Gasket-type orifice structure and pressure-type flow rate control device

Abstract

A gasket-type orifice structure according to the present invention comprises: a first orifice base and a second orifice base that are made of a resin and are connected to each other; an orifice plate sandwiched between the first orifice base and the second orifice base; and an input-side block and a flow path forming block that are made of metal. An annular first recessed groove and an annular second recessed groove are formed in a bottom wall of an output-side housing recess and a bottom wall of an input-side housing recess, respectively. The first orifice base and the second orifice base are provided with an annular first protrusion that enters the first recessed groove and an annular second protrusion that enters the second recessed groove, respectively.

Description

Gasket-type orifice structure and pressure-type flow control device

[0001] The present invention relates to a gasket-type orifice structure and a pressure-type flow control device.

[0002] JP2007-57474A discloses a gasket-type orifice structure and a pressure-type flow control device including the gasket-type orifice structure.

[0003] In the gasket-type orifice structure described in Patent Document 1 mentioned above, the two orifice bases that sandwich the metal orifice plate are both made of metal, so sufficient cost reduction of the gasket-type orifice structure cannot be achieved.

[0004] In order to reduce the cost of the gasket-type orifice structure, it is conceivable to replace the two metal orifice bases with two resin orifice bases. However, when each resin orifice base contracts due to temperature change, fluid leakage may occur due to the formation of a gap on the sealing surface (specifically, the sealing surface between the orifice base and the flow path forming block).

[0005] Accordingly, the present invention has been made in view of this problem, and an object of the present invention is to provide a gasket-type orifice structure and a pressure-type flow control device that can suppress fluid leakage caused by temperature change while achieving cost reduction.

[0006] According to one aspect of the present invention, the present invention comprises a first orifice base made of resin, a second orifice base made of resin connected to the first orifice base and having a recess formed therein for accommodating at least a portion of the first orifice base, a metal orifice plate sandwiched between the first orifice base and the second orifice base, a first channel forming block made of metal having a first channel and a first accommodating recess located at the end of the first channel and accommodating the first orifice base, a second channel forming block made of metal having a second channel communicating with the first channel and a second accommodating recess located at the end of the second channel and provided opposite the first accommodating recess to accommodate the second orifice base, wherein an annular first groove is formed in the bottom wall of the first accommodating recess and an annular second groove is formed in the bottom wall of the second accommodating recess. The gasket-type orifice structure is provided in which, when the first orifice base is provided with an annular first projection that fits into the first groove, and the second orifice base is provided with an annular second projection that fits into the second groove, the amount of protrusion of the first projection is formed to be greater than the depth of the first groove when the first orifice base is not elastically deformed, and the amount of protrusion of the second projection is formed to be greater than the depth of the second groove when the second orifice base is not elastically deformed, and when the first channel forming block and the second channel forming block are connected so that the first channel and the second channel are in communication, the connected first orifice base and the second orifice base are compressed along the axial direction of the first orifice base or the second orifice base and housed in the first housing recess and the second housing recess.

[0007] According to this embodiment, it is possible to reduce the cost of the gasket-type orifice structure while suppressing fluid leakage due to temperature changes.

[0008] Figure 1 is a cross-sectional view showing the main part of the pressure-type flow control device according to this embodiment. Figure 2 is a cross-sectional view showing the gasket-type orifice structure (assembled state 4) according to this embodiment. Figure 3 is a cross-sectional view showing assembled state 1 with the gasket-type orifice structure assembled. Figure 4 is a cross-sectional view showing assembled state 2 with the gasket-type orifice structure assembled. Figure 5 is a cross-sectional view showing assembled state 3 with the gasket-type orifice structure assembled. Figure 6 is a cross-sectional view showing the gasket-type orifice structure according to the first modified example. Figure 7 is a cross-sectional view showing the gasket-type orifice structure according to the second modified example.

[0009] Hereinafter, embodiments of the present invention (hereinafter referred to as "these embodiments") will be described with reference to the attached drawings. Throughout this specification, the same elements will be denoted by the same reference numerals.

[0010] (Configuration of pressure-type flow control device) First, the pressure-type flow control device 100 according to this embodiment will be described with reference to Figure 1.

[0011] Figure 1 is a cross-sectional view showing the main parts of the pressure-type flow control device 100 according to this embodiment. Note that a portion of the valve 1 is not shown in cross-section in Figure 1.

[0012] As shown in Figure 1, the pressure-type flow control device 100 according to this embodiment is a mass flow controller used in a fluid supply unit as a fluid supply means for supplying process gases as a fluid from a fluid supply source (not shown) to semiconductor manufacturing equipment (CVD equipment, sputtering equipment, etching equipment, etc.).

[0013] As shown in Figure 1, the pressure-type flow control device 100 comprises a valve 1 having a flow path forming block 11 as a second flow path forming block made of metal (specifically, SUS316L / stainless steel), an input-side block 2 as a first flow path forming block made of metal (specifically, SUS316L / stainless steel) connected to one side (specifically, the left side in Figure 1) of the flow path forming block 11 of the valve 1 by fixing bolts (not shown), and an output-side block 3 made of metal (specifically, SUS316L / stainless steel) connected to the other side (specifically, the right side in Figure 1) of the flow path forming block 11 by fixing bolts (not shown).

[0014] The flow path forming block 11 has a fluid inlet flow path 12 and a fluid outlet flow path 13 formed therein as second flow paths communicating with each other. At the input end of the fluid inlet flow path 12, an input-side receiving recess 121 is formed as a second receiving recess. At the output end of the fluid outlet flow path 13, an output-side receiving recess 131 is formed.

[0015] An input channel 21 is formed in the input-side block 2 as a first flow path. At the output end of the input channel 21, an output-side accommodating recess 211 is formed as a first accommodating recess that is opposite and in communication with the input-side accommodating recess 121. Gasket-type orifices 4 are housed in the output-side accommodating recess 211 and the input-side accommodating recess 121. Here, the gasket-type orifice structure 6 according to this embodiment (see Figure 2) is configured to include the output-side accommodating recess 211, the input-side accommodating recess 121, and the gasket-type orifice 4. The configuration of the gasket-type orifice structure 6 will be described later.

[0016] An output channel 31 is formed in the output-side block 3. An input housing portion 311 is formed at the input end of the output channel 31, opposite and communicating with the output-side housing recess 131. A gasket 5 is housed in the output-side housing recess 131 and the input housing portion 311, with a through hole 51 formed therein, which serves as a communication channel connecting the fluid outflow channel 13 and the output channel 31.

[0017] (Configuration of the gasket-type orifice structure) Next, the gasket-type orifice structure 6 according to this embodiment will be described in detail with reference to Figures 1 to 5. The gasket-type orifice structure 6 shown in Figure 2 is assembled by sequentially going through assembly states 1 to 3 shown in Figures 3 to 5.

[0018] Figure 2 is a cross-sectional view showing the assembled gasket-type orifice structure 6, and is an enlarged view of part A in Figure 1. Figure 3 is a cross-sectional view showing assembled state 1 of the gasket-type orifice structure 6. Figure 4 is a cross-sectional view showing assembled state 2 of the gasket-type orifice structure 6. Figure 5 is a cross-sectional view showing assembled state 3 of the gasket-type orifice structure 6.

[0019] As shown in Figures 1 to 5, the gasket-type orifice structure 6 is configured to include an output-side accommodating recess 211, an input-side accommodating recess 121, and a gasket-type orifice 4, as described above.

[0020] As shown in Figures 1 to 5, the output side housing recess 211 is formed as a columnar (specifically, cylindrical) recess that communicates with the output end of the input flow path 21. The bottom wall 211a of the output side housing recess 211 is formed flush with the surface. An annular (specifically, circular) first groove 211b is formed in the bottom wall 211a of the output side housing recess 211. The annular first groove 211b is located on the outer edge of the bottom wall 211a of the output side housing recess 211. The side wall 211c of the output side housing recess 211 is formed perpendicular to the bottom wall 211a.

[0021] As shown in Figures 1 to 5, the input-side accommodating recess 121 is formed as a columnar (specifically, cylindrical) recess that communicates with the input end of the fluid inflow channel 12. The bottom wall 121a of the input-side accommodating recess 121 is formed flush with the surface. An annular (specifically, circular) second groove 121b is formed in the bottom wall 121a of the input-side accommodating recess 121. The annular second groove 121b is located on the outer periphery of the bottom wall 121a of the input-side accommodating recess 121. In this embodiment, the diameter of the output-side accommodating recess 211 and the diameter of the input-side accommodating recess 121 are the same. The side wall 121c of the input-side accommodating recess 121 is formed perpendicular to the bottom wall 121a.

[0022] As shown in Figures 1 to 5, the gasket-type orifice 4 comprises a first orifice base 41, a second orifice base 42 connected to the first orifice base 41 by screwing, and a disc-shaped orifice plate 43 sandwiched between the first orifice base 41 and the second orifice base 42.

[0023] The first orifice base 41 is made of a resin such as PCTFE or EPDM. The first orifice base 41 also has an annular portion 411 (specifically, an annular portion), an annular (specifically, annular) convex portion 412 provided so as to protrude from the annular portion 411, a circular first orifice channel 413 formed on the inner circumference of both the annular portion 411 and the convex portion 412, and an annular (specifically, annular) first projection 414 that fits into the first groove 211b.

[0024] The annular portion 411 has an annular first opposing surface 411a facing the second orifice base 42, and an annular first end surface 411b facing away from the first opposing surface 411a. The first end surface 411b is one end surface of the first orifice base 41 located on the outer circumference of one end of the first orifice flow path 413 so as to be flush with the surface and facing the bottom wall 211a of the output side housing recess 211. An annular first projection 414 is provided on the outer periphery of the first end surface 411b.

[0025] A male screw 412a is formed on the outer circumference of the protrusion 412. The annular second end face 412b of the protrusion 412, which faces the second orifice base 42, is the first clamping surface that clamps the orifice plate 43 (specifically, the outer edge of the orifice plate 43). The second end face 412b is the other end face of the first orifice base 41, which is located on the outer circumference of the other end of the first orifice flow path 413 so as to be flush with it. The first orifice flow path 413 penetrates the region located between the first end face 411b and the second end face 412b.

[0026] The second orifice base 42, like the first orifice base 41, is made of a resin such as PCTFE or EPDM. In this embodiment, the outer diameter of the second orifice base 42 is the same as the outer diameter of the annular portion 411, the diameter of the output side receiving recess 211, and the diameter of the input side receiving recess 121 of the first orifice base 41. A recess 422 for accommodating the convex portion 412 of the first orifice base 1 is formed on the inner circumference side of the third end face 421, which is one end face of the annular (specifically, circular annular) portion of the second orifice base 42. A female thread 422a that engages with the male thread 421a is formed on the circumferential surface of the recess 422. The bottom surface 422b of the annular (specifically, circular annular) portion of the recess 422 is a second clamping surface that clamps the orifice plate 43 (specifically, the outer peripheral edge of the orifice plate 43). The fourth end face 423 of the second orifice base 42 is the annular other end face of the second orifice base 42, which is located on the outer circumference of the other end of the second orifice flow path 424 (described later) and is flush with the surface and faces the bottom wall 121a of the input side receiving recess 121.

[0027] Furthermore, the second orifice base 42 has a circular second orifice channel 424 that penetrates the region located between the bottom surface 422b of the recess 422 and the fourth end surface 423, and an annular (specifically, circular) second projection 425 that enters the second groove 121b. The bottom surface 422b of the recess 422 is located on the outer circumference side of one end of the second orifice channel 424. The recess 422 and the second orifice channel 424 are formed coaxially. When the first orifice base 41 and the second orifice base 42 are connected by screwing, the second orifice channel 424 is formed coaxially and with the same diameter as the first orifice channel 413. The annular second projection 425 is provided on the outer edge of the fourth end surface 423.

[0028] The orifice plate 43 has multiple orifice holes (not shown), but it may also have a single orifice hole. The orifice plate 43 is made of, for example, metal (specifically, SUS316L / stainless steel). For this reason, the hardness of the orifice plate 43 is greater than the hardness of the first orifice base 41 and the second orifice base 42.

[0029] In this way, by making the hardness of the resin first orifice base 41 and the resin second orifice base 42 less than the hardness of the metal orifice plate 43 sandwiched between the second end face 412b (first clamping surface) of the first orifice base 41 and the bottom face 422b (second clamping surface) of the second orifice base 42, the load on the orifice plate 43 by the first orifice base 41 and the second orifice base 42 can be reduced when the first orifice base 41 and the second orifice base 42 are connected by screws. This suppresses bending of the orifice plate 43 and reduces variations in the flow rate of the gasket-type orifice 4 due to bending of the orifice plate 43. Furthermore, assembling the gasket-type orifice 4 by screwing the first orifice base 41 and the second orifice base 42 together simplifies the assembly process compared to assembling the gasket-type orifice by press-fitting one orifice base into the other.

[0030] Furthermore, in this embodiment, since the first orifice base 41 and the second orifice base 42 are made of resin and the orifice plate 43 is made of metal, compared to conventional structures in which the first orifice base 41, the second orifice base 42, and the orifice plate 43 are made of metal, it is possible to suppress fluid leakage due to particles generated during the assembly of the gasket-type orifice 4 or damage to the orifice plate 43.

[0031] Furthermore, in this embodiment, when the orifice plate 43 is sandwiched between the second end face 412b of the first orifice base 41 and the bottom face 422b of the second orifice base 42, the first opposing surface 411a of the first orifice base 41 and the third end face 421 of the second orifice base 42 are in contact.

[0032] Figure 3 shows a state in which the first orifice base 41 and the second orifice base 42 are not elastically deformed, a portion of the gasket-type orifice 4, into which the first orifice base 41 and the second orifice base 42 are screwed, is housed in the first groove 211b, and the rest of the gasket-type orifice 4 is not housed in the second groove 121b.

[0033] Figure 4 shows a state in which the first orifice base 41 and the second orifice base 42 are not elastically deformed, a part of the gasket-type orifice 4 is housed in the first groove 211b, and the other part of the gasket-type orifice 4 is housed in the second groove 121b. In the state shown in Figure 4, a gap d1 is formed between the connecting surface of the input-side block 2, which is the outer circumference side of the output-side housing recess 211, and the connecting surface of the flow path forming block 11, which is the outer circumference side of the input-side housing recess 121.

[0034] As shown in Figures 3 and 4, when the first orifice base 41 is not elastically deformed, the first projection 414 is formed with a protrusion amount greater than the depth of the first groove 211b. That is, when the first orifice base 41 is not elastically deformed and the tip of the first projection 414 is in contact with the bottom of the first groove 211b, a gap d2 is formed between the bottom wall 211a of the output side housing recess 211 and the first end face 411b of the first orifice base 41. As shown in Figure 4, the gap d1 between the connecting surface of the input side block 2 and the connecting surface of the flow path forming block 11 is larger than the gap d2 between the bottom wall 211a of the output side housing recess 211 and the first end face 411b of the first orifice base 41.

[0035] Similarly, as shown in Figures 3 and 4, when the second orifice base 42 is not elastically deformed, the second projection 425 is formed to protrude more than the depth of the second groove 121b. That is, when the second orifice base 42 is not elastically deformed and the tip of the second projection 425 is in contact with the bottom of the second groove 121b, a gap d3 is formed between the bottom wall 121a of the input side receiving recess 121 and the fourth end face 423 of the second orifice base 42. Then, as shown in Figure 4, the gap d1 between the connecting surface of the input side block 2 and the connecting surface of the flow path forming block 11 is larger than the gap d3 between the bottom wall 121a of the input side receiving recess 121 and the fourth end face 423 of the second orifice base 42.

[0036] In Figure 5, the first orifice base 41 and the second orifice base 42 are elastically deformed, and a portion of the gasket-type orifice 4 is housed in the first groove 211b, while the other portion of the gasket-type orifice 4 is housed in the second groove 121b. In the state shown in Figure 5, a gap d4 smaller than the gap d1 shown in Figure 4 is formed between the connecting surface of the input-side block 2, which is the outer circumference of the output-side housing recess 211, and the connecting surface of the flow path forming block 11, which is the outer circumference of the input-side housing recess 121.

[0037] By tightening the fixing bolts that connect the input-side block 2 and the flow path forming block 11, the gasket-type orifice structure 6 changes from assembly state 2 shown in Figure 4 to assembly state 3 shown in Figure 5. In this state change, the first orifice base 41 and the second orifice base 42 are compressed along their axial directions by the output-side accommodating recess 211 and the input-side accommodating recess 121, respectively, so that the gap formed between the connecting surface of the input-side block 2, which is the outer circumference of the output-side accommodating recess 211, and the connecting surface of the flow path forming block 11, which is the outer circumference of the input-side accommodating recess 121, becomes smaller.

[0038] As shown in Figure 5, the first orifice base 41 and the second orifice base 42 are compressed along their axial directions such that the tip of the first projection 414 abuts against the bottom of the first groove 211b, and the bottom wall 211a of the output side housing recess 211 abuts against the first end face 411b of the first orifice base 41. In this state, the tip of the second projection 425 abuts against the bottom of the second groove 121b, and the bottom wall 121a of the input side housing recess 121 abuts against the fourth end face 423 of the second orifice base 42.

[0039] In Figure 2, the first orifice base 41 and the second orifice base 42 are elastically deformed, and a portion of the gasket-type orifice 4 is housed in the first groove 211b, while the other portion of the gasket-type orifice 4 is housed in the second groove 121b. In the state shown in Figure 2, the connecting surface of the input-side block 2, which is the outer circumference of the output-side housing recess 211, and the connecting surface of the flow path forming block 11, which is the outer circumference of the input-side housing recess 121, are in contact. That is, no gap is formed between the connecting surface of the input-side block 2 and the connecting surface of the flow path forming block 11.

[0040] By further tightening the fixing bolts connecting the input-side block 2 and the flow path forming block 11, the gasket-type orifice structure 6 changes from the assembled state 3 shown in Figure 5 to the assembled state 4 shown in Figure 2. In this state change, the first orifice base 41 and the second orifice base 42 are compressed along their axial directions by the output-side accommodating recess 211 and the input-side accommodating recess 121, respectively, so that the gap formed between the connecting surface of the input-side block 2, which is the outer circumference of the output-side accommodating recess 211, and the connecting surface of the flow path forming block 11, which is the outer circumference of the input-side accommodating recess 121, becomes so small that it disappears.

[0041] Then, as shown in Figure 2, with the input-side block 2 and the flow path forming block 11 connected such that the input flow path 21 and the fluid inflow flow path 12 are in communication via a gasket-type orifice 4 (specifically, the first orifice flow path 413 and the second orifice flow path 424), the first orifice base 41 and the second orifice base 42, which are connected by screws, are compressed along the axial direction of the first orifice base 41 or the second orifice base 42 and housed in the output-side housing recess 211 and the input-side housing recess 121.

[0042] As can be seen from Figures 2 to 5, when the input block 2 and the flow path forming block 11 are connected, the amount of elastic deformation of the outer peripheral region of the gasket-type orifice 4 (specifically, the outer peripheral region of the first orifice base 41 on which the first projection 414 is provided and the outer peripheral region of the second orifice base 42 on which the second projection 425 is provided) is greater than the amount of elastic deformation of the region other than the outer peripheral region of the gasket-type orifice 4 (i.e., the region located on the inner side of the outer peripheral region of the gasket-type orifice 4 / the region where the first projection 414 and the second projection 425 are not provided). In other words, when the input block 2 and the flow path forming block 11 are connected, the compressive density of the outer peripheral region of the gasket-type orifice 4 is greater than the compressive density of the region other than the outer peripheral region of the gasket-type orifice 4.

[0043] Thus, when the resin-made first orifice base 41 and the resin-made second orifice base 42 contract due to temperature change, even if a gap is formed between the bottom wall 211a of the output-side accommodation recess 211 and the first end surface 411b of the first orifice base 41 (or between the bottom wall 121a of the input-side accommodation recess 121 and the fourth end surface 423 of the second orifice base 42), the annular first recessed groove 211b and the annular second recessed groove 121b are filled with the compressed annular first projection 414 and the compressed annular second projection 425, respectively, so that the sealing performance in each recessed groove (the first recessed groove 211b and the second recessed groove 121b) can be maintained. As a result, fluid leakage due to temperature change can be suppressed.

[0044] As described above, the annular first projection 414 and the annular second projection 425 are respectively provided on the outer peripheral edge of the first orifice base 41 and the outer peripheral edge of the second orifice base 42, and therefore overlap in a front view. Similarly, the annular first recessed groove 211b and the annular second recessed groove 121b are formed so as to overlap in a front view.

[0045] Accordingly, compared with a configuration where the annular first projection 414 and the annular second projection 425 do not overlap in a front view, the compression density in the region where the annular projections (specifically, the annular first projection 414 and the annular second projection 425) are provided can be increased, so that the sealing performance in each recessed groove (specifically, the first recessed groove 211b and the second recessed groove 121b) can be further maintained. As a result, fluid leakage due to temperature change can be further suppressed.

[0046] Further, from the viewpoint of further suppressing fluid leakage due to temperature change, it is preferable that the area of the region of the bottom wall 211a of the output-side accommodation recess 211 where the annular first recessed groove 211b is formed is smaller than the area of the region of the bottom wall 211a of the output-side accommodation recess 211 where the annular first recessed groove 211b is not formed in a front view. Similarly, from the viewpoint of further suppressing fluid leakage due to temperature change, it is preferable that the area of the region of the bottom wall 121a of the input-side accommodation recess 121 where the second recessed groove 121b is formed is smaller than the area of the region of the bottom wall 121a of the input-side accommodation recess 121 where the second recessed groove 121b is not formed in a front view.

[0047] In the present embodiment, the second orifice base 42 connected to the first orifice base 41 is connected by screw fitting; however, the present invention is not limited thereto, and the connection may be performed by press fitting, for example.

[0048] Furthermore, in the present embodiment, the gasket-type orifice structure 6 is housed between the input-side block 2 and the flow path forming block 11; however, the present invention is not limited thereto, and the gasket-type orifice structure 6 may be housed between the output-side block 3 and the flow path forming block 11, for example.

[0049] (Modified Examples of Gasket-Type Orifice Structure) Next, the gasket-type orifice structure 6 according to each modified example will be described with reference to FIG. 6 and FIG. 7. In each modified example, descriptions of points that are the same as those in the above-described embodiment are omitted, and points that differ from the above-described embodiment will be mainly described.

[0050] FIG. 6 is a cross-sectional view showing the gasket-type orifice structure 6 according to a first modified example. FIG. 7 is a cross-sectional view showing the gasket-type orifice structure 6 according to a second modified example.

[0051] In the above-described embodiment, the annular first projection 414 and the annular second projection 425 are respectively provided on the outer peripheral edge of the first orifice base 41 and the outer peripheral edge of the second orifice base 42; however, the present invention is not limited thereto, and for example, as shown in FIG. 6, they may be respectively provided on the inner peripheral edge of the first orifice base 41 and the inner peripheral edge of the second orifice base 42.

[0052] In this case, as shown in FIG. 6, the annular first recessed groove 211b and the annular second recessed groove 121b are respectively formed on the inner peripheral edge of the bottom wall 211a of the output-side housing recess 211 and the inner peripheral edge of the bottom wall 121a of the input-side housing recess 121.

[0053] Furthermore, as shown in FIG. 7, for example, the annular first projection 414 and the annular second projection 425 may be respectively provided between the outer peripheral edge of the first orifice base 41 and the inner peripheral edge of the first orifice base 41, and between the outer peripheral edge of the second orifice base 42 and the inner peripheral edge of the second orifice base 42.

[0054] In this case, as shown in Figure 7, the annular first groove 211b and the annular second groove 121b are formed between the outer peripheral edge and the inner peripheral edge of the bottom wall 211a and between the outer peripheral edge and the inner peripheral edge of the bottom wall 121a, respectively.

[0055] In summary, the annular first projection 414 may be provided on one or more of the following: the outer periphery of the first orifice base 41, the inner periphery of the first orifice base 41, and the area between the outer periphery of the first orifice base 41 and the inner periphery of the first orifice base 41. Similarly, the annular second projection 425 may be provided on one or more of the following: the outer periphery of the second orifice base 42, the inner periphery of the second orifice base 42, and the area between the outer periphery of the second orifice base 42 and the inner periphery of the second orifice base 42.

[0056] Furthermore, from the viewpoint of reliably suppressing fluid leakage due to temperature changes, it is preferable that multiple annular first protrusions 414 or annular second protrusions 425 are provided. In this case, the number of first grooves 211b or the number of second grooves 121b is the same as the number of first protrusions 414 or the number of second protrusions 425.

[0057] (Effects) Next, the effects of the embodiments and their respective modifications described above will be explained.

[0058] The gasket-type orifice structure 6 according to the above embodiment comprises a resin first orifice base 41, a resin second orifice base 42 connected to the first orifice base 41 and having a recess 422 formed therein for accommodating at least a part of the first orifice base 41, a metal orifice plate 43 sandwiched between the first orifice base 41 and the second orifice base 42, an input channel 21, a metal input-side block 2 having an output-side accommodating recess 211 located at the end of the input channel 21 and accommodating the first orifice base 41, a fluid inflow channel 12 communicating with the input channel 21, and a metal channel forming block 11 having an input-side accommodating recess 121 located at the end of the fluid inflow channel 12 and facing the output-side accommodating recess 211 to accommodate the second orifice base 42, wherein an annular first groove 211b is formed in the bottom wall 211a of the output-side accommodating recess 211, and the input side An annular second groove 121b is formed in the bottom wall 121a of the receiving recess 121, an annular first projection 414 that fits into the first groove 211b is provided on the first orifice base 41, and an annular second projection 425 that fits into the second groove 121b is provided on the second orifice base 42, and when the first orifice base 41 is not elastically deformed, the amount of protrusion of the first projection 414 is formed to be greater than the depth of the first groove 211b, and when the second orifice base 42 is elastically deformed If not present, the second projection 425 is formed with a protrusion amount greater than the depth of the second groove 121b, and in a state where the input side block 2 and the flow path forming block 11 are connected so that the input flow path 21 and the fluid inflow flow path 12 are in communication, the connected first orifice base 41 and second orifice base 42 are compressed along the axial direction of the first orifice base 41 or the second orifice base 42 and housed in the output side housing recess 211 and the input side housing recess 121.

[0059] Furthermore, the pressure-type flow control device 100 according to this embodiment includes the gasket-type orifice structure 6 described above.

[0060] With these configurations, even if a gap is formed between the bottom wall 211a of the output side receiving recess 211 and the first end face 411b of the first orifice base 41 (or between the bottom wall 121a of the input side receiving recess 121 and the fourth end face 423 of the second orifice base 42) when the resin first orifice base 41 and the resin second orifice base 42 contract due to temperature changes, the annular first groove 211b and the annular second groove 121b are filled with compressed annular first protrusions 414 and annular second protrusions 425, respectively, thus maintaining the sealing performance in each groove (specifically, the first groove 211b and the second groove 121b). As a result, the cost of the gasket-type orifice structure 6 can be reduced while suppressing fluid leakage due to temperature changes.

[0061] Based on the above, the gasket-type orifice structure 6 and the pressure-type flow control device 100 according to this embodiment can suppress fluid leakage due to variations in flow rate and temperature changes.

[0062] Furthermore, in this embodiment, the annular first projection 414 is formed to overlap with the annular second projection 425 when viewed from the front.

[0063] With this configuration, compared to a configuration in which the annular first projection 414 and the annular second projection 425 do not overlap in a front view, the compressive density of the region where the annular projections (specifically, the annular first projection 414 and the annular second projection 425) are provided can be increased, thereby better maintaining the sealing performance in each groove (specifically, the first groove 211b and the second groove 121b). As a result, fluid leakage due to temperature changes can be better suppressed.

[0064] Furthermore, in this embodiment, the first projection 414 is provided on the outer periphery of the first orifice base 41.

[0065] Furthermore, in this embodiment, the second projection 425 is provided on the outer edge of the second orifice base 42.

[0066] In another modified example, the first projection 414 is provided on the inner periphery of the first orifice base 41.

[0067] In another modified configuration, the second projection 425 is provided on the inner periphery of the second orifice base 42.

[0068] In another modified configuration, the first projection 414 is provided between the outer peripheral edge of the first orifice base 41 and the inner peripheral edge of the first orifice base 41.

[0069] In another modified configuration, the second projection 425 is provided between the outer peripheral edge of the second orifice base 42 and the inner peripheral edge of the second orifice base 42.

[0070] Furthermore, in this embodiment, the area of ​​the bottom wall 211a region of the first receiving recess 211 in which the first groove 211b is formed is smaller in a front view than the area of ​​the bottom wall 211a region of the first receiving recess 211 in which the first groove 211b is not formed.

[0071] Furthermore, in this embodiment, the area of ​​the bottom wall 121a region of the second receiving recess 121 in which the second groove 121b is formed is smaller in a front view than the area of ​​the bottom wall 121a region of the second receiving recess 121 in which the second groove 121 is not formed.

[0072] These configurations allow for further suppression of fluid leakage due to temperature changes.

[0073] Although this embodiment has been described above, the above-described embodiment only illustrates a part of the application of the present invention, and is not intended to limit the technical scope of the present invention to the specific configurations of the above-described embodiment.

[0074] This application claims priority under Japanese Patent Application No. 2025-51255, filed with the Japan Patent Office on 26 March 2025, and all contents of that application are incorporated herein by reference.

[0075] 2 Input side block (first flow path forming block) 6 Gasket type orifice structure 11 Flow path forming block (second flow path forming block) 12 Fluid inflow flow path (second flow path) 21 Input flow path (first flow path) 41 First orifice base 42 Second orifice base 43 Orifice plate 121 Input side housing recess (second housing recess) 121a Bottom wall 121b Second groove 211 Output side housing recess (first housing recess) 211a Bottom wall 211b First groove 414 First projection 422 Recess 425 Second projection 100 Pressure type flow control device

Claims

1. The orifice comprises: a first orifice base made of resin; a second orifice base made of resin connected to the first orifice base and having a recess formed therein for accommodating at least a part of the first orifice base; a metal orifice plate sandwiched between the first orifice base and the second orifice base; a first channel forming block made of metal having a first channel and a first accommodating recess located at the end of the first channel and accommodating the first orifice base; a second channel forming block made of metal having a second channel communicating with the first channel and a second accommodating recess located at the end of the second channel and provided opposite the first accommodating recess to accommodate the second orifice base; an annular first groove formed in the bottom wall of the first accommodating recess; an annular second groove formed in the bottom wall of the second accommodating recess; an annular first projection that fits into the first groove is provided on the first orifice base; and an annular second projection that fits into the second groove is provided on the second orifice base. A gasket-type orifice structure in which, when the first orifice base is not elastically deformed, the first projection is formed with a protrusion amount greater than the depth of the first groove, and when the second orifice base is not elastically deformed, the second projection is formed with a protrusion amount greater than the depth of the second groove, and in a state in which the first channel forming block and the second channel forming block are connected so that the first channel and the second channel are in communication, the connected first orifice base and the second orifice base are compressed along the axial direction of the first orifice base or the second orifice base and housed in the first housing recess and the second housing recess.

2. The gasket-type orifice structure according to claim 1, wherein the annular first projection is formed to overlap with the annular second projection in a front view.

3. The gasket-type orifice structure according to claim 1, wherein the first projection is provided on the outer peripheral edge of the first orifice base.

4. The gasket-type orifice structure according to claim 1, wherein the second projection is provided on the outer peripheral edge of the second orifice base.

5. The gasket-type orifice structure according to claim 1, wherein the area of ​​the bottom wall region of the first receiving recess in which the first groove is formed is smaller in a front view than the area of ​​the bottom wall region of the first receiving recess in which the first groove is not formed.

6. The gasket-type orifice structure according to claim 1, wherein the area of ​​the bottom wall region of the second receiving recess in which the second groove is formed is smaller in a front view than the area of ​​the bottom wall region of the second receiving recess in which the second groove is not formed.

7. A pressure-type flow control device comprising a gasket-type orifice structure according to any one of claims 1 to 6.

Images