Nozzle member, attachment member, film formation device, and method for manufacturing film formation component

Abstract

Provided are a nozzle member, an attachment member, a film formation device, and a method for manufacturing a film formation component, that make it possible to form a film in hard-to-access regions while suppressing a reduction in film formation efficiency. A nozzle member (2b) jets a powder (13) as a raw material powder and a working gas in a film formation device (100), and comprises a first nozzle portion (2ba), a second nozzle portion (36), and a connection part (50). The first nozzle portion (2ba) extends in a first direction. The second nozzle portion (36) extends in a direction intersecting the first direction. The connection part (50) connects the first nozzle portion (2ba) and the second nozzle portion (36). The connection part (50) is disposed at a position facing the first nozzle portion (2ba) and includes a curved surface-shaped portion (10) protruding toward the first nozzle portion (2ba).

Description

Nozzle Member, Attachment Member, Film Forming Apparatus, and Method for Manufacturing Film-Formed Component

[0001] The present disclosure relates to a nozzle member, an attachment member, a film forming apparatus, and a method for manufacturing a film-formed component.

[0002] Conventionally, film forming apparatuses using a cold spray method are known (see, for example, Figure 3 of Japanese Patent Laid-Open No. 2012-140707). Japanese Patent Laid-Open No. 2012-140707 discloses a nozzle with a bent intermediate portion for forming a film on areas where it is difficult to form a film with a standard linear nozzle, such as hard-to-access internal spaces.

[0003] Japanese Patent Laid-Open No. 2012-140707

[0004] In the nozzle disclosed in the above-mentioned Japanese Patent Laid-Open No. 2012-140707, powder accelerated to high speed for film formation collides with the bent portion of the nozzle. This causes a decrease in the velocity of the powder. As a result, a problem of reduction in film forming efficiency occurs.

[0005] Accordingly, an object of the present disclosure is to provide a nozzle member, an attachment member, a film forming apparatus, and a method for manufacturing a film-formed component that can form a film on hard-to-access regions while suppressing a decrease in film forming efficiency.

[0006] A nozzle member according to the present disclosure is a nozzle member that injects raw material powder and working gas in a film forming apparatus, and includes a first nozzle portion, a second nozzle portion, and a connecting portion. The first nozzle portion extends in a first direction. The second nozzle portion extends in a direction intersecting the first direction. The connecting portion connects the first nozzle portion and the second nozzle portion. The connecting portion is disposed at a position facing the first nozzle portion, and includes a curved surface portion convex toward the first nozzle portion.

[0007] According to the above, there can be obtained a nozzle member, an attachment member, a film forming apparatus, and a method for manufacturing a film-formed component that can form a film on hard-to-access regions while suppressing a decrease in film forming efficiency.

[0008] Figure 1 is a schematic diagram showing the configuration of a film deposition apparatus according to Embodiment 1. Figure 2 is a schematic partial cross-sectional view of the nozzle member in the film deposition apparatus shown in Figure 1. Figure 3 is an exploded perspective schematic view of the attachment member constituting the nozzle member shown in Figure 2. Figure 4 is a schematic partial cross-sectional view showing a first modified example of the nozzle member in the film deposition apparatus shown in Figure 1. Figure 5 is a schematic partial cross-sectional view showing a second modified example of the nozzle member in the film deposition apparatus shown in Figure 1. Figure 6 is a flowchart showing a method for manufacturing a film-deposited part using the film deposition apparatus shown in Figure 1. Figure 7 is a schematic partial cross-sectional view of the nozzle member in the film deposition apparatus according to Embodiment 2. Figure 8 is a schematic partial front view of the nozzle member shown in Figure 7. Figure 9 is a schematic partial cross-sectional view showing a modified example of the nozzle member shown in Figure 7. Figure 10 is a schematic diagram showing the nozzle member in the film deposition apparatus according to Embodiment 3.

[0009] Embodiments of the present disclosure will be described below. The same components will be given the same reference numerals, and their descriptions will not be repeated.

[0010] (Embodiment 1) <Configuration of the film-forming apparatus> Figure 1 is a schematic diagram showing the configuration of a film-forming apparatus according to Embodiment 1 of the present disclosure. The film-forming apparatus 100 shown in Figure 1 is a film-forming apparatus that can form a film 21 by spraying powder 13, which is a film-forming material, onto a workpiece 20 using the cold spray method, which is one of the thermal spraying methods. As shown in Figure 1, the film-forming apparatus 100 mainly comprises a spray gun 2, a gas supply unit, a powder supply unit, and a sensor.

[0011] The gas supply unit supplies working gas to the spray gun 2. The gas supply unit includes a storage unit 4, a gas supply pipeline 6, and a valve 7. The storage unit 4 stores the working gas. The gas supply pipeline 6 connects the storage unit 4 to the spray gun 2. The valve 7 is installed in the gas supply pipeline 6. By opening and closing the valve 7, the supply state of working gas from the storage unit 4 to the spray gun 2 can be controlled.

[0012] The sensor includes a pressure sensor 8 and a temperature sensor 9. The pressure sensor 8 is installed in the gas supply pipeline 6. The pressure sensor 8 is located in the gas supply pipeline 6 in the area opposite to the storage unit 4 as viewed from the valve 7. The pressure sensor 8 measures the pressure of the working gas supplied from the storage unit 4 to the gas supply pipeline 6. Any pressure gauge configuration can be used as the pressure sensor 8, but for example, a capacitive pressure gauge may be used.

[0013] The spray gun 2 mainly consists of a spray gun body 2a, a nozzle member 2b, and a heater 2c. A nozzle connection part 2d is installed at the first end, which is the front end of the spray gun body 2a. The nozzle member 2b is connected to the nozzle connection part 2d. A gas supply pipeline 6 is connected to the second end, which is the rear end of the spray gun body 2a. The gas supply pipeline 6 is connected to the storage unit 4 via a valve 7.

[0014] The heater 2c is located on the second end side of the spray gun body 2a. The working gas supplied to the inside of the spray gun body 2a from the second end is heated by the heater 2c. The working gas flows inside the spray gun body 2a from the second end to the first end. A temperature sensor 9 is connected to the first end side of the spray gun body 2a (near the nozzle connection part 2d). The temperature sensor 9 measures the temperature of the working gas flowing inside the spray gun body 2a. Any thermometer can be used as the temperature sensor 9, but for example, a thermocouple may be used.

[0015] The nozzle member 2b is the part of the film-forming apparatus 100 that sprays raw material powder and working gas toward the workpiece 20. The nozzle member 2b comprises a first nozzle portion 2ba and an attachment member 2bb. The attachment member 2bb includes a second nozzle portion 36 and a connecting portion 50. The first nozzle portion 2ba extends in a first direction. The cross-sectional area of ​​the internal flow path of the first nozzle portion 2ba gradually increases from the spray gun body portion 2a side toward the attachment member 2bb side. The second nozzle portion 36 is connected to the first nozzle portion 2ba via the connecting portion 50. In other words, the connecting portion 50 connects the first nozzle portion 2ba and the second nozzle portion 36. The second nozzle portion 36 extends in a direction intersecting the first direction. The cross-sectional area of ​​the internal flow path of the second nozzle portion 36 may gradually increase from the connecting portion 50 side toward the tip side, or it may remain constant. The connecting portion 50 is detachably connected to the first nozzle portion 2ba. In other words, the attachment member 2bb is detachably connected to the first nozzle portion 2ba. The connecting portion 50 is positioned opposite the first nozzle portion 2ba and includes a curved portion 10 that is convex toward the first nozzle portion 2ba. The specific configurations of the nozzle member 2b and the attachment member 2bb will be described later.

[0016] The powder supply unit supplies powder 13, which is the raw material for film formation, to the spray gun body 2a of the spray gun 2. The powder supply unit includes a powder storage unit 3, a powder supply pipeline 5, and a powder supply nozzle 11. The powder storage unit 3 stores the powder 13. The powder supply pipeline 5 connects the powder storage unit 3 and the spray gun body 2a. In the powder supply pipeline 5, the powder supply nozzle 11 is connected to the second end opposite to the first end connected to the powder storage unit 3. The powder supply nozzle 11 is connected to a powder supply hole (not shown) in the spray gun body 2a. As the powder supply pipeline 5, a general pipe or a hose made of any flexible material can be used.

[0017] <Configuration of Nozzle Member and Attachment Member> Figure 2 is a schematic partial cross-sectional view of the nozzle member in the film deposition apparatus shown in Figure 1. Figure 3 is a schematic exploded perspective view of the attachment member constituting the nozzle member shown in Figure 2. As shown in Figures 1 to 3, the attachment member 2bb includes a connecting portion 50 and a second nozzle portion 36. The connecting portion 50 mainly includes a main body portion 30, a first curved surface component 51, and a fixing member 38. The main body portion 30 has a first hole portion 31, a second hole portion 32, a bent hole portion 33, a first recess 34a, and a fixing hole 37. The first hole portion 31 is formed on the first surface (top surface) of the main body portion 30. The first hole portion 31 is connected to the first nozzle portion 2ba constituting the nozzle member 2b. In the attachment member 2bb shown in Figure 2, the end of the first nozzle portion 2ba is inserted and fixed inside the first hole portion 31.

[0018] The second hole 32 is formed to open into the second surface (first side surface) of the main body 30. The second surface extends in a different direction from the first surface. As shown in Figure 2, the direction in which the second hole 32 extends intersects with the direction in which the first hole 31 extends. The second nozzle portion 36 is connected to the second surface of the main body 30. The second hole 32 is connected to the second nozzle portion 36, which constitutes the nozzle member 2b, in a direction intersecting with the direction in which the first hole 31 extends. As shown in Figure 3, the main body 30 and the second nozzle portion 36 are integrally constructed.

[0019] The bent hole 33 connects the first hole 31 and the second hole 32. The bent hole 33 is formed inside the main body 30. The bent hole 33 is, for example, in the main body 30, an area within the inner diameter of the second hole 32, from the intersection point (bending point) of the central axis of the first hole 31 and the central axis of the second hole 32. The first recess 34a is continuous with the bent hole 33. The first recess 34a is formed in a position that overlaps with the first hole 31 when viewed from the extending direction of the first hole 31. The outer shape of the first curved surface component 51 is spherical. That is, the first curved surface component 51 is a sphere 35. The sphere 35 is arranged inside the first recess 34a, which is the recess 34. At least a part of the surface of the sphere 35, which is the first curved surface component 51, is exposed to the bent hole 33. The exposed surface portion of the sphere 35 is a curved portion 10 that is convex toward the first hole 31. Here, the radius of curvature of the curved portion 10 (for example, the radius of the sphere 35 as the first curved component 51) can be adjusted as appropriate. However, if the radius of curvature of the curved portion 10 is too large, even if the powder 13 collides with the curved portion 10, the direction of travel of the powder 13 will not be easily changed. This is because when the radius of curvature of the curved portion 10 is large, the curved portion 10 becomes closer to a plane.

[0020] The material constituting the sphere 35 may be, for example, a ceramic. Any material can be used as the material constituting the sphere 35, as long as it has a hardness higher than the hardness of the material constituting the powder 13 used as the raw material powder. The sphere 35 may be rotatable inside the first recess 34a, or it may be pressed against the inner wall of the first recess 34a and fixed in place.

[0021] The cross-sectional area of ​​the internal flow path in the first hole 31 may increase as it approaches the bent hole 33, or it may remain constant. The cross-sectional area of ​​the internal flow path in the bent hole 33 may increase as it approaches the second hole 32, or it may remain constant. The cross-sectional area of ​​the internal flow path in the second hole 32 may increase as it approaches the second nozzle portion 36, or it may remain constant.

[0022] The main body portion 30 has a rectangular parallelepiped shape. However, the shape of the main body portion 30 may be any other arbitrary shape. The main body portion 30 includes a first main body portion 30a and a second main body portion 30b as multiple parts. The first main body portion 30a and the second main body portion 30b are parts obtained by dividing the main body portion 30 by a dividing surface passing through a first hole portion 31, a second hole portion 32, a bent hole portion 33, and a first recess portion 34a. With the first main body portion 30a and the second main body portion 30b in contact at the dividing surface, fixing holes 37 are formed so as to penetrate the first main body portion 30a and the second main body portion 30b. Multiple fixing holes 37 are formed. With a sphere 35 placed inside the first recess portion 34a, the first main body portion 30a and the second main body portion 30b are in contact at the dividing surface. In this state, the fixing member 38 is inserted and fixed into the fixing hole 37, thereby fixing the first main body portion 30a and the second main body portion 30b together.

[0023] The main body 30 shown in Figure 3 is composed of two parts, but the number of parts constituting the main body 30 may be three or more. Also, the position of the dividing surface of the main body 30 may be any position other than the position shown in Figure 3. For example, the dividing surface may be set to pass through the first recess 34a, but not through the first hole 31, the second hole 32, and the bent hole 33.

[0024] Any material can be used for the main body 30, but for example, a metal such as stainless steel may be used.

[0025] By using such a nozzle member 2b, the powder 13 will collide with the surface of the sphere 35 of the connecting portion 50 (which is made of a material with a higher hardness than the material constituting the powder 13 and is a curved portion 10 that is convex toward the first nozzle portion 2ba), thereby changing its direction of travel. As a result, problems such as the part of the nozzle member 2b that the powder 13 collides with being easily damaged, and the speed of the powder 13 slowing down, can be suppressed.

[0026] <Configuration of Modified Nozzle Member> Figure 4 is a schematic partial cross-sectional view showing a first modified nozzle member in the film deposition apparatus shown in Figure 1. The nozzle member 2b shown in Figure 4 basically has the same configuration as the nozzle member 2b of the film deposition apparatus 100 shown in Figure 1, but the configuration of the connecting portion 50 is different from that of the nozzle member 2b shown in Figure 1. That is, in the nozzle member 2b shown in Figure 4, the inner circumferential surface facing the first curved surface component 51 in the bent hole portion 33 is a concave curved surface 33a. The shape of the concave curved surface 33a may follow the shape of the curved portion 10, which is the surface portion of the first curved surface component 51. In the cross-section shown in Figure 4, the radius of curvature of the curved portion 10 and the radius of curvature of the concave curved surface 33a are substantially the same. Note that the radius of curvature of the curved portion 10 and the radius of curvature of the concave curved surface 33a may be different from each other. For example, the radius of curvature of the curved surface 33a of the recess may be larger than the radius of curvature of the curved portion 10.

[0027] Figure 5 is a schematic partial cross-sectional view showing a second modified example of the nozzle member in the film deposition apparatus shown in Figure 1. The nozzle member 2b shown in Figure 5 basically has the same configuration as the nozzle member 2b of the film deposition apparatus 100 shown in Figure 1, but the configuration of the connecting portion 50 is different from that of the nozzle member 2b shown in Figure 1. That is, in the nozzle member 2b shown in Figure 5, the connecting portion 50 further includes a second curved surface component 52. The outer shape of the second curved surface component 52 is spherical. In other words, the second curved surface component 52 is a sphere 35. The main body portion 30 has a second recess 34b that is connected to the bent hole portion 33 and the second hole portion 32. The second recess 34b may be formed to be connected to the bent hole portion 33 or to be connected to the second hole portion 32.

[0028] The second curved component 52 is positioned inside the second recess 34b. At least a portion of the surface of the second curved component 52 is exposed to the bent hole 33 and the second hole 32 as a curved portion 10. Depending on the arrangement of the second recess 34b, a portion of the surface of the second curved component 52 may be exposed only to the bent hole 33 as a curved portion 10, or only to the second hole 32. In Figure 5, the second recess 34b is formed to connect to the first recess 34a. Therefore, the first curved component 51 and the second curved component 52 can come into contact with each other.

[0029] The nozzle member 2b shown in Figure 4 or Figure 5 can also provide the same effect as the nozzle member 2b shown in Figures 1 to 3.

[0030] <Method for manufacturing a film-deposited component using a film-depositing apparatus> Figure 6 is a flowchart showing a method for manufacturing a film-deposited component using the film-depositing apparatus shown in Figure 1. The method for manufacturing a film-deposited component shown in Figure 6 mainly comprises a preparation step (S100), a film deposition step (S200), and a post-processing step (S300).

[0031] The preparation step (S100) includes a step of preparing the powder to be used as the raw material for film formation. In addition, the preparation step (S100) includes preparations necessary for manufacturing the film-forming component, such as the preparation of the workpiece 20. A mask 23 having an opening pattern for defining the area on which the film 21 is formed is placed on the surface of the workpiece 20. Note that the mask 23 is not required.

[0032] Furthermore, the preparation step (S100) includes the step of preparing the film-forming apparatus 100. In this step, the powder 13 is loaded into the powder supply unit, and then the spray gun 2 is positioned facing the workpiece 20. Furthermore, operating gas is supplied to the spray gun 2.

[0033] Next, in the film formation process (S200), powder 13 is supplied to the spray gun 2. As a result, the powder 13, which is the raw material, is sprayed onto the surface of the workpiece 20 by the cold spray method. In this way, a film 21, which is a film made of the film-forming raw material, is formed on the surface of the workpiece 20.

[0034] In the post-processing step (S300), necessary processing is carried out on the workpiece 20 on which the coating 21 has been formed. In this way, the film-formed part 22 can be obtained.

[0035] <Operation> The nozzle member 2b according to the present disclosure is a nozzle member 2b that injects a powder 13 as a raw material powder and an operating gas in a film-forming apparatus 100, and comprises a first nozzle portion 2ba, a second nozzle portion 36, and a connecting portion 50. The first nozzle portion 2ba extends in a first direction. The second nozzle portion 36 extends in a direction intersecting the first direction. The connecting portion 50 connects the first nozzle portion 2ba and the second nozzle portion 36. The connecting portion 50 is positioned opposite the first nozzle portion 2ba and includes a curved portion 10 that is convex toward the first nozzle portion 2ba.

[0036] In this way, the powder 13 flowing from the first nozzle portion 2ba together with the working gas collides with the curved portion 10 and changes direction of travel. In this case, the decrease in the velocity of the powder 13 whose direction of travel has been changed can be suppressed more effectively than when the tip of the nozzle member 2b is simply bent. As a result, a nozzle member 2b is obtained that can perform film deposition on hard-to-reach areas such as the sides of the film-depositing component 22 while suppressing a decrease in film deposition efficiency.

[0037] In the nozzle member 2b described above, the connecting portion 50 and the second nozzle portion 36 are attachment members 2bb that are detachably connected to the first nozzle portion 2ba.

[0038] In this case, for example, by using the linear nozzle of an existing spray gun 2 as the first nozzle portion 2ba and connecting the attachment member 2bb to the tip of the nozzle, a nozzle member 2b according to this disclosure can be easily obtained.

[0039] In the nozzle member 2b described above, the connecting portion 50 includes a main body portion 30 and a first curved surface component 51. The main body portion 30 has a first hole portion 31, a second hole portion 32, a bent hole portion 33, and a first recess 34a as a recess 34. The first hole portion 31 is connected to the first nozzle portion 2ba that constitutes the nozzle member 2b. The second hole portion 32 is connected to the second nozzle portion 36 in a direction intersecting the direction in which the first hole portion 31 extends. The bent hole portion 33 connects the first hole portion 31 and the second hole portion 32. The first recess 34a is connected to the bent hole portion 33. The first curved surface component 51 is arranged inside the first recess 34a. At least a part of the surface of the first curved surface component 51 is exposed to the bent hole portion 33 as a curved surface portion 10.

[0040] In this case, if the curved portion 10 is damaged by the impact of the powder 13, the nozzle member 2b can be restored to a normal state by replacing the first curved component 51 instead of the entire connecting portion 50.

[0041] In the nozzle member 2b described above, the outer shape of the first curved component 51 is spherical. In this case, the entire surface of the first curved component 51 can be used as the curved portion 10. For example, consider a case where a part of the surface of the first curved component 51 is used as the curved portion 10, and that part of the surface is damaged. In this case, the first curved component 51 can be rotated to expose another part of the surface of the first curved component 51 to the bent hole 33, thereby creating a new curved portion 10.

[0042] In the nozzle member 2b described above, the connecting portion 50 further includes a second curved surface component 52. The main body portion 30 has a second recess 34b that is connected to at least one of the bent hole portion 33 and the second hole portion 32. The second curved surface component 52 is positioned inside the second recess 34b. At least a portion of the surface of the second curved surface component 52 is exposed to the bent hole portion 33 or the second hole portion 32 as a curved surface portion 10.

[0043] In this case, the curved portion 10 can be constructed using the first curved component 51 and the second curved component 52. Therefore, the shape of the curved portion 10 can be easily changed by appropriately selecting the size and shape of the first curved component 51 and the second curved component 52.

[0044] In the above-mentioned nozzle member 2b, an inner peripheral surface facing the first curved surface component 51 in the bent hole portion 33 is formed as a concave curved surface 33a.

[0045] In this case, in a region of the bent hole portion 33 facing the first curved surface component 51, it is possible to prevent the cross-sectional area of the internal flow path from being reduced due to the curved surface portion 10. As a result, the cross-sectional area of the internal flow path can be maintained substantially constant throughout, for example, the entire bent hole portion 33.

[0046] In the above-mentioned nozzle member 2b, the hardness of a material forming the curved surface portion 10 is higher than the hardness of the powder 13 serving as a raw material powder.

[0047] In this case, the path of the powder 13 that has collided with the curved surface portion 10 can be reliably changed. Furthermore, damage to the curved surface portion 10 caused by collision of the powder 13 can be suppressed.

[0048] An attachment member 2bb according to the present disclosure is an attachment member 2bb that constitutes a nozzle member 2b for injecting powder 13 as a raw material powder and a working gas in a film forming apparatus 100, and comprises a main body portion 30 and a first curved surface component 51. A first hole portion 31, a second hole portion 32, a bent hole portion 33, and a first recess 34a are formed in the main body portion 30. The first hole portion 31 is connected to a first nozzle portion 2ba that constitutes the nozzle member 2b. The second hole portion 32 is connected to a second nozzle portion 36 that constitutes the nozzle member 2b in a direction intersecting a direction in which the first hole portion 31 extends. The bent hole portion 33 connects the first hole portion 31 and the second hole portion 32. The first recess 34a is continuous with the bent hole portion 33. The first curved surface component 51 is disposed inside the first recess 34a. At least a part of a surface of the first curved surface component 51 is exposed to the bent hole portion 33 as the curved surface portion 10 convex toward the first hole portion 31.

[0049] According to this configuration, by connecting the attachment member 2bb to a linear nozzle, the nozzle member 2b capable of forming a film on a hard-to-access region such as a side surface of a film forming component 22 while suppressing a decrease in film forming efficiency can be obtained.

[0050] The film deposition apparatus 100 according to this disclosure includes the nozzle member 2b. In this way, a film deposition apparatus 100 can be obtained that can perform film deposition using a nozzle member 2b inclined at the tip end (second nozzle portion 36) with respect to the base end (first nozzle portion 2ba), i.e., a bent nozzle member 2b.

[0051] A method for manufacturing a film-forming part according to this disclosure is a method for manufacturing a film-forming part using the above-described film-forming apparatus 100, comprising a step of preparing raw material powder to be used as a film-forming raw material (S100) and a film-forming step (S200). In the film-forming step (S200), an operating gas and powder 13, which is the raw material powder, are supplied to the spray gun 2, and the powder 13 is sprayed onto the surface of the workpiece 20 by a cold spray method to form a film on the surface of the workpiece 20. In this way, since the film is formed using the film-forming apparatus 100 according to this disclosure, it is possible to form a film in areas of the workpiece 20 that are difficult to access while suppressing problems such as a decrease in film-forming efficiency.

[0052] The film-deposited component 22 according to this disclosure is manufactured by the manufacturing method of the film-deposited component described above. In this case, since the film-depositing apparatus 100 according to this disclosure is used, a film-deposited component 22 can be obtained in which the coating 21 is reliably formed even in areas that are difficult to access.

[0053] (Embodiment 2) <Configuration of the film deposition apparatus> Figure 7 is a schematic partial cross-sectional view of the nozzle member in the film deposition apparatus according to Embodiment 2. Figure 8 is a schematic partial front view of the nozzle member shown in Figure 7. Figure 8 shows the nozzle member 2b viewed from the direction along the arrow 60 in Figure 7. The film deposition apparatus equipped with the nozzle member 2b shown in Figures 7 and 8 basically has the same configuration as the film deposition apparatus 100 shown in Figure 1 and can obtain the same effects, but the configuration of the nozzle member 2b is different from that of the film deposition apparatus shown in Figure 1. That is, in the nozzle member 2b shown in Figures 7 and 8, the outer shape of the first curved surface component 51 is cylindrical. In other words, the first curved surface component 51 is a cylindrical member 40. Also, the shape of the first recess 44a as the recess 34 is a cylindrical shape that follows the outer shape of the first curved surface component 51.

[0054] As shown in Figures 7 and 8, the central axis of the cylindrical first curved component 51 is aligned with a direction that intersects (specifically, is perpendicular to) the extending direction of the first hole 31 to which the first nozzle portion 2ba is connected and the extending direction of the second hole 32. In other words, the central axis of the first curved component 51 extends along the left-right direction (horizontal direction) in Figure 8.

[0055] In this case, the curved surface (the curved side surface of the cylindrical member 40) can be made to face both the first hole portion 31 and the second hole portion 32. As a result, the powder 13 (see Figure 1) flowing from the first nozzle portion 2ba toward the cylindrical member 40 collides with the curved portion 10 (a part of the curved side surface of the cylindrical member 40). As a result, the direction of travel of the powder 13 is changed toward the direction of the second hole portion 32.

[0056] <Configuration of Modified Example> Figure 9 is a schematic partial cross-sectional view showing a modified example of the nozzle member shown in Figure 7. The nozzle member 2b shown in Figure 9 basically has the same configuration as the nozzle member 2b of the film deposition apparatus 100 shown in Figures 7 and 8, but the configuration of the connecting portion 50 is different from that of the nozzle member 2b shown in Figures 7 and 8. That is, in the nozzle member 2b shown in Figure 9, the connecting portion 50 further includes a second curved surface component 52. The outer shape of the second curved surface component 52 is cylindrical. In other words, the second curved surface component 52 is a cylindrical member 40. The main body portion 30 has a second recess 44b that is connected to the bent hole portion 33 and the second hole portion 32. The second recess 44b may be formed to be connected to the bent hole portion 33, or to be formed to be connected to the second hole portion 32.

[0057] The second curved component 52 is positioned inside the second recess 44b. At least a portion of the surface of the second curved component 52 is exposed to the bent hole 33 and the second hole 32 as a curved portion 10. Depending on the arrangement of the second recess 44b, a portion of the surface of the second curved component 52 may be exposed only to the bent hole 33 as a curved portion 10, or only to the second hole 32. In Figure 9, the second recess 44b is formed to connect to the first recess 44a. Therefore, the first curved component 51 and the second curved component 52 can come into contact with each other. The nozzle member 2b shown in Figure 9 can also provide the same effects as the nozzle member 2b shown in Figures 7 and 8.

[0058] <Function> In the nozzle member 2b described above, the outer shape of the first curved surface component 51 is cylindrical. In this case, the bent side surface of the cylindrical shape of the first curved surface component 51 can be used as the curved portion 10.

[0059] (Embodiment 3) <Configuration of the film deposition apparatus> Figure 10 is a schematic diagram showing a nozzle member in a film deposition apparatus according to Embodiment 3. The film deposition apparatus equipped with the nozzle member 2b shown in Figure 10 basically has the same configuration as the film deposition apparatus 100 shown in Figure 1 and can obtain the same effects, but the configuration of the nozzle member 2b is different from that of the film deposition apparatus shown in Figure 1. That is, in the nozzle member 2b shown in Figure 10, the first nozzle portion 2ba, the second nozzle portion 36 and the connecting portion 50 are integrally configured. The nozzle member 2b shown in Figure 10 is configured by bending a single nozzle at the bent portion 2bf which serves as the connecting portion 50. The bent portion 2bf has a curved portion 10 that is convex toward the first nozzle portion 2ba. The curved portion 10 is formed by deforming the outer wall of the bent portion 2bf toward the inside of the bent portion 2bf.

[0060] <Operation> In the above-described film-forming apparatus, the nozzle member 2b is integrally composed of a first nozzle portion 2ba, a second nozzle portion 36, and a bent portion 2bf as a connecting portion 50.

[0061] In this case, the number of parts in the nozzle member 2b can be reduced compared to the configuration using a connecting part 50 that is separate from the first nozzle part 2ba, as shown in Figures 1 to 3. As a result, the manufacturing cost of the nozzle member 2b can be reduced. When the first nozzle part 2ba, the second nozzle part 36, and the connecting part 50 are integrally configured as described above, the connecting part 50 is the bent part 2bf that connects the first nozzle part 2ba and the second nozzle part 36, as shown in Figure 10. The bent part 2bf is, for example, in the nozzle member 2b, the region within twice the inner diameter of the second nozzle part 36 from the intersection point (bending point) of the central axis of the first nozzle part 2ba and the central axis of the second nozzle part 36.

[0062] The embodiments disclosed herein should be considered in all respects to be illustrative and not restrictive. At least two of the embodiments disclosed herein can be combined, as long as they do not contradict each other. The basic scope of this disclosure is indicated by the claims rather than the foregoing description, and all modifications within the meaning and scope of the claims are intended to be included.

[0063] 2 Spray gun, 2a Spray gun body, 2b Nozzle member, 2ba First nozzle section, 2bb Attachment member, 2bf Bent section, 2c Heater, 2d Nozzle connection section, 3 Powder storage section, 4 Storage section, 5 Powder supply pipeline, 6 Gas supply pipeline, 7 Valve, 8 Pressure sensor, 9 Temperature sensor, 10 Curved section, 11 Powder supply nozzle, 13 Powder, 20 Workpiece, 21 Coating, 22 Film-forming part, 23 Mask, 30 Body section, 30a First body section, 30b Second body section, 31 First hole section, 32 Second hole section, 33 Bent hole section, 33a Curved surface, 34 Recess, 34a, 44a First recess, 34b, 44b Second recess, 35 Sphere, 36 Second nozzle section, 37 Fixing hole, 38 Fixing member, 40 cylindrical member, 50 connecting part, 51 first curved surface component, 52 second curved surface component, 60 arrow, 100 film deposition apparatus.

Claims

1. A nozzle member for injecting raw material powder and working gas in a film-forming apparatus, comprising: a first nozzle portion extending in a first direction; a second nozzle portion extending in a direction intersecting the first direction; and a connecting portion connecting the first nozzle portion and the second nozzle portion, wherein the connecting portion is positioned opposite the first nozzle portion and includes a curved portion that is convex toward the first nozzle portion.

2. The nozzle member according to claim 1, wherein the connecting portion and the second nozzle portion are attachment members that are detachably connected to the first nozzle portion.

3. The nozzle member according to claim 1 or 2, wherein the connecting portion includes a main body and a first curved surface component, the main body has a first hole connected to the first nozzle portion constituting the nozzle member, a second hole connected to the second nozzle portion in a direction intersecting the direction in which the first hole extends, a bent hole connecting the first hole and the second hole, and a first recess connected to the bent hole, the first curved surface component is disposed inside the first recess, and at least a portion of the surface of the first curved surface component is exposed to the bent hole as the curved portion.

4. The nozzle member according to claim 3, wherein the outer shape of the first curved component is spherical or cylindrical.

5. The nozzle member according to claim 3 or 4, wherein the connecting portion further includes a second curved surface component, the main body portion has a second recess formed therein that is connected to at least one of the bending hole portion and the second hole portion, the second curved surface component is disposed inside the second recess, and at least a portion of the surface of the second curved surface component is exposed to the bending hole portion or the second hole portion as the curved surface portion.

6. The nozzle member according to any one of claims 3 to 5, wherein the inner circumferential surface facing the first curved surface component in the bent hole portion is a concave curved surface.

7. The nozzle member according to any one of claims 1 to 6, wherein the hardness of the material constituting the curved portion is higher than the hardness of the raw material powder.

8. An attachment member comprising a nozzle member for injecting raw material powder and working gas in a film-forming apparatus, the attachment member comprising a main body and a first curved surface component, wherein the main body has a first hole connected to a first nozzle portion constituting the nozzle member, a second hole connected to a second nozzle portion constituting the nozzle member in a direction intersecting the direction in which the first hole extends, a bent hole connecting the first hole and the second hole, and a first recess connected to the bent hole, the first curved surface component being disposed inside the first recess, and at least a portion of the surface of the first curved surface component being exposed to the bent hole as a curved portion convex toward the first hole.

9. A film deposition apparatus comprising a nozzle member according to any one of claims 1 to 7.

10. A method for manufacturing a film-forming part using the film-forming apparatus described in claim 9, comprising the steps of: preparing the raw material powder to be used as a film-forming raw material; and supplying the operating gas and the raw material powder to a spray gun including the nozzle member, and spraying the raw material powder onto the surface of a workpiece by a cold spray method to form a film on the surface of the workpiece.

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