Substrate processing device

Abstract

This substrate processing device comprises a processing container, a first hinge part, and a second hinge part. The processing container has: a container body having an opening in the upper part thereof; and a lid body that openably and closably covers the opening. The first hinge part is disposed outside the region of the opening, and supports the lid body so as to be rotatable around a first axis along the horizontal direction. The second hinge part is disposed outside the opening, and supports, so as to be rotatable around a second axis along the vertical direction so as to move away from the processing container, the lid body that has rotated around the first axis so as to open the opening.

Description

Substrate processing apparatus

[0001] Various aspects and embodiments of the present disclosure relate to a substrate processing apparatus.

[0002] The following Patent Document 1 discloses: "A vacuum processing apparatus comprising: a transfer container in which a target wafer to be processed is transferred through a depressurized internal space; a vacuum vessel having a processing chamber connected to a side wall of the transfer container and having a sample stage in which the target wafer to be processed is placed; a lid member that is provided at an upper portion of the vacuum vessel and opens and closes the vacuum vessel; an inner chamber member disposed inside the vacuum vessel and constituting an inner side wall of the processing chamber; a jig disposed outside the vacuum vessel and connected to a side wall of the vacuum processing vessel, the jig comprising: a first joint portion (230) having a vertical axis and a horizontal axis; and an arm portion (250) that is rotatable in vertical and horizontal directions around each of the vertical axis and the horizontal axis of the joint portion (230), is extendable and retractable in length, and has a distal end connected to the inner chamber member, wherein the jig further comprises: a head (260) disposed at the distal end of the arm portion (250) and connected to the inner chamber member; and a second joint portion (810) that rotates the inner chamber member connected to the head (260) around a horizontal axis thereof, and the inner chamber member, whose distal end of the arm portion (250) is inserted into the vacuum vessel and connected thereto, is configured to be removable from the inside of the vacuum vessel in a state where the lid member is opened and the inside of the vacuum vessel is open to the atmosphere.".

[0003] Japanese Patent No. 5564271

[0004] The present disclosure provides a substrate processing apparatus capable of reducing the space required for maintenance of the substrate processing apparatus.

[0005] One aspect of the present disclosure is a substrate processing apparatus comprising a processing container, a first hinge portion, and a second hinge portion. The processing container has a container body having an opening at the top and a lid that covers the opening in an openable and closable manner. The first hinge portion is located outside the region of the opening and supports the lid so as to be rotatable about a first axis along the horizontal direction. The second hinge portion is located outside the opening and supports the lid so as to be rotatable about a second axis along the vertical direction so as to move away from the processing container after it has been rotated about the first axis to open the opening.

[0006] According to various aspects and embodiments of this disclosure, the space required for maintenance of the substrate processing apparatus can be reduced.

[0007] Figure 1 is a diagram showing an example of a side view of the substrate processing apparatus, including a partial cross-section, as viewed from the Y-axis direction. Figure 2 is a diagram showing an example of the top view of the substrate processing apparatus as viewed from the Z-axis direction. Figure 3 is a diagram showing an example of a side view of the substrate processing apparatus as viewed from the X-axis direction. Figure 4 is a perspective view showing an example of a locking mechanism in the locked state. Figure 5 is a cross-sectional view showing an example of the structure of the locking mechanism in the locked state. Figure 6 is a perspective view showing an example of a locking mechanism in the unlocked state. Figure 7 is a cross-sectional view showing an example of the structure of the locking mechanism in the unlocked state. Figure 8 is a side view showing an example of the state of the lid when performing maintenance on the lid. Figure 9 is a top view showing an example of the state of the lid when performing maintenance on the lid. Figure 10 is a side view showing an example of the movement of the lid when performing maintenance on the container body. Figure 11 is a top view showing an example of the state of the lid when performing maintenance on the container body.

[0008] The following describes in detail an embodiment of the substrate processing apparatus with reference to the drawings. However, the substrate processing apparatus disclosed is not limited to the embodiments described below.

[0009] Incidentally, when performing maintenance on a substrate processing device, it is sometimes necessary to maintain both the container body and the lid of the processing container. In this case, if the processing container is opened by moving the lid upward, the side of the lid that faces the container body will be facing downward, making it difficult to maintain the lid in that state. Therefore, it is conceivable to use a hinge with a horizontal axis to open the lid to a 180-degree angle so that the side of the lid that faces the container body is facing upward.

[0010] In this case, maintenance of the lid on the side facing the container body becomes easier, but maintenance of the inside of the container body requires accessing the inside from the side. Therefore, space must be reserved for maintenance on the side of the processing container, and other substrate processing equipment or peripheral equipment cannot be placed in that location. Consequently, it is difficult to reduce the footprint of the entire system, including the substrate processing equipment.

[0011] Therefore, this disclosure provides a technology that can reduce the space required for maintenance of substrate processing equipment.

[0012] [Configuration of Substrate Processing Apparatus 1] Figure 1 is a diagram showing an example of a side view of the substrate processing apparatus 1, including a partial cross-section, when viewed from the Y-axis direction. Figure 2 is a diagram showing an example of the top surface of the substrate processing apparatus 1 when viewed from the Z-axis direction. Figure 3 is a diagram showing an example of a side view of the substrate processing apparatus 1 when viewed from the X-axis direction. The substrate processing apparatus 1 illustrated in Figures 1 to 3 is, for example, a PVD (Physical Vapor Deposition) apparatus that forms a metal film on a substrate W by sputtering under a reduced pressure atmosphere.

[0013] The substrate processing apparatus 1 includes a processing container 10. The processing container 10 is configured to be able to reduce pressure and contains the substrate W to be processed. The processing container 10 has a container body 11 and a lid 12. The container body 11 and lid 12 are made of, for example, aluminum and are connected to ground potential.

[0014] The container body 11 is formed in a substantially cylindrical shape with a bottom and an opening 11a at the top. An exhaust device V for reducing the pressure of the sealed space inside the processing container 10 is connected to the bottom of the container body 11 via an APC (Automatic Pressure Control) valve (not shown). An opening (not shown) for loading and unloading substrates W is formed in the side wall of the container body 11, and a gate valve (not shown) for opening and closing this opening is provided.

[0015] The lid 12 is capable of closing the opening 11a of the container body 11 and is attached to the upper side of the container body 11. The shape of the lid 12 is, for example, dome-shaped. The lid 12 is attached to the container body 11 via a first hinge portion 15 and a second hinge portion 16. The first hinge portion 15 opens and closes the opening 11a of the container body 11 using the lid 12. The second hinge portion 16 moves the lid 12 after the opening 11a of the container body 11 has been opened. An O-ring 111 is provided between the container body 11 and the lid 12 as a sealing member.

[0016] A mounting table 13 is provided inside the processing container 10 as a substrate support. The substrate W is placed on the mounting table 13. Specifically, the substrate W is placed horizontally on the mounting table 13 so as to face the processing space S defined by the shield portion 112, which will be described later. The mounting table 13 has a base portion 131 and an electrostatic chuck 130.

[0017] The base portion 131 is formed in a disc shape, for example, using aluminum. A heater (not shown) for heating the substrate W is provided on this base portion 131. Alternatively, a cooling mechanism may be provided instead of the heater, or both a heater and a cooling mechanism may be provided.

[0018] The electrostatic chuck 130 has a dielectric film and electrodes provided as an inner layer of the dielectric film, and is provided on a base portion 131. A DC power supply 17 is connected to the electrodes of the electrostatic chuck 130. The substrate W placed on the electrostatic chuck 130 is held in place by the electrostatic attraction force generated by the voltage applied from the DC power supply 17.

[0019] The mounting base 13 is connected to the rotation / movement mechanism 18. The rotation / movement mechanism 18 includes, for example, a support shaft 180 and a drive unit 181.

[0020] The support shaft 180 extends vertically so as to penetrate the bottom wall of the processing container 10. A sealing member SL is provided between the support shaft 180 and the bottom wall of the processing container 10. The sealing member SL is a member that seals the space between the bottom wall of the processing container 10 and the support shaft 180 so that the support shaft 180 can rotate and move up and down, and is, for example, a magnetic fluid seal. The upper end of the support shaft 180 is connected to the center of the lower surface of the mounting base 13, and the lower end is connected to the drive unit 181. The drive unit 181 has, for example, a motor and generates a driving force to rotate and move the support shaft 180 up and down. As the support shaft 180 rotates about its axis AX, the mounting base 13 rotates about the axis AX, and as the support shaft 180 moves downward, the mounting base 13 moves up and down.

[0021] Above the mounting base 13, a metal target holder 140 is provided to hold a metal target 141. The target holder 140 holds the target 141 so that it is positioned inside the processing container 10. This target holder 140 is attached to the lid 12 of the processing container 10. A through-hole 12a is formed at the mounting position of the target holder 140 in the processing container 10. In addition, an insulating member 142 is provided on the inner wall surface of the processing container 10 so as to surround the through-hole 12a. The target holder 140 is attached to the processing container 10 via the insulating member 142 so as to close the through-hole.

[0022] The target holder 140 holds the target 141 so that the target 141 faces the mounting table 13 and is positioned diagonally above the shield opening 112a of the shield portion 112. The target holder 140 also holds the target 141 facing forward so that the target 141 faces the substrate W to be processed through the shield opening 112a. A power supply 143 is connected to the target holder 140, and a negative DC voltage is applied from the power supply 143. An AC voltage may be applied instead of a negative DC voltage.

[0023] A magnet 144 is positioned on the rear side of the target holder 140, outside the processing container 10. The magnet 144 forms a magnetic field that leaks to the front side of the target 141 held by the target holder 140, and is connected to a moving mechanism 145. The moving mechanism 145 swings the magnet 144, for example, along the depth direction of the device (for example, the Y-axis direction in Figure 1). The moving mechanism 145 has a drive source (not shown), such as a motor, that generates the driving force to swing the magnet 144.

[0024] The lid 12 is provided with a gas introduction member 121. The gas introduction member 121 supplies gas supplied from a gas supply source (not shown) into the processing container 10.

[0025] The first hinge portion 15 is located outside the area of ​​the opening 11a and supports the lid 12 so that it can rotate around a first axis that is aligned horizontally. The first hinge portion 15 includes a rotating member 150, a shaft member 151, and a motor 152, as shown in Figures 1 to 3, for example. The shaft member 151 is located outside the opening 11a of the container body 11. The shaft member 151 is also positioned so that its central axis extends in a direction aligned horizontally (for example, in the Y-axis direction in Figures 1 to 3). The central axis of the shaft member 151 is an example of a first axis, and the motor 152 is an example of a first motor.

[0026] The rotating member 150 is connected to the lid 12. The rotating member 150 rotates around the shaft member 151, thereby opening and closing the lid 12 relative to the container body 11. The motor 152 rotates the rotating member 150 around the shaft member 151.

[0027] The second hinge portion 16 is positioned outside the opening 11a and supports the lid 12, which has rotated around the first axis to open the opening 11a, so that it can rotate around a second axis along the vertical direction so that it moves away from the processing container 10. The second hinge portion 16 includes a rotating member 160, a motor 161, and a shaft member 162, as shown in Figures 1 to 3, for example. The shaft member 162 is positioned outside the opening 11a of the container body 11. The shaft member 162 is also positioned so that its central axis extends along the vertical direction (for example, the Z-axis direction in Figures 1 to 3). Furthermore, the shaft member 162 is positioned outside the center of the side surface of the container body 11 in the direction along the horizontal direction (for example, the Y-axis direction in Figures 1 to 3). The central axis of the shaft member 162 is an example of a second axis, and the motor 161 is an example of a second motor.

[0028] The rotating member 160 is connected to the first hinge portion 15. By rotating the rotating member 160 around the shaft member 162, the first hinge portion 15 and the lid 12 are rotated away from the container body 11. The motor 161 rotates the rotating member 160 around the shaft member 162. A base member 21 is also connected to the rotating member 160, and the motor 161 rotates the base member 21 together with the rotating member 160. The shaft member 162 is positioned outside the center of the side surface of the container body 11 in a direction along the horizontal direction (for example, the Y-axis direction in Figures 1 to 3). Therefore, the lid 12, the first hinge portion 15, and the base member 21 are rotated away from the container body 11 by the rotating member 160.

[0029] The rotating member 150 of the first hinge portion 15 is provided with a light-emitting portion 150a and a light-emitting portion 150b, as shown in Figure 1, for example. The base member 21 is provided with a light-receiving portion 153. The light-emitting portion 150a is positioned opposite the light-receiving portion 153 when the lid 12 is open to 180 degrees. The light-emitting portion 150b is positioned opposite the light-receiving portion 153 when the lid 12 is open to 110 degrees. 110 degrees is an example of a first angle.

[0030] The light-emitting units 150a and 150b emit light, and the light-receiving unit 153 detects the light emitted by the light-emitting units 150a and 150b. By detecting the light emitted by the light-emitting unit 150a, the light-receiving unit 153 can detect that the lid 12 is open at 180 degrees. Furthermore, by detecting the signal emitted by the light-emitting unit 150b, the light-receiving unit 153 can detect that the lid 12 is open at 110 degrees.

[0031] A light-emitting unit 113 is provided on the side wall of the container body 11, and a light-receiving unit 21a is provided on the base member 21. The light-receiving unit 21a is an example of a first sensor. The light-emitting unit 113 is positioned to face the light-receiving unit 21a when the base member 21 is in contact with the side surface of the container body 11. The light-emitting unit 113 emits light, and the light-receiving unit 21a detects the light emitted by the light-emitting unit 113. By detecting the light emitted by the light-emitting unit 113, the light-receiving unit 21a can detect whether the base member 21 is in contact with the side surface of the container body 11. In other words, by detecting whether or not the light emitted by the light-emitting unit 113 is being detected, the light-receiving unit 21a can detect whether or not the lid 12 is rotating around the second axis.

[0032] A locking mechanism 20 is provided on the outer wall of the container body 11. The locking mechanism 20 controls the locking and unlocking of the base member 21. The locking mechanism 20 has a housing 22 and a cylinder 23, as shown in Figures 4 to 7, for example. Figure 4 is a perspective view showing an example of the locking mechanism 20 in the locked state, and Figure 5 is a cross-sectional view showing an example of the structure of the locking mechanism 20 in the locked state. Figure 6 is a perspective view showing an example of the locking mechanism 20 in the unlocked state, and Figure 7 is a cross-sectional view showing an example of the structure of the locking mechanism 20 in the unlocked state.

[0033] A handle 24 is provided on the cylinder 23. The operator can raise and lower the cylinder 23 by operating the handle 24 along the guide hole 25. For example, as shown in Figures 4 and 5, when the cylinder 23 is raised, the cylinder 23 is inserted into the recess 21b of the base member 21, and the base member 21 is locked against the housing 22 and the container body 11. This prevents the rotating member 160 from rotating around the shaft member 162.

[0034] On the other hand, as shown in Figures 6 and 7, for example, when the cylinder 23 descends, the cylinder 23 is withdrawn from the recess 21b of the base member 21, and the lock between the base member 21 and the housing 22 and the container body 11 is released. As a result, the rotating member 160 can rotate around the shaft member 162.

[0035] The housing 22 is provided with a light-receiving unit 22a and a light-receiving unit 22b, and the cylinder 23 is provided with a light-emitting unit 23a. The light-emitting unit 23a emits light, and the light-receiving units 22a and 22b detect the light emitted by the light-receiving unit 23a. The light-receiving unit 22a is positioned opposite the light-receiving unit 23a when the cylinder 23 is raised to the locked position, as shown in Figure 5, for example. This allows the light-receiving unit 22a to detect that the cylinder 23 is in the locked position when it detects the light emitted by the light-receiving unit 23a. The light-receiving units 22a and 22b are examples of a second sensor.

[0036] The light-receiving unit 22b is positioned opposite the light-emitting unit 23a when the cylinder 23 is lowered to the unlocked position, as shown in Figure 7, for example. This allows the light-receiving unit 22b to detect that the cylinder 23 is in the unlocked position when it detects light emitted by the light-emitting unit 23a.

[0037] The substrate processing apparatus 1 includes a control unit U, as shown in Figure 1, for example. The control unit U processes computer-executable instructions that cause the substrate processing apparatus 1 to perform various processes described herein. The control unit U may be configured to control each element of the substrate processing apparatus 1 to perform the various processes described herein. In this embodiment, some or all of the control unit U may be included in the substrate processing apparatus 1. The control unit U may include a processing unit, a storage unit, and a communication interface. The control unit U is implemented, for example, by a computer. The processing unit may be configured to read a program from the storage unit that provides logic or routines that enable various control operations, and to perform various control operations by executing the read program. This program may be stored in the storage unit in advance, or it may be obtained via a medium when needed. The obtained program is stored in the storage unit and read from the storage unit and executed by the processing unit. The medium may be various storage media read by a computer, or it may be a communication line connected to a communication interface. The storage medium may be temporary or non-temporary. The processing unit may be a CPU (Central Processing Unit). The storage unit may include RAM (Random Access Memory), ROM (Read Only Memory), HDD (Hard Disk Drive), SSD (Solid State Drive), or a combination thereof. The communication interface may communicate with the substrate processing device 1 via a communication line such as a LAN (Local Area Network).

[0038] [Movement of the lid 12 during maintenance] Figure 8 is a side view showing an example of the state of the lid 12 when maintenance is performed on the lid 12, and Figure 9 is a top view showing an example of the state of the lid 12 when maintenance is performed on the lid 12.

[0039] When maintenance is performed on the lid 12, the control unit U confirms that the base member 21 is in contact with the side surface of the container body 11 by confirming that the light receiving unit 21a is detecting the light emitted by the light emitting unit 113. The control unit U then opens the lid 12 by controlling the motor 152 to rotate the rotating member 150 around the shaft member 151. When the rotating member 150 has rotated and the light emitting unit 150a is in a position facing the light receiving unit 153, and the light receiving unit 153 detects the light emitted by the light emitting unit 150a, the control unit U controls the motor 152 to stop the rotation of the rotating member 150. As a result, the lid 12 is opened to 180 degrees by the first hinge 15, for example, as shown in Figure 10.

[0040] As a result, the surface of the lid 12 facing the container body 11 faces upward, making maintenance of the surface of the lid 12 facing the container body 11 easier. For example, compared to when the surface of the lid 12 facing the container body 11 faces sideways or downward, the worker can work in a more comfortable posture when attaching and detaching parts such as the target 141 provided on the surface of the lid 12 facing the container body 11. This reduces the burden on the worker. In addition, for example, when replacing parts such as the target 141, it is possible to prevent the parts, screws and other components used to fix the parts, and tools used to attach / detach the parts from falling. This improves the worker's work efficiency.

[0041] Further, as shown in, for example, FIG. 9, an operator can perform maintenance on the surface of the lid 12 on the container body 11 side in the region 31 or the region 32. Therefore, it is not necessary to secure a space for maintaining the lid 12 in the region 30 around the substrate processing apparatus 1. Therefore, peripheral devices of the substrate processing apparatus 1 or another substrate processing apparatus 1 can be arranged in the region 30, and the footprint of the entire system can be reduced.

[0042] [Movement of Lid 12 During Maintenance of Container Body 11] FIG. 10 is a side view showing an example of the movement of the lid 12 when maintenance is performed on the container body 11. FIG. 11 is a top view showing an example of the state of the lid 12 when maintenance is performed on the container body.

[0043] When maintenance is performed on the interior of the container body 11, the control unit U detects light emitted from the light emitting unit 113 by the light receiving unit 21a, and confirms that the base member 21 is in contact with the side surface of the container body 11. Further, the control unit U detects light emitted from the light emitting unit 23a of the lock mechanism 20 by the light receiving unit 22b, and confirms that the cylinder 23 is in the unlocked position.

[0044] Then, the control unit U controls the motor 152 such that the lid 12 is opened to an angle within a range of more than 100 degrees and less than 120 degrees from the closed state of the lid 12. Then, when the rotating member 150 rotates, the light emitting unit 150b comes to a position facing the light receiving unit 153, and the light receiving unit 153 detects the light emitted from the light emitting unit 150b, the control unit U controls the motor 152 to stop the rotation of the rotating member 150. In the present embodiment, as shown in, for example, FIG. 10, the control unit U controls the motor 152 such that the lid 12 is opened at an angle of 110 degrees from the closed state of the lid 12.

[0045] Next, the control unit U controls the motor 161 to rotate the rotating member 160 around the shaft member 162 such that the lid 12 moves away from the container body 11, as shown in, for example, FIG. 11.

[0046] By retracting the lid body 12 using the motor 161 in this manner, an area 33 for maintaining the inside of the container body 11 can be secured, for example, as shown in FIG. 11. Therefore, it is not necessary to secure a space for maintaining the inside of the container body 11 in the area 30 around the substrate processing apparatus 1. Accordingly, peripheral devices of the substrate processing apparatus 1 or another substrate processing apparatus 1 can be arranged in the area 30, and the footprint of the entire system can be reduced.

[0047] Further, in the present embodiment, from the closed state of the lid body 12, the motor 161 rotates the rotating member 160 around the shaft member 162 such that the lid body 12 moves away from the container body 11 when the lid body 12 is opened to an angle within a range of greater than 100 degrees and less than 120 degrees. This can prevent the lid body 12 from falling into the area 33 while an operator performs maintenance on the inside of the container body 11 in the area 33. Accordingly, the maintenance work inside the container body 11 can be efficiently performed.

[0048] Note that when a plurality of substrate processing apparatuses 1 are arranged adjacent to each other, a maintenance area 33 is also provided on the front face of the adjacent substrate processing apparatus 1. Therefore, when maintenance is not being performed on the adjacent substrate processing apparatus 1, the lid body 12 may be rotated around the shaft member 162 so as to move away from the container body 11 in a state where the lid body 12 is opened up to 180 degrees.

[0049] The embodiments have been described above. The substrate processing apparatus (substrate processing apparatus 1) in this embodiment comprises a processing container (processing container 10), a first hinge portion (first hinge portion 15), and a second hinge portion (second hinge portion 16). The processing container has a container body (container body 11) having an opening (opening 11a) at the top, and a lid (lid 12) that covers the opening in an openable and closable manner. The first hinge portion is located outside the area of ​​the opening and supports the lid so that it can rotate around a first axis along the horizontal direction. The second hinge portion is located outside the opening and supports the lid so that it can rotate around a second axis along the vertical direction so that it moves away from the processing container after it has rotated around the first axis to open the opening. This makes it possible to reduce the space required for maintenance of the substrate processing apparatus.

[0050] Furthermore, in the above-described embodiment, the first hinge rotates the lid around the first axis to an angle of 180 degrees from the closed position. This reduces the burden on the worker when performing maintenance on the surface of the lid 12 that faces the container body 11. It also prevents parts used for maintenance from falling, thereby improving the efficiency of maintenance work.

[0051] Furthermore, in the above-described embodiment, the second hinge rotates the lid around the second axis when the first hinge has rotated the lid around the first axis to an angle greater than 100 degrees but less than 120 degrees from the state in which the opening is closed. This reduces the space required for the lid 12 to be retracted when performing maintenance inside the container body 11.

[0052] Furthermore, in the embodiment described above, the first hinge portion has a first motor (motor 152) that rotates the lid around a first axis. This allows the lid 12 to be easily rotated around the first axis.

[0053] Furthermore, in the embodiment described above, the second hinge portion has a second motor (motor 161) that rotates the lid around the second axis. This allows the lid 12 to be easily rotated around the second axis.

[0054] Furthermore, the substrate processing apparatus in the above-described embodiment includes a first sensor (light receiving unit 21a) that detects whether or not the lid is rotating around a second axis. This prevents the lid from rotating to close during maintenance of the container body.

[0055] Furthermore, the substrate processing apparatus in the above-described embodiment includes a locking mechanism (locking mechanism 20) that controls the prohibition and release of the rotation of the lid around the second axis. This prevents the lid from rotating to close during maintenance of the container body.

[0056] Furthermore, the substrate processing apparatus in the above-described embodiment includes a second sensor (light receiving unit 22a, light receiving unit 22b) that detects whether the locking mechanism is preventing the rotation of the cover around the second axis. This makes it possible to detect whether the operator is explicitly preventing the rotation of the cover around the second axis.

[0057] Furthermore, in the above-described embodiment, the substrate processing apparatus may be a PVD (Physical Vapor Deposition) apparatus. In a PVD apparatus, components such as targets may be placed on the lid, so maintenance of the lid and the container body is performed frequently. Therefore, reducing the space required for maintenance of the substrate processing apparatus is effective.

[0058] [Other] The technology disclosed in this application is not limited to the embodiments described above, and numerous modifications are possible within the scope of its essence.

[0059] For example, the substrate processing apparatus 1 described above was explained using the case where it is a PVD apparatus, but the disclosed technology is not limited to this. As another example, the substrate processing apparatus 1 may be other film deposition apparatus such as a CVD (Chemical Vapor Deposition) apparatus or an ALD (Atomic Layer Deposition) apparatus, or it may be an etching apparatus, a heat treatment apparatus, or a cleaning apparatus, etc.

[0060] Furthermore, in the above-described embodiment, the central axis of the shaft member 151 of the first hinge portion 15 is oriented horizontally, but the disclosed technology is not limited to this. As another example, the central axis of the shaft member 151 may be oriented obliquely to the horizontal direction, as long as it is aligned with the horizontal direction. Also, in the above-described embodiment, the central axis of the shaft member 162 of the second hinge portion 16 is oriented vertically, but the disclosed technology is not limited to this. As another example, the central axis of the shaft member 162 may be oriented obliquely to the vertical direction, as long as it is aligned with the vertical direction.

[0061] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. Indeed, the embodiments described above can be embodied in a variety of forms. Furthermore, the embodiments described above may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the attached claims.

[0062] Furthermore, the following additional information is disclosed regarding the above embodiments.

[0063] (Note 1) A substrate processing apparatus comprising: a processing container having a container body having an opening at the top and a lid that covers the opening in an openable and closable manner; a first hinge portion disposed outside the area of ​​the opening and supporting the lid so as to be rotatable about a first axis along the horizontal direction; and a second hinge portion disposed outside the opening and supporting the lid so as to be rotatable about a second axis along the vertical direction so as to move away from the processing container after it has been rotated about the first axis to open the opening. (Note 2) The substrate processing apparatus according to Note 1, wherein the first hinge portion rotates the lid about the first axis to an angle of 180 degrees from a closed position of the opening. (Note 3) The substrate processing apparatus according to Note 1 or 2, wherein the second hinge portion rotates the lid around the second axis while the first hinge portion has rotated the lid around the first axis to a first angle greater than 100 degrees and less than 120 degrees from the state in which the opening is closed. (Note 4) The substrate processing apparatus according to any one of Notes 1 to 3, wherein the first hinge portion has a first motor for rotating the lid around the first axis. (Note 5) The substrate processing apparatus according to any one of Notes 1 to 4, wherein the second hinge portion has a second motor for rotating the lid around the second axis. (Note 6) The substrate processing apparatus according to any one of Notes 1 to 5, further comprising a first sensor for detecting whether or not the lid is rotating around the second axis. (Note 7) A substrate processing apparatus according to any one of Notes 1 to 6, further comprising a locking mechanism for controlling the prohibition and release of the rotation of the cover around the second axis. (Note 8) A substrate processing apparatus according to Note 7, further comprising a second sensor for detecting whether the locking mechanism is prohibiting the rotation of the cover around the second axis. (Note 9) A substrate processing apparatus according to any one of Notes 1 to 8, wherein the substrate processing apparatus is a PVD (Physical Vapor Deposition) apparatus.

[0064] AX Axis S Processing space SL Sealing member U Control unit V Exhaust device W Substrate 1 Substrate processing device 10 Processing container 11 Container body 11a Opening 112 Shield part 112a Shield opening 113 Light-emitting part 12 Cover 12a Through-hole 121 Gas introduction member 13 Mounting table 130 Electrostatic chuck 131 Base part 140 Target holder 141 Target 142 Insulating member 143 Power supply 144 Magnet 145 Moving mechanism 15 First hinge part 150 Rotating member 150a Light-emitting part 150b Light-emitting part 151 Shaft member 152 Motor 153 Light-receiving part 16 Second hinge part 160 Rotating member 161 Motor 162 Shaft member 17 DC power supply 18 Rotation / movement mechanism 180 Support shaft 181 Drive unit 20 Locking mechanism 21 Base member 21a Light receiving unit 21b Recess 22 Housing 22a Light receiving unit 22b Light receiving unit 23 Cylinder 23a Light emitting unit 24 Handle 25 Guide hole

Claims

1. A substrate processing apparatus comprising: a processing container having a container body having an opening at the top and a lid that covers the opening in an openable and closable manner; a first hinge portion disposed outside the area of ​​the opening and supporting the lid so as to be rotatable about a first axis along the horizontal direction; and a second hinge portion disposed outside the opening and supporting the lid so as to be rotatable about a second axis along the vertical direction so as to move away from the processing container after it has been rotated about the first axis to open the opening.

2. The substrate processing apparatus according to claim 1, wherein the first hinge portion rotates the lid about the first axis to an angle of 180 degrees from the state in which the opening is closed.

3. The substrate processing apparatus according to claim 1 or 2, wherein the second hinge portion rotates the lid around the second axis while the first hinge portion has rotated the lid around the first axis to a first angle greater than 100 degrees and less than 120 degrees from the state in which the opening is closed.

4. The substrate processing apparatus according to claim 1, wherein the first hinge portion has a first motor for rotating the lid around the first axis.

5. The substrate processing apparatus according to claim 1, wherein the second hinge portion has a second motor for rotating the lid around the second axis.

6. The substrate processing apparatus according to claim 1, further comprising a first sensor for detecting whether or not the cover is rotating around the second axis.

7. The substrate processing apparatus according to claim 1, further comprising a locking mechanism for controlling the locking and unlocking of the rotation of the cover around the second axis.

8. The substrate processing apparatus according to claim 7, further comprising a second sensor for detecting whether the locking mechanism is preventing the rotation of the cover around the second axis.

9. The substrate processing apparatus according to claim 1, wherein the substrate processing apparatus is a PVD (Physical Vapor Deposition) apparatus.

Images