Lid body, package, and gas sensor

Abstract

Provided are a lid body and a package in which the lid body and a substrate can be fixed without using a bonding material. The lid body has a plate-shaped main body part and at least one protrusion protruding from an edge portion of the main body part. In plan view, with respect to the protrusion, the width of the protrusion in a direction perpendicular to the direction in which the protrusion protrudes is smaller than the width of the main body part, and the protrusion has elasticity.

Description

Lid, Package, and Gas Sensor

[0001] The present disclosure relates to a lid attached to a substrate having a recess that accommodates an element, a package including the lid, and a gas sensor.

[0002] Patent Document 1 discloses an electronic component storage package including an insulating substrate having a recess, and a lid that closes an opening of the recess.

[0003] International Publication WO2024 / 162055

[0004] A lid according to one aspect of the present disclosure is a lid attached to a substrate having a recess that accommodates an element, the lid including a plate-shaped main body portion, and at least one protrusion protruding from an edge of the main body portion, wherein in a plan view, a width of the protrusion in a direction perpendicular to a protruding direction of the protrusion is narrower than a width of the main body portion, and the protrusion has elasticity.

[0005] A package according to one aspect of the present disclosure includes the above-described lid, and a substrate having a recess that accommodates an element, wherein the lid is held between inner side surfaces of the recess by an elastic force.

[0006] A gas sensor according to one aspect of the present disclosure includes a gas sensor element, and the above-described package.

[0007] This is a cross-sectional view of a gas sensor according to Embodiment 1 of the present disclosure. This is a top view of a gas sensor according to Embodiment 1 of the present disclosure. This is a top view of a cover according to Embodiment 1 of the present disclosure. This is a cross-sectional view of the cover shown in Figure 3, taken along the line IV-IV. This is a plan view showing another embodiment of the cover. This is a plan view showing another embodiment of the cover. This is a plan view showing another embodiment of the cover. This is a plan view showing another embodiment of the cover. This is a plan view showing another embodiment of the cover. This is a cross-sectional view of a gas sensor according to another embodiment. This is a top view of a cover according to another embodiment. This is a diagram showing another embodiment of the cover. This is a diagram showing another embodiment of the substrate. This is a diagram showing another embodiment of the substrate. This is a diagram showing how a cover according to another embodiment is inserted into the substrate. This is a diagram showing another embodiment of the substrate. This is a cross-sectional view of a gas sensor according to Embodiment 10 of the present disclosure. This is a top view of a gas sensor according to Embodiment 10 of the present disclosure.

[0008] In the conventional technology described above, the insulating substrate and the cover are joined together by a bonding material.

[0009] One aspect of this disclosure aims to realize a lid and a package in which the lid and the substrate can be fixed together without the use of adhesive.

[0010] According to one aspect of this disclosure, a lid and a package can be realized in which the lid and the substrate can be fixed together without the use of a bonding material.

[0011] [Embodiment 1] Hereinafter, one embodiment of the present disclosure will be described in detail.

[0012] Hereinafter, the lid, package, and gas sensor according to the embodiment will be described in detail with reference to the drawings. However, for the sake of convenience of explanation, the figures referenced below show only the components necessary for describing the embodiment in a simplified manner. Therefore, the lid, package, and gas sensor according to the embodiment may include any components not shown in the referenced figures. In the following description, the distinction between top and bottom is for convenience only and does not limit the orientation of the substrate, package, and gas sensor when they are actually used. In this specification, the side of the substrate 2 on which the element 800 is provided is defined as the top. Also, the dimensions of the components in each figure do not necessarily have to be faithful representations of the actual dimensions of the components and the dimensional ratios of each component. In this disclosure, "rectangular" is not limited to a strictly rectangular shape, but includes shapes that can be visually perceived as rectangular overall, even if, for example, the corners are curved.

[0013] [Embodiment 1] The cover 4, package 100, and gas sensor 900 according to Embodiment 1 will be described with reference to Figures 1 to 4. Figure 1 is a cross-sectional view of the gas sensor 900 according to Embodiment 1, and is a cross-sectional view taken along the line I-I in Figure 2. Figure 2 is a top view of the gas sensor 900. Figure 3 is a top view of the cover 4 according to Embodiment 1. Figure 4 is a cross-sectional view taken along the line IV-IV of the cover 4 shown in Figure 3.

[0014] As shown in the example in Figure 1, the gas sensor 900 according to Embodiment 1 comprises a package 100 according to Embodiment 1 and an element 800 mounted on the package 100. In this disclosure, the element 800 may be a gas sensor element. The package 100 comprises a substrate 2 and a lid 4. The substrate 2 has a recess 21 for housing the element 800. More specifically, the substrate 2 includes a base portion 22 having an element mounting area R on which the element 800 is mounted, and a frame portion 23 positioned surrounding the element mounting area R.

[0015] The substrate 2 has a first upper surface 201 which is the uppermost surface of the frame portion 23, a bottom surface 203 which is the bottom surface of the recess 21, and a bottom surface 204 which is the lower surface of the substrate 2. The bottom surface 203 is the upper surface of the base portion 22 and may have a mounting area R on which the element 800 is mounted. The substrate 2 may further have a second upper surface 202 which is located between the first upper surface 201 and the bottom surface 203 in the thickness direction of the substrate 2 and is substantially parallel to the bottom surface 203. In other words, the frame portion 23 may have a step on its inner surface having the second upper surface 202.

[0016] Of the inner surfaces of the substrate 2, the inner surface located between the first upper surface 201 and the second upper surface 202 is referred to as the first inner surface 205. Of the inner surfaces of the substrate 2, the inner surface located between the second upper surface 202 and the bottom surface 203 is referred to as the second inner surface 206.

[0017] As shown in Figure 2, the plan view shape of the substrate 2 may be, for example, rectangular. Similarly, the plan view shape of the recess 21 may be, for example, rectangular. The substrate 2 includes an insulating substrate made of ceramics such as an aluminum oxide sintered body (alumina ceramics), an aluminum nitride sintered body, a mullite sintered body, or a glass ceramic sintered body. The insulating substrate may be composed of a plurality of stacked insulating layers.

[0018] As shown in Figure 1, the substrate 2 may include wiring conductors 3 located on the surface and inside the substrate 2. The wiring conductors 3 may include a connecting electrode 31 that is electrically connected to the element 800, an external electrode 32 used for electrical connection to a mounting board such as a printed circuit board (PCB), and internal wiring 33 that connects the connecting electrode 31 and the external electrode 32.

[0019] The connecting electrode 31 may be located on the inner surface of the recess 21, for example, on the bottom surface 203. Alternatively, the connecting electrode 31 may extend from the bottom surface 203 into the interior of the substrate 2, specifically between the base portion 22 and the frame portion 23. Or, the substrate 2 may have a further step between the bottom surface 203 and the second upper surface 202, and the connecting electrode 31 may be located on the upper surface (third upper surface) of this step. In this case, the connecting electrode 31 may extend from the third upper surface into the frame portion 23.

[0020] The connecting electrode 31 can be electrically connected to the corresponding electrode of the element 800, for example, by a bonding wire. The external electrode 32 may be located on the lower surface 204. Alternatively, the external electrode 32 may be provided extending from the lower surface 204 to the outer surface of the substrate 2. The internal wiring 33 may include through conductors and interlayer conductors. A through conductor penetrates at least one insulating layer in the vertical direction and connects conductors located above and below the through conductor. An interlayer conductor is a conductor located between insulating layers.

[0021] As shown in Figures 1 to 3, the lid 4 has a plate-shaped main body portion 41 and at least one projection 42 protruding from the edge of the main body portion 41. In a plan view, the width W1 of the projection 42 in the direction perpendicular to the direction of projection is narrower than the width W2 of the main body portion 41. The projection 42 is also elastic.

[0022] The cover 4 can be held between the inner surfaces of the recess 21 by being pressed into the recess 21 of the substrate 2 after the element 800 is mounted on the substrate 2. Before the cover 4 is pressed into the recess 21, the outer edge of the cover 4 is located outside the outer edge of the opening of the recess 21. When the cover 4 is pressed into the recess 21, the projection 42 curves. Specifically, the boundary line shown by the dashed line in Figure 3 is the boundary, and mainly the part outside this boundary line curves (deforms). Since the projection 42 is elastic, an elastic force is generated that tries to return it to its original shape. This elastic force is a force that pushes the inner surfaces of the recess 21 outward, so the cover 4 is held between the inner surfaces of the recess 21. In other words, the cover 4 is held between the inner surfaces of the recess 21 by the elastic force of the projection 42. When the cover 4 is attached to the substrate 2, the space where the element 800 is located is not sealed by the cover 4, and a ventilation path is ensured by the gap between the cover 4 and the substrate 2.

[0023] The lid 4 has a structure in which a projection 42 narrower than the main body 41 protrudes from the main body 41. As a result, when pressed onto the substrate 2, only the projection bends, and the main body 41 is less likely to bend. This reduces the possibility of the lid 4 coming into contact with the element 800 due to the bending of the main body 41. Furthermore, because the projection 42 is elastic, when an external force is applied and it deforms, it can impart an elastic force in the direction outward from the main body 41, thus enabling the lid 4 to be fixed to the substrate 2 without adhesive.

[0024] In conventional technology, when a lid is fixed to a substrate using an adhesive, steps such as applying the adhesive, curing (if a resin adhesive is used), and sealing the lid and substrate are required. In contrast, the lid 4 according to this disclosure can be fixed to the substrate 2 without an adhesive, thus reducing the number of steps and lowering manufacturing costs. Furthermore, when an adhesive such as resin is used in a package housing a gas sensor, gas emission from the adhesive may worsen the detection accuracy. In contrast, the lid 4 according to this disclosure can be fixed to the substrate 2 without an adhesive, thus improving gas detection accuracy.

[0025] The material of the cover 4 may be stainless steel. More specifically, for example, the cover 4 may be manufactured from a stainless steel plate with a thickness of 0.02 mm or more and 0.2 mm or less by press working, etching, wire processing, etc. The type of stainless steel is not particularly limited, but for example, it may be SUS304. By using stainless steel as the material for the cover 4, the cover 4 can have the rigidity necessary to protect the element 800. In addition, when the cover 4 is pressed into the recess 21, a cover with appropriate elasticity that can be held between the inner surfaces of the recess 21 can be realized. Furthermore, stainless steel is an excellent material for a cover in that it is inexpensive, readily available, and resistant to rust.

[0026] As shown in Figure 4, the lid 4 may be flat in shape as indicated by the figure indicated by reference numeral 4001 before being pressed onto the substrate 2. In plan view, the lid 4 has an outer shape larger than the recess 21. Alternatively, the lid 4 may have a bent portion 49 between the main body 41 and the projection 42. In other words, the projection 42 may have a pre-inclined shape relative to the main body 41. In this case as well, the lid 4 has an outer shape larger than the recess 21 in plan view. Having a bent portion 49 between the main body 41 and the projection 42 before being pressed onto the substrate 2 reduces the possibility of the main body 41 bending when pressed and allows for smoother pressing onto the substrate 2. Furthermore, having a bent portion 49 makes it easier to position the lid 4 relative to the recess 21.

[0027] The substrate 2 may have a support portion 24 on the outer edge of the recess 21 in plan view that supports the lid 4. The support portion 24 may support the main body portion 41 and / or the projection 42 of the lid 4. For example, in the substrate 2, the support portion 24 may be a second upper surface 202. If the substrate 2 has a second upper surface 202 as the support portion 24, the lid 4 can be held between the first inner surfaces 205.

[0028] Alternatively, the substrate 2 may have a projection that protrudes inward from its inner surface at a position that overlaps with the projection 42 of the lid 4 in a plan view. Alternatively, the substrate 2 may have a projection that protrudes inward from its inner surface at a position that overlaps with at least a part of the main body portion 41 of the lid 4 in a plan view. The support surface on which the support portion 24 supports the lid 4 is set to a position higher than the height of the element 800, with reference to the bottom surface 203.

[0029] The substrate 2 may have multiple such protrusions, and the multiple protrusions may be located apart from each other. For example, the multiple protrusions may be provided in pairs on either side of the mounting area. Alternatively, if the shape of the recess 21 in plan view is rectangular, the protrusions may be provided on opposite sides. Or, the protrusions may be provided on each side. If the multiple protrusions are provided on adjacent inner surfaces of a recess 21 that has a rectangle in plan view, the protrusions may be provided near the corners of the recess 21. By having the protrusions in this configuration, the possibility of the lid 4 tilting can be reduced, and the posture of the lid 4 can be stabilized.

[0030] The presence of a support portion 24 on the substrate 2 facilitates the vertical positioning of the lid 4. This reduces the possibility of the lid 4 coming into contact with elements and bonding wires.

[0031] The surface roughness of the inner surface of the substrate 2 may be rougher than the surface roughness of the upper surface of the substrate 2. More specifically, in the substrate 2, the surface roughness of the first inner surface 205 may be rougher than the surface roughness of the first upper surface 201. Since the first upper surface 201 is the outer surface of the substrate 2, it is desirable that its surface be smoother. On the other hand, if the surface roughness of the first inner surface 205 that holds the lid 4 is rougher than that of the first upper surface 201, the frictional force with the lid 4 will be greater, making it more difficult for the lid 4 to come off.

[0032] If the substrate 2 is made of ceramics, the inner surface of the substrate 2 can be formed by punching out a green sheet using a die. The surface roughness of the inner surface of the substrate 2 can be adjusted by changing the type of die used for punching, adjusting the punching speed, etc.

[0033] In package 100, the entire lid 4 may be located within the recess 21. Since the projection 42 of the lid 4 does not protrude from the substrate 2, the possibility of the projection 42 coming into contact with the mounting substrate on which the gas sensor 900 is mounted, or with other components of the device equipped with the mounting substrate, can be reduced. Furthermore, because the entire lid 4 is located within the recess 21, the thickness of the substrate 2 becomes the height of package 100, thus enabling a lower profile for both package 100 and gas sensor 900.

[0034] Furthermore, when a package 100 is formed by dividing a base substrate, which has multiple substrate regions arranged to form the package 100, into individual pieces, grooves for division may be formed at the boundaries of adjacent substrate regions. Since the entire lid 4 is housed within the recess 21, the possibility of contact between the equipment that forms the grooves and the lid 4 is reduced, thereby reducing the possibility of a decrease in yield.

[0035] <Another Embodiment> The following describes various other embodiments of the lid 4 and the substrate 2.

[0036] (Another Embodiment 1) Figures 5 and 6 are plan views showing another embodiment of the lid 4. The plan view shape of the main body 41 of the lid 4 can be arbitrarily designed according to the plan view shape of the recess 21, etc. For example, the main body 41 of the lid 4 may be rectangular, as shown in the example indicated by reference numerals 5001 and 5002 in Figure 5, or it may be circular, as shown in the example indicated by reference numeral 5003 in Figure 5. Alternatively, the main body 41 of the lid 4 may be polygonal, for example, octagonal, as shown in the example in Figure 6.

[0037] If the main body portion 41 has a polygonal shape, the projections 42 may be located in multiple positions on each side of the main body portion 41, as shown in the example indicated by reference numerals 5001 and 5002 in Figure 5. Having multiple projections 42 on each side of the lid 4 reduces the possibility of the lid 4 tilting when it is pushed into the substrate 2. Also, since the number of fixing points increases, the possibility of the lid 4 coming off the substrate 2 is reduced. Alternatively, as shown in the example in Figure 6, one projection 42 may be located on one side of the main body portion 41 of the lid 4.

[0038] Furthermore, as shown in the examples in Figures 5 and 6, the main body portion 41 of the lid 4 may have at least one through-hole 43. The through-hole 43 can function as a vent for the gas sensor 900, thereby enabling the realization of a highly sensitive gas sensor 900. When the element 800 is a gas sensor element, the upper center of the element 800 may have a gas-sensing body made of sintered particles of a metal oxide such as tin oxide. The through-hole 43 may be provided so as not to overlap with the gas-sensing body when the gas sensor 900 is viewed through from above. This protects the gas-sensing body and reduces the possibility of foreign matter such as dust adhering to the gas-sensing body.

[0039] Furthermore, as shown in the example in Figure 5, the through-hole 43 may be located at a position that coincides with a straight line extending from the projection 42 in the opposite direction to the projection direction of the projection 42, and near the outer edge of the main body 41. In other words, the through-hole 43 may be located at the outer edge of the main body 41 at a position corresponding to the projection 42. In this embodiment, "near the outer edge or outer edge" may refer to the region between the outer edge of the gas-sensitive element 800 and the outer edge of the main body 41 when the package 100 is viewed from above.

[0040] Because the through-holes 43 are arranged in this manner, when the lid 4 is pressed onto the substrate 2, the deformation outside the through-holes 43 is absorbed by the through-holes 43, thereby reducing the possibility and / or degree of deformation of the central part of the main body 41. The through-holes 43 may be circular, as shown in the example indicated by reference numeral 5002 in Figure 5, or they may be slit-shaped, as shown in the examples indicated by reference numerals 5001 and 5003 in Figure 5. Furthermore, slit-shaped through-holes 43 may be arranged in a double or triple row centered on the center of the main body 41.

[0041] Furthermore, in the case of a package 100 comprising a lid 4 as shown in Figure 6 and a substrate 2 whose recess 21 has a rectangular shape in plan view, the through hole 43 may be located in a direction toward the corner of the recess 21, passing from the center of the main body 41 through the space between adjacent protrusions 42. With this configuration, the through hole 43 is located at a position where the stress from the two protrusions flanking the corner overlaps and becomes large, thus reducing deformation of the main body 41.

[0042] (Another Embodiment 2) Fig. 7 is a plan view showing another embodiment of the lid body 4. As in the example shown in Fig. 7, in the lid body 4, the width of the first end portion of the protrusion 42 adjacent to the main body portion 41 may be smaller than the width of the second end portion opposite to the first end portion. In other words, the first end portion of the protrusion 42 is the root of the protrusion. In other words, the second end portion of the protrusion 42 is the tip of the protrusion. For example, as in the example indicated by reference numeral 7001 in Fig. 7, the width of the protrusion 42 may gradually decrease as approaching the main body portion 41. Alternatively, as in the example indicated by reference numeral 7002 in Fig. 7, a notch 421 may be provided at the root of the protrusion 42. With this configuration, bending stress concentrates on the narrow width portion, so that the narrow width portion is easily bent. Thereby, the possibility of deformation of the main body portion 41 and / or the degree of deformation can be reduced.

[0043] (Another Embodiment 3) Fig. 8, Fig. 9, and Fig. 10 are plan views showing another embodiment of the lid body 4. As in the examples shown in Fig. 8 to Fig. 10, the lid body 4 may have a notch 411 on the outer edge of the main body portion 41. By providing the notch 411 on the outer edge of the main body portion 41, the notch 411 can be used as a vent, so that the sensitivity of the gas sensor 900 can be improved.

[0044] Further, the lid body 4 has a plurality of notches 411 in the main body portion 41, and the plurality of notches 411 may be positioned adjacent to the protrusion 42 with the protrusion 42 interposed therebetween. Since there are notches on both sides of the protrusion 42, the boundary line between the main body portion 41 and the protrusion 42, which is indicated by a two-dot chain line in Fig. 8 to Fig. 10, enters further inward than the line connecting the outermost edges of the main body portion 41 indicated by the broken line, so that the protrusion 42, which is a deformable portion, can be lengthened. When the protrusion 42 is lengthened toward the outside of the main body portion 41, the bending angle increases, so the contact angle with the inner side surface of the recess 21 decreases, and the fixing by elastic force becomes weak. Therefore, it is necessary to increase the size of the recess 21 to reduce the bending angle and increase the contact angle.

[0045] By providing a notch on the outer edge of the main body portion 41 and lengthening the protrusion 42, the contact angle between the protrusion 42 and the inner side surface of the recess 21 can be increased without changing the size of the recess 21. Thereby, the package 100 that is compact and has high fixing strength for the lid can be realized. In addition, when the protrusion 42 is lengthened, the height position of the tip end of the protrusion 42 can be lowered in a curved state of the protrusion 42, so the recess 21 can be designed to be shallow. Thereby, the height reduction of the gas sensor 900 can be realized. Furthermore, since the longer protrusion 42 is easier to bend, an easily bendable protrusion can be realized even in the case of size reduction.

[0046] In addition, as in the example shown in FIG. 9, the notch 411 may have a shape bulging at least toward the protrusion 42 side. For example, as shown in examples denoted by reference numeral 9001 and reference numeral 9002 in FIG. 9, the shape of the tip portion of the notch 411, that is, the shape of the innermost portion of the lid body 4 in a plan view of the notch 411, may be convex toward the protrusion 42. Alternatively, as in the example shown at 9003 in FIG. 9, the notch 411 may have a shape in which the shape of the inner tip portion of the lid body 4 in plan view is wider in both directions relative to the outer width. Alternatively, as in the example shown at 9004 in FIG. 9, the notch 411 may be located mainly within a region obtained by extending the protrusion 42 toward the main body portion 41.

[0047] Furthermore, as in the example shown in FIG. 10, the notch 411 may be in the shape of a slit. For example, as in the example shown in FIG. 10, the slit serving as the notch 411 may be inclined with respect to the side of the main body portion 41 in a direction in which the base of the protrusion 42 becomes narrower.

[0048] As in each example shown in FIG. 9 and FIG. 10, since the base of the protrusion 42 is narrowed by the notch 411, bending stress concentrates on the narrow width portion, so the possibility of deformation of the main body portion 41 and / or the degree of deformation can be reduced.

[0049] The tip of the projection 42 of the cover 4 may be straight. This configuration allows for a larger contact area with the recess 21, thereby improving the holding strength of the cover 4 in the recess 21. The tip corner of the projection 42 of the cover 4 may be rounded, as shown in the example indicated by reference numeral 1001 in Figure 10. For example, the tip corner in a plan view may have a curved shape with a curvature R of 0.05 or more. The rounded shape of the tip corner reduces the generation of debris caused by unnecessary scratches on the inner surface of the substrate 2 when inserting the cover 4 into the recess 21, thereby reducing the possibility of debris adhering to the element.

[0050] Alternatively, as shown in the example indicated by reference numerals 1002 and 1003 in Figure 10, the tip corner of the projection 42 in plan view may be composed of two straight lines. This configuration makes it easier to catch on the inner surface of the substrate 2.

[0051] (Another Embodiment 4) Figure 11 is a plan view showing another embodiment of the lid 4. Figure 11 shows the lid 4 being held on the substrate 2. As shown in the examples indicated by reference numerals 1101 to 1106 in Figure 11, in the lid 4, the projection 42 may be located only on one side when the main body portion 41 is divided into two parts by a dashed line that passes through the center of the main body portion 41 in a plan view. In Figure 11, the dashed line indicates the dashed line that passes through the center of the main body portion 41 in a plan view and divides the main body portion 41 into two parts. In the example shown in Figure 11, the lid 4 can be fixed to the substrate 2 by bringing the main body portion 41 into contact with two adjacent inner surfaces of the rectangular recess 21 in a plan view, and pressing the projection 42 against the other two inner surfaces or corners. In the lid 4, by arranging the projection 42 off-center as shown in the examples in Figure 11, the side without the projection can be pressed against the inner wall of the substrate before being pressed in, making alignment easier.

[0052] (Another Embodiment 5) In another embodiment 5, a lid 4A, a package 100A equipped with the lid 4A, and a gas sensor 900A, which are other embodiments of the lid 4, will be described with reference to Figures 12 and 13. Figure 12 is a cross-sectional view of the gas sensor 900A according to another embodiment 5. Figure 13 is a top view of the lid 4A.

[0053] As shown in Figures 12 and 13, the lid 4A may have a plurality of protrusions 42 and a canopy portion 44 extending outward from the main body portion 41 between the protrusions 42. In the lid 4A having the canopy portion 44, the protrusions 42 may be bent so as to be inclined with respect to the main body portion 41. Furthermore, the tips of the protrusions 42 may be folded back to facilitate insertion into the recess 21.

[0054] In Figure 13, the eaves 44 are located in all the spaces between adjacent protrusions 42, but the example is not limited to this one. For example, the lid 4A may have a pair of eaves 44 at positions opposite each other, sandwiching the main body 41. In a plan view of the package 100, the outer edge of the eaves 44 is located outside the outer edge of the recess 21.

[0055] Because the lid 4 has a canopy portion 44, the lid 4A is supported on the upper surface of the frame portion 23, eliminating the need for a support portion 24 inside the recess 21 as shown in Figure 1. This makes it possible to further miniaturize the gas sensor 900A. Furthermore, because the lid 4 is fixed by a projection 42, even though the lid 4 is supported on the upper surface of the frame portion 23, alignment between the recess 21 and the lid 4 becomes easier.

[0056] (Another Embodiment 6) Figure 14 shows another embodiment of the lid 4. As shown in each example in Figure 14, the main body 41 of the lid may have a protrusion 412 in the center when viewed from above. The protrusion 412 may be realized by curving the entire main body 41, for example, as shown in the example indicated by reference numeral 1401 in Figure 14. Alternatively, the protrusion 412 may be realized by providing a dome-shaped protrusion in the center of the main body 41, for example, as shown in the example indicated by reference numeral 1402 in Figure 14. Having a protrusion 412 in the center of the main body 41 can more effectively reduce the possibility of the lid 4 coming into contact with the element 800 and wire bonding, etc.

[0057] In the example shown by reference numeral 1401 in Figure 14, the lid 4 may be inserted into the substrate 2 by the curvature of the main body portion 41. In other words, the lid 4 may be fixed to the substrate 2 mainly by the elastic force of the main body portion 41. In the example shown by reference numeral 1402 in Figure 14, the main body portion becomes less prone to deformation, and only the projection 42 curves.

[0058] (Another Embodiment 7) Figures 15 and 16 show another embodiment of the substrate 2. As shown in the examples in Figures 15 and 16, in a cross section perpendicular to the bottom surface 203 of the recess 21, at least a portion of the inner surface of the substrate 2 in the height direction may be inclined with respect to the bottom surface 203. For example, as shown in the examples in Figures 15 and 16, the first inner surface 205, which is a portion of the inner surface of the substrate 2 in the height direction, may be inclined with respect to the bottom surface 203. In other words, the portion of the inner surface of the substrate 2 on the opening side, to which the tip of the projection 42 abuts, may be inclined with respect to the bottom surface 203. In the example shown in Figure 15, when the substrate 2 is viewed in plane perspective, the outer edge of the upper end of the first inner surface 205 is located inside the outer edge of the lower end of the first inner surface 205. Because the first inner surface 205 is inclined with respect to the bottom surface 203 in this way, the lid 4 becomes difficult to remove once it has been pushed in.

[0059] On the other hand, in the example shown in Figure 16, when the substrate 2 is viewed from above, the outer edge of the upper end of the first inner surface 205 is located outside the outer edge of the lower end of the first inner surface 205. Because the first inner surface 205 is inclined with respect to the bottom surface 203 in this way, the opening of the recess 21 is widened, making it easier to push in the lid 4.

[0060] Furthermore, as shown in the example in Figure 15, the upper surface of the frame portion 23 may be inclined so that the inside is lower. In other words, the region on the inner edge side of the first upper surface 201 may be inclined in a direction that approaches the bottom surface 203 as it approaches the opening of the recess 21. Having such an inclination on the first upper surface 201 makes it easier to insert the lid.

[0061] (Another Embodiment 8) In another embodiment 8, another embodiment of the lid 4 will be described using Figure 17. Figure 17 shows the lid 4 according to another embodiment 8 being inserted into the substrate 2.

[0062] As shown in Figure 17, the boundary between the main body portion 41 and the projection 42 may be pre-bent. The projection 42 may also have a curved cross-sectional shape. The bending of the boundary between the main body portion 41 and the projection 42 may be in the direction that brings the projection 42 closer to the bottom surface 203, or it may be in the opposite direction. Furthermore, the direction of the curvature of the projection 42 and the number of curved portions in the longitudinal direction of the projection 42 are not particularly limited.

[0063] (Another Embodiment 9) Figure 18 shows another embodiment of the substrate 2. In the example shown in Figure 1, an example was described in which the substrate 2 has a second upper surface 202 that acts as a support portion 24, but as shown in Figure 18, an embodiment in which the substrate 2 does not have a support portion 24 is also within the scope of this disclosure. The substrate 2 has an inner surface 207, and the lid 4 can be held between the inner surfaces 207 of the recess 21 by the elastic force of the lid 4.

[0064] (Another Embodiment 10) Another embodiment 10 shows another embodiment of the lid 4. Figure 19 is a cross-sectional view of the gas sensor 900 according to embodiment 10, and is a cross-sectional view taken along the line XIX-XIX in Figure 20. Figure 20 is a top view of the gas sensor 900 according to embodiment 10.

[0065] In the example of Embodiment 1 shown in Figures 1 to 3, the outer edge of the main body portion 41 of the lid 4, when viewed from above, was located outside the second inner surface 206. However, as shown in Figures 19 and 20, the outer edge of the lid 4 may be located inside the second inner surface 206. By adopting this configuration, a ventilation path can be formed between the outer edge of the main body portion 41 and the second inner surface 206 when viewed from above, thereby improving the sensitivity of the gas sensor 900.

[0066] In embodiment 10, the projection 42 of the lid 4 may be bent outward from the second inner surface 206 when viewed from above, as shown in Figure 19. This allows the projection 42 to be supported by the support portion 24. Alternatively, the projection 42 of the lid 4 may be bent at its base (the boundary with the main body portion 41). In this case, the lid 4 can be held between the first inner surfaces 205 by the elastic force of the projection 42.

[0067] (Summary) (1) The cover according to Embodiment 1 of the present disclosure is a cover to be attached to a substrate having a recess for housing an element, and comprises a plate-shaped main body and at least one projection protruding from the edge of the main body, wherein in a plan view, the width of the projection in a direction perpendicular to the direction of protrusion is narrower than the width of the main body, and the projection is elastic.

[0068] (2) In the lid according to aspect 2 of the present disclosure, the material of the lid is stainless steel, as in aspect 1 above.

[0069] (3) In the lid according to embodiment 3 of the present disclosure, the main body is polygonal in shape, and the protrusions are located in multiple positions on each side of the main body.

[0070] (4) The cover according to embodiment 4 of the present disclosure has a bent portion between the main body and the projection in any of embodiments 1 to 3 above.

[0071] (5) In any of the embodiments 1 to 4, the lid according to embodiment 5 of the present disclosure has at least one through hole, the through hole is located in the vicinity of the outer edge of the main body, and is positioned on a line extending from the projection in the opposite direction to the projection.

[0072] (6) In any of embodiments 1 to 5, the cover according to embodiment 6 of the present disclosure is characterized in that the width of the first end of the projection adjacent to the main body is smaller than the width of the second end opposite to the first end.

[0073] (7) The cover according to embodiment 7 of the present disclosure has a notch on the outer edge of the main body in any of embodiments 1 to 6 above.

[0074] (8) The cover according to embodiment 8 of the present disclosure has a plurality of notches in embodiment 7, wherein the plurality of notches are positioned adjacent to the projection, with the projection in between.

[0075] (9) In any of the embodiments 1 to 8, the cover according to embodiment 9 of the present disclosure has a projection that passes through the center of the main body in a plan view and is located only on one side when the main body is divided into two by a virtual line.

[0076] (10) The cover according to embodiment 10 of the present disclosure has, in any of embodiments 1 to 9 above, a plurality of projections and a canopy portion extending outward from the main body portion between the projections.

[0077] (11) In any of the above embodiments 1 to 10, the cover according to embodiment 11 of the present disclosure has a protrusion in the center when viewed in plan.

[0078] (12) A package according to embodiment 12 of the present disclosure comprises a lid according to any of embodiments 1 to 11 and a substrate having a recess for housing an element, wherein the lid is held between the inner surfaces of the recess by an elastic force.

[0079] (13) In the package according to embodiment 13 of the present disclosure, the entire lid is located within the recess in embodiment 12.

[0080] (14) In the package according to embodiment 14 of the present disclosure, in embodiment 12 or 13, the substrate has a support portion for supporting the lid on the outer edge of the recess in a plan view.

[0081] (15) In any of embodiments 12 to 14, the package according to embodiment 15 of the present disclosure is such that, in a cross section perpendicular to the bottom surface of the recess, at least a portion of the inner surface of the substrate in the height direction is inclined with respect to the bottom surface.

[0082] (16) In any of embodiments 12 to 15, the package according to embodiment 16 of the present disclosure has a surface roughness on the inner surface of the substrate that is rougher than the surface roughness on the upper surface of the substrate.

[0083] (17) The package according to embodiment 17 of the present disclosure, in any of embodiments 12 to 16, includes a base having an element mounting area on which an element is mounted, and a frame portion located surrounding the element mounting area, wherein the upper surface of the frame portion is inclined such that the inner side is lower.

[0084] (18) A gas sensor according to embodiment 18 of the present disclosure comprises a gas sensor element and a package according to any of embodiments 12 to 17.

[0085] (19) In the gas sensor according to embodiment 19 of the present disclosure, the substrate includes a ceramic material in embodiment 18.

[0086] [Additional Notes] The inventions described in this disclosure have been explained based on the drawings and embodiments. However, the inventions described in this disclosure are not limited to the embodiments described above. That is, the inventions described in this disclosure can be modified in various ways within the scope shown in this disclosure, and embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the inventions described in this disclosure. In other words, it should be noted that it is easy for those skilled in the art to make various modifications or alterations based on this disclosure. Furthermore, it should be noted that these modifications or alterations are included in the scope of this disclosure.

[0087] 100, 100A...Package 2...Substrate 21...Recess 22...Base 23...Frame 24...Support 201...First upper surface 202...Second upper surface 203...Bottom surface 204...Bottom surface 205...First inner surface 206...Second inner surface 3...Wiring conductor 4, 4A...Lid 41...Main body 411...Notch 412...Convex part 42...Protrusion 43...Through hole 44...Eaves 49...Bent part 800...Element 900, 900A...Gas sensor

Claims

1. A cover to be attached to a substrate having a recess for housing an element, comprising a plate-shaped main body and at least one projection protruding from the edge of the main body, wherein, in a plan view, the width of the projection in a direction perpendicular to the direction of protrusion is narrower than the width of the main body, and the projection is elastic.

2. The lid according to claim 1, wherein the material of the lid is stainless steel.

3. The lid according to claim 1 or 2, wherein the main body is polygonal in shape, and the protrusions are located in multiple positions on each side of the main body.

4. The lid according to any one of claims 1 to 3, having a bent portion between the main body and the projection.

5. The lid according to any one of claims 1 to 4, wherein the main body portion has at least one through hole, the through hole is located near the outer edge of the main body portion, and the through hole is located at a position that coincides with a straight line extending from the projection in the opposite direction to the projection direction.

6. The cover according to any one of claims 1 to 5, wherein the width of the first end of the projection adjacent to the main body is smaller than the width of the second end opposite to the first end.

7. The lid according to any one of claims 1 to 6, wherein the outer edge of the main body portion has a notch.

8. The lid according to claim 7, wherein it has a plurality of notches, the plurality of notches are positioned adjacent to the projection, sandwiching the projection.

9. The lid according to any one of claims 1 to 8, wherein the projection passes through the center of the main body in a plan view and is located only on one side when the main body is divided into two by a virtual line.

10. The lid according to any one of claims 1 to 9, having a plurality of the aforementioned protrusions and a canopy portion extending outward from the main body portion between the protrusions.

11. The lid according to any one of claims 1 to 10, wherein the main body portion has a protrusion in the center when viewed from above.

12. A package comprising a lid according to any one of claims 1 to 11 and a substrate having a recess for housing an element, wherein the lid is held between the inner surfaces of the recess by an elastic force.

13. The package according to claim 12, wherein the entire lid is located within the recess.

14. The package according to claim 12 or 13, wherein the substrate has a support portion on the outer edge of the recess in a plan view for supporting the lid.

15. The package according to any one of claims 12 to 14, wherein, in a cross section perpendicular to the bottom surface of the recess, at least a portion of the inner surface of the substrate in the height direction is inclined with respect to the bottom surface.

16. The package according to any one of claims 12 to 15, wherein the surface roughness of the inner surface of the substrate is rougher than the surface roughness of the upper surface of the substrate.

17. The package according to any one of claims 12 to 16, wherein the substrate includes a base portion having an element mounting area on which an element is mounted, and a frame portion positioned surrounding the element mounting area, and the upper surface of the frame portion is inclined such that the inner side is lower.

18. A gas sensor comprising a gas sensor element and a package according to any one of claims 12 to 17.

19. The gas sensor according to claim 18, wherein the substrate includes a ceramic material.

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