Holder, holding plate, and vapor deposition device

Abstract

The present invention enables work of setting a large number of optical lens base materials on a holding plate and removing the optical lens base materials from the holding plate to be performed efficiently, when depositing a vapor deposition film on an optical surface of the optical lens base materials. An optical lens base material B is held either by: causing a holding plate 200 to hold the optical lens base material B, the holding plate 200 including an opening part 201 opening along the contour of the optical lens base material B, a peripheral wall part 3 erected from the peripheral edge part of the opening part 201, at least two cutout parts 5 formed by partially cutting out the peripheral wall part 3, and a support part 4 supporting the optical lens base material B in a state of hovering over the surface of the holding plate 200; or attaching, to the holding plate 200, a holder 1 including an annular base part 2 attachable along a peripheral end surface 202 of the opening part 201, a peripheral wall part 3 erected from the base part 2, at least two cutout parts 5 formed by partially cutting out the peripheral wall part 3, and a support part 4 supporting the optical lens base material B in a state of hovering over the surface of the holding plate 200.

Description

Holder, Holding Plate, and Vapor Deposition Apparatus

[0001] The present invention relates to a holder, a holding plate, and a vapor deposition apparatus that can be suitably used when forming a vapor deposited film on an optical surface of an optical lens base material.

[0002] Generally, in an optical lens such as an eyeglass lens, a functional thin film such as an antireflection film or a water-repellent film is formed on the lens surface (optical surface). For example, in Patent Document 1, a large number of eyeglass lenses are held on a dome-shaped holding plate that rotates around an axis in a chamber, and a vapor deposited film as a functional thin film is formed by a vapor deposition method.

[0003] Japanese Patent Laid-Open No. 2009-197275

[0004] In view of such background art, the inventors of the present invention conducted intensive studies to enable efficient work of setting a large number of optical lens base materials on a holding plate and removing them from the holding plate when forming a vapor deposited film on an optical surface of an optical lens base material such as an eyeglass lens, and as a result, completed the present invention.

[0005] The holder according to the present invention is: [1] A holder for holding an optical lens substrate in a holding plate having an opening that opens along the contour of the optical lens substrate when forming a vapor-deposited film on the optical surface of the optical lens substrate, comprising: an annular base that can be attached along the peripheral end surface of the opening; a peripheral wall portion rising from the base portion; at least two notches formed by partially cutting out the peripheral wall portion; and a support portion that supports the optical lens substrate while floating above the surface of the holding plate. [2] The holder according to [1] may include at least three support portions that bulge radially inward from the inner peripheral surface of the peripheral wall portion. [3] The holder according to [2] may include the support portions and the notches, respectively, at equal angular intervals along the circumferential direction. [4] In the holder according to [2] or [3], it is preferable that the support portions have a support surface located on the same plane as the top surface of the peripheral wall portion. [5] In the holder described in [4] above, when the base is attached along the circumferential end surface of the opening, the circumferential wall can be made to protrude from the surface of the retaining plate to a height of 0.1 to 5.0 mm. [6] In any of the holders described in [1] to [5] above, it is preferable that the central angle with respect to the length of the notch along the circumferential direction is 5 to 60°, and the sum of the central angles with respect to the lengths of each of the notches along the circumferential direction is 180° or less. [7] In any of the holders described in [1] to [6] above, when the base is attached along the circumferential end surface of the opening, it is preferable that the bottom surface of the notch is at the same height as the surface of the retaining plate. [8] In any of the holders described in [2] to [7] above, a support column can be erected at an adjacent portion radially outward from the support portion. [9] In the holder described in [8] above, the support column can be provided with a tapered surface that is connected to the support surface of the support portion at an obtuse angle.

[10] In the holder described in [8] or [9] above, the support column portion includes a back portion that bulges radially outward with respect to the outer peripheral surface of the peripheral wall portion, and the bottom surface of the base portion may be provided with a claw portion that protrudes radially outward from the bottom surface side of the base portion and sandwiches the holding plate between itself and the end surface on the base end side of the back portion.

[0006] The holding plate according to the present invention is a holding plate for setting an optical lens substrate in a vapor deposition apparatus when a vapor deposition film is formed on the optical surface of the optical lens substrate, and is provided with an opening that opens along the contour of the optical lens substrate, and is configured such that any of the holding devices described in [1] to

[10] above is detachably attached to the opening.

[0007] The vapor deposition apparatus according to the present invention is a vapor deposition apparatus for forming a vapor-deposited film on the optical surface of an optical lens substrate, and is configured to include the holding plate described in

[11] above.

[0008] The holding plate according to the present invention may also include:

[13] a holding plate for setting an optical lens substrate in a vapor deposition apparatus when depositing a vapor deposition film on the optical surface of the optical lens substrate, the holding plate having an opening that opens along the contour of the optical lens substrate, a peripheral wall portion rising from the peripheral edge of the opening, at least two notches formed by partially cutting out the peripheral wall portion, and a support portion that supports the optical lens substrate while floating above the surface of the holding plate.

[14] The holding plate according to

[13] may include at least three support portions that bulge radially inward from the inner peripheral surface of the peripheral wall portion.

[0009] The vapor deposition apparatus according to the present invention is a vapor deposition apparatus for forming a vapor deposition film on the optical surface of an optical lens substrate, and may also be configured to include the holding plate described in

[13] or

[14] above.

[0010] According to the present invention, when depositing a vapor-deposited film on the optical surface of an optical lens substrate, the process of setting a large number of optical lens substrates onto a holding plate and removing them from the holding plate can be performed efficiently.

[0011] This is a schematic explanatory diagram showing an example of a vapor deposition apparatus according to an embodiment of the present invention. This is a perspective view showing a schematic of a holder according to an embodiment of the present invention. This is a side view showing a schematic of a holder according to an embodiment of the present invention. This is an explanatory diagram showing the movement of the claws of a robot hand when removing an optical lens substrate from a holding plate. This is an explanatory diagram showing the movement of the claws of a robot hand when removing an optical lens substrate from a holding plate. This is an explanatory diagram showing the movement of the claws of a robot hand when removing an optical lens substrate from a holding plate. This is an explanatory diagram showing the movement of the claws of a robot hand when removing an optical lens substrate from a holding plate. This is a perspective view showing a schematic of a sub-ring. This is an enlarged perspective view showing a schematic of a main part of a holding plate according to an embodiment of the present invention. This is a perspective view showing a schematic of a modified example of a holder according to an embodiment of the present invention. This is an enlarged perspective view showing a schematic of a main part of a modified example of a holding plate according to an embodiment of the present invention.

[0012] Preferred embodiments of the present invention will be described below with reference to the drawings.

[0013] Figure 1 is a schematic explanatory diagram showing an example of a deposition apparatus according to this embodiment. The deposition apparatus 100 shown as an example in Figure 1 is an apparatus for forming a deposition film on the optical surface of an optical lens substrate B, such as an eyeglass lens, and includes a chamber 101 as a processing tank for performing deposition processing. The chamber 101 is connected to a vacuum pump (not shown) via an exhaust port 102, and is configured to allow the inside of the chamber 101 to be evacuated and adjusted to a vacuum level suitable for deposition processing.

[0014] Inside the chamber 101, SiO ２ Ya Ta ２ O ５ The chamber 101 comprises a vapor deposition source 103 that heats and vaporizes or sublimes a vapor deposition material, a dome-shaped holding plate 200 that holds an optical lens substrate B, and an ion gun 104. A rotating mechanism 105 is provided on the ceiling of the chamber 101, and the holding plate 200 attached to the rotating mechanism 105 rotates around an axis above the vapor deposition source 103, so that a vapor deposition film is uniformly formed on the optical surface of the optical lens substrate B held on the holding plate 200.

[0015] The holding plate 200 is provided with an opening 201 that opens along the contour of the optical lens substrate B. This allows the vaporized or sublimated material from the deposition source 103 to reach the optical surface of the optical lens substrate B located on the side opposite the opening 201 (the lower surface of the optical lens substrate B held by the holding plate 200) from the back side of the holding plate 200 (the side of the deposition source 103), and to be fixed to the optical surface by ions (ion beam) irradiated from the ion gun 104, thereby forming a vapor-deposited film. In the illustrated example, multiple openings 201 that open along the contour of a circularly shaped spectacle lens are arranged in an efficient layout optimized to hold as many spectacle lenses as possible (however, detailed illustration is omitted).

[0016] In this embodiment, the optical lens substrate B is held on the retaining plate 200 via a holder 1 attached to the retaining plate 200. As shown in Figure 2, the holder 1 includes an annular (annular in the illustrated example) base 2 that can be attached along the peripheral end surface 202 of the opening 201 of the retaining plate 200, a peripheral wall portion 3 rising from the base portion 2, at least three support portions 4 bulging radially inward from the inner peripheral surface of the peripheral wall portion 3, and at least two notches 5 formed by partially cutting out the peripheral wall portion 3.

[0017] Here, Figure 2 is a perspective view showing a schematic of the holder according to this embodiment. Figure 3 is a side view of the same, in which the holding plate 200 and the optical lens substrate B held via the holder 1 attached to the holding plate 200 are shown by dashed lines (dotted lines).

[0018] The retainer 1 can be attached to the retaining plate 200 by fitting its annular base 2 into the opening 201 of the retaining plate 200, with the outer diameter of the base 2 being equal to the inner diameter of the opening 201. When attaching the retainer 1 to the retaining plate 200 in this way, the base 2 can be formed as a portion facing the circumferential end surface 202 of the opening 201, with a height equal to the thickness of the retaining plate 200. The circumferential wall portion 3 can be formed integrally with the base 2 with the same thickness as the base 2 as a portion protruding from the surface of the retaining plate 200.

[0019] Furthermore, the holder 1 can be formed such that the inner diameter of the holder 1, particularly the inner diameter of the peripheral wall portion 3, is equal to the outer diameter of the optical lens substrate B, so that the holder 1 supports the peripheral edge of the optical surface of the optical lens substrate B with a support portion 4 that bulges radially inward from the inner surface of the peripheral wall portion 3 by, for example, about 1 mm.

[0020] In the illustrated example, the optical lens substrate B is supported at three points by three support parts 4. While not limited to this, four or more support parts 4 may be provided to more stably support the optical lens substrate B. However, if the supported portion is hidden by the support parts 4, it may hinder the deposition of the vapor-deposited film. The number of support parts 4 and the degree to which they protrude can be appropriately adjusted to stably support the optical lens substrate B, while considering such inconveniences. For example, it is preferable that at least three support parts 4 are provided at equal angular intervals along the circumferential direction, and that they protrude by 0.1 to 3.0 mm from the inner circumferential surface of the peripheral wall 3 to support the edge of the peripheral surface where the vapor-deposited film is formed.

[0021] By holding the optical lens substrate B on the holding plate 200 via such a holder 1, the optical lens substrate B supported by the support portion 4 is held in a state where it is floating above the surface of the holding plate 200. For this reason, for example, when setting the optical lens substrate B on or removing it from the holding plate 200 using a chuck-type robot hand having multiple claws, the claws of the robot hand do not interfere with the holding plate 200, and a gap is secured between the tips of the claws and the optical lens substrate B, while reliably gripping the peripheral end surface of the optical lens substrate B from the side.

[0022] In this case, by ensuring that the optical lens substrate B is gripped by the robot hand's claws at the position where the notches 5 are provided in the peripheral wall 3, it is possible to prevent the robot hand's claws from interfering with the holder 1. Therefore, when using a two-clawed robot hand, two notches 5 can be provided in the peripheral wall 3. When using a three-clawed robot hand, three notches 5 can be provided in the peripheral wall 3. In any case, it is preferable to provide at least two notches 5 in the peripheral wall 3 at equal angular intervals along the circumferential direction, depending on the arrangement of the robot hand's claws.

[0023] In the illustrated example, the notch 5 is provided in a rectangular shape, but is not limited to this. The shape of the notch 5 may be, for example, semicircular, semielliptical, trapezoidal, or triangular, as long as interference between the robot hand's claw and the holder 1 is avoided. In order to avoid interference between the robot hand's claw and the holder 1, it is preferable that the shape of the notch 5 be such that when the base 2 is attached along the peripheral end surface 202 of the opening 201, the bottom surface of the notch 5 is at the same height as the surface of the holder plate 200, so that the bottom surface of the notch 5 is located on a virtual extended surface that extends the surface of the holder plate 200.

[0024] According to this embodiment, when depositing a vapor-deposited film on the optical surface of the optical lens substrate B, the operations of setting a large number of optical lens substrates B on the holding plate 200 and removing them from the holding plate 200 can be performed efficiently by using a chuck-type robot hand.

[0025] In particular, when depositing a vapor-deposited film onto the optical surface of an eyeglass lens, which serves as the optical lens substrate B, it is necessary to invert the eyeglass lens and transfer it to the holding plate 200 in order to deposit the vapor-deposited film onto one optical surface (for example, the front surface of the lens) and then onto the other optical surface (for example, the rear surface of the lens). This process can involve depositing several hundred eyeglass lenses at once. Consequently, setting the eyeglass lenses onto and removing them from the holding plate 200 required considerable effort. However, according to this embodiment, these operations can be performed efficiently using a chuck-type robotic hand.

[0026] Furthermore, depending on the prescription, some eyeglass lenses have a thin edge thickness (edge ​​thickness) of less than 1 mm. Even with such thin eyeglass lenses, by holding them in a state where they are slightly raised from the surface of the retaining plate 200, the robot hand will not lose its grip when removing them from the retaining plate 200, and will be able to securely grip them with an appropriate gap between the tip of the robot hand's claws and the lens.

[0027] When supporting the optical lens substrate B on the support portion 4 provided on the peripheral wall portion 3 of the holder 1, it is preferable that the support portion 4 has a support surface 6 located on the same plane as the top surface of the peripheral wall portion 3. As a result, the optical lens substrate B supported in contact with the support surface 6 is raised above the surface of the holding plate 200 at a distance equal to the height of the peripheral wall portion 3, and the distance between the optical lens substrate B and the holding plate 200 can be adjusted by the height of the peripheral wall portion 3.

[0028] For example, in order to ensure that the optical lens substrate B is securely gripped with an appropriate gap between it and the tip of the robot hand's claw, it is preferable that the optical lens substrate B is raised with a gap of 0.1 to 5.0 mm from the surface of the holding plate 200. In such a case, the height of the peripheral wall portion 3 should be 0.1 to 5.0 mm, and when the base portion 2 is attached along the peripheral end surface 202 of the opening 201, the peripheral wall portion 3 should protrude from the surface of the holding plate 200 with a height of 0.1 to 5.0 mm.

[0029] When removing the optical lens substrate B from the holding plate 200 using the robot hand, the robot hand is advanced toward the holding plate 200, and once the sensor detects that the tip of the claw C has made contact with the holding plate 200 (see Figure 4), the robot hand is slightly retracted in the opposite direction (see Figure 5), and then the claw C is moved toward the optical lens substrate B (see Figure 6), thereby ensuring that the peripheral end surface of the optical lens substrate B is gripped securely and accurately from the side (see Figure 7).

[0030] Here, Figures 4 to 7 show a longitudinal cross-section of the portion where the notch 5 is provided, in a state in which the optical lens substrate B is held via the holder 1 attached to the holding plate 200, and are explanatory diagrams showing the movement of the claw C of the robot hand when removing the optical lens substrate B from the holding plate 200.

[0031] It is preferable to adjust the height of the peripheral wall portion 3 as appropriate, taking into consideration that such control will be performed. For example, when the robot hand's drive is controlled so that the robot hand is moved back 1 mm when the tip of the robot hand's claws contacts the holding plate 200, and the claws are operated at that position to grip the peripheral end surface of the optical lens substrate B from the side, the height of the peripheral wall portion 3 should be set to 2 mm in order to grip the optical lens substrate B with a 1 mm gap between the tip of the claws and the robot hand.

[0032] Furthermore, when depositing a vapor-deposited film on one optical surface of the optical lens substrate B held by the holding plate 200, it is undesirable for ions irradiated from the ion gun 104 to pass through the notches 5 provided in the peripheral wall portion 3 and wrap around to the other optical surface. For example, when a water-repellent film is deposited as a vapor-deposited film on one optical surface, and then the optical lens substrate B is inverted to deposit a water-repellent film on the other optical surface, if ions irradiated from the ion gun 104 wrap around to the first optical surface, there is a risk that the water-repellent performance of the previously deposited water-repellent film will be reduced.

[0033] When providing the notch 5 in the peripheral wall portion 3, in addition to avoiding interference between the robot hand's claw and the holder 1, the size of the notch can be appropriately adjusted by considering how much ion leakage is acceptable in order to effectively avoid such problems. For example, the size of the notch 5 can be adjusted so that the central angle with respect to the length along the circumferential direction of the notch 5 (or the maximum length if the length changes in the height direction) is 5 to 60°, and the sum of the central angles with respect to each length along the circumferential direction of the notch 5 is 180° or less.

[0034] Furthermore, the holder 1 can have a support column 7 erected on an adjacent radially outward portion relative to the support portion 4 provided on the peripheral wall portion 3. When setting the optical lens substrate B on the holding plate 200 using a robot hand, the accuracy of positioning the set position of the optical lens substrate B can be improved by controlling the drive of the robot hand while having a sensor detect the support column 7 erected on the peripheral wall portion 3. The support column 7 erected around the optical lens substrate B supported by the support portion 4 can also suppress misalignment of the set optical lens substrate B. The support column 7 can be formed in a cylindrical, prismatic, or other shape, but by providing a tapered surface 8 connected at an obtuse angle to the support surface 6 of the support portion 4, it can also function as a guide when supporting the optical lens substrate B on the support portion 4.

[0035] When erecting the support column 7 on the peripheral wall 3 in this manner, the support column 7 can be formed to include a back portion 9 that bulges radially outward relative to the outer peripheral surface of the peripheral wall 3. The back portion 9 can be formed to extend in the height direction along the outer peripheral surface of the peripheral wall 3. Furthermore, a claw portion 10 can be provided on the bottom surface of the base portion 2, projecting radially outward from the bottom surface side of the base portion 2 and sandwiching the retaining plate 200 between it and the end face on the base end side of the back portion 9. The distance between the end face on the base end side of the back portion 9 and the claw portion 10 can be equal to the thickness of the retaining plate 200.

[0036] In this way, when attaching the holder 1 to the holding plate 200, the base 2 fitted into the opening 201 of the holding plate 200 can be easily secured. As a result, problems such as the holder 1 being lifted up when removing the optical lens substrate B from the holding plate 200 using a robot hand can be effectively avoided.

[0037] The holder 1 can be detachably attached to the opening 201 of the retaining plate 200. To facilitate attachment and detachment, the holder 1 can have notches formed at any point along the circumferential direction. In this case, for example, the holder 1 can be bent and deformed so that one end divided by the notches overlaps the other end in the circumferential direction, allowing it to be attached to or removed from the opening 201 of the retaining plate 200.

[0038] To attach the retainer 1 to the opening 201 of the retaining plate 200 in a detachable manner, the retainer 1 can be attached by interposing a sub-ring 11 as shown in Figure 8. The sub-ring 11 can be formed in an annular shape that can be fitted to the outer circumference of the retainer 1, and its width (radial length) can be appropriately adjusted according to the difference between the outer diameter of the retainer 1 and the inner diameter of the opening 201. At least three pairs of upper and lower claw portions 12 (three in the illustrated example) can be provided on the outer edge of the sub-ring 11 so that it can be attached to the opening 201 of the retaining plate 200 when fitted with the retainer 1.

[0039] By interposing such a sub-ring 11, the holder 1 can be detachably attached to the opening 201 of the holding plate 200. This allows the holding plate 200 to be used even if the inner diameter of the opening 201 is larger than the outer diameter of the optical lens substrate B to which the vapor-deposited film is to be formed, making it unsuitable for holding the optical lens substrate B, by using a holder 1 that is suitable for the optical lens substrate B. This configuration is suitable when reusing an existing holding plate 200.

[0040] On the other hand, when a dedicated holding plate 200 is prepared to be suitable for an optical lens base material B that is a target on which a vapor-deposited film is to be formed, a portion corresponding to the peripheral wall portion 3 of the holder 1 configured as described above, in other words, a member obtained by omitting only the base portion 2 from the holder 1, may be provided along the peripheral edge of the opening 201 of the holding plate 200 so as to be flush with the peripheral end surface 202 of the opening 201. Such an embodiment is preferable for arranging the openings 201 in an efficient layout optimized to hold as many optical lens base materials B as possible.

[0041] The reason is as follows. That is, when the optical lens base material B is held via the holder 1 attached to the holding plate 200, the inner diameter of the opening 201 has to be increased by the thickness of the holder 1 relative to the outer diameter of the optical lens base material B. In contrast, this eliminates the need to consider the thickness of the holder, and allows the inner diameter of the opening 201 to be equal to the outer diameter of the optical lens base material B.

[0042] In such an embodiment, the holding plate 200 can be specified as including: an opening 201 opened along the contour of the optical lens base material B; a peripheral wall portion 3 rising from the peripheral edge of the opening 201; at least three support portions 4 bulging radially inward from the inner peripheral surface of the peripheral wall portion 3; and at least two cutout portions 5 formed by partially cutting out the peripheral wall portion 3. An example of such an embodiment is shown in Fig. 9, and configurations common to the holder 1 described above are denoted by the same reference numerals, and detailed descriptions thereof are omitted.

[0043] The preferred embodiments of the present invention have been shown and described above. However, the present invention is not limited only to the above-described embodiments, and it goes without saying that various modifications can be made within the scope of the present invention.

[0044] [Modification] For example, in the above-described embodiment, at least three support portions 4 that bulge radially inward from the inner peripheral surface of the peripheral wall portion 3 are provided, and the support portions 4 are configured to support the optical lens base material B. This takes into consideration that if the supported portion is hidden by the support portions 4, the formation of the vapor deposition film may be partially hindered, leading to a risk that non-deposited portions are formed.

[0045] However, from the viewpoint of quality control, there may be cases where it is visually preferable that the non-deposited portions are uniformly formed along the outer peripheral edge of the optical lens base material B. In such a case, as shown in, for example, FIGS. 10 and 11, at least the top side of the peripheral wall portion 3 can be bulged radially inward with a constant width to serve as the support portion 4, so that the outer peripheral edge portion of the optical lens base material B can be supported along the circumferential direction excluding the notch portion 5.

[0046] Even with such an embodiment, the optical lens base material B can be held in a state of being lifted from the surface of the holding plate 200. Therefore, similarly to the above-described embodiment, when a chuck-type robot hand having a plurality of claws is used to set the optical lens base material B on the holding plate 200 or remove it from the holding plate 200, the claws of the robot hand do not interfere with the holding plate 200, and a gap can be secured between the tips of the claws and the optical lens base material B, while the peripheral end surface of the optical lens base material B can be reliably gripped from the side.

[0047] In any case, according to the present invention, it is only required that the optical lens base material B can be held in a state of being lifted from the surface of the holding plate 200, and the specific configuration thereof is not limited.

[0048] 1 Holder 2 Base portion 3 Peripheral wall portion 4 Support portion 5 Notch portion 6 Support surface 7 Strut portion 8 Tapered surface 9 Back surface portion 10 Claw portion 100 Vapor deposition apparatus 200 Holding plate 201 Opening portion 202 Peripheral end surface

Claims

1. A holder for holding an optical lens substrate in a holding plate having an opening that opens along the contour of the optical lens substrate when forming a vapor-deposited film on the optical surface of the optical lens substrate, the holder comprising: an annular base that can be attached along the peripheral end surface of the opening; a peripheral wall portion rising from the base portion; at least two notches formed by partially cutting out the peripheral wall portion; and a support portion that supports the optical lens substrate in a state that is raised above the surface of the holding plate.

2. The holder according to claim 1, comprising at least three support portions that bulge radially inward from the inner surface of the peripheral wall portion.

3. The holder according to claim 2, wherein the support portion and the notch portion are each provided at equal angular intervals along the circumferential direction.

4. The holder according to claim 2, wherein the support portion has a support surface located on the same plane as the top surface of the peripheral wall portion.

5. The retainer according to claim 4, wherein when the base is attached along the peripheral end surface of the opening, the peripheral wall protrudes from the surface of the retaining plate to a height of 0.1 to 5.0 mm.

6. The holder according to claim 1, wherein the central angle of the notch with respect to the length along the circumferential direction is 5 to 60°, and the sum of the central angles of the lengths along the circumferential direction of each of the notches is 180° or less.

7. The retainer according to claim 1, wherein when the base is attached along the peripheral end surface of the opening, the bottom surface of the notch is at the same height as the surface of the retaining plate.

8. The holder according to claim 2, wherein a support column is erected at an adjacent portion radially outward from the support portion.

9. The holder according to claim 8, wherein the support column portion is provided with a tapered surface that is connected at an obtuse angle to the support surface of the support portion.

10. The holder according to claim 8, wherein the support column includes a back portion that bulges radially outward with respect to the outer circumferential surface of the peripheral wall, and the bottom surface of the base is provided with a claw portion that protrudes radially outward from the bottom surface side of the base and sandwiches the retaining plate between itself and the end surface on the base end side of the back portion.

11. A holding plate for setting an optical lens substrate in a vapor deposition apparatus when depositing a vapor-deposited film onto the optical surface of the optical lens substrate, the holding plate having an opening that opens along the contour of the optical lens substrate, wherein the holding device described in any one of claims 1 to 10 is detachably attached to the opening.

12. A vapor deposition apparatus for forming a vapor-deposited film on the optical surface of an optical lens substrate, characterized by comprising the holding plate described in claim 11.

13. A holding plate for setting an optical lens substrate in a vapor deposition apparatus when depositing a vapor-deposited film onto the optical surface of the optical lens substrate, the holding plate comprising: an opening that opens along the contour of the optical lens substrate; a peripheral wall portion rising from the peripheral edge of the opening; at least two notches formed by partially cutting out the peripheral wall portion; and a support portion that supports the optical lens substrate while floating above the surface of the holding plate.

14. The holder according to claim 13, comprising at least three support portions that bulge radially inward from the inner surface of the peripheral wall portion.

15. A vapor deposition apparatus for forming a vapor-deposited film on the optical surface of an optical lens substrate, characterized by comprising the holding plate described in claim 13.

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