Force-torque sensor and robot

Abstract

The present embodiment relates to a force-torque sensor comprising: a fixation part; a movement part at least a part of which is disposed in the fixation part; and a first waterproof member coupled to the fixation part and the movement part, wherein the movement part comprises a lid at least a part of which is disposed outside the fixation part, and a first carrier coupled to the lid and disposed in the fixation part; and the first waterproof member comprises a first region positioned between the lid and the first carrier.

Description

Force-torque sensors and robots

[0001] This embodiment relates to a force-torque sensor and a robot.

[0002] Robots are used in industry, healthcare, services, and various other fields, and their scope of application is steadily expanding. To improve the performance of robot systems and ensure safety, robot movements must be accurately monitored and controlled. In particular, the forces and torques generated when a robot interacts with the environment or handles objects are critical information.

[0003] Conventional robot sensor technology has primarily focused on detecting motion states such as position, velocity, and acceleration. However, force and torque play a crucial role in providing information about robot interactions and the working environment. Force-torque sensors are essential for robots to safely grasp or manipulate objects and respond to their surroundings. Furthermore, utilizing these sensors can improve robot operational efficiency and prevent malfunctions.

[0004] Conventional force-torque sensors cannot separate the applied external force into forces for each axis; instead, they receive inputs simultaneously and decompose the forces, resulting in a problem where noise caused by cross-torque is mixed into the detected values ​​for each axis. In particular, there is a problem where noise increases when the force in the z-axis direction and the torque force are mixed.

[0005] (Patent Document 1) KR 10-2023-0123723 A

[0006] This embodiment aims to provide a force-torque sensor capable of measuring z-axis force and torque force separately.

[0007] Furthermore, the present embodiment aims to provide a force-torque sensor in which watertightness is maintained inside the sensor.

[0008] A force-torque sensor according to the present embodiment comprises a fixed portion; a movable portion having at least a portion disposed within the fixed portion; and a first waterproof member coupled to the fixed portion and the movable portion, wherein the movable portion includes a lead having at least a portion disposed outside the fixed portion and a first carrier coupled to the lead and disposed within the fixed portion, and the first waterproof member may include a first region disposed between the lead and the first carrier.

[0009] The above-mentioned fixed member includes a housing and an upper cover coupled to the upper part of the housing, and the first waterproof member may include a second area disposed between the housing and the upper cover and a third area connecting the first area and the second area.

[0010] The first waterproof member is bonded to the housing and the upper cover with an adhesive, and at least one of the housing and the upper cover may include a groove in which the adhesive is disposed.

[0011] The force-torque sensor includes an upper elastic member, and the moving part includes a second carrier disposed between the fixed part and the first carrier, the upper elastic member is coupled to the first carrier and the second carrier, and the lead, the first waterproof member, the upper elastic member, and the first carrier can be stacked in order in a virtual first axis direction.

[0012] The force-torque sensor may include a first coupling member comprising a head portion disposed on the lead and a body portion extending from the head portion and passing through the lead, the first waterproof member and the upper elastic member to be coupled with the first carrier.

[0013] The force-torque sensor comprises a second coupling member including a head portion disposed on the first waterproof member and a body portion extending from the head portion and passing through the first waterproof member and the upper elastic member to be coupled with the second carrier.

[0014] The force-torque sensor may include a magnet disposed in the moving part; a sensor that detects the magnet; a substrate on which the sensor is disposed; and a second waterproof member disposed between the substrate and the fixed part.

[0015] The second waterproof member includes a hole spaced apart from the fixing part, and the substrate can pass through the hole of the second waterproof member.

[0016] The force-torque sensor comprises a lower elastic member coupled to the fixed part and the movable part, the fixed part comprises a housing and a lower cover coupled to the lower part of the housing, the lower elastic member comprises an outer part disposed between the housing and the lower cover, and at least a portion of the second waterproof member may be disposed between the lower elastic member and the lower cover.

[0017] The second waterproof member may include a body portion disposed between the substrate and the fixing portion, a first protrusion extending from the body portion and disposed on the outer surface of the lower cover, and a second protrusion extending from the body portion and disposed on the inner surface of the lower cover.

[0018] Each of the first waterproof member and the second waterproof member can be formed of rubber.

[0019] The force-torque sensor comprises a lower elastic member coupled to the fixed part and the movable part, the fixed part comprises a housing and a lower cover coupled to the lower part of the housing, the lower elastic member comprises an outer part disposed between the housing and the lower cover, and the lower elastic member may be bonded to the housing and the lower cover with an adhesive.

[0020] At least one of the above housing and the above lower cover may include a groove in which the adhesive is disposed.

[0021] The force-torque sensor may include a magnet disposed in the moving part; a sensor that detects the magnet; a substrate disposed within the fixed part and on which the sensor is disposed; a connector electrically connected to the substrate and disposed in the fixed part; and a third waterproof member disposed between the connector and the fixed part.

[0022] The robot according to the present embodiment may include the force-torque sensor.

[0023] Through the force-torque sensor according to the present embodiment, the z-axis force and torque force can be measured separately. This minimizes the influence of noise caused by cross-torque on the detected values ​​for each axis. In other words, the measurement accuracy of the force-torque sensor can be improved.

[0024] Furthermore, the internal watertightness of the force-torque sensor is maintained, preventing damage caused by moisture ingress.

[0025] FIG. 1 is a perspective view of a force-torque sensor according to the present embodiment.

[0026] Figure 2 is a perspective view in which part of the substrate in Figure 1 is omitted.

[0027] Figure 3 is a cross-sectional view taken from AA in Figure 2.

[0028] Figure 4 is a cross-sectional view taken from BB of Figure 2.

[0029] Figure 5 is a cross-sectional view and a partial enlarged view as seen from CC of Figure 2.

[0030] FIG. 6 is a cross-sectional view taken from above of a force-torque sensor according to the present embodiment, cut perpendicular to the z-axis.

[0031] FIG. 7 is an exploded view of a force-torque sensor according to the present embodiment.

[0032] Fig. 8 is an exploded perspective view seen from a different direction than Fig. 7.

[0033] Figure 9 is a perspective view of Figure 2 with the lead omitted.

[0034] FIG. 10 is a perspective view with the upper cover and upper waterproof member omitted from FIG. 9.

[0035] FIG. 11 is a perspective view of FIG. 10 with the upper elastic member and related components omitted.

[0036] FIG. 12 is a perspective view of FIG. 11 with the internal carrier and related configuration omitted.

[0037] FIG. 13 is a perspective view of FIG. 12 with the external carrier and related configuration omitted.

[0038] FIG. 14 is a plan view of FIG. 13 with the housing and lower elastic member omitted.

[0039] FIG. 15 is a bottom perspective view of the force-torque sensor in the state of FIG. 2 with the lower cover omitted and viewed from a different direction.

[0040] FIG. 16 is a bottom perspective view in which the substrate, the lower waterproof member, and related components in FIG. 15 have been omitted.

[0041] FIG. 17 is a bottom perspective view with the housing and lower elastic member omitted from FIG. 16.

[0042] FIG. 18 is a bottom perspective view with the external carrier and related configuration omitted from FIG. 17.

[0043] FIG. 19 is a bottom perspective view with the internal carrier and related configurations omitted from FIG. 18.

[0044] FIG. 20 is a perspective view of a force-torque sensor according to a modified example.

[0045] FIG. 21 is a partial perspective view illustrating a waterproof member, a connector, and related configuration according to a modified example.

[0046] FIG. 22 is a diagram illustrating the case where an external force having a yaw or pitch component is applied to a force-torque sensor according to the present embodiment.

[0047] FIG. 23 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the present embodiment.

[0048] FIG. 24 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the present embodiment.

[0049] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0050] However, the technical concept of the present invention is not limited to some of the described embodiments but can be implemented in various different forms, and within the scope of the technical concept of the present invention, one or more of the components among the embodiments may be selectively combined or substituted.

[0051] In addition, terms used in the embodiments of the present invention (including technical and scientific terms) may be interpreted in a sense that is generally understood by those skilled in the art to which the present invention belongs, unless explicitly and specifically defined otherwise. Terms that are commonly used, such as terms defined in advance, may be interpreted in consideration of their meaning in the context of the relevant technology.

[0052] Furthermore, the terms used in the embodiments of the present invention are for the purpose of describing the embodiments and are not intended to limit the present invention.

[0053] In this specification, the singular form may include the plural form unless specifically stated otherwise in the text, and when described as "at least one of A and B and C (or more than one)," it may include one or more of all combinations that can be formed from A, B, and C.

[0054] In addition, terms such as first, second, A, B, (a), (b), etc., may be used when describing the components of the embodiments of the present invention. These terms are used merely to distinguish the components from other components and are not intended to limit the essence, order, or sequence of the components.

[0055] And, where it is stated that a component is 'connected', 'combined', or 'connected' to another component, this may include not only cases where the component is directly 'connected', 'combined', or 'connected' to the other component, but also cases where it is 'connected', 'combined', or 'connected' due to another component located between the component and the other component.

[0056] Furthermore, when described as being formed or placed "above" or "below" each component, "above" or "below" includes not only cases where two components are in direct contact with each other, but also cases where one or more other components are formed or placed between the two components. Additionally, when expressed as "above" or "below," it may include the meaning of a downward direction as well as an upward direction relative to a single component.

[0057] In the following, one of the "upper cover (120)" and the "lower cover (130)" may be referred to as the "first cover" and the other as the "second cover".

[0058] In the following, one of the “inner carrier (210)” and the “outer carrier (220)” may be referred to as the “first carrier” and the other as the “second carrier”.

[0059] In the following, one of the "internal magnet (311)" and the "external magnet (312)" may be referred to as the "first magnet" and the other as the "second magnet".

[0060] In the following, one of the "internal sensor (321)" and the "external sensor (322)" may be referred to as the "first sensor" and the other as the "second sensor".

[0061] In the following, one of the “inner ball (410)” and the “outer ball (420)” may be referred to as the “first ball” and the other as the “second ball”.

[0062] In the following, one of the "upper elastic member (510)" and the "lower elastic member (520)" may be referred to as the "first elastic member" and the other as the "second elastic member".

[0063] In the following, one of the "internal coupling member (610)" and the "external coupling member (620)" may be referred to as the "first coupling member" and the other as the "second coupling member".

[0064] In the following, one of the "upper waterproof member (810)", "lower waterproof member (820)" and "lower waterproof member (830)" may be referred to as the "first waterproof member", another as the "second waterproof member", and the other as the "third waterproof member".

[0065] In the following, one of the "external protrusion (823)" and the "internal protrusion (824)" may be referred to as the "first protrusion" and the other as the "second protrusion".

[0066] In the following, one of the z-axis, x-axis, and y-axis may be referred to as the "first axis," another as the "second axis," and the other as the "third axis."

[0067] In the following description, one of the roll direction, yaw direction, and pitch direction may be referred to as the "first circumferential direction," another as the "second circumferential direction," and the other as the "third circumferential direction." Alternatively, the roll direction, yaw direction, and pitch direction may be referred to as the "first to third directions."

[0068]

[0069] The configuration of the force-torque sensor according to the present embodiment will be described below with reference to the drawings.

[0070] FIG. 1 is a perspective view of a force-torque sensor according to the present embodiment. FIG. 2 is a perspective view of FIG. 1 with a portion of the substrate omitted. FIG. 3 is a cross-sectional view taken from AA in FIG. 2. FIG. 4 is a cross-sectional view taken from BB in FIG. 2. FIG. 5 is a cross-sectional view taken from CC in FIG. 2 and a partial enlarged view. FIG. 6 is a cross-sectional view taken from above, cut perpendicularly to the z-axis, of the force-torque sensor according to the present embodiment. FIG. 7 is an exploded perspective view of the force-torque sensor according to the present embodiment. FIG. 8 is an exploded perspective view taken from a different direction than FIG. 7. FIG. 9 is a perspective view of FIG. 2 with the lead omitted. FIG. 10 is a perspective view of FIG. 9 with the upper cover and upper waterproof member omitted. FIG. 11 is a perspective view of FIG. 10 with the upper elastic member and related components omitted. FIG. 12 is a perspective view of FIG. 11 with the inner carrier and related components omitted. FIG. 13 is a perspective view of FIG. 12 with the outer carrier and related components omitted. FIG. 14 is a plan view of FIG. 13 with the housing and lower elastic member omitted. FIG. 15 is a bottom perspective view of the force-torque sensor of FIG. 2 with the lower cover omitted and viewed from a different direction. FIG. 16 is a bottom perspective view of FIG. 15 with the substrate, lower waterproof member, and related components omitted. FIG. 17 is a bottom perspective view of FIG. 16 with the housing and lower elastic member omitted. FIG. 18 is a bottom perspective view of FIG. 17 with the outer carrier and related components omitted. FIG. 19 is a bottom perspective view of FIG. 18 with the inner carrier and related components omitted.

[0071] Force-torque sensors can be used to detect and measure forces and torques applied to a robot in real time. Force-torque sensors can detect forces applied to the force-torque sensor. Force-torque sensors can measure forces applied to the force-torque sensor. Force-torque sensors can detect torque applied to the force-torque sensor. Force-torque sensors can measure torque applied to the force-torque sensor. The force-torque sensor can be a 6-axis force-torque sensor. The force-torque sensor can detect and measure forces in 6 axes, namely the x-axis, y-axis, z-axis, yaw, pitch, and roll directions. The force-torque sensor can be a finger sensor of the robot.

[0072] The force-torque sensor can be formed in a circular shape when viewed from above. The force-torque sensor can be formed in a circular shape when viewed from below. The force-torque sensor can be cylindrical in shape.

[0073] The force-torque sensor may include a fixed part (100). The fixed part (100) is a concept distinct from the moving part (200) and may be a part that is relatively fixed when the moving part (200) moves.

[0074] The force-torque sensor may include a housing (110). The fixed part (100) may include the housing (110). The housing (110) may be placed on the lower cover (130). The housing (110) may be placed on the lower cover (130). The housing (110) may be placed on the upper cover (120). The housing (110) may be placed below the upper cover (120). The housing (110) may be placed between the lower cover (130) and the upper cover (120). The housing (110) may accommodate an external carrier (220) inside. The housing (110) may accommodate an internal carrier (210) inside. The housing (110) may be placed on the outside of the external carrier (220). The housing (110) may be placed on the outside of the internal carrier (210).

[0075] The housing (110) may include a groove. The groove may be a ball rail. An outer ball (420) may be placed in the groove. The groove may extend in the z-axis direction. The outer ball (420) may move along the groove of the housing (110). The outer ball (420) may roll along the groove of the housing (110).

[0076] The force-torque sensor may include an upper cover (120). The fixed part (100) may include an upper cover (120). The upper cover (120) may be placed on the housing (110). The upper cover (120) may be placed on the housing (110). The upper cover (120) may be coupled to the housing (110). The upper cover (120) may be coupled to the upper surface of the housing (110). The upper cover (120) may be fixed to the housing (110). The upper cover (120) may be placed between the housing (110) and the lid (230). The upper cover (120) may be coupled to the upper part of the housing (110).

[0077] The force-torque sensor may include a lower cover (130). The fixed part (100) may include the lower cover (130). The lower cover (130) may form the bottom portion of the force-torque sensor. The lower cover (130) may be positioned on the opposite side of the lead (230). The lower cover (130) may be positioned below the housing (110). The lower cover (130) may be coupled to the lower surface of the housing (110). The lower cover (130) may be coupled to the lower part of the housing (110). The lower cover (130) may be coupled to the housing (110). The lower cover (130) may be coupled to the housing (110). The lower cover (130) may include a hole or groove through which the substrate (700) passes. The lower cover (130) may be positioned on the opposite side of the upper cover (120).

[0078] The force-torque sensor may include a moving part (200). The moving part (200) may be disposed within the fixed part (100). The moving part (200) may be disposed on the fixed part (100). The moving part (200) may move relative to the fixed part (100). When an external force is applied, the moving part (200) may move relative to the fixed part (100). At least a portion of the moving part (200) may be disposed within the fixed part (100). A portion of the moving part (200) may be exposed outside the fixed part (100). The moving part (200) may be disposed on the lower cover (130).

[0079] The force-torque sensor may include a first moving part (201). The first moving part (201) may be a part that moves when a force having x-axis, y-axis, yaw, pitch, and roll components is applied to the force-torque sensor. The first moving part (201) may include a lead (230) and an internal carrier (210). The first moving part (201) may be movably disposed within a fixed part (100).

[0080] The force-torque sensor may include a second moving part (202). The second moving part (202) may move when a force having a z-axis component is applied. The second moving part (202) may move together with the first moving part (201) when a force having a z-axis component is applied. The second moving part (202) may include an external carrier (220). The second moving part (202) may be positioned between the fixed part (100) and the first moving part (201).

[0081] The force-torque sensor may include an inner carrier (210). The moving part (200) may include an inner carrier (210). The inner carrier (210) may be placed within the fixed part (100). The inner carrier (210) may be placed within the outer carrier (220). The inner carrier (210) may be placed on the fixed part (100). The inner carrier (210) may be placed within the housing (110). The inner carrier (210) may include a curved surface. An inner ball (410) may be placed on the curved surface of the inner carrier (210). The inner carrier (210) may be formed in a spherical shape in at least a portion. The inner carrier (210) may be formed in a spherical shape in at least a portion so that the center of rotation remains constant without changing. Through this, the inner carrier (210) moves as intended by the designer, thereby minimizing the occurrence of cross talk.

[0082] The inner carrier (210) can move in the yaw direction, which is a rotational direction centered on the x-axis, the pitch direction, which is a rotational direction centered on the y-axis, and the roll direction, which is a rotational direction centered on the z-axis, with respect to the outer carrier (220). The x-axis, y-axis, and z-axis can be orthogonal to each other. The inner carrier (210) and the outer carrier (220) can move integrally in the z-axis direction with respect to the fixed part (100).

[0083] The inner carrier (210) may include a protrusion. The protrusion may be a stopper. The protrusion may be formed on the outer surface of the inner carrier (210). The protrusion may protrude outward from the inner carrier (210). The protrusion may be placed in a groove of the outer carrier (220).

[0084] The force-torque sensor may include an external carrier (220). The moving part (200) may include an external carrier (220). The external carrier (220) may be positioned between the internal carrier (210) and the fixed part (100). The external carrier (220) may be positioned on the outside of the internal carrier (210). The external carrier (220) may be positioned within the fixed part (100). The external carrier (220) may be positioned on the fixed part (100). The external carrier (220) may be positioned within the housing (110). The external carrier (220) may move in the z-axis direction relative to the fixed part (100). The external carrier (220) may move together with the internal carrier (210) when the internal carrier (210) moves in the z-axis direction.

[0085] The outer carrier (220) may include a first groove. The first groove may be an inner ball rail. An inner ball (410) may be placed in the first groove. The inner ball (410) may move along the first groove. Alternatively, the inner ball (410) may rotate while at least a portion is received in the first groove.

[0086] The outer carrier (220) may include a second groove. The second groove may be an outer ball rail. An outer ball (420) may be placed in the second groove. The outer ball (420) may move along the second groove. The second groove may extend in the z-axis direction.

[0087] The outer carrier (220) may include a groove. The groove may be formed on the inner surface of the outer carrier (220). The groove may be formed concavely on the inner surface of the outer carrier (220). A projection of the inner carrier (210) may be disposed in the groove of the outer carrier (220).

[0088] The groove can limit the movement of the inner carrier (210) to within a preset range. When the inner carrier (210) rotates about the z-axis by more than a preset angle relative to the outer carrier (220), the projection of the inner carrier (210) may come into contact with the groove of the outer carrier (220).

[0089] The force-torque sensor may include a lead (230). The moving part (200) may include a lead (230). The lead (230) may be connected to an internal carrier (210). At least a portion of the lead (230) may be placed on the housing (110). At least a portion of the lead (230) may be placed on the upper cover (120). At least a portion of the lead (230) may be placed on the fixed part (100). At least a portion of the lead (230) may protrude beyond the fixed part (100). At least a portion of the lead (230) may be placed outside the fixed part (100). An external force may be applied to at least a portion of the lead (230) that protrudes beyond the fixed part (100). An external force may be applied to the lead (230). The lead (230) may be moved by the external force. The lead (230) may be coupled to the internal carrier (210). The lead (230) may be placed on the inner carrier (210). The lead (230) may be placed on the inner carrier (210). The lead (230) may move integrally with the inner carrier (210). The lead (230) may be fixed to the inner carrier (210). At least a portion of the lead (230) may be exposed outside the fixed portion (100). The lead (230) may be exposed to the outside and move by an external force. The lead (230) may be formed in a circular shape when viewed from above.

[0090] When a force is applied to the lead (230) in the direction of the first axis, the direction of the second axis, the direction of rotation around the first axis, the direction of rotation around the second axis, and the direction of rotation around the third axis, the inner carrier (210) can move relative to the outer carrier (220). When a force is applied to the lead (230) in the direction of the third axis, the inner carrier (210) and the outer carrier (220) can move together relative to the fixed part (100). At this time, the first axis may be the x-axis, the second axis may be the y-axis, and the third axis may be the z-axis.

[0091] The force-torque sensor may include a sensing unit. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100). The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the x-axis direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the y-axis direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the yaw direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the pitch direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the roll direction. The sensing unit can detect movement of the moving unit (200) relative to the fixed unit (100) in the z-axis direction.

[0092] The force-torque sensor may include a magnet (310). The magnet (310) may be placed in the moving part (200). The magnet (310) may be a 4-pole magnet. The magnet (310) may include two S poles and two N poles. As a variation, the magnet (310) may be a 2-pole magnet.

[0093] The magnet (310) may include an internal magnet (311). The internal magnet (311) may be placed in the internal carrier (210). The internal magnet (311) may be placed on the lower surface of the internal carrier (210). The internal magnet (311) may be placed in the first moving part (201).

[0094] The internal magnet (311) may include a plurality of magnets. The internal magnet (311) may include four magnets. The internal magnet (311) may include first to fourth magnets. The first magnet may be positioned on the central axis of the internal carrier (210). The second magnet and the third magnet may be positioned on opposite sides of the first magnet. The fourth magnet may be positioned so as to be spaced apart from the second magnet and the third magnet by the same distance.

[0095] The magnet (310) may include an external magnet (312). The external magnet (312) may be placed on the external carrier (220). The external magnet (312) may be placed on the lower surface of the external carrier (220). The external magnet (312) may be placed on the second moving part (202). The external magnet (312) may be placed on the opposite side of the fourth magnet with respect to the first magnet.

[0096] The force-torque sensor may include a sensor (320). The sensor (320) may detect a magnet (310). The sensor (320) may detect the magnetic force of the magnet (310). The sensor (320) may include a Hall element. The sensor (320) may be a Hall sensor. The sensor (320) may be placed on a substrate (700). The sensor (320) may be placed on a mounting portion (710) of the substrate (700).

[0097] The sensor (320) may include an internal sensor (321). The internal sensor (321) may detect an internal magnet (311). The internal sensor (321) may include a plurality of sensors. The internal sensor (321) may include four sensors. The internal sensor (321) may include first to fourth sensors corresponding to first to fourth magnets of the internal magnet (311).

[0098] The sensor (320) may include an external sensor (322). The external sensor (322) may detect an external magnet (312). The external sensor (322) may be positioned on the opposite side of the fourth sensor relative to the first sensor.

[0099] As a variation, the sensor (320) may be placed in the moving part (200) and the magnet (310) may be placed in the fixed part (100).

[0100] The internal magnet (311) may be placed on either the lower surface of the fixed part (100) or the internal carrier (210). At this time, the internal sensor (321) may be placed on the other lower surface of the fixed part (100) or the internal carrier (210) and may detect the internal magnet (311).

[0101] The external magnet (312) may be placed in either the fixed part (100) or the second moving part (202). At this time, the external sensor (322) may be placed in the other of the fixed part (100) and the second moving part (202) and may detect the external magnet (312).

[0102] The force-torque sensor may include a guide member. The guide member may guide the movement of the moving part (200). The guide member may guide the movement of the moving part (200) relative to the fixed part (100). The guide member may guide the movement of the inner carrier (210) relative to the outer carrier (220).

[0103] The force-torque sensor may include an inner ball (410). The guide member may include an inner ball (410). The inner ball (410) may be formed of ceramic. The inner ball (410) may be placed in an inner carrier (210). The inner ball (410) may be in direct contact with the inner carrier (210). The inner ball (410) may be placed in an outer carrier (220). The inner ball (410) may be in direct contact with the outer carrier (220). The inner ball (410) may be placed between the inner carrier (210) and the outer carrier (220). The inner ball (410) may be placed between the first moving part (201) and the second moving part (202). The inner ball (410) may guide the movement of the inner carrier (210) relative to the outer carrier (220). The inner carrier (210) can move in the yaw, pitch, and roll directions relative to the outer carrier (220) by means of the inner ball (410). However, if the inner carrier (210) is to move in the z-axis direction, the inner ball (410) and the outer carrier (220) can move together with the inner carrier (210).

[0104] The inner ball (410) can guide the first moving part (201) to tilt relative to the fixed part (100). The inner ball (410) can guide the inner carrier (210) to tilt relative to the outer carrier (220) or the housing (110).

[0105] The inner ball (410) may include a plurality of balls. The inner ball (410) may include four balls. The inner ball (410) may include first to fourth balls.

[0106] The first moving part (201) may come into direct contact with the inner ball (410). At least a portion of the first moving part (201) may be formed of metal. The rigidity of the inner ball (410) may be greater than the rigidity of the metal of the first moving part (201). The inner carrier (210) may be formed of aluminum. The inner ball (410) may be formed of ceramic, which has greater rigidity than aluminum. The outer ball (420) may also be formed of the same material as the inner ball (410).

[0107] The force-torque sensor may include an outer ball (420). The guide member may include an outer ball (420). The outer ball (420) may be formed of ceramic. The outer ball (420) may be placed on an outer carrier (220). The outer ball (420) may be in direct contact with the outer carrier (220). The outer ball (420) may be placed on a housing (110). The outer ball (420) may be in direct contact with the housing (110). The outer ball (420) may be placed between the outer carrier (220) and the fixed part (100). The outer ball (420) may be placed between the outer carrier (220) and the housing (110). The outer ball (420) may be placed between the fixed part (100) and the second moving part (202). The outer ball (420) can guide the movement of the outer carrier (220) relative to the housing (110). The outer carrier (220) can move in the z-axis direction relative to the housing (110) by means of the outer ball (420). At this time, the outer carrier (220) can move together with the inner carrier (210) and the lead (230).

[0108] The outer ball (420) may include a plurality of balls. The outer ball (420) may include at least two balls that overlap in the z-axis direction. Even when the outer carrier (220) moves due to the at least two balls that overlap in the z-axis direction, tilt can be prevented. The outer ball (420) may be placed in four locations, with two balls each. The outer ball (420) may be placed in a total of eight locations. The outer ball (420) may include the first to eighth balls.

[0109] The force-torque sensor may include an elastic member. The elastic member may provide a restoring force to the moving part (200). The elastic member may have elasticity. The elastic member may be formed of metal.

[0110] The force-torque sensor may include an upper elastic member (510). The upper elastic member (510) may be coupled to an external carrier (220). The upper elastic member (510) may be coupled to an internal carrier (210). The upper elastic member (510) may be coupled to a lead (230). The upper elastic member (510) may connect the external carrier (220) and the internal carrier (210).

[0111] The upper elastic member (510) may include an outer portion (511). The outer portion (511) may be coupled to an external carrier (220). The outer portion (511) may be disposed on the external carrier (220). The outer portion (511) may be fixed to the external carrier (220).

[0112] The upper elastic member (510) may include an inner portion (512). The inner portion (512) may be coupled to the inner carrier (210). The inner portion (512) may be placed on the inner carrier (210). The inner portion (512) may be fixed to the inner carrier (210). The inner portion (512) may be coupled to the lid (230). The inner portion (512) may be placed on the lid (230). The inner portion (512) may be fixed to the lid (230). The inner portion (512) may be placed between the inner carrier (210) and the lid (230).

[0113] The upper elastic member (510) may include a connecting portion (513). The connecting portion (513) may connect the outer portion (511) and the inner portion (512). The connecting portion (513) may elastically connect the outer portion (511) and the inner portion (512). The connecting portion (513) may include a bent shape. The connecting portion (513) may include a shape that is bent multiple times. The connecting portion (513) may include a bent portion. The connecting portion (513) may have elasticity. The connecting portion (513) may be formed of metal.

[0114] The force-torque sensor may include a lower elastic member (520). The lower elastic member (520) may be coupled to a lower cover (130). The lower elastic member (520) may be coupled to a housing (110). The lower elastic member (520) may be coupled to an external carrier (220). The lower elastic member (520) may connect the lower cover (130) and the external carrier (220). The lower elastic member (520) may connect the housing (110) and the external carrier (220). The lower elastic member (520) may be coupled to a fixed part (100) and a moving part (200).

[0115] The lower elastic member (520) can be bonded to the housing (110) and the lower cover (130) with an adhesive. At least one of the housing (110) and the lower cover (130) may include a groove (112, 131) into which the adhesive is placed. The housing (110) may include a groove (112) into which the adhesive is placed. The groove (112) of the housing (110) may be formed on the lower surface of the housing (110). The lower cover (130) may include a groove (131) into which the adhesive is placed. The groove (131) of the lower cover (130) may be formed on the upper surface of the lower cover (130).

[0116] The lower elastic member (520) may include an outer portion (521). The outer portion (521) may be coupled to the lower cover (130). The outer portion (521) may be placed on the lower cover (130). The outer portion (521) may be fixed to the lower cover (130). The outer portion (521) may be coupled to the housing (110). The outer portion (521) may be placed on the housing (110). The outer portion (521) may be fixed to the housing (110). The outer portion (521) may be placed between the lower cover (130) and the housing (110).

[0117] The lower elastic member (520) may include an inner portion (522). The inner portion (522) may be coupled to the outer carrier (220). The inner portion (522) may be disposed on the outer carrier (220). The inner portion (522) may be fixed to the outer carrier (220). The inner portion (522) may support the outer carrier (220). The inner portion (522) may support the outer carrier (220) from below.

[0118] The lower elastic member (520) may include a connecting portion (523). The connecting portion (523) may connect the outer portion (521) and the inner portion (522). The connecting portion (523) may elastically connect the outer portion (521) and the inner portion (522). The connecting portion (523) may include a bent shape. The connecting portion (523) may include a shape that is bent multiple times. The connecting portion (523) may include a bent portion. The connecting portion (523) may have elasticity. The connecting portion (523) may be formed of metal.

[0119] The force-torque sensor may include a coupling member. The coupling member may connect two or more different members together. For example, the coupling member may be a screw. The coupling member may be a bolt.

[0120] The force-torque sensor may include an internal coupling member (610). The internal coupling member (610) may be coupled to the lead (230) and the internal carrier (210). The internal coupling member (610) may secure the lead (230) to the internal carrier (210).

[0121] The internal coupling member (610) may include a head portion (611). The head portion (611) may be placed on the lead (230).

[0122] The internal coupling member (610) may include a body portion (612). The body portion (612) may extend from the head portion (611). The body portion (612) may pass through the lid (230), the upper waterproof member (810), and the upper elastic member (510). The body portion (612) may be coupled with the internal carrier (210).

[0123] The force-torque sensor may include an external coupling member (620). The external coupling member (620) may be coupled to an upper elastic member (510) and an external carrier (220). The external coupling member (620) may secure the upper elastic member (510) to the external carrier (220).

[0124] The external connecting member (620) may include a head portion (621). The head portion (621) may be placed on the upper waterproof member (810).

[0125] The external coupling member (620) may include a body portion (622). The body portion (622) may extend from the head portion (621). The body portion (622) may pass through the upper waterproof member (810) and the upper elastic member (510). The body portion (622) may be coupled to the external carrier (220).

[0126] The force-torque sensor may include a substrate (700). The sensing part may include a substrate (700). The substrate (700) may be placed on a fixed part (100). The substrate (700) may be placed on a lower cover (130). The substrate (700) may be placed on a housing (110).

[0127] The substrate (700) may include a mounting portion (710). A sensor (320) may be placed in the mounting portion (710). The mounting portion (710) may be an RPCB. The substrate (700) may include a terminal portion (720). The terminal portion (720) may include a plurality of terminals. The terminal portion (720) may be placed outside the lower cover (130). The plurality of terminals of the terminal portion (720) may be connected to external terminals such as a robot. The substrate (700) may include a connection portion (730). The connection portion (730) may connect the mounting portion (710) and the terminal portion (720). The terminal portion (720) and the connection portion (730) may be FPCBs.

[0128] The force-torque sensor may include a plate member (740) disposed on the upper surface of the substrate (700). The plate member (740) may include a hole or groove that avoids the sensor (320). The plate member (740) can prevent the phenomenon in which the moving part (200) moves and strikes the sensor (320).

[0129] The force-torque sensor may include a reinforcing plate (750) disposed on the lower surface of the substrate (700). The reinforcing plate (750) can reinforce the strength of the substrate (700). Furthermore, the reinforcing plate (750) may be formed of a heat dissipation material to perform a heat dissipation function. In this case, the reinforcing plate (750) may be a heat dissipation member.

[0130] The force-torque sensor according to the present embodiment may include a waterproof member. The waterproof member forms a watertight structure inside the force-torque sensor to prevent moisture from penetrating into the sensor. An upper waterproof member (810) may be placed between the lead (230) and the fixing part (100) to prevent moisture from entering through the open upper portion. A lower waterproof member (820) may be placed between the substrate (700) and the fixing part (100) to prevent moisture from entering through the substrate (700) extraction part. The upper cover (120) and the housing (110) and the lower cover (130) and the housing (110) may be bonded with an adhesive. At this time, an adhesive groove in which the adhesive is placed may be formed in each member.

[0131] The force-torque sensor may include an upper waterproof member (810). The upper waterproof member (810) may seal the space open to the top of the housing (110). The upper waterproof member (810) may seal the space between the housing (110) and the lid (230). The upper waterproof member (810) may prevent water from entering between the lid (230) and the housing (110). The upper waterproof member (810) may be an upper shielding rubber. The upper waterproof member (810) may be coupled to the fixed part (100) and the movable part (200). The upper waterproof member (810) may be placed in the housing (110). The upper waterproof member (810) may be fixed to the housing (110). The upper waterproof member (810) may be coupled to the housing (110). The upper waterproof member (810) can be bonded to the housing (110) with an adhesive. The upper waterproof member (810) can be placed on the upper cover (120). The upper waterproof member (810) can be fixed to the upper cover (120). The upper waterproof member (810) can be coupled to the upper cover (120). The upper waterproof member (810) can be bonded to the upper cover (120) with an adhesive.

[0132] The upper waterproof member (810) may be formed of rubber. The upper waterproof member (810) may have elasticity.

[0133] At least one of the housing (110) and the upper cover (120) may include a groove (111, 121) into which an adhesive is placed. The housing (110) may include a groove (111) into which an adhesive is placed. The groove (111) may be formed on the upper surface of the housing (110). The upper cover (120) may include a groove (121) into which an adhesive is placed. The groove (121) may be formed on the lower surface of the upper cover (120).

[0134] In this embodiment, the lead (230), upper waterproof member (810), upper elastic member (510), and inner carrier (210) may be stacked in order along a virtual first axis direction. At this time, the first axis may be parallel to the z-axis.

[0135] The upper waterproof member (810) may include a first region (811). The first region (811) may be an inner portion. The first region (811) may be positioned between the lid (230) and the inner carrier (210).

[0136] The upper waterproof member (810) may include a second area (812). The second area (812) may be an outer portion. The second area (812) may be positioned between the housing (110) and the upper cover (120). The second area (812) may be exposed to the outside between the housing (110) and the upper cover (120).

[0137] The upper waterproof member (810) may include a third area (813). The third area (813) may be a connecting part. The third area (813) may connect the first area (811) and the second area (812).

[0138] The force-torque sensor may include a lower waterproof member (820). The lower waterproof member (820) may be positioned between the substrate (700) and the fixing part (100). The lower waterproof member (820) may seal the space between the substrate (700) and the fixing part (100). The lower waterproof member (820) may prevent water from flowing into the outlet side of the substrate (700). The lower waterproof member (820) may be a lower shielding ring. The lower waterproof member (820) may be positioned on the substrate (700). The lower waterproof member (820) may be fixed to the substrate (700). The lower waterproof member (820) may be in contact with the substrate (700). The lower waterproof member (820) may be positioned on the fixing part (100). The lower waterproof member (820) may be fixed to the fixing part (100). The lower waterproof member (820) can be in contact with the fixed part (100).

[0139] At least a portion of the lower waterproof member (820) may be positioned between the lower elastic member (520) and the lower cover (130). At least a portion of the lower waterproof member (820) may be positioned between the outer portion (521) of the lower elastic member (520) and the lower cover (130).

[0140] The lower waterproof member (820) may be formed of rubber. The lower waterproof member (820) may have elasticity.

[0141] The lower waterproof member (820) may include a body portion (821). The body portion (821) may be positioned between the substrate (700) and the fixing portion (100). The body portion (821) may be positioned on the substrate (700). The body portion (821) may be positioned on the fixing portion (100).

[0142] The lower waterproof member (820) may include a hole (822). The hole (822) may be spaced apart from the fixing part (100). The substrate (700) may pass through the hole (822) of the lower waterproof member (820). Through this, the substrate (700) is in complete contact with the lower waterproof member (820), and moisture ingress between the substrate (700) and the lower waterproof member (820) can be prevented.

[0143] The lower waterproof member (820) may include an external protrusion (823). The external protrusion (823) may extend from the body portion (821). The external protrusion (823) may be positioned on the outer surface of the lower cover (130). The external protrusion (823) may extend from the body portion (821) along the outer surface of the lower cover (130).

[0144] The lower waterproof member (820) may include an internal protrusion (824). The internal protrusion (824) may extend from the body portion (821). The internal protrusion (824) may be positioned on the inner surface of the lower cover (130). The inner protrusion (824) may extend from the body portion (821) along the inner surface of the lower cover (130).

[0145]

[0146] Below, the configuration of a force-torque sensor according to a modified example is explained with reference to the drawings.

[0147] FIG. 20 is a perspective view of a force-torque sensor according to a modified example. FIG. 21 is a partial perspective view illustrating a waterproof member, a connector, and related configuration according to a modified example.

[0148] The following describes variations focusing on the differences from the present embodiment. That is, for components of the variations that are not described, the description in the present embodiment may be applied by analogy.

[0149] A force-torque sensor according to a modified example may include a lower waterproof member (830). The lower waterproof member (830) may be positioned between the connector (840) and the fixing part (100). The lower waterproof member (830) may be, for example, an O-ring. The lower waterproof member (830) may seal the space between the connector (840) and the fixing part (100).

[0150] A force-torque sensor according to a modified example may include a connector (840). The connector (840) may be electrically connected to a substrate (700). The connector (840) may be placed on a fixed part (100). The connector (840) may be a 4-pin connector. The connector (840) may be replaced with an FPCB.

[0151] A force-torque sensor according to a modified example may include an external connector (850). The external connector (850) may be connected to a connector (840). The external connector (850) may be electrically connected to a connector (840). The external connector (850) may be connected to the outside. The external connector (850) may connect the force-torque sensor to an external power source and a control unit.

[0152]

[0153] The operation of the force-torque sensor according to the present embodiment will be explained below with reference to the drawings.

[0154] FIG. 22 is a diagram illustrating the case where an external force having a yaw or pitch component is applied to a force-torque sensor according to the present embodiment.

[0155] When an external force having a component in at least one of the y-axis direction and the yaw direction is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) may rotate or tilt around the x-axis. At this time, the internal carrier (210) may move integrally with the lead (230) (see A and B of FIG. 22). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the y-axis direction component and the force of the yaw direction component of the external force applied to the lead (230) can be measured.

[0156] When an external force having a component in at least one of the x-axis direction and the pitch direction is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) may rotate or tilt around the y-axis (see pitch in FIG. 22). At this time, the internal carrier (210) may move integrally with the lead (230) (see A and B in FIG. 22). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the x-axis direction component and the force of the pitch direction component of the external force applied to the lead (230) can be measured.

[0157] FIG. 23 is a diagram illustrating the change when an external force having a roll direction component is applied to a force-torque sensor according to the present embodiment.

[0158] When an external force having a roll direction component is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) may rotate or tilt around the z-axis (see roll and a, b in FIG. 23). At this time, the internal carrier (210) may move integrally with the lead (230). Meanwhile, since the fixed part (100) is maintained in a fixed state, the distance between the internal sensor (321) of the substrate (700) placed on the fixed part (100) and the internal magnet (311) placed on the internal carrier (210) may change. At this time, since the four internal magnets (311) move at different distances relative to the four internal sensors (321), the force of the roll direction component of the external force applied to the lead (230) can be measured. For example, three of the four internal magnets (311) move the same distance and one internal magnet with the center positioned does not move, so the force of the roll direction component of the external force applied to the lead (230) can be measured.

[0159] FIG. 24 is a diagram illustrating the case where an external force having a component in the z-axis direction is applied to a force-torque sensor according to the present embodiment.

[0160] When an external force having a z-axis component is applied to the lead (230) of the force-torque sensor according to the present embodiment, the lead (230) can move along the z-axis (see B in FIG. 24). At this time, the external carrier (220) and the internal carrier (210) can move integrally with the lead (230) (see A and B in FIG. 24). Meanwhile, the distance between the external sensor (322) of the substrate (700) and the external magnet (312) placed on the external carrier (220) can be changed. Through this, the force of the z-axis component of the external force applied to the lead (230) can be measured. However, at this time, the distance between the internal magnet (311) and the internal sensor (321) is also changed, and through this, the force of the z-axis component of the external force applied to the lead (230) can also be measured.

[0161]

[0162] The configuration of the robot according to the present embodiment is described below.

[0163] The robot may include a body. The robot may include an arm member connected to the body. The arm member of the robot may include a gripping portion. The gripping portion may include, for example, a finger shape. The force-torque sensor of the present embodiment may be placed in the gripping portion of the arm member. The arm member of the robot may include a joint. The force-torque sensor of the present embodiment may be placed in the joint of the arm member.

[0164]

[0165] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive.

Claims

1. Fixed part; A movable part in which at least a portion is disposed within the fixed part; and It includes a first waterproof member coupled to the fixed part and the movable part, and The above-mentioned moving part includes a lead, at least a portion thereof disposed outside the fixed part, and a first carrier coupled to the lead and disposed within the fixed part. The first waterproof member is a force-torque sensor comprising a first region disposed between the lead and the first carrier.

2. In Paragraph 1, The above-mentioned fixed part includes a housing and an upper cover coupled to the upper part of the housing, and The first waterproof member comprises a second region disposed between the housing and the upper cover, and a third region connecting the first region and the second region, forming a force-torque sensor.

3. In Paragraph 2, The first waterproof member is bonded to the housing and the upper cover with an adhesive, and A force-torque sensor in which at least one of the housing and the upper cover includes a groove in which the adhesive is disposed.

4. In Paragraph 1, It includes an upper elastic member, and The above moving part includes a second carrier disposed between the above fixed part and the first carrier, and The upper elastic member is coupled with the first carrier and the second carrier, and The above lead, the above first waterproof member, the above upper elastic member, and the above first carrier are a force-torque sensor that is stacked in order in a virtual first axis direction.

5. In Paragraph 4, A force-torque sensor comprising a first coupling member including a head portion disposed on the lead, and a body portion extending from the head portion and passing through the lead, the first waterproof member, and the upper elastic member to be coupled with the first carrier.

6. In Paragraph 4, A force-torque sensor comprising a second coupling member including a head portion disposed on the first waterproof member and a body portion extending from the head portion and passing through the first waterproof member and the upper elastic member to be coupled with the second carrier.

7. In Paragraph 1, A magnet disposed in the above-mentioned moving part; A sensor that detects the above magnet; A substrate on which the above sensor is placed; and A force-torque sensor comprising a second waterproof member disposed between the substrate and the fixed part.

8. In Paragraph 7, The second waterproof member includes a hole spaced apart from the fixing part, and The above substrate is a force-torque sensor passing through the hole of the second waterproof member.

9. In Paragraph 7, It includes a lower elastic member coupled to the fixed part and the moving part, and The above-mentioned fixed part includes a housing and a lower cover coupled to the lower part of the housing, and The lower elastic member includes an outer portion disposed between the housing and the lower cover, and At least a portion of the second waterproof member is a force-torque sensor disposed between the lower elastic member and the lower cover.

10. In Paragraph 9, The second waterproof member comprises a body portion disposed between the substrate and the fixing portion, a first protrusion extending from the body portion and disposed on the outer surface of the lower cover, and a second protrusion extending from the body portion and disposed on the inner surface of the lower cover, forming a force-torque sensor.

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