Robot

Abstract

This robot comprises an arm, an operation shaft part supported by the arm so as to be able to move along a first direction, and a first magnetic body provided around or inside the operation shaft part.

Description

Robot

[0001] The present disclosure relates to a robot.

[0002] Japanese Patent No. 7188777 discloses a machine tool provided with an electromagnetic interference (EMI) shield.

[0003] There is a long-felt demand for a robot capable of suppressing radiated noise.

[0004] A first aspect of the present disclosure is a robot comprising an arm, an operating shaft portion supported by the arm so as to be movable along a first direction, and a first magnetic body provided around or inside the operating shaft portion.

[0005] A second aspect of the present disclosure is a robot comprising an arm and an operating shaft portion supported by the arm so as to be movable along a first direction, wherein at least a part of the operating shaft portion is a magnetic body.

[0006] Figure 1 is a side view of a robot according to the first embodiment. Figure 2A is a partial cross-sectional view of the robot in Figure 1, and Figure 2B is a partial perspective view of the robot in Figure 1. Figure 3A is a partial cross-sectional view showing a first modified example of the first magnetic material, and Figure 3B is a partial perspective view showing the first modified example. Figure 4 is a partial cross-sectional view showing a second modified example of the first magnetic material. Figure 5A is a partial perspective view showing a third modified example of the first magnetic material, and Figure 5B is a partial cross-sectional view along the line VB-VB in Figure 5A. Figure 6A is a partial perspective view showing a fourth modified example of the first magnetic material, and Figure 6B is a partial cross-sectional view along the line VIB-VIB in Figure 6A. Figure 7A is a partial cross-sectional view showing a fifth modified example of the first magnetic material, and Figure 7B is a partial cross-sectional view showing a sixth modified example of the first magnetic material. Figure 8A is a partial cross-sectional view showing the seventh modified example of the first magnetic material, Figure 8B is a partial cross-sectional view showing the eighth modified example of the first magnetic material, and Figure 8C is a partial cross-sectional view showing the ninth modified example of the first magnetic material. Figure 9A is a partial perspective view showing the tenth modified example of the first magnetic material, and Figure 9B is a partial perspective view showing the eleventh modified example of the first magnetic material. Figure 10A is a partial perspective view showing the twelfth modified example of the first magnetic material, Figure 10B is a partial perspective view showing the thirteenth modified example of the first magnetic material, and Figure 10C is a partial perspective view showing the fourteenth modified example of the first magnetic material. Figure 11 is a side view of the robot according to the second embodiment. Figure 12A is a partial cross-sectional view of the robot in Figure 11, and Figure 12B is a partial cross-sectional view showing a modified example of the robot in Figure 11. Figure 13 is a side view of the robot according to the third embodiment. Figure 14 is a side view of the robot according to the fourth embodiment. Figure 15 is a partial cross-sectional view of the robot according to the fifth embodiment. Figure 16 is a partial cross-sectional view of the robot according to the sixth embodiment. Figure 17 is a partial cross-sectional view of the robot according to the seventh embodiment. Figure 18A is a partial cross-sectional view of the robot according to the eighth embodiment, and Figure 18B is a partial cross-sectional view showing a modified version of the robot in Figure 18A. Figure 19A is a partial cross-sectional view of the robot according to the ninth embodiment, and Figure 19B is a partial cross-sectional view showing a modified version of the robot in Figure 19A. Figure 20A is a partial perspective view of the robot according to the tenth embodiment, and Figure 20B is a partial perspective view showing a modified version of the robot in Figure 20A.Figure 21A is a partial cross-sectional view of a robot according to the 11th embodiment, and Figure 21B is a partial cross-sectional view showing a modified example of the robot in Figure 21A. Figure 22 is a side view of a robot according to the 12th embodiment. Figure 23A is a partial cross-sectional view of a robot according to the 13th embodiment, and Figure 23B is a partial cross-sectional view showing a modified example of the robot in Figure 23A. Figure 24A is a partial cross-sectional view of a robot according to the 14th embodiment, and Figure 24B is a partial cross-sectional view showing a modified example of the robot in Figure 24A. Figure 25 is a partial side view of a robot according to the 15th embodiment. Figure 26 is a side view of a robot according to the 16th embodiment.

[0007] Recently, there has been a growing need to suppress the emission of electromagnetic waves generated by electronic devices as radiated noise. Conventionally, this noise was suppressed by placing magnetic materials around the cables connected to the electronic devices. However, depending on the shape of the electronic device and the frequency and magnitude of the radiated noise, this suppression may be insufficient.

[0008] This disclosure may provide a robot that effectively suppresses radiated noise.

[0009] Figure 1 is a side view of robot 10 according to the first embodiment. Robot 10 is a horizontal articulated robot. Horizontal articulated robots are also called SCARA robots. Robot 10 is an industrial robot. Robot 10 performs a desired task by moving its arm in the horizontal direction. In the first embodiment, robot 10 is not limited to a horizontal articulated robot. Also, in the first embodiment, robot 10 is not limited to an industrial robot.

[0010] The robot 10 comprises a base 12, a first arm 14, a second arm (arm) 16, and a linear motion mechanism 18. The base 12 is installed on a floor surface (not shown). The base end of the first arm 14 is supported at the upper end of the base 12. The first arm 14 extends horizontally from the upper end of the base 12. The first arm 14 is rotatable relative to the base 12 about a first axis 20 extending in the vertical direction (first direction). The base end of the second arm 16 is supported at the tip of the first arm 14. The second arm 16 extends horizontally from the tip of the first arm 14. The second arm 16 is rotatable relative to the first arm 14 about a second axis 22 extending in the vertical direction. At least a portion of the first arm 14 and at least a portion of the second arm 16 are made of a metallic material.

[0011] The linear motion mechanism 18 is provided on the second arm 16. The linear motion mechanism 18 includes a shaft (operating shaft portion) 24, a ball screw nut 26, and a ball spline nut 28.

[0012] The shaft 24 is a metal rod-shaped member. The shaft 24 is a hollow shaft, but is not limited to this. The shaft 24 may be a solid shaft or a shaft that is partially hollow. The shaft 24 is supported on the second arm 16 so as to be movable along the vertical direction.

[0013] More specifically, the shaft 24 is supported by the second arm 16 along a third axis 30 that extends in the vertical direction. The shaft 24 penetrates the second arm 16 in the vertical direction. That is, the shaft 24 extends upward through the upper surface 16u of the surface 16s of the second arm 16, and also extends downward through the bottom surface 16b of the same surface 16s.

[0014] The lower end (one end) 24a of the shaft 24 is located below the bottom surface 16b of the second arm 16. A mounting portion 31 is provided on the lower end 24a of the shaft 24. The mounting portion 31 is detachable from the lower end 24a of the shaft 24. A tool 32, such as a hand, is attached to the mounting portion 31. The tool 32 is detachable from the mounting portion 31. The upper end 24b (the other end) of the shaft 24 is located above the upper surface 16u of the second arm 16.

[0015] The shaft 24 is a ball screw spline shaft 34. The ball screw nut 26 and the ball spline nut 28 are provided on the second arm 16. The ball screw nut 26 moves the ball screw spline shaft 34 (shaft 24) along the third axis 30 by converting rotational force from a rotational drive source (not shown) into linear motion. The ball spline nut 28 rotates the ball screw spline shaft 34 (shaft 24) around the third axis 30 by transmitting rotational force from another rotational drive source (not shown) to the ball screw spline shaft 34.

[0016] In the first embodiment, the shaft 24 is not limited to a ball screw spline shaft 34. The shaft 24 may be a metal rod-shaped member that is movable along the third axis 30. Alternatively, the shaft 24 may be a metal rod-shaped member that is rotatable about the third axis 30.

[0017] The robot 10 is electrically connected to an external device 36 via a cable 35. The external device 36 is a control device 38 that controls the robot 10. The cable 35 is a power cable that supplies power to the robot 10. Alternatively, the cable 35 is a communication cable that transmits signals from the control device 38 to the robot 10 and from the robot 10 to the control device 38. Alternatively, the cable 35 may have both power and communication functions. The cable 35 is routed into the base 12. In addition, at least a portion of the first arm 14, at least a portion of the second arm 16, and the shaft 24 are grounded.

[0018] A first magnetic material 40 is provided around the shaft 24. As shown in Figures 2A and 2B, the first magnetic material 40 extends in a columnar shape along the axial direction of the shaft 24 (the extension direction of the third axis 30). The first magnetic material 40 has a hollow portion 41 that penetrates the first magnetic material 40 along the axial direction of the shaft 24.

[0019] Specifically, the first magnetic material 40 has a hollow, columnar shape. The first magnetic material 40 surrounds the shaft 24 in the circumferential direction without providing an air gap. In other words, the first magnetic material 40 surrounds the shaft 24 in the circumferential direction without partially missing the first magnetic material 40.

[0020] As shown in Figure 2A, the first magnetic material 40 has a rectangular cross-section in the portion between its inner surface 40i and outer surface 40o. In other words, the portion of the first magnetic material 40 between its inner surface 40i and outer surface 40o is solid. The inner surface 40i and outer surface 40o of the first magnetic material 40 extend along the axial direction of the shaft 24.

[0021] The hollow portion 41 is the inner space (internal hole) of the first magnetic material 40. As described above, since the inner circumferential surface 40i of the first magnetic material 40 extends along the third axis 30, the hollow portion 41 extends along the third axis 30. The hollow portion 41 has a rectangular cross-section.

[0022] In the first embodiment, as shown in Figure 2B, the shape of the first magnetic body 40 is annular (cylindrical). More specifically, the first magnetic body 40 is formed in an annular shape. The shaft 24 is surrounded by the first magnetic body 40. That is, as shown in Figure 2A, the shaft 24 passes through the hollow portion 41 of the first magnetic body 40. The first magnetic body 40 is attached to the shaft 24 by fixing its inner circumferential surface 40i to the outer circumferential surface of the shaft 24. The first magnetic body 40 is attached to the lower end 24a and the upper end 24b of the shaft 24, respectively. In the first embodiment, the first magnetic body 40 is not limited to being attached to the lower end 24a and the upper end 24b of the shaft 24, respectively. The first magnetic body 40 may be attached to at least one of the lower end 24a and the upper end 24b of the shaft 24.

[0023] It is desirable that the first magnetic material 40 has a maximum value of 50 or more for the magnitude of the real or imaginary part of its complex relative permeability in an alternating magnetic field with a frequency of 1 MHz or higher.

[0024] When the diameter of the shaft 24 is d, and the thickness (thickness dimension) of the first magnetic material 40 in the radial direction perpendicular to the third axis 30 (the radial direction of the shaft 24) is T, it is desirable that 0.1 ≤ d / T ≤ 10. Note that the thickness T is the thickness dimension between the outer surface 40o and the inner surface 40i of the first magnetic material 40 in the radial direction of the third axis 30. In the example of Figure 2A, the thickness T is smaller than the diameter d (T < d).

[0025] As shown in Figure 1, a second magnetic material 42 is provided around the cable 35. Specifically, the second magnetic material 42 is formed in an annular shape. The cable 35 passes through the second magnetic material 42. The second magnetic material 42 is positioned, for example, near the external equipment 36 (control device 38) on the cable 35.

[0026] The first magnetic material 40 and the second magnetic material 42 are preferably magnetic cores. More preferably, the first magnetic material 40 and the second magnetic material 42 are ferrite cores. In the first embodiment, the first magnetic material 40 and the second magnetic material 42 are not limited to magnetic cores such as ferrite cores. The first magnetic material 40 and the second magnetic material 42 may be magnetic materials such as magnetic tape. Magnetic tape is obtained by coating or vapor-depositing powdered magnetic material onto the surface of a tape-shaped film. Alternatively, the first magnetic material 40 and the second magnetic material 42 may be magnetic materials made of magnetic materials such as ferrite, amorphous alloy, or nanocrystalline alloy.

[0027] The robot 10 operates based on control from the control device 38. Specifically, the robot 10 rotates the first arm 14 around the first axis 20. The robot 10 rotates the second arm 16 around the second axis 22. The robot 10 rotates the shaft 24 around the third axis 30. The robot 10 moves the shaft 24 up and down along the third axis 30. The robot 10 grasps a workpiece (not shown) with a tool 32 and transports the workpiece.

[0028] When robot 10 operates, electromagnetic waves are generated by robot 10. These electromagnetic waves include a high-frequency alternating magnetic field with a frequency of 1 MHz or higher. The generated electromagnetic waves may be radiated outside robot 10 as radiated noise. Radiated noise is electromagnetic noise caused by an alternating magnetic field with a frequency of 1 MHz or higher. Specifically, radiated noise may be radiated outside robot 10 from parts of robot 10 made of metal material. For example, radiated noise may be radiated outside robot 10 from a metal shaft 24.

[0029] As shown in Figure 2A, in the first embodiment, radiated noise can be effectively suppressed by providing a cylindrical first magnetic body 40 around the shaft 24. The first magnetic body 40 functions as an electromagnetic shield to suppress radiated noise (electromagnetic noise).

[0030] Specifically, when a high-frequency alternating magnetic field is generated, the magnetic flux from the alternating magnetic field penetrates into the first magnetic material 40. The first magnetic material 40 converts the energy of the magnetic flux that has penetrated it into thermal energy. By converting the energy of the magnetic flux into thermal energy, the energy of the radiated noise is reduced. As a result, the radiated noise can be reduced.

[0031] Furthermore, since the cylindrical first magnetic material 40 extends columnarly along the axial direction of the shaft 24, the first magnetic material 40 surrounds the shaft 24 in the circumferential direction without any partial absence of the first magnetic material 40. As a result, the first magnetic material 40 forms a closed magnetic circuit around the shaft 24. This allows the magnetic flux that has entered the first magnetic material 40 to leak out to the outside of the first magnetic material 40, and the energy of the magnetic flux can be effectively converted into thermal energy.

[0032] Furthermore, the maximum value of the real or imaginary part of the complex relative permeability of the first magnetic material 40 in the frequency range of 1 MHz or higher is 50 or more. By setting the maximum value of the real or imaginary part of the complex relative permeability of the first magnetic material 40 to 50 or more, magnetic flux from an AC magnetic field of high frequency of 1 MHz or higher can easily penetrate the first magnetic material 40. In other words, the magnetic flux can be more easily concentrated in the first magnetic material 40. As a result, the energy of radiated noise can be effectively reduced.

[0033] Furthermore, since the ratio d / T of the diameter d of the shaft 24 to the thickness T of the first magnetic material 40 is 0.1 or more and 10 or less, the shaft 24 to which the first magnetic material 40 is attached can be moved efficiently in the axial direction of the shaft 24 while reducing radiated noise. However, if the ratio d / T is less than 0.1, the weight of the first magnetic material 40 will be large relative to the weight of the shaft 24, and it may not be possible to efficiently improve the operating speed of the robot 10 (the operating speeds of the first arm 14, the second arm 16, and the shaft 24). Also, if the ratio d / T is greater than 10, the thickness T of the first magnetic material 40 is small, so it may not be possible to efficiently convert the energy of the magnetic flux that has entered the interior of the first magnetic material 40 into thermal energy.

[0034] Thus, in the first embodiment, radiated noise can be easily suppressed simply by attaching the first magnetic material 40 to the shaft 24. Moreover, by attaching the first magnetic material 40 to the lower end 24a and the upper end 24b of the shaft 24, radiated noise can be suppressed without hindering the rotation and movement of the shaft 24, which is a ball screw spline shaft 34.

[0035] Furthermore, as shown in Figure 1, in the first embodiment, a second magnetic material 42 is provided around the cable 35, so that electromagnetic noise generated in the cable 35 is suppressed from being radiated as radiated noise.

[0036] In the first embodiment, the shaft 24 is not limited to penetrating the second arm 16. The shaft 24 may protrude from the surface 16s of the second arm 16. Specifically, the shaft 24 may protrude downward from the bottom surface 16b of the second arm 16. Alternatively, the shaft 24 may protrude upward from the top surface 16u of the second arm 16. When the shaft 24 protrudes from the surface 16s of the second arm 16, the first magnetic material 40 is provided on the portion of the shaft 24 that protrudes from the second arm 16.

[0037] Next, we will describe modified versions of the first magnetic material 40 (the first to the fourteenth modified versions) with reference to Figures 3A to 10C.

[0038] As shown in Figures 3A and 3B, in the first modified example, the robot 10 (see Figure 1) further includes a buffer member 44 provided between the first magnetic body 43a and the shaft 24.

[0039] Specifically, the first magnetic material 43a has the same configuration as the first magnetic material 40 (see Figures 2A and 2B). The inner hole of the first magnetic material 43a is a hollow portion 45a. The shaft 24 passes through the hollow portion 45a. The wall thickness Ta of the first magnetic material 43a is the thickness dimension between the inner circumferential surface 43ai and the outer circumferential surface 43ao in the radial direction of the shaft 24. The wall thickness Ta of the first magnetic material 43a is smaller than the diameter d of the shaft 24 (Ta < d).

[0040] The buffer member 44 is provided between the inner circumferential surface 43ai of the first magnetic material 43a and the outer circumferential surface of the shaft 24. The first magnetic material 43a is attached to the shaft 24 via the buffer member 44.

[0041] More specifically, the buffer member 44 is formed in an annular (cylindrical) shape so as to surround the outer circumferential surface of the shaft 24. The shape of the buffer member 44 is cylindrical. The buffer member 44 is provided in the hollow portion 45a. The buffer member 44 is fixed to the outer circumferential surface of the shaft 24. The buffer member 44 is provided over the entire inner circumferential surface 43ai of the first magnetic material 43a. By fixing the inner circumferential surface 43ai of the first magnetic material 43a to the buffer member 44, the first magnetic material 43a is attached to the shaft 24 via the buffer member 44.

[0042] Examples of the cushioning member 44 include rubber and urethane, but are not limited thereto. The cushioning member 44 suppresses the transmission of vibrations from the shaft 24 to the first magnetic body 43a. By providing the cushioning member 44, the first magnetic body 43a can be appropriately protected from vibrations and shocks during the transportation of the robot 10 or during the operation of the robot 10. In particular, if the first magnetic body 43a includes ceramics such as a ferrite core, the first magnetic body 43a can be effectively protected from vibrations and shocks by attaching the first magnetic body 43a to the shaft 24 via the cushioning member 44.

[0043] As shown in Figure 4, in the second modified example, the thickness Tb of the first magnetic material 43b is greater than the diameter d of the shaft 24 (Tb > d). Also, the thickness Tb of the first magnetic material 43b is greater than the thickness T of the first magnetic material 40 (see Figure 2A) and the thickness Ta of the first magnetic material 43a (see Figure 3A) (Tb > T, Tb > Ta). Note that the thickness Tb of the first magnetic material 43b is the thickness dimension between the inner circumferential surface 43bi and the outer circumferential surface 43bo in the radial direction of the shaft 24.

[0044] As shown in Figures 5A and 5B, in the third modified example, the shape of the first magnetic material 43c is a hollow frustoconical shape. The longitudinal cross-section between the inner surface 43ci and the outer surface 43co of the first magnetic material 43c is trapezoidal. The portion of the first magnetic material 43c between the inner surface 43ci and the outer surface 43co is solid.

[0045] The first magnetic body 43c is tapered to reduce in diameter downward. The wall thickness of the upper end of the first magnetic body 43c in the radial direction of the shaft 24 is larger than the wall thickness of the lower end. In the third modified example, the wall thickness Tc of the first magnetic body 43c is defined, for example, as the thickness dimension between the inner circumferential surface 43ci and the outer circumferential surface 43co at the axially intermediate position of the first magnetic body 43c, but is not limited thereto. The wall thickness Tc may be the thickness dimension at the upper end or the lower end of the first magnetic body 43c.

[0046] As shown in FIG. 6A and FIG. 6B, also in the fourth modified example, the shape of the first magnetic body 43d is a hollow truncated cone, similarly to the first magnetic body 43c of the third modified example (see FIG. 5A and FIG. 5B). However, in the fifth modified example, the first magnetic body 43d is tapered to reduce in diameter upward. The wall thickness of the upper end of the first magnetic body 43d in the radial direction of the shaft 24 is smaller than the wall thickness of the lower end. In the fourth modified example, the wall thickness Td of the first magnetic body 43d is defined, for example, as the thickness dimension between the inner circumferential surface 43di and the outer circumferential surface 43do at the axially intermediate position of the first magnetic body 43d, but is not limited thereto. The wall thickness Td may be the thickness dimension at the upper end or the lower end of the first magnetic body 43d.

[0047] As shown in FIG. 7A, in the fifth modified example, the outer circumferential surface 43eo of the first magnetic body 43e changes in a wavy shape in the axial direction of the shaft 24. Therefore, the wall thickness of the first magnetic body 43e in the radial direction of the shaft 24 varies in the axial direction of the shaft 24. In the fifth modified example, the wall thickness Te of the first magnetic body 43e is defined, for example, as the average value of the thickness dimensions between the inner circumferential surface 43ei and the outer circumferential surface 43eo at each position along the axial direction of the first magnetic body 40, but is not limited thereto. The wall thickness Te of the first magnetic body 40 may be the maximum value or the minimum value of the thickness dimension of the first magnetic body 43e.

[0048] As shown in FIG. 7B, in the sixth modified example, the outer peripheral surface 43fo of the first magnetic body 43f changes in an arc shape in the axial direction of the shaft 24. Therefore, the longitudinal cross section between the inner peripheral surface 43fi and the outer peripheral surface 43fo of the first magnetic body 43f is fan-shaped. The portion between the inner peripheral surface 43fi and the outer peripheral surface 43fo of the first magnetic body 43f is solid. The thickness dimension between the inner peripheral surface 43fi and the outer peripheral surface 43fo in the radial direction of the shaft 24 decreases upward. In the sixth modified example, the wall thickness Tf of the first magnetic body 43f is defined, for example, as the average value of the thickness dimensions between the inner peripheral surface 43fi and the outer peripheral surface 43fo at each position along the axial direction of the first magnetic body 43f, but is not limited thereto. The wall thickness Tf of the first magnetic body 43f may be the maximum value of the thickness dimension of the first magnetic body 43f.

[0049] As shown in FIG. 8A, in the seventh modified example, the outer peripheral surface 43go of the first magnetic body 43g is formed in a stepped shape. Therefore, the longitudinal cross section between the inner peripheral surface 43gi and the outer peripheral surface 43go of the first magnetic body 43g is stepped. The portion between the inner peripheral surface 43gi and the outer peripheral surface 43go of the first magnetic body 43g is solid. The thickness dimension between the inner peripheral surface 43gi and the outer peripheral surface 43go in the radial direction of the shaft 24 changes stepwise in the axial direction of the shaft 24. In the seventh modified example, the wall thickness Tg of the first magnetic body 43g is defined, for example, as the minimum value of the thickness dimension between the inner peripheral surface 43gi and the outer peripheral surface 43go, but is not limited thereto. The wall thickness Tg of the first magnetic body 43g may be the maximum value or the average value of the thickness dimension of the first magnetic body 43g.

[0050] As shown in Figure 8B, in the eighth modified example, the outer circumferential surface 43ho of the first magnetic material 43h is formed to be curved radially inward in an arc shape. Therefore, the longitudinal cross-section between the inner circumferential surface 43hi and the outer circumferential surface 43ho of the first magnetic material 43h has a shape in which one side of a rectangle is curved inward in an arc shape. The portion of the first magnetic material 43h between the inner circumferential surface 43hi and the outer circumferential surface 43ho is solid. The thickness dimension between the inner circumferential surface 43hi and the outer circumferential surface 43ho in the radial direction of the shaft 24 varies in the axial direction of the shaft 24. In the eighth modified example, the thickness Th of the first magnetic material 43h is defined, for example, as the average value of the thickness dimension between the inner circumferential surface 43hi and the outer circumferential surface 43ho at each position along the axial direction of the first magnetic material 43h, but is not limited thereto. The thickness Th of the first magnetic material 43h may be the maximum or minimum value of the thickness dimension of the first magnetic material 43h.

[0051] As shown in Figure 8C, in the ninth modification, the shape of the first magnetic material 43i is torus-shaped with the third axis 30 as the axis of rotation. The longitudinal cross-section between the inner circumferential surface 43ii and the outer circumferential surface 43io of the first magnetic material 43i is circular. That is, the inner circumferential surface 43ii and the outer circumferential surface 43io are arc-shaped in cross-sectional view. The portion of the first magnetic material 43i between the inner circumferential surface 43ii and the outer circumferential surface 43io is solid. Therefore, the thickness dimension between the inner circumferential surface 43ii and the outer circumferential surface 43io in the radial direction of the shaft 24 changes in the axial direction of the shaft 24. In the ninth modification, the wall thickness Ti of the first magnetic material 43i is defined, for example, as the maximum value of the thickness dimension between the inner circumferential surface 43ii and the outer circumferential surface 43io at each position along the axial direction of the first magnetic material 43i, but is not limited thereto. The thickness Ti of the first magnetic material 43i may be the average value of the thickness dimension of the first magnetic material 43i.

[0052] The inner pore of the first magnetic material 43i is the hollow portion 45i. The shape of the vertical cross-section of the hollow portion 45i is a rectangle in which two opposite sides are curved inward in an arc shape.

[0053] A shaft 24 is inserted through the hollow portion 45i. The buffer member 44i is provided in the hollow portion 45i and surrounds the outer circumferential surface of the shaft 24. The outer circumferential portion of the buffer member 44i is curved radially inward in an arc shape, corresponding to the inner circumferential surface 43ii of the first magnetic material 43i. The first magnetic material 43i is attached to the shaft 24 via the buffer member 44i. By attaching the first magnetic material 43i to the shaft 24 via the buffer member 44i, the torus-shaped first magnetic material 43i is supported by the shaft 24 via the buffer member 44i, and the first magnetic material 43i can be effectively protected from vibration and shock.

[0054] As shown in Figure 9A, in the tenth modified example, the first magnetic body 43j is a hexagonal prism-shaped cylindrical member attached to the shaft 24 so as to surround the shaft 24. Specifically, the first magnetic body 43j is a hollow hexagonal prism. The first magnetic body 43j extends along the third axis 30. The upper and lower ends of the first magnetic body 43j are hexagonal in an axial view. The portion of the first magnetic body 43j between the inner circumferential surface 43ji and the outer circumferential surface 43jo is solid.

[0055] In the tenth modified example, the thickness Tj of the first magnetic material 43j in the radial direction of the shaft 24 is defined, for example, as the minimum thickness dimension between the inner circumferential surface 43ji and the outer circumferential surface 43jo of the first magnetic material 43j, but is not limited thereto. The thickness Tj of the first magnetic material 43j may be the maximum or average thickness dimension of the first magnetic material 43j. The minimum thickness dimension is the radial dimension between one side of the inner circumferential surface 43ji and the outer circumferential surface 43jo when viewed in the axial direction. The maximum thickness dimension is the radial dimension between the vertices of the inner circumferential surface 43ji and the outer circumferential surface 43jo when viewed in the axial direction.

[0056] As shown in Figure 9B, in the 11th modified example, the first magnetic material 43k is a rectangular tube attached to the shaft 24 so as to surround the shaft 24. Specifically, the first magnetic material 43k is a hollow rectangular prism. The first magnetic material 43k extends along the third axis 30. The portion of the first magnetic material 43k between the inner circumferential surface 43ki and the outer circumferential surface 43ko is solid.

[0057] In the 11th modified example, the thickness Tk of the first magnetic material 43k in the radial direction of the shaft 24 is defined, for example, as the minimum thickness dimension between the inner circumferential surface 43ki and the outer circumferential surface 43ko of the first magnetic material 43k, but is not limited thereto. The thickness Tk of the first magnetic material 43k may be the maximum or average thickness dimension of the first magnetic material 43k. The minimum thickness dimension is the radial dimension between one side of the inner circumferential surface 43ki and the outer circumferential surface 43ko when viewed in the axial direction. The maximum thickness dimension is the radial dimension between the vertices of the inner circumferential surface 43ki and the outer circumferential surface 43ko when viewed in the axial direction.

[0058] As shown in Figure 10A, in the twelfth modified example, the shaft 24c is a rectangular bar extending along the third axis 30c. The first magnetic material 43l is a rectangular tube attached to the shaft 24c so as to surround it. Specifically, the first magnetic material 43l is a hollow rectangular parallelepiped. The portion of the first magnetic material 43l between the inner circumferential surface 43li and the outer circumferential surface 43lo is solid.

[0059] In the 12th modified example, the thickness Tl of the first magnetic material 43l in the direction perpendicular to the third axis 30c is defined, for example, as the minimum thickness dimension between the inner circumferential surface 43li and the outer circumferential surface 43lo of the first magnetic material 43l, but is not limited thereto. The thickness Tl of the first magnetic material 43l may be the maximum or average thickness dimension of the first magnetic material 43l. The minimum thickness dimension is the thickness dimension between one side of the inner circumferential surface 43li and one side of the outer circumferential surface 43lo when viewed in the axial direction. The maximum thickness dimension is the thickness dimension between the vertex of the inner circumferential surface 43li and the vertex of the outer circumferential surface 43lo when viewed in the axial direction.

[0060] As shown in Figure 10B, in the 13th modified example, the shaft 24d is a triangular rod extending along the third axis 30d. The first magnetic body 43m is a triangular prism-shaped cylindrical member attached to the shaft 24d so as to surround it. Specifically, the first magnetic body 43m is a hollow triangular prism. The first magnetic body 43m extends along the third axis 30d. The upper and lower ends of the first magnetic body 43m are triangular in shape when viewed in the axial direction. The portion of the first magnetic body 43m between the inner circumferential surface 43mi and the outer circumferential surface 43mo is solid.

[0061] In the 13th modified example, the thickness Tm of the first magnetic material 43m in the direction perpendicular to the third axis 30d is defined, for example, as the minimum thickness dimension between the inner circumferential surface 43mi and the outer circumferential surface 43mo of the first magnetic material 43m, but is not limited thereto. The thickness Tm of the first magnetic material 43m may be the maximum or average thickness dimension of the first magnetic material 43m. The minimum thickness dimension is the thickness dimension between one side of the inner circumferential surface 43mi and one side of the outer circumferential surface 43mo when viewed in the axial direction. The maximum thickness dimension is the thickness dimension between the vertex of the inner circumferential surface 43mi and the vertex of the outer circumferential surface 43mo when viewed in the axial direction.

[0062] As shown in Figure 10C, in the 14th modified example, the first magnetic body 43n is a truncated square pyramidal cylindrical member attached to the shaft 24c so as to surround the shaft 24c. Specifically, the shape of the first magnetic body 43n is such that the apex of a square pyramid is cut off parallel to the base of the square pyramid. The first magnetic body 43n tapers in diameter upwards. Therefore, the longitudinal cross-section between the inner circumferential surface 43ni and the outer circumferential surface 43no of the first magnetic body 43n is trapezoidal. The portion of the first magnetic body 43n between the inner circumferential surface 43ni and the outer circumferential surface 43no is solid.

[0063] In the 14th modified example, the thickness Tn of the first magnetic material 43n in the direction perpendicular to the third axis 30c is defined, for example, as the minimum thickness dimension between the inner circumferential surface 43ni and the outer circumferential surface 43no of the first magnetic material 43n, but is not limited thereto. The thickness Tn of the first magnetic material 43n may be the maximum or average thickness dimension of the first magnetic material 43n. The minimum thickness dimension is the thickness dimension between one side of the inner circumferential surface 43ni and one side of the outer circumferential surface 43no at the upper end of the first magnetic material 43n, viewed in the axial direction. The maximum thickness dimension is the thickness dimension between the vertex of the inner circumferential surface 43ni and the vertex of the outer circumferential surface 43no at the lower end of the first magnetic material 43n, viewed in the axial direction.

[0064] In addition, in any of the first to fourteenth modifications, the above-mentioned effects of the first embodiment can be obtained as long as the ratio of the wall thickness T, Ta to Tn to the diameter d is within the range of 0.1 to 10. Furthermore, in the second to eighth and tenth to fourteenth modifications, a buffer member 44 may be provided between the first magnetic materials 43b to 43h, 43j to 43n and the shaft 24. By providing the buffer member 44, the first magnetic materials 43b to 43h, 43j to 43n can be protected from vibration and shock.

[0065] Figure 11 is a side view of the robot 10A according to the second embodiment. In the robot 10A according to the second embodiment, the same reference numerals are used for components that are the same as those in the robot 10 according to the first embodiment (see Figures 1 to 10C), and detailed explanations are omitted.

[0066] In the second embodiment, the first magnetic material 40a is attached to the surface 16s of the second arm 16. Specifically, as shown in Figure 12A, the first magnetic material 40a is attached to the surface 16s of the second arm 16 so as to surround the shaft 24. The first magnetic material 40a does not come into contact with the shaft 24 that passes through the hollow portion 41a. More specifically, the first magnetic material 40a is attached to the bottom surface 16b and the top surface 16u of the surface 16s of the second arm 16, respectively. The first magnetic material 40a is configured in the same way as the first magnetic material 40 (see Figures 2A and 2B). Therefore, in Figure 12A, for the sake of explanation, the thickness dimension of the first magnetic material 40a in the radial direction of the shaft 24 is shown as the wall thickness T.

[0067] In the second embodiment, radiated noise can be suppressed without hindering the rotation and movement of the shaft 24. In the second embodiment, the first magnetic material 40a may be attached to at least one of the bottom surface 16b and the top surface 16u.

[0068] Furthermore, in the second embodiment, as shown in Figure 12B, a buffer member 44a may be provided between the first magnetic body 40a and the surface 16s of the second arm 16. By providing the buffer member 44a, the transmission of vibrations from the second arm 16 to the first magnetic body 40a can be suppressed. As a result, the first magnetic body 40a can be adequately protected from vibration and shock.

[0069] In the second embodiment, the first magnetic material 40a may be replaced with the first magnetic materials 43a to 43n of the first to fourteenth modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above effects of the second embodiment can be obtained.

[0070] Figure 13 is a side view of robot 10B according to the third embodiment. In robot 10B according to the third embodiment, the same reference numerals are used for components that are the same as those in robots 10 and 10A according to the first and second embodiments (see Figures 1 to 12B), and detailed descriptions are omitted.

[0071] The robot 10B according to the third embodiment further includes a first magnetic body 40b provided inside the second arm 16. The first magnetic body 40b is provided inside the second arm 16 so as to surround the shaft 24. The first magnetic body 40b is supported inside the second arm 16 by a support member (not shown). The first magnetic body 40b does not come into contact with the shaft 24 that passes through the hollow portion 41b. The first magnetic body 40b is configured in the same way as the first magnetic body 40a. Therefore, in Figure 13, for the sake of explanation, the thickness dimension of the first magnetic body 40b in the radial direction of the shaft 24 is shown as the wall thickness T. In the third embodiment, the robot 10B may omit either the first magnetic body 40 or the first magnetic body 40a. In the third embodiment as well, radiated noise can be suppressed without hindering the rotation and movement of the shaft 24.

[0072] In the third embodiment, the first magnetic materials 40a and 40b may be replaced with the first magnetic materials 43a to 43n of the first to fourteenth modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above-mentioned effects of the third embodiment can be obtained.

[0073] Figure 14 is a side view of the robot 10C according to the fourth embodiment. In the robot 10C according to the fourth embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10B according to the first to third embodiments (see Figures 1 to 13), and detailed explanations are omitted.

[0074] In the fourth embodiment, a plurality of shafts 24 are supported on the second arm 16 at horizontal intervals. Each of the plurality of shafts 24 can move along the vertical direction by a ball screw nut 26.

[0075] In the fourth embodiment, a first magnetic material 40c is provided around each of the multiple shafts 24. The first magnetic material 40c is provided at the lower end 24a and the upper end 24b of the shaft 24.

[0076] In the fourth embodiment, additional first magnetic materials 40d are provided around the multiple shafts 24. The first magnetic materials 40d are provided between the bottom surface 16b of the second arm 16 and the lower end portions 24a of the multiple shafts 24.

[0077] Multiple shafts 24 penetrate the first magnetic material 40d in the vertical direction. In this case, the thickness of the first magnetic material 40d in the radial direction of the shafts 24 is defined, for example, by the thickness dimension between the inner circumferential surface of the hole through which the central shaft 24 passes and the outer circumferential surface of the first magnetic material 40.

[0078] Alternatively, the first magnetic material 40d may be formed in a ring shape so as to surround a plurality of shafts 24. In this case, the thickness of the first magnetic material 40d in the radial direction of the shaft 24 is defined, for example, by the thickness dimension between the inner and outer surfaces of the first magnetic material 40d.

[0079] Furthermore, in the fourth embodiment as well, the first magnetic material 40a is attached to the surface 16s of the second arm 16 so as to surround each of the multiple shafts 24. Specifically, the first magnetic material 40a is attached to the bottom surface 16b and the top surface 16u of the second arm 16 so as to surround the shafts 24.

[0080] In the fourth embodiment as well, the second arm 16 is equipped with a first magnetic material 40b inside each of the multiple shafts 24, so as to surround the shaft 24.

[0081] The fourth embodiment is not limited to the configuration shown in Figure 14. If there are multiple shafts 24, the first magnetic materials 40a, 40b, 40c, and 40d may be provided on at least one of the following: the lower end 24a of the shafts 24, the upper end 24b of the shafts 24, the upper surface 16u of the second arm 16, the bottom surface 16b of the second arm 16, and the interior of the second arm 16. In other words, the first magnetic materials 40a, 40b, 40c, and 40d may be attached anywhere on the shafts 24 and the second arm 16.

[0082] In the fourth embodiment, radiated noise can also be suppressed.

[0083] In the fourth embodiment, the first magnetic materials 40a, 40b, and 40c may be replaced with the first magnetic materials 43a to 43n of the first to fourteenth modified examples (see Figures 3A to 10C). Also, in the fourth embodiment, the shape of the first magnetic material 40d may be the same as the shape of the first magnetic materials 43a to 43n. In these cases as well, the above-mentioned effects of the fourth embodiment can be obtained.

[0084] Figure 15 is a partial cross-sectional view of robot 10D according to the fifth embodiment. In robot 10D according to the fifth embodiment, the same reference numerals are used for components that are the same as those in robots 10 to 10C according to the first to fourth embodiments (see Figures 1 to 14), and detailed explanations are omitted.

[0085] Figure 15 is a partial cross-sectional view of the tip end of the second arm 16 of the robot 10D. The robot 10D is equipped with a holding part 50 for holding the first magnetic body 40a. The first magnetic body 40a is held by the second arm 16 via the holding part 50.

[0086] Specifically, an opening 16c is formed in the lower wall portion that forms the bottom surface 16b of the second arm 16. The holding portion 50 is a bottomed cylindrical member. The holding portion 50 is made of a metal or resin material. The holding portion 50 extends along the vertical direction. The upper end of the holding portion 50 is fixed to the bottom surface 16b of the second arm 16 coaxially with the opening 16c. The first magnetic body 40a is arranged inside the holding portion 50. A through hole 50a is formed in the lower end (bottom) of the holding portion 50. The shaft 24 passes through the opening 16c, the first magnetic body 40a, and the through hole 50a of the holding portion 50. A small gap is formed between the outer circumferential surface of the shaft 24, the edge of the opening 16c, the inner circumferential surface of the first magnetic body 40a, and the edge of the through hole 50a.

[0087] The upper end of the holding portion 50 is fixed to the bottom surface 16b of the second arm 16 by a screw member (not shown). If the holding portion 50 and the bottom surface 16b side of the second arm 16 are made of metal material, the holding portion 50 may be fixed to the bottom surface 16b of the second arm 16 by magnetic force. By fixing the holding portion 50 to the second arm 16, a housing space 52 is formed inside the holding portion 50. The first magnetic body 40a is housed in the housing space 52, positioned away from the shaft 24.

[0088] In the housing space 52, a buffer member 54 is provided between the holding part 50 and the bottom surface 16b of the second arm 16 and the first magnetic material 40a. The buffer member 54 is made of rubber, urethane, or the like. The holding part 50 holds the first magnetic material 40a via the buffer member 54. Therefore, the first magnetic material 40a is held on the bottom surface 16b of the second arm 16 via the buffer member 54 and the holding part 50. By providing the buffer member 54, collisions between the first magnetic material 40a and the second arm 16 and the holding part 50 are avoided. In addition, by providing the buffer member 54, the transmission of vibrations from the second arm 16 to the first magnetic material 40a can be suppressed. As a result, the first magnetic material 40a can be appropriately protected from vibrations and shocks. Therefore, in the fifth embodiment, the performance of the first magnetic material 40a can be maintained while appropriately protecting the first magnetic material 40a.

[0089] The above description describes the case in which the first magnetic material 40a is held on the bottom surface 16b of the second arm 16, but is not limited to this. It is sufficient that the first magnetic material 40a is held on the surface 16s of the second arm 16 via the holding part 50 by fixing the holding part 50 to the surface 16s of the second arm 16 (see Figures 11 and 13). Therefore, it is also possible that the first magnetic material 40a is held on the upper surface 16u of the second arm 16 via the holding part 50 by fixing the holding part 50 to the upper surface 16u of the second arm 16. For this reason, the fifth embodiment is also applicable to the second embodiment (see Figure 11), the third embodiment (see Figure 13), and the fourth embodiment (see Figure 14).

[0090] Figure 16 is a partial cross-sectional view of robot 10E according to the sixth embodiment. In robot 10E according to the sixth embodiment, the same reference numerals are used for components that are the same as those in robots 10 to 10D according to the first to fifth embodiments (see Figures 1 to 15), and detailed explanations are omitted.

[0091] The robot 10E according to the sixth embodiment includes a holding portion 60 for holding the first magnetic body 40a. The first magnetic body 40a is held by the second arm 16 via the holding portion 60. Figure 16 shows the case in which the first magnetic body 40a is held on the bottom surface 16b of the second arm 16 via the holding portion 60.

[0092] The retaining portion 60 is a fixing means for fixing the first magnetic material 40a to the bottom surface 16b of the second arm 16. Specifically, the retaining portion 60 is a magnet, adhesive, double-sided tape, etc. If the retaining portion 60 is adhesive or double-sided tape, the retaining portion 60 can function as a buffer member 61 between the first magnetic material 40a and the bottom surface 16b of the second arm 16.

[0093] If the holding portion 60 is a magnet, the bottom surface 16b side of the second arm 16 must be a magnet or a magnetizable metal such as iron, cobalt, or nickel. Alternatively, the magnet or magnetizable metal may be fixed to the bottom surface 16b side of the second arm 16 by press-fitting or fastening. Alternatively, the entire second arm 16 may be made of a magnetizable metal such as iron. By configuring the second arm 16 in this way, the first magnetic material 40a is easily held to the bottom surface 16b of the second arm 16 via the holding portion 60.

[0094] Furthermore, if the holding portion 60 is a magnet, the first magnetic body 40a may also include the holding portion 60. In this case, the holding portion 60 is fixed to the first magnetic body 40a using a fixing member such as a cable tie. Alternatively, the holding portion 60 is incorporated inside the first magnetic body 40a, which is covered with a coating such as resin. Even when the first magnetic body 40a includes the holding portion 60, the first magnetic body 40a is easily held to the bottom surface 16b of the second arm 16 via the holding portion 60.

[0095] If the holding portion 60 is an adhesive or double-sided tape, the first magnetic material 40a is positioned away from the shaft 24 and fixed to the bottom surface 16b of the second arm 16 via the holding portion 60. Alternatively, the holding portion 60 may be a fixing member such as a string or cable tie. In this case, the first magnetic material 40a is directly fixed to the bottom surface 16b of the second arm 16 by the fixing member. If the holding portion 60 functions as a cushioning member 61, the cushioning member 61 suppresses the transmission of vibration from the second arm 16 to the first magnetic material 40a. This allows the first magnetic material 40a to be adequately protected from vibration and shock.

[0096] The above description describes the case in which the first magnetic material 40a is held on the bottom surface 16b of the second arm 16, but is not limited to this. It is sufficient that the first magnetic material 40a is held on the surface 16s of the second arm 16 (see Figures 11 and 13) by the holding part 60. Therefore, it is also possible for the first magnetic material 40a to be held on the upper surface 16u of the second arm 16 by the holding part 60. For this reason, the sixth embodiment is also applicable to the second embodiment (see Figure 11), the third embodiment (see Figure 13), and the fourth embodiment (see Figure 14).

[0097] Figure 17 is a partial cross-sectional view of robot 10F according to the seventh embodiment. In robot 10F according to the seventh embodiment, the same reference numerals are used for components that are the same as those in robots 10 to 10E according to the first to sixth embodiments (see Figures 1 to 16), and detailed explanations are omitted.

[0098] Figure 17 is a partial cross-sectional view of the robot 10F, specifically the lower end 24a side of the shaft 24. The robot 10F includes a holding portion 70 for holding the first magnetic body 40. The first magnetic body 40 is held at the lower end 24a of the shaft 24 via the holding portion 70.

[0099] Specifically, the robot 10F comprises a holding portion 70 and a mounting portion 72. The mounting portion 72 is an annular member. The mounting portion 72 is made of a metal or resin material. The lower end portion 24a of the shaft 24 passes through the mounting portion 72. The mounting portion 72 is fixed to the lower end portion 24a of the shaft 24 by a mounting member 74 such as a screw. The holding portion 70 is a bottomed cylindrical member. The holding portion 70 is made of a metal or resin material. The holding portion 70 extends along the vertical direction. The upper end portion of the holding portion 70 is fixed to the mounting portion 72. A through hole 70a is formed in the lower end portion (bottom portion) of the holding portion 70. The lower end portion 24a of the shaft 24 is inserted through the through hole 70a.

[0100] The holding portion 70 is fixed to the mounting portion 72, thereby forming a housing space 76 inside the holding portion 70. The first magnetic material 40 is housed in the housing space 76. The first magnetic material 40 is positioned away from the shaft 24.

[0101] In the housing space 76, a cushioning member 78 is provided between the holding portion 70 and the mounting portion 72 and the first magnetic material 40. The cushioning member 78 is made of rubber, urethane, or the like. The holding portion 70 holds the first magnetic material 40 via the cushioning member 78. Therefore, the first magnetic material 40 is held at the lower end 24a of the shaft 24 via the cushioning member 78, the holding portion 70, and the mounting portion 72. By providing the cushioning member 78, collisions between the first magnetic material 40 and the holding portion 70 and the mounting portion 72 are avoided. In addition, by providing the cushioning member 78, the transmission of vibrations from the shaft 24 to the first magnetic material 40 via the holding portion 70 or the mounting portion 72 can be suppressed. As a result, the first magnetic material 40 can be appropriately protected from vibration and shock. Therefore, in the seventh embodiment, the performance of the first magnetic material 40 can be maintained while appropriately protecting the first magnetic material 40.

[0102] The above description describes the case in which the first magnetic material 40 is held at the lower end portion 24a of the shaft 24, but is not limited to this. It is sufficient that the first magnetic material 40 is held on the shaft 24 via the holding portion 70 by providing the holding portion 70 and the mounting portion 72 on the shaft 24. Therefore, it is also possible for the first magnetic material 40 to be held at the upper end portion 24b of the shaft 24 (see Figures 1 and 13) by providing the holding portion 70 and the mounting portion 72 on the upper end portion 24b of the shaft 24. For this reason, the seventh embodiment is also applicable to the first embodiment (see Figure 1), the third embodiment (see Figure 13), and the fourth embodiment (see Figure 14).

[0103] Figures 18A and 18B are partial cross-sectional views of the robot 10G according to the eighth embodiment. In the robot 10G according to the eighth embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10F according to the first to seventh embodiments (see Figures 1 to 17), and detailed descriptions are omitted.

[0104] Figures 18A and 18B are partial cross-sectional views of the robot 10G, specifically the lower end 24a side of the shaft 24. The robot 10G includes a holding portion 80 for holding the first magnetic body 40. The first magnetic body 40 is held at the lower end 24a of the shaft 24 via the holding portion 80.

[0105] Specifically, the holding portion 80 is a cylindrical tubular member. The holding portion 80 is made of a metal or resin material. The holding portion 80 is attached coaxially to the lower end 24a of the shaft 24. In this case, the tool 32 (see Figure 1) is attached to the lower end of the holding portion 80.

[0106] In Figure 18A, the central portion in the vertical direction of the outer circumferential surface of the retaining portion 80 is recessed radially inward. The first magnetic material 40 is held in the radially recessed portion of the retaining portion 80. The first magnetic material 40 is held in the retaining portion 80 by insert molding, while housed in a mold (not shown), and integrated with the resin material that will become the retaining portion 80. Alternatively, the first magnetic material 40 may be held in the retaining portion 80 by shrink fitting. In the case of shrink fitting, the first magnetic material 40 is heated to expand radially, the metal retaining portion 80 is inserted into the hollow portion 41, and then the first magnetic material 40 is cooled to contract radially, thereby holding the first magnetic material 40 in the retaining portion 80.

[0107] In Figure 18B, the upper portion of the retaining part 80 bulges radially outward. The first magnetic material 40 is inserted from the lower end of the retaining part 80 and is in contact with the upper portion of the retaining part 80. Therefore, the upper end of the first magnetic material 40 is in contact with the upper portion of the retaining part 80. The lower end of the first magnetic material 40 is in contact with the retaining ring 82 attached to the retaining part 80. In Figure 18B, the first magnetic material 40 is held vertically by the upper portion of the retaining part 80 and the retaining ring 82.

[0108] In the eighth embodiment, as shown in Figures 18A and 18B, the first magnetic body 40 is held on the lower end 24a of the shaft 24 via the holding portion 80.

[0109] The above description describes the case in which the first magnetic material 40 is held at the lower end portion 24a of the shaft 24, but is not limited to this. It is sufficient that the first magnetic material 40 is held on the shaft 24 via the holding portion 80 by providing the holding portion 80 on the shaft 24. Therefore, it is also possible for the first magnetic material 40 to be held at the upper end portion 24b of the shaft 24 via the holding portion 80 by providing the holding portion 80 at the upper end portion 24b of the shaft 24 (see Figures 1 and 3B). For this reason, the eighth embodiment is also applicable to the first embodiment (see Figure 1), the third embodiment (see Figure 13), and the fourteenth embodiment (see Figure 14).

[0110] Furthermore, if the holding portion 80 is made of a resin material, the holding portion 80 can function as a buffer member 81 between the first magnetic body 40 and the shaft 24. As a result, the buffer member 81 suppresses the transmission of vibrations from the shaft 24 to the first magnetic body 40 via the holding portion 80. This makes it possible to properly protect the first magnetic body 40 from vibrations and shocks.

[0111] Figure 19A is a partial cross-sectional view of robot 10H according to the ninth embodiment. In robot 10H according to the ninth embodiment, the same reference numerals are used for components that are the same as those in robots 10 to 10G according to the first to eighth embodiments (see Figures 1 to 18B), and detailed descriptions are omitted.

[0112] Figure 19A is a partial cross-sectional view of the robot 10H, specifically the bottom surface 16b side of the second arm 16. The robot 10H includes a holding portion 90 for holding the first magnetic body 40b. The first magnetic body 40b is held inside the second arm 16 via the holding portion 90.

[0113] Specifically, the retaining portion 90 is a cylindrical recess formed on the bottom surface 16b side of the second arm 16. Figure 19A illustrates the case in which the retaining portion 90 is formed by bulging the bottom surface 16b side of the second arm 16 downward. The first magnetic material 40b is held in the retaining portion 90 by being press-fitted into the retaining portion 90. Alternatively, the first magnetic material 40b is held in the retaining portion 90 by being fitted into the retaining portion 90. Therefore, the first magnetic material 40b is held in the second arm 16 via the retaining portion 90.

[0114] As shown in Figure 19B, a buffer member 91 may be provided between the first magnetic body 40b and the second arm 16 (holding portion 90). This buffer member 91 suppresses the transmission of vibrations from the second arm 16 to the first magnetic body 40b via the holding portion 90. As a result, the first magnetic body 40b can be adequately protected from vibration and shock.

[0115] The above description describes the case in which the first magnetic material 40b is held on the bottom surface 16b side of the second arm 16, but is not limited to this. It is sufficient that the first magnetic material 40b is held inside the second arm 16 via the holding portion 90 by providing the holding portion 90 inside the second arm 16. The holding portion 90 may also be a fixing means such as an adhesive. In this case as well, the first magnetic material 40b is held inside the second arm 16 via the holding portion 90. Therefore, the ninth embodiment is also applicable to the third embodiment (see Figure 13) and the fourth embodiment (see Figure 14).

[0116] Figure 20A is a partial perspective view of the robot 10I according to the tenth embodiment. In the robot 10I according to the tenth embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10H according to the first to ninth embodiments (see Figures 1 to 19B), and detailed descriptions are omitted.

[0117] The robot 10I is equipped with a holding part 100 for holding the first magnetic body 40b. The first magnetic body 40b is held inside the second arm 16 via the holding part 100.

[0118] Specifically, the first magnetic material 40b is provided with a pair of flanges 100a. The flanges 100a are fixed to the inner wall of the second arm 16 by fixing members 100b such as screws. The flanges 100a and fixing members 100b constitute a holding portion 100. Figure 20A illustrates how the first magnetic material 40b is held inside the second arm 16 via the pair of holding portions 100.

[0119] In the tenth embodiment, a mounting member such as a sheet metal (not shown) may be attached to the inner wall of the second arm 16, and the first magnetic body 40b may be held by the mounting member via the holding portion 100.

[0120] Furthermore, in the tenth embodiment, the first magnetic body 40b only needs to be held inside the second arm 16 by at least one holding portion 100. For example, the first magnetic body 40b may be provided with one flange 100a, and the flange 100a may be fixed to the inner wall of the second arm 16 by one fixing member 100b.

[0121] Furthermore, although the axial direction of the shaft 24 and the axial direction of the fixing member 100b are different in Figure 20A, the invention is not limited to this. The fixing member 100b may fix the flange 100a to the inner wall of the second arm 16 along the axial direction of the shaft 24. In this case, the flange 100a protrudes from the first magnetic material 40b so as to contact the inner wall on the upper surface 16u (see Figure 13) side or the bottom surface 16b side of the second arm 16. The fixing member 100b fixes the flange 100a to the inner wall of the second arm 16 along the axial direction of the shaft 24.

[0122] Thus, in the tenth embodiment, the first magnetic material 40b only needs to be held inside the second arm 16 via some holding means such as the holding portion 100.

[0123] The tenth embodiment is also applicable to the third embodiment (see Figure 13) and the fourth embodiment (see Figure 14).

[0124] As shown in Figure 20B, a buffer member 101 may be provided between the first magnetic body 40b and the second arm 16. This buffer member 101 suppresses the transmission of vibrations from the second arm 16 to the first magnetic body 40b. As a result, the first magnetic body 40b can be adequately protected from vibration and shock.

[0125] Figure 21A is a partial cross-sectional view of robot 10J according to the 11th embodiment. In robot 10J according to the 11th embodiment, the same reference numerals are used for components that are the same as those of robots 10 to 10I according to the 1st to 10th embodiments (see Figures 1 to 20B), and detailed descriptions are omitted.

[0126] Figure 21A is a partial cross-sectional view of the lower end 24a of the shaft 24 of the robot 10J. The robot 10J has a first magnetic body 40e inside the shaft 24. The first magnetic body 40e is held inside the shaft 24 by a holding part such as an adhesive (not shown). Therefore, the shaft 24 does not pass through the hollow portion 41e of the first magnetic body 40e. Inside the shaft 24, there is a protective member 110 made of an anaerobic material. The protective member 110 is provided inside the shaft 24 between the opening on the lower end 24a side of the shaft 24 and the first magnetic body 40e so as to close the opening. The first magnetic body 40e is constructed in the same way as the first magnetic body 40 (see Figures 2A and 2B). Therefore, in Figure 21A, for the sake of explanation, the thickness dimension of the first magnetic body 40e in the radial direction of the shaft 24 is shown as the wall thickness T.

[0127] As shown in Figure 21B, a buffer member 111 may be provided between the first magnetic material 40e and the shaft 24. This buffer member 111 suppresses the transmission of vibrations from the shaft 24 to the first magnetic material 40e. As a result, the first magnetic material 40e can be adequately protected from vibration and shock.

[0128] Figure 22 is a side view of the robot 10K according to the 12th embodiment. In the robot 10K according to the 12th embodiment, the same reference numerals are used for components that are the same as those of the robots 10 to 10J according to the 1st to 11th embodiments (see Figures 1 to 21B), and detailed explanations are omitted.

[0129] The robot 10K is equipped with multiple fixing parts 122 and a bellows section 124.

[0130] Multiple fixing parts 122 are provided on the lower end 24a of the shaft 24, the upper end 24b of the shaft 24, the upper surface 16u of the second arm 16, and the bottom surface 16b of the second arm 16. Specifically, annular fixing parts 122 are fixed to the lower end 24a and the upper end 24b of the shaft 24, respectively. Annular fixing parts 122 are fixed to the upper surface 16u and the bottom surface 16b of the second arm 16, respectively, and the shaft 24 passes through these fixing parts 122 so as to be movable in the vertical direction.

[0131] The bellows section 124 covers the periphery of the portion of the shaft 24 that protrudes vertically from the second arm 16. Specifically, the periphery of the portion of the shaft 24 that protrudes upward from the second arm 16 and the periphery of the portion that protrudes downward are covered by the two bellows sections 124, respectively.

[0132] The upper bellows section 124 is fixed to a fixing part 122 fixed to the upper end 24b of the shaft 24 and to a fixing part 122 fixed to the upper surface 16u of the second arm 16. Between the two fixing parts 122, the upper bellows section 124 covers the periphery of the portion of the shaft 24 that protrudes upward from the second arm 16.

[0133] The lower bellows section 124 is fixed to a fixing part 122 that is fixed to the lower end 24a of the shaft 24 and to a fixing part 122 that is fixed to the bottom surface 16b of the second arm 16. Between the two fixing parts 122, the lower bellows section 124 covers the perimeter of the portion of the shaft 24 that protrudes downward from the second arm 16.

[0134] The bellows section 124 is expandable and contractible in the vertical direction when the shaft 24 moves vertically.

[0135] In the twelfth embodiment, the first magnetic material 40 is at least one of the plurality of fixed parts 122, or at least a part of each of the plurality of fixed parts 122. The bellows section 124 is non-magnetic, or at least a part of it is magnetic material 40f.

[0136] Specifically, for each of the multiple fixing parts 122, at least a portion of the fixing part 122 may be the first magnetic material 40, or the fixing part 122 itself may be the first magnetic material 40. Also, at least one of the multiple fixing parts 122 may be the first magnetic material 40.

[0137] Alternatively, a magnetic material 40f can be provided on the bellows section 124 by coating or vapor-depositing a powdered magnetic material onto its surface. The bellows section 124 itself may also be the magnetic material 40f.

[0138] Figure 22 shows a case where each of the multiple fixing parts 122 is the first magnetic material 40, and the multiple bellows sections 124 are magnetic materials 40f.

[0139] In the twelfth embodiment, the fixing portion 122 may be replaced with the first magnetic materials 43a to 43n of the first to fourteenth modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above-mentioned effects of the twelfth embodiment can be obtained.

[0140] Figure 23A is a partial cross-sectional view of the robot 10L according to the 13th embodiment. In the robot 10L according to the 13th embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10K according to the 1st to 12th embodiments (see Figures 1 to 22), and detailed explanations are omitted.

[0141] Figure 23A is a partial cross-sectional view of the robot 10L, specifically the lower end 24a side of the shaft 24. In the robot 10L, the first magnetic body 40g is attached to the mounting portion 31. More specifically, the first magnetic body 40g is attached to the outer circumferential surface of the mounting portion 31. The shaft 24 passes through the hollow portion 41g of the first magnetic body 40g. The first magnetic body 40g has the same configuration as the first magnetic body 40 (see Figures 2A and 2B). Therefore, in Figure 23A, for the sake of explanation, the thickness dimension of the first magnetic body 40g in the radial direction of the shaft 24 is shown as the wall thickness T.

[0142] In the 13th embodiment, the first magnetic material 40g can also suppress radiated noise. Furthermore, by providing the first magnetic material 40g on the mounting portion 31, it becomes possible to replace the first magnetic material 40g together with the mounting portion 31 as needed. In the 13th embodiment, as shown in Figure 23B, a buffer member 126 may be provided between the first magnetic material 40g and the mounting portion 31. By providing the buffer member 126, the transmission of vibrations from the shaft 24 to the first magnetic material 40g via the mounting portion 31 can be suppressed. As a result, the first magnetic material 40g can be appropriately protected from vibration and shock.

[0143] In the 13th embodiment, the first magnetic material 40g may be replaced with the first magnetic materials 43a to 43n of the first to 14th modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above-mentioned effects of the 13th embodiment can be obtained.

[0144] Figure 24A is a partial cross-sectional view of robot 10M according to the 14th embodiment. In robot 10M according to the 14th embodiment, the same reference numerals are used for components that are the same as those in robots 10 to 10L according to the 1st to 13th embodiments (see Figures 1 to 23B), and detailed descriptions are omitted.

[0145] Figure 24A is a partial cross-sectional view of the robot 10M, specifically the lower end 24a side of the shaft 24. In the robot 10M, the first magnetic body 40h is attached to the tool 32. More specifically, a flange 32a is formed at the base end of the tool 32, projecting radially along the third axis 30. The first magnetic body 40h is provided on the flange 32a so as to surround the mounting portion 31. The shaft 24 passes through the hollow portion 41h of the first magnetic body 40h. The first magnetic body 40h has the same configuration as the first magnetic body 40 (see Figures 2A and 2B). Therefore, for the sake of explanation, in Figure 24A, the thickness dimension of the first magnetic body 40h in the radial direction of the shaft 24 is shown as the wall thickness T.

[0146] In the 14th embodiment, the first magnetic material 40h can also suppress radiated noise. Furthermore, by providing the first magnetic material 40h on the tool 32, it becomes possible to replace the first magnetic material 40h together with the tool 32 as needed. In the 14th embodiment, as shown in Figure 24B, a buffer member 128 may be provided between the first magnetic material 40h and the tool 32. By providing the buffer member 128, the transmission of vibrations from the shaft 24 to the first magnetic material 40h via the mounting portion 31 and the tool 32 can be suppressed. As a result, the first magnetic material 40h can be appropriately protected from vibration and shock.

[0147] In the 14th embodiment, the first magnetic material 40h may be replaced with the first magnetic materials 43a to 43n of the first to 14th modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above-mentioned effects of the 14th embodiment can be obtained.

[0148] Figure 25 is a partial side view of the robot 10N according to the 15th embodiment. In the robot 10N according to the 15th embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10M according to the 1st to 14th embodiments (see Figures 1 to 24B), and detailed explanations are omitted.

[0149] In the 15th embodiment, the robot 10N further includes a restricting unit 129 that restricts the range of movement of the shaft 24 along the third axis 30. The first magnetic body 40j is provided on the restricting unit 129.

[0150] Specifically, the restricting portion 129 has a lower restricting portion 129a and an upper restricting portion 129b. The lower restricting portion 129a is attached to the portion of the shaft 24 below the bottom surface 16b. The lower restricting portion 129a is attached to the lower end portion 24a of the shaft 24. The upper restricting portion 129b is attached to the portion of the shaft 24 above the top surface 16u. The upper restricting portion 129b is attached to the upper end portion 24b of the shaft 24.

[0151] When the shaft 24 moves upward, the lower restricting portion 129a contacts the bottom surface 16b, preventing the shaft 24 from moving upward. Similarly, when the shaft 24 moves downward, the upper restricting portion 129b contacts the top surface 16u, preventing the shaft 24 from moving downward. Therefore, the shaft 24 can move vertically between the lower restricting portion 129a and the upper restricting portion 129b. Furthermore, the contact of the lower restricting portion 129a with the bottom surface 16b defines the upper limit position of the tool 32. The contact of the upper restricting portion 129b with the top surface 16u defines the lower limit position of the tool 32.

[0152] The first magnetic material 40j is provided in the lower restricting portion 129a and the upper restricting portion 129b, respectively. Specifically, the first magnetic material 40j is provided on the bottom surface of the lower restricting portion 129a, and the shaft 24 is inserted through the hollow portion 41j of the first magnetic material 40j. The first magnetic material 40j is provided on the upper surface of the upper restricting portion 129b, but the shaft 24 is not inserted through the hollow portion 41j of the first magnetic material 40j. Furthermore, buffer members 131 are provided between the lower restricting portion 129a and the first magnetic material 40j, and between the upper restricting portion 129b and the first magnetic material 40j, respectively. The first magnetic material 40j has the same configuration as the first magnetic material 40 (see Figures 2A and 2B). Therefore, in Figure 25, for the sake of explanation, the thickness dimension of the first magnetic material 40j in the radial direction of the shaft 24 is shown as the wall thickness T.

[0153] In the 15th embodiment, the first magnetic material 40j can also suppress radiated noise. Furthermore, by providing the first magnetic material 40j in the restricting section 129, it becomes possible to replace the first magnetic material 40j together with the restricting section 129 as needed. In addition, by providing the buffer member 131, the transmission of vibrations from the shaft 24 to the first magnetic material 40j via the restricting section 129 can be suppressed. As a result, the first magnetic material 40j can be appropriately protected from vibration and shock.

[0154] In the 15th embodiment, the first magnetic material 40j may be replaced with the first magnetic materials 43a to 43n of the first to 14th modified examples (see Figures 3A to 10C). Even when replaced with the first magnetic materials 43a to 43n, the above-mentioned effects of the 15th embodiment can be obtained.

[0155] Figure 26 is a side view of the robot 10O according to the 16th embodiment. In the robot 10O according to the 16th embodiment, the same reference numerals are used for components that are the same as those in the robots 10 to 10N according to the 1st to 15th embodiments (see Figures 1 to 25), and detailed explanations are omitted.

[0156] In the sixteenth embodiment, the shaft 24 is made of magnetic material 130. In the sixteenth embodiment, it is sufficient that at least a portion of the shaft 24 is made of magnetic material 130. Furthermore, it is desirable that the magnetic material 130 is made of the same material as the first magnetic material 40 and the second magnetic material 42 described above.

[0157] The following additional information is disclosed regarding the above embodiments.

[0158] (Note 1) The robots (10, 10A to 10N) of this disclosure include an arm (16), an operating shaft portion (24, 24c, 24d) supported by the arm so as to be movable along a first direction, and a first magnetic material (40, 40a to 40e, 40g, 40h, 40j, 43a to 43n) provided around or inside the operating shaft portion.

[0159] (Note 2) The robot described in Note 1, wherein the first magnetic material is formed in an annular shape so that the operating shaft portion can pass through it, the operating shaft portion extends along the first direction and is surrounded by the first magnetic material.

[0160] (Note 3) In the robot described in Note 2, the first magnetic material may be attached to the operating shaft portion.

[0161] (Note 4) In the robot described in Note 3, the first magnetic material may be provided at one end (24a) or the other end (24b) of the operating shaft.

[0162] (Note 5) In the robot described in Note 1 or 2, the first magnetic material may be provided on the surface (16s) of the arm.

[0163] (Note 6) In the robot described in Note 1 or 2, the first magnetic material may be provided inside the arm.

[0164] (Note 7) A robot according to any one of Notes 1 to 3, further comprising a bellows section (124) that covers the periphery of the operating shaft, wherein the first magnetic material may be provided in the bellows section.

[0165] (Note 8) The robot described in Note 7, wherein the bellows section is made of a non-magnetic material, or at least a part of it is made of a magnetic material (40f), and the first magnetic material may be connected to the bellows section.

[0166] (Note 9) A robot according to any one of Notes 1 to 3, further comprising a plurality of fixing parts (122) provided on one end or the other end of the operating shaft and the surface of the arm, and a bellows section fixed to the plurality of fixing parts and covering the periphery of the operating shaft between the plurality of fixing parts, wherein the first magnetic material may be provided on the fixing part or on the bellows section.

[0167] (Note 10) The robot described in Note 9, wherein the first magnetic material is at least one of the plurality of fixed parts, or at least a part of each of the plurality of fixed parts, and the bellows section is non-magnetic, or at least a part of it is magnetic.

[0168] (Note 11) A robot according to any one of Notes 1 to 10, wherein the operating shaft portion may penetrate the arm along the first direction.

[0169] (Note 12) The robot described in any one of Notes 1 to 11, wherein the operating shaft portion may be a ball screw spline shaft (34).

[0170] (Note 13) A robot as described in any one of Notes 1 to 12, wherein the robot is electrically connected to an external device (36) via a cable (35), and a second magnetic material (42) may be provided around the cable.

[0171] (Note 14) In the robot described in Note 13, the external device may be a control device (38) that controls the robot.

[0172] (Note 15) A robot according to any one of Notes 1 to 14, wherein a plurality of the operating shafts are supported by the arm at intervals in a direction intersecting the first direction, and the first magnetic material may be provided around each of the plurality of operating shafts, inside each of the plurality of operating shafts, around the plurality of operating shafts, on the surface of the arm, and inside the arm.

[0173] (Note 16) A robot according to any one of Notes 1 to 15 may further include holding parts (50, 60, 70, 80, 90, 100) for holding the first magnetic material.

[0174] (Note 17) In the robot described in Note 16, the first magnetic material may be held in the arm or the operating shaft via the holding portion.

[0175] (Note 18) A robot according to any one of Notes 1 to 17, wherein the first magnetic material may have a maximum value of 50 or more for the magnitude of the real or imaginary part of the complex relative permeability in an alternating magnetic field with a frequency of 1 MHz or higher.

[0176] (Note 19) In the case of a robot described in any one of Notes 1 to 18, where the diameter of the operating shaft is d and the thickness of the first magnetic material in the radial direction perpendicular to the axial direction of the operating shaft is T, 0.1 ≤ d / T ≤ 10 may also be applicable.

[0177] (Note 20) The robot described in Note 1 or 2 may further include cushioning members (44, 44a, 44i, 54, 61, 78, 81, 91, 101, 111, 126, 128, 131) provided between the first magnetic body and the operating shaft, or between the first magnetic body and the arm.

[0178] (Note 21) A robot according to any one of Notes 1, 2, 11 to 15, 18, or 19, further comprising a mounting portion (31) provided on the operating shaft, wherein a tool (32) can be attached to and detached from the mounting portion, and the first magnetic material may be attached to the mounting portion or the tool.

[0179] (Note 22) A robot according to any one of Notes 1, 2, 11 to 15, 18, or 19, further comprising a restricting portion (129) that restricts the range of movement of the operating shaft portion relative to the arm along the first direction, wherein the first magnetic body may be provided on the restricting portion.

[0180] (Note 23) The robot described in any one of Notes 1 to 22, wherein the first magnetic material may be a ferrite core.

[0181] (Note 24) A robot according to any one of Notes 1 to 23, wherein the first magnetic body extends in a columnar shape along the axial direction of the operating shaft, and the first magnetic body may have hollow portions (41, 41a, 41b, 41e, 41g, 41h, 41j, 45a, 45i) that penetrate the first magnetic body along the axial direction.

[0182] (Note 25) The robot (10O) of the present disclosure comprises an arm and an operating shaft supported by the arm so as to be movable along a first direction, wherein at least a portion of the operating shaft is a magnetic material (130).

[0183] (Note 26) In the robot described in Note 25, the magnetic material may have a maximum value of 50 or more for the magnitude of the real or imaginary part of the complex relative permeability in an alternating magnetic field with a frequency of 1 MHz or higher.

[0184] While this disclosure has been described in detail, it is not limited to the individual embodiments described above. These embodiments can be added, replaced, modified, partially deleted, etc., in any way that does not depart from the gist of this disclosure or from the intent of this disclosure derived from the claims and their equivalents. These embodiments can also be implemented in combination. For example, the order of operations and processes in the embodiments described above are given as examples only and are not limited thereto. The same applies when numerical values ​​or mathematical formulas are used in the description of the embodiments described above.

[0185] 10, 10A-10O...Robot 16...Arm 16s...Surface 24, 24c, 24d...Shaft (operating shaft) 24a...Lower end (one end) 24b...Upper end (other end) 31...Mounting part 32...Tool 34...Ball screw spline shaft 35...Cable 36...External equipment 38...Control device 40, 40a-40e, 40g, 40h, 40j, 43a-43n...First magnetic material 40f, 130...Magnetic material 41, 41a, 41b, 41e, 41g, 41h, 41j, 45a, 45i...Hollow part 42...Second magnetic material 44, 44a, 44i, 54, 61, 78, 81, 91, 101, 111, 126, 128, 131...Cushioning material 50, 60, 70, 80, 90, 100... Holding part 122... Fixing part 124... Bellows part 129... Regulating part d... Diameter T, Ta~Tn... Wall thickness

Claims

1. A robot comprising: an arm; an operating shaft supported by the arm so as to be movable along a first direction; and a first magnetic body provided around or inside the operating shaft.

2. A robot according to claim 1, wherein the first magnetic material is formed in an annular shape so that the operating shaft portion can pass through it, and the operating shaft portion extends along the first direction and is surrounded by the first magnetic material.

3. The robot according to claim 2, wherein the first magnetic material is attached to the operating shaft portion.

4. A robot according to claim 3, wherein the first magnetic body is provided at one end or the other end of the operating shaft portion.

5. A robot according to claim 1 or 2, wherein the first magnetic material is provided on the surface of the arm.

6. A robot according to claim 1 or 2, wherein the first magnetic body is provided inside the arm.

7. A robot according to any one of claims 1 to 3, further comprising a bellows section covering the periphery of the operating shaft, wherein the first magnetic body is provided in the bellows section.

8. A robot according to any one of claims 1 to 3, further comprising: a plurality of fixing parts provided on one end or the other end of the operating shaft and the surface of the arm; a bellows section fixed to the plurality of fixing parts and covering the periphery of the operating shaft between the plurality of fixing parts, wherein the first magnetic material is either one of the fixing parts or provided on the bellows section.

9. A robot according to any one of claims 1 to 8, wherein the operating shaft is a ball screw spline shaft.

10. A robot according to any one of claims 1 to 9, wherein the robot is electrically connected to an external device via a cable, and the external device is a control device for controlling the robot.

11. A robot according to any one of claims 1 to 10, wherein a plurality of the operating shafts are supported by the arm at intervals in a direction intersecting the first direction, and the first magnetic material is provided on at least one of the following: around each of the plurality of the operating shafts, inside each of the plurality of the operating shafts, around the plurality of the operating shafts, on the surface of the arm, and inside the arm.

12. A robot according to any one of claims 1 to 11, further comprising a holding part for holding the first magnetic material.

13. A robot according to claim 12, wherein the first magnetic material is held by the arm or the operating shaft via the holding portion.

14. A robot according to any one of claims 1 to 13, wherein the first magnetic material has a maximum value of 50 or more for the magnitude of the real or imaginary part of the complex relative permeability in an alternating magnetic field with a frequency of 1 MHz or higher.

15. A robot according to any one of claims 1 to 14, wherein the diameter of the operating shaft is d, and the thickness of the first magnetic material in the radial direction perpendicular to the axial direction of the operating shaft is T, such that 0.1 ≤ d / T ≤ 10.

16. A robot according to claim 1 or 2, further comprising a cushioning member provided between the first magnetic body and the operating shaft portion, or between the first magnetic body and the arm.

17. A robot according to any one of claims 1, 2, 9 to 11, 14, or 15, further comprising a mounting portion provided on the operating shaft portion, wherein a tool can be attached to and detached from the mounting portion, and the first magnetic body is attached to the mounting portion or the tool.

18. A robot according to any one of claims 1, 2, 9 to 11, 14, or 15, further comprising a restricting unit for restricting the range of movement of the operating shaft unit relative to the arm along the first direction, wherein the first magnetic body is provided on the restricting unit.

19. A robot according to any one of claims 1 to 18, wherein the first magnetic body extends in a columnar shape along the axial direction of the operating shaft, and the first magnetic body has a hollow portion that penetrates the first magnetic body along the axial direction.

20. A robot comprising an arm and an operating shaft portion supported by the arm so as to be movable along a first direction, wherein at least a portion of the operating shaft portion is a magnetic material.

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