Inspection jig and connection method in inspection jig

Abstract

The present invention addresses the problem of making deterioration of high-frequency characteristics less likely to occur.　This inspection jig is for electrically connecting a flexible substrate and an inspection target, and comprises: a push pin that presses a portion of the flexible substrate toward the inspection target; and an elastic member that holds the push pin in a pressing state. The elastic member applies, to the push pin, a restoring force resulting from the deformation of the elastic member when the inspection target comes into contact with the flexible substrate due to the movement of the inspection target or the inspection jig in the direction in which the push pin presses.

Description

Inspection jig, connection method for inspection jig

[0001] The present invention relates to an inspection jig and the like.

[0002] Conventionally, as disclosed in Patent Document 1, a probe device (inspection jig) has been proposed.

[0003] Japanese Unexamined Patent Publication No. 2004-170182

[0004] However, with the structure of the inspection jig described in Patent Document 1, it is difficult to form a complete coaxial structure at the connection portion between the probe pin and the coaxial cable. This causes problems such as reflection loss and deterioration of high-frequency characteristics.

[0005] An example of an object of the present invention is to make it difficult for high-frequency characteristics to deteriorate in an inspection jig. Other objects of the present invention will become apparent from the description of the present specification.

[0006] One aspect of the present invention is an inspection jig for electrically connecting a flexible substrate to an inspection object, comprising: a push pin that presses a part of the flexible substrate toward the inspection object; and an elastic member that holds the push pin in a state where the push pin is pressed, wherein the elastic member provides the push pin with a restoring force resulting from deformation of the elastic member caused by the inspection object coming into contact with the flexible substrate when the inspection object or the inspection jig moves in the pressing direction of the push pin.

[0007] One aspect of the present invention is an inspection jig for electrically connecting to an inspection object, comprising: a flexible substrate that is electrically connected to the inspection object; a push pin that presses a part of the flexible substrate toward the inspection object; and an elastic member that holds the push pin in a state where the push pin is pressed, wherein the elastic member provides the push pin with a restoring force resulting from deformation of the elastic member caused by the inspection object coming into contact with the flexible substrate when the inspection object or the inspection jig moves in the pressing direction of the push pin.

[0008] One aspect of the present invention is a method for electrically connecting a flexible substrate to an object to be inspected in an inspection jig having a push pin that presses a part of the flexible substrate toward the object to be inspected, and an elastic member that holds the push pin in the pressed state, wherein the object to be inspected and the flexible substrate are brought into contact by movement of the object to be inspected or the inspection jig in the direction pressed by the push pin, a restoring force is applied to the push pin by deformation of the elastic member caused by the contact, and the object to be inspected and the flexible substrate are electrically connected.

[0009] According to the above embodiment of the present invention, the objective is to make it less likely for deterioration of high-frequency characteristics to occur in the inspection jig.

[0010] This is an exploded perspective view of the inspection jig of this embodiment. This is an exploded perspective view of the inspection jig, showing the clamping part, elastic member, push pin group, flexible substrate, workpiece, work base, and plunger. This is a perspective view of the inspection jig with the holding part and the holding mechanism omitted from the illustration. This is a yz cross-sectional perspective view of the clamping part, elastic member, push pin group, flexible substrate, workpiece, work base, and plunger. This is an enlarged xz cross-sectional view of the region including the tongue in the inspection jig before pressing by the plunger. This is an enlarged xz cross-sectional view of the region including the tongue in the inspection jig after pressing by the plunger.

[0011] The inspection jig 1 according to this embodiment will be described below with reference to Figures 1 to 7. Note that the embodiments are not limited to those described below. Furthermore, the contents described in one embodiment generally apply to other embodiments as well. Also, each embodiment and each modification can be combined as appropriate.

[0012] Here, to explain the directions, we define the x, y, and z directions. The x direction is the horizontal direction in which the rotation axis AX of the retaining plate 33a extends. The y direction is the horizontal direction perpendicular to the x direction. The z direction is the vertical direction perpendicular to both the x and y directions. In this embodiment, we will explain by assuming that the x direction is the left-right direction, the y direction is the front-back direction, and the z direction is the up-down direction. In Figure 1 and other figures, the directions indicated by the arrows for the x, y, and z axes are defined as the right direction, the front direction, and the up direction, respectively.

[0013] To facilitate understanding of the inspection jig 1, some elements constituting the inspection jig 1 are omitted in Figures 3 and 5. Specifically, Figure 3 omits the illustration of the first work guide 25, the second work guide 27, the base portion 11, and the fastening members for attaching the work base 15 to the base portion 11. Furthermore, Figure 3 shows the yz cross-section through which the push pin P passes for the work base 15 and the plunger 33c, and shows the outer shape of the clamping portion 17, the elastic member 19, the push pin group 21, the flexible substrate 23, and the work 51. Figure 4 omits the illustration of the clamping mechanism holding portion 31 and the clamping mechanism 33. Figure 5 omits the illustration of the first work guide 25, the second work guide 27, the base portion 11, the fastening members for attaching the work base 15 to the base portion 11, and the fastening members for attaching the clamping portion 17 to the work base 15.

[0014] (Inspection jig 1) As shown in Figures 1 to 5, the inspection jig 1 of this embodiment comprises a base portion 11, a hook portion 13, a work base 15, a clamping portion 17, an elastic member 19, a group of push pins 21, a flexible substrate 23, a first work guide 25, a second work guide 27, a connector 29, a holding mechanism holding portion 31, a holding mechanism 33 (holding plate 33a, holder 33b, plunger 33c), and a hook 33d.

[0015] (Base portion 11) The base portion 11 is the base of the inspection jig 1 and has a roughly rectangular parallelepiped shape. A recessed portion 11a is provided on the upper surface of the base portion 11 in the area facing the lower surface of the clamping portion 17. The base portion 11 can be made of, for example, resin. The material of the base portion 11 is, for example, PBT (polybutylene terephthalate).

[0016] (Hooking portion 13) The hooking portion 13 is attached to the front surface of the base portion 11 by screwing it from the front in the y direction. The hooking portion 13 has an area to which the hook 33d of the retaining mechanism 33, which will be described later, is hooked. The hooking portion 13 can be made of resin, for example. The material of the hooking portion 13 is, for example, PBT (polybutylene terephthalate).

[0017] (Work base 15) The work base 15 is attached to the upper surface of the base portion 11 by screw fastening from the upper side in the z direction. The work base 15 has a substantially rectangular parallelepiped shape. The work base 15 holds a part of the workpiece 51, the flexible substrate 23, etc., on its upper surface which is parallel to the x and y planes. The work base 15 can be made of, for example, resin. The material of the work base 15 is, for example, PBT (polybutylene terephthalate).

[0018] The workpiece base 15 has a hole 15a that penetrates in the z direction. The workpiece base 15 holds the clamping portion 17 and the like inside (through the hole 15a).

[0019] As shown in Figures 3 and 5, the hole 15a houses the push pin group 21 at the top and the clamping portion 17 and elastic member 19 at the bottom. Specifically, the hole 15a includes first to fourth regions h1 to h4. The first region h1 houses the tip portion P1 of the push pin P in a state where the upper end of the tip portion P1 of the push pin P can protrude upward in the z direction from the upper surface of the work base 15. The second region h2 is located below the first region h1 in the z direction, has a larger xy cross-section than the first region h1, and houses the rear end portion P2 of the push pin P. The third region h3 is located below the second region h2 in the z direction, has a larger xy cross-section than the second region h2, and houses a portion of the clamping portion 17 and the elastic member 19. The fourth region h4 is located below the third region h3 in the z direction, has a larger y-direction dimension than the third region h3, and houses the remaining portion of the clamping portion 17.

[0020] (Clamping part 17) The clamping part 17 is attached to the inside of the work base 15 by screw fastening from the lower side in the z direction. The clamping part 17 has a columnar shape with a convex shape in the yz cross section. The clamping part 17 holds the elastic member 19 on its upper surface. The clamping part 17 can be made of, for example, resin. The material of the clamping part 17 is, for example, PC (polycarbonate).

[0021] (Elastic member 19) The elastic member 19 is placed on the upper surface of the clamping portion 17. The elastic member 19 is made of rubber or the like and has a roughly rectangular parallelepiped shape. The elastic member 19 holds the push pin group 21 on its upper surface.

[0022] (Size of the elastic member 19) The elastic member 19 is fitted into the third region h3 of the work base 15 by press-fitting or the like. For this reason, it is desirable that the elastic member 19 and the third region h3 of the work base 15 are formed such that there is almost no gap between the elastic member 19 and the third region h3 of the work base 15 in at least one of the x and y directions.

[0023] (Push pin group 21) The push pin group 21 has a plurality of push pins P extending in the z direction. Each of the push pins P is made of a non-stretchable material that does not stretch or contract in the z direction. The push pins P can be made of, for example, resin. The material of the push pins P is, for example, PEEK (polyether ether ketone). Each of the push pins P has a tip P1 on the upper side in the z direction and a rear end P2 that is thicker than the tip P1 and is located below the tip P1 in the z direction. Each of the push pins P is made of a non-conductive material such as resin.

[0024] The number and arrangement of the push pins P constituting the push pin group 21 and the first region h1 of the work base 15 are determined according to the number and arrangement of connection terminals on the flexible substrate 23 and the workpiece 51.

[0025] In this embodiment, as an example, the push pin group 21 consists of six push pins P arranged in the y direction as shown in Figure 3, one push pin P located to the left in the x direction and to the front in the y direction of the push pin P located to the front in the y direction of the six push pins P, and one push pin P located to the left in the x direction and to the rear in the y direction of the push pin P located to the left in the x direction and to the rear in the y direction of the push pin P located to the rear in the y direction of the six push pins P.

[0026] (Holding of the elastic member 19 and the push pin group 21) The push pin group 21 is placed on the elastic member 19. The elastic member 19 and the push pin group 21 are held between the work base 15 and the clamping portion 17. The first region h1 and the second region h2 restrict the movement of the push pin group 21 in directions other than the z direction. Furthermore, the step at the boundary between the first region h1 and the second region h2 restricts the upward movement of the push pin group 21 in the z direction. In addition, the elastic member 19 restricts the downward movement of the push pin group 21 in the z direction.

[0027] The size and material of the elastic member 19 and the size of the push pin P are determined to satisfy the following two conditions.

[0028] (Condition 1) As shown in Figure 6, when no downward pressure is applied in the z direction by the plunger 33c, the upper end of the tip P1 of the push pin P protrudes upward in the z direction by a predetermined length d (for example, d = approximately 0.1 mm) from the upper surface of the work base 15, lifting the tongue Q of the tongue group 23a of the flexible substrate 23 upward in the z direction. At this time, the lower end of the rear end P2 of the push pin P hardly indents the elastic member 19.

[0029] (Condition 2) As shown in Figure 7, with the plunger 33c pressing downward in the z direction, the lower end of the rear end P2 of the push pin P causes the elastic member 19 to be recessed downward in the z direction by a predetermined length d. At this time, the upper end of the tip P1 of the push pin P hardly protrudes upward in the z direction from the upper surface of the work base 15.

[0030] Therefore, each of the push pins P in the push pin group 21 is held in a state that allows it to move in the z direction by a predetermined length d.

[0031] (Flexible substrate 23) The flexible substrate 23 is attached to the upper surface of the work base 15 by screws from the upper side in the z direction, in a state parallel to the x and y planes. The flexible substrate 23 can be made of, for example, resin. The material of the flexible substrate 23 is, for example, PI (polyimide). A substrate-side transmission line (not shown) is provided on the flexible substrate 23. The substrate-side transmission line includes a signal line and a ground line. The substrate-side transmission line is electrically connected to the connector 29. As shown in Figure 3, in the flexible substrate 23, tongue pieces Q of the tongue piece group 23a are formed in each region facing the first region h1 of the hole 15a of the work base 15.

[0032] The tongue Q is formed by a slit (notch) surrounding one end of the substrate-side transmission line. The slit is formed, for example, in a roughly U-shape. However, the slit is not limited to a roughly U-shape and may have other shapes, such as a roughly polygonal shape. The slit allows the tongue Q to bend in the z-direction away from the surrounding area of ​​the flexible substrate 23.

[0033] (First work guide 25) As shown in Figure 1, the first work guide 25 is attached to the upper surface of the work base 15 by screwing it from above in the z direction, sandwiching the area on the left side in the x direction of the flexible substrate 23. The first work guide 25 can be made of, for example, resin. The material of the first work guide 25 is, for example, PC (polycarbonate). The first work guide 25 has a substantially concave shape when viewed from the z direction. The first work guide 25 restricts the movement of the work 51 to the right in the x direction, the front in the y direction, and the rear in the y direction in order to position the work 51 so that the right end of the work 51 in the x direction overlaps with the tongue group 23a of the flexible substrate 23.

[0034] (Second work guide 27) As shown in Figures 1, 2, and 4, the second work guide 27 is attached to the upper surface of the base portion 11 by screwing it in from below in the z direction. The second work guide 27 can be made of, for example, resin. The material of the second work guide 27 is, for example, PBT (polybutylene terephthalate). The second work guide 27 has a substantially L-shape when viewed from the y direction. The surface of the second work guide 27 that holds the workpiece 51 is parallel to the xy plane and has substantially the same height as the upper surface of the flexible substrate 23 attached to the work base 15. The second work guide 27 restricts the movement of the workpiece 51 to the left in the x direction and downward in the z direction in order to position the workpiece 51 so that the right end of the workpiece 51 in the x direction overlaps with the tongue group 23a of the flexible substrate 23.

[0035] (Connector 29) As shown in Figures 1, 2, and 4, the connector 29 is attached to the upper surface of the work base 15 by screwing it from the upper side in the z direction, sandwiching the area on the right side in the x direction of the flexible substrate 23. The connector 29 is, for example, an SMD (Surface Mount Device) connector. The core wire (not shown) of the connector 29 extends from the left side in the x direction and the lower side in the z direction, to the right side in the x direction and the upper side in the z direction, when viewed from the y direction. One end of the core wire of the connector 29 is in contact with the other end of the substrate-side transmission line in the flexible substrate 23. The other end of the core wire of the connector 29 is connected to the first device 61 via a cable.

[0036] (Pressing mechanism holding part 31) As shown in Figures 1 and 2, the pressing mechanism holding part 31 is attached to the rear surface of the base part 11 by screw fastening from the rear side in the y direction. The pressing mechanism holding part 31 holds the pressing plate 33a of the pressing mechanism 33 in a state in which it can rotate around the rotation axis AX.

[0037] (Pressing mechanism 33) As shown in Figures 1 and 2, the pressing mechanism 33 includes a pressing plate 33a, a presser 33b, a plunger 33c, a hook 33d, and a spring 33e. The pressing plate 33a, the presser 33b, and the plunger 33c can be made of, for example, resin. The material of the pressing plate 33a, the presser 33b, and the plunger 33c is, for example, PBT (polybutylene terephthalate). The hook 33d can be made of, for example, an aluminum alloy. The material of the hook 33d is, for example, duralumin.

[0038] (Retaining plate 33a) The retaining plate 33a is attached to the retaining mechanism holding part 31 so as to be rotatable around the rotation axis AX. The retaining plate 33a holds the retainer 33b. The retaining plate 33a holds the hook 33d at its tip.

[0039] (Presser 33b) The retainer 33b is attached to the retainer plate 33a by screws from the left and right sides in the x-direction. The retainer 33b holds the plunger 33c.

[0040] (Plunger 33c) The plunger 33c is attached to the lower side of the retainer 33b in the z direction by screwing it in from the upper side in the z direction.

[0041] (Hook 33d) The hook 33d is attached to the tip of the retaining plate 33a.

[0042] (Spring 33e) The spring 33e is positioned between the retaining plate 33a and the hook 33d. The spring 33e applies a force in a direction that pulls the retaining plate 33a and the hook 33d apart from each other. The spring 33e is not particularly limited as long as it is an elastic member such as a coil spring.

[0043] When the pressing plate 33a covers the upper surface of the work base 15 and the hook 33d is latched to the latching portion 13, the plunger 33c presses a part of the work 51 (the right side in the x-direction), the region including the tongue piece Q of the flexible substrate 23, and the push pin group 21 downward in the z-direction from the upper side in the z-direction. Further, when the hook 33d is latched to the latching portion 13, the biasing force of the spring 33e causes the hook 33d to be more firmly latched by the latching portion 13, and the pressing plate 33a is more strongly biased toward the work base 15.

[0044] The pressing surface of the plunger 33c is held in a region of the plunger 33c facing the work 51 by an elastic body such as a spring (not shown) provided inside the plunger 33c. The elastic constant and the like of the elastic body of the plunger 33c are set such that the pressing surface of the plunger 33c can push down the push pin P during pressing.

[0045] (Work 51) The work (inspection object) 51 is a connector of a second device 62 that is electrically connected to the inspection jig 1 and undergoes inspection related to electrical characteristics. The work 51 is detachable from the inspection jig 1, and is placed on the region including the tongue piece Q of the flexible substrate 23 and the second work guide 27. A work-side transmission line (not shown) is provided on the work 51. The work-side transmission line is electrically connected to the second device 62. The work 51 is, for example, a flexible substrate. Note that the work 51 is not limited to a flexible substrate, and may be a plate-shaped rigid substrate.

[0046] (Procedure for electrically connecting flexible substrate 23 and work 51 in inspection jig 1) Next, a procedure for electrically connecting the flexible substrate 23 and the work 51 in the inspection jig 1 will be described. The inspection jig 1 is assembled in advance, and the flexible substrate 23 is attached to the work base 15.

[0047] With the plunger 33c separated from the flexible substrate 23, the work 51 is placed on the region including the tongue piece group 23a of the flexible substrate 23 and the upper surface of the second work guide 27 (see the work arranging step, FIG. 6). At this time, one end of the work-side transmission line of the work 51 faces one end of the substrate-side transmission line of the flexible substrate 23 in the z-direction. In addition, no force is applied to the push pin P from the upper side in the z-direction, and the elastic member 19 is hardly recessed except for the portion caused by the self-weight of the tongue piece Q and the push pin P. Therefore, the upper end of the tip portion P1 of the push pin P protrudes upward in the z-direction by a predetermined length d from the upper surface of the work base 15, and lifts the tongue piece Q of the tongue piece group 23a of the flexible substrate 23 upward in the z-direction. That is, the push pin P presses a part (the tongue piece Q) of the flexible substrate 23 toward the direction of the work 51 (upward in the z-direction). The region around the tongue piece Q in the flexible substrate 23 is maintained in a state parallel to the xy plane.

[0048] The hook 33d is latched to the latching portion 13. At this time, the pressing surface of the plunger 33c presses the region on the right side in the x-direction of the work 51 downward in the z-direction, brings the tongue piece Q into a state parallel to the xy plane, and presses the push pin P downward in the z-direction (see the clamping step, FIG. 7). As a result, the region of the elastic member 19 on which the push pin P is placed is recessed downward in the z-direction by the predetermined length d. Due to the restoring force of the elastic member 19, an upward force in the z-direction is applied to the push pin P, and the pressing mechanism 33 and the push pin P clamp the tongue piece Q and the work 51 arranged such that at least a part of the work 51 overlaps the tongue piece Q. That is, the elastic member 19 holds the push pin P in a state where the push pin P presses the tongue piece Q and the work 51. The elastic member 19 applies, to the push pin P, a restoring force generated by deformation of the elastic member 19 caused when the work 51, which has moved toward the pressing direction (downward in the z-direction) of the push pin P, comes into contact with the flexible substrate 23. Accordingly, the flexible substrate 23 and the work 51 are brought into close contact with each other, and the substrate-side transmission line of the flexible substrate 23 and the work-side transmission line of the work 51 are electrically connected to each other.

[0049] (Effect of the elastic member 19 providing a restoring force to the push pin P) It becomes possible to firmly connect the flexible substrate 23 and the workpiece 51. Also, since no electrical connection via the push pin P is required, reflection loss is less likely to occur even when the inspection jig 1 is used for high-frequency measurements. As a result, deterioration of high-frequency characteristics in the inspection jig 1 can be reduced. In addition, the push pin P can be made of a non-conductive material at low cost.

[0050] (Effect of pressing the tongue piece Q) This makes it possible to firmly connect the flexible substrate 23 and the workpiece 51 in a state where the flexible substrate 23 is less likely to be damaged.

[0051] (Effects of arranging the flexible substrate 23 parallel to a plane perpendicular to the direction in which the push pin P presses) The substrate-side transmission line of the flexible substrate 23 and the workpiece-side transmission line of the workpiece 51 can be formed in a substantially straight line, and compared to a configuration in which a curved region is provided on the transmission path, electrical adverse effects such as transmission path reflection are less likely to occur. As a result, deterioration of high-frequency characteristics in the inspection jig 1 can be made less likely.

[0052] (Effect of pressing the tongue piece Q in the region opposite the hole 15a) This makes it possible to firmly connect the flexible substrate 23 and the workpiece 51 in a state where the flexible substrate 23 is less likely to be damaged.

[0053] (Effects of providing the clamping portion 17) It becomes possible to easily hold the push pin P and the elastic member 19 without fixing the push pin P and the elastic member 19 together.

[0054] (Effects of clamping the tongue piece Q and the workpiece 51 which is positioned so that at least a portion of the tongue piece Q overlaps) Prior to clamping, the workpiece 51 and the flexible substrate 23 are aligned, making alignment easy and reliable. Furthermore, once the alignment is complete, the tongue piece Q and the workpiece 51 are clamped by the push pin P and the holding mechanism 33, enabling a stronger connection between the flexible substrate 23 and the workpiece 51.

[0055] (Effects of constructing the push pin P from a non-stretchable member) Multiple push pins P can be held using a single elastic member 19, and the structure can be simplified compared to a configuration in which an elastic member such as a spring is provided inside the push pin P.

[0056] (Effect of the number and arrangement of push pins P corresponding to the number and arrangement of connection terminals of the workpiece 51) Using the inspection jig 1, inspections can be performed to suit various specifications of the flexible substrate 23 and the workpiece 51.

[0057] (Effects of installation by press-fitting) Since the elastic member 19 is installed inside the work base 15 with almost no gap between the elastic member 19 and the work base 15, the elastic force from the elastic member 19 can be concentrated on the push pin P.

[0058] (Effects of providing the first work guide 25 and the second work guide 27) The workpiece 51 and the flexible substrate 23 can be aligned easily and reliably.

[0059] (Effects of mounting the clamping portion 17 inside the work base 15) Compared to a configuration in which the clamping portion 17 is mounted on a member other than the work base 15, the work base 15 and the clamping portion 17 allow for a simple and reliable clamping of the push pin group 21 and the elastic member 19.

[0060] (Effects of providing the recessed portion 11a) Physical interference between the upper surface of the base portion 11 and the lower surface of the clamping portion 17 (or the fastening member for attaching the clamping portion 17 to the work base 15) can be avoided.

[0061] (Effects of providing plunger 33c) The contraction of an elastic member such as a spring inside the plunger 33c allows the clamping mechanism 33 and the push pin P to be performed in stages.

[0062] (Effect of the push pin P pressing the tongue piece Q etc. from the lower side in the z direction) The clamping mechanism 33 and the push pin P make it possible to firmly connect the flexible substrate 23 and the workpiece 51.

[0063] (Examples of applications of tongue piece Q) In this embodiment, an example was described in which one push pin P presses one tongue piece Q upward in the z direction. However, it is also possible for two or more push pins P to press one tongue piece Q upward in the z direction.

[0064] (Example of application of pressing direction) In this embodiment, an example has been described in which the flexible substrate 23 and workpiece 51 are arranged on the upper side of the push pin P in the z direction. However, the flexible substrate 23 and workpiece 51 may also be arranged on the lower side of the push pin P in the z direction. In this case, the elastic member 19 is arranged on the upper side of the push pin P in the z direction, and the push pin P presses the tongue Q of the flexible substrate 23 on the lower side in the z direction. In this case, the base 15 side including the push pin P and flexible substrate 23 can also be configured to move toward the pressing mechanism 33.

[0065] (Application examples of push pins P and elastic members 19) In this embodiment, an example has been described in which a plurality of push pins P and elastic members 19 are configured separately. However, each of the plurality of push pins P may be made of an expandable / contractible member, and an elastic member 19 such as a spring may be provided inside it.

[0066] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims and their equivalents.

[0067] According to this specification, the following embodiments of inspection jigs are provided: (Embodiment 1) Embodiment 1 is an inspection jig for electrically connecting a flexible substrate and an object to be inspected, comprising: a push pin that presses a part of the flexible substrate toward the object to be inspected; and an elastic member that holds the push pin in the pressed state, wherein the elastic member provides the push pin with a restoring force due to the deformation of the elastic member caused by the object to be inspected coming into contact with the flexible substrate due to the movement of the object to be inspected or the inspection jig in the direction pressed by the push pin.

[0068] According to the above embodiment, it becomes possible to firmly connect the flexible substrate and the object to be inspected. Furthermore, since electrical connection via push pins is not required, reflection losses are less likely to occur even when the inspection jig is used for high-frequency measurements. This makes it possible to reduce the deterioration of high-frequency characteristics in the inspection jig. In addition, the push pins can be made of non-conductive material at low cost.

[0069] (Aspect 2) In aspect 2, the push pin presses the tongue formed by the notch in the flexible substrate toward the object to be inspected.

[0070] According to the above-described embodiment, it becomes possible to firmly connect the flexible substrate 23 and the workpiece 51 in a state in which the flexible substrate 23 is less likely to be damaged.

[0071] (Aspect 3) Aspect 3 further comprises a work base having a hole for housing the push pin, wherein the flexible substrate is attached to the work base in a state parallel to a plane perpendicular to the direction in which the push pin presses, and a tongue is provided in the region facing the hole.

[0072] According to the above-described embodiment, the transmission line on the substrate side of the flexible substrate and the transmission line of the object under inspection can be formed in a substantially straight line, and compared to an embodiment in which a curved region is provided on the transmission path, electrical adverse effects such as transmission path reflection are less likely to occur. As a result, deterioration of high-frequency characteristics in the inspection jig can be made less likely. In addition, it becomes possible to firmly connect the flexible substrate and the object under inspection in a state in which the flexible substrate is less likely to be damaged.

[0073] (Aspect 4) Aspect 4 further comprises a clamping portion that clamps the push pin and the elastic member between the work base.

[0074] According to the above-described embodiment, it becomes possible to easily hold the push pin and the elastic member without fixing the push pin and the elastic member together.

[0075] (Aspect 5) Aspect 5 further comprises a pressing mechanism, wherein the pressing mechanism and the push pin clamp the tongue and the object to be inspected, which is positioned on the work base such that at least a portion of it overlaps with the tongue.

[0076] According to the above-described embodiment, the object to be inspected and the flexible substrate can be aligned in the preliminary stage before clamping, making alignment easy and reliable. Furthermore, once the alignment is complete, the tongue piece and the object to be inspected are clamped by the push pin and the pressing mechanism, enabling a stronger connection between the flexible substrate and the object to be inspected.

[0077] (Aspect 6) In aspect 6, the push pin is made of a non-stretchable member, and the push pin is held between the work base and the elastic member.

[0078] According to the above-described embodiment, multiple push pins can be held using a single elastic member, and the configuration can be simplified compared to a configuration in which an elastic member such as a spring is provided inside the push pin.

[0079] (Aspect 7) Aspect 7 has a group of push pins including the plurality of push pins, wherein the number and arrangement of the push pins constituting the group of push pins corresponds to the number and arrangement of connection terminals in the flexible substrate or the object to be inspected.

[0080] According to the above-described embodiment, inspections can be performed using the inspection jig to accommodate various specifications of flexible substrates and objects to be inspected.

[0081] (Aspect 8) In aspect 8, the elastic member is installed inside the work base by press-fitting.

[0082] According to the above embodiment, since the elastic member is mounted inside the work base with almost no gap between the elastic member and the work base, the elastic force from the elastic member can be concentrated on the push pin.

[0083] (Aspect 9) In aspect 9, at least one of the work base and the base portion that holds the work base is provided with a work guide for positioning the object to be inspected such that at least a part of the object to be inspected overlaps with the tongue piece.

[0084] According to the above-described embodiment, the object to be inspected and the flexible substrate can be easily and reliably aligned.

[0085] (Aspect 10) In aspect 10, the clamping portion is mounted inside the work base.

[0086] According to the above-described embodiment, compared to a configuration in which the clamping portion is attached to a member other than the work base, the work base and the clamping portion allow for a simple and reliable clamping of the push pin group and the elastic member.

[0087] (Aspect 11) Aspect 11 further comprises a base portion for holding the work base, wherein a recess is provided in the area of ​​the base portion facing the clamping portion.

[0088] According to the above-described embodiment, physical interference between the upper surface of the base and the lower surface of the clamping portion (or the fastening member for attaching the clamping portion to the work base) can be avoided.

[0089] (Aspect 12) In aspect 12, the pressing mechanism includes a plunger that presses the object to be inspected when the pressing mechanism and the push pin clamp the tongue and the object to be inspected.

[0090] According to the above-described embodiment, the clamping mechanism and the push pin can be clamped in stages by the contraction of an elastic member such as a spring inside the plunger.

[0091] (Aspect 13) In aspect 13, the flexible substrate is mounted on the work base, at least a portion of the object to be inspected is placed on the tongue, the push pin presses the tongue upward, and the pressing mechanism presses the object to be inspected downward.

[0092] According to the above-described embodiment, the clamping mechanism and the push pin make it possible to firmly connect the flexible substrate and the object to be inspected.

[0093] According to this specification, the following embodiments of inspection fixtures are provided: (Embodiment 14) Embodiment 14 is an inspection fixture for electrically connecting to an object to be inspected, comprising: a flexible substrate electrically connected to the object to be inspected; a push pin that presses a part of the flexible substrate toward the object to be inspected; and an elastic member that holds the push pin in the pressed state, wherein the elastic member provides the push pin with a restoring force due to deformation of the elastic member caused by the object to be inspected coming into contact with the flexible substrate due to movement of the object to be inspected or the inspection fixture in the direction pressed by the push pin.

[0094] According to the above embodiment, it becomes possible to firmly connect the flexible substrate and the object to be inspected. Furthermore, since electrical connection via push pins is not required, reflection losses are less likely to occur even when the inspection jig is used for high-frequency measurements. This makes it possible to reduce the deterioration of high-frequency characteristics in the inspection jig. In addition, the push pins can be made of non-conductive material at low cost.

[0095] The following configurations of connection methods are provided according to this specification. (Configuration 15) Configuration 15 is a method for electrically connecting a flexible substrate to an object to be inspected in an inspection jig having a push pin that presses a part of the flexible substrate toward an object to be inspected, and an elastic member that holds the push pin in the pressed state, wherein the object to be inspected and the flexible substrate are brought into contact by movement of the object to be inspected or the inspection jig in the direction pressed by the push pin, a restoring force is applied to the push pin by deformation of the elastic member caused by the contact, and the object to be inspected and the flexible substrate are electrically connected.

[0096] According to the above embodiment, it becomes possible to firmly connect the flexible substrate and the object to be inspected. Furthermore, since electrical connection via push pins is not required, reflection losses are less likely to occur even when the inspection jig is used for high-frequency measurements. This makes it possible to reduce the deterioration of high-frequency characteristics in the inspection jig. In addition, the push pins can be made of non-conductive material at low cost.

[0097] 1 Inspection jig 11 Base part 11a Recessed part 15 Work base 15a Hole part 17 Clamping part 19 Elastic member 21 Push pin group 23 Flexible substrate 25 First work guide 27 Second work guide 33 Holding mechanism 33c Plunger 51 Work P Push pin Q Tongue piece

Claims

1. An inspection jig for electrically connecting a flexible substrate and an object to be inspected, comprising: a push pin that presses a part of the flexible substrate toward the object to be inspected; and an elastic member that holds the push pin in the pressed state, wherein the elastic member provides the push pin with a restoring force due to the deformation of the elastic member caused by the object to be inspected coming into contact with the flexible substrate as the object to be inspected or the inspection jig moves in the direction pressed by the push pin.

2. The inspection jig according to claim 1, wherein the push pin presses the tongue formed by the notch in the flexible substrate toward the object to be inspected.

3. The inspection jig according to claim 1, further comprising a work base having a hole for housing the push pin, wherein the flexible substrate is attached to the work base in a state parallel to a plane perpendicular to the direction in which the push pin presses, and a tongue is provided in a region facing the hole.

4. The inspection jig according to claim 3, further comprising a clamping portion that clamps the push pin and the elastic member between the work base.

5. The inspection jig according to claim 3, further comprising a pressing mechanism, wherein the pressing mechanism and the push pin clamp the tongue and the object to be inspected, which is positioned on the work base such that at least a portion of it overlaps with the tongue.

6. The inspection jig according to claim 3, wherein the push pin is made of a non-stretchable member, and the push pin is held between the work base and the elastic member.

7. The inspection jig according to claim 1, having a group of push pins including the plurality of push pins, wherein the number and arrangement of the push pins constituting the group of push pins correspond to the number and arrangement of connection terminals on the flexible substrate or the object to be inspected.

8. The inspection jig according to claim 3, wherein the elastic member is installed inside the work base by press-fitting.

9. The inspection jig according to claim 3, wherein at least one of the work base and the base portion that holds the work base is provided with a work guide for positioning the object to be inspected such that at least a portion of the object to be inspected overlaps with the tongue piece.

10. The inspection jig according to claim 4, wherein the clamping portion is mounted inside the work base.

11. The inspection jig according to claim 4, further comprising a base portion for holding the work base, wherein a recess is provided in the region of the base portion facing the clamping portion.

12. The inspection jig according to claim 5, wherein the pressing mechanism includes a plunger that presses the object to be inspected when the pressing mechanism and the push pin clamp the tongue and the object to be inspected.

13. The inspection jig according to claim 5, wherein the flexible substrate is mounted on the work base, at least a portion of the object to be inspected is placed on the tongue, the push pin presses the tongue upward, and the pressing mechanism presses the object to be inspected downward.

14. An inspection jig for electrically connecting to an object to be inspected, comprising: a flexible substrate electrically connected to the object to be inspected; a push pin that presses a part of the flexible substrate toward the object to be inspected; and an elastic member that holds the push pin in the pressed state, wherein the elastic member provides the push pin with a restoring force due to the deformation of the elastic member caused by the object to be inspected coming into contact with the flexible substrate as the object to be inspected or the inspection jig moves in the direction pressed by the push pin.

15. A method for electrically connecting a flexible substrate to an object to be inspected in an inspection jig having a push pin that presses a part of the flexible substrate toward the object to be inspected, and an elastic member that holds the push pin while it is pressed, wherein the object to be inspected or the inspection jig is moved in the direction pressed by the push pin to bring the object to be inspected and the flexible substrate into contact, and a restoring force is applied to the push pin by the deformation of the elastic member caused by the contact, thereby electrically connecting the object to be inspected and the flexible substrate.

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