Imprint template and imprint apparatus

Abstract

An imprint template and an imprint apparatus. The imprint template comprises a first template body, which has a first imprint functional surface and a first conformal structure arranged on the first imprint functional surface, wherein the first imprint functional surface is configured to press against a first imprint substrate, and the first conformal structure is configured to cause the first imprint substrate to deform so as to conform to the first imprint functional surface, thereby forming a second imprint functional surface. By means of the arrangement of the first conformal structure on the first imprint functional surface, the first imprint substrate can be made to closely conform to the first imprint functional surface of the first template body, thereby reducing the deviation between a pattern obtained by imprinting and an originally designed pattern, and thus improving the quality of a liquid crystal device.

Description

Imprinting templates and imprinting equipment Technical Field

[0001] This application belongs to the field of embossing technology, and more specifically, relates to an embossing template and embossing equipment. Background Technology

[0002] In the manufacturing process of liquid crystal devices, the plasticity of the liquid crystal substrate can be utilized to assist in the manufacturing of the device using an imprinting process. However, in the actual application of imprinting technology, it is difficult to achieve a completely tight fit between the substrate and the imprinting template surface. This results in a certain degree of deviation between the final imprinted pattern and the originally designed imprinting template, leading to a difference between the final optical structure and the originally expected structure, which seriously affects the quality of the liquid crystal device. Summary of the Invention

[0003] The purpose of this application is to provide an imprint template and an imprinting device to solve the technical problem in the prior art where the optical structure obtained by imprinting differs from the originally designed and expected structure.

[0004] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0005] In a first aspect, an embossing template is provided, including a first template body, the first template body having a first embossing functional surface and a first conformal structure disposed on the first embossing functional surface, the first embossing functional surface being used to compress a first embossing substrate, the first conformal structure being used to cause the first embossing substrate to deform to form a second embossing functional surface, the second embossing functional surface being in contact with the first embossing functional surface.

[0006] In some embodiments, the first conformal structure includes a first protrusion protruding from the first embossing functional surface, and / or a first recess disposed from the first embossing functional surface.

[0007] Wherein, the first protrusion is used to insert into the first embossing substrate to deform the first embossing substrate;

[0008] The first recess is used to form a second protrusion on the first imprinting substrate that protrudes from the second imprinting functional surface.

[0009] In some embodiments, the first template body further has a first side surface for pressing the first imprint substrate in the direction of pressing the first imprint substrate along the first template body, the maximum distance between the first side surface and the first imprint functional surface is L1, the distance between the first side surface and the bottom surface of the first recess is L2, and L2≥L1.

[0010] In some embodiments, the first template body further has a second side facing away from the first imprinting substrate. Along the direction in which the first template body presses the first imprinting substrate, the maximum distance between the second side and the first imprinting functional surface is L3, and the distance between the second side and the top surface of the first protrusion is L4, where L4≥L3.

[0011] In some embodiments, a plurality of first recesses are provided, and the plurality of first recesses are spaced apart.

[0012] The first protrusion is provided in multiple ways, and the multiple first protrusions are spaced apart.

[0013] In some embodiments, at least a portion of the bottom surfaces of the first recess are located on the same plane; or, at least a portion of the bottom surfaces of the first recess are located on the same curved surface.

[0014] At least a portion of the top surfaces of the first protrusions are located on the same plane; or, at least a portion of the top surfaces of the first protrusions are located on the same curved surface.

[0015] In some embodiments, the first protrusion and the first recess are alternately spaced along a first preset direction.

[0016] In some embodiments, the cross-sectional shape of the first recess is annular, circular, rectangular, triangular, arc-shaped, or elliptical;

[0017] The cross-sectional shape of the first protrusion is annular, circular, rectangular, triangular, arc-shaped, or elliptical.

[0018] In some embodiments, the first imprinted functional surface includes a first optical functional area, which is used to be bonded to the first imprinted substrate to form an optical structure on the first imprinted substrate.

[0019] At least a portion of the first conformal structure is located within the first optical functional region;

[0020] Alternatively, the first conformal structure may be located outside the first optical functional region.

[0021] In some embodiments, the embossing template further includes a second template body, the second template body having a first bearing surface facing the first embossing functional surface, the first bearing surface being used to bear the first embossing substrate, and the first template body and the second template body being able to approach each other to compress the first embossing substrate.

[0022] In some embodiments, the first bearing surface and the first conformal structure are spaced apart.

[0023] In some embodiments, the embossing template further includes a third template body, the third template body being provided with a second bearing surface, the second bearing surface being used to bear a second embossing substrate, the first conformal structure being used to deform the first embossing substrate to form a second conformal structure, the second template body and the third template body being able to approach each other so that the second conformal structure squeezes the second embossing substrate, so that the second embossing substrate is deformed to fit against the second embossing functional surface to form a third embossing functional surface.

[0024] Secondly, an embossing device is provided, including a driving mechanism and the aforementioned embossing template, wherein a first template body of the embossing template is mounted on the driving mechanism.

[0025] The beneficial effects of the imprinting template provided in this application are as follows: a first conformal structure is provided on the first imprinting functional surface. The first conformal structure can cause the first imprinting substrate to deform so that the first imprinting substrate can deform to adapt to the first imprinting functional surface, thereby forming a second imprinting functional surface that fits with the first imprinting functional surface. In other words, the first imprinting substrate can fit tightly with the first imprinting functional surface of the first template body, reducing the deviation between the imprinted pattern and the originally designed pattern, thereby reducing the difference between the optical structure of the final liquid crystal device and the originally designed expected structure, that is, reducing the distortion of the optical structure of the liquid crystal device, which helps to improve the quality of the liquid crystal device. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 is a schematic diagram of the first template body provided in an embodiment of this application;

[0028] Figure 2 is a schematic diagram of the first template body, the first imprinting substrate, and the second template body provided in an embodiment of this application;

[0029] Figure 3 is a schematic diagram of the first imprinting substrate and the second template body provided in the embodiment of this application;

[0030] Figure 4 is a schematic diagram of the liquid crystal device provided in an embodiment of this application;

[0031] Figure 5 is a schematic diagram of the first imprinting substrate, the second template body, the second imprinting substrate, and the third template body provided in the embodiments of this application;

[0032] Figure 6 is a schematic diagram of the second imprint substrate shown in Figure 5;

[0033] Figure 7 is a schematic diagram of the main body of the first template shown in Figure 1;

[0034] Figure 8 is a schematic diagram of the first template body provided in another embodiment of this application;

[0035] Figure 9 is a schematic diagram of the main body of the first template shown in Figure 8;

[0036] Figure 10 is a schematic diagram of the first template body provided in another embodiment of this application;

[0037] Figure 11 is a schematic diagram of the first template body provided in another embodiment of this application;

[0038] Figure 12 is a schematic diagram of the first template body provided in another embodiment of this application;

[0039] Figure 13 is a schematic diagram of the first template body provided in another embodiment of this application;

[0040] Figure 14 is a schematic diagram of the first template body provided in another embodiment of this application.

[0041] In the figures, the reference numerals are as follows: 100, liquid crystal device; 10, first substrate; 101, optical structure; 20, second substrate; 301, first alignment layer; 301, second alignment layer; 401, first electrode layer; 402, second electrode layer; 50, frame adhesive; 60, liquid crystal; 1, first template body; 11, first imprinting functional surface; 12, first conformal structure; 121, first protrusion; 122, first concave portion; 13, first side surface; 14, second side surface; 2, second template body; 21, first bearing surface; 3, third template body; 31, second bearing surface; 4, first imprinting substrate; 41, second imprinting functional surface; 42, second conformal structure; 421, second protrusion; 422, second concave portion; 5, second imprinting substrate; 51, third imprinting functional surface; 52, third conformal structure; 521, third protrusion; 522, third concave portion. Detailed Implementation

[0042] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0043] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0044] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0045] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, "multiple sets" means two or more sets, "multiple pieces" means two or more pieces, and "several" means one or more, unless otherwise explicitly specified.

[0046] A liquid crystal device (LCD) is an electronic device that utilizes the photoelectric effect of liquid crystals to achieve specific functions. Liquid crystals are a state of matter between solid and liquid, possessing unique optical and electrical properties.

[0047] The most common application of liquid crystal devices is in the display field, such as liquid crystal displays (LCDs). In LCDs, liquid crystal molecules can change their alignment under the influence of an electric field, thereby controlling the transmission or blocking of light. By precisely controlling the state of the liquid crystal molecules at each pixel, different colors and brightness can be displayed, thus forming images or text.

[0048] Besides display applications, liquid crystal devices are also widely used in optical modulation, optical switches, and sensors. For example, in optical communication, liquid crystal modulators can be used to modulate optical signals; in some optical instruments, liquid crystal switches can quickly control the on / off state of optical paths. In general, liquid crystal devices occupy an important position in modern electronic and optical technologies due to their advantages such as low power consumption, small size, and ease of integration.

[0049] In the manufacturing process of liquid crystal devices (LCDs), the plasticity of the LCD substrate can be utilized to fabricate the optical structure of the LCD using an imprinting process. First, a suitable imprinting template is selected to imprint the substrate, thereby shaping an optical structure such as a Fresnel structure. Then, functional layers such as alignment layers and electrode layers are formed on top of the formed Fresnel structure or other optical structures. After the functional layers are completed, the two substrates are connected to form a liquid crystal cell. Liquid crystal is then filled into the liquid crystal cell using a drop-in method or vacuum crystal filling, ultimately producing a complete liquid crystal device.

[0050] However, despite striving for precision in the design phase of the imprinting template, during the actual imprinting process, the substrate and the imprinting surface of the template are difficult to completely and tightly adhere, resulting in a certain degree of deviation between the final imprinted pattern and the initially designed template. This deviation leads to a difference between the final optical structure and the originally intended structure. This deviation in the optical structure will undoubtedly negatively impact the optical performance of the liquid crystal device, potentially causing a series of problems such as reduced display clarity, inaccurate color reproduction, and narrowed viewing angles, severely affecting the quality of the liquid crystal device.

[0051] Based on this, the present application provides an imprint template and an imprinting device. The imprint template includes a first template body, the first template body has a first imprinting functional surface and a first conformal structure disposed on the first imprinting functional surface. The first imprinting functional surface is used to squeeze a first imprinting substrate, and the first conformal structure is used to cause the first imprinting substrate to deform to form a second imprinting functional surface. The second imprinting functional surface is in contact with the first imprinting functional surface.

[0052] The imprinting template provided in this application has a first conformal structure on the first imprinting functional surface. The first conformal structure can cause the first imprinting substrate to deform so that the first imprinting substrate can deform to adapt to the first imprinting functional surface, thereby forming a second imprinting functional surface that fits with the first imprinting functional surface. In other words, the first imprinting substrate can fit tightly with the first imprinting functional surface of the first template body, reducing the deviation between the imprinted pattern and the originally designed pattern, thereby reducing the difference between the optical structure of the final liquid crystal device and the originally designed expected structure, that is, reducing the distortion of the optical structure of the liquid crystal device, which helps to improve the quality of the liquid crystal device.

[0053] Referring to Figures 1 to 3, the embossing template provided in this application includes a first template body 1. The first template body 1 has a first embossing functional surface 11 and a first conformal structure 12 disposed on the first embossing functional surface 11. The first embossing functional surface 11 is used to press a first embossing substrate 4, and the first conformal structure 12 is used to cause the first embossing substrate 4 to deform to form a second embossing functional surface 41. The second embossing functional surface 41 is attached to the first embossing functional surface 11.

[0054] It should be noted that the impression template can be applied to the impression equipment. The first template body 1 of the impression template can be installed on the impression equipment and connected to the drive mechanism of the impression equipment so that the first template body 1 can move to squeeze the first impression substrate 4.

[0055] It should be noted that in some embodiments, the first imprinting substrate 4 may be flexible, and the first imprinting substrate 4 may be composed of a semi-cured colloid. After the first imprinting substrate 4 is squeezed and deformed, the first imprinting substrate 4 may be cured so that the shape of the first imprinting substrate 4 can remain unchanged. For example, the colloid can be formed by semi-curing the adhesive. In some embodiments, the adhesive can be a thermosetting adhesive, such as epoxy resin, polyester resin, vinyl ester, bismaleimide, thermosetting polyimide, cyanate ester, etc. In some embodiments, the adhesive can be a light-curing adhesive, such as acrylate adhesive, UV-curing adhesive, etc. In other embodiments, the adhesive can also be a moisture-curing adhesive, such as cyanoacrylate adhesive, PUR (polyurethane reactive, moisture-curing reactive polyurethane hot melt adhesive), etc. In some embodiments, the first imprinting substrate 4 can be made of a thermoplastic material, such as polyethylene terephthalate (PET), polycarbonate (PC), triacetyl cellulose (TAC), etc.

[0056] It should be noted that the first imprinting functional surface 11 and the first conformal structure 12 of the first template body 1 can be formed by micro-nano processing technologies such as photolithography, etching, nanoimprinting, and 3D printing.

[0057] It should be noted that, referring to FIG4, the liquid crystal device 100 includes a first substrate 10 and a second substrate 20 stacked and spaced apart. The edges of the first substrate 10 and the second substrate 20 are connected by a frame adhesive 50. An optical structure 101 is provided on the side of the first substrate 10 facing the second substrate 20. The optical structure 101 can be a structure that realizes certain physical properties such as light, electricity, magnetism, force, etc., for example, it can be a Fresnel structure, a microlens array, etc. A first electrode layer 401 and a first alignment layer 301 are stacked sequentially on the side of the first substrate 10 facing the second substrate 20. A second electrode layer 402 and a second alignment layer 301 are stacked sequentially on the side of the second substrate 20 facing the first substrate 10. Liquid crystal 60 is also filled between the first substrate 10 and the second substrate 20. In some embodiments, the first template body 1 can be used to process the liquid crystal device 100. In this case, the first imprinting substrate 4 can be the structure of the liquid crystal device 100, so that the imprinting template performs imprinting processing on the first imprinting substrate 4. The second imprinting functional surface 41 formed on the first imprinting substrate 4 can be used to form the optical structure 101 of the liquid crystal device 100, thereby realizing the optical processing of light by the liquid crystal device 100. In other embodiments, the first template body 1 may not be directly used to process the liquid crystal device 100. The first template body 1 can be used to produce the imprinting mold of the liquid crystal device 100. In this case, the first imprinting substrate 4 may not be the structure of the liquid crystal device 100. The first imprinting substrate 4 can be used to imprint other imprinting substrates to obtain imprinting molds for mass production of liquid crystal devices 100.

[0058] It should be noted that the first conformal structure 12 can cause the first imprinting substrate 4 to deform so that the first imprinting substrate 4 can fit with the first imprinting functional surface 11. For example, the first conformal structure 12 can be a first protrusion 121 protruding from the first imprinting functional surface 11. When the first imprinting functional surface 11 presses the first imprinting substrate 4, the first protrusion 121 can be inserted into the first imprinting substrate 4, thereby pressing the first imprinting substrate 4 and causing it to deform to fill the gap between it and the first imprinting functional surface 11. The first conformal structure 12 can also be a first recess 122 recessed from the first imprinting functional surface 11. When the first imprinting functional surface 11 presses the first imprinting substrate 4, a portion of the first imprinting substrate 4 can enter the first recess 122 to reduce the resistance of the first imprinting substrate 4 deforming to fit with the first imprinting functional surface 11. In other embodiments, the first conformal structure 12 can also be other structures disposed on the first imprinting functional surface 11.

[0059] It should be noted that when the first imprinting substrate 4 is the structure of the liquid crystal device 100, the size and position of the first conformal structure 12 can be designed so that the imprinting pattern generated by the first conformal structure 12 on the first imprinting substrate 4 will not affect the optical function of the optical structure 101 of the liquid crystal device 100.

[0060] A first conformal structure 12 is provided on the first imprinting functional surface 11. The first conformal structure 12 can cause the first imprinting substrate 4 to deform so that the first imprinting substrate 4 can deform to adapt to the first imprinting functional surface 11, thereby forming a second imprinting functional surface 41 that fits with the first imprinting functional surface 11. In other words, the first imprinting substrate 4 can fit tightly with the first imprinting functional surface 11 of the first template body 1, reducing the deviation between the imprinted pattern and the originally designed pattern, thereby reducing the difference between the optical structure 101 of the final liquid crystal device 100 and the originally designed structure, that is, reducing the distortion of the optical structure 101 of the liquid crystal device 100, which helps to improve the quality of the liquid crystal device 100.

[0061] In some embodiments, the first conformal structure 12 includes a first protrusion 121 protruding from the first imprinting functional surface 11, the first protrusion 121 being inserted into the first imprinting substrate 4 to deform the first imprinting substrate 4.

[0062] When the first imprinting functional surface 11 presses the first imprinting base 4, the first protrusion 121 can be inserted into the first imprinting base 4 and press the first imprinting base 4 to cause the first imprinting base 4 to deform toward the side of the first template body 1, so that the first imprinting base 4 can be deformed to fit with the first imprinting functional surface 11, thereby ensuring the molding quality of the first imprinting base 4 after imprinting.

[0063] In some embodiments, a first template body 1 is used to press a first imprinting substrate 4. After deformation, the first imprinting substrate 4 can fit with the first imprinting functional surface 11 to form a second imprinting functional surface 41. In addition, the second imprinting functional surface 41 can form a second conformal structure 42 that matches the first conformal structure 12. For example, when the first imprinting functional surface 11 presses the first imprinting substrate 4, the first protrusion 121 can be inserted into the first imprinting substrate 4, and a second recess 422 can be formed in the first imprinting substrate 4. The second recess 422 can be part of the second conformal structure 42.

[0064] When designing the first template body 1, a first protrusion 121 can be set at an appropriate position on the first imprinting functional surface 11, and the size of the first protrusion 121 can be rationally designed. In this way, when the first imprinting substrate 4 is the structure of the liquid crystal device 100, the second concave portion 422 formed by the first protrusion 121 imprinting the first imprinting substrate 4 will not affect the optical function of the optical structure 101 of the liquid crystal device 100. When the first imprinting substrate 4 is used to imprint other imprinting substrates to obtain imprinting molds for mass production of liquid crystal devices 100, these imprinting molds can obtain liquid crystal devices 100 with good quality and high forming precision through imprinting.

[0065] In some embodiments, the first conformal structure 12 includes a first recess 122 recessed from the first imprinting functional surface 11, the first recess 122 being used to form a second protrusion 421 protruding from the second imprinting functional surface of the first imprinting substrate 4.

[0066] When the first imprinting functional surface 11 presses against the first imprinting substrate 4, a portion of the first imprinting substrate 4 can deform to enter the first recess 122, thereby reducing the resistance to the deformation of the first imprinting substrate 4 to fit against the first imprinting functional surface 11. Furthermore, the second imprinting functional surface 41 can form a second conformal structure 42 that matches the first conformal structure 12. For example, when the first imprinting functional surface 11 presses against the first imprinting substrate 4, the deformed first imprinting substrate 4 can enter the first recess 122, thereby forming a second protrusion 421 protruding from the second imprinting functional surface 41. 421 can be part of the second conformal structure 42. Referring to Figures 5 and 6, the first imprinting substrate 4 can imprint the flexible second imprinting substrate 5 so that the second imprinting substrate 5 can be deformed to fit the second imprinting functional surface 41 of the first imprinting substrate 4, thereby obtaining a third imprinting functional surface 51 with the same size as the first imprinting functional surface 11, so as to mass-produce the imprinting mold of the liquid crystal device 100. At this time, the second protrusion 421 can squeeze the second imprinting substrate 5, thus improving the accuracy of the obtained imprinting mold and thereby improving the manufacturing accuracy of the liquid crystal device 100.

[0067] It should be noted that in some embodiments, the first conformal structure 12 may include only the first protrusion 121 or only the first recess 122. In other embodiments, the first conformal structure 12 may include both the first protrusion 121 and the first recess 122.

[0068] In some embodiments, the first template body 1 further has a first side surface 13 facing the first imprinting substrate 4. Along the direction in which the first template body 1 presses the first imprinting substrate 4, the maximum distance between the first side surface 13 and the first imprinting functional surface 11 is L1, and the distance between the first side surface 13 and the bottom surface of the first recess 122 is L2, where L2≥L1.

[0069] It should be noted that the direction in which the first template body 1 presses the first imprinting base 4 can be parallel to the Z-axis direction shown in the figure. L1 is the maximum distance between the first side surface 13 and the first imprinting functional surface 11 along the Z-axis direction shown in the figure, and L2 is the distance between the first side surface 13 and the bottom surface of the first recess 122 along the Z-axis direction shown in the figure.

[0070] By setting the direction along which the first template body 1 presses the first imprinting base 4, the distance between the first side 13 and the bottom surface of the first recess 122 is not less than the maximum distance between the first side 13 and the first imprinting functional surface 11. When the first template body 1 continuously presses the first imprinting base 4, the deformed first imprinting base 4 can continuously fill the first recess 122, so that the first imprinting base 4 can be deformed to fit with the first imprinting functional surface 11, thereby obtaining a second imprinting functional surface 41 that is highly fitted with the first imprinting functional surface 11, thereby ensuring the molding quality of the first imprinting base 4.

[0071] In some embodiments, the first template body 1 also has a second side surface 14 for separating from the first imprinting substrate 4. Along the direction in which the first template body 1 presses the first imprinting substrate 4, the maximum distance between the second side surface 14 and the first imprinting functional surface 11 is L3, and the distance between the second side surface 14 and the top surface of the first protrusion 121 is L4, where L4≥L3.

[0072] It should be noted that the first protrusion 121 protrudes from the first imprinting functional surface 11, and the top surface of the first protrusion 121 is the side of the first protrusion 121 that faces away from the first imprinting functional surface 11.

[0073] By setting the direction along which the first template body 1 presses the first imprinting base 4, the distance between the second side 14 and the top surface of the first protrusion 121 is not less than the maximum distance between the second side 14 and the first imprinting functional surface 11. When the first template body 1 continuously presses the first imprinting base 4, the first protrusion 121 can be continuously inserted into the first imprinting base 4 to cause the first imprinting base 4 to deform, so that the first imprinting base 4 can be deformed to fit with the first imprinting functional surface 11, thereby obtaining a second imprinting functional surface 41 that is highly fitted with the first imprinting functional surface 11, thereby ensuring the molding quality of the first imprinting base 4.

[0074] In some embodiments, along the direction in which the first template body 1 presses the first imprinting substrate 4, the first imprinting functional surface 11 is located between the top surface of the first protrusion 121 and the bottom surface of the first recess 122. Thus, during the process of the first template body 1 pressing the first imprinting substrate 4, the first protrusion 121 can be continuously inserted into the first imprinting substrate 4 to cause the first imprinting substrate 4 to deform. The deformed first imprinting substrate 4 can be continuously filled into the first recess 122, thereby obtaining a second imprinting functional surface 41 that is highly fitted with the first imprinting functional surface 11, thereby ensuring the molding quality of the first imprinting substrate 4.

[0075] In some embodiments, multiple first recesses 122 are provided, and the multiple first recesses 122 are spaced apart.

[0076] Multiple spaced first recesses 122 are provided, each capable of accommodating different portions of the first imprinted substrate 4. This promotes uniform deformation of the first imprinted substrate 4, allowing it to conform integrally with the first imprinted functional surface 11. Furthermore, multiple second protrusions 421 can be formed on the first imprinted substrate 4. When using the first imprinted substrate 4 to mass-produce the imprinting mold for the liquid crystal device 100, the multiple second protrusions 421 can respectively compress the second imprinted substrate 5, causing it to deform. This deformation allows the second imprinted substrate 5 to conform to the second imprinted functional surface 41 of the first imprinted substrate 4, resulting in a third imprinted functional surface 51 with the same dimensions as the first imprinted functional surface 11. This further improves the precision of the resulting imprinting mold, thereby enhancing the manufacturing precision of the liquid crystal device 100.

[0077] In some embodiments, the plurality of first recesses 122 may be evenly spaced.

[0078] Referring to FIG7, in some embodiments, at least a portion of the bottom surface of the first recess 122 is located on the same plane.

[0079] It should be noted that the first recess 122 is formed by recessing from the first imprinting functional surface 11, and the bottom surface of the first recess 122 is the side away from the first imprinting functional surface 11. In some embodiments, the bottom surfaces of all the first recesses 122 may be located on the same plane, or the bottom surfaces of some of the first recesses 122 may be located on the same plane, while the bottom surfaces of other parts of the first recesses 122 may not be located on the same plane.

[0080] By setting the bottom surface of at least a portion of the first recess 122 on the same plane, the processing difficulty of the first recess 122 can be reduced, thereby reducing the processing difficulty of the first template body 1.

[0081] Referring to Figures 8 and 9, in some embodiments, the bottom surfaces of at least a portion of the first recesses 122 are located on the same curved surface. For example, all the bottom surfaces of the first recesses 122 may be located on the same curved surface, or a portion of the first recesses 122 may be located on the same curved surface, while the bottom surfaces of the other portion of the first recesses 122 may not be located on the same curved surface.

[0082] By setting at least a portion of the bottom surface of the first recess 122 on the same curved surface, the depth of the first recess 122 can be flexibly adjusted, thereby helping to enhance the deformation of the first imprinting substrate 4 to form a second imprinting functional surface 41 that is highly fitted to the first imprinting functional surface 11.

[0083] In some embodiments, the bottom surface of a portion of the first recess 122 may be located on the same plane, while the bottom surface of another portion of the first recess 122 may be located on the same curved surface.

[0084] In some embodiments, multiple first protrusions 121 are provided, and the multiple first protrusions 121 are spaced apart.

[0085] Multiple first protrusions 121 are provided at intervals. These protrusions 121 can respectively compress different parts of the first imprinting substrate 4, thereby promoting uniform deformation of the first imprinting substrate 4 and enabling it to be integrally bonded to the first imprinting functional surface 11. Furthermore, multiple second recesses 422 can be formed correspondingly on the first imprinting substrate 4. When using the first imprinting substrate 4 to mass-produce the imprinting mold for the liquid crystal device 100, the multiple second recesses 422 can respectively accommodate different parts of the second imprinting substrate 5, thereby causing the second imprinting substrate 5 to deform and conform to the second imprinting functional surface 41 of the first imprinting substrate 4. This results in a third imprinting functional surface 51 with the same dimensions as the first imprinting functional surface 11, further improving the precision of the resulting imprinting mold and thus enhancing the manufacturing precision of the liquid crystal device 100.

[0086] In some embodiments, the plurality of first protrusions 121 may be evenly spaced.

[0087] Referring to Figures 10 to 14, the first protrusion 121 and the first recess 122 are alternately spaced along the first preset direction.

[0088] It should be noted that, referring to Figure 10, the first preset direction can be the X-axis direction shown in the figure, or it can be the Y-axis direction shown in the figure. Referring to Figures 11 to 13, the first preset direction can also be a direction parallel to the plane formed by the X-axis and Y-axis shown in the figure. Referring to Figure 14, the first preset direction can be the Y-axis direction shown in the figure.

[0089] Referring to Figures 12 and 13, the first protrusion 121 and the first recess 122 may extend along the plane formed by the X-axis and Y-axis as shown in the figure, so that the first conformal structure 12 is radial in shape as a whole; referring to Figure 14, in some embodiments, the first protrusion 121 and the first recess 122 may be arranged at intervals along the Y-axis direction as shown in the figure, the first recess 122 may extend along the X-axis direction as shown in the figure, and a portion of the first protrusion 121 may also extend along the X-direction as shown in the figure.

[0090] The first protrusion 121 and the first concave portion 122 are alternately arranged. The first protrusion 121 can squeeze the first imprinting substrate 4, and a part of the first imprinting substrate 4 that has been squeezed and deformed can be accommodated in the first concave portion 122. In this way, the degree of fit between the deformed first imprinting substrate 4 and the first imprinting functional surface 11 can be improved, which helps to improve the imprinting quality of the first imprinting substrate 4.

[0091] Referring to Figures 10 to 14, the cross-sectional shape of the first recess 122 is annular, circular, rectangular, triangular, arc-shaped, or elliptical. The shape of the first recess 122 can be designed according to actual needs, for example, based on the shape of the optical structure 101, so that the placement of the first recess 122 does not affect the optical function of the optical structure 101 of the liquid crystal device 100.

[0092] In other embodiments, the cross-sectional shape of the first recess 122 may also be a polygon or other irregular shape.

[0093] In some embodiments, referring to FIG11, when the cross-sectional shape of the first recess 122 is annular, the plurality of first recesses 122 can be arranged in the radial direction, and the centers of the plurality of first recesses 122 can coincide.

[0094] In some embodiments, the cross-sectional shape of the first protrusion 121 is annular, circular, rectangular, triangular, arc-shaped, or elliptical. The shape of the first protrusion 121 can be designed according to actual needs, for example, based on the shape of the optical structure 101, so that the placement of the first protrusion 121 does not affect the optical function of the optical structure 101 of the liquid crystal device 100.

[0095] In other embodiments, the cross-sectional shape of the first protrusion 121 may also be a polygon or other irregular shape.

[0096] In some embodiments, the cross-sectional shapes of the first protrusion 121 and the first recess 122 may be the same or different. For example, when the cross-sectional shape of the first recess 122 is annular, the cross-section of the first protrusion 121 may be circular, rectangular, triangular, arc-shaped or elliptical, etc.

[0097] In some embodiments, the cross-sectional dimensions of the first protrusion 121 and the first recess 122 may be the same, while in other embodiments, the cross-sectional dimensions of the first protrusion 121 and the first recess 122 may be different.

[0098] In some embodiments, multiple first protrusions 121 are provided, and the top surfaces of at least a portion of the first protrusions 121 are located on the same plane. For example, the top surfaces of all the first protrusions 121 may be located on the same plane, or the top surfaces of a portion of the first protrusions 121 may be located on the same plane, while the top surfaces of another portion of the first protrusions 121 may not be located on the same plane.

[0099] By placing at least a portion of the top surface of the first protrusion 121 on the same plane, the processing difficulty of the first protrusion 121 can be reduced, thereby reducing the processing difficulty of the first template body 1.

[0100] In some embodiments, the top surfaces of at least a portion of the first protrusions 121 are located on the same curved surface. For example, the top surfaces of all the first protrusions 121 may be located on the same curved surface, or the top surfaces of a portion of the first protrusions 121 may be located on the same curved surface, while the top surfaces of another portion of the first protrusions 121 may not be located on the same curved surface.

[0101] By setting the top surface of at least a portion of the first protrusion 121 on the same curved surface, the protrusion height of the first protrusion 121 can be flexibly adjusted, thereby helping to enhance the deformation of the first imprinting substrate 4 to form a second imprinting functional surface 41 that is highly fitted to the first imprinting functional surface 11.

[0102] In some embodiments, the top surface of a portion of the first protrusion 121 may be located on the same plane, while the top surface of another portion of the first protrusion 121 may be located on the same curved surface.

[0103] The first imprinted functional surface 11 includes a first optical functional area, which is used to adhere to the first imprinted substrate 4 to form an optical structure 101 on the first imprinted substrate 4; in some embodiments, at least a portion of the first conformal structure 12 is located within the first optical functional area.

[0104] It should be noted that the first optical functional area is part of the first imprinting functional surface 11. The first imprinting functional surface 11 includes the first optical functional area and a first non-optical functional area located outside the first optical functional area. The first optical functional area is bonded to the first imprinting substrate 4 to form an optical structure 101. In some embodiments, a portion of the first conformal structure 12 may be located within the first optical functional area. When the first conformal structure 12 has multiple first protrusions 121 and first recesses 122, a portion of the first protrusions 121 and a portion of the first recesses 122 may be located within the first optical functional area, while another portion of the first protrusions 121 and a portion of the first recesses 122 may be located in the first non-optical functional area outside the first optical functional area. In other embodiments, the entire first conformal structure 12 may be located within the first optical functional area, that is, all the first protrusions 121 and all the first recesses 122 are located within the first optical functional area.

[0105] By placing at least a portion of the first conformal structure 12 within the first optical functional area, the bonding effect between the deformed first imprint substrate 4 and the first optical functional area can be improved, thereby improving the molding quality of the first imprint substrate 4 and contributing to the overall quality of the liquid crystal device 100.

[0106] In this embodiment, the influence of the first conformal structure 12 on the optical function of the optical structure 101 can be reduced by reasonably designing the position and size of the first conformal structure 12.

[0107] In other embodiments, the first conformal structure 12 is located outside the first optical functional area. Positioning the first conformal structure 12 outside the first optical functional area reduces the design and manufacturing complexity of the first conformal structure 12, thereby reducing the processing cost of the imprinting template.

[0108] Referring to Figure 2, the imprinting template also includes a second template body 2. The second template body 2 has a first bearing surface 21 facing the first imprinting functional surface 11. The first bearing surface 21 is used to bear the first imprinting substrate 4. The first template body 1 and the second template body 2 can approach each other to squeeze the first imprinting substrate 4.

[0109] By setting the second template body 2, the first bearing surface 21 of the second template body 2 can be used to bear the first imprinting substrate 4, thereby supporting the first imprinting substrate 4 and ensuring the accuracy of imprinting.

[0110] In some embodiments, the first bearing surface 21 and the first conformal structure 12 are spaced apart.

[0111] It should be noted that the first conformal structure 12 includes a first protrusion 121 protruding from the first imprinting functional surface 11 and a first recess 122 recessed from the first imprinting functional surface 11. The first protrusion 121 protrudes towards the side of the first bearing surface 21, and the first recess 122 is recessed towards the side away from the first bearing surface 21. Therefore, the first bearing surface 21 and the first conformal structure 12 are spaced apart, which can be understood as the top surfaces of the first bearing surface 21 and the first protrusion 121 of the first conformal structure 12 being spaced apart.

[0112] By spacing the first bearing surface 21 and the first conformal structure 12 apart, the first conformal structure 12 can avoid contact with the first bearing surface 21 during the imprinting process. That is, the first conformal structure 12 will not separate the first imprinting substrate 4 into multiple parts, thus maintaining the integrity of the structure of the first imprinting substrate 4.

[0113] In some embodiments, the first template body 1 can be directly used to process the liquid crystal device 100. In this case, the first imprinting substrate 4 can be the structure of the liquid crystal device 100, so that the first template body 1 performs imprinting processing on the first imprinting substrate 4. The second imprinting functional surface 41 formed on the first imprinting substrate 4 can become the optical structure 101 of the liquid crystal device 100, thereby realizing the optical processing of light by the liquid crystal device 100.

[0114] In other embodiments, the first template body 1 may not be directly used to process the liquid crystal device 100. Instead, the first template body 1 may be used to produce an imprinting mold for the liquid crystal device 100. In this case, the first imprinting substrate 4 may not be a structure of the liquid crystal device 100. The first imprinting substrate 4 may be used to imprint other imprinting substrates. That is, the first template body 1 is equivalent to a master template. The first template body 1 is used to imprint the first imprinting substrate 4 to produce batch production sub-templates, so as to obtain imprinting molds for producing liquid crystal devices 100 in batches.

[0115] Referring to Figures 2 and 3, after the first template body 1 completes the imprinting of the first imprinting substrate 4, a first imprinting substrate 4 with a second imprinting functional surface 41 can be obtained, and the first imprinting substrate 4 can be formed into a second conformal structure 42 corresponding to the first conformal structure 12 of the first template body 1. The second conformal structure 42 includes a second protrusion 421 and a second concave portion 422.

[0116] Referring to Figures 5 and 6, the imprinting template also includes a third template body 3. The third template body 3 is provided with a second bearing surface 31. The second bearing surface 31 is used to bear the second imprinting substrate 5. The first conformal structure 12 is also used to deform the first imprinting substrate 4 to form a second conformal structure 42. The second template body 2 and the third template body 3 can approach each other so that the second conformal structure 42 squeezes the second imprinting substrate 5, so that the second imprinting substrate 5 is deformed and fits against the second imprinting functional surface 41 to form the third imprinting functional surface 51.

[0117] It should be noted that in some embodiments, the second imprinting substrate 5 can be a flexible substrate, and the second imprinting substrate 5 can be composed of a semi-cured colloid. After the second imprinting substrate 5 is deformed by extrusion, it can be cured to maintain its shape. For example, the colloid can be a semi-cured adhesive. In some embodiments, the adhesive can be a thermosetting adhesive, such as epoxy resin, polyester resin, vinyl ester, bismaleimide, thermosetting polyimide, cyanate ester, etc.; in some embodiments, the adhesive can be a light-curing adhesive, such as acrylate adhesive, UV-curing adhesive, etc.; in other embodiments, the adhesive can also be a moisture-curing adhesive, such as cyanoacrylate adhesive, PUR, etc.; in some embodiments, the second imprinting substrate 5 can be made of a thermoplastic material, such as PET, PC, TAC, etc.

[0118] It should be noted that the third embossing functional surface 51 of the second embossing substrate 5 is embossed by the first embossing substrate 4. The surface shape of the third embossing functional surface 51 is opposite to that of the second embossing functional surface 41. For example, when the second embossing functional surface 41 is convex, the third embossing functional surface 51 is concave. The first embossing substrate 4 is embossed by the first template body 1. The surface shape of the second embossing functional surface 41 is opposite to that of the first embossing functional surface 11. When the first embossing functional surface 11 is concave, the second embossing functional surface 41 is convex. Therefore, the surface shape of the third embossing functional surface 51 is the same as that of the first embossing functional surface 11. The second embossing substrate 5 is equivalent to a sub-template produced by embossing using the first template body 1 as the parent template.

[0119] It should be noted that the second conformal structure 42 of the first imprinting substrate 4 can be imprinted into the third conformal structure 52 on the second imprinting substrate 5. Specifically, the second protrusion 421 of the second conformal structure 42 can be formed into the third concave portion 522 of the third conformal structure 52, and the second concave portion 422 of the second conformal structure 42 can be formed into the third protrusion 521 of the third conformal structure 52. The third concave portion 522 is recessed from the third imprinting functional surface 51, and the third protrusion 521 protrudes from the third imprinting functional surface 51. Referring to Figures 1 and 6, the third imprinting functional surface 51 of the second imprinting substrate 5 corresponds to the first imprinting functional surface 11 of the first template body 1, and the third protrusion 521 and third concave portion 522 of the second imprinting substrate 5 correspond to the first protrusion 121 and first concave portion 122 of the first template body 1, respectively.

[0120] After the second imprinting substrate 5 is cured, it can be used to imprint the substrate of the liquid crystal device 100 to process the optical structure 101 on the liquid crystal device 100. By setting the third template body 3, the second bearing surface 31 of the third template body 3 can be used to support the second imprinting substrate 5, thereby supporting the second imprinting substrate 5 to ensure the imprinting accuracy. In addition, the second template body 2 can drive the first imprinting substrate 4 to move, which can reduce the compression of the first imprinting substrate 4 during the transfer process, thereby reducing the deformation of the first imprinting substrate 4, which can help to further improve the imprinting accuracy.

[0121] Referring to Figures 1 to 3, in some embodiments, when the liquid crystal device 100 is directly processed using the first template body 1, the second imprinted functional surface 41 formed on the first imprinted substrate 4 can serve as the optical structure 101 of the liquid crystal device 100.

[0122] For example, the liquid crystal device 100 includes a first substrate 10 and a second substrate 20. The first imprinted substrate 4 may be a part of the first substrate 10. When manufacturing the liquid crystal device 100, the first template body 1 can be used to form the second imprinted functional surface 41 on the first imprinted substrate 4 to form an optical structure 101. Then, the first substrate 10 and the second substrate 20 are connected by the frame adhesive 50. The liquid crystal 60 is injected into the empty area between the first substrate 10 and the second substrate 20 using a drop-filling method or a vacuum crystal filling method to obtain the liquid crystal device 100 as a whole.

[0123] In some embodiments, the liquid crystal device 100 further includes a first electrode layer 401, a second electrode layer 402, a first alignment layer 301, and a second alignment layer 301. The second electrode layer 402 and the second alignment layer 301 are sequentially stacked on the second substrate 20. The first electrode layer 401 and the first alignment layer 301 can be disposed on the side of the optical structure 101 facing the second substrate 20, or on the side of the optical structure 101 away from the second substrate 20. The first electrode layer 401 and the second electrode layer 402 can be transparent.

[0124] It is understandable that the arrangement of liquid crystal molecules modulates the light passing through the liquid crystal 60. In the absence of an electric field, the liquid crystal molecules exist in a specific initial arrangement, such as the common parallel arrangement along a specific direction. After applying a suitable electric field to the first electrode layer 401 and the second electrode layer 402, the liquid crystal molecules will change their orientation under the action of the electric field force. This is because liquid crystal molecules have dielectric anisotropy, that is, their response to the electric field is different along different directions. The presence of the electric field breaks the original equilibrium state of the molecular arrangement, causing the molecules to readjust their orientation according to the direction and intensity of the electric field. This change in molecular orientation can change the optical properties of the liquid crystal cell. For example, by controlling the presence and strength of the electric field on the first electrode layer 401 and the second electrode layer 402 in different regions, the liquid crystal molecules can present different orientations in different regions, thereby achieving different degrees of light transmission, blocking, or refraction, and thus displaying different images or text information.

[0125] The first alignment layer 301 and the second alignment layer 301 can provide an initial alignment direction for the liquid crystal molecules. When no external electric field or other interference factors are applied, the liquid crystal molecules can be arranged in an orderly manner according to the direction set by the first alignment layer 301 and the second alignment layer 301. For example, a common alignment method is to make the liquid crystal molecules parallel to each other on the surfaces of the first alignment layer 301 and the second alignment layer 301. This lays the foundation for the optical performance of the liquid crystal cell in the initial state. When an electric field is applied to the liquid crystal cell, the liquid crystal molecules will change orientation under the action of the electric field force. The first alignment layer 301 and the second alignment layer 301 play a guiding role in this process, so that the orientation change of the liquid crystal molecules can proceed according to a certain rule and direction. This ensures that the liquid crystal molecules do not change orientation randomly under the action of the electric field, but change in an orderly manner in a direction that is conducive to realizing the specific function of the liquid crystal device 100, so that the liquid crystal device 100 can realize high resolution and high quality image display.

[0126] In some embodiments, the thickness of the first substrate 10 can be 1μm to 2000μm. For example, the thickness of the first substrate 10 can be 1μm, 100μm, 150μm, 300μm, 800μm, 1000μm, 1200μm, 1600μm, 1800μm, or 2000μm.

[0127] In some embodiments, the first imprinted substrate 4 is part of the first substrate 10. In this case, the first substrate 10 may be a substrate with non-uniform thickness, and the thickness value of the area of ​​the first substrate 10 where the optical structure 101 needs to be set may be relatively large.

[0128] In some embodiments, the thickness of the second substrate 20 can be from 1 μm to 2000 μm. For example, the thickness of the second substrate 20 can be 1 μm, 100 μm, 150 μm, 300 μm, 800 μm, 1000 μm, 1200 μm, 1600 μm, 1800 μm, or 2000 μm.

[0129] In some embodiments, the material of the first substrate 10 may be thermoplastic; for example, the material of the first imprinting substrate 4 may be PET, PC, TAC, etc. The first template body 1 can be used to imprint the first substrate 10 to form the optical structure 101 using hot pressing.

[0130] Referring to Figures 1 to 6, in some other embodiments, when using the first template as the master template to mass-produce sub-templates for imprinting the liquid crystal device 100, the first imprinting substrate 4 can be disposed on the second template body 2, and then the first template body 1 is used to press the first imprinting substrate 4, so that the second imprinting functional surface 41 and the second conformal structure 42 are formed on the first imprinting substrate 4. After the first imprinting substrate 4 has cured, the first imprinting substrate 4 is pressed with the second imprinting substrate 5, so that the second imprinting substrate 5 forms a third imprinting functional surface 51 that is the same as the first imprinting functional surface 11. In addition, the second imprinting substrate 5 can also form a third conformal structure 52 that is the same as the first conformal structure 12. Thus, when the liquid crystal device 100 is imprinted using the second imprinting substrate 5, the third conformal structure 52 of the second imprinting substrate 5 can cause the substrate of the liquid crystal device 100 to deform, so that the substrate of the liquid crystal device 100 can fit with the third imprinting functional surface 51 of the second imprinting substrate 5, thereby forming a high-precision optical structure 101.

[0131] In some embodiments, the second imprinting substrate 5 can also be used as a master template to batch imprint sub-templates in the manner described above, thereby obtaining more liquid crystal device 100 imprinting molds.

[0132] This application also includes an imprinting device, which includes a driving mechanism and an imprinting template as described in any of the above embodiments, wherein the first template body 1 of the imprinting template is mounted on the driving mechanism.

[0133] The driving mechanism of the imprinting equipment can drive the first template body 1 to move, so that the first template body 1 can squeeze the first imprinting substrate 4, thereby deforming the first imprinting substrate 4 to form a second imprinting functional surface 41 that fits with the first imprinting functional surface 11, thus realizing the production of liquid crystal devices. Since the first conformal structure 12 of the imprinting template can cause the first imprinting substrate 4 to deform, so that the first imprinting substrate 4 can deform to adapt to the first imprinting functional surface 11, thereby forming a second imprinting functional surface 41 that fits with the first imprinting functional surface 11, the optical structure 101 of the liquid crystal device produced by this imprinting equipment has high precision and good quality.

[0134] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A stamping template, characterized by The first template body includes a first imprinting functional surface and a first conformal structure disposed on the first imprinting functional surface. The first imprinting functional surface is used to press a first imprinting substrate, and the first conformal structure is used to cause the first imprinting substrate to deform to form a second imprinting functional surface. The second imprinting functional surface is in contact with the first imprinting functional surface.

2. The imprint template of claim 1, wherein, The first conformal structure includes a first protrusion protruding from the first embossing functional surface, and / or a first recessed portion recessed from the first embossing functional surface; Wherein, the first protrusion is used to insert into the first embossing substrate to deform the first embossing substrate; The first recess is used to form a second protrusion on the first imprinting substrate that protrudes from the second imprinting functional surface.

3. The imprint template of claim 2, wherein, The first template body also has a first side facing the first imprinting substrate. Along the direction in which the first template body presses the first imprinting substrate, the maximum distance between the first side and the first imprinting functional surface is L1, and the distance between the first side and the bottom surface of the first recess is L2, where L2≥L1.

4. The imprint template of claim 2, wherein, The first template body also has a second side facing away from the first imprinting substrate. Along the direction in which the first template body presses the first imprinting substrate, the maximum distance between the second side and the first imprinting functional surface is L3, and the distance between the second side and the top surface of the first protrusion is L4, where L4≥L3.

5. The imprint template of claim 2, wherein, The first recess is provided in multiple ways, and the multiple first recesses are provided at intervals; The first protrusion is provided in multiple ways, and the multiple first protrusions are spaced apart.

6. The imprint template of claim 5, wherein, At least a portion of the bottom surface of the first recess is located on the same plane; or, at least a portion of the bottom surface of the first recess is located on the same curved surface. At least a portion of the top surfaces of the first protrusions are located on the same plane; or, at least a portion of the top surfaces of the first protrusions are located on the same curved surface.

7. The imprint template of claim 4, wherein, Along a first preset direction, the first protrusion and the first concave portion are alternately spaced.

8. The imprint template of claim 2, wherein, The cross-sectional shape of the first recess is annular, circular, rectangular, triangular, arc-shaped, or elliptical; The cross-sectional shape of the first protrusion is annular, circular, rectangular, triangular, arc-shaped, or elliptical.

9. The imprint template of any of claims 1-8, wherein, The first imprinted functional surface includes a first optical functional area, which is used to adhere to the first imprinted substrate to form an optical structure on the first imprinted substrate; At least a portion of the first conformal structure is located within the first optical functional region; Alternatively, the first conformal structure may be located outside the first optical functional region.

10. The imprint template of any of claims 1-8, wherein, The embossing template further includes a second template body, the second template body having a first bearing surface facing the first embossing functional surface, the first bearing surface being used to bear the first embossing substrate, and the first template body and the second template body being able to approach each other to compress the first embossing substrate.

11. The imprint template of claim 10, wherein, The first bearing surface is spaced apart from the first conformal structure.

12. The imprint template of claim 10, wherein, The embossing template also includes a third template body, which is provided with a second bearing surface. The second bearing surface is used to support the second embossing substrate. The first conformal structure is also used to deform the first embossing substrate to form a second conformal structure. The second template body and the third template body can approach each other so that the second conformal structure squeezes the second embossing substrate, so that the second embossing substrate is deformed and fits against the second embossing functional surface to form a third embossing functional surface.

13. An embossing apparatus comprising a drive mechanism, characterized in that It also includes an imprinting template as described in any one of claims 1-12, wherein the first template body of the imprinting template is mounted on the driving mechanism.

Images