Atomizer for vaporizer for thin-film deposition and droplet supply system comprising same

Abstract

The present invention relates to an atomizer for a vaporizer for thin-film deposition and a droplet supply system comprising same. The objective of the present invention is to provide an atomizer that minimizes dead volume and does not leak. The droplet supply system according to the present invention comprises: a liquid supply unit which supplies a liquid precursor; a gas supply unit which supplies a carrier gas; an atomizer for a vaporizer, which receives the liquid precursor and the carrier gas from the liquid supply unit and the gas supply unit, to form a droplet aerosol, wherein a piezo valve is located at the upstream end of a body flow path through which the liquid precursor supplied from the liquid supply unit moves, a shut-off valve is located at the downstream end of the body flow path, and an orifice is inserted at a lower portion of the shut-off valve to control the flow rate of the liquid precursor; and a control unit which controls the liquid supply unit and the gas supply unit to control supply of the liquid precursor and the carrier gas.

Description

Atomizer for a vaporizer for thin film deposition and droplet supply system including the same

[0001] The present invention relates to an atomizer for a vaporization device for thin film deposition and a droplet supply system including the same, and more specifically, to an atomizer for a vaporization device for thin film deposition capable of atomizing a droplet aerosol supplied to a vaporization device and a droplet supply system including the same.

[0002] In the manufacturing processes of semiconductor devices and displays, thin film deposition using liquid precursors is generally performed. The thin film is formed by converting the liquid precursor into a gaseous state and depositing it onto a substrate inside a chamber. The device that supplies the gaseous precursor to the chamber is the vaporization device.

[0003] Vaporizers include bubbling, flash, boiling, and Direct Liquid Injection (DLI) methods. Among these, the DLI vaporizer features a very simple configuration and allows for precise control of the flow rates of the carrier gas and liquid precursor using a Gas Flow Control System (GMFC) and a Liquid Flow Control System (LMFC). Furthermore, the DLI method is the most efficient vaporizer because it can supply high-flow, high-density vapor and is applicable to all types of liquid sources.

[0004] While the performance of such vaporizers depends on the structure of the heat exchanger, it is also determined by how finely the liquid precursor is atomized into droplet aerosols in the atomizer. To atomize the liquid precursor, it is important to precisely control the quantity of the liquid precursor.

[0005] In order to atomize liquid aerosols in a vaporizer, precise quantitative control of the liquid precursor is required. However, there is a problem in that precise quantitative control of the liquid precursor becomes difficult as the liquid flow control device and the dead volume within the atomizer increase. To improve this problem, an atomizer is being introduced that controls the flow rate of the liquid precursor by placing a shut-off valve at the front end of the body path formed within the atomizer and a piezo valve at the top of the orifice located at the rear end of the body path.

[0006] The diaphragm of the piezo valve can block the body flow path through which the liquid precursor travels by sealing tightly against the orifice. However, a problem exists in that leakage occurs because the body flow path is not completely blocked, as it is difficult for the piezo valve diaphragm to seal completely against the orifice.

[0007] In addition, the piezoelectric element used in the piezo valve is characterized by its vulnerability to heat. When the piezo valve is positioned at the top of the atomizer orifice as in conventional designs, the piezoelectric element is exposed to heat generated by the heat exchanger of the vaporizer, which may make it difficult to precisely control the flow rate of the liquid precursor.

[0008] Therefore, it is necessary to develop an atomizer that minimizes the wasted volume of the atomizer, enables precise control of the liquid precursor, and prevents leakage.

[0009] [Prior Art]

[0010] Registered Patent Publication No. 10-2124290 (June 17, 2020)

[0011] Therefore, the objective of the present invention is to provide an atomizer that minimizes waste volume and prevents leakage.

[0012] To achieve the above objective, the droplet supply system according to the present invention comprises: a liquid supply unit for supplying a liquid precursor; a gas supply unit for supplying a carrier gas; an atomizer for a vaporization device that receives the liquid precursor and the carrier gas from the liquid supply unit and the gas supply unit to form a droplet aerosol, wherein a piezo valve is located at the front end of a body path through which the liquid precursor supplied from the liquid supply unit travels, a shut-off valve is located at the rear end of the body path, and an orifice is inserted at the bottom of the shut-off valve to control the flow rate of the liquid precursor; and a control unit for controlling the liquid supply unit and the gas supply unit to control the supply of the liquid precursor and the carrier gas.

[0013] An atomizer for a vaporization device according to the present invention may include: an atomizer body having a body passage through which a liquid precursor moves, and a space formed in which the liquid precursor moving through the body passage collides with a carrier gas to form a liquid aerosol; a piezo valve connected to the front end of the body passage and controlling the flow rate of the liquid precursor by the extension of a piezoelectric element; a shut-off valve connected to the rear end of the body passage and controlling the flow rate of the liquid precursor by pneumatic pressure; and an orifice inserted into the lower part of the shut-off valve.

[0014] The atomizer body may include: a body passage through which the liquid precursor travels; a first coupling portion located at the front end of the body passage and coupled with the piezo valve; a second coupling portion located at the rear end of the body passage and coupled with the shut-off valve; a gas inlet connected to the rear end of the body passage through which the carrier gas is introduced; and a nozzle through which the liquid precursor and the carrier gas collide to form the liquid aerosol.

[0015] The piezo valve may include: a piezo valve body coupled to the first coupling part and having a first inlet through which the liquid precursor flows, a first flow path through which the liquid precursor moves, and a first outlet through which the liquid precursor that has moved through the first flow path flows into the atomizer body; a piezo actuator coupled to the piezo valve body and operated by the application of voltage; and a first diaphragm that separates the piezo actuator from the first flow path and opens and closes the first flow path by the operation of the piezo actuator.

[0016] The above piezo actuator can be positioned horizontally with respect to the atomizer body.

[0017] The above piezo actuator can be positioned vertically with respect to the atomizer body.

[0018] The above piezo actuator may have a heat sink formed on its outer surface to emit heat.

[0019] The above shut-off valve may include: a shut-off valve body coupled to the second coupling part and having a second inlet through which the liquid precursor flows, a second flow path through which the liquid precursor moves, and a second outlet formed to allow the liquid precursor that has moved through the second flow path to flow into the atomizer body; a pneumatic actuator coupled to the shut-off valve body and operated by pneumatic pressure; and a second diaphragm that separates the pneumatic actuator from the second flow path and opens and closes the second flow path by the operation of the pneumatic actuator.

[0020] The atomizer according to the present invention can minimize the wasted volume of the atomizer and prevent leakage of the liquid precursor by placing a piezo valve at the front end of the body flow path and a shut-off valve at the rear end of the body flow path.

[0021] In addition, the atomizer according to the present invention can minimize the wasted volume by inserting an orifice into the lower part of the shut-off valve.

[0022] FIG. 1 is a drawing showing a droplet supply system according to a first embodiment of the present invention.

[0023] FIG. 2 is a drawing showing an atomizer according to a first embodiment of the present invention.

[0024] FIG. 3 is a drawing showing an atomizer body according to a first embodiment of the present invention.

[0025] FIG. 4 is a drawing showing a piezo valve according to a first embodiment of the present invention.

[0026] FIG. 5 is a drawing showing a shut-off valve according to a first embodiment of the present invention.

[0027] FIG. 6 is a drawing showing the lower part of a shut-off valve according to a first embodiment of the present invention.

[0028] FIG. 7 is a drawing showing an orifice according to a first embodiment of the present invention.

[0029] FIG. 8 is a drawing showing an atomizer according to a second embodiment of the present invention.

[0030] FIG. 9 is a drawing showing a piezo valve according to a second embodiment of the present invention.

[0031] FIG. 10 is a drawing showing an atomizer according to a comparative example and an embodiment.

[0032] The present invention proceeds with the filing of an application with the support of the problem described in [Table 1].

[0033] Project No. 00434116 Ministry Name: Ministry of Trade, Industry and Energy Project Management (Specialized) Agency Name: Korea Institute for Industrial Technology Promotion Research Project Name: Technology-Based Innovation in the Materials and Components Industry (Support for Mass Production Performance Evaluation) Research Project Title: Mass Production Performance Evaluation of DLI (Direct Liquid Injection) Type Vaporizers for TEOS Deposition Process Executing Agency Name: ASK Co., Ltd. Research Period: May 1, 2024 – April 30, 2025

[0034] It should be noted that in the following description, only the parts necessary for understanding the embodiments of the present invention are explained, and the description of other parts will be omitted to the extent that it does not deviate from the gist of the present invention.

[0035] The terms and words used in the specification and claims described below should not be interpreted as being limited to their ordinary or dictionary meanings, but should be interpreted in a meaning and concept consistent with the technical spirit of the invention, based on the principle that the inventor can appropriately define the concept of the terms to best describe his invention. Accordingly, the embodiments described in this specification and the configurations illustrated in the drawings are merely preferred embodiments of the invention and do not represent all aspects of the technical spirit of the invention; therefore, it should be understood that various equivalents and modifications capable of replacing them may exist at the time of filing this application.

[0036] Hereinafter, embodiments of the present invention will be described in more detail with reference to the attached drawings.

[0037] FIG. 1 is a drawing showing a droplet supply system according to a first embodiment of the present invention.

[0038] Referring to FIG. 1, a droplet supply system (1000) according to a first embodiment of the present invention includes a liquid supply unit (300) for supplying a liquid precursor, a gas supply unit (400) for supplying a carrier gas, an atomizer (100) for a vaporization device that receives the liquid precursor and carrier gas from the liquid supply unit (300) and the gas supply unit (400) to form a droplet aerosol, and a control unit (500) that controls the liquid supply unit (300) and the gas supply unit (400) to control the supply of the liquid precursor and carrier gas.

[0039] Hereinafter, the configuration of the droplet supply system (1000) according to the first embodiment of the present invention will be described in more detail.

[0040] The liquid supply unit (300) supplies a liquid precursor to the atomizer (100), and the gas supply unit (400) supplies a carrier gas to the atomizer (100) so that a droplet aerosol can be formed in the atomizer (100).

[0041] The liquid supply unit (300) transmits information regarding the flow rate of the liquid precursor to the control unit (500), and the control unit (500) can control the liquid supply unit (300) and the gas supply unit (400) to regulate the supply of the liquid precursor and the carrier gas.

[0042] FIG. 2 is a drawing showing an atomizer (100) according to a first embodiment of the present invention.

[0043] Referring to FIG. 2, the atomizer (100) may include an atomizer body (10), a piezo valve (20), a shut-off valve (30), and an orifice (40). In the atomizer (100), the piezo valve (20) may be located at the front end of the body path (13) through which the liquid precursor travels, and the shut-off valve (30) may be located at the rear end of the body path (13).

[0044] Conventional atomizers place a shut-off valve upstream of the body flow path and a piezo valve downstream of the body flow path to minimize waste volume. However, since it is difficult for the piezo valve to completely block the body flow path, there is a problem of leakage of the liquid precursor. Additionally, when the piezo valve is located downstream of the body flow path, the valve's piezoelectric element is exposed to heat generated by the heat exchanger of the vaporizer, which may make precise control of the liquid precursor flow rate difficult.

[0045] Accordingly, the atomizer (100) according to the first embodiment of the present invention can minimize the wasted volume of the atomizer (100) and prevent leakage of the liquid precursor by placing a piezo valve (20) at the front end of the body flow path (13) and a shut-off valve (30) at the rear end of the body flow path (13).

[0046] In addition, the atomizer (100) according to the first embodiment of the present invention can minimize the wasted volume by inserting an orifice (40) into the lower part of the shut-off valve (30).

[0047] Hereinafter, the configuration of the atomizer (100) according to the first embodiment of the present invention will be described in more detail.

[0048] FIG. 3 is a drawing showing an atomizer body (10) according to a first embodiment of the present invention.

[0049] Referring to FIG. 3, the atomizer body (10) may be formed with a body passage (13) through which a liquid precursor travels, a first coupling part (11) located at the front end of the body passage (13) and coupled with a piezo valve (20), a second coupling part (12) located at the rear end of the body passage (13) and coupled with a shut-off valve (30), a gas inlet (14) connected to the rear end of the body passage (13) through which a carrier gas is introduced, and a nozzle (15) through which a droplet aerosol formed by the collision of the liquid precursor and the carrier gas is sprayed.

[0050] The body flow path (13) may include a section connected from a first connecting part (11) connected to a piezo valve (20) to a second connecting part (12) connected to a shut-off valve (30). Since it is easier to precisely control the flow rate of the liquid precursor as the body flow path (13) is formed shorter, it can be formed to the shortest length considering the size and structure of the piezo valve (20) and the shut-off valve (30).

[0051] A liquid precursor passing through the body channel (13) can collide with a carrier gas introduced through the gas inlet (14) to form a droplet aerosol. The droplet aerosol can be sprayed through the nozzle (15). The nozzle (15) is formed so that its diameter narrows toward the end, thereby increasing the flow velocity of the sprayed droplet aerosol.

[0052] FIG. 4 is a drawing showing a piezo valve (20) according to the first embodiment of the present invention.

[0053] Referring to FIG. 4, the piezo valve (20) may include a piezo valve body (21), a piezo actuator (22), and a first diaphragm (23).

[0054] The piezo valve body (21) can be connected to the first coupling part (11) of the atomizer body (10) and connected to the front end of the body flow path (13). Specifically, the piezo valve body (21) may be formed with a first inlet (21a) into which a liquid precursor is introduced, a first flow path (21c) through which the liquid precursor moves, and a first outlet (21c) that allows the liquid precursor moving through the first flow path (21c) to be introduced into the atomizer body (10).

[0055] The piezo actuator (22) is coupled with the piezo valve body (21) and may accommodate a piezoelectric element (22a) that extends upon the application of voltage, a first button (22b) that pushes the first diaphragm (23) by the extension of the piezoelectric element (22a), and a first plunger (22c).

[0056] The first diaphragm (23) separates the piezo actuator (22) and the first fluid path (21c) to prevent the liquid precursor from flowing into the piezo actuator (22), and can open and close the first fluid path (21c) by the operation of the piezo actuator (22). For example, when voltage is applied to the piezoelectric element (22a), the piezoelectric element (22a) extends and can push out the first button (22b) and the first plunger (22c). The first button (22b) and the first plunger (22c) can push out the first diaphragm (23). At this time, the first plunger (22c), which has a ball-shaped end, can apply pressure to the part where the first diaphragm (23) contacts the first flow path (21c), thereby causing the first diaphragm (23) to open and close the first flow path (21c).

[0057] A piezo actuator (22) according to the first embodiment of the present invention can be arranged horizontally with respect to the atomizer body (10).

[0058] Since the heat exchanger installed in the vaporization device is heated to a high temperature, the atomizer body (10) can be heated by the conduction and convection heat generated in the heat exchanger. Since the piezo valve (20) is susceptible to heat, if the piezo valve (20) is coupled with the atomizer body (10) over a large surface area, the heat generated in the heat exchanger may affect the precision of the flow rate control of the piezo valve (20).

[0059] Accordingly, the piezo valve (20) according to the first embodiment of the present invention may have a structure in which all parts except the part where the atomizer body (10) and the piezo valve body (21) come into contact and the bracket (21d) are separated from the atomizer body (10) in order to minimize the contact surface with the atomizer (100).

[0060] In addition, a heat sink (not shown) can be formed on the outer surface of the piezo actuator (22) to increase the cooling effect.

[0061] FIG. 5 is a drawing showing a shut-off valve (30) according to a first embodiment of the present invention.

[0062] Referring to FIG. 5, the shut-off valve (30) may include a shut-off valve body (31), a pneumatic actuator (32), and a second diaphragm (33).

[0063] The shut-off valve body (31) may be connected to the second coupling part (12) of the atomizer body (10) and connected to the rear end of the body path (13). Specifically, the shut-off valve (30) may include a second inlet (31a) into which a liquid precursor is introduced, a second path (not shown) through which the liquid precursor travels, and a second outlet (31b) that allows the liquid precursor that has traveled through the second path (not shown) to be introduced back into the atomizer body (10).

[0064] The pneumatic actuator (32) is coupled with the shut-off valve body (31) and may accommodate a pneumatic cylinder that extends by pneumatic pressure, a second button (32a) that pushes the second diaphragm (33) by the extension of the pneumatic cylinder, and a second plunger (32b).

[0065] The second diaphragm (33) separates the pneumatic actuator (32) from the second fluid path (not shown) to prevent the liquid precursor from flowing into the pneumatic actuator (32), and can open and close the second fluid path (not shown) by the operation of the pneumatic actuator (32). For example, when the pneumatic cylinder of the pneumatic actuator (32) extends, it can push out the second button (32a) and the second plunger (32b). The second button (32a) and the second plunger (32b), pushed by the pneumatic cylinder, can push out the second diaphragm (33). At this time, the second plunger (32b), whose end is formed in a ball shape, can apply pressure to the part where the second diaphragm (33) contacts the second fluid path (not shown), thereby causing the second diaphragm (33) to open and close the second fluid path (not shown).

[0066] Unlike the piezo valve (20), the shut-off valve (30) can prevent leakage of the liquid precursor because the second diaphragm (33) is in perfect contact with the second flow path (not shown).

[0067] FIG. 6 is a drawing showing the lower part of a shut-off valve (30) according to the first embodiment of the present invention.

[0068] As illustrated in FIG. 6a, the shut-off valve (30) has a second outlet (31b) formed at the bottom through which a liquid precursor is discharged. This second outlet (31b) corresponds to a waste volume, so the flow of the liquid precursor from the second outlet (31b) to the nozzle (15) of the atomizer body (10) may be stagnated. Additionally, a bubble dome phenomenon may occur at the second outlet (31b), which may hinder the formation of a droplet aerosol. Therefore, in the first embodiment of the present invention, as illustrated in FIG. 6b, an orifice (40) is inserted at the bottom of the shut-off valve (30) to minimize the waste volume.

[0069] FIG. 7 is a drawing showing an orifice (40) according to a first embodiment of the present invention.

[0070] Referring to FIG. 7, the orifice (40) is a component in which a capillary is formed and is inserted into the lower part of the shut-off valve (30) to minimize the wasted volume and also rapidly narrow the cross-sectional area through which the liquid precursor flows, thereby increasing the flow rate of the liquid precursor. The internal diameter (w) of the orifice (40) can be adjusted according to the characteristics of the liquid precursor used.

[0071] The atomizer according to the present invention is not limited thereto and may include an atomizer according to a second embodiment.

[0072] FIG. 8 is a drawing showing an atomizer according to a second embodiment of the present invention.

[0073] Referring to FIG. 8, an atomizer (200) according to a second embodiment of the present invention comprises an atomizer body (10) in which a body passage (13) is formed, a piezo valve (50) located at the front end of the body passage (13), a shut-off valve (30) located at the rear end of the body passage (13), and an orifice (40) inserted into the lower part of the shut-off valve (30).

[0074] At this time, the atomizer (200) according to the second embodiment of the present invention may have a liquid inlet (16) formed therein through which a liquid precursor can be introduced through the atomizer body (10) and supplied to the piezo valve (50). In addition, the atomizer (200) according to the second embodiment of the present invention may have a piezo actuator of the piezo valve (50) arranged in a direction perpendicular to the atomizer body (10). Since the shut-off valve (30) and orifice (40) according to the second embodiment are identical to the shut-off valve (30) and orifice (40) according to the first embodiment, a description thereof is omitted.

[0075] FIG. 9 is a drawing showing a piezo valve (50) according to a second embodiment of the present invention.

[0076] Referring to FIG. 9, the piezo valve (50) comprises a piezo valve body (51), a first diaphragm (53), and a piezo actuator (52), wherein the piezo actuator (52) may be positioned vertically with respect to the atomizer body (10). Additionally, a heat sink (52d) that emits heat may be formed on the outer surface of the piezo actuator (52).

[0077] The piezo valve body (51) and the first diaphragm (53) according to the second embodiment are identical to the piezo valve body (21) and the first diaphragm (23) according to the first embodiment, so a description thereof is omitted.

[0078]

[0079] [Comparative Examples and Examples]

[0080] Below, in order to confirm the waste-free volume of the atomizer according to the present invention, the waste-free volume of the atomizer according to the example and comparative example was measured.

[0081] The atomizer according to the first comparative example has a shut-off valve placed at the top and a separate liquid flow control device installed.

[0082]

[0083] The atomizer according to the second comparative example includes a piezo valve as a liquid flow control device, wherein a shut-off valve is placed at the front end of the flow path and a piezo valve is placed at the rear end of the flow path.

[0084] The atomizer according to the embodiment includes a piezo valve as a liquid flow control device, wherein the piezo valve is positioned at the front end of the flow path and a shut-off valve is positioned at the rear end of the flow path.

[0085] Since it is difficult to directly measure the waste volume of the atomizer according to the comparative example and the embodiment, the waste volume of the atomizer was estimated by indirectly measuring the length of the flow path formed from the liquid flow control device to the inlet of the orifice inserted inside the atomizer.

[0086] FIG. 10 is a drawing showing an atomizer according to a comparative example and an embodiment.

[0087] Referring to FIG. 10, the flow paths formed in the atomizers according to the comparative example and the embodiment are indicated in red. As shown in FIG. 10a, it can be seen that the flow path of the atomizer according to the first comparative example is formed long because a liquid flow control device is installed separately. As shown in FIG. 10c, it can be seen that the flow path of the atomizer according to the second comparative example is formed very short because the piezo valve contacts the orifice inserted inside the atomizer. On the other hand, as shown in FIG. 10b, it can be seen that the flow path of the atomizer according to the embodiment is formed to be shorter than that of the atomizer according to the first comparative example and longer than that of the atomizer according to the second comparative example.

[0088] When the length of the flow path formed in the atomizer according to the first comparative example is set to 100% and the length of the flow path formed in the atomizer according to the second comparative example is set to 0%, it can be confirmed that the length of the flow path formed in the atomizer according to the embodiment is 17%.

[0089] When simply comparing the length of the flow paths, it can be seen that the flow path of the atomizer according to the second comparative example is formed to be shorter than that of the atomizer according to the embodiment. However, since the piezo valve is positioned at the rear end of the flow path in the atomizer according to the second comparative example, leakage of the liquid precursor may occur. On the other hand, in the atomizer according to the embodiment, the piezo valve is positioned at the front end of the flow path and the shut-off valve is positioned at the rear end of the flow path, so leakage of the liquid precursor does not occur.

[0090] Meanwhile, the embodiments disclosed in this specification and drawings are merely specific examples provided to aid understanding and are not intended to limit the scope of the invention. It is obvious to those skilled in the art that other variations based on the technical concept of the invention are possible in addition to the embodiments disclosed herein.

[0091] [Explanation of the symbol]

[0092] 1000 : Droplet supply system

[0093] 100, 200 : Atomizer

[0094] 10: Atomizer Body

[0095] 11: First connecting part

[0096] 12: Second connecting part

[0097] 13 : Body Euro

[0098] 14: Gas inlet

[0099] 15: Nozzle

[0100] 16: Liquid inlet

[0101] 20, 50 : Piezo valve

[0102] 21, 51: Piezo valve body

[0103] 21a, 51a: First inlet

[0104] 21b, 51b: First outlet

[0105] 21c: First Euro

[0106] 21d : Bracket

[0107] 22, 52: Piezo actuator

[0108] 22a, 52a: Piezoelectric element

[0109] 22b, 52b: 1st button

[0110] 22c, 52c: 1st plunger

[0111] 52d : Heatsink

[0112] 23, 53: First diaphragm

[0113] 30 : Shut-off valve

[0114] 31: Shut-off valve body

[0115] 31a: Second inlet

[0116] 31b: Second outlet

[0117] 32 : Pneumatic actuator

[0118] 32a : Second button

[0119] 32b : 2nd plunger

[0120] 33 : Second diaphragm

[0121] 40 : Orifice

[0122] 300 : Liquid supply unit

[0123] 400 : Gas supply unit

[0124] 500 : Control unit

Claims

1. A liquid supply unit that supplies a liquid precursor; A gas supply unit that supplies carrier gas; An atomizer for a vaporization device that receives the liquid precursor and carrier gas from the liquid supply unit and gas supply unit to form a droplet aerosol, wherein a piezo valve is located at the front end of a body flow path through which the liquid precursor supplied from the liquid supply unit travels, a shut-off valve is located at the rear end of the body flow path, and an orifice is inserted at the bottom of the shut-off valve to regulate the flow rate of the liquid precursor; and A control unit for controlling the liquid supply unit and the gas supply unit to control the supply of the liquid precursor and the carrier gas; comprising, The above atomizer is, An atomizer body having a body channel through which the liquid precursor moves, and a space formed in which the liquid precursor moving through the body channel collides with the carrier gas to form a droplet aerosol; A piezo valve connected to the front end of the body flow path and arranged horizontally with respect to the atomizer body, which controls the flow rate of the liquid precursor by the elongation of a piezoelectric element and has a heat sink formed on its outer surface that emits heat; A shut-off valve connected to the rear end of the body flow path and controlling the flow rate of the liquid precursor by pneumatic pressure; and Includes an orifice inserted into the lower part of the above-mentioned shut-off valve; and The above atomizer body is, A body channel through which the above liquid precursor travels; A first coupling part located at the front end of the body Euro and coupled with the piezo valve; A second coupling part located at the rear end of the body Euro and coupled with the shut-off valve; A gas inlet connected to the rear end of the body Euro and into which the carrier gas is introduced; and It includes a nozzle for spraying the droplet aerosol formed by the collision of the liquid precursor and the carrier gas; The above piezo valve is, A piezo valve body coupled to the first coupling portion, wherein a first inlet for the liquid precursor to flow in, a first flow path for the liquid precursor to move, and a first outlet for the liquid precursor that moves through the first flow path to flow into the atomizer body are formed; A piezo actuator coupled to the above-mentioned piezo valve body and operated by the application of voltage; and A first diaphragm that separates the piezo actuator and the first fluid path and opens and closes the first fluid path by the operation of the piezo actuator; The above shut-off valve is, A shut-off valve body coupled to the second coupling portion, having a second inlet through which the liquid precursor flows, a second flow path through which the liquid precursor moves, and a second outlet formed to allow the liquid precursor that has moved through the second flow path to flow into the atomizer body; A pneumatic actuator coupled to the above-mentioned shut-off valve body and operated by pneumatic pressure; and It includes a second diaphragm that separates the pneumatic actuator and the second fluid path and opens and closes the second fluid path by the operation of the pneumatic actuator. The above piezo valve has a structure in which the portion of the piezo valve body that is in contact with the first coupling portion is separated from the atomizer body. A droplet supply system characterized by the above-described piezo actuator receiving a piezoelectric element that extends upon the application of voltage, a first button that pushes a first diaphragm by the extension of the piezoelectric element, and a first plunger.

2. An atomizer body having a body channel through which a liquid precursor moves, and a space formed in which the liquid precursor moving through the body channel collides with a carrier gas to form a droplet aerosol; A piezo valve connected to the front end of the body flow path and arranged horizontally with respect to the atomizer body, which controls the flow rate of the liquid precursor by the elongation of a piezoelectric element and has a heat sink formed on its outer surface that emits heat; A shut-off valve connected to the rear end of the body flow path and controlling the flow rate of the liquid precursor by pneumatic pressure; and Includes an orifice inserted into the lower part of the above-mentioned shut-off valve; and The above atomizer body is, A body channel through which the above liquid precursor travels; A first coupling part located at the front end of the body Euro and coupled with the piezo valve; A second coupling part located at the rear end of the body Euro and coupled with the shut-off valve; A gas inlet connected to the rear end of the body Euro and into which the carrier gas is introduced; and It includes a nozzle for spraying the droplet aerosol formed by the collision of the liquid precursor and the carrier gas; The above piezo valve is, A piezo valve body coupled to the first coupling portion, wherein a first inlet for the liquid precursor to flow in, a first flow path for the liquid precursor to move, and a first outlet for the liquid precursor that moves through the first flow path to flow into the atomizer body are formed; A piezo actuator coupled to the above-mentioned piezo valve body and operated by the application of voltage; and A first diaphragm that separates the piezo actuator and the first fluid path and opens and closes the first fluid path by the operation of the piezo actuator; The above shut-off valve is, A shut-off valve body coupled to the second coupling portion, having a second inlet through which the liquid precursor flows, a second flow path through which the liquid precursor moves, and a second outlet formed to allow the liquid precursor that has moved through the second flow path to flow into the atomizer body; A pneumatic actuator coupled to the above-mentioned shut-off valve body and operated by pneumatic pressure; and It includes a second diaphragm that separates the pneumatic actuator and the second fluid path and opens and closes the second fluid path by the operation of the pneumatic actuator. The above piezo valve has a structure in which the portion of the piezo valve body that is in contact with the first coupling portion is separated from the atomizer body. The above piezo actuator is an atomizer for a vaporization device characterized by accommodating a piezoelectric element that extends upon the application of voltage, a first button that pushes a first diaphragm by the extension of the piezoelectric element, and a first plunger.

Images