Composite seal for semiconductor manufacturing device
WO241180SActive Publication Date: 2025-08-29VALQUA LTD
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Patent Information
- Application Number
- WO241180
- Authority / Receiving Office
- WO · WO
- Patent Type
- Designs
- Current Assignee / Owner
- Priority Date
- 2024-03-15
- Filing Date
- 2024-08-27
- Publication Date
- 2025-08-29
- Estimated Expiration
- 2049-08-27
Smart Images
Figure M001_001 
Figure M001_002 
Figure M001_003
Abstract
Fig. 1.1 is a perspective view of a composite seal for semiconductor manufacturing device; fig. 1.2 is a top view thereof; fig. 1.3 is a front view thereof; fig. 1.4 is back view thereof; fig. 1.5 is a right view thereof; fig. 1.6 is a cross-sectional view taken along line 1.6-1.6 of fig. 1.2 thereof; and fig. 1.7 is an enlarged view of portion 1.7 of fig. 1.6 thereof. The dashed-dot-dashed lines with a reference number in fig. 1.6 indicate an enlarged portion.
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