Substrate transfer robot system and substrate transfer method

Abstract

A substrate transfer robot system (1) comprises: a robot (2) that unloads a substrate (9) stored in a storage unit (42) through an opening (43) of the storage unit; a camera (5) that images the substrate stored in the storage unit through the opening; an illumination (7) that illuminates the substrate when the camera images the substrate; and a controller (20) that switches on and off of the illumination so that the substrate to be unloaded by the robot is illuminated.

Description

Substrate transfer robot system and substrate transfer method

[0001] The technology disclosed herein relates to a substrate transfer robot system and a substrate transfer method.

[0002] Patent Document 1 describes a conventional wafer detection apparatus. The conventional wafer detection apparatus detects the accommodation state of wafers accommodated in a wafer container. The wafer container is a container that can accommodate a plurality of wafers stacked in a vertical direction, and allows the wafers to be loaded and unloaded through an opening. The conventional wafer detection apparatus includes an illumination device and an imaging device on which reflected light from the wafers is incident. The illumination device is arranged on at least one of the left and right sides of the opening of the wafer container. The illumination device is vertically elongated so as to irradiate light from above and below onto the wafers in the wafer container.

[0003] The conventional wafer detection apparatus detects the accommodation state of wafers, specifically: (1) whether there is a missing state where a slot that accommodates no wafer exists, (2) whether there is an overlapping state where a plurality of wafers are stacked and accommodated in one slot, and (3) whether there is a so-called cross-slot state where a wafer is obliquely accommodated in a step-shaped slot in the left-right direction.

[0004] Japanese Patent No. 5881007

[0005] For example, a wafer substrate for semiconductor manufacturing may bend or warp due to heat treatment or its own weight. Here, as illustrated in FIG. 15, there are two modes of deformation of the substrate. As shown in the upper view 1501 of FIG. 15, the first deformation mode is a mode in which the substrate 9 having a front surface 91 and a back surface 92 spreading on an X-Y plane is deformed in the Y direction while not deformed in the X direction. When the substrate 9 of the first deformation mode is viewed along a line of sight parallel to the X direction, the edge of the substrate 9 appears curved.

[0006] If the substrate is irradiated with light through the opening as in the above-described conventional wafer detection apparatus, the light is reflected at the edge of the curved substrate. The edge of the deformed substrate can be extracted by processing an image captured by a camera through the opening of the storage section. The detection apparatus easily detects deformation of the substrate according to the first deformation mode.

[0007] The second deformation mode is one in which the substrate 9 deforms in the Y and X directions, as shown in Figure 1502 below Figure 15. In other words, the deformed substrate 9 is bowl-shaped. When viewing the substrate 9 in the second deformation mode with a line of sight parallel to the X direction, the edges of the substrate 9 appear straight without curving. Even when light is shone on the substrate through an opening, the light is reflected off the straight edges of the substrate, but not off the curved surfaces of the substrate. Even when processing images captured by a camera, the extracted edges of the substrate are not deformed, making it difficult for the detection device to detect the deformation of the substrate due to the second deformation mode.

[0008] Furthermore, in both the first and second deformation modes, the substrate 9 may deform not only to become convex toward the back surface 92 as illustrated in Figure 15, but also to become convex toward the front surface 91.

[0009] Furthermore, in both the first and second deformation modes, the deformation is not necessarily symmetrical with respect to the center of the substrate 9.

[0010] Furthermore, changes in the shape of the substrate 9 may cause the orientation of the substrate 9 stored in the storage compartment to change from its normal orientation. Conventional wafer detection devices have difficulty detecting changes in the orientation of the substrate 9.

[0011] The technology disclosed herein relates to a substrate transport robot system. The substrate transport robot system comprises: a robot that transports substrates stored in a storage compartment through an opening in the storage compartment; a camera that photographs the substrates stored in the storage compartment through the opening; lighting that illuminates the substrates when the camera photographs them; and a controller that switches the lighting on and off so that the substrates to be transported by the robot are illuminated.

[0012] The aforementioned substrate transport robot system has lighting that selectively illuminates the substrate that the robot intends to transport, making it easier to detect the condition of the substrate, including deformation or orientation, based on the image of the substrate captured by the camera.

[0013] Figure 1 shows a substrate transport robot system. Figure 2 is a block diagram of the substrate transport robot system. Figure 3 shows the robot. Figure 4 is a front view showing a part of the storage section for storing substrates. Figure 5 is a cross-sectional view of the storage section and the robot from the side. Figure 6 is an exploded view of the lighting provided in the storage section. Figure 7 shows an image of a substrate taken by a camera. Figure 8 is a flowchart showing the procedure for transporting substrates. Figure 9 shows a modified example of the lighting. Figure 10 is a plan view and a cross-sectional view of the storage section showing a modified example of the lighting. Figure 11 is a cross-sectional view of the storage section showing a modified example of the lighting. Figure 12 is a plan view and a cross-sectional view of the storage section showing a modified example of the lighting. Figure 13 is a front view of the storage section showing a modified example of the lighting. Figure 14 is a cross-sectional view of the storage section of Figure 13. Figure 15 shows a modified form of the substrate.

[0014] The following describes embodiments of a substrate transport robot system and a substrate transport method with reference to the drawings. The substrate transport robot system and substrate transport method described herein are illustrative examples.

[0015] Figure 1 shows a substrate transport robot system 1. Figure 2 is a block diagram of the substrate transport robot system 1. The substrate transport robot system 1 transports substrates 9. The substrate 9 is, for example, a semiconductor wafer. The substrate transport robot system 1 is, for example, an EFEM (Equipment Front End Module). The substrate transport robot system 1 may also be, for example, a sorter. The substrate transport robot system 1 may also be, for example, a stocker.

[0016] The substrate transport robot system 1 includes a housing 10. However, the housing 10 is not an essential element of the substrate transport robot system 1.

[0017] The enclosure 10 has a first wall 11, a second wall 12, a third wall 13, and a fourth wall 14. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 are each walls perpendicular to the floor. The first wall 11 and the third wall 13 face each other in a horizontal first direction. The second wall 12 and the fourth wall 14 face each other in a horizontal second direction. The second direction is perpendicular to the first direction. Hereafter, the first direction will be called the X direction, and the second direction will be called the Y direction. The vertical direction perpendicular to the X and Y directions will be called the Z direction.

[0018] The first wall 11 and the second wall 12, and the first wall 11 and the fourth wall 14 are connected to each other, and the third wall 13 and the second wall 12, and the third wall 13 and the fourth wall 14 are connected to each other. The first wall 11, the second wall 12, the third wall 13, and the fourth wall 14 form a closed transport space 15.

[0019] The enclosure 10 also has a ceiling wall. The ceiling wall is connected to the first wall 11, the second wall 12, the third wall 13, and the fourth wall 14, and closes the upper end of the transport space 15.

[0020] The substrate transport robot system 1 has load ports 19. Note that the load ports 19 are not essential elements of the substrate transport robot system 1. The substrate transport robot system 1 has multiple load ports 19. The multiple load ports 19 are arranged along the first wall 11.

[0021] A hoop (FOUP: Front Opening Unified Pod) 41 is attached to the load port 19. The hoop 41 houses the circuit board 9. The hoop opener on the load port 19 opens and closes the lid of the hoop 41. When the hoop opener opens the lid, the transport space 15 and the hoop 41 communicate through the opening 17. The robot 2 can unload the circuit board 9 from the hoop 41 through the opening 17 and load the circuit board 9 into the hoop 41.

[0022] The substrate transport robot system 1 transports substrates 9 to the substrate processing equipment 4 and also transports substrates 9 from the substrate processing equipment 4. Note that the substrate processing equipment 4 is not an essential component of the substrate transport robot system 1.

[0023] The substrate processing equipment 4 performs processes on the substrate 9, such as heat treatment, impurity introduction, thin film formation, lithography, cleaning, and planarization. Alternatively, the substrate processing equipment 4 inspects the appearance or dimensions of the substrate 9. Alternatively, the processing performed by the substrate processing equipment 4 may be temporary storage for the transfer of the substrate 9. Here, the storage of the substrate 9 by the substrate processing equipment 4 is also included in the processing of the substrate 9. The third wall 13 separates the transport space 15 from the substrate processing equipment 4. The third wall 13 has an opening 16. The opening 16 can be opened and closed. When the opening 16 is open, the transport space 15 and the substrate processing equipment 4 are in communication, and when the opening 16 is closed, communication between the transport space 15 and the substrate processing equipment 4 is blocked.

[0024] The substrate processing equipment 4 has a storage section 42. As shown in Figure 4 or Figure 5, the storage section 42 stores a plurality of substrates 9 arranged in the Z direction. Details of the structure of the storage section 42 will be described later. The robot 2 can unload the substrates 9 from the storage section 42 through the opening 16 and the opening 43 of the storage section 42, and can also load the substrates 9 into the storage section 42.

[0025] The substrate transport robot system 1 includes a robot 2. The robot 2 transports the substrate 9 between the hoop 41 and the substrate processing equipment 4 (see the solid and dashed lines in Figure 1). The robot 2 is located and fixed within the transport space 15. However, the robot 2 may be able to move within the transport space 15 along rails laid in the transport space 15. The robot 2 is a horizontal articulated robot. The structure of the robot 2 will be described later.

[0026] As shown in Figure 2, the substrate transport robot system 1 has a robot controller 20. The robot controller 20 is electrically connected to the robot 2. The electrical connection includes wired or wireless connections.

[0027] The robot controller 20 controls the robot 2. The robot controller 20 may be, for example, a controller dedicated to controlling the robot 2. The robot controller 20 may also be, for example, a general-purpose computer, such as an IPC (Industrial PC).

[0028] The robot controller 20 has a processor unit 201. The robot controller 20 also has a storage 203. The storage 203 stores teaching data for the robot 2. The processor unit 201 calculates motion commands to move the robot 2 based on the teaching data in the storage 203. The processor unit 201 also outputs the calculated motion commands to the servo drive unit 202.

[0029] The servo drive unit 202 is interposed between the robot controller 20 and the robot 2. The servo drive unit 202 is connected to the robot controller 20, for example, by communication. The servo drive unit 202 receives operation commands from the processor unit 201 and outputs drive signals for the actuators 23-26 of the robot 2 to the robot 2. Based on the drive signals from the servo drive unit 202, the actuators 23-26 are driven and the robot 2 operates. The robot 2 transports the circuit board 9.

[0030] The servo drive unit 202 may also be incorporated into the robot controller 20.

[0031] (Robot Structure) Figure 3 is a side view of robot 2. As shown in Figure 1 or Figure 3, robot 2 has a base 21. The base 21 is installed in the transport space 15. Robot 2 has a manipulator 200. The manipulator 200 includes an arm 22 and a hand 3.

[0032] The base 21 supports the arm 22. The arm 22 is movable up and down in the Z direction relative to the base 21. The first actuator 23 raises and lowers the arm 22.

[0033] The arm 22 has multiple links 221 and 222. In the illustrated example, the arm 22 of the robot 2 has two links, link 221 and link 222. However, the number of links forming the arm 22 is not limited to two.

[0034] The first end of link 221 is supported by the base 21. Link 221 is rotatable around a first axis Z1 extending in the Z direction relative to the base 21. The second actuator 24 rotates link 221. The second end of link 221 is connected to the first end of link 222. Link 222 is rotatable around a second axis Z2 extending in the Z direction relative to link 221. The third actuator 25 rotates link 222.

[0035] Hand 3 is connected to the second end of link 222. Hand 3 is rotatable about a third axis Z3 that extends in the Z direction relative to link 222. The fourth actuator 26 rotates hand 3.

[0036] Hand 3 is an end effector that holds the substrate 9. Hand 3 has a main body 31 and a holding part 32. The main body 31 supports the holding part 32. The main body 31 is rotatably connected to the second end of the link 222.

[0037] As shown in Figure 1, the holding portion 32 is roughly Y-shaped in plan view and, as shown in Figure 3, is a thin plate. Generally, the holding portion 32 holds the substrate 9 on one side and releases the held substrate 9 by various means such as gripping, suction, placement, or fitting.

[0038] The hand 3 in the diagram is an edge grip hand. Hand 3 holds the substrate 9 by having multiple guides that sandwich the substrate 9. Hand 3 releases the substrate 9 by moving the guides away from the substrate 9. Note that hand 3 is not limited to an edge grip hand.

[0039] (Camera of the substrate detection device) The substrate transport robot system 1 is equipped with a camera 5. The camera 5, as an example, has an image sensor and a lens. The lens focuses light onto the image sensor. The image sensor outputs a signal corresponding to the amount of light it receives. The image sensor is either a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor.

[0040] As shown in Figure 3, the camera 5 is fixed to the hand 3 so that the front of the hand 3 can be photographed. More specifically, the camera 5 is fixed to the upper surface of the main body 31 of the hand 3. When the robot 2 moves the hand 3, the camera 5 moves together with the hand 3.

[0041] The optical axis Ax of the camera 5 is horizontal as shown in Figure 3. As will be described later, the camera 5 photographs the substrate 9 stored in the storage section 42 of the substrate processing facility 4. The optical axis Ax of the camera 5 is parallel to the front surface 91 or the back surface 92 of the substrate 9. The lens has a predetermined angle of view. The camera 5 can photograph the entire substrate 9 stored in the storage section 42.

[0042] The image photographed by the camera 5 is a still image. The camera 5 may also photograph moving images. The image may be a color image. It is not excluded that the image is a black-and-white image.

[0043] As shown in Figure 2, an imaging controller 204 controls the camera 5. Based on a command from the imaging controller 204, the camera 5 photographs the substrate 9 stored in the storage section 42. The imaging controller 204 is included in the robot controller 20. The imaging controller 204 may be separate from and connected to the robot controller 20.

[0044] An image processor 6 receives the image photographed by the camera 5. Details of the processing by the image processor 6 will be described later. The image processor 6 is included in the robot controller 20. The image processor 6 may be separate from and connected to the robot controller 20.

[0045] (Illumination of Substrate Detection Apparatus) The substrate transfer robot system 1 includes an illumination 7. The illumination 7 illuminates the substrate 9 when the camera 5 photographs the substrate 9 stored in the storage section 42. The camera 5 and the illumination 7 constitute the substrate detection apparatus 100. Further, the imaging controller 204 and the image processor 6 are included in the substrate detection apparatus 100.

[0046] FIG. 4 shows a storage section 42 to which illumination 7 is added. FIG. 4 is a front view of a part of the storage section 42 as seen from the opening 43 side. FIG. 5 corresponds to a cross-sectional view of the storage section 42 as seen from the side. FIG. 5 also includes a robot 2 that unloads a substrate 9 from the storage section 42.

[0047] The storage section 42 has a substantially box shape. The substrate 9 is stored between two side walls 421, 421 facing each other in the Y direction. The side walls 421, 421 each have a support section 422 projecting from the inner surface thereof. The support section 422 supports the edge of the substrate 9 from below. The substrate 9 is placed on the support section 422. The support sections 422 are positioned at equal intervals in the Z direction. The storage section 42 has a plurality of slots 423 for storing substrates 9. The plurality of slots 423 are arranged at equal intervals in the Z direction. The storage section 42 stores a plurality of substrates 9 side by side at intervals in the Z direction. Note that in FIGS. 4 and 5, the intervals between the substrates 9 are intentionally drawn wider to facilitate understanding of the technology disclosed herein. The intervals between the substrates 9 may be narrower than the intervals shown in the drawings.

[0048] The storage section 42 has an opening 43. The opening 43 opens the interior of the storage section 42 in the X direction. A hand 3 of the robot 2 can unload the substrate 9 from the storage section 42 through the opening 43, and can load the substrate 9 into the storage section 42 through the opening 43.

[0049] The illumination 7 has a light source 71. The light source 71 is positioned on the back surface of the storage section 42 on the opposite side to the opening 43 with the substrate 9 interposed therebetween. The light source 71 illuminates the substrate 9 toward the opening 43, as indicated by the two-dot chain line in FIG. 5.

[0050] More specifically, the illumination 7 has a plurality of light sources 71, 71, .... The plurality of light sources 71, 71, ... correspond to the plurality of slots 423, respectively.

[0051] The light source 71 is positioned at the same height as the substrate 9 in the height direction. A width H of the light source 71 in the Z direction is narrower than the interval between adjacent substrates 9 in the storage section 42. Further, a width W of the light source 71 in the Y direction extends from one end to the other end of the substrate 9. Each light source 71 has an elongated bar shape in the Y direction.

[0052] The lighting 7 has a light-shielding section 72. The light-shielding section 72 is located between adjacent light sources 71 in the Z direction. The light-shielding section 72 blocks the irradiation of light onto the substrate 9.

[0053] Figure 6 shows an example of the structure of the lighting 7. Figure 6 is an exploded view of the lighting 7. The lighting 7 has a surface light source 70. The surface light source 70 spreads, for example, over the entire Y and Z directions on the back of the storage unit 42. The back of the storage unit 42 may be formed by the surface light source 70.

[0054] The surface light source 70 may have a plurality of light-emitting elements 73 arranged in a grid pattern, as shown by partially breaking off the image. The light-emitting elements may be, for example, LEDs (Light Emitting Diodes). The surface light source 70 can selectively light up some of the light-emitting elements 73. The shooting controller 204 selects the light-emitting elements 73 to be lit.

[0055] The lighting fixture 7 has a light-shielding plate 74. The light-shielding plate 74 has slits 741. The slits 741 are elongated in the Y direction. The light-shielding plate 74 has multiple slits 741 spaced apart in the Z direction.

[0056] The light-shielding plate 74 is located between the surface light source 70 and the storage section 42. The slits 741 of the light-shielding plate 74 allow light emitted from the surface light source 70 to pass through. The portion of the light-shielding plate 74 between the slits 741 blocks the passage of light emitted from the surface light source 70.

[0057] The slit 741 is located at the same height as the substrate 9 in the storage section 42. The combination of the surface light source 70 and the light shielding plate 74 forms a plurality of light sources 71 located at the same height as the substrate 9, and light shielding sections 72 between the light sources 71.

[0058] Alternatively, instead of the surface light source 70, multiple independent light sources may be arranged at the same height as the substrate 9.

[0059] The shooting controller 204 controls the lighting 7. Details of the control of the lighting 7 by the shooting controller 204 will be described later.

[0060] (Control of the substrate transport robot system) Before the robot 2 unloads the substrate 9 from the storage section 42, the substrate transport robot system 1 checks the deformation and orientation of the substrate 9 to be unloaded. The substrate 9 may bend or warp due to, for example, heat treatment or its own weight. If the substrate 9 is deformed, when the robot 2 inserts the hand 3 into the storage section 42 from the opening 43 according to the pre-programmed path of the hand 3, there is a risk that the hand 3 will collide with the substrate 9. To prevent a collision between the hand 3 and the substrate 9, the substrate transport robot system 1 checks the shape of the substrate 9 based on the image taken by the camera 5. In addition, the orientation of the substrate 9 in the storage section 42 may change from its normal orientation due to a change in the shape of the substrate 9. The substrate transport robot system 1 can also check the orientation of the substrate 9 based on the image taken by the camera 5.

[0061] In this specification, the deformation of the substrate 9 may be referred to as the state of the substrate 9, the orientation of the substrate 9 may be referred to as the state of the substrate 9, or both the deformation and orientation of the substrate 9 may be referred to as the state of the substrate 9.

[0062] The control of the substrate transport robot system 1, described below, is performed by the robot controller 20.

[0063] As shown in Figure 5, the robot 2 adjusts the position of the camera 5 in front of the opening 43 of the storage compartment 42 to match the height of the substrate 9 to be unloaded. The position of the camera 5 may also be adjusted so that the optical axis Ax of the camera 5 coincides with the position of the substrate 9.

[0064] The shooting controller 204 lights up the light-emitting element 73 at the position corresponding to the circuit board 9 to be removed. The shooting controller 204 does not light up the light-emitting elements 73 at other positions. The light source 71 at the position corresponding to the circuit board 9 to be removed illuminates the circuit board 9 from behind toward the opening 43. With the light source 71 illuminating the circuit board 9, the camera 5 takes a picture of the circuit board 9.

[0065] Figure 7 illustrates an image 50 taken by camera 5. Since the light source 71 illuminates the substrate 9 from behind relative to camera 5, the silhouette of the substrate 9 can be captured. The substrate 9 is assumed to be deformed in the second deformation mode of Figure 15, convex toward the back surface 92. The edges of the substrate 9 are not curved, or are hardly curved, so the upper edge of the substrate 9 appears almost straight. On the other hand, because the surface of the substrate 9 is warped, the height width h from the upper edge of the substrate 9 to the warped surface of the substrate 9, that is, the height width h from edge to edge of the substrate 9 in image 50, is greater than the thickness t of the substrate 9.

[0066] It should be noted that the deformation of the substrate 9 is not limited to the deformation illustrated in Figure 7. Furthermore, due to the deformation of the substrate 9, the deformed substrate 9 may not be properly supported by the support portion 422, causing the orientation of the substrate 9 to change. For example, the substrate 9 inside the storage portion 42 may tilt forward or backward in the X direction, or tilt to the right or left in the Y direction. For example, if the substrate 9 inside the storage portion 42 tilts forward or backward in the X direction, the width h from edge to edge of the substrate 9 in the height direction in image 50 will be greater than the thickness t of the substrate 9.

[0067] Here, as shown in Figure 6, the inner surface of the storage compartment 42 may be coated with a paint that suppresses light reflection. The paint that suppresses light reflection may be, for example, a matte black paint. When the reflection on the inner surface of the storage compartment 42 is suppressed, unwanted light does not enter the image 50 captured by the camera 5, so the difference in brightness in the image 50 increases and the outline of the substrate 9 is emphasized.

[0068] Furthermore, when the light source 71 is lit and the camera 5 is photographing the substrate 9, the lighting installed on the ceiling of the substrate processing equipment 4 may be turned off. By illuminating only the light source 71 corresponding to the substrate 9, unnecessary light is not included in the image 50 captured by the camera 5, and the outline of the substrate 9 is emphasized.

[0069] The image data 50 captured by camera 5 is sent to image processor 6. The image processing unit 61 of image processor 6 processes image 50. For example, the image processing unit 61 may convert image 50 into a binarized image and extract the contour of the substrate 9 based on the brightness difference in the binarized image.

[0070] The image processing unit 61 sends the image processing results to the image analysis unit 62. The image analysis unit 62 performs the analysis. Specifically, the image analysis unit 62 calculates the width h in the height direction from edge to edge of the substrate 9 based on the extracted contour of the substrate 9. The image analysis unit 62 may calculate the width h based on, for example, the number of pixels. The magnitude of the width h may correspond to the amount of deformation of the substrate 9. Alternatively, the magnitude of the width h may correspond to the amount of change in the orientation of the substrate 9. The magnitude of the width h may include both the amount of deformation of the substrate 9 and the amount of change in orientation. In the following description, it is assumed that the magnitude of the width h simply corresponds to the amount of deformation of the substrate 9. The following description is not intended to exclude changes in orientation from the technology disclosed herein.

[0071] The image analysis unit 62 also compares the width h with a preset threshold. The threshold may be set based on the thickness t of the substrate 9.

[0072] Based on the comparison between the width h and the threshold value by the image analysis unit 62, it is determined whether the substrate 9 to be transported by the robot 2 is deformed.

[0073] The processor unit 201 receives the analysis results from the image analysis unit 62. If the circuit board 9 is not deformed, the robot controller 20 operates the manipulator 200 according to the teaching data stored in the storage 203.

[0074] The robot controller 20 determines whether the robot 2 can eject the deformed circuit board 9 by correcting the path of the robot 2's hand 3 if the circuit board 9 is deformed.

[0075] If a collision between hand 3 and circuit board 9 can be avoided by correcting the path of hand 3, the robot controller 20 corrects the teaching data stored in storage 203 according to the amount of deformation of circuit board 9 and then calculates an operation command. The robot 2 operates the manipulator 200 based on the corrected operation command.

[0076] If the deformation of the circuit board 9 is large and the robot controller 20 cannot stably eject the circuit board 9 even after correcting the teaching data, or if correcting the teaching data would cause interference with other circuit boards 9, the robot controller 20 will stop ejecting the circuit board 9 and will issue a notification through the notification unit 110.

[0077] Figure 8 is a flowchart showing the procedure for transporting substrates using the substrate transport robot system 1. The flow in Figure 8 is for the case where the robot 2 sequentially unloads multiple substrates 9, numbered from 1 to n (where n is a natural number greater than or equal to 1), stored in the storage unit 42.

[0078] First, in step S11 after the start, the robot controller 20 sets n to 1. n represents the circuit board 9 to be ejected.

[0079] In step S12, the shooting controller 204 turns on the light source 71 at the nth position. The light source 71 at the nth position is the light source 71 at the position corresponding to the substrate 9 to be shipped out. In step S13, the shooting controller 204 causes the camera 5 to photograph the substrate 9 at the nth position.

[0080] The captured image data is sent to the image processor 6. The image processing unit 61 performs image processing in step S14, and the image analysis unit 62 calculates the width h of the substrate 9 in the image 50, i.e., the amount of deformation, in step S15.

[0081] In step S16, the image analysis unit 62 also compares the calculated deformation amount with a first threshold. If the deformation amount is less than or equal to the first threshold, the substrate 9 can be considered not to have deformed. The first threshold is set based on the thickness t of the substrate 9. The processor unit 201 calculates an operation command according to the teaching data stored in the storage 203, and the servo drive unit 202 drives the actuators 23-26 according to the operation command. In step S17, the robot 2 unloads the substrate 9 from the storage unit 42 and transports the substrate 9.

[0082] In step S18, the robot controller 20 increments n, and in step S19, it compares n with the maximum value. The maximum value corresponds to the number of circuit boards 9 to be discharged from the storage unit 42. If n is less than or equal to the maximum value, there are still circuit boards 9 to be discharged in the storage unit 42, so the process in Figure 8 returns to step S12.

[0083] In step S12, the shooting controller 204 turns on the light source 71 at the position corresponding to the next circuit board 9. In step S13, the camera 5 takes a photograph of the next circuit board 9. From step S13 onward, in steps S14 and S15, the image processor 6 performs image processing and image analysis, as described above.

[0084] In step S19, if the robot controller 20 determines that n exceeds the maximum value, the process shown in Figure 8 ends because there are no more circuit boards 9 to be removed remaining in the storage unit 42.

[0085] Returning to step S16, if the amount of deformation exceeds the first threshold, the substrate 9 is deformed. In step S110, the robot controller 20 compares the amount of deformation with a second threshold. The second threshold is greater than the first threshold. The second threshold may be set, for example, based on the spacing between the substrates 9 in the storage section 42.

[0086] If the amount of deformation is below the second threshold, the amount of deformation is relatively small, and the robot 2 can unload the substrate 9 from the storage unit 42 according to the corrected path of the hand 3. In step S111, the robot controller 20 corrects the path of the hand 3 according to the amount of deformation, and in step S17, moves the hand 3 according to the corrected path to unload the substrate 9.

[0087] In step S110, if the amount of deformation is greater than the second threshold, the robot controller 20 will notify the robot controller 20 in step S112 via the notification unit 110 (see Figure 2) that the robot 2 cannot stably eject the substrate 9 or that the hand 3 will interfere with other substrates 9. The notification unit 110 will notify the robot controller 20 that the substrate 9 cannot be ejected from the storage unit 42 by voice or screen display.

[0088] (Effects) The substrate transport robot system 1 is equipped with lighting 7. The lighting 7 illuminates the substrate 9 from behind with respect to the camera 5, in a direction different from the direction from the opening 43 toward the inside of the storage section 42.

[0089] Since the light source 71 that illuminates the substrate 9 is located at the same height as the substrate 9 to be shipped, the camera 5 can capture the silhouette of the substrate 9, as shown in Figure 7.

[0090] The image processing unit 61 of the image processor 6 processes the image 50, thereby extracting the contour of the substrate 9 contained in the image 50. The image analysis unit 62 can acquire information about the deformation state or change in orientation of the substrate 9 based on the extracted contour. In particular, because the light source 71 illuminates the substrate 9 from behind, the image processing unit 61 can accurately extract the contour of the substrate 9 that is deformed in the second deformation mode shown in Figure 1502 below Figure 15.

[0091] Furthermore, since the lighting 7 selectively illuminates the substrate 9 that the robot 2 is about to transport, unwanted light is less likely to be included in the image 50. The substrate transport robot system 1 can stably extract the contour of the deformed substrate 9 based on the image 50 with a large difference in brightness. This makes it easier to detect deformation of the substrate 9.

[0092] Since the light source 71 corresponds to each of the multiple circuit boards 9 arranged in the Z direction in the storage section 42, each of the multiple circuit boards 9 can be illuminated individually. The shooting controller 204 selectively turns on the light source 71 at the position corresponding to the circuit board 9 that the robot 2 intends to unload. The lighting 7 can appropriately illuminate the circuit board 9 that the camera 5 is photographing.

[0093] Camera 5 is supported by the manipulator 200 of robot 2. The position of camera 5 can be changed by robot 2.

[0094] Furthermore, since the optical axis Ax of camera 5 is parallel to the surfaces 91 and 92 of the substrate 9, the image 50 captured by camera 5 includes the substrate 9 as seen from the horizontal direction. The placement of camera 5 is suitable for detecting deformation or orientation of the substrate 9 to be shipped. The image analysis unit 62 can accurately acquire the magnitude of deformation or change in orientation of the substrate 9 based on the width h of the substrate 9 in the image 50.

[0095] The robot controller 20 controls the robot 2's operation to remove the substrate 9 according to the acquired magnitude of the substrate 9's deformation. Specifically, if the substrate 9 is significantly deformed, the processor unit 201 corrects the path of the hand 3, thereby suppressing interference between the hand 3 and the substrate 9.

[0096] If the deformation of the circuit board 9 becomes even greater, the robot controller 20 will issue a notification through the notification unit 110 and stop the removal of the circuit board 9. This suppresses interference between the hand 3 and the circuit board 9, and also prevents unstable removal of the circuit board 9 by the robot 2.

[0097] Furthermore, if the deformation of the circuit board 9 is small or if the circuit board 9 is not deformed, the robot controller 20 does not correct the path of the hand 3. The robot 2 can stably unload the circuit board 9 from the storage unit 42 according to the pre-set teaching data.

[0098] Furthermore, when the lighting 7 is on and the camera 5 is photographing the circuit board 9, the lighting of the circuit board processing equipment 4 in which the storage unit 42 is installed is turned off, so that the lighting illuminating the circuit board 9 is limited to the light source 71 corresponding to the position of the circuit board 9. This suppresses the inclusion of unwanted light in the image 50 captured by the camera 5.

[0099] Furthermore, if the inner surface of the storage compartment 42 is coated with a paint that suppresses light reflection, unwanted light is less likely to enter the image 50 captured by the camera 5. The image processor 6 can easily extract the contour of the circuit board 9 from the image 50 captured by the camera 5.

[0100] (Modification) Figure 9 shows a modification regarding the arrangement of the light source. The light source 71 may be located on the upper and lower sides of the substrate 9 in the Z direction.

[0101] A light-shielding section 72 is positioned between the two light sources 71. The light-shielding section 72 is positioned at the same height as the substrate 9. The modified illumination 7 can be configured by a combination of the surface light source 70 and the light-shielding plate 74 shown in Figure 6. The shooting controller 204 lights up the two light sources 71, 71 that sandwich the substrate 9 to be transported from above and below.

[0102] The height H of the light source 71 may be narrower than the distance between the substrates 9. By narrowing the height H of the light source 71, reflection of light from adjacent substrates 9 to the substrate 9 to be shipped can be suppressed.

[0103] The light source 71 illuminates both the front surface 91 and the back surface 92 of the substrate 9 to be removed. As shown by the dashed arrows in Figure 9, when the front surface 91 or back surface 92 is deformed, light illuminates the convex surface 91 or back surface 92. As a result, the contour of the substrate 9 is emphasized in the image captured by the camera 5. The image processor 6 can accurately extract the contour of the substrate 9 based on the image and obtain the amount of deformation of the substrate 9.

[0104] Furthermore, instead of simultaneously lighting both the upper and lower light sources 71 on the circuit board 9, the camera 5 may first light only the upper light source 71 and take a picture, and then light only the lower light source 71 and take another picture. The order in which the upper and lower light sources 71 are lit may also be reversed.

[0105] Figure 10 shows another modified example of lighting 7, which combines a light source 75 and a reflector 76. The upper part of Figure 10 is a plan view of the storage unit 42 and the hand 3 of the robot 2 seen from above, and the lower part of Figure 10 is a cross-sectional view of the storage unit 42 and the hand 3 of the robot 2 seen from the side.

[0106] The reflector 76 reflects light from the light source 75 to illuminate the substrate 9. The reflector 76 is a secondary light source that illuminates the substrate 9. The reflector 76 may be made of, for example, a mirror or a metal plate with high light reflectivity. Alternatively, the reflector 76 may be constructed by applying a paint with high light reflectivity to the substrate.

[0107] The reflector 76 is located on the back of the housing 42. Similar to the light source 71 in Figure 5, the reflector 76 is located at the same height as the substrate 9 and corresponds to each of the multiple substrates 9. The width of the reflector 76 in the Z direction is narrower than the distance between the substrates 9 within the housing 42. The width of the light source 71 in the Y direction extends from one end of the substrate 9 to the other.

[0108] The portion 77 between the reflectors 76 may be coated with a paint that suppresses light reflection. The paint that suppresses light reflection may be, for example, a matte black paint.

[0109] The light source 75 is located outside the storage compartment 42. More specifically, the light source 75 is located in front of the opening 43 of the storage compartment 42, offset in the Y direction from the center of the opening 43. The light source 75 shines light toward the reflector 76 on the back of the storage compartment 42.

[0110] The lighting system 7 has multiple light sources 75, as shown in the lower diagram of Figure 10. The multiple light sources 75 are arranged in the Z direction and are positioned corresponding to each substrate 9 in the storage unit 42. The light sources 75 can be constructed in a manner similar to the combination of a surface light source 70 and a light shielding plate 74 shown in Figure 6. The shooting controller 204 selectively lights up the light sources 75 corresponding to the position of the substrate 9 to be transported.

[0111] The reflector 76 located at the position corresponding to the substrate 9 to be removed reflects light from the light source 75, illuminating the substrate 9 from behind. Reflection in the area 77 between the reflectors 76 is suppressed. Because the reflector 76 is at the same height as the substrate 9, the camera 5 can capture the silhouette of the substrate 9, as in Figure 7.

[0112] Note that the position of the light source 75 shown in Figure 10 is just one example. The light source 75 may be located on the opposite side in the Y direction from the robot 2 in the upper diagram of Figure 10. Also, the light source may be supported by the manipulator 200 of the robot 2.

[0113] Figure 11 shows yet another variation, specifically regarding the position of the reflector 76. Similar to the light source 71 shown in Figure 9, the reflector 76 may be located on the upper and lower sides of the substrate 9 in the Z direction.

[0114] The two reflectors 76, one above the other, flanking the substrate 9, reflect light from the light source 75 to illuminate the front surface 91 and back surface 92 of the substrate 9. The area 77 between the reflectors 76 is, for example, coated to suppress light reflection.

[0115] Since the front surface 91 and back surface 92 of the substrate 9 are illuminated by the reflectors 76, 76 acting as secondary light sources, the contour of the substrate 9 is emphasized in the image captured by the camera 5. The image processor 6 can accurately extract the contour of the substrate 9 based on the image and obtain the amount of deformation of the substrate 9.

[0116] In the example shown in Figure 11, the light source 75 is positioned at the same height as the substrate 9 in the Z direction. The light source 75 may also be positioned on the upper and lower sides of the substrate 9, similar to the reflector 76.

[0117] Figure 12 shows an example where the position of the light source is changed from that in Figure 10. The light source 710 may be supported by the hand 3 of the robot 2. If the light source 710 is positioned on both sides of the camera 5, the entire substrate 9 can be illuminated. The light source 710 may be positioned on either one side of the camera 5. The light source 710 may also be mounted on the camera 5. The light source 710 may be mounted on the side of the camera 5 on the hand 3, or it may also be mounted on the camera 5.

[0118] The light source 710 in Figure 12 can also be combined with the example in Figure 11.

[0119] Figure 13 shows a modified example regarding the position of the light source. Figure 13 is a front view of the inside of the storage section 42 as seen through the opening 43, and Figure 14 is a cross-sectional view of the storage section 42 as seen from the side.

[0120] The light source 71 or the reflector 76 as a secondary light source that illuminates the substrate 9 is not limited to being located behind the substrate 9 with respect to the camera 5. The illumination 7 may have light sources 78, 79 located above and below the substrate 9 within the storage compartment 42, illuminating the front surface 91 or back surface 92 of the substrate 9.

[0121] The lower light source 78 is located at the bottom of the storage compartment 42. The lower light source 78 is located below the circuit board 9 and illuminates the back surface 92 of the circuit board 9 from below.

[0122] The upper light source 79 is located on the ceiling of the storage compartment 42. The upper light source 79 is located above the substrate 9 and illuminates the surface 91 of the substrate 9 from above.

[0123] When camera 5 photographs the circuit board 9, the shooting controller 204 first turns on the lower light source 78 to illuminate the back surface 92 of the circuit board 9. The upper light source 79 is turned off. With the lower light source 78 on, camera 5 photographs the circuit board 9. As shown by the dashed arrow in Figure 14, the back surface 92 of the circuit board 9 is illuminated, so if the circuit board 9 is deformed to be convex on the back surface 92 side, the contour of the circuit board 9 is emphasized in the image taken by camera 5. The image processor 6 can extract the contour of the circuit board 9 based on the image and obtain the amount of deformation of the circuit board 9.

[0124] Once the shooting with the lower light source 78 illuminated is complete, the shooting controller 204 turns off the lower light source 78 and turns on the upper light source 79. With the upper light source 79 illuminated, the camera 5 photographs the circuit board 9. Because the surface 91 of the circuit board 9 is illuminated, if the circuit board 9 is deformed so that the surface 91 side becomes convex, the image processor 6 can extract the contour of the circuit board 9 that has become convex on the surface 91 side based on the image captured by the camera 5.

[0125] The lighting order of the lower light source 78 and the upper light source 79 may be reversed from the above.

[0126] As another variation, the robot 2 in the substrate transport robot system 1 may be able to transport multiple substrates 9 arranged in the Z direction from the storage section 42 all at once. The lighting 7 may illuminate each of the multiple substrates 9 to be transported. The camera 5 may capture an image that includes part or all of the multiple substrates to be transported.

[0127] The camera 5 is not limited to being supported by the hand 3. The camera 5 can be installed in any position as long as it is in a position where the circuit board 9 can be photographed through the opening 43 of the storage section 42.

[0128] The substrate transport robot system 1 may check for deformation or orientation of the substrate 9 when it is being unloaded from the hoop 41. The substrate transport robot system 1 may also check for deformation of the substrate 9 when it is being unloaded from the storage section 42 of the substrate processing equipment 4 and when it is being unloaded from the hoop 41.

[0129] Furthermore, the image processor 6 can employ various methods to extract the contour of the substrate 9 from the image 50 captured by the camera 5. For example, the image processor 6 may use machine learning to extract the contour of the substrate 9.

[0130] The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), FPGAs (Field Programmable Gate Arrays), and / or conventional circuits. The functionality of the elements disclosed herein may be implemented using one or more circuits or processing circuits, including combinations of general-purpose processors, special-purpose processors, integrated circuits, ASICs, FPGAs, and conventional circuits. One or more circuits or processing circuits may be programmed using one or more programs stored together or individually in one or more memories, or otherwise configured to perform the disclosed functionality. A processor is considered a processing circuit or circuit because it includes transistors and other circuits. A processor may be a programmed processor that executes programs stored in memory. In this disclosure, a circuit, unit, or means is hardware that performs the enumerated functionality alone or in combination with each other, or hardware programmed to perform the enumerated functionality alone or in combination with each other. The hardware may be any hardware disclosed herein that is programmed or configured to perform the listed functions.

[0131] A computer program, including computer instructions, is stored in memory. The computer instructions provide logic and routines that enable hardware to perform the methods disclosed herein. The hardware includes, for example, processing circuits or circuits. The computer program may be implemented in known formats on computer-readable storage media, computer program products, memory devices, recording media such as CD-ROMs or DVDs, and / or in the memory of FPGAs or ASICs.

[0132] (Embodiments) The embodiments described above are specific examples of the following embodiments.

[0133] (Aspect 1) A substrate transport robot system (1) comprising: a robot (2) that transports substrates (9) stored in a storage section (42) through an opening (43) of the storage section (42); a camera (5) that photographs the substrates (9) stored in the storage section (42) through the opening (43); a light (7) that illuminates the substrates (9) when the camera (5) photographs them; and controllers (20, 204) that switch the light (7) on and off so that the substrates (9) that the robot (2) is about to transport are illuminated.

[0134] Because the lighting (7) selectively illuminates the substrate (9) that the robot (2) is about to transport, unwanted light is less likely to be included in the image (50) of the substrate (9) captured by the camera (5). The substrate transport robot system (1) can easily extract the contour of the substrate (9) that has been deformed or whose posture has changed based on the image (50) with a large difference in brightness.

[0135] (Aspect 2) The substrate transport robot system (1) according to aspect 1, wherein the storage section (42) stores a plurality of substrates (9) in a line in the height direction, the robot (2) transports the plurality of substrates (9) in order, the lighting (7) has light sources (71, 75, 76) corresponding to each of the plurality of substrates (9), and the controllers (20, 204) selectively light up the light sources (71, 75, 76) corresponding to the substrates (9) that the robot (2) is about to transport.

[0136] Light sources (71, 76) corresponding to the substrate (9) being transported among the multiple substrates (9) arranged in the vertical direction are illuminated. The substrate transport robot system (1) can extract the contour of the substrate (9) based on the image (50) of the substrate (9) taken by the camera (5).

[0137] Note that the number of circuit boards (9) that are discharged is not limited to one. The robot (2) may discharge multiple circuit boards (9) at once. The lighting (7) may selectively light up, for example, multiple light sources (71, 76) that correspond to the multiple circuit boards (9) that are discharged.

[0138] (Aspect 3) The substrate transport robot system (1) according to aspect 1 or 2, wherein the controller (20, 6) obtains information regarding the state of the substrate (9) by processing the image (50) captured by the camera (5).

[0139] The controllers (20, 6) can extract the contour of the substrate (9) contained in the image (50) by processing the image (50). The controllers (20, 6) can also obtain information about the state of the substrate (9), that is, information about the deformation or change in orientation of the substrate (9), based on the extracted contour.

[0140] (Aspect 4) The substrate transport robot system (1) according to aspect 3, wherein the camera (5) has an optical axis (Ax) parallel to the surface of the substrate (9), and the controller (20, 6) acquires the amount of change in the state of the substrate (9) based on the width (h) in the height direction from edge to edge of the substrate (9) in the image (50) viewed horizontally of the substrate (9).

[0141] When the substrate (9) bends or warps, the front surface (91) or back surface (92) of the substrate (9) curves. When the deformed substrate (9) is viewed horizontally, the height (h) from the edge of the substrate (9) to the warped surface of the substrate (9) is thicker than the width (h) of an undeformed substrate (9). Also, when the orientation of the substrate (9) changes, the height (h) of the substrate (9) appears thicker when viewed horizontally. The controller (20, 6) can obtain the amount of state change of the substrate (9) based on the size of the width (h) in the image (50). The amount of state change is the amount of deformation or change in orientation of the substrate (9).

[0142] (Aspect 5) The substrate transport robot system (1) according to aspect 4, wherein the controller (20, 201) controls the transport operation of the substrate (9) by the robot (2) according to the acquired amount of state change.

[0143] If the change in the state of the substrate (9) is large, there is a risk that the robot (2) may interfere with the substrate (9) when it performs the removal operation of the substrate (9) according to a pre-programmed movement path.

[0144] The controllers (20, 201) control the robot (2)'s removal operation of the substrate (9) according to the amount of change in the substrate's state, thereby suppressing interference between the robot (2) and the substrate (9).

[0145] (Aspect 6) The substrate transport robot system (1) according to aspect 5, wherein the controller (20, 201) corrects the pre-taught path of the robot (2)'s hand (3) when the acquired amount of state change exceeds a threshold.

[0146] If the change in the state of the substrate (9) is large, that is, if the substrate (9) is significantly deformed or the orientation of the substrate (9) is significantly changed, interference between the robot (2) and the substrate (9) can be suppressed by correcting the path of the hand (3).

[0147] If the change in the state of the substrate (9) is small, the path of the hand (3) is not corrected. Also, if the substrate (9) is not deformed or its orientation has not changed, the path of the hand (3) is not corrected. The robot (2) can stably transport the substrate (9) without interfering with it.

[0148] (Aspect 7) The substrate transport robot system (1) according to aspect 6, wherein the controller (20, 201) provides notification through the notification unit (110) when the acquired amount of state change exceeds a second threshold which is greater than the threshold.

[0149] If the change in the state of the substrate (9) is too large, even if the path of the hand (3) is corrected, the robot (2) may not be able to stably discharge the substrate (9), or there is a risk that the robot (2) may interfere with a different substrate (9) than the one it is trying to discharge. The controllers (20, 201) will provide notification through the notification unit (110). The substrate transport robot system (1) may stop discharging the substrate (9).

[0150] (Aspect 8) A substrate transport robot system (1) according to any one of aspects 1 to 7, wherein the lighting of the equipment (4) on which the storage unit (42) is installed is turned off when at least the lighting (7) is turned on and the camera (5) is taking a picture of the substrate (9).

[0151] By turning off the lights of equipment (4), the lighting illuminating the substrate (9) is limited to specific lights (7). Unwanted light is suppressed from entering the image (50) captured by the camera (5). Turning off the lights of equipment (4) enables accurate extraction of the contour of the substrate (9).

[0152] (Aspect 9) The lighting (7) is located on the back side of the storage section (42) opposite to the opening (43) that sandwiches the substrate (9), and has a light source (71) that illuminates the substrate (9) toward the opening (43), the substrate transport robot system (1) according to any one of aspects 1 to 8.

[0153] Because the lighting (7) illuminates the substrate (9) from behind relative to the camera (5), the contour of the deformed substrate (9) is more easily extracted in the image (50).

[0154] (Aspect 10) The substrate transport robot system (1) according to any one of aspects 1 to 8, wherein the illumination (7) includes a light source (75) that illuminates the back surface of the storage section (42) on the opposite side of the opening (43) from the substrate (9) through the opening (43), and a reflector (76) located on the back surface of the storage section (42) that reflects the light from the light source (75) toward the opening (43) to illuminate the substrate (9).

[0155] The reflector (76) can illuminate the substrate (9) from behind as a secondary light source. This makes it easier to extract the contour of the deformed substrate (9) in the image (50).

[0156] (Aspect 11) The substrate transport robot system (1) according to any one of aspects 1 to 8, wherein the lighting (7) is located in at least one of the above and below the substrate (9) within the storage section (42) and has light sources (78, 79) that illuminate the surfaces (91, 92) of the substrate (9).

[0157] The light sources (78, 79) illuminate the surface (91, 92) of the substrate (9) from above or below, so that when the surface (91, 92) is deformed into a convex shape, the outline of the substrate (9) is emphasized in the image (50) captured by the camera (5).

[0158] (Aspect 12) The substrate transport robot system (1) according to any one of aspects 1 to 11, wherein the camera (5) is supported by the manipulator (200) of the robot (2).

[0159] The camera (5), supported by the manipulator (200), can be repositioned by the robot (2). The manipulator (200) supporting the camera (5) is suitable for photographing the substrate (9) that the robot (2) is about to remove.

[0160] (Aspect 13) A method for transporting circuit boards, wherein a robot (2) sequentially unloads a plurality of circuit boards (9) that are stored side by side in a storage compartment (42), a light (7) selectively illuminates a specific circuit board (9) that the robot intends to unload, a camera (5) photographs the circuit board (9) illuminated by the light (7), and a controller (204) processes the image taken by the camera (5) and controls the unloading operation of the circuit board (9) by the robot (2) according to the state of the circuit board (9) based on the image.

[0161] 1. Substrate transport robot system 100. Substrate detection device 2. Robot 200. Manipulator 204. Shooting controller 42. Storage section 43. Opening 5. Camera 7. Lighting 71. Light source 72. Light shielding section 755. Light source 76. Reflector 77. Section between reflectors 78. Lower light source 79. Upper light source 9. Substrate

Claims

1. A circuit board transport robot system comprising: a robot that transports circuit boards stored in a storage compartment through an opening in the storage compartment; a camera that photographs the circuit boards stored in the storage compartment through the opening; lighting that illuminates the circuit boards when the camera photographs them; and a controller that switches the lighting on and off so that the circuit boards to be transported by the robot are illuminated.

2. A substrate transport robot system according to claim 1, wherein the storage unit stores a plurality of substrates arranged in the height direction, the robot transports the plurality of substrates in order, the lighting has a light source corresponding to each of the plurality of substrates, and the controller selectively lights up the light source corresponding to the substrate that the robot is about to transport.

3. A substrate transport robot system according to claim 1 or 2, wherein the controller obtains information regarding the state of the substrate by processing an image captured by the camera.

4. A substrate transport robot system according to claim 3, wherein the camera has an optical axis parallel to the surface of the substrate, and the controller acquires the amount of change in the state of the substrate based on the width in the height direction from edge to edge of the substrate in the image of the substrate viewed in the horizontal direction.

5. A substrate transport robot system according to claim 4, wherein the controller controls the transport operation of the substrate by the robot according to the acquired amount of state change.

6. A substrate transport robot system according to claim 5, wherein the controller corrects the pre-taught path of the robot's hand when the acquired amount of state change exceeds a threshold.

7. A substrate transport robot system according to claim 6, wherein the controller provides notification through a notification unit when the acquired amount of state change exceeds a second threshold which is greater than the threshold.

8. A substrate transport robot system according to any one of claims 1 to 7, wherein the lighting of the equipment in which the storage unit is installed is turned off when at least the lighting is turned on and the camera is taking a picture of the substrate.

9. A substrate transport robot system according to any one of claims 1 to 8, wherein the illumination is located on the back side of the storage section opposite to the opening that sandwiches the substrate, and has a light source that illuminates the substrate toward the opening.

10. A substrate transport robot system according to any one of claims 1 to 8, wherein the illumination comprises a light source that illuminates the back surface of the storage section opposite to the opening that sandwiches the substrate, through the opening, and a reflector located on the back surface of the storage section that reflects the light from the light source toward the opening to illuminate the substrate.

11. A substrate transport robot system according to any one of claims 1 to 8, wherein the illumination is located at least one above and below the substrate in the storage compartment and has a light source that illuminates the surface of the substrate.

12. A substrate transport robot system according to any one of claims 1 to 11, wherein the camera is supported by the manipulator of the robot.

13. A method for transporting circuit boards, comprising: a robot sequentially unloading a plurality of circuit boards stored side by side in a storage compartment; lighting selectively illuminating a specific circuit board that the robot intends to unload; a camera photographing the circuit board illuminated by the lighting; and a controller processing the image captured by the camera and controlling the unloading operation of the circuit board by the robot according to the state of the circuit board based on the image.

Images