Purification and homogenization treatment apparatus and process for ultra-high-purity polymer
Patent Information
- Application Number
- PCT/CN2025/136560
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2025-04-18
- Filing Date
- 2025-11-21
- Publication Date
- 2026-10-22
Smart Images

Figure CN2025136560_22102026_PF_FP_ABST
Abstract
Description
An ultra-high purity polymer purification and homogenization treatment device and process Technical Field
[0001] This invention belongs to the field of ultra-high purity polymers, specifically relating to an ultra-high purity polymer purification and homogenization treatment device and process. Background Technology
[0002] Ultra-high purity polymers are a class of special polymer materials with metal ion content below 1 ppm and non-volatile residues ≤0.01%. Taking high-purity polyethylene as an example, as a core membrane material for ultrapure water systems used in semiconductor manufacturing, it must meet the stringent requirements of extremely low total amounts of 12 metals such as Na, Fe, and Cr in the ASTM D4326 standard, which directly affects the resistivity of ultrapure water (≥18.2 MΩ·cm) and the system's service life. However, the existing production process has the following technical bottlenecks: (1) Catalyst residue: Ziegler-Natta, metallocene and other metal-containing catalysts (such as Ti, Zr, Cr) form non-combustible metal ash after polymerization. Conventional deashing processes are difficult to reduce the residue to the semiconductor grade requirements; (2) Equipment contamination: Metal reactors (such as 316L stainless steel) and screw extruders in continuous production generate submicron-sized metal shavings such as Fe and Ni under high temperature and high shear conditions; (3) Purification defects: Traditional vibrating sieves (mesh size ≤ 400 mesh) cannot effectively intercept metal particles with a particle size < 38 μm, while electrostatic dust removal has a removal rate of less than 60% for non-magnetic metals (such as Al and Cu); (4) Insufficient homogenization: The purity fluctuation between batches leads to differences in the performance of end products, such as the deviation of the pore blockage rate of medical filter materials > 15% and the decrease in the yield of chip manufacturing by 2-3 orders of magnitude.
[0003] Especially in high-end applications such as medical implants (ISO10993 standard) and semiconductor photoresist carriers (SEMIF57 standard), problems such as dielectric loss (tanδ>0.001) and catalytic side reactions caused by metal impurities in polymers produced by existing technologies have seriously restricted industrial upgrading. Therefore, developing a production system that combines deep demagnetization and dynamic homogenization functions has become the key to breaking through technological barriers. Summary of the Invention
[0004] The purpose of this invention is to provide an ultra-high purity polymer purification and homogenization treatment device and process to solve the above-mentioned problems.
[0005] The objective of this invention is achieved through the following technical solution:
[0006] A purification and homogenization treatment device for ultra-high purity polymers includes a purification, screening and demagnetization unit and a downstream circulating homogenization and demagnetization unit.
[0007] The purification, screening and demagnetization unit includes a purification silo, a vibrating screen and an automatic demagnetizer connected in sequence.
[0008] The circulating homogenization and demagnetization unit includes a homogenization hopper, the outlet of which is connected to an automatic demagnetizer. The outlet of the automatic demagnetizer is provided with two branch pipes, including:
[0009] The qualified material output branch is connected at its end to the finished product collection unit; and
[0010] The circulation branch is connected to the homogenization silo via the return pipeline, and is used to return substandard materials to the homogenization silo for further homogenization and demagnetization.
[0011] As a preferred technical solution of the present invention, the top of the purification silo is equipped with a dust collector, and its discharge pipeline is sequentially equipped with a rotary valve, an electrostatic monitoring and elimination mechanism and a vibrating screen, and the qualified discharge end of the vibrating screen is connected to an automatic demagnetizer.
[0012] As a preferred technical solution of the present invention, a buffer hopper is provided between the purification screening and demagnetization unit and the circulating homogenization and demagnetization unit, and a dust collector is installed on the top of the buffer hopper.
[0013] As a preferred technical solution of the present invention, the top of the homogenizing silo is equipped with a dust collector, and its discharge pipeline is sequentially equipped with a rotary valve, an automatic demagnetizer and a reversing valve. The first outlet of the reversing valve is connected to the qualified material output branch, and the second outlet is connected to the circulation branch.
[0014] As a preferred embodiment of the present invention, the automatic demagnetizer includes:
[0015] The cavity is divided into a demagnetization zone and a cleaning zone, with a clean material cavity and a slag material cavity corresponding to the bottom.
[0016] A multi-layer movable drawer, each drawer including an outer panel, an inner panel and a magnetic rod extending into the cavity, the magnetic rod being disposed between the outer panel and the inner panel;
[0017] A drive unit is symmetrically arranged on both sides of the drawer's travel direction to drive the movable drawer to move;
[0018] The scraper is fixedly installed on the inner wall of the cavity in the demagnetizing zone.
[0019] As a preferred technical solution of the present invention, the automatic demagnetizer adopts a vibration-type pneumatic scraper iron remover;
[0020] The driving component includes a cylinder, and the extension rod of the cylinder is connected to the outer panel;
[0021] The automatic demagnetizer has a vibrator installed inside its cavity, and the vibrator is fixedly installed on the side wall of the cavity in the cleaning area.
[0022] As a preferred technical solution of the present invention, the magnetic rods are arranged in layers with increasing magnetic intensity from top to bottom, the difference in magnetic field intensity between adjacent layers is controlled at 200-500Gs, the magnetic rods in adjacent layers are arranged alternately, and each layer of magnetic rods is installed between the inner panel and the outer panel through bearings.
[0023] As a preferred embodiment of the present invention, the number of the purification, screening and demagnetizing units is one or more arranged in parallel; the discharge end of the purification silo is provided with at least two discharge pipelines equipped with vibrating screens and automatic demagnetizers in parallel.
[0024] The number of circulating homogenization and demagnetization units is 2 to 10. The feed pipes of multiple homogenization silos are connected in parallel to the upstream conveying system, and the discharge pipes are connected in parallel to the downstream conveying system.
[0025] As a preferred embodiment of the present invention, the homogenizing silo is a gravity homogenizing silo, and a mixing bottom cone is provided at the bottom, the mixing bottom cone comprising:
[0026] The central feed pipe is vertically positioned at the center of the inner cavity of the mixing bottom cone;
[0027] Dividers are radially distributed around the central feed pipe, forming multiple independent flow channels;
[0028] A conical shell is connected to the bottom of the homogenization silo and forms an external channel between it and the outer wall of the homogenization silo.
[0029] As a preferred embodiment of the present invention, a sampling port or an online magnetic induction detector is provided on the circulation branch; or, a sampling port or an online magnetic induction detector is provided on the discharge end pipe of the automatic demagnetizer. For example, when the online magnetic induction detector detects that the magnetic content of the material is unqualified, the PLC controls the reversing valve to switch to the circulation branch.
[0030] As a preferred technical solution of the present invention, the system conveys materials through a pneumatic conveying system or a pneumatic conveying unit. The working pressure of the pneumatic conveying system is 0.03-0.09MPa, and the conveying wind speed is 18-25m / s.
[0031] A purification and homogenization process for ultra-high purity polymers, employing the aforementioned apparatus, includes:
[0032] The material is purified, screened and demagnetized in sequence to remove residual solvent, residual solvent and VOCs, and is screened and initially demagnetized.
[0033] The processed material enters the circulating homogenization and demagnetization unit for cyclic homogenization and demagnetization until it meets the standard and is then output.
[0034] The specific process is as follows: materials from the upstream process are conveyed to the purification, screening and demagnetization unit, where residual solvents, residues and VOCs are removed in sequence through the purification silo, and then screened by a vibrating screen and demagnetized by an automatic demagnetizer; the materials processed by the purification, screening and demagnetization unit are conveyed to the circulating homogenization and demagnetization unit, where they are circulated and homogenized by the homogenization silo and the automatic demagnetizer until they meet the qualified standards and are discharged through the qualified material output branch.
[0035] Compared with the prior art, the present invention has the following beneficial effects:
[0036] 1. Deep demagnetization and purification: Through multi-stage linkage of the purification screening unit (vibrating screen + gradient magnetic field demagnetizer), metal impurities are efficiently intercepted, which can effectively reduce the content of magnetic metals such as Fe and Cr in polymers and meet the total metal content requirements of semiconductor-grade materials.
[0037] 2. Dynamic homogenization guarantee: The circulating homogenization unit, through the mixing bottom cone (radial diversion + external channel) and multi-compartment parallel design, ensures that the batch-to-batch ash content difference is <3% and the pore blockage rate fluctuation is ≤2%, meeting the stringent requirements of the material for high product standards.
[0038] 3. Strong process compatibility: The modular design supports parallel operation of 1-10 homogenization silos, adapting to different production capacity requirements, and the purification unit can be expanded to multiple levels in series, resulting in low dielectric loss of the end product. Attached Figure Description
[0039] Figure 1 is a schematic diagram of the purification and homogenization treatment device of the present invention;
[0040] Figure 2 is a schematic diagram of the main structure of the automatic demagnetizer;
[0041] Figure 3 is a side view of the automatic demagnetizer.
[0042] Figure 4 is a schematic diagram of the gravity homogenization silo.
[0043] Figure 5 is a schematic diagram of a mixed bottom cone structure;
[0044] Figure 6 is a schematic diagram of the material mixing principle;
[0045] In the diagram: 100-Homogeneous material bin; 101-Blending bottom cone; 1011-Central discharge pipe; 1012-Flow channel; 1013-Conical shell; 200-Automatic demagnetizer; 201-Cavity; 202-Cylinder; 203-Clean material chamber; 204-Slag material chamber; 205-Outer panel; 206-Magnetic rod; 300-Rotary valve; 400-Dust collector; 500-Reversing valve; 600-Buffer hopper; 700-Purified material bin; 800-Static electricity monitoring and elimination mechanism; 900-Vibrating screen. Detailed Implementation
[0046] The present invention will now be described in detail with reference to the accompanying drawings. All technical solutions not described in detail herein are already disclosed in the art.
[0047] Figure 1 is a schematic diagram of a purification and homogenization treatment device of the present invention, including an upstream purification screening and demagnetization unit and a downstream circulating homogenization and demagnetization unit. A buffer hopper 600 is provided between the purification screening and demagnetization unit and the circulating homogenization and demagnetization unit, and a dust collector 400 is installed on the top of the buffer hopper 600.
[0048] The purification, screening, and demagnetizing unit includes a purification silo 700, a rotary valve 300, a static electricity monitoring and elimination mechanism 800, and a vibrating screen 900 connected in sequence. The qualified discharge end of the vibrating screen 900 is connected to an automatic demagnetizer 200. A dust collector 400 is installed on the top of the purification silo 700. At least two discharge pipes with the vibrating screen 900 and the automatic demagnetizer 200 are arranged side-by-side at the discharge end of the purification silo 700. The static electricity monitoring and elimination mechanism 800 includes a static electricity monitoring unit and a static electricity elimination unit, used to eliminate static electricity generated in the material and ensure production safety.
[0049] The circulating homogenization and demagnetization unit includes a homogenization silo 100. A rotary valve 300 is installed at the outlet of the homogenization silo 100. An automatic demagnetizer 200 is installed downstream of the rotary valve 300. A reversing valve 500 is installed downstream of the automatic demagnetizer 200. The reversing valve 500 has two branch pipes: a qualified material output branch, the end of which is connected to the finished product collection unit; and a circulation branch, which is connected to the homogenization silo 100 through a return pipe, for returning substandard materials to the homogenization silo 100 for further homogenization and demagnetization.
[0050] During operation, materials (such as polyethylene powder) are conveyed via a pneumatic conveying system or a pneumatic conveying unit (such as nitrogen positive pressure conveying). Materials from upstream processes are sent to the purification, screening, and demagnetization unit. Hot nitrogen containing a small amount of steam is introduced into the purification silo 700 to degas the materials. After purification in the purification silo 700, residual solvents, residual solvents, VOCs, and other impurities are effectively removed from the materials. The purification silo 700 helps improve the quality of powder products and the safety of downstream system operation. By introducing wet nitrogen containing a small amount of steam into the silo, a small amount of residual hydrocarbon components in the powder are removed (reducing the hexane content to 0.1%), avoiding the impact of residual solvents on product quality. At the same time, residual catalysts are deactivated. The material is then screened by a vibrating screen 900 to obtain materials of suitable size (unqualified materials are collected and processed separately), and then preliminarily demagnetized by an automatic demagnetizer 200.
[0051] The material processed by the purification, screening, and demagnetization unit is sent to the circulating homogenization and demagnetization unit. It undergoes circulating homogenization and demagnetization via the homogenization silo 100 and the automatic demagnetizer 200. Based on cleanliness requirements, the material is circulated through the control valve 500. The material continuously circulates between the homogenization silo and the circulation branch, undergoing demagnetization via the automatic demagnetizer 200. A dust collector 400 is installed at the top of the homogenization silo 100, and the pneumatically supplied gas is filtered before being discharged from the homogenization silo. After several cycles, the powder homogenization is completed. Simultaneously, the magnetic metal impurities in the powder undergo multiple demagnetization processes to reach ultra-clean standards (sampling ports or online magnetic induction detectors are installed on the circulation branch, or on the discharge pipe of the automatic demagnetizer. When the measured magnetic content of the material fails to meet the standard, the PLC or DCS controls the reversing valve to switch to the circulation branch until the product meets the standard). After homogenization and demagnetization are completed, the circulation branch is closed by controlling the reversing valve 500, and the qualified material output branch is opened. Qualified products are discharged and sent to the finished product collection unit or packaging unit.
[0052] In a preferred embodiment of the present invention, the purification screening and demagnetization unit and the circulating homogenization and demagnetization unit can be configured in parallel by multiple groups, for example, 2 to 10 groups, depending on actual needs, and can be selectively activated during operation. For example, Figure 1 shows a circulating homogenization and demagnetization unit composed of 6 groups of homogenization silos configured in parallel. The parallel homogenization silos provide a sufficiently large buffer space to increase the system's processing capacity; on the other hand, they can achieve material mixing between the silos, improving flexibility and increasing the uniformity of the material.
[0053] In a preferred embodiment of the present invention, the automatic demagnetizer 200 employs a vibration-type pneumatic scraper iron remover, as shown in Figures 2 and 3. The automatic demagnetizer 200 includes a cavity 201, with multiple movable drawers arranged from top to bottom. Each drawer includes an outer panel 205 located outside the cavity 201 and an inner panel (not shown in the figures) located inside the cavity 201. Several magnetic rods 206 extending into the cavity 201 are evenly and horizontally arranged on the outer panel 205, and the ends of the magnetic rods 206 are fixedly installed to the inner panel. From top to bottom, the cavity 201 is divided into a demagnetizing zone and a cleaning zone. Correspondingly, a clean material chamber 203 and a slag chamber 204 communicating with the demagnetizing zone and the cleaning zone are respectively provided in the lower part of the cavity 201, discharging clean material and slag material respectively.
[0054] Furthermore, the outer panel 205 is connected to the driving component. In a preferred embodiment, a cylinder 202 can be used, with its extension rod connected to the outer panel 205. The cylinder 202 is symmetrically installed on both sides of the outer panel 205. Driven by the cylinder, the outer panel 205, along with the magnetic rod assembly, moves outward. The automatic demagnetizer 200 works as follows: upstream material enters the cleaning zone of the cavity 201 through the feed inlet. As the material falls, it passes through each magnetic rod 206, where metallic magnetic impurities are intercepted and adsorbed. The clean material falls into the clean material chamber 203 of the cavity 201 and is discharged. A scraper is installed on the inner wall of the cavity 201 in the demagnetization zone. The scraper passes through each magnetic rod 206. When a magnetic rod 206 is pushed out, the scraper cleans the metallic magnetic impurities adsorbed on its surface. The metallic magnetic impurities fall into the demagnetization zone of the cavity 201, achieving automatic cleaning. The metallic magnetic impurities are then discharged through the slag chamber 204.
[0055] In a preferred embodiment, the cavity is provided with 2 to 10 movable drawers from top to bottom. More preferably, it is provided with 4 to 10 movable drawers. Figure 2 shows a schematic diagram of a 4-layer movable drawer configuration. The adjacent magnetic rods 206 are staggered to achieve better demagnetization. In a further preferred embodiment, the magnetic rods 206 are mounted to the inner and outer panels via bearings, allowing the magnetic rods 206 to roll. When materials fall, the surface of the rolling magnetic rods 206 can uniformly adsorb magnetic materials, enabling the adsorption of more metallic magnetic impurities.
[0056] In a preferred embodiment, the magnetism of each layer of magnetic rods increases sequentially from top to bottom, forming a gradient. This gradient arrangement of magnetic rods improves the demagnetization effect because the content of magnetic impurities in the material decreases sequentially along the material flow direction. To better demagnetize and ensure the uniform application of each magnetic rod, avoiding material blockage caused by saturation or excessive adsorption of impurities on the upper rods, the upper rods can have weaker magnetism, while the lower rods progressively strengthen, thus achieving a better demagnetization effect. For example, in a preferred embodiment of the invention, four layers of magnetic rods are arranged sequentially, with the first layer having a surface magnetism of 9000~10000GS, the second layer 10000~11000GS, the third layer 11000~12000GS, and the fourth layer 12000~13000GS. Each layer of magnetic rods independently performs a cleaning action, achieving large-scale continuous online cleaning.
[0057] As a preferred embodiment, the automatic demagnetizer 200 is equipped with a vibrator. When each layer of magnetic rods performs the cleaning action, the vibrator vibrates to shake off the material accumulated on the surface of the magnetic rods or adsorbed by the magnetic rods. The material is then automatically cleaned by the scraper assembly. In addition, the vibration also helps to prevent powder from bridging and clogging in the equipment.
[0058] The homogenizing silo of this invention is an important device for achieving material homogenization and blending. As a preferred technical solution, the homogenizing silo of this invention adopts a gravity homogenizing silo, relying on gravity blending to homogenize the performance and stabilize the quality of the polyolefin powder product. That is, while the powder flows out under gravity, different layers of powder are automatically mixed and homogenized. The structural schematic diagram of the gravity homogenizing silo used in this invention is shown in Figures 4 and 5. A blending bottom cone 101 is provided at the bottom of the homogenizing silo 100. The blending bottom cone 101 can be detachably installed from the homogenizing silo 100. The blending bottom cone 101 includes a shell, with a central discharge pipe 1011 at the center of the shell cavity. A partition plate is provided outside the central discharge pipe 1011, dividing it into independent flow channels 1012. The lower part of the shell is a conical shell 1013, forming an external channel between the conical shell 1013 and the homogenizing silo. This special flow channel form helps to homogenize and blend the material evenly. Ideally suited to the physical properties of polyethylene powder, this design utilizes the full-flow nature of the material within the silo, relying on gravity flow to achieve uniform mixing and homogenization. The unique flow channel design of the mixing bottom cone structure separates the material flow channels within the silo bottom cone, forming multiple flow channels. Within each channel, material flows at different angles and heights at varying velocities into the discharge port at the bottom. Material at different heights within the silo enters the multiple channels of the mixing bottom cone through inlets at different heights and angles (see Figure 6) during discharge. A uniformly mixed product is obtained in the mixing chamber at the bottom, and then passes through an automatic demagnetizer 200 and external material circulation to achieve material homogenization and purification.
[0059] Existing homogenization silos for processing polyolefin powders (such as polyethylene powder) mostly use airflow homogenization schemes. However, after each discharge, there will be about 0.2-0.3% material residue, which needs to be cleaned. Large-scale grade adjustments require silo cleaning, and the cleaning cycle in confined spaces is long (requiring 2 days). In contrast, the present invention adopts the above-mentioned gravity mixing scheme. There will be no residue when mixing or switching grades between silos, which is conducive to achieving ultra-clean and high-purity materials and product consistency.
[0060] The above description of the embodiments is provided to enable those skilled in the art to understand and use the invention. It will be apparent to those skilled in the art that various modifications can be made to these embodiments, and the general principles described herein can be applied to other embodiments without inventive effort. Therefore, the present invention is not limited to the above embodiments, and any improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the invention should be within the protection scope of the present invention.
Claims
1. An ultra-high purity polymer purification homogenization processing apparatus, characterized by, This includes a purification, screening, and demagnetization unit and a downstream circulating homogenization and demagnetization unit; The purification, screening and demagnetization unit includes a purification silo (700), a vibrating screen (900), and an automatic demagnetizer (200) connected in sequence. The circulating homogenization and demagnetization unit includes a homogenization hopper (100), whose outlet is connected to an automatic demagnetizer (200). The outlet of the automatic demagnetizer (200) is provided with two branch pipes, including: The qualified material output branch is connected at its end to the finished product collection unit; and The circulation branch is connected to the homogenization silo (100) through the return pipeline, and is used to return substandard materials to the homogenization silo (100) for further homogenization and demagnetization.
2. The device for purification and homogenization of ultrahigh purity polymers according to claim 1, characterized in that, The top of the purification silo (700) is equipped with a dust collector (400), and its discharge pipeline is sequentially equipped with a rotary valve (300), an electrostatic monitoring and elimination mechanism (800) and a vibrating screen (900). The qualified discharge end of the vibrating screen (900) is connected to an automatic demagnetizer (200).
3. The device for purification and homogenization of ultrahigh purity polymers according to claim 2, characterized in that, A buffer hopper (600) is provided between the purification screening and demagnetization unit and the circulating homogenization and demagnetization unit, and a dust collector (400) is installed on the top of the buffer hopper (600).
4. The device for purification and homogenization of ultrahigh purity polymers according to claim 1, characterized in that, The top of the homogenization silo (100) is equipped with a dust collector (400), and its discharge pipeline is sequentially equipped with a rotary valve (300), an automatic demagnetizer (200) and a reversing valve (500). The first outlet of the reversing valve (500) is connected to the qualified material output branch, and the second outlet is connected to the circulation branch.
5. The device for purification and homogenization of ultrahigh purity polymers according to claim 1, characterized in that, The automatic demagnetizer (200) includes: The cavity (201) is divided into a demagnetization zone and a cleaning zone, and the bottom is provided with a clean material cavity (203) and a slag material cavity (204). A multi-layer movable drawer, each drawer including an outer panel (205), an inner panel and a magnetic rod (206) extending into a cavity (201), the magnetic rod (206) being disposed between the outer panel (205) and the inner panel; A drive unit is symmetrically arranged on both sides of the drawer's travel direction to drive the drawer to move; The scraper is fixedly installed on the inner wall of the cavity (201) of the demagnetizing zone.
6. The device for purification and homogenization of ultrahigh purity polymers according to claim 5, characterized in that, The automatic demagnetizer (200) adopts a vibration-type pneumatic scraper iron remover; The driving component includes a cylinder (202), and the telescopic rod of the cylinder (202) is connected to the outer panel (205); The automatic demagnetizer (200) has a vibrator installed inside its cavity (201), and the vibrator is fixedly installed on the side wall of the cavity (201) of the cleaning area.
7. The device for purification and homogenization of ultrahigh purity polymers according to claim 5, characterized in that, The magnetic rods (206) are arranged in layers with increasing magnetic intensity from top to bottom. Adjacent layers of magnetic rods (206) are staggered, and each layer of magnetic rods (206) is installed between the inner panel and the outer panel (205) by bearings.
8. The device for purification and homogenization of ultrahigh purity polymers according to claim 1, characterized in that, The number of the purification, screening, and demagnetization units is one or more connected in parallel; The discharge end of the purification silo (700) is provided with at least two discharge pipes equipped with vibrating screens (900) and automatic demagnetizers (200) in parallel; The number of circulating homogenization and demagnetization units is 2 to 10. The feed pipes of multiple homogenization silos (100) are connected in parallel to the upstream conveying system, and the discharge pipes are connected in parallel to the downstream conveying system.
9. The device for purification and homogenization of ultrahigh purity polymers according to claim 1, characterized in that, The homogenizing bin (100) is a gravity homogenizing bin, and a blending bottom cone (101) is arranged at the bottom. A center discharging pipe (1011) is vertically arranged in the center of the inner cavity of the blending bottom cone (101); A partition plate is radially distributed around the center discharging pipe (1011) to form a plurality of independent flow channels (1012); A conical shell (1013) is connected to the bottom of the homogenizing bin (100) and forms an outer channel between the outer wall of the homogenizing bin (100).
10. An ultra-high purity polymer purification homogenization process characterized by, The device comprises: The material is sequentially removed from residual solvent, residual single, VOCs through the purification screening and magnetic removal unit, and is screened and preliminarily removed from magnetism. The processed material enters the circulating homogenizing and magnetic removal unit, is circulated, homogenized and removed from magnetism until it is output after reaching the standard.