Batch-type substrate processing apparatus
Patent Information
- Application Number
- PCT/KR2026/001002
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-03-12
- Filing Date
- 2026-01-16
- Publication Date
- 2026-09-17
Smart Images
Figure KR2026001002_17092026_PF_FP_ABST
Abstract
Description
Batch-type substrate processing device
[0001] The present invention relates to a batch-type substrate processing apparatus, and more specifically, to a batch-type substrate processing apparatus with improved exhaust performance.
[0002] Generally, a substrate processing device is a device that places a substrate to be processed within a processing space and then deposits reaction particles contained in the process gas injected into the processing space onto the substrate using methods such as Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD). There are single-wafer type devices capable of performing a processing process on a single substrate, and batch type devices capable of performing a processing process on multiple substrates simultaneously.
[0003] A batch-type substrate processing device performs a processing process by accommodating multiple substrates in multiple stages within a vertical process tube, and the exhaust performance is determined by the size of the exhaust port.
[0004] While exhaust performance can be improved by increasing the diameter of the exhaust port, a structure in which the diameter of the exhaust port is simply increased also increases the overall height of the batch substrate processing device. Therefore, there is a need for a technology that can improve the exhaust performance of the batch substrate processing device while maintaining the height of the standardized and / or standardized batch substrate processing device.
[0005] (Patent Document 1) Korean Registered Patent No. 10-2079017
[0006] The present invention provides a batch-type substrate processing device in which the opening area of the exhaust port is widened to improve exhaust performance.
[0007] A batch-type substrate processing device according to one embodiment of the present invention comprises: a process tube extending in the vertical direction and providing a processing space capable of accommodating a plurality of substrates in multiple stages; a flange portion provided at the lower end of the process tube and having a hollow portion communicating with the processing space; and an exhaust port assembly provided on one side of the flange portion and communicating with the hollow portion to exhaust the inside of the processing space; wherein the exhaust port assembly may include: an inlet line portion extending outward from one side of the flange portion and having an inlet port communicating with the hollow portion; and an exhaust pipe adapter having one end connected to the inlet line portion and the other end having an outlet port having a shape different from the inlet port.
[0008] The above inlet may have a shape having a short axis in the vertical direction and a long axis in the horizontal direction.
[0009] The above-mentioned outlet is circular, the short axis of the above-mentioned inlet has a width smaller than the diameter of the above-mentioned outlet, and the long axis of the above-mentioned inlet may have a width larger than the diameter of the above-mentioned outlet.
[0010] The exhaust pipe adapter may include: a one end connected to the inlet line; a other end provided on the opposite side of the one end, where the discharge port is formed; and a deformation portion provided between the one end and the other end, in which the internal cross-section changes from the shape of the inlet port to a circular shape as it goes from the one end to the other end.
[0011] The internal cross-section of the above-mentioned deformation part can change into a circular shape as the short axis extends in the vertical direction and the long axis decreases in the central direction from both sides.
[0012] The above inlet may be rectangular.
[0013] The height of the center of the above-mentioned outlet may be the same as the height of the center of the above-mentioned inlet.
[0014] The above outlet may have a diameter of 110 to 310 mm.
[0015] The cross-sectional area of the above inlet may be 90 to 110% of the cross-sectional area of the above outlet.
[0016] The above flange portion and the above exhaust port assembly may be made of a metal material.
[0017] It may further include a heater provided around the circumference of the process tube to heat the process tube; a heater support plate located above the flange portion and supporting the heater; and an exhaust pipe connected to the exhaust pipe adapter and communicating with the discharge port.
[0018] The above-mentioned inlet line portion may protrude outwardly from the heater support plate in the direction of the flange portion.
[0019] The process tube comprises an inner tube forming the processing space; and an outer tube receiving the inner tube, wherein the inner tube includes an exhaust slit communicating with the internal space of the outer tube, and the inlet may be at least partially facing the exhaust slit.
[0020] In a batch-type substrate processing device according to an embodiment of the present invention, the inlet and outlet of the exhaust port assembly have different shapes, so that the outlet has a large circular diameter and the inlet has an opening area similar to that of the outlet, thereby improving the exhaust performance of the batch-type substrate processing device through the exhaust port assembly. In this case, the inlet may be formed with a shape having a short axis in the vertical direction and a long axis in the horizontal direction, thereby maximizing the opening area of the exhaust port assembly without increasing the height of the batch-type substrate processing device.
[0021] In other words, since batch-type substrate processing devices are standardized and / or standardized, there was difficulty in widening the opening area of the exhaust port, including the diameter of the discharge port, due to the limitation of equipment height. However, by using an exhaust port assembly to make the shape of the inlet port different from a circular discharge port, having a short axis in the vertical direction and a long axis in the horizontal direction, the diameter of the discharge port can be increased without changing the height of the batch-type substrate processing device, and the opening area of the exhaust port assembly can be widened.
[0022] Furthermore, the exhaust port assembly can possess high rigidity by being made of a metal material, similar to the flange section. Consequently, even if a large-diameter outlet is positioned apart from the flange section, no breakage (or damage) occurs between the flange section and the exhaust port assembly, and / or to the exhaust port assembly itself, thereby improving stability (or safety factor). Additionally, unlike cases where the exhaust port is formed in the process tube using brittle quartz, the shape of the inlet can be formed as a rectangle. When the inlet is formed as a rectangle, efficient area utilization is possible even if the height (or vertical width) of the inlet is limited, allowing the width (or horizontal width) of the inlet to be minimized. As a result, the flow spreading vertically and gathering horizontally at the deformation section of the exhaust pipe adapter can be balanced, thereby forming a stable exhaust flow.
[0023] In addition, the exhaust port assembly is connected to the flange portion so that the height of the center of the outlet and the height of the center of the inlet can be the same, and accordingly, the straightness of the exhaust flow to the exhaust pipe can be improved and effective exhaust can be achieved.
[0024] Meanwhile, the exhaust port assembly can protrude outwardly from the heater support plate so that the exhaust port is positioned beyond the heater support plate, and accordingly, the opening area of the exhaust port assembly is widened, thereby improving the exhaust performance of the batch-type substrate processing device while maintaining a height within the standard height of the batch-type substrate processing device.
[0025] FIG. 1 is a schematic cross-sectional view showing a batch-type substrate processing apparatus according to an embodiment of the present invention.
[0026] FIG. 2 is a schematic perspective view showing a process tube, a flange portion, and an exhaust port assembly according to an embodiment of the present invention.
[0027] FIG. 3 is a conceptual diagram illustrating the positional relationship between an exhaust port assembly and a heater support plate according to an embodiment of the present invention.
[0028] FIG. 4 is a schematic cross-sectional view showing an exhaust port assembly according to another embodiment of the present invention.
[0029] Embodiments of the present invention will be described in more detail below with reference to the attached drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms; these embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. In the description, the same reference numerals are assigned to identical components, and the drawings may be partially exaggerated in size to accurately describe the embodiments of the present invention, and the same reference numerals in the drawings refer to the same elements.
[0030]
[0031] FIG. 1 is a schematic cross-sectional view showing a batch-type substrate processing apparatus according to an embodiment of the present invention.
[0032] Referring to FIG. 1, a batch-type substrate processing device (100) according to one embodiment of the present invention may include: a process tube (110) that extends in an upward and downward direction and provides a processing space capable of accommodating a plurality of substrates (10) in multiple stages; a flange portion (120) provided at the lower end of the process tube (110) and having a hollow portion communicating with the processing space; and an exhaust port assembly (130) provided on one side of the flange portion (120) and communicating with the hollow portion to exhaust the inside of the processing space.
[0033] The process tube (110) may be extended in the vertical direction and may provide a processing space capable of accommodating multiple substrates (10) in multiple stages. For example, the process tube (110) may be formed in a cylindrical shape with the top closed and the bottom open, using a heat-resistant material such as quartz or ceramic, and may provide the processing space in which multiple substrates (10) are accommodated and processed. Here, the processing space of the process tube (110) may be a space in which a substrate boat (50) in which multiple substrates (10) are stacked in the extension direction of the process tube (110) (i.e., the vertical direction) is accommodated, and an actual processing process (e.g., a deposition process) is performed.
[0034] At this time, the substrate boat (50) is configured to support the substrate (10), and may be formed so that a plurality of substrates (10) are loaded in the extension direction of the process tube (110), and may also form a plurality of unit processing spaces in which a plurality of substrates (10) are each processed individually.
[0035] Meanwhile, the process tube (110) may consist of a single tube or multiple tubes. For example, the process tube (110) may include an inner tube (111) that forms the processing space and an outer tube (112) that accommodates the inner tube (111). The inner tube (111) may form the processing space, and the processing space may be provided within the inner tube (111). The outer tube (112) may have an inner space, and the inner tube (111) may be accommodated in the inner space. At this time, the inner tube (111) may include an exhaust slit (111a) that communicates with the inner space of the outer tube (112). The exhaust slit (111a) can be connected to the internal space of the outer tube (112) and the (residual) gas in the processing space can be exhausted from the processing space to the space between the inner tube (111) and the outer tube (112) (or the internal space of the outer tube) by forming the exhaust slit (111a) on (one) side wall of the inner tube (111).
[0036] The flange portion (120) may be provided at the lower end of the process tube (110) and may have a hollow portion communicating with the processing space. Here, the flange portion (120) may support the process tube (110) and may have a hollow ring shape, and the process tube (110) may be supported by the flange portion (120) so that the hollow portion of the flange portion (120) communicates with the processing space of the process tube (110). For example, the outer tube (112) may be supported (at the lower end) by the upper end (part) of the flange portion (120), and the internal space of the outer tube (112) may communicate with the hollow portion of the flange portion (120). And the inner tube (111) is inserted (or accommodated) into the inner space of the outer tube (112) so that its lower end can extend to the hollow portion of the flange portion (120) and can be supported by an (inner) protrusion that protrudes inwardly from the lower end of the flange portion (120). At this time, the processing space can be in communication with the hollow portion through the exhaust slit (111a) of the inner tube (111).
[0037] Meanwhile, the space between the process tube (110) and the flange portion (120) may be sealed by an O-ring, etc., and the space between the outer tube (112) and the flange portion (120) and / or the space between the inner tube (111) and the flange portion (120) may be sealed (or sealed). Additionally, a sealing member (51), such as an O-ring, may be provided between the lower portion (or substrate boat support plate) of the substrate boat (50) and the flange portion (120), and as the substrate boat (50) is raised and loaded into the processing space, the sealing member (51) may be interposed (or compressed) between the lower portion of the substrate boat (50) and the flange portion (120), thereby sealing the processing space.
[0038] An exhaust port assembly (130) may be provided (or connected) to one side of the flange portion (120) and may communicate with the hollow portion to exhaust the processing space. For example, the exhaust port assembly (130) may be formed through the (one) side wall of the flange portion (120) and may have an exhaust passage inside. Accordingly, (residual) gas within the processing space may be discharged to the outside of the process tube (110) through the exhaust port assembly (130) via the hollow portion of the flange portion (120).
[0039] FIG. 2 is a schematic perspective view showing a process tube, a flange portion, and an exhaust port assembly according to an embodiment of the present invention.
[0040] Referring to FIGS. 1 and 2, the exhaust port assembly (130) may include an inlet line portion (131) that extends outward from one side of the flange portion (120) and has an inlet port (130a) communicating with the hollow portion; and an exhaust pipe adapter (132) that has one end connected to the inlet line portion (131) and has an outlet port (130b) having a shape different from the inlet port (130a) at the other end. The inlet line portion (131) may extend outward (radially) from one side of the flange portion (120) (or in the radial direction of the flange portion), and may have an inlet port (130a) communicating with the hollow portion at one end (or one side) in contact with the flange portion (120), and may have a first exhaust passage formed inside. At this time, the inlet line section (131) may have an outlet on the opposite side (the other end) of the inlet port (130a) that can exit from the first exhaust passage to the exhaust pipe adapter (132), and the other end (or other side) of the inlet line section (131) may be connected to the exhaust pipe adapter (132).
[0041] For example, the inlet line section (131) may extend radially from the flange section (120), and an inlet port (130a) may be formed at one end of the inlet line section (131), and the other end of the inlet line section (131) may be connected to an exhaust pipe adapter (132). In addition, the inlet line section (131) may have a first exhaust passage formed therein having an internal cross-section identical to the shape of the inlet port (130a), and may extend straight radially from the flange section (120) while maintaining the shape of the inlet port (130a). At this time, the inlet line section (131) can be extended to such an extent that the exhaust pipe adapter (132) does not interfere with other components of the batch-type substrate processing device (100) (e.g., heater support plate, flange section, lower chamber, etc.), and the other end of the inlet line section (131) can be spaced apart from the flange section (120) in the radial direction.
[0042] Here, the inlet (130a) may be located at one end of the inlet line section (131), may be provided in contact with the flange section (120), and may be in communication (or connected) with the hollow section of the flange section (120). Through this, (residual) gas within the process tube (110) may be introduced from the processing space of the process tube (110) through the hollow section and into the exhaust passage of the exhaust port assembly (130) through the inlet (130a).
[0043] At this time, the inlet (130a) may be provided facing at least partially to the exhaust slit (111a) of the inner tube (111) and may be in communication with the exhaust slit (111a). By having the inlet (130a) in communication at least partially to the exhaust slit (111a), smooth exhaust can be achieved and exhaust performance can be improved. For example, the lower end (part) of the inner tube (111) may be extended to the hollow portion of the flange portion (120), so that the exhaust slit (111a) may also be formed extending to the hollow portion. Accordingly, the exhaust slit (111a) may face the inlet (130a) formed on one side of the flange portion (120), and the inlet (130a) may be in direct communication with the processing space, thereby enabling smooth exhaust through the exhaust port assembly (130).
[0044] Meanwhile, the lower portion of the inner tube (111) inserted into the hollow portion may be the receiving area of the pedestal of the substrate boat (50). If exhaust is not properly performed in the receiving area of the pedestal, the (residual) gas may be adsorbed onto the surface of the pedestal or the inner wall of the inner tube (111) of the receiving area of the pedestal and act as a particle during the process. However, by forming an exhaust slit (111a) facing the inlet (130a) in the receiving area of the pedestal, the (residual) gas can be effectively exhausted without stagnating in the receiving area of the pedestal.
[0045] And the exhaust pipe adapter (132) may have one end (or one side) connected to the inlet line section (131), and may have an outlet (130b) having a shape different from the inlet (130a) at the other end (or the other side) facing the one end (or the side opposite the one end). Additionally, the exhaust pipe adapter (132) may have a communication port at the one end in contact with the inlet line section (131) that communicates with the outlet of the inlet line section (131), and may have a second exhaust passage formed inside.
[0046] Here, the outlet (130b) may be provided at the other end of the exhaust pipe adapter (132) spaced apart from the flange portion (120) and the inlet line portion (131), and may have a shape different from that of the inlet (130a). At this time, the size (or opening area) of the outlet (130b) may be the same as or different from the size (or opening area) of the inlet (130a), but may be similar to or nearly the same as the size of the inlet (130a) in order to effectively exhaust the (residual) gas from the processing space of the process tube (110).
[0047] For example, the outlet (130b) may be circular, and the inlet (130a) may have a shape having a short axis in the vertical direction and a long axis in the horizontal direction. The outlet (130b) may be circular for effective exhaust and connection with the exhaust pipe (150), and may have a large diameter for smooth exhaust.
[0048] And the inlet (130a) may have a shape having a short axis in the vertical direction and a long axis in the horizontal direction, and may be rectangular, elliptical, etc., and it is sufficient that the width (or height) in the vertical direction is narrow and the width (or width) in the horizontal direction is wide to have a wide opening area similar to the outlet (130b).
[0049] At this time, the short axis of the inlet (130a) may have a width smaller than the diameter of the outlet (130b), and the long axis of the inlet (130a) may have a width larger than the diameter of the outlet (130b). For example, the width of the short axis of the inlet (130a) (or the vertical width) may be less than or equal to the diameter of a conventional exhaust port, thereby preventing the height of the batch-type substrate processing device (100) from increasing in order to secure the height (or vertical width) of the exhaust port assembly (130). Also, the width of the long axis of the inlet (130b) (or the horizontal width) may be larger than the diameter of a conventional exhaust port to improve exhaust performance.
[0050] The exhaust port (130b) may have a diameter larger than that of a conventional exhaust port, thereby improving exhaust performance. At this time, since the short axis of the inlet port (130a) has a width less than or equal to the diameter of a conventional exhaust port, the width of the short axis of the inlet port (130a) may be smaller than the diameter of the exhaust port (130b), and the width of the long axis of the inlet port (130a) may be larger than the diameter of the exhaust port (130b) so that the inlet port (130a) may have an opening area similar to that of the exhaust port (130b).
[0051] Accordingly, in the batch-type substrate processing device (100) according to the present invention, the inlet (130a) and the outlet (130b) of the exhaust port assembly (130) have different shapes, so that the outlet (130b) has a large circular diameter and the inlet (130a) has an opening area similar to that of the outlet (130b), and accordingly, the exhaust performance of the batch-type substrate processing device (100) through the exhaust port assembly (130) can be improved. In addition, by forming the inlet (130a) in a shape having a short axis in the vertical direction and a long axis in the horizontal direction, the opening area of the exhaust port assembly (130) can be maximized without increasing the height of the batch-type substrate processing device (100).
[0052] And the exhaust pipe adapter (132) may include: a one end (132a) connected to an inlet line section (131); a other end (132b) provided on the opposite side of the one end (132a) and having an outlet (130b) formed therein; and a deformation section (132c) provided between the one end (132a) and the other end (132b), wherein the internal cross-section changes from the shape of the inlet (130a) to a circular shape as it goes from the one end (132a) to the other end (132b). The one end (132a) may be connected to the inlet line section (131), and a communication port may be formed therein, and through the communication port, (residual) gas may be introduced from the outlet of the inlet line section (131) into the second exhaust passage. At this time, the first section (132a) may be extended in the direction of extension of the inflow line section (131), and the deformation section (132c) may begin immediately.
[0053] The other end (132b) may be provided on the opposite side of the first end (132a), and may have an outlet (130b) formed therein and may have an exhaust pipe (150) connected thereto, and may discharge (residual) gas through the outlet (130b) to the exhaust pipe (150). At this time, the other end (132b) may extend in the direction of extension of the inlet line (131), or it may be the place (or part) where the deformation section (132c) ends.
[0054] Meanwhile, the other end (132b) may be formed such that the diameter of the cross-section gradually increases as it moves toward the outlet (130b), as with the deformation part (132c), or the other end (132b) may be the deformation part (132c). In this way, if the other end (132b) is formed such that the diameter gradually increases as it moves toward the exhaust pipe (150) from the deformation part (132c), or if the other end (132b) is the deformation part (132c), the pressure at which gas is discharged from the outlet (130b) to the exhaust pipe (150) gradually increases, thereby increasing the efficiency of gas discharge.
[0055] The deformation section (132c) may extend from the first section (132a) in the direction of extension of the inflow line section (131) and may be provided between the first section (132a) and the other section (132b). At this time, one end (or one side) of the deformation section (132c) may be in contact with the first section (132a), and the other end (or other side) of the deformation section (132c) may be in contact with the other section (132b). Here, so that the other end of the deformation section (132c) can be connected to the other section (132b) where the discharge port (130b) is formed, the internal cross-section of the deformation section (132c) may change from the shape of the inflow port (130a) to a circular shape identical to the discharge port (130b) as it moves (or extends) from the first section (132a) to the other section (132b).
[0056] For example, one end of the deformation part (132c) may have an internal cross-section identical to the shape of the inlet (130a) so that it can be connected to the end part (132a) connected to the inlet line part (131), and the other end of the deformation part (132c) may have a circular internal cross-section identical to the shape of the outlet (130b) so that it can be connected to the other end part (132b) where the outlet (130b) is formed. In addition, the second exhaust passage may be formed inside the deformation part (132c), in which the internal cross-section changes from the shape identical to the inlet (130a) to a circular shape (i.e., the shape identical to the outlet) as it goes from one end (or the said end part) to the other end (or the said other end part) of the deformation part (132c). At this time, the internal cross-section of the deformation part (132c) can be such that as it moves from one end of the deformation part (132c) to the other, the width of the short axis (or the short axis of the inlet) gradually increases and becomes equal to the diameter of the outlet (130b), and the width of the long axis (or the long axis of the inlet) gradually decreases and becomes equal to the diameter of the outlet (130b). Meanwhile, the exhaust pipe adapter (132) may be configured as a reducer including the deformation part (132c).
[0057] Not only can the discharge port (130b) be sufficiently separated from the flange portion (120) through the inlet line portion (131), but the exhaust pipe adapter (132) can also be separated from the flange portion (120), allowing the height (or vertical width) of the second exhaust passage to gradually increase through the deformation portion (132c). Accordingly, even if the height of the batch-type substrate processing device (100) is maintained (as in the conventional method), the diameter of the discharge port (130b) can be increased (compared to the conventional method) without interfering with other components of the batch-type substrate processing device (100). That is, the diameter of the discharge port (130b) can be increased without changing the height of the batch-type substrate processing device (100) (compared to the conventional method), and the exhaust performance can be improved (compared to the conventional method).
[0058] Additionally, a space can be secured through the inlet line section (131) so as to be separated from the flange section (120) without interfering with other components of the batch-type substrate processing device (100), and a circular outlet (130b) having a large diameter can be obtained by making the shape of the inlet (130a) and the shape of the outlet (130b) different through the deformation section (132c) so that exhaust performance can be improved (than conventional).
[0059] And the height of the center of the outlet (130b) may be the same as the height of the center of the inlet (130a). If the center of the outlet (130b) is located at a different height from the center of the inlet (130a), the exhaust flow in the exhaust passage will be directed upward or downward, the straightness of the exhaust flow will be lost, and the (residual) gas will not be efficiently (or effectively) exhausted, so the effect of increasing the diameter of the outlet (130b) will not be significant.
[0060] However, if the height of the center of the outlet (130b) is made equal to the height of the center of the inlet (130a) so that the width of the shortening of the inlet (130a) increases in both the up and down directions (or both sides), the straightness of the exhaust flow to the exhaust pipe (150) can be improved, and effective exhaust can be achieved even if the shapes of the inlet (130a) and the outlet (130b) are different, as the center of the inlet (130a) and the center of the outlet (130b) coincide.
[0061] That is, the exhaust port assembly (130) is connected to the flange portion (120) so that the height of the center of the outlet (130b) and the height of the center of the inlet (130a) are the same, and accordingly, the straightness of the exhaust flow to the exhaust pipe (150) can be improved and effective exhaust can be achieved.
[0062] At this time, the internal cross-section of the deformation part (132c) can change into a circular shape as the short axis extends in the vertical direction and the long axis decreases from both sides toward the center. That is, the vertical width (or the width of the short axis) of the second exhaust passage of the deformation part (132c) can be increased symmetrically in both vertical directions, and the horizontal width (or the width of the long axis) of the second exhaust passage of the deformation part (132c) can be decreased from both sides toward the center, thereby allowing the other end of the deformation part (132c) to change into a circular shape identical to the discharge port (130b). At this time, the long axis of the inlet port (130a) and the horizontal diameter (or diameter) of the discharge port (130b) can be symmetrical with respect to the center, and the long axis of the inlet port (130a) can decrease toward the center from both sides toward the center.
[0063] In summary, nowadays, batch-type substrate processing devices (100) are standardized and / or standardized, and the height of the batch-type substrate processing device (100) is limited according to the standard height, and as a result, it was difficult to increase the opening area of the exhaust port, including the diameter of the discharge port (130b). However, the batch-type substrate processing device (100) according to the present invention can increase the diameter of the discharge port (130b) and increase the opening area of the exhaust port assembly (130) without changing the height of the batch-type substrate processing device (100) by making the shape of the inlet port (130a) different from the circular discharge port (130b) have a short axis in the vertical direction and a long axis in the horizontal direction.
[0064] Here, the flange portion (120) and the exhaust port assembly (130) may be made of a metal (or alloy) material, may be made of the same material, or may be made of a different material from the process tube (110). At this time, the flange portion (120) and the exhaust port assembly (130) may be formed as a single unit, or the exhaust port assembly (130) may be welded to the flange portion (120). If the exhaust port assembly (130) is made of quartz, just like the process tube (110), it may not only be prone to breakage but also difficult to weld at the angled corners (or vertices), so the inlet (130a) may not be formed in a rectangular shape, and the angled corners of the exhaust port assembly (130) may be vulnerable. In addition, the exhaust port assembly (130) is made of a material different from the metal flange portion (120), so the exhaust port assembly (130) cannot be welded to the flange portion (120), and the flange portion (120) and the exhaust port assembly (130) cannot be formed as a single unit.
[0065] However, since both the flange portion (120) and the exhaust port assembly (130) are made of metal material, the rigidity of the exhaust port assembly (130) can be high (or excellent), and the material (or material) of the flange portion (120) and the exhaust port assembly (130) can be the same (or similar), making welding easy and providing excellent stability (or safety factor).
[0066] For example, the inlet (130a) may be rectangular, may be a rectangular shape extending in the left-right direction, and the internal cross-section of the deformation part (132c) may be gradually changed from the shape of the inlet (130a) to the shape of the circular outlet (130b) in a loft manner. The flange part (120) may be made of a metal material and have high rigidity so that the angled part may not be weak, and the (internal) cross-section may be formed in a rectangular shape. Accordingly, the inlet (130a) may be rectangular in accordance with the (internal) cross-section of the flange part (120), and even if the inlet (130a) is formed in a rectangular shape, breakage (or damage) may not occur between the flange part (120) and the exhaust port assembly (130) and / or the exhaust port assembly (130) during the process.
[0067] When the shape of the inlet (130a) is formed as a rectangle, the area can be utilized efficiently even if the height (or vertical width) of the inlet (130a) is limited (or restricted), so the width (or horizontal width) of the inlet (130a) can be minimized. Accordingly, the flow spreading in the vertical direction and gathering in the horizontal direction at the deformation part (132c) of the exhaust pipe adapter (132) can be balanced as much as possible, thereby forming a stable exhaust flow.
[0068] Accordingly, the batch-type substrate processing device (100) according to the present invention may have high rigidity as the exhaust port assembly (130) is made of a metal material such as the flange portion (120). Accordingly, even if a large-diameter outlet (130b) is positioned spaced apart from the flange portion (120), no damage occurs between the flange portion (120) and the exhaust port assembly (130) and / or to the exhaust port assembly (130), and stability can be improved. Furthermore, unlike the case where the exhaust port is formed in the process tube (110) with brittle quartz, the shape of the inlet (130a) can be formed as a rectangle. When the shape of the inlet (130a) is formed as a rectangle, the area utilization can be efficient even if the height of the inlet (130a) is limited, so the width of the inlet (130a) can be minimized. Accordingly, the flow spreading in the vertical direction and gathering in the horizontal direction at the deformation part (132c) of the exhaust pipe adapter (132) can be balanced (to each other), so that a stable exhaust flow can be formed.
[0069] Here, the exhaust port (130b) may have a diameter of 110 to 310 mm. The exhaust port (130b) may have a diameter of 110 to 310 mm and may be connected (or communicated) with an exhaust pipe (150) of 125 to 300 A (or an inner diameter of about 125 to 300 mm), and the exhaust performance may be improved (compared to conventional). Through this, (residual) gas within a groove or hole with a large aspect ratio (H(Height) / W(Width)) on the substrate (10) and / or thin film can be effectively exhausted without leaving any behind, and accordingly, the step coverage of the deposited film (or thin film) can be improved and particles within the thin film can be reduced.
[0070] Conventionally, due to the structure of the batch-type substrate processing device (100), the inner diameter (or diameter) of the exhaust port was only about 100 mm, so it was necessary to use an exhaust pipe (150) of 100 A (or an inner diameter of about 100 mm), and there was a problem in that (residual) gas in a groove or hole with a large aspect ratio could not be effectively removed. As a result, various attempts were made to increase the inner diameter of the exhaust port, but conventionally, the only option was to increase the height of the batch-type substrate processing device (100). However, nowadays, as the batch-type substrate processing device (100) is standardized and / or standardized, a method is required to use an exhaust pipe (150) that is larger (for example, about 200 A) than 100 A while maintaining the height of the batch-type substrate processing device (100) that used the exhaust pipe (150) of 100 A.
[0071] For example, the outlet (130b) may have a diameter of 125 to 300 A (or an inner diameter of about 125 to 300 mm), may have a diameter of 150 to 250 mm, and may be connected to an exhaust pipe (150) of 200 A (or an inner diameter of about 200 mm).
[0072] The batch-type substrate processing device (100) according to the present invention has an inlet (130a) that has a shape different from a circular outlet (130b), having a short axis in the vertical direction and a long axis in the horizontal direction, and by sufficiently separating the outlet (130b) from the flange part (120) through an inlet line part (131) and / or an exhaust pipe adapter (132) to avoid interference, the outlet (130b) can have a diameter of 110 to 310 mm, and can be used by connecting an exhaust pipe (150) that is larger than 100 A (or conventional) such as an exhaust pipe (150) of 200 A.
[0073] At this time, the inlet (130a) and the outlet (130b) may have similar sizes even if their shapes are different, and the (internal) cross-sectional area (or size) of the inlet (130a) may be 90 to 110% of the (internal) cross-sectional area (or size) of the outlet (130b). If the cross-sectional area of the inlet (130a) is less than 90% of the cross-sectional area of the outlet (130b), the size of the inlet (130a) is (too) small compared to the size of the outlet (130b), so exhaust cannot be effectively performed, and the vacuum pressure (or exhaust pressure) by the vacuum pump acts strongly within the exhaust port assembly (130), causing damage between the flange portion (120) and the exhaust port assembly (130) and / or the exhaust port assembly (130).
[0074] On the other hand, if the cross-sectional area of the inlet (130a) exceeds 110% of the cross-sectional area of the outlet (130b), a bottleneck occurs at the outlet (130b), preventing smooth exhaust, and the pressure inside the exhaust port assembly (130) increases, which may cause the exhaust port assembly (130) and / or the connection between the exhaust port assembly (130) and the exhaust pipe (150) to break (or be damaged). Additionally, for a laminar flow of (process) gas, the width of the long axis of the inlet (130a) may be less than or equal to the diameter of the process tube (110), and if the cross-sectional area of the inlet (130a) exceeds 110% of the cross-sectional area of the outlet (130b), the width of the long axis of the inlet (130a) may exceed the diameter of the process tube (110).
[0075] However, in the batch-type substrate processing device (100) according to the present invention, the cross-sectional area of the inlet (130a) is 90 to 110% of the cross-sectional area of the outlet (130b), so the exhaust performance is improved and exhaust can be carried out smoothly and effectively, and the connection between the flange portion (120) and the exhaust port assembly (130), and the exhaust port assembly (130) and / or the exhaust port assembly (130) and the exhaust pipe (150) may be prevented or suppressed from being damaged (or broken).
[0076] Here, the width of the major axis of the inlet (130a) may be less than or equal to the diameter of the process tube (110), less than or equal to the diameter of the internal space of the outer tube (112) and the diameter of the flange portion (120), and for laminar flow of the (process) gas, it may be preferable for it to be smaller than the diameter of the internal space of the outer tube (112) and the diameter of the flange portion (120).
[0077] The batch-type substrate processing device (100) according to the present invention may further include: a heater (140) provided around the process tube (110) to heat the process tube (110); a heater support plate (145) located above the flange portion (120) and supporting the heater (140); and an exhaust pipe (150) connected to an exhaust pipe adapter (132) and communicating with an outlet (130b).
[0078] A heater (140) may be provided around the process tube (110), heat the process tube (110), and be supported on a heater support plate (145). For example, the heater (140) may heat the inside of the process tube (110) to heat a plurality of substrates (10), may surround the process tube (110), and may transfer thermal energy to raise the temperature inside the process tube (110) and heat a plurality of substrates (10).
[0079] A heater support plate (145) may be positioned above the flange portion (120) and the exhaust port assembly (130) and may support the heater (140) at the bottom of the heater portion (140). For example, the heater support plate (145) may have a through hole through which at least a portion of the process tube (110) passes, and may be provided along the circumference of the process tube (110) to support the heater (140) surrounding the process tube (110).
[0080] The exhaust pipe (150) can be connected to an exhaust pipe adapter (132) and communicate with an outlet (130b), and can be connected to a vacuum pump to discharge gas and residual material generated during the process to the outside. For example, the exhaust pipe (150) and the vacuum pump may have a large exhaust type structure, the exhaust pipe (150) may have an inner diameter (200 A) of about 200 mm, and the vacuum pump may have a capacity of about 10,000 liters (ℓ). This can increase the efficiency of gas circulation.
[0081] Meanwhile, the batch-type substrate processing device (100) of the present invention may further include a lower chamber (not shown) provided at the bottom of the process tube (110).
[0082] A lower chamber (not shown) may be provided at the bottom of a process tube (110) and may provide a space for loading a plurality of substrates (10) onto a substrate boat (50), and a plurality of substrates (10) may be loaded inside the lower chamber (not shown) and loaded in multiple layers onto the substrate boat (50). Then, the substrate boat (50) loaded with a plurality of substrates (10) in the lower chamber (not shown) may be lifted by a boat elevator to perform a substrate (10) processing process and accommodated in the processing space of the process tube (110). For example, the upper part of the lower chamber (not shown) may be open so that the substrate boat (50) can be lifted, and a passage for the substrates (10) to enter and exit may be formed on one side (in the front-rear direction) so that a plurality of substrates (10) can be loaded. Here, the lower chamber (not shown) may be connected to a transfer chamber (not shown) and may have a passage connected to the transfer chamber (not shown), through which a substrate (10) may be loaded from the transfer chamber (not shown) to the lower chamber (not shown). A gate valve (not shown) may be installed on the outside of the passage, and the passage may be opened and closed by the gate valve (not shown).
[0083] FIG. 3 is a conceptual diagram illustrating the positional relationship between an exhaust port assembly and a heater support plate according to an embodiment of the present invention.
[0084] Referring to FIG. 3, the inlet line portion (131) may protrude outward from the heater support plate (145) in the direction of the flange portion (120). The inlet line portion (131) may protrude outward from the heater support plate (145) in the (radial) direction of the flange portion (120), and the exhaust pipe adapter (132) having a deformation portion (132c) may be extended outward from the flange portion (120) so as to move away from the heater support plate (145), and the outlet (130b) may have a diameter of 110 to 310 mm, and may be used by connecting an exhaust pipe (150) larger than (conventional) 100 A, such as an exhaust pipe (150) of 200 A.
[0085] That is, a heater support plate (145) is arranged on the upper part of the exhaust port assembly (130) to support a heater (140) that heats the inside of the process tube (110) by surrounding the process tube (110). Since the inflow line portion (131) does not protrude beyond the heater support plate (145), there is no space to increase the vertical width of the exhaust pipe adapter (132) (of the second exhaust passage) upward (or in the upward direction). Therefore, in order to increase the vertical width of the exhaust pipe adapter (132) upward, the height of the flange portion (120) or the process tube (110) and the batch-type substrate processing device (100) must be increased (or enlarged) so that the heater (140) can cover the processing space of the process tube (110). However, in the batch-type substrate processing device (100) according to the present invention, the inlet line portion (131) is extended outwardly from the flange portion (120) and protrudes beyond the heater support plate (145), so that the exhaust pipe adapter (132) moves away from the heater support plate (145), and the internal cross-section of the deformation portion (132c) can change not only in the downward direction but also in the upward direction (or vertical direction). Accordingly, the diameter of the discharge port (130b) can be increased without the exhaust port assembly (130) interfering with the heater support plate (145), and the height (or vertical width) can be increased symmetrically in the vertical direction.
[0086] At this time, the exhaust port assembly (130) may protrude outward from the lower chamber (not shown) in the direction of the flange portion (120), and the exhaust port (130b) may be positioned outward from the lower chamber (not shown) in the direction of the flange portion (120). Accordingly, exhaust performance (compared to the conventional) can be improved, and (residual) gas within a groove or hole with a large aspect ratio (H(Height) / W(Width)) on the substrate (10) and / or thin film can be effectively exhausted without leaving any behind, the step coverage of the deposited film (or thin film) can be improved, and particles within the thin film can be reduced.
[0087] Here, the gap (or height of the flange) between the heater support plate (145) and the bottom of the flange portion (120) (or the bottom of the process tube) may be 80 to 100 mm. Since the gap between the heater support plate (145) and the bottom of the flange portion (120) is only 80 to 100 mm, the diameter of the discharge port (130b) could not be made greater than 100 mm without increasing the height of the batch-type substrate processing device (100). However, in the batch-type substrate processing device (100) according to the present invention, the inlet line portion (131) protrudes outward from the heater support plate (145) in the direction of the flange portion (120), so that the discharge port (130b) extends beyond the heater support plate (145), thereby allowing the discharge port (130b) to have a diameter of 110 to 310 mm, and can be used by connecting a discharge pipe (150) larger than 100 A, such as a 200 A discharge pipe (150).
[0088] Accordingly, in the batch-type substrate processing device (100) according to the present invention, the exhaust port assembly (130) protrudes outwardly from the heater support plate (145), so that the exhaust port (130b) is positioned away from the heater support plate (145). Accordingly, the opening area of the exhaust port assembly (130) is widened, thereby improving the exhaust performance of the batch-type substrate processing device (100) while maintaining a height within the standard height.
[0089] FIG. 4 is a schematic cross-sectional view showing an exhaust port assembly according to another embodiment of the present invention.
[0090] Referring to FIG. 4, in another embodiment of the present invention, the exhaust pipe adapter (132) may have a length of the deformation section (132c) (in the extension direction of the inlet line section (131)) increased (without the other end (132b), so that the width (or diameter) (in the vertical direction) may change (or increase) more gradually as it approaches the outlet (130b). At this time, the other end (132b) of the exhaust pipe adapter (132) may simply be where the deformation section (132c) ends. In this case, a sudden change in pressure within the exhaust pipe adapter (132) due to a sudden change in the size (or diameter) of the exhaust passage can be prevented, thereby minimizing airflow in a direction that intersects or is opposite to the extension direction of the inlet line section (131), allowing the exhaust flow to be smooth while maintaining straightness, and the exhaust through the exhaust pipe adapter (132) can be made more efficient.
[0091] Meanwhile, the batch-type substrate processing device (100) of the present invention may further include a gas supply unit (not shown) that supplies process gas to the processing space.
[0092] A gas supply unit (not shown) may include at least one injection nozzle (not shown) for injecting process gas by extending vertically within the processing space, and the injection nozzle (not shown) may have a pipe shape extending along the extension direction of the process tube (110), and a plurality of injection holes may be formed along the extension direction of the injection nozzle (not shown). The plurality of injection holes may be spaced apart by a predetermined distance along the extension direction of the injection nozzle (not shown), and the injection nozzle (not shown) may inject the process gas toward the center of the processing space through the plurality of injection holes. For example, the injection nozzle may be formed of a material such as quartz (SiO2).
[0093] And the height of the batch-type substrate processing device (100) of the present invention may be about 3,850 mm or less (about 3,750 to 3,850 mm), and may be the same as the height of the batch-type substrate processing device (100) that used the exhaust pipe (150) of 100 A in the past. In addition, the height of the process tube (110) may be about 950 mm or less (about 850 to 950 mm), and the height of the flange portion (120) may be about 250 mm or less (about 150 to 250 mm), and the combined height of the process tube (110) and the flange portion (120) (or the combined height of the process tube and the flange portion) may be about 1,150 mm or less (about 1,050 to 1,150 mm), and may be similar to or the same as the height of the conventional process tube (110).
[0094]
[0095] As such, in the present invention, the inlet and outlet of the exhaust port assembly have different shapes, so that the outlet has a large circular diameter and the inlet has an opening area similar to that of the outlet, and accordingly, the exhaust performance of the batch-type substrate processing device through the exhaust port assembly can be improved. At this time, the inlet can be formed with a shape having a short axis in the vertical direction and a long axis in the horizontal direction, thereby allowing the opening area of the exhaust port assembly to be maximized without increasing the height of the batch-type substrate processing device. That is, since batch-type substrate processing devices are standardized and / or standardized, there was difficulty in expanding the opening area of the exhaust port, including the diameter of the outlet, due to the equipment height being limited; however, by making the shape of the inlet through the exhaust port assembly different from the circular outlet, having a short axis in the vertical direction and a long axis in the horizontal direction, the diameter of the outlet can be increased and the opening area of the exhaust port assembly can be expanded without changing the height of the batch-type substrate processing device. Furthermore, the exhaust port assembly can possess high rigidity by being made of metal, similar to the flange section. Consequently, even if a large-diameter outlet is spaced apart from the flange section, stability can be enhanced by preventing damage to the space between the flange and the exhaust port assembly, as well as to the exhaust port assembly itself. Additionally, unlike cases where the exhaust port is formed in the process tube using brittle quartz, the shape of the inlet can be formed as a rectangle. When the inlet is formed as a rectangle, efficient area utilization is possible even if the height of the inlet is limited, allowing the width of the inlet to be minimized. As a result, the flow at the deformation section of the exhaust pipe adapter can achieve a balance between spreading vertically and gathering horizontally, thereby forming a stable exhaust flow. Moreover, since the exhaust port assembly is connected to the flange section, the height of the center of the outlet can be the same as the center of the inlet; this improves the straightness of the exhaust flow to the exhaust pipe and enables effective exhaust.Meanwhile, the exhaust port assembly protrudes outwardly from the heater support plate so that the exhaust port is positioned beyond the heater support plate, and accordingly, the opening area of the exhaust port assembly is widened, thereby improving the exhaust performance of the batch-type substrate processing device while allowing the batch-type substrate processing device to maintain a height within the standard height.
[0096]
[0097] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the embodiments described above, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible without departing from the gist of the present invention as claimed in the claims. Accordingly, the technical scope of protection of the present invention should be determined by the following claims.
Claims
1. A process tube extending in the vertical direction and providing a processing space capable of accommodating multiple substrates in multiple stages; A flange portion provided at the lower end of the process tube and having a hollow portion communicating with the processing space; and An exhaust port assembly provided on one side of the flange portion and communicating with the hollow portion to exhaust within the processing space; comprising The above exhaust port assembly is, An inlet line portion extending outward from one side of the flange portion and having an inlet communicating with the hollow portion; and A batch-type substrate processing device comprising: an exhaust pipe adapter having one end connected to the inlet line section and the other end having an outlet with a shape different from the inlet.
2. In Claim 1, The above-mentioned inlet is a batch-type substrate processing device having a shape with a short axis in the vertical direction and a long axis in the horizontal direction.
3. In Claim 2, The above outlet is circular, and The shortening of the above inlet has a width smaller than the diameter of the above outlet, A batch-type substrate processing device in which the long axis of the inlet has a width greater than the diameter of the outlet.
4. In Claim 2, The above exhaust pipe adapter is, One end connected to the above-mentioned inflow line; A other end provided on the opposite side of the above-mentioned end portion, wherein the discharge port is formed; and A batch-type substrate processing apparatus comprising a deformation portion provided between the above-mentioned first end and the above-mentioned second end, wherein the internal cross-section changes from the shape of the inlet to a circular shape as it goes from the first end to the second end.
5. In Claim 4, A batch-type substrate processing device in which the internal cross-section of the above-mentioned deformation part changes into a circular shape as the short axis extends in the vertical direction and the long axis decreases in the central direction from both sides.
6. In Claim 2, The above-mentioned inlet is a rectangular batch-type substrate processing device.
7. In Claim 1, A batch-type substrate processing device in which the height of the center of the above-mentioned discharge port is the same as the height of the center of the above-mentioned inlet port.
8. In Claim 1, The above discharge port is a batch-type substrate processing device having a diameter of 110 to 310 mm.
9. In Claim 8, A batch-type substrate processing apparatus in which the cross-sectional area of the inlet is 90 to 110% of the cross-sectional area of the outlet.
10. In Claim 1, The above flange portion and the above exhaust port assembly are a batch-type substrate processing device made of metal material.
11. In Claim 1, A heater provided around the circumference of the process tube to heat the process tube; A heater support plate located above the flange portion and supporting the heater; and A batch-type substrate processing device further comprising an exhaust pipe connected to the exhaust pipe adapter and communicating with the exhaust port.
12. In Claim 11, The above-mentioned inlet line portion is a batch-type substrate processing device that protrudes outwardly from the heater support plate in the direction of the flange portion.
13. In Claim 1, The above process tube is, An inner tube forming the above processing space; and It includes an outer tube that accommodates the inner tube mentioned above, The inner tube includes an exhaust slit communicating with the internal space of the outer tube, and The above-mentioned inlet is a batch-type substrate processing device that at least partially faces the above-mentioned exhaust slit.