Powder deposition prevention device

Abstract

The present invention relates to a powder deposition prevention device connected to process pipes to form a waste gas channel together with the process pipes such that waste gases flow along same. The powder deposition prevention device comprises: a transfer gas supply module having a first gas supply passage for supplying a transfer gas to one side thereof; a first outer pipe coupled to the outside of the first gas supply passage on one side of the transfer gas supply module; a first inner injection pipe having a part located inside the first outer pipe to form a first transfer gas passage on the outside thereof and to form a waste gas flow path on the inside thereof, the first inner injection pipe including a first injection nozzle for injecting a transfer gas into the waste gas flow path; and an intermediate guide pipe coupled to the outside and one side of the first inner injection pipe to shield one side thereof while forming a first transfer gas passage therein, and the other side of the intermediate guide pipe being coupled to the first outer pipe.

Description

Powder deposition prevention device

[0001] The present invention relates to a powder deposition prevention device that prevents powder, which is a reaction byproduct of waste gas, from being deposited on the inner surface of a process pipe by injecting a carrier gas into the waste gas flow path of the process pipe.

[0002] Process equipment used in a semiconductor manufacturing line or a display manufacturing line may include a process chamber, a vacuum pump, a scrubber, and process piping. The process piping may be installed in the process chamber and the vacuum pump, or in the vacuum pump and the scrubber. The process piping may provide a waste gas flow path for process waste gas discharged from the vacuum chamber to flow to the vacuum pump. The process piping may provide a waste gas flow path for process waste gas that has passed through the vacuum pump to flow to the scrubber. As the process waste gas flows through the process piping, it may generate reaction byproducts containing powder through various reactions.

[0003] The aforementioned powder can travel through the exhaust gas flow path of the process piping and deposit on the inner surface of the piping, potentially causing various problems. For example, as the powder deposits on the inner surface of the process piping, it can clog the exhaust gas flow path through which process exhaust gas flows. The powder can also erode the process piping, forming holes through which process exhaust gas leaks. Therefore, the process piping requires periodic inspection and replacement based on the degree of powder deposition.

[0004] Meanwhile, the above-mentioned process piping may be equipped with a hot gas injection module that injects hot gas in the middle to improve the blockage of the exhaust gas flow path. Conventional hot gas injection modules can be primarily installed in process piping areas where a large amount of powder adheres. However, since conventional hot gas injection modules are generally installed at specific locations in the process piping to inject hot gas, there are limitations in preventing powder from adhering to the inner surface.

[0005] The process piping connecting the vacuum pump and the scrubber has a problem in that a large amount of powder accumulates, especially on the inner surface of the side connected to the vacuum pump, which shortens the inspection and replacement cycles.

[0006] The present invention aims to provide a powder deposition prevention device that is easily installed in process piping and prevents powder from being deposited in the waste gas flow path by injecting a transport gas.

[0007] The powder deposition prevention device of the present invention is a powder deposition prevention device connected to process pipes to form a waste gas path through which waste gas flows together with the process pipes, and is characterized by comprising: a transport gas supply module having a first gas supply passage that supplies transport gas to one side; a first external pipe coupled to the outside of the first gas supply passage at one side of the transport gas supply module; a first internal injection pipe including a first injection nozzle that is partially located inside the first external pipe to form a first transport gas passage on the outside and a waste gas path on the inside, and injects the transport gas into the waste gas path; and an intermediate guide pipe coupled to the outside and one side of the first internal injection pipe to form the first transport gas passage on the inside while shielding one side, and the other side being coupled to the first external pipe.

[0008] The powder deposition prevention device of the present invention is a powder deposition prevention device connected to a process pipe to form a waste gas flow path in which waste gas flows from one side to the other side together with the process pipe, and is characterized by including a carrier gas inlet, an outer pipe connected to the process pipe, a plurality of inner injection pipes coupled along a central axis direction, a portion of which is located on the inner side of the outer pipe to form a carrier gas passage on the outside and a waste gas flow path on the inside, and including an injection nozzle that injects the carrier gas into the waste gas flow path, and an intermediate guide pipe coupled to one side of the outer pipe, which forms the carrier gas passage together with the inner injection pipe on the outside of the inner injection pipe, and forms an inner connecting passage and a carrier gas injection passage connected to the carrier gas passage on the inner side of the inner injection pipe to inject the carrier gas into the waste gas flow path.

[0009] The powder deposition prevention device of the present invention is a powder deposition prevention device connected to a process pipe and forming a waste gas flow path in which waste gas flows from one side to the other side together with the process pipe, and is characterized by comprising: a conveying gas supply module including a gas supply body formed in a ring shape and supplying a conveying gas supplied from the outside in the direction of the waste gas flow path; an external pipe including a first external pipe and a second external pipe coupled to one side and the other side of the gas supply body; an internal pipe having an outer surface spaced apart from the inner surface of the gas supply body and the first external pipe to form a conveying gas passage, one side being positioned to be exposed for a predetermined length from one side of the first external pipe, and forming an internal connecting passage that penetrates from the outside to the inside on one side to connect with the conveying gas passage; and an intermediate guide pipe that forms the conveying gas passage together with the internal pipe on the outside of the internal pipe and forms a conveying gas injection passage connected to the internal connecting passage on the inside of the internal pipe to inject the conveying gas into the waste gas flow path.

[0010] The powder deposition prevention device of the present invention is provided with an intermediate guide pipe that forms an internal injection pipe and a transport gas flow path between an external pipe and an internal injection pipe, so that it can be easily installed between process pipes.

[0011] The powder deposition prevention device of the present invention can effectively prevent reaction byproduct powder from being deposited on the inner surface of the outer pipe by isolating the inner surface of the outer pipe from exhaust gas.

[0012] The powder deposition prevention device of the present invention can be easily installed between process pipes because the outer pipe and the intermediate guide pipe extending from the inner side of the outer pipe to one side form a transport gas passage between the inner injection pipe and the outer pipe, allowing the transport gas to flow.

[0013] The powder deposition prevention device of the present invention is formed such that an intermediate guide pipe forms a carrier gas injection passage extending in the opposite direction to the carrier gas passage on the inner side of the internal injection pipe, thereby allowing the carrier gas of the carrier gas passage to be injected into the exhaust gas flow path, so that it can be easily installed between process pipes.

[0014] The powder deposition prevention device of the present invention can be installed instead in an area of ​​the process piping where a relatively large amount of powder may be deposited, thereby effectively blocking the deposition of powder.

[0015] FIG. 1 is a vertical cross-sectional view of a powder deposition prevention device according to one embodiment of the present invention.

[0016] Figure 2 is a vertical cross-sectional view of "AA" in Figure 1.

[0017] Figure 3 is a vertical cross-sectional view of "BB" in Figure 1.

[0018] Figure 4 is a vertical cross-sectional view of "CC" in Figure 1.

[0019] Figure 5 is an enlarged view of "D" in Figure 1.

[0020] Figure 6 is an enlarged view of "E" in Figure 1.

[0021] Figure 7 is an enlarged view of "F" in Figure 1.

[0022] FIG. 8 is a front view of the first internal injection tubes of FIG. 1 before they are joined together.

[0023] FIG. 9 is a front view after the combination of adjacent first internal injection tubes of FIG. 1.

[0024] Figure 10 is a vertical cross-sectional view of the intermediate induction pipe of Figure 1.

[0025] Figure 11 is a vertical cross-sectional view showing the operation of the powder deposition prevention device of Figure 1.

[0026] Fig. 12 is an enlarged view of "G" in Fig. 11.

[0027] FIG. 13 is a vertical cross-sectional view of a powder deposition prevention device according to another embodiment of the present invention.

[0028] Fig. 14 is a vertical cross-sectional view of "AA" in Fig. 13.

[0029] Fig. 15 is a vertical cross-sectional view of "BB" in Fig. 13.

[0030] Fig. 16 is an enlarged view of "C" in Fig. 13.

[0031] Fig. 17 is an enlarged view of "D" in Fig. 13.

[0032] FIG. 18 is a front view of the adjacent internal injection tubes of FIG. 13 before they are combined.

[0033] FIG. 19 is a front view of the combination of adjacent internal injection tubes of FIG. 13.

[0034] Figure 20 is a vertical cross-sectional view of the intermediate induction pipe of Figure 13.

[0035] FIG. 21 is a vertical cross-sectional view of the powder deposition prevention device of FIG. 13 connected to the process piping.

[0036] FIG. 22 is a vertical cross-sectional view of a powder deposition prevention device according to another embodiment of the present invention.

[0037] FIG. 23 is a vertical cross-sectional view of a powder deposition prevention device according to another embodiment of the present invention.

[0038] Fig. 24 is a partial enlarged view of "A" in Fig. 23.

[0039] FIG. 25 is a vertical cross-sectional view showing the powder deposition prevention device of FIG. 23 coupled to the process piping.

[0040] FIG. 26 is a vertical cross-sectional view of the first internal injection tube of another embodiment corresponding to FIG. 6.

[0041] FIG. 27 is a perspective view of a first internal injection tube of another embodiment corresponding to FIG. 6.

[0042] FIG. 28 is a vertical cross-sectional view of the first internal injection tube of FIG. 27.

[0043] FIG. 29 is a vertical cross-sectional view of an internal injection pipe formed by the first internal injection pipes of FIG. 27.

[0044] FIG. 30 is a perspective view of a first internal injection tube of another embodiment corresponding to FIG. 6.

[0045] FIG. 31 is a vertical cross-sectional view of the first internal injection tube of FIG. 30.

[0046] FIG. 32 is a perspective view of a first internal injection tube of another embodiment corresponding to FIG. 6.

[0047] FIG. 33 is a vertical cross-sectional view of the first internal injection tube of FIG. 32.

[0048] Hereinafter, a powder deposition prevention device according to a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.

[0049]

[0050] First, a powder deposition prevention device according to one embodiment of the present invention will be described.

[0051] A powder deposition prevention device (100) according to one embodiment of the present invention, with reference to FIGS. 1 to 10, may include a transport gas supply module (110), a first external pipe (120), a first internal injection pipe (130), and an intermediate guide pipe (140). The powder deposition prevention device (100) may further include a second external pipe (150) and a second internal injection pipe (160).

[0052] The powder deposition prevention device (100) may be installed between process pipes, between a process pipe and a vacuum pump, or between a process pipe and a scrubber. The powder deposition prevention device (100) may form a waste gas flow path (100a) along the central axis direction inside together with the process pipe. The waste gas flow path (100a) is a flow path through which waste gas discharged from the process chamber flows. The waste gas may refer to a gas mixed with the process gas discharged from the process chamber and reaction byproducts. The powder deposition prevention device (100) may inject a carrier gas into the waste gas flow path (100a) in the direction of waste gas flow. The powder deposition prevention device (100) may be located inside a heater jacket (not shown) that heats the process pipe. The carrier gas may be nitrogen gas.

[0053] The powder deposition prevention device (100) can be installed in place of the process piping in an area where a relatively large amount of powder, which is a reaction dispersion of waste gas, can be deposited in the process piping. For example, the powder deposition prevention device (100) can be located between the discharge end of a vacuum pump and the process piping, or between the fixed piping and the inlet end of a scrubber. Accordingly, the powder deposition prevention device (100) can prevent the waste gas flow path (100a) from being blocked by powder.

[0054] The above powder deposition prevention device (100) has a carrier gas supply module (110) located inside a heater jacket that surrounds the outside of the process piping, so that it can be heated by the heat of the heater jacket. Therefore, the carrier gas supply module (110) of the above powder deposition prevention device (100) can heat and supply the carrier gas even without a separate power supply.

[0055] The powder deposition prevention device (100) may have a first external pipe (120) located on one side and a second external pipe (150) located on the other side, centered around the carrier gas supply module (110). The first external pipe (120) and the second external pipe (150) may function as general process pipes. That is, the first external pipe (120) and the second external pipe (150) may replace process pipes in the area where the powder deposition prevention device (100) is installed. In the following description, if there is no need to distinguish between the first external pipe (120) and the second external pipe (150), they may be referred to as external pipes. If there is no need to distinguish between the first internal injection pipe (130) and the second internal injection pipe (160), they may be referred to as internal injection pipes.

[0056] The first internal injection pipe (130) of the powder deposition prevention device (100) may be positioned with its outer surface spaced apart from the inside of the intermediate guide pipe. Accordingly, the powder deposition prevention device (100) may form a first transport gas passage (100b) by having the intermediate guide pipe and the first internal injection pipe (130) located on one side of the transport gas supply module (110). The powder deposition prevention device (100) may form a second transport gas passage (100c) by having the second external pipe (150) and the second internal injection pipe (160) located on the other side. The powder deposition prevention device (100) may supply transport gas to the first transport gas passage (100b) and the second transport gas passage (100c), respectively. The above powder deposition prevention device (100) can inject a conveying gas in the direction of the flow of waste gas into the waste gas path (100a) through the first internal injection pipe (130) and the second internal injection pipe (160).

[0057] Meanwhile, the second external pipe (150) may be omitted when the transfer gas supply module (110) is located on the other side of the powder deposition prevention device (100). In this case, the powder deposition prevention device (100) may further include a first internal injection pipe (130) and a second internal injection pipe (160).

[0058] In the following description, referring to FIG. 1, one side may refer to the side where waste gas flows into the waste gas flow path (100a), and the other side may refer to the side where waste gas flows out of the waste gas flow path (100a). The direction from one side to the other side may refer to the longitudinal direction. The central axis may refer to a virtual axis extending from the center of the component in the direction from one side to the other side.

[0059] The above-described transfer gas supply module (110) may include a gas supply body (111), a gas movement passage (112), a gas inlet passage (113), a first gas supply passage (114), and a second gas supply passage (115). The above-described transfer gas supply module (110) may supply transfer gas supplied to the outside to the first transfer gas passage (100b) and the second transfer gas passage (100c).

[0060] The gas supply body (111) may be formed in a ring shape having an inner diameter, an outer diameter, and a predetermined length. That is, the gas supply body (111) may be formed in a ring shape having an inner surface, an outer surface, and two sides. The gas supply body (111) may be formed with an inner diameter that is equal to or larger than the inner diameter of the process pipe. The gas supply body (111) may have a waste gas passage (100a) formed on its inner side that is connected to the waste gas passage (100a) of the process pipe. The gas supply body (111) may be formed with a thickness necessary to form a gas movement passage (112) inside. The gas supply body (111) may be formed of a material such as corrosion-resistant stainless steel.

[0061] The above gas supply body (111) may be installed so that heat is transferred from a heater jacket (not shown) that heats the process piping. The above gas supply body (111) may be heated by the heat of the heater jacket. The above gas supply body (111) may have a heating wire built inside and may be heated by heat generated by power applied to the heating wire from the outside.

[0062] The gas passage (112) may be formed in a ring shape extending in the direction of the central axis inside the gas supply body (111). The gas passage (112) may consist of at least two ring shapes spaced apart from each other in the outward direction and connected in a zigzag pattern to form a single passage. For example, the gas passage (112) may include a unit passage (112a) and a unit connecting passage (112b). The unit passage (112a) may be formed in a ring shape extending along the direction of the central axis of the gas supply body (111) inside the gas supply body (111). That is, the unit passage (112a) may be formed in a ring shape having an inner diameter, an outer diameter, and a length. The unit passage (112a) may be formed with a length smaller than the length of the gas supply body (111). The above unit movement passages (112a) may be connected in a zigzag pattern, with at least two of them spaced apart from each other in an outward direction from the central axis of the gas supply body (111). The above unit connection passages (112b) may be formed in a cylindrical shape extending from the inside to the outside. The above unit connection passages (112b) may connect one side or the other side of the unit movement passages (112a) while extending from the inside to the outside.

[0063] The above gas passage (112) may be formed in a zigzag pattern from one side to the other inside the gas supply body (111). Accordingly, the above gas passage (112) may allow the conveyed gas to flow in a zigzag pattern from the outside to the inside of the gas supply body (111). The above gas passage (112) may increase the time the conveyed gas flows inside the gas supply body (111) so that the conveyed gas is sufficiently heated. The above gas passage (112) may be formed with an appropriate volume according to the required flow rate and heating temperature of the conveyed gas.

[0064] The above gas inlet passage (113) extends inward from the outer surface of the gas supply body (111) and can be connected to the outermost unit movement passage (112a) among the unit movement passages (112a) of the gas movement passage (112). The outer side of the above gas inlet passage (113) can be connected to an external gas supply means (not shown). The above gas inlet passage (113) can supply a transport gas supplied from the gas supply means to the gas movement passage (112).

[0065] The first gas supply passage (114) may be formed by penetrating from the unit movement passage (112a) of the gas movement passage (112) to one side of the gas supply body (111). The first gas supply passage (114) may be formed by penetrating from the innermost unit movement passage (112a) among the unit movement passages (112a) of the gas movement passage (112) to one side of the gas supply body (111). The first gas supply passage (114) may be connected to the first transport gas passage (100b) to supply transport gas to the first transport gas passage (100b).

[0066] The first gas supply passage (114) may be formed in multiple numbers spaced apart in the circumferential direction with respect to the central axis of the gas supply body (111). The first gas supply passage (114) may be formed in one or multiple numbers depending on the flow rate of the transport gas to be supplied and the diameter of the exhaust gas path (100a). The first gas supply passage (114) may be formed in an overall ring shape. The first gas supply passage (114) may supply the transport gas of the unit movement passage (112a) from one side of the gas supply body (111) to one side direction.

[0067] The first gas supply passage (114) may be formed in a direction parallel to the central axis of the gas supply body (111). In this case, the transport gas can flow smoothly through the first transport gas passage (100b) while being supplied from the first gas supply passage (114).

[0068] The second gas supply passage (115) may be formed by penetrating from the unit movement passage (112a) of the gas movement passage (112) into the inner surface of the gas supply body (111). The second gas supply passage (115) may be formed by penetrating from the innermost unit movement passage (112a) among the unit movement passages (112a) of the gas movement passage (112) into the inner surface of the gas supply body (111). The second gas supply passage (115) may be formed as one or multiple passages depending on the flow rate of the transport gas to be supplied and the diameter of the exhaust gas path (100a). The second gas supply passage (115) may be formed as multiple passages spaced apart in the circumferential direction with respect to the central axis of the gas supply body (111). The second gas supply passage (115) may be formed in an overall ring shape. The second gas supply passage (115) can supply the transport gas of the unit transfer passage (112a) in an inward direction from the inner circumference of the gas supply body (111). That is, the second gas supply passage (115) can supply the transport gas to the second transport gas passage (100c).

[0069] The first external pipe (120) may include a first pipe body (121) and a first pipe flange (122). The first external pipe (120) may be connected to one side of the gas supply body (111) and extended in one direction. That is, the other side of the first pipe body (121) of the first external pipe (120) may be connected to one side of the gas supply body (111), and the first pipe flange (122) may be connected to one side. The first external pipe (120) may be connected to the outside of the first gas supply passage (114). The other side of the first external pipe (120) may be connected to one side of the gas supply body (111) by a joining method such as welding. The first external pipe (120) can be connected to a process pipe (10) located on one side by means of a first pipe flange (122).

[0070] The first pipe body (121) may be formed in the shape of a tube with a hollow interior and open sides. The first pipe body (121) may be formed as a straight pipe. Screw threads may be formed on the inner surface of the first pipe body (121) in a predetermined length area. The first pipe body (121) may be connected to an intermediate guide pipe by screw connection. The first pipe body (121) may be formed with a length greater than the length of the screw threads required to fix the other side of the intermediate guide pipe. The inner diameter of the first pipe body (121) may be formed larger than the diameter where the first gas supply passage (114) of the gas supply body (111) is located. That is, the first pipe body (121) may be formed with an inner diameter required for the first gas supply passage (114) to be located inside. The first pipe body (121) may be formed of a corrosion-resistant material. For example, the first pipe body (121) may be formed of a corrosion-resistant material such as stainless steel, aluminum, aluminum alloy, or synthetic resin.

[0071] The first pipe flange (122) can be connected to one end of the first pipe body (121). The first pipe flange (122) can be formed as a general pipe flange. The first pipe flange (122) can be connected to adjacent process pipes (10).

[0072] The first internal injection tube (130) may include a first outer ring (131), a first intermediate ring (132), a first inner ring (133), and a first internal spacing projection (134).

[0073] The first internal injection pipe (130) may be formed in a tubular shape by combining a plurality of them along the central axis direction. The first internal injection pipe (130) may be formed such that a portion of it is located inside the first external pipe (120). The first internal injection pipe (130) may be formed such that its outer surface is spaced apart from the inner surface of the first external pipe (120). The first internal injection pipe (130) may be formed such that its outer diameter is smaller than the diameter of the first gas supply passage (114) of the gas supply body (111). Accordingly, the first internal injection pipe (130) may be formed such that its outer surface is located inside the first gas supply passage (114).

[0074] The first internal injection pipe (130) may be formed with a total length longer than the length of the first external pipe (120). Accordingly, a portion of the first internal injection pipe (130) may be located inside the first external pipe (120), and a portion may be exposed from the first external pipe (120). The other end of the first internal injection pipe (130) may be connected to one side of the gas supply body (111). That is, the first internal injection pipe (130) located at the other end may be connected to one side of the gas supply body (111). At this time, some components of the second internal injection pipe (160) may be removed to facilitate connection with one side of the gas supply body (111). For example, the first internal ring (133) of the first internal injection pipe (130) may be removed.

[0075] The first internal injection pipe (130) may form a first transport gas passage (100b) on the outside and a waste gas passage (100a) on the inside. The first internal injection pipe (130) may inject the transport gas supplied to the first transport gas passage (100b) through the first gas supply passage (114) into the waste gas passage (100a).

[0076] The first inner injection tube (130) may be integrally formed with a first outer ring (131), a first intermediate ring (132), a first inner ring (133), and a first inner spacing projection (134). For example, the first inner injection tube (130) may be integrally formed with a first outer ring (131), a first intermediate ring (132), a first inner ring (133), and a first inner spacing projection (134) by machining.

[0077] The first internal injection pipe (130) can be combined in multiple numbers to form a first injection nozzle (130a) between adjacent first internal injection pipes (130). The first injection nozzle (130a) is formed to form a ring shape along the circumferential direction on the inner surface of the first internal injection pipe (130), and multiple nozzles may be positioned spaced apart from each other along the central axis direction of the exhaust gas flow path (100a).

[0078] The first inner injection tube (130) can be joined so as to overlap each other for a predetermined length when joined with an adjacent first inner injection tube (130). More specifically, the first outer ring (131) of the first inner injection tube (130) can be positioned to overlap the first inner ring (133) of the adjacent first inner injection tube (130) for a predetermined length in one direction. The first inner ring (133) of the first inner injection tube (130) can be positioned to overlap the first outer ring (131) of the adjacent first inner injection tube (130) for a predetermined length in the other direction. Accordingly, the first injection nozzle (130a) can be formed by the space between the first outer ring (131) and the first inner ring (133) of the adjacent first inner injection tubes (130). The first injection nozzle (130a) above can inject a conveying gas into the waste gas flow path (100a) in the direction of the flow of the waste gas.

[0079] The first outer ring (131) may be formed in a ring shape having a predetermined thickness and length. The first outer ring (131) may be formed with an outer diameter corresponding to the inner diameter of the first transfer gas passage (100b). The first outer ring may be formed with an outer diameter necessary for its outer surface to form the inner surface of the first transfer gas passage (100b). The inner surface of the first outer ring (131) may form a part of the first injection nozzle (130a). The inner diameter of the first outer ring (131) may be formed to be larger than the diameter of the exhaust gas flow path (100a). Meanwhile, when the first inner injection pipe (130) is located inside the first outer pipe (120), the outer surface may form the first transfer gas passage (100b) while being spaced apart from the inner surface of the first outer pipe (120).

[0080] The first intermediate ring (132) may be formed in a ring shape having a predetermined length. One side of the first intermediate ring (132) may be connected to the other side of the first outer ring (131). That is, the first intermediate ring (132) may extend in the longitudinal direction from the other side of the first outer ring (131). The first intermediate ring (132) may be formed with an outer diameter necessary to form the inner surface of the first transport gas passage (100b). That is, the diameter of the outer surface of the first intermediate ring (132) may be formed to correspond to the diameter of the outer surface of the first outer ring (131). The inner surface of the first intermediate ring (132) may be formed to be inclined inward. That is, the inner surface of the first intermediate ring (132) can be formed to be inclined in the direction of the central axis of the exhaust gas flow path (100a).

[0081] The first intermediate ring (132) can form a first transport gas passage (100b) together with the first outer ring (131). The first intermediate ring (132) can cause the transport gas injected from the first injection nozzle (130a) to be injected in a direction oblique to the central axis of the exhaust gas passage (100a).

[0082] The first intermediate ring (132) may include a first receiving step (132a). The first receiving step (132a) may be formed to be open to the other side while having a predetermined depth and length inwardly from the outer surface of the first intermediate ring (132). That is, the first receiving step (132a) may be formed in a stepped shape extending across the outer surface of the first intermediate ring (132) and the other side. The first receiving step (132a) may provide a space for receiving the first internal spacing projection (134) of the first internal injection pipe (130) adjacent to the other side. The depth of the first receiving step (132a) may be equal to the thickness of the first internal spacing projection (134), and the length may be formed to be shorter than the length of the first internal spacing projection (134). When the first internal injection pipe (130) is combined with the first internal injection pipe (130) adjacent to the other side, the first internal spacing projection (134) of the first internal injection pipe (130) adjacent to the first receiving step (132a) can be combined. Accordingly, a first injection nozzle (130a) through which a conveying gas flows from the outside to the inside can be formed between the other side of the first intermediate ring (132) and one side of the first outer ring (131) of the first internal injection pipe (130) adjacent to it.

[0083] The first inner ring (133) may be formed in a ring shape having a predetermined thickness and length. One side of the first inner ring (133) may be connected to the other side of the first intermediate ring (132). The first inner ring (133) may be formed such that its outer diameter is smaller than the outer diameter of the first intermediate ring (132), so that its outer surface is located inward from the outer surface of the first intermediate ring (132). The outer surface of the first inner ring (133) may be formed with a step difference from the outer surface of the first intermediate ring (132).

[0084] The outer surface of the first inner ring (133) may be formed with a smaller diameter than the inner surface of the first outer ring (131). Accordingly, when the first inner ring (133) of the first inner injection tube (130) is joined to overlap with the first outer ring (131) of the first inner injection tube (130) located on the other side, the outer surface of the first inner ring (133) and the inner surface of the first outer ring (131) may be spaced apart from each other and a first injection nozzle (130a) that is open in one direction may be formed. The first injection nozzle (130a) may be formed as a ring-shaped gap between the outer surface of the first inner ring (133) and the inner surface of the first outer ring (131). The first injection nozzle (130a) can inject the carrier gas supplied to the first carrier gas passage (100b) into the exhaust gas passage (100a).

[0085] The inner surface of the first inner ring (133) may include an inclined portion and a horizontal portion. The inclined portion of the first inner ring (133) may be formed as an inclined surface that slopes at the same angle as the inner surface of the first intermediate ring (132). The inclined portion of the first inner ring (133) may be formed as a surface identical to the inner surface of the first intermediate ring (132). The inclined portion of the first inner ring (133) may form part of the first injection nozzle (130a) to guide the conveyed gas to flow at an angle. The horizontal portion of the first inner ring (133) may be formed as a surface that extends horizontally from the inclined portion. The horizontal portion of the first inner ring (133) may form part of the exhaust gas flow path (100a).

[0086] The first internal spacing projection (134) may be in the shape of a column or a projection and may be formed by extending from one end of the first outer ring (131) to one side. The first internal spacing projection (134) may be extended in the opposite direction to the first inner ring (133). The first internal spacing projection (134) may be formed with a length necessary to form a part of the first injection nozzle (130a) through which the transport gas passes. That is, the first internal spacing projection (134) may be formed with a length necessary to space one side of the first outer ring (131) from the other side of the first intermediate ring (132) of the first internal injection pipe (130) located on one side when coupled to the first receiving step (132a) of the first intermediate ring (132) of the first internal injection pipe (130) located on one side. The first internal spacing projection (134) may be formed as at least two spaced apart along the circumferential direction on one side of the first outer ring (131). The first internal spacing projection (134) may preferably be formed as at least three.

[0087] The intermediate guide pipe (140) may include a main guide pipe (141), an intermediate blocking ring (142), and an internal guide pipe (143). The intermediate guide pipe (140) may be connected to the outer side and one side of the first internal injection pipe (130) to form a first transfer gas passage (100b). The other side of the intermediate guide pipe (140) may be connected to the first external pipe (120). The outer surface of the other side of the intermediate guide pipe (140) may be screw-connected to the inner surface of one side of the first external pipe (120).

[0088] The intermediate guide pipe (140) allows the carrier gas supplied from the first gas supply passage (114) to be injected into the waste gas flow path (100a) through the first internal injection pipe (130). The intermediate guide pipe (140) can allow the carrier gas to be injected into the waste gas flow path (100a) by connecting one end of the first gas supply passage (114) to the waste gas flow path (100a). In particular, the intermediate guide pipe (140) can open one end of the first carrier gas passage (100b) to the waste gas flow path (100a) by connecting one end of the intermediate guide pipe (140) to one side of the first internal injection pipe (130). Accordingly, the intermediate guide pipe (140) can allow the carrier gas supplied from the other side of the first carrier gas passage (100b) to flow smoothly to one side. The above intermediate guide pipe (140) can inject the carrier gas into the exhaust gas path (100a) even when the powder deposition prevention device (100) is separated from the process pipe (10). Accordingly, the above intermediate guide pipe (140) can allow the powder deposition prevention device (100) to be separated independently from the process pipe (10).

[0089] The main induction pipe (141) is formed as a pipe with a hollow interior and open ends, and its inner diameter may be formed to be larger than the outer diameter of the first inner injection pipe (130), and its outer diameter may be formed to be the same as the inner diameter of the first outer pipe (120). The main induction pipe (141) may be formed to have a shorter length than the first inner injection pipe (130). The main induction pipe (141) may be formed to be longer than the length of the first inner injection pipe (130) that is exposed to one side of the first outer pipe (120). One end of the inner pipe body may coincide with one end of the first inner injection pipe (130). Screw threads may be formed on the outer surface of the other side of the main induction pipe (141). Accordingly, the outer surface of the other side of the main induction pipe (141) may be screw-coupled to the inner surface of one side of the first outer pipe (120).

[0090] The main guide pipe (141) can be coupled so that its inner surface is spaced apart from the outer surface of the first inner injection pipe (130) and wraps around the outer surface. The main guide pipe (141) can be coupled so that it wraps around the first inner injection pipe (130) which is exposed to at least one side of the first outer pipe (120). Accordingly, the main guide pipe (141) can form a first transport gas passage (100b) together with the outer surface of the first inner injection pipe (130) on its inner surface.

[0091] The intermediate blocking ring (142) may be formed in a ring shape having an inner diameter and an outer diameter and a predetermined thickness. The intermediate blocking ring (142) may be formed such that its outer diameter is equal to the inner diameter of the main induction pipe (141) and its inner diameter is smaller than the inner diameter of the first internal injection pipe (130). The outer end of the intermediate blocking ring (142) may be connected to one end of the main induction pipe (141). The intermediate blocking ring (142) may contact one end of the first internal spacing projection (134) of the first internal injection pipe (130) located at the outermost side, and its inner end may be located inside the first internal injection pipe (130). The above intermediate blocking ring (142) can block one end of the first transfer gas passage (100b) and the first internal spacing projection (134) to form a transfer gas passage from the outside to the inside of the first internal spacing projections (134).

[0092] The inner guide pipe (143) may be formed in a tubular shape having a predetermined length, with an outer diameter equal to the inner diameter of the intermediate blocking ring (142). The inner guide pipe (143) may be formed with a length longer than that of the first inner spacing projection (134). One end of the inner guide pipe (143) may be connected to the inner circumference of the intermediate blocking ring (142), and the outer surface may be connected to the inner surface of the first inner spacing projection (134) at a distance. The inner guide pipe (143) may be located inside the first inner spacing projection (134). Accordingly, the inner guide pipe (143) can inject the transport gas flowing inward through the passage between the first inner spacing projections (134) in the direction of the exhaust gas flow.

[0093] The second external pipe (150) may include a second pipe body (151) and a second pipe flange (152). The second external pipe (150) may be connected to the other side of the gas supply body (111) and extend in the other direction. That is, one side of the second pipe body (151) of the second external pipe (150) may be connected to the other side of the gas supply body (111), and the second pipe flange (152) may be connected to the other side of the second pipe body (151). One side of the second external pipe (150) may be connected to the other side of the gas supply body (111) by a joining method such as welding. The second external pipe (150) may be connected to a process pipe (10) or a vacuum pump located on the other side by the second pipe flange (152). Meanwhile, the second external pipe (150) may have a flange attached to one side of the second pipe body (151) so that the flange can be attached to the other side of the gas supply body (111). The second external pipe (150) may form a waste gas flow path (100a) through which waste gas flows inside.

[0094] The second pipe body (151) may be formed in a tubular shape with a hollow interior and open sides. The second pipe body (151) may be formed as a straight pipe or a bellows pipe. The second pipe body (151) may be formed with a shorter length than the first pipe body (121).

[0095] The second pipe body (151) may be formed with an inner diameter equal to the inner diameter of the gas supply body (111). The inner surface of the second pipe body (151) may form a waste gas flow path (100a) through which waste gas flows together with the inner surface of the gas supply body (111). The second pipe body (151) may be formed with an inner diameter smaller than that of the first pipe body (121). The second pipe body (151) may be formed of a corrosion-resistant material. For example, the second pipe body (151) may be formed of a corrosion-resistant material such as stainless steel, aluminum, aluminum alloy, or synthetic resin.

[0096] The second pipe flange (152) may be connected to the other end of the second pipe body (151). The second pipe flange (152) may be formed as a general pipe flange. The second pipe flange (152) may be connected to adjacent process pipes (10) or the discharge end of a vacuum pump.

[0097] The second internal injection tube (160) may include a second outer ring (161), a second intermediate ring (162), a second inner ring (163), and a second internal spacing projection (164). The second internal injection tube (160) may further include a second one-sided blocking ring (165) and a second other-sided blocking ring (166). However, when the second internal injection tube (160) is located at the outermost side, the second internal spacing projection (164) may be omitted to be combined with the second one-sided blocking ring (165).

[0098] The second internal injection pipe (160) may be formed identically or similarly to the first internal injection pipe (130). However, since the second internal injection pipe (160) is located inside the gas supply body (111) and the second external pipe (150), the diameter of each component may be formed to be relatively smaller than that of the first internal injection pipe (130). Meanwhile, if the second external pipe (150) is omitted, the second internal injection pipe (160) may be located only inside the gas supply body (111).

[0099] The second internal injection pipe (160) may be formed in a tube shape by combining a plurality of them along the central axis direction of the exhaust gas flow path (100a). The second internal injection pipe (160) may be formed such that the diameter of its outer surface is smaller than the inner diameter of the gas supply body (111) and the second external pipe (150). The second internal injection pipe (160) may form a second transport gas passage (100c) with its outer surface spaced apart from the inner surface of the gas supply body (111) and the second external pipe (150). Accordingly, the second transport gas passage (100c) is connected to the second gas supply passage (115), and the transport gas supplied from the second gas supply passage (115) flows into the second transport gas passage (100c).

[0100] The second inner injection tube (160) can be combined in multiple numbers to form a second injection nozzle (160a) between adjacent second inner injection tubes (160). More specifically, the second outer ring (161) of the second inner injection tube (160) can be positioned to overlap the second inner ring (163) of the second inner injection tube (160) adjacent in one direction by a predetermined length. The second inner injection tube (160) can be positioned so that the second inner ring (163) overlaps the second outer ring (161) of the second inner injection tube (160) adjacent in the other direction by a predetermined length. At this time, the second outer ring (161) of the second inner injection pipe (160) may be spaced apart from the outer surface of the second inner ring (163) of the adjacent second inner injection pipe (160). The second injection nozzle (160a) may be formed by the space between the second outer ring (161) and the second inner ring (163) of the adjacent second inner injection pipe (160). The second injection nozzle (160a) is formed to form a ring shape overall along the circumferential direction on the inner surface of the second inner injection pipe (160), and a plurality of them may be positioned spaced apart from each other along the central axis direction of the exhaust gas flow path (100a). The second injection nozzle (160a) can inject the transport gas supplied to the second transport gas passage (100c) through the second gas supply passage (115) into the exhaust gas passage (100a).

[0101] The second internal injection pipe (160) may have a second transfer gas passage (100c) located on the outside and a waste gas passage (100a) located on the inside. One side of the second transfer gas passage (100c) may be blocked by a second one-side blocking ring (165), and the other side may be open or blocked by a second other-side blocking ring (166).

[0102] The second inner injection tube (160) may be integrally formed with a second outer ring (161), a second middle ring (162), a second inner ring (163), and a second inner spacing projection (164). For example, the second inner injection tube (160) may be integrally formed with a second outer ring (161), a second middle ring (162), a second inner ring (163), and a second inner spacing projection (164) by machining.

[0103] The second outer ring (161) may be formed in a ring shape having a predetermined thickness and length. The second outer ring (161) may be located inside the gas supply body (111) and the second external pipe (150) to form a second transfer gas passage (100c). The inner surface of the second outer ring (161) may form part of the second injection nozzle (160a). The outer surface of the second outer ring (161) may be formed with a diameter corresponding to the inner diameter of the second transfer gas passage (100c).

[0104] The second intermediate ring (162) may be formed in a ring shape having a predetermined length. One side of the second intermediate ring (162) may be connected to the other side of the second outer ring (161). That is, the second intermediate ring (162) may extend in the longitudinal direction from the other side of the second outer ring (161). The outer surface of the second intermediate ring (162) may be formed with an outer diameter necessary to form the inner surface of the second transfer gas passage (100c). That is, the outer surface of the second intermediate ring (162) may be formed with a diameter corresponding to the outer surface diameter of the second outer ring (161). The inner surface of the second intermediate ring (162) may be formed to be inclined inward from one side. That is, the inner surface of the second intermediate ring (162) may be formed to be inclined in the direction of the central axis of the exhaust gas flow path (100a). The second intermediate ring (162) may form a second transport gas passage (100c) together with the second outer ring (161). The second intermediate ring (162) may cause the transport gas injected from the second injection nozzle (160a) to be injected in a direction oblique to the central axis of the exhaust gas flow path (100a).

[0105] The second intermediate ring (162) may include a second receiving step (162a). The second receiving step (162a) may be formed in the same or similar shape as the first receiving step (132a). The second receiving step (162a) may be formed to have a predetermined depth and length inwardly from the outer surface of the second intermediate ring (162) and open to the other side. That is, the second receiving step (162a) may be formed in a stepped shape extending across the outer surface of the second intermediate ring (162) and the other side. The second receiving step (162a) may provide a space for receiving the second internal spacing projection (164) of the second internal injection pipe (160) adjacent to the other side. The second receiving step (162a) may be formed with a depth equal to the thickness of the second internal spacing projection (164) and a length smaller than the length of the second internal spacing projection (164). When the second internal injection pipe (160) is combined with the second internal injection pipe (160) adjacent to the other side, the second internal spacing projection (164) of the second internal injection pipe (160) adjacent to the second receiving step (162a) may be combined. Accordingly, a part of the second injection nozzle (160a), through which the conveying gas flows by penetrating from the outside to the inside, may be formed between the other side of the second intermediate ring (162) and one side of the second outer ring (161) of the adjacent second internal injection pipe (160).

[0106] The second inner ring (163) may be formed in a ring shape having a predetermined thickness and length. The second inner ring (163) may be coupled to the other side of the second intermediate ring (162). The second inner ring (163) may be formed such that its outer diameter is smaller than the outer diameter of the second intermediate ring (162), so that its outer surface is located inward from the outer surface of the second intermediate ring (162). The outer surface of the second inner ring (163) may be formed such that it is stepped from the outer surface of the second intermediate ring (162).

[0107] The outer surface of the second inner ring (163) may be formed with a smaller diameter than the inner surface of the second outer ring (161). Accordingly, when the second inner ring (163) of the second inner injection tube (160) is joined to overlap with the second outer ring (161) of the second inner injection tube (160) located on the other side, the outer surface of the second inner ring (163) and the inner surface of the second outer ring (161) may be spaced apart from each other and form a part of the second injection nozzle (160a) that is open in the other direction. The second injection nozzle (160a) may be formed as a ring-shaped gap between the outer surface of the second inner ring (163) and the inner surface of the second outer ring (161). The second injection nozzle (160a) can inject the transport gas supplied to the second transport gas passage (100c) into the exhaust gas passage (100a).

[0108] The inner surface of the second inner ring (163) may include an inclined portion and a horizontal portion. The inclined portion of the second inner ring (163) may be formed as an inclined surface that slopes at the same angle as the inner surface of the second intermediate ring (162). The inclined portion of the second inner ring (163) may be formed as a surface identical to the inner surface of the second intermediate ring (162). The inclined portion of the second inner ring (163) may form part of the second injection nozzle (160a) to guide the transport gas to flow at an angle. The horizontal portion of the second inner ring (163) may be formed as a surface that extends horizontally from the inclined portion. The horizontal portion of the second inner ring (163) may form part of the exhaust gas flow path (100a).

[0109] The second internal spacing projection (164) may be in the shape of a column or a projection and may be formed by extending from one end of the second outer ring (161) to the other. The second internal spacing projection (164) may be extended in the opposite direction to the second inner ring (163). The second internal spacing projection (164) may be formed to a length necessary to form a part of the second injection nozzle (160a) through which the transport gas passes. That is, the second internal spacing projection (164) may be formed with a length necessary to space the other side of the second outer ring (161) located on the other side from the one side of the second intermediate ring (162) of the second internal injection tube (160) located on the one side when coupled to the second receiving step (162a) of the second intermediate ring (162) of the second internal injection tube (160) located on the one side. The second internal spacing projection (164) may be formed as at least two spaced apart along the circumferential direction on the other side of the second outer ring (161). The second internal spacing projection (164) may preferably be formed as at least three.

[0110] The second one-sided blocking ring (165) is ring-shaped, and its inner diameter may be the same as or smaller than the diameter of the second inner injection pipe (160), and its outer diameter may be formed to correspond to the inner diameter of the gas supply body (111). The second one-sided blocking ring (165) may be coupled to the inside of one side of the gas supply body (111). The second one-sided blocking ring (165) may be coupled to one end of the second inner ring (163) of the second inner injection pipe (160) and one side of the gas supply body (111). The second inner ring (163) of the second inner injection pipe (160) may be coupled to the other side or inner circumference of the second one-sided blocking ring (165). The outer circumference of the second one-sided blocking ring (165) may be coupled to the inner circumference of the gas supply body (111). The above second side blocking ring (165) is coupled between one side of the gas supply body (111) and the second internal injection pipe (160) to block one side of the second transfer gas passage (100c).

[0111] The second other-side blocking ring (166) is ring-shaped and can block the other side of the second transfer gas passage (100c). Accordingly, the second other-side blocking ring (166) can be formed in a shape necessary to block the other side of the second transfer gas passage (100c). For example, the second other-side blocking ring (166) is ring-shaped, and its inner diameter may be the same diameter or smaller than the diameter of the inner injection pipe of the second outer ring (161), and its outer diameter may be formed to a diameter corresponding to the inner diameter of the gas supply body (111). The second one-side blocking ring (165) can be coupled to the inside of the other side of the gas supply body (111). More specifically, the second other-side blocking ring (166) may be coupled to the other end of the second inner ring (163) of the second inner injection pipe (160) and to the other side of the gas supply body (111). The second inner ring (163) of the second inner injection pipe (160) may be coupled to the other side or inner circumference of the second other-side blocking ring (166). The outer circumference of the second other-side blocking ring (166) may be coupled to the inner circumference of the gas supply body (111). The second one-side blocking ring (165) may be coupled between the other side of the gas supply body (111) and the second inner injection pipe (160) to block the other side of the second transport gas passage (100c).

[0112]

[0113] The following describes the operation of a powder deposition prevention device according to one embodiment of the present invention.

[0114] A powder deposition prevention device (100) according to one embodiment of the present invention is coupled between process pipes (10) as shown in FIGS. 11 and 12 to form a waste gas path (100a) through which waste gas (a) flows together with the process pipes (10). The powder deposition prevention device (100) forms a carrier gas path through which a carrier gas (b) flows separately from the process pipes (10), and sprays the carrier gas into the waste gas path (100a). That is, the powder deposition prevention device (100) blocks one end of the first carrier gas passage (100b) and one end of the first internal injection pipe (130) with an intermediate guide pipe (140) to spray the carrier gas into the waste gas path (100a). The above powder deposition prevention device (100) reduces the deposition of reaction by-products of waste gas inside the first internal injection pipe (130) and the second internal injection pipe (160) and inside the process pipe (10) by increasing the transport speed of waste gas by injecting a transport gas.

[0115] The powder deposition prevention device (100) receives a carrier gas from the outside through a carrier gas supply module (110). More specifically, the carrier gas flows through the gas inlet passage (113), the gas movement passage (112), and the first gas supply passage (114) of the carrier gas supply module (110) and is supplied to the first carrier gas passage (100b). While flowing through the first carrier gas passage (100b), the carrier gas is injected into the waste gas passage (100a) through the first injection nozzle (130a). The carrier gas is injected in the direction of waste gas flow in the waste gas passage (100a).

[0116] The main guide pipe (141) forms a first transport gas passage (100b). The intermediate blocking ring (142) blocks one end of the first transport gas passage (100b). The intermediate blocking ring (142) contacts one end of the first internal spacing projection (134) and blocks one end of the space between the first internal spacing projections (134), thereby forming a passage from the outside to the inside. The internal guide pipe (143) is located below the first internal spacing projection (134) and sprays the transport gas passing through the first internal spacing projection (134) into the exhaust gas passage (100a). The internal guide pipe (143) sprays the transport gas at an angle in the direction of exhaust gas movement in the exhaust gas passage (100a).

[0117] The second internal injection pipe (160) forms a second transfer gas passage (100c) inside the transfer gas supply module (110). The second transfer gas passage (100c) receives transfer gas through the second gas supply passage (115). The second internal injection pipe (160) injects transfer gas into the waste gas path (100a) in the same way as the first internal injection pipe (130).

[0118] Next, a powder deposition prevention device according to another embodiment of the present invention will be described.

[0119] A powder deposition prevention device (200) according to another embodiment of the present invention may include an external pipe (110), an internal injection pipe (230), and an intermediate induction pipe (240), with reference to FIGS. 13 to 20. The powder deposition prevention device (200) may further include a transport gas heating pipe (270).

[0120] The powder deposition prevention device (200) may have an internal injection pipe (230) positioned spaced apart from the inner side of the outer pipe (110). The powder deposition prevention device (200) may have an intermediate guide pipe (240) connected to one side of the outer pipe (220) and positioned outside the internal injection pipe (230). Accordingly, the powder deposition prevention device (200) may form a transport gas passage (200b) together with the internal injection pipe (230) located inside the outer pipe (220) and the intermediate guide pipe (240). The powder deposition prevention device (200) may form an internal connection passage (200c) and a transport gas injection passage (200d) by means of the inner side of the internal injection pipe (230) and the intermediate guide pipe (240). The powder deposition prevention device (200) can inject a carrier gas (b) supplied from an external carrier gas supply module (not shown) into a waste gas path (200a) through a carrier gas passage (200b) and an internal connecting passage (200c). At this time, the powder deposition prevention device (200) can inject the carrier gas (b) in the direction of flow of the waste gas (a) in the waste gas path (200a).

[0121] In the following description, referring to FIG. 13, one side may refer to the side where the exhaust gas (a) flows into the exhaust gas flow path (200a), and the other side may refer to the side where the exhaust gas (a) flows out of the exhaust gas flow path (200a). The direction from one side to the other side may refer to the longitudinal direction. The central axis may refer to a virtual axis extending from the center of the component in the direction from one side to the other side.

[0122] The above external pipe (220) may include a transfer gas inlet (221). The above external pipe (220) may be formed in a pipe shape having a predetermined length and with one side and the other side open. The above external pipe (220) may form a waste gas flow path (200a) inside. The above external pipe (220) may have pipe flanges (222) connected to one side and the other side, respectively. The above external pipe (220) may be connected to process pipes (10) located on one side and the other side, respectively, by means of pipe flanges (222), as shown in FIG. 21.

[0123] The above-mentioned transfer gas inlet (221) may be formed by penetrating from the outer surface of the external pipe (220) to the inner surface. The above-mentioned transfer gas inlet (221) may provide a path for the transfer gas (b) to flow from the outside to the inside of the external pipe (220).

[0124] The inner injection tube (230) may include an outer ring (231), an intermediate ring (232), an inner ring (233), and an inner spacing projection (234). The inner injection tube may further include an inner blocking ring (235).

[0125] The internal injection pipe (230) may be formed into an overall tubular shape by joining multiple internal injection pipes along the central axis direction. The internal injection pipe (230) may be formed with an outer diameter smaller than the inner diameter of the external pipe (220). A portion of the internal injection pipe (230) may be located inside the external pipe (220). The internal injection pipe (230) may be formed such that its outer surface is spaced apart from the inner surface of the external pipe (220). The internal injection pipe (230) may be formed with an overall length longer than that of the external pipe (220). Accordingly, a portion of the internal injection pipe (230) may be located inside the external pipe (110), and a portion may be exposed to one side from the external pipe (220).

[0126] The inner injection pipe (230) can be connected adjacent to the other end of the outer pipe (220), with the inner injection pipe (230) located at the other end. Some components of the inner injection pipe (230) may be removed to facilitate connection with the other end of the outer pipe (220). For example, the inner injection pipe (230) may have a portion of the intermediate ring (232) and the inner ring (233) removed.

[0127] The inner injection pipe (230) may form a transport gas passage (200b) on the outside and a waste gas passage (200a) on the inside. The inner injection pipe (230) may inject the transport gas (b) supplied to the transport gas passage (200b) through the transport gas inlet (221) into the waste gas passage (200a). The inner injection pipe (230) may have an outer ring (231), an intermediate ring (232), an inner ring (233), and an inner spacing projection (234) formed integrally. For example, the inner injection pipe (230) may have an outer ring (231), an intermediate ring (232), an inner ring (233), and an inner spacing projection (234) formed integrally by machining.

[0128] The above internal injection pipes (230) may be joined together around the axial direction to form injection nozzles (230a) between adjacent internal injection pipes (230). The injection nozzles (230a) are formed to form a ring shape along the circumferential direction on the inner surface of the internal injection pipes (230), and multiple nozzles may be positioned spaced apart from each other along the central axis direction of the exhaust gas flow path (200a). When the internal injection pipes (230) are joined together with adjacent internal injection pipes (230), they may be joined so that they overlap each other for a predetermined length. The outer ring (231) of the internal injection pipe (230) may be positioned so that it overlaps the inner ring (233) of the adjacent internal injection pipe (230) for a predetermined length in one direction. The inner injection pipe (230) may be positioned such that the inner ring (233) overlaps the outer ring (231) of the inner injection pipe (230) adjacent to it in the other direction by a predetermined length. The injection nozzle (230a) may be formed by the space between the outer ring (231) and the inner ring (233) of the inner injection pipes (230) adjacent to each other. The injection nozzle (230a) may inject a transport gas (b) in the direction of flow of the waste gas (a) into the waste gas path (200a).

[0129] The outer ring (231) may be formed in a ring shape having a predetermined thickness and length. The outer ring (231) may be formed with an outer diameter corresponding to the inner diameter of the transfer gas passage (200b). The outer ring (231) may be formed with an outer diameter necessary for its outer surface to form the inner surface of the transfer gas passage (200b). The inner surface of the outer ring (231) may form a part of the injection nozzle (230a). The inner diameter of the outer ring (231) may be formed to be larger than the diameter of the exhaust gas flow path (200a). Meanwhile, when the inner injection pipe (230) is located inside the outer pipe (220), the outer surface may form the transfer gas passage (200b) while being spaced apart from the inner surface of the outer pipe (220).

[0130] The intermediate ring (232) may be formed in a ring shape having a predetermined length. One side of the intermediate ring (232) may be connected to the other side of the outer ring (231). The intermediate ring (232) may extend in the longitudinal direction from the other side of the outer ring (231). The outer surface of the intermediate ring (232) may be formed with an outer diameter necessary to form the inner surface of the transport gas passage (200b). The outer surface of the intermediate ring (232) may be formed with a diameter corresponding to the outer diameter of the outer ring (231). The inner surface of the intermediate ring (232) may be inclined inward. The inner surface of the intermediate ring (232) may be inclined in the direction of the central axis of the exhaust gas flow path (200a). The intermediate ring (232) may form the transport gas passage (200b) together with the outer ring (231). The above intermediate ring (232) can inject the transport gas (b) injected from the injection nozzle (230a) in a direction oblique to the central axis of the exhaust gas path (200a).

[0131] The intermediate ring (232) may include an intermediate step (232a). The intermediate step (232a) may be formed to be open to the other side while having a predetermined depth and length inwardly from the outer surface of the intermediate ring (232). The intermediate step (232a) may be formed in a stepped shape extending across the outer surface of the intermediate ring (232) and the other side. The intermediate step (232a) may provide a space for receiving an internal spacing projection (234) of an internal injection pipe (230) adjacent to the other side. The intermediate step (232a) may be formed with a depth equal to the thickness of the internal spacing projection (234) and a length shorter than that of the internal spacing projection (234). When the above internal injection pipe (230) is combined with an adjacent internal injection pipe (230) on the other side, the internal spacing projection (234) of the adjacent internal injection pipe (230) can be combined with the intermediate step (232a). An injection nozzle (230a) through which a conveying gas (b) flows can be formed between the other side of the intermediate ring (232) and one side of the outer ring (231) of the adjacent internal injection pipe (230).

[0132] The inner ring (233) may be formed in a ring shape having a predetermined thickness and length. One side of the inner ring (233) may be connected to the other side of the intermediate ring (232). The outer diameter of the inner ring (233) may be formed smaller than the outer diameter of the intermediate ring (232), so that its outer surface may be located inward from the outer surface of the intermediate ring (232). The outer surface of the inner ring (233) may be stepped from the outer surface of the intermediate ring (232). The outer surface of the inner ring (233) may be formed with a diameter smaller than that of the inner surface of the outer ring (231). Accordingly, when the inner ring (233) of the inner injection pipe (230) is joined to overlap with the outer ring (231) of the inner injection pipe (230) located on the other side, the outer surface of the inner ring (233) and the inner surface of the outer ring (231) are spaced apart from each other and an injection nozzle (230a) that is open in the other direction can be formed. The injection nozzle (230a) can be formed as a ring-shaped gap between the outer surface of the inner ring (233) and the inner surface of the outer ring (231). The injection nozzle (230a) can inject the transport gas (b) supplied to the transport gas passage (200b) into the exhaust gas passage (200a).

[0133] The inner surface of the inner ring (233) may include an inclined portion and a horizontal portion. The inclined portion of the inner ring (233) may be formed as an inclined surface that slopes at the same angle as the inner surface of the intermediate ring (232). The inclined portion of the inner ring (233) may be formed as a surface identical to the inner surface of the intermediate ring (232). The inclined portion of the inner ring (233) may form part of the injection nozzle (230a) to guide the transport gas (b) to flow at an angle. The horizontal portion of the inner ring (233) may be formed as a surface that extends horizontally from the inclined portion. The horizontal portion of the inner ring (233) may form part of the exhaust gas flow path (200a).

[0134] The internal spacing projection (234) may be in the shape of a column or a projection and may be formed by extending from one end of the outer ring (231) to one side. The internal spacing projection (234) may be extended in the opposite direction to the inner ring (233). The internal spacing projection (234) may be formed with a length necessary to form a part of the injection nozzle (230a) through which the transport gas (b) passes. The internal spacing projection (234) may be formed with a length necessary to space one side of the outer ring (231) from the other side of the intermediate ring (232) of the adjacent internal injection pipe (230) when coupled to the intermediate step (232a) of the intermediate ring (232) of the internal injection pipe (230) located on one side. The above internal spaced projections (234) may be formed as at least two spaced apart along the circumferential direction on one side of the outer ring (231). The above internal spaced projections (234) may preferably be formed as at least three.

[0135] The inner blocking ring (235) is ring-shaped and can block the other side of the transport gas passage (200b). The inner blocking ring (235) can be formed in a shape necessary to block the other side of the transport gas passage (200b). For example, the inner blocking ring (235) is ring-shaped, and its inner diameter may be equal to or smaller than the outer diameter of the outer ring (231) or the intermediate ring (232), and its outer diameter may be formed to correspond to the inner diameter of the outer pipe (220). The inner blocking ring (235) can be connected to the other side of the outer pipe and to the inner injection pipe (230) located at the far end. The outer surface of the inner blocking ring (235) can be connected to the inner surface of the outer pipe (220).

[0136] The above intermediate guide pipe (240) may include a main guide pipe (241), an intermediate blocking ring (242), and an internal guide pipe (243). The above intermediate guide pipe (240) may further include a waste gas guide ring (244).

[0137] The above intermediate guide pipe (240) may form a transport gas passage (200b) together with the internal injection pipe (230) by being located on the outer side of the internal injection pipe (230) which is exposed to one side of the external pipe (110) while the main guide pipe (241) is connected to one side of the external pipe (220). The above intermediate guide pipe (240) may form an internal connection passage (200c) in which an intermediate blocking ring (242) extends from one side of the transport gas passage (200b) to the inside of the main guide pipe (241). The above intermediate guide pipe (240) may form a transport gas injection passage (200d) in which the internal guide pipe (243) is spaced apart from the inner surface of the internal injection pipe (230) and connected to the internal connection passage (200c). The intermediate guide pipe (240) can form a transport gas passage (200b), an internal connection passage (200c), and a transport gas injection passage (200d). Accordingly, the intermediate guide pipe (240) allows the transport gas (b) to be injected into the waste gas flow path (200a) from one end of the internal injection pipe (230) through the transport gas passage (200b), the internal connection passage (200c), and the transport gas injection passage (200d). The intermediate guide pipe (240) can inject the transport gas (b) into the waste gas flow path (200a) even when the powder deposition prevention device (200) is separated from the process pipe (10) connected at one end. The intermediate guide pipe (240) can allow the powder deposition prevention device (200) to operate independently separated from the process pipe (10).

[0138] The main induction pipe (241) may be formed as a pipe with a hollow interior and open ends. The main induction pipe (241) may be formed with an outer diameter necessary for its outer surface to be connected to the inner surface of the outer pipe (220). The outer diameter of the main induction pipe (241) may be smaller than or equal to the inner diameter of the outer pipe (220). The inner diameter of the main induction pipe (241) may be formed to be larger than the outer diameter of the inner injection pipe (230). The main induction pipe (241) may be formed with an inner diameter necessary for its inner surface to be spaced apart from the outer surface of the inner injection pipe (230) to form a conveying gas passage (200b) between it and the outer surface of the inner injection pipe (230). The main induction pipe (241) may be connected to surround the outer surface of the inner injection pipe (230) while being spaced apart from the outer surface of the inner injection pipe (230), which is exposed to one side of the outer pipe (220). The above main induction pipe (241) can form a transport gas passage (200b) together with the external pipe (220).

[0139] One side of the main guide pipe (241) may be exposed for a predetermined length from one side of the outer pipe (110) in a direction of one side. The main guide pipe (241) may be formed with a length longer than the length of the inner injection pipe (230) exposed to one side of the outer pipe (110). One end of the main guide pipe (241) may be spaced apart from one end of the inner injection pipe (230) by a predetermined distance. One end of the main guide pipe (241) may be spaced apart from one end of the inner injection pipe (230) by a distance corresponding to the width of the inner connecting passage (200c). The other side of the main guide pipe (241) may be connected to one side of the outer pipe (220). The other side of the main guide pipe (241) may be connected to one side of the outer pipe (220) by welding, etc. The outer surface of the other side of the main guide pipe (241) can be connected to the inner surface of one side of the outer pipe (220). The main guide pipe (241) has screw threads formed on the outer surface of the other side and can be screw-coupled with the screw threads formed on the inner surface of one side of the outer pipe (220).

[0140] The intermediate blocking ring (242) may be formed in a ring shape having an inner diameter and an outer diameter and a predetermined thickness. The outer end of the intermediate blocking ring (242) may be connected to one end of the main induction pipe (241), and the inner end may be located inside the internal injection pipe (230). The outer diameter of the intermediate blocking ring (242) may be formed to be the same as the inner diameter of the main induction pipe (241), and the inner diameter may be formed to have an inner diameter smaller than the inner diameter of the internal injection pipe (230). The inner end of the intermediate blocking ring (242) may be connected to one end of the internal injection pipe (230). The intermediate blocking ring (242) may form an internal connecting passage (200c) that shields one end of the transfer gas passage (200b) to connect with the transfer gas passage (200b) and allows the transfer gas (b) to flow inside the internal injection pipe (230).

[0141] The other side of the intermediate blocking ring (242) may be in contact with one end of the internal injection pipe (230). In this case, the transport gas (b) may flow from the transport gas passage (200b) to the inside of the internal injection pipe (230) through the internal connecting passage (200c) formed on one side of the internal injection pipe (230). The other side of the intermediate blocking ring (242) may be spaced apart from one end of the internal injection pipe (230). The internal connecting passage (200c) formed in the internal injection pipe (230) may be formed entirely in the circumferential direction of the internal injection pipe (230). The internal connecting passage (200c) may be formed as a ring-shaped hole penetrating from the outer surface to the inner surface on one side of the internal injection pipe (230).

[0142] The inner guide pipe (243) may be formed in a pipe shape having a predetermined length, with an outer diameter equal to the inner diameter of the intermediate blocking ring (242). One end of the inner guide pipe (243) may be connected to the inner circumference of the intermediate blocking ring (242), and the outer surface may be spaced apart from the inner surface of the inner injection pipe (230) and extend in the other direction. The inner guide pipe (243) may form a transport gas injection passage (200d) through which transport gas (b) is injected while the outer surface is spaced apart from the inner surface of the inner injection pipe (230). The transport gas injection passage (200d) may inject transport gas (b) supplied from an internal connecting passage (200c) connected from one side into the exhaust gas flow path (200a). The transport gas injection passage (200d) may inject transport gas (b) in the direction in which exhaust gas (a) flows in the exhaust gas flow path (200a).

[0143] The exhaust gas induction ring (244) may have an outer diameter equal to that of the intermediate blocking ring (242) and an inner surface that is inclined toward the center from one side to the other. The exhaust gas induction ring (244) may have an inner surface formed as an inclined plane. The exhaust gas induction ring (244) may have a width equal to that of the intermediate blocking ring (242). The other side of the exhaust gas induction ring (244) may be connected to one side of the intermediate blocking ring (242). The exhaust gas induction ring (244) may be formed integrally with the intermediate blocking ring (242). The exhaust gas induction ring (244) may have an outer surface that is the same as the outer surface of the intermediate blocking ring (242), and an inner surface that forms an inclined plane extending from the outer surface of the intermediate blocking ring (242) to the inner surface of the internal induction pipe (243). The exhaust gas induction ring (244) may be formed such that one end of the inner surface meets one end of the outer surface. The exhaust gas induction ring (244) may be formed such that one end of the inner surface and one end of the outer surface coincide. The exhaust gas induction ring (244) may form an inclined surface that slopes from the outside to the inside on one side of the intermediate blocking ring (242) to allow the exhaust gas (a) to flow smoothly.

[0144] The above-mentioned transfer gas heating pipe (270) is formed as a pipe of a predetermined length that surrounds the outer side of the outer pipe (220), and can be formed so as to shield the space between the outer pipe (220) at one end and the other end. The above-mentioned transfer gas heating pipe (270) can form a transfer gas inlet space (270a) into which transfer gas (b) is introduced, with its inner surface spaced apart from the outer surface of the outer pipe (220). The above-mentioned transfer gas heating pipe (270) may include a transfer gas supply port (271) on the other side to supply transfer gas (b). The above-mentioned transfer gas supply port (271) is connected to an external transfer gas supply means (not shown) and can supply the supplied transfer gas (b) to the transfer gas inlet space (270a).

[0145]

[0146] The following describes the operation of a powder deposition prevention device according to another embodiment of the present invention.

[0147] A powder deposition prevention device (200) according to another embodiment of the present invention is coupled between process pipes (10) as shown in FIG. 21 to form a waste gas flow path (200a) through which waste gas (a) flows together with the process pipes (10). The powder deposition prevention device (200) can connect one end of a transport gas passage (200b) to a transport gas injection passage (200d) through an internal connection passage (200c) formed by an intermediate blocking ring (242). The powder deposition prevention device (200) can sequentially connect the transport gas passage (200b), the internal connection passage (200c), and the transport gas injection passage (200d), allowing the transport gas (b) to flow sequentially. The above powder deposition prevention device (200) can cause the carrier gas (b) to flow from one side to the other inside the carrier gas passage (200b), cause the carrier gas (b) to flow from the outside to the inside in the internal connecting passage (200c), and cause the carrier gas (b) to flow from one side to the other in the carrier gas injection passage (200d) and inject it into the waste gas flow path (200a).

[0148] The powder deposition prevention device (200) can inject a carrier gas (b) into a waste gas path (200a) through an internal injection pipe (230). The internal injection pipe (230) can inject the carrier gas (b) into the waste gas path (200a) by forming a plurality of injection nozzles (230a) spaced apart in the direction of flow of the waste gas (a) in the waste gas path (200a). The powder deposition prevention device (200) reduces the accumulation of reaction by-products of the waste gas (a) inside the internal injection pipe (230) and the process pipe (10) by increasing the transport speed of the waste gas (a) through the injection of the carrier gas (b) into the waste gas path (200a).

[0149]

[0150] Next, a powder deposition prevention device according to another embodiment of the present invention will be described.

[0151] A powder deposition prevention device (300) according to another embodiment of the present invention may include an external pipe (320), an internal injection pipe (330), and an intermediate induction pipe (240), as shown in FIG. 22. The powder deposition prevention device (300) may further include a transport gas heating pipe (270).

[0152] In another embodiment of the present invention, the structure of the external piping (210) and the internal injection pipe (330) may be formed differently compared to the embodiment according to FIGS. 13 to 21. The powder deposition prevention device (300) is described with a focus on the structure that differs in the external piping (320) and the internal injection pipe (330). In the powder deposition prevention device (300), the same reference numerals may be assigned to configurations identical or similar to the powder deposition prevention device (200) according to the embodiment according to FIGS. 13 to 21, and descriptions may be omitted.

[0153] The above external pipe (320) may include an external main body pipe (321), an external expansion pipe (322), and an external connecting ring (323). The above external pipe (320) may include an external expansion pipe (322) having an inner diameter larger than that of the external main body pipe (321). The above external pipe (320) may be equipped with an external expansion pipe (322) to allow exhaust gas (a) to flow smoothly.

[0154] The above-mentioned outer body pipe (321) may be formed in a pipe shape with an inner diameter identical to the inner diameter of a general process pipe (10). The above-mentioned outer body pipe (321) is located on one side of the outer pipe (320) and may be connected to the other side of the intermediate guide pipe (240). A pipe flange (222) may be connected to one side of the above-mentioned outer body pipe (321).

[0155] The external expansion pipe (322) may be formed in a pipe shape with an inner diameter larger than that of the external main body pipe (321). The external expansion pipe (322) may be located on the other side of the external main body pipe (321). The external expansion pipe (322) may expand the inner diameter of the exhaust gas flow path (200a) to allow the exhaust gas (a) to flow smoothly. A transfer gas heating pipe (270) may be located on the outside of the external expansion pipe (322). A transfer gas inlet (221) may be formed in the external expansion pipe (322). A pipe flange (222) may be formed on the other side of the external expansion pipe (322).

[0156] The outer connecting ring (323) may be formed such that its inner diameter corresponds to the inner diameter of the outer main body pipe (321) and its outer diameter corresponds to the outer diameter of the outer expansion pipe (322). The outer connecting ring (323) may be formed as a ring of a predetermined thickness. The outer connecting ring (323) may connect the other side of the outer main body pipe (321) and one side of the outer expansion pipe (322) while sealing them.

[0157] The internal injection pipe (330) may include a separate internal connecting pipe (335). The internal connecting pipe (335) may connect the internal injection pipe (330) located inside the outer main body pipe (321) and the internal injection pipe (330) located inside the outer expansion pipe (322). The internal connecting pipe (335) may form a part of the transport gas passage (200b) while connecting the internal injection pipes (330).

[0158] The internal connecting pipe (335) may include an internal horizontal pipe (336) and an internal vertical ring (337). The internal horizontal pipe (336) may be formed in a pipe shape extending in the axial direction. The internal horizontal pipe (336) may be located inside the other side of the external main body pipe (321). The internal horizontal pipe (336) may form a conveying gas passage (200b) with its outer surface spaced apart from the inner surface of the external main body pipe (321).

[0159] The inner vertical ring (337) may be formed in a shape corresponding to the outer connecting ring (323). The inner surface of the inner vertical ring (337) may be connected to the other end of the inner horizontal pipe (336), and the outer surface may be connected to the inner injection pipe (330). The inner vertical ring (337) may form a conveying gas passage (200b) with one side spaced apart from the other side of the outer connecting ring (323).

[0160]

[0161] Next, a powder deposition prevention device according to another embodiment of the present invention will be described.

[0162] A powder deposition prevention device (400) according to one embodiment of the present invention may include a transport gas supply module (410), an external pipe (420), an internal pipe (430), and an intermediate guide pipe (440), with reference to FIGS. 23 and 24.

[0163] The above powder deposition prevention device (400) can form a waste gas flow path (400a) in which waste gas (a) flows along the central axis direction of the process pipe on the inside together with the process pipe. As shown in FIG. 23, the waste gas (a) can flow from the left to the right of the waste gas flow path (400a).

[0164] The powder deposition prevention device (400) may have external pipes (420) located on one side and the other side centered around the transport gas supply module (410). The powder deposition prevention device (400) may have an intermediate guide pipe (440) connected to one side of the external pipe (420) and located on the outside of the internal pipe (430). The powder deposition prevention device (400) may form a transport gas passage (400b) together with the transport gas supply module (410), the external pipe (420), and the internal pipe (430) located inside the intermediate guide pipe (440). The powder deposition prevention device (400) may form an internal connection passage (400c) and a transport gas injection passage (400d) by means of the inside of the internal pipe (430) and the intermediate guide pipe (440).

[0165] In the following description, referring to FIG. 23, one side may refer to the side where the exhaust gas (a) flows into the exhaust gas flow path (400a), and the other side may refer to the side where the exhaust gas (a) flows out of the exhaust gas flow path (400a). The direction from one side to the other side may refer to the longitudinal direction. The central axis may refer to a virtual axis extending from the center of the component in the direction from one side to the other side.

[0166] The above-mentioned transfer gas supply module (410) may include a gas supply body (411), a gas heating passage (412), a gas inlet passage (413), and a gas supply passage (414). The above-mentioned transfer gas supply module (410) may further include a gas heating means (415) and a heating means case (416).

[0167] The above-described transfer gas supply module (410) can supply transfer gas supplied from the outside into the inside of the gas supply body (411). More specifically, the above-described transfer gas supply module (410) can supply transfer gas into the inside through the gas inlet passage (413), the gas heating passage (412), and the gas supply passage (414). The above-described transfer gas supply module (410) can heat the transfer gas while passing it through the gas heating passage (412).

[0168] Meanwhile, in the case where there is no need to heat the transfer gas in the above-mentioned transfer gas supply module (410), the gas heating passage (412) and the gas inlet passage (413) may not be formed. The gas supply body (411) of the above-mentioned transfer gas supply module (410) may be formed in the same way as the process piping.

[0169] The gas supply body (411) may be formed in a ring shape having an inner diameter, an outer diameter, and a predetermined length. The gas supply body (411) may be formed in a ring shape having an inner surface, an outer surface, and two sides. The gas supply body (411) may supply a carrier gas supplied from the outside to the inside. The gas supply body (411) may supply the carrier gas in the direction of the exhaust gas flow path (400a). The gas supply body (411) may be formed with an inner diameter corresponding to the inner diameter of the process pipe. The gas supply body (411) may be formed with an inner diameter equal to or larger than the inner diameter of the process pipe. The gas supply body (411) may have an exhaust gas flow path (400a) formed on the inside that is connected to the exhaust gas flow path (400a) of the process pipe. The gas supply body (411) may be formed with a thickness necessary for a gas heating passage (412) to be formed inside.

[0170] The above gas supply body (411) can heat the carrier gas flowing through the gas heating passage (412) by being heated by a gas heating means (415) located outside the gas supply body (411). Accordingly, the carrier gas supply module (410) can supply the heated carrier gas.

[0171] The gas heating passage (412) may be formed as a space for accommodating the carrier gas inside the gas supply body (411). The gas heating passage (412) may be formed to form a spiral shape from one side to the other with respect to the central axis of the gas supply body (411) inside the gas supply body (411). The gas heating passage (412) may be formed in a ring shape having a predetermined length and width inside the gas supply body (411). The gas heating passage (412) may allow the carrier gas to flow spirally or in a straight line from one side to the other. The gas heating passage (412) may increase the travel distance of the carrier gas so that the carrier gas is heated efficiently.

[0172] The gas inlet passage (413) extends inward from one side of the outer circumference of the gas supply body (411) and can be connected to one side of the gas heating passage (412). The outer side of the gas inlet passage (413) can be connected to an external gas supply means (not shown). The gas inlet passage (413) can supply a transport gas supplied from the gas supply means to the gas transport passage.

[0173] The gas supply passage (414) may be formed to be open to the inner surface or inside of the gas supply body (411) from the gas heating passage (412). The gas supply passage (414) may be formed on one side or the other side of the gas heating passage (412). The gas supply passage (414) may supply the carrier gas, which is heated and supplied from the gas heating passage (412), to the inside of the gas supply body (411). The gas supply passage (414) may supply the carrier gas to the carrier gas passage (400b). The gas supply passage (414) may be formed as a plurality of passages spaced apart in the circumferential direction with respect to the central axis of the gas supply body (411).

[0174] The above gas heating means (415) is formed as a heating wire and is located on the outer side of the gas supply body (411) to heat the gas supply body (411). The above gas heating means (415) is formed as a rod-shaped heating wire, each of which is positioned to extend in the direction of the central axis of the gas supply body (411) and can be positioned to be spaced apart from each other in the circumferential direction. The above gas heating means (415) is formed as a wire-shaped heating wire and can be wound in a spiral shape along the outer surface of the gas supply body (411). The above gas heating means (415) can heat the gas supply body (411) by generating heat through power supplied from the outside. The above gas heating means (415) can heat the transport gas flowing through the gas heating passage (412).

[0175] The heating means case (416) may be formed to surround the gas heating means (415) while being coupled to the outer surface of the gas supply body (411). The heating means case (416) may position the gas heating means (415) inside so that it is not exposed to the outside. The heating means case (416) may be formed of the same material as the gas supply body (411).

[0176] The above external pipe (420) may include a first external pipe (421) and a second external pipe (422). The above external pipe (420) may be connected to one side and the other side of a gas supply module. The first external pipe (421) and the second external pipe (422) may be formed with an inner diameter equal to the inner diameter of the gas supply body (411). The first external pipe (421) and the second external pipe (422) may be formed with an inner diameter equal to the process pipe. The first external pipe (421) and the second external pipe (422) may form a waste gas flow path (400a) together with the gas supply body (411). The first external pipe (421) and the second external pipe (422) may be formed with a predetermined length. The first external pipe (421) and the second external pipe (422) may be formed with the same length. The first external pipe (421) may be formed with a longer length than the second external pipe (422).

[0177] The first external pipe (421) may be extended in one direction while the other end is connected to one side of the gas supply body (411). The other end of the first external pipe (421) may be connected to one side of the gas supply body (411) by a joining method such as welding. The first pipe flange (421a) may be connected to one side of the first external pipe (421). The first external pipe (421) may be connected to a process pipe located on one side by the first pipe flange (421a).

[0178] The second external pipe (422) may be extended in the direction of the other side while one side is connected to the other side of the gas supply body (411). The second external pipe (422) may be connected to the other side of the gas supply body (411) by a joining method such as welding. The second pipe flange (422a) may be connected to the other side of the second external pipe (422). The second external pipe (422) may be connected to a process pipe located on the other side by the second pipe flange (422a).

[0179] The inner pipe (430) may include an inner blocking ring (431). The inner pipe (430) may be formed in a pipe shape having a predetermined inner diameter, outer diameter, and length. The inner pipe (430) may be formed to have an outer diameter smaller than the inner diameter of the gas supply body (411) and the first outer pipe (421). The inner pipe (430) may be formed to have an outer diameter smaller than the inner diameter of the second outer pipe (422). The outer surface of the inner pipe (430) may be positioned such that it is spaced apart from the inner surface of the gas supply body (411) and the first outer pipe (421). The outer surface of the inner pipe (430) may be spaced apart from the inner surface of the second outer pipe (422). The inner pipe (430) may be formed with a length longer than the total length of the gas supply body (411) and the first outer pipe (421). The inner pipe (430) may be formed with a length longer than the total length of the gas supply body (411), the first outer pipe (421), and the second outer pipe (422). The inner pipe (430) may form a conveying gas passage (400b) with its outer surface spaced apart from the inner surface of the first outer pipe (421), the gas supply body (411), and the second outer pipe (422).

[0180] The inner pipe (430) may be connected such that one side is exposed to one side of the first outer pipe (421) for a predetermined length. The other side of the inner pipe (430) may be located inside the gas supply passage (414). The inner pipe (430) may be connected such that the other side is located inside the second outer pipe (422). The inner pipe (430) may be configured so that the transport gas supplied from the gas supply passage (414) is not supplied directly to the waste gas path (400a) but is supplied to one side of the transport gas passage (400b).

[0181] The above internal pipe (430) may include an internal connecting passage (400c) in the shape of a hole that penetrates from the outer surface to the inner surface on one side. The internal connecting passage (400c) is connected to a conveying gas passage (400b), and the conveying gas flowing through the conveying gas passage (400b) can flow into the inside of the internal pipe (430).

[0182] The inner blocking ring (431) is ring-shaped, and its inner diameter may be equal to or smaller than the outer diameter of the inner pipe (430), and its outer diameter may be equal to or larger than the inner diameter of the first outer pipe (421). The inner blocking ring (431) may be connected between the other end of the inner pipe (430) and the inner surface of the conveying gas body. The inner surface of the inner blocking ring (431) may be connected to the inner pipe (430), and its outer surface may be connected to the inner surface of the gas supply body (411). The inner blocking ring (431) may block the other end of the conveying gas passage (400b) from the other end of the gas supply passage (414), thereby allowing the conveying gas to be supplied to one side of the conveying gas passage (400b) and preventing it from flowing to the other side of the conveying gas passage (400b).

[0183] The above intermediate guide pipe (440) may include a main guide pipe (441), an intermediate blocking ring (442), and an internal guide pipe (443). The above intermediate guide pipe (440) may further include a waste gas guide ring (444).

[0184] The above intermediate guide pipe (440) can form a transport gas passage (400b) together with the inner pipe (430) by being located on the outer side of the inner pipe (430) which is exposed to one side of the first outer pipe (421) while the main guide pipe (441) is connected to one side of the first outer pipe (421). The above intermediate guide pipe (440) can form an inner connecting passage (400c) in which an intermediate blocking ring (442) extends from one side of the transport gas passage (400b) to the inside of the main guide pipe (441). The above intermediate guide pipe (440) can form a transport gas injection passage (400d) in which the inner guide pipe (443) is spaced apart from the inner surface of the inner pipe (430) and connected to the inner connecting passage (400c). The above intermediate guide pipe (440) can form a conveying gas passage (400b), an internal connecting passage (400c), and a conveying gas injection passage (400d). The above intermediate guide pipe (440) can inject the conveying gas supplied to the conveying gas passage (400b) into the waste gas flow path (400a) through the conveying gas passage (400b), the internal connecting passage (400c), and the conveying gas injection passage (400d).

[0185] The main induction pipe (441) is formed as a pipe with a hollow interior and open ends, and its outer diameter may be smaller than the inner diameter of the outer pipe (420) and its inner diameter larger than the outer diameter of the inner pipe (430). The main induction pipe (441) may be formed with an outer diameter necessary for its outer surface to come into contact with the inner surface of the outer pipe (420). The main induction pipe (441) may be formed with an inner diameter necessary for its inner surface to be spaced apart from the outer surface of the inner pipe (430) to form a transport gas passage (400b) between it and the outer surface of the inner pipe (430). The main induction pipe (441) may wrap its outer surface while being spaced apart from the outer surface of the inner pipe (430), which is exposed to one side of the first outer pipe (421). The main induction pipe (441) may form a transport gas passage (400b) together with the gas supply body (411).

[0186] The main induction pipe (441) may be formed with a length required for one side to be exposed from one side of the outer pipe (420) in a certain direction and the other side to be connected to one side of the outer pipe (420). The main induction pipe (441) may be formed to be longer than the length of the inner pipe (430) exposed to one side of the outer pipe (420). One end of the main induction pipe (441) may be spaced apart from one end of the inner pipe (430) by a certain distance. One end of the main induction pipe (441) may be spaced apart from one end of the inner pipe (430) by a distance corresponding to the width of the inner connecting passage (400c). The other end of the main induction pipe (441) may be connected to one side of the gas supply body (411) by welding, etc. The outer surface of the other side of the main guide pipe (441) can be connected to the inner surface of one side of the outer pipe (420). The main guide pipe (441) can be screw-connected to the outer pipe (420).

[0187] The intermediate blocking ring (442) may be formed in a ring shape having an inner diameter and an outer diameter and a predetermined thickness. The outer end of the intermediate blocking ring (442) may be connected to one end of the main induction pipe (441), and the inner end may be located inside the inner pipe (430). The outer diameter of the intermediate blocking ring may be the same as the inner diameter of the main induction pipe (441), and the inner diameter may be formed to be smaller than the inner diameter of the inner pipe (430). The inner end of the intermediate blocking ring may be connected to one end of the inner pipe (430). The intermediate blocking ring may shield one end of the transfer gas passage (400b) to form an internal connection passage (400c) through which the transfer gas flows into the inner pipe (430) and is connected to the transfer gas passage (400b).

[0188] The other side of the intermediate blocking ring (442) may be in contact with one end of the internal pipe (430). The conveyed gas may flow from the conveyed gas passage (400b) to the inside of the internal pipe (430) through an internal connecting passage (400c) formed on one side of the internal pipe (430). The other side of the intermediate blocking ring (442) may be spaced apart from one end of the internal pipe (430). The internal connecting passage (400c) formed in the internal pipe (430) may be formed entirely in the circumferential direction of the internal pipe (430). The internal connecting passage (400c) may be formed in a ring shape and may be formed entirely between the other side of the intermediate blocking ring (442) and one end of the internal pipe (430).

[0189] The above internal guide pipe (443) may be formed in a pipe shape having a predetermined length, with an outer diameter equal to the inner diameter of the intermediate blocking ring. The above intermediate guide pipe (440) may have one end connected to the inner circumference of the intermediate blocking ring and may extend in the other direction while its outer surface is spaced apart from the inner surface of the internal pipe (430). The above internal guide pipe (443) may form a carrier gas injection passage (400d) through which carrier gas is injected while its outer surface is spaced apart from the inner surface of the internal pipe (430). The above carrier gas injection passage (400d) may inject carrier gas supplied from an internal connecting passage (400c) connected from one side into a waste gas flow path (400a). The above carrier gas injection passage (400d) may inject carrier gas in the direction in which waste gas (a) flows in the waste gas flow path (400a).

[0190] The exhaust gas induction ring (444) may have an outer diameter equal to that of the intermediate blocking ring (442) and an inner surface that is inclined toward the center from one side to the other. The exhaust gas induction ring (444) may have an inner surface formed as an inclined plane. The exhaust gas induction ring (444) may have a width equal to that of the intermediate blocking ring (442). The other side of the exhaust gas induction ring (444) may be connected to one side of the intermediate blocking ring (442). The exhaust gas induction ring (444) may be formed integrally with the intermediate blocking ring (442). The exhaust gas induction ring (444) may have an outer surface that is the same as the outer surface of the intermediate blocking ring (442), and an inner surface that forms an inclined plane extending from the outer surface of the intermediate blocking ring (442) to the inner surface of the internal induction pipe (443). The exhaust gas induction ring (444) may be formed such that one end of the inner surface meets one end of the outer surface. The exhaust gas induction ring (444) may be formed such that one end of the inner surface and one end of the outer surface coincide. The exhaust gas induction ring (444) may form an inclined surface that slopes from the outside to the inside on one side of the intermediate blocking ring (442) to allow the exhaust gas (a) to flow smoothly.

[0191]

[0192] The following describes the operation of a powder deposition prevention device according to another embodiment of the present invention.

[0193] A powder deposition prevention device (400) according to another embodiment of the present invention, as shown in FIG. 25, is coupled between process pipes (10) to form a waste gas flow path (400a) through which waste gas (a) flows together with the process pipes (10). The powder deposition prevention device (400) can connect one end of a transport gas passage (400b) to a transport gas injection passage (400d) through an internal connection passage (400c) formed by an intermediate blocking ring (442). The powder deposition prevention device (400) can cause the transport gas (a) to flow from one side to the other inside the transport gas passage (400b), cause the transport gas (b) to flow from the outside to the inside in the internal connection passage (400c), and cause the transport gas (b) to flow from one side to the other in the transport gas injection passage (400d) and inject it into the waste gas flow path (400a).

[0194] The above powder deposition prevention device (400) receives a carrier gas (a) from the outside through a carrier gas supply module (410). The carrier gas (a) flows through the gas inlet passage (413), gas heating passage (412), and gas supply passage (414) of the carrier gas supply module (410) and is supplied to the carrier gas passage (400b).

[0195]

[0196] The following describes a first internal injection tube applied to a powder deposition prevention device according to another embodiment of the present invention.

[0197] A first internal injection tube (530) according to another embodiment of the present invention may include, with reference to FIG. 26, a first outer ring (131), a first intermediate ring (132), a first inner ring (133), a first internal spacing projection (134), and a first Teflon layer (536).

[0198] The first internal injection tube (530) may additionally have a first Teflon layer (536) formed therein in contrast to the first internal injection tube (130) of the embodiment of FIG. 6. Accordingly, the first internal injection tube (530) will be described below with a focus on the first Teflon layer (536). The same reference numerals may be assigned to the first internal injection tube (530) for configurations identical or similar to the first internal injection tube (130) according to FIG. 6, and specific descriptions may be omitted. The first Teflon layer (536) of the first internal injection tube (530) may be applied in the same way to the internal injection tube (230) of FIG. 16.

[0199] The first Teflon layer (536) is formed of Teflon material and may be formed as a thin film layer or a film layer of a predetermined thickness. The first Teflon layer (536) may be formed by coating as a thin film or by attaching a film. The first Teflon layer (536) may be formed on the inner surface of the first outer ring (131), the first intermediate ring (132), and the first inner ring (133). The first Teflon layer (536) may be formed entirely on the inner surface of the first outer ring (131), the first intermediate ring (132), and the first inner ring (133). The first Teflon layer (536) may be formed in the area where semiconductor waste gas comes into contact in the first inner injection pipe (530). The first Teflon layer (536) can reduce the adhesion of reaction by-products of semiconductor waste gas to the inner surface of the first outer ring (131), the first intermediate ring (132), and the first inner ring (133) that are in contact with semiconductor waste gas.

[0200]

[0201] The following describes a first internal injection tube applied to a powder deposition prevention device according to another embodiment of the present invention.

[0202] A first internal injection tube (630) according to another embodiment of the present invention, with reference to FIGS. 27 to 29, may include an internal injection tube body (631), an injection protrusion ring (632), and an injection nozzle hole (633). The first internal injection tube (630) may further include an internal Teflon layer (636).

[0203] The first internal injection pipe (630) can be installed at the location of the first internal injection pipe (130) of the embodiment of FIG. 1 to form an injection nozzle (630a). The first internal injection pipe (630) can be similarly applied at the location of the internal injection pipe (230) of FIG. 13 and FIG. 22.

[0204] The inner injection tube body (631) may be formed with a uniform thickness and may be formed in a tube shape in which the inner diameter decreases from one side to the other. The inner injection tube body (631) may be formed with a first injection inner diameter (631a) at one end and a second injection inner diameter (631b) at the other end that is formed with a diameter smaller than the first injection inner diameter. The inner injection tube body (631) may be formed with a first injection outer diameter (631c) at one end and a second injection outer diameter (631d) at the other end that is formed with a diameter smaller than the first injection outer diameter. The inner injection tube body (631) may be formed such that the first injection inner diameter is larger than the second injection outer diameter.

[0205] The above internal injection tube body (631) can form an injection nozzle (630a) by combining with internal injection tube bodies (631) located on one side and the other side. The internal injection tube body (631) can form an injection nozzle (630a) by having the inner surface of one side spaced apart from the outer surface of the internal injection tube body (631) that is coupled to the one side. The internal injection tube body (631) can form an injection nozzle (630a) by having the outer surface of the other side spaced apart from the inner surface of the internal injection tube body (631) that is coupled to the other side.

[0206] The injection protrusion ring (632) may be formed in a ring shape that protrudes inward from one side of the inner surface of the inner injection tube body (631). The injection protrusion ring (632) may be formed with a protrusion ring inner diameter (632a) having a predetermined thickness and an inner diameter larger than the second injection outer diameter on the other side of the inner injection tube body. The injection protrusion ring (632) may be coupled to one side of the inner injection tube body (631) and may come into contact with the outer surface of the other side of the inner injection tube body (631) that is inserted at a predetermined distance. The injection protrusion ring (632) may support the inner surface of one side of the inner injection tube body (631) and the outer surface of the inner injection tube body (631) coupled to one side so that they are spaced apart at a predetermined distance.

[0207] The above-mentioned injection nozzle hole (633) may be formed in a hole shape that penetrates from one side of the injection protrusion ring (632) to the other side and opens toward the inner surface. That is, the above-mentioned injection nozzle hole (633) may form a concave groove shape in the outer direction from the inner surface of the injection protrusion ring (632). The above-mentioned injection nozzle hole (633) may be formed at a depth corresponding to the outer diameter of the injection protrusion ring (632) from the inner surface. The above-mentioned injection nozzle hole (633) may be formed in at least two holes spaced apart at equal intervals in the circumferential direction. The above-mentioned injection nozzle hole (633) may preferably be formed in at least four holes spaced apart in the circumferential direction. The above-mentioned injection nozzle hole (633) may form an injection nozzle (630a) between the inner surface of one side of the inner injection pipe body (631) and the outer surface of the inner injection pipe body (631) that is coupled to one side.

[0208] The inner Teflon layer (636) is formed of Teflon material and may be formed as a thin film layer or a film layer of a predetermined thickness. The inner Teflon layer (636) may be formed entirely on the inner circumference of the inner injection tube body (631). The inner injection tube body (631) may be formed in the area where the semiconductor waste gas of the inner injection tube body (631) comes into contact.

[0209]

[0210] The following describes a first internal injection tube applied to a powder deposition prevention device according to another embodiment of the present invention.

[0211] A first internal injection tube (730) according to another embodiment of the present invention may include an internal injection tube body (631) and an injection protrusion (732), with reference to FIGS. 30 and 31. The first internal injection tube (730) may further include an internal Teflon layer (636).

[0212] The first internal injection pipe (730) may have an injection nozzle (not shown) formed therein, such as the injection nozzle (630a) of the first internal injection pipe (630) of the embodiment of FIGS. 27 and 28. The first internal injection pipe (730) may also be applied in the same way to the position of the internal injection pipe (230) of FIGS. 13 and 22.

[0213] The first internal injection tube (730) may be formed with a different injection protrusion (732) than the first internal injection tube (630) of the embodiment of FIGS. 27 and 28. Accordingly, in the following description, the same reference numerals may be assigned to parts of the first internal injection tube (730) that are identical to the first internal injection tube (630) of FIGS. 27 and 28, and specific descriptions may be omitted.

[0214] The above-mentioned injection protrusion (732) may be formed in a protrusion shape that protrudes inward from one side of the inner surface of the inner injection tube body (631). The above-mentioned injection protrusion (732) may be formed with a predetermined width and length. The above-mentioned injection protrusion (732) may be formed with an inner diameter (732a) in which the inner diameter of the virtual circle formed by the inner end is larger than the outer diameter of the other side of the inner injection tube body (631). The inner surface of the above-mentioned injection protrusion (732) may be connected to one side of the inner injection tube body (631) and may come into contact with the outer surface of the other side of the inner injection tube body (631) inserted at a predetermined distance. The above-mentioned injection protrusion (732) may support the outer surface of the inner injection tube body (631) connected to one side of the inner surface of the inner injection tube body (631) so that they are spaced apart at a predetermined distance.

[0215] The above-mentioned injection protrusions (732) may be formed as at least two protrusions spaced apart at equal intervals in the circumferential direction on one side of the inner injection tube body (631). The above-mentioned injection protrusions (732) may preferably be formed as at least four protrusions spaced apart in the circumferential direction. The above-mentioned injection protrusions (732) may form a passage through which a transport gas flows between adjacent injection nozzle protrusions to form an injection nozzle. The above-mentioned injection protrusions (732) may form an injection nozzle between the inner side of one side of the inner injection tube body (631) and the outer side of the inner injection tube body (631) that is coupled to one side.

[0216]

[0217] The following describes a first internal injection tube applied to a powder deposition prevention device according to another embodiment of the present invention.

[0218] A first internal injection tube (830) according to another embodiment of the present invention, with reference to FIGS. 32 and 33, may include an internal injection tube body (631), an injection protrusion ring (632), and an injection nozzle hole (833). The first internal injection tube (830) may further include an internal Teflon layer (836).

[0219] The first internal injection tube (830) may have an injection nozzle (not shown) formed therein, such as the injection nozzle (630a) of the first internal injection tube (630) of the embodiment of FIGS. 27 and 28. The first internal injection tube (830) may also be applied in the same way to the position of the internal injection tube (230) of FIGS. 13 and 22.

[0220] The first internal injection tube (830) may be formed with a different injection protrusion (632) than the first internal injection tube (630) of the embodiment of FIGS. 27 and 28. Accordingly, in the following description, the same reference numerals may be assigned to parts of the first internal injection tube (830) that are identical to the first internal injection tube (630) of FIGS. 27 and 28, and specific descriptions may be omitted.

[0221] The injection nozzle hole (833) may be formed in the shape of a hole penetrating from the outer surface to the inner surface on one side of the inner injection tube body. The injection nozzle hole (833) may be formed at a position adjacent to the injection protrusion ring (632). The injection nozzle hole (833) may be formed in at least two holes spaced apart at equal intervals in the circumferential direction. Preferably, the injection nozzle hole (833) may be formed in at least four holes spaced apart in the circumferential direction. The injection nozzle hole (833) may form an injection nozzle between the inner surface on one side of the inner injection tube body (631) and the outer surface of the inner injection tube body (631) that is coupled to one side.

[0222] The inner Teflon layer (836) is formed of Teflon material and may be formed as a thin film layer or a film layer of a predetermined thickness. The inner Teflon layer (836) may be formed on the inner surface of the inner injection tube body (631). The inner Teflon layer (836) may be formed so as not to obstruct the injection nozzle hole (833). That is, the inner Teflon layer (836) may be formed up to a position where one end is spaced apart from the injection nozzle hole (833).

Claims

1. A powder deposition prevention device connected to process pipes to form a waste gas flow path through which waste gas flows together with the process pipes, and A transfer gas supply module having a first gas supply passage for supplying transfer gas to one side, and A first external pipe coupled to the outside of the first gas supply passage on one side of the above-mentioned transfer gas supply module, and A first internal injection pipe comprising a first injection nozzle that includes a portion located on the inner side of the first external pipe to form a first transfer gas passage on the outer side and a waste gas flow path on the inner side, and injects the transfer gas into the waste gas flow path, and A powder deposition prevention device characterized by including an intermediate guide pipe that is coupled to the outer side and one side of the first inner injection pipe, shields one side while forming the first transfer gas passage on the inner side, and has the other side coupled to the first outer pipe.

2. In Paragraph 1, It includes a second internal injection pipe located on the inner side of the above-mentioned transfer gas supply module, forming a second transfer gas passage on the outer side and forming the exhaust gas flow path on the inner side, The above-described carrier gas supply module includes a second gas supply passage that supplies the carrier gas to a second carrier gas passage, and A powder deposition prevention device characterized by the second internal injection pipe including a second injection nozzle that supplies the carrier gas of the second carrier gas passage to the exhaust gas passage.

3. In Paragraph 2, The above transfer gas supply module is A gas supply body formed in a ring shape, and A plurality of ring-shaped gas passages extending in the direction of the central axis inside the above gas supply body and spaced apart from each other in the outward direction, and connected in a zigzag pattern, and It includes a gas inlet passage that extends inward from the outer surface of the gas supply body and is connected to the gas movement passage located at the outermost side, The first gas supply passage is connected to the gas movement passage located at the innermost position, penetrates through one side of the gas supply body, and is connected to the first transfer gas passage. A powder deposition prevention device characterized in that the second gas supply passage is connected to the gas transfer passage located at the innermost position, penetrates through the inner circumference of the gas supply body, and is connected to the second transfer gas passage.

4. In Paragraph 1, The above-mentioned first internal injection tube A first outer ring whose outer surface forms the inner surface of the first transfer gas passage, and A first intermediate ring, one side of which is coupled to the other side of the first outer ring and extends longitudinally from the other side of the first outer ring to form the inner surface of the first conveying gas passage, and A first inner ring having one side coupled to the other side of the first intermediate ring and having an outer diameter smaller than the outer diameter of the first intermediate ring, and, A powder deposition prevention device characterized by including at least two first internal spacing protrusions that extend from one end of the first outer ring to one side and are spaced apart along the circumferential direction on one side of the first outer ring.

5. In Paragraph 4, The above-mentioned first internal injection tube A powder deposition prevention device characterized by further including a first Teflon layer formed on the inner circumference of the first outer ring, the first intermediate ring, and the first inner ring, the first thin film layer or film layer having a predetermined thickness and made of Teflon material.

6. In Paragraph 4, The above-mentioned first external pipe includes a first pipe body formed in a pipe shape with a hollow interior and open sides, and The above intermediate guide pipe is A main induction pipe having one end coupled to one side of the first pipe body, one end coinciding with one end of the first inner injection pipe, and formed such that the inner surface surrounds the outer surface of the first inner injection pipe while being spaced apart from it, An intermediate blocking ring having an outer end coupled to one end of the main induction pipe and contacting one end of the first internal spacing projection of the first internal injection pipe located at the outermost side, and an inner end located inside the first internal injection pipe; A powder deposition prevention device characterized by including an internal guide pipe, wherein one end is coupled to the inner circumference of the intermediate blocking ring and the outer surface is coupled to the inner surface of the first internal spacing projection.

7. In Paragraph 6, The above-mentioned first pipe body has screw threads formed on one side of its inner surface, and The above main induction pipe has screw threads formed on the outer surface of the other side, and A powder deposition prevention device characterized in that the main induction pipe is screw-coupled to the first pipe body.

8. In Paragraph 6, The above intermediate blocking ring shields one end of the first transport gas passage and the first internal spacing projection to form a passage through which transport gas flows from the outside to the inside of the first internal spacing projection, and A powder deposition prevention device characterized by the above-mentioned internal induction pipe injecting the carrier gas flowing inward through the passage between the first internal spacing protrusions in the direction of the exhaust gas flow.

9. In Paragraph 1, The above-mentioned first internal injection tube An internal injection tube body formed with a uniform thickness and having a tubular shape in which the inner diameter decreases from one side to the other, and A spray protrusion ring formed in a ring shape that protrudes inward from the inner circumferential surface of one side of the inner spray pipe body and is formed with an inner diameter larger than the outer diameter of the other side of the inner spray pipe body. A powder deposition prevention device characterized by having a concave groove shape on the inner circumference of the injection protrusion ring and including an injection nozzle hole that penetrates from one side of the injection protrusion ring to the other side.

10. In Paragraph 9, The above-mentioned first internal injection tube A powder deposition prevention device characterized by being made of Teflon material and formed as a thin film layer or film layer of a predetermined thickness, and further including an inner Teflon layer formed on the inner circumference of the first inner injection tube.

11. In Paragraph 1, The above-mentioned first internal injection tube An internal injection tube body formed with a uniform thickness and having a tubular shape in which the inner diameter decreases from one side to the other, and A powder deposition prevention device characterized by including at least two protrusion shapes that protrude inwardly from the inner circumferential surface of one side of the inner injection tube body and are spaced apart in the circumferential direction, wherein the virtual circle formed by the inner end is formed with an inner diameter larger than the outer diameter of the other side of the inner injection tube body.

12. In Paragraph 11, The above-mentioned first internal injection tube A powder deposition prevention device characterized by being made of Teflon material and formed as a thin film layer or film layer of a predetermined thickness, and further including an inner Teflon layer formed on the inner circumference of the first inner injection tube.

13. In Paragraph 1, The above-mentioned first internal injection tube An internal injection tube body formed with a uniform thickness and having a tubular shape in which the inner diameter decreases from one side to the other, and A spray protrusion ring formed in a ring shape that protrudes inward from the inner circumferential surface of one side of the inner spray pipe body and is formed with an inner diameter larger than the outer diameter of the other side of the inner spray pipe body. A powder deposition prevention device characterized by including at least two injection nozzle holes formed at equal intervals in the circumferential direction, which are shaped like holes penetrating from the outer surface to the inner surface at a position adjacent to the injection protrusion ring on one side of the inner injection tube body.

14. In Paragraph 13, The above-mentioned first internal injection tube A powder deposition prevention device characterized by further including an inner Teflon layer formed of a thin film layer or film layer of a predetermined thickness made of Teflon material, and formed on the inner circumference of the first inner injection tube so as not to cover the injection nozzle hole.

15. A powder deposition prevention device connected to a process pipe and forming a waste gas flow path through which waste gas flows from one side to the other side together with the process pipe, and It includes a transfer gas inlet and an external pipe connected to the process piping, and An internal injection pipe comprising a plurality of parts joined along the direction of a central axis, wherein a portion is located on the inner side of the external pipe to form a conveying gas passage on the outer side and a waste gas passage on the inner side, and an injection nozzle for injecting the conveying gas into the waste gas passage. A powder deposition prevention device characterized by including an intermediate guide pipe that is coupled to one side of the above-mentioned external pipe, forms a conveying gas passage together with the internal injection pipe on the outer side of the internal injection pipe, and forms an internal connecting passage and a conveying gas injection passage connected to the conveying gas passage on the inner side of the internal injection pipe to inject the conveying gas into the exhaust gas flow path.

16. In Paragraph 15, A powder deposition prevention device characterized by the fact that the internal injection tube further includes an internal blocking ring that blocks the conveying gas passage on the other side of the gas supply passage.

17. In Paragraph 15, The above intermediate guide pipe is A main guide pipe having an inner surface spaced apart from the outer surface of the inner injection pipe exposed to one side of the outer pipe, thereby forming the conveying gas passage together with the outer pipe, and An intermediate blocking ring having an outer end connected to one end of the main induction pipe and an inner end located inside the internal injection pipe, and A powder deposition prevention device characterized by including an internal guide pipe having one end coupled to the inner end of the intermediate blocking ring and an outer surface extending in the other direction while being spaced apart from the inner surface of the internal injection pipe to form a conveying gas injection passage connected to the internal connecting passage.

18. In Paragraph 17, The above internal connecting passage is A powder deposition prevention device characterized in that the other side of the intermediate blocking ring is formed entirely in the circumferential direction of the inner injection tube while being spaced apart from one end of the inner injection tube, and a ring-shaped hole is formed on one side of the inner injection tube that penetrates from the outside to the inside.

19. In Paragraph 17, The above intermediate guide pipe is A powder deposition prevention device characterized by further including a waste gas induction ring having an outer diameter identical to that of the intermediate blocking ring, an inner surface formed to be inclined toward the center from one side to the other, and the other side coupled to one side of the intermediate blocking ring.

20. In Paragraph 17, The above main induction pipe has screw threads formed on the outer surface of the other side, and The above external pipe has screw threads formed on one side of its inner surface, and A powder deposition prevention device characterized in that the main induction pipe and the external pipe are screw-coupled.

21. In Paragraph 15, The above internal injection tube An outer ring whose outer surface forms the inner surface of the above-mentioned transfer gas passage, and One side of which is coupled to the other side of the outer ring, and an intermediate ring extending longitudinally from the other side of the outer ring to form the inner surface of the conveying gas passage, and One side of which is coupled to the other side of the intermediate ring, and an inner ring having an outer diameter smaller than the outer diameter of the intermediate ring, and A powder deposition prevention device characterized by including at least two internal spacing protrusions formed along the circumferential direction on one side of the outer ring, extending from one end of the outer ring to one side.

22. In Paragraph 15, The above external piping is An outer body pipe located on one side, formed in a pipe shape with an inner diameter identical to the inner diameter of the process pipe, and An external expansion pipe formed in a pipe shape with an inner diameter larger than that of the external main body pipe, with one end connected to the other end of the external main body pipe, and It includes an external connecting ring that seals the space between the other side of the external main body pipe and one side of the external expansion pipe, The above internal injection tube A powder deposition prevention device characterized by further including an internal connecting pipe connecting an internal injection pipe located on the inner side of the outer main body pipe and an internal injection pipe located on the inner side of the outer expansion pipe.

23. A powder deposition prevention device connected to a process pipe and forming a waste gas flow path through which waste gas flows from one side to the other side together with the process pipe, and A transfer gas supply module comprising a gas supply body formed in a ring shape and supplying a transfer gas supplied from the outside in the direction of the waste gas flow path, and An external pipe comprising a first external pipe and a second external pipe coupled to one side and the other side of the above gas supply body, and An outer surface is spaced apart from the inner surface of the gas supply main body and the first outer pipe to form a conveying gas passage, one side is positioned to be exposed for a predetermined length from one side of the first outer pipe, and an inner pipe is formed to form an internal connecting passage that penetrates from the outside to the inside on one side and connects to the conveying gas passage. A powder deposition prevention device characterized by including an intermediate guide pipe that forms a transfer gas passage together with the internal pipe on the outer side of the internal pipe and forms a transfer gas injection passage connected to the internal connection passage on the inner side of the internal pipe to inject the transfer gas into the exhaust gas flow path.

24. In Paragraph 23, The above transfer gas supply module is A gas heating passage and a space for accommodating the transfer gas inside the above gas supply body, and A gas inlet passage connected to the gas heating passage on one side of the above gas supply body and A powder deposition prevention device characterized by including a gas supply passage that is opened from the gas heating passage to the inner surface of the gas supply body on the other side of the gas supply body.

25. In Paragraph 23, The first external pipe is connected to the process pipe located on one side by a first pipe flange located on one side, and A powder deposition prevention device characterized in that the second external pipe above has a second pipe flange located on the other side that is coupled to the process pipe.

26. In Paragraph 24, A powder deposition prevention device characterized in that the internal piping further includes an internal blocking ring that blocks the transfer gas passage on the other side of the gas supply passage.

27. In Paragraph 23, The above intermediate guide pipe is A main guide pipe forming the conveying gas passage together with the gas supply body, having an inner surface spaced apart from the outer surface of the inner pipe exposed to one side of the first outer pipe, and An intermediate blocking ring having an outer end connected to one end of the main induction pipe and an inner end located inside the inner pipe, and A powder deposition prevention device characterized by including an intermediate guide pipe, wherein one end is coupled to the inner end of the intermediate blocking ring and the outer surface extends in the other direction while being spaced apart from the inner surface of the internal pipe to form a conveying gas injection passage connected to the internal connecting passage.

28. In Paragraph 27, The above internal connecting passage is A powder deposition prevention device characterized by forming a hole shape penetrating from the outer surface to the inner surface on one side of the internal piping.

29. In Paragraph 27, The above internal connecting passage is A powder deposition prevention device characterized in that the other side of the intermediate blocking ring is spaced apart from one end of the internal pipe and is formed entirely in the circumferential direction of the internal pipe.

30. In Paragraph 27, The above internal connecting passage is A powder deposition prevention device characterized by further including a waste gas induction ring having an outer diameter identical to that of the intermediate blocking ring, an inner surface formed to be inclined toward the center from one side to the other, and the other side coupled to one side of the intermediate blocking ring.

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