer　20　side　toward　the　first　lens　31　or　second　lens　32　side.　　Therefore,　in　the　photodetection　element　1S　according　to　the　fourth　modification,　similarly　to　the　photodetection　element　1R　according　to　the　third　modification,　the　opening　areas　of　the　optical　waveguide　portions　4　facing　the　direction　in　which　the　light　is　incident　are　increased,　so　that　the　light　collection　characteristic　can　be　improved.

[0158] Next,　a　photodetection　element　1T　according　to　a　fifth　modification　according　to　the　second　embodiment　will　be　described　with　reference　to　Fig.　37.　　Fig.　37　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1T　according　to　the　fifth　modification　according　to　the　second　embodiment.

[0159] As　illustrated　in　Fig.　37,　the　optical　waveguide　portions　4　and　the　absorption　portion　45　of　the　photodetection　element　1T　according　to　the　fifth　modification　have　a　width　partitioning　the　optical　layer　40　at　a　portion　facing　the　boundary　line　between　adjacent　first　lenses　31　larger　than　a　width　partitioning　the　optical　layer　40　at　portions　facing　the　boundary　line　between　adjacent　second　lenses　32　and　the　boundary　line　between　adjacent　first　lens　31　and　second　lens　32.

[0160] As　a　result,　the　photodetection　element　1T　according　to　the　fifth　modification　further　suppresses　transmission　of　light　obliquely　incident　on　the　first　lenses　31　through　the　optical　waveguide　portions　4,　thereby　further　suppressing　crosstalk.

[0161] Next,　a　photodetection　element　1U　according　to　a　sixth　modification　according　to　the　second　embodiment　will　be　described　with　reference　to　Fig.　38.　　Fig.　38　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1U　according　to　the　sixth　modification　according　to　the　second　embodiment.

[0162] As　illustrated　in　Fig.　38,　in　the　photodetection　element　1U　according　to　the　sixth　modification　according　to　the　second　embodiment,　the　height　of　the　optical　waveguide　portions　4　at　the　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　31　is　lower　than　the　height　of　another　optical　waveguide　portion　4.

[0163] Specifically,　the　optical　waveguide　portions　4　stacked　on　the　light-receiving　layer　20　without　interposing　the　absorption　portion　45　penetrate　the　optical　layer　40　in　a　thickness　direction.　　On　the　other　hand,　the　optical　waveguide　portions　4　stacked　on　the　light-receiving　layer　20　via　the　absorption　portion　45　extend　from　the　absorption　portion　45　to　a　middle　portion　in　the　thickness　direction　of　the　optical　layer　40.

[0164] As　a　result,　in　the　photodetection　element　1U　according　to　the　sixth　modification,　the　light　obliquely　incident　on　the　first　lens　31　is　hardly　shielded　by　the　optical　waveguide　portion　4　in　the　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　31,　so　that　the　light-receiving　sensitivity　of　the　photoelectric　conversion　portions　21　facing　the　first　lenses　31　can　be　improved.

[0165] Next,　a　photodetection　element　1V　according　to　a　seventh　modification　according　to　the　second　embodiment　will　be　described　with　reference　to　Fig.　39.　　Fig.　39　is　a　cross-sectional　view　illustrating　a　portion　of　a　side　cross-section　of　the　photodetection　element　1V　according　to　the　seventh　modification　according　to　the　second　embodiment.

[0166] As　illustrated　in　Fig.　39,　in　the　photodetection　element　1V　according　to　the　seventh　modification　according　to　the　second　embodiment,　the　absorption　portion　45　extends　between　one　color　filter　4G　of　two　color　filters　4G　facing　two　adjacent　first　lenses　31　and　the　protective　film　24.　　The　other　configurations　of　the　photodetection　element　1V　according　to　the　seventh　modification　are　similar　to　those　of　the　photodetection　element　1N　illustrated　in　Fig.　30.

[0167] That　is,　in　the　photodetection　element　1V　according　to　the　seventh　modification,　light　is　shielded　by　the　absorption　portion　45　with　respect　to　only　one　photoelectric　conversion　portion　21　of　the　two　photoelectric　conversion　portions　21　disposed　opposite　to　the　two　adjacent　first　lenses　31.

[0168] As　a　result,　in　the　photodetection　element　1V　according　to　the　seventh　modification,　among　the　two　adjacent　photoelectric　conversion　portions　21,　by　using　the　phase　difference　between　the　light　incident　on　the　photoelectric　conversion　portion　21　for　which　the　light　is　not　shielded　and　the　light　incident　on　the　photoelectric　conversion　portion　21　for　which　the　light　is　shielded　by　the　absorption　portion　45,　autofocus　can　be　achieved　by　the　photoelectric　conversion　portion　21　that　receives　green　light.

[0169] Next,　variations　of　the　plan　view　shape　of　the　optical　waveguide　portions　4　of　the　photodetection　element　1N　according　to　the　second　embodiment　will　be　described　with　reference　to　Figs.　40　to　45.　　Figs.　40　to　45　are　plan　views　illustrating　an　example　of　a　portion　of　the　optical　layer　40　of　the　photodetection　element　1N　according　to　the　second　embodiment.　　Note　that　Figs.　40　to　45　illustrate　a　portion　of　the　light-receiving　surface　obtained　by　cutting　the　optical　layer　40　at　the　layer　where　the　absorption　portion　45　is　located.

[0170] As　illustrated　in　Fig.　40,　in　one　example,　in　the　photodetection　element　1N,　the　absorption　portion　45　is　disposed　at　the　boundary　portion　between　the　four　color　filters　4G　disposed　in　a　matrix　in　plan　view.　　In　the　photodetection　element　1N,　the　optical　waveguide　portions　4　are　disposed　at　the　boundary　portions　between　the　four　color　filters　4R　disposed　in　a　matrix　and　the　four　color　filters　4B　disposed　in　a　matrix　without　disposing　the　absorption　portion　45.

[0171] In　the　photodetection　element　1N,　the　absorption　portion　45　and　the　optical　waveguide　portions　4　are　not　disposed　at　the　boundary　portions　between　the　color　filters　4R,　4G,　and　4B　of　different　colors.　　Each　of　the　absorption　portion　45　and　the　optical　waveguide　portions　4　has　a　tapered　shape　in　which　the　width　in　plan　view　becomes　narrower　toward　the　boundary　portions　between　the　color　filters　4R,　4G,　and　4B　of　different　colors.

[0172] With　the　photodetection　element　1N　illustrated　in　Fig.　40,　it　is　possible　to　suppress　crosstalk　between　the　photoelectric　conversion　portions　21　facing　the　color　filters　4G　located　on　both　sides　of　the　absorption　portion　45　in　plan　view.　　In　addition,　with　the　photodetection　element　1N　illustrated　in　Fig.　40,　it　is　possible　to　improve　the　light-receiving　sensitivity　of　the　region　where　the　absorption　portion　45　is　not　disposed　at　the　boundary　portion　between　the　photoelectric　conversion　portions　21　facing　the　color　filters　4R,　4G,　and　4B.

[0173] In　addition,　as　illustrated　in　Fig.　41,　in　one　example,　in　the　photodetection　element　1N,　the　optical　waveguide　portions　4　are　disposed　at　the　boundary　portions　between　the　color　filters　4R,　4G,　and　4B　of　different　colors　without　disposing　the　absorption　portion　45.　　In　addition,　in　the　photodetection　element　1N,　the　absorption　portion　45　is　disposed　at　the　boundary　portion　between　the　four　color　filters　4G　disposed　in　a　matrix　in　plan　view.　　However,　the　absorption　portion　45　and　the　optical　waveguide　portions　4　are　not　coupled.

[0174] In　the　photodetection　element　1N,　the　optical　waveguide　portions　4　are　disposed　at　the　boundary　portions　between　the　four　color　filters　4R　disposed　in　a　matrix　and　the　four　color　filters　4B　disposed　in　a　matrix　without　disposing　the　absorption　portion　45.　　However,　the　optical　waveguide　portions　4　at　the　boundary　portion　between　the　color　filters　4R　of　the　same　color　and　the　boundary　portion　between　the　color　filters　4B　of　the　same　color　are　not　coupled　to　the　optical　waveguide　portions　4　at　the　boundary　portions　between　the　color　filters　4R,　4G,　and　4B　of　different　colors.

[0175] With　the　photodetection　element　1N　illustrated　in　Fig.　41,　it　is　possible　to　suppress　crosstalk　between　the　photoelectric　conversion　portions　21　facing　the　color　filters　4G　located　on　both　sides　of　the　absorption　portion　45　in　plan　view.　　In　addition,　with　the　photodetection　element　1N　illustrated　in　Fig.　41,　it　is　possible　to　improve　the　light-receiving　sensitivity　of　the　region　where　the　absorption　portion　45　is　not　disposed　at　the　boundary　portion　between　the　photoelectric　conversion　portions　21　facing　the　color　filters　4R,　4G,　and　4B.

[0176] In　addition,　as　illustrated　in　Figs.　42　to　45,　in　one　example,　in　the　photodetection　element　1N,　the　absorption　portion　45　is　disposed　at　the　boundary　portion　between　specific　color　filters　4G　designed　in　advance,　and　the　optical　waveguide　portions　4　are　disposed　at　the　boundary　portions　between　the　color　filters　4R,　4G,　and　4B　other　than　the　specific　color　filters　4G　without　disposing　the　absorption　portion　45.

[0177] With　the　photodetection　elements　1N　illustrated　in　Figs.　42　to　45,　it　is　possible　to　suppress　crosstalk　between　the　photoelectric　conversion　portions　21　facing　the　specific　color　filters　4G　located　on　both　sides　of　the　absorption　portion　45　in　plan　view.　　In　addition,　with　the　photodetection　elements　1N　illustrated　in　Figs.　42　to　45,　it　is　possible　to　improve　the　light-receiving　sensitivity　of　the　region　where　the　absorption　portion　45　is　not　disposed　at　the　boundary　portion　between　the　photoelectric　conversion　portions　21　facing　the　color　filters　4R,　4G,　and　4B.

[0178] Note　that,　as　the　first　lenses　31　and　the　second　lenses　32　of　the　photodetection　elements　1N,　1P,　1Q,　1R,　1S,　1T,　1U,　and　1V　according　to　the　second　embodiment,　the　first　lenses　31　and　the　second　lenses　32　disposed　as　illustrated　in　Figs.　1,　19,　20,　and　24　to　26　can　be　adopted.

[0179] In　addition,　as　the　color　filters　4R,　4G,　and　4B　of　the　photodetection　elements　1N,　1P,　1Q,　1R,　1S,　1T,　1U,　and　1V　according　to　the　second　embodiment,　the　color　filters　4R,　4G,　and　4B　disposed　as　illustrated　in　Figs.　27　to　29　can　be　adopted.

[0180] In　addition,　the　configurations　of　the　photodetection　elements　1,　1A,　1B,　1C,　1D,　1E,　1F,　1G,　1H,　1J,　1K,　1L,　1M,　1N,　1P,　1Q,　1R,　1S,　1T,　1U,　and　1V　according　to　the　first　embodiment,　second　embodiment,　and　modifications　described　above　can　be　optionally　combined　within　a　range　in　which　no　contradiction　occurs.

[0181] Note　that　the　present　technology　can　also　have　the　following　configurations. (1) A　photodetection　element　including: light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　provided　so　as　to　cover　the　light-receiving　layer;　and a　plurality　of　lenses　that　is　provided　on　a　side　opposite　to　the　light-receiving　layer　across　the　optical　layer,　wherein the　plurality　of　lenses　includes a　first　lens　provided　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　second　lens　provided　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, the　optical　layer　includes an　optical　waveguide　portion　partitioning　the　optical　layer　for　each　of　the　lenses　so　as　to　guide　light　incident　through　the　lenses　to　the　photoelectric　conversion　portions,　and the　optical　waveguide　portion　has a　width　partitioning　the　optical　layer　in　a　portion　facing　a　boundary　line　between　adjacent　first　lenses　larger　than　a　width　partitioning　the　optical　layer　in　portions　facing　a　boundary　line　between　adjacent　second　lenses　and　a　boundary　line　between　adjacent　first　lens　and　second　lens. (2) The　photodetection　element　according　to　(1),　wherein the　optical　layer　includes a　plurality　of　types　of　color　filters　that　transmits　different　colors　of　light,　and the　optical　waveguide　portion　has a　width　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　a　same　color　different　from　a　width　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　different　colors. (3) The　photodetection　element　according　to　(2),　wherein the　optical　waveguide　portion　has the　width　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　same　color　larger　than　the　width　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　different　colors. (4) The　photodetection　element　according　to　any　one　of　(1)　to　(3),　wherein the　optical　waveguide　portion　includes an　absorption　portion　that　absorbs　light. (5) The　photodetection　element　according　to　any　one　of　(1)　to　(4),　wherein the　optical　waveguide　portion　has a　tapered　shape　in　which　the　width　increases　from　a　lens　side　toward　a　light-receiving　layer　side. (6) The　photodetection　element　according　to　any　one　of　(1)　to　(5),　wherein the　optical　waveguide　portion　provided　in　a　central　portion　of　the　optical　layer　in　plan　view　is　provided　at　a　position　facing　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and the　optical　waveguide　portion　provided　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　plan　view　is　provided　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions. (7) The　photodetection　element　according　to　any　one　of　(1)　to　(6),　wherein the　optical　waveguide　portion　provided　on　an　outer　side　of　a　central　portion　of　the　optical　layer　in　plan　view　has　a　width　partitioning　the　optical　layer　larger　than　a　width　of　the　optical　waveguide　portion　provided　in　the　central　portion　of　the　optical　layer　in　plan　view　and　partitioning　the　optical　layer. (8) The　photodetection　element　according　to　any　one　of　(1)　to　(5),　including: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　the　first　lenses　provided　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　the　second　lens　provided　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　the　second　lens　provided　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters. (9) The　photodetection　element　according　to　any　one　of　(1)　to　(5),　including: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　the　first　lenses　provided　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　the　second　lens　provided　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　the　second　lens　provided　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters. (10) The　photodetection　element　according　to　any　one　of　(1)　to　(5),　including: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　the　first　lenses　provided　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　the　second　lens　provided　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　the　second　lens　provided　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters. (11) The　photodetection　element　according　to　any　one　of　(1)　to　(5),　including: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　the　first　lenses　provided　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　the　second　lens　provided　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　provided　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　the　second　lens　provided　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters. (12) The　photodetection　element　according　to　any　one　of　(8)　to　(11),　including: a　pixel　isolation　portion　that　is　provided　in　a　portion　of　a　boundary　portion　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　excluding　a　portion　where　boundary　portions　between　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　on　which　light　of　a　same　color　is　incident　intersect,　and　electrically　and　optically　isolates　the　photoelectric　conversion　portions. (13) The　photodetection　element　according　to　(12),　including: a　pixel　isolation　region　in　which　impurities　are　ion-implanted　into　a　region　where　the　pixel　isolation　portion　is　not　provided　within　the　boundary　portions　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　to　electrically　and　optically　isolate　the　photoelectric　conversion　portions. (14) A　photodetection　element　including: light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　provided　so　as　to　cover　the　light-receiving　layer;　and a　plurality　of　lenses　that　is　provided　on　a　side　opposite　to　the　light-receiving　layer　across　the　optical　layer,　wherein the　plurality　of　lenses　includes a　first　lens　provided　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　second　lens　provided　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, the　optical　layer　includes an　optical　waveguide　portion　partitioning　the　optical　layer　for　each　of　the　lenses　so　as　to　guide　light　incident　through　the　lenses　to　the　photoelectric　conversion　portions, the　optical　waveguide　portion　of　a　portion　facing　a　boundary　line　between　adjacent　first　lenses　is　stacked　on　the　light-receiving　layer　via　an　absorption　portion　that　absorbs　light,　and the　optical　waveguide　portions　of　a　portion　facing　a　boundary　line　between　adjacent　second　lenses　and　a　portion　facing　a　boundary　line　between　adjacent　first　lens　and　second　lens　are　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion. (15) The　photodetection　element　according　to　(14),　wherein the　optical　layer　includes a　plurality　of　types　of　color　filters　that　transmits　different　colors　of　light,　and the　optical　waveguide　portion　stacked　on　the　light-receiving　layer　via　the　absorption　portion　is　located　between　adjacent　color　filters　that　transmit　light　of　a　same　color. (16) The　photodetection　element　according　to　(14)　or　(15),　wherein the　optical　waveguide　portion　provided　in　a　central　portion　of　the　optical　layer　in　plan　view　is　provided　at　a　position　facing　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and the　optical　waveguide　portion　provided　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　plan　view　is　provided　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions. (17) The　photodetection　element　according　to　(16),　wherein the　optical　waveguide　portion　provided　on　an　outer　side　of　the　central　portion　is　provided　in　a　staircase　pattern　at　a　position　shifted　in　a　direction　of　the　central　portion　as　approaching　the　lens　from　a　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions. (18) The　photodetection　element　according　to　any　one　of　(14)　to　(17),　wherein the　optical　waveguide　portion　has a　width　partitioning　the　optical　layer　in　a　portion　facing　the　boundary　line　between　the　adjacent　first　lenses　larger　than　a　width　partitioning　the　optical　layer　in　portions　facing　the　boundary　line　between　the　adjacent　second　lenses　and　the　boundary　line　between　the　adjacent　first　lens　and　second　lens. (19) The　photodetection　element　according　to　(18),　wherein the　optical　waveguide　portion　has a　tapered　shape　in　which　the　width　increases　from　a　lens　side　toward　a　light-receiving　layer　side. (20) The　photodetection　element　according　to　any　one　of　(14)　to　(19),　wherein the　optical　waveguide　portion　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion　penetrates　the　optical　layer　in　a　thickness　direction,　and the　optical　waveguide　portion　stacked　on　the　light-receiving　layer　via　the　absorption　portion　extends　from　the　absorption　portion　to　a　middle　portion　in　the　thickness　direction　of　the　optical　layer. (21) A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　disposed　on　a　light　incident　side　of　the　light-receiving　layer;　and a　plurality　of　lenses　that　is　disposed　on　a　light　incident　side　of　the　optical　layer,　 wherein　the　plurality　of　lenses　includes: a　plurality　of　first　lenses　disposed　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　plurality　of　second　lenses　disposed　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses,　and wherein　a　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses. (22) The　photodetection　element　according　to　(21),　wherein　a　width　of　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　greater　than　a　width　of　the　portion　of　the　optical　waveguide　between　adjacent　second　lenses. (23) The　photodetection　element　according　to　(21)　or　(22),　wherein　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　includes　an　absorption　portion,　and　wherein　the　portion　of　the　optical　waveguide　between　adjacent　second　lenses　does　not　include　an　absorption　portion. (24) The　photodetection　element　according　to　any　one　of　(21)　to　(23),　wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion. (25) The　photodetection　element　according　to　any　one　of　(21),　(23),　or　(24),　wherein　a　width　of　a　portion　of　the　optical　waveguide　portion　between　adjacent　first　lenses　is　larger　than　a　width　of　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses,　and　 wherein　the　width　of　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　larger　than　a　width　of　a　portion　of　the　optical　waveguide　between　adjacent　first　and　second　lenses. (26) The　photodetection　element　according　to　any　of　(21)　to　(25),　 wherein　the　optical　layer　includes　a　plurality　of　different　types　of　color　filters,　wherein　the　different　types　of　color　filters　transmit　different　colors　of　light,　and wherein　a　width　of　a　portion　of　the　optical　waveguide　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　a　same　color　is　different　from　a　width　of　a　portion　of　the　optical　waveguide　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　different　colors. (27) The　photodetection　element　according　to　(26),　wherein　the　width　of　the　portion　of　the　optical　waveguide　portion　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　same　color　is　larger　than　the　width　of　the　portion　of　the　optical　waveguide　portion　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　different　colors. (28) The　photodetection　element　according　to　(21),　wherein　the　optical　waveguide　includes　an　absorption　portion　that　absorbs　light. (29) The　photodetection　element　according　to　(26),　wherein the　optical　waveguide　portion　has a　tapered　shape　in　which　the　width　of　the　optical　waveguide　portion　increases　from　a　lens　side　toward　a　light-receiving　layer　side. (30) The　photodetection　element　according　to　any　of　(21)　to　(29),　wherein the　optical　waveguide　portion　disposed　in　a　central　portion　of　the　optical　layer　in　a　plan　view　faces　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and the　optical　waveguide　portion　disposed　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　the　plan　view　is　disposed　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions. (31) The　photodetection　element　according　to　any　of　(21)　to　(30),　wherein the　optical　waveguide　portion　disposed　on　an　outer　side　of　a　central　portion　of　the　optical　layer　in　a　plan　view　has　a　width　partitioning　the　optical　layer　that　is　larger　than　a　width　of　the　optical　waveguide　portion　disposed　in　the　central　portion　of　the　optical　layer　in　the　plan　view　and　partitioning　the　optical　layer. (32) The　photodetection　element　according　to　any　of　(21)　to　(31),　further　comprising: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　four　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　two　of　the　second　lenses　,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　two　of　the　second　lenses　,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters. (33) The　photodetection　element　according　to　any　of　(21)　to　(31),　further　comprising: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　four　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　one　of　the　second　lenses　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　one　of　the　second　lenses　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters. (34) The　photodetection　element　according　to　any　of　(21)　to　(31),　further　comprising: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　16　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　eight　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　eight　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters. (35) The　photodetection　element　according　to　any　of　(21)　to　(31),　further　comprising: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　16　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　four　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　four　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters. (36) The　photodetection　element　according　to　(32),　further　comprising: a　pixel　isolation　portion　that　is　disposed　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　excluding　a　portion　between　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　on　which　light　of　a　same　color　is　incident　intersect,　and　electrically　and　optically　isolates　the　photoelectric　conversion　portions. (37) The　photodetection　element　according　to　(36),　further　comprising: a　pixel　isolation　region　in　which　impurities　are　ion-implanted　into　a　region　where　the　pixel　isolation　portion　is　not　disposed　within　the　boundary　portions　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　to　electrically　and　optically　isolate　the　photoelectric　conversion　portions. (38) The　photodetection　element　according　to　(28), wherein　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　stacked　on　the　light-receiving　layer　via　the　absorption　portion　that　absorbs　light,　and 　wherein　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses　and　a　portion　of　the　optical　waveguide　between　adjacent　first　and　second　lenses　are　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion. (39) The　photodetection　element　according　to　(38),　wherein　the　optical　layer　includes　a　plurality　of　types　of　color　filters　that　transmits　different　colors　of　light,　and wherein　the　portion　of　the　optical　waveguide　portion　stacked　on　the　light-receiving　layer　via　the　absorption　portion　is　located　between　adjacent　color　filters　that　transmit　light　of　a　same　color. (40) The　photodetection　element　according　to　(38),　wherein　a　portion　of　the　optical　waveguide　disposed　in　a　central　portion　of　the　optical　layer　in　a　plan　view　is　disposed　at　a　position　facing　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and wherein　the　optical　waveguide　portion　disposed　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　the　plan　view　is　disposed　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions. (41) The　photodetection　element　according　to　(40),　wherein　the　portion　of　the　optical　waveguide　disposed　on　an　outer　side　of　the　central　portion　is　disposed　in　a　staircase　pattern　at　a　position　shifted　in　a　direction　of　the　central　portion　as　approaching　the　lens　from　a　position　facing　adjacent　photoelectric　conversion　portions. (42) The　photodetection　element　according　to　(38),　wherein　the　optical　waveguide　has　a　width　partitioning　the　optical　layer　in　a　portion　adjacent　first　lenses　that　is　larger　than　a　width　partitioning　the　optical　layer　in　portions　facing　adjacent　second　lenses　and　between　the　adjacent　first　lens　and　second　lens. (43) The　photodetection　element　according　to　(32),　wherein　the　optical　waveguide　has　a　tapered　shape　in　which　the　width　increases　from　a　lens　side　toward　a　light-receiving　layer　side. (44) The　photodetection　element　according　to　(38),　wherein　the　portion　of　the　optical　waveguide　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion　penetrates　the　optical　layer　in　a　thickness　direction,　and wherein　the　portion　of　the　optical　waveguide　stacked　on　the　light-receiving　layer　via　the　absorption　portion　extends　from　the　absorption　portion　to　a　middle　portion　in　the　thickness　direction　of　the　optical　layer. (45) A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　disposed　on　a　light　incident　side　of　the　light-receiving　layer;　and a　plurality　of　lenses　disposed　on　a　light　incident　side　of　the　optical　layer,　 wherein　the　plurality　of　lenses　includes: a　plurality　of　first　lenses　disposed　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　plurality　of　second　lenses　disposed　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses,　 wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion,　and wherein　a　portion　of　the　optical　waveguide　　between　adjacent　first　lenses　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses. (46) A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　disposed　on　a　light　incident　side　of　the　light-receiving　layer,　the　optical　layer　including: an　optical　waveguide;　and a　plurality　of　color　filters;　and a　plurality　of　lenses　that　is　disposed　on　a　light　incident　side　of　the　optical　layer,　including: a　plurality　of　first　lenses,　wherein　each　first　lens　in　the　plurality　of　first　lenses　is　disposed　opposite　to　one　of　the　photoelectric　conversion　portions;　and a　plurality　of　second　lenses,　wherein　each　second　lens　in　the　plurality　of　second　lenses　is　disposed　opposite　to　a　plurality　of　adjacent　ones　of　the　photoelectric　conversion　portions, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses　and　each　of　the　color　filters,　 wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion,　and wherein　a　portion　of　the　optical　waveguide　　between　adjacent　color　filters　of　a　first　color　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　color　filters　of　the　first　color　and　a　second　color.

[0182] 1,　1A,　1B,　1C,　1D,　1E,　1F,　1G,　1H,　1J,　1K,　1L,　1M,　1N,　1P,　1Q,　1R,　1S,　1T,　1U,　1V　Photodetection　element 4　Optical　waveguide　portion 4B,　4C,　4G,　4M,　4R,　4Y　Color　filter 20　Light-receiving　layer 21　Photoelectric　conversion　portion 22　Pixel　isolation　portion 23　Fixed　charge　layer 24　Protective　film 25　Pixel　isolation　region 26　Electrode 31　First　lens 32　Second　lens 33　Light-collecting　element 34　Meta-lens 40　Optical　layer 41　Protective　film 42　Wide　portion 45　Absorption　portion 46　Covering　portion 51　Etching　stopper　layer

Claims

1. A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　disposed　on　a　light　incident　side　of　the　light-receiving　layer;　and a　plurality　of　lenses　that　is　disposed　on　a　light　incident　side　of　the　optical　layer,　 wherein　the　plurality　of　lenses　includes: a　plurality　of　first　lenses　disposed　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　plurality　of　second　lenses　disposed　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses,　and wherein　a　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses.

2. The　photodetection　element　according　to　claim　1,　wherein　a　width　of　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　greater　than　a　width　of　the　portion　of　the　optical　waveguide　between　adjacent　second　lenses.

3. The　photodetection　element　according　to　claim　1,　wherein　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　includes　an　absorption　portion,　and　wherein　the　portion　of　the　optical　waveguide　between　adjacent　second　lenses　does　not　include　an　absorption　portion.

4. The　photodetection　element　according　to　claim　1,　wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion.

5. The　photodetection　element　according　to　claim　1,　wherein　a　width　of　a　portion　of　the　optical　waveguide　portion　between　adjacent　first　lenses　is　larger　than　a　width　of　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses,　and　 wherein　the　width　of　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　larger　than　a　width　of　a　portion　of　the　optical　waveguide　between　adjacent　first　and　second　lenses.

6. The　photodetection　element　according　to　claim　1,　 wherein　the　optical　layer　includes　a　plurality　of　different　types　of　color　filters,　wherein　the　different　types　of　color　filters　transmit　different　colors　of　light,　and wherein　a　width　of　a　portion　of　the　optical　waveguide　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　a　same　color　is　different　from　a　width　of　a　portion　of　the　optical　waveguide　partitioning　the　optical　layer　between　adjacent　color　filters　that　transmit　light　of　different　colors.

7. The　photodetection　element　according　to　claim　6,　wherein　the　width　of　the　portion　of　the　optical　waveguide　portion　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　same　color　is　larger　than　the　width　of　the　portion　of　the　optical　waveguide　portion　partitioning　the　optical　layer　between　the　adjacent　color　filters　that　transmit　light　of　the　different　colors.

8. The　photodetection　element　according　to　claim　1,　wherein　the　optical　waveguide　includes　an　absorption　portion　that　absorbs　light.

9. The　photodetection　element　according　to　claim　6,　wherein the　optical　waveguide　portion　has a　tapered　shape　in　which　the　width　of　the　optical　waveguide　portion　increases　from　a　lens　side　toward　a　light-receiving　layer　side.

10. The　photodetection　element　according　to　claim　1,　wherein the　optical　waveguide　portion　disposed　in　a　central　portion　of　the　optical　layer　in　a　plan　view　faces　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and the　optical　waveguide　portion　disposed　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　the　plan　view　is　disposed　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions.

11. The　photodetection　element　according　to　claim　1,　wherein the　optical　waveguide　portion　disposed　on　an　outer　side　of　a　central　portion　of　the　optical　layer　in　a　plan　view　has　a　width　partitioning　the　optical　layer　that　is　larger　than　a　width　of　the　optical　waveguide　portion　disposed　in　the　central　portion　of　the　optical　layer　in　the　plan　view　and　partitioning　the　optical　layer.

12. The　photodetection　element　according　to　claim　1,　further　comprising: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　four　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　two　of　the　second　lenses　,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　two　of　the　second　lenses　,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters.

13. The　photodetection　element　according　to　claim　1,　further　comprising: a　green　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　green　light,　and　four　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　red　light,　and　one　of　the　second　lenses　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　four　photoelectric　conversion　portions　and　transmitting　blue　light,　and　one　of　the　second　lenses　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters.

14. The　photodetection　element　according　to　claim　1,　further　comprising: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　16　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　eight　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　eight　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　two　adjacent　photoelectric　conversion　portions　across　the　color　filters.

15. The　photodetection　element　according　to　claim　1,　further　comprising: a　green　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　green　light,　and　16　of　the　first　lenses　disposed　on　a　side　opposite　to　the　respective　photoelectric　conversion　portions　across　the　color　filters; a　red　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　red　light,　and　four　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters;　and a　blue　pixel　that　includes　16　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　color　filters　disposed　at　positions　facing　the　16　photoelectric　conversion　portions　and　transmitting　blue　light,　and　four　of　the　second　lenses,　wherein　each　of　the　second　lenses　is　disposed　on　a　side　opposite　to　four　adjacent　photoelectric　conversion　portions　across　the　color　filters.

16. The　photodetection　element　according　to　claim　12,　further　comprising: a　pixel　isolation　portion　that　is　disposed　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix,　excluding　a　portion　between　four　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　on　which　light　of　a　same　color　is　incident　intersect,　and　electrically　and　optically　isolates　the　photoelectric　conversion　portions.

17. The　photodetection　element　according　to　claim　16,　further　comprising: a　pixel　isolation　region　in　which　impurities　are　ion-implanted　into　a　region　where　the　pixel　isolation　portion　is　not　disposed　within　the　boundary　portions　between　a　plurality　of　the　photoelectric　conversion　portions　adjacent　to　each　other　in　a　matrix　to　electrically　and　optically　isolate　the　photoelectric　conversion　portions.

18. The　photodetection　element　according　to　claim　8, wherein　the　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　stacked　on　the　light-receiving　layer　via　the　absorption　portion　that　absorbs　light,　and 　wherein　a　portion　of　the　optical　waveguide　　between　adjacent　second　lenses　and　a　portion　of　the　optical　waveguide　between　adjacent　first　and　second　lenses　are　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion.

19. The　photodetection　element　according　to　claim　18,　wherein　the　optical　layer　includes　a　plurality　of　types　of　color　filters　that　transmits　different　colors　of　light,　and wherein　the　portion　of　the　optical　waveguide　portion　stacked　on　the　light-receiving　layer　via　the　absorption　portion　is　located　between　adjacent　color　filters　that　transmit　light　of　a　same　color.

20. The　photodetection　element　according　to　claim　18,　wherein　a　portion　of　the　optical　waveguide　disposed　in　a　central　portion　of　the　optical　layer　in　a　plan　view　is　disposed　at　a　position　facing　a　boundary　line　between　adjacent　photoelectric　conversion　portions,　and wherein　the　optical　waveguide　portion　disposed　on　an　outer　side　of　the　central　portion　of　the　optical　layer　in　the　plan　view　is　disposed　at　a　position　shifted　in　a　direction　of　the　central　portion　from　the　position　facing　the　boundary　line　between　the　adjacent　photoelectric　conversion　portions.

21. The　photodetection　element　according　to　claim　20,　wherein　the　portion　of　the　optical　waveguide　disposed　on　an　outer　side　of　the　central　portion　is　disposed　in　a　staircase　pattern　at　a　position　shifted　in　a　direction　of　the　central　portion　as　approaching　the　lens　from　a　position　facing　adjacent　photoelectric　conversion　portions.

22. The　photodetection　element　according　to　claim　18,　wherein　the　optical　waveguide　has　a　width　partitioning　the　optical　layer　in　a　portion　adjacent　first　lenses　that　is　larger　than　a　width　partitioning　the　optical　layer　in　portions　facing　adjacent　second　lenses　and　between　the　adjacent　first　lens　and　second　lens.

23. The　photodetection　element　according　to　claim　22,　wherein　the　optical　waveguide　has　a　tapered　shape　in　which　the　width　increases　from　a　lens　side　toward　a　light-receiving　layer　side.

24. The　photodetection　element　according　to　claim　18,　wherein　the　portion　of　the　optical　waveguide　stacked　on　the　light-receiving　layer　without　interposing　the　absorption　portion　penetrates　the　optical　layer　in　a　thickness　direction,　and wherein　the　portion　of　the　optical　waveguide　stacked　on　the　light-receiving　layer　via　the　absorption　portion　extends　from　the　absorption　portion　to　a　middle　portion　in　the　thickness　direction　of　the　optical　layer.

25. A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　disposed　on　a　light　incident　side　of　the　light-receiving　layer;　and a　plurality　of　lenses　disposed　on　a　light　incident　side　of　the　optical　layer,　 wherein　the　plurality　of　lenses　includes: a　plurality　of　first　lenses　disposed　on　a　side　opposite　to　one　photoelectric　conversion　portion　across　the　optical　layer,　and a　plurality　of　second　lenses　disposed　on　a　side　opposite　to　a　plurality　of　adjacent　photoelectric　conversion　portions　across　the　optical　layer, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses,　 wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion,　and wherein　a　portion　of　the　optical　waveguide　between　adjacent　first　lenses　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　second　lenses.

26. A　photodetection　element,　comprising: a　light-receiving　layer　that　includes　a　plurality　of　photoelectric　conversion　portions　disposed　in　a　matrix; an　optical　layer　that　is　disposed　on　a　light　incident　side　of　the　light-receiving　layer,　the　optical　layer　including: an　optical　waveguide;　and a　plurality　of　color　filters;　and a　plurality　of　lenses　that　is　disposed　on　a　light　incident　side　of　the　optical　layer,　including: a　plurality　of　first　lenses,　wherein　each　first　lens　in　the　plurality　of　first　lenses　is　disposed　opposite　to　one　of　the　photoelectric　conversion　portions;　and a　plurality　of　second　lenses,　wherein　each　second　lens　in　the　plurality　of　second　lenses　is　disposed　opposite　to　a　plurality　of　adjacent　ones　of　the　photoelectric　conversion　portions, wherein　the　optical　layer　includes　an　optical　waveguide　partitioning　the　optical　layer　for　each　of　the　lenses　and　each　of　the　color　filters,　 wherein　light　passing　through　the　lenses　that　is　incident　on　the　optical　waveguide　portion　is　at　least　one　of　guided　to　at　least　one　of　the　photoelectric　conversion　portions　and　absorbed　by　the　optical　waveguide　portion,　and wherein　a　portion　of　the　optical　waveguide　between　adjacent　color　filters　of　a　first　color　is　different　than　a　portion　of　the　optical　waveguide　between　adjacent　color　filters　of　the　first　color　and　a　second　color.

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